pressure regulator

Abstract

The device includes a housing including a first chamber having a first pressure regulating device, a first fluid inlet, and a first fluid outlet. The first pressure regulating device includes a plurality of first levers, a first spring, and a first pressure actuation device. In response to a decrease in external pressure, the first pressure actuation device overcomes the first closing force and opens the first fluid inlet. The second chamber has a second pressure regulating device including a second fluid inlet and a second fluid outlet, a plurality of second levers, a second spring, and a second pressure actuation device configured to contract as external pressure increases. In response to a decrease in external pressure, the second pressure actuation device is configured to overcome the second closing force and open the second fluid inlet.

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE The present disclosure relates to pressure management of fluid containers. More particularly, the present disclosure relates to a pressure regulator for a fluid container for controlling pressure during fluid dispensing from the fluid container. [Background technology]

[0002] A variety of fluid supply packages can be used to provide process fluids for use in semiconductor manufacturing. Safety and process efficiency considerations have led to the development of fluid supply packages that utilize fluid storage and dispensing vessels with pressure regulation devices within the vessel's internal volume or vessel valve head.

[0003] A pressure-regulated vessel coupled to a flow circuit may exhibit sudden pressure fluctuations at the beginning of a fluid dispensing operation. This abnormal behavior is most often experienced as a pressure spike that is detected by pressure-sensing components in the flow circuit. Summary of the Invention

[0004] In some embodiments, the device includes a housing. In some embodiments, the housing includes a first chamber having a first pressure regulation device. In some embodiments, the first chamber includes a first fluid inlet and a first fluid outlet. In some embodiments, the first pressure regulation device includes a plurality of first levers. In some embodiments, the first pressure regulation device includes a first spring having a first spring force. In some embodiments, the first spring force is configured to provide a first closing force to close the first fluid inlet. In some embodiments, the first pressure regulation device includes a first pressure actuation device. In some embodiments, the first pressure actuation device is configured to contract as external pressure increases. In some embodiments, in response to a decrease in external pressure, the first pressure actuation device is configured to overcome the first closing force and open the first fluid inlet. In some embodiments, the housing includes a second chamber having a second pressure regulation device. In some embodiments, the second chamber includes a second fluid inlet and a second fluid outlet. In some embodiments, the second pressure regulation device includes a plurality of second levers and a second spring having a second spring force. In some embodiments, the second spring force is configured to provide a second closing force to close the second fluid inlet. In some embodiments, the second pressure regulation device includes a second pressure actuation device. In some embodiments, the second pressure actuation device is configured to contract as the external pressure increases. In some embodiments, in response to a decrease in the external pressure, the second pressure actuation device is configured to overcome the second closing force and open the second fluid inlet.

[0005] In some embodiments, the device includes a filter disposed in the first fluid inlet or the second fluid inlet.

[0006] In some embodiments, the first spring is a wave spring.

[0007] In some embodiments, the device includes an adjustment mechanism configured to modify the outlet pressure of the fluid exiting the second pressure regulation device.

[0008] In some embodiments, the transition from the idle state to the flow state is smooth.

[0009] In some embodiments, the device is configured for low pressure delivery.

[0010] In some embodiments, the first pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

[0011] In some embodiments, the second pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

[0012] In some embodiments, the first spring comprises a plurality of first springs.

[0013] In some embodiments, the assembly includes a pressure regulated vessel and a pressure regulator. In some embodiments, the pressure regulator includes a housing. In some embodiments, the housing includes a first chamber having a first pressure regulating device. In some embodiments, the first chamber includes a first fluid inlet and a first fluid outlet. In some embodiments, the first pressure regulating device includes a plurality of first levers and a first spring having a first spring force. In some embodiments, the first spring force is configured to provide a first closing force to close the first fluid inlet. In some embodiments, the first pressure regulating device includes a first pressure actuating device. In some embodiments, the first pressure actuating device is configured to contract as external pressure increases. In some embodiments, in response to the increase in external pressure, the first pressure actuating device is configured to overcome the first closing force and open the first fluid inlet. In some embodiments, the pressure regulator includes a second chamber having a second pressure regulating device. In some embodiments, the second chamber includes a second fluid inlet and a second fluid outlet. In some embodiments, the second pressure regulation device includes a plurality of second levers and a second spring having a second spring force. In some embodiments, the second spring force is configured to provide a second closing force to close the second fluid inlet. In some embodiments, the second pressure regulation device includes a second pressure actuation device. In some embodiments, the second pressure actuation device is configured to contract as the external pressure increases. In some embodiments, in response to the increase in external pressure, the second pressure actuation device is configured to overcome the second closing force and open the second fluid inlet.

