Parts processing unit

Abstract

This allows for more accurate detection of problems occurring in the mechanical components, including the voice coil motor. [Solution] A parts processing apparatus according to one aspect of the present disclosure is a device that performs a predetermined process on a workpiece. This parts processing apparatus comprises a workpiece holding unit that holds the workpiece and is movable forward and backward; a forward and backward drive unit that applies an external force to the workpiece holding unit so that the workpiece holding unit moves forward and backward; and a load detection unit provided in the forward and backward drive unit that detects the load applied to the workpiece holding unit. The forward and backward drive unit has a drive motor that generates a driving force and a voice coil motor that limits the load applied to the workpiece holding unit.

Description

Technical Field

[0001] The present disclosure relates to a component processing apparatus.

Background Art

[0002] Patent Document 1 discloses an electronic component holding apparatus provided with a voice coil motor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a component processing apparatus useful for more accurately detecting the occurrence of troubles in a mechanism portion including a voice coil motor.

Means for Solving the Problems

[0005] A component processing apparatus according to one aspect of the present disclosure is an apparatus that performs a predetermined process on a workpiece. This component processing apparatus includes a workpiece holding portion that holds the workpiece and is movable forward and backward, a forward and backward drive portion that applies an external force to the workpiece holding portion so that the workpiece holding portion moves forward and backward, and a load detection portion provided in the forward and backward drive portion that detects a load applied to the workpiece holding portion. The forward and backward drive portion includes a drive motor that generates a driving force and a voice coil motor that limits the load applied to the workpiece holding portion.

Effects of the Invention

[0006] According to the present disclosure, there is provided a component processing apparatus useful for more accurately detecting the occurrence of troubles in a mechanism portion including a voice coil motor.

Brief Description of the Drawings

[0007] [Figure 1] Figure 1 is a schematic diagram showing an example of a parts processing device. [Figure 2] Figure 2 is a schematic diagram showing an example of a reciprocating drive unit. [Figure 3] Figure 3 is a schematic diagram showing an example of a reciprocating drive unit. [Figure 4] Figure 4 is a schematic graph showing an example of the time-dependent changes in the position and load values ​​of each part. [Figure 5] Figure 5(a) is a schematic diagram illustrating the operation under normal conditions. Figure 5(b) is a schematic diagram illustrating the operation when a problem occurs. [Figure 6] Figure 6 is a schematic diagram showing an example of a parts processing unit. [Figure 7] Figure 7 is a schematic diagram showing an example of a reciprocating drive unit. [Figure 8] Figure 8 is a schematic diagram showing an example of a reciprocating drive unit. [Figure 9] Figures 9(a) and 9(b) are schematic diagrams showing an example of a parts processing device. [Modes for carrying out the invention]

[0008] An embodiment will be described below with reference to the drawings. In this description, the same elements or elements having the same function will be denoted by the same reference numeral, and redundant descriptions will be omitted.

[0009] [Component Processing Device] Figure 1 is a schematic plan view showing a parts processing apparatus according to one embodiment. The parts processing apparatus 1 shown in Figure 1 is an apparatus that performs a predetermined process on a workpiece to be processed (hereinafter referred to as "workpiece W"). The parts processing apparatus 1 is, for example, a die sorter, which transports the workpiece W, sorts it into good and defective products, and then stores the workpiece W in a storage member. The parts processing apparatus 1 may also be an apparatus that transports the workpiece W and then mounts it onto other components such as printed circuit boards, i.e., a mounter or bonder. In the following, the contents of this disclosure will be explained using the case where the parts processing apparatus 1 is a die sorter as an example.

[0010] The parts processing apparatus 1 may store workpieces W that have been determined to be good products by inspection into a storage member, or it may store workpieces W in different storage members according to the classification results of the inspection. The parts processing apparatus 1 may store workpieces W in the storage member in a state that allows them to be removed. In one example, after workpieces W have been stored in the storage member in the parts processing apparatus 1, they are removed from the storage member and subjected to further processing in a device separate from the parts processing apparatus 1. The inspection performed by the parts processing apparatus 1 includes, for example, visual inspection or electrical characteristic inspection. In addition to inspecting the workpieces W, the parts processing apparatus 1 may also perform marking. The storage member that stores the workpieces W after inspection by the parts processing apparatus 1 is, for example, a carrier tape, a tray, or a wafer sheet.

[0011] The workpiece W processed by the component processing device 1 is an electronic component. The type of workpiece W (electronic component) is not limited, and specific examples of workpiece W include passive components such as resistors, capacitors, and inductors, active components such as transistors, diodes, and integrated circuits, LEDs, and sensors that detect physical quantities. Workpiece W may be composed of two or more components combined. Electronic components as workpiece W also include semiconductor components (electronic components using semiconductor materials). Workpiece W may be components that have been formed in the front-end process of semiconductor manufacturing and then separated into individual pieces by dicing or the like.

[0012] As shown in Figure 1, the parts processing device 1 includes, for example, a rotary conveying unit 10, a plurality of processing units 40, and a controller 100. The rotary conveying unit 10 conveys the workpiece W along a circular orbit CR. The workpiece W to be conveyed may have main surfaces Wa and Wb that are opposite to each other (parallel to each other) (see Figure 2). The rotary conveying unit 10 includes, for example, a support unit 12, a plurality of workpiece holding units 14, a rotary drive unit 16, one or more forward / backward drive units 18, and an angle detection unit 90.

[0013] The support section 12 is configured to support multiple workpiece holders 14. The support section 12 supports the multiple workpiece holders 14 so that each workpiece holder 14 is positioned in a circular orbit CR. The support section 12 is provided so as to be rotatable around the central axis Ax of the circular orbit CR. The circular orbit CR may be a horizontal circular orbit, and the central axis Ax may be a vertical axis. In Figure 1, etc., the direction in which the central axis Ax extends is represented as the "Z axis". The support section 12 is, for example, a turntable. In the following explanation, the Z axis direction will be assumed to be the vertical direction.

[0014] Multiple workpiece holding units 14 are arranged at equal intervals along a circumference centered on the central axis Ax and are fixed to the support unit 12. Each of the multiple workpiece holding units 14 is configured to hold a workpiece W and is provided to be movable back and forth. At least a portion of each workpiece holding unit 14 is movable back and forth, for example, in the Z-axis direction (vertical direction). The workpiece holding units 14 may hold the workpiece W in any manner. Specific examples of how the workpiece holding units 14 hold the workpiece W include vacuum suction, electrostatic suction, and gripping. The workpiece holding unit 14 may vacuum-suction either the main surface Wa or Wb from one side in a direction perpendicular to the support unit 12 (for example, the upper surface of the turntable).

[0015] Figure 2 is a schematic side view showing a part of the parts processing device. In one example, the workpiece holding unit 14 includes a suction unit 22, a holder 24, and a spring 26, as shown in Figure 2. The suction unit 22 (workpiece holding unit) is configured to suction either the main surface Wa or Wb of the workpiece W from above. The suction unit 22 is, for example, a suction rod formed to extend perpendicularly to the support unit 12, and holds the workpiece W by suction at its lower end. The holder 24 is fixed to the outer circumference of the support unit 12 and holds the suction unit 22 so that it can move up and down. As described above, the suction unit 22 holds the workpiece W by suction and is able to move back and forth in the Z-axis direction.

[0016] Spring 26 resists the downward movement of the suction portion 22 by its elasticity. When a downward external force is applied to the upper end of the suction portion 22, the spring 26 elastically deforms in response to the downward movement of the suction portion 22, and when the downward external force disappears, it elastically returns and pushes the suction portion 22 back to the height before the downward movement. The spring 26 is also referred to as a "support spring". The work holding portion 14 may have a valve for switching on and off the vacuum suction by the suction portion 22 in response to an operation instruction from the controller 100. Specific examples of the valve include an electromagnetic valve and the like.

[0017] Returning to FIG. 1, the rotation drive unit 16 is configured to rotate the support unit 12 around the central axis Ax of the circular orbit CR. The rotation drive unit 16 rotates the support unit 12 around the central axis Ax by a direct drive without using a gear, for example, using a power source such as an electric motor. As a result, the plurality of work holding portions 14 move along a horizontal circular orbit CR centered on the central axis Ax. That is, the rotation drive unit 16 moves the plurality of work holding portions 14 along the circular orbit CR. As a result, the work W held by the work holding portion 14 is conveyed along the circular orbit CR.

