Sample holder

Abstract

To provide a sample holder that is less prone to a decrease in uniform heat distribution. [Solution] A sample holder according to one aspect of the present disclosure comprises a heating plate, a base plate, an insulating member, a power receiving terminal, and a power supply terminal. The heating plate has a surface for holding the sample and is equipped with a heating element. The base plate is positioned opposite the heating plate and has a first through hole. The insulating member is positioned on the opposite side of the base plate from the heating plate and has a second through hole. The power receiving terminal is located inside the first and second through holes and is connected to the heating element via a conductor. The power supply terminal is connected to the power receiving terminal. The power receiving terminal has a first portion, a second portion with a smaller diameter than the first portion, and a stepped portion formed by the difference in diameter between the first and second portions. The power receiving terminal is supported by the insulating member at the stepped portion.

Description

Technical Field

[0001] This disclosure relates to a sample holder.

Background Art

[0002] In the manufacturing process of semiconductor wafers, a heating device (for example, a coater developer device) that heats the wafer to a predetermined temperature while holding the wafer is used.

[0003] Patent Document 1 discloses a heating device having a base plate and a face plate located above the base plate. The face plate has an aluminum substrate on which a wafer is placed and a film heater attached to the lower surface of the aluminum substrate.

[0004] The heating device described in Patent Document 1 has a terminal block attached to the lower surface on the outer peripheral side of the base plate. The terminal block is electrically connected to a power supply terminal extending from the film heater and is also electrically connected to a wiring from an external power source. Specifically, a crimp terminal is provided at the tip of the wiring from the external power source, and the crimp terminal is screwed and fixed to a metal plate constituting the terminal block with screws.

Prior Art Documents

Patent Documents

[0005] [[ID=3…]]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, there is room for improvement in the heat uniformity in the above-described conventional technology.

[0007] For example, when heating devices are used and the temperature is repeatedly raised and lowered, each component of the heating device undergoes repeated deformation (expansion and contraction). When the coefficients of thermal expansion differ for each component, repeated deformation can cause loosening of connections such as fasteners. As described in Patent Document 1, when a crimp terminal is screw-fixed to a terminal block, repeated deformation can loosen the connection between the crimp terminal and the terminal block, leading to unstable power supply and reduced uniform heating of the faceplate.

[0008] This disclosure provides a sample holder that is less prone to a decrease in uniform heat distribution. [Means for solving the problem]

[0009] A sample holder according to one aspect of the present disclosure comprises a heating plate, a base plate, an insulating member, a power receiving terminal, and a power supply terminal. The heating plate has a surface for holding the sample and is equipped with a heating element. The base plate is positioned opposite the heating plate and has a first through hole. The insulating member is positioned on the opposite side of the base plate from the heating plate and has a second through hole. The power receiving terminal is located inside the first and second through holes and is connected to the heating element via a conductor. The power supply terminal is connected to the power receiving terminal. The power receiving terminal has a first portion, a second portion with a smaller diameter than the first portion, and a stepped portion formed by the difference in diameter between the first and second portions. The power receiving terminal is supported by the insulating member at the stepped portion. [Effects of the Invention]

[0010] According to this disclosure, it is possible to provide a sample holder that is less prone to a decrease in uniform heat distribution. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a cross-sectional view showing an example of the configuration of a sample holder according to the first embodiment. [Figure 2] Figure 2 is a cross-sectional view showing an example of the configuration of a sample holder according to the second embodiment. [Figure 3]Figure 3 is a cross-sectional view showing an example of the configuration of a sample holder according to the third embodiment. [Figure 4] Figure 4 is a cross-sectional view showing an example of the configuration of a sample holder according to the fourth embodiment. [Figure 5] Figure 5 is a cross-sectional view showing an example of the configuration of a sample holder according to the fifth embodiment. [Figure 6] Figure 6 is a cross-sectional view showing a modified configuration of the sample holder as seen along the line VI-VI in Figure 2. [Figure 7] Figure 7 is a plan view showing a modified configuration of the first nut. [Modes for carrying out the invention]

[0012] The embodiments for implementing the sample holder according to this disclosure (hereinafter referred to as "Embodiments") will be described in detail below with reference to the drawings. However, this disclosure is not limited by these embodiments. Furthermore, each embodiment can be combined as appropriate, provided that the processing content is not inconsistent. Also, the same parts are denoted by the same reference numerals in each of the following embodiments, and redundant descriptions are omitted.

