Chamber and probe

Abstract

Reduce the temperature in the observation window. [Solution] The system comprises a stage 8 for fixing the object to be evaluated 110, a heater 30 for heating the stage 8, airtight containers 10 and 20 for housing the heater 30 and the stage 8, and a first cooling pipe 7 for cooling the side walls of the airtight containers 10 and 20. The airtight containers 10 and 20 each consist of a main body 10 surrounding the heater 30 and the stage 8, and an observation section 20 having an observation window 18 for observing the object to be evaluated 110, with the observation section 20 protruding from the main body 10. The system also has a second cooling pipe 17 for cooling the side wall of the observation section 20.

Claims

1. A stage for fixing the object to be evaluated, A heater for heating the aforementioned stage, An airtight container housing the heater and the stage, The airtight container is further equipped with a first cooling pipe for cooling the side wall of the airtight container, The airtight container comprises a main body that encloses the heater and the stage, and an observation section having an observation window for observing the object to be evaluated. The observation section protrudes from the main body. A chamber characterized by the following features.

2. The observation section is equipped with a second cooling pipe for cooling the side wall. The chamber according to claim 1.

3. The airtight container has a base that supports the heater and the stage, The side wall and the heater are spaced apart. The chamber according to claim 1.

4. A stage for fixing the object to be evaluated, A heater for heating the aforementioned stage, An airtight container housing the heater and the stage, The airtight container is further equipped with a first cooling pipe for cooling the side wall of the airtight container, The airtight container has an observation window for observing the object to be evaluated. A probe characterized by the following.

5. The system further comprises a probe housed within the aforementioned airtight container, The probe comprises a core wire, a metal tube into which the core wire is inserted without contact, and an insulating member that insulates the tip of the core wire and the tip of the metal tube. The insulating member is made of alumina. The probe according to feature 4.

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