Ingot lifting device including automatic clamp

Abstract

The ingot lifting device includes a housing defining a growth chamber and a growth chamber outlet; an isolation valve having a first valve end and a second valve end connected to the growth chamber outlet; an ingot receiving chamber and an ingot receiving container defining a receiving chamber inlet provided at the receiving container end; a clamp including a clamp base connected to the second valve end; and a controller. The clamp includes a clamping mechanism that releasably connects the receiving container end to the clamp base; and an actuator that moves the clamping mechanism between a clamped position where the receiving container end is connected to the clamp base and a released position where the receiving container end can be released from the clamp base. The controller is connected to the actuator and controls the movement of the clamping mechanism between the clamped position and the released position.

Description

Technical Field

[0001] (Cross - reference to Related Applications) This application claims priority to U.S. Patent Application No. 18 / 313730, filed on May 8, 2023, the entire disclosure of which is incorporated herein by reference.

[0002] This field relates to an ingot pulling device used for manufacturing single - crystal semiconductor ingots, and more particularly, to an automatic clamp for selectively connecting an ingot receiving chamber of an ingot pulling device to an isolation valve.

Background Art

[0003] Single - crystal silicon is the starting material in most processes for manufacturing many electronic components such as semiconductor devices and solar cells, and is generally produced by the batch Czochralski (CZ) method or the continuous Czochralski (CCZ) method. In these methods, a polycrystalline raw material such as polycrystalline silicon in the form of a solid raw material is charged into a quartz crucible and melted, a single seed crystal is brought into contact with the molten silicon or melt, and a single - crystal silicon ingot is grown by slowly pulling it up.

[0004] Conventional apparatus for accelerating the growth of single-crystal silicon ingots includes a furnace vessel or housing defining a growth chamber in which a crucible is placed, an isolation valve connected to the outlet of the growth chamber, and an ingot receiving container connected to the isolation valve. During the ingot growth process, the isolation valve is opened to provide communication between the growth chamber and the ingot receiving chamber defined by the ingot receiving container. The ingot grows by being slowly pulled up, and as it is being pulled up, the growing ingot is pulled out of the growth chamber through the open isolation valve and placed into the ingot receiving chamber. The fully grown ingot is housed in the ingot receiving chamber. After the growth process, the isolation valve is closed and the ingot receiving container is removed from the isolation valve. The fully grown ingot is then removed from the ingot receiving chamber.

[0005] In conventional growth systems, the ingot receiving container is seated on an isolation valve and connected to the isolation valve by a manually operated clamp, which holds the ingot receiving container in place and forms a seal between the ingot receiving container and the isolation valve. Assembly and disassembly of the system require the operator to manually attach the clamp for connecting and disconnecting the ingot receiving container and the isolation valve. This makes the system prone to operator error and misuse. For example, during assembly, the clamp may not be properly attached, resulting in a weak connection between the ingot receiving container and the isolation valve, or a leak in the seal. Furthermore, the use of manually operated clamps to connect the ingot receiving container and the isolation valve limits the system's ability to provide an automated growth process. Therefore, there is a need for improved clamps to be used with ingot growth systems to address these shortcomings.

[0006] This background section is intended to introduce to the reader various aspects of the technology that may be relevant to the various aspects of the disclosure described and / or claimed below. This discussion is intended to be useful in providing the reader with background information to facilitate a better understanding of the various aspects of the disclosure. Therefore, these statements should be read in this context and do not constitute an admission of prior art. [Overview of the project]

[0007] One embodiment is an ingot pulling apparatus for manufacturing a single crystal semiconductor ingot, the ingot pulling apparatus comprising a housing defining a growth chamber and a growth chamber outlet; an isolation valve having a first valve end connected to the growth chamber outlet and a second valve end on the opposite side; an ingot receiving chamber and an ingot receiving container defining a receiving chamber inlet provided at the receiving container end; a clamp including a clamp base connected to the second valve end; and a controller. The clamp comprises a clamping mechanism that releasably connects the receiving container end to the clamping base; and at least one actuator that can control the movement of the clamping mechanism between a clamping position in which the clamping mechanism connects the receiving container end to the clamping base and a release position in which the receiving container end can be released from the clamping base. The controller is connected to the at least one actuator and controls the at least one actuator to move the clamping mechanism between the clamping position and the release position.

[0008] Another embodiment is an ingot pulling apparatus for manufacturing a single-crystal semiconductor ingot, the ingot pulling apparatus comprising a housing defining a growth chamber and a growth chamber outlet; an isolation valve having a first valve end connected to the growth chamber outlet and a second valve end on the opposite side; an ingot receiving chamber and an ingot receiving container defining a receiving chamber inlet provided at the receiving container end; and a clamp including a clamp base connected to the second valve end. The clamp comprises at least one clamp finger rotatably connected to the clamp base and releasably connecting the receiving container end to the clamp base, and a support ring movable relative to the clamp base between a first position and a second position. The support ring biases at least one clamp finger to rotate to engage with the receiving container end when the support ring moves from the first position to the second position to connect the receiving container end to the clamp base.

[0009] Another embodiment is a releasable clamp for releasably connecting an ingot receiving container of an ingot lifting device to an isolation valve. The releasable clamp includes a clamp base connectable to the end of an isolation valve, a clamp cover facing the clamp base and defining an opening sized to receive the end of an ingot receiving container, clamp fingers rotatably connected to the clamp base, and a support ring movable relative to the clamp base between a first position and a second position. The support ring biases the clamp fingers as the support ring moves from the first position to the second position, causing the end of the ingot receiving container to rotate to an engagement position adapted for connecting to the clamp base. The clamp includes at least one actuator controllable to move the support ring between the first position and the second position.

[0010] Various improvements exist to the features described in relation to the above-described embodiments of this disclosure. Further features may be incorporated into the above-described embodiments of this disclosure. These improvements and additional features may exist individually or in any combination. For example, various features described below in relation to any of the illustrated embodiments of this disclosure may be incorporated individually or in any combination into any of the above-described embodiments of this disclosure. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a schematic cross-sectional view of an ingot pulling apparatus for forming single-crystal silicon ingots. [Figure 2] Figure 2 is a perspective view of a part of the ingot lifting device, showing an ingot receiving container connected to an isolation valve by an exemplary clamp. [Figure 3] Figure 3 is a cross-sectional view showing in more detail the connection between the ingot receiving container and the isolation valve, facilitated by the exemplary clamp. [Figure 4] Figure 4 is a cross-sectional view showing the ingot receiving container with the clamp released and freed from the isolation valve. [Figure 5] Figure 5 is a perspective view showing the clamp alone. [Figure 6] Figure 6 is an exploded view of the clamp. [Figure 7] Figure 7 is a perspective view showing the clamp alone, illustrating the steps in the clamp's operation sequence. [Figure 8] Figure 8 is a perspective view showing the clamp alone, illustrating the steps in the clamp's operation sequence. [Figure 9] Figure 9 is a perspective view showing the clamp alone, illustrating the steps in the clamp's operation sequence.

