Sensors and Electronics

Abstract

[Problem] To provide a technology that enables equalizing of the sensitivity in detection of shear force irrespective of the location of the shear force in an in-plane direction of a sensor. [Solution] A sensor according to the present technology is provided with a sensor part and a separation layer. The sensor part comprises a first pressure sensor and a second pressure sensor that are disposed on a front side and a rear side, respectively, so as to face each other, and detects, on the basis of pressure detection locations at which pressures are detected respectively by the first and second pressure sensors in an in-plane direction, a force in said in-plane direction. The separation layer has voids, and is interposed between the first pressure sensor and the second pressure sensor.

Description

[Technical field]

[0001] The present technology relates to sensors that detect forces. [Background technology]

[0002] In recent years, with the decline in the working population, the automation of work by robots has been considered in various fields. In order to control the behavior of a robot hand with high precision, it is necessary to detect the amount of force acting on the surface of the robot hand.

[0003] Patent Document 1 listed below discloses a technique for detecting the force (slippage) on a palm of a robot hand when the robot hand grasps an object, using a sensor provided on the palm of the robot hand.

[0004] The sensor has an upper pressure detection section, a lower pressure detection section, and a deformation section interposed between the two pressure detection sections. When a shear force is applied to the sensor in the in-plane direction, the deformation layer undergoes shear deformation, causing a difference between the pressure center position detected by the upper pressure detection section and the pressure center position detected by the lower pressure detection section. This difference correlates with the applied shear force. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2009-34742 A Summary of the Invention [Problem to be solved by the invention]

[0006] In the technology described in Patent Document 1, the degree of shear deformation of the deformation layer varies depending on the position where the shear force is applied in the in-plane direction of the sensor, which causes variation in the detection sensitivity of the shear force.

[0007] In view of the above circumstances, an object of the present technology is to provide a technology that can make the detection sensitivity of a shear force uniform regardless of the position of the shear force in the in-plane direction of the sensor. [Means for solving the problem]

[0008] The sensor according to the present technology includes a sensor unit and a separation layer. The sensor unit includes a first pressure sensor on a front side and a second pressure sensor on a back side that face each other, and detects a force in an in-plane direction based on pressure detection positions in the in-plane direction by the first pressure sensor and the second pressure sensor. The separation layer has a gap and is interposed between the first pressure sensor and the second pressure sensor.

[0009] In this manner, by providing a gap in the separation layer, the detection sensitivity of the shear force can be made uniform regardless of the position of the shear force in the in-plane direction of the sensor.

[0010] The electronic device according to the present technology includes a sensor. The sensor includes a sensor portion and a separation layer. The sensor unit includes a first pressure sensor on the front side and a second pressure sensor on the back side which face each other, and detects a force in the in-plane direction based on a pressure detection position in the in-plane direction by the first pressure sensor and the second pressure sensor. The separation layer has a gap and is interposed between the first pressure sensor and the second pressure sensor. [Brief description of the drawings]

[0011] [Figure 1] 1A to 1C are diagrams illustrating a robot hand according to a first embodiment of the present technology. [Diagram 2] FIG. 2 is a cross-sectional side view of the sensor. [Diagram 3] FIG. 2 is a plan view showing a sensor electrode layer in the sensor. [Figure 4] FIG. 2 is a back view of the spacing layer in the sensor. [Diagram 5] 1A to 1C are diagrams showing examples of the shape of a separation layer. [Figure 6] FIG. 11 is a diagram showing the isolating layer as viewed from the rear surface side, illustrating the patterns of the shape of the column portion as viewed in plan. [Figure 7] 1 is a diagram showing a model of a state in which a load Fz is applied to a sensor in a vertical downward direction. [Figure 8] This is a model of the state when a shear force Fs is applied in the in-plane direction to a sensor while a load Fz in the normal direction is applied to the sensor. [Figure 9] FIG. 13 is a diagram showing an evaluation of the variation in detection sensitivity of the shear force Fs in a separation layer according to a comparative example. [Figure 10] FIG. 13 is a diagram showing an evaluation of the variation in detection sensitivity of the shear force Fs in the separation layer according to the present embodiment. [Figure 11] FIG. 2 is a diagram showing examples and comparative examples of a separation layer. [Figure 12] 13 is a diagram showing a state where the detection sensitivity of the shear force Fs and the variation in the detection sensitivity of the shear force Fs are evaluated. FIG. [Figure 13] FIG. 13 is a diagram showing the state when the resolution of the detection sensitivity in the in-plane direction of the shear force Fs is evaluated. [Figure 14] 1A and 1B are diagrams showing examples and comparative examples of a deformation layer. [Figure 15] FIG. 4 is a diagram showing the relationship between the thickness and basis weight of a deformation layer in each of the examples and comparative examples. [Figure 16] FIG. 11 is a cross-sectional side view of the pressure sensor according to the second embodiment. [Figure 17] 11A to 11C are diagrams showing examples and comparative examples according to the second embodiment. [Figure 18] FIG. 13 is a diagram showing examples and comparative examples according to the third embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, embodiments of the present technology will be described with reference to the drawings.

[0013] First Embodiment <Overall structure and each part structure> 1 is a diagram showing a robot hand 10 according to a first embodiment of the present technology. As shown in FIG 1, the robot hand 10 has an arm unit 1, a wrist unit 2, and a hand unit 3.

[0014] The arm unit 1 has multiple joints 1a, and the hand unit 3 can be moved to any position by driving the joints 1a. The wrist unit 2 is rotatably connected to the arm unit 1, and the hand unit 3 can be rotated by the rotation of the wrist unit 2.

[0015] The hand unit 3 has two fingers 3a facing each other, and can grasp an object between the two fingers 3a by driving the two fingers 3a. Note that, although the hand unit 3 has two fingers in the example shown in Fig. 1, the number of fingers 3a can be changed as appropriate to three, four, etc.

[0016] A sensor 20 is provided on each of the opposing surfaces of the two finger portions 3a. The sensor 20 is capable of detecting a force applied to the sensor 20 in a direction perpendicular to the sensor 20 (Z-axis direction), and is also capable of detecting a force applied to the sensor 20 in an in-plane direction (X-axis direction and Y-axis direction). In other words, the sensor 20 is a three-axis sensor capable of detecting forces corresponding to three axial directions. The configuration of the sensor 20 will be described later with reference to FIG. 2 etc.

[0017] The robot hand 10 is driven under the control of a control device (not shown). The control device may be a dedicated device for the robot hand 10, or may be a general-purpose device. When the control device is a general-purpose device, the control device may be, for example, a PC (Personal Computer), a mobile phone (including a smartphone), a server device on a network, or the like.

[0018] The control device includes a control unit, a storage unit, etc. The control unit is, for example, a CPU (Central Processing Unit), and controls the driving of each unit in the robot hand 10 based on a program stored in the storage unit. Typically, the control unit acquires force information in three axial directions detected by the sensor 20, and based on this force information, controls the driving of the hand unit 3 so as to stably grip an object with an appropriate gripping force.

[0019] The storage unit includes a non-volatile memory for storing various programs and data required for processing by the control unit, and a volatile memory used as a working area for the control unit. The various programs may be read from a portable recording medium such as a semiconductor memory, or may be downloaded from a server device on a network.

[0020] [Sensor 20] Fig. 2 is a cross-sectional side view of the sensor 20. Fig. 3 is a plan view showing the sensor electrode layer 30 in the sensor 20. Fig. 4 is a rear view of the separation layer 23 in the sensor 20.

[0021] In each figure of the sensor 20, the X-axis direction and the Y-axis direction are in-plane directions parallel to the sensing surface of the sensor 20, and the Z-axis direction is a vertical direction perpendicular to the sensing surface. In Fig. 2, the upper side corresponds to the front side to which an external force is applied, and the lower side corresponds to the opposite back side.

[0022] 2 to 4, the sensor 20 has a rectangular, flat plate shape as a whole in a plan view. Typically, the shape of the sensor 20 in a plan view may be appropriately set according to the shape of the location where the sensor 20 is disposed, and the shape of the sensor 20 in a plan view is not particularly limited. For example, the shape of the sensor 20 in a plan view may be a polygon other than a square, a circle, an ellipse, or the like.

[0023] The sensor 20 includes a sensor section 21 including a first pressure sensor 22a on the front side and a second pressure sensor 22b on the back side, and a separation layer 23 interposed between the first pressure sensor 22a and the second pressure sensor 22b. In other words, the sensor 20 has a layered structure in which the second pressure sensor 22b, the separation layer 23, and the first pressure sensor 22a are layered in this order from the bottom in the vertical direction. In the following description, the two pressure sensors 22a and 22b will simply be referred to as pressure sensors 22 unless they are to be particularly distinguished from one another.

[0024] A viscoelastic layer (not shown) having a hardness similar to that of human skin is provided on the upper side (front side) of the first pressure sensor 22a. This viscoelastic layer transmits the external force to the sensor 20 while deforming in response to the external force.

[0025] "Sensor unit 21" The sensor unit 21 detects a force (shear force Fs) applied to the sensor 20 in an in-plane direction based on the pressure center position (pressure detection position) in the in-plane direction by the first pressure sensor 22a and the pressure center position (pressure detection position) in the in-plane direction by the second pressure sensor 22b. The sensor unit 21 also detects a force (load Fz) applied to the sensor 20 from above in a vertical direction based on the pressure value detected by the first pressure sensor 22a.

[0026] The sensor unit 21 may detect a force applied from above in the vertical direction to the sensor 20 based on two values, that is, the pressure value detected by the first pressure sensor 22a and the pressure value detected by the second pressure sensor 22b. That is, typically, the sensor unit 21 may be configured to detect a force applied from above in the vertical direction based on the pressure value detected by at least the first pressure sensor 22a of the first pressure sensor 22a and the second pressure sensor 22b.