[0014] In some embodiments, a filter is disposed in the first fluid inlet or the second fluid inlet.

[0015] In some embodiments, the assembly includes a filter.

[0016] In some embodiments, the adjustment mechanism is configured to modify the outlet pressure of the fluid exiting the second pressure regulation device.

[0017] In some embodiments, the transition from the idle state to the flow state is smooth.

[0018] In some embodiments, the pressure regulator is configured for low pressure delivery.

[0019] In some embodiments, the first pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

[0020] In some embodiments, the second pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

[0021] In some embodiments, the first spring comprises a plurality of first springs.

[0022] In some embodiments, the plurality of levers are formed from a stiff, low-friction material.

[0023] In some embodiments, the assembly is configured to deliver hazardous materials used in manufacturing semiconductor devices.

[0024] Several embodiments of the present disclosure are described herein by way of example with reference to the accompanying drawings. Referring now specifically to the drawings in detail, it is emphasized that the illustrated embodiments are by way of example and for illustrative discussion of embodiments of the present disclosure. In this regard, the description using the drawings will make apparent to those skilled in the art how embodiments of the present disclosure may be practiced. [Brief explanation of the drawings]

[0025] [Figure 1] 1 illustrates a fluid delivery system, according to some embodiments. [Figure 2]2 shows a cross-sectional view of the fluid delivery system of FIG. 1 according to some embodiments. [Figure 3] 1 shows a perspective view of a device according to some embodiments. [Figure 4] 4 shows a cross-sectional view of the device of FIG. 3 according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0026] Like numbers refer to the same or like parts throughout.

[0027] Manufacturing processes, such as, but not limited to, semiconductor manufacturing processes, often use fluid delivery systems in which fluids are stored in containers and then delivered to specialized equipment. Specialized equipment can be sensitive to fluctuations in flow rate. For example, rapid or constant changes in pressure can result in a condition in which a downstream mass flow controller is unable to maintain a constant set point. This condition can be exacerbated by lower flow rates (e.g., 2 cm 3 / min~3cm 3 This can be enhanced when dealing with fluid delivery at high flow rates (flow rates of 1000 / min). Spikes or vibrations in the flow control can disrupt specialized equipment and result in alarm conditions that halt the manufacturing process. This can result in, for example, rework of the product being manufactured.

[0028] Embodiments of the present disclosure are directed to devices configured to provide a smooth transition between idle and flow states. In some embodiments, the devices (e.g., pressure regulators) can reduce the risk of reaching an alarm condition that interrupts the manufacturing process. As a result, in some embodiments, less rework may be required in the manufacturing process.

[0029] In some embodiments, the device is configured for low pressure delivery. In some embodiments, the low pressure is less than 760 Torr. It should be understood that embodiments of the present disclosure may be applied to different pressures, such as pressures greater than 760 Torr.

[0030] As used herein, a "smooth transition between idle and flowing conditions" can include a pressure fluctuation of less than 10 Torr / s, a deviation of less than 5 Torr / s, or a deviation of less than 1 Torr / s.

[0031] Figure 1 illustrates a fluid delivery system 100 according to some embodiments. Figure 2 illustrates a cross-sectional view of the fluid delivery system 100 according to some embodiments. For the sake of brevity, Figures 1 and 2 will be discussed together unless otherwise noted.