[0012] Corresponding reference numerals indicate the corresponding parts throughout the drawing. [Modes for carrying out the invention]

[0013] This application claims priority to U.S. Patent Application No. 18 / 313730, filed on 8 May 2023, the entire disclosure of which is incorporated herein by reference.

[0014] Referring to Figure 1, an ingot pulling apparatus or ingot puller is schematically shown and is shown as 100 overall. The ingot pulling apparatus 100 is used to produce single-crystal (i.e., monocrystalline) ingots of semiconductor materials, such as single-crystal silicon ingots. In some embodiments, the ingot is grown by a so-called Czochralski (CZ) process, in which the ingot is pulled from a silicon melt 102 held in a crucible 104 of the crystal pulling apparatus 100. In some embodiments, the ingot is grown by a batch CZ process, in which a sufficient amount of polycrystalline silicon is charged into the crucible 104 to grow one ingot, and the silicon melt 102 is substantially depleted from the crucible 104 after the growth of one ingot. In other embodiments, the ingot is grown by a continuous CZ (CCZ) process, in which polycrystalline silicon is continuously or periodically added to the crucible 104 to replenish the silicon melt 102 during the growth process. The CCZ process facilitates the growth of multiple ingots pulled from a single melt 102. Embodiments of the subject matter described are not limited to specific crystal growth processes.

[0015] The ingot pulling device 100 includes a housing 106 that defines a crystal growth chamber 108 and a growth chamber outlet 110 having smaller lateral dimensions than the growth chamber 108. The housing 106 has a generally dome-shaped upper wall 112 that transitions from the growth chamber 108 to the growth chamber outlet 110. The ingot pulling device 100 includes an inlet port 114 and an outlet port 116 that can be used to introduce process gas into the growth chamber 108 and remove process gas from the growth chamber 108 during crystal growth.

[0016] A crucible 104 within the ingot pulling device 100 contains a silicon melt 102 from which silicon ingots are drawn. The crucible 104 may be made of quartz or fused silica, which have high melting points and thermal stability and are generally non-reactive to fused silicon in the melt 102. The crucible 104 may be made of other materials in addition to quartz without departing from the scope of the present disclosure. For example, a quartz crucible 104 may be made of a composite material comprising silica and an additional material such as silicon nitride or silicon carbide.

[0017] The silicon melt 102 is obtained by melting polycrystalline silicon charged into the crucible 104. In a continuous system, a supply system (not shown) is used to supply solid raw materials to the crucible assembly 104 and / or the melt 102. The crucible 104 is placed in a susceptor 118 and supported by the susceptor 118, which is supported by a rotatable shaft 120. The susceptor 118 and the rotatable shaft 120 facilitate the rotation of the crucible 104 about the central longitudinal axis X of the ingot pulling device 100.

[0018] A heating system 122 (e.g., one or more electric resistance heaters) surrounds the susceptor 118 and crucible 104 and supplies heat by heat conduction through the susceptor 118 and crucible 104 to melt the silicon charge to produce a melt 102 and / or to maintain the melt 102 in a molten state. The heater 122 may extend below the susceptor 118 and crucible 104. The heating system 122 is controlled by a controller 140 so that the temperature of the melt 102 is precisely controlled throughout the pulling process. For example, the controller may control the current supplied to the heating system 122 to control the amount of thermal energy supplied by the heating system 122. The controller may control the heating system 122 so that the temperature of the melt 102 is maintained above the melting temperature of silicon (e.g., about 1412°C). For example, the molten metal 102 may be heated to a temperature of at least about 1425°C, at least about 1450°C, or at least about 1500°C. Insulation (not shown) surrounding the heating system 122 may reduce the amount of heat lost through the housing 106. The ingot pulling device 100 may also include a thermal shielding assembly (not shown) positioned above the surface of the molten metal 102 to shield the ingot from the heat of the crucible 104 in order to increase the axial temperature gradient at the solid-molten interface.

[0019] The lifting mechanism 132 is attached to a lifting wire 124 that extends downward from the lifting mechanism. The mechanism 132 can raise and lower the lifting wire 124 and rotate the lifting wire 124. Depending on the type of lifting device, the lifting device 100 may have a lifting shaft instead of a wire. The lifting wire 124 terminates in a lifting assembly 126 which includes a seed crystal chuck 128 that holds a seed crystal 130 used for growing a silicon ingot.

[0020] The ingot lifting device 100 also includes a housing 106, more specifically, an isolation valve 150 connected to the upper wall 112 at the growth chamber outlet 110. The isolation valve 150 includes a valve body 152 extending between a first valve end portion 154 and a second valve end portion 156 connected to the housing 106. A valve passage 158 extends through the valve body 152 between the first valve end portion 154 and the second valve end portion 156. The valve body 152 is open at both valve end portions 154, 156 such that the valve passage 158 communicates the growth chamber 108 and the ingot receiving chamber 162 defined by the ingot receiving container 160. The isolation valve 150 may be opened and closed to selectively provide communication between the growth chamber 108 and the ingot receiving chamber 162. More specifically, the isolation valve 150 includes a valve element 151 (shown in FIG. 3) disposed in the valve passage 158, and the valve element 151 may be selectively actuated automatically (e.g., by an actuating arm 153 operatively coupled to the valve element 151 and controllable by the controller 140) or manually by an operator using a valve handle (not shown) connected to the valve element. In an exemplary ingot lifting device 100, the valve element 151 is a movable disk actuated by an actuating arm 153 (FIG. 3) to selectively seal the second valve end portion 156, thereby closing the valve passage 158. In other examples, the isolation valve 150 may include any suitable valve configuration and valve element to enable the isolation valve 150 to function as described. For example, the isolation valve 150 may include a ball valve, a butterfly valve, a diaphragm valve, or other suitable type of valve. When closed, the isolation valve 150 may preferably isolate the growth chamber 108 from the ingot receiving chamber 162 and / or the surrounding environment.

