Volume-controlled coaxial valve block

Abstract

Providing small valve blocks for chemical containers. The coaxial valve block has a housing that can accommodate three valve control mechanisms, thus allowing for fast and effective purging without the need for additional external lines, valves, and coaxial injectors. This advantage greatly reduces the amount of wetted surface area inside the valve block, resulting in a significant reduction in the time it takes to purge the device, thus allowing for faster time to change out chemical containers.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This patent application claims priority to U.S. Provisional Application No. 62 / 987,128, filed March 9, 2020, and U.S. Provisional Application No. 63 / 055,869, filed July 23, 2020. [Background technology]

[0002] 2. Background of the Invention The semiconductor manufacturing industry requires a wide variety of chemicals and processes to be able to continuously supply pure chemicals on demand to semiconductor tools. These requirements necessitate a regular and safe exchange process of chemical containers within chemical transport equipment.

[0003] The presence of large piping and dead legs in the design increases the purge time required to safely exchange these chemical containers while reducing purge efficiency. Dead legs refer to portions of a chemical transport equipment design that the purge gas cannot effectively reach, thus reducing purge efficiency and equipment safety during chemical container exchange and equipment repair.

[0004] These shortcomings of chemical transport device design are amplified by the presence of chemicals with lower vapor pressures and high purity, such as tetrakis(dimethylamido)titanium (TDMAT), which have historically been purged by the use of solvent chemicals as disclosed in U.S. Patents 5,964,230 and 6,138,691.

[0005] As described below, the use of a low volume block valve eliminates the need for solvent purging and instead allows for the use of high pressure, high velocity purge gas and internal coaxial lines. The use of vacuum and purge gas exhaust is also included in the block valve design. This low volume block valve virtually eliminates any dead legs in the purgable piping design, allowing for improved purge efficiency during chemical container changeover. Summary of the Invention

[0006] Summary of the Invention In one aspect, disclosed herein is a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening (120) including a first opening (122) and a second opening (124) each of which is an end of a conduit, the first opening (120) including a first opening (122) and a second opening (124) each of which is an end of a conduit, the first opening (120) including a first opening (122) and a second opening (124) each of which is an end of a conduit, the first opening (120) including a first opening (122) and a second opening (124) each of which is an end of a conduit, the first opening (120) including a first opening (120 ... a first side (116), and a second side (126); a third side (128) adjacent to the first side (116), and a fourth side (128) opposite the third side (128); (138), wherein third side (128) includes a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is an end of a conduit, the first opening (134) being in fluid communication with a first portion (150) of a second conduit (148), the second opening (136) being located on a fourth side (138) of the housing (114). a third side (128) and a fourth side (138) in fluid communication with an opening (204) located in the fifth side (140) of the housing (114); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein a second portion (152) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) through a conduit via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) being disposed adjacent a portion of the housing (114); a sloped seventh side (158) in fluid communication with an opening (208) through a conduit portion (194) via a bend (196) located in the fifth side (140), and a second opening (176) in fluid communication with an opening (206) located in a second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188);

[0007] In another aspect, disclosed herein is a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a first portion (150) and a second portion (126) extending therethrough. a first side (116) in fluid communication with a T-junction (146) in fluid communication with a second conduit (148) having a first opening (124) in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in a cylindrical recess (118) in the first side (116); a third side (128) adjacent the first side (116) and a fourth side (128) opposite the third side (128). a third side (128) of the housing (114) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is an end of a conduit, the first opening (134) being in fluid communication with a first portion (150) of the second conduit (148), and the second opening (136) being in fluid communication with an opening (204) located in the fourth side (138) of the housing (114). a third side (128) and a fourth side (138) having a first portion (150) of a second conduit (148) extending through the housing (114); a second valve control mechanism located in a cylindrical recess (130) in the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein a first portion (150) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) including a bend (196) located in the fifth side (140) of the housing (114); a third valve control mechanism located in a cylindrical recess (154) in the sloped seventh side (158); a second opening (176) in fluid communication with an opening (208) through a conduit portion (194) via a bend (190) and a third opening (176) in fluid communication with an opening (206) located in the second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188);

