Inspection object holding device and inspection object evaluation system

Abstract

To accurately determine the quality of the object being inspected. [Solution] The suction holding device comprises a holding member having a suction port for sucking and holding an object to be inspected, and a rotating base material that arranges a plurality of the holding members on a ring and switches the position of the holding members on the ring by rotating. The suction holding device comprises a negative pressure supply unit that supplies negative pressure to the suction port, a connecting member having a suction connection unit that supplies negative pressure supplied from the negative pressure supply system to each of the holding members, and a moving-side suction connection unit that is arranged along the rotational trajectory of the rotating base material and transmits negative pressure from the negative pressure supply unit to the suction port.

Description

Technical Field

[0001] The technology of the present disclosure relates to an inspection object holding device and an inspection object evaluation system.

Background Art

[0002] Patent Document 1 discloses a transport mechanism for adsorbing and transporting an electronic component package. This transport mechanism includes a plurality of suction nozzles composed of a first group of suction nozzles and a second group of suction nozzles. The transport mechanism includes a first motor for raising and lowering the suction nozzles of the first group, a second motor for raising and lowering the suction nozzles of the second group, and a third motor for rotating the plurality of suction nozzles in a plane intersecting the lifting direction of the plurality of suction nozzles. The transport mechanism includes a third power transmission mechanism for transmitting the power of the third motor to the plurality of suction nozzles. The third power transmission mechanism includes a plurality of rotating gears corresponding to the plurality of suction nozzles, a rotating pinion that rotates when the third motor is driven, and a rod-shaped rotating rack arranged to mesh with the plurality of rotating gears and moving along with the rotation of the rotating pinion.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the above-described transport device, a rotary pinion rotates due to the drive of a third motor, and a rod-shaped rotary rack moves in conjunction with the rotation of the rotary pinion, causing multiple suction nozzles to rotate only within a plane. Therefore, when photographing electronic component packages that are attracted to the nozzles and determining the quality of the electronic component packages based on the image data obtained from the photography, it is not possible to properly photograph the edges of the electronic component packages, and thus it is not possible to accurately determine the quality of the electronic component packages. Furthermore, even when determining good and defective products by visual inspection without using image data, it is necessary to visually inspect the entire package to be inspected from multiple angles, but it is not possible to change the orientation of the electronic component package at will.

[0005] The technology disclosed herein aims to provide an object holding device and an object evaluation system that facilitate changes in the orientation of the object being inspected. [Means for solving the problem]

[0006] To achieve the above objective, the inspection object holding device of the first aspect of the technology of this disclosure is The apparatus comprises a nozzle that contacts the object to be inspected and adsorbs the object to be inspected, a first holding part that holds the nozzle, and a first rotation mechanism that rotates the first holding part about a first central axis of the first holding part.

[0007] The inspection object holding device includes a second holding part that rotatably holds the first holding part, and a second rotation mechanism that rotates the second holding part about a second central axis of the second holding part.

[0008] The object to be inspected holding device comprises the first holding part, the first rotating mechanism, the second holding part, a third holding part that holds the second rotating mechanism, a rocking mechanism that rocks the third holding part, a tube connected to the nozzle via the first holding part and the second holding part, and a suction part that sucks air from inside the tube.

[0009] The second embodiment of the inspection object evaluation system comprises a first inspection object holding device, a second inspection object holding device, a device moving mechanism for moving the first inspection object holding device and the second inspection object holding device, and an imaging unit for photographing the inspection object.

[0010] The nozzle of the first object-to-inspection holding device is referred to as the first nozzle, and the nozzle of the second object-to-inspection holding device is referred to as the second nozzle. The object-to-inspection has a first surface and a second surface facing the first surface.

[0011] The inspection object evaluation system controls the first inspection object holding device, the second inspection object holding device, and the moving mechanism so that the second surface of the inspection object is photographed by the imaging unit while the first surface is adsorbed to the first nozzle, and after such photography, the second surface is adsorbed to the second nozzle and the adsorption of the first surface is stopped, and the first surface of the inspection object is photographed by the imaging unit while the second surface is adsorbed to the second nozzle, and evaluates the quality of the inspection object based on the images obtained from the first surface and the second surface of the inspection object being photographed.

[0012] The control unit of the object inspection evaluation system in the third embodiment controls the first object inspection holding device, the second object inspection holding device, and the moving mechanism so that the second surface of the object inspection is photographed from a different direction by the imaging unit while the first surface is attached to the first nozzle, and the first surface of the object inspection is photographed from a different direction by the imaging unit while the second surface is attached to the second nozzle. [Effects of the Invention]

[0013] A first aspect of the technology of this disclosure includes a first holding part, a first rotating mechanism, a second holding part, a third holding part that holds the second rotating mechanism, and a rocking mechanism that rocks the third holding part, so that the object to be inspected can be changed to any position.

[0014] The second aspect includes the first inspection object holding device, the second inspection object holding device, and a device moving mechanism for moving the first inspection object holding device and the second inspection object holding device. Since there are the first inspection object holding device and the second inspection object holding device for holding the inspection object, the inspection target area can be expanded by changing the holding surface.

[0015] In the third aspect, since the posture of the held inspection object can be arbitrarily changed, it can be evaluated with images taken from more angles, and the evaluation system can be improved.

Brief Description of the Drawings

[0016] [Figure 1] FIG. 1 is an overall front view of an example of an inspection object evaluation system. [Figure 2] FIG. 2 is an overall plan view of an example of an inspection object evaluation system. [Figure 3] FIG. 3 is an overall perspective view of an example of an inspection system. [Figure 4] FIG. 4 is an overall perspective view of an example of an inspection holding device. [Figure 5] FIG. 5 is an overall plan view of an example of an inspection holding device. [Figure 6] FIG. 6 is an overall side view of an example of an inspection holding device. [Figure 7] FIG. 7 is a cross-sectional view taken along the line A-A of the inspection holding device. [Figure 8] FIG. 8 is an exploded perspective view of an example of the connection portion between the connection member and the support member. [Figure 9] FIG. 9 is a partially enlarged cross-sectional view of an example of the inspection holding device. [Figure 10] FIG. 10 is a cross-sectional view taken along the line B-B of an example of the inspection holding device. [Figure 11] FIG. 11 is a cross-sectional view taken along the line C-C of an example of the inspection holding device. [Figure 12] FIG. 12 is an overall perspective view of an example of a supply holding device. [Figure 13]FIG. 13 is an overall side view of an example of the supply and holding device. [Figure 14] FIG. 14 is a partial enlarged cross-sectional view of an example of the supply and holding device. [Figure 15] FIG. 15 is a partial enlarged cross-sectional view of an example of the supply and holding device. [Figure 16] FIG. 16 is an overall front view of an example of the inspection holding member and the inversion device. [Figure 17] FIG. 17 is an overall front view of an example of the inversion device and the storage and holding device. [Figure 18] FIG. 18 is a circuit diagram of an example of the air transmission circuit. [Figure 19] FIG. 19 is a block diagram showing an example of the control circuit. [Figure 20] FIG. 20 is a flowchart of an example of the inspection object evaluation program. [[ID=Z3]] [Figure 21] FIG. 21 is a flowchart of an example of the inspection process in step S103 of FIG. 20. [Figure 22] FIG. 2Z is a flowchart of an example of the delivery process in step S105 of FIG. 20. [Figure 23] FIG. 23 is a concept showing an example of the state where the inspection holding device is located at the inspection position. [[ID=3Z]] [Figure 24] FIG. 24 is a conceptual diagram showing an example of the state where the inspection holding device is tilted at the inspection position. [[ID=zz]] [Figure 25] [[ID=Z6]]FIG. 25 is a conceptual diagram showing an example of the state of the transfer operation of the inspection object from the first inspection holding device to the second inspection holding device. [[ID=Z / ]] [Figure 26] FIG. 26 is a conceptual diagram showing an example of the state where the inspection object is transferred to the second inspection holding device. [Figure 27] FIG. 27 is a conceptual diagram showing an example of the state where the second inspection holding device has moved to the inversion position. [Figure 28] FIG. 28 is a schematic configuration diagram of an example of the inspection object evaluation system of the first modification. [Figure 29] FIG. 29 is a schematic configuration diagram of an example of the inspection object evaluation system of the second modification. [Figure 30] Figure 30 is a cross-sectional view of an example of the lower scanning mirror section. [Figure 31] Figure 31 is a side cross-sectional view of an example of an object evaluation system. [Figure 32] Figure 32 shows an example of the nozzle used to aspirate the object being inspected being rotated from bottom to top. [Figure 33] Figure 33 shows an example of how inspected items are sorted and placed into good product trays and defective product trays according to the quality judgment result. [Figure 34] Figure 34 is a schematic diagram of an example of an inspection target evaluation system for a third modified example. [Modes for carrying out the invention]

[0017] [Embodiment] An example of an embodiment of the inspection target evaluation system of the technology disclosed herein will be described in detail below with reference to the attached drawings.

[0018] [composition] Figure 1 is an overall front view of the inspection object evaluation system 1, and Figure 2 is an overall top view of the inspection object evaluation system 1. The inspection object evaluation system 1 is an inspection system that optically inspects the surface of an inspection object 7 having a rectangular parallelepiped shape for the presence or absence of scratches or irregularities, or scratches or irregularities on the edges that form the boundary of the surface, using an imaging device such as a camera. In this embodiment, the inspection object 7 has a difference in shape between its front and back surfaces. The front surface is an example of the "second aspect" of the technology disclosed herein, and the back surface is an example of the "first aspect" of the technology disclosed herein.

[0019] As shown in Figures 1 and 2, the inspection object evaluation system 1 has a supply system 12, an inspection system 13, an inversion system 14, and a storage system 15 on a base 11.

[0020] The supply system 12 has a supply holding device 2A, which picks up the object to be inspected 7 with its surface facing upwards from the supply tray 125 on which the object to be inspected 7 is prepared, and passes the object to be inspected 7 picked up by the supply holding device 2A to the first inspection holding device 5A located in the inspection system 13, as shown in Figure 3. In the inspection system 13, the transport unit 3 moves the first inspection holding device 5A to the imaging area (inspection position Ep). Within the inspection position Ep, the camera Ca takes images of the surface and edges of the object to be inspected 7.

[0021] The first inspection and holding device 5A rotates the rotating base material 24 sequentially to change the orientation of the object to be inspected 7 so that it can be photographed by the camera Ca. Next, the second inspection and holding device 5B receives the object to be inspected 7 from the first inspection and holding device 5A. The second inspection and holding device 5B holds the surface of the object to be inspected 7 and enables photography of the back surface. The camera Ca photographs the back surface and edges of the object to be inspected 7 held by the second inspection and holding device 5B. The images of the surface, back surface, and their edges taken by the camera Ca are analyzed by the control device 10C, which will be described later in Figure 19. Based on the image analysis results, the control device 10C makes an evaluation based on the presence or absence of scratches on the surface of the object to be inspected, the unevenness of the edge lines, the color of the surface, etc. Camera Ca is an example of the imaging unit of the technology of this disclosure.

[0022] In the inspection system 13, the CPU 101C of the control device 10C shown in Figure 19 stores the evaluation result of each inspection target 7 in the storage device 104C. For each inspection target 7, the CPU 101C stores the evaluation result of that inspection target 7 in the storage device 104C, associating it with the position held in the first inspection holding device 5A and the second inspection holding device 5B.

[0023] In the inspection system 13, the second inspection holding device 5B passes the inspected object 7, which has been inspected, to the inversion device 6 of the inversion system 14, and the inversion device 6 passes the inspected object 7 to the storage holding device 2B of the storage system 15. The inversion device 6 intervenes between the second inspection holding device 5B and the storage holding device 2B, and by passing the inspected object 7, it can invert the orientation of the inspected object 7. In other words, the storage holding device 2B stores the inspected object 7 in the good product tray 155 or defective product tray 156 with its surface facing upwards, just as it was when it was placed on the supply tray 125.