[0027] (First pressure sensor 22a and second pressure sensor 22b) The first pressure sensor 22a and the second pressure sensor 22b are arranged to face each other in the vertical direction. The first pressure sensor 22a has a laminated structure in which a sensor electrode layer 30a, a deformation layer 27a, and an electrode film layer 26a are laminated in this order from the bottom in the vertical direction. The second pressure sensor 22b has a laminated structure in which an electrode film layer 26b, a deformation layer 27b, and a sensor electrode layer 30b are laminated in this order from the bottom in the vertical direction.

[0028] As will be understood from the description herein, the first pressure sensor 22a and the second pressure sensor 22b are arranged upside down. Therefore, the first pressure sensor 22a and the second pressure sensor 22b are both configured so that the sensor electrode layer 30 is arranged on the separation layer 23 side. The first pressure sensor 22a and the second pressure sensor 22b are basically configured in the same way except that they are upside down. The first pressure sensor 22a and the second pressure sensor 22b may be arranged upside down.

[0029] (Sensor electrode layer 30) The sensor electrode layer 30 (see Figs. 2 and 3) is composed of a flexible printed circuit board or the like. The sensor electrode layer 30 has a main body 36 that is rectangular in plan view, and an extension portion 37 that extends outward from the main body 36. The extension portion 37 is provided to output information about the pressure detected by the pressure sensor 22 to a control unit or the like. Note that the shape of the sensor electrode layer in plan view is not limited to a rectangle and can be changed as appropriate.

[0030] The sensor electrode layer 30 has a flexible substrate 29 and a plurality of sensing portions 28 provided inside the substrate 29 .

[0031] The material of the base material 29 is, for example, a polymer resin such as polyethylene terephthalate, polycarbonate, or acrylic resin.

[0032] The sensing units 28 are regularly arranged vertically and horizontally (vertically: Y-axis direction, horizontal: X-axis direction) at predetermined intervals. In the example shown in Fig. 3, the number of sensing units 28 is 5 x 5 (vertically x horizontally), making a total of 25. Note that the number of sensing units 28 can be changed as appropriate.

[0033] The sensing unit 28 is a capacitance-type sensor capable of detecting a change in distance between the reference electrode layer 25 in the electrode film layer 26 as a change in capacitance. The sensing unit 28 includes, for example, a comb-shaped pulse electrode and a comb-shaped sense electrode (not shown). The comb-shaped pulse electrode and the comb-shaped sense electrode are arranged so that the teeth of one comb face each other, and are arranged so that the teeth of the other comb fit between the teeth of the other comb. The type of the sensing unit 28 is not particularly limited, and any type may be used.

[0034] (electrode film layer 26) The electrode film layer 26 is flexible, and includes a film layer 24 and a reference electrode layer 25 provided on one surface (the surface side of the deformation layer 27) of the film layer 24. The reference electrode layer 25 is a so-called ground electrode, and is at ground potential.

[0035] The electrode film layer 26 has a thickness of, for example, about 10 μm to 100 μm, and the reference electrode layer 25 has a thickness of, for example, about 0.05 μm to 0.5 μm.

[0036] Examples of the material for the film layer 24 include polymer resins such as polyethylene terephthalate, polycarbonate, and acrylic resin. Examples of the material for the reference electrode layer 25 include inorganic conductive materials, organic conductive materials, and conductive materials containing both inorganic and organic conductive materials.

[0037] Examples of inorganic conductive materials include metals such as aluminum, copper, and silver, alloys such as stainless steel, and metal oxides such as zinc oxide and indium oxide. Examples of organic conductive materials include carbon materials such as carbon black and carbon fiber, and conductive polymers such as substituted or unsubstituted polyaniline and polypyrrole. Any material may be used as long as it is conductive.

[0038] The reference electrode layer 25 is formed on the film layer 24 by, for example, a method such as vapor deposition, sputtering, adhesion, or coating. The film layer 24 may be omitted, in which case the reference electrode layer 25 is made of a thin metal plate such as stainless steel or aluminum, a conductive fiber, or a conductive nonwoven fabric.

[0039] (Deformation layer 27) The deformation layer 27 is interposed between the sensor electrode layer 30 and the electrode film layer 26 (reference electrode layer 25). The deformation layer 27 has a thickness of, for example, about 50 μm to 300 μm.

[0040] The deformation layer 27 is configured to be elastically deformable in response to an external force. When an external force is applied to the sensor 20 in a vertical direction, the deformation layer 27 elastically deforms in response to the external force, and the reference electrode layer 25 approaches the sensor electrode layer 30. At this time, the capacitance between the pulse electrode and the sense electrode in the sensing unit 28 changes, so that the sensing unit 28 can detect this change in capacitance as a pressure value.

[0041] The thickness of the deformation layer 27 is greater than 100 μm and less than 1000 μm, and the weight per unit area of ​​the deformation layer 27 is 50 mg / cm 2 By setting the thickness and basis weight of the deformation layer 27 within this range, the detection sensitivity of the pressure sensor 22 in the vertical direction can be improved.

[0042] The lower limit of the thickness of deformation layer 27 is not particularly limited as long as it is greater than 100 μm, but this lower limit may be, for example, 150 μm or more, 200 μm or more, 250 μm or more, 300 μm or more, etc.

[0043] Furthermore, the upper limit of the thickness of deformation layer 27 is not particularly limited as long as it is 1000 μm or less, but this upper limit may be, for example, 950 μm or more, 900 μm or less, 850 μm or less, 800 μm or less, etc.

[0044] The thickness of the deformation layer 27 is obtained as follows. First, the pressure sensor 22 is processed by the IB (Focused Ion Beam) method or the like to prepare a cross section, and a cross-sectional image (hereinafter referred to as a "cross-sectional SEM image") is taken using a scanning electron microscope (SEM). Next, a point is randomly selected from the deformation layer 27 in the cross-sectional SEM image, and the thickness of the deformation layer 27 is measured at that point.

[0045] The upper limit of the weight of the deformation layer 27 is 50 mg / cm 2 There is no particular limitation as long as it is equal to or less than this upper limit, but the upper limit is, for example, 45 mg / cm 2 Below 40mg / cm 2 Below, 35mg / cm 2 It may be as follows.

[0046] The lower limit of the weight of the deformation layer 27 is not particularly limited, but the lower limit is, for example, 3 mg / cm 2 More than 5mg / cm 2 More than 7mg / cm 2 More than 10mg / cm 2 The above may be acceptable.

[0047] The basis weight of the deformation layer 27 is calculated as follows. First, the electrode film layer 26 is removed (e.g., peeled off) from the pressure sensor 22 to expose the surface of the deformation layer 27, and the mass M1 of the pressure sensor 22 is measured in this state. Next, the deformation layer 27 is removed (e.g., dissolved with a solvent) from the pressure sensor 22, and the mass M2 of the pressure sensor 22 is measured in this state. Finally, the basis weight is calculated from the following formula. The weight of the deformation layer 27 [mg / cm 2 ]=(Mass M1-Mass M2) / (Area S of deformation layer 27)

[0048] The deformation layer 27 includes a porous layer. The porous layer may be a fiber layer. The fiber layer is, for example, a nonwoven fabric or a woven fabric. The fibers included in the fiber layer may be nanofibers or may be thicker fibers. When the deformation layer 27 is a nanofiber layer, the sensitivity of the pressure sensor 22 in the vertical direction can be further improved. The fibers may contain a polymer resin or an inorganic material. When the fibers contain a polymer resin, the sensitivity of the pressure sensor 22 in the vertical direction can be further improved.

[0049] The porous layer may include a three-dimensional structure (irregular network structure such as nonwoven fabric) formed by fibrous structures and may have a plurality of gaps (pores). By including a three-dimensional structure in the porous layer, a structure with a high porosity can be produced, and it is also easy to make the layer thin.

[0050] The fibrous structure is a fibrous material having a sufficient length relative to the fiber diameter. For example, a plurality of fibrous structures are assembled and randomly overlapped to form a porous layer. A single fibrous structure may be randomly entangled to form a porous layer. Alternatively, a porous layer formed by a single fibrous structure and a porous layer formed by a plurality of fibrous structures may be mixed.

[0051] The fibrous structure extends, for example, linearly. The fibrous structure may have any shape, for example, may be curly or bent in the middle. Alternatively, the fibrous structure may be branched in the middle.

[0052] The minimum fiber diameter of the fibrous structure is, for example, 500 nm or less, 300 nm or less, etc. The average fiber diameter is, for example, 0.1 μm or more and 10 μm or less, etc. By reducing the average fiber diameter, the pore diameter of the pores becomes large. The average fiber diameter can be measured, for example, by microscopic observation using a scanning electron microscope or the like. The average length of the fibrous structure is arbitrary. The fibrous structure is formed, for example, by a phase separation method, a phase inversion method, an electrostatic (electric field) spinning method, a melt spinning method, a wet spinning method, a dry spinning method, a gel spinning method, a sol-gel method, or a spray coating method. By using such a method, a fibrous structure having a sufficient length relative to the fiber diameter can be easily and stably formed.

[0053] The fibrous structure is formed of at least one of a polymeric material and an inorganic material, and is particularly formed of nanofibers. Here, the nanofiber is a fibrous material having a fiber diameter of 1 nm to 1000 nm and a length of 100 times or more of the fiber diameter. By using such nanofibers as the fibrous structure, the porosity is high and a thin film can be formed. The fibrous structure made of nanofibers may be formed by electrostatic spinning. By using the electrostatic spinning method, a fibrous structure having a small fiber diameter can be easily and stably formed.

[0054] The deformation layer 27 may be formed of a patterned structure including, for example, a columnar structure, and may have a variety of patterns, such as a matrix, stripe, mesh, radial, geometric, or spiral pattern.

[0055] "Separation layer 23" The isolation layer 23 is fixed between the first pressure sensor 22a and the second pressure sensor 22b via an adhesive layer (not shown). The isolation layer 23 is deformable in response to an external force. The isolation layer 23 has voids 33, and has a plurality of vertically extending pillars 34 formed by the voids 33. The voids 33 are provided on the back surface side (second pressure sensor 22b side) of the isolation layer 23 in the form of grooves that do not penetrate the isolation layer 23 in the vertical direction.

