Jet Module and Active Jet System

Abstract

To provide a jet module and an active jet system including the jet module, which can replace a conventional pipe heating belt and effectively solve the problem of pipe clogging. [Solution] The jet module has an apparatus body, and a transport chamber and an annular airflow generating chamber are provided inside the apparatus body. A gas input section is provided at one end of the apparatus body, and a gas output section is provided at the other end of the apparatus body. An airflow introduction section extending outward is formed on the side of the apparatus body. The transport chamber, gas input section, and gas output section are mutually connected, and the transport chamber, annular airflow generating chamber, and airflow introduction section are also mutually connected. The annular airflow generating chamber has a side connection section and a nozzle section, and the side connection section and the nozzle section are mutually connected. The side connection section is connected to the airflow introduction section, and the nozzle section is connected to the transport chamber. The nozzle section generates a push airflow toward the transport chamber through a predetermined path.

Description

[Technical field]

[0001] The present invention relates to a jet module and an active jet system, and more particularly to a jet module and an active jet system that replaces a traditional pipe heating belt and generates airflow at a predetermined angle. [Background technology]

[0002] As far as particle dust exhaust gas treatment systems in high-tech manufacturing are concerned, fine dust needs to be collected before and after many exhaust gas detoxification processes. Existing semiconductor manufacturing process equipment uses a wet scrubber (local scrubber) to remove fine dust and transports the dusty exhaust gas through a pipe. However, when transporting dusty exhaust gas for a long time, the dust in the exhaust gas accumulates and accumulates on the pipe wall, causing the pipe to become clogged. For this reason, current semiconductor manufacturing process equipment installs multiple heating belts on the pipe to prevent the accumulated dust from adhering to the pipe wall, so that it can be removed from the pipe together with the exhaust gas.

[0003] However, the installation of the heating belt not only increases the manufacturing cost, but also does not completely eliminate the need for pipe cleaning. Summary of the Invention [Problem to be solved by the invention]

[0004] The technical problem that the present invention seeks to solve is to provide a jet module and active jet system to address the deficiencies of the current art. [Means for solving the problem]

[0005] In order to solve the above technical problems, one technical means adopted by the present invention is to provide a jet module, the jet module having an apparatus body, the apparatus body being provided with a transport chamber and an annular airflow generating chamber inside. The apparatus body is provided with a gas input at one end and a gas output at the other end. In addition, an airflow inlet extending outward from a side of the apparatus body is formed. The transport chamber, the gas input and the gas output are mutually connected, and the transport chamber, the annular airflow generating chamber and the airflow inlet are mutually connected. The gas input is configured to be connected to a first external working device, and the gas output is configured to be connected to a second external working device. The airflow inlet is configured to be connected to an external gas source device. The annular airflow generating chamber has a side connection and at least one nozzle, the side connection and the at least one nozzle are mutually connected. The side connection is connected to the airflow inlet, and the at least one nozzle is connected to the transport chamber. The at least one nozzle unit is disposed to generate a push airflow toward the transfer chamber through a predetermined path, and a predetermined angle is formed between the predetermined path and a central axis of the device body, the predetermined angle being 0 degrees to 89 degrees.

[0006] In order to solve the above technical problem, another technical means adopted by the present invention is to provide an active jet system, which includes at least one jet module, at least one gas supply module, and a control module. The at least one jet module comprises an apparatus body, and the apparatus body comprises a transfer chamber and an annular airflow generating chamber inside the apparatus body. The apparatus body comprises a gas input at one end and a gas output at the other end. In addition, an airflow inlet extending outward is formed on a side of the apparatus body. The transfer chamber, the gas input, and the gas output are mutually communicated, and the transfer chamber, the annular airflow generating chamber, and the airflow inlet are also mutually communicated. The at least one gas supply module is connected to the airflow inlet. The control module is connected to the gas supply module, and is configured to control the gas supply module to supply a driving airflow to the jet module in a continuous mode or an intermittent mode. The gas input section is configured to be connected to a first external working device, and the gas output section is configured to be connected to a second external working device. The annular airflow generating chamber includes a side connection section and at least one nozzle section, and the side connection section and the at least one nozzle section are mutually connected. The side connection section is connected to the airflow introduction section, and the at least one nozzle section is connected to the transfer chamber. The at least one nozzle section is disposed to generate a push airflow toward the transfer chamber through a predetermined path, and there is a predetermined angle between the predetermined path and the central axis of the apparatus main body. The predetermined angle is 0 degrees to 89 degrees. Effect of the Invention