[0024] In the inspection process described above, the configuration of the inspection system 13, which is the core of the inspection process, will be explained in detail, and then the overall configuration will be explained along the flow of movement of the object to be inspected 7. The inspection system 13 includes a first inspection holding device 5A, a second inspection holding device 5B, a transport unit 3, and a camera Ca. The first inspection holding device 5A and the second inspection holding device 5B hold the object to be inspected 7. The transport unit 3 transports the first inspection holding device 5A and the second inspection holding device 5B separately. The camera Ca acquires images of the object to be inspected 7 held by the first inspection holding device 5A and the second inspection holding device 5B.

[0025] As shown in Figure 3, the transport unit 3 includes a transport table 32A for transporting the first inspection and holding device 5A, a transport table 32B for transporting the second inspection and holding device 5B, and a first transport electromagnetic cylinder 321a and a second transport electromagnetic cylinder 321b (see Figure 19) for moving the transport tables 32A and 32B. The first transport electromagnetic cylinder 321a and the second transport electromagnetic cylinder 321b have sliders that move along the transport guide rail 31. The camera Ca is located approximately in the center of the transport guide rail 31 and is installed with its optical axis facing downward. The first inspection and holding device 5A is an example of the first inspection object holding device of the technology of this disclosure, and the second inspection and holding device 5B is an example of the second inspection object holding device of the technology of this disclosure. The transport unit 3 is an example of the device moving mechanism of the technology of this disclosure.

[0026] The slider of the first transport electromagnetic cylinder 321a supports the transport platform 32A, and the slider of the second transport electromagnetic cylinder 321b (see Figure 19) supports the transport platform 32B. These electromagnetic cylinders are configured to allow for precise control of the slider position. Each slider can move along the entire length of the transport guide rail 31.

[0027] Since the pair of transport tables 32A and 32B, the pair of support tables 33A and 33B, the first inspection and holding device 5A, and the second inspection and holding device 5B all have the same configuration, we will explain the configuration of one of them, the first inspection and holding device 5A, the transport tables 32A, and the support tables 33A, and omit the explanation of the other configuration.

[0028] The transport platform 32A moves along the transport guide rail 31. The transport platform 32A's main movement area is between the position closest to the supply system 12 on the transport guide rail 31, that is, the position where the object to be inspected 7 is received from the supply holding device 2A (receiving position Ea), and the position directly below the camera Ca for inspection (inspection position Ep), and it moves back and forth within this area. The transport platform 32B's main movement area is between the position closest to the inversion system 14 on the transport guide rail 31, that is, the position where the object to be inspected 7 is handed over to the inversion system 14 (handing position Eb), and the position directly below the camera Ca for inspection (inspection position Ep), and it moves back and forth within this area.

[0029] The transport platform 32A supports the support platform 33A. The support platform 33A supports the first inspection and holding device 5A, which is equipped with a rocking motor M35a. As shown in Figure 4, the support platform 33A has a pair of support plates 331a and 331b and an angle adjustment platform 332. The pair of support plates 331a and 331b are erected parallel to each other and are located on the transport platform 32A. The angle adjustment platform 332 is supported between the support plates 331a and 331b so as to be able to rock. The rocking motor M35a adjusts the tilt angle of the angle adjustment platform 332. The rocking motor M35a is a motor whose rotation angle can be controlled, such as a servo motor or a stepping motor.

[0030] The angle adjustment base 332 has a rocking base 332c and a pair of parallel rocking plates 332a and 332b erected at both ends of the rocking base 332c. Support plates 331a and 331b pivotally support the rocking plates 332a and 332b, respectively, by rocking shafts 333a and 333b. The rocking shaft 333b of the rocking plate 332b is connected to the rotor of the rocking motor M35a. The angle adjustment base 332 is an example of a third holding part of the technology of this disclosure. The rocking motor M35a is an example of a rocking mechanism of the technology of this disclosure.

[0031] The first inspection and holding device 5A is mounted on the rocking table 332c. The configuration of the first inspection and holding device 5A will now be described. Figure 4 is an overall perspective view of the first inspection and holding device 5A, Figure 5 is an overall plan view of the first inspection and holding device 5A, Figure 6 is an overall side view of the first inspection and holding device 5A, and Figure 7 is a cross-sectional view AA of the first inspection and holding device 5A.

[0032] The first inspection and holding device 5A comprises a support member 22, a connecting member 23, a rotating base material 24, a plurality of rotating holding members 25a, 25b, 25c, and 25d, a swivel motor M15a (see Figures 6 and 7), and a switching motor M25a (see Figure 7).

[0033] The support member 22 is fixed on the rocking base 332c. The connecting member 23 is rotatably connected to the support member 22. The rotating base material 24 rotates together with the connecting member 23. Multiple rotating holding members 25a, 25b, 25c, and 25d are arranged at equal intervals in the circumferential direction at the upper circumferential end of the rotating base material 24 and are rotatably supported. The slewing motor M15a supplies rotational driving force to each of the rotating holding members 25a, 25b, 25c, and 25d, causing each of the rotating holding members 25a, 25b, 25c, and 25d to rotate at controlled rotation angles. The switching motor M25a supplies rotational driving force to the rotating base material 24, causing the rotating base material 24 to rotate at controlled rotation angles. The slewing motor M15a is one form of the first rotation mechanism, and the switching motor M25a is one form of the second rotation mechanism. The swivel motor M15a and the switching motor M25a are motors capable of controlling the rotation angle, such as servo motors and stepping motors.

[0034] As shown in Figures 4, 6, and 7, a slewing motor M15a is positioned on the lower side of the rocking base 332c, and a support member 22 and a switching motor M25a are positioned on the upper side. As shown in Figures 4 and 6, the support member 22 is fixed to the rocking base 332c via a plurality of connecting columns 511. Also, as shown in Figure 7, the switching motor M25a is positioned inside the support member 22. The rotor ms2 of the switching motor M25a and the rotor ms1 of the slewing motor M15a have concentric cross-sections and share the same center of rotation.

[0035] The support member 22 is formed in an annular shape centered on the rotor ms1 of the swing motor M15a. A negative pressure device Pn (see Figure 18) is connected to the lower surface of the support member 22. As shown in Figure 6, suction connection parts 225a, 225b, 225c, and 225d (225a is not shown) are provided at equal intervals in the circumferential direction.

[0036] As shown in Figures 8 and 9, the support member 22 has multiple annular grooves 222 formed radially along the circumferential direction on its upper surface. The multiple grooves 222 are arranged on concentric circles of different diameters. In this embodiment, the support member 22 has five grooves 222, of which the central groove 222a is particularly wide. The bottom of the wide groove 222a has multiple suction holes 223 (four in this embodiment) connected to a negative pressure device Pn, and the suction holes 223 are arranged at equal intervals in the circumferential direction.

[0037] The connecting member 23 is an annular member centered on the rotor ms1 of the swivel motor M15a shown in Figure 7, and the lower surface of the connecting member 23 has multiple circumferentially formed protrusions 235. The multiple protrusions 235 are arranged on concentric circles of different diameters. As shown in Figure 9, the protrusions 235 are fitted into grooves 222 formed on the upper surface of the support member 22. The swivel motor M15a is a nozzle rotation motor that rotates the posture of the object to be inspected 7. In this embodiment, the connecting member 23 has five protrusions 235. Of the five protrusions 235, the central protrusion 235a is configured to be particularly wide. Multiple suction connection ports 233 (four in this embodiment) connected to the suction port 254 are provided at the top of the wide protrusion 235a. The multiple suction connection ports 233 are arranged at equal intervals in the circumferential direction. As shown in Figure 7, the connecting member 23 is rotatable around the rotor ms2 of the switching motor M25a and is connected to the support member 22 so as to be rotatable relative to it.

[0038] The same number of suction connection ports 233 are provided on the connecting member 23, and the same number of suction holes 223 are provided on the support member 22, and they are positioned opposite each other. The multiple suction holes 223 and suction connection ports 233 provided on the connecting member 23 and the support member 22 are configured so that all openings overlap simultaneously. Specifically, since each opening is arranged at equal intervals in the circumferential direction, even when the connecting member 23 and the support member 22 rotate relative to each other, all openings overlap simultaneously each time they move by a predetermined rotational angle. In this embodiment, every time the connecting member 23 and the support member 22 rotate relative to each other by 90 degrees, all suction connection ports 233 and suction holes 223 overlap simultaneously.

[0039] Furthermore, as shown in Figure 9, a gap 236 is formed between the bottom of each groove 222 and the top of each protrusion 235. This gap 236 suppresses friction in the fitting portion between the groove 222 and the protrusion 235 and has the effect of smoothing the relative rotation between the connecting member 23 and the support member 22. In addition, a gap 236 is provided between the top of the wide protrusion 235a, which is provided with the suction connection port 233, and the bottom of the wide groove 222a, which is provided with the suction hole 223. Since air can flow through this gap 236, even when the suction connection port 233 and the suction hole 223 do not overlap, air can flow through the gap 236 and supply negative pressure to the suction port 254. The gap 236 allows air to flow in the circumferential direction along the groove 222, but the fitting of the multiple grooves 222 arranged radially with the protrusion 235 suppresses air flow in the radial direction. In this way, the fitting of the multiple grooves 222 and the protruding ridges 235 suppresses the inflow of air from the outside and maintains negative pressure.

[0040] As shown in Figure 4, the connecting member 23 has a plurality of connecting portions 231 protruding from its circumferential end. The connecting portions 231 are arranged substantially evenly in the circumferential direction and connect the rotating base material 24 which is placed on the protruding end.

[0041] As shown in Figure 7, the rotating base material 24 is an annular member centered on the rotor ms1 of the slewing motor M15a, and has a disc portion 241, support columns 242 erected at equal intervals in the circumferential direction at the peripheral end of the disc portion 241, an annular portion 243 connected to the tip of the support columns 242, and a cover 245 that covers the annular portion 243.

[0042] As shown in Figures 4 and 7, the upper end of the connecting portion 231 of the connecting member 23 is connected and fixed to the lower surface of the disc portion 241 of the rotating base material 24. With this configuration, the connecting member 23 is fixed to the rotating base material 24, and the connecting member 23 and the rotating base material 24 rotate as a single unit.

[0043] Furthermore, the rotor ms1 of the slewing motor M15a is inserted through the center of the disc portion 241, and the rotor ms2 of the switching motor M25a is connected to its lower side. Rotors ms1 and ms2 each have the same center of rotation.

[0044] As shown in Figures 7 and 9, support members 26a to 26d are installed between the disc portion 241 and the annular portion 243. Multiple support members 26a to 26d are arranged at equal intervals in the circumferential direction, and in this embodiment, four are arranged. The upper ends of the support members 26a to 26d are rotatably supported by the annular portion 243, and the lower ends are rotatably supported by the disc portion 241.

[0045] Each support member 26a to d has a sliding rotation shaft 27a to d that passes through the rotation axis. Although not shown, grooves and protrusions that fit together are formed in the axial direction on the outer circumferential surfaces of the sliding rotation shafts 27a to d and the inner circumferential surfaces of the support members 26a to d. With this configuration, the sliding rotation shafts 27a to d are axially slidable relative to the support members 26a to d, and when rotating around the axis, the support members 26a to d and the sliding rotation shaft 27 rotate as a single unit. The support members 26a to d have a pulley portion 261 on their outer circumferential surface around which a transmission belt is wound, and the pulley portion 261 has irregularities to suppress slippage with the first transmission belt 43a and the second transmission belt 43b. The pulley portion 261 functions as a driven pulley.

