Rotating substrate support for aligning substrates

Abstract

Multiple embodiments of substrate supports for aligning a substrate are provided herein. In some embodiments, the substrate support for aligning a substrate includes a rotary assembly comprising a base plate, a stator coupled to the base plate, and a rotor rotatably coupled to the stator via bearings positioned between the stator and the rotor; a bellows assembly fixed to the rotor; a lever having a first end coupled to the rotor and a second end configured to be coupled to an actuator; and a chuck assembly positioned on the base plate and fixedly coupled to the bellows assembly. In this case, the chuck assembly is capable of rotational and axial movement along a central axis relative to the base plate, and rotation of the lever around the central axis rotates the bellows assembly and the chuck assembly relative to the base plate in order to align the substrate with respect to the base plate.

Description

Technical Field

[0001]

[0001] Embodiments of the present disclosure generally relate to a substrate processing apparatus.

Background Art

[0002]

[0002] Printing systems including scanners are suitable for various applications, including printing text on paper, patterning photoresist during integrated circuit manufacturing, and generating masks or reticles for projection photolithography systems. In integrated circuit applications, laser printing systems typically require sub-micron accuracy. A concern for precise scanners is the orientation of the workpiece (or photomask) with respect to the laser beam. When the propagation direction and the scanning direction are not on the same straight line, the sharpness of the edge may be reduced by turning the beam on and off, or unwanted skew or directional bias may occur in the pattern to be irradiated. However, conventional methods of rotating and aligning photomasks can be overly complex and lack accuracy.

[0003]

[0003] Accordingly, the inventors have provided herein several embodiments of an improved laser printing system.

Summary of the Invention

[0004]

[0004] Multiple embodiments of substrate supports for aligning a substrate are provided herein. In some embodiments, the substrate support for aligning a substrate includes a rotary assembly comprising a base plate, a stator coupled to the base plate, and a rotor rotatably coupled to the stator via bearings positioned between the stator and the rotor, a bellows assembly fixed to the rotor, a lever having a first end coupled to the rotor and a second end configured to be coupled to an actuator, and a chuck assembly positioned on the base plate and fixedly coupled to the bellows assembly. In this case, the chuck assembly is capable of rotational and axial movement along a central axis relative to the base plate, and rotation of the lever around the central axis rotates the bellows assembly and the chuck assembly relative to the base plate in order to align the substrate relative to the base plate.

[0005]

[0005] In some embodiments, a substrate support for aligning a substrate includes a stage configured for movement along the x, y, and z directions, and a part holder assembly disposed on the stage. The part holder assembly includes a rotary assembly including a base plate, a stator coupled to the base plate, and a rotor rotatably coupled to the stator via bearings disposed between the stator and the rotor, a bellows assembly fixed to the rotor and configured for vertical movement, a lever having a first end coupled to the rotor and a second end coupled to an actuator, and a chuck assembly disposed on the base plate and fixedly coupled to the bellows assembly. In this case, the chuck assembly is capable of rotational and axial movement along a central axis relative to the base plate, and rotation of the lever around the central axis rotates the chuck assembly relative to the base plate to align the substrate relative to the base plate.

[0006]

[0006] In some embodiments, a laser printing system for processing a photomask includes a housing that defines an internal space and a substrate support disposed within the internal space. The substrate support includes a rotary assembly including a base plate, a stator coupled to the base plate, and a rotor rotatably coupled to the stator via bearings disposed between the stator and the rotor, a bellows assembly fixed to the rotor, a lever having a first end coupled to the rotor and a second end coupled to an actuator, a chuck assembly disposed on the base plate and fixedly coupled to the bellows assembly, wherein the chuck assembly is capable of rotational and axial movement along a central axis relative to the base plate, and rotation of the lever around the central axis rotates the chuck assembly relative to the base plate to align the substrate with respect to the base plate, and an edge finder disposed above the base plate, the edge finder configured to facilitate finding the edges of the photomask when the photomask is placed on the chuck assembly.

[0007]

[0007] Other and further embodiments of the present disclosure are described below.

