Method for extracting feature points, method for setting shipping standards, and information processing system

Abstract

This invention provides a method for efficiently extracting feature points to collect information useful for process improvement and setting shipping standards in both the film manufacturing process and the post-processing process using the film. [Solution] The method for extracting feature points includes the steps of: comparing the first feature point information of the film in the first inspection data S1 of the first manufacturing process with the second feature point information of the film in the second inspection data S2 of the second manufacturing process; and, based on the comparison result, extracting feature points that are present in one of the first and second inspection data but not in the other, or that are judged as defects in one of the inspection data but not in the other.

Description

Technical Field

[0001] The present invention relates to a method for extracting feature points, a method for setting shipment standards, and an information processing system.

Background Art

[0002] Liquid crystal display devices have come to be used in large-screen TVs and large monitors, and accordingly, films used for the display surface of liquid crystal display devices are also required to be wider. For example, films with a width of 2000 mm or more are desired. In addition, in order to anticipate substrate loss (film loss) in advance and reduce transportation costs, the production of long film rolls with a winding length of 1000 m or more, and further 3000 m or more, is required.

[0003] In the post-processing step of manufacturing a product using a film as a substrate, when quality problems such as defects occur, it is necessary to distinguish whether the defect originated during the previous step, that is, during the production of the film, or whether it occurred in the post-processing step. If it cannot be clearly determined that the defect occurred in the post-processing step, improvement in the previous step may be required. When trying to respond to improvement requests, the shipment standards of the previous step become overly strict, resulting in over-specification. Also, although it is not clear how it will affect the post-processing step, in order to prevent quality problems, there are cases where the shipment standards during film production are overly strict in anticipation. Such cases also result in over-specification. Over-specification is not preferable for both the operator of the previous step and the operator of the post-processing step, as it deteriorates the yield and increases costs.

[0004] In Patent Document 1, "In the manufacturing process of a roll-shaped antireflection film consisting of multiple steps, even when a part of the product roll is cut due to the occurrence of an abnormal location between the upstream step and the latest step, a quality monitoring system for performing quality control by selecting defects that occurred in the latest step from the inspection information of the upstream step and the inspection information of the latest step, Inspection machines installed at each stage of the manufacturing process, An inspection information management database that stores and manages inspection information obtained from inspection machines, A production information management database that manages quality information and performance information at each stage of the product roll process, A defect sorting means that sorts defects that occurred in the latest process by correcting the coordinates of the defect detection locations in the latest process and the previous process based on the inspection information management database and the production information management database, A quality monitoring system is disclosed, characterized by comprising: a defect monitoring means that determines defects selected by a defect selection means to be abnormal based on abnormality determination conditions and notifies the system of the abnormality. (Claim 1) [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2013-088247 [Overview of the project] [Problems that the invention aims to solve]

[0006] The technology described in Patent Document 1 detects defects occurring in the latest process, identifies abnormalities, and issues notifications, thus preventing defects from occurring during manufacturing. However, it is insufficient for gathering information to investigate the causes of quality problems and does not lead to the setting of appropriate product standards or process improvements.

[0007] This invention has been made in view of the above circumstances, and aims to efficiently collect information that can be used for process improvement and setting of shipping standards in both the manufacturing process of the film and the post-processing process using the film. [Means for solving the problem]

[0008] The above objectives of the present invention are achieved by the following means.

[0009] (1) A method for extracting feature points from a film, Step (a) to obtain first inspection data in the first manufacturing process for manufacturing the film, (b) A step of acquiring second inspection data in a second manufacturing process which is performed after the first manufacturing process and involves post-processing using the manufactured film, (c) a step of comparing the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, The method includes step (d), which extracts feature points from the first and second inspection data that are present in one inspection data but not in the other, or that are determined to be defects in one inspection data but not in the other, based on the comparison results of step (c) above. Method for extracting feature points.

[0010] (2) A method for extracting feature points from a film, (a) A step of acquiring first inspection data in a first manufacturing process for manufacturing a film or a second manufacturing process for performing post-processing using the manufactured film after the first manufacturing process, (b) A step of acquiring second inspection data at the second manufacturing process, or at an inspection location after a sub-process downstream from the inspection location where the first inspection data was acquired in the second manufacturing process, (c) a step of comparing the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, The method includes step (d), which extracts feature points from the first and second inspection data that are present in one inspection data but not in the other, or that are determined to be defects in one inspection data but not in the other, based on the comparison results of step (c) above. Method for extracting feature points.

[0011] (3) The one inspection data is the first inspection data, and the other inspection data is the second inspection data. The method for extracting feature points according to (1) or (2) above, wherein step (d) extracts first-class feature points that are present in the first inspection data but not present in the second inspection data, or that are determined to be defects in the first inspection data but not determined to be defects in the second inspection data.

[0012] (4) The feature point extraction method described in (3) above, wherein step (d) further extracts Type II feature points that are present in the second inspection data but not present in the first inspection data, or that are determined to be defects in the second inspection data but not determined to be defects in the first inspection data.

[0013] (5) The first inspection data and the second inspection data are images taken of the film. This is inspection data obtained by processing and extracting feature point information. The feature point extraction method according to (3) above, wherein the feature point information includes size information of the feature point and position information on the film.

[0014] (6) The step (e) prior to step (c) further includes aligning the film with the first inspection data and the second inspection data, In step (e) above, (e1) a step of moving the positional information of the feature points of the second inspection data without shifting the relative positions of the first inspection data and the second inspection data, (e2) A step of calculating the distance from each of the multiple feature points in one of the first and second inspection data to the nearest feature point in the other inspection data, A step (e3) which repeats step (e1) and step (e2) such that the distance calculated in step (e2) is minimized, and a method for extracting feature points as described in (3) above, which is executed.

[0015] (7) After the step (e), calculate the distance from each of the plurality of feature points in one of the first and second inspection data to the closest feature point in the other inspection data, and exclude distance values greater than or equal to a predetermined threshold value. Then, based on the sum or average value of the distance values after exclusion, determine whether the process of step (e) is appropriate in step (f). The method for extracting feature points according to (6) above further includes this step (f).

[0016] (8) Before the step (c), further include a step (g) of aligning the position of the film in the first inspection data and the second inspection data. In the step (g), Perform kernel density estimation on a plurality of feature points of the first inspection data and the second inspection data to calculate a probability density function of the feature points, and perform film alignment by comparing the calculated probability density functions. The method for extracting feature points according to (3) above.

[0017] (9) Before the step (c), further include a step (g) of aligning the position of the film in the first inspection data and the second inspection data. In the step (g), Perform kernel density estimation on a plurality of feature points in one of the first inspection data and the second inspection data to calculate a probability density function of the feature points, and perform film alignment by comparing the calculated probability density function with the position information of the feature points in the other inspection data. The method for extracting feature points according to (3) above.

[0018] (10) The post-processing in the second manufacturing process is a coating process for applying a functional layer to the surface of the film manufactured in the first manufacturing process. The method for extracting feature points according to (3) above.

[0019] (11) Before the step (c), The method for extracting feature points according to (3) above, further comprising the step (g) of performing a preprocessing on the first inspection data and the second inspection data to exclude feature points that do not meet predetermined conditions.

[0020] (12) The one inspection data is the second inspection data, and the other inspection data is the first inspection data. The method for extracting feature points according to (1) or (2) above, wherein step (d) extracts a second type feature point that is present in the second inspection data but not present in the first inspection data, or that is determined to be a defect in the second inspection data but not determined to be a defect in the first inspection data.

[0021] (13) The first manufacturing process and the second manufacturing process each include a number of sub-processes, Multiple inspection data are acquired at each of the multiple inspection locations upstream and downstream of at least one of the multiple sub-processes. The method for extracting feature points as described in (2) above, wherein one of the aforementioned plurality of inspection data is used as the first inspection data, and the inspection data at an inspection location downstream of the first inspection data is used as the second inspection data.

[0022] (14) The method for extracting feature points as described in (13) above, further comprising step (h) of accepting the selection of a combination of the first test data and the second test data from among the plurality of test data.

[0023] (15) Based on the first type feature points extracted by the feature point extraction method described in (3) above, A method for setting shipping standards in the first manufacturing process.

[0024] (16) An acquisition unit that acquires first inspection data in a first manufacturing process for manufacturing a film, and second inspection data in a second manufacturing process which is performed after the first manufacturing process and involves post-processing using the manufactured film, A comparison unit that compares the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, Based on the comparison results of the comparison unit, the system includes an extraction unit that extracts feature points from the first and second inspection data that are present in one inspection data set but not in the other inspection data set, or feature points that are determined to be defects in one inspection data set but not in the other inspection data set. Information processing system.

[0025] (17) An acquisition unit that acquires first inspection data in a first manufacturing process for manufacturing a film or a second manufacturing process for performing post-processing using the manufactured film after the first manufacturing process, and second inspection data in the second manufacturing process or at an inspection position downstream of the inspection position from which the first inspection data was acquired in the second manufacturing process, A comparison unit that compares the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, Based on the comparison results of the comparison unit, the system includes an extraction unit that extracts feature points from the first and second inspection data that are present in one inspection data set but not in the other inspection data set, or feature points that are determined to be defects in one inspection data set but not in the other inspection data set. Information processing system.