[0046] The sliding rotation shafts 27a to d have rotation holding members 25a to d connected to their tips. Each of the sliding rotation shafts 27a to d has a suction passage 271 formed along its axis, and the suction passage 271 has openings at the tips and base ends of the sliding rotation shafts 27a to d. The tips of the suction passages 271 are connected to a space 251 inside the rotation holding member 25, as shown in Figure 7, and the base ends are connected to a suction connection port 233 formed in the connecting member 23, as shown in Figure 9. The rotation holding member 25 has a circular base plate 255 and a cylindrical nozzle support 256 that covers the circular base plate 255, and a space 251 is formed between the circular base plate 255 and the nozzle support 256. The nozzle support 256 can be replaced. For example, by replacing it with a nozzle support 256 equipped with nozzles of different numbers, materials, and shapes of suction ports, it can handle a wide variety of inspection targets.

[0047] The rotating holding members 25a to d are cylindrical in shape and coaxial with the rotation axes 27a to d of the slide rotation axes, and have a space 251 through which the tip of the suction passage 271 opens. The base ends of a plurality of nozzles 252 are connected to the surface facing the opening of the suction passage 271. In this embodiment, as shown in Figures 4 and 5, three nozzles 252 are provided. A suction port 254 is provided at the tip of each nozzle 252, and this suction port 254 communicates with the space 251. A deformable contact portion 254s surrounds the suction port 254. When this suction port 254 is pressed against the surface of the object to be inspected 7, the object to be inspected 7 can be sucked onto the rotating holding member 25. By providing a deformable contact portion 254s at the nozzle tip where the suction port 254 is located, it is possible to suppress the formation of a gap between the suction port 254 and the surface of the object to be inspected 7, and to ensure sufficient suction force. Furthermore, even if the surface of the object to be inspected 7 has a complex shape other than a flat surface, such as a sphere, the contact portion 254s deforms according to the shape, making it possible to tightly seal the suction port 254 to the surface of the object to be inspected 7 without any gaps.

[0048] In this embodiment, the contact portion 254s is bellows-shaped, but it may have other shapes. It may also be made of a softer material. Such a contact portion also acts as a cushioning material to soften the impact when the suction port 254 is pressed against the object to be inspected 7. The bellows-shaped suction port is one form of the impact absorption portion.

[0049] The rotating holding members 25a to d, configured as described above, rotate together with the sliding rotation shafts 27a to d, and move together in the axial direction with the axial sliding movement of the sliding rotation shafts 27a to d. The rotating holding member 25 is one form of the first holding part. As shown in Figures 6 and 9, a compression spring 257 is interposed between the rotating holding members 25a to d and the support members 26a to d. This compression spring 257 mitigates the impact when the supply holding device 2A or the second inspection holding device 5B comes into contact with the object to be inspected 7 when the object to be inspected 7 is being handed over.

[0050] The suction circuit is formed from the suction port 254, space 251, suction passage 271, suction connection port 233, suction hole 223, and suction path 224. The suction circuit (254, 251, 271, 233, 223, 224) supplies negative pressure to the suction port 254 of the nozzle 252. As shown in Figure 18, a negative pressure device Pn is connected to the suction circuit (254, 251, 271, 233, 223, 224). An example of a negative pressure device Pn is a negative pressure pump. The negative pressure device Pn is one form of the suction section. The air passage consisting of the suction passage 271, suction connection port 233, suction hole 223, and suction path 224 is one form of a pipe.

[0051] As shown in Figure 18, switching valves Va to Vd are connected between the suction circuit (254, 251, 271, 233, 223, 224) and the negative pressure device Pn, allowing for electrical switching between suction and no pressure (no suction). As shown in Figure 18, a separate pressurizing device Pp may also be provided and connected to the switching valves Va to Vd. In this case, the switching valves Va to Vd can be switched between three states: a negative pressure state with the negative pressure device Pn connected, a pressurized state with the pressurizing device Pp connected, and a no-pressure state (atmospheric pressure state) with neither the negative pressure device Pn nor the pressurizing device Pp connected.

[0052] These switching valves Va to Vd are controlled by a control device (see Figure 19), and three states—negative pressure, pressurized pressure, and no pressure—are realized at the suction port 254. Alternatively, the suction circuit may be connected to the suction port of the pump and the pressurized circuit to the discharge port of the pump without providing a pressurizing device Pp.

[0053] Next, the rotation mechanism for rotating the rotation holding members 25a to 25d will be described. Figures 10 and 11 show the rotation mechanism that transmits rotation, and are cross-sectional views BB and CC in Figure 7. On the disc portion 241 of the rotating base material 24, four pairs of guide pulleys 42a, 42a, 42b, 42b, 42c, 42c, 42d, and 42d are arranged at equal intervals in the circumferential direction on the circumference of a circle centered on the rotor ms1. The guide pulleys 42a, 42a, 42b, 42b, 42c, 42c, 42d, and 42d are driven pulleys. A drive pulley 41 is also connected to the tip of the rotor ms1. As shown in Figure 11, a first transmission belt 43a and a second transmission belt 43b are wound around the drive pulley 41. The first transmission belt 43a is wrapped around the drive pulley 41 as well as the support supports 26c and 26d, and is guided by two pairs of guide pulleys 42c, 42c, 42d, and 42d such that the wrapping angle around each pulley increases.

[0054] As shown in Figure 10, the second transmission belt 43b is wrapped around the support 26a, 26b in addition to the drive pulley 41, and is guided by two pairs of guide pulleys 42a, 42a, 42b, 42b such that the wrapping angle around each pulley increases.

[0055] As the winding angle increases in this way, the contact distance between the drive pulley 41 and the first transmission belt 43a and the second transmission belt 43b increases, suppressing slippage between the drive pulley 41 and the first transmission belt 43a and the second transmission belt 43b, thereby ensuring reliable power transmission. The same applies to power transmission between the first transmission belt 43a and the second transmission belt 43b and the pulley portion 261 of the support 26a to d. Since the first transmission belt 43a and the second transmission belt 43b are wound around the same drive pulley 41, they are wound at different positions in the axial direction of the drive pulley 41.

[0056] The first transmission belt 43a transmits the rotation of the drive pulley 41 to the support members 26c and 26d, causing the rotation holding members 25c and 25d to rotate. The second transmission belt 43b transmits the rotation of the drive pulley 41 to the support members 26a and 26b, causing the rotation holding members 25a and 25b to rotate.

[0057] Furthermore, by rotating the switching motor M25a, the rotating base material 24 rotates, and the positions of each rotating holding member 25a, 25b, 25c, and 25d on the circumference can be changed. When the position of each rotating holding member 25a, 25b, 25c, and 25d is changed by rotating the switching motor M25a, the positions of the suction connection port 233 and the suction hole 223 of each suction circuit become relatively separated, and the connection is interrupted. However, the gap 236 maintains some airflow between the suction connection port 233 and the suction hole 223, so the suction effect on the object to be inspected 7 does not disappear, and the holding effect by suction is maintained.

[0058] The switching motor M25a is a motor for changing the position of the object to be inspected 7 by rotating the rotating base material 24, and is a form of the second rotation mechanism. The rotating base material 24 is a form of the second holding part.

[0059] Next, the supply system 12 will be described. The supply system 12 shown in Figures 1 and 2 includes a pair of parallel guide rails 121 and 123 arranged at a predetermined height, a movable beam 122 erected on the pair of guide rails 121 and 123, and a supply holding device 2A provided on the movable beam 122.

[0060] The movable beam 122 is mounted on the slider of a vertically moving electromagnetic cylinder 123s (see Figure 19) provided along guide rails 121 and 123, and is configured to reciprocate along the guide rails 121 and 123 in the Y-axis direction in Figure 1. The movable beam 122 also has a horizontally moving electromagnetic cylinder 124s (see Figure 19). The slider of the horizontally moving electromagnetic cylinder 124s moves in the X-axis direction. A movable base 124 is mounted on the slider of the horizontally moving electromagnetic cylinder 124s. The body of a lifting electromagnetic cylinder is fixed to the movable base 124, and a supply and holding device 2A is fixed to the slider of the lifting electromagnetic cylinder 201 (see Figure 13). These electromagnetic cylinders allow the supply and holding device 2A to reciprocate along the movable beam 122 in the X-axis direction and also reciprocate vertically in the Z-axis direction. By using electromagnetic cylinders, the movement position can be precisely controlled electrically. The electromagnetic cylinder can be replaced with other cylinders that can precisely control the amount of movement and convert it into linear movement, such as a linear servo motor.

[0061] A supply tray 125 on which the object to be inspected 7 is placed is positioned between the guide rails 121 and 123. The movable range of the supply holding device 2A includes the entire area directly above the supply tray 125 and the area directly above the initial position of the first inspection holding device 5A.

[0062] Figure 12 is an overall perspective view of the supply and holding device 2A, and Figure 13 is a side view showing the supply and holding device 2A and the configuration in which the supply and holding device 2A is attached to the movable beam 122. The configuration of the supply and holding device 2A is almost the same as that of the first inspection and holding device 5A which has already been described, so only the differences will be explained, and the explanation of the similar configuration will be omitted.

[0063] As shown in Figure 13, a connecting plate 202 is connected to the slider of the lateral moving electromagnetic cylinder provided on the movable beam 122. This causes the connecting plate 202 to move in the X-axis direction. The body of the lifting electromagnetic cylinder is fixed to the connecting plate 202. A base plate 20 is fixed to the slider of the lifting electromagnetic cylinder. This causes the base plate 20 to move in the Z-axis direction. Mounting parts 211, 211 are provided for the base plate 21, and the base plate 21 is fixed to the base plate 20 via the mounting parts 211, 211. An electromagnetic cylinder 212 is attached to the end of the base plate 21. As shown in Figures 14 and 15, the piston rod tip 213 of the electromagnetic cylinder 212 extends and retracts in the vertical direction (Z-axis direction). In the supply and holding device 2A, the electromagnetic cylinder 212 functions as a pick-up cylinder, and in the storage and holding device 2B, the electromagnetic cylinder 212 functions as a distribution cylinder.

[0064] A support member 22 is fixed to the underside of the base 21 via connecting members 221. This support member 22 is connected to a suction path 224 (see Figure 14) of a suction circuit (not shown). Four connecting members 221 are provided, positioned near the four corners of the base 21.

[0065] The configuration of the support member 22 provided on the lower side of the base 21, the connecting member 23 connected to the support member 22, the rotating base material 24 fixed integrally with the connecting member 23, the rotating holding members 25a to d provided on the rotating base material 24, and the mechanism for rotating the rotating base material 24 and the rotating holding members 25a to d are the same as those of the first inspection and holding device 5A.

[0066] Figures 14 and 15 are enlarged cross-sectional views showing the configuration in which the piston rod tip 213 of the electromagnetic cylinder 212 causes the slide rotation shafts 27a to d to extend and retract.

[0067] As shown in Figures 14 and 15, extension members 28 are connected to the base ends 276 of the slide rotation shafts 27a to d. The extension member 28 has a cavity 281 on its inside, which communicates with the suction passage 271. The extension member 28 is inserted through an insertion portion 237 formed in the connecting member 23. A contact member 273 is provided at the end of the extension member 28. The cavity 281 has a flow hole 272, and the suction passage 271 communicates with the outside through the cavity 281.

[0068] Sealing members 237a and 237b are interposed between the extension member 28 and the openings at both ends of the insertion portion 237. This prevents air from entering. A flow space is formed between the extension member 28 and the insertion portion 237, and the flow hole 272 is located within this flow space. When the extension member 28 slides in the axial direction, the flow hole 272 is always located within the flow space of the insertion portion 237. The extension member 28 has a contact member 273 at the tip that protrudes from the insertion portion 237. When the piston rod tip 213 of the electromagnetic cylinder 212 protrudes downward, it comes into contact with the contact member 273. As shown in Figure 15, when the piston rod of the electromagnetic cylinder 212 shown in Figure 12 is retracted to the standby position, a gap 214 is formed between the piston rod tip 213 and the contact member 273, as shown in Figure 15. This gap 214 prevents the piston rod tip 213 from interfering with the contact member 273 when the connecting member 23 rotates.

