Method for manufacturing dielectric elastomer actuator, and dielectric elastomer actuator

Abstract

To provide a method for manufacturing a dielectric elastomer actuator capable of acquiring a dielectric elastomer actuator whose film body has a non-flat plate shape, and a dielectric elastomer actuator whose film body has a non-flat plate shape.SOLUTION: A method for manufacturing a dielectric elastomer actuator according to the present invention includes a dip step for dipping a mold M into a liquid dielectric elastomer E and then, pulling up the mold from the dielectric elastomer, a curing step for curing the dielectric elastomer on the mold to acquire a film body 10 made of the dielectric elastomer on the mold after the dip step, a mold removal step for removing the mold from the film body on the mold to acquire the film body having a non-flat plate-like three dimensional shape after the curing step, and an assembly step for respectively providing a first electrode 11 and a second electrode 12 on both surfaces of the film body to acquire a dielectric elastomer actuator 1 after the mold removal step.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a method for manufacturing a dielectric elastomer actuator, and to a dielectric elastomer actuator. [Background technology]

[0002] 2. Description of the Related Art Conventionally, there is a dielectric elastomer actuator that includes a flat membrane made of a dielectric elastomer and electrodes provided on both sides of the membrane (for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-61878 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional dielectric elastomer actuators described above, the membrane is flat.

[0005] An object of the present invention is to provide a method for manufacturing a dielectric elastomer actuator, which can obtain a dielectric elastomer actuator having a non-flat membrane, and a dielectric elastomer actuator having a non-flat membrane. [Means for solving the problem]

[0006] The method for producing a dielectric elastomer actuator of the present invention comprises the steps of: a dipping step of dipping a mold into a liquid dielectric elastomer and then lifting the mold out of the dielectric elastomer; a curing step of curing the dielectric elastomer on the mold after the dipping step to obtain a film body made of the dielectric elastomer on the mold; a mold removing step of removing the mold from the film body on the mold after the hardening step to obtain the film body having a non-flat three-dimensional shape; an assembling step of providing a first electrode and a second electrode on both sides of the membrane body, respectively, after the mold removing step, to obtain the dielectric elastomer actuator; Includes.

[0007] In the method for producing a dielectric elastomer actuator of the present invention, the mold is made of a first soluble material that is soluble in a first solvent; In the mold removing step, the mold may be removed from the film body on the mold by dissolving the mold with the first solvent.

[0008] In the method for producing a dielectric elastomer actuator of the present invention, The method further includes a mold manufacturing step of manufacturing the mold before the dipping step; The mold manufacturing step may include a mold creating step of creating the mold using the first soluble material with a 3D printer without using a support material.

[0009] In the method for producing a dielectric elastomer actuator of the present invention, The method further includes a mold manufacturing step of manufacturing the mold before the dipping step; The mold manufacturing step includes: A mold forming step of forming the mold on the support material using the first soluble material while using a support material made of a second soluble material that is dissolved by a second solvent different from the first solvent by a 3D printer; a support material removing step of removing the support material from the mold on the support material by dissolving the support material in the second solvent after the mold forming step; may include:

[0010] In the method for producing a dielectric elastomer actuator of the present invention, The mold removing step may include removing the mold from the film body on the mold by releasing the mold from the film body.

[0011] In the method for producing a dielectric elastomer actuator of the present invention, The membrane defines a cavity therein and has an opening communicating with the cavity; In the assembling step, the first electrode may be provided on an outer surface of the membrane, and the second electrode may be provided on an inner surface of the membrane.

[0012] In the method for producing a dielectric elastomer actuator of the present invention, The assembly step may include filling the cavity of the membrane with an internal pressure applying medium, thereby applying a pre-tension to the membrane.

[0013] In the method for producing a dielectric elastomer actuator of the present invention, The internal pressure applying medium may be conductive and may constitute the second electrode.