[0007] One beneficial effect of the present invention is that the jet module and active jet system provided by the present invention, through the above-mentioned technical means, replaces the traditional pipe heating belt and effectively solves the problem of pipe clogging.

[0008] In order to make the characteristics and technical contents of the invention more readily apparent, reference is made to the following detailed description of the invention and the accompanying drawings, which are provided for reference and explanation only and are not intended to limit the scope of the invention. [Brief description of the drawings]

[0009] [Figure 1] 1 is a structural schematic diagram of an active jet system in a first embodiment of the present invention; FIG. [Diagram 2] 1 is a functional block diagram of an active jet system according to a first embodiment of the present invention. FIG. [Diagram 3] 1 is a first schematic cross-sectional view of a jet module according to a first embodiment of the present invention; FIG. [Figure 4] FIG. 2 is a second schematic cross-sectional view of the jet module in the first embodiment of the present invention. [Diagram 5] FIG. 2 is a structural schematic diagram of an active jet system according to a second embodiment of the present invention. [Figure 6] FIG. 4 is a functional block diagram of an active jet system according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] The following describes the embodiments of the "jet module and active jet system" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the disclosure of this specification. The present invention can be implemented or applied in other different embodiments. Each detail in this specification can be modified and changed equivalently based on various perspectives or applications without departing from the spirit of the present invention. In addition, the drawings of the present invention are for simple and schematic illustration only and do not show actual dimensions. The following embodiments will further explain technical matters related to the present invention, but the disclosed contents do not limit the present invention.

[0011] Throughout this specification, terms such as "first", "second", and the like may be used to describe various components or signals, but it should be understood that these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another or one signal from another. Furthermore, the term "or" as used herein may include any one or combination of the associated listed items as appropriate depending on the actual situation.

[0012] [First embodiment] Please refer to Figures 1 to 4, which respectively show a structural schematic diagram of an active jet system in a first embodiment of the present invention, a functional block diagram of the active jet system, a first schematic cross-sectional diagram of a jet module, and a second schematic cross-sectional diagram of the jet module. As shown in these figures, the first embodiment of the present invention provides an active jet system Z, which can include at least one jet module M, at least one gas supply module 1, and a control module 2.

[0013] As shown in FIG. 1 to FIG. 4, the jet module M has an apparatus main body M1, and the inside of the apparatus main body M1 can be provided with a transport chamber M10 and an annular airflow generating chamber M11. One end of the apparatus main body M1 can be provided with a gas input part M2, and the other end can be provided with a gas output part M3. In addition, an airflow introduction part M4 extending outward is formed on the side of the apparatus main body M1. The transport chamber M10, the gas input part M2, and the gas output part M3 can be mutually communicated, and the transport chamber M10, the annular airflow generating chamber M11, and the airflow introduction part M4 can be mutually communicated. The gas input part M2 is arranged to be connected to the first external working device U1, and the gas output part M3 is arranged to be connected to the second external working device U2. The annular airflow generating chamber M11 has a side connection part M110 and at least one nozzle part M111, and the side connection part M110 and the nozzle part M111 are mutually communicated. The side connection part M110 is connected to the airflow introduction part M4, and the nozzle part M111 is connected to the transfer chamber M10. The nozzle part M111 is disposed so as to generate a push airflow PA toward the transfer chamber M10 via a predetermined path PR, and there is a predetermined angle PG between the predetermined path PR and the central axis CA of the apparatus main body M1. The predetermined angle PG is between 0 degrees and 89 degrees.