[0013] In conventional heating devices (see Patent Document 1), crimp terminals are connected to a terminal block directly fixed to the underside of the base plate. When the heating device is used and the temperature is repeatedly raised and lowered, the terminal block may be repeatedly deformed. For example, the terminal block and the base plate have different coefficients of thermal expansion. Therefore, when the terminal block is directly fixed to the base plate, excessive load is easily generated at the fixing point due to the difference in coefficients of thermal expansion, which makes the terminal block prone to deformation.

[0014] When the terminal block repeatedly undergoes deformation, there is a risk of repeated loads occurring at the connection point between the crimp terminal and the terminal block. Specifically, for example, when the crimp terminal and the terminal block are fixedly connected by screwing, there is a risk that torque or the like in the direction of loosening the screw will repeatedly occur in such a screw. In this way, when the connection point between the crimp terminal and the terminal block loosens, power supply to the face plate becomes unstable, and there was a risk that the soaking property of a sample such as a wafer would deteriorate.

[0015] Also, in a conventional heating device, since the terminal block is directly fixed to the base plate, heat easily transfers from the base plate to the terminal block, and a load caused by the difference in the coefficient of thermal expansion repeatedly easily occurs at the connection point between the crimp terminal and the terminal block. Also due to this, loosening occurred at the connection point between the crimp terminal and the terminal block, and there was a risk that the soaking property of the sample would deteriorate.

[0016] On the other hand, according to the sample holder of the present disclosure, it is possible to reduce the deterioration of the soaking property of the sample. Hereinafter, the configuration of the sample holder of the present disclosure will be described.

[0017] <First Embodiment> First, referring to FIG. 1, the configuration of a sample holder 100 according to the first embodiment will be described. FIG. 1 is a cross-sectional view showing an example of the configuration of the sample holder 100 according to the first embodiment. As shown in FIG. 1, the sample holder 100 includes a heating plate 1, a base plate 2, an insulating member 3, a power receiving terminal 4, and a power supply terminal 5. Note that FIG. 1 shows only a part of the sample holder 100. The sample holder 100 may include a plurality of insulating members 3, power receiving terminals 4, and power supply terminals 5.

[0018] The heating plate 1 may be, for example, a plate-like member having a circular shape in plan view. The heating plate 1 may have a first surface 11 and a second surface 12 located opposite to the first surface 11. The first surface 11 may be a holding surface for holding a sample such as a semiconductor wafer.

[0019] The heating plate 1 may be made of, for example, ceramics. The ceramics constituting the heating plate 1 may contain, for example, silicon carbide (SiC) as a main component. Alternatively, the ceramics constituting the heating plate 1 may contain, for example, aluminum oxide (Al2O3), aluminum nitride (AlN), or yttrium oxide (Y2O3) as a main component. Note that the main component in the present disclosure is, for example, a component that exceeds 50% by mass of all components in the constituent object, and may be 80% by mass or more.

[0020] The heating plate 1 may have a heating resistor 13 (an example of a heating element). The heating resistor 13 may be located, for example, on the second surface 12. The heating resistor 13 may be a metal conductor mainly composed of, for example, platinum, tungsten, molybdenum, copper, or silver. By flowing an electric current through the heating resistor 13, the heating plate 1 can be heated. Note that the heating resistor 13 may be located inside the heating plate 1.

[0021] The base plate 2 is located opposite to the heating plate 1. The base plate 2 may be, for example, a plate-shaped member having substantially the same diameter as the heating plate 1. The base plate 2 may have a third surface 21 facing the second surface 12 of the heating plate 1 and a fourth surface 22 located opposite to the third surface 21. The base plate 2 may be made of, for example, a metal such as stainless steel.