[0008]

[0008] Embodiments of the present disclosure, which are briefly summarized above and described in more detail below, can be understood by referring to exemplary embodiments of the present disclosure shown in the accompanying drawings. However, since the present disclosure may allow for other equally valid embodiments, the accompanying drawings show only typical embodiments of the present disclosure and should not be considered limiting in scope. [Brief explanation of the drawing]

[0009] [Figure 1]

[0009] A schematic isometric view of a laser printing system according to at least some embodiments of the present disclosure is shown. [Figure 2]

[0010] A schematic cross-sectional side view of a substrate support used in a laser printing system according to at least some embodiments of the present disclosure is shown. [Figure 3]

[0011] This shows an enlarged schematic cross-sectional view of the gas port region of a substrate support according to at least some embodiments of the present disclosure. [Figure 4]

[0012] A schematic partial bottom view of a substrate support according to at least some embodiments of the present disclosure is shown. [Figure 5]

[0013] A schematic cross-sectional side view of a substrate support used in a laser printing system according to at least some embodiments of the present disclosure is shown. [Modes for carrying out the invention]

[0010]

[0014] For ease of understanding, the same reference numerals have been used to indicate identical elements common to the figures where possible. The figures are not to scale and may be simplified for clarity. Elements and features of one embodiment may be usefully incorporated into other embodiments without further description.

[0011]

[0015] Multiple embodiments of substrate supports used in laser writing systems, such as laser printing systems, are provided herein. A substrate support may generally include a chuck assembly having a support surface. The chuck assembly is positioned on a base plate. In this case, the chuck assembly is rotatably coupled to the base plate to align a substrate (such as a photomask) when placed on the chuck assembly. The base plate is coupled to an actuator configured to rotate the chuck assembly for precise substrate alignment. A gas source may be coupled to the substrate support and configured to supply gas to the area between the chuck assembly and the base plate in order to raise the chuck assembly relative to the base plate. Once the chuck assembly is raised, the actuator can be moved to rotate the chuck assembly to the desired position. Once the chuck assembly is aligned, it can then be lowered and held or clamped to the base plate by any suitable method to maintain the desired position. Conventional devices for rotating the chuck assembly may use excessive piping and electrical wiring. The multiple embodiments of substrate supports provided herein are advantageous in that they reduce component complexity and facilitate ease of assembly and maintenance.

[0012]

[0016] Figure 1 shows a schematic isometric view of a laser printing system 100 according to at least some embodiments of the present disclosure. The laser printing system 100 may be a laser photomask writing device, etc. The laser printing system 100 may have a housing 102 defining an internal space 118. A substrate support 110 is positioned within the internal space 118 to support a substrate 116. In some embodiments, the substrate 116 is a photomask. However, the substrate 116 may be any other suitable substrate used in the semiconductor industry. The substrate support 110 generally comprises a part holder assembly 104 and a stage 108. In this case, the stage 108 is positioned below the part holder assembly 104.

[0013]

[0017] The stage 108 is configured to move the part holder assembly 104 along one or more of the x-direction 120, y-direction 130, and z-direction 140. Thus, the stage 108 may be coupled to a motion control device 150 configured to move the stage 108. The motion control device 150 may comprise any suitable electronic devices, such as one or more motors, one or more actuators, and associated operable structures, such as gears, belts, and chains. The stage 108 may comprise one or more plates. For example, the stage 108 comprises a first plate that enables movement in the x-direction 120 and a second plate that enables movement in the y-direction 130. Thereafter, the first and second plates together are configured to move the stage in the x-direction 120 and the y-direction 130.

[0014]

[0018] The part holder assembly 104 generally includes a base plate 112 and a chuck assembly 122 configured to support a substrate and supported by the base plate 112. In some embodiments, the base plate 112 is formed of glass. The chuck assembly 122 is rotatable relative to the base plate 112. Thereafter, when the substrate 116 is placed on the chuck assembly 122, it can be aligned with the base plate 112 and, consequently, with the stage 108. In some embodiments, an edge finder 126 is positioned above the base plate 112 and is configured to facilitate the detection of the edges 119 of the substrate 116 when the substrate 116 is placed on the chuck assembly 122. A laser assembly 132 is positioned above the base plate 112 and is configured to generate a pattern on the substrate 116. The laser assembly 132 may comprise one or more lasers 134 suitable for generating the pattern.