[0056] The isolation layer 23 has, on its front side (the first pressure sensor 22a side), a filling layer 31 (first layer) with a filling structure that has no voids 33. The isolation layer 23 also has, on its back side (the second pressure sensor 22b side), a column layer 32 (second layer) that has voids 33 and a plurality of column sections 34 formed by the voids 33.

[0057] Each of the multiple pillars 34 has a shape in which the thickness is not constant in the vertical direction, but varies. In the example shown in Fig. 2 and Fig. 4, the multiple pillars 34 are formed so that the thickness gradually decreases from the front side (the first pressure sensor 22a side) to the back side (the second pressure sensor 22b side) in the vertical direction. Specifically, in the example shown in Fig. 2 and Fig. 4, each of the multiple pillars 34 has an inverted quadrangular pyramid shape. Note that the pillars 34 may be formed in an inverted circular truncated cone shape, an inverted triangular truncated pyramid shape, an inverted pentagonal truncated pyramid shape, an inverted hexagonal truncated pyramid shape, a circle shape, or the like.

[0058] The pillars 34 are regularly arranged vertically and horizontally. The pillars 34 are provided at positions corresponding to the sensing portions 28 in the vertical direction, and therefore the voids 33 for forming the pillars 34 are provided at positions not corresponding to the sensing portions 28 in the vertical direction. The number of pillars 34 is the same as the number of sensing portions 28b in the second pressure sensor 22b, and is 5×5 (vertical×horizontal) for a total of 25. The number of pillars 34 can be changed as appropriate.

[0059] The isolation layer 23 has a thickness of, for example, about 1000 μm to 5000 μm. The vertical height of the column portion 34 (i.e., the depth of the groove-like void portion 33) is 20% or more, 25% or more, 30% or more, 35% or more, 40% or more, 45% or more, etc., of the thickness of the isolation layer 23. Note that although there is no problem if the height of the column portion 34 is high (e.g., 100% of the thickness of the isolation layer 23), if the height is too low (e.g., less than 20% of the thickness of the isolation layer 23), the column portion 34 may not function effectively.

[0060] The area (in-plane direction) of the underside of the column portion 34 (the portion that contacts the second pressure sensor 22b) is set according to the area of ​​the sensing portion 28b of the second pressure sensor 22, and is, for example, approximately the same as the area of ​​the sensing portion 28b.

[0061] The separation layer 23 is typically made of a viscoelastic material having viscoelastic properties, such as silicone gel, urethane gel, synthetic rubber, and foam.

[0062] (Examples of the isolation layer 23) Next, examples of the shape of the isolation layer 23 will be described. Fig. 5 is a diagram showing examples of the shape of the isolation layer 23. Fig. 5 shows six patterns of the shape of the isolation layer 23, shape A to shape F. Note that Fig. 5 shows the first pressure sensor 22a and the second pressure sensor 22b in a simplified manner.

[0063] (Shape A) Shape A is the shape already described with reference to FIGS.

[0064] (Shape B) In shape B, similar to shape A, the void portion 33 is provided in the shape of a groove that does not vertically penetrate the isolation layer 23 on the back surface side (the second pressure sensor 22b side) of the isolation layer 23. Also, in shape B, similar to shape A, a two-layer structure of a filling layer 31 and a columnar layer 32 is formed.

[0065] In shape A, the thickness of the column portion 34 varies in the vertical direction, but in shape B, the thickness of the column portion 34 is the same in the vertical direction. Specifically, in shape B, the column portion 34 has a quadrangular prism shape. Note that the column portion 34 may be formed in a cylindrical shape, a triangular prism shape, a pentagonal prism shape, a hexagonal prism shape, a circle shape, or the like.

[0066] Note that the column portion 34 in Shape B is typically provided at a position corresponding to the sensing portion 28b of the second pressure sensor 22b in the vertical direction, similar to the column portion 34 in Shape A. Note that this also applies to Shapes C to E.

[0067] (Shape C) In shapes A and B, the voids 33 are groove-shaped and do not vertically penetrate the isolation layer 23, but in shape C, the voids 33 are hole-shaped and vertically penetrate the isolation layer 23. In this relationship, in shape C, the height of the column portions 34 is higher than in shapes A and B, and the height of the column portions 34 matches the thickness of the isolation layer 23. In other words, the height of the column portions 34 is 100% of the thickness of the isolation layer 23.

[0068] In addition, in shapes A and B, the isolation layer 23 has a two-layer structure consisting of a filling layer 31 and a columnar layer 32, but in shape C, the filling layer 31 does not exist and the isolation layer 23 has a single-layer structure consisting of a columnar layer 32.

[0069] In shape C, the shape of the pillar portion 34 is an inverted truncated square pyramid, but the shape of the pillar portion 34 may be an inverted truncated cone, an inverted truncated triangular pyramid, an inverted truncated pentagonal pyramid, an inverted truncated hexagonal pyramid, etc.

[0070] (Shape D) In shape D, similar to shape C, the voids 33 are hole-shaped and penetrate the isolation layer 23 in the vertical direction. Also, in shape D, similar to shape C, the height of the column portions 34 matches the thickness of the isolation layer 23, and the height of the column portions 34 is 100% of the thickness of the isolation layer 23.

[0071] In shape C, the thickness of the column portion 34 varies in the vertical direction, but in shape D, the thickness of the column portion 34 is the same in the vertical direction. Specifically, in shape D, the column portion 34 has a quadrangular prism shape. Note that the column portion 34 may be formed in a cylindrical shape, a triangular prism shape, a pentagonal prism shape, a hexagonal prism shape, a circle shape, or the like.

[0072] (Shape E) Shape E shows an example of a combination of shapes A to D. In other words, shapes A to D can be appropriately combined.

[0073] In shape E, the leftmost pillar portion 34 corresponds to the pillar portion 34 in shape C. The other four pillar portions 34 correspond to the pillar portions 34 in shape D, but each has a different thickness. Note that the second pillar portion 34 from the right has a circular gap portion 33 (gap portion 33 that is not in contact with either the first pressure sensor 22a or the second pressure sensor 22b) in the center in the vertical direction.

[0074] (Shape F) Shape F is a comparative example having no voids 33, and the isolation layer 23' is entirely filled.

[0075] (Shape in plan view) FIG. 6 is a diagram showing the isolating layer 23 as viewed from the back surface side, illustrating each pattern of the shape of the column portion 34 in plan view.

[0076] The top diagram in Fig. 6 shows the column portion 34 in a square column shape. The second diagram from the top in Fig. 6 shows the column portion 34 in a hexagonal column shape (honeycomb structure). The third diagram from the top in Fig. 6 shows the column portion 34 in a combination of different shapes (cylinder, square column, triangular column, etc.). The bottom diagram in Fig. 6 corresponds to a comparative example having no void portion 33.

[0077] <Detection principle of shear force Fs (in-plane force)> Next, the principle of detection of shear force Fs (force in the in-plane direction) will be explained.

[0078] Fig. 7 is a diagram showing a model of a state when a load Fz is applied vertically downward to the sensor 20. Fig. 8 is a diagram showing a model of a state when a shear force Fs is applied in an in-plane direction to the sensor 20 in a state where a load Fz in the vertical direction is applied to the sensor 20. In Figs. 7 and 8, the contour lines of the detected pressure are shown by dashed circles.

[0079] 7, when a load Fz is applied vertically downward to the sensor 20, the pressure center position P in the in-plane direction detected by the first pressure sensor 22a coincides with the pressure center position Q in the in-plane direction detected by the second pressure sensor 22b. Note that the pressure center position means the position in the in-plane direction corresponding to the highest pressure in the detected pressure distribution.

[0080] On the other hand, as shown in Figure 8, when a load Fz is applied to the sensor 20 in the vertical downward direction while a shear force Fs is applied in the in-plane direction, the pressure center position P in the in-plane direction detected by the first pressure sensor 22a does not coincide with the pressure center position Q in the in-plane direction detected by the second pressure sensor 22b.

[0081] The isolation layer 23 is distorted according to the shear force Fs applied in the in-plane direction, and at this time, the isolation layer 23 generates a shear stress σ corresponding to the shear force Fs. Here, the rigidity modulus of the isolation layer 23 is G, and the thickness of the isolation layer 23 is t. Furthermore, the difference between the pressure center position P of the first pressure sensor 22a and the pressure center position Q of the second pressure sensor 22b is d (= t × tan θ). In this case, the shear stress σ (shear force Fs) is expressed by the following formula. σ=Fs=G×d

[0082] Here, the modulus of rigidity G of the separation layer 23 is known on the right side of the equation. Therefore, by calculating the difference d between the pressure center position P in the in-plane direction of the first pressure sensor 22a and the pressure center position Q in the in-plane direction of the second pressure sensor 22b, the shear stress Fs, i.e., the force in the in-plane direction, can be detected.

[0083] <Evaluation of variation in detection sensitivity of shear force Fs> Next, an evaluation of the variation in detection sensitivity of the shear force Fs in the separation layer 23' according to a comparative example and the separation layer 23 according to this embodiment will be described.

[0084] [Comparative Example] First, an evaluation of the variation in the detection sensitivity of the shear force Fs in the separation layer 23' according to the comparative example will be described. Fig. 9 is a diagram showing the evaluation of the variation in the detection sensitivity of the shear force Fs in the separation layer 23' according to the comparative example. The upper diagram in Fig. 9 is a top view showing the sensor 20 according to the comparative example, showing the point and direction in the in-plane direction where the shear force Fs is applied. The center diagram in Fig. 9 is a side view showing the sensor 20 according to the comparative example.

[0085] As shown in the center diagram of Fig. 9, the separation layer 23' according to the comparative example does not have voids 33, and the entire layer is filled in. Also, as shown in the upper diagram of Fig. 9, in this evaluation test, a vertical load Fz was applied to point A near the upper left corner, point B near the lower left corner, and point C in the center in the in-plane direction of the sensor 20 at separate times, and a shear force Fs was applied in the X-axis direction.