[0008] In yet another aspect, disclosed herein is a method of performing a purging process on a valve block after the valve block has undergone a fluid flow process, the valve block being in fluid communication with a container, the valve block having a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) having a surface (120) and a second side (126) opposite the first side (116), the cylindrical recess (118) having a surface (120) and a second side (126) each having a a first side (116) including a first opening (122) and a second opening (124) at the end of a line, the first opening being in fluid communication with a T-junction (146) that is in fluid communication with a second line (148) having a first portion (150) and a second portion (152), the second opening (124) being in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in a cylindrical recess (118) in the first side (116); a third side (128) adjacent to the housing (116) and a fourth side (138) opposite the third side (128), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of the first opening (134) being in fluid communication with a first portion (150) of the second conduit (148), the second opening (136) being in fluid communication with the fourth side (138) of the housing (114). a third side (128) and a fourth side (138) in fluid communication with an opening (204) located in the cylindrical recess (130) of the housing (114) (FIG. 1); a second valve control mechanism located in the cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein a first portion (150) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) being connected to a bend (196) located in the fifth side (140) of the housing (114); a sloped seventh side (158); a cylindrical recess in the sloped seventh side (158); and a conduit (186) in fluid communication with an opening (208) through the conduit (194), the second opening (176) in fluid communication with an opening (206) located in the second side (126) of the housing (114) through the bend (190) and the conduit portion (188), the opening (206) located in the second side (126) of the housing (114) being in fluid communication with a purge gas source (159). and a third valve control mechanism located in the cylindrical recess (130) of the third side (128); the method includes the steps of exchanging the container; engaging the second valve control mechanism to close a first opening (134) in the surface (132) of the cylindrical recess (130) of the third side (128) and isolate a second opening (136) in the surface (132) of the cylindrical recess (130) of the third side (128); and disengaging the first valve control mechanism to close the first opening (134) in the surface (132) of the cylindrical recess (130) of the third side (128). opening a first opening (122) in the surface (120) of the cylindrical recess (118) of the first side (116) and opening a second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116); disengaging the third valve control mechanism to open a first opening (174) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158) and opening a second opening (176) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158);The purge gas flows through the second opening (176) in the surface (184) of the cylindrical recess (154) of the sloping seventh side (158), then through the first opening (174) in the surface (184) of the cylindrical recess (154) of the sloping seventh side (158), exits the interior coaxial portion (183) of the coaxial conduit, returns to the exterior coaxial portion (185) of the coaxial conduit, and flows back into the cylindrical recess (116) of the first side (116). flowing the high pressure purge gas through an opening (206) located in the second side (126) of the housing (114) through a first opening (122) in the surface (120) of the cylindrical recess (118) of the first side (116) to a second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116) to a vent opening (178) located in the second side (126) of the housing (114);

[0009] The embodiments of the present invention may be used alone or in combination with each other. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 shows a prior art solvent purge system that includes a solvent purge manifold to a host container manifold system that includes two independent valves and a coaxial injector connection. [Diagram 2] FIG. 2 shows a prior art high pressure purge manifold to host container manifold arrangement that includes coaxial injector connections and two independent valves with three independent valve controls. [Diagram 3] FIG. 3 further illustrates another prior art device that includes a valve block that includes a dual valve control mechanism. [Figure 4] FIG. 4 shows a valve block of the present invention. [Diagram 5] FIG. 5 is an axial view of the valve block of FIG. [Figure 6] FIG. 6 is a view of the valve block of FIG. 5 taken along line AA. [Figure 7]FIG. 7 is a view of the valve block of FIG. 6 taken along line BB. [Figure 8] FIG. 8 is another view of the valve block of FIG. [Figure 9] FIG. 9 is a view of the valve block of FIG. 8 taken along line CC. [Figure 10] FIG. 10 is a view of the valve block of FIG. 8 taken along line DD. [Figure 11] FIG. 11 shows the valve block of the present invention in relation to the mounting points of the container below the chimering. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Detailed Description of the Invention The following detailed description merely provides preferred exemplary embodiments and is not intended to limit the scope, applicability, or configuration of the present invention. Rather, the following detailed description of preferred exemplary embodiments provides those skilled in the art with an enabling description for practicing preferred exemplary embodiments of the present invention. Various changes may be made in the function and arrangement of elements without departing from the spirit and scope of the present invention as set forth in the appended claims.

[0012] For purposes of this specification and the appended claims, the term "high velocity purge" means a purge process that uses a purge gas delivered at a rate of 100 liters per minute or greater.

[0013] For purposes of this specification and the appended claims, the term "conduit" refers to one or more structures capable of transporting fluid between two or more components of an apparatus. For example, conduits can include pipes, ducts, manifolds, and combinations thereof that transport liquids and / or gases at varying pressures throughout an apparatus.

[0014] For purposes of this specification and the appended claims, the term "fluid communication" refers to a quality of connection between two or more components that allows liquids and / or gases to be transported between the components in a controlled manner. Coupling two or more components so that they are in fluid communication with one another can include any suitable method known in the art, such as the use of flanged lines, gaskets, and / or bolts.

[0015] For purposes of this specification and the appended claims, the terms "coaxial" or "coaxial" refer to an arrangement of tubes in which an inner tube is located concentrically inside an outer tube.

