Liquid dispensing head

Abstract

To provide a liquid discharge head that can suppress water hammer and protect the nozzle plate. [Solution] The liquid discharge head according to the embodiment comprises a nozzle plate having a nozzle for discharging liquid, a nozzle cover having a cover portion that faces the discharge surface side of the nozzle plate with a gap between them and the nozzle cover having an opening formed on the discharge side of the nozzle, and a flow path member that constitutes a liquid flow path including a plurality of pressure chambers communicating with each of the plurality of nozzles, the nozzle plate being flexible and having a damper portion and a joint portion that is joined to the flow path member, and the nozzle cover being bonded to the area of ​​the nozzle plate other than the damper portion.

Description

Technical Field

[0001] Embodiments of the present invention relate to a liquid ejection head.

Background Art

[0002] In a liquid ejection head such as an inkjet head, a nozzle cover may be formed on the ejection-side surface of the nozzle plate in order to protect the nozzle plate. Also, in a liquid ejection head, the nozzle plate may be made of a flexible film material such as PI and used as a damper for suppressing a water hammer phenomenon.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The problem to be solved by the present invention is to provide a liquid ejection head that can suppress a water hammer phenomenon and protect a nozzle plate.

Means for Solving the Problems

[0005] The liquid ejection head according to the embodiment includes a nozzle plate having nozzles for ejecting a liquid, a cover portion facing the ejection surface side of the nozzle plate with a gap therebetween, a nozzle cover having an opening formed in a portion on the ejection side of the nozzles, and a flow path member constituting a liquid flow path including a plurality of pressure chambers communicating with the plurality of nozzles respectively. The nozzle plate has flexibility and has a damper portion and a joint portion joined to the flow path member. The nozzle cover is adhered to a region of the nozzle plate other than the damper portion.

Brief Description of the Drawings

[0006] [Figure 1] A perspective view showing the configuration of a liquid dispensing head according to the first embodiment. [Figure 2] A perspective view showing the configuration of the liquid dispensing head. [Figure 3] A bottom view showing a part of the liquid dispensing head. [Figure 4] A cross-sectional view showing a part of the liquid dispensing head. [Figure 5] A schematic cross-sectional view showing part of the liquid dispensing head. [Figure 6] This diagram illustrates the structure of the adhesive layer in the liquid dispensing head. [Modes for carrying out the invention]

[0007] The liquid dispensing head 1 according to the first embodiment will be described below with reference to Figures 1 to 5. Figures 1 and 2 are perspective views showing the configuration of the liquid dispensing head according to this embodiment. Figure 3 is a bottom view showing the internal configuration of the liquid dispensing head, and Figure 4 is a cross-sectional view showing a part of the configuration of the liquid dispensing head. Figure 5 is a schematic cross-sectional view showing a part of the configuration of the liquid dispensing head. Figure 6 is an explanatory diagram showing the configuration of the adhesive layer of the liquid dispensing head. In the figures, X, Y, and Z represent the first, second, and third directions, which are orthogonal to each other, respectively. Note that in each figure, the configuration is enlarged, reduced, or omitted as appropriate for explanatory purposes.

[0008] The liquid ejection head 1 is a shear-mode inkjet head provided in a liquid ejection device such as an inkjet recording device. The liquid ejection head 1 has an independent drive structure that alternately includes a pressure chamber 1131 and an air chamber 1132.

[0009] The liquid ejection head 1 is supplied with ink in liquid form. The liquid ejection head 1 may be a non-circulating head that does not circulate ink, or it may be a circulating head that circulates ink. In this embodiment, the liquid ejection head 1 will be described using an example of a non-circulating head.

[0010] As shown in Figures 1 to 5, the liquid discharge head 1 comprises a head body 11, a manifold unit 12, and a cover 15. For example, the liquid discharge head 1 is a side-chute type four-row integrated head having two sets of head bodies 11, each having a pair of actuators 113.

[0011] The print head body 11 discharges liquid. The print head body 11 comprises a substrate 111, a frame 112 as a flow path member, an actuator 113 having a plurality of pressure chambers 1131 and a plurality of air chambers 1132, a nozzle plate 114, an outer cover 115, and a nozzle cover 118. A predetermined ink flow path 16 is formed inside the print head body 11, passing through a pressure chamber 1131 that communicates with a nozzle 1141. The ink flow path 16 is a liquid flow path.