[0015]

[0019] In some embodiments, a gas source 160 is coupled to the substrate support 110 and configured to supply gas to the region between the chuck assembly 122 and the base plate 112 (described in more detail with reference to Figure 3) in order to raise the chuck assembly 122 relative to the base plate 112. In some embodiments, the substrate support 110 is coupled to a vacuum source 170 configured to vacuum chuck the chuck assembly 122 to the base plate 112 after alignment, thereby advantageously reducing or preventing movement of the chuck assembly 122 relative to the base plate 112 once it has been aligned. In some embodiments, the vacuum source 170 may be configured to vacuum chuck the substrate 116 to the chuck assembly 122 once it has been aligned. The vacuum source 170 may generally comprise a pump and associated valves. In some embodiments, the chuck assembly 122 may be mechanically held relative to the base plate 112 after alignment. For example, a clamp 152 coupled to a stage 108 or the base plate 112 may hold the chuck assembly 122 relative to the base plate 112.

[0016]

[0020] The laser printing system 100 may include a controller 171 for controlling the operation of the laser printing system 100. The controller 171 generally includes a central processing unit (CPU) 172, memory 174, and support circuitry 176. The CPU 172 may be one of any form of general-purpose computer processor available for use in industrial settings. The support circuitry 176 is conventionally coupled to the CPU 172 and may include a cache, clock circuitry, input / output subsystems, power supply, etc. Software routines, such as the processing methods described herein, may be stored in memory 174 and, when executed by the CPU 172, translate the CPU 172 to the controller 171. The software routines may also be stored and / or executed by a second controller (not shown) located remotely from the laser printing system 100.

[0017]

[0021] During operation, the controller 171 enables data collection and feedback from the laser printing system 100 and provides instructions to system components in order to optimize the performance of the laser printing system 100. For example, the controller 171 may be configured to use data from the edge finder 126 to locate the substrate 116 and to provide instructions to the laser printing system 100 to control the rotational position of the chuck assembly 122 relative to the base plate 112. Memory 174 may be a non-temporary computer-readable medium containing instructions. When these instructions are executed by the CPU 172 (or controller 171), they perform the methods described herein.

[0018]

[0022] Multiple embodiments of this disclosure may be implemented in hardware, firmware, software, or any combination thereof. Alternatively, multiple embodiments may be implemented as instructions stored using one or more computer-readable media, which can be read and executed by one or more processors. The computer-readable media may include any mechanism for storing or transmitting information in a format readable by a machine (e.g., a computing platform, or “virtual machines” running on one or more computing platforms). For example, the computer-readable media may include any suitable form of volatile or non-volatile memory. In some embodiments, the computer-readable media may include non-temporary computer-readable media.

[0019]

[0023] Figure 2 shows a schematic cross-sectional side view of a substrate support 110 used in a laser printing system according to at least some embodiments of the present disclosure. The part holder assembly 104 includes a bellows assembly 204 coupled to a chuck assembly 122. The bellows assembly 204 includes a bellows 248 which may be formed of metal. The bellows 248 may have circular pleats. The circular pleats allow the bellows 248 to expand vertically while the chuck assembly 122 remains fixed so as not to rotate. For example, the bellows assembly 204 generally provides vertical flexibility of the chuck assembly 122 relative to the base plate 112 while limiting rotational flexibility relative to the base plate 112. The base plate 112 includes an opening 208, and a portion of the bellows assembly 204 extends through the opening 208 while maintaining a gap 212 between the bellows assembly 204 and the side wall of the opening 208.

[0020]

[0024] In some embodiments, the base plate 112 includes one or more through holes 214, and the part holder assembly 104 includes gas ports 218 fluidly coupled to one or more through holes 214. The gas ports 218 may be coupled to a gas source 160 and configured to facilitate gas flow to the underside 228 of the chuck assembly 122 in order to raise the chuck assembly 122 relative to the base plate 112. The gas ports 218 may also be advantageously coupled to a vacuum source 170 to provide a vacuum chuck between the base plate 112 and the chuck assembly 122. In some embodiments, the part holder assembly 104 may include separate ports for supplying gas to the underside 228 and for providing a vacuum chuck.

[0021]

[0025] In some embodiments, as shown in Figure 5, the chuck assembly 122 may include one or more holes 526 configured for vacuum chucking the substrate 116 into the chuck assembly 122. In some embodiments, one or more holes 526 have a diameter less than one or more through holes 214.