[0016] In the context of describing the present invention (particularly in the context of the claims that follow), the use of the terms "a" and "an" and "the" and similar referents should be understood to encompass both the singular and the plural, unless otherwise indicated in the present disclosure or clearly contradicted by the context. The terms "comprising," "having," "including," and "containing" should be understood as open-ended terms (i.e., meaning "including, but not limited to"), unless otherwise indicated. The recitation of ranges of values ​​in this disclosure is only intended to serve as a shorthand method of individually referring to each separate value included within the range, unless otherwise indicated in the present disclosure, and each separate value is incorporated herein as if it were individually recited in the present disclosure. All methods described in this disclosure can be performed in any suitable order, unless otherwise indicated in the present disclosure or clearly contradicted by the context. The use of any and all examples or exemplary language (e.g., "such as") provided in this disclosure is intended merely to further clarify the invention and does not pose a limitation on the scope of the invention unless otherwise stated in the claims. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the invention. Use of the term "comprising" in the specification and claims encompasses the narrower terms "consisting essentially of" and "consisting of."

[0017] The embodiments described in this disclosure include the best ways known to the inventors for carrying out the invention. Variations of these preferred embodiments will become apparent to those skilled in the art upon reading the foregoing description. The inventors expect that such variations will be adopted by those skilled in the art as appropriate, and the inventors intend to carry out the invention in ways other than as specifically described in this disclosure. Accordingly, this invention includes all modifications and equivalents of the subject matter recited in the claims appended hereto as permitted by applicable law. Moreover, any combination of the above-described elements in all possible variations thereof is encompassed by the invention unless otherwise indicated in this disclosure or clearly contradicted by context.

[0018] As used herein, "about" is intended to correspond to ±5% of the stated value.

[0019] Disclosed in this disclosure is an improved valve block design and apparatus therefor that can be used to improve purging efficiency for drying all wet surfaces connected between chemical containers and manifolds or between a set of manifolds. The improved valve block design includes multiple features that can be used to substantially reduce the time required to purge all wet surfaces in the apparatus. The valve block design eliminates dead legs or introduces only minimal dead legs, and substantially impacts any minimal dead legs. Additionally, it allows for a significant reduction in the length of the vent path and thus a significant reduction in the total amount of surface area of ​​the lines wetted with liquid chemicals.

[0020] The valve block disclosed in the present disclosure includes a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a second opening (124) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a second opening (124) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a second opening (124) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a second opening (124) and a second opening (124) in the surface (120), each of which is an end of a conduit, the second ... a first side (116), a second side (126) in fluid communication with a T-junction (146) in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), the second opening (124) in fluid communication with a vent opening (178) located in a second side (126) of the housing (114); a third side (128) adjacent the first side (116) and a fourth side (128) opposite the third side (128); 38), wherein the third side (128) includes a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is an end of a conduit, the first opening (134) being in fluid communication with a first portion (150) of a second conduit (148), the second opening (136) being located on a fourth side (138) of the housing (114). a third side (128) and a fourth side (138) in fluid communication with an opening (204) extending through the fifth side (140) and the sixth side (142) opposite the fifth side (140), wherein a second portion (152) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) through a conduit via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) being configured to be in communication with the housing ( a housing (114) having an angled seventh side (158) in fluid communication with an opening (208) through a conduit portion (194) via a bend (196) located in a fifth side (140) of the housing (114), and a second opening (176) in fluid communication with an opening (206) located in a second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188);

[0021] The valve block according to the embodiments disclosed in the present disclosure achieves these improvements by having a triad of valves located within a single valve block or housing, with two of the valve seats oriented at 90 degrees difference from each other (e.g., on adjacent surfaces of the housing in the shape of a rectangular parallelepiped), while the third is located independently on another side. When used in an apparatus in which the valve block is connected to a host container, the presence of the triad of valves ensures that all dead legs are fully impinged during the purge step, thereby allowing for a more efficient purge process. Specifically, the conduit through which the purge gas enters the apparatus is coaxially aligned with a port opening in fluid communication with the container. Since this port opening is closed during the purge process, the minimal dead legs located coaxially to this port opening are fully impinged by the purge gas when the port opening is closed. Thus, less purge gas can be used, the purge process can be performed more quickly, and energy savings can be realized. This is in contrast to known prior art devices (see Figures 1 and 2) in which the valve seats are further away from the container opening. Additionally, by arranging the valves in a single valve block, the liquid (vent) path can be kept very short, thereby greatly reducing the amount of piping surface area that must be wetted and therefore dried, in contrast to known prior art devices (see FIG. 2) which have comparably much longer liquid (vent) paths that must be dried.