[0021] Referring further to Figures 2 and 3, the valve body 152 of the isolation valve 150 includes flanges 174 and 176 provided on the open valve ends 154 and 156, respectively. The flanges 174 and 176 enable connection of the isolation valve 150 to the housing 106 and the clamp 200, respectively. The clamp 200 will be described in more detail below. As shown in Figure 2, an annular connecting collar 178 is provided between the upper wall 112 of the housing 106 at the growth chamber outlet 110 and the second valve end 154. The flange 174 is connected to the connecting collar 178 using fasteners 180 (e.g., bolts and / or screws) to connect the first valve end 154 to the growth chamber outlet 110.

[0022] Referring again to FIG. 1, the ingot receiving vessel 160 includes a hollow cylinder that defines an ingot receiving chamber 162. The ingot receiving vessel 160 is open at a first vessel end 166 to define a receiving chamber inlet 164. The ingot receiving vessel 160 extends from the first vessel end 166 to a second vessel end 168. The ingot receiving vessel 160 includes a door 170 (shown in FIG. 2) located in a side wall 172 of the receiving vessel 160 that extends between the first vessel end 166 and the second vessel end 168. When the ingot lifting device 100 is assembled during the growth process, the first vessel end 166 is connected to the second valve end 156 using a clamp 200 described in further detail below. The receiving vessel 160 extends vertically coaxial with the valve passage 158 and the growth chamber outlet 110 above the isolation valve 150 and the housing 106. More specifically, the receiving vessel 160, the isolation valve 150, and the growth chamber outlet 110 are axially aligned along the longitudinal axis X of the ingot lifting device 100, enabling the grown ingot to be lifted from the growth chamber 108 through the growth chamber outlet 110, through the valve passage 158, and into the ingot receiving chamber 162. The receiving vessel 160 extends at an appropriate height between the first vessel end 166 and the second vessel end 168 to accommodate the full length of the fully grown ingot and the lifting assembly 126. The door 170 located in the side wall 172 of the ingot receiving vessel 160 is sized and shaped to provide a lateral exit for the fully grown ingot from the receiving chamber 162.

[0023] A process gas (e.g., argon) is introduced into the growth chamber 108 through an inlet port 114 and withdrawn through an outlet port 116. The inlet port 114 is shown in Figure 1 as being located at the second vessel end 168 to introduce the process gas toward the growth chamber 108 through the ingot receiving chamber 162 and the valve opening passage 158. In other examples, the inlet port 114 may be located at an additional or alternative suitable location on the ingot lifting device 100 (e.g., on the upper wall 112 of the housing 106). The process gas creates an atmosphere within the housing, and the melt and the atmosphere form a melt-gas interface. The outlet port 116 is in fluid communication with the exhaust system (not shown) of the ingot lifting device.

[0024] The controller 140 may be a known computing device or computer system and may include one or more processors 142 and a memory area 144. The processors 142 execute instructions stored in the memory area 144. The term “processor” refers to a central processing unit, a microprocessor, a microcontroller, a reduced instruction set circuit (RISC), an application-specific integrated circuit (ASIC), a logic circuit, and any other circuit or processor capable of performing the functions described. The foregoing description is illustrative and is not intended to limit the definition and / or meaning of the term “processor.” In addition, one or more processors 142 may reside in a single computing device or in multiple computing devices operating in parallel.

[0025] The memory area 144 stores, for example, processor-executable instructions for receiving input from an operator (e.g., via a user interface 146), processing the received input, and controlling process parameters of the ingot retrieval device 100 based on the processed input received from the operator. The memory area 144 may include, but is not limited to, any computer operating hardware suitable for storing and / or retrieving processor-executable instructions and / or data. The memory area 144 may include random access memory (RAM), such as dynamic RAM (DRAM) or static RAM (SRAM), read-only memory (ROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), and non-volatile RAM (NVRAM). Furthermore, the memory area 144 may include multiple storage devices, such as hard disks or solid-state disks in a redundant array (RAID) configuration of inexpensive disks. The memory area 144 may also include a storage area network (SAN) and / or network-attached storage (NAS) system. In some embodiments, the memory area 144 includes memory integrated into the controller 140. For example, the controller 140 may include one or more hard disk drives as the memory area 144. The memory area 144 may also include memory located outside the controller 140 and may be accessed by multiple computing devices. The types of memory described above are illustrative and do not limit the types of memory that the processor can use to store executable instructions and / or data.

[0026] The controller 140 includes a user input device or user interface 146 for receiving input from an operator. This information may be one or more selected process parameters or control actions for the ingot growth process. The input device 146 may include, for example, a keyboard, pointing device, mouse, stylus, touch sensor panel (e.g., touchpad or touchscreen), voice input device, etc. A single component, such as a touchscreen, may function as both an output device (e.g., a media output component) and an input device 146 of the controller 140. For example, a memory area 144 may provide the user interface 146 to the user via the media output component and store computer-readable instructions for receiving and processing input from the user interface 146. The user interface 146 may also include, as an alternative possibility, a web browser and an application. The web browser allows the user to view and interact with media and other information typically embedded in a web page or website from a web server. The application allows the user to interact with a server application. The user interface facilitates the display of information related to the ingot pulling device 100 and the ingot growth process via either a web browser or an application, or both.

[0027] The controller 140 may also include a communication interface 148, which may be communicatively connected to one or more remote devices. The communication interface 148 may include, for example, a wired or wireless network adapter or wireless data transceiver for use with a cellular network (e.g., GSM (Global System for Mobile communications), 3G, 4G, or Bluetooth®)) or other mobile data network (e.g., WiMAX (Worldwide Interoperability for Microwave Access)).

[0028] During the operation of the ingot lifting device 100 for growing the ingot, the first container end 166 of the ingot receiving container 160 is connected to the second valve end 156 of the isolation valve 150 using a clamp 200. The isolation valve 150 is opened at this stage to provide communication between the growth chamber 108, the valve passage 158, and the ingot receiving chamber 162. The polycrystalline silicon material is charged into the crucible 104 and heated by the heating system 122 to produce a silicon melt 102. Process gases are introduced into the growth chamber 108 through the inlet port 114, the ingot receiving chamber 162, and the valve passage 158. The lifting mechanism 132 lowers the seed crystal 130 into the growth chamber 108 through the ingot receiving chamber 162 and the valve passage 158 until the seed crystal 130 contacts the surface of the silicon melt 102. When the seed crystal 130 begins to melt, the pulling mechanism 132 slowly pulls the seed crystal 130 through the growth chamber 108 in the direction of the longitudinal axis X in order to grow a single crystal ingot. The speed at which the pulling mechanism 132 rotates the seed crystal 130 and the speed at which the pulling mechanism 132 pulls up the seed crystal (i.e., the pulling speed v) are controlled by the controller 140.

