Tube-type dustless ionizer

Abstract

To provide a tube-type dust-free ionizer that can blow a large amount of ions onto an object to be electrostatically removed while preventing strong winds from hitting the object. [Solution] A tube-type dustless ionizer for removing static electricity from a substrate W with ionized air 100, comprising: an ionizer 1 positioned outside a chamber C for removing static electricity from the substrate W, which generates ionized air 100 by ionizing air 102 with soft X-rays 92 and discharges the ionized air 100 from an outlet 12; and a tube 70 for transporting the ionized air 100 from the outlet 12 to the substrate W for removal of static electricity.

Description

Technical Field

[0006] , , , ,

[0005] , ,

[0001] The present invention relates to a tube-type dustless ionizer. In particular, it relates to a tube-type dustless ionizer suitable for removing static electricity from a small substrate.

Background Art

[0002] Conventionally, in the manufacturing processes of semiconductors, liquid crystals, and organic ELs, in the processing and handling processes of semiconductor substrates, liquid crystal substrates, and organic EL substrates, static electricity is charged on the surface of the substrates, and troubles occur in which the circuits of the semiconductor substrates, liquid crystal substrates, and organic EL substrates are damaged by the static electricity. In addition, the charging of each substrate also causes troubles such as the adhesion of dust to the surface.

[0003] As countermeasures against such troubles, in semiconductor, liquid crystal, and organic EL manufacturing apparatuses, an ionizer (static eliminator) that generates ions for preventing charging and removing static electricity on the surface of the substrate is installed. The ionizer includes a corona discharge type ionizer that ionizes air at a high voltage and a soft X-ray type ionizer that irradiates soft X-rays to air to ionize the air.

[0004] In the corona discharge type ionizer, particles are generated from the electrodes during discharge, and in the soft X-ray type ionizer, although no particles are generated, it has the disadvantage that if the soft X-rays leak, they will affect the human body.

[0005] Conventionally, a soft X-ray type ionizer that only extracts ionized air and does not leak soft X-rays to the outside has been developed, but its structure has been complicated. Therefore, the inventor previously proposed a soft X-ray shielding sheet that can prevent the leakage of soft X-rays from the outlet with a simple structure by reducing the number of collisions of the soft X-rays incident from the supply port with the passage to at least 3 times or more before reaching the outlet, thereby blocking the straightness of the soft X-rays and attenuating and eliminating the soft X-rays (Patent Document-1).

Prior Art Documents

Patent Documents

[0006] [Patent Document 1] International Publication No. WO2008 / 023727 [Overview of the Initiative] [Problems that the invention aims to solve]

[0007] However, the inventors discovered that ionized air diffuses when discharged from the outlet, and the number of ions in the ionized air decreases over time, resulting in a reduced ion concentration by the time it reaches the target substrate surface. They also found that this decrease is primarily due to the ions disappearing over time in the air, rather than due to the recombination of positive and negative ions. Therefore, it is effective to supply ionized air to the substrate surface from the ionizer in a short time. However, a smaller chamber for processing the substrate is more efficient, and it is preferable to install the ionizer outside the chamber rather than inside it.

[0008] On the other hand, if a strong wind is used to blow a large amount of ions onto a tiny object such as a substrate for HBM (High Bandwidth Memory), there is a risk that the substrate or other object may be blown away by the wind. Therefore, the object of the present invention is to provide a tube-type dustless ionizer that can blow a large amount of ions onto a substrate to be electrostatically removed while preventing strong wind from hitting the substrate. [Means for solving the problem]

[0009] To solve the above problems, a tube-type dustless ionizer according to a first aspect of the present invention, as shown in Figures 1 and 2, for example, is a tube-type dustless ionizer that removes static electricity from a substrate W with ionized air 100, and comprises an ionizer 1 located outside the chamber C that removes static electricity from the substrate W, which generates ionized air 100 by ionizing air 102 with soft X-rays 92 and discharges the ionized air 100 from an outlet 12, and a tube 70 that transports the ionized air 100 from the outlet 12 to the substrate W to be removed static electricity.

[0010] With this configuration, the ionized air generated by the soft X-ray ionizer is transported to the substrate via a tube, allowing the soft X-ray ionizer to be installed outside the chamber used for processing the substrate. This reduces the chamber space and enables more efficient processing. Furthermore, because the ionized air is transported via a tube, it can be applied to the substrate in a short time, allowing for static elimination with a large amount of ions. In addition, since it is a soft X-ray ionizer, it does not generate dust, and the method of positioning the tube relative to the substrate can be adjusted to prevent strong airflow from hitting the substrate.