[0018] The rotation drive unit 16 is controlled by the controller 100 to repeat the rotation and stop of the support unit 12 at the angular pitch (angular pitch around the central axis Ax) between adjacent work holding portions 14. Hereinafter, the plurality of positions where the plurality of work holding portions 14 (more specifically, the plurality of suction portions 22) are respectively arranged when the rotation drive unit 16 stops the support unit 12 are referred to as "plurality of stop positions SP".

[0019] One or more reciprocating drive units 18 are configured to individually move at least a portion of the multiple workpiece holding units 14 forward and backward. The rotary transport unit 10 may have multiple reciprocating drive units 18 as one or more reciprocating drive units 18. Note that in Figure 2, one of the multiple reciprocating drive units 18 is shown. The reciprocating drive unit 18 is configured to move the workpiece holding unit 14 forward and backward along a predetermined direction. The reciprocating drive unit 18 applies an external force to the workpiece holding unit 14 so that the workpiece holding unit 14 positioned at the corresponding stop position SP moves forward and backward (displaces). As a result, the workpiece holding unit 14 positioned at the corresponding stop position SP moves downward to one side in the direction perpendicular to the support unit 12.

[0020] Multiple forward / backward drive units 18 may be provided to correspond to all of the multiple stop positions SP. A forward / backward drive unit 18 may not be provided at a stop position SP where it is not necessary to move the workpiece holding unit 14 forward or backward. Viewed from the Z-axis direction, the forward / backward drive unit 18 is located at or near the corresponding stop position SP. The forward / backward drive unit 18 is provided to be located above the workpiece holding unit 14 that is positioned at the corresponding stop position SP. The forward / backward drive unit 18 moves the workpiece holding unit 14 downward as it is sequentially positioned at the corresponding stop position SP. The stop position SP where the forward / backward drive unit 18 is located is also the position (actuation position) where the forward / backward drive unit 18 applies force to one of the multiple workpiece holding units 14.

[0021] Although not shown in Figures 1 and 2, the rotary conveying unit 10 may have members for fixing the multiple forward / backward drive units 18. The multiple forward / backward drive units 18 are arranged so as not to rotate together with the support unit 12 even when the support unit 12 rotates. Details of the forward / backward drive units 18 will be described later.

[0022] The angle detection unit 90 is a sensor that detects the rotation angle of the support unit 12. The rotation angle represents the rotational position of the support unit 12 in the circumferential direction around the central axis Ax. The angle detection unit 90 may also detect the position (i.e., rotation angle) of a reference position within the support unit 12 in the circumferential direction. The angle detection unit 90 may be provided in the rotation drive unit 16 that rotates the support unit 12. The angle detection unit 90 can be any sensor that can acquire information indicating the rotation angle of the support unit 12. In one example, the angle detection unit 90 is a rotary encoder or a slit sensor.

[0023] The angle detection unit 90 may be provided to detect the rotation angle of the shaft member along the central axis Ax of the support unit 12, instead of the rotation drive unit 16. The angle detection unit 90 may be provided directly on the shaft member, or it may be provided at a position away from the shaft member (central axis Ax). In one example, the angle detection unit 90 is connected to the shaft member and provided on a transmission member including a belt and pulleys.

[0024] The angle detection unit 90 outputs information indicating the rotation angle of the support unit 12 to the controller 100. The angle detection unit 90 may repeatedly acquire and output information indicating the rotation angle of the support unit 12 at a predetermined measurement cycle. The angle detection unit 90 may continuously acquire and output information indicating the rotation angle of the support unit 12 while the parts processing device 1 is in operation.

[0025] Multiple processing units 40 are provided to correspond to several stop positions SP. Unlike the example shown in Figure 1, a processing unit 40 may be provided for each of the stop positions SP. Each processing unit 40 is configured to perform a predetermined process on the workpiece W within a processing area that includes the corresponding stop position SP. In this disclosure, for the sake of explanation, the process performed by each processing unit 40 on the workpiece W is referred to as a "unit process" to distinguish it from the overall process by the parts processing device 1. The forward / backward drive unit 18 is located at the stop position SP where a processing area for executing the unit process by the processing unit 40 is set.

[0026] In this disclosure, "unit processing" performed on workpiece W includes any action that changes the state of workpiece W. For example, marking workpiece W, having workpiece W held (handing over) workpiece W to workpiece holding unit 14, and workpiece holding unit 14 handing over workpiece W all constitute "unit processing." Performing any inspection on workpiece W also constitutes "unit processing" because it changes the state from one where the inspection data is unknown to one where the inspection data is known. The multiple processing units 40 include, for example, a parts supply unit 42, a parts recovery unit 44, and one or more intermediate processing units 46.

[0027] The parts supply unit 42 is a unit that supplies workpieces W to the rotary transport unit 10. The parts supply unit 42 is positioned at one of the stop positions SP. In one example, the parts supply unit 42 transports the storage member so that each storage section of the storage member, which contains multiple workpieces W, is sequentially positioned at the corresponding stop position SP. With the storage section containing the workpieces W positioned at the corresponding stop position SP, the workpiece holding section 14 positioned at that stop position SP is displaced by the forward / backward drive unit 18 and receives the workpieces W in the storage section. In this way, the workpieces W are supplied from the parts supply unit 42 to the rotary transport unit 10. Hereinafter, the stop position SP from which the parts supply unit 42 supplies the workpieces W will be referred to as the "supply stop position SP".

[0028] The parts retrieval unit 44 is a unit that retrieves workpieces W from the rotary transport unit 10. The parts retrieval unit 44 is positioned at one of the stop positions SP. In one example, the parts retrieval unit 44 transports a storage member capable of accommodating multiple workpieces W, sequentially positioning each empty storage section of the storage member at the corresponding stop position SP. With an empty storage section positioned at the corresponding stop position SP, the workpiece holding section 14 positioned at that stop position SP is displaced by the forward / backward drive unit 18, and the workpiece W is transferred into that storage section. As a result, the workpieces W are retrieved from the rotary transport unit 10 to the parts retrieval unit 44. Hereinafter, the stop position SP from which the parts retrieval unit 44 retrieves workpieces W will be referred to as the "retrieval stop position SP".

[0029] The intermediate processing unit 46 is a unit that performs predetermined unit processing on the workpiece W at any stop position SP other than the supply and retrieval stop positions SP. Specific examples of unit processing by the intermediate processing unit 46 include electrical characteristic inspection, optical characteristic inspection, correction of at least one of the attitude and position, and marking (laser marking). The workpiece holding unit 14, located at the corresponding stop position SP, may be displaced by the forward / backward drive unit 18 in order to transfer the workpiece W to and from the intermediate processing unit 46, or to perform unit processing in the intermediate processing unit 46.

[0030] (Movement drive unit) Referring to Figures 2 and 3, an example of the details of the reciprocating drive unit 18 will be described. As shown in Figure 2, the reciprocating drive unit 18 includes a fixed base 52, a drive motor 54, a movable base 55, a first spring 56, a voice coil motor 60, a first reciprocating rod 72, a holder 73, a second spring 74, and a second reciprocating rod 76.

[0031] The fixed base portion 52 is a base portion that supports the components of the reciprocating drive unit 18 other than the fixed base portion 52. The fixed base portion 52 is fixed in a predetermined position in the parts processing device 1. The fixed base portion 52 is connected to a member for fixing the reciprocating drive unit 18 so that it does not move even when the support portion 12 rotates. The fixed base portion 52 includes, for example, a first portion that extends horizontally, a second portion connected to one end of the first portion and extending downward along the Z-axis direction, and a third portion connected to the lower end of the second portion and extending horizontally such that a part of it overlaps with the first portion.

