Vacuum degreasing and cleaning equipment

Abstract

To provide a vacuum degreasing and cleaning apparatus that can reduce energy consumption. [Solution] The vacuum degreasing and cleaning apparatus 100 is a vacuum degreasing and cleaning apparatus that performs at least a shower cleaning step and an immersion cleaning step on a workpiece 14, and comprises a cleaning chamber 1 for storing the workpiece 14, a measuring unit 43 that measures information regarding the amount of heat exchanged between the cleaning liquid supplied to the workpiece 14 in the cleaning chamber 1 during the shower cleaning step and the workpiece 14 as heat exchange information, and a control device 44 that estimates the time for immersing the workpiece 14 in the cleaning liquid in the immersion cleaning step performed after the shower cleaning step, based on the heat exchange information.

Description

Technical Field

[0001] The present invention relates to a vacuum degreasing and cleaning apparatus that performs at least a shower cleaning process and an immersion cleaning process on a workpiece.

Background Art

[0002] For example, when cleaning a workpiece using a vacuum degreasing and cleaning apparatus as pre-cleaning or post-cleaning in a heat treatment process.

[0003] For example, in Patent Document 1, it is described that the dirt on the workpiece is cleaned and a surface treatment for increasing the surface hardness is performed after cleaning.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the cleaning of a workpiece, shower cleaning in which a cleaning liquid is sprayed onto the workpiece and immersion cleaning in which the workpiece is immersed in the cleaning liquid may be performed. In such a case, from the safety side, the time for immersion cleaning may be set long. If the time required for immersion cleaning is set longer than necessary, the energy consumption may increase.

[0006] In view of the above problems, an object of the present invention is to provide a vacuum degreasing and cleaning apparatus capable of suppressing the energy consumption.

Means for Solving the Problems

[0007] To solve the above problems, the vacuum degreasing and cleaning apparatus according to the present invention is a vacuum degreasing and cleaning apparatus that performs at least a shower cleaning step and an immersion cleaning step on a workpiece, comprising: a cleaning chamber for storing the workpiece; a measuring unit that measures information regarding the amount of heat exchanged between the cleaning liquid supplied to the workpiece in the cleaning chamber during the shower cleaning step and the workpiece as heat exchange information; and a control device that estimates the time for immersing the workpiece in the cleaning chamber with the cleaning liquid in the immersion cleaning step performed after the shower cleaning step, based on the heat exchange information.

[0008] Furthermore, the vacuum degreasing and cleaning apparatus further comprises a vacuum drying step, and the control device estimates the time to immerse the workpiece in the immersion cleaning step so that the workpiece is in a good drying state by executing the vacuum drying step after the immersion cleaning step.

[0009] Furthermore, in the vacuum degreasing and cleaning apparatus, the control device estimates the time to immerse the workpiece in the immersion cleaning process, based on the heat exchange information in the shower cleaning process, so that the workpiece reaches a predetermined temperature state through immersion.

[0010] Furthermore, in the vacuum degreasing and cleaning apparatus, the measuring unit measures the temperature of the cleaning solution before it is supplied to the workpiece in the cleaning chamber during the shower cleaning process, and the temperature of the cleaning solution after it has been supplied to the workpiece in the cleaning chamber during the shower cleaning process.

[0011] Furthermore, in the vacuum degreasing and cleaning apparatus, the control device estimates the time for immersing the workpieces in the cleaning solution in the cleaning chamber based on at least one of the workpiece mass, workpiece volume, workpiece surface area, and number of workpieces, and the heat exchange information. [Effects of the Invention]

[0012] According to the vacuum degreasing and cleaning apparatus of the present invention, energy consumption can be reduced. [Brief explanation of the drawing]

[0013] [Figure 1] This figure schematically shows an example of the overall configuration of a vacuum degreasing and cleaning apparatus according to an embodiment of the present invention. [Figure 2] Figure 1 shows an example of the configuration of various sensors and control devices installed in the vacuum degreasing and cleaning apparatus. [Figure 3] Figure 1 shows an example of the operation of the primary shower cleaning process in the vacuum degreasing and cleaning apparatus. [Figure 4] Figure 1 shows an example of the operation of the immersion cleaning process in the vacuum degreasing and cleaning apparatus. [Figure 5] Figure 1 shows an example of the operation of the secondary shower cleaning process in the vacuum degreasing and cleaning apparatus. [Figure 6] Figure 1 shows an example of the operation of the vacuum drying process in the vacuum degreasing and cleaning apparatus. [Figure 7] This figure shows an example of a specific configuration of the control device model in Figure 2. [Figure 8] This figure shows an example of the temperature change of the workpiece in each step of the vacuum degreasing and cleaning apparatus shown in Figure 1. [Figure 9] Figure 2 is a flowchart showing an example of the process for estimating the immersion time in the control device. [Modes for carrying out the invention]

[0014] Embodiments of the present invention will be described below with reference to the attached drawings. In order to facilitate understanding of the explanation, the same reference numerals are used for identical components in each drawing whenever possible, and redundant explanations are omitted as appropriate.

[0015] ===Implementation Method=== ≪Overall Structure≫ FIG. 1 is a diagram schematically showing an example of the overall configuration of a vacuum degreasing and cleaning apparatus 100 according to an embodiment of the present invention. FIG. 2 is a diagram showing an example of the configuration of various sensors and the like provided in the vacuum degreasing and cleaning apparatus 100 in FIG. 1. Note that, although FIG. 1 and FIG. 2 show an example of the configuration of the vacuum degreasing and cleaning apparatus 100, the specific configuration is not limited to FIG. 1 and FIG. 2.

