Inspection jig

Abstract

To provide flexible substrates that are resistant to damage even when force is applied to a specific area. [Solution] The flexible substrate comprises one end, the other end, and a pattern portion 31a3 formed at least between the one end and the other end. The pattern portion 31a3 has a first tongue piece 31a41 formed by a cut. The first tongue piece 31a41 includes a first region A1 which is the tip region of the first tongue piece 31a41, and a second region A2 which is in communication with the first region A1 and is the root region of the first tongue piece 31a41. The first tongue piece 31a41 is electrically connected to other members via the first region A1. The width of the first region A1 of the first tongue piece 31a41 is wider than the width of the second region A2 of the first tongue piece 31a41.

Description

Technical Field

[0001] The present invention relates to a flexible substrate and the like.

Background Art

[0002] Conventionally, as disclosed in Patent Document 1, a flexible substrate that can be stretched and contracted has been proposed.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, when a force is partially applied to the flexible substrate, there is a risk that a part of the flexible substrate may be damaged, such as being bent.

[0005] An example of the object of the present invention is to provide a flexible substrate that is difficult to be damaged even when a force is partially applied. Other objects of the present invention will become apparent from the description herein.

Means for Solving the Problems

[0006] The flexible substrate according to the present invention includes one end portion, the other end portion, and at least a pattern portion formed between the one end portion and the other end portion. The pattern portion has a first tongue piece formed by a cut. The first tongue piece includes a first region that is a tip region of the first tongue piece and a second region that communicates with the first region and is a root region of the first tongue piece. The first tongue piece is electrically connected to another member via the first region. The width of the first region is wider than the width of the second region.

Effects of the Invention

[0007] As described above, the present invention provides a flexible substrate that is less susceptible to damage even when force is applied to a part of it. [Brief explanation of the drawing]

[0008] [Figure 1] This is an exploded perspective view of the first inspection jig of the first embodiment. [Figure 2] This is an exploded perspective view of the connector contact area, the circuit board holding area, and the circuit board itself. [Figure 3] This is an exploded perspective view of the front circuit board assembly. [Figure 4] This is a perspective view of the first flexible circuit board, seen from the front and below. [Figure 5] This is a perspective view of the area containing the tongue of the first flexible substrate, viewed from the front and below. [Figure 6] This is a view from below of the region containing the tongue-shaped tabs of the first flexible substrate. [Figure 7] This is an exploded perspective view of the assembly of the first flexible circuit board and the first connector, the front holding part, the front connector base, and the front probe group. [Figure 8] This is an exploded perspective view of the rear circuit board assembly. [Figure 9] This is a perspective view of the first inspection fixture, seen from the front and below. [Figure 10] This is a front view of the first inspection jig, seen from the front. [Figure 11] This is a cross-sectional view of the yz region including a region where a first spring is located, showing a first inspection jig and a connector to be inspected in a first state. [Figure 12] This is an enlarged xz cross-sectional view of the region containing the tongue of the first flexible substrate in the first state. [Figure 13] This is a cross-sectional view of the first inspection fixture and the connector to be inspected in the second state, including a region where the first spring is located. [Figure 14] This is a cross-sectional view of the yz region including the region where the first spring is located, showing the first inspection jig and the connector to be inspected in the third state. [Figure 15]It is a yz cross-sectional configuration diagram of the first inspection jig in the fourth state and the inspection target connector, including the region where the first spring is located. [Figure 16] It is an enlarged xz cross-sectional configuration diagram of the region where the tongue piece of the first flexible printed board in the fourth state is located. [Figure 17] It is a yz cross-sectional configuration diagram of the first inspection jig in the fifth state and the inspection target connector, including the region where the first spring is located. [Figure 18] It is a perspective view of the second inspection jig of the second embodiment. [Figure 19] It is a cross-sectional configuration diagram of the second inspection jig. [Figure 20] It is a perspective view of the first flexible printed board of the second embodiment. [Figure 21] It is a perspective view of the third inspection jig of the third embodiment. [Figure 22] It is a perspective view of the first flexible printed board of the third embodiment. [Figure 23] It is a perspective view of the fourth inspection jig of the fourth embodiment. [Figure 24] It is a perspective view of the first to tenth flexible printed boards of the fourth embodiment. [Figure 25] It is an enlarged perspective view of the region where the first tongue piece and the second tongue piece of the first flexible printed board in FIG. 24 are located.

Embodiments for Carrying Out the Invention

[0009] Hereinafter, the first embodiment will be described with reference to FIGS. 1 to 17. Note that the embodiments are not limited to the following embodiments. In addition, the content described in one embodiment is generally applicable to other embodiments as well. Also, each embodiment and each modification can be appropriately combined.

[0010] (First inspection jig 1) As shown in Figure 1, the first inspection jig 1 in the first embodiment comprises a connector contact portion 10, a substrate holding portion 20, a substrate portion 30, and a horizontal position adjustment portion 40. The first inspection jig 1 contacts the connector to be inspected (BtoB connector, Board to Board connector) 100 via the connector contact portion 10 and electrically connects to the internal first flexible substrate 31a and second flexible substrate 32a. Note that the connector to be inspected 100 is not shown in Figure 1.

[0011] To explain the directions, the horizontal direction (front-to-back direction) in which the two circuit board assemblies (front circuit board assembly 31 and rear circuit board assembly 32) are placed side by side is defined as the x-direction, the direction perpendicular to the x-direction and in which the two support parts 43 are placed side by side (left-to-right direction) is defined as the y-direction, and the direction perpendicular to the x-direction and y-direction (up-down direction) is defined as the z-direction. In Figure 1, the directions indicated by the arrows on the x, y, and z axes are defined as the front direction, right direction, and up direction, respectively. Specifically, the direction from the rear circuit board assembly 32 toward the front circuit board assembly 31 is defined as the front direction. Also, the direction from the support part 43 located in the lower right of Figure 1 toward the support part 43 located in the upper left of Figure 1 is defined as the right direction. Also, the direction from the connector contact part 10 toward the horizontal position adjustment part 40 is defined as the up direction.

[0012] (Connector contact portion 10) As shown in Figure 2, the connector contact portion 10 includes a floating guide (first movable member) 11 and a first spring (first elastic member) 13. The floating guide 11 has a hole that penetrates in the z direction. The lower end of the lower holding portion 21 and the lower end of the substrate portion 30 are inserted into the hole of the floating guide 11 from the upper side in the z direction. The upper end of the connector to be inspected 100 is inserted into the hole of the floating guide 11 from the lower side in the z direction. In other words, the connector to be inspected 100 is attached to the floating guide 11 in a detachable manner.

[0013] It is desirable that a guide portion 11a with a sloping shape is provided on the lower z-direction side of the hole in the floating guide 11, such that the opening on the lower z-direction side gradually increases in size, in order to facilitate the insertion of the connector 100 to be inspected.

[0014] The upper side of the floating guide 11 in the z direction is attached to the lower holding part 21 by screw fastening. A first spring 13 is provided between the floating guide 11 and the lower holding part 21. The first spring 13 biases the floating guide 11 away from the first flexible substrate 31a and the second flexible substrate 32a in the z direction. Therefore, unless a force is applied in a compressive direction in the z direction, such as pushing the first inspection jig 1 onto the connector 100 to be inspected from the upper side in the z direction, the floating guide 11 and the lower holding part 21 are kept separated by the first spring 13.

[0015] (Substrate holding part 20) The substrate holding section 20 has a lower holding section (pin block frame) 21 and an upper holding section (connecting plate) 23. The lower holding section 21 is provided on the lower side of the substrate section 30 in the z direction. The upper holding section 23 is provided on the upper side of the substrate section 30 in the z direction. The lower holding section 21 and the upper holding section 23 sandwich the substrate section 30 in the z direction.

[0016] The lower holding portion 21 has a hole that penetrates in the z direction. The lower end of the substrate portion 30 is inserted into the hole in the lower holding portion 21 from the upper side in the z direction. A protrusion is formed on the lower side of the lower holding portion 21 in the z direction. This protrusion is fitted into the hole of the floating guide 11 from the upper side in the z direction.