[0032] The drive motor 54 is a motor that generates driving force. The drive motor 54 may also be a servo motor. When the movable parts (first reciprocating rod 72 and second reciprocating rod 76) in the reciprocating drive unit 18 move and come into contact with the workpiece holding unit 14, an external force acts on the workpiece holding unit 14. The drive motor 54 generates the driving force necessary to move the movable parts (first reciprocating rod 72 and second reciprocating rod 76). In other words, the drive motor 54 drives the movable parts (first reciprocating rod 72 and second reciprocating rod 76).

[0033] The drive motor 54 may include a position detector 54a. The position detector 54a is a sensor that detects the rotational position of the drive motor 54. The position detector 54a is, for example, a rotary encoder. The position detector 54a may output information indicating the detected rotational position to the controller 100. The position of the movable part (for example, the tip of the movable part) in the Z-axis direction can be determined from the detection result by the position detector 54a. The drive motor 54 may be provided on the first part of the fixed base part 52.

[0034] The movable base portion 55 is a base portion that is movably provided relative to the fixed base portion 52. The movable base portion 55 is provided so as to be movable (up and down) along the Z-axis direction. The movable base portion 55 is positioned between the first portion and the third portion of the fixed base portion 52 in the Z-axis direction. The movable base portion 55 includes, for example, a first portion that extends horizontally, a second portion connected to one end of the first portion and extending downward in the Z-axis direction, and a third portion connected to the lower end of the second portion and extending horizontally such that a part of it overlaps with the first portion. In one example, the second portion of the movable base portion 55 is movably connected to the second portion of the fixed base portion 52 along the Z-axis direction.

[0035] The first spring 56 is provided between the third portion of the movable base portion 55 and the third portion of the fixed base portion 52. The first spring 56 resists the downward movement of the movable base portion 55 due to its elasticity. When a downward external force is applied to the movable base portion 55, the first spring 56 elastically deforms in accordance with the downward movement of the movable base portion 55, and when the downward external force is removed, it elastically returns to its original height, pushing the movable base portion 55 back to its height before the downward movement. The first spring 56 functions as an upward spring. The upward force applied to the movable base portion 55 by the first spring 56 is denoted as "force F1". The first spring 56 supports the weight of the movable base portion 55 and the portion supported by the movable base portion 55 of the reciprocating drive unit 18.

[0036] The voice coil motor 60 limits the load applied to the workpiece holding section 14. The voice coil motor 60 has a function to limit the force acting on the workpiece holding section 14 by the forward / backward drive section 18. By continuously applying a predetermined voltage (or a voltage within a predetermined range) to the voice coil motor 60, the load applied to the workpiece holding section 14 is limited to a load corresponding to the predetermined voltage (or a voltage within a predetermined range). The value of the voltage applied to the voice coil motor 60 may be predetermined according to the value to which the load applied to the workpiece holding section 14 should be limited.

[0037] The voice coil motor 60 is a linear motor that generates linear motion using electromagnetic force. The voice coil motor 60 includes a stator 62 and a movable element 64. In the example shown in Figure 3, the stator 62 and the movable element 64 are aligned along the Z-axis direction (a predetermined direction). In this case, when viewed from the Z-axis direction, at least a part of the stator 62 overlaps with at least a part of the movable element 64. The voice coil motor 60 may be provided with a case that houses the stator 62 and a part of the movable element 64. The stator 62 contains a coil, and the movable element 64 contains a magnet. When current flows through the coil of the stator 62, the coil of the stator 62 generates a force that pulls the movable element 64 towards itself, according to the current (current value).

[0038] The stator 62 is connected to the first portion of the movable base 55. Therefore, when the movable base 55 is driven by the drive motor 54, the entire voice coil motor 60 moves (descends). In the voice coil motor 60, an upward tensile force is applied to the movable element 64 when voltage is applied (current is supplied). The upward force generated in the voice coil motor 60 is denoted as "force Fv".

[0039] The first retractable rod 72 is formed in a rod shape so as to extend along the Z-axis direction. The upper end of the first retractable rod 72 is connected to the movable element 64 of the voice coil motor 60. The holder 73 is the part that supports the first retractable rod 72. The holder 73 may also support the lower end portion of the first retractable rod 72 in the Z-axis direction. The holder 73 may be formed to extend inward from the part that supports the first retractable rod 72. "Inward" means in the direction toward the central axis Ax.

[0040] The second spring 74 (spring) is positioned between the portion of the reciprocating drive unit 18 connected to the stator 62 and the portion connected to the movable part 64. The second spring 74 is configured to generate a force opposite to the force generated by the voice coil motor 60. In one example, the movable base portion 55 includes a connecting portion 55a extending downward from the lower surface of the horizontally extending first portion. The second spring 74 is provided between the connecting portion 55a of the movable base portion 55 and the holder 73. Due to its elasticity, the second spring 74 applies a downward force to the holder 73. The second spring 74 functions as a compression spring. The downward force applied by the second spring 74 is denoted as "force F2".

[0041] The second retractable rod 76 is formed in a rod shape so as to extend along the Z-axis direction. The upper end of the second retractable rod 76 is connected to the holder 73, and the second retractable rod 76 is supported by the holder 73. The lower end of the second retractable rod 76 is positioned so as to be able to contact the upper end of the suction portion 22 (suction rod) of the workpiece holding portion 14.

[0042] In the forward / backward drive unit 18 illustrated above, the movable part connected to the movable element 64 of the voice coil motor 60 is composed of a first forward / backward rod 72, a holder 73, and a second forward / backward rod 76. A force Fv from the voice coil motor 60 is applied upward to this movable part, and a force F2 from the second spring 74 is applied downward.

[0043] The forward / backward drive unit 18, as illustrated in Figure 2, is in a state where it is not pressing down on the workpiece holding unit 14 against the suction unit 22 (hereinafter referred to as the "neutral state"). In the neutral state, voltage is applied to the voice coil motor 60. In the neutral state, the forces Fv and F2 are balanced.

[0044] Figure 3 illustrates the state in which the reciprocating drive unit 18 is pushing down on the suction part 22 (hereinafter referred to as the "pushed-down state"). In the pushed-down state, a downward force F0 is applied to the movable base part 55 by the drive motor 54. While balancing forces Fv and F2, the movable part including the first reciprocating rod 72 and the second reciprocating rod 76 descends due to the application of force F0, and the lower end (tip) of the second reciprocating rod 76 comes into contact with the suction part 22. Then, the movable part including the first reciprocating rod 72 and the second reciprocating rod 76 pushes down on the suction part 22 in order to overcome the upward force from the spring 26. Figure 3 illustrates how a downward force Fd is applied to the suction part 22 from the tip of the second reciprocating rod 76, and how a force Fr representing the reaction force of the spring 26 corresponding to that force Fd is generated. By balancing forces Fv and F2, that is, by providing the second spring 74, position control becomes possible when driven by the drive motor 54.

[0045] (Load detection unit) The parts processing apparatus 1 includes a load detection unit 80. The load detection unit 80 is provided on the reciprocating drive unit 18. In the parts processing apparatus 1, a load detection unit 80 may be provided for each reciprocating drive unit 18. That is, the parts processing apparatus 1 may have multiple load detection units 80 corresponding to multiple reciprocating drive units 18. The load detection unit 80 is a sensor that detects the load applied to the workpiece holding unit 14. When the reciprocating drive unit 18 applies force to the workpiece holding unit 14, it receives a reaction force corresponding to that force. The load detection unit 80 can detect the reaction force received from the workpiece holding unit 14 (the load received by the second reciprocating rod 76 from the workpiece holding unit 14).

[0046] The load detection unit 80 may detect the load by any method. The load detection unit 80 may be a mechanical sensor that detects changes in electrical resistance values, such as a strain gauge, or it may be a load cell. The load detection unit 80 outputs information indicating the magnitude of the load (load value) to the controller 100. The load detection unit 80 may repeatedly acquire and output information indicating the magnitude of the load at a predetermined measurement cycle. The load detection unit 80 may continuously acquire and output information indicating the magnitude of the load while the parts processing device 1 is in operation.

[0047] The load detection unit 80 may be provided in the portion of the reciprocating drive unit 18 that is connected to the movable element 64 of the voice coil motor 60. In the example shown in Figure 2, the portion of the reciprocating drive unit 18 connected to the movable element 64 consists of the first reciprocating rod 72, the holder 73, and the second reciprocating rod 76. For example, the load detection unit 80 is provided on the second reciprocating rod 76. In one example, the load detection unit 80 is provided near the upper end of the second reciprocating rod 76.