[0014] For example, the outer shape of the device body M1 may be a geometric shape, such as a rectangle or a rounded trapezoid, but is not limited thereto. The transport chamber M10 is located at the center of the device body M1, and the annular airflow generating chamber M11 is disposed so as to surround the transport chamber M10. The transport chamber M10 may have a hollow structure. The gas input part M2 extends outward from one end of the device body M1, and the gas output part M3 extends outward from the other end. The gas input part M2, the gas output part M3, and the airflow introduction part M4 are hollow tubular structures, the gas input part M2 communicates with the gas output part M3 via the transport chamber M10, and the airflow introduction part M4 communicates with the transport chamber M10 via the annular airflow generating chamber M11. The diameter or hole size of the nozzle part M111 is 0.01 mm to 3 mm, and preferably 0.1 mm. In addition, the predetermined angle PG is preferably 0 degrees to 10 degrees, and the optimal predetermined angle PG is 0 degrees. The first external work device U1 and the second external work device U2 can be, but are not limited to, a turbo pump, a dry pump, a wet scrubber, a combustion type exhaust gas removal device, a plasma type exhaust gas removal device, or a central processing unit (Central Scrubber; for example, a wet scrubber) in the semiconductor device. The gas input M2 is connected to the first external work device U1 through an external pipe EP, and the gas output M3 is connected to the second external work device U2 through an external pipe EP.

[0015] Furthermore, the cross section of the annular airflow generating chamber M11 may be feather-shaped, and the annular airflow generating chamber M11 may be an annular hollow structure. The annular airflow generating chamber M11 includes a main chamber portion M112, and the main chamber portion M112 has a feather-shaped portion covering area M112a and a shoulder area M112b. The feather-shaped portion covering area M112a connects the side connection portion M110 and the shoulder area M112b, and the shoulder area M112b is connected to at least one nozzle portion M111. The feather-shaped portion covering area M112a has a cone-shaped cross section, and the shoulder area M112b may have a C-shaped or hook-shaped cross section, but is not limited thereto. In addition, in the device main body M1, there is a predetermined inclination angle TG between the inner wall surface of the wing-shaped portion covering area M112a adjacent to the transport chamber M10 and the central axis CA, and this predetermined inclination angle TG is 5 degrees to 30 degrees, and preferably 8 degrees, 16 degrees (see Figure 4), 19 degrees, 26.5 degrees, or 30 degrees (see Figure 3), but is not limited to this.

[0016] Next, as shown in Figures 1 and 2, at least one gas supply module 1 is connected to the airflow inlet M4. For example, the gas supply module 1 is a gas supply device in a semiconductor device, and can supply general air or special gas (such as, but not limited to, an inert gas). The gas supply module 1 has a connecting pipe 10, which is connected to the airflow inlet M4.

[0017] 2, the control module 2 is electrically connected to the gas source module 1, and the control module 2 is configured to control the gas source module 1 to supply the driving airflow DA to the jet module M in a continuous or intermittent mode. By way of example, the control module 2 can be a central control device or a computer device. In other preferred embodiments, the control module 2 is also connected to the first external working device U1 and the second external working device U2, and can receive information provided by the first external working device U1 or the second external working device U2, or both, such as signals related to parameters related to gas transport.

[0018] Therefore, when the airflow inlet M4 receives the driving airflow DA provided from the gas supply source module 1 and the gas input M2 receives the process gas MP provided from the first external work device U1, the annular airflow generating chamber M11 generates a push airflow PA to the transfer chamber M10 through at least one nozzle M111, and the push airflow PA makes the process gas MP flow toward the gas output M3. When the airflow inlet M4 receives the driving airflow DA provided from the gas supply source module 1, the annular airflow generating chamber M11 introduces the driving airflow DA into the vane-like portion covered area M112a through the side connection M110. The driving airflow DA passes through the vane-like portion covered area M112a and the shoulder area M112b in order, passes through at least one nozzle M111, and flows into the transfer chamber M10 by a predetermined path PR, forming a push airflow PA.