[0086] The lower diagram in FIG. 9 is a diagram showing the results when the shear force Fs is changed at points A, B, and C, and the difference d between the pressure center position P and the pressure center position Q is measured.

[0087] In the lower diagram of Fig. 9, attention is focused on the location where the shear force Fs is 3 N. When a shear force Fs of 3 N is applied to points A and B near the corners in the in-plane direction, a difference d of approximately 0.5 mm occurs between the pressure center position P of the first pressure sensor 22a and the pressure center position Q of the second pressure sensor 22b. In contrast, when a shear force Fs of 3 N is applied to point C near the center in the in-plane direction, a difference of only approximately 0.3 mm occurs between the pressure center position P of the first pressure sensor 22a and the pressure center position Q of the second pressure sensor 22b.

[0088] That is, even though the same shear force Fs is applied, the difference d is smaller at point C near the center than at points A and B near the corners. In this case, assume that the shear force Fs is calculated based on the difference d at points A, B, and C. In this case, even though the same shear force Fs is applied, the shear force Fs calculated at point C is smaller than the shear force Fs calculated at points A and B. Thus, in the comparative example, the detection sensitivity of the shear force Fs at each point in the in-plane direction differs.

[0089] This is because in the comparative example, since the isolation layer 23' has a completely filled structure, even if the same shear force Fs is applied to each point, there is a difference in the shear stress σ generated in the isolation layer 23' at each point. That is, near the center in the in-plane direction, the isolation layer 23' has a larger shear stress σ in response to the shear force Fs than near the periphery in the in-plane direction, and is less likely to be distorted by the shear force Fs. Conversely, near the periphery in the in-plane direction, the isolation layer 23' has a smaller shear stress σ in response to the shear force Fs than near the center in the in-plane direction, and is more likely to be distorted by the shear force Fs.

[0090] In the lower graph of Fig. 9, the slope of the graph indicates the detection sensitivity of the shear force Fs at each point. In other words, the larger the slope, the better the detection sensitivity of the shear force Fs, and the smaller the slope, the worse the detection sensitivity of the shear force Fs.

[0091] As can be seen from the lower diagram of Fig. 9, the detection sensitivity of the shear force Fs is poorer at point C near the center than at points A and B near the corners. Also, the detection sensitivity of the shear force Fs is relatively high at points A and B near the corners compared to point C near the center, but this detection sensitivity is insufficient for detecting the shear force Fs. In other words, in the comparative example, the detection sensitivity of the shear force Fs itself is poor to begin with.

[0092] In addition, in the comparative example, since the isolating layer 23' has a completely filled structure, there is a problem that the pressure detection sensitivity of the second pressure sensor 22b is poor. That is, in the comparative example, since the isolating layer 23' has a completely filled structure, when a vertical load Fz is applied, the entire isolating layer 23' becomes a buffer layer, and the load Fz is not easily transmitted to the second pressure sensor 22b. Therefore, the position of the pressure center position Q detected by the second pressure sensor 22b becomes inaccurate, and there is a possibility that the shear force Fs cannot be measured accurately.

[0093] As can be understood from the above description, the comparative example has the following problems 1. to 3. 1. The detection sensitivity of the shear force Fs varies in the in-plane direction. 2. The detection sensitivity of the shear force Fs itself is poor. 3. The second pressure sensor 22b has poor pressure detection sensitivity.

[0094] To address these problems, in this embodiment, the spacing layer 23 has a void 33 formed therein, and the spacing layer 23 has a predetermined shape (for example, a shape having pillars 34).

[0095] [Present embodiment] Next, an evaluation of the variation in the detection sensitivity of the shear force Fs in the separation layer 23 according to this embodiment will be described. Fig. 10 is a diagram showing the evaluation of the variation in the detection sensitivity of the shear force Fs in the separation layer 23 according to this embodiment. The upper diagram in Fig. 10 is a top view showing the sensor 20 according to this embodiment, showing the point and direction in the in-plane direction where the shear force Fs is applied. The central diagram in Fig. 10 is a side view showing the sensor 20 according to this embodiment.

[0096] As shown in the center diagram of Fig. 10, in this evaluation test, the separation layer 23 of the above-mentioned shape B was used as the separation layer 23 according to this embodiment. The separation layer 23 of shape B has a two-layer structure with a filled layer 31 on the front side and a column layer 32 on the back side, with a groove-shaped void portion 33. In addition, the column portion 34 in the column layer 32 is formed into a quadrangular column shape.

[0097] Also, as shown in the upper diagram of FIG. 10, in this evaluation test, similar to the evaluation test in the comparative example, a vertical load Fz was applied to point A near the upper left corner, point B near the lower left corner, and point C in the center in the in-plane direction of sensor 20 at separate times, and a shear force Fs was applied in the X-axis direction.

[0098] The lower diagram in FIG. 10 is a diagram showing the results when the shear force Fs is changed at points A, B, and C, and the difference d between the pressure center position P and the pressure center position Q is measured.

[0099] As can be seen from the lower diagram of Fig. 10, when the same shear force Fs is applied, the same difference d (difference d between the pressure center position P and the pressure center position Q) occurs at each point A, point B, and point C. This means that the detection sensitivity of the shear force Fs is uniform in the in-plane direction.

[0100] Furthermore, as can be seen from a comparison between the lower graph in Figure 10 and the lower graph in Figure 8, the slope of the graph at each point in this embodiment is greater than the slope of the graph at each point in the comparative example, which means that the detection sensitivity of the shear force Fs in this embodiment is greater than that in the comparative example.

[0101] Here, the detection sensitivity of the shear force Fs becomes uniform in the in-plane direction and the detection sensitivity of the shear force Fs is improved because the voids 33 are provided in the separation layer 23. That is, in this embodiment, the voids 33 are provided in the separation layer 23, so that the ease of distortion (shear stress σ) of the separation layer 23 with respect to the shear force Fs at each point in the in-plane direction becomes uniform, and therefore, in this embodiment, the detection sensitivity of the shear force Fs becomes uniform in the in-plane direction.

[0102] More specifically, in this embodiment, since the void portion 33 is provided, when the shear force Fs is applied, the separation layer 23 is locally distorted at a location corresponding to the in-plane point where the shear force Fs occurs, and the distortion is not transmitted much to other parts. The local distortion tendency (shear stress σ) is uniform regardless of the in-plane point. Therefore, in this embodiment, the detection sensitivity of the shear force Fs is uniform in the in-plane direction.

[0103] Furthermore, in this embodiment, since a void portion 33 is provided in the isolation layer 23, the isolation layer 23 is more easily distorted by the shear force Fs at each point in the in-plane direction (the shear stress σ is smaller), thereby improving the detection sensitivity of the shear force Fs.

[0104] In addition, in this embodiment, the pillar portion 34 formed by the gap portion 33 is provided at a position corresponding to the sensing portion 28 of the second pressure sensor 22b. Therefore, when a vertical load Fz is applied to the sensor 20, the pillar portion 34 locally presses a portion of the second pressure sensor 22b corresponding to the sensing portion 28, so that the force can be efficiently transmitted to the second pressure sensor 22b. Therefore, even if the vertical load Fz is small, the pressure center position Q can be accurately detected in the second pressure sensor 22b, and the shear force Fs can be accurately measured.

[0105] In addition, when the shape of the isolation layer 23 is a two-layer structure of the filling layer 31 and the columnar layer 32, such as shape A or shape B, the columnar layer 32 may be made of a material that is relatively harder than the filling layer 31. In this case, when a vertical load Fz is applied to the sensor 20, the columnar portion 34 of the relatively hard columnar layer 32 locally presses a portion of the second pressure sensor 22b corresponding to the sensing portion 28, so that the force can be transmitted more efficiently in the second pressure sensor 22b.

[0106] <Examples and Comparative Examples of the Separation Layer 23> Next, a description will be given of examples and comparative examples of the separation layer 23. FIG. 11 is a diagram showing examples and comparative examples of the separation layer 23.

[0107] In each embodiment and each comparative example, a sensor 20 was prepared including a separation layer 23 having a different thickness, shape, etc., and each sensor 20 was evaluated for the detection sensitivity in the in-plane direction of the shear force Fs, the variation in the detection sensitivity in the in-plane direction of the shear force Fs, and the resolution of the detection sensitivity in the in-plane direction of the shear force Fs.

[0108] 12 is a diagram showing the state when the detection sensitivity of the shear force Fs and the variation of the detection sensitivity of the shear force Fs are evaluated. First, in the evaluation of the detection sensitivity of the shear force Fs, a Φ6 tapping element of the evaluation device was used to apply a load Fz of 1N vertically downward to the center point C, and a shear force Fs of 1N was applied in the in-plane direction to measure the detection sensitivity (S / N) of the shear force Fs. In other words, the detection sensitivity of the shear force Fs at the center point C was taken as the representative detection sensitivity of the sensor 20.

[0109] In addition, to evaluate the variation in the detection sensitivity of the shear force Fs in the in-plane direction, a load Fz of 1N was applied vertically downward to point D near the right corner with a Φ6 tapper in the evaluation device, and a shear force Fs of 1N was applied in the in-plane direction to measure the detection sensitivity (S / N) of the shear force Fs. The ratio of the detection sensitivity at point D to the detection sensitivity at point C in the center was then calculated ((detection sensitivity at point D / detection sensitivity at point C) x 100), and this ratio was used as the evaluation value for the variation in the in-plane direction of the shear force Fs. Note that the evaluation value for variation is closer to 100%, indicating less variation and uniform detection sensitivity in the in-plane direction.