[0014] The dielectric elastomer actuator of the present invention comprises: A membrane body made of a dielectric elastomer and having a non-flat three-dimensional shape; a first electrode and a second electrode provided on both sides of the film body, Equipped with The membrane has a non-flat three-dimensional shape in its natural state.

[0015] In the dielectric elastomer actuator of the present invention, The membrane defines a cavity therein and has an opening communicating with the cavity; The first electrode is provided on an outer surface of the membrane, The second electrode may be provided on an inner surface of the membrane.

[0016] In the dielectric elastomer actuator of the present invention, The cavity of the membrane may be filled with an internal pressure applying medium, thereby applying a pre-tension to the membrane.

[0017] In the dielectric elastomer actuator of the present invention, The internal pressure applying medium may be conductive and may constitute the second electrode. Effect of the Invention

[0018] According to the present invention, it is possible to provide a method for manufacturing a dielectric elastomer actuator that can obtain a dielectric elastomer actuator having a non-flat membrane, and a dielectric elastomer actuator having a non-flat membrane. [Brief description of the drawings]

[0019] [Figure 1] 2 is a diagram showing the state of dipping a mold in a dipping step in the manufacturing method of the dielectric elastomer actuator according to the first embodiment of the present invention. [Diagram 2] 4 is a diagram showing the state in which a mold is lifted in a dipping step in the method for manufacturing a dielectric elastomer actuator according to the first embodiment of the present invention. [Diagram 3] 4 is a diagram illustrating a mold removal step in the method for manufacturing a dielectric elastomer actuator according to the first embodiment of the present invention. [Figure 4] 1 is a perspective view showing a film body obtained by a mold removal step in a manufacturing method for a dielectric elastomer actuator according to a first embodiment of the present invention. FIG. [Diagram 5] 11 is a diagram illustrating a mold removal step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 6]13 is a diagram illustrating a schematic diagram of 3D printing data used in a mold forming step in a first example of a mold manufacturing step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 7] 11 is a diagram showing the process of forming a mold in a mold forming step in a first example of a mold manufacturing step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 8] 11 is a diagram showing a mold obtained in a mold forming step in a first example of a mold manufacturing step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 9] 11 is a diagram showing the process of forming a mold in a mold forming step in a second example of a mold manufacturing step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 10] 13 is a diagram showing the mold and support material obtained in the mold forming step in a second example of the mold manufacturing step in the manufacturing method of the dielectric elastomer actuator according to the second embodiment of the present invention. [Figure 11] 13 is a diagram showing the process of dissolving the support material in a support material removal step in a second example of a mold manufacturing step in a method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. [Figure 12] 1 is a diagram illustrating a schematic diagram of a dielectric elastomer actuator system including a dielectric elastomer actuator according to one embodiment of the present invention. [Figure 13] 13A and 13B are diagrams for explaining the operation of the dielectric elastomer actuator of FIG. 12, where FIG. 13A shows the state when no voltage is applied, and FIG. 13B shows the state when a voltage is applied. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a method for producing a dielectric elastomer actuator and a dielectric elastomer actuator according to the present invention will be described with reference to the drawings. In each drawing, the same components are denoted by the same reference numerals. In the following, "dielectric elastomer actuator" may be abbreviated as "DEA" (Dielectric Elastomer Actuator).

[0021] FIG. 12 shows a dielectric elastomer actuator (DEA) system 2 including a dielectric elastomer actuator (DEA) 1 according to one embodiment of the present invention. The DEA 1 can be manufactured by a manufacturing method for a dielectric elastomer actuator (DEA) according to any embodiment of the present invention described below. The DEA 1 includes a membrane 10 made of a dielectric elastomer, and a first electrode 11 and a second electrode 12 provided on both sides of the membrane 10, respectively. The membrane 10 has a non-flat three-dimensional shape. The three-dimensional shape of the membrane 10 can be any shape as long as it is non-flat. The DEA 1 and the DEA system 2 will be described in more detail later.