[0017] The front retaining portion 31c of the front substrate assembly 31 and the rear retaining portion 32c of the rear substrate assembly 32 are attached to the upper side of the lower retaining portion 21 in the z direction. The front retaining portion 31c is attached to the lower retaining portion 21 by fitting using boss holes and adhesive bonding. The rear retaining portion 32c is attached to the lower retaining portion 21 by adhesive bonding.

[0018] The front push block 31i of the front substrate assembly 31 and the rear push block 32i of the rear substrate assembly 32 are attached to the lower side of the upper holding portion 23 in the z direction. The front push block 31i is attached to the upper holding portion 23 from the upper side in the z direction by screwing it through a round hole. The rear push block 32i is attached to the upper holding portion 23 from the upper side in the z direction by screwing it through an elongated hole extending in the x direction. The elongated hole extending in the x direction of the upper holding portion 23 is used to adjust the x-direction spacing between the front holding portion 31c, which holds the front push block 31i, and the rear holding portion 32c, which holds the rear push block 32i.

[0019] The x-direction spacing between the front retaining portion 31c and the rear retaining portion 32c is determined according to the x-direction spacing of the electrode positions of the connector 100 under inspection. If the x-direction spacing of the electrodes of the connector 100 under inspection is narrow, the front retaining portion 31c and the rear retaining portion 32c are attached to the lower retaining portion 21, and the front push block 31i and the rear push block 32i are attached to the upper retaining portion 23, with a narrow x-direction spacing between them. If the x-direction spacing of the electrodes of the connector 100 under inspection is wide, the front retaining portion 31c and the rear retaining portion 32c are attached to the lower retaining portion 21, and the front push block 31i and the rear push block 32i are attached to the upper retaining portion 23, with a wide x-direction spacing between them.

[0020] In other words, the substrate holding unit 20 holds a plurality of flexible substrates (first flexible substrate 31a, second flexible substrate 32a) in a state in which the spacing in the x-direction can be adjusted.

[0021] (Circuit board section 30) The substrate section 30 includes a front substrate assembly 31 and a rear substrate assembly 32. The front substrate assembly 31 is positioned on the front side in the x-direction, and the rear substrate assembly 32 is positioned on the rear side in the x-direction.

[0022] (Front board assembly 31) As shown in Figure 3, the front substrate assembly 31 includes a first flexible substrate (flexible substrate) 31a, a first connector 31b, a front holding part 31c, a front connector base 31d, a front connector retaining rubber 31e, a front connector cover 31f, a front probe group 31g, a front second spring 31h, and a front push block (second movable member) 31i.

[0023] (First flexible substrate 31a) As shown in Figures 4 and 5, the first flexible substrate 31a has a connector connection end (one end) 31a1, a holding part connection end (the other end) 31a2, and a pattern part 31a3.

[0024] The connector connection end 31a1 is the front end in the x-direction and the upper end in the z-direction of the first flexible substrate 31a, and the first connector 31b is attached to the connector connection end 31a1 by soldering or the like. The retaining part connection end 31a2 is the rear end in the x-direction and the upper end in the z-direction of the first flexible substrate 31a, and is hooked onto the front retaining part 31c. Specifically, the hole 31a21 provided in the retaining part connection end 31a2 is fitted into the boss 31c3 provided on the upper z-direction side of the probe receiving part 31c1 of the front retaining part 31c. However, the hooking of the retaining part connection end 31a2 and the front retaining part 31c is not limited to the fitting of the hole 31a21 and the boss 31c3.

[0025] The pattern portion 31a3 is the region between the connector connection end 31a1 and the retaining portion connection end 31a2. A pattern of a transmission line (either a signal line, ground line, or power line) extending from the connector connection end 31a1 is formed on the lower (front) surface of the pattern portion 31a3 in the z direction. The pattern portion 31a3 is bent to form a roughly V shape when viewed from the y direction. The end of the transmission line is provided at the lower end of the pattern portion 31a3 in the lower z direction, in the state where it has been bent to form a roughly V shape. This end of the transmission line is used as a substrate-side electrode that is electrically connected to the electrode of the connector 100 under inspection.

[0026] (Slit S, tongue piece 31a4) As shown in Figure 6, a slit S is provided around the end of the transmission line (the region including the part of the pattern section 31a3 that is electrically connected to the connector 100 under inspection). The slit S has a starting point S1 and an ending point S2 on the side closer to the connector connection end 31a1 than to the end of the transmission line. The starting point S1 and the ending point S2 are in a positional relationship that straddles the transmission line. The slit S extends from the starting point S1 along the transmission line towards the side where the end of the transmission line is located, further extends to surround the end of the transmission line, and further extends along the transmission line to the ending point S2. The slit S forms a roughly U-shaped tongue piece 31a4. That is, the pattern section 31a3 has a tongue piece 31a4. The slit S has closed ends (cuts) at both ends (start point S1 and end point S2), but it may also have one end (one of the start point S1 and end point S2) as an open end and the other end (the other of the start point S1 and end point S2) as a closed end.

[0027] (1st tongue piece 31a41, 1st tongue piece 31a41) The tongue piece 31a4 has a first tongue piece 31a41 and a second tongue piece 31a42. Each of the first tongue piece 31a41 and the second tongue piece 31a42 has a first region (the tip region of the tongue piece) A1 and a second region (the base region of the tongue piece) A2. The first region A1 is the region where the end of the transmission line is located. Each of the first tongue piece 31a41 and the second tongue piece 31a42 is electrically connected to other components such as the connector 100 under inspection via the first region A1. The second region A2 communicates with the first region A1. The second region A2 is the region where the transmission line extends and includes the starting point S1 and ending point S2 (the end of the cut) of the slit S.

[0028] It is desirable that a first tongue piece 31a41 be formed at the end of the signal line of the transmission line. The first tongue piece 31a41 has a substantially U-shape including a wide region at its tip. The width of the first region A1 of the first tongue piece 31a41 is wider than the width of the second region A2 of the first tongue piece 31a41. Specifically, the first region A1 of the first tongue piece 31a41 has a wider width (dimension in the y-direction) than the second region A2 of the first tongue piece 31a41. That is, the first region A1 of the first tongue piece 31a41 has a shape in which the width gradually widens from the region in contact with the second region A2 of the first tongue piece 31a41 toward the tip, and then gradually narrows.

[0029] The first region A1 of the first tongue flap 31a41 has both a region that rapidly widens and a region that rapidly narrows compared to the second region A2 of the first tongue flap 31a41. One of these regions, the "region that rapidly widens compared to the second region A2" and the "region that rapidly narrows compared to the second region A2," is the region of the first region A1 that is close to the second region A2, and the other is the outermost part of the first region A1.

[0030] In the first embodiment, the second region A2 of the first tongue piece 31a41 has a substantially rectangular shape sandwiched between two slits S, and the first region A1 of the first tongue piece 31a41 has a substantially circular shape. For example, if the second region A2 of the first tongue piece 31a41 is the front side and the first region A1 of the first tongue piece 31a41 is the rear side, the rear side has a wider region than the front side. That is, the first tongue piece 31a41 has a substantially front-rear circular shape. However, the first region A1 of the first tongue piece 31a41 is not limited to a substantially circular shape, but may be, for example, a polygonal shape.

[0031] The width of the wider region of the first region A1 of the first tongue piece 31a41 and the shape of the first region A1 are determined so as not to physically interfere with adjacent slits or through holes. For example, the width of the wider region of the first region A1 of the first tongue piece 31a41 (the diameter of the circle if the first region A1 is circular) is approximately twice the width of the second region A2 of the first tongue piece 31a41.

[0032] It is desirable that a second tongue piece 31a42 be formed at the ends of the ground wire and power wire in the transmission line. The second tongue piece 31a42 has a roughly U-shape that does not include a wide area at its tip. The first region A1 of the second tongue piece 31a42 does not have a wider area than the second region A2 of the second tongue piece 31a42. That is, the first region A1 of the second tongue piece 31a42 has a shape in which the width gradually narrows from the area in contact with the second region A2 of the second tongue piece 31a42 toward the tip, without any area that widens.

[0033] The first region A1 of the second tongue flap 31a42 has one region that rapidly widens and the other that rapidly narrows compared to the second region A2 of the second tongue flap 31a42. The one of these regions, "the region that rapidly widens compared to the second region A2" and "the region that rapidly narrows compared to the second region A2," is the outermost part of the first region A1.