[0012] The print head body 11 has a common flow path section 116 that communicates with multiple pressure chambers 1131 of the actuator 113 as part of the ink flow path 16. The primary side of the multiple pressure chambers 1131 is the upstream side of the multiple pressure chambers 1131 in the direction of liquid flow. The secondary side of the multiple pressure chambers 1131 is the downstream side of the multiple pressure chambers 1131 in the direction of liquid flow.

[0013] Furthermore, the head body 11 has an electrode section composed of an electrode film formed on the substrate 111 and the actuator 113. Specifically, the head body 11 has, as an electrode section, a plurality of individual electrodes that drive a plurality of pressure chambers 1131 of the actuator 113, and one or more common electrodes that drive the plurality of pressure chambers 1131 simultaneously.

[0014] In this embodiment, the head body 11 has two actuators 113, and the common flow path section 116 has one first common flow path 1161 and two second common flow paths 1162. The common flow path section 116 includes, for example, a first common flow path 1161 that communicates with one opening (the inlet of the pressure chamber 1131) of the plurality of pressure chambers 1131 of the actuator 113, and a second common flow path 1162 that communicates with the secondary opening (the outlet of the pressure chamber 1131) of the plurality of pressure chambers 1131 of the actuator 113.

[0015] Specifically, a first common flow path 1161 is located at one end of each of the multiple actuator grooves 1135, each extending in the second direction (Y direction), and a second common flow path 1162 is located at the other end of the actuator groove 1135 in each pair of actuators 113. The first common flow path 1161 and the second common flow path 1162 are in communication at both ends in the first direction.

[0016] The substrate 111 is formed in the shape of a rectangular plate from a ceramic material such as alumina. The substrate 111 is formed in the shape of a rectangle that is elongated in one direction (X direction). An electrode film is formed on one main surface of the substrate 111. A pair of actuators 113 are provided on the surface of the substrate 111, aligned in the short direction (Y direction) of the substrate 111. The substrate 111 has a single supply port 1111 through which liquid passes. The supply port 1111 is a through hole that penetrates between the two main surfaces of the substrate 111.

[0017] Furthermore, the back surface of the substrate 111 faces the manifold 121 and covers a groove formed on the opposite surface of the manifold 121, which forms a cooling channel through which cooling water flows. In other words, the substrate 111, together with the manifold 121, forms a cooling channel.

[0018] The supply port 1111 is an inlet for supplying ink to the first common channel 1161. The supply port 1111 is a through-hole formed in the center of the substrate 111 in the short direction. The supply port 1111 extends along the longitudinal direction of the substrate 111. In other words, the supply port 1111 is an elongated hole that is elongated in one direction, for example, along the longitudinal direction of the actuator 113 and the longitudinal direction of the first common channel 1161. The supply port 1111 is provided between a pair of actuators 113 and opens at a position opposite the first common channel 1161. Part of the common electrode may be formed on the inner wall surface of the supply port 1111.

[0019] An actuator 113 and a frame body 112 are provided on a substrate 111. The inside of the frame body 112 on the substrate 111 is a liquid contact area where ink is arranged, and the outside of the frame body 112 is a mounting area where various electronic components can be connected. The frame body 112 is a flow path member that constitutes a liquid flow path including a pressure chamber 1131 and a common flow path 1161.

[0020] The frame body 112 is fixed to one main surface of the substrate 111 by an adhesive or the like. The frame body 112 surrounds a supply port 1111 provided on the substrate 111 and the actuator 113.

[0021] For example, the frame body 112 is formed in a rectangular frame shape, thereby forming an opening that is long in one direction along the longitudinal direction of the frame body 112. A pair of actuators 113 and a supply port 1111 are arranged in the opening of the frame body 112. The frame body 112 surrounds the periphery of the actuator 113 between the nozzle plate 114 and the substrate 111 and is configured to be able to hold liquid inside. That is, a predetermined ink flow path including a pressure chamber 1131 and common flow paths 1161, 1162 is formed in the head body 11 by the frame body 112, the nozzle plate 114, the substrate 111, and the actuator 113.