[0019] For example, referring to Fig. 1 to Fig. 4, the active jet system Z of the present invention is applied to a semiconductor manufacturing process equipment, and replaces the pipe heating belt in the existing semiconductor manufacturing process equipment. Therefore, when the active jet system Z of the present invention is operated, the jet module M can receive the process gas MP (such as, but not limited to, harmful gas (such as waste gas) containing fine dust) provided from the first external working device U1. Then, the control module 2 can control the gas supply source module 1 to supply the driving airflow DA (such as, but not limited to, an airflow of an inert gas) to the jet module M. At this time, the driving airflow DA enters the annular airflow generating chamber M11 from the airflow inlet part M4, passes through the vane-shaped part covering area M112a and the shoulder part area M112b in order, generates a swirling flow (i.e., flows in the annular airflow generating chamber M11 in a vortex manner) in the annular airflow generating chamber M11, and is sprayed from the nozzle part M111 to the transfer chamber M10. The nozzle unit M111 injects a driving airflow DA into the transfer chamber M10 along a predetermined path PR (i.e., a specific direction, a predetermined direction), and the driving airflow DA forms a push airflow PA. The push airflow PA may be an annular airflow.

[0020] Next, when the push airflow PA is sprayed into the inside of the transfer chamber M10, the push airflow PA flows toward the gas output part M3 along a predetermined path PR (i.e., a predetermined spray direction). At the same time, the push airflow PA entrains and sucks the process gas MP introduced from the gas input part M2, and combines with the process gas MP to form a strong and stable airflow, which flows toward the gas output part M3. Finally, the push airflow PA completely propels the process gas MP and sends it to the second external working device U2, thereby preventing the dust contained in the process gas MP from remaining in the external pipe EP.

[0021] In addition, the control module 2 of the present invention can control the gas supply source module 1 based on a built-in program or manual operation to continuously supply the driving airflow DA to the jet module M. Alternatively, the control module 2 can control the gas supply source module 1 to supply the driving airflow DA to the jet module M in a manner of intermittently supplying gas (for example, but not limited to, a manner of supplying gas every 5 seconds). The flow rate range of the push airflow PA generated by the jet module M is 1 SLM to 600 SLM.

[0022] In this way, the active jet system Z of the present invention provides an active circular airflow by installing the jet module M, the gas supply module 1 and the control module 2 between the first external work device U1 and the second external work device U2 through the above-mentioned technical means. In addition, the jet module M generates a push airflow PA, which allows the process gas MP to flow completely to the second external work device U2, so that the dust contained in the process gas MP does not remain in the external pipe EP. At the same time, the active jet system Z of the present invention replaces the conventional semiconductor manufacturing process of using a heating belt to heat the pipe to eliminate clogging, which can greatly reduce the manufacturing cost and the equipment maintenance cost.

[0023] Further, based on the above, and with reference to FIG. 1 to FIG. 4, the present invention further provides a jet module M. The jet module M has an apparatus body M1, and the inside of the apparatus body M1 can be provided with a transport chamber M10 and an annular airflow generating chamber M11. One end of the apparatus body M1 can be provided with a gas input part M2, and the other end can be provided with a gas output part M3. In addition, an airflow inlet part M4 extending outward is formed on the side of the apparatus body M1. The transport chamber M10, the gas input part M2, and the gas output part M3 can be mutually communicated, and the transport chamber M10, the annular airflow generating chamber M11, and the airflow inlet part M4 can be mutually communicated. The gas input part M2 is configured to be connected to a first external working device U1, and the gas output part M3 is configured to be connected to a second external working device U2. The airflow introduction part M4 is configured to be connected to an external gas source device U3 (which may be the same as the gas supply source module 1, for example, a gas supply device in a semiconductor device that supplies general air or a special gas (for example, but not limited to, an inert gas). The annular airflow generation chamber M11 has a side connection part M110 and at least one nozzle part M111, and the side connection part M110 and the at least one nozzle part M111 communicate with each other. The side connection part M110 is connected to the airflow introduction part M4, and the at least one nozzle part M111 is connected to the transfer chamber M10. The at least one nozzle part M111 is configured to generate a push airflow PA toward the transfer chamber M10 by a predetermined path PR, and there is a predetermined angle PG between the predetermined path PR and the central axis CA of the device main body M1. The predetermined angle PG is 0 degrees to 89 degrees.

