Laminated temperature-controlled pre-firing apparatus

Abstract

The present invention provides a laminated temperature-controlled pre-firing apparatus that can uniformly dissipate heat from pre-firing plates. [Solution] The hollow laminate is mounted on a fixed frame and has a first fluid chamber, the hollow laminate is suitable for supporting a pre-baked plate, and the fluid supply device is suitable for supplying temperature-controlled fluid to the first fluid chamber of the hollow laminate.

Description

Technical Field

[0001] The present invention relates to a laminated temperature control pre-firing device, and more particularly to a laminated temperature control pre-firing device capable of uniformly dissipating heat from a pre-firing plate.

Background Art

[0002] Currently, after electronic components are manufactured, reliability tests such as pre-firing tests (pre-burn-in tests) may be necessary to eliminate defective products and ensure product quality. In the operation of pre-firing tests, they are usually carried out via a pre-firing device (pre-burning machine). In addition, in order to perform a pre-firing test with a high wattage, since it is necessary to control the pre-firing temperature within a certain temperature range, the pre-firing device is also equipped with a heat dissipation function to assist in temperature control.

Summary of the Invention

Problems to be Solved by the Invention

[0003] However, the heat dissipation of the current pre-firing device is generally only applied to the electronic components supported by the socket. In this way, the pre-firing plate cannot uniformly release heat, and as a result, the pre-firing plate and its circuit are easily damaged, and there is a problem that the functional test of the electronic components becomes impossible.

Means for Solving the Problems

[0004] In view of such problems, the present invention has the following configuration. That is, in a laminated temperature control pre-firing device including a fixed frame, a hollow laminate, and a fluid supply device, the hollow laminate is provided on the fixed frame and includes a first fluid chamber, and the hollow laminate is suitable for supporting a pre-firing plate. the fluid supply device is suitable for supplying a temperature control fluid to the first fluid chamber of the hollow laminate. The apparatus further comprises a bottom plate and at least one heat-conducting block, the at least one of which is provided between the pre-fired plate and the bottom plate, and the bottom plate is in contact with the hollow laminate. Furthermore, it comprises at least one heat-conducting block, the at least one of which is provided on the bottom surface of the pre-fired plate and in contact with the hollow laminate. Furthermore, it is equipped with a negative pressure laminate, an exhaust channel, and an exhaust device. The negative pressure laminate is provided below the hollow laminate and also includes a bottom surface and a negative pressure channel. At least one air inlet is provided in the bottom surface, which also communicates with the negative pressure channel, the negative pressure channel communicates with the exhaust channel, and the exhaust device is suitable for extracting gas from the exhaust channel.

[0005] Furthermore, the system comprises a controller and at least one temperature sensor, the at least one of which is provided on the hollow laminate and also detects the temperature of at least one pre-fired component of the pre-fired plate supported by the hollow laminate. The controller controls the temperature of the temperature-controlled fluid supplied by the fluid supply device based on the detected temperature of at least one of the pre-fired components of the pre-fired plate.

[0006] Furthermore, it is equipped with a pre-firing furnace body and a temperature control plate. The fixed frame, the hollow laminate, and the pre-firing plate are housed within the pre-firing furnace body, the temperature control plate is provided on one side of the pre-firing furnace body and includes a second fluid chamber, the second fluid chamber communicating with the first fluid chamber and the fluid supply device.

[0007] Furthermore, it is equipped with an exhaust channel and an exhaust device. The exhaust channel and the exhaust device are provided on the temperature control plate, and the exhaust device is suitable for extracting gas from the pre-firing furnace body, which flows through the exhaust channel and is then discharged into the pre-firing furnace body.

[0008] Furthermore, the hollow laminate is equipped with a fluid connector, and the second fluid chamber communicates with the first fluid chamber via the fluid connector.

[0009] Furthermore, in a laminated temperature-controlled pre-firing apparatus comprising a fixed frame, a negative pressure laminate, an exhaust channel, and an exhaust device, The negative pressure laminate is provided on the fixed frame and is suitable for supporting the pre-baking plate, and the negative pressure laminate comprises a negative pressure channel, a corresponding top surface, and a bottom surface, the top surface facing the pre-baking plate, at least one first air inlet is provided on the bottom surface, and at least one second air inlet is provided on the top surface, and at least one of the first air inlets and at least one of the second air inlets communicate with the negative pressure channel, The exhaust channel communicates with the negative pressure channel. The exhaust device is suitable for extracting gas from the exhaust channel.

[0010] Furthermore, at least one of the first air inlets corresponds to at least one of the second air inlets.

[0011] The apparatus further comprises a bottom plate and at least one heat-conducting block, the at least one of which is provided between the pre-baked plate and the bottom plate, the bottom plate in contact with the upper surface of the negative pressure laminate and opening at least one third air inlet, the at least one of which communicates with the negative pressure channel.