[0029] As the seed crystal 130 is slowly pulled up from the molten metal 102, silicon atoms from the molten metal 102 align and adhere to the seed crystal 130, forming an ingot. The pulling mechanism 132 continues to pull the seed crystal 130 and the growing ingot out of the growth chamber 108 through the growth chamber outlet 110, and then into the ingot receiving chamber 162 through the valve passage 158, in the direction of the longitudinal axis X.

[0030] After the ingot has grown to the appropriate length, the growth process ends and the fully grown ingot is housed in the receiving chamber 162. The isolation valve 150 is then closed (manually or via the controller 140) and the clamp 200 is opened, releasing the ingot receiving container 160 from the isolation valve 150. The ingot receiving container 160 is removed from the isolation valve 150, and the ingot is then removed from the receiving chamber 162 through the door 170.

[0031] Next, with reference to Figures 2 to 5, an exemplary clamp 200 for releasably connecting the ingot receiving container 160 to the isolation valve 150 will be described. Figure 2 is a partial perspective view of the ingot receiving container 160 connected to the isolation valve 150 by the clamp 200. Figure 3 is a cross-sectional view showing in more detail the connection between the ingot receiving container 160 and the isolation valve 150 facilitated by the clamp 200. Figure 4 is a cross-sectional view showing the ingot receiving container 160 with the clamp 200 open and released from the isolation valve 150. Figure 5 is a perspective view showing the clamp 200 alone. Figure 6 is an exploded view of the clamp 200.

[0032] The clamp 200 includes a clamp base 202, a clamp cover 248 facing the clamp base 202 and positioned above the clamp base 202, and a clamp housing 250 connected to the clamp cover 248 by fasteners 252 (e.g., screws). The clamp housing 250 is omitted from Figure 6. The clamp cover 248 and the clamp housing 250 define a clamp opening 254 having a size and shape to receive the first container end 166 of the ingot receiving container 160. The clamp base 202 is connected to the second valve end 156. The clamp base 202 includes a base platform 204 having a size and shape that complements the size and shape of the flange 176 provided on the second valve end 156. In the illustrated example, the base platform 204 is annular. In other examples, the base platform 204 may have any suitable shape to complement the shape of the flange 176.

[0033] The base platform 204 includes a bottom surface 206 that seats on the flange 176 and an upper surface 208 on the opposite side. A hole 210 extends through the base platform 204 between the upper surface 208 and the bottom surface 206. The hole 210 aligns with a corresponding opening 182 defined in the flange 176. The hole 210 and the corresponding opening 182 connect the base platform 204 to the flange 176 and thereby receive fasteners 184 (e.g., dowels, screws, bolts, etc.) to connect the clamp platform 202 to the second valve end 156. An O-ring 186 is provided between the bottom surface 206 and the flange 176. In the illustrated example, the O-ring 186 seats in a recess (not referenced) extending along the flange 176. Additionally or alternatively, a recess for accommodating the O-ring 186 may be formed in the bottom surface 206 of the base platform 204. When the base platform 204 is connected to the flange 176, the O-ring 186 forms a seal between the bottom surface 206 and the flange 176.

[0034] The clamp base 202 also includes an annular wall 212 extending from the top surface 208 of the base platform 204 to its upper edge 216. The annular wall 212 also extends downward beyond the bottom surface 206 of the base platform 204 to define an annular ridge 218. The ridge 218 is received by the open second valve end 156 and facilitates the alignment of the bottom surface 206 of the base platform 204 on the flange 176. The annular wall 212 surrounds and defines the central opening 214 of the clamp base 202. The annular wall 212 defines the central opening 214 with an appropriate diameter so that the ingot does not pass through the central opening 214 and interfere with the annular wall 212. Furthermore, when the ingot lifting device 100 is assembled with the clamp 200 connecting the isolation valve 150 and the ingot receiving container 160, the central opening 214 is axially aligned with the growth chamber outlet 110, the valve passage 158, and the receiving chamber 162 along the longitudinal axis X of the ingot lifting device 100, allowing the ingot to be lifted through the central opening 214 into the receiving chamber 162.

[0035] The clamp base 202 supports the ingot receiving container 160, which is received by the clamp opening 254, and is located between the first container end 166 and the second valve end 156. The first container end 166 includes a rim 188 that extends downward from the side wall 172 to the bottom edge 190. The rim 188 surrounds and defines the receiving chamber inlet 164. The rim 188 is joined to the side wall 172 by a shoulder 192 that extends laterally between the rim 188 and the side wall 172. The shoulder 192 defines an internal ledge 194 that extends between the inner surface of the rim 188 and the side wall 172, and an external ledge 196 that extends between the outer surface of the rim 188 and the side wall 172.

[0036] As shown in Figure 3, when the ingot receiving container 160 is supported by the clamp base 202, the annular wall 212 is received by the rim 188, and the upper edge 216 of the annular wall 212 engages with the internal ledge 194. The O-ring 220 is provided between the upper edge 216 and the internal ledge 194. In the illustrated example, the O-ring 220 is seated in a recess (not indicated) extending along the upper edge 216. Additionally and / or alternatively, a recess for receiving the O-ring 220 may be formed in the internal ledge 194. When the ingot receiving container 160 is supported by the clamp base 202 and the annular wall 212 is engaged with the internal ledge 194, the O-ring 220 forms a seal between the upper edge 216 and the internal ledge 194.

[0037] Furthermore, as shown in Figure 3, when the ingot receiving container 160 is supported on the clamp base 202 and the annular wall 212 is received by the rim 188, the lower edge 190 of the rim 188 engages with the upper surface 208 of the base platform 204. The upper surface 208 extends by an appropriate distance between the annular wall 212 and the periphery or edge of the clamp base 202 so that the rim 188 does not extend outward beyond the base platform 204. An O-ring (not shown) may be provided between the bottom edge 190 and the upper surface 208 of the base platform 204 to form a seal between the bottom edge 190 and the upper surface 208 of the base platform 204. In some examples, the upper edge 216 of the annular wall 212 engages with the internal ledge 194, while the lower edge 190 does not engage with the upper surface 208 of the base platform 204. In other examples, the upper edge 216 of the annular wall 212 may not engage with the internal ledge 194, while the lower edge 190 may engage with the upper surface 208 of the base platform 204. Preferably, at least one O-ring is provided to form a seal between the clamp base 202 and the first container end 166. In examples where there is only one engaging surface between the clamp base 202 and the first container end 166 (i.e., between the upper edge 216 of the annular wall 212 and the internal ledge 194, or between the lower edge 190 and the upper surface 208 of the base platform 204), an O-ring or other seal is preferably provided on the engaging surface.