[0034] Therefore, the widest region of the first region A1 of the second tongue piece 31a42 has the same width (dimension in the y-direction) as the second region A2 of the second tongue piece 31a42. In other words, the width of the first region A1 of the second tongue piece 31a42 is the same as or less than the width of the second region A2 of the second tongue piece 31a42.

[0035] In the first embodiment, the second region A2 of the second tongue piece 31a42 has a substantially rectangular shape sandwiched between two slits S, and the first region A1 of the second tongue piece 31a42 has a substantially semicircular shape. However, the first region A1 of the second tongue piece 31a42 is not limited to a substantially semicircular shape, but may be, for example, a semi-polygonal shape.

[0036] Furthermore, the patterns provided on the lower (front) side of the pattern section 31a3 in the z direction are not limited to transmission lines. Also, on the lower (front) side of the pattern section 31a3 in the z direction, multiple through-holes 31a5 and grounding wires may be provided only in the area connected to the connector 100 under inspection (the first area A1 of the tongue piece 31a4) and the area where the first connector 31b of the connector connection end 31a1 is soldered. In this case, the area on which grounding wires are provided is reduced, resulting in lower costs compared to the case where the grounding wire pattern is provided across the entire lower (front) side of the pattern section 31a3 in the z direction.

[0037] In order to increase the amount of downward displacement in the z direction by the probe P of the front probe group 31g described later, it is desirable to increase the longitudinal length of the slit S that forms the second region A2 of the tongue piece 31a4. On the other hand, in order to prevent deterioration of the characteristics of the signal line in the high-frequency region, it is desirable to shorten the longitudinal length of the slit S that forms the second region A2 of the tongue piece 31a4. For this reason, the longitudinal length of the slit S that forms the second region A2 of the tongue piece 31a4 is determined while considering the amount of downward displacement of the tongue piece 31a4 in the z direction and the characteristics of the signal line in the high-frequency region. Only one signal line, ground line, or power line may be provided in one tongue piece 31a4, or at least one of the signal line, ground line, and power line may be provided in multiples.

[0038] Furthermore, the first tongue piece 31a41 formed by the slit S is not limited to a substantially U-shape having a wide area at its tip. As long as the pattern portion 31a3 is not stretched, it can be displaced from the upper side in the z direction to the lower side in the z direction by the probe P of the front probe group 31g, it may have other shapes, such as a substantially groove shape, that have a wide area at its tip.

[0039] Furthermore, the second tongue piece 31a42 formed by the slit S is not limited to a substantially U-shape. As long as the pattern portion 31a3 is not stretched, it can be displaced from the upper side in the z direction to the lower side in the z direction by the probe P of the front probe group 31g, it may have other shapes such as a substantially V-shape, a substantially C-shape, a substantially L-shape, or a substantially groove shape.

[0040] On the upper (back) side of the pattern portion 31a3 in the z direction, that is, the side opposite to the side electrically connected to the connector 100 under inspection, a separate grounding wire or grounding surface is provided, distinct from the grounding wire on the lower (front) side in the z direction. The pattern portion 31a3 is provided with multiple through-holes 31a5 for electrically connecting the upper and lower sides in the z direction. Figures 4 to 6 show examples where multiple through-holes 31a5 are provided. However, the arrow line for component number "31a5" points to only one of the multiple through-holes 31a5.

[0041] If multiple through-holes 31a5 are provided in the pattern portion 31a3, even if other components are electrically connected only to one side of the pattern portion 31a3 (the side electrically connected to other components, the front side), it is possible to electrically connect the other components to the other side of the pattern portion 31a3 (the opposite side from the side electrically connected to other components, the back side).

[0042] Furthermore, depending on the specifications of the connector 100 under inspection, the ground wire or ground surface on the upper z-direction side of the pattern portion 31a3, and the multiple through-holes 31a5 may be omitted. Also, in figures other than Figures 4 to 6, the transmission lines, slits S, tongues 31a4, and through-holes 31a5 of the pattern portion 31a3 are not shown.

[0043] Furthermore, multiple through-holes 31a5 and a grounding area (grounding wire or grounding surface) on the upper (back) side in the z direction may be provided only in the area that connects to the connector 100 under inspection (the first area A1 of the tongue piece 31a4) and the area where the first connector 31b of the connector connection end 31a1 is soldered.

[0044] (First connector 31b) As shown in Figure 7, the first connector 31b is attached to the connector connection end 31a1 of the first flexible substrate 31a. The first connector 31b is used to electrically connect the first flexible substrate 31a to an inspection device (not shown).

[0045] (Front holding part 31c) The front retaining portion 31c holds the front connector base 31d on the front side in the x direction. The front retaining portion 31c holds the retaining portion connection end 31a2 of the first flexible substrate 31a on the rear side in the x direction.

[0046] (Probe receiving part 31c1) A probe receiving portion 31c1 for holding the front probe group 31g is provided on the rear side in the x direction and the lower side in the z direction of the front holding portion 31c. The probe receiving portion 31c1 is made of resin. When the probe receiving portion 31c1 is made of resin, it is lighter, easier to process, and less expensive than when the probe receiving portion 31c1 is made of metal. However, the probe receiving portion 31c1 may also be made of metal.

[0047] The probe receiving portion 31c1 is composed of grooves extending in the z direction (upper groove portion 31c11, lower groove portion 31c12) and holes extending in the z direction (upper hole portion 31c13, lower hole portion 31c14). The widths of the upper groove portion 31c11 and the lower groove portion 31c12 in the x and y directions are larger than the outer diameter of the spring housing portion (barrel) P2 of the probe P that constitutes the front probe group 31g. The upper end of the upper hole portion 31c13 communicates with the lower end of the upper groove portion 31c11, and the lower end of the upper hole portion 31c13 communicates with the upper end of the lower groove portion 31c12. The inner diameter of the upper hole portion 31c13 is larger than the outer diameter of the spring housing portion P2 of the probe P that constitutes the front probe group 31g. The upper end of the pilot hole 31c14 communicates with the lower end of the lower groove 31c12, and the lower end of the pilot hole 31c14 is open. The inner diameter of the pilot hole 31c14 is larger than the outer diameter of the tip P1 of the probe P that constitutes the front probe group 31g, and smaller than the outer diameter of the spring housing P2.

[0048] (Method for forming the probe receiving portion 31c1) The upper groove 31c11 and the lower groove 31c12 are formed by a mold. The upper hole 31c13 and the lower hole 31c14 are formed by making holes in the rectangular parallelepiped region using a pin or the like. However, the method of forming the probe receiving portion 31c1 is not limited to the above.

[0049] (Attachment of the first flexible substrate 31a to the front holding portion 31c) The first flexible substrate 31a is attached to the front holding portion 31c such that the following two conditions are met. First condition: The lower side of the front holding portion 31c in the z direction faces the upper surface of the pattern portion 31a3 of the first flexible substrate 31a in the z direction. Second condition: The first region A1 of the tongue piece 31a4 of the first flexible substrate 31a is located on the lower side in the z direction of the pilot hole portion 31c14 of the probe receiving portion 31c1 of the front holding portion 31c.

[0050] (Push block groove 31c2) A groove (push block groove 31c2) is provided on the upper z-direction side of the probe receiving portion 31c1 of the front holding portion 31c, with an opening on the upper z-direction side. The front push block 31i is inserted into the push block groove 31c2 from the upper z-direction side (see Figure 3).

[0051] (Boss 31c3) A boss 31c3 extending upward in the z direction is provided on the upper z-side of the probe receiving portion 31c1 of the front holding portion 31c. The boss 31c3 is used to hook the holding portion connection end 31a2 of the first flexible substrate 31a.

[0052] (Front connector base 31d) The front connector base 31d holds the first connector 31b at the front in the x-direction. The front connector base 31d is located further forward in the x-direction than the front retaining portion 31c and is attached to the front retaining portion 31c.

[0053] The assembly of the first flexible substrate 31a and the first connector 31b is attached to the assembly of the front holding portion 31c and the front connector base 31d by sandwiching the front holding portion 31c and the front connector base 31d in the x-direction and enclosing the lower end of the front holding portion 31c. The front holding portion 31c is attached to the front connector base 31d by screwing it in from the rear in the x-direction.