[0022] The pair of actuators 113 are adhered to the surface of the substrate 111. The pair of actuators 113 are provided on the substrate 111 in two rows with the supply port 1111 sandwiched therebetween. The actuator 113 is a plate-shaped member that is long in one direction. The actuator 113 is arranged in the opening of the frame body 112 and adhered to the surface of the substrate 111.

[0023] The actuator 113 has a plurality of pressure chambers 1131 arranged at equal intervals in the longitudinal direction on the central side in the longitudinal direction, and air chambers 1132 arranged at equal intervals in the longitudinal direction and arranged between adjacent pressure chambers 1131. In other words, a plurality of pressure chambers 1131 and air chambers 1132 are alternately arranged along the longitudinal direction in the actuator 113. The plurality of pressure chambers 1131 and the plurality of air chambers 1132 extend in a direction intersecting the arrangement direction, for example, in the short side direction of the actuator 113.

[0024] The top surface of the actuator 113, which is the side opposite to the substrate 111, is bonded to the nozzle plate 114. The actuators 113 are arranged at equal intervals in the longitudinal direction, and a plurality of actuator grooves 1135 are formed along a direction perpendicular to the longitudinal direction. The plurality of actuator grooves 1135 form a plurality of pressure chambers 1131 and a plurality of air chambers 1132. In other words, the actuator 113 has a plurality of piezoelectric elements 1133, which are driving elements that constitute a wall forming actuator grooves 1135 between them, arranged at equal intervals in the longitudinal direction. The plurality of piezoelectric elements 1133 form a plurality of pressure chambers 1131 and a plurality of air chambers 1132 between adjacent piezoelectric elements 1133, and the volume of the pressure chambers 1131 is changed when a driving voltage is applied.

[0025] The actuator 113 has a width in the shorter direction that gradually increases from the top side toward the substrate 111 side. The cross-sectional shape of the actuator 113 along the direction perpendicular to the longitudinal direction (shorter direction) is formed as a trapezoid. That is, the actuator 113 has an inclined surface 1134 that slopes toward the side surface in the shorter direction. The side surface (inclined surface 1134) is positioned opposite the first common channel 1161 and the second common channel 1162. An electrode film is formed on the inclined surface 1134 in a predetermined pattern.

[0026] As a specific example, the actuator 113 is formed from a laminated piezoelectric member, which consists of two rectangular plates of piezoelectric material, each elongated in one direction, bonded together facing each other so that their polarization directions are opposite. Here, the piezoelectric material is, for example, PZT (lead zirconate titanate). The actuator 113 is bonded to the surface of the substrate 111, for example, with an adhesive. The actuator 113 also has an inclined surface 1134. The actuator 113 has multiple actuator grooves 1135 that form multiple pressure chambers 1131 and multiple air chambers 1132, and piezoelectric elements (driving elements) 1133 that serve as side walls separating adjacent actuator grooves 1135.

[0027] Furthermore, electrode films constituting individual electrodes and common electrodes are formed on the actuator 113 in a predetermined pattern.

[0028] The pressure chamber 1131 deforms during printing or other operations by the liquid ejection head 1, thereby ejecting ink from the nozzle 1141. The pressure chamber 1131 has an inlet that opens into the first common passage 1161 and an outlet that opens into the second common passage 1162. Ink flows into the pressure chamber 1131 from the inlet and flows out from the outlet. The pressure chamber 1131 may also be configured so that ink flows in from both openings described as the inlet and outlet. Individual electrodes are formed within the actuator grooves 1135 that constitute the pressure chamber 1131.

[0029] Furthermore, the inlet and outlet sides of the pressure chamber 1131 may be partially blocked by liquid-proof walls formed of photosensitive resin or the like. For example, by blocking a portion of the groove openings at both ends in the direction of groove extension of the pressure chamber 1131 with liquid-proof walls, a restricted flow path is formed at the inlet and outlet of the pressure chamber 1131 that communicate with the first common flow path 1161 and the second common flow path 1162. This restricted flow path has, for example, a groove width narrower than the interior of the pressure chamber 1131 and a smaller flow path cross-section.