[0110] 13 is a diagram showing the state when the resolution of the detection sensitivity of the shear force Fs in the in-plane direction was evaluated. In this resolution evaluation, a load Fz of 1N was applied vertically downward at the center point C and at point D near the right corner by a Φ6 tapping element of the evaluation device. Then, a shear force Fs of 1N was applied in the in-plane direction only to the center point C. The ratio of the detection sensitivity of the shear force Fs at point D to the detection sensitivity of the shear force Fs at the center point C at this time (detection sensitivity at point D / detection sensitivity at point C) × 100) was calculated, and this ratio was used as the evaluation value of the resolution in the in-plane direction.

[0111] If a vertical load Fz is applied simultaneously to points C and D, and a shear force Fs is applied only to the central point C, the shear force Fs should ideally be detected only at point C, and not at all at point D, which is the highest resolution. Therefore, the closer the evaluation value for resolution is to 0%, the higher the resolution.

[0112] As will be understood from the explanation here, the resolution of the detection sensitivity in the in-plane direction of shear force Fs is an indicator of whether, when a shear force Fs needs to be detected at two or more points, when a shear force Fs is applied to a certain point, the shear force Fs can be properly detected only at that point without affecting other surrounding points.

[0113] Example 1 In Example 1, the thickness of the separation layer 23 was 2000 μm, and a silicone gel having a hardness of a penetration of 100° was used as the material of the separation layer 23. Also, in Example 1, a separation layer 23 of shape D (see FIG. 5) type was used, in which the column portions 34 were arranged in a 3×3 matrix. Note that the same material (silicone gel having a hardness of a penetration of 100°) was used as the material of the separation layer 23 in each Example and Comparative Example.

[0114] In this Example 1, the detection sensitivity of the shear force Fs was 4.5, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 130%. Also, in Example 1, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 50%.

[0115] Example 2 In Example 2, the thickness of the separation layer 23 was set to 4000 μm. Also, in Example 2, a separation layer 23 of type D (see FIG. 5 ) in which the column portions 34 were arranged in a 3×3 matrix was used.

[0116] In Example 2, the detection sensitivity of the shear force Fs was 7.5, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 130%. Also, in Example 2, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 50%.

[0117] Comparing Example 1 and Example 2, they have the same material and shape of the separation layer 23, but differ in the thickness of the separation layer 23. In Example 2, the thickness of the separation layer 23 is made thicker than in Example 1, and therefore the detection sensitivity of the shear force Fs is higher than that of Example 1.

[0118] Example 3 In Example 3, the thickness of the separation layer 23 was set to 4000 μm. Also, in Example 3, a separation layer 23 of type C (see FIG. 5 ) in which the column portions 34 were arranged in a 3×3 matrix was used.

[0119] In Example 3, the detection sensitivity of the shear force Fs was 7.5, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 130%. Also, in Example 3, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 50%.

[0120] Comparing Example 2 and Example 3, the thickness and material of the isolation layer 23 are the same, but the shapes of the isolation layer 23 are different (shape D, shape C). On the other hand, the detection sensitivity, variation, and resolution of the shear force Fs are the same in Example 2 and Example 3. Therefore, it can be seen that the isolation layers 23 of shapes D and C have almost the same performance. Example 4 In Example 4, the thickness of the separation layer 23 was set to 4000 μm. Also, in Example 4, a separation layer 23 of type B (see FIG. 5 ) in which the column portions 34 were arranged in a 3×3 matrix was used.

[0121] In Example 4, the detection sensitivity of the shear force Fs was 10.0, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 100%. Also, in Example 4, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 25%.

[0122] Comparing Example 4 with Examples 2 and 3, the thickness and material of the separation layer 23 are the same, but the shapes of the separation layer 23 are different (shape B, as well as shapes D and C). On the other hand, in Example 4, the detection sensitivity, variation, and resolution of the shear force Fs are improved compared to Examples 2 and 3. Therefore, it can be seen that the separation layer 23 of shape B has higher performance than the separation layer 23 of shapes D and C.

[0123] The reason why the performance of the separation layer 23 of shape B is improved compared to the separation layer 23 of shapes D and C is because in shape B, the separation layer 23 has a two-layer structure including the filling layer 31 and the column layer 32. That is, in shape B, the filling layer 31 sufficiently supports the first pressure sensor 22a from below, so that the first pressure sensor 22a can properly detect the pressure (pressure center position) due to the external force. In addition, in shape B, the column portion 34 of the column layer 32 locally presses the second pressure sensor 22b, so that the second pressure sensor 22b can properly detect the pressure (pressure center position) due to the external force.

[0124] Example 5 In Example 5, the thickness of the separation layer 23 was set to 4000 μm. Also, in Example 5, the separation layer 23 used was of type A (see FIG. 5 ), in which the column portions 34 were arranged in a 3×3 matrix.

[0125] In Example 5, the detection sensitivity of the shear force Fs was 10.0, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 100%. Also, in Example 5, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 25%.

[0126] Comparing Example 4 and Example 5, the thickness and material of the isolation layer 23 are the same, but the shapes of the isolation layer 23 are different (shape B, shape A). On the other hand, in Example 4 and Example 5, the detection sensitivity, variation, and resolution of the shear force Fs are the same. Therefore, it can be seen that the isolation layers 23 of shapes B and A have almost the same performance. In both shapes B and A, the isolation layer 23 has a two-layer structure including a filling layer 31 and a columnar layer 32.

[0127] Example 6 In Example 6, the thickness of the spacing layer 23 was 4000 μm. Also, in Example 6, the spacing layer 23 used was of type A (see FIG. 5 ), in which the column portions 34 were arranged in a 9×9 matrix.

[0128] In Example 6, the detection sensitivity of the shear force Fs was 10.0, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 100%. Also, in Example 6, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 10%.

[0129] Comparing Example 5 and Example 6, they have the same thickness, material, and shape of the isolation layer 23, but differ in the fineness of the voids in the isolation layer 23 (the number of divisions of the isolation layer 23 is different). On the other hand, Example 6 has improved resolution of the shear force Fs compared to Example 5. This is because, in Example 6, the voids 33 are arranged finer in the isolation layer 23 compared to Example 5, making it more difficult for the shear force Fs at a certain point to be transmitted to surrounding points.

[0130] Comparative Example 1 In Comparative Example 1, the thickness of the isolation layer 23 was set to 2000 μm. Also, in Comparative Example 1, an isolation layer 23′ of type F (see FIG. 5), that is, an isolation layer 23′ having an entirely filled structure, was used.

[0131] In this Comparative Example 1, the detection sensitivity of the shear force Fs was 3.0, the variation of the detection sensitivity in the in-plane direction of the shear force Fs was 240%, and the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 100%.

[0132] Comparative Example 2 In Comparative Example 2, the thickness of the isolation layer 23 was set to 4000 μm. Also, in Comparative Example 2, an isolation layer 23′ of type F (see FIG. 5), that is, an isolation layer 23′ having an entirely filled structure, was used.

[0133] In this Comparative Example 2, the detection sensitivity of the shear force Fs was 5.0, and the variation in the detection sensitivity in the in-plane direction of the shear force Fs was 200%. Also, in Comparative Example 2, the resolution of the detection sensitivity in the in-plane direction of the shear force Fs was 80%.

[0134] Comparing Comparative Example 1 and Comparative Example 2, the material and shape of the isolation layer 23 are the same, but the thickness of the isolation layer 23 is different. In Comparative Example 2, the thickness of the isolation layer 23 is made thicker than in Comparative Example 1, and therefore the detection sensitivity, variation, and resolution of the shear force Fs are all improved compared to Comparative Example 1, but the performance is still insufficient.

[0135] (Comparison between Examples and Comparative Examples) 11, the detection sensitivity, variation, and resolution of the shear force Fs are improved in Examples 1 to 6 compared to Comparative Examples 1 and 2. The reason why the detection sensitivity of the shear force Fs is improved and the variation in the detection sensitivity in the in-plane direction of the shear force Fs is suppressed is as described above (see FIG. 10), and is due to the provision of the void portion 33 in the separation layer 23.

[0136] The reason why the resolution in the in-plane direction of the shear force Fs is improved is also because the gap 33 is provided in the separation layer 23. In other words, when the shear force Fs is applied to the sensor 20, the separation layer 23 is locally distorted at a location corresponding to the point in the in-plane direction where the shear force Fs is generated, because the gap 33 is provided in the separation layer 23, and the distortion is not transmitted much to other parts than that localized location. This improves the resolution.

[0137] <Examples and Comparative Examples of Deformation Layer 27> Next, examples and comparative examples of the deformation layer 27 will be described. In this embodiment, as shown in Fig. 2, the first pressure sensor 22a and the second pressure sensor 22b have a three-layer structure in which the sensor electrode layer 30, the deformation layer 27, and the electrode film layer 26 (reference electrode layer 25) are laminated. In this embodiment, the deformation layer 27 is thinned and made soft, thereby improving the detection sensitivity to the load Fz in the vertical direction.

[0138] For this reason, in this embodiment, the thickness of the deformation layer 27 is set to be greater than 100 μm and equal to or less than 1000 μm, and the basis weight of the deformation layer 27 is set to be 50 mg / cm 2 It is stated as follows.

[0139] Hereinafter, the reasons why the thickness and basis weight of the deformation layer 27 are set within the above-mentioned ranges will be described with reference to examples and comparative examples of the deformation layer 27.

[0140] Fig. 14 is a diagram showing examples and comparative examples of deformation layer 27 (see Fig. 2). Fig. 14 shows the thickness, basis weight, product name, and material of deformation layer 27 in each example and comparative example. Fig. 14 also shows the detection sensitivity (S / N) in the vertical direction of sensor 20 when loads Fz of 1 kPa and 100 kPa are applied downward in the vertical direction to sensor 20.

[0141] In this embodiment, the load Fz in the vertical direction on the sensor 20 is determined based on the pressure value detected by the first pressure sensor 22a, and therefore the detection sensitivity of the sensor 20 in the vertical direction is evaluated using the detection sensitivity of the first pressure sensor 22a in the vertical direction.

[0142] FIG. 15 is a diagram showing the relationship between the thickness and basis weight of the deformation layer 27 in each of the examples and comparative examples.