[0022]

[0026] Referring back to FIG. 2, the part holder assembly 104 includes a rotary assembly 230 that includes, for example, a stator 234 coupled to the base plate 112 via one or more fasteners 219, and a rotor 238 rotatably coupled to the stator 234 via a bearing 242 disposed between the stator 234 and the rotor 238. The stator 234 comprises the stationary components of the rotary assembly 230 fixed to the base plate 112. The bellows assembly 204 is fixed to the rotor 238 and configured for vertical movement. The bellows assembly 204 rotates with the rotor 238. In some embodiments, the rotor 238 comprises a cup 244. In some embodiments, the bellows assembly 204 includes a bellows 248 partially disposed within the cup 244. In some embodiments, the lower flange 252 of the bellows 248 is coupled to the lower portion 245 of the cup 244 via, for example, one or more fasteners 215. In some embodiments, the upper flange 254 of the bellows 248 is coupled to the chuck assembly 122 via, for example, one or more fasteners 217.

[0023]

[0027] The part holder assembly 104 includes a lever 262 having a first end 264 coupled to the rotor 238 and a second end 266 coupled to the actuator 280. In some embodiments, the lever 262 is coupled to the rotor 238 via one or more fasteners 231. The chuck assembly 122 is disposed on the base plate 112 and fixedly coupled to the bellows assembly 204. The chuck assembly 122 is capable of rotational movement and axial (e.g., z-direction 140) movement about the central axis 268 relative to the base plate 112. Rotation of the lever 262 about the central axis 268 via the actuator 280 rotates the chuck assembly 122 relative to the base plate 112 to align the substrate with respect to the base plate. The actuator 280 is configured to provide an accurate rotational movement of the lever 262. For example, the actuator 280 is configured to rotate the chuck assembly 122 by plus or minus approximately 5 degrees about the central axis 268.

[0024]

[0028] FIG. 3 shows an enlarged view of the gas port region 300 of the substrate support 210 according to at least some embodiments of the present disclosure. The gas port 218 may be defined within a bushing 302 coupled to the base plate 112. In some embodiments, a body 308 is coupled to the bushing 302 to facilitate coupling a conduit 304 to the gas port 218 to provide either gas or vacuum to the gas port 218. For example, the conduit 304 may be selectively coupled to a first port 312 for receiving gas from a gas source 160 and a second port 316 coupled to a vacuum source 170. In some embodiments, a junction 314 is disposed proximate to the intersection between the conduit 304, the first port 312, and the second port 316. In some embodiments, the junction 314 includes one or more valves for selective opening and closing of the first port 312 and the second port 316. In some embodiments, the junction 314 is a T-shaped junction having no valves or flow restrictions.

[0025]

[0029] In some embodiments, the lower side 228 of the chuck assembly 122 includes a channel 318 that defines a confinement space 310 located between the chuck assembly 122 and the base plate 112 adjacent to the gas port 218. In some embodiments, the channel 318 is an annular channel. In some embodiments, the channel 318 has a width greater than the diameter of one or more through holes 214. The confinement space 310 is advantageous in that gas from the gas source 160 spreads into it, thereby providing a larger space to provide greater force to the lower side 228 to raise the chuck assembly 122 slightly above the upper surface 326 of the base plate 112. When the chuck assembly 122 is raised, the chuck assembly 122 can be rotated via the lever 262 with minimal or no frictional force generated between the upper surface 326 of the base plate 112 and the lower side 228 of the chuck assembly 122.

[0026]

[0030] Figure 4 shows a schematic partial bottom view of a substrate support 110 according to at least some embodiments of the present disclosure. The actuator 270 is coupled to the second end 266 of the lever 262. In some embodiments, the actuator is a linear actuator. A power supply 410 may be coupled to the actuator 270 to provide power to the actuator 270 in order to move the actuator shaft 402. In some embodiments, the shaft 402 may be actuated via a gas pressure line.

[0027]

[0031] In some embodiments, the lever 262 includes a circular plate 426 coupled to a rotor 238 and an elongated arm 436 extending from the circular plate 426 and having a second end 266 of the lever 262. In some embodiments, a flexible portion 412 is positioned between the second end 266 of the lever 262 and the actuator 270 and coupled to the second end 266 of the lever 262 and the actuator 270. Advantageously, the flexible portion 412 can facilitate the conversion of the linear motion of the shaft 402 into the rotational motion of the lever 262.