[0069] A spring receiver 274 is provided at the connection point between the base end 276 of the slide rotation shaft 27a and the extension member 28. A return spring 275 is interposed between the spring receiver 274 and the support body 26a. As shown in Figure 14, the slide rotation shaft 27a, which is pushed down by the piston rod tip 213, returns to its original position (position in Figure 15) by the return spring 275 when the piston rod tip 213 retracts.

[0070] In the connecting member 23, the suction connection port 233 and the insertion portion 237 are connected by a flow passage 232. In this configuration, the suction circuit consists of the suction port 254 at the tip of the nozzle 252, space 251, suction path 271, flow hole 272, flow space of the insertion portion 237, flow passage 232, suction connection port 233, suction hole 223, and suction path 224, and is finally connected to the negative pressure device Pn. Such an air circuit (Figure 18) is the same as that of the first inspection and holding device 5A, so its explanation is omitted. The suction circuit is provided independently for each of the multiple rotating holding members 25a to 25d, and suction and pressurization can be performed individually for each rotating holding member 25a to 25d.

[0071] The configuration of the second inspection and holding device 5B is the same as that of the first inspection and holding device 5A, so no explanation is provided. When transferring the object to be inspected 7 held by the first inspection and holding device 5A to the second inspection and holding device 5B, the object to be inspected 7 held by the rotating holding member 25a of the first inspection and holding device 5A is transferred to the rotating holding member 25a of the second inspection and holding device 5B, the object to be inspected 7 held by the rotating holding member 25b of the first inspection and holding device 5A is transferred to the rotating holding member 25b of the second inspection and holding device 5B, the object to be inspected 7 held by the rotating holding member 25c of the first inspection and holding device 5A is transferred to the rotating holding member 25c of the second inspection and holding device 5B, and the object to be inspected 7 held by the rotating holding member 25d of the first inspection and holding device 5A is transferred to the rotating holding member 25d of the second inspection and holding device 5B.

[0072] The inversion system 14 will now be described. As shown in Figures 16 and 17, the inversion system 14 has an inversion device 6. The inversion device 6 has an inversion table 62 that swings at a 90-degree angle, holding members 61a to 61d provided on the inversion table 62, a main body 63 that rotatably supports the inversion table 62, an inversion motor M4 fixed to the main body 63 that rotates the inversion table 62 between a vertical position and a horizontal position, suction nozzles provided on the holding members 61a to 61d, and a suction circuit (see Figure 18) that generates negative pressure in the suction nozzles. The detailed configuration of these is the same as that of the first inspection and holding device 5A, so the explanation will be omitted.

[0073] The positions of the holding members 61a to 61d are the same as the positions of the rotating holding members 25a to 25d in the second inspection holding device 5B, and are arranged so that they face each other when placed opposite each other. Furthermore, the positions of the four holding members 61a to 61d are configured to be opposite to the initial positions of the rotating holding members 25a to 25d in the second inspection holding device 5B when it has moved to the position where the object to be inspected 7 is handed over to the reversing device 6. In other words, when the object to be inspected 7 is handed over, the object to be inspected 7 held by the rotating holding member 25a is handed over to holding member 61a, the object to be inspected 7 held by the rotating holding member 25b is handed over to holding member 61b, the object to be inspected 7 held by the rotating holding member 25c is handed over to holding member 61ca, and the object to be inspected 7 held by the rotating holding member 25d is handed over to holding member 61d.

[0074] The inversion device 6 receives the object to be inspected 7 from the second inspection and holding device 5B when the inversion table 62 is in a vertical position, and then transfers the object to be inspected 7 to the storage and holding device 2B when it is in a horizontal position.

[0075] The storage system 15 will be described as shown in Figures 1 and 2. The storage system 15 includes a pair of parallel guide rails 151 and 153 arranged at a predetermined height, a movable beam 152 erected on the pair of guide rails 151 and 153, and a storage and holding device 2B provided on the movable beam 152. Vertically moving electromagnetic cylinders 153s (see Figure 19) are arranged along the guide rails 151 and 153. A horizontally moving electromagnetic cylinder 154s that moves in the X-axis direction is mounted on the movable beam 152, and the slider of the horizontally moving electromagnetic cylinder 154s moves in the X-axis direction. A movable base 154 is mounted on the slider of the horizontally moving electromagnetic cylinder 154s. The body of a lifting electromagnetic cylinder is fixed to the movable base 154, and the storage and holding device 2B is fixed to the slider of the lifting electromagnetic cylinder.

[0076] The movable beam 152 is mounted on the slider of an electromagnetic cylinder and is set to reciprocate along guide rails 151 and 153 in the Y-axis direction in Figure 1. Between the movable beam 152 and the storage and holding device 2B, a lateral movement electromagnetic cylinder 154s for movement in the X-axis direction and a vertical movement electromagnetic cylinder 201 for movement in the Z-axis direction are interposed. These electromagnetic cylinders allow the storage and holding device 2B to reciprocate along the movable beam 152 in the X-axis direction and also reciprocate vertically in the Z-axis direction. The use of electromagnetic cylinders allows for precise electrical control of the movement position. The electromagnetic cylinders can be replaced with other cylinders that can precisely control the amount of movement and convert it into linear movement, such as a rear servo motor.

[0077] Between the guide rails 151 and 153, a good product tray 155 is positioned for placing good products that have passed inspection among the inspected objects 7, and a defective product tray 156 is positioned for placing defective products that have failed inspection. The movable range of the storage and holding device 2B includes the entire area directly above the good product tray 155, the area directly above the defective product tray 156, and the area directly above the inversion device 6.

[0078] The storage and holding device 2B will now be described. Since the storage and holding device 2B is the same as the supply and holding device 2A, the explanation of the supply and holding device 2A will be omitted, and the differences will be explained.

[0079] As shown in Figures 12, 14, and 15, when the piston rod tip 213 of the electromagnetic cylinder 212 protrudes and the object to be inspected 7, which is being held by the rotating holding member 25a, is placed on the storage tray, the switching valve Va of the suction circuit is switched to pressurized. If the switching valve Va is only switched from negative pressure to no pressure, the negative pressure supplied to the other rotating holding members 25b, 25d, and 25c will act on the rotating holding member 25a through the gap 236, and suction will continue. To suppress this continuation of suction, the switching valve Va is switched to pressurized, and the nozzle 252 discharges air, ensuring that the object to be inspected 7 is detached.

[0080] The first inspection and holding device 5A, the second inspection and holding device 5B, the supply and holding device 2A, the reversing device 6, and the storage and holding device 2B, configured as described above, each have rotating holding members 25a, 25b, 25c, and 25d for holding the object to be inspected 7. The air circuits that supply negative or pressurized pressure to the nozzles 252 of each of these rotating holding members 25a, 25b, 25c, and 25d will now be described.

[0081] As shown in Figure 18, in the first inspection and holding device 5A, the suction circuit of the rotating holding member 25a, which includes a suction port 254a, a space 251, a suction passage 271, a suction connection port 233, a suction hole 223, and a suction path 224, is connected to a switching valve Va, which is connected to a negative pressure device Pn and a pressurizing device Pp. By switching this switching valve Va, negative pressure and pressurizing pressure are selectively supplied to the suction port 254. Negative pressure is continuously supplied when adsorbing and holding the object to be inspected 7, and pressurizing pressure is supplied temporarily or instantaneously when releasing the object to be inspected 7 from the rotating holding members 25a, 25b, 25c, and 25d. Furthermore, since switching valves Va to Vd are provided for each of the rotating holding members 25a, 25b, 25c, and 25d, it is possible to switch between negative pressure, pressurizing pressure, and no pressure for each of the rotating holding members 25a, 25b, 25c, and 25d.

[0082] Circuits with this configuration are similarly provided for the nozzles 252b, 252c, and 252d of the other rotating holding members 25b, 25c, and 25d. The suction circuits and switching valves Va, Vb, Vc, and Vd for each nozzle 252a, nozzle 252b, nozzle 252c, and nozzle 252d constitute the air circuit As5a of the first inspection holding device 5A. Similarly, the air circuit As5b of the second inspection holding device 5B, the air circuit As2a of the supply holding device 2A, the air circuit As2b of the storage holding device 2B, and the air circuit As6 of the reversing device 6 are provided, and these are connected to the negative pressure device Pn and the pressurizing device Pp, respectively. The pressurizing device Pp does not necessarily have to be connected to the air circuits As5a, As5b, As2a, and As6. The negative pressure device Pn and the pressurizing device Pp are in a continuously operating state, and the negative pressure and pressurizing supplied to the nozzle 252 are controlled by switching the switching valve.

[0083] The control device for the inspection object evaluation system having the mechanical configuration described above will be explained based on the block diagram in Figure 19.

[0084] The control device 10C is a computer and comprises a CPU 101C, a ROM 102C, a RAM 103C, and a storage device 104C. The ROM 102C stores the object evaluation program that controls this object evaluation system. The object evaluation program includes a program to operate the electromagnetic cylinder to move the supply and holding device 2A and the storage and holding device 2B, a program to move or change the posture of the first inspection and holding device 5A and the second inspection and holding device 5B, and a program to evaluate the object 7 from images acquired by the camera Ca. The RAM 103C is the working area for the program stored in the ROM 102C. The storage device 104C stores the evaluation performed for each object 7, associated with each rotating holding member 25 that held the object 7.

[0085] The control device 10C is connected to the swivel motor M15a, switching motor M25a, oscillating motor M35a, and switching valves Va, Vb, Vc, and Vd of the first inspection and holding device 5A. The control device 10C controls the rotation angles of the swivel motor M15a, switching motor M25a, and oscillating motor M35a, and controls the state (negative pressure, pressurized, no pressure) of the switching valves Va, Vb, Vc, and Vd of the first inspection and holding device 5A.

[0086] The control device 10C is connected to the swivel motor M15b, switching motor M25b, oscillating motor M35b, and switching valves Va, Vb, Vc, and Vd of the second inspection and holding device 5B. The control device 10C controls the rotation angles of the swivel motor M15b, switching motor M25b, and oscillating motor M35b, and controls the state (negative pressure, pressurized, no pressure) of the switching valves Va, Vb, Vc, and Vd of the second inspection and holding device 5B.

[0087] The control device 10C is connected to the swivel motor M12a, the switching motor M22a, and the switching valves Va, Vb, Vc, and Vd of the supply and holding device 2A. The control device 10C controls the rotation angles of the swivel motor M12a and the switching motor M22a, and controls the state (negative pressure, pressurized, no pressure) of the switching valves Va, Vb, Vc, and Vd of the supply and holding device 2A.

[0088] The control device 10C is connected to the swivel motor M12b, the switching motor M22b, and the switching valves Va, Vb, Vc, and Vd of the storage and holding device 2B. The control device 10C controls the rotation angles of the swivel motor M12b and the switching motor M22b, and controls the state (negative pressure, pressurized pressure, no pressure) of the switching valves Va, Vb, Vc, and Vd of the storage and holding device 2B.

[0089] The control device 10C is connected to the reversing motor M4 and the switching valves Va, Vb, Vc, and Vd of the reversing device 6. The control device 10C controls the rotation angle of the reversing motor M4 and the state (negative pressure, pressurized pressure, no pressure) of the switching valves Va, Vb, Vc, and Vd of the reversing device 6.

