Metasurface structure and gas sensor

The metasurface structure addresses the challenge of detecting low concentrations of ozone and ammonia by inducing surface plasmon resonance with ultraviolet light, enhancing absorption and reflection to achieve precise gas concentration measurements.

JP2026087375APending Publication Date: 2026-05-27NAT UNIV CORP TOKYO UNIV OF AGRI & TECH +1
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Patent Information

Application Number
JP2024200045
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-11-15
Publication Date
2026-05-27

AI Technical Summary

Technical Problem

Existing ozone and ammonia gas concentration measurement techniques are unable to accurately detect low concentrations below 1 ppm due to their absorption wavelengths mismatching with the gases' absorption wavelengths, and electrochemical sensors face similar limitations.

Method used

A metasurface structure that induces surface plasmon resonance using ultraviolet light, with specific geometric parameters and configurations to enhance absorption and reflection of target gases like ozone and ammonia, allowing for high sensitivity detection.

Benefits of technology

Accurately detects low concentrations of ozone and ammonia at 1 ppm or less by enhancing absorption cross-sections through surface plasmon resonance, enabling precise measurement of these gases.

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Abstract

To provide a metasurface structure and gas sensor that can accurately detect targets at low concentrations of 1 ppm or less contained in gas. [Solution] Light in the ultraviolet region is irradiated onto the substrate 2 and the metal part 3 on the substrate 2, and only specific wavelengths are absorbed and reflected by surface plasmon resonance, and the gas to be detected is provided near the metal part 3. The aspect ratio of the gap between adjacent metal parts 3 along the x-axis on the substrate 2 is set to 55 / (300-10) or more and 100 or less. The aspect ratio qy of the gap between adjacent metal parts 3 along the y-axis on the substrate 2 is set to 55 / (800-163) or more and 100 / (300-296) or less. The filling factor of the metal part 3 along the x-axis on the substrate 2 is set to 10 / 300 or more and 0.99 or less. The filling factor of the metal part 3 along the y-axis on the substrate 2 is set to 163 / 800 or more and 296 / 300 or less.
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Citation Information

Patent Citations

  • Sensor device

    JP2009025091A

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    JP2022121045A

  • Meta surface structure and gas sensor

    JP2024065906A

  • Ozone concentration measuring device, ozone concentration measuring method, and ozone generation system

    JP7462859B1