[0012] Furthermore, at least one of the first air inlets, at least one of the second air inlets, and at least one of the third air inlets correspond to each other.

[0013] Furthermore, it includes at least one heat-conducting block, the at least one of which is provided between the pre-fired plate and the negative-pressure laminate. [Effects of the Invention]

[0014] As described above, according to some embodiments of the present invention, the temperature of the pre-fired plate can be uniformly controlled to improve the uniformity of the temperature of the pre-fired plate (for example, uniformly removing the heat accumulated in the pre-fired plate). Thereby, the life of the test circuit used to test the function of the pre-fired component on the pre-fired plate is further improved, and the risk of damage to the pre-fired plate and the test circuit is reduced.

Brief Description of the Drawings

[0015] [Figure 1] It is a schematic diagram of a laminated temperature control pre-firing device according to the first embodiment of the present invention. [Figure 2] It is a cross-sectional view of a laminated temperature control pre-firing device according to the first embodiment of the present invention. [Figure 3] It is a cross-sectional view of a laminated temperature control pre-firing device according to the second embodiment of the present invention. [Figure 4] It is a cross-sectional view of a laminated temperature control pre-firing device according to the third embodiment of the present invention. [Figure 5] It is a cross-sectional view of a laminated temperature control pre-firing device according to the fourth embodiment of the present invention. [Figure 6] It is a block diagram of a laminated temperature control pre-firing device according to some embodiments of the present invention. [Figure 7] It is a partial schematic diagram of a laminated temperature control pre-firing device according to some embodiments of the present invention. [Figure 8] It is an enlarged view of the main part of a laminated temperature control pre-firing device according to some embodiments of the present invention. [Figure 9] It is a cross-sectional view of a laminated temperature control pre-firing device according to the fifth embodiment of the present invention. [Figure 10] It is a cross-sectional view of a laminated temperature control pre-firing device according to the sixth embodiment of the present invention. [Figure 11] It is a cross-sectional view of a laminated temperature control pre-firing device according to the seventh embodiment of the present invention.

Modes for Carrying Out the Invention

[0016] First, an explanation will be given with reference to FIGS. 1 and 2. Here, FIG. 1 is a schematic view of a laminated temperature-controlled pre-firing apparatus according to a first embodiment of the present invention, and FIG. 2 is a cross-sectional view of the laminated temperature-controlled pre-firing apparatus according to the first embodiment of the present invention.

[0017] The laminated temperature-controlled pre-firing apparatus 10 includes a fixed frame 20, a hollow laminate (hollow laminate body) 30, and a fluid supply device 40.

[0018] Here, FIG. 1 shows four fixed frames 20 and four hollow laminates 30, and FIG. 2 shows two fixed frames 20 and two hollow laminates 30. However, the present invention is not limited to this, and the number of fixed frames 20 corresponds to the number of hollow laminates 30 and may be one or more.

[0019] In some embodiments, the fixed frame 20 and the hollow laminate 30 are arranged one-dimensionally, such as being arranged vertically. Hereinafter, a single fixed frame 20, a single hollow laminate 30, and related structures will be described.

[0020] The hollow laminate 30 is disposed on the fixed frame 20 and supported by the fixed frame 20. For example, both sides of the hollow laminate 30 are connected to the fixed frame 20. The hollow laminate 30 is suitable for supporting the pre-firing plate 50.

[0021] For example, slide rail grooves are provided on both sides of the hollow laminate 30 so that both sides of the pre-firing plate 50 can be slid on the hollow laminate 30 and fixed. On the upper surface of the pre-firing plate 50 (hereinafter, also referred to as the first upper surface TF1), at least one pre-firing socket (for example, the first pre-firing socket 51A and the second pre-firing socket 51B) for arranging the pre-firing component 52 is provided.

[0022] The bottom surface of the pre-firing plate 50 (hereinafter referred to as the first bottom surface BF1) is provided with a test circuit 53 for testing the function of the pre-firing component 52 during the pre-firing test. In some embodiments, the pre-firing component 52 is a semiconductor packaging component, and the pre-firing socket is a chip socket.

[0023] The hollow laminate 30 has a first fluid chamber 31. The fluid supply device 40 is suitable for supplying temperature-controlled fluid to the first fluid chamber 31 of the hollow laminate 30.

[0024] In this way, the heat from the pre-fired plate 50 can be uniformly removed or the temperature of the pre-fired plate 50 can be controlled by the first fluid chamber 31 through which the temperature-controlled fluid flows. As a result, the uniformity of the temperature of the pre-fired plate 50 is improved, thereby reducing the risk of damage to the pre-fired plate 50.