[0048] (Example of control by a controller) Returning to Figure 1, the controller 100 is comprised of one or more control computers. The controller 100 controls the rotary transport unit 10 and the multiple processing units 40 according to a predetermined control procedure so that predetermined processing is performed sequentially on multiple workpieces W. For example, the controller 100 controls the rotary transport unit 10 and the multiple processing units 40 so that corresponding unit processing is performed on the workpieces W at several stopping positions SP while transporting multiple workpieces W along a circular orbit CR.

[0049] The controller 100 may intermittently rotate the support unit 12 using the rotation drive unit 16 so that multiple workpiece holding units 14 are sequentially positioned at multiple stop positions SP. Intermittent rotation means that the support unit 12 alternately rotates and stops. The controller 100 may also intermittently rotate the support unit 12 using the rotation drive unit 16 at the same pitch as the angular pitch between adjacent workpiece holding units 14 on the circular orbit CR. As a result, one workpiece holding unit 14 (one suction unit 22) is sequentially positioned at each stop position SP.

[0050] The controller 100 may control the forward / backward drive unit 18, the workpiece holding unit 14, and the parts supply unit 42 so that the workpiece W is supplied to the rotary transport unit 10 at the supply stop position SP. In one example, the controller 100 lowers the suction part 22 of the workpiece holding unit 14 by the corresponding forward / backward drive unit 18 when the storage unit containing the workpiece W is positioned at the supply stop position SP by the parts supply unit 42. The controller 100 operates the forward / backward drive unit 18 so that the suction part 22 descends to the point where its lower end contacts the main surface Wa of the workpiece W, or to a position just before contact. The controller 100 may also control the forward / backward drive unit 18 so that the suction part 22 returns to its height before descent after it has gripped the main surface Wa.

[0051] The controller 100 may control the forward / backward drive unit 18, the workpiece holding unit 14, and the parts recovery unit 44 so that the workpiece W is recovered from the rotary conveying unit 10 into the storage member at the recovery stop position SP. In one example, the controller 100 lowers the suction part 22 of the workpiece holding unit 14 using the corresponding forward / backward drive unit 18 while the empty storage member is positioned at the recovery stop position SP by the parts recovery unit 44. The controller 100 operates the forward / backward drive unit 18 so that the suction part 22 descends to the point where the main surface Wb of the workpiece W held by the suction part 22 contacts the storage member, or to the position just before contact. After the suction part 22 releases the suction of the workpiece W, the controller 100 may control the forward / backward drive unit 18 so that the suction part 22 returns to the height it was at before descending.

[0052] The controller 100 may control the forward / backward drive unit 18, the workpiece holding unit 14, and the intermediate processing unit 46 so that unit processing is performed on the workpiece W at stop positions SP other than the supply and retrieval stop positions SP. In one example, the controller 100 moves the suction unit 22 forward and backward using the corresponding forward / backward drive unit 18 when the suction unit 22 is positioned at the stop position SP for unit processing.

[0053] The controller 100 may acquire the detected value from the load detection unit 80. The controller 100 may repeatedly acquire the detected value from the load detection unit 80 at a predetermined measurement cycle while the parts processing device 1 is in operation. The controller 100 may monitor the detected value from the load detection unit 80 while the workpiece holding unit 14 (suction unit 22) is being moved back and forth by the forward / backward drive unit 18. The controller 100 may adjust the voltage value applied to the voice coil motor 60 based on the detected value from the load detection unit 80. The controller 100 may perform closed-loop control to adjust the voltage value applied to the voice coil motor 60 so that the detected value from the load detection unit 80 follows a predetermined target load. While performing this closed-loop control, the controller 100 may monitor whether there are any abnormalities in the detected load value.

[0054] Figure 4 shows a schematic graph illustrating the time changes of the position of the lifting portion of the reciprocating drive unit 18, including the second reciprocating rod 76, the position of the suction portion 22, and the detected value by the load detection unit 80 during the period in which the reciprocating drive unit 18 performs one reciprocating movement of the suction portion 22. The positions of the lifting portion of the reciprocating drive unit 18 and the suction portion 22 represent positions in the Z-axis direction. The position of the lifting portion of the reciprocating drive unit 18 in the Z-axis direction may be defined by the height of the lower end of the second reciprocating rod 76, and the position of the suction portion 22 in the Z-axis direction may be defined by the height of the lower end of the suction portion 22.

[0055] The movement of the reciprocating drive unit 18 may begin when the drive motor 54 of the reciprocating drive unit 18 starts operating. At the point indicated by "a1" in the graph, the drive motor 54 starts driving the lifting portion, which includes the movable base portion 55, the voice coil motor 60, the first reciprocating rod 72, and the second reciprocating rod 76, and the lifting portion begins to descend. As the descent of the lifting portion, including the second reciprocating rod 76, continues, at time t1, the lower end of the second reciprocating rod 76 comes into contact with the upper end of the suction portion 22. As a result, at the point indicated by "b1" in the graph, the suction portion 22 begins to descend. In addition, as the second reciprocating rod 76 and the suction portion 22 come into contact, the load detection unit 80 begins to detect the load received by the second reciprocating rod 76 from the workpiece holding portion 14 (the load applied to the workpiece holding portion 14). Immediately after contact, in addition to the load on the second retractable rod 76, disturbances caused by the collision between the second retractable rod 76 and the suction part 22 are detected by the load detection unit 80.

[0056] From time t1 onward, the forward / backward drive unit 18 (second forward / backward rod 76) continues to apply force to the suction unit 22, causing the suction unit 22 to continue descending. While the suction unit 22 continues to descend, the voltage applied to the voice coil motor 60 is adjusted so that the value detected by the load detection unit 80 follows the target load. Then, at the points indicated by "a2" and "b2" in the graph, the descent of the second forward / backward rod 76 stops, and consequently, the descent of the suction unit 22 also stops. In one example, at the retrieval stop position SP, the forward / backward drive unit 18 operates so that the suction unit 22 stops at a position where the main surface Wb of the workpiece W held by the suction unit 22 contacts the housing portion of the housing member that houses the retrieved workpiece W, or just before contact.

[0057] After the second retractable rod 76 and the suction part 22 remain stationary for a predetermined period of time, the lifting section including the second retractable rod 76 begins to rise at the points indicated by "a3" and "b3" in the graph, and the suction part 22 also begins to rise accordingly. During the period immediately after the second retractable rod 76 and the suction part 22 come into contact, and before the lifting section including the second retractable rod 76 and the suction part 22 begin to rise, the load applied to the workpiece holding section 14 (the reaction force received from the suction part 22) is maintained at a substantially constant level by the voice coil motor 60. The fact that the load applied to the workpiece holding section 14 is substantially constant means that the load acting from the second retractable rod 76 on the suction part 22 is also limited to a certain range.

[0058] As the upward movement of the lifting section, including the second reciprocating rod 76, continues, at time t2, the lower end of the second reciprocating rod 76 separates from the upper end of the suction section 22. This releases the force exerted by the second reciprocating rod 76 on the suction section 22. As a result, at the point indicated by "b4" in the graph, the upward movement of the suction section 22 ends (the suction section 22 returns to its height position before the descent). Subsequently, at the point indicated by "a4" in the graph, the drive of the drive motor 54 to the lifting section, including the second reciprocating rod 76, ends, and the upward movement of the lifting section, including the second reciprocating rod 76, ends (the lifting section of the second reciprocating rod 76 returns to its height position before the descent).

[0059] The controller 100 may detect the occurrence of an abnormality from the value detected by the load detection unit 80 while the suction unit 22 is moving back and forth by the forward / backward drive unit 18. Here, the method for detecting the occurrence of an abnormality by the controller 100 is illustrated using the operation in which the suction unit 22, which holds the workpiece W, moves back and forth by the forward / backward drive unit 18 at the retrieval stop position SP as an example. In the forward / backward operation, it is assumed that the suction unit 22 is lowered until it stops just before the main surface Wb of the workpiece W held by the suction unit 22 comes into contact with the storage unit. Figure 5(a) illustrates the operation under normal conditions, and Figure 5(b) illustrates the operation under abnormal conditions.