[0022] Here, a method for producing a DEA according to a first embodiment of the present invention will be described with reference to Figures 1 to 4. The method for producing a DEA according to the first embodiment of the present invention includes a dipping step, a curing step, a mold removing step, and an assembly step.

[0023] First, before the dipping step, a liquid dielectric elastomer E contained in a dielectric elastomer tank TE and a mold M are prepared (FIG. 1). The dielectric elastomer E may be any dielectric elastomer, and examples thereof include silicone-based elastomers (eg, polydimethylsiloxane (PDMS) etc.), rubber, acrylic-based elastomers, and urethane-based elastomers. The mold M has a spherical shape in the illustrated example, but may have any three-dimensional shape.

[0024] Then, in the dipping step, the mold M is dipped into the liquid dielectric elastomer E (Fig. 1), and then the mold M is pulled up from the dielectric elastomer E (Fig. 2). As a result, the viscosity of the dielectric elastomer E causes the dielectric elastomer E to adhere to the mold M in the form of a film.

[0025] After the dipping step, in the curing step, the dielectric elastomer E on the mold M is cured to obtain a film body 10 made of the dielectric elastomer E on the mold M. The method of curing the dielectric elastomer E varies depending on the material of the dielectric elastomer E, but is carried out, for example, by heating the dielectric elastomer E or drying the dielectric elastomer E at room temperature.

[0026] After the hardening step, in a mold removal step, the mold M is removed from the film body 10 on the mold M to obtain the film body 10 (FIG. 3). The film body 10 obtained in the mold removal step has a non-flat three-dimensional shape in its natural state, and more specifically, has a three-dimensional shape that follows the outer shape of the mold M (FIG. 4). Here, the "natural state" refers to a state in which no external force is applied to the film body 10. More specifically, in the first embodiment, in the mold removal step, the mold M is released from the film body 10, thereby removing the mold M from the film body 10 on the mold M (FIG. 3). This allows the mold M to be easily removed from the film body 10. Here, "releasing" the mold M from the film body 10 refers to pulling the mold M away from the film body 10 by an external force. In the first embodiment, the material constituting the mold M may be any material, such as metal, resin, etc. In addition, in the first embodiment, the mold M may be manufactured by any method, for example, by metal molding, or by modeling with a 3D printer.

[0027] After the mold removal step, in the assembly step, a first electrode 11 and a second electrode 12 are provided on both sides of the membrane 10, respectively, to obtain the DEA 1 (FIG. 12).

[0028] In addition, the dipping step and curing step may be performed only once before the mold removal step, or the thickness of the film body 10 may be increased by repeating the dipping step multiple times before the curing step, or by repeating the dipping step and curing step multiple times before the mold removal step.

[0029] According to the manufacturing method of the DEA of the first embodiment of the present invention, a membrane body 10 having a non-flat three-dimensional shape is obtained through the above-mentioned dipping step, curing step, and mold removal step, so that a DEA1 in which the membrane body 10 is non-flat can be obtained.

[0030] Next, a method for producing a DEA according to a second embodiment of the present invention will be described with reference to Fig. 5 to Fig. 11. The method for producing a DEA according to the second embodiment of the present invention differs from that according to the first embodiment in the content of the mold removal step. The dipping step, curing step, and assembly step are the same as those according to the first embodiment. FIG. 5 is a diagram illustrating a mold removing step in the method for manufacturing a dielectric elastomer actuator according to a second embodiment of the present invention. In the second embodiment, the mold M is made of a first soluble material that is dissolved by the first solvent S1. The first solvent S1 and the first soluble material are each arbitrary, but for example, the first solvent S1 may be water and the first soluble material may be a water-soluble material (e.g., water-soluble polyvinyl alcohol (PVA) or the like), or the first solvent S1 may be oil and the first soluble material may be an oil-soluble material, or the first solvent S1 may be an organic solvent and the first soluble material may be ABS resin, ASA resin or the like. However, the first solvent S1 is not capable of dissolving the film body 10. In the second embodiment, in the mold removal step, the mold M is dissolved by the first solvent S1 to remove the mold M from the film body 10 on the mold M (FIG. 5), thereby obtaining the film body 10 (FIG. 4). Specifically, for example, as shown in FIG. 5, the mold M and the film body 10 after the hardening step are immersed in the first solvent S1 contained in a first solvent tank T1, thereby dissolving the mold M by the first solvent S1.

