The invention relates to the technical field of
information processing, in particular to an IMP-based intelligent beam adjustment method, device and equipment and a storage medium, an operation interface image of each IMP
machine table is acquired in real time through a KVM switcher, a current beam parameter and a real-time state identifier in the operation interface image are identified and extracted by using an OCR visual
algorithm, and the current beam parameter and the real-time state identifier in the operation interface image are identified and corrected. Acquiring process requirement data of the current
wafer batch number, integrating the parameter and state data and the process requirement data, performing data cleaning and normalization
processing on the integrated data to obtain a pre-
processing data set, analyzing difference information between the current
machine beam state and a target process requirement based on the pre-
processing data set by using an AI decision-making model, and determining the target process requirement according to the difference information. According to the method, the difference information is acquired, the optimal beam adjustment parameter is calculated according to the difference information, the adjustment accuracy is improved, the complex
process requirements are adapted, the control instruction is generated according to the optimal beam adjustment parameter, and the IMP
machine adjusts the parameters of related
hardware modules according to the control instruction, so that the intelligent level is improved.