Laser irradiation device and laser irradiation method

The laser irradiation device forms high-quality patterns on substrates by using multiple writing units to irradiate non-overlapping areas, improving productivity and pattern quality on surfaces like containers.

JP7600754B2Active Publication Date: 2024-12-17RICOH CO LTD
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Patent Information

Application Number
JP2021029677
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-02-26
Publication Date
2024-12-17
Estimated Expiration
2041-02-26

AI Technical Summary

Technical Problem

Existing methods struggle to form high-quality patterns on substrates with high productivity, particularly in forming non-overlapping patterns on surfaces like containers, which affect visibility and efficiency.

Method used

A laser irradiation device and method that forms patterns by irradiating non-overlapping areas on a substrate using multiple writing units, each controlled to irradiate specific areas with lasers, ensuring high accuracy and speed in pattern formation.

Benefits of technology

This approach allows for the formation of high-quality patterns with improved productivity and uniformity on substrates, enhancing visibility and reducing overall processing time.

✦ Generated by Eureka AI based on patent content.

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Abstract

To form a pattern of high quality on a base material 1a with high productivity.SOLUTION: A manufacturing apparatus 500 includes: a plurality of writing units including a first writing unit 310 and a second writing unit 320 which irradiate a plurality of irradiation regions that does not overlap each other on a surface of a base material 1a of a storage container 1 with a laser, thereby form a pattern 11 in the plurality of irradiation regions, and emit a laser; and a control device 400 which controls the first writing unit 310 so that a first irradiation region included in the plurality of irradiation regions is irradiated with a laser but an irradiation region other than the first irradiation region in the plurality of irradiation regions is not irradiated with a laser, and controls the second writing unit 320 so that a second irradiation region included in the plurality of irradiation regions is irradiated with a laser, but an irradiation region other than a second irradiation region in the plurality of irradiation regions is not irradiated with a laser.SELECTED DRAWING: Figure 12
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Description

[Technical field]

[0001] The present invention relates to a laser irradiation device and a laser irradiation method. By law Regarding. [Background technology]

[0002] Patent document 1 describes a marking device 1 that has first laser processing units 3a, 3b as a first marking unit that marks a workpiece with a first dot diameter, second laser processing units 5a, 5b as a second marking unit that marks the workpiece with a second dot diameter smaller than the first dot diameter, and a device PC7 as a divided drawing pattern registration unit that divides and registers a drawing pattern into a first drawing pattern drawn by the first laser processing units 3a, 3b and a second drawing pattern drawn by the second laser processing units 5a, 5b, thereby enabling the marking device 1 to simultaneously improve processing accuracy and reduce working time. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6278451 Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to form a high-quality pattern on a substrate with high productivity. [Means for solving the problem]

[0005] The laser irradiation device according to the present invention is a laser irradiation device that forms a pattern in a plurality of irradiation regions that do not overlap each other on a surface of a substrate by irradiating the plurality of irradiation regions with a laser, and includes a plurality of irradiation units including a first irradiation unit and a second irradiation unit that each irradiate with a laser, and a control unit that controls the first irradiation unit to irradiate a first irradiation region included in the plurality of irradiation regions with the laser but not to irradiate irradiation regions other than the first irradiation region in the plurality of irradiation regions with the laser, and controls the second irradiation unit to irradiate a second irradiation region included in the plurality of irradiation regions with the laser but not to irradiate irradiation regions other than the second irradiation region in the plurality of irradiation regions with the laser. The substrate has a surface having a plurality of mutually non-overlapping divided regions in which patterns are to be formed, and the control unit determines, for the plurality of divided regions, which divided regions are included in the first irradiation region and which divided regions are included in the second irradiation region, according to the type of pattern to be formed in the divided regions. do. Effect of the Invention

[0006] According to the present invention, a high-quality pattern can be formed on a substrate with high productivity. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a diagram showing an example of a pattern formed on a substrate according to an embodiment of the present invention. [Diagram 2] 5A and 5B are diagrams showing an example of the configuration of a dot portion according to the present embodiment, in which (a) is a top view and (b) is a cross-sectional view taken along the line CC in (a). [Diagram 3] 5A and 5B are scanning electron microscope photographs of a dot portion according to the present embodiment, in which (a) is a perspective view seen from above, and (b) is a perspective view seen from the cross-sectional direction indicated by the arrow DD in (a). [Figure 4] 11 shows a modified example of the dot portion according to the present embodiment. [Diagram 5] 11 shows another modified example of the dot portion according to the present embodiment. [Figure 6] FIG. 2 is a diagram showing a manufacturing apparatus according to the present embodiment. [Figure 7] 1A and 1B are diagrams illustrating laser irradiation according to the present embodiment. [Figure 8] 11A and 11B are diagrams illustrating a container and additional information according to the present embodiment. [Figure 9]FIG. 4 is a diagram illustrating a subdivided region according to the embodiment. [Figure 10] 4 is a diagram illustrating the contents stored in a table of the control device according to the embodiment. FIG. [Figure 11] FIG. 4 is a diagram illustrating the processing of the control device according to the embodiment. [Figure 12] 5A to 5C are diagrams illustrating a specific example of processing by the control device according to the embodiment. [Figure 13] 5A to 5C are diagrams illustrating the operation of the manufacturing apparatus according to the present embodiment. [Figure 14] FIG. 13 is a diagram showing a manufacturing apparatus according to a modified example of the present embodiment. [Figure 15] FIG. 13 is a diagram showing a manufacturing apparatus according to a second modified example of the present embodiment. [Figure 16] 13A to 13C are diagrams illustrating the operation of a manufacturing apparatus according to a second modified example of the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, the embodiment of the invention will be described with reference to the drawings. In each drawing, the same components are given the same reference numerals, and duplicated explanations may be omitted. The embodiments shown below are illustrative of an apparatus for embodying the technical idea of ​​the present invention, and the present invention is not limited to the embodiments shown below. The dimensions, materials, shapes, relative positions, etc. of the components described below are intended to be illustrative, and not to limit the scope of the present invention, unless otherwise specified. The sizes and positional relationships of the components shown in the drawings may be exaggerated to clarify the explanation.

[0009] The substrate according to the embodiment of the present invention is a substrate in which a predetermined shape constituting a pattern is formed in at least a part of the region. The substrate means a material portion of an object. An example of the object is a container. An example of the container is a PET bottle that contains a resin such as PET and contains a beverage. However, there is no particular limit to the object, and it may be any object. There is also no limit to the shape and material of the container, and it may be a container of any shape and made of any material.