[0016] Before and after heat treatment such as quenching, cleaning of the workpiece 14 is performed using the vacuum degreasing and cleaning apparatus 100.

[0017] As shown in FIG. 1, the vacuum degreasing and cleaning apparatus 100 is provided with a main body 10. The main body 10 has a cleaning chamber 1 for storing the workpiece 14 as an object, and a hollow cleaning liquid tank 4 that takes in the periphery of the cleaning chamber 1. The cleaning chamber 1 can carry in and out the workpiece 14 through an opening / closing door 2. For example, the cleaning chamber 1 can accommodate a plurality of workpieces 14. Inside the cleaning chamber 1, the workpiece 14 is placed on a mounting table (not shown). The vacuum degreasing and cleaning apparatus 100 can clean and dry the workpiece 14 in the cleaning chamber 1. That is, cleaning and drying are performed in the same chamber. The cleaning liquid tank 4 stores a cleaning liquid 17. The cleaning liquid 17 is, for example, cleaning oil. Further, the vacuum degreasing and cleaning apparatus 100 is provided with a regeneration tank 8, a distiller 9, a waste liquid tank 11, a heat exchanger 21, and a pump 15.

[0018] Above the cleaning chamber 1, a shower cleaning nozzle 5a and a shower cleaning nozzle 5b are arranged. Below the cleaning chamber 1, a bubbling nozzle 6 is arranged. Also, the lower part of the cleaning chamber 1 is connected to a cleaning liquid line AL1, and is connected to a sewage tank 11 via a cleaning liquid line AL4. The upper part of the cleaning liquid tank 4 is connected to a cleaning liquid line AL5 and is communicable with the shower cleaning nozzle 5a. The cleaning liquid line AL1 and the cleaning liquid line AL5 are connected by a cleaning liquid line AL2. The shower cleaning nozzle 5b is connected to a nitrogen gas line NL1 and nitrogen gas can be supplied. The upper part of the cleaning liquid tank 4 is connected to a nitrogen gas line NL2 and nitrogen gas can be supplied. The bubbling nozzle 6 is connected to a nitrogen gas line NL3 and nitrogen gas can be supplied. The regeneration tank 8 is connected to a nitrogen gas line NL4 and nitrogen gas can be supplied. The sewage tank 11 is connected to a nitrogen gas line NL5 and nitrogen gas can be supplied. The upper part of the cleaning liquid tank 4 is connected to a shower line SL1, and is connected to the lower part of the cleaning liquid tank 4 via a heat exchanger 21, a pump 15, and a shower line SL3. The shower line SL1 is connected to the shower cleaning nozzle 5b via a shower line SL2. The shower line SL3 is connected to the regeneration tank 8 via a cleaning liquid line AL6. The sewage tank 11 is connected to a distillation apparatus 9 via a distillation line JL1. The distillation line JL1 is connected to the upstream side (downstream side of the pump 15) of the heat exchanger 21 via a cleaning liquid line AL3. The distillation apparatus 9 is connected to the regeneration tank 8 via a distillation line JL3. The cleaning chamber 1 is connected to a vacuum pump 7 via a vacuum line VL1. The vacuum line VL1 is connected to the distillation apparatus 9 via a vacuum line VL2. The cleaning liquid tank 4 is connected to a vacuum line VL5. The vacuum line VL1 is connected to a vacuum line VL6.

[0019] The vacuum degreasing and cleaning apparatus 100 performs the following steps in order: an exhaust step, a primary shower cleaning step, an immersion cleaning step, a secondary shower cleaning step, and a vacuum drying step, to clean and dry the workpiece 14. In particular, the primary shower cleaning step, the immersion cleaning step, and the secondary shower cleaning step constitute a cleaning step (triple cleaning step). As will be described later, the cleaning step includes cleaning in a vacuum-evacuated state, and therefore constitutes a vacuum cleaning step (reduced pressure cleaning step). The vacuum degreasing and cleaning apparatus 100 performs at least a primary shower cleaning step and an immersion cleaning step on the workpiece 14.

[0020] The exhaust process involves vacuuming the cleaning chamber 1 using a vacuum pump 7 after the workpiece 14 has been brought into the cleaning chamber 1. In other words, the air (oxygen) inside the cleaning chamber 1 is removed. For example, valve V1 of vacuum line VL1 is opened, and exhaust is performed by the vacuum pump 7, reducing the pressure inside the cleaning chamber 1. Also, valve A1 of cleaning liquid line AL1 and valve A4 of cleaning liquid line AL4 are opened, reducing the pressure inside the contaminated liquid tank 11. When the cleaning chamber 1 and the contaminated liquid tank 11 reach a predetermined vacuum level, valves V1, A1, and A4 are closed. Furthermore, during the exhaust process, valve S3 of shower line SL3 and valve S1 of shower line SL1 are opened, and the cleaning liquid 17 in the cleaning liquid tank 4 is circulated via the heat exchanger 21.