[0054] (Front connector retaining rubber 31e) The front connector retaining rubber 31e is provided between the first connector 31b and the front connector cover 31f. The front connector retaining rubber 31e is used to minimize the adverse effect on the electrical connection with the inspection device due to variations in the height of the first connector 31b. The front connector retaining rubber 31e is also used to make it difficult for the first connector 31b to move when attaching or detaching the cable extending from the inspection device to the first connector 31b.

[0055] (Front connector cover 31f) The front connector cover 31f covers the pattern portion 31a3 of the first flexible substrate 31a and the front side in the x-direction of the first connector 31b. The front connector cover 31f is attached to the front connector base 31d by screwing it in from the front side in the x-direction. The front connector cover 31f and the front connector base 31d sandwich the first connector 31b and the front connector retaining rubber 31e in the x-direction.

[0056] (Anterior probe group 31g) The front probe group 31g has multiple probes (extendable members) P that extend and retract in the z direction. The multiple probes P are arranged in the y direction. Each probe P constituting the front probe group 31g has a tip P1 on the lower side in the z direction and a spring housing P2 above the tip P1 in the z direction. A spring (not shown) is housed in the spring housing P2. The tip P1 is biased in a direction in which its entire length extends by the spring in the spring housing P2.

[0057] When the first flexible substrate 31a is not attached to the front holding portion 31c, and each of the probes P constituting the front probe group 31g is placed on the probe receiving portion 31c1 of the front holding portion 31c, the tip portion P1 of the probe P protrudes downward in the z direction from the hole (lower hole portion 31c14) at the lower end of the probe receiving portion 31c1. However, the spring housing portion P2 is held in place by the step between the lower hole portion 31c14 and the lower groove portion 31c12, so the probe P does not fall out of the lower hole portion 31c14.

[0058] When the first flexible substrate 31a is attached to the front holding portion 31c, and each of the probes P constituting the front probe group 31g is placed on the probe receiving portion 31c1 of the front holding portion 31c, the tip portion P1 of the probe P contacts the back side of the first region A1 of the tongue piece 31a4 of the first flexible substrate 31a. For example, among the multiple probes P, the first probe P is in a positional relationship that contacts one of the regions (one of the first regions A1 of the tongue piece 31a4) of the first flexible substrate 31a that is electrically connected to the connector 100 to be inspected. Also, among the multiple probes P, the second probe P, which is different from the first probe P, is in a positional relationship that contacts one of the regions (one of the tongue pieces 31a4) of the first flexible substrate 31a that is electrically connected to the connector 100 to be inspected, and the first region A1 of the tongue piece 31a4 corresponding to the first probe P is in a positional relationship that contacts the first region A1 of the tongue piece 31a4 of the other tongue piece 31a4. However, since the probe P is light, it only makes contact and hardly displaces the tongue piece 31a4 downwards in the z direction.

[0059] The front holding portion 31c and the front connector base 31d of the assembly of the first flexible substrate 31a and the first connector 31b are attached to the assembly while each of the probes P constituting the front probe group 31g is placed on the probe receiving portion 31c1.

[0060] (Front second spring 31h, front push block 31i) The front push block 31i is inserted into the groove (push block groove 31c2) of the front holding portion 31c from above in the z direction, in a state where it can move in the z direction. The front push block 31i is used to push each of the probes P constituting the front probe group 31g downward in the z direction. That is, the multiple probes P constituting the front probe group 31g are provided between the first flexible substrate 31a and the front push block 31i. A front second spring 31h is provided between the front holding portion 31c and the front push block 31i. The front second spring 31h biases the front push block 31i away from the front holding portion 31c in the z direction.

[0061] When a force is applied in the z-direction to compress the springs, the spring characteristics (spring pressure, spring constant, etc.) of the first spring 13, the front second spring 31h, and the rear second spring 32h are set such that the compression in the z-direction of the first spring 13 is completed first, followed by the compression of the front second spring 31h and the rear second spring 32h (described later). In other words, the front second spring 31h and the rear second spring 32h compress after the first spring 13 has compressed.

[0062] In other words, when connecting the first flexible substrate 31a and the second flexible substrate 32a to the connector 100 to be inspected, the floating guide 11 and the first flexible substrate 31a and the second flexible substrate 32a are controlled by the first spring 13, the front second spring 31h, and the rear second spring 32h as follows: After the first distance d1 between the floating guide 11 and the first flexible substrate 31a and the second flexible substrate 32a is shortened, the second distance d2 between the front push block 31i and the first flexible substrate 31a is shortened, and at approximately the same time, the second distance d2 between the rear push block 32i and the second flexible substrate 32a is shortened.

[0063] For example, the first distance d1 is the distance in the z direction between the lower end of the floating guide 11 (the opening region into which the connector 100 to be inspected is inserted) and the lower end of the first flexible substrate 31a (the region of the pattern portion 31a3 that is electrically connected to the connector 100 to be inspected). For example, the second distance d2 is the distance in the z direction between the lower end of the front push block 31i (the region in contact with the front probe group 31g) and the lower end of the first flexible substrate 31a (the region of the pattern portion 31a3 that is electrically connected to the connector 100 to be inspected) (see Figure 9).

[0064] Therefore, even if a force is applied in the z-direction in a compressive direction, such as pushing the first inspection jig 1 onto the connector 100 to be inspected from above in the z-direction, as long as the first spring 13 does not compress, the front second spring 31h maintains the separation between the front push block 31i and the front retaining part 31c, and the rear second spring 32h maintains the separation between the rear push block 32i and the rear retaining part 32c.

[0065] (Rear circuit board assembly 32) The rear substrate assembly 32 includes a second flexible substrate (flexible substrate) 32a, a second connector 32b, a rear holding part 32c, a rear connector base 32d, a rear connector retaining rubber 32e, a rear connector cover 32f, a rear probe group 32g, a rear second spring 32h, and a rear push block (second movable member) 32i.

[0066] Except for the orientation in the x-direction being reversed, the configuration of the rear board assembly 32 is the same as that of the front board assembly 31. The second flexible board 32a of the rear board assembly 32 corresponds to the first flexible board 31a of the front board assembly 31. The second connector 32b of the rear board assembly 32 corresponds to the first connector 31b of the front board assembly 31. The rear holding portion 32c of the rear board assembly 32 corresponds to the front holding portion 31c of the front board assembly 31. The rear connector base 32d of the rear board assembly 32 corresponds to the front connector base 31d of the front board assembly 31. The rear connector retaining rubber 32e of the rear board assembly 32 corresponds to the front connector retaining rubber 31e of the front board assembly 31. The rear connector cover 32f of the rear board assembly 32 corresponds to the front connector cover 31f of the front board assembly 31. The rear probe group 32g of the rear substrate assembly 32 corresponds to the front probe group 31g of the front substrate assembly 31. The rear second spring 32h of the rear substrate assembly 32 corresponds to the front second spring 31h of the front substrate assembly 31. The rear push block 32i of the rear substrate assembly 32 corresponds to the front push block 31i of the front substrate assembly 31.

[0067] (Horizontal position adjustment section 40) The horizontal position adjustment section 40 includes a third spring (third elastic member) 41, a support section (third movable member) 43, and a bracket 45 (see Figure 1).

[0068] (Third spring 41, support part 43) Two support sections 43 are provided in the y direction. Each of the two support sections 43 incorporates an annular coil spring (not shown).

[0069] The support portion 43 is used to absorb the displacement of the first region A1 of the tongue piece 31a4 of the first flexible substrate 31a of the front substrate assembly 31, and the tip region of the tongue piece of the second flexible substrate 32a of the rear substrate assembly 32, from the position facing the electrodes of the connector 100 under inspection in the z direction.

[0070] For example, suppose that the first region A1 of the tongue 31a4 of the first flexible substrate 31a of the front substrate assembly 31, and the tip region of the tongue of the second flexible substrate 32a of the rear substrate assembly 32 are offset in the xy plane from the position facing the electrodes of the connector 100 to be inspected in the z direction. In this case, when the first inspection jig 1 is attached to the connector 100 to be inspected, the horizontal position adjustment unit 40 does not move, and the connector contact portion 10, the substrate holding portion 20, and the substrate portion 30 can move in the xy plane.