[0090] The control device 10C is connected to the vertical movement electromagnetic cylinder 123s, horizontal movement electromagnetic cylinder 124s, lifting electromagnetic cylinder 201, and pick-up electromagnetic cylinder 212 of the supply system 12. The control device 10C controls the movement of the moving beam 122 in the Y-axis direction, the movement of the supply holding device 2A in the X-axis and Z-axis directions, and controls the extension and retraction of the piston rod tip 213 for picking up the object to be inspected 7.

[0091] The control device 10C is connected to the vertical movement electromagnetic cylinder 153s, the horizontal movement electromagnetic cylinder 154s, the lifting electromagnetic cylinder 201, and the distribution electromagnetic cylinder 212 of the storage system 15. The control device 10C controls the movement of the moving beam 152 in the Y-axis direction, the movement of the storage and holding device 2B in the X and Z axis directions, and controls the extension and retraction of the piston rod tip 213 for placing the object to be inspected 7 onto the tray.

[0092] The control device 10C is connected to the first transport electromagnetic cylinder 321a and the second transport electromagnetic cylinder 321b of the transport unit 3. The control device 10C controls the movement of the first inspection and holding device 5A and the second inspection and holding device 5B.

[0093] The camera Ca is connected to the control device 10C. The control device 10C controls the camera Ca's shooting and stores the captured images in the storage device 104C. The control device 10C is a form of control unit.

[0094] [Effect] The operation of the inspection target evaluation system configured as described above will be explained based on the flowcharts shown in Figures 20, 21, and 22.

[0095] The supply process (step S101) will now be described. In the supply system 12, the CPU 101C of the control device 10C controls the vertical moving electromagnetic cylinder 123s and the horizontal moving electromagnetic cylinder 124s to move the supply holding device 2A to the top of the supply tray 125. The objects to be inspected 7 placed on the supply tray 125 are rectangular parallelepipeds and are precisely arranged in the vertical and horizontal directions. The control device 10C has previously stored the position information of each object to be inspected 7 placed on the supply tray 125 in the storage device 104C, and based on the position information of one object to be inspected 7, the CPU 101C moves the supply holding device 2A so that the piston rod tip 213 of the picking electromagnetic cylinder 212 of the supply holding device 2A is positioned directly above that object to be inspected 7.

[0096] The CPU 101C controls the lifting electromagnetic cylinder 201 so that the supply and holding device 2A descends to a position where the object to be inspected 7 can be picked up. The CPU 101C then controls the pick-up electromagnetic cylinder 212 so that the nozzle 252 of the first rotating holding member 25a contacts the surface of the object to be inspected 7. Next, the CPU 101C controls the switching valve Va so that negative pressure is generated at the suction port 254 of the supply and holding device 2A. Since the object to be inspected 7 is attracted to the suction port 254 of the rotating holding member 25a, the CPU 101C controls the pick-up electromagnetic cylinder 212 so that the rotating holding member 25a retracts (rises). This completes the pick-up process for the first object to be inspected 7.

[0097] Next, the CPU 101C controls the switching motor M22a so that the next rotating holding member 25b is positioned directly below the tip 213 of the piston rod. In this embodiment, it is rotated by 90 degrees. This switches the rotating holding member to be picked up from rotating holding member 25a to rotating holding member 25b. At the same time, the CPU 101C moves the supply holding device 2A to the position of the adjacent inspection object 7 based on the stored position information of the inspection object 7.

[0098] The CPU 101C performs the pickup process for the rotating holding member 25b, similar to the case of the rotating holding member 25a, and completes the pickup process for the rotating holding members 25c and 25d. In this embodiment, four objects to be inspected 7 are held by the supply and holding device 2A.

[0099] Next, the CPU 101C controls the vertical movement electromagnetic cylinder 123s and the horizontal movement electromagnetic cylinder 124s so that the supply holding device 2A moves to the standby position for the first inspection holding device 5A. The CPU 101C also controls the lifting electromagnetic cylinder 201 so that the supply holding device 2A descends toward the first inspection holding device 5A. In this state, the rotation holding members 25a, 25b, 25c, and 25d of the first inspection holding device 5A are positioned directly below and opposite to the rotation holding members 25a, 25b, 25c, and 25d of the supply holding device 2A. In other words, the rotating holding member 25a of the first inspection holding device 5A is located directly below the rotating holding member 25a of the supply holding device 2A, the rotating holding member 25b of the first inspection holding device 5A is located directly below the rotating holding member 25b of the supply holding device 2A, the rotating holding member 25c of the first inspection holding device 5A is located directly below the rotating holding member 25c of the supply holding device 2A, and the rotating holding member 25d of the first inspection holding device 5A is located directly below the rotating holding member 25d of the supply holding device 2A.

[0100] The CPU 101C controls the switching valves Va, Vb, Vc, and Vd of the first inspection and holding device 5A so that when the back surface of the object being inspected 7 comes into contact with the suction ports 254 of each of the rotating holding members 25a, 25b, 25c, and 25d of the first inspection and holding device 5A, the suction of the first inspection and holding device 5A is started. Next, the CPU 101C controls the switching valves Va, Vb, Vc, and Vd of the supply and holding device 2A so that the suction of the supply and holding device 2A is stopped. Alternatively, the switching valves Va, Vb, Vc, and Vd may be controlled to supply pressure. In this way, the CPU 101C releases the object being inspected 7 from the nozzle 252 of the supply and holding device 2A.

[0101] Next, the inspection process (step S103) will be described with reference to Figure 21. In step S201, the CPU 101C controls the first transport electromagnetic cylinder 321a and the second transport electromagnetic cylinder 321b to move the transport table 32A and move the first inspection holding device 5A from the initial position where the object to be inspected 7 was received from the supply holding device 2A to the inspection position Ep directly below the camera Ca. As shown in Figure 23, the CPU 101C controls the first transport electromagnetic cylinder 321a to position the object to be inspected 7 for the first inspection at the inspection position Ep, where the optical axis L1 of the camera Ca passes through. The position of the transport table 32A is moved and the amount of rotation (rotation angle) of the switching motor M25a and the oscillating motor M35a is controlled. In this embodiment, the first inspection is performed with the surface 71 of the object to be inspected 7 facing directly upwards. The surface 71 is an example of a second aspect of the technology of this disclosure.

[0102] In step S203, the CPU 101C initializes the variable j, which identifies the object to be inspected 7, by setting it to 0 (j←0). In step S205, the CPU 101C increments the variable j (j←j+1). As a result, if j=1, the object to be inspected 7, which is held by the rotating holding member 25a and is to be inspected first, is identified. This identification information is also associated with the rotating holding member 25a to which the identification information 1 has been assigned in the first inspection holding device 5A.

[0103] In step S207, the CPU 101C controls the camera Ca to capture an image of the surface of the object j identified by the variable j. The CPU 101C stores the captured image in the memory device 104C, associating it with j=1.

[0104] In step S209, the CPU 101C controls the oscillating motor M35a so that the tilt angle of the angle adjustment table 332 is tilted with respect to the optical axis L1 of the camera Ca. The tilt angle of the angle adjustment table 332 is, for example, the angle at which the axis of the rotor ms1 of the slewing motor M15a is tilted 45 degrees with respect to the position where the surface of the cover 245 of the rotating base material 24 is horizontal (the position where the rotor ms1 is facing vertically). This tilt angle can be changed as appropriate depending on the content of the inspection.

[0105] In step S211, the CPU 101C initializes the variable e, which identifies the edges surrounding the surface of the object j under inspection, by setting it to 0 (e←0). In step S213, the CPU 101C increments the variable e (e←e+1).

[0106] In step S215, as shown in Figure 24, the CPU 101C controls the camera Ca to photograph the ridge 731 identified by the variable e. Before photographing, the CPU 101C controls the first transport electromagnetic cylinder 321a so that the ridge e to be inspected is positioned on the optical axis L1 of the camera Ca. The CPU 101C stores the image captured by the camera Ca in the storage device 104C, associating it with the variable e.

[0107] In step S219, the CPU 101C determines whether the value of variable e has reached the total number E of edges surrounding the surface 71. In this embodiment, the value of the total number E is 4. If variable e reaches the total number E, it means that imaging has been completed for all edges surrounding the surface 71.

[0108] If, in step S219, the value of variable e has not reached the total number E (step S219:N), the process proceeds to step S217, where the CPU 101C rotates the swivel motor M15a by a predetermined angle. In this embodiment, it is rotated by 90 degrees. This causes the ridge line at the position of the optical axis L1 to change from ridge line 731 to ridge line 732. The process from steps S213 to S217 is then repeated until the condition in step S219 is met.

[0109] When the value of variable e reaches the total number E (step S219: Y), the process proceeds to step S221, where the CPU 101C determines whether the object to be inspected (j=1) is good or bad based on the stored images of that object. The quality determination is performed, for example, by image matching between each image of the object to be inspected j and each image of a good workpiece. The similarity between the two images is calculated, and if the similarity is greater than or equal to a predetermined value, it is determined to be a good product; if the similarity is less than the predetermined value, it is determined to be a defective product. Alternatively, the quality determination of the object to be inspected j based on each image of the object to be inspected may be performed using the following pre-trained model. The pre-trained model is a model that uses images of workpieces and information on the quality of those workpieces as training data, and is trained to output information on the quality of a workpiece when an image of the object to be inspected is input.

[0110] In step S223, the CPU 101C stores the pass / fail judgment result in the storage device 104C, associated with the identification information j of the object to be inspected. In step S225, the CPU 101C controls the oscillating motor M35a to return the angle adjustment stand 332 to a horizontal position. In step S227, the CPU 101C determines whether the variable j has reached the total number J of the objects to be inspected 7. If the object has not yet reached the target (step S227:N), in step S229, the CPU 101C controls the switching motor M25a to rotate the rotating substrate 24. This moves the next object to be inspected into the imaging area.

[0111] Next, CPU101C executes the processes from steps S205 to S227. In step S227, if the variable j reaches the total number J (step S227: Y), CPU101C returns to the main routine shown in Figure 20.

[0112] The image acquired in step S215 includes not only the ridge line e, but also images of the side and surface inclined with respect to the optical axis of camera Ca. The pass / fail judgment performed in step S221 may be based on images that include these inclined side and surface images.

[0113] The handover process (step S105) will be explained based on Figures 22, 25, and 26.

[0114] In step S301, the CPU 101C controls the first transport electromagnetic cylinder 321a to move the first inspection and holding device 5A toward its initial position. It is not necessary for it to return to the initial position, but it is required that the CPU 101C ensures that the first inspection and holding device 5A is in a position where it does not interfere with the second inspection and holding device 5B when it swings.

[0115] As shown in Figure 25, in step S303, the CPU 101C controls the oscillating motor M35a so that the object to be inspected 7 held by the first inspection and holding device 5A faces the second inspection and holding device 5B. Specifically, the CPU 101C controls the oscillating motor M35a so that the angle adjustment table 332 tilts 90 degrees. In step S305, the CPU 101C controls the oscillating motor M35b so that the rotating holding member 25 of the second inspection and holding device 5B faces the first inspection and holding device 5A. Specifically, the CPU 101C controls the oscillating motor M35b so that the angle adjustment table 332 tilts 90 degrees. In step S307, the CPU 101C controls the first transport electromagnetic cylinder 321a and the second transport electromagnetic cylinder 321b so that the first inspection and holding device 5A and the second inspection and holding device 5B are brought close together so that the object to be inspected 7, which is being attracted to the nozzle 252 of the first inspection and holding device 5A, comes into contact with the nozzle 252 of the second inspection and holding device 5B.

[0116] In this configuration, the rotating holding member 25a of the second inspection and holding device 5B faces the rotating holding member 25a of the first inspection and holding device 5A, the rotating holding member 25ba of the second inspection and holding device 5B faces the rotating holding member 25b of the first inspection and holding device 5A, the rotating holding member 25c of the second inspection and holding device 5B faces the rotating holding member 25c of the first inspection and holding device 5A, and the rotating holding member 25d of the second inspection and holding device 5B faces the rotating holding member 25d of the first inspection and holding device 5A.