[0024] However, the above example is merely one embodiment and is not intended to limit the present invention.

[0025] [Second embodiment] Please refer to Figures 5 and 6, which are a structural schematic diagram and a functional block diagram of an active jet system in a second embodiment of the present invention, and please also refer to Figures 1 to 4. The active jet system Z of this embodiment is almost similar to the active jet system Z of the previous embodiment, so the same components will not be described in detail here. The main difference between this embodiment and the first embodiment is that in this embodiment, the active jet system Z further includes a plurality of jet modules Ma, Mb, and Mc. Among them, the gas input part M2 of the jet module Ma is connected to a first external working device U1, and the gas output part M3 of the jet module Mb is connected to the gas input part M2 of another jet module Ma. Furthermore, the gas output part M3 of the jet module Mc is connected to a second external working device U2. The airflow inlet part M4 of the plurality of jet modules Ma, Mb, and Mc is connected to at least one gas supply source module 1.

[0026] For example, referring to Fig. 3 to Fig. 6, the active jet system Z can install a plurality of jet modules Ma, Mb, Mc at equal or unequal intervals between the first external work device U1 and the second external work device U2. Then, each jet module Ma, Mb, Mc may be individually connected to the gas supply source module 1, or a plurality of jet modules Ma, Mb, Mc may be connected to the same gas supply source module 1. Therefore, when the distance between the first external work device U1 and the second external work device U2 is too long (i.e., when the length of the external pipe EP is long), or when the external pipe EP installed between the first external work device U1 and the second external work device U2 is not a straight pipe but is composed of a straight pipe and a bent pipe, the jet modules M can be installed at different positions on the piping path of the external pipe EP.

[0027] Then, the control module 2 is used to control the mode (e.g., continuous mode or intermittent mode) in which the gas supply module 1 supplies the driving airflow DA, so that the multiple jet modules Ma, Mb, Mc can completely transport the process gas MP from the first external work device U1 to the second external work device U2 in a relay manner.

[0028] Furthermore, the control module 2 can first control the gas supply source module 1 corresponding to the jet module Ma to supply the driving airflow DA to the jet module Ma, and the gas supply source modules 1 corresponding to the jet modules Mb and Mc to temporarily not supply the driving airflow DA. Then, after a certain time (for example, an interval of 5 seconds, but not limited thereto), the control module 2 controls the gas supply source module 1 corresponding to the jet module Mb to supply the driving airflow DA to the jet module Mb, and at the same time, controls the gas supply source modules 1 corresponding to the jet modules Ma and Mc to temporarily not supply the driving airflow DA. At this time, the process gas MP is carried to the jet module Mb by the push airflow PA generated by the jet module Ma, and is therefore carried to the jet module Mc by the push airflow PA generated by the jet module Mb.

[0029] Then, after a certain time (for example, but not limited to, an interval of 5 seconds), the control module 2 controls the gas supply source module 1 corresponding to the jet module Mc to supply the driving airflow DA to the jet module Mc, and at the same time controls the gas supply source modules 1 corresponding to the jet modules Ma and Mb to temporarily not supply the driving airflow DA. At this time, the process gas MP is carried to the jet module Mc by the push airflow PA generated by the jet module Mb, and is therefore carried to the second external work device U2 by the push airflow PA generated by the jet module Mc.