[0030] The air chamber 1132 is separated from the first common channel 1161 and the second common channel 1162 by having its inlet and outlet sides sealed by liquid-proof walls made of photosensitive resin or the like. Furthermore, the air chamber 1132 is sealed by the nozzle plate 114, and no nozzle 1141 is placed in it. Therefore, ink does not flow into the air chamber 1132.

[0031] The nozzle plate 114 is formed in a plate shape. The nozzle plate 114 is made of a flexible film such as a polyimide film. The nozzle plate 114 has, for example, a Young's modulus of 9.1 GPa or more. The nozzle plate 114 is positioned opposite to one side of the actuator 113 in the third direction (Z direction). For example, the nozzle plate 114 functions as a pressure buffer damper to suppress water hammer phenomena occurring in the common flow path. The nozzle plate 114 is fixed to the main surface of the frame 112 opposite to the substrate 111 with an adhesive or the like. The nozzle plate 114 has a plurality of nozzles 1141 formed at positions opposite to a plurality of pressure chambers 1131. In this embodiment, the nozzle plate 114 has two rows of nozzle rows 1142 in which a plurality of nozzles 1141 are arranged in one direction. A water-repellent film is formed on the ink discharge surface side of the nozzle plate 114.

[0032] The outer cover 115 is constructed by bending a plate member made of a metal material such as SUS material. The outer cover 115 integrally includes a rectangular, flat top plate portion 1151 (top portion) that covers a predetermined area of ​​the discharge surface of the nozzle plate 114, and a peripheral wall portion 1152 that curves from the outer edge of the top plate portion 1151 and extends in the Z direction.

[0033] The top plate portion 1151 is a flat plate-shaped member positioned opposite a predetermined area on the discharge-side surface of the substrate 111, avoiding the portion where the nozzle 1141 is formed. For example, the top plate portion 1151 is configured in a rectangular shape with an outer diameter larger than that of the substrate 111, and has two openings 1153 formed in portions corresponding to the two rows of actuators 113. The top plate portion 1151 is bonded to the frame 112, for example, via an adhesive layer Pa. The top plate portion 1151 is bonded to the nozzle plate 114 at a position that avoids the damper portion R1, which is positioned opposite the discharge side of the common flow path. For example, the top plate portion 1151 is bonded to the nozzle plate 114 and the frame 112 around the entire circumference of the frame 112 that surrounds the outer circumference of each actuator 113. As shown in Figures 5 and 6, the adhesive layer Pa that bonds the frame 112, the nozzle plate 114, and the top plate portion 1151 is positioned outside the inner edge of the frame 112. Alternatively, the adhesive layer Pa may be positioned on the outer circumference side of the frame 112. For example, as shown in Figure 5, the adhesive area of ​​the adhesive layer Pa is set outside the opening 1153 of the top plate portion 1151. For example, in this embodiment, the two openings 1153 of the top plate portion 1151 correspond to two rows of actuators 113 and are formed in a rectangular shape with their longitudinal direction aligned with the X direction. The peripheral wall portion 1152 is a vertical wall portion that bends from the outer peripheral edge of the top plate portion 1151 and extends in the Z direction. The peripheral wall portion 1152 covers the outer periphery of the frame 112 and the manifold 121.

[0034] The nozzle cover 118 integrally comprises a top cover portion 1181 (cover portion) facing the discharge surface side of the nozzle plate 114 and top plate portion 1151, and an edge cover portion 1182 that curves from the outer peripheral edge of the top cover portion 1181 and extends in the Z direction. The top cover portion 1181 is a flat plate-like portion having a rectangular outer shape larger than the substrate 111. Multiple cover openings 1183 are formed in the top cover portion 1181, each facing one side of the multiple nozzles 1141. For example, the cover openings 1183 are elongated holes that extend along one direction, which is the longitudinal direction of the substrate 111. The cover openings 1183 are configured to have a smaller opening area than the openings 1153 of the outer cover 115. For example, four cover openings 1183 are formed, each corresponding to one of the four rows of nozzles 1141. Each cover opening 1183 is a through-hole whose width in the Y direction is greater than the diameter of the nozzle 1141 and smaller than the width of the opening 1153 in the outer cover 115.