[0025] For example, if the temperature-controlled fluid is a high-temperature fluid, the temperature of the pre-fired plate 50 can be raised uniformly, and if the temperature-controlled fluid is a low-temperature fluid, the heat accumulated in the pre-fired plate 50 can be removed uniformly.

[0026] In other words, by providing a temperature-controlled fluid that is either hot or cold, the hollow laminate 30 can be maintained at a high or low temperature, thereby creating a test environment with either high or low temperatures.

[0027] Furthermore, since the test circuit 53 of the pre-fired plate 50 is located on the first bottom surface BF1 of the pre-fired plate 50, the hollow laminate 30 can be placed relatively close to the test circuit 53, and the temperature of the test circuit 53 can be effectively controlled.

[0028] For example, supplying a low-temperature temperature-controlled fluid to the hollow laminate 30 allows the test circuit 53 to be continuously cooled or maintained at a predetermined temperature, reducing the risk of damage to the test circuit 53 and improving its lifespan.

[0029] In some embodiments, the fluid supply device 40 may be a Cooling Distribution Unit (CDU) or Chiller for directly supplying a low-temperature liquid.

[0030] In other embodiments, the fluid supply device 40 may be a cooling gas supply device that directly supplies a low-temperature gas (such as liquid nitrogen) or temperature-controlled air whose temperature can be adjusted via a condenser or heat exchanger.

[0031] In other embodiments, the fluid supply device 40 may also supply a high-temperature gas or liquid, such as a liquid or gas whose temperature has been controlled by a heater, and the heater may be composed of an electric heating element, a resistive heat source, or other equivalent elements that can control the rise in temperature.

[0032] As shown in Figure 2, in some embodiments, the pre-firing plate 50 has a stand 54 positioned around the body of the pre-firing plate 50, and a gap GP exists between the pre-firing plate 50 and the hollow laminate 30.

[0033] In this way, the hollow laminate 30 can remove heat from the air in the space formed in the gap GP by air convection, and indirectly lower the temperature of the pre-fired plate 50.

[0034] In other embodiments, for example, when the hollow laminate 30 is used for heating, the air in the space formed by the gap GP is also heated by air convection, indirectly raising the temperature of the pre-fired plate 50.

[0035] This prevents the hollow laminate 30 from directly transferring heat to the pre-baking plate 50 through thermal conduction, thus avoiding the possibility of damage to the pre-baking plate 50 due to sudden and drastic temperature changes.

[0036] The explanation will be given with reference to Figure 3. Here, Figure 3 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to a second embodiment of the present invention. The difference between the second embodiment and the first embodiment is that in the second embodiment, the stacked temperature-controlled pre-firing apparatus 10 further comprises a bottom plate 60 and at least one heat conduction block (for example, a first heat conduction block 70A, a second heat conduction block 70B, and a third heat conduction block 70C).

[0037] The heat conduction block is placed between the pre-firing plate 50 and the bottom plate 60, and the bottom plate 60 is in direct contact with the hollow laminate 30. In this way, the hollow laminate 30 can effectively transfer thermal energy to the pre-firing plate 50 via the bottom plate 60 and the heat conduction block by means of heat conduction, and the temperature of the pre-firing plate 50 can be effectively controlled.

[0038] Furthermore, when removing the pre-firing plate 50 from the stacked temperature-controlled pre-firing apparatus 10, or when placing the pre-firing plate 50 into the stacked temperature-controlled pre-firing apparatus 10, the bottom plate 60 can move integrally with the pre-firing plate 50 (removing or placing them together). By isolating the bottom plate 60, when the user is removing or placing the pre-firing plate 50 into or out of the stacked temperature-controlled pre-firing apparatus 10, only the bottom plate 60 can be in contact with, thus preventing the user from directly touching the pre-firing plate 50 and reducing the risk of damaging the pre-firing plate 50 through contact.

[0039] In some embodiments, both ends of some of the heat conduction blocks (e.g., the first heat conduction block 70A and the third heat conduction block 70C) are in contact with the bottom plate 60 and the corresponding areas projected perpendicularly onto the first bottom surface BF1 of the pre-fired plate 50, respectively, by the pre-fired sockets (e.g., the first pre-fired socket 51A and the second pre-fired socket 51B).

[0040] Therefore, the hollow laminate 30 can control the temperature of the pre-fired socket through a direct heat conduction method, using the path with the lowest thermal resistance.

[0041] The ends of the other heat-conducting blocks (for example, the second heat-conducting block 70B) are in contact with the test circuit 53 and the bottom plate 60, respectively.

[0042] In some embodiments, the test circuit 53 may be an electronic component with a high thermal design power (TDP), such as a controller chip or a voltage regulator module (VRM).

[0043] In this way, the hollow laminate 30 can adjust the temperature of the test circuit 53 by direct heat conduction using a heat-conducting block.