[0026] (18) The information processing system according to (16) or (17) above, wherein the extraction unit extracts first-class feature points that are present in the first inspection data but not present in the second inspection data, or that are determined to be defects in the first inspection data but not determined to be defects in the second inspection data. [Effects of the Invention]

[0027] The feature point extraction method according to the present invention comprises the steps of: (c) comparing first feature point information of the film in first inspection data of a first manufacturing process with second feature point information of the film in second inspection data of a second manufacturing process; and (d) extracting feature points that are present in one of the first and second inspection data but not in the other, or that are judged as defects in one of the inspection data but not in the other, based on the comparison result of step (c). This makes it possible to efficiently collect information that can be used for process improvement and setting shipping standards in both the manufacturing of the film and the manufacturing process in which post-processing is performed using the film. [Brief explanation of the drawing]

[0028] [Figure 1] This is a schematic diagram showing an example of the application of the information processing system according to the first embodiment. [Figure 2] This is a table to explain the extracted Type 1 to Type 3 feature points. [Figure 3] This is a block diagram showing the schematic configuration of an information processing system. [Figure 4A] This is an example of a user list stored in the memory unit. [Figure 4B] This is an example of a lot list stored in the memory unit. [Figure 5A] This is an example of a database of inspection data stored in the memory unit. [Figure 5B] This is an example of a database of inspection data stored in the memory unit. [Figure 5C] This is an example of a database of inspection data stored in the memory unit. [Figure 6] This is a flowchart showing the process of generating the first inspection data performed in the first manufacturing process. [Figure 7A] This is a schematic diagram showing the configuration of the inspection device. [Figure 7B] This is a schematic diagram showing the configuration of the inspection device. [Figure 7C] This is a schematic diagram showing the configuration of the inspection device. [Figure 8]This flowchart shows the process for generating second inspection data performed in the second manufacturing process. [Figure 9] This flowchart shows the feature point extraction process performed by an information processing system. [Figure 10] This is a schematic diagram illustrating the feature point extraction process. [Figure 11] This is a subroutine flowchart showing the alignment process in step S34. [Figure 12] This is a flowchart showing the process for setting the shipping specifications in the first manufacturing process. [Figure 13] This is a subroutine flowchart showing the alignment process in step S34 of the second embodiment. [Figure 14] This is an example of a probability density function that shows the location and intensity of feature points, calculated using kernel density estimation. [Figure 15] This is a schematic diagram showing an example of the application of the information processing system according to the third embodiment. [Figure 16] This is a table showing the inspection equipment and inspection positions. [Figure 17A] This table explains the selected test data and the insights gained from the extracted results. [Figure 17B] This is a table to explain the extracted Type 1 to Type 3 feature points. [Figure 18] This is a schematic diagram showing the manufacturing process of film rolls and the inspection location of the inspection unit related to the first inspection data. [Figure 19] Figure 18 is an enlarged schematic diagram of the area around the winding device in the manufacturing process. [Figure 20] This is a schematic diagram showing the manufacturing process of a product using film rolls, and the inspection position of the inspection device related to the second inspection data. [Modes for carrying out the invention]

[0029] Embodiments of the present invention will be described below with reference to the attached drawings. However, the scope of the present invention is not limited to the disclosed embodiments. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted. Also, the dimensional ratios in the drawings are exaggerated for illustrative purposes and may differ from the actual ratios.

[0030] Figure 1 is a schematic diagram showing an application example of the information processing system 50 according to the first embodiment. As shown in Figure 1, the information processing system 50 communicates with terminal devices 70, etc., in factories A and B via a network. The network is a communication line such as a data communication network. In some cases, wired LANs or wireless LANs (for example, LANs conforming to the IEEE 802.11 standard) may be used in the network.

[0031] The terminal device 70 is, for example, a PC (personal computer). For example, the terminal device 70 is a PC used by employees of a manufacturing company operating factories A and B.

[0032] Factory A is equipped with a film roll manufacturing apparatus 1000. Factory A is operated or managed by, for example, a film manufacturing company. A first manufacturing process for producing film rolls 80 is carried out in Factory A. The film surface of the film rolls 80 is inspected by an inspection device 90. The inspection device 90 is, for example, a camera. The film is, for example, an optical film, and its width is, for example, in the range of 1000 mm to 3000 mm. The thickness of the film is set in the range of 15 μm to 80 μm, taking into consideration quality, handling, etc. The length of the film in the film rolls 80 wound on the winding shaft is, for example, in the range of 2000 m to 10000 m. The film here includes a web. The web is a sheet-like material, including resin films and metal films.

[0033] Factory B is equipped with product manufacturing equipment 2000. Factory B is operated or managed by, for example, a coating manufacturer (hereinafter also referred to as a user company or user). There are multiple user companies operating each of the Factory B units. In Factory B, products are manufactured using film rolls 80 shipped and transported from Factory A. In Factory B, the film (film F8 described later) is unwound from the film rolls 80, and a second manufacturing process, which is a post-processing step such as coating, is carried out. For example, in the post-processing step, a coating treatment is performed to impart a functional layer to the surface. In the second manufacturing process as well, the film surface of the film rolls 80 is inspected by an inspection device 90. The inspection device 90 is, for example, a camera.

[0034] (Overview of feature point extraction process) The details of the feature point extraction process will be described later, but below, we will explain the overview of the feature point extraction process with reference to Figure 1.

[0035] In the first manufacturing process of Factory A, during product inspection, the film is optically inspected by the inspection device 90, and inspection data (also referred to as failure data or defect data) is generated. Specifically, by analyzing image data obtained by photographing the surface of the film, inspection data (hereinafter referred to as first inspection data) containing feature point information (feature point, position, intensity) is generated. The information processing system 50 acquires the first inspection data from the terminal device 70 of Factory A (step S1).

[0036] Here, feature points are defects on the film, and feature points are generated by analyzing image data. Image analysis may be performed using known techniques to extract feature points from image data of the film surface where the pixel value deviates by a predetermined amount from the surrounding average value (difference is greater than or equal to a predetermined amount), or it may be calculated using the "image processing for feature point generation" method described later. From one or more image data of a single film roll 80 (total length several kilometers), tens to hundreds of feature points are often generated. Defects include both defects that lead to product defects and minor defects that do not lead to product defects. Feature points include defects related to poor adhesion when films are bonded together midway (e.g., ultrasonic fusion), axial irregularities, etc. Feature point information includes size and position (x and y coordinates). In addition, clustered feature points, where multiple adjacent feature points are grouped together, may be used as feature point information. Image processing for feature point generation will be described later.

[0037] Film rolls 80 manufactured at factory A are transported to factory B. In the second manufacturing process at factory B, during product inspection, the film rolls 80 are optically inspected by an inspection device 90, and inspection data is generated. By analyzing image data obtained by photographing the surface of the film, inspection data containing feature points (hereinafter referred to as second inspection data) is generated. The information processing system 50 acquires the second inspection data from the terminal device 70 at factory B (step S2). Preferably, the inspection device 90 at factory A (first manufacturing process) and the inspection device 90 at factory B (second manufacturing process) are the same, that is, they have the same measurement system and the same measurement conditions, but are not limited to this. Factory A and factory B may have different required performance, quality, and product specifications (hereinafter referred to as product specifications, etc.), and an inspection device 90 with an appropriate measurement system and measurement conditions may be used according to each product specification, etc.

[0038] The information processing system 50 performs feature point extraction processing by comparing the first and second inspection data for the same film roll 80 (step S3). Specifically, the information processing system 50 performs feature point extraction processing by comparing feature points at corresponding positions on the film surface in the first and second inspection data. In this specification, detecting feature points from image data is referred to as "generating feature points." Classifying feature points into one of the following first to third type feature points by comparing the first and second inspection data is referred to as "extracting feature points."

[0039] Figure 2 is a table illustrating the first to third type feature points extracted by the feature point extraction process. Multiple feature points generated from the inspection data of one film roll 80 may be classified into each of the first to third type feature points. For example, some of the hundreds of feature points may be extracted as first type feature points, some as second type feature points, and the rest as third type feature points.

[0040] (Type 1 characteristic point) Type 1 feature points are feature points present in the first inspection data but not in the second inspection data. Type 1 feature points are feature points that disappeared during the second manufacturing process (e.g., the coating process). These Type 1 feature points do not require control during the first manufacturing process. In this case, the manufacturing conditions that cause the generation of Type 1 feature points may be subject to specification relaxation during the first manufacturing process.

[0041] (Type 2 characteristic point) Type 2 feature points are those that are not present in the first inspection data but are present in the second inspection data. These Type 2 feature points are newly generated in the second manufacturing process. Because these Type 2 feature points originate from the second manufacturing process, they can be used to improve the second manufacturing process.

[0042] (Type 3 characteristic point) Type 3 feature points are feature points that exist in both the first and second inspection data. These Type 3 feature points are feature points that originate from the first manufacturing process and are feature points that require control. Because these Type 3 feature points originate from the first manufacturing process, they can be used to improve the first manufacturing process.

[0043] The information processing system 50 provides feedback to users at factory A and factory B regarding the feature point extraction results (step S4). For example, it transmits the extraction results to the terminal device 70 in response to access from the terminal device 70 of the user who manufactured the target film roll 80 and the terminal device 70 of the user to whom the film roll 80 was delivered. This concludes the overview of the feature point extraction process. More detailed information about the process will be described later.

[0044] (Information Processing System 50) The information processing system 50 will be described below with reference to Figures 3 to 5. Figure 3 is a block diagram showing the schematic configuration of the information processing system 50. The information processing system 50 is, for example, a server. As shown in Figure 3, the information processing system 50 includes a control unit 51, a storage unit 52, and a communication unit 53.