[0035] The edge cover portion 1182 is positioned on top of the outer surface of the peripheral wall portion 1152 of the outer cover 115, covering the outer periphery of the outer cover 115. The nozzle cover 118 is bonded to the outer surface of the outer cover 115, for example, via an adhesive layer Pb. In this embodiment, slit-shaped notches 1184 are formed in the edge cover portion 1182 at positions corresponding to the four corners of the peripheral wall portion 1152 of the outer cover 115. The edge cover portion 1182 is divided by the notches 1184 into four plate-like pieces that face the outside of the four outer surfaces of the peripheral wall portion 1152, respectively.

[0036] The nozzle cover 118 is supported directly or indirectly in a position that does not hinder the deformation of the damper portion R1, which is the part of the nozzle plate 114 that functions as a damper. For example, the nozzle cover 118 is bonded via an adhesive layer Pb to the discharge surface side of the top plate portion 1151, which is bonded via an adhesive layer Pa to the discharge surface side of the peripheral edge of the nozzle plate 114. The nozzle cover 118 and the outer cover 115 are bonded together, for example, by an adhesive layer Pb across the entire discharge surface of the top plate portion 1151. For example, the top plate portion 1151 is bonded to the nozzle cover 118 at positions corresponding to the entire circumference of the frame 112 that surrounds the outer circumference of each actuator 113. For example, as shown in Figure 5, the bonding area of ​​the adhesive layer Pb is set outside the opening 1153 of the top plate portion 1151. Therefore, the nozzle cover 118 is positioned opposite the nozzle plate 114, separated by a predetermined distance on the discharge side, with a gap G between them. The nozzle cover 118 is joined and supported on the nozzle plate 114 at a position that avoids the damper portion R1, which functions as a damper and faces at least a portion of the liquid flow path, for example, the second common flow path 1162.

[0037] The first common flow path 1161 is formed between the central sides of a pair of actuators 113, excluding both ends, and constitutes the flow path for ink from the supply port 1111 to the primary side openings (inlets) of the multiple pressure chambers 1131 of each actuator 113. The first common flow path 1161 extends along the longitudinal direction of the actuators 113. The first common flow path 1161 constitutes a part of the ink flow path 16.

[0038] The second common flow path 1162 is formed between each actuator 113 and the frame 112. The second common flow path 1162 forms the flow path for ink from the secondary openings (outlets) of the multiple pressure chambers 1131. The second common flow path 1162 extends along the longitudinal direction of the actuator 113. The second common flow path 1162 constitutes a part of the ink flow path 16.

[0039] In this liquid discharge head 1, the liquid flows into the supply port 1111, through the central first common flow path 1161, through the outside of both ends of the actuator 113 in the first direction, and into the second common flow path 1162. That is, the ink supplied from the supply port 1111 passes through the first common flow path 1161, which is the central flow path closer to the supply port 1111, and the second common flow path 1162, which is the side flow path further from the supply port 1111, and the ink is supplied to the actuator groove 1135 that forms the pressure chamber 1131 from both sides in the Y direction, which is the extension direction of the actuator groove 1135.

[0040] Multiple individual electrodes apply a drive voltage individually to multiple piezoelectric elements 1133, which are driving elements. Multiple individual electrodes individually deform each pressure chamber 1131. The individual electrodes are formed by wiring patterns formed on the substrate 111 and wiring patterns formed on the actuator 113.

[0041] The common electrode applies the same driving voltage to all of the piezoelectric elements 1133. The common electrode simultaneously deforms the multiple pressure chambers 1131. The common electrode is formed by a wiring pattern formed on the substrate 111 and a wiring pattern formed on the actuator 113.

[0042] The individual or common electrodes of the actuator 113 are located inside the cover 15 and connected to a circuit board equipped with a driver IC. For example, the circuit board drives the actuator 113 by applying a drive voltage to the wiring pattern of the actuator 113 via the driver IC, thereby increasing or decreasing the volume of the pressure chamber 1131 and ejecting droplets from the nozzle 1141.