[0021] The primary shower cleaning process is a shower cleaning process in which cleaning liquid 17 is sprayed onto the workpiece 14 for cleaning. Figure 3 shows an example of the operation of the primary shower cleaning process in the vacuum degreasing cleaning apparatus 100 of Figure 1. The valve N2 of the nitrogen gas line NL2 is opened, and nitrogen gas is introduced into the cleaning liquid tank 4. Also, the valve A5 of the cleaning liquid line AL5 is opened, and the cleaning liquid 17 moves from the cleaning liquid tank 4 to the cleaning chamber 1 via the cleaning liquid line AL5 due to the pressure difference between the cleaning liquid tank 4 and the cleaning chamber 1. At this time, the cleaning liquid 17 is sprayed from the shower cleaning nozzle 5a in the cleaning chamber 1 via the cleaning liquid line AL5. As a result, the workpiece 14 is shower cleaned by the cleaning liquid 17. For example, cleaning liquid 17 at a temperature higher than the temperature of the workpiece 14 is sprayed onto the workpiece 14. Also, the valve A1 of the cleaning liquid line AL1 and the valve A4 of the cleaning liquid line AL4 are opened, and the cleaning liquid 17 that has been sprayed onto the workpiece 14 for cleaning is sent to the dirty liquid tank 11. In this manner, after the cleaning solution 17 washes away the dirt from the workpiece 14, the cleaning solution 17 is discharged from the cleaning chamber 1. Furthermore, by opening the valve S3 of the shower line SL3 and the valve S1 of the shower line SL1, the cleaning solution 17 in the cleaning solution tank 4 is circulated via the heat exchanger 21.

[0022] The immersion cleaning process involves immersing the workpiece 14 in cleaning solution 17 for cleaning. The valve N2 of the nitrogen gas line NL2 is opened, and nitrogen gas is introduced into the cleaning solution tank 4. The valve V6 of the vacuum line VL6 is also opened, reducing the pressure in the cleaning chamber 1. Furthermore, the valve A5 of the cleaning solution line AL5 is opened, and the cleaning solution 17 moves from the cleaning solution tank 4 to the cleaning chamber 1 via the cleaning solution line AL5 due to the pressure difference between the cleaning solution tank 4 and the cleaning chamber 1. This delivers clean cleaning solution 17 into the reduced-pressure cleaning chamber 1. When the cleaning solution 17 in the cleaning chamber 1 reaches a predetermined level, valves N2, V6, and A5 are closed. This immerses the workpiece 14 in the cleaning solution 17. Figure 4 shows an example of the operation of the immersion cleaning process in the vacuum degreasing cleaning apparatus 100 shown in Figure 1. In particular, Figure 4 shows an example of the operation after the workpiece 14 is filled with cleaning solution 17 during the immersion cleaning process. The workpiece 14 is heated by being immersed in the cleaning solution 17. Then, valve N3 of the nitrogen gas line NL3 is opened, and nitrogen gas is injected from the bubbling nozzle 6. The cleaning solution 17 is agitated by the bubbles, and bubbling cleaning is performed as the workpiece 14 is immersed. In other words, dirt is removed from the workpiece 14 and the workpiece 14 is heated to a uniform temperature. Also, valve V6 of the vacuum line VL6 is opened, and the cleaning chamber 1 is depressurized. In this way, in the immersion cleaning process, the workpiece 14 is immersed in the cleaning solution 17 for a predetermined time. The time during which the workpiece 14 in the cleaning chamber 1 is immersed in the cleaning solution 17 in the immersion cleaning process is called the "immersion time". When the set immersion time has elapsed, valves N3 and V6 are closed.

[0023] During the immersion cleaning process, valve S3 of shower line SL3 and valve S1 of shower line SL1 are opened, and the cleaning solution 17 in the cleaning solution tank 4 is circulated via the heat exchanger 21. Also, valve N5 of nitrogen gas line NL5, valve J1 of distillation line JL1, and valve J3 of distillation line JL3 are opened, and nitrogen gas is introduced into the wastewater tank 11, moving the cleaning solution 17 from the wastewater tank 11 to the distiller 9. The cleaning solution 17 is then moved from the distiller 9 to the regeneration tank 8. Finally, valve V2 of vacuum line VL2 is opened, and exhaust is performed from the distiller 9.

[0024] In the immersion cleaning process, after the immersion time has elapsed, the cleaning solution 17 filling the cleaning chamber 1 is discharged into the cleaning solution tank 4 by opening valve A1 of cleaning solution line AL1 and valve A2 of cleaning solution line AL2. For example, by opening valve N1 of nitrogen gas line NL1 and valve N3 of nitrogen gas line NL3, nitrogen gas is introduced into the cleaning chamber 1, and at the same time, by opening valve V5 of vacuum line VL5, the pressure in the cleaning solution tank 4 is reduced. Then, due to the differential pressure, the cleaning solution 17 moves from the cleaning chamber 1 to the cleaning solution tank 4.

[0025] The secondary shower cleaning process involves spraying cleaning solution 17 onto the workpiece 14 for cleaning. Figure 5 shows an example of the operation of the secondary shower cleaning process in the vacuum degreasing cleaning apparatus 100 shown in Figure 1. The valve N4 of the nitrogen gas line NL4 is opened, and nitrogen gas is introduced into the regeneration tank 8. The valve V6 of the vacuum line VL6 is also opened, and the cleaning chamber 1 is depressurized. The valve A6 of the cleaning solution line AL6 and the valve S2 of the shower line SL2 are also opened, and the cleaning solution 17 in the regeneration tank 8 is sprayed from the shower cleaning nozzle 5b in the depressurized cleaning chamber 1. The valve S1 of the shower line SL1 and the valve S3 of the shower line SL3 are closed. As a result, the cleaning solution 17 in the regeneration tank 8 is heated by the heat exchanger 21 and sprayed onto the workpiece 14. The valve V2 of the vacuum line VL2 is also opened, and exhaust is performed from the distiller 9. After the cleaning solution 17 washes away the dirt from the workpiece 14, the cleaning solution 17 in the cleaning chamber 1 is discharged into the cleaning solution tank 4 by opening valve A1 of the cleaning solution line AL1 and valve A2 of the cleaning solution line AL2. For example, valve N1 of the nitrogen gas line NL1 and valve N3 of the nitrogen gas line NL3 are opened, and nitrogen gas is introduced into the cleaning chamber 1. Also, valve V5 of the vacuum line VL5 is opened, and the pressure in the cleaning solution tank 4 is reduced. Then, the cleaning solution 17 moves from the cleaning chamber 1 to the cleaning solution tank 4 due to the differential pressure.