[0045] (Control Unit 51) The control unit 51 includes a CPU and memory such as RAM and ROM. The CPU is a control circuit composed of a multi-core processor that controls the above-mentioned parts and performs various calculations according to a program, and each function of the information processing system 50 is performed by the CPU executing the corresponding program.

[0046] The control unit 51 functions as an acquisition unit 511 in cooperation with the communication unit 53. The control unit 51 also functions as a alignment unit 512, a comparison extraction unit 513, and an output unit 514. The acquisition unit 511 acquires the first and second inspection data obtained from inspections in the first and second manufacturing processes. The alignment unit 512 aligns the coordinates of the first and second inspection data by shifting the relative positions of the feature points of the first and second inspection data, or by moving (shifting) the position information of the second inspection data. The comparison extraction unit 513 corresponds to the comparison unit and the extraction unit. The comparison extraction unit 513 compares the feature points of the first and second inspection data after the alignment process and extracts the first to third type feature points shown in Figure 2. The output unit 514 transmits the feature point extraction results to the terminal device 70 or displays them on a display unit (not shown) in response to requests from the terminal device 70.

[0047] (Storage unit 52) The memory unit 52 is a large-capacity auxiliary storage device that stores various programs, including the operating system, and various data. For example, a hard disk, solid-state drive, flash memory, or ROM can be used for storage. The memory unit 52 stores user lists, lot lists, inspection data databases, etc. The management and registration of the user lists and lot lists are performed by an administrator accessing the terminal device 70. For example, this administrator is a person in charge of the relevant department at the manufacturer operating factory A.

[0048] (User list) Figure 4A shows an example of a user list stored in the memory unit. The user list stores user ID, username, contact information, etc. In addition, each user has access rights to their own search data DB (inspection database), and is granted access rights to various data (inspection data, extracted data, etc.) related to the film roll 80 (identified by lot ID) that they are involved with.

[0049] (Lot list) Figure 4B shows an example of a lot list stored in the memory unit. The lot list records the lot ID assigned to each film roll, the product name (also called the variety), the customer user ID (ordering party), and multiple manufacturing conditions, size (width, length, thickness), manufacturing date, etc.

[0050] (Inspection data database) The inspection data database stores various types of inspection data for the film roll 80, such as the first and second inspection data and the results of feature point extraction, as shown in Figures 5A to 5C. As described above, the first inspection data is data obtained from the inspection in the first manufacturing process. The second inspection data is data obtained from the inspection in the second manufacturing process. The results of feature point extraction are data generated by the information processing system 50 using these first and second inspection data.

[0051] Figure 5A shows an example of an inspection list registered in the inspection data database. The inspection list stores the inspection ID, lot ID, inspection device ID, inspection data, inspection date and time, etc.

[0052] Figure 5B shows an example of the contents of inspection data (inspection ID: i0101) in the inspection list. The inspection data records a feature point ID that is automatically assigned sequentially to each feature point, its XY coordinate position, and its intensity for each feature point ID. The intensity is the rank of the feature point, which will be described later. The intensity information may also include information on the size (diameter, area) of the feature point. The XY coordinate position is an XY coordinate relative to the starting point of the film surface (for example, the left edge of the leading edge). X is the coordinate in the width direction of the film and can take a range of, for example, 0 to 3000 mm depending on the film size (see Figure 4B). Y is the coordinate in the longitudinal direction of the film and can take a range of, for example, 0 to 10000 m depending on the film size.

[0053] Figure 5C shows an example of the extracted data (hereinafter simply referred to as the extracted data). The extracted data records the inspection IDs of the original first and second inspection data, and the extraction results for each feature point. The extraction results (types 1 to 3) are the classifications shown in Figure 2 above. The integrated feature point IDs are automatically assigned sequentially, and integrated feature points are generated corresponding to feature points present in either or both of the first and second inspection data. The number of integrated feature point IDs is greater than or equal to the number of first and second inspection feature point IDs.

[0054] In addition, multiple first and second inspection data sets may be generated for a single lot ID by multiple inspection devices. For example, in the second manufacturing process, multiple second inspection data sets may be generated by inspecting (photographing) the film roll 80 in its original winding state, as well as by performing inspections in several downstream processes. In this case, the information processing system 50 may generate multiple feature point extraction result data sets for a single first inspection data set in a one-to-many relationship with multiple second inspection data sets. Furthermore, the user may be allowed to select which second inspection data set to associate with which first inspection data set.

[0055] (Communications Section 59) The communication unit 59 also serves as an interface for network connection with external devices such as PCs.

[0056] (Generation process for the first and second inspection data) The following describes the generation process of the first and second inspection data performed in the first and second manufacturing processes, referring to Figures 6 to 8. Figure 6 is a flowchart showing the generation process of the first inspection data performed in the first manufacturing process.

[0057] (Generation process of the first test data) (Step S11) In the first manufacturing process, film rolls 80 are manufactured by the film roll manufacturing device 1000. At this time, the film rolls are manufactured according to the shipping standard z.

[0058] (Step S12) The inspection device 90 photographs the film and saves the image data. The configuration of the inspection device 90 will be described below with reference to Figure 7.

[0059] (Inspection device 90) The following methods exist for devices that detect surface irregularities, bubbles, cracks, and internal structural distortions in transparent materials such as film F8. (1) A transmissive inspection device that detects defects in an object by irradiating the object with light and receiving the light that has passed through the object. (2) A reflective inspection device that detects defects in an object by receiving light reflected from the object being inspected.

[0060] Furthermore, for both transmissive and reflective inspections, depending on the relative positions of the camera's optical axis, the light source, and the object being inspected, there are bright-field inspection devices that receive non-scattered light from the surface and dark-field inspection devices that receive scattered light. In a bright-field inspection device, if there are no defects, there is no scattering of light, so the light from the light source enters the light detection means without being blocked. If there are defects, the light is blocked by the defects and does not enter the light detection means. Therefore, defects are observed as dark spots or streaks against a bright background. In contrast, in a dark-field inspection device, if there are no defects, the light is not scattered and does not enter the light detection means. However, if there are defects, the light is scattered by the defects and enters the light detection means. Therefore, defects are observed as bright spots or streaks against a dark background. Any type of inspection device may be used as the inspection device 90 in this embodiment. It is preferable, but not limited to, that the first inspection data and the second inspection data are acquired by the same type of inspection device.

[0061] (Reflective type inspection device) Figure 7A is a schematic diagram showing the configuration of the reflective inspection device 90 as viewed from the width direction (Y direction). Figure 7B is a schematic diagram showing the configuration of the inspection device 90 as viewed from the transport direction (X direction). The inspection device 90 comprises a light source 91, a camera 92 as an optical sensor, an analysis unit 93 as a data processing unit, and a storage unit 94. The inspection device 90 optically inspects feature points (hereinafter also simply referred to as defects) that occur on the film F8 during transport. The inspection device 90 uses the camera 92 to optically inspect the film F8 on the film roll 80 and generates image data as inspection data. The number of cameras, the angle of view, and the distance to the film surface are set so that the entire width of the film F8 becomes the inspection area (shooting range). The number of cameras is set so that if one camera cannot properly photograph the entire width of the film, multiple cameras can be arranged in the width direction. Figure 7B shows an example of two cameras 92 arranged in the width direction (Y direction). The analysis unit 93 may combine multiple images obtained by continuous shooting with one camera 92 to generate a single image data including the entire film surface of the film roll 80, or it may store multiple image data in the storage unit 94 in association with the shooting time. Alternatively, it may combine similar image data obtained by multiple cameras 92 arranged in the width direction. By referring to the stored transport speed (winding speed or feed speed), the analysis unit 93 can determine the position of the film F8 in the longitudinal direction based on the shooting time associated with the image data. In the following description, it will be assumed that multiple image data obtained by continuous shooting are stored in association with the shooting time for one film roll 80. The analysis unit 93 generates defect information by analyzing the image data. The inspection device 90 inspects defects that occur during manufacturing processes, such as during winding of a long film F8.

[0062] The light source 91 illuminates the inspection area of ​​the film F8 with light. The light source 91 illuminates the roll-shaped film F8 uniformly in the width direction (a direction perpendicular to the longitudinal direction of the film F8 and parallel to the film surface). Here, uniformity means that the illuminance on the film F8 is substantially the same across the width direction of the film F8 (the difference between the maximum and minimum values ​​is less than or equal to a predetermined value, etc.).

[0063] Camera 92 is an optical sensor that optically reads the inspection area of ​​film F8. Camera 92 is equipped with an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), a lens, etc. Camera 92 is an area sensor that generates two-dimensional image data from the output signals of each image sensor. Camera 92 detects diffuse light from the light reflected in the inspection area of ​​film F8, which is illuminated by the light source 91. Here, either a color camera or a black and white camera (monochrome camera) may be used as camera 92.

[0064] Camera 92 has a shooting range that covers the entire width of the film F8, and simultaneously reads the entire width of the film F8 in a single shot. Camera 92 may detect light in the visible light region or light in the infrared region.

[0065] Furthermore, in the output signal of the camera 92, it is desirable that the contrast between the signal value corresponding to the illuminated area on the film F8 that is illuminated by the light source 91 and the signal value corresponding to the unilluminated area that is not illuminated by the light source 91 is greater than or equal to a predetermined value. In other words, it is desirable that only the areas on the film F8 that are illuminated by light from the light source 91 (illuminated areas) appear bright.