[0043] The manifold unit 12 comprises a manifold 121 and an ink supply pipe. The manifold unit 12 may further include a cooling water supply pipe and a cooling water discharge pipe.

[0044] The manifold 121 is formed in the shape of a plate or a block. The manifold 121 is formed, for example, by assembling a plurality of components together, and forms the supply passage 1211 and the cooling passage.

[0045] For example, the manifold 121 includes a supply passage 1211 that is continuous with the supply port 1111 of the substrate 111 and forms a liquid supply passage, and a cooling passage that forms a passage for cooling fluid. Since the manifold 121 is connected to a pair of head bodies 11, it has a pair of supply passages 1211.

[0046] One main surface of the manifold 121 is fixed to the main surface of the substrate 111. The manifold 121 also has a top plate on the main surface opposite to the one to which the substrate 111 is fixed. An ink supply pipe is also fixed to the manifold 121 via the top plate.

[0047] The supply channel 1211 fluidly connects the ink supply pipe and the supply port 1111 of the substrate 111. The supply channel 1211 is a liquid flow path between the ink supply pipe and the supply port 1111.

[0048] The ink supply pipe is connected to the supply passage 1211. In this embodiment, since the liquid ejection head 1 has a pair of head bodies 11, a pair of ink supply pipes is provided for each.

[0049] The cover 15 covers, for example, the sides of the pair of head bodies 11 and the manifold unit 12.

[0050] The liquid discharge head 1 configured in this way has a head body 11 that includes a plurality of individual electrodes that can individually apply a driving voltage to each piezoelectric element 1133, and a common electrode that can apply a driving voltage to all piezoelectric elements 1133.

[0051] Therefore, the liquid ejection head 1 can selectively, individually, or collectively drive multiple pressure chambers 1131. When a pressure chamber 1131 is driven, it undergoes shear-mode deformation, and the ink supplied into the pressure chamber 1131 is pressurized. Thus, the liquid ejection head 1 can selectively eject the pressurized ink from the nozzle 1141 facing the pressure chamber 1131.

[0052] In this embodiment, a substrate 111 and a frame 112 are arranged on the side of the nozzle plate 114 opposite the ink ejection side as flow path members that constitute the ink supply flow path, and common flow paths 1161 and 1162 are formed by these flow path members as ink flow paths that extend in the row direction of the nozzle 1141. The nozzle plate 114 is made of a flexible material such as polyimide and is used as a pressure buffer damper to suppress water hammer generated in the ink flow path that extends in the row direction. In the liquid ejection head 1 of this embodiment, electrodes for driving the actuator 113 that ejects ink are formed in the ink flow path, and an outer cover 115 for protecting the electrodes is bonded to the ink ejection surface of the nozzle plate 114 at locations other than the damper portion R1 which acts as a pressure buffer damper. The outer cover 115 is shaped to cover the ink ejection surface side and the side of the ink flow path. The nozzle plate 114 is also bonded at locations other than the damper portion R1 which acts as a pressure buffer damper. In other words, the nozzle plate 114 has a damper portion R1 facing the common flow path and a joint portion R2 set at a different position from the damper portion R1.

[0053] Furthermore, a nozzle cover 118 is attached to the outer cover 115, with a shape that covers the ink ejection surface side and a portion of the side of the outer cover 115. The cover opening 1183 of the nozzle cover 118 has a smaller opening area than the opening 1153 of the outer cover 115. For example, the width dimension of the cover opening 1183 in the Y direction, which is the extension direction, is narrower than the width dimension of the opening 1153 in the Y direction.

[0054] With the liquid discharge head 1 configured in this way, a gap G is provided between the nozzle plate 114 and the nozzle cover 118 that protects the nozzle 1141, thereby protecting the nozzle plate 114 without hindering its movement. In other words, when the nozzle plate 114 that forms the nozzle 1141 is used as a pressure buffer damper, the movement of the damper portion R1, which is the region of the nozzle plate 114 facing the common flow path, is not hindered and deformation is permitted, thus maintaining its function as a pressure buffer damper and suppressing the effects of water hammer.