[0022] The base plate 2 may be located at a distance from the heating plate 1. According to such a configuration, by reducing the heat transferred from the heating plate 1 to the base plate 2, the heat capacity of the heating plate 1 can be reduced. Therefore, the heating efficiency of the sample by the heating plate 1 can be increased. Also, according to such a configuration, the temperature rise of the base plate 2 can be reduced.

[0023] The base plate 2 may have a plurality of first through holes 23 extending from the third surface 21 to the fourth surface 22. In Figure 1, one of the plurality of first through holes 23 is shown. A power receiving terminal 4 may be located inside the first through hole 23.

[0024] The insulating member 3 may be located on the opposite side of the heating plate 1 from the base plate 2. Specifically, the insulating member 3 may be located on the fourth surface 22 of the base plate 2. The insulating member 3 may be provided corresponding to the first through hole 23. That is, the sample holder 100 may have multiple insulating members 3 corresponding to multiple first through holes 23. The insulating member 3 has a second through hole 31 at a position opposite to the first through hole 23. The power receiving terminal 4 may be located inside the second through hole 31.

[0025] The insulating member 3 may be made of, for example, ceramics. The ceramics constituting the insulating member 3 may mainly contain aluminum oxide (Al2O3), zirconium oxide (ZrO2), or mullite (3Al2O3·2SiO2). Note that the insulating member 3 is not limited to ceramics and may be made of other insulating materials, but ceramics are preferred from the viewpoint of having a relatively low thermal conductivity. With an insulating member 3 that has low thermal conductivity, thermal stress is less likely to occur inside, and therefore cracks and the like are less likely to occur.

[0026] The insulating member 3 may be fixed to the base plate 2 by a fixing jig 6. In this case, the insulating member 3 may have a flange portion 32 at the end facing the fourth surface 22. The fixing jig 6 may fix the insulating member 3 to the base plate 2 by pressing the flange portion 32 against the fourth surface 22, sandwiching the flange portion 32 between itself and the fourth surface 22 of the base plate 2. The fixing jig 6 may be fixed to the fourth surface 22, for example, by screws 7. With this configuration, the insulating member 3 can be easily attached to and removed from the base plate 2.

[0027] The shape of the flange portion 32 and the shape of the fixing jig 6 are not particularly limited. Furthermore, the method of fixing the insulating member 3 is not limited to the above example. Any configuration that allows the insulating member 3 to be fixed to the base plate 2 is acceptable. For example, the insulating member 3 may be directly bonded and fixed to the base plate 2 using a bonding material or the like.

[0028] The power receiving terminal 4 may be, for example, a rod-shaped metal terminal having a circular cross-section. The power receiving terminal 4 has a first portion 41, a second portion 42 with a smaller diameter than the first portion 41, and a stepped portion 43 formed by the difference in diameter between the first portion 41 and the second portion 42. At least a part of the first portion 41 is located inside the first through hole 23. A part of the second portion 42 is located inside the second through hole 31. The second portion 42 also protrudes from the second through hole 31 of the insulating member 3, and the power supply terminal 5 is connected to the portion of the second portion 42 that protrudes from the second through hole 31. The diameter of the first portion 41 is larger than the diameter of the second through hole 31.

[0029] The power receiving terminal 4 is electrically connected to the heat-generating resistor 13 described above. Specifically, the first portion 41 of the power receiving terminal 4 may be electrically connected to the heat-generating resistor 13 via a conductor 16 and a metal terminal 15. The first portion 41 may protrude from the third surface 21 of the base plate 2. In this case, the conductor 16 may be connected to the portion of the first portion 41 that protrudes from the third surface 21. With this configuration, it is easy to connect the conductor 16 to the power receiving terminal 4.

[0030] The power receiving terminal 4 is supported by the insulating member 3 at the stepped portion 43. Specifically, because the diameter of the first portion 41 is larger than the diameter of the second through hole 31, the stepped portion 43 and the insulating member 3 come into contact. As a result, the power receiving terminal 4 is supported by the insulating member 3.