[0026] The vacuum drying process dries the workpiece 14 by creating a vacuum in the cleaning chamber 1. Figure 6 shows an example of the operation of the vacuum drying process in the vacuum degreasing cleaning apparatus 100 shown in Figure 1. The valve V1 of the vacuum line VL1 is opened, and the pressure inside the cleaning chamber 1 is reduced. As a result, the cleaning chamber 1 is evacuated to a predetermined vacuum level. In addition, the valve S3 of the shower line SL3 and the valve S1 of the shower line SL1 are opened, and the cleaning liquid 17 in the cleaning liquid tank 4 is circulated via the heat exchanger 21. After the cleaning chamber 1 has reached a predetermined vacuum level and a predetermined time has elapsed, the valve V1 is closed. That is, the cleaning chamber 1 is maintained at a high vacuum level for a predetermined time. As a result, vacuum drying is performed on the workpiece 14 to which the cleaning liquid 17 has adhered and inside the cleaning chamber 1. Furthermore, after the cleaning chamber 1 reaches a predetermined vacuum level, valve A3 of the cleaning liquid line AL3 and valve J3 of the distillation line JL3 are opened, and the cleaning liquid 17 is moved from the upstream side of the heat exchanger 21 (downstream side of the pump 15) to the distiller 9. The cleaning liquid 17 is then moved from the distiller 9 to the regeneration tank 8. Finally, valve V2 of the vacuum line VL2 is opened, and exhaust is performed from the distiller 9.

[0027] Once the vacuum drying process is complete, the cleaning chamber 1 is repressurized and evacuated, after which the vacuum-dried workpiece 14 is removed from the cleaning chamber 1.

[0028] The above-mentioned exhaust process, primary shower cleaning process, immersion cleaning process, secondary shower cleaning process, and vacuum drying process constitute one cycle, and this cycle is repeatedly executed.

[0029] Furthermore, as shown in Figure 2, the vacuum degreasing and cleaning apparatus 100 includes a load cell 41, a camera 42, a measuring unit 43, and a control device 44.

[0030] The load cell 41 is a device that measures the mass W of the workpiece 14 before it is brought into the washing chamber 1. The mass W of the workpiece 14 to be measured may be the mass corresponding to a single workpiece 14, or the total mass corresponding to multiple workpieces 14. The measurement result of the mass W by the load cell 41 is output to the control device 44.

[0031] Camera 42 is a device that photographs the workpiece 14 before it is brought into the washing chamber 1. The image of the workpiece 14 that is photographed is output to the control device 44. As will be described later, the image of the workpiece 14 that is photographed shows the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of the workpiece 14.

[0032] The measuring unit 43 measures information regarding the amount of heat exchange between the cleaning liquid 17 supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process and the workpiece 14 as heat exchange information. In other words, the heat exchange information is information regarding the temperature state of the workpiece 14 due to the primary shower cleaning process. For example, the heat exchange information is information indicating the amount of temperature rise (or fall) of the workpiece 14 during the primary shower cleaning process. In this embodiment, since the cleaning liquid 17 in the cleaning liquid tank 4 is at a constant temperature during the primary shower cleaning process, the heat exchange information accurately indicates information regarding the amount of heat exchange between the cleaning liquid 17 and the workpiece 14.

[0033] Therefore, the measuring unit 43 has a first temperature sensor 47 and a second temperature sensor 48.

[0034] The first temperature sensor 47 is a sensor that measures the temperature of the cleaning liquid 17 before it is supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process. In this embodiment, the temperature of the cleaning liquid 17 before it is supplied to the workpiece 14 in the cleaning chamber 1 is referred to as the "first temperature T1". Specifically, the first temperature sensor 47 is provided upstream of the inlet of the cleaning chamber 1 in the flow path of the cleaning liquid 17. In this embodiment, the first temperature sensor 47 is provided in the cleaning liquid line AL5 connected to the shower cleaning nozzle 5a in the cleaning chamber 1. That is, the first temperature T1 can also be said to be the temperature of the cleaning liquid 17 before it comes into contact with the workpiece 14 during the primary shower cleaning process. In this way, the first temperature sensor 47 measures the first temperature T1, which is the temperature of the cleaning liquid 17 before it is sprayed onto the workpiece 14 during the primary shower cleaning process.