[0060] In the normal operation shown in Figure 5(a), for example, the load value detected by the load detection unit 80 changes over time as illustrated in Figure 4. In the abnormal operation shown in Figure 5(b), as indicated by the part labeled "A", the voice coil motor 60 does not operate normally, and the stator 62 and the movable part 64 collide. Because there is a problem with the voice coil motor 60, the lifting section including the second reciprocating rod 76 descends without the load being limited by the voice coil motor 60. As a result, the suction section 22 descends more than in normal operation, and the workpiece W held by the suction section 22 collides with the housing section. Due to this collision, or if an excessive load is applied to the workpiece W after the collision, cracks or other abnormalities may occur in the workpiece W.

[0061] In the abnormal operation shown in Figure 5(b), a reaction force corresponding to the impact of the workpiece W, or the load applied to the workpiece W after the impact, acts on the suction part 22, and this reaction force is also transmitted to the second reciprocating rod 76. As a result, the load detection unit 80 detects an abnormal load value that differs from that of normal operation. For example, the controller 100 determines that an abnormality has occurred in the lifting and lowering part (mechanism part) of the reciprocating drive unit 18 when the detected value by the load detection unit 80 exceeds a predetermined set load.

[0062] As explained using Figure 4, the value detected by the load detection unit 80 includes disturbances due to the contact between the second reciprocating rod 76 and the suction part 22. On the other hand, the position of the second reciprocating rod 76 in the Z-axis direction correlates with the driving force from the drive motor 54 (in other words, the rotational position of the drive motor 54). Therefore, the controller 100 may determine that an abnormality has occurred in the lifting and lowering portion (mechanical part) of the reciprocating drive unit 18 based on the detection result from the position detector 54a of the drive motor 54 and the value detected by the load detection unit 80. Specifically, the controller 100 may exclude the time period in which contact between the second reciprocating rod 76 and the suction part 22 is assumed to have started from the detection result from the position detector 54a, and then determine whether or not an abnormality has occurred in the lifting and lowering portion based on the comparison result between the value detected by the load detection unit 80 and the set load.

[0063] The controller 100 may set (change) a threshold for determining whether or not an abnormality has occurred in the lifting portion of the reciprocating drive unit 18, depending on the individual suction unit 22 located at the stop position SP (hereinafter referred to as "target stop position SP") where the reciprocating drive unit 18 and load detection unit 80 of interest are provided. There are also individual differences in the spring 26 that applies a reaction force to the suction unit 22. Therefore, the reaction force that the second reciprocating rod 76 receives from the suction unit 22 after the second reciprocating rod 76 comes into contact with the suction unit 22 may vary depending on the individual suction unit 22 and spring 26.

[0064] From the perspective of the individual differences described above, when determining an abnormality in load by comparing the load detected by the load detection unit 80 with a threshold value, if the same threshold is used for the determination, there is a possibility that an acceptable load value may be judged as abnormal, and an unacceptable load value may be judged as not abnormal. This possibility is particularly high when managing loads at small values. The controller 100 may identify individual suction units 22 placed at the target stop position SP based on the detection result of the rotation position of the support unit 12 obtained from the angle detection unit 90. The controller 100 may then use the threshold value corresponding to the identified suction unit 22 as the set load. The controller 100 may have threshold values ​​set for each of the multiple suction units 22 stored in advance.

[0065] The controller 100 may stop the operation of the entire parts processing device 1 if it detects an abnormality from the load detected by the load detection unit 80. After the operation of the entire parts processing device 1 has stopped, the cause of the abnormality may be investigated and corrected by an operator or other person. The controller 100 may resume processing by the parts processing device 1 after receiving a user instruction from an operator or other person indicating that the parts processing device 1 should be restarted.

[0066] [Differentiation] In the example described above, the controller 100 performs closed-loop control based on the value detected by the load detection unit 80. Alternatively, the controller 100 may cause the reciprocating drive unit 18 to move the workpiece holding unit 14 forward and backward according to a preset control procedure. Specifically, the controller 100 may continuously apply a predetermined constant voltage value to the voice coil motor 60 during the period in which the reciprocating drive unit 18 is performing the operation of moving the workpiece holding unit 14 forward and backward. While performing the control of applying a constant voltage value to the voice coil motor 60, the controller 100 may also determine whether or not an abnormality has occurred by comparing the detected load value with the set load.

[0067] In the example described above, the reciprocating drive unit 18 moves the workpiece holding unit 14 (suction unit 22) back and forth in the Z-axis direction along the central axis Ax. However, the direction in which the reciprocating drive unit 18 moves the workpiece holding unit 14 back and forth is not limited to the direction along the central axis Ax. The reciprocating drive unit 18 may be configured to move the workpiece holding unit 14 back and forth along the radial direction of a circle centered on the central axis Ax. In this case, the central axis Ax may be a vertical axis, a horizontal axis, or an axis inclined in both the vertical and horizontal directions.

[0068] Here, with reference to Figures 6 to 8, an example of a case in which the reciprocating drive unit moves the workpiece holding unit back and forth along the radial direction will be described in detail. The parts processing apparatus 1 shown in Figure 6 is equipped with a rotary transport unit 110 instead of a rotary transport unit 10. The rotary transport unit 110 has a support unit 112, a plurality of workpiece holding units 114, a rotary drive unit 116, one or more reciprocating drive units 118, and an angle detection unit 190. The support unit 112, workpiece holding units 114, rotary drive unit 116, reciprocating drive unit 118, and angle detection unit 190 correspond to the support unit 12, workpiece holding units 14, rotary drive unit 16, reciprocating drive unit 18, and angle detection unit 90 of the rotary transport unit 10, respectively.

[0069] The support section 112 is configured to support a plurality of workpiece holders 114. The support section 112 supports the plurality of workpiece holders 114 so that each workpiece holder 114 is located in the circular orbit CR1. The support section 112 is provided so as to be rotatable about the central axis Ax1 of the circular orbit CR1. The central axis Ax1 may be a vertical axis, a horizontal axis, or an axis inclined with respect to both the vertical and horizontal directions. In Figures 6 to 8, the direction in which the central axis Ax1 extends is represented by the "Z axis".

[0070] The support portion 112 includes a rotating body 112a and a plurality of protruding portions 112b. The rotating body 112a is provided to rotate around a central axis Ax1. The rotating body 112a is formed in a cylindrical or disc shape, with the central axis Ax1 passing through its center. The plurality of protruding portions 112b extend radially from the outer circumferential surface of the rotating body 112a, away from the central axis Ax1. The plurality of protruding portions 112b are spaced apart from each other in the circumferential direction around the central axis Ax1. The number of the plurality of protruding portions 112b is the same as the number of the plurality of workpiece holding portions 114.

[0071] Multiple workpiece holding sections 114 are arranged at equal intervals along the circumference of a circle centered on the central axis Ax1 and are fixed to multiple protruding sections 112b of the support section 112. Each of the multiple workpiece holding sections 114 is configured to hold a workpiece W and is provided to be able to move back and forth. At least a portion of each workpiece holding section 114 is able to move back and forth in the radial direction of the circle centered on the central axis Ax1. Hereinafter, the radial direction of the circle centered on the central axis Ax1 will be simply referred to as the "radial direction". Furthermore, in the radial direction, the direction approaching the central axis Ax1 will be referred to as "inward," and the direction moving away from the central axis Ax1 will be referred to as "outward."

[0072] The workpiece holding unit 114 may hold the workpiece W in any manner, but for example, it may hold the main surface Wa of the workpiece W by suction. The workpiece holding unit 114 may also hold the main surface Wa of the workpiece W with the main surface Wb facing outwards from the circular orbit CR1.

[0073] In one example, the workpiece holding portion 114 includes a suction portion 122, a fixed base portion 123, a movable base portion 124, and a spring 126, as shown in Figure 7. The suction portion 122 (workpiece holding portion) is configured to suction the main surface Wa of the workpiece W, with the main surface Wb facing outwards from the circular orbit CR1. When the suction portion 122 holds the workpiece W by suction, the main surface Wa faces the central axis Ax1, and the main surface Wb faces outwards from the circular orbit CR1. The suction portion 122 is formed in a rod shape, for example, so as to extend along the radial direction.