[0031] A power supply terminal 5 is fixedly connected to the power receiving terminal 4. Specifically, the power supply terminal 5 may be fixedly connected to the second part 42 of the power receiving terminal 4. The power supply terminal 5 is connected to an external power source via a conductor 52. This allows power to be supplied from the power supply terminal 5 to the heating resistor 13 via the power receiving terminal 4.

[0032] The power supply terminal 5 may be, for example, a thin plate-shaped member having a through hole 51. The second portion 42 of the power receiving terminal 4 may be inserted through the through hole 51. As shown in Figure 1, the power supply terminal 5 may be fixedly connected to the power receiving terminal 4 by, for example, a first nut 81 and a second nut 82 fitted into screw grooves (not shown) formed in the second portion 42.

[0033] Specifically, the power supply terminal 5 may be fixedly connected to the power receiving terminal 4 by sandwiching the power supply terminal 5 between the first nut 81 and the second nut 82. The power supply terminal 5, the first nut 81, and the second nut 82 may be positioned in the order of first nut 81, power supply terminal 5, and second nut 82, starting from the insulating member 3 side.

[0034] A washer 83 may be positioned between the power supply terminal 5 and the second nut 82. This reduces damage to the power supply terminal 5 caused by tightening the second nut 82. Alternatively, a washer 84 may be positioned between the second nut 82 and the washer 83. This reduces loosening of the tightening by the first nut 81 and the second nut 82.

[0035] The diameter of the first part 41 may be smaller than the diameter of the first through hole 23. In other words, there may be a gap between the first part 41 and the first through hole 23. This gap is an air layer, which has a lower thermal conductivity than the base plate 2. Therefore, with this configuration, the heat transferred from the base plate 2 to the power receiving terminal 4 can be reduced in the first part 41. Consequently, the temperature rise at the connection point between the power supply terminal 5 and the power receiving terminal 4 can be reduced.

[0036] The diameter of the second portion 42 may be smaller than the diameter of the second through-hole 31. In other words, there may be a gap between the second portion 42 and the second through-hole 31. This gap is an air layer, which has a lower thermal conductivity than the insulating member 3. Therefore, with this configuration, the heat transferred from the insulating member 3 to the power receiving terminal 4 in the second portion 42 can be reduced. Consequently, the temperature rise at the connection point between the power supply terminal 5 and the power receiving terminal 4 can be reduced.

[0037] For example, if the temperature of the connection point between the power supply terminal 5 and the power receiving terminal 4 rises repeatedly, a load due to the difference in thermal expansion coefficients will repeatedly occur at the connection point, which may cause the connection point to loosen. Specifically, for example, repeated torque applied to the first nut 81 and the second nut 82 may cause the tightening of the power supply terminal 5 to loosen. On the other hand, with the sample holder 100 of this disclosure, as described above, the gaps between the first part 41 and the first through hole 23, and between the second part 42 and the second through hole 31 reduce the temperature rise at the connection point between the power supply terminal 5 and the power receiving terminal 4, thereby reducing the loosening of the connection point.

[0038] As described above, the power receiving terminal 4 is only supported by the insulating member 3 at the stepped portion 43. With this configuration, compared to, for example, the case in which the power receiving terminal 4 is directly fixed to the base plate 2 by screws or the like, less load is placed on the power receiving terminal 4 and the power receiving terminal 4 is less likely to deform.

[0039] For example, if the power receiving terminal 4 is directly fixed to the base plate 2 by screws or the like, repeated heating and cooling of the base plate 2 can easily cause excessive loads to repeatedly occur at the fixing point between the power receiving terminal 4 and the base plate 2 due to the difference in thermal expansion coefficients. In such a case, the power receiving terminal 4 may be repeatedly deformed by the external force received from the base plate 2.