[0066] Contrast is expressed as the difference or ratio between two values ​​being processed (in this case, the signal value corresponding to the illuminated area and the signal value corresponding to the unilluminated area). The greater the difference between the two values, the greater the contrast. To increase the contrast between the illuminated and unilluminated areas, it is desirable to use a powerful and highly directional light source 91.

[0067] Here, "powerful" means that when the illuminance at an irradiation distance of 50 mm is E50, the illuminance E50 is 50,000 lx or more. Also, "highly directional" means that when the illuminance at an irradiation distance of 50 mm is E50 and the illuminance at an irradiation distance of 100 mm is E100, the condition (E50-E100) / E50 < 0.5 is satisfied.

[0068] The analysis unit 93 consists of a CPU, RAM, etc., and reads various processing programs stored in the memory unit 94, loads them into RAM, and performs various processing in cooperation with those programs.

[0069] The storage unit 94 is composed of an HDD, SSD (Solid State Drive), etc., and stores various processing programs and data necessary for the execution of those programs. The storage unit 94 also stores captured image data (inspection data) linked to the time of capture. The storage unit 94 stores the winding speed in the film roll manufacturing device 1000 (e.g., 100 m / min) or the film F8 feed conditions in the product manufacturing device 2000 (e.g., 30 m / min). These winding speeds and feed conditions may be included in the inspection list of the inspection DB (see Figure 5A).

[0070] The analysis unit 93 detects defects (location and intensity) in the film F8 by performing data processing on the output signal of the camera 92 (optical sensor). The data processing includes image processing on image data obtained from the output signal of the camera 92, defect detection processing to determine defects based on the image-processed data, and quantitative evaluation processing to quantitatively evaluate defects based on the image-processed data.

[0071] (Relative position of camera 92 and light source 91) The camera 92 may be positioned to receive specularly reflected light from the light source 91 (in the case of a bright-field inspection system that receives non-scattered light).

[0072] Furthermore, the camera 92 may be positioned to avoid receiving specularly reflected light from the light source 91 (in the case of a dark-field inspection system that receives scattered light). In other words, it is preferable to position it in a location that receives diffused light from the light reflected by the object being inspected.

[0073] (Transmission-type inspection device) Figure 7C shows an example of a transmissive inspection device 90. A transmissive inspection device 90 may be employed in which the light source 92 is positioned opposite the camera 92 with the film F8 in between.

[0074] (Step S13) The analysis unit 93 performs the image processing described below on the image data to generate multiple feature points.

[0075] (Image processing for feature point generation) The analysis unit 93 acquires two-dimensional image data generated by the camera 92 and stored in the storage unit 94.

[0076] The analysis unit 93 performs data processing on the image data (inspection data) acquired from the camera 92.

[0077] The analysis unit 93 divides the image data into multiple regions. For example, the analysis unit 93 divides the image data into n regions (for example, several to several dozen) in the width direction (hereinafter referred to as regions a1 to an).

[0078] Next, the analysis unit 93 acquires image data of one region a1 and performs mathematical processing on the image data of region a1 (step S103). Depending on the type of defect to be detected (gauge band, vertical wrinkles, diagonal wrinkles, etc.), appropriate mathematical processing is provided.

[0079] Mathematical processing includes preprocessing, enhancement, signal processing, and image feature extraction.

[0080] The following are examples of pretreatment steps: Image cropping, Low-pass filter, high-pass filter, Gaussian filter, median filter, bilateral filter, Morphological transformation, color transformation (L*a*b*, sRGB, HSV, HSL), contrast adjustment, noise reduction, blur / blur image restoration, masking, Hough transform, projection transformation, etc.

[0081] Examples of enhancement techniques include the Sobel filter, Scharr filter, Laplacian filter, Gabor filter, and Canny method.

[0082] The following are examples of signal processing: • Processing to calculate basic statistics (maximum, minimum, mean, median, standard deviation, variance, quartiles), sum of squares, root of squares, difference, sum, product, ratio, distance matrix, differential and integral calculus, thresholding (binarization, adaptive binarization, etc.) Fourier transform, wavelet transform, peak detection (peak value, number of peaks, full width at half maximum, etc.), etc.

[0083] Examples of image feature extraction methods include template matching and SIFT feature extraction.

[0084] Next, the analysis unit 93 performs thresholding on the values ​​(features) obtained by mathematical processing of the image data of region a1. Thresholding is a process that determines whether or not a value is a defect to be detected, and also determines the rank (intensity) of the defect, based on a predetermined threshold.

[0085] In thresholding, determining the presence and type of a defect corresponds to "defect detection processing." Furthermore, in thresholding in step S104, classifying defects into multiple ranks according to the threshold corresponds to "quantitative evaluation processing."

[0086] For example, for a parameter (feature) that takes values ​​between 1 and 100, defects can be classified into multiple ranks. For instance, the rank can be classified by the size of the defect (diameter or area). Alternatively, the ranks classified by size can be further subdivided according to the parameter values.

[0087] The analysis unit 93 performs the same processing on regions other than region a1.

[0088] After processing each region a1 to an, the analysis unit 93 integrates the results for each region a1 to an, and the data processing is completed. Specifically, the analysis unit 93 generates data that associates the rank and location (x and y coordinates) of the detected defects for each region (each position in the width direction of the film F8).

[0089] After data processing, the analysis unit 93 stores the processing results in the storage unit 94. The analysis unit 93 performs this data processing on each of the multiple image data obtained from the inspection of one film roll 80 to obtain processing results. By aggregating these processing results, inspection data like that shown in Figure 5B is generated.

[0090] (Step S14) The terminal device 70 in the first manufacturing process sends inspection data containing multiple feature point information obtained in the processing up to step S13 to the information processing system 50. The acquisition unit 511 of the information processing system 50 stores the acquired inspection data as first inspection data in the inspection data DB of the storage unit 52.

[0091] (Generation process for second test data) Figure 8 is a flowchart showing the process of generating second inspection data in the second manufacturing process.

[0092] (Step S21) In the second manufacturing process, post-processing is performed using the film roll 80 by the product manufacturing equipment 2000 to produce a product using film F8.

[0093] (Step S22) The inspection device 90 photographs the surface of the film F8 before post-processing, or during or after post-processing, and saves the image data. This inspection device 90 is composed of, for example, a light source 91, a camera 92, an analysis unit 93, a storage unit 94, etc., as shown in Figure 7.

[0094] (Step S23) The analysis unit 93 stores inspection data, including the feature point information of the multiple feature points generated, in the storage unit 94 by the same process as in step S13.

[0095] (Step S24) The terminal device 70 in the second manufacturing process sends inspection data containing multiple feature point information obtained in the processing up to step S23 to the information processing system 50. The acquisition unit 511 of the information processing system 50 stores the acquired inspection data as second inspection data in the inspection data DB of the storage unit 52.

[0096] (Feature point extraction process) The feature point extraction process performed by the information processing system 50 will be described below with reference to Figures 9 to 11. Figure 9 is a flowchart of the feature point extraction process. Figure 10 is a schematic diagram to explain the feature point extraction process. Figure 11 is a subroutine flowchart showing the alignment process in step S34.

[0097] (Step S31) The information processing system 50 starts the process from step S31 onwards in response to a start instruction from the user via the terminal device 70, or when the second inspection data is registered in the inspection data DB of the storage unit 52 and a pair of first and second inspection data are available.

[0098] The acquisition unit 511 acquires a pair of first and second inspection data from the inspection data DB for the same lot.

[0099] (Steps S32, S33) The alignment unit 512 performs preprocessing on the first inspection data under the first condition and on the second inspection data under the second condition. In the following description, it will be explained that the XY coordinate system of each feature point in the second inspection data is aligned with the XY coordinate system of the first inspection data. However, it is not limited to this, and conversely, the XY coordinate system of the first inspection data may be aligned with the XY coordinate system of the second inspection data.

[0100] As shown in Figure 10, the alignment unit 512 performs a preprocessing step for the second condition by inverting the Y coordinate (up and down) of the second inspection data to match the difference between winding (first manufacturing process) and unwinding (second manufacturing process). In addition, depending on the information that the camera 92's shooting area is set to either the front or back surface of the film F8 in the second manufacturing process, the alignment unit 512 performs a preprocessing step by inverting the X coordinate (left and right) of the second inspection data (or first inspection data). Furthermore, if the film F8 expands or contracts due to the heating temperature or tension settings in post-processing during the second manufacturing process, and the expansion / contraction ratio can be estimated in advance, the coordinate transformation of the second inspection data may be performed using that expansion / contraction ratio.

[0101] Furthermore, the alignment unit 512 performs at least one of the following noise reduction processes on the first and second inspection data, as part of the noise reduction process included in the first and second conditions. (1) Removal of low-ranking feature points. (2) Remove extremely small feature points. (3) Eliminate consecutive runs scored. (4) Eliminate concentrated spots in the width direction. This occurs especially at the leading and trailing ends of film F8.

[0102] (Step S34) The alignment unit 512 performs coordinate system alignment processing. Figure 11 is a subroutine flowchart showing the alignment processing in step S34.

[0103] (Rough adjustment: Steps S401~S403) In steps S401 to S403, the alignment unit 512 performs a rough adjustment. The alignment unit 512 shifts the coordinate positions of the second inspection data by a predetermined amount in the XY direction, calculates the distances L1 to Lm between the corresponding feature points at that time, and selects the shift amount (x1, y1) whose sum is the smallest. Here, the average value may be used instead of the sum. i. For corresponding feature points, the closest feature point is extracted. Also, if a feature point corresponding to the other inspection data cannot be found in one inspection data (i.e., first and second type feature points), the distance may become an infinite value. The alignment unit 512 may exclude distance values ​​above a predetermined threshold and use the sum or average of the distance values ​​after exclusion.