[0032] Fluid delivery system 100 can be used, for example, to store and deliver pressurized fluid maintained at a low pressure level. In some embodiments, fluid delivery system 100 can be used, for example, in the manufacturing of semiconductor devices and the like. Equipment using the fluid in fluid delivery system 100 can be sensitive to pressure fluctuations. Therefore, embodiments described herein can provide a smooth transition between idle and flowing states. As a result, embodiments herein can improve the functionality of fluid delivery system 100 and reduce issues in manufacturing equipment used with fluid delivery system 100.

[0033] In the illustrated embodiment, the fluid delivery system 100 includes a pressure-regulated vessel 102 configured to store a pressurized fluid. In some embodiments, the pressure-regulated vessel 102 may be referred to as a cylinder. In some embodiments, the pressurized fluid is stored at low pressure. In some embodiments, the pressurized fluid is in a gas phase or a partial gas phase.

[0034] The fluid delivery system 100 includes a valve head 104. In some embodiments, the valve head 104 can be threadedly engaged at an end (e.g., an upper end) of the pressure-regulated vessel 102. The valve head 104 can include an inlet 106 through which the pressure-regulated vessel 102 can be filled with fluid. The fluid can be discharged from the interior 110 of the pressure-regulated vessel 102 through an outlet 108. The valve head 104 also includes a handle 112 configured to allow control of the fluid exiting through the outlet 108.

[0035] Although not shown in the illustrated embodiment, it is understood that outlet 108 can be connected to a conduit to fluidly connect fluid delivery system 100 with equipment such as, but not limited to, equipment used in semiconductor manufacturing (e.g., ion implantation, etc.). Additionally, one or more pressure transducers and mass flow controllers can be included along the conduit to measure and provide an alert if the pressure fluctuates beyond acceptable limits.

[0036] As shown in FIG. 2, the fluid delivery system 100 includes a device 114 within the interior 110 of the pressure regulated vessel 102. The device 114 may be referred to as a valve assembly or the like. In some embodiments, the device 114 may be referred to as a pressure regulator. In some embodiments, the device 114 may enable or disable an exhaust flow path through the outlet 108. The device 114 is specifically configured to allow a smooth transition between an idle state and a flow state. The device 114 is shown and described in further detail with reference to FIGS. 3 and 4 below.

[0037] The fluid delivery system 100 may also include a filter 116 disposed within the interior 110 of the pressure regulated vessel 102. It should be understood that one or more filters may be included elsewhere within the fluid delivery system 100, such as, but not limited to, at the outlet 108.

[0038] Figure 3 shows a perspective view of device 114, according to some embodiments. Figure 4 shows a cross-sectional view of device 114, according to some embodiments. For the sake of brevity, Figures 3 and 4 will be discussed together unless otherwise noted.

[0039] The device 114 includes an inlet 150 and an outlet 152 from a housing 154. The inlet 150 is fluidly connected to the outlet 152 such that fluid in the interior 110 of the pressure regulated vessel 102 (FIGS. 1, 2) can flow from the inlet 150 to the outlet 152 through the housing 154. In some embodiments, the inlet 150 can be fluidly connected to another component, such as, but not limited to, a filter 116 (FIG. 2).

[0040] In some embodiments, device 114 can include multiple chambers. For example, housing 154 of device 114 can be divided to include chamber 156 and chamber 158. In the illustrated embodiment, length L1 of chamber 156 along the longitudinal axis LL of housing 154 can be different from length L2 of chamber 158 along the longitudinal axis LL. In some embodiments, length L1 and length L2 can be the same.

[0041] In some embodiments, the features disposed within chamber 156 and the features disposed within chamber 158 can be similar or identical. In some embodiments, by having chamber 156 and chamber 158, device 114 can be referred to as a two-stage pressure regulator. In some embodiments, device 114 is designed with multiple stages for controlling the pressure at outlet 152. In some embodiments, having multiple stages can provide a constant outlet pressure device even when the inlet pressure may vary.