[0010] The "at least a part of the region" of the substrate includes the surface region of the substrate. The surface of the substrate means the surface of the material that is in contact with the outside air, etc. In the embodiment, the term "surface of the substrate" is used as a term that is symmetrical to the inside of the substrate, so that, for example, in the case of a plate-shaped substrate, both the front surface and the back surface of the substrate correspond to the surface of the substrate. In addition, in the case of a cylindrical substrate, both the outer surface and the inner surface of the substrate correspond to the surface of the substrate.

[0011] The pattern may include letters, codes such as barcodes, figures, images, etc., and may display information about the container or the contained item, such as a beverage, contained in the container, such as the name, identification number, manufacturer, and manufacturing date and time.

[0012] In the case of containers such as PET bottles, this information may be displayed by attaching a recording medium on which it is recorded to the surface of the container, but in this embodiment, this information is displayed without using a recording medium by forming a pattern showing this information on the surface of the base material that constitutes the container.

[0013] FIG. 1 is a diagram illustrating an example of a pattern formed on a substrate according to this embodiment. FIG. 1 shows a part of a substrate 1a constituting a container 1 having a pattern 11 formed on its surface. The container 1 and the contained object constitute a container. The container 1 is composed of a substrate 1a made of, for example, a PET resin that is transparent to visible light. Visible light is light with a lower wavelength of about 360 nm to about 400 nm and an upper wavelength of about 760 nm to about 1600 nm.

[0014] Pattern 11 constitutes the character string "labelless." Region A is a part of the character "su" in pattern 11. Oblique view B is a schematic enlarged view of region A to explain the details of the configuration of pattern 11.

[0015] As shown in the perspective view B, the region A includes a plurality of dot portions 110. The dot portions 110 are an example of a predetermined shape formed in at least a partial region of the substrate and constituting a pattern. The predetermined shape includes a shape formed on the surface of the substrate and an internal shape such as a void portion located below the shape formed on the surface of the substrate.

[0016] The dot portion 110 is a milky white portion as a visual example, and includes a recessed portion 111 and a protruding portion 112. The recessed portion 111 is a portion recessed into the surface of the base material 1a constituting the container 1, and is an example of a predetermined recessed portion. The protruding portion 112 is a portion protruding from the surface of the base material 1a constituting the container 1, and is an example of a predetermined protruding portion. The protruding portion 112 is a portion protruding from the surface of the base material 1a constituting the container 1, and is an example of a predetermined protruding portion. of It is formed around the recess 111 so as to surround it.

[0017] The multiple dot portions 110 are formed as an aggregate on the base material 1a that constitutes the container 1, thereby forming the character string "labelless" in the pattern 11. Here, an aggregate refers to an object formed by assembling individual parts, and the pattern 11 is formed by an aggregate of the multiple dot portions 110.

[0018] Since a plurality of dot portions 110 are formed in the patterned region 13, the reflection direction and light diffusion property of light incident on the container 1 differ from those of the non-patterned region 12. As a result, at least one of the light transmittance and light reflectance for light incident on the container 1 differs between the patterned region 13 and the non-patterned region 12. The difference in at least one of the light transmittance and light reflectance allows a person looking at the container 1 to visually recognize the pattern 11 formed on the container 1.

[0019] Moreover, the overall width (dot width) of each of the multiple dot portions 110 and the spacing (dot spacing) between the multiple dot portions 110 are small compared to the pattern 11. This allows a person looking at the container 1 to see the word "labelless" in the pattern 11 without seeing the dot portions 110 themselves.

[0020] The dots are arranged in a dot-to-dot manner so that the dot portion 110 itself is not visible. and The gap between the container 1 and the container 1 is preferably 100 μm or less, although it depends on the eyesight of the person viewing the container 1 and the distance between the eyes and the container 1. As for the dot width, the smaller the better, but the size at which the shape of the dot itself cannot be distinguished is set to 100 μm or less. μm It is preferable that the amount of the ionization is smaller than the degree of the ionization. This point will be explained in more detail.

[0021] A person with eyesight of about 1.5 can generally distinguish black and white dots of 50 μm when viewing container 1 from a distance of about 30 cm. This limit increases when the black and white contrast is low, but is generally around 50 μm. However, if only the dot is present, a 30 μm dot can be seen, and if the dot has high contrast, a 10 μm dot can also be seen.

[0022] Furthermore, when there are two adjacent dots 110, whether the two dots 110 can be seen depends on the resolution of the human eye, etc. Note that resolution refers to the minimum distance at which two dots can be recognized as two separate points.

[0023] The resolution of the human eye depends on eyesight, but is generally 100 μm at a distance of 30 cm. 30 cm corresponds to the distance at which one picks up a PET bottle containing drinking water or the like and is able to visually identify the information on the label or other information displayed on the PET bottle. In other words, if one picks up a PET bottle with one's elbow slightly bent, the distance between one's eyes and the PET bottle will be about 30 cm. Taking into account the size of a person's physique, this distance can vary within a range of about 30 cm to 50 cm. The resolution is about 100 μm at a distance of 30 cm and 160 μm at a distance of 50 cm.

[0024] Another indicator is that when 200 dpi (dots per inch) is guaranteed as the resolution boundary, if the gap between adjacent dots is 130 μm or less, the dots will be visible as a single mass without being broken down into individual dots.

[0025] From the above, by making the gap between dots preferably 160 μm or less, more preferably 100 μm or less, the dot portions 110 are not perceived as being separate but are perceived as a continuum, and the pattern such as the character "Labelless" in pattern 11 can be seen. Also, if the size of the dots is larger than 100 μm, there are cases where the shape change of the dots themselves is visible. Therefore, by making the dots preferably 160 μm or less, more preferably 100 μm or less, the dots can be perceived as a uniform pattern even if there is a shape change within the dots, and the pattern such as the character, which is a collection of the dots, can be seen as a uniform pattern without graininess.

[0026] Various processing methods such as laser processing, electric discharge processing, etching processing, cutting processing, and molding processing using a mold can be applied to form the dot portion 110. However, among these, the laser processing method is preferable because it can process the base material without contacting it, and can perform high-speed processing by scanning with laser light, arraying the light source, pattern exposure, etc.

[0027] In laser processing, the size, shape, depth, etc. of the dot portion 110 can be changed by adjusting the light energy of the irradiated laser light (laser beam), the size of the laser beam, the irradiation time, etc. In addition, the cross-sectional intensity distribution of the laser beam is generally a Gaussian distribution, but it is also possible to adjust the intensity distribution by combining laser beams of an array light source, or to generate a top-hat-shaped intensity distribution with a flat central intensity distribution by designing the irradiation optical system. In addition, it is desirable to adjust the laser irradiation size by the light source and optical system and make the laser irradiation size almost constant in processing. Note that here, constant means that there is substantially no fluctuation within the tolerance of the processing accuracy, and includes fluctuations within the tolerance of about a few percent depending on the processing accuracy.