[0104] Specifically, the alignment unit 512 sequentially shifts the coordinate positions of the second inspection data from (-shift_x,-shift_y) to (+shift_x,+shift_y) around the central shift amount (0,0) using a fixed coarse adjustment shift amount a. Then, for each of the feature points 1 to m of the first inspection data at that time, it calculates the distances L1 to Lm to the nearest feature point in the second inspection data. Then, from (-shift_x,-shift_y) to (+shift_x,+shift_y), it selects the shift amount (x1,y1) that minimizes the sum of the distances.

[0105] For example, if the coarse adjustment shift amount a = 1.0 mm, then (-shift_x, -shift_y) = (-10 mm, -10 mm) and (-shift_x, +shift_y) = (+10 mm, +10 mm). Alternatively, if the difference in order of magnitude (about 3 orders of magnitude) between the X and Y directions is large, the X and Y shift amounts can be adjusted to match the order of magnitude. For example, the Y direction can be changed from millimeters to meters, so (-shift_x, -shift_y) = (-10 mm, -10 m) and (-shift_x, +shift_y) = (+10 mm, +10 m) (the same applies to the fine adjustments below).

[0106] (Fine-tuning: Steps S404~S406) In steps S404 to S406, the alignment unit 512 performs fine adjustments and selects the shift amount (x2, y2). The process here is the same as in steps S401 to S403, but differs from the coarse adjustment in steps S401 to S403 in the following respects: The fine adjustment shift amount b is smaller than the coarse adjustment shift amount a, and the center shift amount is not (0, 0), but the shift amount (x1, y1) selected in step S403 is set as the center shift amount. For example, the fine adjustment shift amount b is sufficiently smaller than the coarse adjustment shift amount a, for example, one order of magnitude smaller, 0.1 mm.

[0107] (Step S407) The alignment unit 512 performs a coordinate transformation process on the second inspection data using the shift amount (x2, y2) selected in step S406.

[0108] (Step S408) The alignment unit 512 calculates the distances L1 to Lm after the coordinate transformation and checks whether the sum of these distances is less than a predetermined threshold. If it is greater than or equal to the predetermined threshold, the alignment unit 512 may determine that the alignment in step S407 was inappropriate.

[0109] (Step S409) If the alignment is incorrect (YES), the control unit 51 terminates the process (end). If the alignment is incorrect, it may display an error message or record in the inspection data DB that the calculation could not be performed. On the other hand, if the alignment is correct (NO), the control unit 51 terminates the process in Figure 11 and returns to the process in Figure 9 (return), and executes the process from step S35 onwards.

[0110] (Steps S35, S36) The comparison extraction unit 513 compares the feature point information of the first inspection data and the second inspection data. The second inspection data here is the data after the alignment process in step S34. Through comparison, the comparison extraction unit 513 extracts feature points that are present in only one of the first and second inspection data but not in the other. The comparison extraction unit 513 also extracts feature points that are present in both data. Through this processing, the comparison extraction unit 513 generates extracted data in which the feature points are classified into first to third type feature points (see Figures 2 and 5C).

[0111] (Step S37) The output unit 514 registers the extraction results (extracted data) generated in step S36 into the inspection data DB or transmits the extraction results to the terminal device 70. This completes the feature point extraction process shown in Figure 9 (end).

[0112] In this embodiment, the first feature point information of the film in the first inspection data and the second feature point information of the film in the second inspection data are compared. Based on the comparison result, features that are present in one of the first and second inspection data are not present in the other. This method extracts feature points that are absent or that are identified as defects in one inspection dataset but not in the other. This allows for the efficient collection of information that can be used for process improvement and setting shipping standards, both during the production of film rolls and in the post-processing stages using the film.

[0113] (modified version) Figure 12 is a flowchart showing the process for setting the shipping specifications in the first manufacturing process.

[0114] (Step S51) The terminal device 70 for the first manufacturing process allows users, such as administrators managing the first manufacturing process, to refer to the extraction results. This processing corresponds to step S37 in Figure 9.

[0115] (Step S52) The user can revise the shipping specification z for the first manufacturing process by referring to Type 1 feature points, that is, feature points present in the first inspection data but not in the second inspection data. For example, by revising the shipping specification z for Type 1 feature points in the first manufacturing process, an improvement in yield can be expected.

[0116] (Second embodiment) Next, with reference to Figures 13 to 14, the information processing system 50 in the second embodiment will be described. In the information processing system 50 according to the second embodiment, kernel density estimation is used for coordinate system alignment processing. In this respect, it differs from the alignment processing of the first embodiment (Figures 10 and 11), but for other configurations, the configuration examples of the first embodiment shown in Figures 1 to 9 can be commonly applied. Figure 13 is a subroutine flowchart showing the alignment processing of step S34 in the second embodiment.

[0117] (Step S451) The alignment unit 512 obtains a probability density function by performing kernel density estimation on the first inspection data. Kernel density estimation is performed in two dimensions, and a Gaussian kernel is used as the kernel function. A predetermined value is used for the bandwidth. For example, a table associating each product name (type) with a bandwidth may be stored in the storage unit 52, and the bandwidth value for each product name may be used, or different bandwidth values ​​may be used depending on the number of feature points. The alignment unit 512 calculates the density for each feature point's data, taking into account the surrounding data. Then, the alignment unit 512 sums the densities calculated for each data to obtain a probability density function. Figure 14 is an example of a probability density function showing the position and intensity (density) of feature points calculated by kernel density estimation. In Figure 14, the vertical and horizontal axes are XY coordinates, and it is shown that a higher density indicates a higher concentration.

[0118] (Step S452) The alignment unit 512 obtains a probability density function by performing kernel density estimation on the second inspection data using the same process as in step S451.

[0119] (Steps S453~S455) The alignment unit 512 compares the two obtained probability density functions and makes a correspondence based on the density distribution (position and intensity information). Then, the alignment unit 512 calculates a transformation row example based on the correspondence result and performs a coordinate transformation of the XY coordinates on the second inspection data.

[0120] (Steps S456~S457) The processing here is the same as steps S406 to S407 in Figure 11. The alignment unit 512 uses the inspection data after coordinate transformation to align feature points 1 to m in one of the inspection data. The distances L1 to Lm to each corresponding feature point of the other inspection data are calculated, and it is checked whether the sum of these distances is less than a predetermined threshold. If the sum is greater than or equal to the predetermined threshold, the alignment unit 512 determines that the alignment in step S455 is inappropriate and terminates the process (end). On the other hand, if the alignment is appropriate (NO), the control unit 51 terminates the process in Figure 13 and returns to the process in Figure 9 (return), and executes the processes from step S35 onwards.

[0121] In this second embodiment, the kernel density estimation is performed to calculate the probability density function of the feature points, and the film is aligned by comparing the calculated probability density functions. The same effects as in the first embodiment can be obtained in this way as well.

[0122] In the embodiment shown in Figure 13, kernel density estimation was performed on both the first and second inspection data to calculate the probability density function of the feature points, but this is not the only way. For example, kernel density estimation may be performed on only one of the inspection data (e.g., the second inspection data), and the obtained probability density function may be compared with the feature point information of the other inspection data to perform film alignment.

[0123] (Third embodiment) Figure 15 is a schematic diagram showing an application example of the information processing system 50 according to the third embodiment. Figure 16 is a table showing the relationship between the multiple inspection devices 90a1 to 90b3 and the inspection positions in Figure 15. Figure 15 corresponds to Figure 1, but some configurations such as the terminal device 70 are omitted. In the first and second embodiments described above, an example was shown in which first inspection data is acquired in the first manufacturing process and second inspection data is acquired in the second manufacturing process. In the following, inspection data is acquired at multiple inspection positions in each of the first and second manufacturing processes, and a combination of first and second inspection data is selected from the obtained multiple inspection data. The inspection positions are positions before or after multiple sub-processes that constitute the manufacturing process. For example, this is the case when n and m pieces of inspection data are obtained in the first and second manufacturing processes respectively (total p = n + m), and any two inspection data are selected from these p pieces of inspection data. In this case, among the selected inspection data, the inspection data at the upstream inspection location in the process flow direction is referred to as the first inspection data, and the inspection data at the downstream inspection location is referred to as the second inspection data.

[0124] There is one inspection device 90 for inspecting failures and defects that occur in a single sub-process. The inspection device 90 may consist of multiple inspection units. For example, it may consist of an inspection unit (camera) for detecting scratches on the surface of the film F8 and an inspection unit (camera) for detecting foreign objects inside the film F8. In this case, one of the analysis results obtained by analyzing the photographic data from the two inspection units may be used, or the results of these two analysis results may be combined (by performing calculations such as addition) and used as inspection data.

[0125] In the example shown in Figures 15 and 16, the inspection device 90a1 is positioned at the final stage of the first manufacturing process 1000 (immediately upstream of the winding process). Following the first manufacturing process, there is a storage or transport process for the film roll 80. After that, there are multiple first to third sub-processes and a winding process in the second manufacturing process 2000. In the example in Figure 15, the first to third sub-processes are the first to third coating processes, respectively. The first to second layers are applied to the base film F8 by the first to third coating processes, respectively (see the enlarged cross-sectional view of the spray outlet in Figure 15). Each sub-process may include not only a coating process for applying the coating liquid, but also other auxiliary processes such as a drying process. Furthermore, each sub-process is not limited to a coating process, but may also be an adhesive process (laminating) for bonding and attaching other films, as in the embodiment described later.