[0030] However, the control module 2 can control the gas supply source modules 1 corresponding to the jet modules Ma, Mb, Mc to continuously supply the driving airflows DA to all of these jet modules Ma, Mb, Mc, so that the jet modules Ma, Mb, Mc can simultaneously generate the push airflows PA to carry the process gas MP supplied from the first external work device U1 to the second external work device U2.

[0031] It is noteworthy that in the active jet system Z of the present invention, the flow rate range of the push airflow PA generated by the jet modules Ma, Mb, and Mc is 1 SLM to 600 SLM.

[0032] It should be noted that the above example is merely one embodiment and is not intended to limit the present invention.

[0033] [Beneficial Effects of the Embodiments] One of the beneficial effects of the present invention is that the jet module M and active jet system Z provided by the present invention can replace the traditional pipe heating belt through the above-mentioned technical means, and can effectively solve the problem of pipe clogging.

[0034] Furthermore, the active jet system Z of the present invention can provide an active circular airflow by utilizing the above-mentioned technical means and installing the jet module M, the gas supply module 1 and the control module 2 between the first external work device U1 and the second external work device U2. The jet module M generates a push airflow PA in a specific direction along a predetermined path PR, which can make the process gas MP flow completely to the second external work device U2, preventing the dust contained in the process gas MP from remaining in the external pipe EP, and solving the pipe clogging problem in the semiconductor industry. In addition, it does not require additional power supply, and is an alternative to the method of heating the pipe with a heating belt used in the current semiconductor manufacturing process to eliminate pipe clogging, and in the future, the heating belt will no longer be needed in the pipeline, which can significantly reduce manufacturing costs and equipment maintenance costs.

[0035] The above disclosure is merely a preferred embodiment of the present invention, and does not limit the scope of the utility model registration claims of the present invention. Therefore, all equivalent technical modifications made based on the contents of the specification and accompanying drawings of the present invention shall be included in the scope of the utility model registration claims of the present invention. [Explanation of symbols]

[0036] Z Active Jet System M, Ma, Mb, Mc Jet Modules M1 Device Main Unit M10 Transfer Chamber M11 Annular Airflow Generation Chamber M110 Side Connection M111 Nozzle M112 Main chamber M112a Wing Coverage Area M112b Shoulder Area M2 Gas input M3 Gas Output Unit M4 Airflow Inlet 1 Gas Source Module 10 Connecting pipe 2 Control Module U1 First external working device U2 Second external working device U3 External gas source device CA center axis DA Driven Airflow MP Process Gas PA Push Airflow PG Predetermined angle PR Predefined route TG Predetermined tilt angle EP External Pipe

Claims

1. A jet module having an apparatus body, The device body is provided with a transport chamber and an annular airflow generating chamber inside, the device body has a gas input part at one end and a gas output part at the other end, an airflow introduction part extending outward is formed on a side of the device body, the transport chamber, the gas input part and the gas output part are mutually connected, and the transport chamber, the annular airflow generating chamber and the airflow introduction part are mutually connected, The gas input is configured to be connected to a first external working device, the gas output is configured to be connected to a second external working device, and the airflow inlet is configured to be connected to an external gas source apparatus; the annular airflow generating chamber has a side connection portion and at least one nozzle portion, the side connection portion and the at least one nozzle portion are mutually connected, the side connection portion is connected to the airflow introduction portion, the at least one nozzle portion is connected to the transport chamber, the at least one nozzle portion is configured to generate a push airflow toward the transport chamber through a predetermined path, there is a predetermined angle between the predetermined path and a central axis of the device main body, the predetermined angle being 0 degrees to 89 degrees; A jet module comprising:

2. 2. The jet module of claim 1, wherein when the airflow inlet receives the driving airflow provided from the external gas source device and the gas input receives the process gas provided from the first external working device, the annular airflow generating chamber generates the push airflow toward the transfer chamber through the at least one nozzle, so that the push airflow makes the process gas flow toward the gas output, the push airflow is annular airflow, the predetermined angle is 0-10 degrees, the transfer chamber is located at the center of the apparatus body, the annular airflow generating chamber surrounds the transfer chamber, and the flow rate range of the push airflow generated by the jet module is 1 SLM-600 SLM.