[0040] When the power receiving terminal 4 is repeatedly deformed in this manner, repeated load is applied to the connection point between the power supply terminal 5 and the power receiving terminal 4, which may cause the connection point to loosen. Specifically, for example, repeated torque applied to the first nut 81 and the second nut 82 may cause the tightening of the power supply terminal 5 to loosen. On the other hand, with the sample holder 100 of this disclosure, the insulating member 3 supports the power receiving terminal 4, thereby reducing the external force applied to the power receiving terminal 4. This reduces the deformation of the power receiving terminal 4. Therefore, loosening of the connection point between the power supply terminal 5 and the power receiving terminal 4 can be reduced.

[0041] Furthermore, according to the sample holder 100 of the first embodiment, less load is applied to the insulating member 3. Specifically, the insulating member 3 is less susceptible to external forces due to the reaction from the power receiving terminal 4. Therefore, the occurrence of cracks and the like in the insulating member 3 can be reduced.

[0042] The power supply terminal 5 may be connected to the second portion 42 of the power receiving terminal 4 at a position separated from the insulating member 3. In other words, there may be a gap between the power supply terminal 5 and the insulating member 3. With this configuration, the heat transmitted from the insulating member 3 to the connection point between the power supply terminal 5 and the power receiving terminal 4 can be reduced. Therefore, even with this configuration, loosening of the connection point between the power supply terminal 5 and the power receiving terminal 4 can be reduced.

[0043] Thus, with the sample holder 100 of this disclosure, even when the base plate 2 is repeatedly heated and cooled, the connection between the power supply terminal 5 and the power receiving terminal 4 is less likely to loosen, thus stabilizing the power supply to the heating plate 1. Therefore, the decrease in the uniform heating of samples such as semiconductor wafers can be reduced.

[0044] <Second Embodiment> Next, with reference to Figure 2, the configuration of the sample holder 100 according to the second embodiment will be described. Figure 2 is a cross-sectional view showing an example of the configuration of the sample holder 100 according to the second embodiment. As shown in Figure 2, the sample holder 100 according to the second embodiment may further have a cylindrical portion 33 in the insulating member 3.

[0045] The cylindrical portion 33 may be located inside the first through-hole 23. The cylindrical portion 33 may have a third through-hole 331 connected to the second through-hole 31. The shape of the cylindrical portion 33 in a cross-section perpendicular to the axial direction of the first through-hole 23 may be, for example, an annular shape. Note that the expression "perpendicular" does not require strict perpendicularity. That is, the above expression allows for deviations such as manufacturing accuracy and installation accuracy.

[0046] With the sample holder 100 having a cylindrical portion 33, the power receiving terminal 4 and the base plate 2 are less likely to come into contact, thus ensuring more reliable insulation between the power receiving terminal 4 and the base plate 2. In addition, the cylindrical portion 33 can block radiant heat from the base plate 2, thereby reducing the temperature rise of the power receiving terminal 4. There may be gaps between the cylindrical portion 33 and the first through hole 23, and between the cylindrical portion 33 and the power receiving terminal 4.

[0047] The cylindrical portion 33 may protrude from the third surface 21 of the base plate 2, as shown in Figure 2. With this configuration, the conductor 16 and the base plate 2 are less likely to come into contact, thus ensuring more reliable insulation between the conductor 16 and the base plate 2.

[0048] <Third Embodiment> Next, the configuration of the sample holder 100 according to the third embodiment will be described with reference to Figure 3. Figure 3 is a cross-sectional view showing an example of the configuration of the sample holder 100 according to the third embodiment. As shown in Figure 3, the sample holder 100 according to the third embodiment may have a third portion 44 in the power receiving terminal 4.

[0049] The third portion 44 may be located closer to the heating plate 1 than the first portion 41. That is, the third portion 44 may include the end of the power receiving terminal 4 on the heating plate 1 side. The diameter of the third portion 44 may be smaller than the diameter of the first portion 41. If the power receiving terminal 4 has the third portion 44, the conductor 16 may be connected to the third portion 44.

[0050] With this configuration, the power receiving terminal 4 and the conductor 16 are less likely to come into contact with the base plate 2, thus reducing the likelihood of a short circuit between the power receiving terminal 4 and the base plate 2. Furthermore, since the conductor 16 is less likely to come into contact with the insulating member 3, the conductor 16 is less likely to break due to contact with the insulating member 3.