[0038] The clamp 200 also includes a clamping mechanism 222 for releasably connecting a first container end 166, received by a clamping opening 254, to a clamping base 202. The clamping mechanism 222 is movable relative to the clamping base 202 between a clamping position (shown in Figure 3) in which the clamping mechanism 222 connects the first container end 166 to the clamping base 202, and a release position (shown in Figure 4) in which the first container end 166 can be released from the clamping base 202. The clamping mechanism 222 is operably connected to one or more actuators 224 that move the clamping mechanism 222 between the clamping position and the release position. One or more actuators 224 may be automatically controlled by a controller (e.g., controller 140 shown in Figure 1) to move the clamping mechanism 222.

[0039] The clamping mechanism 222 includes clamping fingers 226 rotatably connected to the clamping base 202. The clamping base 202 includes multiple pairs of mounting brackets 228 positioned spaced apart along the periphery of the clamping base 202 beyond the base platform 204. Each clamping finger 226 is connected to the clamping base 202 via a pair of mounting brackets 228. In the exemplary clamp 200, the clamping mechanism 222 includes six clamping fingers 226 and corresponding six pairs of mounting brackets 228 positioned spaced apart along the periphery of the clamping base 202. The clamping mechanism 222 may alternatively include any suitable number of clamping fingers 226 and corresponding multiple pairs of mounting brackets 228. For example, the clamping mechanism 222 may include one clamping finger 226 and a corresponding pair of mounting brackets 228, or it may include two or more (e.g., two, three, four, five, or six or more) clamping fingers 226 and two or more (e.g., two, three, four, five, or six or more) corresponding mounting brackets 228. In some examples, each clamping finger 226 may be rotatably connected to the clamping base 202 by a single corresponding mounting bracket 228.

[0040] Each clamp finger 226 includes a pivot base 230 and a head 232 that protrudes outward beyond the pivot base 230. The pivot base 230 of each clamp finger 226 includes a shaft 234 that passes through the pivot base 230 and extends laterally outward from both sides of the clamp finger 226. The shaft 234 is inserted into a pair of holes 236 formed in a corresponding pair of mounting brackets 228, rotatably connecting the pivot base 230 between the mounting brackets 228. Each clamp finger 226 is rotatable by the rotation of the shaft 234 within the pair of holes 236, about a pivot axis that extends through the corresponding shaft 234 in a direction tangent to the periphery of the clamp base 202. Retaining elements (e.g., nuts, washers, etc.) may be provided to keep the shaft 234 within the pair of holes 236 while the clamp finger 226 rotates between the pair of mounting brackets 228.

[0041] The clamping fingers 226 are rotatable between an idle position (shown in Figure 4) corresponding to the release position of the clamping mechanism 222, in which the first container end 166 can be released from the clamping base 202, and an engaged position (shown in Figure 3) corresponding to the clamping position of the clamping mechanism 222, in which the clamping mechanism 222 connects the first container end 166 to the clamping base 202. In the engaged position, the outwardly projecting heads 232 of each clamping finger 226 extend beyond and engage with the outer surface 196 defined by the shoulder 192 of the ingot receiving container 160. The engagement between the heads 232 and the outer surface 196 facilitates the connection of the first container end 166 to the clamping base 202. In the idle position, the clamping fingers 226 are oriented at an oblique angle with respect to the longitudinal axis X so that the outer surface 196 and rim 188 of the ingot receiving container 160 do not interfere with the head 232, and the ingot receiving container 160 can be released from the clamping base 202 (for example, by an upward tensile force applied to the ingot receiving container 160).

[0042] The clamping mechanism 222 also includes a biasing element 242 (shown in Figure 6) that maintains the clamping finger 226 in an idle position (shown in Figure 4) and / or biases the clamping finger 226 to rotate toward the idle position (shown in Figure 4). In the exemplary clamp 200, the biasing element 242 is a spring clip. Each spring clip 242 includes a stationary portion connected to the upper surface 240 of the corresponding mounting bracket 228 and a flexible portion that is movable relative to the stationary portion. The flexible portion of each spring clip 242 is connected to the clamping finger 226. In particular, each clamping finger 226 includes a pair of tabs 238 extending laterally outward from both sides of the clamping finger 226, and the flexible portion of each spring clip 242 is connected to one of the tabs 238. In the idle or stationary state, when no external force is applied to the clamp finger 226 and / or spring clip 242, the deflected portion of each spring clip 242 is at an oblique angle to the stationary portion (as shown in Figure 6), thereby orienting the clamp finger 226 to the idle position shown in Figure 4. The deflected portion of each spring clip 242 is movable to a position substantially coplanar with the stationary portion (not shown) in response to an external force that biases the clamp finger 226 to rotate toward the base platform 204 to the engagement position shown in Figure 3. When the applied external force is released from the clamp finger 226, the deflected portion of each spring clip 242 deflects back to the idle or stationary state shown in Figure 6. This causes the deflected portion to bias the clamp finger 226 to rotate toward the idle position shown in Figure 4.

[0043] The clamping mechanism 222 also includes a support ring 244 that is movable relative to the clamp base 202 in order to selectively apply a force to the clamp fingers 226 that biases them toward the engagement position. The support ring 244 is connected to a guide rail 246 so as to slide. The guide rail 246 is connected to the clamp base 202 at spaced positions along the outer circumference of the clamp base 202 beyond the base platform 204. The guide rail 246 extends substantially parallel to each other between the clamp base 202 and the clamp cover 248. The clamp cover 248 is also connected to each guide rail 246 (for example, using fasteners 252 that connect the clamp cover 248 to the clamp housing 250) at positions corresponding to the guide rail positions on the clamp base 202. The guide rails 246 are inserted through holes 256 in the support ring 244, thereby slidably connecting the support ring 244 to the guide rails 246. The support ring 244 is annular and defines a ring opening 245 of a suitable size to provide clearance to the first container end 166 of the ingot receiving container 160, which is received by the clamp opening 254. This ensures that the ingot receiving container 160 does not obstruct the movement of the support ring 244 along the guide rail 246 between the clamp base 202 and the clamp cover 248.

[0044] The support ring 244 includes an inner surface 258 and an outer surface 260. A projection 262 extends inward from the inner surface 258. Holes 256 for receiving the guide rails 246 each extend through the projection 262. The support ring 244 also includes a window 264 extending through the space between the inner surface 258 and the outer surface 260. The window 264 is provided to receive one or more retaining pins 290, which will be described in more detail below, and / or to reduce the weight of the support ring 244.