[0035] The second temperature sensor 48 is a sensor that measures the temperature of the cleaning liquid 17 after it has been supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process. In this embodiment, the temperature of the cleaning liquid 17 after it has been supplied to the workpiece 14 in the cleaning chamber 1 is referred to as the "second temperature T2". Specifically, the second temperature sensor 48 is provided downstream of the outlet of the cleaning chamber 1 in the flow path of the cleaning liquid 17. In this embodiment, the second temperature sensor 48 is provided in the cleaning liquid line AL1. That is, the second temperature T2 can also be said to be the temperature of the cleaning liquid 17 after it has come into contact with the workpiece 14 during the primary shower cleaning process. In particular, in the vacuum degreasing cleaning apparatus 100, cleaning liquid tanks 4 are provided around the cleaning chamber 1, and the walls of the cleaning chamber 1 are heated by the cleaning liquid 17 in the cleaning liquid tanks 4. Therefore, changes in the temperature of the cleaning liquid 17 due to contact with components other than the workpiece 14 in the cleaning chamber 1 are suppressed, and the second temperature T2 is measured by the second temperature sensor 48. In this way, the second temperature sensor 48 measures the second temperature T2, which is the temperature of the cleaning solution 17 after it has been sprayed onto the workpiece 14 in the primary shower cleaning process.

[0036] In this way, the first temperature T1 of the cleaning solution 17 is measured by the first temperature sensor 47, and the second temperature T2 of the cleaning solution 17 is measured by the second temperature sensor 48. The first temperature T1 and the second temperature T2 are then output to the control device 44 as heat exchange information. For example, in the primary shower cleaning process, when heat is transferred from the cleaning solution 17 to the workpiece 14, the second temperature T2 will be lower than the first temperature T1.

[0037] The above example shows one example of the installation positions of the first temperature sensor 47 and the second temperature sensor 48. The specific installation positions of the first temperature sensor 47 and the second temperature sensor 48 are not limited as long as it is possible to measure the temperature of the cleaning solution 17 before it is supplied to the workpiece 14 in the cleaning chamber 1 and the temperature of the cleaning solution 17 after it has been supplied to the workpiece 14 in the cleaning chamber 1.

[0038] The control device 44 is an information processing device (computer) that controls the operation of the vacuum degreasing and cleaning apparatus 100. Specifically, the control device 44 estimates the immersion time in the immersion cleaning process that follows the primary shower cleaning process of the vacuum degreasing and cleaning apparatus 100 based on the information obtained in the primary shower cleaning process. In this embodiment, the control device 44 uses AI to estimate the immersion time. However, estimation is not limited to the use of AI, and various methods such as program control can be applied. For example, the control device 44 is composed of a CPU, memory, communication interface, storage device, operating device, and display device.

[0039] ≪Functional configuration≫ Figure 2 further illustrates an example of the various functions of the control device 44. As shown in Figure 2, the control device 44 mainly comprises an motion control unit 51, an acquisition unit 52, an image analysis unit 53, an estimation unit 54, a notification unit 55, and a learning unit 56.

[0040] The operation control unit 51 controls the operation of each part of the vacuum degreasing and cleaning apparatus 100. Specifically, the operation control unit 51 cleans and dries the workpiece 14 by controlling the operation of various processes performed in the vacuum degreasing and cleaning apparatus 100.

[0041] The acquisition unit 52 acquires heat exchange information. Specifically, the acquisition unit 52 acquires the first temperature T1 measured by the first temperature sensor 47 and the second temperature T2 measured by the second temperature sensor 48 as heat exchange information. The acquisition unit 52 then defines the difference between the first temperature T1 and the second temperature T2 as the "temperature change amount ΔT". If the temperature change amount ΔT is measured or calculated by the measurement unit 43, the acquisition unit 52 may acquire the temperature change amount ΔT instead. The temperature change amount ΔT, like the first temperature T1 and the second temperature T2, is information (heat exchange information) regarding the amount of heat exchanged between the workpiece 14 and the cleaning liquid 17 in the primary shower cleaning process.

[0042] Furthermore, the acquisition unit 52 acquires information on at least one of the following indicators: the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of the workpiece 14. The mass W of the workpiece 14, the volume V of the workpiece 14, and the surface area A of the workpiece 14 are indicators corresponding to a single workpiece 14, for example, but they may also be indicators that represent multiple workpieces 14 together. In this embodiment, the acquisition unit 52 acquires the measurement result of the mass W of the workpiece 14 by the load cell 41 and an image captured by the camera 42. The measurement result of the mass W by the load cell 41 is information on the mass W of the workpiece 14. The image captured by the camera 42 is information on the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of the workpiece 14.

[0043] The image analysis unit 53 analyzes the images captured by the camera 42 acquired by the acquisition unit 52. Specifically, the image analysis unit 53 analyzes the images of the workpiece 14 to determine the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of the workpiece 14. Multiple types of images may be acquired from the camera 42 for this analysis.

[0044] The estimation unit 54 estimates the appropriate immersion time for the workpiece 14 in the immersion cleaning process performed after the primary shower cleaning process, based on the heat exchange information. Specifically, the estimation unit 54 estimates the immersion time for the workpiece 14 in the immersion cleaning process so that the workpiece 14 will be in a good drying state when a vacuum drying process is performed after the immersion cleaning process. The drying state is considered good when the workpiece 14 is in a drying state that meets desired criteria. Desired criteria include, for example, that no cleaning solution 17 adheres to the surface of the workpiece 14 (no liquid residue) and that there are no stains on the surface of the workpiece 14 caused by the cleaning solution 17. For this reason, the estimation unit 54 estimates the appropriate immersion time for the workpiece 14 that has undergone the primary shower cleaning process using the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, the number N of workpieces 14, and the temperature change ΔT. For this reason, the estimation unit 54 has a model M1.