[0071] The support portion 43 is attached to the upper holding portion 23 by screw fastening from the lower side in the z direction. A third spring 41 is provided between the support portion 43 and the upper holding portion 23. The third spring 41 biases the support portion 43 away from the upper holding portion 23 in the z direction.

[0072] When a force is applied in the z-direction to compress the springs, the spring characteristics (spring pressure, spring constant, etc.) of the first spring 13, the front second spring 31h, and the rear second spring 32h are set such that the compression of the third spring 41 in the z-direction is completed after the compression of the first spring 13, the front second spring 31h, and the rear second spring 32h is completed. In other words, the third spring 41 compresses after the first spring 13, the front second spring 31h, and the rear second spring 32h have compressed.

[0073] In other words, when connecting the first flexible substrate 31a and the second flexible substrate 32a to the connector 100 to be inspected, the floating guide 11, the front push block 31i, the rear push block 32i, and the support part 43 are controlled by the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 as follows: After the first distance d1 between the floating guide 11 and the first flexible substrate 31a and the second flexible substrate 32a is shortened, the second distance d2 between the front push block 31i and the first flexible substrate 31a is shortened, and at approximately the same time, the second distance d2 between the rear push block 32i and the second flexible substrate 32a is shortened. After the second distance d2 between the front push block 31i and the first flexible substrate 31a is shortened, and the second distance d2 between the rear push block 32i and the second flexible substrate 32a is shortened, the third distance d3 between the support portion 43 and the first flexible substrate 31a and the second flexible substrate 32a is shortened.

[0074] For example, the third distance d3 is the distance in the z-direction between the lower end of the support portion 43 (the region facing the upper holding portion 23 in the z-direction) and the lower end of the first flexible substrate 31a (the region of the pattern portion 31a3 that is electrically connected to the connector 100 to be inspected).

[0075] Therefore, even if a force is applied in the z-direction to compress the connector 100 under inspection from above in the z-direction, the third spring 41 will maintain the separation between the support portion 43 and the upper holding portion 23 as long as the first spring 13, the front second spring 31h, and the rear second spring 32h do not compress.

[0076] As an example of spring characteristics, one possible configuration is in which the spring characteristics of each spring are set such that the spring pressure of the third spring 41 is higher than the spring pressure of the front second spring 31h and the rear second spring 32h, and the spring pressure of the front second spring 31h and the rear second spring 32h is higher than the spring pressure of the first spring 13.

[0077] Furthermore, as an example of spring characteristics, one can consider a configuration in which the spring characteristics of each spring are set such that the combined spring constant (elastic modulus) of the two third springs 41 is greater than the combined spring constant (elastic modulus) of the two front second springs 31h and the two rear second springs 32h, and the combined spring constant (elastic modulus) of the two front second springs 31h and the two rear second springs 32h is greater than the combined spring constant (elastic modulus) of the two first springs 13.

[0078] (Bracket 45) The bracket 45 is attached to a device (not shown) that holds and moves the first inspection jig 1, such as an inspection device or machine tool. The bracket 45 is attached to the upper side in the z direction of the two support parts 43. The bracket 45 is attached to the support parts 43 by screwing it in from the upper side in the z direction.

[0079] As shown in Figures 9 to 10, the first spring 13, the front second spring 31h, and the rear second spring 32h are arranged such that a portion of the first spring 13 is visible from the outside, while the front second spring 31h and the rear second spring 32h are almost invisible from the outside (not visible from the front and rear in the x-direction). In addition, the third spring 41 is arranged such that at least a portion of it is visible from the outside when it is extended.

[0080] (Materials for each part: metal parts, resin parts) Of the components constituting the first inspection jig 1, the conductive areas such as the first flexible substrate 31a, the front probe group 31g, the rear probe group 32g, and the screws are made of metal. The other components constituting the first inspection jig 1 are made of non-conductive materials such as resin.

[0081] (Procedure for connecting the first inspection jig 1 to the connector 100 to be inspected) Next, we will explain the changes in the expansion and contraction state of the first spring 13 when the first inspection jig 1 is moved from the upper side in the z direction to the lower side in the z direction and connected to the connector 100 to be inspected (Figures 11 to 17).

[0082] Note that the rear second spring 32h is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13-15, and 17. However, the rear second spring 32h is located on the rear side in the x direction of the front second spring 31h and expands and contracts in the same way as the front second spring 31h. Also, the rear push block 32i is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13-15, and 17. However, the rear push block 32i is located on the rear side in the x direction of the front push block 31i and moves in the same way as the front push block 31i. Furthermore, the rear probe group 32g is not shown in the yz cross-sectional configuration diagrams of Figures 11, 13-15, and 17. However, the rear probe group 32g is located on the rear side in the x direction of the front probe group 31g and operates in the same way as the front probe group 31g. Also, the tongue of the second flexible substrate 32a is not shown. However, the tongue of the second flexible substrate 32a is located on the rear side in the x-direction of the tongue of the first flexible substrate 31a 31a4, and is displaced in the same way as the tongue of the first flexible substrate 31a 31a4.

[0083] As shown in Figure 11, before the first inspection jig 1 contacts the connector 100 to be inspected, the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 are in an extended state, and the first distance d1, the second distance d2, and the third distance d3 are not shortened (first state). At this time, the lower z-direction tip P1 of the probe P constituting the front probe group 31g contacts the first region A1 of the tongue 31a4 of the first flexible substrate 31a (see Figure 12). However, because the probe P is light, the tongue 31a4 of the first flexible substrate 31a is hardly pushed down in the z direction. Similarly, the lower z-direction tip P1 of the probe P constituting the rear probe group 32g contacts the tip region of the tongue of the second flexible substrate 32a. However, because the probe P is lightweight, the tongue of the second flexible substrate 32a is hardly pushed down in the z direction.

[0084] As shown in Figure 13, immediately after the connector 100 to be inspected is fitted into the hole of the floating guide 11 of the first inspection jig 1, the first spring 13, the front second spring 31h, the rear second spring 32h, and the third spring 41 are in an extended state, and the first distance d1, the second distance d2, and the third distance d3 are not shortened (second state). At this time, the first flexible substrate 31a and the second flexible substrate 32a are not in contact with the connector 100 to be inspected.

[0085] As shown in Figure 14, when the first inspection jig 1 moves further downward in the z direction from the second state, the first spring 13 compresses in the z direction, and the lower holding part 21 is brought closer to the floating guide 11 (third state).

[0086] At this time, the first flexible substrate 31a and the second flexible substrate 32a are in close proximity to the connector 100 under inspection. Therefore, the first distance d1 in the third state is shorter than the first distance d1 in the second state. However, the front second spring 31h, the rear second spring 32h, and the third spring 41 are hardly compressed. Therefore, the second distance d2 in the third state is hardly shorter than the second distance d2 in the second state. The third distance d3 in the third state is hardly shorter than the third distance d3 in the second state.

[0087] As shown in Figure 15, when the first inspection jig 1 moves further downward in the z direction from the third state, the front second spring 31h compresses in the z direction, and the front push block 31i is brought closer to the front holding part 31c (fourth state). Similarly, the rear second spring 32h compresses in the z direction, and the rear push block 32i is brought closer to the rear holding part 32c.

[0088] Furthermore, as the front push block 31i moves downward in the z direction, the probe P of the front probe group 31g moves downward in the z direction, and the tip P1 of the probe P pushes the back side (upper side in the z direction) of the first flexible substrate 31a. As a result, the tongue 31a4 of the first flexible substrate 31a is pushed downward in the z direction (see Figure 16). That is, the probe P of the front probe group 31g brings the first region A1 of the tongue 31a4 of the first flexible substrate 31a closer to the electrode of the connector 100 to be inspected. Similarly, as the rear push block 32i moves downward in the z direction, the probe P of the rear probe group 32g moves downward in the z direction, and the tip P1 of the probe P pushes the back side (upper side in the z direction) of the second flexible substrate 32a. As a result, the tongue of the second flexible substrate 32a is pushed downward in the z direction. In other words, the probe P of the rear probe group 32g brings the tip region of the tongue of the second flexible substrate 32a closer to the electrode of the connector 100 to be inspected.