[0045] The support ring 244 surrounds the clamp fingers 226. As the support ring 244 moves between the clamp base 202 and the clamp cover 248, the inner surface 258 of the support ring 244 faces the back surface 266 of each clamp finger 226, biasing the clamp finger 226 to rotate toward the engagement position (shown in Figure 3). The back surface 266 of the clamp finger 226 and the outwardly projecting head 232 define an "S" shaped clamp finger profile. As shown in Figures 3 and 4, the back surface 266 of each clamp finger 226 transitions from a concave portion adjacent to the pivot base 230 to a flat portion adjacent to the head 232. The support ring 244 includes tapered slots 268 defined in the inner surface 258 of the support ring 244 at the positions corresponding to the clamp fingers 226. The tapered slots 268 define inclined surfaces 270 extending between the upper surface 272 and the inner surface 258 of the support ring 244. Each inclined surface 270 complements the corresponding concave portion of the back surface 266 of the clamp finger 226, limiting or eliminating engagement between the support ring 244 and the clamp finger 226 when the support ring 244 is in a first position (shown in Figure 4) where it has descended to be adjacent to the clamp base 202.

[0046] When the support ring 244 is in a first position adjacent to the clamp base 202, the clamp fingers 202 are held in an idle position by the spring clip 242. As the support ring 244 moves from the first position toward a second position (shown in Figure 3) that is raised adjacent to the clamp cover 248, the engagement between the support ring 244 and the clamp fingers 226 gradually increases. As the support ring moves toward the second position, the inclined surface 270 engages with the flat surface portion of the back surface 266 of each corresponding clamp finger 226, biasing the clamp fingers 226 to rotate toward the engagement position. As the support ring 244 continues to move toward the second position, the engagement transitions so that the inner surface 258 engages with the flat surface portion of the back surface 266 of each clamp finger 226. At this stage, each clamp finger 226 is in an engaged position.

[0047] One or more actuators 224 of the clamp 200 are controllable to move the support ring 244 between a first position and a second position, corresponding to the clamp fingers 226 being in an idle position and an engaged position, and the clamp mechanism 222 being in a released position and an engaged position, respectively. In the exemplary clamp 200, one or more actuators 224 are pneumatic cylinders. In other examples, any suitable actuators may be used as one or more actuators 224 to enable the clamp 200 to function as described.

[0048] For example, one or more actuators 224 may include linear actuators, rotary actuators, hydraulic cylinders, electric actuators, and the like. One or more actuators 224 include two actuators 224 in the exemplary clamp 200. In other examples, more or fewer actuators 224 may be included to enable the clamp 200 to function as described. The actuators 224 are connected to a controller (for example, the controller 140 shown in Figure 1). The controller 140 controls one or more actuators to move the support ring 244 between a first position and a second position. One or more actuators 224 are sometimes referred to as two pneumatic cylinders 224, but this is for the sake of simplicity and does not limit the number or type of actuators 224 to any number or type.

[0049] In the illustrated clamp 200, pneumatic cylinders 224 are positioned on both sides of the clamp 200 to apply a balanced force to the support ring 244. One end of the pneumatic cylinder 224 is connected to the clamp base 202 via a base actuator mounting portion 274, and the other end of the pneumatic cylinder 224 is connected to the clamp cover 248 via a cover actuator mounting portion 276. Each pneumatic cylinder 224 is connected to a pressurized gas (e.g., compressed air) supply device (not shown) via a gas port 278. Each pneumatic cylinder 224 also includes a piston 280 that extends or retracts in response to compressed air supplied to or removed from the pneumatic cylinder 224. The piston 280 is connected to the support ring 244 via piston mounting portions 282 extending from the outer surface 260 of the support ring 244, with the piston mounting portions 282 provided on both sides of the support ring 244 corresponding to the positions in which the pneumatic cylinders 224 are positioned. As the piston 280 extends and retracts, the support ring 244 moves between a first position and a second position. The controller 140 may control the movement of the support ring 244 by controlling the compressed air supplied from or removed from the pneumatic cylinder to selectively extend or retract the piston 280. The movement of the support ring 244 between the first and second positions may, additionally or alternatively, be manually controlled by the operator via one or more bars 284 extending outward from the outer surface 260 of the support ring 244.

[0050] As shown in Figure 5, the bar 284 extends outward beyond the clamp housing 250 so that an operator can access and grip the bar 284. A slot 286 extending between the clamp base 202 and the clamp cover 248 is defined in the clamp housing 250 to provide clearance for the bar 284 as the support ring 244 moves between a first position and a second position. The operator may move the support ring 244 from the first position to the second position by applying an upward tensile force to the bar 284, or move the support ring 244 from the second position to the first position by applying a downward pushing force to the bar 284.

[0051] The clamp 200 also includes a retaining pin assembly 288 that facilitates selectively maintaining the support ring 244 in a second position. The retaining pin assembly 288 is attached to the clamp cover 248 by a mounting platform 291 connected (e.g., using fasteners) to a retaining pin mounting portion 289 on the clamp cover 248. The retaining pin assembly 288 includes a retaining pin 290 that selectively translates into and out of one of the windows 264 of the support ring 244. The retaining pin 290 is operably connected via a plate 292 to a motor 294 (e.g., a pneumatic actuator, or an electrically controllable actuator including but not limited to an electric motor, servo motor, stepping motor, etc.). The motor 294 is mounted on the mounting platform 291. The motor 294 operates to move the plate 292 linearly relative to the motor 294 and the mounting platform 291. The linear motion of plate 292 causes the retaining pin 290 to move into or out of one of the windows 264. The motor 294 may be connected to a controller (e.g., controller 140). The controller 140 may control the motor 294 to translate the retaining pin 290 so that it moves into or out of one of the windows 264.

[0052] Additionally or alternatively, the retaining pin assembly 288 may include a manual gear drive unit 296 operably connected to the plate 292, which allows an operator to translate the retaining pin 290 into or out of one of the windows 264. The manual gear drive unit 296 includes a manual drive wheel 298. The rotation of the manual drive wheel 298 (e.g., by the operator) is converted by the manual gear drive unit 296 into linear motion of the plate 292 and translational motion of the retaining pin 290. When the retaining pin 290 is selectively inserted into one of the windows 264 using the motor 294 and / or the manual gear drive unit 296, the retaining pin 290 facilitates maintaining the support ring 244 in a second position by restricting or preventing the support ring 244 from moving to a first position (i.e., descending).