[0045] Model M1 estimates the appropriate immersion time. Figure 7 shows an example of the specific configuration of Model M1. As shown in Figure 7, Model M1 is composed of a neural network. That is, Model M1 has an input layer, an intermediate layer, and an output layer. In the input layer, the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, the number N of workpieces 14, and the temperature change ΔT are input. Alternatively, the input layer may receive a first temperature T1 and a second temperature T2 instead of the temperature change ΔT. The immersion time is then output from the output layer via the machine learning-trained intermediate layer. Although Figure 7 illustrates an example of the configuration of Model M1, Model M1 is not limited to the configuration shown in Figure 7. Also, although Figure 7 shows Model M1 as an example of being composed of a neural network, Model M1 is not limited to being composed of a neural network.

[0046] Model M1 is trained by the learning unit 56, which will be described later, and the estimation unit 54 uses the trained model M1 to estimate the immersion time of the workpiece 14.

[0047] Thus, the estimation unit 54 estimates an appropriate immersion time in the immersion cleaning process based on various information (especially heat exchange information) obtained before the immersion cleaning process begins. It is preferable that the estimation of the immersion time is performed before the start of the immersion cleaning process or as soon as possible after the start of the immersion cleaning process.

[0048] When the estimation unit 54 estimates the immersion time, for example, the estimation unit 54 outputs the immersion time to the operation control unit 51. As a result, the operation control unit 51 sets (updates) the immersion time for the immersion cleaning process, and the immersion cleaning process is executed according to the estimated immersion time.

[0049] The notification unit 55 notifies the immersion time estimated by the estimation unit 54. For example, the notification unit 55 displays the immersion time on a predetermined display device and notifies the worker. Alternatively, the immersion cleaning process may be performed according to the immersion time once the worker has confirmed and approved the notified immersion time.

[0050] The learning unit 56 performs learning (machine learning) on ​​model M1. Specifically, the learning unit 56 learns model M1 using training data consisting of input and output sets for model M1. The training data for the input of model M1 consists of the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, the number N of workpieces 14, and the temperature change ΔT, which correspond to the input layer of model M1. The training data for the output of model M1 is the immersion time, which corresponds to the output layer of model M1. For example, in the vacuum degreasing and cleaning apparatus 100, a primary shower cleaning process is performed, and the immersion time is estimated using model M1. Then, each process from the immersion cleaning process onward is executed using the estimated immersion time. If the drying state of the workpiece 14 is good, the training of model M1 is performed using the mass W of the workpiece 14, the volume V, the surface area A, the number N, and the temperature change ΔT corresponding to the process performed as input training data, and the estimated immersion time as output training data. Furthermore, if the drying state of the workpiece 14 is not good, the mass W, volume V, surface area A, number N, and temperature change ΔT of the workpiece 14 corresponding to the process performed are used as input training data, and the estimated immersion time is corrected to become the output training data. Then, model M1 is trained using the input training data and the output training data. The estimated immersion time corrected to become the output training data (output training data) is set according to the drying state of the workpiece 14. For example, if cleaning solution 17 is attached to the surface of the workpiece 14, the output training data immersion time is set to correct the estimated immersion time to a longer time. Learning is performed, for example, by backpropagation using the training data. In this way, model M1 is trained (updated).

[0051] ≪Specific examples regarding the estimation of immersion time≫ Next, we will explain the details of the estimation of immersion time in the estimation unit 54.

[0052] Figure 8 shows an example of the temperature change of the workpiece 14 in each step of the vacuum degreasing and cleaning apparatus 100. In Figure 8, the temperature change of the workpiece 14 is shown as line L1. For example, in the primary shower step, a cleaning solution 17 at a temperature higher than that of the workpiece 14 is sprayed onto the workpiece 14. This causes heat exchange between the cleaning solution 17 and the workpiece 14, and the temperature of the workpiece 14 rises as shown in region R1. Then, in the immersion cleaning step following the primary shower cleaning step, the workpiece 14 is immersed in the cleaning solution 17 at a temperature higher than that of the workpiece 14, and the temperature of the workpiece 14 rises as shown in region R2. For example, the temperature of the workpiece 14 rises to temperature T3 in the immersion cleaning step. After that, the workpiece 14 heated to temperature T3 undergoes a secondary shower cleaning step and is dried in a vacuum drying step. Note that, for example, the temperature change of the workpiece 14 in the secondary shower cleaning step is smaller than the temperature change of the workpiece 14 in the primary shower cleaning step and the immersion cleaning step. Furthermore, the workpiece 14, which has been heated to temperature T3 by the immersion cleaning process, maintains its temperature during subsequent processes.

[0053] Here, the temperature of the workpiece 14 before the start of the vacuum drying process is important in order to dry the workpiece 14 to a desired dry state that meets the required standards. In other words, the temperature of the workpiece 14 after the immersion cleaning process (i.e., temperature T3) is important for the workpiece 14 to be properly dried. Specifically, it is preferable that the temperature T3 of the workpiece 14 reaches a target temperature within a predetermined temperature range after the immersion cleaning process. For example, if the temperature T3 of the workpiece 14, which has risen due to the immersion cleaning process, is lower than the predetermined temperature range, the workpiece 14 may not dry sufficiently in the subsequent vacuum drying process, and residual liquid may occur. Also, if the temperature T3 of the workpiece 14, which has risen due to the immersion cleaning process, is higher than the predetermined temperature range, stains from the cleaning liquid 17 may form on the surface of the workpiece 14 during the subsequent vacuum drying process. For this reason, it is preferable to set an appropriate temperature range for temperature T3, and to set the most suitable temperature within this range as the target temperature. The predetermined temperature range is set by the type of cleaning liquid 17, etc. For example, in the case of normal de decane, the specified temperature range is 60 degrees Celsius or more and 110 degrees Celsius or less. The immersion cleaning process sufficiently and appropriately heats the workpiece 14, and as the temperature T3 approaches the target temperature within the specified temperature range, the drying state of the workpiece 14 can be improved in the subsequent vacuum drying process.