[0011] In a tube-type dustless ionizer according to a second aspect of the present invention, a coil 80 is wound around a tube 70, as shown in Figure 5, for example, to generate a magnetic field inside the tube 70. With this configuration, the ion concentration inside the tube is higher near the center and lower at the periphery due to the influence of the magnetic field. This makes it easier to supply highly concentrated ionized air to the substrate, thereby increasing efficiency.

[0012] In a third aspect of the present invention, a tube-type dustless ionizer is provided, for example, as shown in Figure 6, at the outlet 74 of the ionized air 100 of the tube 70, there is a flow divider 110 that allows the ionized air 100c from the central side of the tube 70 to pass through, while obstructing the flow of ionized air 100e from the peripheral side of the tube 70. With this configuration, the flow divider allows only the ionized air from the central side to pass through, while obstructing the flow of ionized air from the peripheral side. As a result, only ionized air with a high ion concentration comes into contact with the substrate, meaning that a large amount of ions can be blown onto the substrate with less air, i.e., without applying a strong wind.

[0013] In a fourth aspect of the present invention, a tube-type dustless ionizer is provided, for example, as shown in Figure 7, at the outlet 74 of the ionized air 100 of the tube 70, there is a mesh member 120 that disrupts the flow of the ionized air 100 as it passes through. With this configuration, the flow of the ionized air is disrupted by the mesh member, making it possible to blow a large amount of ions onto the substrate without applying a strong wind.

[0014] In a fifth aspect of the present invention, a tube-type dustless ionizer is provided, for example, as shown in Figure 8, at the outlet 74 of the ionized air 100 of the tube 70, there is a dispersion member 130 that disperses the flow of ionized air 100 in multiple directions. With this configuration, the flow of ionized air is dispersed in multiple directions by the dispersion member, making it possible to blow a large amount of ions onto the substrate without applying a strong wind.

[0015] In the sixth aspect of the present invention, a tubular dust-free ionizer is provided, for example, as shown in Figure 5, on the inner surface of the tube 70, which is tin-plated 76. With this configuration, the tin plating on the inner surface of the tube reduces the capture of ions in the ionized air on the inner surface of the tube, making it possible to spray a large amount of ions onto the substrate. [Effects of the Invention]

[0016] The present invention provides a tube-type dustless ionizer that removes static electricity from a substrate using ionized air. The ionizer is located outside the chamber where the substrate is removed from static electricity and comprises a soft X-ray ionizer that generates ionized air by ionizing air with soft X-rays and discharges the ionized air from an outlet, and a tube that transports the ionized air from the outlet to the substrate to be removed from static electricity. Therefore, the ionizer can be installed outside the chamber, and a large amount of ions can be blown onto the object to be electrostatically removed while preventing strong winds from hitting the substrate. [Brief explanation of the drawing]

[0017] [Figure 1]It is a conceptual diagram for explaining the tube-type dust-free ionizer of the present invention. [Figure 2] It is a conceptual diagram for explaining the soft X-ray type ionizer. [Figure 3] It is a cross-sectional view for explaining the ionization air passage portion of the soft X-ray shielding sheet used at the outlet of the soft X-ray type ionizer. [Figure 4] It is an exploded perspective view of the soft X-ray shielding sheet for explaining the ionization air passage portion of the soft X-ray shielding sheet used at the outlet of the soft X-ray type ionizer. [Figure 5] It is a conceptual diagram for explaining the tube and the coil wound around the tube. [Figure 6] It is a schematic cross-sectional view for explaining the flow dividing member installed at the discharge port of the tube. [Figure 7] It is a schematic cross-sectional view for explaining the mesh member installed at the discharge port of the tube. [Figure 8] It is a schematic cross-sectional view for explaining the dispersion member installed at the discharge port of the tube.

Embodiments for Carrying Out the Invention

[0018] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each figure, the same or corresponding devices are denoted by the same reference numerals, and redundant explanations are omitted. First, referring to FIG. 1, the tube-type dust-free ionizer of the present invention will be described.