[0044] The explanation will be given with reference to Figure 4. Figure 4 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to a third embodiment of the present invention.

[0045] In a third embodiment of the laminated temperature-controlled pre-firing apparatus 10, the apparatus similarly comprises a fixed frame 20, a hollow laminate 30, a fluid supply device 40, and at least one heat conduction block (e.g., a first heat conduction block 70A, a second heat conduction block 70B, and a third heat conduction block 70C), the difference being that the heat conduction block is positioned on the first bottom surface BF1 of the pre-firing plate 50 and is in direct contact with the hollow laminate 30.

[0046] For example, both ends of some of the heat conduction blocks (e.g., the first heat conduction block 70A and the third heat conduction block 70C) are in contact with the hollow laminate 30 and the corresponding areas projected perpendicularly onto the first bottom surface BF1 of the pre-fired plate 50 by the pre-fired sockets (e.g., the first pre-fired socket 51A and the second pre-fired socket 51B), respectively, while both ends of the other heat conduction blocks (e.g., the second heat conduction block 70B) are in contact with the test circuit 53 and the hollow laminate 30, respectively.

[0047] Thus, since the heat conduction block is used solely as a medium for heat conduction between the pre-fired plate 50 and the hollow laminate 30, thermal control is achieved with the lowest possible thermal resistance, further enhancing temperature control of the test circuit 53 and the pre-fired components 52 on the pre-fired socket.

[0048] Next, we will explain with reference to Figure 5. Here, Figure 5 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to the fourth embodiment of the present invention.

[0049] The difference from the first embodiment is that in the fourth embodiment, the laminated temperature-controlled pre-firing apparatus 10 further comprises a negative pressure laminate (negative pressure laminate) 80, an exhaust channel 90, and an exhaust device 100.

[0050] The negative pressure laminate 80 is positioned below the hollow laminate 30 and includes a bottom surface (hereinafter referred to as the second bottom surface BF2) and a negative pressure channel 81.

[0051] The second bottom surface BF2 is provided with at least one air inlet (hereinafter referred to as the first air inlet AI1), which is connected to the negative pressure channel 81.

[0052] In this way, the hot air released by the pre-fired component 52 adjacent to the lower layer of the second bottom surface BF2 (for example, arrow AF1 in Figure 5) is drawn into the negative pressure channel 81 through the first air inlet AI1 above the pre-fired component 52.

[0053] The negative pressure channel 81 is connected to the exhaust channel 90, and the gas drawn into the negative pressure channel 81 is transmitted to the exhaust channel 90 (arrow AF2 in Figure 5); and the exhaust channel 90 can collect the hot air discharged from the negative pressure channel 81 of each layer.

[0054] Furthermore, the exhaust device 100 is positioned within the exhaust channel 90 or in a space where the exhaust channel 90 is connected to the outside air, and is suitable for extracting gas from the exhaust channel 90 and discharging it into the atmosphere.

[0055] In this way, the exhaust system 100 can discharge the hot air released from the pre-fired component 52 by air convection without causing a heat storage effect or thermal crosstalk effect.

[0056] Furthermore, in some embodiments, the negative pressure channel 81 may be composed of a negative pressure laminate 80 and a hollow laminate 30, and by flowing a low-temperature temperature-controlled fluid through the hollow laminate 30, the hot air in the negative pressure channel 81 can be further cooled, thereby lowering the temperature of the gas discharged into the atmosphere.

[0057] The exhaust device 100 is, for example, an exhaust fan, and can exhaust air diagonally upward to avoid affecting other equipment.

[0058] The second embodiment in Figure 3 and the third embodiment in Figure 4 described above can be applied to the fourth embodiment in Figure 5. The correspondence between these two embodiments can be understood by referring to Figures 3 through 5; therefore, no further detailed explanation is provided here.

[0059] Next, we will explain with reference to Figure 6. This is a block diagram of a laminated temperature-controlled pre-firing apparatus 10 according to some embodiments of the present invention.

[0060] In some embodiments, the stacked temperature-controlled pre-firing apparatus 10 further comprises a controller 200 and at least one temperature sensor 300. The controller 200 is electrically connected to the temperature sensor 300 and the fluid supply device 40.

[0061] The temperature sensor 300 is placed on the hollow laminate 30 and can detect the temperature of the pre-fired components 52 of the pre-fired plate 50 supported by the hollow laminate 30.

[0062] The number of temperature sensors 300 corresponds to the number of pre-fired components 52, and each temperature sensor 300 is distributed in a corresponding area projected vertically onto the hollow laminate 30 of the pre-fired socket, detecting the temperature of each pre-fired component 52 supported by the corresponding pre-fired socket.

[0063] In other embodiments, the temperature sensor 300 may be placed at any location within the pre-firing furnace body 400 (see Figure 1, details of which will be described later) or within the exhaust channel 90 (see Figure 5).