[0143] Example 7 In Example 7, the thickness of the deformation layer 27 is 300 μm, and the weight per unit area is 7.2 mg / cm 2 In Example 7, the material of the deformation layer 27 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0144] In Example 7, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 3.0 and 80, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0145] Example 8 In Example 8, the deformation layer 27 has a thickness of 500 μm and a basis weight of 12 mg / cm 2 In Example 8, the material of the deformation layer 27 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0146] In Example 8, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 2.5 and 120, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0147] Example 9 In Example 9, the deformation layer 27 has a thickness of 1000 μm and a basis weight of 24 mg / cm 2In Example 9, the material of the deformation layer 27 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0148] In Example 9, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 2.0 and 150, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0149] Example 10 In Example 10, the deformation layer 27 has a thickness of 150 μm and a basis weight of 4 mg / cm 2 In Example 10, the material of the deformation layer 27 was PORON (registered trademark) SS-15DP, which is a foamed film made of polyurethane.

[0150] In Example 10, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 4.0 and 200, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0151] Example 11 In Example 11, the deformation layer 27 has a thickness of 500 μm and a weight per unit area of ​​7.5 mg / cm 2 In Example 11, the deformation layer 27 was made of nanofibers made of polyurethane.

[0152] In Example 11, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 2.0 and 60, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0153] Example 12 In Example 12, the deformation layer 27 has a thickness of 1000 μm and a basis weight of 48 mg / cm 2In Example 12, the deformation layer 27 was made of PORON (registered trademark) SR-S-48, which is a foamed film made of polyurethane.

[0154] In Example 12, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 1.5 and 80, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0155] Comparative Example 3 In Comparative Example 3, the thickness of the deformation layer 27 was 100 μm and the weight per unit area was 3 mg / cm 2 In Example 3, the material of the deformation layer 27 was Purecell (registered trademark) S010, which is a foamed film made of polyurethane.

[0156] In Comparative Example 3, when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction, the detection sensitivity of the sensor 20 in the vertical direction was 2.0 and 20, respectively.

[0157] In Comparative Example 3, the detection sensitivity is acceptable when a load Fz of 1 kPa is applied, but the detection sensitivity is too low when a load Fz of 100 kPa is applied. That is, in Comparative Example 3, the thickness of deformation layer 27 is 100 μm, which is too thin, so the amount of deformation at high pressure is small and the detection sensitivity is poor. For this reason, in this embodiment, the thickness of deformation layer 27 is typically made larger than 100 μm (see also Example 10, where good results are obtained with a thickness of 150 μm).

[0158] Comparative Example 4 In Comparative Example 4, the thickness of the deformation layer 27 was 1000 μm and the weight per unit area was 60 mg / cm 2 In Example 4, the material of the deformation layer 27 was PORON (registered trademark) NU60, which is a foamed film made of polyurethane.

[0159] In Comparative Example 4, when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction, the detection sensitivity of the sensor 20 in the vertical direction was 1 or less and 30, respectively.

[0160] In Comparative Example 4, the detection sensitivity when a load Fz of 1 kPa is applied and the detection sensitivity when a load Fz of 100 kPa is applied are both too low. This is because, in Comparative Example 4, the basis weight is 60 mg / cm 2 This is because the basis weight is too high, and the deformation layer 27 is too hard. For this reason, in this embodiment, the basis weight of the deformation layer 27 is typically 50 mg / cm 2 (In Example 12, the basis weight is 48 mg / cm 2 (See also the good results achieved with

[0161] Comparative Example 5 In Comparative Example 5, the thickness of the deformation layer 27 was 1200 μm, and the weight per unit area was 48 mg / cm 2 In Example 5, the material of the deformation layer 27 was PORON (registered trademark) MS40, which is a foamed film made of polyurethane.

[0162] In Comparative Example 5, when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction, the detection sensitivity of the sensor 20 in the vertical direction was 1 or less and 80, respectively.

[0163] In Comparative Example 5, the detection sensitivity is acceptable when a load Fz of 100 kPa is applied, but the detection sensitivity is too low when a load Fz of 1 kPa is applied. That is, in Comparative Example 5, the thickness of the deformation layer 27 is 1200 μm, which is too thick, so that the distance between the sensor electrode layer 30 and the reference electrode layer 25 is too far for the deformation amount at low pressure, resulting in poor detection sensitivity. For this reason, in this embodiment, the thickness of the deformation layer 27 is typically set to 1000 μm or less (see also Examples 9 and 12, where good results are obtained with a thickness of 1000 μm).

[0164] From the above description, the thickness of the deformation layer 27 is set to be greater than 100 μm and equal to or less than 1000 μm, and the basis weight of the deformation layer 27 is set to be 50 mg / cm 2 It can be seen that if it is set to the following, the detection sensitivity for the load Fz in the vertical direction can be improved.

[0165] <Effect, etc.> As described above, in this embodiment, the gap 33 is provided in the separation layer 23. This makes the detection sensitivity of the shear force Fs uniform in the in-plane direction, improves the detection sensitivity of the shear force Fs, and also improves the resolution of the shear force Fs in the in-plane direction.

[0166] That is, in this embodiment, since the void portion 33 is provided in the separation layer 23, when the shear force Fs is applied, the separation layer 23 is locally distorted at a location corresponding to the in-plane point where the shear force Fs is generated, and the distortion is not transmitted much to other parts. The local distortion tendency (shear stress σ) is uniform regardless of the in-plane point. Therefore, in this embodiment, the detection sensitivity of the shear force Fs is uniform in the in-plane direction. In addition, in this embodiment, the resolution is also improved due to the characteristic that the separation layer 23 is locally distorted at a location corresponding to the in-plane point where the shear force Fs is applied.

[0167] Furthermore, in this embodiment, since a void portion 33 is provided in the separation layer 23, the separation layer 23 is more likely to distort in response to the shear force Fs at each point in the in-plane direction (the shear stress σ is smaller), thereby improving the detection sensitivity of the shear force Fs.

[0168] In this embodiment, the pillar portion 34 formed by the gap portion 33 is provided at a position corresponding to the sensing portion 28 of the second pressure sensor 22b. Therefore, when a vertical load Fz is applied to the sensor 20, the pillar portion 34 locally presses a portion of the second pressure sensor 22b corresponding to the sensing portion 28, so that the force can be efficiently transmitted to the second pressure sensor 22b. Therefore, even if the vertical load Fz is small, the pressure center position Q can be accurately detected in the second pressure sensor 22b, and the shear force Fs can be accurately measured.

[0169] Furthermore, when the shape of the isolation layer 23 is a two-layer structure of the filled layer 31 and the column layer 32, such as shape A or shape B, the filled layer 31 sufficiently supports the first pressure sensor 22a from below, allowing the first pressure sensor 22a to properly detect the pressure (pressure center position) due to the external force. In addition, in shapes A and B, the column portion 34 of the column layer 32 locally presses the second pressure sensor 22b, allowing the second pressure sensor 22b to properly detect the pressure (pressure center position) due to the external force.

[0170] Furthermore, if the column layer 32 is made of a material that is relatively harder than the filling layer 31, when a vertical load Fz is applied to the sensor 20, the column portion 34 in the relatively hard column layer 32 locally presses the portion of the second pressure sensor 22b that corresponds to the sensing portion 28, thereby transmitting the force even more efficiently in the second pressure sensor 22b.

[0171] In this embodiment, the thickness of the deformation layer 27 is greater than 100 μm and is equal to or less than 1000 μm, and the basis weight of the deformation layer 27 is 50 mg / cm 2 This makes it possible to improve the detection sensitivity for the load Fz in the vertical direction.

[0172] Second Embodiment Next, a second embodiment of the present technology will be described. In the second embodiment, another example of the pressure sensor 22 will be described. Fig. 16 is a cross-sectional view of the pressure sensor 22' according to the second embodiment as viewed from the side.

[0173] The pressure sensor 22′ includes a first electrode film layer 43 (first reference electrode layer 42), a sensor electrode layer 45, and a first deformation layer 44 interposed between the electrode film layer 43 (first reference electrode layer 42) and the sensor electrode layer 47. The pressure sensor 22′ also includes a second electrode film layer 51 (second reference electrode layer 50), and a second deformation layer 48 interposed between the second electrode film layer 51 (second reference electrode layer 50) and the sensor electrode layer 47.

[0174] This pressure sensor 22' has a laminated structure in which, from the bottom up in the vertical direction, a second electrode film layer 51 (second reference electrode layer 50), a second deformation layer 48, a sensor electrode layer 47, a first deformation layer 44, and a first electrode film layer 43 (first reference electrode layer 42) are laminated.

[0175] The first electrode film layer 43 includes a film layer 41 and a first reference electrode layer 42. The second electrode film layer 51 includes a film layer 49 and a second reference electrode layer 50. The sensor electrode layer 47 also includes a substrate 46 and a plurality of sensing portions 45.

[0176] The first electrode film layer 43 corresponds to the electrode film layer 26 in the first embodiment, and the first deformation layer 44 corresponds to the deformation layer 27 in the first embodiment. The sensor electrode layer 47 corresponds to the sensor electrode layer 30 in the first embodiment. The second electrode film layer 51 has the same configuration as the first electrode film layer 43, except that it is upside down.

[0177] The second deformation layer 48 is made of, for example, a material such as double-sided tape, silicon gel, urethane gel, synthetic rubber, foam, etc. The second deformation layer 48 may be made of, for example, a patterned structure including the pillars 34. This patterned structure can be of various types, such as a matrix, stripe, mesh, radial, geometric, or spiral structure.

[0178] <Each embodiment and each modification> Next, examples and comparative examples of the second embodiment will be described. Fig. 17 is a diagram showing examples and comparative examples of the second embodiment. Fig. 17 shows the material, product name, thickness, area occupancy, and basis weight of the first deformation layer 44 in each example and comparative example. Fig. 17 also shows the material and product name of the second deformation layer 48.