[0089] As a result, the first flexible substrate 31a and the second flexible substrate 32a become electrically connected to the connector 100 under inspection. Also, the first distance d1 in the fourth state becomes even shorter than the first distance d1 in the third state. Furthermore, the front push block 31i and the rear push block 32i are pushed down to the lowest end of their movable range in the z direction. Therefore, the second distance d2 in the fourth state becomes shorter than the second distance d2 in the third state. However, the third spring 41 is hardly compressed. Therefore, the third distance d3 in the fourth state is hardly shorter than the third distance d3 in the third state.

[0090] As shown in Figure 17, when the first inspection jig 1 moves further downward in the z direction from the fourth state, the third spring 41 compresses in the z direction, and the support portion 43 and bracket 45 are brought closer to the upper holding portion 23 (fifth state). At this time, the support portion 43 is in close proximity to the upper holding portion 23. Therefore, the third distance d3 in the fifth state is shorter than the third distance d3 in the fourth state.

[0091] Whether the front second spring 31h and the rear second spring 32h are compressed cannot be visually confirmed from the front and rear sides in the x-direction. Similarly, whether the front push block 31i and the rear push block 32i have moved downward in the z-direction cannot be visually confirmed from the front and rear sides in the x-direction. However, a portion of the third spring 41 is visible from the outside, at least when it is extended. Therefore, by observing the region of the third spring 41 from the outside, it is possible to confirm whether the third spring 41 has begun to compress significantly, that is, whether the downward movement of the front push block 31i and other components in the z-direction has been completed, and whether the first flexible substrate 31a and the second flexible substrate 32a are electrically connected to the connector 100 under inspection.

[0092] (The effect of applying individual pressure with probe P) By considering variations in the height of the contact points (electrodes) between the connector 100 under inspection and the transmission line, it becomes possible to individually press a retractable member such as a probe P against each electrode, thereby ensuring a secure connection between each electrode and the connector 100 under inspection.

[0093] (Effects of providing tongues on the first flexible substrate 31a and the second flexible substrate 32a) To absorb variations in electrode height, when an expandable member such as a probe P is pressed against the substrate and force is applied to a portion of it, the tongue-shaped piece 31a4 of the first flexible substrate 31a, formed in the region including the applied force, is displaced through the slit S, away from other regions adjacent to the tongue-shaped piece 31a4 of the first flexible substrate 31a, in the direction of the applied force (downward in the z direction). Similarly, the tongue-shaped piece of the second flexible substrate 32a, formed in the region including the applied force, is displaced through the slit S, away from other regions adjacent to the tongue-shaped piece of the second flexible substrate 32a, in the direction of the applied force (downward in the z direction). Therefore, compared to a configuration without tongue-shaped pieces, the flexible substrates (first flexible substrate 31a, second flexible substrate 32a) are less likely to be damaged even when displaced.

[0094] (The effect of including multiple electrodes in a single tongue) Compared to a configuration where only one electrode is provided on each tongue piece 31a4, the number of slits S can be reduced, making it easier to form tongue pieces 31a4 in narrow areas. The same applies to the tongue pieces of the second flexible substrate 32a.

[0095] (The effect of widening the tip of the tongue) When the width (y-direction dimension) of the tongues (tongues 31a4 of the first flexible substrate 31a and tongues of the second flexible substrate 32a corresponding to the first tongues 31a41) is narrowed, the following advantages are available compared to when the width of the tongues is widened: The tongues can be made lighter, and they can be displaced with less load. If the load required to displace the tongues is reduced, the total load on the first inspection jig 1 will also be reduced, the load on the components constituting the first inspection jig 1 will be reduced, deformation of those components will be reduced, and the product life of the first inspection jig 1 can be extended.

[0096] When the width of the tongue is increased, there are the following advantages compared to when the width of the tongue is narrowed: Because the width of the tongue is wider, the tolerance for misalignment with the probe P is increased, eliminating the need to improve the precision of the alignment between the probe P and the tongue, making processing easier and reducing the manufacturing cost of the first inspection jig 1.

[0097] In the first embodiment, the width of the tip region (first region A1) of the first tongue piece 31a41, that is, the region of the first tongue piece 31a41 that contacts the probe P, is made wider than the base region (second region A2) of the first tongue piece 31a41. The base region (second region A2) of the first tongue piece 31a41 is made narrower than the tip region (first region A1) of the first tongue piece 31a41. This makes it possible to lighten the tongue piece while increasing the contact area with the probe P, thereby increasing the tolerance for positional misalignment with the probe P. Consequently, it becomes possible to extend the product life of the first inspection jig 1 and reduce manufacturing costs.

[0098] (Effects of making the first tongue piece 31a41 anterior-posterior circular shape) By making the first region A1 roughly circular and the second region A2 roughly square (rectangle), it becomes easier to form the first tongue piece 31a41 compared to configurations with other shapes. Furthermore, the distance from the end of the transmission line to the edge of the first region A1 can be made uniform, maximizing the contact area with the probe P and allowing for a greater tolerance for positional misalignment with the probe P.

[0099] (The effect of making the width of the wide area of ​​the first region A1 of the first tongue piece 31a41 twice the width of the second region A2) This makes it easier to form the first region A1 without physical interference with adjacent slits S or through-holes 31a5.

[0100] (Effects of providing the first tongue piece 31a41 and the second tongue piece 31a42) A first tongue piece 31a41 can be provided at the end of a transmission line (signal line) where the allowable margin of misalignment with the probe P is greater, and a second tongue piece 31a42 can be provided at the end of a transmission line (grounding line and power line) where there is less need to increase the allowable margin of misalignment.

[0101] (The effect of using the end as an electrode) If an electrical connection is made to another component in the middle of a signal line, the area between the connection point and the end of the line may function as an antenna, potentially transmitting and receiving noise. By making the electrical connection to the other component near the end of the line, it is possible to reduce the transmission and reception of noise. Furthermore, if an electrical connection is made to another component in the middle of a grounding wire, impedance matching may be disrupted.

[0102] (Other embodiments, stretchable members other than probes) In the first embodiment, a configuration was described in which probes P are used as expandable members that push the first flexible substrate 31a from the back side (upper side in the z direction) to the lower side in the z direction, and as expandable members that push the second flexible substrate 32a from the back side (upper side in the z direction) to the lower side in the z direction. However, other elastic members may be used, not limited to probes P, as long as they are expandable and contractible in the z direction (the direction in which the flexible substrate is pushed).

[0103] (Other embodiments include cases where the probe is not limited to two rows.) In the first embodiment, a configuration was described in which the front probe group 31g and the rear probe group 32g are arranged in the x-direction, that is, the probe groups arranged in the y-direction are arranged in two rows in the x-direction. However, the number of rows of probe groups may be one row or three or more rows, depending on the arrangement of electrodes of the connector 100 to be inspected. For example, in the second inspection jig 2 described later, one row of probe groups is provided. In the third inspection jig 3 described later, probe groups are provided in four locations. In the fourth inspection jig 4 described later, ten rows of probe groups are provided.

[0104] (Other embodiments, elastic members other than springs) In the first embodiment, a configuration was described in which a first spring 13 is provided between the floating guide 11 and the lower holding portion 21, a front second spring 31h is provided between the front holding portion 31c and the front push block 31i, a rear second spring 32h is provided between the rear holding portion 32c and the rear push block 32i, and a third spring 41 is provided between the upper holding portion 23 and the support portion 43. However, other elastic members, not limited to springs, may be used as long as they are expandable and contractible in the z direction (the direction in which the flexible substrate is pushed).

[0105] (Other embodiments, application examples of inspection jigs using a flexible substrate including tongue pieces) In the first embodiment, an example was described in which a flexible substrate (such as the first flexible substrate 31a) including the first tongue piece 31a41 is pressed via an expandable member such as a probe P, and connected to the inspection target connector 100 located on the opposite side of the expandable member. However, the flexible substrate including the first tongue piece 31a41 may be used to connect to other inspection target members. Furthermore, the inspection jig including the flexible substrate having the first tongue piece 31a41 is not limited to the first inspection jig 1, but may be an inspection jig configured in other shapes.

[0106] For example, the second inspection jig 2 may include a flexible substrate (first flexible substrate 31a) (see the second embodiment, Figures 18 to 20). The second inspection jig 2 includes a first clip member 2a, a second clip member 2b, a base portion 2c, a first flexible substrate 31a, and a first connector 31b.