[0051] Furthermore, with this configuration, the gap between the power receiving terminal 4 and the base plate 2 in the third section 44 can be increased. This reduces the heat transferred from the base plate 2 to the power receiving terminal 4, thereby reducing the temperature rise at the connection point between the power supply terminal 5 and the power receiving terminal 4. Consequently, load is less likely to occur at this connection point, and loosening of this connection point can be reduced.

[0052] The diameter of the third part 44 may be smaller than the diameter of the second part 42. By making the diameter of the third part 44 relatively small, the heat transferred from the base plate 2 to the power receiving terminal 4 can be reduced. Also, by making the diameter of the second part 42 relatively large, the power supply path from the power supply terminal 5 to the power receiving terminal 4 can be enlarged. Therefore, the decrease in the amount of power supplied from the power supply terminal 5 to the power receiving terminal 4 can be reduced.

[0053] <Fourth Embodiment> Next, the configuration of the sample holder 100 according to the fourth embodiment will be described with reference to Figure 4. Figure 4 is a cross-sectional view showing an example of the configuration of the sample holder 100 according to the fourth embodiment. As shown in Figure 4, the sample holder 100 according to the fourth embodiment may further have a restricting member 9 for restricting the rotation of the power supply terminal 5.

[0054] The restricting member 9 may be, for example, a member having a rectangular shape in plan view and an L-shape in side view. The restricting member 9 may be attached to, for example, the insulating member 3. In this case, the insulating member 3 may have, for example, a recess 34 on the end face facing the power supply terminal 5. The recess 34 may have, for example, a rectangular shape in plan view. The restricting member 9 may be fitted and fixed into such recess 34.

[0055] With this configuration, the restricting member 9 can be fixed to the insulating member 3 in a non-rotatable state. Furthermore, with this configuration, the restricting member 9 can be easily attached to and detached from the insulating member 3.

[0056] In this example, the regulating member 9 is described in a case where it is fitted and fixed into the recess 34, but the method of fixing the regulating member 9 is not limited to this. For example, the regulating member 9 may be bonded and fixed to the insulating member 3 with adhesive or the like. In such a case, the insulating member 3 does not necessarily have to have a recess 34.

[0057] The restricting member 9 may have through holes 91 and 92. The second portion 42 of the power receiving terminal 4 may be inserted through the through hole 91. The power supply terminal 5 may be inserted through the through hole 92. With a configuration having such a restricting member 9, the rotation of the power supply terminal 5 can be reduced by the through hole 92 contacting the power supply terminal 5. Specifically, it is possible to reduce the rotation of the power supply terminal 5 around the axis of the power receiving terminal 4.

[0058] For example, if the power supply terminal 5 rotates, a load will be placed on the connection point between the power supply terminal 5 and the power receiving terminal 4, which may cause the connection point to loosen. On the other hand, with the sample holder 100 having a restricting member 9, the rotation of the power supply terminal 5 can be reduced, thereby reducing the loosening of the connection point between the power supply terminal 5 and the power receiving terminal 4.

[0059] <Fifth Embodiment> Next, with reference to Figure 5, the configuration of the sample holder 100 according to the fifth embodiment will be described. Figure 5 is a cross-sectional view showing an example of the configuration of the sample holder 100 according to the fifth embodiment. In the first to fourth embodiments, an example was described in which the power supply terminal 5 is fixedly connected to the power receiving terminal 4 by a first nut 81 and a second nut 82. However, the invention is not limited to this, and as shown in Figure 5, for example, the power supply terminal 5 can also be fixedly connected to the power receiving terminal 4 using only the second nut 82.

[0060] As shown in Figure 5, the sample holder 100 according to the fifth embodiment may have a screw groove (not shown) at the tip of the second portion 42 of the power receiving terminal 4. The diameter of the tip of the second portion 42 having such a screw groove may be smaller than the diameter of the other second portions 42.