[0074] The fixed base portion 123 is the part fixed to the corresponding protruding portion 112b of the support portion 112. The movable base portion 124 is a part that is movable radially relative to the fixed base portion 123. The movable base portion 124 includes a holder portion 124a that holds the suction portion 122. As the movable base portion 124 is displaced relative to the fixed base portion 123, the suction portion 122 moves forward and backward radially. The movement of the suction portion 122 includes moving forward away from the central axis Ax1 and moving backward towards the central axis Ax1.

[0075] The spring 126 resists the forward movement of the suction part 122 (movable base part 124) due to its elasticity. When an outward force is applied to the suction part 122 (movable base part 124), the spring 126 elastically deforms in accordance with the displacement of the suction part 122, and when the outward external force is removed, it elastically returns to its original position before the forward movement. The spring 126 functions as a tension spring. The workpiece holding part 114, like the workpiece holding part 14, may have a valve for switching the vacuum suction by the suction part 122 on and off in response to operation instructions from the controller 100.

[0076] Returning to Figure 6, the rotary drive unit 116 is configured to rotate the support unit 112 around the central axis Ax1 of the circular orbit CR1. The rotary drive unit 116 may be the same type of drive unit as the rotary drive unit 16. The rotation of the support unit 112 by the rotary drive unit 116 causes multiple workpiece holding units 114 to move along the circular orbit CR1. In other words, the rotary drive unit 116 moves multiple workpiece holding units 114 along the circular orbit CR1. As a result, the workpiece W held by the workpiece holding units 114 is transported along the circular orbit CR1.

[0077] The rotary drive unit 116 is controlled by the controller 100 to repeatedly rotate and stop the support unit 112 at an angular pitch between adjacent workpiece holding units 114 (angular pitch around the central axis Ax1). Hereinafter, the multiple positions in which each of the multiple workpiece holding units 114 (more specifically, the multiple suction units 122) is positioned when the rotary drive unit 116 stops the support unit 112 will be referred to as "multiple stopping positions SP1".

[0078] One or more reciprocating drive units 118 are configured to individually move at least a portion of the multiple workpiece holding units 114. The rotary transport unit 110 may have multiple reciprocating drive units 118 as one or more reciprocating drive units 118. Note that in Figure 6, one reciprocating drive unit 118 is shown. Although omitted in Figure 6, etc., the rotary transport unit 110 may have members for fixing the multiple reciprocating drive units 118. The multiple reciprocating drive units 118 are arranged so that they do not rotate together even when the support unit 112 rotates.

[0079] Multiple forward / backward drive units 118 may be provided to correspond to all of the multiple stop positions SP1. A forward / backward drive unit 118 may not be provided at a stop position SP1 where it is not necessary to move the workpiece holding unit 114 forward or backward. In a parts processing apparatus 1 equipped with a rotary transport unit 110, multiple processing units 40 may be provided outside the circular orbit CR1. For the sake of explanation, the forward / backward drive unit 118 will be described below, focusing on one such unit. In Figure 6, etc., the direction (predetermined direction) in which the forward / backward drive unit 118 moves the workpiece holding unit 114 forward or backward is represented by the "X-axis". The X-axis direction is perpendicular to the Z-axis direction.

[0080] The forward / backward drive unit 118 applies an external force to the workpiece holding unit 114 so that the workpiece holding unit 114, which is positioned at the corresponding stop position SP1, moves forward and backward (displaces). As a result, the workpiece holding unit 114 positioned at the corresponding stop position SP1 moves radially outward. Viewed from the Z-axis direction, the forward / backward drive unit 118 may be positioned inside the corresponding stop position SP. The forward / backward drive unit 118 may be positioned inside the suction portion 122 of the workpiece holding unit 14 positioned at the corresponding stop position SP. The forward / backward drive unit 118 moves the workpiece holding units 114 that are sequentially positioned at the corresponding stop position SP radially outward. The stop position SP on which the forward / backward drive unit 118 is positioned is also the position (application position) where the forward / backward drive unit 118 applies force to one of the multiple workpiece holding units 114.

[0081] The angle detection unit 190 is a sensor that detects the rotation angle of the support unit 112. The angle detection unit 190 may have the same configuration and functions as the angle detection unit 90, except for the rotation angle to be detected.

[0082] As shown in Figure 7, the reciprocating drive unit 118 includes a fixed base portion 152, a drive motor 154, a movable base portion 155, a first spring 156, a voice coil motor 160, a first reciprocating rod 172, a holder 173, and a second reciprocating rod 176. The fixed base portion 152, drive motor 154, movable base portion 155, and first spring 156 correspond to the fixed base portion 52, drive motor 54, movable base portion 55, and first spring 56 of the reciprocating drive unit 18, respectively. The voice coil motor 160, first reciprocating rod 172, holder 173, and second reciprocating rod 176 correspond to the voice coil motor 60, first reciprocating rod 72, holder 73, and second reciprocating rod 76 of the reciprocating drive unit 18, respectively.

[0083] The fixed base portion 152 is a base portion that supports the components of the reciprocating drive unit 118 other than the fixed base portion 152. The fixed base portion 152 is fixed in a predetermined position in the parts processing device 1 equipped with a rotary conveying unit 110. The fixed base portion 152 is connected to a member for fixing the reciprocating drive unit 118 so that it does not move even when the support portion 112 rotates. The fixed base portion 152 includes, for example, a first portion extending in the Z-axis direction and a second portion connected to one end of the first portion (the end furthest from the overhang portion 112b) and extending in the X-axis direction.

[0084] The drive motor 154 is a motor that generates driving force. The drive motor 154 may also be a servo motor. When the movable parts (first reciprocating rod 172 and second reciprocating rod 176) in the reciprocating drive unit 118 move and come into contact with the workpiece holding unit 114, an external force acts on the workpiece holding unit 114. The drive motor 154 generates the driving force necessary to move the movable parts (first reciprocating rod 172 and second reciprocating rod 176). In other words, the drive motor 154 drives the movable parts (first reciprocating rod 172 and second reciprocating rod 176).

[0085] The drive motor 154 may include a position detector 154a. The position detector 154a is a sensor that detects the rotational position of the drive motor 154. The position detector 154a is, for example, a rotary encoder. The position detector 154a may output information indicating the detected rotational position to the controller 100. Based on the detection result by the position detector 154a, the position of the movable part (for example, the tip of the movable part) in the X-axis direction can be determined. The drive motor 154 may be provided on the first portion of the fixed base portion 152.

[0086] The movable base portion 155 is a base portion that is movable relative to the fixed base portion 152. The movable base portion 155 is provided so as to be movable (displaceable) along the X-axis direction. At least a part of the movable base portion 155 is positioned in the Z-axis direction between the overhang portion 112b of the support portion 112 and the second portion of the fixed base portion 152. The movable base portion 155 includes, for example, a first portion extending in the Z-axis direction and a second portion connected to one end of the first portion (the end furthest from the overhang portion 112b) and extending in the X-axis direction. In one example, the second portion of the movable base portion 155 is movably connected to the second portion of the fixed base portion 152 along the X-axis direction.

[0087] The first spring 156 is provided between the first portion of the movable base portion 155 and the first portion of the fixed base portion 152. The first spring 156 resists the displacement (forward movement) of the movable base portion 155 due to its elasticity. When an outward external force is applied to the movable base portion 155, the first spring 156 elastically deforms in accordance with the displacement of the movable base portion 155, and when the outward external force is removed, it elastically returns to its original position before the displacement. The first spring 156 functions as a tension spring. The inward force applied to the movable base portion 155 by the first spring 156 is denoted as "force F11".

[0088] The voice coil motor 160 limits the load applied to the workpiece holding section 114. The voice coil motor 160 has a function to limit the force acting on the workpiece holding section 114 by the forward / backward drive section 118. By continuously applying a predetermined voltage (or a voltage within a predetermined range) to the voice coil motor 160, the load applied to the workpiece holding section 114 is limited to a load corresponding to the predetermined voltage (or a voltage within a predetermined range). The value of the voltage applied to the voice coil motor 160 may be predetermined according to the value to which the load applied to the workpiece holding section 114 is to be limited.