[0126] Figure 17A shows an arbitrary selection of the multiple test data (Data A to Data B3) shown in Figure 16. This figure shows the insights obtained through the extraction process when two combinations are selected and used as the first and second inspection data. This extraction process is performed by the information processing system 50, and either of the extraction processes described in the first and second embodiments above may be applied. This selection may be made by the user via the terminal device 70, or the information processing system 50 may perform the extraction process for all combinations and output the results.

[0127] Figure 17B is a table illustrating the first to third type feature points extracted by the feature point extraction process in the third embodiment.

[0128] Type 1 feature points are feature points that have disappeared up to the inspection location where the second inspection data was acquired (hereinafter referred to as the second inspection location). These may be subject to specification relaxation in the manufacturing process or sub-manufacturing process upstream of the inspection location where the first inspection data was acquired (hereinafter referred to as the first inspection location). Type 2 feature points are feature points originating from an intermediate process (manufacturing process or sub-process) between the first inspection location and the second inspection location. These Type 2 feature points can be used to improve the intermediate process. Type 3 feature points are feature points originating from an upstream process (manufacturing process or sub-process) upstream of the first inspection location, and are also feature points that require management. These Type 3 feature points can be used to improve the upstream process. The information processing system 50 can provide feedback to users of Factory A and Factory B on the extraction results of feature points obtained from such combinations.

[0129] In this embodiment, first inspection data is acquired in the first manufacturing process for manufacturing the film, or in the second manufacturing process for performing post-processing using the manufactured film after the first manufacturing process. Second inspection data is acquired in the second manufacturing process, or at an inspection position downstream of the inspection position where the first inspection data was acquired in the second manufacturing process. That is, two inspection data sets are selected from among the multiple inspection data obtained in the first and second manufacturing processes, and the inspection data from the upstream process is used as the first inspection data, and the inspection data from the downstream process is used as the second inspection data. Then, the first feature point information of the film in the first inspection data and the second feature point information of the film in the second inspection data are compared. Based on the comparison result, feature points that are present in one of the first and second inspection data sets but not in the other, or that are judged as defects in one inspection data set but not in the other, are extracted. This allows for the efficient collection of information useful for process improvement and setting shipping standards, both during the manufacturing of film rolls and in the post-processing stages (including sub-processes) using the film.

[0130] (Examples) The following describes examples of the film roll manufacturing process (first manufacturing process) and the manufacturing process (second manufacturing process) of products using the manufactured film roll, with reference to Figures 18 to 20.

[0131] (First manufacturing process for film rolls) The film roll manufacturing apparatus 1000 shown in Figure 18 manufactures optical films by a solution casting method. The manufactured optical film rolls 80 are inspected by an inspection apparatus 90 during product inspection.

[0132] The solution casting method involves dissolving the raw resin in a solvent, adding various additives such as plasticizers, UV absorbers, degradation inhibitors, lubricants, and release accelerators as needed, to prepare a dope. This dope is then extruded from a die onto an endlessly moving metal support (e.g., a belt or drum). After casting, the solvent is removed to a certain extent on the endless support, then the dope is peeled off the support, and subsequently passed through a drying section using various conveying means to remove the solvent before being wound onto a winding shaft for manufacturing.

[0133] As shown in Figure 18, the film roll manufacturing apparatus 1000 includes a casting section 01, a first drying section 02, a stretching section 03, a second drying section 04, a knurling forming section 05, and a winding and recovery section 06 (also called a winding device). In the film roll manufacturing apparatus 1000, an inspection device 90 is located in the winding and recovery section 06. The inspection device 90 optically inspects the film surface side of the film roll 80 and generates first inspection data. The configuration of the inspection device 90 is as described above (Figure 7, etc.).

[0134] The casting section 01 includes an endless support mirror-finish strip metal casting belt (hereinafter referred to as "belt") 01a that travels in an endless manner (in the direction of the arrow in the figure), and a die 01b that casts a dope, which is a resin dissolved in a solvent, onto the belt 01a. In order to stabilize the dope film flowing out from the die 01b, a depressurization chamber (not shown) may be provided upstream of the die 01b in the belt transport direction, and a pressurization chamber (not shown) may be provided downstream.

[0135] The casting section 01 has a peeling roll 01d. The peeling roll 01d peels off the cast film 01c that has been cast onto the belt 01a. The cast film 01c peeled off by the peeling roll 01d constitutes an unstretched film F8a.

[0136] The first drying section 02 (first drying process) includes a drying box 02a having a drying air intake 02b and an exhaust port 02c, and a conveying roll 02d consisting of multiple sets of upper and lower rolls for conveying the unstretched film F8a.

[0137] The first drying section 02 can adjust the amount of solvent contained in the unstretched film F8a before it enters the stretching section 03 (stretching process), and can be installed as needed.

[0138] The stretching section 03 has an MD (Machine Direction) stretching section 03a and a TD (Transverse Direction) stretching section 03b. The stretching section 03 stretches the unstretched film F8a that is transported from the first drying section 02.

[0139] The second drying section 04 (second drying process) has the same basic configuration as the first drying section 02, so its explanation will be omitted.

[0140] The knurling forming section 05 forms knurling on both ends of the stretched film F8 before it is wound onto the winding shaft in the winding and recovery section 06 (winding and recovery process) after being transported from the second drying section 04. It is preferable that the knurling is formed on both ends of the stretched film F8 after the ends of the stretched film F8, which is gripped by the TD stretching section 03b located upstream of the knurling forming section 05, have been cut off.

[0141] The winding and retrieval unit 06 includes a winding machine 06a for winding the stretched film F8, which has knurling formed on both ends in the knurling formation unit 05, and an accompanying air volume control device 06b. The winding and retrieval unit 06 also includes a contact or non-contact linear encoder 06c for detecting the running speed of the stretched film F8, a winding shaft rotation speed measuring device 06d, a tension control device 06e, and a thickness measuring device 6f.

[0142] As shown in the figure, in the casting section 01, the raw resin is dissolved in a solvent, and various additives such as plasticizers, UV absorbers, degradation inhibitors, lubricants, and peel accelerators are added as needed to prepare a dope, which is then extruded from a die 01b onto an endless belt 01a that moves indefinitely. After the casting film is formed, the solvent is removed to a certain extent on the endless support, and then it is peeled off the belt. Next, it is passed through a drying section and a stretching section 03 by various conveying means to form knurling at both ends, and then wound onto a winding shaft in the winding and recovery section 06 to produce an optical film. ru.

[0143] The width of the optical film to be manufactured, as shown in Figures 18 and 19, is preferably between 1000 mm and 2500 mm, taking into consideration productivity, quality, etc.

[0144] The thickness is preferably between 15 μm and 50 μm, taking into consideration quality, handling, etc.

[0145] The length of the optical film F8 on the film roll 8 wound onto the winding shaft 82 (see Figure 19; the winding shaft is also called the core) is preferably between 2000m and 8000m, taking into consideration productivity, winding quality, etc. The winding length is shown as a value calculated from the speed and time.

[0146] Figure 19 is an enlarged schematic diagram showing the knurling forming section 05 and the winding and retrieval section 06.

[0147] The knurling forming apparatus 05a consists of a pair of knurling forming rolls 501a and receiving rolls 501b, each having a knurling forming roll 501a with an uneven surface and a pressing means 501c. In the knurling forming apparatus 05a, knurling is formed on both ends of the stretched film F8 by sandwiching the stretched film F8 between the knurling forming roll 501a and the receiving roll 501b. The knurling forming roll 501a can be moved vertically (in the direction of the arrow in the figure) by the pressing means 501c. The amount of movement (pressure) of the pressing means 501c is controlled by the control device 07.

[0148] The control device 07 includes a memory, a CPU, and an input / output interface. The control device 07 performs calculations between the information input to the CPU and the information pre-input to the memory to determine the amount of movement (pressing amount) of the pressing means 501c and the amount of movement (pressing amount) of the knurling forming roll 501a. When the amount of movement (pressing amount) of the knurling forming roll 501a increases, the height of the formed knurling increases, and when the amount of movement (pressing amount) of the knurling forming roll 501a decreases, the height of the formed knurling decreases.

[0149] Furthermore, if the knurling forming section 05 has a TD stretching section (not shown) upstream of the transport direction of the stretched film F8, it is preferable to cut off both ends of the stretched film F8 held by the TD stretching section (not shown) and then form knurling on both ends of the stretched film.

[0150] In this figure, the knurling forming apparatus 05a is shown to be a system using a pressing roll and a receiving roll, but other methods include, for example, an inkjet method and a laser method.

[0151] In this invention, the knurling forming apparatus can be of any type. For example, in the case of an inkjet method, the amount of knurling forming material ejected from the inkjet head is controlled. In the case of a laser method, the laser output is controlled.

[0152] The entrained air volume control device 06b includes a touch roll 602a that contacts and presses against the stretched film F8 being wound onto the winding shaft 82, and a pressure amount control device 602b that controls the amount of pressure applied by the touch roll 602a. The amount of entrained air can be adjusted by adjusting the amount of pressure. The pressure amount control devices 602b are located at both ends of the touch roll 602a.

[0153] The relationship between touch rolls and tension control (conveyor tension) is described in the literature (JKGood Modeling Nip Induced Tension in Wound Rolls Proceedings of Forth International Conference on Web Handling, 1997).