[0064] Furthermore, the controller 200 can control the flow rate or temperature of the temperature-controlled fluid supplied by the fluid supply device 40 based on the detected temperature of the pre-fired components 52 of the pre-fired plate 50.

[0065] For example, when the temperature sensor 300 detects that the temperature of the pre-fired component 52 is higher than a first temperature threshold, it sends a cooling signal to the controller 200, and in response to this cooling signal, the controller 200 controls the fluid supply device 40 to lower the temperature of the temperature-controlled fluid being supplied or to increase the flow rate of the temperature-controlled fluid.

[0066] On the other hand, when the temperature sensor 300 detects that the temperature of the pre-fired component 52 is lower than the second temperature threshold, it transmits a temperature rise signal to the controller 200. In response to this temperature rise signal, the controller 200 controls the fluid supply device 40 to increase the temperature of the supplied temperature-controlled fluid or decrease the flow velocity of the temperature-controlled fluid. Here, the first temperature threshold is a temperature higher than the second temperature threshold.

[0067] In this way, the controller 200 can control the temperatures of the pre-fired plate 50 and the pre-fired components 52 via the fluid supply device 40 to a certain temperature range (for example, a temperature interval formed by a first temperature threshold and a second temperature threshold).

[0068] The controller 200 may be, but is not limited to, an arithmetic circuit such as a central processing unit, a microprocessor, an application-specific integrated circuit (ASIC), or a system on a chip (SOC).

[0069] In some embodiments, the controller 200 is also connected to the exhaust system 100, and the controller 200 detects the temperature of the pre-firing components 52 of the pre-firing plate 50, the temperature inside the pre-firing furnace body 400, or the temperature inside the exhaust channel 90, and controls the exhaust volume (i.e., operating speed) of the exhaust system 100.

[0070] For example, when the temperature sensor 300 detects that the temperature of the pre-fired component 52 is higher than a first temperature threshold, a cooling signal is sent to the controller 200, and the controller 200 responds to the cooling signal by controlling the exhaust device 100 to increase its exhaust volume.

[0071] When the temperature sensor 300 detects that the temperature of the pre-fired component 52 is lower than a second temperature threshold, it transmits a temperature rise signal to the controller 200, and the controller 200 responds to this temperature rise signal by controlling the exhaust device 100 to reduce the exhaust volume of the exhaust device 100, so that the temperatures of the pre-fired plate 50 and the pre-fired component 52 can be controlled within a certain temperature range (for example, a temperature range formed by a first temperature threshold and a second temperature threshold).

[0072] Next, we will explain with reference to Figure 7. Here, Figure 7 is a partial schematic diagram of a stacked temperature-controlled pre-firing apparatus 10 according to several embodiments of the present invention.

[0073] In some embodiments, the laminated temperature-controlled pre-firing apparatus 10 further comprises a pre-firing furnace body 400 and a temperature control plate 500. The fixed frame 20, the hollow laminate 30, and the pre-firing plate 50 are housed within the pre-firing furnace body 400.

[0074] The temperature control plate 500 is located on one side of the pre-firing furnace body 400 and has a second fluid chamber 510. The first fluid chamber 31 is connected to the second fluid chamber 510, and the second fluid chamber 510 is connected to the fluid supply device 40. In other words, the first fluid chamber 31, the second fluid chamber 510, and the fluid supply device 40 form a sealed fluid circulation circuit (fluid circulation circuit loop).

[0075] In some embodiments, the second fluid chamber 510 may include a supply circuit (supply loop) 511 and a recovery circuit (recovery loop) 512. The fluid supply device 40 can supply temperature-controlled fluid to the first fluid chamber 31 via the supply circuit 511, and the fluid supply device 40 can recover the temperature-controlled fluid to the first fluid chamber 31 via the recovery circuit 512.

[0076] As a result, the temperature-controlled fluid flowing through the first fluid chamber 31 of each hollow laminate 30 merges with the recovery circuit 512 of the second fluid chamber 510, and then flows to the fluid supply device 40, where an integrated heat exchange process of heating or cooling is performed.

[0077] The fluid supply device 40 then flows the temperature-controlled fluid, which has undergone heat exchange treatment (e.g., raising or lowering its temperature), to the first fluid chamber 31 via the supply circuit 511 of the second fluid chamber 510, thereby continuously controlling the temperature of the pre-fired plate 50. This further enhances the temperature control effect of the pre-fired plate 50.

[0078] As shown in Figure 7, in some embodiments, the exhaust channel 90 and the exhaust device 100 are provided on the temperature control plate 500.

[0079] The exhaust system 100 is suitable for extracting gas from inside the pre-firing furnace body 400, flowing it through the exhaust channel 90, and then discharging it outside the pre-firing furnace body 400.