3. 2. The jet module according to claim 1, wherein the cross section of the annular airflow generating chamber is feather-shaped, the annular airflow generating chamber further comprises a main chamber portion, the main chamber portion comprises a feather-shaped covering area and a shoulder area, the feather-shaped covering area connects the side connection portion and the shoulder area, the shoulder area connects with the at least one nozzle portion, the cross section of the feather-shaped covering area is cone-shaped, and the cross section of the shoulder area is C-shaped or hook-shaped, when the airflow inlet portion receives the driving airflow provided by the external gas source device, the annular airflow generating chamber introduces the driving airflow into the feather-shaped covering area through the side connection portion, the driving airflow passes through the feather-shaped covering area and the shoulder area in turn, and flows into the transport chamber through the at least one nozzle portion according to the predetermined path to form the push airflow.

4. At least one jet module having an apparatus main body, the apparatus main body having a transport chamber and an annular airflow generating chamber inside, the apparatus main body having a gas input part at one end and a gas output part at the other end, an airflow introduction part extending outward is formed on a side surface of the apparatus main body, the transport chamber, the gas input part and the gas output part are mutually connected, and the transport chamber, the annular airflow generating chamber and the airflow introduction part are also mutually connected; At least one gas supply module connected to the airflow inlet; a control module connected to the gas source module and configured to control the gas source module to provide a driving airflow to the jet module in a continuous or intermittent mode; 1. An active jet system comprising: The gas input is configured to be connected to a first external working device and the gas output is configured to be connected to a second external working device; the annular airflow generating chamber has a side connection portion and at least one nozzle portion, the side connection portion and the at least one nozzle portion are mutually connected, the side connection portion is connected to the airflow introduction portion, the at least one nozzle portion is connected to the transport chamber, the at least one nozzle portion is configured to generate a push airflow toward the transport chamber through a predetermined path, a predetermined angle is formed between the predetermined path and a central axis of the device main body, and the predetermined angle is 0 degrees to 89 degrees; An active jet system.

5. 5. The active jet system of claim 4, further comprising a plurality of said jet modules, wherein the gas input of one of said jet modules is connected to the first external work device, the gas output of one of said jet modules is connected to the gas input of another of said jet modules, and the gas output of another of said jet modules is connected to the second external work device, and the airflow inlets of the plurality of said jet modules are connected to the at least one gas supply module.

6. When the airflow inlet receives the driving airflow provided from the at least one gas supply module and the gas input receives the process gas provided from the first external working device, the annular airflow generating chamber generates the push airflow toward the transfer chamber through the at least one nozzle, and the push airflow makes the process gas flow toward the gas output, the push airflow is an annular airflow, the flow rate range of the push airflow generated by the jet module is 1 SLM-600 SLM, the predetermined angle is 0 degrees-10 degrees, the transfer chamber is located at the center of the apparatus body, the annular airflow generating chamber surrounds the transfer chamber, the cross section of the annular airflow generating chamber is feather-shaped, and the annular airflow generating chamber is further 5. The active jet system of claim 4, further comprising a main chamber section, the main chamber section having a vane-like portion covering area and a shoulder area, the vane-like portion covering area connecting the side connection section and the shoulder area, the shoulder area connecting the at least one nozzle section, the cross section of the vane-like portion covering area being cone-shaped and the cross section of the shoulder area being C-shaped or hook-shaped, when the airflow inlet section receives the driving airflow provided from the at least one gas supply module, the annular airflow generating chamber introduces the driving airflow into the vane-like portion covering area through the side connection section, the driving airflow passes through the vane-like portion covering area and the shoulder area in turn, and flows into the transfer chamber along the predetermined path through the at least one nozzle section to form the push airflow.

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