[0019] The tube-type dustless ionizer is used, for example, in a processing apparatus H that processes a semiconductor substrate W. The processing of the semiconductor substrate W is usually performed in a chamber C because a clean air environment / dry environment or the like is required. In order to remove static electricity from the substrate W to be processed, that is, to neutralize it, ionized air 100 is supplied from the tube-type dustless ionizer to the substrate W. At that time, for example, since it is desirable to reduce the volume inside the chamber C that is a clean air environment, it is preferable to install the ionizer 1 outside the chamber C. Therefore, in the tube-type dustless ionizer, the ionizer 1 is installed outside the chamber C, and the ionized air 100 is supplied to the substrate W to be processed through the tube 70.

[0020] Referring also to FIG. 2-4, the soft X-ray type ionizer 1 will be described. The soft X-ray type ionizer 1 has a container 10 that ionizes air 102 and provides a space through which ionized air 100, which is the ionized air, flows. The container 10 has an air inlet 14 for taking in air 102 into the container 10. The air inlet 14 may be provided with a fan (not shown) to forcibly take in the air 102 outside the container 10 into the container 10. A soft X-ray generator 90 is disposed near the position where the air inlet 14 is provided in the container 10. The soft X-ray generator 90 generates soft X-rays 92 and irradiates the air inside the container 10, whereby the air is ionized. Since the soft X-ray generator 90 may be a known soft X-ray device, detailed description thereof will be omitted. An outlet 12 for the ionized air 100 is formed at a position away from the position where the air inlet 14 is provided in the container 10. When the soft X-ray generator 90 is provided near the air inlet 14 and the outlet 12 is provided at a position away from the air inlet 14, air flows from the air inlet 14 to the outlet 12, and the air can be ionized by the soft X-rays 92 from the soft X-ray generator 90, and the ionized air 100 is preferably discharged from the outlet in a short time, but other arrangements may also be possible. Note that the container 10 is generally formed of stainless steel or other metals. Since the soft X-ray type ionizer 1 generates the ionized air 100 by irradiating the air 102 with the soft X-rays 92, unlike the corona discharge type ionizer, particles are not generated from the electrodes during discharge, and it becomes a dustless ionizer.

[0021] A soft X-ray shielding sheet 20 is placed at the outlet 12. In other words, the ionized air 100 must pass through the soft X-ray shielding sheet 20 before being released from the container 10.

[0022] Here, with reference to Figures 3 and 4, the ionized air passage portion 44 of the soft X-ray shielding sheet 20 through which the ionized air 100 passes will be described. Figure 3 is a cross-sectional view of the soft X-ray shielding sheet 20 near the ionized air passage portion 44, and Figure 4 is an exploded perspective view thereof. The soft X-ray shielding sheet 20 is formed by laminating and fixing three sheets: a first outer layer sheet 30 made of a material that does not allow soft X-rays 92 to pass through, an intermediate layer sheet 34 made of a material that does not allow soft X-rays 92 to pass through, and a second outer layer sheet 40 made of a material that does not allow soft X-rays 92 to pass through. Here, the material that does not allow soft X-rays to pass through is typically a metal such as lead, iron, or aluminum, but it is not limited to metals. If it is a metal, it can block the passage of soft X-rays 92 even if it is thin and is easy to form thinly, making it suitable for the soft X-ray shielding sheet 20. Also, the method of lamination and fixing is not particularly limited. The first outer layer sheet 30 has a supply port 32 through which ionized air 100 from inside the container 10 enters the soft X-ray shielding sheet 20. The intermediate layer sheet 34 has ionized air passages 38 with ionized air inlet openings 36 at both ends. The second outer layer sheet 40 has an outlet 42 through which ionized air 100 is released outside the container 10.

[0023] In this embodiment, the supply ports 32 of the first outer layer sheet 30 are two openings in the first outer layer sheet 30, spaced apart from each other. The ionized air passage 38 of the intermediate layer sheet 34 is provided with ionized air inlet openings 36 that are opened at positions communicating with the supply ports 32 of the first outer layer sheet 30, and is formed to communicate with each of the ionized air inlet openings 36. The outlet 42 of the second outer layer sheet 40 is opened at a position communicating with the ionized air passage 38 of the intermediate layer sheet 34.

[0024] When the first outer layer sheet 30, intermediate layer sheet 34, and second outer layer sheet 40 formed as described above are laminated and fixed together, each supply port 32 of the first outer layer sheet 30 and each ionized air inlet opening 36 of the intermediate layer sheet 34 are connected, and furthermore, at an intermediate position of the ionized air passage 38 of the intermediate layer sheet 34, the ionized air passage 38 and the outlet 42 of the second outer layer sheet 40 are connected, forming an ionized air passage section 44. The soft X-ray shielding sheet 20 may have one ionized air passage section 44, or it may have multiple ionized air passage sections 44. The shape of the ionized air passage section 44, the number of openings, etc., are not limited to those described above.