[0154] Based on the concept of TW (winding tension) = Th (conveying tension) + μN (μ: coefficient of friction, N: touch pressure), it is possible to set the optimal radial and circumferential stresses during winding to prevent failures. It is possible.

[0155] The material can be metal, or a metal roll wrapped with resin, rubber, or other materials. A crown roll with a diameter that changes from the center to the sides can also be used. For the core material, aluminum, iron, or CFRP (carbon fiber reinforced plastics) can be used.

[0156] The tension control device 06e includes a tension controller 605a and a means 605b for moving the tension controller 605a. The tension control device 06e is capable of moving the position of the tension controller 605a (in the direction of the arrow in the figure) in accordance with the changes in the stretched film F8 being wound onto the winding shaft 82 in the recovery unit 6. Generally, when the initial tension is set to t1, the tension is low at the beginning of winding (set value t1), and increases as the winding diameter increases (set value t1 + α). The tension setting value t1 is changed by the winding conditions set by the winding condition setting unit 315.

[0157] Although this diagram describes stretched film F8, it can of course be applied to unstretched film if a stretching device is not installed.

[0158] (Second manufacturing process for products using film rolls) Next, referring to Figure 20, the manufacturing process of a product (hereinafter simply referred to as "product") equipped with a film roll 80 for acquiring second inspection data in this embodiment will be described. In the product manufacturing process, when the film F8 is unwound from the film roll 80 and the product is manufactured, the film surface side of the film roll 80 is optically inspected by the inspection device 90 and inspection data is generated. The inspection device 90 used in this second manufacturing process is an inspection device having substantially the same inspection performance as the first inspection device 90 used during the manufacturing of the film roll 80 in Figure 18.

[0159] Figure 20 is a schematic diagram showing the manufacturing process of the laminated polarizing film 1 equipped with a film roll 80, and the inspection position of the inspection device 90 for the second inspection data.

[0160] The laminated polarizing film product manufacturing apparatus 2000 shown in Figure 20 performs a series of processes, from manufacturing polarizers to bonding protective films to obtain laminated polarizing films, on a single manufacturing line.

[0161] The product manufacturing apparatus 2000, shown in Figure 20, which manufactures a laminated polarizing film 1 equipped with film F8, has, in order from upstream, a wet processing apparatus 204, a drying apparatus 205, and a laminating apparatus 206. The product manufacturing apparatus 2000 also has a feeding unit 202. The film roll 80 manufactured by the film roll manufacturing apparatus 1000 shown in Figures 18 and 19 is loaded into the third roll section 63 of the feeding unit 202, and the film F8 unwound from the film roll 80 is used as the second protective film 13. In the product manufacturing apparatus 2000, an inspection device 90 is also located in the third roll section 63 of the feeding unit 202. The inspection device 90 optically inspects the film surface side of the film roll 80 loaded into the third roll section 63 and generates first inspection data. In Figure 18, the arrows indicate the transport direction of the film, etc. (the same applies to Figures 19 and 20).

[0162] The wet processing apparatus 204 includes a first roll section 41 around which a long strip of untreated hydrophilic polymer film 1a is wound, a transport section 42 for transporting the hydrophilic polymer film 1a, and a processing section. The processing section is the part that treats the untreated hydrophilic polymer film 1a with a dichroic substance to change the hydrophilic polymer film 1a into a polarizer 1b.

[0163] The drying apparatus 205 includes a transport section 501 for transporting the long, strip-shaped polarizer 1b, and a heating section for the polarizer 1b. It has a heating section that provides a heat to dry the polarizer 1b, and

[0164] The laminating apparatus 206 includes a transport section 61 for transporting the polarizer 1c and protective film 12 after drying, an adhesive coating section 64, a bonding section 67, and a chamber 69 surrounding the adhesive coating section 64 and the bonding section 67.

[0165] <Wet Processing Equipment> The wet processing apparatus 204 includes a processing unit for dyeing and stretching a long, strip-shaped hydrophilic polymer film 1a with a dyeing solution. The wet processing includes stretching the hydrophilic polymer film 1a while applying a plurality of processing solutions, including the dyeing solution, to the hydrophilic polymer film 1a.

[0166] Wet processing apparatuses are conventionally known, and the wet processing apparatus 204 of the present invention can also employ a conventionally known configuration.

[0167] The processing unit includes, for example, a swelling treatment tank 4A, a dyeing treatment tank 4B, a crosslinking treatment tank 4C, a stretching treatment tank 4D, and a washing treatment tank 4E, in order from the upstream side.

[0168] The conveying section 42 of the wet processing apparatus 204 has multiple guide rolls and the like, and pulls out the long, strip-shaped hydrophilic polymer film 1a that is wound around the first roll section 41 and conveys it to the processing section.

[0169] The swelling treatment tank 4A is a treatment tank containing a swelling treatment solution. The swelling treatment solution swells the hydrophilic polymer film 1a. The dyeing treatment tank 4B is a treatment tank containing a dyeing treatment solution. The dyeing treatment solution dyes the hydrophilic polymer film 1a. The crosslinking treatment tank 4C is a treatment tank containing a crosslinking treatment solution. The crosslinking treatment solution crosslinks the dyed hydrophilic polymer film 1a. The stretching treatment tank 4D is a treatment tank containing a stretching treatment solution. The stretching treatment solution is not particularly limited, but for example, a solution containing a boron compound as an active ingredient can be used. The washing treatment tank 4E is a treatment tank containing a washing treatment solution. The washing treatment solution washes the stretched hydrophilic polymer film 1a. The washing treatment solution is a treatment solution for washing off treatment solutions such as the dyeing treatment solution and crosslinking treatment solution that have adhered to the hydrophilic polymer film 1a. Typically, water such as ion-exchanged water, distilled water, or pure water is used as the washing treatment solution.

[0170] <Drying equipment> The drying device 205 is located downstream of the wet processing device 204 and upstream of the laminating device 206. In the illustrated example, the drying device 205 is located downstream of the washing tank 4E.

[0171] The drying apparatus 205 may be a single unit, or two or more units may be provided in the direction of polarizer transport. In the illustrated example, for example, one drying apparatus 205 is provided in the polarizer transport path. The drying apparatus 205 includes a transport section 501 having guide rolls for transporting the elongated strip-shaped polarizer 1b manufactured by the wet processing apparatus 204, and a heating section that applies heat to the polarizer 1b being transported in the longitudinal direction (MD direction) by the transport section 501 to dry it.

[0172] The heating section includes, for example, a chamber 502 and a heat source (not shown). The chamber 502 has a space 503 inside which a polarizer can be transported.

[0173] <Laminating machine> The conveying section 61 of the laminating device 206 includes guide rolls and the like. The conveying section 61 conveys the long, strip-shaped polarizer 1c, which has been dried by the drying device 205, to the bonding section 67. The conveying section 61 also conveys the long, strip-shaped protective film 12 and the like to the bonding section 67.

[0174] The laminated polarizing film manufacturing apparatus 2000 shown in the illustration can laminate a first protective film 12 and a second protective film 13 on both sides of a polarizer 1c, respectively. Using this apparatus, a laminated polarizing film 1 can be obtained having a layer structure of first protective film 12 / adhesive layer 31 / polarizer 11 / adhesive layer 32 / second protective film 13, as shown in Figure 20 (the area indicated by the speech bubble in the lower left of Figure 20).

[0175] Such a product manufacturing apparatus 2000 has a second roll section 62 around which a long strip-shaped first protective film 12 is wound, and a third roll section 63 around which a long strip-shaped second protective film 13 (film F8) is wound. The first protective film 12 of the second roll section 62 and the second protective film 13 of the third roll section 63 are each independently conveyed from the respective roll sections 62 and 63 to the bonding section 67 by the conveying section 61.

[0176] The adhesive coating section 64 has a coating roll 641. The coating roll 641 of the adhesive coating section 64 coats the film with adhesive. The adhesive coating section 64 is located upstream of the bonding section 67.

[0177] In the illustrated example of the laminating apparatus 206, the adhesive coating section 64 is located on one side of the first protective film 12 and on one side of the second protective film 13 (film F8), respectively.

[0178] One adhesive coating section 64 applies adhesive to one side of the first protective film 12 to form an adhesive layer, and another adhesive coating section 64 applies adhesive to one side of the second protective film 13 (film F8) to form an adhesive layer.

[0179] Furthermore, if necessary, adhesive coating areas may also be provided on one side of the polarizer 1c and on the other side of the polarizer 1c (not shown). When these adhesive coating areas (not shown) are provided, adhesive can be applied to one side of the polarizer 1c and the other side of the polarizer 1c to form an adhesive layer.

[0180] Furthermore, the adhesive coating areas located on one side of the polarizer 1c and on the other side of the polarizer 1c can also be used to coat the easy-adhesion composition described later.

[0181] The adhesive coating section 64 includes, for example, a gravure roll 641 which is a coating roll, a container 642 in which adhesive is stored, and a doctor blade 643. The adhesive coating section 64 may also have a backup roll if necessary. The backup roll is positioned opposite the gravure roll 641 with the film in between.