[0028] The recesses 111 in the dot portions 110 are formed by melting, burning, vaporizing, or deforming a part of the base material 1a at the irradiation position of the laser light. The protrusions 112 are formed by a part of the base material 1a that is separated from the recesses 111 and adheres to the periphery of the recesses 111 and solidifies without being burned or vaporized. Since this is a process that mainly uses thermal energy, a resin with a relatively low thermal conductivity is suitable for the material of the base material 1a, but other materials such as glass can also be used.

[0029] In addition, by controlling the thermal conductivity, various predetermined shapes such as the dots 110 can be formed. For example, the thermal conductivity can be controlled by making the base material 1a itself highly thermally conductive, or by closely contacting another member with high thermal conductivity with the base material 1a to rapidly release heat generated by the base material 1a due to irradiation with laser light. Examples of the other member with high thermal conductivity include a coolant and a metal.

[0030] Furthermore, phenomena such as melting, evaporation, crystallization, and foaming during laser processing occur irregularly within the irradiated area, so the surface of the patterned area 13 tends to become rough and the surface roughness is greater than that of the non-patterned area 12. Due to the greater surface roughness, the patterned area 13 has a higher light diffusion property for light incident on the container 1 than the non-patterned area 12. As a result, the contrast of the pattern 11 increases, and visibility is further improved. In this respect as well, the application of laser processing is more suitable.

[0031] In addition, in this embodiment, the pattern is formed of an aggregate of multiple dot portions 110 including at least one of recessed portions 111 and protruding portions 112, so that the surface area is increased along the shapes of the recessed portions 111 and protruding portions 112, and the area with high surface roughness is further increased compared to the case where the pattern is formed of grooves or depressions as a mass. In addition, since the pattern is formed of an aggregate of multiple dot portions 110, the surface area is further increased along the shapes of the multiple dot portions 110. This further increases the light diffusion property, and the contrast is increased, thereby further improving the visibility.

[0032] In the example shown in the perspective view B, the dots 110 are regularly arranged in a square lattice pattern, but this is not limiting. They may be arranged in a triangular lattice pattern or a honeycomb pattern, or may be irregularly arranged with different spacing between each other.

[0033] Also, the pattern 11 including the character string "labelless" has been exemplified, but is not limited to this. The pattern 11 can also be formed by any character string, a figure or photograph, a symbol or code such as a barcode or QR code, or a combination of these. In other words, the pattern 11 is an image, and the image can be formed by a predetermined shape such as the dot portion 110.

[0034] <Configuration example of dot section 110> FIG. 2 is a diagram for explaining an example of the configuration of the dot portion 110 according to this embodiment, where (a) is a top view and (b) is a cross-sectional view taken along the CC arrow in (a). FIG. 3 is a scanning electron microscope (SEM) photograph of the dot portion 110 according to this embodiment, where (a) is a perspective view taken from the top, and (b) is a perspective view taken from the cross-sectional view taken along the DD arrow in (a). FIG. 3 is an SEM photograph of a part of the pattern region 13 in an enlarged manner. In FIG. 3(a), two of the multiple dot portions 110 are entirely observed, and two dot portions 110 are slightly observed on the positive Y-axis side, and two dot portions 110 are slightly observed on the negative Y-axis side. The dot width is formed to be about 100 um.

[0035] 2 and 3, the dot portion 110 is configured to include a recessed portion 111 and a protruding portion 112. The recessed portion 111 includes a first inclined surface 1111 (hatched portion) and a bottom portion 1112 (solid black portion), and is formed in a bowl shape. The recessed portion width Dc represents the width of the recessed portion 111, and the depth dp represents the height (length in the Z-axis direction) of the bottom portion 1112 relative to the surface of the non-pattern region 12.

[0036] Moreover, the protrusion 112 includes an apex 1121 (vertical line hatching portion) and a second inclined surface 1122 (matte hatching portion), and is formed in a torus shape. Note that a torus is a surface of revolution obtained by rotating a circumference. The annular width Dr represents the radial width of the annular surface portion of the protrusion 112, and the height h represents the height of the apex 1121 relative to the surface of the non-pattern region 12 (length in the Z-axis direction).

[0037] The dot width W represents the width of the entire dot portion 110. The first inclined surface 1111 and the second inclined surface 1122 are continuous surfaces. A continuous surface means a surface that is made of the same material and is connected without any steps.

[0038] 3, minute unevenness 113 is formed on the surfaces constituting each of the recessed portion 111 and the protruding portion 112, making the surface rough. The unevenness 113 is an example of an unevenness consisting of recessed and protruding portions smaller than a predetermined shape. The unevenness 113 consists of recessed and protruding portions with a width smaller than the dot width W of the dot portion 110, and typically consists of recessed and protruding portions with a width of about 1 μm to 10 μm.

[0039] 3(a), chips produced when processing the dot portions 110 are scattered in the regions between the dot portions 110, which also roughens the surface. In the patterned region 13, the surface roughness is greater than in the non-patterned region due to the surface roughness caused by the uneven portions 113 and chips produced when processing.

[0040] The dots 110 can be formed, for example, by irradiating the substrate 1a with laser light and modifying the surface of the substrate 1a. One dot 110 is formed by concentrating the laser light at one point on the substrate 1a. In addition, multiple dots 110 are formed by two-dimensionally scanning the laser light. Alternatively, the dots 110 can be formed by multiple laser lights emitted from multiple arrayed laser light sources. Furthermore, multiple dots 110 can be formed in parallel by one exposure by irradiating an expanded laser light onto a mask member having multiple light-transmitting openings corresponding to the positions of the dots 110, and using each of the multiple transmitted laser light groups that have passed through each light-transmitting opening of the mask member.

[0041] As a laser light source for irradiating laser light, various laser light sources can be used. Those capable of pulse oscillation of femtoseconds, picoseconds to nanoseconds, etc. are preferable. Solid-state lasers include YAG lasers and titanium sapphire lasers. Gas lasers include argon lasers, helium neon lasers, and carbon dioxide gas lasers. Semiconductor lasers are also preferable because of their small size. In addition, a fiber laser, which is a type of solid-state laser that uses optical fiber as an amplification medium, is an example of a suitable light source in terms of its high peak energy and its ability to be miniaturized.

[0042] Fig. 4 shows a modified example of the dot portion according to this embodiment. Fig. 4(a) shows a recess shape formed by evaporating the base material on the surface of the bottle, and Fig. 4(b) shows a recess shape formed by melting the base material on the surface of the bottle. In the case of Fig. 4(b), the periphery of the recess is raised compared to Fig. 4(a).

[0043] FIG. 4(c) shows the change in the crystallization state on the surface of the bottle substrate, and FIG. 4(d) shows the change in the foaming state below the surface of the bottle substrate.