[0025] As the soft X-rays 92 enter from the supply port 32 and reach the outlet 42, the number of collisions with the inner surface 41 of the second outer layer sheet 40 and the inner surface 31 of the first outer layer sheet 30 increases, causing the soft X-rays 92 to attenuate and disappear. To this end, the ionization air passage 38 is provided with a bent portion 39 that bends 90 degrees on a plane.

[0026] Furthermore, in order to reduce the fluid resistance of the ionized air 100 and allow it to reach the outlet 42 in a short time, each bent portion 39 of the ionized air passage 38 is formed with a curved surface 37 to reduce the fluid resistance of the ionized air 100. That is, the ionized air passage 38 has at least one bent portion 39 that bends 90 degrees on a plane, and aims to eliminate the soft X-rays 92 by impacting the inner surface, i.e., the passage. Note that the shape of the ionized air passage 38 may be other shapes. A shape that increases the number of impacts of the soft X-rays 92 on the passage while suppressing the fluid resistance of the ionized air 100 is preferred.

[0027] The operation of the soft X-ray shielding sheet 20 used in the soft X-ray ionizer 1 with the above configuration will be explained with reference to Figure 3. Inside the container 10, which is upstream of the soft X-ray shielding sheet 20, ionized air 100, which has been ionized into positive and negative ions by soft X-rays 92, is pressurized when air 102 is supplied into the container 10. Therefore, the ionized air 100 is released from the supply port 32, through the ionized air inlet 36 and the ionized air passage 38, to the downstream side of the soft X-ray shielding sheet 20 from the outlet 42.

[0028] On the other hand, soft X-rays 92 enter from each supply port 32 and travel in a straight line, passing through the ionized air inlet opening 36 and the ionized air passage 38 to the outlet 42. As shown in Figure 3, during this journey, they collide with the inner surface 41 of the second outer layer sheet 40, the inner surface 31 of the first outer layer sheet 30, or the curved surface 37 of the bent portion 39, thus preventing them from traveling in a straight line. The collisions with the inner surfaces 31 and 41 attenuate the soft X-rays 92, causing them to almost disappear, and preventing dangerous soft X-rays 92 from leaking from the outlet 42. It is preferable for the soft X-rays 92 to collide with the inner surfaces 31 and 41 three or more times for them to attenuate and almost disappear. To this end, the size and length of the cross-section of the ionized air passage 44, the number of bent portions 39, and the path of the ionized air passage 38 are designed accordingly. Furthermore, the number of sheets constituting the soft X-ray shielding sheet 20 may be four or more, rather than three, by having multiple intermediate layer sheets 34 through which ionized air passages 38 are connected.

[0029] The ionized air 100 introduced from the supply port 32 passes through the ionized air passage 38 to the outlet 42. By making the bent portion 39 of the ionized air passage 38, which is provided from the viewpoint of preventing leakage of soft X-rays 92, a curved surface 37, fluid resistance is reduced, and the ionized air 100 can reach the outlet 42 in a short time. In particular, it is preferable that the ionized air 100 can pass through the soft X-ray shielding sheet 20 in a short time, and the path of the ionized air passage 44 is shortened. Therefore, a large amount of ions are released downstream from the outlet 42.

[0030] In the case of the soft X-ray shielding sheet 20 shown in Figures 3 and 4, there are two supply ports 32 and one outlet 42. However, the ionized air 100 flowing from both sides through the ionized air passage 38 collides at the outlet 42, allowing the ionized air 100 to be ejected vertically from the outlet 42.

[0031] Furthermore, in the soft X-ray ionizer 1, as shown in Figure 2, a soft X-ray shielding sheet 22 may be placed at the air intake port 14 that takes in air 102 into the container 10, and the air 102 may be configured to pass through the soft X-ray shielding sheet 22 as it enters the container 10. The soft X-ray shielding sheet 22 may have the same configuration as the soft X-ray shielding sheet 20. By configuring it in this way, leakage of soft X-rays 92 from the air intake port 14 can also be prevented, and safety is enhanced.