[0117] In step S309, the CPU 101C controls the switching valves Va to Vd of the second inspection and holding device 5B so that when the nozzle 252 of the second inspection and holding device 5B comes into contact with the surface of the object to be inspected 7 that is being sucked into the nozzle 252 of the first inspection and holding device 5A, the suction of the nozzle 252 of the second inspection and holding device 5B is started. As a result, the object to be inspected 7 is attracted to the nozzle 252 of the second inspection and holding device 5B. In step S311, after step S309, the CPU 101C controls the switching valves Va to Vd of the first inspection and holding device 5A so that the suction of the nozzle 252 of the first inspection and holding device 5A is stopped.

[0118] In step S311, suction may be stopped and pressure supplied. These processes complete the transfer of the object to be inspected 7 from the first inspection and holding device 5A to the second inspection and holding device 5B. The object to be inspected 7 that was held by the rotating holding member 25a of the first inspection and holding device 5A is transferred to the rotating holding member 25a of the second inspection and holding device 5B, the object to be inspected 7 that was held by the first inspection and holding device 5A is transferred to the rotating holding member 25ba of the second inspection and holding device 5B, the object to be inspected 7 that was held by the rotating holding member 25c of the first inspection and holding device 5A is transferred to the rotating holding member 25c of the second inspection and holding device 5B, and the object to be inspected 7 that was held by the rotating holding member 25d of the first inspection and holding device 5A is transferred to the rotating holding member 25d of the second inspection and holding device 5B.

[0119] As shown in Figure 26, in step S315, the CPU 101C controls the first transport electromagnetic cylinder 321a and the oscillating motor M35a to return the first inspection and holding device 5A to its initial position in a horizontal state. The CPU 101C also controls the oscillating motor M35b to return the orientation of the angle adjustment table 332 of the second inspection and holding device 5B to a horizontal state.

[0120] As the angle adjustment table 332 of the second inspection holding device 5B returns to a horizontal position, the object to be inspected 7 held by the rotating holding members 25a, 25b, 25c, and 25d of the second inspection holding device 5B is positioned with its back surface facing upward (towards the camera Ca). The back surface 72 is an example of the first aspect of the technology of this disclosure.

[0121] Next, the inspection process (step S107) is performed on the second inspection and holding device 5B. The content of the inspection process (step S107) is the same as the flowchart shown in Figure 21. In the inspection process of step S107, the back surface of the object to be inspected 7 is inspected. That is, in the flowchart shown in Figure 21, in step S207, the back surface of the object to be inspected 7 is photographed. In step S215, the edges surrounding the back surface are photographed. As described above, by performing step S107, the inspection of the front surface and its edges, and the back surface and its edges of the object to be inspected 7 is completed.

[0122] Next, the inversion process (step S109) will be described. As shown in Figure 27, the CPU 101C controls the oscillating motor M35b so that the object to be inspected 7 is tilted 90 degrees so that it faces the inversion device 6. The CPU 101C then controls the second transport electromagnetic cylinder 321b so that the transport table 32B moves toward the inversion device 6. As shown in Figure 16, the CPU 101C controls the inversion motor M4 of the inversion device 6 so that the holding members 61a, 61b, 61c, and 61d face toward the second inspection and holding device 5B.

[0123] When the reversing device 6 and the second inspection and holding device 5B are facing each other, the holding member 61a of the reversing device 6 faces the rotating holding member 25a of the second inspection and holding device 5B, the holding member 61b of the reversing device 6 faces the rotating holding member 25b of the second inspection and holding device 5B, the holding member 61c of the reversing device 6 faces the rotating holding member 25c of the second inspection and holding device 5B, and the holding member 61d of the reversing device 6 faces the rotating holding member 25d of the second inspection and holding device 5B.

[0124] The CPU 101C controls the second transport electromagnetic cylinder 321b so that the transport table 32B moves to a position where the second inspection and holding device 5B and the inversion table 62 face each other, as shown in Figure 16. The CPU 101C controls the second transport electromagnetic cylinder 321b so that the suction port of the inversion table 62 contacts the back surface 72 of the object to be inspected 7 held by the second inspection and holding device 5B. The CPU 101C controls the switching valves Va to Vd of the inversion device 6 to start suction from the suction port of the inversion table 62. Subsequently, the CPU 101C controls the switching valves Va to Vd of the second inspection and holding device 5B to stop the suction of the second inspection and holding device 5B. The CPU 101C controls the second transport electromagnetic cylinder 321b so that the second inspection and holding device 5B retracts. This completes the transfer of the object to be inspected 7 from the second inspection and holding device 5B to the inversion table 62. Then, the object to be inspected 7 that was held by the rotating holding member 25a of the second inspection and holding device 5B is held by the holding member 61a of the inversion device 6, the object to be inspected 7 that was held by the rotating holding member 25b of the second inspection and holding device 5B is held by the holding member 61b of the inversion device 6, the object to be inspected 7 that was held by the rotating holding member 25c of the second inspection and holding device 5B is held by the holding member 61c of the inversion device 6, and the object to be inspected 7 that was held by the rotating holding member 25d of the second inspection and holding device 5B is held by the holding member 61d of the inversion device 6. CP101C controls the reversing motor M4 so that the reversing table 62 rotates to a horizontal position. As shown in Figure 17, the inspection object 7 is placed in a waiting position to be handed over to the storage and holding device 2B.

[0125] Next, the storage process (step S111) will be described. The CPU 101C controls the vertical movement electromagnetic cylinder 153s, the horizontal movement electromagnetic cylinder 154s, and the lifting electromagnetic cylinder 201 so that the storage and holding device 2B moves directly above the reversing table 62 and descends toward the reversing table 62.

[0126] When the reversing device 6 and the storage and holding device 2B are facing each other, the holding member 61a of the reversing device 6 faces the rotating holding member 25a of the storage and holding device 2B, the holding member 61b of the reversing device 6 faces the rotating holding member 25b of the storage and holding device 2B, the holding member 61c of the reversing device 6 faces the rotating holding member 25c of the storage and holding device 2B, and the holding member 61d of the reversing device 6 faces the rotating holding member 25d of the storage and holding device 2B.

[0127] The CPU 101C controls the lifting electromagnetic cylinder 201 so that the suction port 254 of the storage and holding device 2B comes into contact with the surface 71 of the object to be inspected 7 held by the inversion table 62. The CPU 101C also controls the switching valves Va to Vd of the storage and holding device 2B so that the suction port 254 of the storage and holding device 2B starts suction. The CPU 101C controls the switching valves Va to Vd of the inversion device 6 so that the inversion table 62 stops suction. The CPU 101C controls the lifting electromagnetic cylinder 201 so that the storage and holding device 2B rises. With these steps, the transfer of the object to be inspected 7 from the inversion table 62 to the storage and holding device 2B is completed.

[0128] As a result, the object to be inspected 7 that was held by the holding member 61a of the reversing device 6 is now held by the rotating holding member 25a of the storage and holding device 2B; the object to be inspected 7 that was held by the holding member 61b of the reversing device 6 is now held by the rotating holding member 25b of the storage and holding device 2B; the object to be inspected 7 that was held by the holding member 61c of the reversing device 6 is now held by the rotating holding member 25c of the storage and holding device 2B; and the object to be inspected 7 that was held by the holding member 61d of the reversing device 6 is now held by the rotating holding member 25d of the storage and holding device 2B.

[0129] The inspection object 7 received by the storage and holding device 2B will have its underside facing downwards. By placing it in the good product tray 155 and the defective product tray 156 in this orientation, it can be stored in each good product tray 155 and defective product tray 156 in the same condition as when it was on the supply tray 125.

[0130] The CPU 101C stores information in the memory device 104C, associated with identification information, that each of the rotating holding members 25a to d is a good or defective product. The CPU 101C reads the evaluation results of each rotating holding member 25a to d from the memory device 104C and sorts the products into good and defective based on the results. Specifically, if there is a defective product among the products being held, the CPU 101C controls the vertical movement electromagnetic cylinder 153s and the horizontal movement electromagnetic cylinder 154s so that the storage and holding device 2B moves onto the defective product tray 156. The CPU 101C controls the distribution electromagnetic cylinder 212 so that the storage and holding device 2B places the defective product products 7 into the defective product tray 156. The CPU 101C controls the vertical movement electromagnetic cylinder 153s and the horizontal movement electromagnetic cylinder 154s so that the storage and holding device 2B moves onto the good product tray 155. The CPU 101C controls the distribution electromagnetic cylinder 212 so that the storage and holding device 2B places good quality inspection objects 7 into the good quality tray 155. The CPU 101C precisely controls the movement of the storage and holding device 2B via the vertical movement electromagnetic cylinder 153s and the horizontal movement electromagnetic cylinder 154s, so that the inspection objects 7 are precisely arranged at equal intervals vertically and horizontally in the good quality tray 155 and the defective product tray 156.

[0131] When placing the object to be inspected 7, which is being held by the storage and holding device 2B, onto the tray, the CPU 101C controls the lifting electromagnetic cylinder 201 so that the storage and holding device 2B descends until the object to be inspected 7 is close to the surface of the tray. The CPU 101C controls the switching motor M22b so that the rotating holding member that holds the object to be inspected 7 to be placed on the tray moves to the position of the piston rod tip 213. The CPU 101C controls the distribution electromagnetic cylinder 212 so that the piston rod tip 213 protrudes. As a result, the object to be inspected 7 protrudes downward, moves closer to the tray, or is placed on the tray. The CPU 101C controls the switching valves Va~Vd of the storage and holding device 2B so that the protruding rotating holding member stops suction or discharges pressurized air from the nozzle into the air circuit. In this way, the object to be inspected 7 is released from the suction port 254.

[0132] [effect] This embodiment can accurately determine whether an object being inspected is of good or bad quality.

[0133] For example, with the first inspection and holding device 5A, the position of the inspection device that analyzes images acquired by the camera, or the inspection body that inspects the surface of the object to be inspected 7 with the naked eye, is fixed, and the object to be inspected can be inspected from any angle.

[0134] Since the object to be inspected is attracted and held, the object can be easily held and released without damaging its surface.

[0135] Furthermore, since there are two object holding devices for holding the object to be inspected, the inspectable area can be expanded by changing the surface on which the object to be inspected is held by the two holding devices.

[0136] By having the control unit evaluate the images captured by the imaging unit, highly accurate evaluation results can be obtained.

[0137] Since the posture of the object being inspected can be arbitrarily changed, evaluation can be performed using images acquired from a wider range of angles, thereby improving evaluation accuracy.

[0138] [Differentiation] (First variation) Figure 28 is a schematic configuration diagram of an example of the inspection device 500N3 of the first modified example. The third modified example concerns the transfer of the object to be inspected from the supply system to the storage system. Robot arms 606 and 608 are provided between the supply tray 125 and the storage tray 155. Robot arms 606 and 608 are equipped with a supply holding device 2A and a storage holding device 2B at the tip of the arm, respectively. Robot arm 606 picks up the object to be inspected placed on the supply tray 125, and with the underside of the object facing upwards, the robot arm 606 inverts the object so that the surface to be inspected faces upwards, and performs inspection with the central camera Ca.

[0139] Next, the robot arm 608 uses the storage and holding device 2B to suction and collect the surface of the object to be inspected, making the opposite side of the object the surface to be inspected. Then, the robot arm 608 turns the surface of the object to be inspected upwards, and the camera Ca performs the inspection.

[0140] Subsequently, the robot arm 608 moves the objects to be inspected to storage trays, sorts them into good product tray 155 and defective product tray 156, and places them on the trays.

[0141] In the first modified example, the number of holding devices can be reduced to two by using the configuration described above.