[0053] Next, referring to Figures 1 to 6, and further to Figures 7 to 9, the operation of the clamp 200 for releasably connecting the first container end 166 of the ingot receiving container 160 to the second valve end 156 of the isolation valve 150 will be described. Figures 7 and 8 are perspective views showing the clamp 200 alone and illustrate the steps in the sequence for moving the clamping mechanism 222 of the clamp 200 between the released position (also shown in Figures 7 and 4) and the clamped position (also shown in Figures 8 and 3), respectively. Figure 9 is a perspective view showing the clamp 200 alone and illustrates the steps in the sequence of Figures 7 and 8, in which the retaining pin assembly 288 is used to maintain the clamping mechanism 222 in the clamped position. In Figures 7 to 9, the clamp housing 250 is omitted to illustrate the operation of the clamp 200.

[0054] During operation, the clamp base 202 of the clamp 200 is first connected to the second valve end 156 of the isolation valve 150, and the first container end 166 of the ingot receiving container 160 is received by the clamp opening 254. An O-ring 186 provided between the bottom surface 206 of the clamp base 202 and the flange 176 of the second valve end 156 forms a seal between them. Once the first container end 166 is received by the clamp opening 254 and supported on the clamp base 202, the annular wall 212 of the clamp base is received by the rim 188 of the first container end 166, and the upper edge 216 of the annular wall 212 engages with the internal ledge 194 of the ingot receiving container 160. An O-ring 220 provided between the upper edge 216 of the annular wall 212 and the internal ledge 194 forms a seal between them. The seals formed by the O-rings 186 and 220 facilitate the prevention of leakage of process gases and other reaction by-products from the valve passage 158, the central opening 214 of the clamp 200, and the internal channels formed by the ingot receiving chamber 162.

[0055] When the first container end 166 is received in the clamp opening 254, the clamping mechanism 222 is in the released position (Figures 4 and 7), providing clearance for the rim 188 of the first container end 166 to reach and seat on the upper surface 208 of the clamp base 202. When the clamping mechanism 222 is in the released position, the support ring 244 is in a first position adjacent to the clamp base 202, and the clamping fingers 226 are oriented in the idle position as shown in Figures 4 and 7, so that the heads 232 of the clamping fingers 226 do not obstruct the downward movement of the first container end 166 toward the clamp base 202. The clamping fingers 226 are preferably held in the idle position by a spring clip 242.

[0056] When the first container end 166 is seated on the upper surface 208 of the clamp base 202, the clamping mechanism 222 may be moved to a clamping position (Figures 3 and 8) to connect the first container end 166 to the clamp base 202. To move the clamping mechanism 222 to the clamping position, the support ring 244 is moved along the guide rail 246 in the direction of the longitudinal axis X toward a second position adjacent to the clamp cover 248 (for example, raised). The support ring 244 may also be moved toward the second position via a controller 140 that controls the piston 280 of a pneumatic cylinder 224 to move the support ring 244 toward the clamp cover 248.

[0057] Additionally or alternatively, the support ring 244 may be manually moved toward a second position by an operator using an outwardly extending bar 284. When the support ring 244 is moved toward the second position, the inclined surfaces 270 of the support ring 244 engage with the back surfaces 266 of the clamp fingers 226, biasing the clamp fingers 226 to rotate toward the engagement position, and the inner surface 258 of the support ring 244 subsequently engages with the flat surface portion of the back surfaces 266 of the clamp fingers 226. When the clamp fingers 226 are in the engagement position, the outwardly projecting heads 232 of each clamp finger 226 extend onto the outer surface 196 and engage, connecting the first container end 166 to the clamp base 202, restricting or preventing the ingot receiving container 160 from opening from the clamp 200. When the support ring is in the first position, the engagement between the inner surface 258 of the support ring 244 and the flat surface portion of the back surface 266 of the clamp finger 226 limits or prevents the clamp finger 226 from disengaging from the outer surface 196 and rotating toward the idle position.

[0058] The retaining pin assembly 288 may then engage with the support ring 244 (Figure 9) to maintain the support ring 244 in a second position. The retaining pin 290 moves toward one of the windows 264 of the support ring 244, enters the window 264, and restricts or prevents the support ring 244 from moving to the first position (i.e., descending). The retaining pin 290 may be translated into one of the windows 264 by the operation of a motor 294 controlled by the controller 140 and / or by the operation of a manual gear drive 296 by an operator. By maintaining the support ring 244 in a second position, the retaining pin assembly 288 facilitates the maintenance of the clamping finger 226 in the engaged position, thereby maintaining the clamping mechanism in the clamped position and connecting the first container end 166 to the clamping base 202.

[0059] With the first container end 166 connected to the clamp base 202 (shown in Figure 4), the ingot growth process may proceed as described above. The isolation valve 150 is opened to provide communication between the growth chamber 108 and the ingot receiving chamber 162. The growing ingot is pulled up in the direction of the longitudinal axis X, passing through the growth chamber 108, valve passage 158, central opening 214, and clamp opening 254, and finally entering the ingot receiving chamber 162. After the ingot growth process, the isolation valve 150 may be closed to isolate the growth chamber 108, and the ingot receiving container 160 may be released from the clamp 200 to allow the fully grown ingot to be subsequently removed from the ingot receiving chamber 162. To easily release the ingot receiving container 160 from the clamp 200, the retaining pin 290 is moved out of one of the windows 264 of the support ring 244 (for example, using a motor 294 controlled by the controller 140 and / or a manual gear drive 296), and the support ring 244 is moved to a second position (e.g., lowered) (for example, using a pneumatic cylinder 224 controlled by the controller 140 and / or using a bar 284 manually). When the support ring 244 is moved to the second position, the spring clip 242 biases the clamp finger 226 to rotate toward the idle position, in which the head 232 disengages from the outer surface 196 and does not prevent the first container end 166 from moving upward. The ingot receiving container 160 may then be released from the clamp base 202 (for example, by an upward tensile force applied to the ingot receiving container 160).

[0060] Advantageously, the examples described herein include a clamp for selectively connecting and disconnecting an ingot receiving container to an isolation valve in an apparatus used for manufacturing single-crystal semiconductor ingots. The exemplary clamp is provided for automatic control of the connecting and disconnecting operations. Automatic control of the clamp facilitates the reduction or elimination of operator error in clamp installation and / or creates opportunities for a fully automated ingot growth process using the apparatus. The clamp also includes components that allow for manual operation of the clamp in the event of controller error or failure.

[0061] The clamp can also form a seal between the ingot receiving vessel and the isolation valve, facilitating the restriction or prevention of process gases or other reaction byproducts from leaking out of the apparatus. Although the clamp is described for use in apparatus for single-crystal ingot growth processes, the clamp may be implemented in additional and / or alternative applications.