[0032] For example, a soft X-ray ionizer 1 having the above configuration is installed outside the chamber C, and a tube 70 is connected to the outlet 12 of the soft X-ray ionizer 1. The tube 70 is drawn into the chamber C. The ionized air 100 discharged from the outlet 12 passes through the tube 70 and is supplied to the substrate W inside the chamber C. It is preferable that the tube 70 be made of a non-magnetic material such as stainless steel, so that ions in the ionized air 100 are not trapped on the inner surface of the tube 70.

[0033] Since the soft X-ray ionizer 1 can be installed outside the chamber C, for example, by installing the soft X-ray ionizer 1 inside a closed box as shown in Figure 1, the safety of workers from soft X-ray leakage can be further enhanced.

[0034] It is known that the ion concentration in ionized air 100 decreases over time. Previously, this decrease was thought to be due to the recombination of positive and negative ions in the ionized air 100, but it has been found that the effect of recombination is small, and the decrease occurs over time in the air. In other words, the rate of decrease hardly changes with ion concentration. Therefore, the ionized air 100 is transported at high speed through a tube 70 with a smaller cross-section than the outlet 12.

[0035] For example, let's assume the effective existence time of ions in ionized air 100 is 0.2 seconds. If the flow rate of ionized air 100, i.e., the amount of air supplied to the soft X-ray ionizer 1, is 30 L / min, then tubes 70 up to a length of 5.1 m for a nominal 6 mm tube (inner diameter 5 mm), 2.6 m for a nominal 8 mm tube (inner diameter 7 mm), and 1.6 m for a nominal 10 mm tube (inner diameter 9 mm) can be used. The flow velocity of ionized air 100 in each size of tube is 26 m / s for a nominal 6 mm tube, 13 m / s for a nominal 8 mm tube, and 7.9 m / s for a nominal 10 mm tube.

[0036] The ionized air 100 transported by tube 70 is directed onto the substrate W to be processed in chamber C. The substrate W is electrostatically discharged by the ions. By forming tube 70 from a flexible material such as stainless steel, it becomes easier to adjust the tip of tube 70 so that the ionized air 100 flows toward the surface of the substrate W.

[0037] As shown in Figure 5, a coil 80 may be wound around the tube 70, and current may be passed from the power supply 82 to generate a magnetic field inside the tube 70. When a magnetic field is formed, the pinch effect causes ions in the ionized air 100 inside the tube 70 to gather towards the center. That is, the ion concentration is higher in the ionized air 100c at the center of the tube 70, and lower in the ionized air 100e at the periphery. Therefore, by directing the ionized air 100c at the center onto the substrate W, a larger amount of ions can be blown with less ionized air 100, i.e., with a weaker airflow, thereby enhancing the static elimination effect.

[0038] To strengthen the magnetic field generated inside the tube 70, a magnetic pipe 86 may be installed outside the coil 80 wound around the tube 70. The magnetic pipe 86 reduces magnetic resistance, thereby strengthening the magnetic field. In other words, more ions will gather in the ionized air 100c at the center. Furthermore, as shown in Figure 2, it is preferable to place an insulator 72 between the tube 70 and the soft X-ray ionizer 1 to insulate the tube 70 from the soft X-ray ionizer 1, so that ions in the ionized air 100 are not trapped in the tube 70.

[0039] As mentioned above, the flow velocity of the ionized air 100 flowing out of tube 70 is high. If such a strong flow of ionized air 100 is applied to a small substrate W, for example, a few millimeters square and several tens of micrometers thick, there is a risk that the substrate W may be blown away. Therefore, it is also effective to devise a way to weaken the flow of ionized air 100 while applying a large amount of ions.

[0040] In the example shown in Figure 6, ionized air 100c from the center is passed through the outlet 74 of the tube 70, but a flow divider 110 is installed to obstruct the flow of ionized air 100e from the peripheral side of the tube 70. The flow divider 110 is trumpet-shaped, and the ionized air 100c from the center flows unimpeded by the flow divider 110, but the ionized air 100e from the peripheral side is deflected away from the center and bent outwards by the trumpet-shaped flow divider 110. As a result, only the ionized air 100c from the center hits the substrate W, reducing the amount of ionized air 100 hitting the substrate W and weakening the flow. The flow divider 110 may be supported by a non-magnetic support 112 on the tube 70. The flow divider 110 is also made of a non-magnetic material to prevent ion capture. Furthermore, in order to ensure that ions in the ionized air 100 are more reliably trapped by the flow divider 110, it is preferable to form the support 112 from an insulating material, or to insulate the flow divider 110 from the tube 70 by placing an insulator between the support 112 and the tube 70, or between the support 112 and the flow divider 110.