[0022] 1 is a visual representation of prior art apparatus 10, including a solvent source 66 in fluid communication with a line 40 that is in fluid communication with a valve 38. Valve 38 is in fluid communication with a line 17 via connection 16, which is in fluid communication with a line 15 via a bend 26. Line 15 is in fluid communication with the interior coaxial portion of a coaxial injector 36, which is in fluid communication with a container 30 via line 29.

[0023] Fluid flow outlet 60 is in fluid communication with line 59 which is in fluid communication with valve 68. Valve 68 is in fluid communication with line 47 via connection 46. Line 47 is in fluid communication with the exterior coaxial portion of coaxial injector 36 and is in fluid communication with container 30 via line 29.

[0024] 2 is a visual representation of prior art apparatus 70, including a purge source 101 in fluid communication with a line 97 which is in fluid communication with a valve 84 through a bend 92. Valve 84 is in fluid communication with a line 79, which is in fluid communication with the interior coaxial portion of a coaxial injector 88, which is in fluid communication with a container 90 via line 89.

[0025] Fluid flow outlet 98 is in fluid communication with conduit 74 which is in fluid communication with valve 72 via connection 83. Valve 72 is dual actuated to control the respective port connections 82, 83 via actuators 99, 100. During this actuation, actuator 99 is open and actuator 100 is closed allowing fluid communication to connection 75 which is in fluid communication with conduit 93. Conduit 93 is in fluid communication with the external coaxial portion of coaxial injector 88 and in fluid communication with container 90 via conduit 89.

[0026] Vent 96 is in fluid communication with line 95 which is in fluid communication with valve 72 via connection 82. Valve 72 is dual actuated to control the respective port connections 82, 83 via actuators 99, 100. During this actuation, actuator 100 is open and actuator 99 is closed allowing fluid communication to connection 75, which is in fluid communication with line 93. Line 93 is in fluid communication with the external coaxial portion of coaxial injector 88 and is in fluid communication with container 90 via line 89.

[0027] The valve block shown in prior art Figure 3 is disclosed in U.S. Patent No. 10,663,072, which is incorporated herein by reference. The valve block shown in prior art Figure 3 is a supply manifold to host container manifold apparatus 110 that includes an improved valve block 112 in accordance with the present invention, which will now be described in detail.

[0028] The valve block 112 of the present invention includes a housing 114 that is generally rectangular in shape, although other housing shapes are possible within the scope of the present invention, including, for example, a generally cuboid, spherical, or ovoid shape, or an irregular shape. In this embodiment, the housing 114 includes a first side 116 that includes a valve seat 117 that includes a cylindrical recess 118. The cylindrical recess 118 includes a surface 120 that terminates in openings 122, 124, and a second side 126 opposite the first side 116. The cylindrical recess 118 accommodates the placement of a valve control mechanism (not shown). The valve control mechanism allows for selective opening and closing of the opening 122 via a diaphragm that is fully engageable with the opening 122.

[0029] The opening 122 is fluidly connected to a line section 144 which is fluidly connected to a T-junction 146. The T-junction 146 is also fluidly connected to a line section 148 which includes a first section 150 and a second section 152. The valve block 112 further includes a third side 128 which includes a valve seat 129 which includes a cylindrical recess 130. The cylindrical recess 130 includes a surface 132 where the openings 134, 136 terminate, a fourth side 138 opposite the third side 128, a fifth side 140, and a sixth side 142 opposite the fifth side 140. The cylindrical recess 130 accommodates the placement of a second valve control mechanism (not shown) therein. The second valve control mechanism is used to selectively open and close the opening 134 via a diaphragm fully engageable with the opening 134. Opening 134 is in fluid communication with a first portion 150 of conduit portion 148, and opening 136 is in fluid communication with conduit portion 160. In this embodiment, cylindrical recesses 118, 130 of valve seats 117, 129 that accommodate the attachment of valve control mechanisms are located on adjacent sides of housing 114 (i.e., first side 116 and third side 128), and openings 134, 154 are axially aligned, i.e., the center points of openings 134, 154 are aligned along the same axis (via a line that can be drawn through the center of the volume of conduit portion 148).

[0030] A second portion 152 of the conduit section 148 is in fluid communication with an opening 154 located on the fourth side 138 of the valve block 112, which is in fluid communication with both a make-up manifold 158 and a purge gas source 159 via a connection 156. The conduit section 160 is in fluid communication with a conduit section 164 via a bend 162, which is in fluid communication with an opening 166 located on the second side 126 of the housing 114. The opening 166 is in fluid communication with a container 170 via a connection 168. The opening 124 located on the surface 120 of the cylindrical recess 118 is in fluid communication with a conduit section 172, which is in fluid communication with the conduit section 176 via a bend 174. The conduit section 176 is in fluid communication with an opening 178 located on the fifth side 140 of the housing 114, which in turn is in fluid communication with a vent 182 via a connection 180. In this embodiment, the T-junction 146 and the bends 162, 174 orient the respective connected conduit sections at a 90 degree angle. It should be appreciated that in alternative embodiments, the T-junction 146 and / or the bends 162, 174 need not orient the respective connected conduit sections at a 90 degree angle, but instead can orient the respective connected conduit sections at any angle between 30 and 135 degrees.