[0042] Chamber 156 includes an inlet 160 and an outlet 162. Inlet 160 is fluidly connected to inlet 150 and, correspondingly, to interior 110 of pressure regulated vessel 102 (FIG. 2).

[0043] A pressure regulation device 164 is disposed within the chamber 156 between the inlet 160 and the outlet 162. In some embodiments, the device 164 includes a plurality of levers 166. In some embodiments, the chamber 156 can include two of the levers 166, three of the levers 166, four of the levers 166, or five or more of the levers 166. In some embodiments, four levers 166 may be preferred for stability. In some embodiments, the levers 166 are formed from a rigid, low-friction material. In some embodiments, the levers 166 are formed from polytetrafluoroethylene (PTFE), or the like.

[0044] In some embodiments, device 164 includes spring 168. In some embodiments, spring 168 includes multiple springs. In some embodiments, spring 168 can be a wave spring, or the like.

[0045] In some embodiments, device 164 includes a pressure actuated device 170. In some embodiments, pressure actuated device 170 can include, for example, a bellows, a diaphragm, a spring, or any combination thereof.

[0046] Collectively, the components of device 164, in some embodiments, are selected such that device 164 has a first closing force acting on inlet 160. The first closing force is selected to maintain device 164 in an idle state. In some embodiments, pressure actuated device 170 is configured to contract when external pressure on pressure actuated device 170 increases. During operation, when external pressure on pressure actuated device 170 decreases, pressure actuated device 170 is configured to apply a force greater than the first closing force acting on inlet 160. As a result, fluid flow is permitted within chamber 156 (i.e., from inlet 160 to outlet 162).

[0047] In some embodiments, chamber 156 optionally includes a filter 172. Filter 172 can be configured to remove contaminants from the fluid within pressure regulated vessel 102 (FIGS. 1, 2).

[0048] In some embodiments, pressure actuated device 170 can additionally include a spring 174. In the illustrated embodiment, spring 174 is a coil spring. In some embodiments, spring 174 can function in conjunction with pressure actuated device 170 to provide a first closing force acting on inlet 160. Parameters of spring 174 can be selected to function with pressure actuated device 170.

[0049] In some embodiments, lever 166 applies a force to member 176. Member 176 receives a force from spring 168 via lever 166. In some embodiments, pressure actuated device 170 applies a force to the opposite side of member 176. In some embodiments, member 176 can move in a direction opposite to flow F to unseat seal member 178 and allow fluid flow when the force applied by pressure actuated device 170 is greater than the force applied via lever 166 and spring 168. When the force applied via lever 166 and spring 168 is greater, device 114 is in an idle state.

[0050] Chamber 158 includes an inlet 180 and an outlet 182. Inlet 180 is fluidly connected to outlet 162 of chamber 156, which is correspondingly fluidly connected to interior 110 of pressure regulated vessel 102 (FIG. 2).

[0051] A pressure regulation device 184 is disposed within the chamber 158 between the inlet 180 and the outlet 182. In some embodiments, the device 184 includes a plurality of levers 186. In some embodiments, the chamber 158 may include two of the levers 186, three of the levers 186, four of the levers 186, or five or more of the levers 186. In some embodiments, four levers 186 may be preferred for stability. In some embodiments, the levers 186 are formed from a rigid, low-friction material. In some embodiments, the levers 186 are formed from polytetrafluoroethylene (PTFE), or the like.

[0052] In some embodiments, device 184 includes spring 188. In some embodiments, spring 188 includes multiple springs. In some embodiments, spring 188 can be a wave spring, or the like.

[0053] In some embodiments, device 184 includes a pressure actuated device 190. In some embodiments, pressure actuated device 190 can include, for example, a bellows, a diaphragm, a spring, or any combination thereof.