[0089] The voice coil motor 160 may be of the same type as the voice coil motor 60 described above. The voice coil motor 160 includes a stator 162 and a movable element 164. The stator 162 and the movable element 164 correspond to the stator 62 and the movable element 64 of the voice coil motor 60, respectively. The stator 162 and the movable element 164 are aligned along the X-axis. In this case, when viewed from the X-axis direction, at least a portion of the stator 162 overlaps at least a portion of the movable element 164.

[0090] The stator 162 is connected to the first portion of the movable base 155. Therefore, when the movable base 155 is driven by the drive motor 154, the entire voice coil motor 160 is displaced (moves forward). In the voice coil motor 160, an inward tensile force is applied to the movable element 164 when voltage is applied (current is supplied). The inward force generated in the voice coil motor 160 is denoted as "force Fv1".

[0091] The first retractable rod 172 is formed in a rod shape so as to extend along the X-axis. One inner end of the first retractable rod 172 is connected to the movable element 164 of the voice coil motor 160. The holder 173 is the part that supports the first retractable rod 172. The holder 173 may also support the outer end of the first retractable rod 172. The holder 173 may be formed to extend along the Z-axis from the part that supports the first retractable rod 172.

[0092] The second spring 174 (spring) is positioned between the portion of the reciprocating drive unit 118 connected to the stator 162 and the portion connected to the movable part 164. The second spring 174 is configured to generate a force opposite to the force generated by the voice coil motor 160. In one example, the movable base portion 155 includes a connecting portion 155a extending outward from the outer end face of the first portion along the Z-axis direction. The second spring 174 is provided between the connecting portion 155a of the movable base portion 155 and the holder 173. Due to its elasticity, the second spring 174 applies an outward force to the holder 173. The second spring 174 functions as a compression spring. The outward force applied by the second spring 174 is denoted as "force F21".

[0093] The second retractable rod 176 is formed in a rod shape so as to extend along the X-axis direction. The inner end of the second retractable rod 176 is connected to the holder 173, and the second retractable rod 176 is supported by the holder 173. The movable base portion 124 of the workpiece holding portion 114 described above includes a contact portion 124b that the tip of the second retractable rod 176 can contact. When observed from the outside in the X-axis direction, the contact portion 124b of the workpiece holding portion 114, which is positioned at the stop position SP1 corresponding to the retractable drive portion 118, overlaps with the tip of the second retractable rod 176. The second retractable rod 176 is positioned so that its tip can contact the contact portion 124b of the workpiece holding portion 114.

[0094] In the forward / backward drive unit 118 illustrated above, the movable part connected to the movable element 164 of the voice coil motor 160 is composed of a first forward / backward rod 172, a holder 173, and a second forward / backward rod 176. A force Fv1 from the voice coil motor 160 is applied inward to this movable part, and a force F21 from the second spring 174 is applied outward.

[0095] The forward / backward drive unit 118, illustrated in Figure 7, is in a neutral state where no external force is applied to the suction part 122 of the workpiece holding unit 114. In the neutral state, voltage is applied to the voice coil motor 160. In the neutral state, the forces Fv1 and F21 are balanced.

[0096] Figure 8 illustrates a state in which the reciprocating drive unit 118 applies an external force to the suction part 122 (hereinafter referred to as the "driven state"). In the driven state, an outward force F01 is applied to the movable base part 155 by the drive motor 154. While balancing forces Fv1 and F21, the application of force F01 causes the movable parts, including the first reciprocating rod 172 and the second reciprocating rod 176, to move outward (advance), and the tip of the second reciprocating rod 176 comes into contact with the contact part 124b connected to the suction part 122. Then, overcoming the inward force from the spring 126, the movable parts, including the first reciprocating rod 172 and the second reciprocating rod 176, move the suction part 122 outward. Figure 8 illustrates how an outward force Fd1 is applied from the tip of the second reciprocating rod 176 to the contact portion 124b, generating a force Fr1 representing the reaction force of the spring 126 in response to that force Fd1. By balancing the forces Fv1 and F21, that is, by providing the second spring 174, position control becomes possible when driven by the drive motor 154.

[0097] The parts processing apparatus 1, which is equipped with a rotary conveying unit 110, is equipped with a load detection unit 180 instead of a load detection unit 80. The load detection unit 180 may have the same configuration and function as the load detection unit 80, except that it is provided on the reciprocating drive unit 118. When the reciprocating drive unit 118 applies force to the workpiece holding unit 114, it receives a reaction force corresponding to that force. The load detection unit 180 can detect the reaction force received from the workpiece holding unit 114 (the load received by the second reciprocating rod 176 from the workpiece holding unit 114).

[0098] The load detection unit 180 may be provided in the portion of the reciprocating drive unit 118 connected to the movable element 164 of the voice coil motor 160. In the example shown in Figure 7, the portion of the reciprocating drive unit 118 connected to the movable element 164 consists of the first reciprocating rod 172, the holder 173, and the second reciprocating rod 176. For example, the load detection unit 180 is provided on the second reciprocating rod 176. In one example, the load detection unit 180 is provided near the inner end of the second reciprocating rod 176.

[0099] The controller 100 may perform the same control as when the rotary conveying unit 10 and load detection unit 80 are provided, even when the rotary conveying unit 110 and load detection unit 180 are provided.

[0100] In cases where a rotary transport unit 110 and a load detection unit 180 are provided, the processing unit 40, which is positioned so that the forward / backward drive unit 18 moves the workpiece holding unit 114 forward and backward, as shown in Figures 9(a) and 9(b), may be another rotary transport unit 110. With respect to the rotary transport unit 110 of interest, another rotary transport unit 110 that functions as a processing unit 40 will be denoted as "rotary transport unit 110A".

[0101] As illustrated in Figure 9(a), the central axis Ax1 in the rotary conveying unit 110 and the central axis Ax1 in the rotary conveying unit 110A may be parallel to each other. As illustrated in Figure 9(b), the central axis Ax1 in the rotary conveying unit 110 and the central axis Ax1 in the rotary conveying unit 110A may intersect (for example, orthogonal). In this disclosure, intersection also includes a relationship where there is no intersection point but the positions are twisted (so-called three-dimensional intersection). Although not shown in Figures 9(a) and 9(b), a forward / backward drive unit 118 may also be provided in the rotary conveying unit 110A. In the example shown in Figure 9(a) or Figure 9(b), one or more additional rotary conveying units 110 may be provided separately from the rotary conveying unit 110 and the rotary conveying unit 110A.

[0102] In the parts processing apparatus 1, a single workpiece holding unit 14,114 may be provided instead of multiple workpiece holding units 14,114. In this case, the parts processing apparatus 1 may move the workpiece holding unit 14,114 along a movement path different from a circular trajectory, and then move the workpiece holding unit 14,114 forward and backward at any point along the movement path using the forward and backward drive units 18,118. In the parts processing apparatus 1, a rotary transport unit 10 and a rotary transport unit 110 may be combined. In one of the various examples described above, at least some of the matters described in the other examples may be combined.

[0103] [Summary of this disclosure] This disclosure includes the following components [1] to [5]:

[0104] [1] A parts processing device (1) that performs a predetermined process on a workpiece (W), comprising: a workpiece holding part (14, 22, 114, 122) that holds the workpiece (W) and is movable forward and backward; a forward and backward drive unit (18, 118) that applies an external force to the workpiece holding part (14, 22, 114, 122) so that the workpiece holding part (14, 22, 114, 122) moves forward and backward; and a load detection unit (80, 180) provided on the forward and backward drive unit (18, 118) that detects the load applied to the workpiece holding part (14, 22, 114, 122), wherein the forward and backward drive unit (18, 118) comprises a drive motor (54, 154) that generates a driving force and a voice coil motor (60, 160) that limits the load applied to the workpiece holding part (14, 22, 114, 122).