[0031] However, the valve block disclosed in U.S. Pat. No. 10,663,072 still suffers from the drawback of only moving liquid or gas through three ports controlled by two actuators. The present invention, on the other hand, can move liquid or gas through four ports controlled by three individual actuators. In addition to advanced port control, the present invention can deliver purge gas directly to the container connections, fluid flow paths, and vents through the use of coaxial tubing within the valve block. The smaller tubes inside the coaxial portion of the valve focus the pressure of the purge gas to a higher pressure, allowing for faster purging of the valve block. This disclosure is based on that disclosed in U.S. Pat. No. 10,663,072.

[0032] 4-10, a purge manifold to host container manifold apparatus 110 including an improved valve block 112 in accordance with the present invention will now be described in detail.

[0033] The valve block 112 of the present invention includes a housing 114 that is a multi-sided object, although other housing shapes are possible within the scope of the present invention, including, for example, a generally cubic, spherical, rectangular, oval, or other irregular shape. In this embodiment, the housing 114 includes a first side 116 that includes a valve seat 117 that includes a cylindrical recess 118. The cylindrical recess 118 includes a surface 120 that terminates in openings 122, 124, and a second side 126 opposite the first side 116. The cylindrical recess 118 accommodates placement of a valve control mechanism (not shown). The valve control mechanism allows for selective opening and closing of the opening 122 via a diaphragm that is fully engageable with the opening 122.

[0034] The opening 122 is fluidly connected to a conduit section 144 which is fluidly connected to a T-junction 146. The T-junction 146 is also fluidly connected to a conduit section 148 which includes a first section 150 and a second section 152. The valve block 112 further includes a third side 128 which includes a valve seat 129 which includes a cylindrical recess 130. The cylindrical recess 130 includes a surface 132 at which the openings 134, 136 terminate, a fourth side 138 opposite the third side 128, a fifth side 140, and a sixth side 142 opposite the fifth side 140. The cylindrical recess 130 accommodates therein the arrangement of a second valve control mechanism (not shown). The second valve control mechanism is used to selectively open and close the opening 134, for example using a diaphragm. Opening 134 is in fluid communication with a first portion 150 of conduit portion 148, and opening 136 is in fluid communication with conduit portion 198. Conduit portion 198 is in fluid communication with an opening 204 located on a fourth side 138 of housing 114, which in turn is in fluid communication with fluid flow outlet 202 via connection 200. In this embodiment, the cylindrical recesses 118, 130 of valve seats 117, 129 which accommodate the attachment of the valve control mechanism are located adjacent (i.e., on first side 116 and third side 128) instead of on opposing sides of the valve block housing as shown in the prior art embodiment of FIG.

[0035] Conduit section 148 is in fluid communication with conduit section 164 via bend 162, which is in fluid communication with opening 166 located on fifth side 140 of housing 114. Opening 166 is in fluid communication with face seal fitting 187 via reduced conduit 189, and with coaxial conduit section 185, which is in fluid communication with opening 208. Opening 208 is in fluid communication with container 170 via connection 168. Opening 124 located on surface 120 of cylindrical recess 118 is in fluid communication with conduit section 172. Conduit section 172 is in fluid communication with opening 178 located on second side 126 of housing 114, which is in fluid communication with vent 182 via connection 180.

[0036] Additionally, the valve block 112 includes a sloped seventh side 158 that includes a valve seat 131 that includes a cylindrical recess 154. The cylindrical recess 154 includes a surface 184 that terminates in openings 174, 176, and a second side 126 that opposes the first side 116. The cylindrical recess 154 accommodates the placement of a third valve control mechanism (not shown). The third valve control mechanism is used to selectively open and close the opening 174. The opening 174 is in fluid communication with a line portion 192. The line portion 192 is in fluid communication with a line portion 194 via a bend 196. The line portion 194 is in fluid communication with an outer coaxial line portion 185 (outer portion) and line portion 168, and leads to the container 170 via an inner coaxial portion 183 (inner portion) that is located inside a face seal fitting 187. Opening 176 is in fluid communication with conduit section 186. Conduit section 186 is in fluid communication with conduit section 188 via bend 190, which is in fluid communication with opening 206 located in second side 126 of housing 114 and with purge gas source 159 via connection 156.