[0041] In the example shown in Figure 7, a mesh member 120 is installed at the outlet 74 of the tube 70. The mesh member 120 is, for example, a material made by intricately intertwining thin fibers or by overlapping wire mesh. The ionized air 100 from the tube 70 has its flow disturbed by the mesh member 120, and the weakened flow strikes the substrate W. The mesh member 120 is also made of a non-magnetic material to prevent it from trapping ions. Furthermore, in order to more reliably trap ions in the ionized air 100 by the mesh member 120, it is preferable to insulate the mesh member 120 from the tube 70 by placing an insulator 122 between the tube 70 and the mesh member 120.

[0042] In the example shown in Figure 8, a dispersion member 130 is installed at the outlet 74 of the tube 70. The dispersion member 130 is a member that, for example, is like a lid that expands and covers the outlet 74 of the tube, and has numerous holes formed in multiple directions. The ionized air 100 from the tube 70 has its flow directed in multiple directions by the dispersion member 130, and only the flow in the center is weakened and hits the substrate W. The dispersion member 130 is also made of a non-magnetic material to prevent it from trapping ions. Furthermore, in order to more reliably trap ions in the ionized air 100 by the dispersion member 130, it is preferable to insulate the dispersion member 130 from the tube 70 by placing an insulator 132 between the tube 70 and the dispersion member 130.

[0043] Furthermore, as shown in Figure 5-8, the inner surface of the tube 70 may be tin-plated. By tin-plating, scratches on the inner surface of the tube 70 that may have occurred during processing can be covered with a smooth surface, thereby reducing ion adhesion on the inner surface. In addition to the inner surface of the tube 70, tin plating 116 may also be applied to the inner surface of the flow divider 110 (the surface on the central side where the ionized air 100c flows), as shown in Figure 6. Although not shown, tin plating may also be applied to the mesh member 120, dispersion member 130, and other parts that come into contact with the ionized air 100. Note that the plating is not limited to tin, and other plating materials may be used.

[0044] Although a soft X-ray ionizer 1 was used as the configuration for the dust-free ionizer, other configurations may also be used. Furthermore, the component for weakening the flow of ionized air 100 at the outlet 74 of tube 70 may be omitted depending on the application, or a configuration other than the one described above may be used. [Explanation of Symbols]

[0045] 1. Soft X-ray ionizer 12 Exit 10 containers 12 Exit 14 Air intake 20. Soft X-ray shielding sheet 30. First outer layer sheet 31 Inner surface of the first outer layer sheet 32 supply ports 34 Intermediate layer sheet 36 Ionized air inlet opening 37 Curved surface 38 Ionized air passage 39 Bend section 40. Second outer layer sheet 41 Inner surface of the second outer layer sheet 42 Exit 44 Ionized air passage section 70 tubes 72 Insulators 74 Outlet 76 Tin-plated 80 coils 82 Power supply 86 Magnetic Pipe 92 Soft X-ray 100 Ionized air 100°C Ionized air on the central side 100e Peripheral ionized air 102 Air 110 Flow Divider 112 Support 116 Tin-plated 120 Mesh Member 122 Insulators 130 Dispersed member 132 Insulators C Chamber H Processing Apparatus W board

Claims

1. A tube-type dustless ionizer that removes static electricity from a substrate using ionized air, An ionizer positioned outside the chamber for static electricity removal of the substrate, comprising a soft X-ray ionizer that ionizes air with soft X-rays to generate ionized air and discharges the ionized air from an outlet; The system includes a tube that transports the ionized air from the outlet to the substrate to be statically removed; Tube-type dustless ionizer.

2. A coil is wound around the tube, generating a magnetic field inside the tube. A tube-type dustless ionizer according to claim 1.

3. The tube has a flow divider at the outlet for the ionized air that allows the ionized air from the central side of the tube to pass through and obstructs the flow of the ionized air from the peripheral side of the tube. A tube-type dustless ionizer according to claim 1 or claim 2.

4. The tube has a mesh member at the outlet for the ionized air that disrupts the flow of the ionized air as it passes through. A tube-type dustless ionizer according to claim 1 or claim 2.

5. The tube has a dispersion member at the outlet for the ionized air that disperses the flow of the ionized air in multiple directions. A tube-type dustless ionizer according to claim 1 or claim 2.

6. The inner surface of the tube is tin-plated, A tube-type dustless ionizer according to claim 1 or claim 2.

Images