[0179] 17 also shows the detection sensitivity in the vertical direction of pressure sensor 22' when a load Fz of 10 gf or 1 kgf is applied vertically downward to pressure sensor 22. Note that the detection sensitivity in the vertical direction of pressure sensor 22' shown in FIG. 17 does not indicate the sensitivity of sensor 20 as a whole, but indicates the detection sensitivity of pressure sensor 22' alone.

[0180] (Example 13) In Example 13, nanofibers were used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 150 μm, and the area occupancy was 100%. In Example 13, the basis weight was 4 mg / cm 2 In Example 13, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0181] In Example 13, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 10 and 150, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0182] Example 14 In Example 14, nanofibers were used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 400 μm, and the area occupancy was 100%. In Example 14, the basis weight was 10 mg / cm 2 In Example 14, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0183] In Example 14, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 40 and 300, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0184] Example 15 In Example 15, a foamed film PORON (registered trademark) SR-S-32P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 200 μm, and the area occupancy was 100%. In Example 15, the basis weight was 6 mg / cm 2 In Example 15, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0185] In Example 15, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 10 and 200, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0186] Example 16 In Example 16, a foamed film PORON (registered trademark) SS-32P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 16, the basis weight was 16 mg / cm 2 In Example 16, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0187] In Example 16, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 30 and 350, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0188] (Example 17) In Example 17, a foamed film PORON (registered trademark) SS-24P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 300 μm, and the area occupancy was 100%. In Example 17, the basis weight was 7 mg / cm 2 In Example 17, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0189] In Example 17, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 50 and 350, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0190] (Example 18) In Example 18, a foamed film PORON (registered trademark) SS-24P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 18, the basis weight was 12 mg / cm 2 In Example 18, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0191] In Example 18, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 40 and 400, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0192] (Example 19) In Example 19, a foamed film PORON (registered trademark) SS-15P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 19, the basis weight was 8 mg / cm 2 In Example 19, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0193] In Example 19, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 50 and 400, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0194] (Example 20) In Example 20, a foamed film PORON (registered trademark) SR-S-40P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 1000 μm, and the area occupancy was 100%. In Example 20, the basis weight was 40 mg / cm 2 In Example 20, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0195] In Example 20, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 15 and 200, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0196] Example 21 In Example 21, a foamed film PORON (registered trademark) HH48 was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 1000 μm, and the area occupancy rate was 100%. In Example 21, the basis weight was 50 mg / cm 2 In Example 21, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0197] In Example 21, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 10 and 150, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0198] Example 22 In Example 22, a foamed film PORON (registered trademark) SS-24P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 22, the basis weight was 12 mg / cm 2 In Example 22, the material of the second deformation layer 48 was a foamed film, PORON (registered trademark) SS-24P.

[0199] In Example 22, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 60 and 500, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0200] (Example 23) In Example 23, a foamed film PORON (registered trademark) SS-24P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 23, the basis weight was 12 mg / cm 2 In Example 23, the material of the second deformation layer 48 was a foamed film, PORON (registered trademark) SS-32P.

[0201] In Example 23, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 50 and 600, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0202] (Example 24) In Example 24, a foamed film PORON (registered trademark) SS-24P was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 500 μm, and the area occupancy was 100%. In Example 24, the basis weight was 12 mg / cm 2 In Example 24, the material of the second deformation layer 48 was silicone gel FFG-42100-1t.

[0203] In Example 24, when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22' in the vertical direction, the detection sensitivity of the pressure sensor 22' in the vertical direction was 40 and 400, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure.

[0204] Comparative Example 6 In Comparative Example 6, a foamed film Purecell (registered trademark) S010 was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 100 μm, and the area occupancy rate was 100%. In Comparative Example 6, the basis weight was 3 mg / cm 2 In Comparative Example 6, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0205] In Comparative Example 6, the detection sensitivity of the pressure sensor 22 in the vertical direction when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22 in the vertical direction was 5 and 100, respectively. This detection sensitivity is considered to be a low value at low pressure and high pressure.

[0206] That is, in Comparative Example 6, the thickness of the first deformation layer 44 is 100 μm, which is too thin, so that the amount of deformation at low and high pressures is small, and the detection sensitivity is poor.

[0207] Comparative Example 7 In Comparative Example 7, a foamed film PORON (registered trademark) H48 was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 1500 μm, and the area occupancy rate was 100%. In Comparative Example 7, the basis weight was 70 mg / cm 2In Comparative Example 7, the material of the second deformation layer 48 was a double-sided tape Neofix (registered trademark) 100.

[0208] In Comparative Example 7, the detection sensitivity of the pressure sensor 22 in the vertical direction when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22 in the vertical direction was 5 and 30, respectively. This detection sensitivity is considered to be a low value at low pressure and high pressure.

[0209] That is, in Comparative Example 7, the basis weight of the first deformation layer 44 is too large at 70, so the first deformation layer 44 is hard, and the deformation amount at low pressure and high pressure is small, resulting in poor detection sensitivity. Also, in Comparative Example 7, the thickness of the first deformation layer 44 is too thick at 1500 μm, so that the distance between the sensor electrode layer 47 and the first reference electrode layer 42 and the second reference electrode layer 50 is too large for the deformation amount at low pressure, resulting in poor detection sensitivity.

[0210] Comparative Example 8 In Comparative Example 8, the foamed film PORON (registered trademark) H48 was used as the material of the first deformation layer 44, the thickness of the first deformation layer 44 was 1500 μm, and the area occupancy rate was 100%. In Comparative Example 8, the basis weight was 70 mg / cm 2 In Comparative Example 8, the material of the second deformation layer 48 was a foamed film, PORON (registered trademark) H48.

[0211] In Comparative Example 8, the detection sensitivity of the pressure sensor 22 in the vertical direction when a load Fz of 10 gf and 1 kgf was applied to the pressure sensor 22 in the vertical direction was 5 and 50, respectively. This detection sensitivity is considered to be a low value at low pressure and high pressure.

[0212] That is, in Comparative Example 8, the basis weight of the first deformation layer 44 is too large at 70, so the first deformation layer 44 is hard, and the deformation amount at low pressure and high pressure is small, resulting in poor detection sensitivity. Also, in Comparative Example 8, the thickness of the first deformation layer 44 is too thick at 1500 μm, so that the distance between the sensor electrode layer 47 and the first reference electrode layer 42 and the second reference electrode layer 50 is too large for the deformation amount at low pressure, resulting in poor detection sensitivity.

[0213] From the results shown in FIG. 17, it is found that the thickness of the first deformation layer 44 is greater than 100 μm and is equal to or less than 1000 μm, and the basis weight of the first deformation layer 44 is equal to or less than 50 mg / cm 2 It can be seen that if it is set to the following, the detection sensitivity for the load Fz in the vertical direction can be improved.

[0214] Third Embodiment Next, a second embodiment of the present technology will be described. In a third embodiment, yet another example of the pressure sensor 22 will be described. The pressure sensor 22' according to the third embodiment has a laminated structure in which, similar to the pressure sensor 22' according to the second embodiment, a second electrode film layer 51 (second reference electrode layer 50), a second deformation layer 48, a sensor electrode layer 47, a first deformation layer 44, and a first electrode film layer 43 (first reference electrode layer 42) are laminated in this order from the bottom in the vertical direction.

[0215] In the third embodiment, the thickness of the first deformation layer 44 is 100 μm or less, and the basis weight of the first deformation layer 44 is 3 mg / cm 2 In the third embodiment, the thickness of the second deformation layer 48 is greater than 100 μm and is equal to or less than 1000 μm, and the basis weight of the second deformation layer 48 is equal to or less than 50 mg / cm 2 The following is stated.

[0216] In the third embodiment, by configuring the first deformation layer 44 and the second deformation layer 48 within the above range, the first deformation layer 44 improves the detection sensitivity at low pressure, while the second deformation layer 48 improves the detection sensitivity at both low and high pressure.

[0217] <Each embodiment and each modification> Next, examples and comparative examples of the third embodiment will be described. Fig. 18 is a diagram showing examples and comparative examples of the third embodiment. Fig. 18 shows the thickness, basis weight, product name, and material of the first deformation layer 44 in each example and comparative example. Fig. 18 also shows the thickness, basis weight, product name, and material of the second deformation layer 48.

[0218] Fig. 18 also shows the detection sensitivity in the vertical direction of the sensor 20 when a load Fz of 10 kPa and 100 kPa is applied downward in the vertical direction to the sensor 20. Fig. 18 also shows the displacement detection sensitivity when the displacement is 5 μm.

[0219] (Example 25) In Example 25, the thickness of the first deformation layer 44 is 100 μm, and the weight per unit area is 2.5 mg / cm 2 In Example 25, the material of the first deformation layer 44 was a nanofiber made of polyurethane.

[0220] In Example 25, the thickness of the second deformation layer 48 is 500 μm, and the weight per unit area is 12 mg / cm 2 In Example 25, the material of the second deformation layer 48 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0221] In Example 25, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 3 and 120, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure. In Example 25, the displacement detection sensitivity when the displacement was 5 μm was 5, which was a high value.

[0222] (Example 26) In Example 26, the thickness of the first deformation layer 44 was 25 μm and the weight per unit area was 0.9 mg / cm2 In Example 26, the material of the first deformation layer 44 was a nanofiber made of polyurethane.

[0223] In Example 26, the thickness of the second deformation layer 48 is 500 μm, and the weight per unit area is 12 mg / cm 2 In Example 26, the material of the second deformation layer 48 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0224] In Example 26, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 3 and 120, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure. In Example 26, the displacement detection sensitivity when the displacement was 5 μm was 10, which was a high value.

[0225] Example 27 In Example 27, the thickness of the first deformation layer 44 is 25 μm, and the weight per unit area is 0.9 mg / cm 2 In Example 27, the material of the first deformation layer 44 was a nanofiber made of polyurethane.

