Apparatus for forming coated film, method for forming coated film, and storage medium
The frustum-shaped coating roller addresses non-uniformity issues in coating films by reducing friction and optimizing liquid application, ensuring a uniform coating film on substrate edges.
JP2026089412APending Publication Date: 2026-06-01TOKYO ELECTRON LTD
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2024-11-20
- Publication Date
- 2026-06-01
Smart Images
Figure 2026089412000001_ABST
Abstract
A uniform coating film is formed on the peripheral edge of the substrate. [Solution] The coating film forming apparatus comprises a holding unit and a coating unit. The holding unit rotatably holds the substrate. The coating unit applies a coating liquid to the peripheral edge of the substrate held by the holding unit. The coating unit has a frustoconical shape and includes a coating roller that is pressed against the peripheral edge of the substrate with its first end facing radially outward from the substrate and its second end, which has a smaller diameter than the first end, facing radially inward from the substrate, and applies the coating liquid to the peripheral edge of the substrate while rotating.
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