[0037] In the device 110 of Figures 4-10, during normal fluid flow operation, the valve control mechanism (not shown) in the cylindrical cavity 130 is open. This allows fluid to flow from the container 170 through the conduit 168 and through the opening 208 to the conduit 185. The conduit 185 is the outer coaxial portion of the face seal 187, which allows fluid to flow through the opening 166 to the conduits 164 and 148. With the valve control mechanism (not shown) open, the fluid can flow through the opening 134 and into the opening 136, so that it can pass through the conduits 198 and 200, out the opening 204 and towards the fluid flow outlet 202.

[0038] If the container 170 is empty, it needs to be replaced. The valve control (not shown) in the cylindrical cavity 130 (third side) is closed. This closes the opening 134 and isolates the wet equipment from the area intended to be purged. The valve control (not shown) in both cylindrical cavities 154 and 118 is opened, starting the purge cycle. The purge gas source 159 supplies purge gas through lines 188 and 186 via line 156 through opening 206. With the valve control (not shown) open, the fluid flows through opening 174 and into opening 176, so that it exits the inner coaxial portion 183 through lines 192 and 196. The container's valve control (not shown) is closed, and this purge process allows the high pressure purge gas to force the fluid molecules out of the opening 208 connection and back into the outer coaxial line 185. Conduit 185 is an outer coaxial portion of face seal 187 that allows the purge gas and fluid particles to flow through opening 166 and into conduits 164 and 148. When a valve control mechanism (not shown) in cylindrical recess 118 is open, the purge gas and fluid particles can flow through opening 122 and into opening 124 so that it can exit opening 178 via conduits 172 and 180 to vent 182.

[0039] Accordingly, disclosed herein is a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is an end of a conduit, the first opening having a first portion (150) and a second portion (126) extending therethrough. a first side (116) in fluid communication with a T-junction (146) in fluid communication with a second conduit (148) having a first end (116) and a second side (126) in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in a cylindrical recess (118) in the first side (116); a third side (128) adjacent the first side (116) and a fourth side (128) opposite the third side (128). a face (138), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is an end of a conduit, the first opening (134) being in fluid communication with a first portion (150) of a second conduit (148), and the second opening (136) being in fluid communication with an opening (204) located in a fourth side (138) of the housing (114). a third side (128) and a fourth side (138) having a cylindrical recess (130) formed therein; a second valve control mechanism located in a cylindrical recess (130) in the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein a first portion (150) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) including a bend (196) located in the fifth side (140) of the housing (114); a third valve control mechanism located in a cylindrical recess (154) in the sloped seventh side (158); a second opening (176) in fluid communication with an opening (208) through a conduit portion (194) via a bend (190) and a third opening (176) in fluid communication with an opening (206) located in the second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188);

[0040] Accordingly, further disclosed herein is a method of performing a purging process on a valve block after the valve block has undergone a fluid flow process, the valve block being in fluid communication with a container, the valve block comprising a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) having a surface (120) and a tube (122) disposed on the surface (120), each of the surfaces (120) including a tube (122). a first side (116) and a second side (126) including a first opening (122) and a second opening (124) at the end of a passage, the first opening being in fluid communication with a T-junction (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), the second opening (124) being in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in a cylindrical recess (118) in the first side (116); a third side (128) adjacent to the housing (116) and a fourth side (138) opposite the third side (128), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of the first opening (134) being in fluid communication with a first portion (150) of the second conduit (148), the second opening (136) being in fluid communication with the fourth side (132) of the housing (114). a third side (128) and a fourth side (138) in fluid communication with an opening (204) located in the cylindrical recess (130) of the third side (128); a second valve control mechanism located in the cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein a first portion (150) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162);a sloped seventh side (158) adjacent the first side (116) and the fourth side (138), the sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, the cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, the first opening (174) being connected to a bend (196) located in the fifth side (140) of the housing (114); a sloped seventh side (158); a cylindrical recess in the sloped seventh side (158); and a conduit (186) in fluid communication with an opening (208) through the conduit (194), the second opening (176) in fluid communication with an opening (206) located in the second side (126) of the housing (114) through the bend (190) and the conduit portion (188), the opening (206) located in the second side (126) of the housing (114) being in fluid communication with a purge gas source (159). and a third valve control mechanism located in the cylindrical recess (130) of the third side (128); the method includes the steps of exchanging the container; engaging the second valve control mechanism to close a first opening (134) in the surface (132) of the cylindrical recess (130) of the third side (128) and isolate a second opening (136) in the surface (132) of the cylindrical recess (130) of the third side (128); and disengaging the first valve control mechanism to close the first opening (134) in the surface (132) of the cylindrical recess (130) of the third side (128). opening a first opening (122) in the surface (120) of the cylindrical recess (118) of the first side (116) and opening a second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116); disengaging the third valve control mechanism to open a first opening (174) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158) and opening a second opening (176) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158);The purge gas flows through the second opening (176) in the surface (184) of the cylindrical recess (154) of the sloping seventh side (158), then through the first opening (174) in the surface (184) of the cylindrical recess (154) of the sloping seventh side (158), exits the interior coaxial portion (183) of the coaxial conduit, returns to the exterior coaxial portion (185) of the coaxial conduit, and flows back into the cylindrical recess (116) of the first side (116). flowing the high pressure purge gas through an opening (206) located in the second side (126) of the housing (114) through a first opening (122) in the surface (120) of the cylindrical recess (118) of the first side (116) to a second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116) to a vent opening (178) located in the second side (126) of the housing (114);