[0044] In this way, by changing the shape of the bottle surface, the crystallization state of the substrate surface, or the foaming state under the substrate surface, a pattern consisting of an aggregate of dots can be formed on the bottle surface. As a method of forming a recess shape by evaporating the substrate on the bottle surface, for example, a pulsed laser having a wavelength of 355 nm to 1064 nm and a pulse width of 10 fs to 500 nm or less is irradiated. As a result, the substrate in the area irradiated with the laser beam is evaporated, and minute recesses can be formed on the surface.

[0045] It is also possible to melt the substrate and form recesses by irradiating a CW (Continuous Wave) laser with a wavelength of 355 nm to 1064 nm. If the laser continues to be irradiated even after the substrate is melted, the surface or subsurface of the substrate can be foamed and become opaque. In order to change the crystallized state, for example, the substrate can be made of PET, and a CW laser with a wavelength of 355 nm to 1064 nm can be irradiated to raise the temperature of the substrate in one go, and then the power can be reduced to gradually cool the substrate, thereby bringing the PET substrate into a crystallized state and making it opaque. If the temperature is raised and then the substrate is rapidly cooled by turning off the laser beam, the PET becomes amorphous and transparent.

[0046] In addition, the change in the properties of the base material of the bottle is not limited to those shown in Figures 2 to 4. The properties of the base material may be changed by yellowing, oxidation reaction, surface modification, etc. of the base material made of a resin material. In addition, an absorbent (converting material) that absorbs the irradiated laser light and converts the light energy into thermal energy may be applied to the base material in advance, and heating control may be performed to form recesses or protrusions on the base material using the thermal energy converted by the absorbent.

[0047] The above-mentioned minute formation parts become modified marks by laser irradiation, and very small dots are formed. The sense of the dots can be changed to change the density, or the dot shape can be changed to a size smaller than that which can be perceived. height Or something like that.

[0048] In the above, the first pattern has been shown as a small, roughly circular shape, but is not limited thereto. It may be an ellipse, an oval shape, or a line shape. The shape of the first pattern itself may be any shape as long as it is difficult to recognize with the naked eye. It may also be a collection of fine lines with a very small width.

[0049] Fig. 5 shows another modified example of the dot portion according to the present embodiment. The dot portion may be formed by overlapping dots as shown in Fig. 5(a), overlapping in both the main and sub laser scanning directions as shown in Fig. 5(b), or arranged in an oval shape with a partially increased overlap rate as shown in Fig. 5(c). By adopting such a form, the change in the transmittance or reflectance of the surface can be made larger, which is more effective in expressing a case where it is desired to increase the contrast with the non-formation portion.

[0050] Fig. 6 is a diagram showing a manufacturing apparatus according to this embodiment. The manufacturing apparatus 500 shown in Fig. 6 is an example of a laser irradiation apparatus, and includes a manufacturing line (transport section) 200 that transports containers 1, a plurality of writing units 310, 320, 330 that irradiate laser light onto the plurality of containers 1 transported on the manufacturing line (transport section) 200, and a control device 400 that controls the plurality of writing units 310, 320, 330 based on input image data and additional information.

[0051] The multiple writing units 310, 320, 330 are examples of multiple irradiation units and include a first writing unit 310 which is an example of a first irradiation unit, a second writing unit 320 which is an example of a second irradiation unit, and a third writing unit 330 which is an example of a third irradiation unit.

[0052] The control device 400 includes a table 400T that stores and manages image data and additional information.

[0053] The multiple writing units 310, 320, 330 each irradiate a laser onto a different container 1. That is, the first writing unit 310 irradiates a first container 1 with a laser, the second writing unit 320 irradiates a second container 1 with a laser, and the third writing unit 330 irradiates a third container 1 with a laser.

[0054] 7 is a diagram for explaining laser irradiation according to this embodiment. In FIG. 7, the first writing unit 310 is taken as an example for explanation, but the second writing unit 320 and the third writing unit 330 are also similar.

[0055] The first writing unit 310 includes a laser control unit 311, a laser drive power supply unit 312, a laser light source unit 313, a laser scanning unit 314, and a laser emission port 315, and irradiates the pattern area 13 of the container 1 with laser light 316.

[0056] The laser light emitted from the laser emission port 315 marks very small dots in the pattern region 13. For example, the diameter of the laser light in a region where the properties of a transparent substrate such as a plastic bottle are to be changed is preferably 1 μm or more and 200 μm or less.

[0057] The laser control unit 311 controls the laser drive power supply unit 312 and the laser scanning unit 314 based on a control signal sent from the control device 400 shown in FIG.

[0058] The laser light source unit 313 emits, for example, a pulsed laser beam, and emits laser beam with an output (light intensity) suitable for changing the property of the pattern region 13 of the container 1.

[0059] The laser light source unit 313 can use a laser light source with a wavelength of 532 nm, a laser light pulse width of 16 picoseconds, and an average output of 4.9 W. Alternatively, a pulse laser with a wavelength of 355 nm to 1064 nm and a pulse width of 10 fs to 500 nm or less may be used, and the type of laser is not limited.

[0060] The laser light source may be composed of one laser light source or may be composed of multiple laser light sources. When multiple laser light sources are used, the on / off control, emission frequency control, light intensity control, etc. may be performed independently for each laser light source, or may be shared.

[0061] The laser driving power supply unit 312 drives the laser light source unit 313 based on a control signal sent from the laser control unit 311. This makes it possible to control the on / off, frequency, intensity, etc. of the laser light emitted from the laser light source unit 313.

[0062] The parallel laser light emitted from the laser light source unit 313 has its diameter expanded by a beam expander or the like, and enters the laser scanning unit 314 .

[0063] The laser scanning unit 314 scans the pattern area 13 of the container 1 with the laser light emitted from the laser light source unit 313 based on a control signal sent from the laser control unit 311 .

[0064] The laser scanning unit 314 includes a scanning mirror that changes the reflection angle by a driving unit such as a motor. By changing the reflection angle of the scanning mirror, the incident laser light is scanned in a direction perpendicular to the paper surface. A galvanometer mirror, a polygon mirror, a MEMS (Micro Electro Mechanical System) mirror, or the like can be used as the scanning mirror.

[0065] 7 shows an example in which the laser scanning unit 314 performs one-dimensional scanning with the laser light in a direction perpendicular to the paper surface, but is not limited to this. The laser scanning unit 314 may also perform two-dimensional scanning with the laser light within a plane by using a scanning mirror that changes the reflection angle in two orthogonal directions. Also, a FC-LDA (fiber-coupled laser diode array) may be used.

[0066] The laser scanning unit 314 may perform two-dimensional scanning by detecting the direction in which the container 1 is transported by the production line 200. The scanning speed may be apparently increased in coordination with the two-dimensional scanning of the laser light.