[0182] The gravure roll 641 has multiple cells (recesses that hold adhesive) formed on its surface. The gravure roll 641 rotates around its axis so that its surface comes into contact with the adhesive 65 stored in the container 642 (the direction of rotation of the gravure roll 641 is indicated by an arrow). As it rotates, the adhesive 65 adheres to the surface of the gravure roll 641, including the cells, and any excess adhesive 65 is scraped off into the container 642 by the doctor blade 643. When the gravure roll 641, with the adhesive in its cells, comes into contact with the film, the adhesive 65 in the cells is transferred to one side of the first protective film 12 and the second protective film 13. In this way, the adhesive 65 is coated onto one side of the first protective film 12 and the second protective film 13 from the gravure roll 641.

[0183] The adhesive used to bond the polarizer 1c to the first protective film 12 and the second protective film 13 is not particularly limited, but as described above, it is preferable to use an active energy ray curable adhesive. Conventional active energy ray curable adhesives can be used. Active energy ray curable adhesives generally contain an active energy ray curable component and a polymerization initiator, and optionally contain various additives.

[0184] (Dispensing section 202) The feeding unit 202 includes an easy-adhesion treatment tank 21, a washing treatment tank 22, and a heat treatment tank 23. The easy-adhesion treatment tank 21 performs an easy-adhesion treatment on the surface of the second protective film 13 (film F8) to which the polarizer 11 is bonded. For example, the easy-adhesion treatment tank 21 performs corona discharge treatment or plasma treatment. Corona discharge treatment is performed by applying a high voltage to a wire or sawtooth-shaped electrode placed in the chamber facing the second protective film 13 (film F8). The washing treatment tank 22 has the same configuration as the washing treatment tank 4E described above and is a treatment tank containing a washing treatment liquid. The washing treatment liquid washes the second protective film 13 (film F8). The heat treatment tank 23 has the same configuration as the drying apparatus 205 and heats and dries the second protective film 13 (film F8). In addition, the drying temperature of the heat treatment tank 23 is changed according to the heat treatment conditions set by the manufacturing management system 3000.

[0185] The configuration of the information processing system 50 described above is intended to illustrate the main features of the above embodiment, and is not limited to the above configuration; various modifications can be made within the scope of the claims. Furthermore, it does not exclude configurations that are generally found in information processing devices / systems. For example, the information processing system 50 may include an inspection device 90 placed in the first manufacturing process and / or the second manufacturing process. In addition, the feature point generation function of the analysis unit 93 of the inspection device 90 may be handled by the control unit 51 of the information processing system 50. In this case, image data of the film surface captured and its shooting conditions (information such as transport speed, camera orientation, and field of view) are sent from the inspection device 90 to the information processing system 50, and the feature point generation process is performed on the control unit 51 side.

[0186] Furthermore, the means and methods for performing various processing operations in the information processing system 50 according to the above embodiment can be implemented by either a dedicated hardware circuit or a programmed computer. The program may be provided, for example, on a computer-readable recording medium such as a USB memory stick or a DVD (Digital Versatile Disc)-ROM, or it may be provided online via a network such as the Internet. In this case, the program recorded on the computer-readable recording medium is usually transferred to and stored in a storage unit such as a hard disk. The program may also be provided as a standalone application software, or it may be incorporated into the software of the device as a function of the device.

[0187] This application is based on Japanese Patent Application No. 2023-206655, filed on December 7, 2023, and its disclosures are referenced and incorporated as a whole. [Explanation of symbols]

[0188] 50 Information Processing Systems 51 Control Unit 511 Acquisition Department 512 Alignment section 513 Comparison Extraction Section Output section of 514 52 Storage section 90, 90a1, 90b1, 90b2, 90b3 Inspection device 1000 Film Roll Manufacturing Equipment 2000 Product manufacturing equipment

Claims

1. A method for extracting feature points from a film, Step (a) to obtain first inspection data in the first manufacturing process for manufacturing the film, (b) A step of acquiring second inspection data in a second manufacturing process which is performed after the first manufacturing process and involves post-processing using the manufactured film, (c) a step of comparing the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, The method includes step (d), which extracts feature points from the first and second inspection data that are present in one inspection data but not in the other, or that are determined to be defects in one inspection data but not in the other, based on the comparison results of step (c) above. Method for extracting feature points.

2. A method for extracting feature points from a film, (a) A step of acquiring first inspection data in a first manufacturing step of manufacturing a film or a second manufacturing step of performing post-processing using the manufactured film after the first manufacturing step, (b) A step of acquiring second inspection data at the second manufacturing process, or at an inspection position downstream of the inspection position where the first inspection data was acquired in the second manufacturing process, (c) a step of comparing the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, The method includes step (d), which extracts feature points from the first and second inspection data that are present in one inspection data but not in the other, or that are determined to be defects in one inspection data but not in the other, based on the comparison results of step (c) above. Method for extracting feature points.

3. The aforementioned one inspection data is the first inspection data, and the aforementioned other inspection data is the second inspection data. The method for extracting feature points according to claim 1 or claim 2, wherein in step (d), a first type feature point is extracted that is present in the first inspection data but not present in the second inspection data, or that is determined to be a defect in the first inspection data but not determined to be a defect in the second inspection data.

4. The method for extracting feature points according to claim 3, further comprising step (d) extracting a second type of feature point that is present in the second inspection data but not present in the first inspection data, or that is determined to be a defect in the second inspection data but not determined to be a defect in the first inspection data.

5. The first inspection data and the second inspection data are inspection data obtained by processing images of the film and extracting feature point information. The method for extracting feature points according to claim 3, wherein the feature point information includes size information of the feature point and position information on the film.

6. The step (e) preceding step (c) further includes aligning the film with the first inspection data and the second inspection data, In step (e) above, Step (e1) of moving the positional information of the feature points of the second inspection data without shifting the relative positions of the first inspection data and the second inspection data, Step (e2) of calculating the distance from each of the multiple feature points in one of the first and second inspection data to the nearest feature point in the other inspection data, A method for extracting feature points according to claim 3, comprising: step (e3) repeating step (e1) and step (e2) such that the distance calculated in step (e2) is minimized; and performing this step.

7. The method for extracting feature points according to claim 6, further comprising, after step (e), a step (f) of calculating the distance from each of a plurality of feature points in one of the first and second inspection data to the nearest feature point in the other inspection data, excluding distance values ​​above a predetermined threshold, and determining whether the processing in step (e) is appropriate based on the sum or average of the distance values ​​calculated from the excluded distance values.

8. The step (g) preceding step (c) further includes aligning the film with the first inspection data and the second inspection data, In step (g) above, The method for extracting feature points according to claim 3, comprising performing kernel density estimation on a plurality of feature points of the first inspection data and the second inspection data to calculate a probability density function of the feature points, and then performing film alignment by comparing the calculated probability density functions.

9. The step (g) preceding step (c) further includes aligning the film with the first inspection data and the second inspection data, In step (g) above, The method for extracting feature points according to claim 3, comprising performing kernel density estimation on multiple feature points in one of the first inspection data and the second inspection data to calculate a probability density function of the feature points, and then aligning the film by comparing the calculated probability density function with the positional information of the feature points in the other inspection data.

10. The method for extracting feature points according to claim 3, wherein the post-processing treatment of the second manufacturing step is a coating treatment that imparts a functional layer to the surface of the film manufactured in the first manufacturing step.

11. Before step (c), The method for extracting feature points according to claim 3, further comprising the step (g) of performing a preprocessing on the first inspection data and the second inspection data to exclude feature points that do not meet predetermined conditions.

12. The first inspection data is the second inspection data, and the other inspection data is the first inspection data. The method for extracting feature points according to claim 1 or claim 2, wherein in step (d), a second type feature point is extracted that is present in the second inspection data but not present in the first inspection data, or that is determined to be a defect in the second inspection data but not determined to be a defect in the first inspection data.

13. The first manufacturing process and the second manufacturing process each include a plurality of sub-processes, Multiple inspection data are acquired at each of the upstream and downstream inspection positions of at least one of the multiple sub-processes. The method for extracting feature points according to claim 2, wherein one of the aforementioned plurality of inspection data is used as the first inspection data, and the inspection data at an inspection position downstream of the first inspection data is used as the second inspection data.

14. The method for extracting feature points according to claim 13, further comprising the step (h) of accepting a selection of a combination of first and second inspection data from among the plurality of inspection data.

15. Based on the first type of feature points extracted by the feature point extraction method of claim 3, A method for setting shipping standards in the first manufacturing process.

16. An acquisition unit that acquires first inspection data in a first manufacturing process for manufacturing a film, and second inspection data in a second manufacturing process that is performed after the first manufacturing process and involves post-processing using the manufactured film, A comparison unit that compares the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, Based on the comparison results of the comparison unit, the system includes an extraction unit that extracts feature points that are present in one of the first and second inspection data sets but not in the other, or feature points that are determined to be defects in one of the inspection data sets but not in the other. Information processing system.

17. An acquisition unit that acquires first inspection data in a first manufacturing process for manufacturing a film or a second manufacturing process for performing post-processing using the manufactured film after the first manufacturing process, and second inspection data in the second manufacturing process or at an inspection position downstream of the inspection position from which the first inspection data was acquired in the second manufacturing process, A comparison unit that compares the first feature point information of the film in the first inspection data with the second feature point information of the film in the second inspection data, Based on the comparison results of the comparison unit, the system includes an extraction unit that extracts feature points that are present in one of the first and second inspection data sets but not in the other, or feature points that are determined to be defects in one of the inspection data sets but not in the other. Information processing system.

18. The information processing system according to claim 16 or claim 17, wherein the extraction unit extracts first-type feature points that are present in the first inspection data but not present in the second inspection data, or that are determined to be defects in the first inspection data but not determined to be defects in the second inspection data.

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