[0105] In this parts processing apparatus (1), the load applied to the workpiece holding section (14, 22, 114, 122) is limited by the voice coil motor (60, 160). As a result, the load applied to the workpiece (W) via the workpiece holding section (14, 22, 114, 122) is also limited, reducing the possibility of abnormal loads being applied to the workpiece (W). Conventionally, in parts processing apparatuses equipped with such voice coil motors, even if a problem occurs in the mechanism including the voice coil motor and an abnormal load is applied to the workpiece holding section that holds the workpiece, there is no means to detect the load itself, so the abnormality may not be detected. In contrast, in the above parts processing apparatus (1), even if an abnormal load is applied to the workpiece holding section (14, 22, 114, 122) that holds the workpiece (W) due to a problem in the mechanism of the forward / backward drive section (18, 180), abnormalities that could not be detected conventionally can be detected by monitoring the detected value of the load detection section (80, 180). Therefore, it is useful for more accurately detecting the occurrence of trouble in the mechanical parts, including the voice coil motor (60, 160). For example, by more accurately detecting the occurrence of trouble, the trouble can be recognized early and the operation of the parts processing device (1) can be stopped. This prevents the processing of multiple workpieces (W) from being repeated while the troubled state continues, and avoids discarding these multiple workpieces (W).

[0106] [2] The parts processing apparatus (1) described in [1] above, wherein the voice coil motor (60, 160) includes a stator (62, 162) and a movable element (64, 164), and the load detection unit (80, 180) is provided in the portion of the reciprocating drive unit (18, 118) connected to the movable element (64, 164).

[0107] In a voice coil motor (60,160), the stator (62,162) and the movable element (64,164) are physically separated. If a load detection unit is installed in the part connected to the stator (62,162) or on the stator (62,162), the reaction force received from the workpiece holding part (14,22,114,122) may not be accurately reflected in the detected load value. In contrast, in the parts processing device (1) described in [2] above, the load detection unit (80,180) is provided in the part connected to the movable element (64,164), so the load applied to the workpiece holding part (14,22,114,122) can be detected with greater accuracy. This is useful for more accurate control of the load applied to the workpiece (W).

[0108] [3] The voice coil motor (60, 160) includes a stator (62, 162) and a movable element (64, 164), and the reciprocating drive unit (18, 118) is configured to move the workpiece holding part (14, 22, 114, 122) back and forth along a predetermined direction (Z axis, X axis), and the stator (62, 162) and the movable element (64, 164) are aligned along the above predetermined direction (Z axis, X axis), and the reciprocating drive unit (18, 118) is a parts processing apparatus (1) according to [1] or [2] above, further comprising a spring (74, 174) positioned between a portion connected to a stator (62, 162) and a portion connected to a movable element (64, 164), configured to generate a force (F2, F21) in the opposite direction to the force (Fv, Fv1) generated by a voice coil motor (60, 160).

[0109] In this case, the forward / backward drive unit (18, 118) can drive the workpiece holding unit (14, 22, 114, 122) by the drive motor (54, 154) while balancing the force (Fv, Fv1) generated by the voice coil motor (60, 160) and the force (F2, F21) generated by the spring (74, 174). As a result, position control can be performed when driving by the drive motor (54, 154).

[0110] [4] A parts processing apparatus (1) according to any one of [1] to [3] above, further comprising: a plurality of workpiece holding parts (14, 22, 114, 122) including workpiece holding parts (14, 22, 114, 122); and support parts (12, 122) that support the plurality of workpiece holding parts (14, 22, 114, 122) so as to be located in a circular orbit (CR) passing through an operating position (SP, SP1) where a reciprocating drive unit (18, 118) applies force to any of the plurality of workpiece holding parts (14, 22, 114, 122).

[0111] In this case, the same forward / backward drive unit (18, 118) can be used to perform forward / backward movements between one workpiece holding unit (14, 22, 114, 122) and another workpiece holding unit (14, 22, 114, 122). Therefore, it is useful for simplifying the parts processing device (1).

[0112] [5] The parts processing apparatus (1) described in [4] above, further comprising a rotary drive unit (16, 116) for moving a plurality of workpiece holding units (14, 22, 114, 122) along a circular orbit (CR, CR1), and an angle detection unit (90, 190) for detecting the rotation angle of the support unit (12, 112).

[0113] In this case, it is possible to detect abnormal loads with greater accuracy based on the values ​​detected by the load detection unit (80, 180). Furthermore, adopting the above configuration is even more beneficial when it is necessary to more strictly control the load applied to the workpiece (W). For example, as described above, a difference in reaction force may occur between individual workpiece holding units (22, 122) while the reciprocating drive unit (18, 118) is moving the workpiece holding unit (22, 122) back and forth. This difference in reaction force is then reflected in the values ​​detected by the load detection unit (80, 180). In contrast, the parts inspection device (1) described in [4] above can identify which workpiece holding unit (22, 122) is positioned at the target operating position (SP, SP1) based on the detection results from the angle detection unit (90, 190). Therefore, by using the detected values ​​from the load detection unit (80, 180) to determine abnormalities under conditions corresponding to the identified workpiece holding unit (22, 122), the possibility of misjudgment can be reduced.

[0114] [6] The drive motor (54, 154) is a component processing device (1) according to any one of [1] to [5] above, including a position detector (54a, 154a).

[0115] As described above, when the reciprocating drive unit (18, 118) and the workpiece holding unit (14, 22, 114, 122) begin to make contact, the values ​​detected by the load detection unit (80, 180) include disturbances in the time period immediately after contact. On the other hand, the position of the reciprocating mechanism (movable part) of the reciprocating drive unit (18, 118) correlates with the rotational position of the drive motor (54, 154). Therefore, by excluding the time period in which disturbances are assumed to occur due to the start of contact between the reciprocating drive unit (18, 118) and the workpiece holding unit (14, 22, 114, 122) from the detection results by the position detectors (54a, 154a), it is possible to monitor the values ​​detected by the load detection unit (80, 180) and determine whether or not an abnormality has occurred in the above mechanism. This reduces the possibility of misjudgment. [Explanation of symbols]

[0116] 1...Parts processing unit, 10,110...Rotating transport unit, 12,112...Support unit, 14,114...Workpiece holding unit, 22,122...Suction unit, 16,116...Rotating drive unit, 90,190...Angle detection unit, 18,118...Forward / backward drive unit, 54,154...Drive motor, 54a,154a...Position detector, 60,160...Voice coil motor, 62,162...Stator, 64,164...Movement unit, 72,172...First forward / backward rod, 76,176...Second forward / backward rod, 80,180...Load detection unit.

Claims

1. A parts processing device that performs a predetermined process on a workpiece, A workpiece holding unit that holds the workpiece and is movable forward and backward, A reciprocating drive unit that applies external force to the workpiece holding unit so that the workpiece holding unit moves forward and backward, A load detection unit is provided in the forward / backward drive unit and detects the load applied to the workpiece holding unit, Equipped with, The aforementioned reciprocating drive unit is A drive motor that generates driving force, The system includes a voice coil motor that limits the load applied to the workpiece holding portion, Parts processing unit.

2. The voice coil motor includes a stator and a movable element. The load detection unit is provided in the portion of the forward / backward drive unit that is connected to the movable element. The parts processing apparatus according to claim 1.

3. The voice coil motor includes a stator and a movable element. The aforementioned reciprocating drive unit is configured to move the workpiece holding unit back and forth along a predetermined direction. The stator and the movable element are arranged along the predetermined direction, The forward / backward drive unit further includes a spring positioned between the portion connected to the stator and the portion connected to the movable element, which is configured to generate a force opposite to the force generated by the voice coil motor. The parts processing apparatus according to claim 1.

4. A plurality of workpiece holding parts, including the aforementioned workpiece holding part, The system further comprises a support portion that supports the plurality of workpiece holding portions, such that it is positioned in a circular orbit that passes through the position where the forward / backward drive unit applies force to any of the plurality of workpiece holding portions. A parts processing apparatus according to any one of claims 1 to 3.

5. A rotational drive unit that moves the plurality of workpiece holding units along the circular orbit, The system further includes an angle detection unit for detecting the rotation angle of the support portion. The parts processing apparatus according to claim 4.

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