[0067] The laser control unit 311 starts irradiating the laser light based on a detection signal from a photodetector that detects the position of the container 1 transported by the production line 200. This makes it possible to accurately irradiate the laser light to the container 1 transported by the production line 200.

[0068] Although the container 1 is described assuming a cylindrical bottle, it is not limited to this and may be a square bottle. In any case, if the relative position between the container 1 and the writing unit 310 changes during irradiation of the laser light, it will affect the quality of the pattern, so the container 1 may be fixed by providing a holder mechanism with a rotation mechanism.

[0069] 8A and 8B are diagrams for explaining a container and additional information according to this embodiment. Fig. 8(a) shows a container 1 on which a pattern is formed by the manufacturing apparatus 500 shown in Fig. 6.

[0070] A pattern area 13 is formed on the surface of the substrate 1a of the container 1, and the pattern area 13 includes a character area 13A, a barcode area 13B, a graphic area 13C, a photograph area 13D, and an identification mark area 13E, which are examples of multiple non-overlapping subdivided areas in which a pattern is formed.

[0071] The text area 13A is a pattern showing information such as the name, ingredients, content, expiration date, storage method, manufacturer, etc., and is basically made up of letters, numbers, and alphabets. The size should basically be 8 points or more.

[0072] Barcode area 13B is a pattern that represents numbers, letters, etc., using a combination of bars and spaces in a form that can be read by a dedicated reading device, or a two-dimensional code arranged two-dimensionally, such as a QR code (registered trademark).

[0073] The graphic area 13C is a pattern that literally shows a graphic without any shading. The photograph area 13D is a pattern that shows a graphic with shading. The identification mark area 13E is a pattern that shows a recycle mark or a logo mark.

[0074] As the multiple non-overlapping divided regions in which patterns are formed, for example, thin lines and thick lines in barcode region 13B may be defined as separate divided regions.

[0075] Each of the multiple subdivision regions has a representational purpose and a level of pattern quality required to achieve that purpose.

[0076] For example, the barcode area 13B is the most important representation, and there is no point in displaying it if the barcode reader does not read it normally. This display requires a certain level of black and white contrast and pattern quality.

[0077] Next, since the character area 13A basically contains small characters, if the display density is low, the characters will not be recognizable by humans.

[0078] On the other hand, it may be judged that the presence of the identification mark area 13E and the graphic area 13C is sufficient. The photograph area 13D and the graphic area 13C have large design restrictions, but the quality of the pattern does not need to be so high.

[0079] The above is a general judgment, and the level required for each display mode will vary depending on the object on which the pattern is formed.

[0080] FIG. 8(b) shows additional information input to the control device 400 shown in FIG. 6 in association with each of the image information indicating the character area 13A, the barcode area 13B, the graphic area 13C, the photograph area 13D, and the identification mark area 13E.

[0081] The additional information includes identification (type) information for identifying the character area 13A, the barcode area 13B, the graphic area 13C, the photo area 13D, and the identification mark area 13E, as well as writing conditions (pattern formation) and printing position identification information associated with each of the identification information.

[0082] 9A and 9B are diagrams for explaining the divided regions according to this embodiment, in which Fig. 9A shows a barcode region 13B, Fig. 9B shows a text region 13A, and Fig. 9C shows a photograph region 13D.

[0083] In each of the cases shown in FIG. 9(a) to FIG. 9(c), the image is made up of a collection of very small dots. For example, in the barcode area 13B, No. 1 If the dots are considered to be a pattern, they are composed of an aggregate of the second pattern. Here, an aggregate refers to a collection of multiple elements. The second pattern is a collection of minute similar formations, and multiple such formations are arranged at approximately regular intervals. do , forming a first pattern.

[0084] Moreover, in photographic area 13D shown in FIG. 9(c), light and dark areas are continuous within one image, and the shading is expressed by varying the density of minute dots.

[0085] 10 is a diagram for explaining the contents stored in the table of the control device according to this embodiment. Table 400T of control device 400 stores and manages identification (type) information, writing conditions, print position identification information, print area, and estimated print time in association with each of image data showing character area 13A, barcode area 13B, graphic area 13C, photo area 13D, and identification mark area 13E.

[0086] The identification (type) information, writing conditions, and printing position identification information are stored additional information shown in Fig. 8(b), and the printing area and estimated printing time are stored values ​​calculated by the control device 400 based on the image data and additional information. Note that one or both of the printing area and estimated printing time may be included in the additional information input to the control device 400.

[0087] For example, the expected printing time for the graphic area 13C showing "Bottle" is calculated to be 15 msec. The photo area 13D showing a dolphin is a large design, but does not need to be very dense, so it is calculated to be 20 msec. There are two types of identification mark areas 13E, and each is calculated to take 5 msec. The barcode area 13B requires high black-and-white contrast and a high density pattern, so it takes a relatively long time and is calculated to be 30 msec. Finally, the character area 13A only needs to be perceptible by humans, so it is calculated to be 18 msec.

[0088] FIG. 11 is a diagram for explaining the processing of the control device according to the present embodiment.

[0089] When the control device 400 starts the process (step S1), it accepts input of all print notation data such as image information and additional information (step S2).

[0090] The control device 400 determines the type of each printed notation (step S3), and obtains the printing position information of each printed notation (step S4).

[0091] Based on the information obtained up to step S4, the control device 400 calculates the scanning area (printing area) of each printed marking (step S5), and calculates the printing time of each printed marking (step S6).

[0092] The control device 400 sets the printing notation to be handled by each of the writing units 310-330 based on the printing time calculated in step S6 (step S7), commands each of the writing units 310-330 to print (step S8), and each of the writing units 310-330 irradiates a laser to start writing (pattern formation) (step S9). The above flow does not limit the order.

[0093] FIG. 12 is a diagram for explaining a specific example of the process of the control device according to the present embodiment.

[0094] In step S7 of Fig. 11, if one writing unit is responsible for printing, the total time required for printing is 15 + 20 + 5 + 5 + 30 + 18 = 93 msec by simple integration. In reality, the writing conditions differ for each type, so time is required to change each writing condition, but this is omitted here.

[0095] 12(a) shows the process of step S7 in FIG. 11 when two writing units 310, 320 are used, and FIG. 12(b) shows the process of step S7 in FIG.

[0096] In FIG. 12(a), the control device 400 determines that the first writing unit 310 should irradiate the laser to the first irradiation area including the barcode area 13B (30 msec) and the graphic area 13C (15 msec), so that the time required for the first writing unit 310 to write to each container is a total of 45 msec.

[0097] The control device 400 also determines that the second writing unit 320 should irradiate the laser to the second irradiation area including the photo area 13D (20 msec), the character area 13A (18 msec), and the identification mark area 13E (5 msec+5 msec). As a result, the time required for the second writing unit 320 to write on one container is 48 msec in total.