[0041] Unlike the prior art apparatus 10 shown in Figure 1, when the apparatus 110 of Figure 4 needs to change containers, it does not need to use a hazardous solvent source. The use of high pressure purge gas accomplishes the same task, reducing the changes in hazardous chemical exposure in the apparatus and reducing the waste stream for disposing of hazardous chemicals.

[0042] Additionally, unlike the prior art device 70 shown in Figure 2, the device 110 of Figures 4-10 does not require additional lines, valves, and a separate coaxial injector. The device 110 of Figures 4-10 takes all of these separate components and combines them into one small valve block. The advantage of this is that the amount of wetted surfaces on the interior of the valve block is greatly reduced. This significantly reduces purge times and increases the speed at which containers can be changed out.

[0043] Additionally, unlike the prior art apparatus 110 shown in Figure 3, when the apparatus 110 of Figures 4-10 performs a container exchange, the coaxial injector portion 187 can use high pressure purge gas to blow out the connection between the valve block 112 and the container 170. This allows the same valve to vent gas in the same step and also deliver fluid in another step after the can exchange is completed. This is accomplished by incorporating three separate valve controls (not shown) into a single valve block while still utilizing a coaxial high pressure purge device.

Claims

1. a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of the first opening and the second opening (124) being the termination of a conduit, the first opening being in fluid communication with a T-junction (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), the second opening (124) being in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a third side (128) adjacent to the first side (116) and a fourth side (138) opposite the third side (128), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of the first opening (134) being an end of a conduit, the first opening (134) being in fluid communication with the first portion (150) of the second conduit (148), and the second opening (136) being in fluid communication with an opening (204) located in the fourth side (138) of the housing (114); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the second portion (152) of the second conduit (148) is in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) through a conduit via a bent portion (162); a sloped seventh side (158) adjacent said first side (116) and said fourth side (138), said sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, said cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in said surface (184), each of which is an end of a conduit, said first opening (174) and a second opening (176) in said surface (184). a sloped seventh side (158) in fluid communication with an opening (208) through a conduit portion (194) via a bend (196) located on the fifth side (140) of the housing (114), the second opening (176) in fluid communication with an opening (206) located on the second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188); The valve block includes the housing (114).

2. 2. The valve block of claim 1, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

3. 3. The valve block of claim 2, wherein the opening (166) on the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduction conduit (189) and in fluid communication with a coaxial conduit (185) that is in fluid communication with the opening (208) located in the fifth side (140) of the housing (114).

4. The valve block of claim 3, wherein the opening (208) located in the fifth side (140) is in fluid communication with a container (170) via a connection (168).

5. The valve block of claim 4, wherein the opening (206) located in the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

6. The valve block of claim 1 , wherein the T-junction includes a 90° angle.

7. The valve block of claim 1 , wherein the T-junction comprises an angle of between 30° and 135°.

8. a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of the first opening and the second opening (124) being the termination of a conduit, the first opening being in fluid communication with a T-junction (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), the second opening (124) being in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in the cylindrical recess (118) of the first side (116); a third side (128) adjacent to the first side (116) and a fourth side (138) opposite the third side (128), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of the first opening (134) being an end of a conduit, the first opening (134) being in fluid communication with the first portion (150) of the second conduit (148), and the second opening (136) being in fluid communication with an opening (204) located in the fourth side (138) of the housing (114); a second valve control mechanism located in the cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), the first portion (150) of the second conduit (148) being in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162); a sloped seventh side (158) adjacent said first side (116) and said fourth side (138), said sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, said cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in said surface (184), each of which is an end of a conduit, said first opening (174) and a second opening (176) in said surface (184). a sloped seventh side (158) in fluid communication with an opening (208) through a conduit portion (194) via a bend (196) located on the fifth side (140) of the housing (114), the second opening (176) in fluid communication with an opening (206) located on the second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit portion (188); a third valve control mechanism located in the cylindrical recess (154) on the inclined seventh side (158); and The apparatus includes a valve block including the housing (114).