[0142] (Second variation) Figure 29 is a schematic configuration diagram of an example of the inspection device 500N1 of the first modified example. Figure 30 is a cross-sectional view of an example of the lower scanning mirror section 500D. Figure 31 is a side cross-sectional view of an example of the inspection device 500N1. Figure 32 is a diagram showing an example of the nozzle 512N that sucks up the object to be inspected 504 being rotated from the bottom to the top. Figure 33 shows how the objects to be inspected are sorted and placed into a good product tray 520G and a defective product tray 520N according to the pass / fail judgment result.

[0143] The inspection device 500N1 includes a lower scanning mirror unit 500D (see Figure 29) that scans the front surface (see Figure 30) of the object to be inspected 504 placed on a rectangular tray 502. The inspection device 500N1 also includes an upper scanning mirror unit 500U that scans the back surface of the object to be inspected 504 after it has been sucked in by the nozzle 512N, which is rotated from the bottom (see Figure 31) to the top (see Figure 32) by a nozzle moving device 514.

[0144] The lower scanning mirror section 500D comprises four scanning mirrors 506 positioned on each side of the tray 502. The scanning mirrors 506 are rotated around an axis 508, which is, for example, parallel to the corresponding side of the tray 502.

[0145] The inspection device 500N1 includes an imaging device 510 (see Figure 30), such as a CCD camera, which scans the front side of the object to be inspected 504 using a lower scanning mirror unit 500D and the back side of the object to be inspected 504 using an upper scanning mirror unit 400U. The inspection device 500N1 includes a computer-controlled control device 550 that determines the quality of the front side of the object to be inspected 504 and the quality of the back side of the object to be inspected 504 based on the image of the front side of the object to be inspected 504 obtained by the imaging device 510. The inspection device 500N1 includes a display device 555 that displays the determination results from the control device 550.

[0146] The control device 550 controls the lower scanning mirror unit 500D so that the front side of the object to be inspected 504 is scanned, and controls the upper scanning mirror unit 400U so that the back side of the object to be inspected 504 is scanned.

[0147] The nozzle moving device 514 includes a plurality of nozzles 512N and a first rotating part 512B that rotates the plurality of nozzles 512N from the bottom (see Figure 31) to the top (see Figure 32) and from the top (see Figure 32) to the bottom (see Figure 31) around a horizontal axis J1. The nozzle moving device 514 includes a second rotating part 512A that rotates the plurality of nozzles 512N around a vertical axis J2 to the positions of the good product tray 520G and the defective product tray 520N. The nozzle moving device 514 includes a moving part 512C that moves a support part 512S that supports the plurality of nozzles 512N up and down.

[0148] The tray for good products 520G and the tray for defective products 520N are each configured to be movable in the horizontal plane in directions F and G respectively (see Figure 33).

[0149] The nozzle moving device 514 is an example of an "object to be inspected holding device" of the technology disclosed herein.

[0150] The operator places multiple objects 504 to be inspected into the tray 502 and turns on a judgment start button (not shown). When placing multiple objects 504 into the tray 502, for example, they are positioned so that each side of the surface of each object 504 is parallel to each side of the tray 502.

[0151] When the judgment start button is turned on, the control device 550 controls the lower scanning mirror unit 500D so that the surface side of the object to be inspected 504 is scanned. The imaging device 510 images the surface side of the object to be inspected 504 while scanning with the lower scanning mirror unit 500D. Based on the image of the surface side of the object to be inspected 504 obtained by the imaging device 510, the control device 550 determines whether the surface side of the object to be inspected 504 is good or bad.

[0152] The control device 550 controls the nozzle moving device 514 to rotate the nozzle 512N that sucks the object to be inspected 504 from the bottom (see Figure 31) to the top (see Figure 32).

[0153] The control device 550 controls the upper scanning mirror unit 400U so that the back side of the object to be inspected 504 is scanned. The imaging device 510 images the back side of the object to be inspected 504 while scanning with the upper scanning mirror unit 400U. Based on the image of the back side of the object to be inspected 504 obtained by the imaging device 510, the control device 550 determines whether the front side of the object to be inspected 504 is good or bad.

[0154] The control device 550 displays the determination result on the display device 555.

[0155] The control device 550 controls the nozzle moving device 514 to rotate the multiple nozzles 512N from the upper side (see Figure 32) to the lower side (see Figure 31) using the first rotating unit 512B. The second rotating unit 512A rotates the multiple nozzles 512N to the upper position of the good product tray 520G and the defective product tray 520N. The moving unit 512C positions the inspection object 504 sucked up by the multiple nozzles 512N on the good product tray 520G and the defective product tray 520N. The control device 550 selectively stops the suction of the multiple nozzles 512N so that good products are placed on the good product tray 520G and defective products are placed on the defective product tray 520N, according to the pass / fail judgment result.

[0156] As described above, the good product tray 520G and the defective product tray 520N are each movable in the horizontal plane in directions F and G. When the control device 550 stops the suction of the multiple nozzles 512N and places the objects to be inspected 504, it moves the good product tray 520G and the defective product tray 520N in directions F and G respectively, and places the objects to be inspected 504 so that they do not overlap.

[0157] In the second modified configuration, a nozzle moving device 514 equipped with multiple nozzles and an imaging device 510 image the front and back sides of the object to be inspected 504. The control device 550 then determines whether an object is good or bad based on each image and controls the nozzle moving device 514 to place good objects in the good object tray 520G and defective objects in the defective object tray 520N. Thus, the first modified configuration can be made simpler than the configuration of the above embodiment.

[0158] (Third variation) The third modification has some components similar to the second modification, so I will mainly explain the differences.

[0159] Figure 34 is a schematic diagram of an example of the inspection apparatus 500N2 of the third modified example. As shown in Figure 34, the inspection apparatus 500N2 includes an upper imaging device 510U that photographs the front side of multiple objects 504 to be inspected, and a lower imaging device 510D that photographs the back side of multiple objects 504 to be inspected. The upper imaging device 510U and the lower imaging device 510D are each rotatably positioned within a vertical plane.

[0160] The inspection device 500N2 includes a transport unit 520 made of transparent material for transporting multiple objects 504 to be inspected. The inspection device 500N3 includes four mirrors 522 that surround the four sides of the multiple objects 504 to be inspected. The mirrors 522 have an entrance 522I and an exit 522J. The transport unit 520 is connected to a moving unit (not shown), and the objects are transported into the imaging area from the entrance 522I by the moving unit and transported to the nozzle moving unit 514 from the exit 522J.

[0161] When the transport unit 520 is brought into the imaging area from the entrance 522I, multiple inspection objects 504 are imaged by the upper imaging device 510U and the lower imaging device 510D, respectively. The upper imaging device 510U and the lower imaging device 510D are each rotated in the vertical plane as described above. Therefore, the edges of the inspection objects 504 can be imaged via the mirror 522.

[0162] When the object to be inspected 504 is imaged by the upper imaging device 510U and the lower imaging device 510D, the control device 550 determines the quality of the front and back surfaces of the object to be inspected 504 based on each image.

[0163] The control device 550 controls the nozzle moving device 514 to place good products in the good product tray 520G and defective products in the defective product tray 520N, according to the quality judgment result.

[0164] In the third modified example, the transport unit 520 carries multiple objects 504 into the imaging area, and the multiple objects 504 are imaged by the upper imaging device 510U and the lower imaging device 510D, respectively. Therefore, the second modified example can be made simpler than the configuration of the above embodiment.

[0165] (Fourth variation) A fourth modification includes an imaging device and a robot arm having an imaging device at its tip, as shown in Figure 28. This configuration allows the relative imaging angle to be changed arbitrarily. Furthermore, a holding device for holding the object to be inspected may be provided at the tip of the robot arm.

[0166] This configuration allows for arbitrary changes to the relative shooting angle. Furthermore, since both the imaging device and the object being inspected can be moved simultaneously, positioning for the imaging process can be performed quickly.

[0167] (Fifth variation) In the embodiments described in detail above, a configuration was described in which an object to be inspected 7, which has a difference in shape between its front and back surfaces, is provided with an inversion device 6 to store the object to be inspected 7 in the same state as when it was supplied, with the front and back surfaces arranged in the same way. The technology of this disclosure is not limited thereto.

[0168] For example, the object being inspected, 7, does not need to have any difference in shape between its front and back surfaces. In the case of an object 7 that has no difference in shape between its front and back surfaces, the arrangement of the front and back surfaces of the object 7 when it is placed in the good product tray 155 or the defective product tray 156 after inspection may be made identical to the arrangement of the front and back surfaces when it was placed in the supply tray 125 by using the reversing device 6. Specifically, the object 7 is placed in the supply tray 125 with its front surface facing upwards, and is also placed in the good product tray 155 or the defective product tray 156 with its front surface facing upwards. In the case of an object 7 that has no difference in shape between its front and back surfaces, the inversion device 6 may be omitted, and the arrangement of the front and back surfaces of the object 7 when it is placed in the good product tray 155 or defective product tray 156 after inspection may be reversed from the arrangement of the front and back surfaces when it was placed in the supply tray 125. Specifically, the object 7 is placed in the supply tray 125 with its front surface facing upwards, and in the good product tray 155 or defective product tray 156 with its back surface facing upwards.

[0169] Furthermore, for inspection objects 7 that have a difference in shape between their front and back surfaces, the inversion device 6 may be omitted, and the arrangement of the front and back surfaces of the inspection objects 7 when they are placed in the good product tray 155 or defective product tray 156 after inspection may be reversed from the arrangement of the front and back surfaces when they were placed in the supply tray 125. Specifically, the inspection objects 7 are placed in the supply tray 125 with the front surface facing upwards, and in the good product tray 155 or defective product tray 156 with the back surface facing upwards.

[0170] (Sixth variation) The order in which images are acquired by camera Ca for each object to be inspected 7 is not limited to what has been described in steps S203 to S229 above. As an example of another order, as shown in Figure 23, the CPU 101C controls the switching motor M25a and camera Ca so that the rotating base material 24 is rotated every 90 degrees while the angle adjustment table 332 is kept horizontal, and the surface 71 of all objects to be inspected is captured sequentially by camera Ca. Next, as shown in Figure 24, the CPU 101C controls the oscillating motor M35a so that the angle adjustment table 332 is tilted. Then, the CPU 101C controls the swivel motor M15a and camera Ca so that the object to be inspected (j=1) held by the rotating holding member 25a is rotated every 90 degrees and all the edges e (=1 to 4) are captured. Next, the CPU 101C controls the switching motor M25a so that the rotating substrate 24 rotates 90 degrees and the next object to be inspected j (=2) captures the edge line e (=1~4) of the camera Ca. Then, the CPU 101C controls the swivel motor M15a and the camera Ca so that the edge line e (=1~4) of the object to be inspected j (=2) is captured. In this way, the CPU 101C rotates the rotating substrate 24 every 90 degrees and each rotating member 25a~d every 90 degrees, thereby acquiring images of all the objects to be inspected j (=1~4). By performing the above control, the CPU 101C can suppress the amount of drive of the oscillating motor M35a and reduce the load on the oscillating motor M35a that oscillates the angle adjustment table 332, which has a high moment of inertia.

[0171] In addition to the above, the four sides of the object to be inspected can also be inspected in addition to the front and back surfaces of the object to be inspected 7. As shown in Figure 25, the CPU 101C controls the oscillating motor M35a so that the angle adjustment table 332 is tilted 90 degrees relative to the horizontal. In this position, the side of the object to be inspected 7 is perpendicular to the optical axis L1 of the camera Ca. In the state shown in Figure 25, the object to be inspected 7 is not directly below the optical axis L1 of the camera Ca, but the CPU 101C controls the first transport electromagnetic cylinder 321a so that it is in such a position. Next, the CPU 101C controls the camera Ca so that it acquires an image of the side of the object to be inspected 7. Next, the CPU 101C controls the swivel motor M15a so that the rotation holding member 25a rotates 90 degrees so that the adjacent side is directly below the optical axis L1 of the camera Ca. The CPU 101C controls the camera Ca so that it acquires an image of the adjacent side of the object to be inspected 7. By repeating this process three times, images of the sides of the four objects to be examined 7 can be obtained.