[0031] According to the second embodiment, it is possible to obtain a DEA1 in which the film body 10 is non-flat, as in the first embodiment. Furthermore, according to the second embodiment, since the mold M is dissolved by the first solvent S1 in the mold removal step (FIG. 5), the shape of the film body 10 can be made such that it cannot be released, compared to the case in which the mold M is released from the film body 10 in the mold removal step as in the first embodiment (FIG. 3), so that the degree of freedom of the shape of the film body 10 can be improved, and for example, the shape of the film body 10 can be made complex.

[0032] The manufacturing method of the DEA according to the second embodiment of the present invention may further include a mold manufacturing step of manufacturing a mold M before the dipping step. In the mold manufacturing step, the mold M may be manufactured by any method. For example, the mold manufacturing step may include a mold forming step of forming the mold M using a first soluble material by a 3D printer P, as in a first example shown in Figures 6 to 8 and a second example shown in Figures 9 to 11. By forming the mold M by the 3D printer P, the degree of freedom of the shape of the mold M can be improved compared to, for example, the case where the mold M is manufactured by metal molding. A first example shown in Figs. 6 to 8 and a second example shown in Figs. 9 to 11 will be described below in order.

[0033] 6 to 8, in a mold forming step, a mold M is formed using a first soluble material without using a support material by a 3D printer P. More specifically, the first example of the mold manufacturing step includes a three-dimensional shape data creating step, a 3D printing data generating step, and a mold forming step. First, in a three-dimensional shape data creating step, three-dimensional shape data (for example, three-dimensional CAD data) representing the three-dimensional shape of the mold M is created using a computer. Next, in a 3D printing data generating step, the 3D shape data created in the 3D shape data creating step is converted into 3D printing data D (FIG. 6) using a computer. The 3D printing data D is read by the control unit P1 of the 3D printer P when the modeling unit P2 of the 3D printer P performs modeling, and the control unit P1 is configured to cause the modeling unit P2 to model the mold M as a modeled object. The 3D printing data D includes, for example, slice data representing the two-dimensional shape of each layer of the mold M as a modeled object. Next, in the mold forming step, the mold M is formed by the 3D printer P (FIG. 7). The 3D printer P may perform forming using any forming method, such as a photolithography method, a powder sintering deposition modeling method, a fused deposition modeling method (FDM method), an inkjet method, etc. FIG. 7 shows a state in which forming is performed by a fused deposition modeling method (FDM method). The 3D printer P includes, for example, a control unit P1 configured by a CPU or the like, a forming unit P2 that performs forming according to the control of the control unit P1, a support table P5 for placing the mold M as the object to be formed, and a container P6 that contains the support table P5 and the mold M as the object. The forming unit P2 has a model material nozzle P3 configured to form an object using a model material MM. When the 3D printer P performs forming using the fused deposition modeling method (FDM method) as in this example, the model material nozzle P3 is configured to eject the model material MM. A first soluble material is used as the model material MM. In the 3D printer P configured in this way, in the mold forming step, the control unit P1 reads the 3D printing data D and causes the printing unit P2 to sequentially print each layer using the model material MM based on the three-dimensional shape included in the read 3D printing data D. At this time, the 3D printer P forms the mold M using the first soluble material as the model material MM without using a support material (i.e., without supporting the mold M as a modeled object with a support material). The mold forming step results in a mold M made of a model material MM made of a first soluble material (FIG. 8). The first example of the mold manufacturing steps described above does not use a support material, so there is no need for a step of removing the support material after the mold forming step, and the mold manufacturing steps are simplified.