[0054] Since it is important to maintain the workpiece 14 at an appropriate temperature during the immersion cleaning process, the estimation unit 54 of the control device 44 estimates the immersion time for the workpiece 14 during the immersion cleaning process so that the workpiece 14 will be properly dried by performing a vacuum drying process after the immersion cleaning process.

[0055] Specifically, as shown in Figure 8, the temperature of the workpiece 14 rises particularly high in region R1 during the primary shower cleaning process and in region R2 during the immersion cleaning process. The temperature rise in region R1 during the primary shower cleaning process and the temperature rise in region R2 during the immersion cleaning process are related (correlated) to each other. Therefore, the control device 44 uses the temperature rise of the workpiece 14 during the primary shower cleaning process to consider the temperature rise of the workpiece 14 during the immersion cleaning process and estimates the immersion time during the immersion cleaning process. For this purpose, the control device 44 uses heat exchange information regarding the temperature rise of the workpiece 14 during the primary shower cleaning process. Based on the heat exchange information, the control device 44 estimates the immersion time so that the workpiece 14 reaches a predetermined temperature state through immersion in the immersion cleaning process. The predetermined temperature state is a target temperature within a predetermined temperature range. Note that the predetermined temperature state may be defined as a predetermined temperature range.

[0056] In this way, the control device 44 uses the information from the primary showering process to estimate an appropriate immersion time for drying the workpiece 14 in the subsequent immersion washing process.

[0057] <<Processing Flow>> Figure 9 is a flowchart showing an example of the immersion time estimation process according to this embodiment. Each of the following steps is started when the vacuum degreasing and cleaning apparatus 100 starts operating. The immersion time estimation process uses the trained model M1. The order and content of each of the following steps can be changed as appropriate.

[0058] (Step SP10) The acquisition unit 52 acquires the measurement result of the mass W of the workpiece 14 by the load cell 41 and the image captured by the camera 42. For example, before the workpiece 14 is brought into the washing chamber 1, the measurement by the load cell 41 and the image captured by the camera 42 are performed, and the acquisition unit 52 acquires the information. Then the process moves on to step SP11.

[0059] (Step SP11) The image analysis unit 53 analyzes the images captured by the camera 42 to determine the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of the workpiece 14. Then, the process proceeds to step SP12.

[0060] (Step SP12) When the primary shower cleaning process is performed, the acquisition unit 52 acquires the first temperature T1 measured by the first temperature sensor 47 and the second temperature T2 measured by the second temperature sensor 48 as heat exchange information. The difference between the first temperature T1 and the second temperature T2 is defined as the temperature change amount ΔT. Then, the process proceeds to step SP13.

[0061] (Step SP13) The estimation unit 54 uses the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, the number N of workpieces 14, and the temperature change ΔT to estimate the immersion time using model M1. Then, the process proceeds to step SP14.

[0062] (Step SP14) The estimation unit 54 outputs the estimated immersion time to the operation control unit 51. The operation control unit 51 then executes the immersion cleaning process according to the estimated immersion time. The process then proceeds to step SP15.

[0063] (Step SP15) The notification unit 55 notifies the user of the immersion time estimated by the estimation unit 54. Then the process ends.

[0064] As described above, when the primary shower cleaning process is performed, the immersion time is estimated, and this estimated immersion time is utilized in the immersion cleaning process performed after the primary shower cleaning process. In other words, an appropriate immersion time is set according to the temperature state of the workpiece 14 at the stage of the primary shower cleaning process, and feedforward control is performed. In the vacuum degreasing cleaning apparatus 100, it is difficult to check the state of the workpiece 14 because the cleaning chamber 1 is in a vacuum state at each step, but it is possible to set an appropriate immersion time using heat exchange information.

[0065] <Effects> In this embodiment, the immersion time for the immersion cleaning process following the first shower cleaning process is estimated using the heat exchange information between the workpiece 14 and the cleaning solution 17 during the first shower cleaning process. Therefore, it is possible to set an appropriate immersion time using information obtained before the immersion cleaning process. This optimizes the immersion time and suppresses unnecessary energy consumption. In other words, it is possible to save energy in the vacuum degreasing cleaning apparatus 100. Furthermore, it is possible to estimate the required immersion time before immersion, making it possible to handle various workpieces 14. In addition, it is possible to shorten the cycle time in the vacuum degreasing cleaning apparatus 100. As a result, productivity and quality stability can be improved.

[0066] Furthermore, the vacuum degreasing and cleaning apparatus 100 is further equipped with a vacuum drying process, which estimates the immersion time so that the workpiece 14 is properly dried. This makes it possible to set an appropriate immersion time, optimizing the immersion time and suppressing unnecessary energy consumption.

[0067] Furthermore, the immersion time is estimated based on the heat exchange information from the primary shower washing process, so that the workpiece 14 reaches a predetermined temperature state. This makes it possible to appropriately estimate the immersion time so that the workpiece 14 is properly dried.

[0068] Furthermore, by measuring the temperature of the cleaning solution 17 before it is supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process, and the temperature of the cleaning solution 17 after it is supplied to the workpiece 14, heat exchange information can be effectively measured.