[0107] To explain the directions, we define the horizontal direction (front-back direction) perpendicular to the rotation axis (first rotation axis ax1) of the second clip member 2b as the x-direction, the direction parallel to the first rotation axis ax1 (left-right direction) as the y-direction, and the direction perpendicular to the x and y directions (up-down direction) as the z-direction. In Figure 18, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the direction from the first gripping area 2a1 of the first clip member 2a toward the area that holds the base portion 2c of the first clip member 2a is defined as the forward direction. Also, in Figure 18, the direction from the area located in the lower right of the front x-direction of the first clip member 2a toward the area located in the upper left of the front x-direction of the first clip member 2a is defined as the right direction. Furthermore, the direction from the first clip member 2a toward the second clip member 2b is defined as the upward direction.

[0108] The first clip member 2a holds the second clip member 2b in a state that allows it to rotate around the first rotation axis ax1. The first clip member 2a has a base portion 2c. The second clip member 2b holds the first flexible substrate 31a and the first connector 31b. The second clip member 2b functions as a substrate holding portion 20. An extendable member (not shown), such as a probe, is provided on the upper z-direction side of the tongue piece 31a4 of the first flexible substrate 31a. The base portion 2c holds the member to be inspected (not shown).

[0109] When force is applied to bring the first gripping region 2a1 of the first clip member 2a and the second gripping region 2b1 of the second clip member 2b closer together, a gap is created between the tongue piece 31a4 of the first flexible substrate 31a and the base portion 2c. The member to be inspected is placed into this gap so that it rests on the base portion 2c. When the force applied to bring the first gripping region 2a1 and the second gripping region 2b1 closer together is released, the tongue piece 31a4 of the first flexible substrate 31a and the member to be inspected resting on the base portion 2c come into contact. At this time, the expandable / contractible member pushes the tongue piece 31a4 downward in the z direction, and the end of the transmission line provided on the tongue piece 31a4 is electrically connected to the member to be inspected.

[0110] Furthermore, for example, the third inspection jig 3 may include a flexible substrate (such as the first flexible substrate 31a) (see the third embodiment, Figures 21-22). The third inspection jig 3 includes a first pressing portion 3a, a first substrate holder 3b, first flexible substrates 31a to fourth flexible substrates 34a, and first connectors 31b to fourth connectors 34b.

[0111] To explain the directions, we will define the horizontal direction (front-back direction) perpendicular to the rotation axis (second rotation axis ax2) of the first presser part 3a as the x-direction, the direction parallel to the second rotation axis ax2 (left-right direction) as the y-direction, and the direction perpendicular to the x and y directions (up-down direction) as the z-direction. In Figure 21, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the forward direction is defined as the direction from the area on the first substrate holder 3b that holds the first presser part 3a toward the area on the first substrate holder 3b where the tip of the first presser part 3a is attached in a detachable state. Also, in Figure 21, the right direction is defined as the direction from the area located in the lower right of the front x-direction of the first substrate holder 3b toward the area located in the upper left of the front x-direction of the first substrate holder 3b. Furthermore, with the tip of the first pressing portion 3a attached to the first substrate holder 3b, the direction from the first substrate holder 3b toward the first pressing portion 3a is defined as the upward direction.

[0112] The first pressing portion 3a holds the member to be inspected (the module to be inspected 300). The first substrate holder 3b holds the first pressing portion 3a in a state that allows it to rotate around the second rotation axis ax2. The first substrate holder 3b holds the flexible substrates (first flexible substrates 31a to fourth flexible substrates 34a). The first substrate holder 3b functions as the substrate holder 20. An extendable member (not shown), such as a probe, is provided on the z-lower side of the tongue 31a4 of the first flexible substrate 31a. The configuration of the second flexible substrates 32a to the fourth flexible substrates 34a is the same as that of the first flexible substrate 31a. The configuration of the second connectors 32b to the fourth connectors 34b is the same as that of the first connector 31b. An extendable member (not shown), such as a probe, is provided on the z-lower side of each tongue of the second flexible substrates 32a to the fourth flexible substrates 34a. The first flexible substrates 31a to the fourth flexible substrates 34a are arranged such that the region including the tongue piece 31a4 of the first flexible substrate 31a, the region including the tongue piece of the second flexible substrate 32a, the region including the tongue piece of the third flexible substrate 33a, and the region including the tongue piece of the fourth flexible substrate 34a are located on the edges that form a rectangle when viewed from above in the z direction.

[0113] When the tip of the first pressing portion 3a is brought close to the first substrate holder 3b, the tongues 31a4 of the first flexible substrate 31a and the tongues of the second flexible substrates 32a to the fourth flexible substrates 34a come into contact with the module 300 to be inspected. At this time, the expandable member pushes the tongues 31a4 and the like upward in the z direction, and the ends of the transmission lines provided on the tongues 31a4 and the like are electrically connected to the module 300 to be inspected.

[0114] Furthermore, for example, the fourth inspection jig 4 may include a flexible substrate (such as the first flexible substrate 31a) (see the fourth embodiment, Figures 23 to 25). The fourth inspection jig 4 has a second pressing portion 4a, a second substrate holding base 4b, and a flexible substrate (such as the first flexible substrate 31a). The flexible substrate of the fourth inspection jig 4 includes the first flexible substrate 31a, the second flexible substrate 32a, the third flexible substrate 33a, the fourth flexible substrate 34a, the fifth flexible substrate 35a, the sixth flexible substrate 36a, the seventh flexible substrate 37a, the eighth flexible substrate 38a, the ninth flexible substrate 39a, and the tenth flexible substrate 310a.

[0115] To explain the directions, we will define the horizontal direction (front-back direction) perpendicular to the rotation axis (third rotation axis ax3) of the second presser part 4a as the x-direction, the direction parallel to the third rotation axis ax3 (left-right direction) as the y-direction, and the direction perpendicular to the x and y directions (up-down direction) as the z-direction. In Figure 23, the directions indicated by the arrows on the x, y, and z axes are defined as the forward direction, the right direction, and the upward direction, respectively. Specifically, the forward direction is defined as the direction from the area on the second substrate holder 4b that holds the second presser part 4a toward the area on the second substrate holder 4b where the tip of the second presser part 4a is attached in a detachable state. Also, in Figure 23, the right direction is defined as the direction from the area located in the lower right of the front x-direction of the second substrate holder 4b toward the area located in the upper left of the front x-direction of the second substrate holder 4b. Furthermore, with the tip of the second pressing portion 4a attached to the second substrate holder 4b, the direction from the second substrate holder 4b toward the second pressing portion 4a is defined as the upward direction.

[0116] The second pressing portion 4a holds the member to be inspected (BGA / LGA (Ball Grid Array / Land Grid Array) 400). The second substrate holder 4b holds the second pressing portion 4a in a state that allows it to rotate around the third rotation axis ax3. The second substrate holder 4b holds a flexible substrate such as the first flexible substrate 31a. The second substrate holder 4b functions as a substrate holder 20. An extendable member (not shown), such as a probe, is provided on the lower z-direction side of the tongue 31a4 of the first flexible substrate 31a. The connector connection end 31a1 of the first flexible substrate 31a is electrically connected to the inspection device (not shown) via a connector (not shown). The configuration of the second flexible substrates 32a to the tenth flexible substrates 310a is the same as that of the first flexible substrate 31a. The first flexible substrates 31a to the tenth flexible substrates 310a are arranged such that the region including the tongues 31a4 (first tongue 31a41, second tongue 31a42) of the first flexible substrate 31a, the region including the tongues of the second flexible substrate 32a, the region including the tongues of the third flexible substrate 33a, the region including the tongues of the fourth flexible substrate 34a, the region including the tongues of the fifth flexible substrate 35a, the region including the sixth flexible substrate 36a, the region including the seventh flexible substrate 37a, the region including the eighth flexible substrate 38a, the region including the ninth flexible substrate 39a, and the region including the tenth flexible substrate 310a are aligned in one direction when viewed from above in the z direction.