[0034] In the second example of the mold manufacturing steps shown in Figures 9 to 11, in the mold forming step, a 3D printer P uses a supporting material SM made of a second soluble material that dissolves in a second solvent S2 (Figure 11) different from the first solvent S1 (Figure 5), and forms a mold M on the supporting material SM using the first soluble material. More specifically, the second example of the mold manufacturing steps includes a supporting material removal step in addition to the three-dimensional shape data creation step, the 3D printing data generation step, and the mold forming step described above for the first example. The three-dimensional shape data creation step and the 3D printing data generation step are the same as those in the first example described above. In the 3D printer P used in the mold modeling step, the modeling unit P2 further includes, in addition to the model material nozzle P3, a support material nozzle P4 configured to discharge a support material SM that supports the mold M as a modeled object during modeling. As the support material SM, a second soluble material that is dissolved by a second solvent S2 (FIG. 11) different from the first solvent S1 (FIG. 5) is used. The second solvent S2 and the second soluble material are each arbitrary as long as the second solvent S2 is different from the first solvent S1. For example, the second solvent S2 may be water and the second soluble material may be a water-soluble material (e.g., water-soluble polyvinyl alcohol (PVA) or the like), or the second solvent S2 may be oil and the second soluble material may be an oil-soluble material, or the second solvent S2 may be an organic solvent and the second soluble material may be ABS resin, ASA resin, or the like. However, the second solvent S2 is not capable of dissolving the mold M. In the 3D printer P configured in this way, in the mold forming step, the control unit P1 reads the 3D printing data D and causes the printing unit P2 to sequentially print each layer using the model material MM and supporting material SM based on the three-dimensional shape included in the read 3D printing data D. At this time, the 3D printer P uses the supporting material SM made of the second soluble material (i.e., supports the overhanging portion of the mold M as the modeled object with the supporting material SM) and forms the mold M on the supporting material SM using the first soluble material as the model material MM (FIG. 9). The mold forming step results in a mold M made of a model material MM made of the first soluble material supported by a support material SM made of the second soluble material (FIG. 10). After the mold creation step, in a supporting material removal step, the supporting material SM is dissolved by the second solvent S2 to remove the supporting material SM from the mold M on the supporting material SM (FIG. 11), thereby obtaining the mold M. Specifically, for example, as shown in FIG. 11, the mold M and supporting material SM after the mold creation step are immersed in the second solvent S2 contained in a second solvent tank T2, thereby dissolving the supporting material SM by the second solvent S2. In the second example of the mold manufacturing step described above, since a support material is used during modeling, it is possible to model a mold M having an overhanging portion and a shape that requires a support material. In addition, since the second solvent S2 (FIG. 11) for dissolving the second soluble material constituting the supporting material SM is different from the first solvent S1 (FIG. 5) for dissolving the first soluble material constituting the mold M, the mold M is not dissolved by the second solvent S2 in the supporting material removal step.

[0035] However, in the second embodiment, in the mold manufacturing step, the mold M may be manufactured by metal molding.

[0036] DEA1 according to an embodiment of the present invention, which can be manufactured by the manufacturing method of DEA according to each embodiment of the present invention, is, for example, as shown in FIG. 12 and FIG. 13. FIG. 12 shows a schematic diagram of a DEA system 2 including a DEA1 according to an embodiment of the present invention. FIG. 13 is a diagram for explaining the operation of the DEA1 in FIG. 12, in which FIG. 13(a) shows the state when no voltage is applied to the DEA1, and FIG. 13(b) shows the state when a voltage is applied to the DEA1. The DEA1 includes a membrane 10 made of a dielectric elastomer, and a first electrode 11 and a second electrode 12 provided on both sides of the membrane 10, respectively. The membrane 10 of the DEA1 in FIG. 12 to FIG. 13 is the same as the membrane 10 shown in FIG. 4. The membrane 10 has a non-flat three-dimensional shape when it constitutes a part of the DEA1 and when no voltage is applied to the DEA1 (FIG. 13(a)). Furthermore, when viewed alone, the membrane 10 has a non-flat three-dimensional shape in its natural state (FIG. 4). In this example, the membrane 10 has a substantially spherical shape (specifically, a shape in which an opening 10B is provided in a hollow sphere), but the three-dimensional shape of the membrane 10 can be any shape as long as it is non-flat.