[0061] In this case, the power supply terminal 5 can be fixedly connected to the power receiving terminal 4 by attaching it to the tip of the second part 42 which has a screw groove, and then tightening it with the second nut 82. With this configuration, the power supply terminal 5 can be fixedly connected to the power receiving terminal 4 more easily than when using the first nut 81 and the second nut 82.

[0062] The method of connecting the power supply terminal 5 and the power receiving terminal 4 is not particularly limited. It is sufficient that the power supply terminal 5 and the power receiving terminal 4 are energized, and for example, the power supply terminal 5 may be directly joined to the power receiving terminal 4 by brazing, soldering, or welding.

[0063] <Other Variation 1> Next, with reference to Figure 6, modified examples of the configuration of the power receiving terminal 4 and insulating member 3 according to the embodiment will be described. Figure 6 is a cross-sectional view showing a modified example of the configuration of the sample holder 100 as seen from the line VI-VI in Figure 2. In the second to fifth embodiments, the cross-sectional shape of the cylindrical portion 33 in a cross section perpendicular to the axial direction of the first through hole 23 was annular. Also, the cross-sectional shape of the first portion 41 of the power receiving terminal 4 in a cross section perpendicular to the axial direction of the first through hole 23 was circular.

[0064] The cylindrical portion 33 may have a circular outer circumference and a polygonal inner circumference in a cross-section perpendicular to the axial direction of the first through-hole 23. In such a case, the first portion 41 of the power receiving terminal 4 may have a polygonal outer circumference in a cross-section perpendicular to the axial direction of the first through-hole 23. Figure 6 shows an example where the shape of the inner circumference of the cylindrical portion 33 and the outer circumference of the power receiving terminal 4 are rectangular.

[0065] With this configuration, the first part 41 is less likely to rotate inside the cylindrical part 33. That is, the power receiving terminal 4 is less likely to rotate relative to the insulating member 3. This reduces misalignment of the wiring direction of the power supply terminal 5 fixedly connected to the power receiving terminal 4. Furthermore, with this configuration, the wiring direction of the power supply terminal 5 fixedly connected to the power receiving terminal 4 can be easily adjusted in 90° increments, making it easy to assemble the sample holder 100.

[0066] <Other variations 2> Next, with reference to Figure 7, a modified example of the configuration of the first nut 81 according to the embodiment will be described. Figure 7 is a plan view showing a modified example of the configuration of the first nut 81. As shown in Figure 7, the first nut 81 may have an external shape provided with, for example, a plurality of recesses 811. Note that Figure 7 shows an example in which the first nut 81 has four recesses 811.

[0067] With this configuration, the surface area of ​​the first nut 81 can be increased compared to the first nut 81 without the recess 811, thereby improving the heat dissipation of the first nut 81. As a result, the heat transmitted from the heating plate 1 can be effectively dissipated by the first nut 81, reducing the temperature rise at the connection point between the power supply terminal 5 and the power receiving terminal 4. Therefore, load is less likely to be placed on the connection point, and loosening of the connection point can be reduced.

[0068] Furthermore, with this configuration, the rotation of the first nut 81 can be easily fixed by inserting a rod or the like into the recess 811 of the first nut 81. For this reason, when fixing the power supply terminal 5 to the power receiving terminal 4 using the first nut 81 and the second nut 82, this operation can be easily performed.

[0069] Although the present disclosure has been described in detail above, this disclosure is not limited to the embodiments described above, and various modifications and improvements are possible without departing from the gist of this disclosure.

[0070] The embodiments disclosed herein should be considered in all respects as illustrative and not restrictive. Indeed, the embodiments described above can be embodied in a variety of forms. Furthermore, the embodiments described above may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims.