[0054] Collectively, the components of device 184, in some embodiments, are selected such that device 184 has a first closing force acting on inlet 180. The first closing force is selected to maintain device 184 in an idle state. In some embodiments, pressure actuated device 190 is configured to contract when external pressure on pressure actuated device 190 increases. During operation, when external pressure on pressure actuated device 190 decreases, pressure actuated device 190 is configured to apply a force greater than the first closing force acting on inlet 180. As a result, fluid flow is permitted within chamber 158 (i.e., from inlet 180 to outlet 182).

[0055] In some embodiments, the chamber 158 optionally includes a filter 192. The filter 192 can be configured to remove contaminants from the fluid within the pressure regulated vessel 102 (FIGS. 1, 2).

[0056] In some embodiments, lever 186 applies a force to member 196. Member 196 receives a force from spring 188 via lever 186. In some embodiments, pressure actuated device 190 applies a force to the opposite side of member 196. In some embodiments, member 196 can move in a direction opposite to flow F to unseat seal member 198 and allow fluid flow when the force applied by pressure actuated device 190 is greater than the force applied via lever 186 and spring 188. When the force applied via lever 186 and spring 188 is greater, device 114 is in an idle state.

[0057] In some embodiments, the pressure actuated device 190 may include an adjustment mechanism such that the device 184 is adjustable to operate at different pressures. For example, the device 114 may include a threaded stem 200. The threaded stem 200 may be rotated to move the member 202 toward the member 196 (retracting the pressure actuated device 190) or away from the member 196 (relaxing the pressure actuated device 190). In some embodiments, the threaded stem 200 may be within a larger threaded stem 204 such that a tool can be inserted into the larger threaded stem 204 to reach the threaded stem 204. In some embodiments, the adjustment may be performed even when the device 114 is installed within the pressure regulated vessel 102. In some embodiments, the adjustment results in a different outlet pressure.

[0058] Among these disclosed benefits and improvements, other objects and advantages of the present disclosure will become apparent from the following description taken in conjunction with the accompanying drawings. Detailed embodiments of the present disclosure are disclosed herein. However, it should be understood that the disclosed embodiments are merely exemplary of the present disclosure, which may be embodied in various forms. Additionally, each of the examples given with respect to various embodiments of the present disclosure is intended to be illustrative and not limiting.

[0059] All prior patents and publications referenced herein are incorporated by reference in their entirety.

[0060] Throughout this specification and claims, the following terms take the meanings expressly associated therewith, unless the context clearly dictates otherwise. As used herein, the phrases "in one embodiment," "in an embodiment," and "in some embodiments" do not necessarily refer to the same embodiment(s), but may refer to the same embodiment(s). Furthermore, as used herein, the phrases "in another embodiment" and "in some other embodiments" do not necessarily refer to different embodiments, but may refer to different embodiments. It is intended that all embodiments of the present disclosure be combinable without departing from the scope or spirit of the disclosure.

[0061] As used herein, the term "based on" is not exclusive and allows for the basis of additional factors not listed, unless the context clearly dictates otherwise. Furthermore, throughout this specification, the meanings of "a," "an," and "the" include plural references. The meaning of "in" includes "in" and "on."

[0062] As used herein, the term "between" does not necessarily require that an element be disposed immediately adjacent to another element. Generally, the term refers to a configuration in which an object is sandwiched between two or more other objects. At the same time, the term "between" can refer to an object that is immediately adjacent to two opposing objects. Thus, in any one or more of the embodiments disclosed herein, a particular structural component that is disposed between two other structural elements may be: A particular structural component may be disposed directly between two other structural elements such that the structural component is in direct contact with both of the two other structural elements; A particular structural component may be disposed immediately adjacent to only one of two other structural elements, such that the particular structural component is in direct contact with only one of the two other structural elements; A particular structural element may be disposed indirectly adjacent to only one of the two other structural elements, such that the particular structural element is not in direct contact with only one of the two other structural elements, but there is another element that juxtaposes the particular structural element and one of the two other structural elements; or A particular structural component may be indirectly disposed between two other structural elements, such that the structural component is not in direct contact with both of the two other structural elements, but other features may be disposed between the structural elements; or Any combination(s) thereof are possible.