[0037] DEA system 2 (FIG. 12) is configured to drive DEA 1. In addition to DEA 1, DEA system 2 includes power supply device 23 electrically connected to first electrode 11 and second electrode 12 of DEA 1. Power supply device 23 applies a voltage to DEA 1 and stops applying a voltage to DEA 1. Power supply device 23 can be, for example, a DC power supply.

[0038] When a voltage is applied to the DEA1 by the power supply unit 23, the first electrode 11 and the second electrode 12 attract each other by electrostatic force, causing the membrane body 10 to stretch so that the three-dimensional shape of the membrane body 10 expands (FIG. 13(b)). Thereafter, when the application of voltage by the power supply unit 23 is stopped, the membrane body 10 shrinks so that the three-dimensional shape of the membrane body 1 contracts, returning to its original shape and size (FIG. 13(a)). Because the DEA1 has a non-flat three-dimensional shape, when a voltage is applied, it can deform in a way that is different from conventional flat DEAs.

[0039] The materials constituting the first electrode 11 and the second electrode 12 may be any material as long as it is conductive and does not impede the expansion and contraction motion of the membrane body 10. For example, conductive grease (e.g., carbon grease), an expandable electrode, a conductive liquid (e.g., water), etc. are suitable. The first electrode 11 and the second electrode 12 may each be provided at only one location (partially or entirely) on the film body 10, or may be provided at multiple locations on the film body 10.

[0040] As in the examples of Figs. 4, 12 and 13, the membrane body 10 may define a cavity 10A therein and may have one or more openings 10B communicating with the cavity 10A. In manufacturing the DEA 1 having such a membrane body 10, in the manufacturing method of the DEA of each embodiment of the present invention described above, first, in a dipping step, preferably only a part of the mold M is dipped into the liquid dielectric elastomer E (FIGS. 1-2), so that the membrane body 10 formed on the mold M has a cavity 10A and an opening 10B (FIGS. 3, 5), and in a subsequent mold removing step, the mold M is removed from the membrane body 10 through the opening B of the membrane body 10 (FIGS. 3, 5). Thus, the membrane body 10 as described above is obtained. Then, in an assembly step, the first electrode 11 is provided on the outer surface of the membrane body 10, and the second electrode 12 is provided on the inner surface of the membrane body 10, thereby obtaining the DEA 1 (FIGS. 12-13). In the DEA 1 obtained in this way, the first electrode 11 is provided on the outer surface of the membrane body 10, and the second electrode 12 is provided on the inner surface of the membrane body 10. In this case, the first electrode 11 is preferably a conductive grease (e.g., carbon grease) or a stretchable electrode. The second electrode 12 is preferably a conductive grease (e.g., carbon grease), a stretchable electrode, or a conductive liquid (e.g., water). In the example of Figs. 12 and 13, the first electrode is carbon grease, and the second electrode is water. When the second electrode 12 is a conductive liquid, it is preferable that the second electrode 12 is filled in the cavity 10A of the membrane body 10. In this way, when the membrane body 10 defines a cavity 10A therein and has one or more openings 10B communicating with the cavity 10A, when a voltage is applied to the DEA 1, the membrane body 10 stretches so that the cavity 10A of the membrane body 10 expands and the three-dimensional shape of the membrane body 10 expands (FIG. 13(b)). Examples of the three-dimensional shape of such a membrane body 10 include an approximately spherical shape (specifically, a shape in which an opening 10B is provided in a hollow sphere) as shown in the examples of FIGS. 4 and 12 to 13, as well as the shapes of organs such as the heart and lungs. The DEA 1 equipped with the membrane body 10 having the shape of an organ can be suitably used, for example, in an organ simulator.