[0080] Specifically, the exhaust device 100 concentrates the hot air released from each pre-firing component 52 of the pre-firing plate 50, which is supported by each hollow laminate 30, into the exhaust channel 90 by air convection and discharges it uniformly into the atmosphere, thus minimizing the effect of heat accumulation or thermal crosstalk.

[0081] This further enhances the temperature control effect inside the pre-firing plate 50 and the pre-firing furnace body 400.

[0082] Next, we will explain with reference to Figure 8. Here, Figure 8 is an enlarged view of the main parts of a stacked temperature-controlled pre-firing apparatus 10 according to several embodiments of the present invention.

[0083] In some embodiments, the hollow laminate 30 includes a fluid connector 33. The fluid connector 33 includes an intubation 330 and a pair of socket connectors 331, as well as a flow path 333 that passes through the intubation 330 and the socket connectors 331.

[0084] The tube 330 and socket connector 331 can be provided separately on the hollow laminate 30 and the temperature control plate 500. Here, the connection is completed by inserting the tube 330 into the socket connector 331, or inserting the socket connector 331 into the tube 330.

[0085] Therefore, the first fluid chamber 31 (not shown) of the hollow laminate 30 and the second fluid chamber 510 of the temperature control plate 500 can be quickly connected or disconnected via the fluid connector 33.

[0086] Next, we will explain with reference to Figure 9. Here, Figure 9 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to the fifth embodiment of the present invention.

[0087] In the fifth embodiment, the laminated temperature-controlled pre-firing apparatus 10 comprises a fixed frame 20, a negative pressure laminate 80, an exhaust channel 90, and an exhaust device 100.

[0088] The difference is that in the fifth embodiment, the negative pressure laminate 80 is provided on the fixed frame 20 and is suitable for supporting the pre-baked plate 50.

[0089] For example, both sides of the negative pressure laminate 80 are connected to the fixed frame 20, and there are slide rail grooves on both sides of the negative pressure laminate 80, allowing both sides of the pre-baked plate 50 to slide into the negative pressure laminate 80 and be fixed in place.

[0090] The negative pressure laminate 80 comprises a negative pressure channel 81, an opposing upper surface (hereinafter also referred to as the second upper surface TF2), and a bottom surface (hereinafter also referred to as the second bottom surface BF2). The second upper surface TF2 faces the pre-fired plate 50.

[0091] The second bottom surface BF2 is provided with at least one first air inlet AI1, and the second top surface TF2 is provided with at least one second air inlet AI2. The first air inlet AI1 and the second air inlet AI2 are connected to a negative pressure channel 81.

[0092] In this way, due to air convection, the hot air (shown by arrow AF3 in Figure 9) released from the first bottom surface BF1 of the pre-baked plate 50 supported by the negative pressure laminate 80 and its test circuit 53 can be drawn into the negative pressure channel 81 via the second air inlet AI2, and the exhaust device 100 combines the hot air drawn in by the negative pressure channel 81 of each layer via the exhaust channel 90 (as shown by arrow AF2 in Figure 9) and exhausts it into the atmosphere.

[0093] In this way, the effects of heat accumulation or thermal crosstalk on the first bottom surface BF1 of the pre-fired plate 50 and its test circuit 53 can be prevented, and the risk of damage to the pre-fired plate 50 and the test circuit 53 can be reduced.

[0094] Furthermore, due to air convection, hot air released from the pre-fired component 52 adjacent to the lower layer of the second bottom surface BF2 (as shown by arrow AF1 in Figure 9) can be drawn into the negative pressure channel 81 via the first air inlet AI1. The exhaust device 100 then combines the hot air drawn in by the negative pressure channel 81 of each layer through the exhaust channel 90 and exhausts it into the atmosphere, thereby avoiding the effect of heat accumulation or thermal crosstalk caused by the pre-fired plate 50.

[0095] In some embodiments, the first air inlet AI1 corresponds to the second air inlet AI2, so that the negative pressure channel 81 has good air extraction capability. In some embodiments, the positions of the first air inlet AI1 and the second air inlet AI2 may coincide or be offset from each other.

[0096] Next, we will explain with reference to Figure 10. Here, Figure 10 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to the sixth embodiment of the present invention.

[0097] The difference from the fifth embodiment is that in the sixth embodiment, the stacked temperature-controlled pre-firing apparatus 10 further comprises a bottom plate 60 and at least one heat conduction block (for example, a first heat conduction block 70A, a second heat conduction block 70B, and a third heat conduction block 70C).

[0098] The heat conduction block is placed between the pre-fired plate 50 and the bottom plate 60. The heat conduction block is spaced a predetermined distance DP1 from the bottom plate 60 and releases the thermal energy of the pre-fired plate 50 into the air within the predetermined distance DP1 to form hot air. In other embodiments, the heat conduction block may be a heat dissipation fin to promote heat dissipation from the pre-fired plate 50.