[0071] Furthermore, this technology can also be configured as follows. (1) A heating plate having a sample holding surface and equipped with a heating element, A base plate positioned opposite the heating plate and having a first through hole, An insulating member having a second through-hole is located on the opposite side of the heating plate from the base plate, A power receiving terminal located inside the first through hole and the second through hole, and connected to the heating element via a conductor, A power supply terminal connected to the power receiving terminal and It has, The power receiving terminal has a first portion, a second portion having a smaller diameter than the first portion, and a stepped portion formed by the difference in diameter between the first portion and the second portion. The power receiving terminal is supported by the insulating member at the stepped portion of the sample holder. (2) The insulating member further has a cylindrical portion located inside the first through hole and having a third through hole connected to the second through hole, The first part is the sample holder described in (1) above, located inside the cylindrical portion. (3) The sample holder according to (1) or (2), wherein the power receiving terminal further has a third portion having a smaller diameter than the first portion and located closer to the heating plate than the first portion. (4) The sample holder according to (3), wherein the diameter of the third portion is smaller than the diameter of the second portion. (5) The sample holder according to any one of (1) to (4), wherein the power supply terminal is connected to the power receiving terminal at a position separated from the insulating member. (6) In a cross-section perpendicular to the axial direction of the first through-hole, The cylindrical portion has a circular outer circumference and a polygonal inner circumference. The first part is the sample holder described in (2) above, wherein the outer circumference has a polygonal shape. (7) The cylindrical portion is the sample holder according to (2) or (6) above, protruding from the base plate. (8) A sample holder according to any one of (1) to (7), further comprising a restricting member that restricts the rotation of the power supply terminal by fitting it into the insulating member. (9) It has a first nut and a second nut, The second part has a screw groove, The power supply terminal, the first nut, and the second nut are positioned in the order of the first nut, the power supply terminal, and the second nut, from a position separated from the insulating member. The first nut is a sample holder according to any one of (1) to (8) above, having an outer shape with a plurality of recesses. [Explanation of symbols]

[0072] 1. Heating plate 2 Base Plate 3. Insulating material 4 Power receiving terminal 5 Power supply terminals 6 Fixing jig 7 screws 9 Regulating members 11 Page 1 12 Side 2 13 Heat-generating resistor 16,52 conductor 21 Page 3 22 Page 4 23 First through hole 31 Second through hole 32 Flange section 33 Cylinder part 34,811 recesses 41 Part 1 42 Part 2 43 Stepped section 44 Part 3 51, 91, 92 through holes 81 First Nut 82 Second nut 83 Washer 84 Washer 100 Sample holders 331 Third through hole

Claims

1. A heating plate having a sample holding surface and equipped with a heating element, A base plate positioned opposite the heating plate and having a first through hole, An insulating member having a second through-hole is located on the opposite side of the heating plate from the base plate, A power receiving terminal located inside the first through hole and the second through hole, and connected to the heating element via a conductor, A power supply terminal connected to the power receiving terminal and It has, The power receiving terminal has a first portion, a second portion having a smaller diameter than the first portion, and a stepped portion formed by the difference in diameter between the first portion and the second portion. The power receiving terminal is supported by the insulating member at the stepped portion of the sample holder.

2. The insulating member further has a cylindrical portion located inside the first through hole and having a third through hole connected to the second through hole, The sample holder according to claim 1, wherein the first part is located inside the cylindrical part.

3. The sample holder according to claim 1, wherein the power receiving terminal further has a third portion having a smaller diameter than the first portion and located closer to the heating plate than the first portion.

4. The sample holder according to claim 3, wherein the diameter of the third portion is smaller than the diameter of the second portion.

5. The sample holder according to claim 1, wherein the power supply terminal is connected to the power receiving terminal at a position separated from the insulating member.

6. In a cross-section perpendicular to the axial direction of the first through-hole, The cylindrical portion has a circular outer circumference and a polygonal inner circumference. The sample holder according to claim 2, wherein the first part has a polygonal outer shape.

7. The sample holder according to claim 2, wherein the cylindrical portion protrudes from the base plate.

8. The sample holder according to claim 1, further comprising a restricting member that restricts the rotation of the power supply terminal by fitting it onto the insulating member.

9. It has a first nut and a second nut, The second part has a screw groove, The power supply terminal, the first nut, and the second nut are positioned in the order of the first nut, the power supply terminal, and the second nut, from a position separated from the insulating member. The sample holder according to claim 1, wherein the first nut has an outer shape provided with a plurality of recesses.

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