[0041] As described above, when the membrane body 10 defines a cavity 10A therein and has one or more openings 10B communicating with the cavity 10A, as in the example of Figs. 12-13, the cavity 10A of the membrane body 10 of the DEA 1 may be filled with an internal pressure applying medium 13, thereby applying a pre-stretch to the membrane body 10. By applying a pre-stretch to the membrane body 10, the membrane body 10 becomes softer. This is because the spring constant of the membrane body 10, which is an elastomer, is generally kept lower after a certain initial strain (pre-stretch) is applied. Therefore, when a voltage is applied to the DEA 1, the membrane body 10 stretches more. To obtain such a DEA 1, for example, in the assembly step of the manufacturing method of the DEA of each embodiment of the present invention described above, the cavity 10A of the membrane body 10 is filled with an internal pressure applying medium 13, thereby applying a preliminary extension to the membrane body 10. From the viewpoint of applying a uniform preliminary stretch to the membrane body 10, the material constituting the internal pressure applying medium 13 is preferably a liquid (for example, water) or a gas (for example, air (atmosphere)). In this case, it is preferable that the DEA system 2 includes an internal pressure applying medium supplying device 22 configured to supply the internal pressure applying medium 13 to the cavity 10A of the membrane body 10 through the opening 10B of the membrane body 10, as in the example of FIG. 12. In this case, the cavity 10A of the membrane body 10 is filled with the internal pressure applying medium 13 by the internal pressure applying medium supplying device 22. In the example of FIG. 12, the internal pressure applying medium supplying device 22 is configured to supply the internal pressure applying medium 13 made of a liquid (e.g., water) to the cavity 10A of the membrane body 10 through the opening 10B of the membrane body 10. In the example of FIG. 12, the internal pressure applying medium supplying device 22 has a medium tank 221 that stores the internal pressure applying medium 13, and a hose 222 configured to circulate the pressure applying medium 13 between the medium tank 221 and the cavity 10A of the membrane body 10. One end of the hose 222 on the membrane body 10 side is connected to the opening 10B of the membrane body 10 via a cylindrical jig 21. However, the internal pressure application medium supply device 22 may have a configuration different from that of the example in FIG.

[0042] The internal pressure applying medium 13 may constitute the second electrode 12 as in the example of Figs. 12 to 13. In this case, the internal pressure applying medium 13 is conductive. In this case, it is preferable that the internal pressure applying medium 13 is a conductive liquid (e.g., water) as in the example of Figs. 12 to 13. When the internal pressure applying medium 13 constitutes the second electrode 12, the internal pressure applying medium 13 has both an internal pressure applying function and an electrode function, so there is no need to separately provide the second electrode 12, and the structure of the DEA 1 can be simplified. However, the internal pressure applying medium 13 may be non-conductive and the second electrode 12 may be provided separately. In that case, it is preferable that the second electrode 12 is a conductive grease (for example, carbon grease) or a stretchable electrode.

[0043] Furthermore, the cavity 10A of the membrane body 10 of the DEA 1 does not have to be filled with the internal pressure applying medium 13, and therefore the membrane body 10 does not have to be pre-stretched.

[0044] The thickness of the film 10 is preferably, for example, 0.1 to 1.0 mm from the viewpoint of improving the performance of the DEA 1. It is difficult to manufacture the film 10 having such a small thickness and a non-flat three-dimensional shape by a manufacturing method (for example, modeling by a 3D printer) other than the manufacturing method including the above-mentioned dipping step. [Industrial Applicability]

[0045] The DEA produced by the DEA production method of the present invention and the DEA of the present invention can be used for any purpose, and can be suitably used, for example, in an organ simulator. [Explanation of symbols]