[0099] The bottom plate 60 is in contact with the second upper surface TF2 of the negative pressure laminate 80 and has at least one third air inlet AI3. The third air inlet AI3 is connected to the negative pressure channel 81.

[0100] In this way, due to air convection, the first bottom surface BF1 of the pre-baked plate 50 and its test circuit 53, which are supported by the negative pressure laminate 80, are drawn into the negative pressure channel 81 via the third air inlet AI3 and the second air inlet AI2 through the heat conduction block (shown by arrow AF3 in Figure 10). The exhaust device 100 then combines the hot air drawn in by the negative pressure channel 81 of each layer via the exhaust channel 90 (shown by arrow AF2 in Figure 10) and exhausts it into the atmosphere.

[0101] In this way, the effects of heat accumulation or thermal crosstalk generated by the first bottom surface BF1 of the pre-fired plate 50 and its test circuit 53 can be prevented, and the risk of damage to the pre-fired plate 50 and the test circuit 53 can be reduced.

[0102] In some embodiments, the first air inlet AI1, the second air inlet AI2, and the third air inlet AI3 correspond to each other (specifically, the positions of the first air inlet AI1, the second air inlet AI2, and the third air inlet AI3 correspond to each other), and as a result, the negative pressure channel 81 has good air extraction capability.

[0103] In other embodiments, the distribution positions of the first air inlet AI1, the second air inlet AI2, and the third air inlet AI3 may be offset from each other.

[0104] In some embodiments, portions of the heat conduction blocks (e.g., a first heat conduction block 70A and a third heat conduction block 70C) are such that pre-firing sockets (e.g., a first pre-firing socket 51A and a second pre-firing socket 51B) are in contact with corresponding areas projected perpendicularly onto the first bottom surface BF1 of the pre-firing plate 50, and other portions of the heat conduction blocks (e.g., a second heat conduction block 70B) are in contact with the test circuit 53.

[0105] In this way, temperature control of the test circuit 53 and the pre-fired components 52 on the pre-fired socket can be further enhanced.

[0106] Finally, let's refer to Figure 11 for further explanation. Here, Figure 11 is a cross-sectional view of a stacked temperature-controlled pre-firing apparatus 10 according to the seventh embodiment of the present invention.

[0107] In the seventh embodiment of the laminated temperature-controlled pre-firing apparatus 10, a fixed frame 20, a negative pressure laminate 80, an exhaust channel 90, an exhaust device 100, and at least one heat conduction block (for example, a first heat conduction block 70A, a second heat conduction block 70B, and a third heat conduction block 70C) is provided, the difference being that a heat conduction block is provided between the pre-firing plate 50 and the negative pressure laminate 80. The heat conduction block is located at a predetermined distance DP2 from the negative pressure laminate 80 and dissipates the thermal energy of the pre-firing plate 50 into the air within the predetermined distance DP2 to form hot air.

[0108] In other embodiments, the heat conduction block may be a heat dissipation fin to promote heat dissipation from the pre-fired plate 50.

[0109] Due to air convection, hot air is drawn into the negative pressure channel 81 via the second air inlet AI2 (arrow AF3 in Figure 11), and the exhaust device 100 combines the hot air drawn in by the negative pressure channels 81 of each layer via the exhaust channel 90 (arrow AF2 in Figure 11), so that it can be released into the atmosphere without generating a heat storage effect or thermal crosstalk effect.

[0110] As described above, according to some embodiments of the present invention, the temperature of the pre-fired plate can be uniformly controlled, and the uniformity of the temperature of the pre-fired plate (such as uniformly releasing the heat accumulated on the pre-fired plate) is improved, thereby extending the lifespan of the test circuit used to test the function of the pre-fired components on the pre-fired plate and reducing the risk of damage to the pre-fired plate or the test circuit. [Explanation of Symbols]

[0111] 10. Layered temperature-controlled pre-firing apparatus 20 Fixed Frames 30 Hollow Laminate 31 First fluid chamber 33 Fluid Connectors 330 Intubation 331 Socket Connector 333 Channels 40 Fluid supply device 50 Pre-fired plates 51A First pre-fired socket 51B Second pre-fired socket 52 Pre-fired components 53 Test Circuit 54 Stands 60 Bottom plate 70A First heat conduction block 70B Second heat conduction block 70C Third heat conduction block 80 Negative pressure lamination 81 Negative pressure channel 90 exhaust channels 100 Exhaust system 200 controllers 300 temperature sensors 400 Pre-firing furnace body 500 Temperature Control Plate 510 Second fluid chamber 511 Supply circuit 512 Recovery Circuit TF1 First upper surface BF1 First bottom TF2 Second upper surface BF2 Second bottom AI1 First air inlet AI2 Second air inlet AI3 Third Air Inlet AF1, AF2, AF3 arrows GP Gap DP1, DP2 predetermined distance

Claims

1. In a laminated temperature-controlled pre-firing apparatus comprising a fixed frame, a hollow laminate, and a fluid supply device, The hollow laminate is provided on the fixed frame and has a first fluid chamber, and the hollow laminate is suitable for supporting the pre-baked plate. The laminated temperature-controlled pre-firing apparatus is characterized in that the fluid supply device is suitable for supplying a temperature-controlled fluid to the first fluid chamber of the hollow laminate.