[0069] Furthermore, by using heat exchange information and at least one of the following: the mass W of the workpiece 14, the volume V of the workpiece 14, the surface area A of the workpiece 14, and the number N of workpieces 14, the accuracy of estimating the immersion time can be improved.

[0070] ≪Variations≫ It should be noted that the present invention is not limited to the embodiments described above. That is, any design modifications made to the above-described examples by those skilled in the art are also included within the scope of the present invention, as long as they retain the features of the present invention. Furthermore, the elements of the above embodiments and the following modifications can be combined to the extent that it is technically possible, and any combination thereof is also included within the scope of the present invention, as long as it retains the features of the present invention.

[0071] For example, in the above embodiment, the image captured by the camera 42 was used as one example of information regarding the volume V, surface area A, and number N of the workpiece 14, but it is not limited to the use of captured images. For example, the information may be input by an operator, or the information may be obtained from the specifications of the workpiece 14, etc. Also, the information regarding the mass W of the workpiece 14 is not limited to the measurement result by the load cell 41, and the information may be input by an operator, etc., or the information may be obtained from the specifications of the workpiece 14, etc.

[0072] Furthermore, the above embodiment uses the case where the measured first temperature T1 and second temperature T2 are used as heat exchange information as an example. The heat exchange information is not limited to the above, as it is information relating to the amount of heat exchanged between the cleaning liquid 17 supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process and the workpiece 14. If the temperature of the cleaning liquid 17 supplied to the workpiece 14 in the cleaning chamber 1 during the primary shower cleaning process (for example, the first temperature T1) is known and does not need to be measured, then only the second temperature T2 may be used as heat exchange information. Also, if the temperature change amount ΔT, which is the difference between the first temperature T1 and the second temperature T2, is measured, then the temperature change amount ΔT may be used as heat exchange information. In addition, the heat exchange information may be constructed using parameters other than the temperature of the cleaning liquid 17. Thus, various indicators can be applied to the heat exchange information as long as it is information relating to the amount of heat exchanged between the workpiece 14 and the cleaning liquid 17 during the primary shower cleaning process.

[0073] Furthermore, in the above embodiment, the estimation unit 54 estimated the immersion time using the mass W, volume V, surface area A, and number N of the workpiece 14. However, if the mass W, volume V, surface area A, and number N of the target workpiece 14 are fixed, the immersion time may be estimated using only heat exchange information (e.g., temperature change ΔT). Also, in the above embodiment, the estimation unit 54 used the mass W, volume V, surface area A, and number N of the workpiece 14 as an example, but at least one of the mass W, volume V, surface area A, and number N of the workpiece 14 may be used.

[0074] Furthermore, while the above embodiment provides an example of setting training data for model M1 in accordance with the actual operation of the vacuum degreasing and cleaning apparatus 100 and performing learning, the learning method is not limited to the above. For example, training data for model M1 may be generated virtually by simulating the vacuum degreasing and cleaning apparatus 100 and then learning may be performed. Alternatively, training data may be created from past operation data (logs) of the vacuum degreasing and cleaning apparatus 100 and then learning may be performed. Alternatively, operation data obtained from multiple vacuum degreasing and cleaning apparatuses 100 may be combined to create training data and then learning may be performed. In other words, model M1 may be learned by transfer learning. Thus, training data can be created by various methods. [Explanation of Symbols]

[0075] 1: Washing Room 14: Work 17: Cleaning solution 43: Measuring part 44: Control device 100: Vacuum degreasing and cleaning device A :Surface area N: Quantity T1: 1st temperature (heat exchange information) T2: 2nd temperature (heat exchange information) V: Volume W: mass

Claims

1. A vacuum degreasing and cleaning apparatus that performs at least a shower cleaning step and an immersion cleaning step on a workpiece, A cleaning chamber for storing the aforementioned workpiece, In the shower cleaning process, a measuring unit measures information regarding the amount of heat exchanged between the cleaning liquid supplied to the workpiece in the cleaning chamber and the workpiece as heat exchange information. A control device that estimates the time for immersing the workpiece in the cleaning chamber with cleaning solution in the immersion cleaning step performed after the shower cleaning step, based on the heat exchange information, A vacuum degreasing and cleaning apparatus characterized by comprising the following features.

2. It further includes a vacuum drying process, The vacuum degreasing and cleaning apparatus according to claim 1, characterized in that the control device estimates the time to immerse the workpiece in the immersion cleaning step so that the workpiece is in a good drying state by executing the vacuum drying step after the immersion cleaning step.

3. The vacuum degreasing cleaning apparatus according to claim 1 or 2, characterized in that the control device estimates the time for immersing the workpiece in the immersion cleaning process so that the workpiece reaches a predetermined temperature state by immersion, based on the heat exchange information in the shower cleaning process.

4. The vacuum degreasing and cleaning apparatus according to claim 1 or 2, characterized in that the measuring unit measures the temperature of the cleaning liquid before it is supplied to the workpiece in the cleaning chamber during the shower cleaning process, and the temperature of the cleaning liquid after it has been supplied to the workpiece in the cleaning chamber during the shower cleaning process.

5. The vacuum degreasing and cleaning apparatus according to claim 1 or 2, characterized in that the control device estimates the time for immersing the workpieces in the cleaning chamber with the cleaning solution based on at least one of the mass of the workpieces, the volume of the workpieces, the surface area of ​​the workpieces, and the number of workpieces, and the heat exchange information.

Images