[0098] The control device 400 calculates the combination that minimizes the difference between the writing time by the first writing unit 310 and the writing time by the second writing unit 320, and stores the information shown in FIG. 12(a) in the table 400T.

[0099] 12(b), the control device 400 determines that the first writing unit 310 is to irradiate the first irradiation area including the barcode area 13B (30 msec) with the laser. As a result, the time required for the first writing unit 310 to write on each container is 30 msec in total.

[0100] The control device 400 also determines that the second writing unit 320 should irradiate the laser to the second irradiation area including the photo area 13D (20 msec) and the identification mark area 13E (5 msec+5 msec). As a result, the time required for the second writing unit 320 to write on one container is 30 msec in total.

[0101] Furthermore, the control device 400 determines that the third writing unit 330 should irradiate the laser to the third irradiation area including the graphic area 13C (15 msec) and the character area 13A (18 msec). As a result, the time required for the third writing unit 330 to write on one container is 33 msec in total.

[0102] The control device 400 calculates the combination that minimizes the difference between the writing time by the first writing unit 310, the writing time by the second writing unit 320, and the writing time by the third writing unit 330, and stores the information shown in Figure 12 (b) in table 400T.

[0103] In the above, the first to third irradiation regions do not overlap with each other because they each include divided regions that do not overlap with each other.

[0104] Then, the control device 400 determines that the first writing unit 310 irradiates the first irradiation region with a laser, but does not irradiate the second and third irradiation regions with a laser.

[0105] Similarly, the control device 400 determines that the second writing unit 320 irradiates the laser onto the second irradiation area but not onto the first and third irradiation areas, and determines that the third writing unit 330 irradiates the laser onto the third irradiation area but not onto the first and first irradiation areas.

[0106] As described above, for the multiple subdivided areas 13A to 13E, the control device 400 determines the subdivided areas included in the first irradiation area to which the first writing unit 310 irradiates the laser and the subdivided areas included in the second irradiation area to which the second writing unit 320 irradiates the laser.

[0107] As a result, among the multiple subdivided areas 13A to 13E, the subdivided areas in which a pattern suitable for the first writing unit 310 is desired can be determined to be included in the first irradiation area, and the subdivided areas in which a pattern suitable for the second writing unit 310 is desired can be determined to be included in the second irradiation area.

[0108] The control device 400 determines, for the multiple divided regions 13A-13E, the divided regions included in the first irradiation region and the divided regions included in the first irradiation region so as to minimize the difference between the time for irradiating the first irradiation region with a laser by the first writing unit 310 and the time for irradiating the second irradiation region with a laser by the second writing unit 320. This makes it possible to minimize the total time for forming a pattern in the multiple divided regions 13A-13E.

[0109] Here, the control device 400 may set the first writing unit 310 to form a pattern that takes more time but is more accurate, and set the second writing unit 310 to form a pattern that is less accurate but is faster.

[0110] In this case, the control device 400 can determine, among the multiple divided regions 13A to 13E as shown in Fig. 12, the divided regions in which a pattern with high accuracy is required to be included in the first irradiation region, and determine the divided regions in which a pattern is required to be formed at high speed to be included in the second irradiation region. This allows a pattern with high accuracy to be formed in the divided regions included in the first irradiation region, and a pattern to be formed at high speed in the divided regions included in the second irradiation region.

[0111] Although the above has been described using an example of the first and second writing units 310 and 320, the same applies to the case where multiple writing units such as the third writing unit 330 are provided.

[0112] FIG. 13 is a diagram illustrating the operation of the manufacturing apparatus according to this embodiment.

[0113] When the control device 400 starts writing (step S9), each writing unit 310-330 starts writing (steps S11, S21, S31), irradiates the laser to the first to third irradiation areas of each different container 1 to print (steps S12, S22, S32), and finishes writing (steps S13, S23, S33).

[0114] The control device 400 controls the manufacturing line 200 to transport the container 1 (step S14), and each writing unit 310-330 starts writing again (steps S15, S25, S35), irradiates the laser onto the first to third irradiation areas of each different container 1 to print (steps S16, S26, S36), and ends writing (steps S17, S27, S37).

[0115] The control device 400 updates the order of the containers 1 (step S18), and if there is no change in the printed notation (step S19), returns to step S14 and repeats the process, and if there is a change in the printed notation (step S19), ends the process.

[0116] As shown in FIG. 12(b), the total times required for the first to third writing units 310 to 330 to write data to one container are 30 msec, 30 msec, and 33 msec, respectively.

[0117] Therefore, the control device 400 starts irradiating the third irradiation region with the laser from the third writing unit 330, which has a longer laser irradiation time among the multiple irradiation units (step S31), and then starts irradiating the first and second irradiation regions with the laser from the first and second writing units 310 and 320, which have shorter laser irradiation times than the long-time irradiation units among the multiple irradiation units (steps S11 and S21).

[0118] Then, after the first and second writing units 310, 320 finish irradiating the first and second irradiation regions with the laser (steps S13, S23), the control device 400 causes the third writing unit 330 to finish irradiating the third irradiation region with the laser (step S33). This makes it possible to minimize the total time during which the first to third writing units 310-330 irradiate the first to third irradiation regions with the laser.

[0119] As explained in FIG. 7, the control device 400 can irradiate laser not only to containers 1 that are stopped but also to containers 1 that are being transported by synchronizing the timing of emitting laser light based on a detection signal from a photodetector that detects the position of the container 1 transported by the production line 200.

[0120] As described above, the control device 400 controls the first writing unit 310 to irradiate a laser onto a first irradiation area included in the multiple irradiation areas, but not to irradiate laser onto irradiation areas other than the first irradiation area in the multiple irradiation areas, and controls the second writing unit 320 to irradiate a laser onto a second irradiation area included in the multiple irradiation areas, but not to irradiate laser onto irradiation areas other than the second irradiation area in the multiple irradiation areas.

[0121] As a result, a pattern is formed by a plurality of writing units in a plurality of non-overlapping irradiation regions on the surface of the base material 1a, and therefore productivity is improved compared to the case where a pattern is formed by a single writing unit.

[0122] In addition, since a pattern is formed in the first irradiation region only by the first writing unit 310 and a pattern is formed in the second irradiation region only by the second writing unit 310, the quality of the pattern in the irradiation region can be made uniform compared to the case where the first irradiation region etc. are irradiated by a plurality of writing units, and therefore the quality of the pattern is improved. In other words, a high-quality pattern can be formed on the substrate 1a with high productivity.