9. The apparatus of claim 8, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

10. 10. The apparatus of claim 9, wherein the opening (166) on the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduction conduit (189) and in fluid communication with a coaxial conduit (185) that is in fluid communication with the opening (208) located in the fifth side (140) of the housing (114).

11. The apparatus of claim 10, wherein the opening (208) located on the fifth side (140) of the housing (114) is in fluid communication with a container (170) via a connection (168).

12. The apparatus of claim 8, wherein the opening (206) located in the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

13. The apparatus of claim 8 , wherein the T-junction includes a 90° angle.

14. The apparatus of claim 8 , wherein the T-junction comprises an angle between 30° and 135°.

15. 1. A method for performing a purge process in a valve block after the valve block has undergone a fluid flow process, the valve block being in fluid communication with a container, the valve block comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), the first side (116) including a cylindrical recess (118) for receiving a valve control mechanism, the cylindrical recess (118) including a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of the first opening and the second opening (124) being the termination of a conduit, the first opening being in fluid communication with a T-junction (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), the second opening (124) being in fluid communication with a vent opening (178) located in the second side (126) of the housing (114); a first valve control mechanism located in the cylindrical recess (118) of the first side (116); a third side (128) adjacent to the first side (116) and a fourth side (138) opposite the third side (128), the third side (128) including a cylindrical recess (130) for receiving a valve control mechanism, the cylindrical recess (130) including a surface (132) and a first opening (134) and a second opening (136) in the surface, each of the first opening (134) being an end of a conduit, the first opening (134) being in fluid communication with the first portion (150) of the second conduit (148), and the second opening (136) being in fluid communication with an opening (204) located in the fourth side (138) of the housing (114); a second valve control mechanism located in the cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), the first portion (150) of the second conduit (148) being in fluid communication with an opening (166) located in the fifth side (140) of the housing (114) via a bent portion (162); a sloped seventh side (158) adjacent said first side (116) and said fourth side (138), said sloped seventh side (158) including a cylindrical recess (154) for receiving a valve control mechanism, said cylindrical recess (154) including a surface (184) and a first opening (174) and a second opening (176) in said surface (184), each of which is an end of a conduit, said first opening (174) being located on said fifth side (140) of said housing (114); a sloped seventh side (158) in fluid communication with an opening (208) through a conduit section (194) via a bend (196) positioned in the conduit section (194), the second opening (176) in fluid communication with an opening (206) located in the second side (126) of the housing (114) through a conduit (186) via a bend (190) and a conduit section (188), the opening (206) located in the second side (126) of the housing (114) in fluid communication with a purge gas source (159); a third valve control mechanism located in the cylindrical recess (154) on the inclined seventh side (158); and the housing (114) having The method comprises: exchanging the container; engaging the second valve control mechanism to close the first opening (134) in the surface (132) of the cylindrical recess (130) in the third side (128) and to isolate the second opening (136) in the surface (132) of the cylindrical recess (130) in the third side (128); disengaging the first valve control mechanism to open the first opening (122) in the surface (120) of the cylindrical recess (118) of the first side (116) and to open the second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116); disengaging the third valve control mechanism to open the first opening (174) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158) and to open the second opening (176) in the surface (184) of the cylindrical recess (154) of the sloped seventh side (158); Purge gas flows through the second opening (176) in the surface (184) of the cylindrical recess (154) of the inclined seventh side (158), then through the first opening (174) in the surface (184) of the cylindrical recess (154) of the inclined seventh side (158), exits the internal coaxial portion (183) of the coaxial conduit, retreats to the external coaxial portion (185) of the coaxial conduit, and returns to the cylindrical recess (154) of the first side (116). flowing a high pressure purge gas through the opening (206) located on the second side (126) of the housing (114) through the first opening (122) in the surface (120) of the recess (118) to the second opening (124) in the surface (120) of the cylindrical recess (118) of the first side (116) and to a vent opening (178) located on the second side (126) of the housing (114); A method comprising:

16. The method of claim 15, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

17. 17. The method of claim 16, wherein the opening (166) on the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduction conduit (189) and in fluid communication with the coaxial conduit (185) that is in fluid communication with the opening (208) located in the fifth side (140) of the housing (114).

18. 18. The method of claim 17, wherein the opening (208) located in the fifth side (140) of the housing (114) is in fluid communication with a container (170) via a connection (168).

19. The method of claim 15, wherein the opening (206) located in the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

20. The method of claim 15 , wherein the T-junction includes a 90° angle.

21. The method of claim 15, wherein the T-junction comprises an angle between 30° and 135°.

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