[0062] The terms “about,” “substantially,” “essentially,” and “approximately,” when used in relation to a range of dimensions, density, temperature, or other physical or chemical properties or characteristics, mean to include any variation that may exist at the upper and / or lower limits of the range of the property or characteristic. Such variation includes, for example, variations resulting from rounding, measurement methods, or other statistical variations.

[0063] When describing elements of this disclosure or embodiments thereof, the articles “a,” “an,” “the,” and “said” are intended to indicate that there is one or more elements. The terms “comprising,” “including,” and “having” are intended to indicate comprehensiveness and that additional elements other than those listed may exist. The use of terms indicating specific orientations (e.g., “top,” “bottom,” “side,” “horizontal,” “vertical,” and “lateral”) is for convenience only and does not require a specific orientation of the described articles.

[0064] Because various modifications are possible in the above-described structure and method without departing from the scope of this disclosure, all matters included in the above description and shown in the accompanying drawings are intended to be interpreted as illustrative rather than restrictive.

Claims

1. An ingot pulling apparatus for manufacturing single-crystal semiconductor ingots, wherein the ingot pulling apparatus is A housing that defines the growth chamber and the growth chamber outlet, An isolation valve having a first valve end connected to the outlet of the growth chamber and a second valve end on the opposite side, An ingot receiving chamber, and an ingot receiving container that defines the inlet of the receiving chamber, provided at the end of the receiving container, A clamp comprising: a clamp base connected to the second valve end; a clamp mechanism that releasably connects the end of the receiving container to the clamp base; and at least one actuator controllable to move the clamp mechanism between a clamp position in which the clamp mechanism connects the end of the receiving container to the clamp base and a release position in which the end of the receiving container can be released from the clamp base; A controller connected to the at least one actuator, which controls the at least one actuator to move the clamping mechanism between the clamping position and the release position. An ingot lifting device equipped with [a specific feature].

2. The clamping mechanism is At least one clamping finger rotatably connected to the clamping base, A support ring is movable relative to the clamp base between a first position where the clamp mechanism is in the released position and a second position where the clamp mechanism is in the clamped position. Equipped with, At least one actuator is controllable to move the support ring between the first position and the second position, The ingot lifting device according to claim 1, wherein the support ring biases the at least one clamp finger and rotates it to engage with the end of the receiving container when the support ring moves from the first position to the second position.

3. The ingot lifting device according to claim 2, wherein the at least one clamping finger comprises two or more clamping fingers rotatably connected to the clamping base.

4. The ingot lifting device according to claim 2, wherein the at least one clamping finger comprises six clamping fingers rotatably connected to the clamping base.

5. The ingot lifting device according to claim 2, wherein the clamp comprises at least one biasing element that biases the at least one clamp finger to rotate so as the support ring moves from the second position to the first position, causing it to disengage from the end of the receiving container.

6. The ingot lifting device according to claim 2, wherein the clamp comprises a retaining pin for selectively maintaining the support ring in the second position.

7. The ingot lifting device according to claim 6, wherein the retaining pin is operably connected to a motor that causes the retaining pin to translate in order to selectively maintain the support ring in the second position, and the motor is connected to the controller.

8. The ingot lifting device according to claim 1, wherein the at least one actuator comprises a pneumatic cylinder.

9. An ingot pulling apparatus for manufacturing single-crystal semiconductor ingots, wherein the ingot pulling apparatus is A housing that defines the growth chamber and the growth chamber outlet, An isolation valve having a first valve end connected to the outlet of the growth chamber and a second valve end on the opposite side, An ingot receiving chamber, and an ingot receiving container that defines the inlet of the receiving chamber, provided at the end of the receiving container, A clamp comprising a clamp base connected to the second valve end, at least one clamp finger rotatably connected to the clamp base and releasably connecting the end of the receiving container to the clamp base, and a support ring movable relative to the clamp base between a first position and a second position. Equipped with, An ingot lifting device wherein the support ring biases the at least one clamp finger to rotate so as to engage with the end of the receiving container when the support ring moves from the first position to the second position and connects the end of the receiving container to the clamp base.

10. The ingot lifting device according to claim 9, wherein the clamp comprises at least one biasing element that biases the at least one clamp finger to rotate so as the support ring moves from the second position to the first position, causing it to disengage from the end of the receiving container.

11. The ingot lifting device according to claim 9, wherein the clamp comprises at least one actuator controllable to move the support ring between the first position and the second position.

12. The ingot lifting device according to claim 11, wherein the at least one actuator comprises a pneumatic cylinder.

13. The ingot lifting device according to claim 9, wherein the clamp comprises at least one bar extending outward from the support ring to allow an operator to manually move the support ring between the first position and the second position.

14. The clamp mentioned above is An opening of a size to receive the end of the receiving container is defined, and a clamp cover facing the clamp base and A guide rail extending between the clamp base and the clamp cover Equipped with, The ingot lifting device according to claim 9, wherein the support ring is movable along the guide rail between a first position in which the support ring is adjacent to the clamp base and a second position in which the support ring is adjacent to the clamp cover.

15. The clamp base is The surface on which the receiving container end sits when the receiving container end is connected to the clamp base, An O-ring that forms a seal between the surface of the clamp base and the end of the receiving container. An ingot lifting device according to claim 9, having the following:

16. The ingot lifting device according to claim 9, wherein the clamp comprises a retaining pin for selectively maintaining the support ring in the second position.

17. The ingot lifting device according to claim 16, wherein the retaining pin is operably connected to a motor that causes the retaining pin to translate in order to selectively maintain the support ring in the second position.

18. The ingot lifting device according to claim 16, wherein the retaining pin is operably connected to a manual gear drive, allowing an operator to manually translate the retaining pin in order to selectively maintain the support ring in the second position.

19. A releasable clamp for releasably connecting an ingot receiving container of an ingot lifting device to an isolation valve, wherein the releasable clamp is A clamp base that can be connected to the end of the isolation valve, A clamp cover facing the clamp base, wherein the clamp cover defines an opening of a size that receives the end of the ingot receiving container, A clamping finger rotatably connected to the clamping base, A support ring movable relative to the clamp base between a first position and a second position, wherein the support ring biases the clamp fingers as it moves from the first position to the second position, causing the end of the ingot receiving container to rotate to an engagement position adapted for connecting to the clamp base; The support ring is controlled to move between the first and second positions by at least one actuator. A releasable clamp equipped with a retractable clamp.

20. The releaseable clamp includes a biasing element corresponding to each clamping finger, The releasable clamp according to claim 19, wherein each biasing element biases the corresponding clamping finger to rotate it from the engagement position when the support ring moves from the second position to the first position.

Images