[0046] 1. Dielectric Elastomer Actuator (DEA) 10 Membrane body 10A cavity 10B opening 11 1st electrode 12 2nd electrode 13 Internal pressure medium 2. Dielectric Elastomer Actuator (DEA) System 21 Jig 22 Internal pressure medium supply device 221 Media tank 222 Hose 23 Power supply M mold E Dielectric Elastomer TE Dielectric Elastomer Bath S1 First Solvent T1 Solvent tank No. 1 S2 Second Solvent T2 Second Solvent Tank D 3D modeling data P 3D Printer P1 Control section P2 Modeling department P3 Modeling Nozzle P4 Support material nozzle P5 support stand P6 Containment Unit MM Model Material SM Support Material

Claims

1. 1. A method for manufacturing a dielectric elastomer actuator, comprising the steps of: a dipping step of dipping a mold into a liquid dielectric elastomer and then lifting the mold out of the dielectric elastomer; a curing step of curing the dielectric elastomer on the mold after the dipping step to obtain a film body made of the dielectric elastomer on the mold; a mold removing step of removing the mold from the film body on the mold after the curing step to obtain the film body having a non-flat three-dimensional shape; an assembling step of providing a first electrode and a second electrode on both sides of the membrane body, respectively, after the mold removing step, to obtain the dielectric elastomer actuator; Including, the mold is made of a first soluble material that is soluble in a first solvent; A method for manufacturing a dielectric elastomer actuator, wherein in the mold removal step, the mold is removed from the film on the mold by dissolving the mold with the first solvent.

2. The method further includes a mold manufacturing step of manufacturing the mold before the dipping step; The method for manufacturing a dielectric elastomer actuator as described in claim 1, wherein the mold manufacturing step includes a mold modeling step of modeling the mold using the first soluble material by a 3D printer without using a support material.

3. The method further includes a mold manufacturing step of manufacturing the mold before the dipping step; The mold manufacturing step includes: A mold forming step of forming the mold on the support material using the first soluble material while using a support material made of a second soluble material that is dissolved by a second solvent different from the first solvent by a 3D printer; a support material removing step of removing the support material from the mold on the support material by dissolving the support material in the second solvent after the mold forming step; A method for manufacturing the dielectric elastomer actuator of claim 1 comprising:

4. A method for manufacturing a dielectric elastomer actuator, comprising the steps of: a dipping step of dipping a mold into a liquid dielectric elastomer and then lifting the mold out of the dielectric elastomer; a curing step of curing the dielectric elastomer on the mold after the dipping step to obtain a film body made of the dielectric elastomer on the mold; a mold removing step of removing the mold from the film body on the mold after the curing step to obtain the film body having a non-flat three-dimensional shape; an assembling step of providing a first electrode and a second electrode on both sides of the membrane body, respectively, after the mold removing step, to obtain the dielectric elastomer actuator; Including, The membrane defines a cavity therein and has an opening communicating with the cavity; In the assembling step, the first electrode is provided on an outer surface of the membrane body, and the second electrode is provided on an inner surface of the membrane body; The method for manufacturing a dielectric elastomer actuator, wherein the assembling step includes filling the cavity of the membrane with an internal pressure applying medium, thereby applying a pre-tension to the membrane.

5. The method for manufacturing a dielectric elastomer actuator according to claim 4 , wherein in the mold removing step, the mold is removed from the film body on the mold by releasing the mold from the film body.

6. The method for manufacturing a dielectric elastomer actuator according to claim 4 , wherein the internal pressure applying medium is conductive and constitutes the second electrode.

7. A membrane body made of a dielectric elastomer and having a non-flat three-dimensional shape; a first electrode and a second electrode provided on both sides of the film body, respectively; Equipped with The membrane has a non-flat three-dimensional shape in its natural state, The membrane defines a cavity therein and has an opening communicating with the cavity; The first electrode is provided on an outer surface of the membrane, The second electrode is provided on an inner surface of the membrane, A dielectric elastomer actuator, wherein the cavity of the membrane is filled with an internal pressure applying medium, thereby applying a pre-tension to the membrane.

8. The dielectric elastomer actuator of claim 7 , wherein the internal pressure applying medium is conductive and constitutes the second electrode.

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