2. It further comprises a base plate and at least one heat-conducting block, The laminated temperature-controlled pre-firing apparatus according to claim 1, characterized in that at least one of the heat conduction blocks is provided between the pre-firing plate and the bottom plate, and the bottom plate is in contact with the hollow laminate.

3. Equipped with at least one heat-conducting block, The laminated temperature-controlled pre-firing apparatus according to claim 1, characterized in that at least one of the heat conduction blocks is provided on the bottom surface of the pre-firing plate and is in contact with the hollow laminate.

4. It further comprises a negative pressure laminate, an exhaust channel, and an exhaust device. The negative pressure laminate is provided below the hollow laminate and also includes a bottom surface and a negative pressure channel. The stacked temperature-controlled pre-firing apparatus according to claim 1, characterized in that at least one air inlet is provided in the bottom surface and is in communication with the negative pressure channel, the negative pressure channel is in communication with the exhaust channel, and the exhaust device is suitable for extracting gas from the exhaust channel.

5. The system further comprises a controller and at least one temperature sensor, At least one of the temperature sensors is provided on the hollow laminate and together detects the temperature of at least one pre-fired component of the pre-fired plate supported by the hollow laminate. The laminated temperature-controlled pre-firing apparatus according to claim 1, characterized in that the controller controls the temperature of the temperature-controlled fluid supplied by the fluid supply device based on the detected temperature of at least one of the pre-firing components of the pre-firing plate.

6. It further comprises a pre-firing furnace body and a temperature control plate, The laminated temperature-controlled pre-firing apparatus according to claim 1, wherein the fixed frame, the hollow laminate, and the pre-firing plate are housed in the pre-firing furnace body, the temperature control vertical plate is provided on one side of the pre-firing furnace body and includes a second fluid chamber, the second fluid chamber is in communication with the first fluid chamber and the fluid supply device.

7. It further includes an exhaust channel and an exhaust device, The stacked temperature-controlled pre-firing apparatus according to claim 6, characterized in that the exhaust channel and the exhaust device are provided on the temperature control vertical plate, and the exhaust device is suitable for extracting gas from the pre-firing furnace body, which flows through the exhaust channel and is then discharged to the pre-firing furnace body.

8. The laminated temperature-controlled pre-firing apparatus according to claim 6, characterized in that the hollow laminate is equipped with a fluid connector, and the second fluid chamber communicates with the first fluid chamber via the fluid connector.

9. In a laminated temperature-controlled pre-firing apparatus comprising a fixed frame, a negative pressure laminate, an exhaust channel, and an exhaust device, The negative pressure laminate is provided on the fixed frame and is suitable for supporting the pre-baking plate, and the negative pressure laminate comprises a negative pressure channel, a corresponding upper surface, and a lower surface, the upper surface facing the pre-baking plate, at least one first air inlet provided on the lower surface, at least one second air inlet provided on the upper surface, and at least one of the first air inlets and at least one of the second air inlets communicating with the negative pressure channel. The exhaust channel communicates with the negative pressure channel, A stacked temperature-controlled pre-firing apparatus characterized in that the exhaust device is suitable for extracting gas from the exhaust channel.

10. The laminated temperature-controlled pre-firing apparatus according to claim 9, characterized in that at least one of the first air inlets corresponds to at least one of the second air inlets.

11. It further comprises a base plate and at least one heat-conducting block, The laminated temperature-controlled pre-firing apparatus according to claim 9, characterized in that at least one of the heat conduction blocks is provided between the pre-firing plate and the bottom plate, the bottom plate is in contact with the upper surface of the negative pressure laminate and has at least one third air inlet, and at least one of the third air inlets is in communication with the negative pressure channel.

12. The laminated temperature-controlled pre-firing apparatus according to claim 11, characterized in that at least one of the first air inlets, at least one of the second air inlets, and at least one of the third air inlets correspond to each other.

13. The laminated temperature-controlled pre-firing apparatus according to claim 9, comprising at least one heat conduction block, wherein at least one of the heat conduction blocks is provided between the pre-firing plate and the negative pressure laminate.

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