[0172] Acquisition of images of the side of the object to be inspected can also be performed after the object to be inspected 7 has been transferred to the second inspection and holding device 5B, when the angle adjustment table 332 of the second inspection and holding device 5B is tilted at a 90-degree angle, as shown in Figure 26.

[0173] Alternatively, the first inspection and holding device 5A may acquire images of two of the four sides, and after the object to be inspected 7 is handed over to the second inspection and holding device 5B, the second inspection and holding device 5B may perform the process of acquiring images of the remaining two sides.

[0174] (Seventh variation) In the embodiments described in detail above, for an object 7 to be inspected that has a difference in shape between its front and back surfaces, the front surface is photographed and inspected first, and then the back surface is photographed and inspected after delivery. The technology of this disclosure is not limited thereto. For an object 7 to be inspected that has a difference in shape between its front and back surfaces, the back surface may be photographed and inspected first, and then the front surface may be photographed and inspected after delivery. In the seventh modification, the front surface is an example of the “first aspect” of the technology of the present disclosure, and the back surface is an example of the “second aspect” of the technology of the present disclosure.

[0175] Furthermore, in order to suppress the occurrence of shadows on the surface of the object to be inspected 7 when photographed by camera Ca, a lighting device may be installed around the inspection position Ep. In this case, the lighting device is installed so that its optical axis is directed toward the object to be inspected 7 located at the inspection position Ep.

[0176] [Note] Based on the above disclosures, the following addendum is proposed.

[0177] (Note 1) A nozzle that comes into contact with the object to be inspected and adsorbs the object to be inspected, A first holding portion for holding the nozzle, A first rotation mechanism that rotates the first holding part about a first central axis of the first holding part, The first holding part is rotatably held by a second holding part, A second rotation mechanism that rotates the second holding part about the second central axis of the second holding part, The first holding part, the first rotating mechanism, and the second holding part, a third holding part that holds the second rotating mechanism, A rocking mechanism for rocking the third holding part, A pipe connected to the nozzle via the first holding part and the second holding part, A suction unit for sucking air from inside the tube, A device for holding objects to be inspected, equipped with the necessary components.

[0178] (Note 2) The object to be inspected is supplied to the nozzle by the supply device. The object holding device described in Appendix 1.

[0179] (Note 3) The nozzle is equipped with an impact absorbing part that absorbs the impact applied to the nozzle. The object holding device described in Appendix 2.

[0180] (Note 4) The system comprises multiple nozzles, and the object to be inspected is attracted by the multiple nozzles. The object holding device described in Appendix 1.

[0181] (Note 5) The nozzles are provided in multiple locations. The first holding part removably holds the nozzle. The object holding device described in Appendix 1.

[0182] (Note 6) It comprises a plurality of the aforementioned first holding parts, The first rotating mechanism is, Motor and, A drive pulley rotated by the aforementioned motor, A plurality of guide pulleys are arranged between the first holding portion and the drive pulley, A plurality of the first holding parts, the plurality of guide pulleys, and a transmission belt wrapped around the drive pulley, Equipped with, The transmission belt is wound such that the first retaining portion and the drive pulley are in contact with the inside of the transmission belt, and the plurality of guide pulleys are in contact with the outside of the transmission belt. The object holding device described in Appendix 1.

[0183] (Note 7) It comprises a first plurality of the first holding parts and a second plurality of the first holding parts, The first rotating mechanism is, Motor and, A pulley rotated by the aforementioned motor, A plurality of first guide pulleys arranged between a plurality of first holding portions, A second plurality of guide pulleys positioned between the second plurality of the first holding portions, A first plurality of first holding parts, a first plurality of guide pulleys, and a first transmission belt wrapped around the pulleys, A second plurality of the first holding parts, a second plurality of guide pulleys, and a second transmission belt wrapped around the pulleys, Equipped with, The first transmission belt and the second transmission belt are located at different heights from each other. The object holding device described in Appendix 1.

[0184] (Note 8) The plurality of the first holding parts are arranged on the same circumference with respect to the center of the pulley. The inspection object holding device described in Appendix 6 or Appendix 7.

[0185] (Note 9) A nozzle that comes into contact with the object to be inspected and adsorbs the object to be inspected, A first holding portion for holding the nozzle, A first rotation mechanism that rotates the first holding part about a first central axis of the first holding part, The first holding part is rotatably held by a second holding part, A second rotation mechanism that rotates the second holding part about the second central axis of the second holding part, A pipe connected to the nozzle via the first holding part and the second holding part, It comprises a suction unit for sucking air from inside the tube, The second holding portion has a plurality of first holding portions arranged at equal intervals in the circumferential direction, concentric with the rotation center of the second holding portion. The device comprises a support base that rotatably supports the second holding portion, The aforementioned pipe passes through the second holding portion and the support base. An object-to-inspection device wherein the connection surfaces of the support base and the second holding member have an annular groove centered on the rotation center of the second holding part and an annular protrusion that fits into the groove, formed on one connection surface and the other connection surface, and openings communicating with the pipe are provided at the bottom of the groove and the top of the protrusion.

[0186] (Note 10) An inspection object holding device according to Appendix 9, wherein a gap is formed between the bottom of the groove and the top of the protrusion.

[0187] (Note 11) The first object holding device described in Appendix 1, The second object holding device described in Appendix 1, A device movement mechanism for moving the first object-to-inspection holding device and the second object-to-inspection holding device, A camera unit for photographing the object to be inspected, The nozzle of the first object to be inspected holding device is designated as the first nozzle, the nozzle of the second object to be inspected holding device is designated as the second nozzle, and the object to be inspected has a first surface and a second surface facing the first surface. A control unit controls the first object holding device, the second object holding device, and the moving mechanism so that the second surface of the object to be inspected is photographed from a different direction by the imaging unit while the first surface is adsorbed to the first nozzle, and after such photography, the second surface is adsorbed to the second nozzle and the adsorption of the first surface is stopped, and the first surface of the object to be inspected is photographed from a different direction by the imaging unit while the second surface is adsorbed to the second nozzle, and evaluates the quality of the object to be inspected based on the images obtained from the first surface and the second surface of the object to be inspected. An inspection target evaluation system equipped with the following features.

[0188] (Note 12) When the imaging of the second side of the object to be inspected is completed, the control unit controls the first object to be inspected holding device, the second object to be inspected holding device, and the moving mechanism so that the first nozzle and the second nozzle face each other and the object to be inspected comes into contact with the first nozzle and the second nozzle. The inspection target evaluation system described in Appendix 11.

[0189] (Note 13) The camera unit is further equipped with a camera unit movement mechanism for moving the aforementioned camera unit. The control unit controls the imaging unit movement mechanism so that the first and second surfaces of the object to be inspected are photographed from different directions. The inspection target evaluation system described in Appendix 11.

[0190] (Note 14) The system further includes a storage device for storing the object to be inspected at a position corresponding to the quality evaluation result of the aforementioned evaluation, The inspection target evaluation system described in Appendix 11.

[0191] (Note 15) The object to be inspected is of a type in which there is a difference in shape between the first surface and the second surface. The inversion device further comprises a third nozzle for adsorbing the object to be inspected, The storage device is equipped with a fourth nozzle, When the imaging of the first surface is completed, the control unit switches from adsorption of the second surface by the second nozzle to adsorption of the first surface by the third nozzle, and further switches from adsorption of the first surface by the third nozzle to adsorption of the second surface by the fourth nozzle, and controls the second inspection object holding device, the inversion device, and the inversion device so that the first surface contacts the position. The inspection target evaluation system described in Appendix 14.

[0192] (Note 16) The object to be inspected is of a type in which there is no difference in shape between the first surface and the second surface. The storage device is equipped with a fourth nozzle, When the imaging of the first surface is completed, the control unit switches from adsorption of the second surface by the second nozzle to adsorption of the first surface by the fourth nozzle, and controls the second inspection object holding device and the inversion device so that the second surface contacts the position. The inspection target evaluation system described in Appendix 14. [Explanation of symbols]

[0193] 1. Inspection Target Evaluation System 12 Supply System 121, 123 Guide rails 122 Moving beam 125 supply trays 13 Inspection Systems CA Camera 14 Inversion System 15 Storage Systems 151, 153 Guide rails 152 Moving beam 155 Good quality trays 156 Defective Tray 7. Items to be inspected 2A supply holding device 2B Storage and holding device 201 Lifting electromagnetic cylinder 202 Connecting plate 20 circuit boards 21 Pedestal 211, 211 Mounting part 212 Electromagnetic Cylinder 213 Piston rod tip 214 Interval 22 Support member 221 Connecting member 222 Groove 223 Suction hole 224 Suction route 23 Connecting Member 232 Distribution path 233 Suction connection port 234 Retaining groove 235 raised section 236 gaps 237 Insertion part 24 Rotating base material 241 Disc section 242 Pillar section 243 Annular section 244 Disc section 25 Rotating holding member 251 Space 252 nozzles 253 Suction port 26a~d Support 261 Pulley section 27 Slide rotation axis 271 Suction channel 272 Flow hole 273 Contact Member 274 Spring receiving part 275 Recovery Spring 257 Compression Spring 3. Conveying section 31 Transport guide rail 32A Transport Platform 32B Transport Platform 33 Support stand 331a Support plate 331b Support plate 41 Drive pulley 42 Guide Pulley 43a First transmission belt 43b Second transmission belt 6. Inversion device 61a~61d Retaining members 62 Turning platform

Claims

1. A nozzle that comes into contact with the object to be inspected and adsorbs the object to be inspected, A first holding portion for holding the nozzle, A first rotation mechanism that rotates the first holding part about a first central axis of the first holding part, The first holding part is rotatably held by a second holding part, A second rotation mechanism that rotates the second holding part about the second central axis of the second holding part, The first holding part, the first rotating mechanism, and the second holding part, and the third holding part that holds the second rotating mechanism, A rocking mechanism for rocking the third holding part, A pipe connected to the nozzle via the first holding part and the second holding part, A suction unit for sucking air from inside the tube, A device for holding objects to be inspected, equipped with the necessary components.

2. The first object to be inspected holding device according to claim 1, The second object holding device according to claim 1, A device moving mechanism for moving the first object-to-inspection holding device and the second object-to-inspection holding device, A camera unit for photographing the object to be inspected, The nozzle of the first object to be inspected holding device is designated as the first nozzle, the nozzle of the second object to be inspected holding device is designated as the second nozzle, and the object to be inspected has a first surface and a second surface facing the first surface. A control unit controls the first object holding device, the second object holding device, and the device movement mechanism so that the second surface of the object to be inspected is photographed by the imaging unit while the first surface is adsorbed to the first nozzle, and after such photography, the second surface is adsorbed to the second nozzle and the adsorption of the first surface is stopped, and the first surface of the object to be inspected is photographed by the imaging unit while the second surface is adsorbed to the second nozzle, and evaluates the quality of the object to be inspected based on the images obtained from the first surface and the second surface of the object to be inspected. An inspection target evaluation system equipped with the following features.

3. The control unit, The inspection object evaluation system according to claim 2, wherein the first inspection object holding device, the second inspection object holding device, and the moving mechanism are controlled such that the second surface of the inspection object is photographed from a different direction by the imaging unit while the first surface is adsorbed to the first nozzle, and the first surface of the inspection object is photographed from a different direction by the imaging unit while the second surface is adsorbed to the second nozzle.

Images