[0028]

[0032] While the foregoing applies to several embodiments of the present disclosure, other embodiments and further embodiments of the present disclosure may be devised without departing from the fundamental scope of the present disclosure.

Claims

1. A substrate support for aligning substrates, A part holder assembly, Base plate, A rotary assembly comprising a stator coupled to the base plate, and a rotor rotatably coupled to the stator via bearings positioned between the stator and the rotor, The bellows assembly fixed to the rotor, A lever having a first end connected to the rotor and a second end configured to be connected to the actuator, A part holder assembly comprising a chuck assembly configured to support the substrate, the chuck assembly being placed on the base plate and fixedly coupled to the bellows assembly, A substrate support wherein the chuck assembly is capable of rotational and axial movement along a central axis relative to the base plate, and when the substrate is placed on the chuck assembly, the rotation of the lever around the central axis causes the bellows assembly and the chuck assembly to rotate relative to the base plate in order to align the substrate with the base plate.

2. The substrate support according to claim 1, further comprising an actuator coupled to the second end of the lever.

3. The substrate support according to claim 2, further comprising a flexible portion disposed between the second end of the lever and the actuator.

4. The substrate support according to claim 2, wherein the actuator is a linear actuator configured to move the lever in order to rotate the chuck assembly.

5. The substrate support according to claim 1, wherein the substrate support includes a gas port, the gas port is fluidly coupled to a through-hole in the base plate configured to promote gas flow to the underside of the chuck assembly in order to raise the chuck assembly relative to the base plate and expand the bellows of the bellows assembly.

6. The substrate support according to claim 5, further comprising a confinement space disposed between the chuck assembly and the base plate adjacent to the gas port.

7. The substrate support according to any one of claims 1 to 6, wherein the base plate includes one or more holes configured for vacuum chucking the chuck assembly to the base plate.

8. The substrate support according to any one of claims 1 to 6, further comprising a clamp configured to selectively hold the chuck assembly with respect to the base plate.

9. The substrate support according to any one of claims 1 to 6, wherein the rotor comprises a cup, the bellows assembly comprises a bellows partially disposed within the cup, the lower flange of the bellows being coupled to the lower part of the cup, and the upper flange of the bellows being coupled to the chuck assembly.

10. A substrate support for aligning substrates, A stage configured for movement along the x, y, and z directions, A substrate support comprising a part holder assembly according to any one of claims 1 to 6, disposed on the stage.

11. The substrate support according to claim 10, wherein the base plate includes through holes, and the part holder assembly includes gas ports fluidly coupled to the through holes.

12. The substrate support according to any one of claims 1 to 6, wherein the substrate is a photomask.

13. The substrate support according to any one of claims 1 to 6, wherein the base plate is formed of glass.

14. The substrate support according to any one of claims 1 to 6, wherein the base plate includes an opening, and a portion of the bellows assembly extends through the opening while maintaining a gap between the bellows assembly and the side wall of the opening.

15. A laser printing system for processing photomasks, Enclosure that defines the internal space, A substrate support according to any one of claims 1 to 6, disposed within the internal space, and A laser printing system comprising an edge finder positioned above the base plate, configured to facilitate the locating of the edges of the photomask when the photomask is positioned on the chuck assembly.

16. The laser printing system according to claim 15, further comprising a stage disposed in the internal space below the base plate, configured to move the base plate along the x, y, and z directions.

17. The laser printing system according to claim 15, further comprising a gas source coupled to the substrate support, configured to supply gas to a region between the chuck assembly and the base plate in order to raise the chuck assembly relative to the base plate.

18. The laser printing system according to claim 15, further comprising a laser assembly positioned above the base plate, the laser assembly configured to generate a pattern on the photomask when the photomask is positioned on the chuck assembly.

19. The laser printing system according to claim 15, further comprising a clamp configured to selectively hold the chuck assembly with respect to the base plate.

20. The laser printing system according to claim 15, wherein the base plate includes one or more holes configured for vacuum chucking the chuck assembly to the base plate.

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