[0123] Furthermore, the control device 400 causes the first writing unit 310 to irradiate the first irradiation region of the first substrate 1a with a laser, and causes the second writing unit 320 to irradiate the second irradiation region of the second substrate 1a with a laser, so that the time when the first writing unit 310 irradiates the first irradiation region of the first substrate 1a with a laser and the time when the second writing unit 320 irradiates the second irradiation region of the second substrate 1a with a laser overlap. This makes it possible to reduce the total time of the time when the first writing unit 310 irradiates the first irradiation region of the first substrate 1a and the time when the second writing unit 320 irradiates the second irradiation region of the first substrate 1a and the second substrate 1a with a laser.

[0124] Although the above has been described using an example of the first and second writing units 310 and 320, the same applies to the case where multiple writing units such as the third writing unit 330 are provided.

[0125] FIG. 14 is a diagram showing a manufacturing apparatus according to a modified example of this embodiment.

[0126] The modified example shown in FIG. 14 differs from the embodiment shown in FIG. 6 in that the second writing unit 320 is disposed on the opposite side of the manufacturing line 200 from the first and third writing units 310 and 330, but is otherwise similar.

[0127] FIG. 15 is a diagram showing a manufacturing apparatus according to a second modified example of this embodiment.

[0128] The second modified example shown in FIG. 15 differs from the embodiment shown in FIG. 6 in that the first to third writing units 310 to 330 irradiate the laser beam onto the same container 1, but is otherwise similar.

[0129] FIG. 16 is a diagram for explaining the operation of a manufacturing apparatus according to a second modified example of this embodiment. When the control device 400 starts writing (step S9), each writing unit 310-330 starts writing (steps S111, S121, S131), irradiates the laser to the first to third irradiation areas of the same container 1 to print (step S112), and ends writing (steps S113, S123, S133).

[0130] The control device 400 controls the production line 200 to transport the container 1 (step S114), and each writing unit 310-330 starts writing again (steps S115, S125, S135), irradiates the laser onto the first to third irradiation areas of each different container 1 to print (step S116), and ends the writing (steps S117, S127, S137).

[0131] The control device 400 updates the order of the containers 1 (step S118), and if there is no change in the printed notation (step S119), returns to step S114 and repeats the process, and if there is a change in the printed notation (step S119), ends the process.

[0132] The control device 400 starts irradiating the third irradiation region with the laser from the third writing unit 330, which has a longer laser irradiation time among the multiple irradiation units (step S131), and then starts irradiating the first and second irradiation regions with the laser from the first and second writing units 310 and 320, which have shorter laser irradiation times than the long-time irradiation units among the multiple irradiation units (steps S111 and S121).

[0133] Then, after causing the first and second writing units 310, 320 to stop irradiating the first and second irradiation regions with the laser (steps S113, S123), the control device 400 causes the third writing unit 330 to stop irradiating the third irradiation region with the laser (step S133).

[0134] That is, the control device 400 causes the first writing unit 310 to irradiate the first irradiation region with a laser and the second writing unit 320 to irradiate the second irradiation region with a laser so that the time when the first writing unit 310 irradiates the first irradiation region with a laser and the time when the second writing unit 320 irradiates the second irradiation region with a laser overlap for the base material 1a of the same container 1. This makes it possible to reduce the total time when the first writing unit 310 irradiates the first irradiation region with a laser and the second writing unit 320 irradiates the second irradiation region with a laser for the same base material 1a.

[0135] ●Summary● As described above, the manufacturing apparatus 500, which is an example of a laser irradiation apparatus according to an embodiment of the present invention, includes a plurality of writing units including a first writing unit 310 and a second writing unit 320 that irradiate a laser to a plurality of irradiation regions that do not overlap each other on the surface of the base material 1a of the container 1, thereby forming a pattern 11 in the plurality of irradiation regions, and a control device 400 that is an example of a control unit that controls the first writing unit 310 so as to irradiate a first irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the first irradiation region in the plurality of irradiation regions with a laser, and controls the second writing unit 320 so as to irradiate a second irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the second irradiation region in the plurality of irradiation regions with a laser. The first writing unit 310 is an example of a first irradiation unit, the second writing unit 320 is an example of a second irradiation unit, and the plurality of writing units are an example of a plurality of irradiation units.

[0136] As a result, a pattern is formed by a plurality of writing units in a plurality of non-overlapping irradiation regions on the surface of the base material 1a, and therefore productivity is improved compared to the case where a pattern is formed by a single writing unit.

[0137] In addition, since a pattern is formed in the first irradiation region only by the first writing unit 310, and a pattern is formed in the second irradiation region only by the second writing unit 310, the quality of the pattern within the irradiation region can be made uniform compared to when the first irradiation region, etc. are irradiated with multiple writing units, thereby improving the quality of the pattern.

[0138] That is, a high-quality pattern can be formed on the base material 1a with high productivity. This makes it possible to obtain the container 1 and the container body including the base material 1a on which the high-quality pattern is formed with high productivity.

[0139] The substrate 1a has on its surface a plurality of non-overlapping subdivided regions 13A-13E in which patterns are formed, and the control device 400 determines, for the plurality of subdivided regions 13A-13E, which subdivided regions are included in the first irradiation region and which subdivided regions are included in the second irradiation region.

[0140] As a result, among the multiple subdivided areas 13A to 13E, the subdivided areas in which a pattern suitable for the first writing unit 310 is desired can be determined to be included in the first irradiation area, and the subdivided areas in which a pattern suitable for the second writing unit 310 is desired can be determined to be included in the second irradiation area.

[0141] Specifically, the control device 400 can set the first writing unit 310 to form a pattern that takes longer but is more accurate, and set the second writing unit 310 to form a pattern that is faster but less accurate.

[0142] In this case, the control device 400 can determine, among the multiple divided regions 13A-13E, the divided regions in which a highly accurate pattern is required to be included in the first irradiation region, and determine the divided regions in which a pattern is required to be formed at high speed to be included in the second irradiation region. This allows a highly accurate pattern to be formed in the divided regions included in the first irradiation region, and a pattern to be formed at high speed in the divided regions included in the second irradiation region.

[0143] The control device 400 determines, for the multiple divided regions 13A-13E, the divided regions included in the first irradiation region and the divided regions included in the first irradiation region so as to minimize the difference between the time for irradiating the first irradiation region with a laser by the first writing unit 310 and the time for irradiating the second irradiation region with a laser by the second writing unit 320. This makes it possible to minimize the total time for forming a pattern in the multiple divided regions 13A-13E.