[0226] In Example 27, the thickness of the second deformation layer 48 is 500 μm, and the weight per unit area is 7.5 mg / cm 2 In Example 27, the material of the second deformation layer 48 was PORON (registered trademark) SS-15DP, which is a foamed film made of polyurethane.

[0227] In Example 27, the detection sensitivity of the sensor 20 in the vertical direction when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 10 and 200, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure. In Example 27, the displacement detection sensitivity at a displacement of 5 μm was 15, which was a high value.

[0228] Comparative Example 9 In Comparative Example 9, the thickness of the first deformation layer 44 was 500 μm and the basis weight was 12 mg / cm 2 In Comparative Example 9, the material of the first deformation layer 44 was PORON (registered trademark) SS-24DP, which is a foamed film made of polyurethane.

[0229] In Comparative Example 9, the thickness of the second deformation layer 48 was set to 100 μm, and the material of the second deformation layer 48 was Neofix (registered trademark) 100, which is a double-sided tape.

[0230] In Comparative Example 9, the detection sensitivity in the vertical direction of the sensor 20 when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 3 and 120, respectively. This detection sensitivity is considered to be a high value at low pressure and high pressure. On the other hand, in Comparative Example 9, the displacement detection sensitivity when the displacement was 5 μm was 1 or less, which was a low value.

[0231] Comparative Example 10 In Comparative Example 10, the thickness of the first deformation layer 44 was 25 μm and the weight per unit area was 0.9 mg / cm 2 In Comparative Example 10, the material of the first deformation layer 44 was a nanofiber made of polyurethane.

[0232] In Comparative Example 10, the thickness of the second deformation layer 48 was 100 μm, and the material of the second deformation layer 48 was Neofix (registered trademark) 100, which is a double-sided tape.

[0233] In Comparative Example 10, the detection sensitivity in the vertical direction of the sensor 20 when loads Fz of 1 kPa and 100 kPa were applied to the sensor 20 in the vertical direction was 2 and 20, respectively. This detection sensitivity is not a problem at low pressure, but is a low value at high pressure. In Comparative Example 10, the displacement detection sensitivity at a displacement of 20 μm was 20, which was a high value.

[0234] <<Various modified examples>> In the above description, the robot hand 10 has been taken as an example of an electronic device equipped with the sensor 20. However, the electronic device equipped with the sensor 20 is not limited to the robot hand 10, and may be other devices such as a mobile phone (including a smartphone) or a PC. Typically, any device equipped with the sensor 20 is considered to be an electronic device.

[0235] The present technology can also have the following configurations. (1) A sensor unit including a first pressure sensor on a front side and a second pressure sensor on a back side facing each other, and detecting a force in an in-plane direction based on a pressure detection position in the in-plane direction by the first pressure sensor and the second pressure sensor; a separation layer having a gap and interposed between the first pressure sensor and the second pressure sensor; A sensor comprising: (2) The sensor according to (1), The separation layer is formed by the voids and has a plurality of columns extending in a vertical direction perpendicular to the in-plane direction. Sensor. (3) The sensor according to (2), The gap is provided in a groove shape that does not penetrate the separation layer in the vertical direction. Sensor. (4) The sensor according to (2), The gap is formed in the shape of a hole penetrating the separation layer in the vertical direction. Sensor. (5) The sensor according to (3) above, The separation layer includes a first layer having no voids and a second layer having the voids and the plurality of columns formed by the voids. Sensor. (6) The sensor according to (5) above, the first layer is a layer on the first pressure sensor side, The second layer is a layer on the second pressure sensor side. Sensor. (7) The sensor according to (6), The second layer is made of a material that is relatively harder than the first layer. Sensor. (8) The sensor according to any one of (2) to (7) above, each of the plurality of pillar portions contacts the second pressure sensor; the second pressure sensor has a plurality of sensing units that detect pressure; The plurality of pillars are provided at positions corresponding to the plurality of sensing units in the vertical direction. Sensor. (9) The sensor according to any one of (2) to (8), The plurality of columnar portions have a shape with a constant thickness in the vertical direction. Sensor. (10) The sensor according to any one of (2) to (8), The plurality of columnar portions have a shape with a different thickness in the vertical direction. Sensor. (11) The sensor according to (10), The plurality of column portions have a shape that narrows in thickness from the front side to the back side in the vertical direction. Sensor. (12) The sensor according to any one of (1) to (11), The sensor unit detects a force in a normal direction perpendicular to the in-plane direction based on a value of a pressure detected by at least the first pressure sensor out of the first pressure sensor and the second pressure sensor. Sensor. (13) The sensor according to (12), The first pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, and a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer; The weight of the first deformation layer is 50 mg / cm 2 is as follows: The thickness of the first deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor. (14) The sensor according to (13), The first deformation layer includes a porous layer. Sensor. (15) The sensor according to (13) or (14), The first deformation layer includes a fiber layer. Sensor. (16) The sensor according to any one of (13) to (15), The first deformation layer includes nanofibers. Sensor. (17) The sensor according to any one of (13) to (16), The first pressure sensor includes a second reference electrode layer and a second deformation layer interposed between the second reference electrode layer and the sensor electrode layer. Sensor. (18) The sensor according to any one of (12) to (17), The second pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, and a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer; The weight of the first deformation layer is 50 mg / cm 2 is as follows: The thickness of the first deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor. (19) The sensor according to (12), The first pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer, a second reference electrode layer, and a second deformation layer interposed between the second reference electrode layer and the sensor electrode layer; The weight of the first deformation layer is 3 mg / cm 2is as follows: The thickness of the first deformation layer is 100 μm or less, The weight of the second deformation layer is 50 mg / cm 2 is as follows: The thickness of the second deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor. (20) A sensor unit including a first pressure sensor on a front side and a second pressure sensor on a back side facing each other, the sensor unit detecting a force in an in-plane direction based on a detection position of the pressure in the in-plane direction by the first pressure sensor and the second pressure sensor; A sensor having an air gap and a separation layer interposed between the first pressure sensor and the second pressure sensor. An electronic device comprising: [Explanation of symbols]

[0236] 10. Robot hand 20…Sensor 21…Sensor section 22...Pressure sensor 22a...first pressure sensor 22b...Second pressure sensor 23…Separation layer 33...Void part 34...Column part

Claims

1. a sensor unit including a first pressure sensor on a front side and a second pressure sensor on a back side facing each other, the sensor unit detecting a force in an in-plane direction based on a pressure detection position in the in-plane direction by the first pressure sensor and the second pressure sensor; a separation layer having a gap and a plurality of pillars formed by the gap and extending in a vertical direction perpendicular to the in-plane direction, the separation layer being interposed between the first pressure sensor and the second pressure sensor; A sensor comprising:

2. 2. The sensor of claim 1, The gap is provided in a groove shape that does not penetrate the separation layer in the vertical direction. Sensor.

3. 2. The sensor of claim 1, The gap is formed in the shape of a hole penetrating the separation layer in the vertical direction. Sensor.

4. 3. The sensor of claim 2, The separation layer includes a first layer having no voids and a second layer having the voids and the plurality of columns formed by the voids. Sensor.

5. 5. The sensor of claim 4, the first layer is a layer on the first pressure sensor side, The second layer is a layer on the second pressure sensor side. Sensor.

6. 6. The sensor of claim 5, The second layer is made of a material that is relatively harder than the first layer. Sensor.

7. 2. The sensor of claim 1, each of the plurality of pillar portions contacts the second pressure sensor; the second pressure sensor has a plurality of sensing portions for detecting pressure; The plurality of pillars are provided at positions corresponding to the plurality of sensing units in the vertical direction. Sensor.

8. 2. The sensor of claim 1, The plurality of columnar portions have a shape with a constant thickness in the vertical direction. Sensor.

9. 2. The sensor of claim 1, The plurality of columnar portions have a shape with a different thickness in the vertical direction. Sensor.

10. 10. The sensor of claim 9, The plurality of column portions have a shape that narrows in thickness from the front side to the back side in the vertical direction. Sensor.

11. 2. The sensor of claim 1, The sensor unit detects a force in a normal direction perpendicular to the in-plane direction based on a pressure value detected by at least the first pressure sensor out of the first pressure sensor and the second pressure sensor. Sensor.

12. 12. The sensor of claim 11, The first pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, and a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer, The weight of the first deformation layer is 50 mg / cm ２ is as follows: The thickness of the first deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor.

13. 13. The sensor of claim 12, The first deformation layer includes a porous layer. Sensor.

14. 13. The sensor of claim 12, The first deformation layer includes a fiber layer. Sensor.

15. 13. The sensor of claim 12, The first deformation layer includes nanofibers. Sensor.

16. 13. The sensor of claim 12, The first pressure sensor includes a second reference electrode layer and a second deformation layer interposed between the second reference electrode layer and the sensor electrode layer. Sensor.

17. 12. The sensor of claim 11, The second pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, and a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer, The weight of the first deformation layer is 50 mg / cm ２ is as follows: The thickness of the first deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor.

18. 12. The sensor of claim 11, The first pressure sensor includes a first reference electrode layer, a sensor electrode layer including a plurality of sensing portions for detecting pressure, a first deformation layer interposed between the first reference electrode layer and the sensor electrode layer, a second reference electrode layer, and a second deformation layer interposed between the second reference electrode layer and the sensor electrode layer, The weight of the first deformation layer is 3 mg / cm ２ is as follows: The thickness of the first deformation layer is 100 μm or less, The weight of the second deformation layer is 50 mg / cm ２is as follows: The thickness of the second deformation layer is greater than 100 μm and less than or equal to 1000 μm. Sensor.

19. a sensor unit including a first pressure sensor on a front side and a second pressure sensor on a back side facing each other, the sensor unit detecting a force in an in-plane direction based on a detection position of the pressure in the in-plane direction by the first pressure sensor and the second pressure sensor; A sensor including a gap, a plurality of pillars formed by the gap and extending in a vertical direction perpendicular to the in-plane direction, and a separation layer interposed between the first pressure sensor and the second pressure sensor. An electronic device comprising:

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