[0117] When the tip of the second pressing portion 4a is brought close to the second substrate holder 4b, the tongues 31a4 of the first flexible substrate 31a, and the tongues of the second flexible substrates 32a to the 10th flexible substrate 310a come into contact with the BGA / LGA 400. At this time, the expandable / contractible member pushes the tongues 31a4 and the like upward in the z direction, and the ends of the transmission lines provided on the tongues 31a4 and the like are electrically connected to the BGA / LGA 400.

[0118] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims and their equivalents.

[0119] The following embodiments are provided according to this specification. (Aspect 1) The flexible substrate comprises one end, the other end, and a patterned portion formed at least between the one end and the other end. The patterned portion has a first tongue formed by a notch. The first tongue includes a first region which is the tip region of the first tongue, and a second region which is in communication with the first region and is the root region of the first tongue. The first tongue is electrically connected to other members via the first region. The width of the first region is wider than the width of the second region.

[0120] According to Embodiment 1, when an expandable member such as a probe is pressed against the flexible substrate and a partial force is applied, the first tongue of the flexible substrate formed in the region including the applied force is displaced in the direction of the pressure, away from other regions adjacent to the first tongue of the flexible substrate via a notch. Therefore, compared to the case without the first tongue, the flexible substrate is less likely to be damaged even when a partial force is applied. In addition, the width of the tip region (first region) of the first tongue, that is, the region of the first tongue that contacts the expandable member, is made wider than the base region (second region) of the first tongue. This makes it possible to reduce the weight of the tongue while increasing the contact area with the expandable member, thereby increasing the allowable margin of misalignment with the expandable member.

[0121] (Aspect 2) Preferably, the first region is circular and the second region is rectangular.

[0122] According to embodiment 2, by making the first region circular and the second region rectangular, it becomes easier to form the first tongue piece compared to forms composed of other shapes. Furthermore, the distance from the end of the transmission line to the edge of the first region can be made uniform, the contact area with the expandable member can be made as large as possible, and the allowable amount of misalignment with the expandable member can be made as large as possible.

[0123] (Aspect 3) More preferably, the patterned portion has a second tongue. The width of the tip region of the second tongue is the same as or less than the width of the base region of the second tongue.

[0124] According to embodiment 3, a first tongue can be provided at the end of the transmission line where the allowable amount of misalignment with the expandable member is increased, and a second tongue can be provided at the end of the transmission line where there is less need to increase the allowable amount.

[0125] (Aspect 4) More preferably, the pattern portion has signal lines, ground lines, and power lines, with a first tongue formed on the signal lines and a second tongue formed on the ground lines and power lines.

[0126] According to embodiment 4, a first tongue piece can be provided at the end of the signal line to increase the allowable amount of misalignment with the expandable member, and a second tongue piece can be provided at the end of the grounding wire and power line to reduce the need to increase the allowable amount.

[0127] (Appendix 5) More preferably, the inspection jig comprises a flexible substrate according to any of embodiments 1 to 4 and an expandable member. The expandable member presses the back side of the region including the portion that is electrically connected to the other member, thereby electrically connecting the tongue to the other member.

[0128] According to embodiment 5, it becomes possible to extend the product life of the inspection jig and reduce manufacturing costs.

[0129] (Aspect 6) More preferably, the second region of the first tongue has a rectangular shape. The width of the wider region of the first region of the first tongue is twice the width of the second region of the first tongue.

[0130] According to embodiment 6, it becomes easier to form the first region without physical interference with adjacent notches or through-holes. [Explanation of symbols]

[0131] 1 First inspection jig, 2 Second inspection jig, 2a First clip member, 2a1 First gripping area, 2b Second clip member, 2b1 Second gripping area, 2c Base part, 3 Third inspection jig, 3a First pressing part, 3b First substrate holder, 4 Fourth inspection jig, 4a Second pressing part, 4b Second substrate holder, 10 Connector contact part, 11 Floating guide (first movable member) 11a Guide part, 13 First spring (first elastic member), 20 Substrate holder part, 21 Lower holder part (pin block frame), 23 Upper holder part (connecting plate), 30 Substrate part, 31 Front substrate assembly, 31a First flexible substrate (flexible substrate), 31a1 Connector connection end, 31a2 Holder connection end, 31a21 Hole, 31a3 Pattern part, 31a4 Tongue piece, 31a5 31b Through-hole, 31c First connector, 31c Front retaining part, 31c1 Probe receiving part, 31c11 Upper groove, 31c12 Lower groove, 31c13 Upper hole, 31c14 Lower hole, 31c2 Push block groove, 31c3 Boss, 31d Front connector base, 31e Front connector retaining rubber, 31f Front connector cover, 31g Front probe group, 31h Front second spring (second elastic member), 31i Front push block (second movable member), 32 Rear substrate assembly, 32a Second flexible substrate (flexible substrate), 32b Second connector, 32c Rear retaining part, 32d Rear connector base, 32e Rear connector retaining rubber, 32f Rear connector cover, 32g Rear probe group, 32h Rear second spring (second elastic member), 32i Rear push block (second movable member), 33a Third flexible substrate (flexible substrate), 33b Third connector, 34a Fourth flexible substrate (flexible substrate), 34b Fourth connector, 35a Fifth flexible substrate (flexible substrate), 36a Sixth flexible substrate (flexible substrate), 37a Seventh flexible substrate (flexible substrate), 38a Eighth flexible substrate (flexible substrate), 39a Ninth flexible substrate (flexible substrate), 310a Tenth flexible substrate (flexible substrate), 40 Horizontal position adjustment part, 41 Third spring, 43 Support part, 45 Bracket, 100 Connector to be inspected (inspection target component), 300 Module to be inspected (inspection target component), 400 BGA / LGA, ax1 First rotation axis, ax2 Second rotation axis, ax3Third rotation axis, d1 First distance, d2 Second distance, d3 Third distance, P Probe (extendable member), P1 Tip, P2 Spring housing, S Slit

Claims

1. A flexible substrate having a pattern portion that electrically connects to other components, A stretchable member that presses the aforementioned flexible substrate, A movable member that pushes the expandable member toward the flexible substrate, An inspection jig comprising an elastic member that biases the movable member in a direction away from the flexible substrate, The flexible substrate has tongue-shaped pieces formed by cuts in the pattern portion. The movable member comprises a first movable member into which the other member is inserted, and a second movable member that pushes the expandable member toward the flexible substrate. The elastic member comprises a first elastic member that biases the first movable member away from the flexible substrate, and a second elastic member that biases the second movable member away from the flexible substrate. The second movable member pushes out the expandable member when the second elastic member is compressed after the first elastic member has been compressed. The aforementioned expandable member is an inspection jig that electrically connects the tongue piece to the other member by pressing and displacing the flexible substrate in the direction of the other member.

2. The inspection jig according to claim 1, wherein the tongue piece includes a first region which is the tip region of the tongue piece and a second region which is the base region of the tongue piece and communicates with the first region, and is electrically connected to the other member via the first region.

3. The tongue piece has a first tongue piece and a second tongue piece, The first tongue portion has a width in the first region that is wider than the width in the second region. The inspection jig according to claim 2, wherein the width of the first region of the second tongue is less than or equal to the width of the second region.

4. The inspection jig according to claim 3, wherein the pattern portion has a signal line, a ground line, and a power line, the first tongue is formed on the signal line, and the second tongue is formed on the ground line and the power line.

5. A third movable member for bringing the second movable member closer to the first movable member in a certain direction, The device further comprises a third elastic member that biases the third movable member toward the second movable member, The inspection jig according to claim 1, wherein when the flexible substrate and the other member are electrically connected, the second elastic member contracts first, followed by the third elastic member.

6. The inspection jig according to claim 5, wherein the third elastic member is arranged so as to be visible from the outside when at least a portion of the third elastic member is stretched.

7. The elastic modulus of the second elastic member is greater than that of the first elastic member. The inspection jig according to claim 5, wherein the elastic modulus of the third elastic member is greater than the elastic modulus of the second elastic member.

8. The inspection jig according to claim 2, wherein the expandable member electrically connects the tongue piece to the other member by pressing the back side of the region including the first region.

9. The system further comprises a support portion for supporting the flexible substrate, The inspection jig according to claim 1, wherein when the tongue is electrically connected to the other member, the support portion moves to adjust the connection position between the tongue and the other member.

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