[0055] It should be noted that the embodiments of the present invention are not limited to the configurations described above. For example, although a side-shooter type inkjet head was exemplified in the above embodiments, the invention is not limited to this, and an end-shooter type may also be used. Furthermore, although the liquid ejection head 1 is shown as an independently driven type with alternating pressure chambers and air chambers, the invention is not limited to this.

[0056] For example, the common flow path on both sides of the pressure chamber 1131 is the supply side, and ink flows in from both sides, but this is not the only configuration. As an example, one side of the pressure chamber 1131 may be the supply side and the other side may be the discharge side, and ink may flow in from one side of the pressure chamber 1131 and out from the other side in an inkjet head. Alternatively, the supply side and discharge side may be reversed, or they may be configured to be switchable.

[0057] Furthermore, although the above example describes a non-circulating liquid discharge head 1, a circulating type is also possible. For example, a configuration in which a flow path is also formed on the discharge side may be provided, in which case discharge ports are formed at both ends of the substrate 111 in the first direction, a liquid discharge path is formed in the manifold 121 that is continuous with the discharge ports of the substrate 111, and a recovery flow path connected to the liquid discharge path is also provided.

[0058] For example, in this embodiment, the cross-section of the actuator 113 is trapezoidal, and the cross-section of the second common flow path 1162 is also trapezoidal with one side inclined, but this is not the only example. For example, it may be rectangular or have other cross-sectional shapes.

[0059] Furthermore, the liquid to be dispensed is not limited to printing ink; for example, it could be a device that dispenses a liquid containing conductive particles for forming wiring patterns on a printed circuit board.

[0060] Furthermore, while the above embodiment shows an example of the inkjet head being used in a liquid ejection device such as an inkjet printer, it is not limited to this, and can also be used in 3D printers, industrial manufacturing machinery, and medical applications, enabling miniaturization, weight reduction, and cost reduction.

[0061] According to at least one embodiment described above, the nozzle can be protected while ensuring the water hammer suppression function provided by the nozzle plate.

[0062] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of Symbols]

[0063] 1...Liquid dispensing head, 11...Head body, 12...Manifold unit, 15...Cover, 16...Ink flow path, 111...Substrate, 112...Frame (flow path member), 113...Actuator, 114...Nozzle plate, 115...Outer cover, 116...Common flow path section, 118...Nozzle cover, 121...Manifold, 1111...Supply port, 1131...Pressure chamber, 1132...Air chamber, 1133...Piezoelectric Body, 1134... Inclined surface, 1135... Actuator groove, 1141... Nozzle, 1142... Nozzle row, 1151... Top plate section, 1152... Peripheral wall section, 1153... Opening, 1161... Common flow path, 1162... Common flow path, 1181... Top cover section, 1182... Edge cover section, 1183... Cover opening (opening), 1184... Notch section, 1211... Supply path, R1... Damper section, R2... Joint section.

Claims

1. A nozzle plate having a nozzle for dispensing liquid, A nozzle cover is provided, which has a cover portion facing the discharge surface side of the nozzle plate with a gap between them, and an opening is formed in the discharge side portion of the nozzle. A flow path member comprising a liquid flow path including a plurality of pressure chambers communicating with each of the plurality of nozzles, Equipped with, The nozzle plate is flexible and has a damper portion and a joint portion that is joined to the flow path member. The nozzle cover is bonded to the area of ​​the nozzle plate other than the damper portion, forming a liquid dispensing head.

2. The system comprises an outer cover that covers at least a portion of the flow channel member, The outer cover comprises a top portion disposed on the discharge side of the nozzle plate and a peripheral wall portion covering at least a part of the outer circumference of the flow path member, with an opening formed on the discharge side of the nozzle. The nozzle cover is joined to the outer cover, The liquid dispensing head according to claim 1, wherein the opening area of ​​the opening in the nozzle cover is smaller than the opening area of ​​the opening in the outer cover.

3. The liquid flow path comprises the pressure chamber and one or more common flow paths that communicate with the plurality of pressure chambers and extend in one direction. The liquid discharge head according to claim 1, wherein the damper portion is positioned opposite the discharge side of the common flow path.

4. The liquid discharge head according to any one of claims 1 to 3, wherein the gap is formed between the discharge side of the damper portion of the nozzle plate and the nozzle cover.

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