[0063] As used herein, "embedded" means that a first material is distributed throughout a second material.

Claims

1. A device, a housing, the housing comprising: a first chamber having a first pressure regulating device, the first chamber includes a first fluid inlet and a first fluid outlet; The first pressure regulating device a plurality of first levers; a first spring having a first spring force, a first spring configured to provide a first closing force for closing the first fluid inlet; and a first pressure actuated device, the first pressure actuation device configured to contract as external pressure increases; a first chamber, wherein in response to a decrease in the external pressure, the first pressure actuated device is configured to overcome the first closing force and open the first fluid inlet; a second chamber having a second pressure regulating device, the second chamber includes a second fluid inlet and a second fluid outlet; The second pressure regulating device a plurality of second levers; a second spring having a second spring force, a second spring configured to provide a second closing force for closing the second fluid inlet; and a second pressure actuated device, the second pressure actuation device configured to contract as the external pressure increases; a second chamber, wherein in response to a decrease in the external pressure, the second pressure actuated device is configured to overcome the second closing force and open the second fluid inlet; A device comprising:

2. The device of claim 1 , further comprising a filter disposed in the first fluid inlet or the second fluid inlet.

3. The device of claim 1 , wherein the first spring is a wave spring.

4. The device of claim 1 , further comprising an adjustment mechanism configured to modify an outlet pressure of fluid exiting the second pressure regulation device.

5. The device of claim 1 , wherein the transition from the idle state to the flow state is smooth.

6. The device of claim 1 , wherein the device is configured for low pressure delivery.

7. The device of claim 1 , wherein the first pressure actuated device comprises one or more of a bellows, a diaphragm, a spring, or combinations thereof.

8. The device of claim 1 , wherein the second pressure actuated device comprises one or more of a bellows, a diaphragm, a spring, or combinations thereof.

9. The device of claim 1 , wherein the first spring comprises a plurality of first springs.

10. 1. An assembly comprising: a pressure regulating vessel; a pressure regulator, the pressure regulator comprising: a housing, the housing comprising: a first chamber having a first pressure regulating device, the first chamber includes a first fluid inlet and a first fluid outlet; The first pressure regulating device a plurality of first levers; a first spring having a first spring force, a first spring configured to provide a first closing force for closing the first fluid inlet; and a first pressure actuated device, the first pressure actuation device configured to contract as external pressure increases; a first chamber, wherein in response to an increase in the external pressure, the first pressure actuated device is configured to overcome the first closing force and open the first fluid inlet; a second chamber having a second pressure regulating device, the second chamber includes a second fluid inlet and a second fluid outlet; The second pressure regulating device a plurality of second levers; a second spring having a second spring force, a second spring configured to provide a second closing force for closing the second fluid inlet; and a second pressure actuated device, the second pressure actuation device configured to contract as the external pressure increases; a second chamber, wherein in response to an increase in the external pressure, the second pressure actuated device is configured to overcome the second closing force and open the second fluid inlet; An assembly comprising:

11. The assembly of claim 10 , further comprising a filter disposed in the first fluid inlet or the second fluid inlet.

12. The assembly of claim 10 further comprising a filter.

13. The assembly of claim 10 , further comprising an adjustment mechanism configured to modify an outlet pressure of fluid exiting the second pressure regulation device.

14. The assembly of claim 10, wherein the transition from the idle state to the flow state is smooth.

15. The assembly of claim 10 , wherein the pressure regulator is configured for low pressure delivery.

16. The assembly of claim 10 , wherein the first pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

17. The assembly of claim 10 , wherein the second pressure actuated device includes one or more of a bellows, a diaphragm, a spring, or combinations thereof.

18. The assembly of claim 10 , wherein the first spring comprises a plurality of first springs.

19. 19. The assembly of claim 18, wherein the plurality of first levers are formed from a rigid, low-friction material or the plurality of second levers are formed from a rigid, low-friction material.

20. The assembly of claim 10 , wherein the assembly is configured to deliver hazardous materials used in manufacturing semiconductor devices.

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