[0144] The control device 400 starts irradiating the third irradiation region with a laser by the third writing unit 330, which is an example of a long-time irradiation unit among the multiple irradiation units, which irradiates the laser for a longer time, and then starts irradiating the first and second irradiation regions with a laser by the first and second writing units 310 and 320, which are an example of a short-time irradiation unit among the multiple irradiation units, which irradiates the laser for a shorter time than the long-time irradiation unit, and ends irradiating the third irradiation region with a laser by the third writing unit 330 after irradiating the first and second irradiation regions with a laser by the first and second writing units 310 and 320. This makes it possible to minimize the total time for irradiating the first to third irradiation regions with a laser by the first to third writing units 310 to 330.

[0145] The control device 400 causes the first writing unit 310 to irradiate the first irradiation region with a laser and the second writing unit 320 to irradiate the second irradiation region with a laser so that the time when the first writing unit 310 irradiates the first irradiation region with a laser and the time when the second writing unit 320 irradiates the second irradiation region with a laser overlap for the same substrate 1a. This makes it possible to reduce the total time when the first writing unit 310 irradiates the first irradiation region with a laser and the second writing unit 320 irradiates the second irradiation region with a laser for the same substrate 1a.

[0146] The control device 400 causes the first writing unit 310 to irradiate the first irradiation region of the first substrate 1a with a laser, and causes the second writing unit 320 to irradiate the second irradiation region of the second substrate 1a with a laser, so that the time when the first writing unit 310 irradiates the first irradiation region of the first substrate 1a with a laser and the time when the second writing unit 320 irradiates the second irradiation region of the second substrate 1a with a laser overlap. This makes it possible to reduce the total time of the time when the first writing unit 310 irradiates the first irradiation region of the first substrate 1a and the time when the second writing unit 320 irradiates the second irradiation region of the first substrate 1a and the second substrate 1a with a laser.

[0147] In the laser irradiation method according to one embodiment of the present invention, a laser is irradiated to a plurality of non-overlapping irradiation regions on the surface of the base material 1a, thereby forming a pattern in the plurality of irradiation regions, and the first writing unit 310 is controlled so as to irradiate a first irradiation region included in the plurality of irradiation regions with the laser, but not to irradiate irradiation regions other than the first irradiation region in the plurality of irradiation regions with the laser, and the second writing unit 320 is controlled so as to irradiate a second irradiation region included in the plurality of irradiation regions with the laser, but not to irradiate irradiation regions other than the second irradiation region in the plurality of irradiation regions with the laser. This allows a high-quality pattern to be formed on the base material 1a with high productivity. This allows a container 1 and a container body including the base material 1a on which a high-quality pattern is formed to be obtained with high productivity. [Explanation of symbols]

[0148] 1 Container 1a Base material 11 Patterns 110 Dot part (predetermined shape, an example of a dot) 111 Recess (an example of a predetermined recess) 1111 First inclined surface 1112 Bottom 112 Convex portion (an example of a predetermined convex portion) 1121 Top 1122 Second inclined surface 113 Uneven part 12 Non-pattern areas 13 Pattern Area 13A Character area (an example of a segmented area) 13B Barcode region (an example of a subdivision region) 13C Figure area (an example of a subdivided area) 13D Photo Area (Example of a subdivision area) 13E Identification mark area (example of a subdivided area) 200 Manufacturing line (transport section) 310, 320, 330 Writing unit (an example of an irradiation unit) 311 Laser control unit 312 Laser drive power supply unit 313 Laser light source unit 314 Laser Scanning Unit 315 Laser exit 316 Laser 400 Control device (control unit) 400T Table 500 Manufacturing equipment (laser irradiation equipment)

Claims

1. A laser irradiation device that irradiates a laser onto a plurality of non-overlapping irradiation regions on a surface of a substrate to form a pattern in the plurality of irradiation regions, the device comprising: A plurality of irradiation units including a first irradiation unit and a second irradiation unit each irradiating with a laser; a control unit that controls the first irradiation unit to irradiate a first irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the first irradiation region in the plurality of irradiation regions with a laser, and also controls the second irradiation unit to irradiate a second irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the second irradiation region in the plurality of irradiation regions with a laser; Equipped with The substrate has a surface in which a plurality of non-overlapping subdivided regions in which the pattern is formed, and the control unit determines, for the plurality of subdivided regions, which of the subdivided regions are included in the first irradiation region and which of the subdivided regions are included in the second irradiation region depending on the type of the pattern formed in the subdivided regions.

2. 2. The laser irradiation device of claim 1, wherein the control unit controls the first irradiation unit based on writing conditions associated with the type of the pattern formed in the subdivided area included in the first irradiation area, and controls the second irradiation unit based on writing conditions associated with the type of the pattern formed in the subdivided area included in the second irradiation area.

3. The control unit is so that the difference between the time for which the first irradiation unit irradiates the first irradiation region with a laser and the time for which the second irradiation unit irradiates the second irradiation region with a laser is minimized, 2. The laser irradiation device according to claim 1, wherein, for the plurality of divided regions, the divided regions included in the first irradiation region and the divided regions included in the second irradiation region are determined.

4. The control unit is After starting laser irradiation by a long-time irradiation unit having a long laser irradiation time among the plurality of irradiation units, starting laser irradiation by a short-time irradiation unit having a shorter laser irradiation time than the long-time irradiation unit among the plurality of irradiation units; 4. The laser irradiation device according to claim 1, wherein the long-time irradiation section terminates laser irradiation after the short-time irradiation section terminates laser irradiation.

5. The control unit, for the same substrate, A time during which the first irradiation unit irradiates the first irradiation region with a laser and a time during which the second irradiation unit irradiates the second irradiation region with a laser are overlapped.

5. The laser irradiation device according to claim 1, wherein the first irradiation section irradiates the first irradiation region with a laser, and the second irradiation section irradiates the second irradiation region with a laser.

6. The control unit is a time during which the first irradiation unit irradiates the first irradiation region of the first base material with a laser and a time during which the second irradiation unit irradiates the second irradiation region of the second base material with a laser are overlapped; The laser irradiation device according to any one of claims 1 to 4, wherein the first irradiation unit irradiates the first irradiation area of ​​the first substrate with a laser, and the second irradiation unit irradiates the second irradiation area of ​​the second substrate with a laser.

7. A laser irradiation method for forming a pattern in a plurality of non-overlapping irradiation regions on a surface of a substrate by irradiating the plurality of irradiation regions with a laser, the method comprising: controlling a first irradiation unit to irradiate a first irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the first irradiation region in the plurality of irradiation regions with a laser, and controlling a second irradiation unit to irradiate a second irradiation region included in the plurality of irradiation regions with a laser, but not to irradiate irradiation regions other than the second irradiation region in the plurality of irradiation regions with a laser; The substrate has a surface in which a plurality of non-overlapping subdivided regions in which the pattern is formed are formed, and for the plurality of subdivided regions, which subdivided regions are included in the first irradiation region and which subdivided regions are included in the second irradiation region are determined depending on the type of the pattern formed in the subdivided regions.

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