Collection and recycling of rare gases in semiconductor processing equipment.

Abstract

A process chamber, such as for semiconductor processing equipment, is connected to a recovery unit. The recovery unit includes a first storage tank for a buffer gas and a second storage tank for a noble gas. Both storage tanks are connected to columns in the recovery unit. The recovery unit and process chamber can operate as a closed system. The separation in the recovery unit operates under constant flow conditions, but the noble gas can be delivered at a variable flow rate.

Description

[Technical field]

[0001] The present disclosure relates to semiconductor processing equipment. [Background technology]

[0002] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to a provisional patent application assigned to U.S. Patent Application No. 62 / 817,702, filed March 13, 2019, the disclosure of which is incorporated herein by reference.

[0003] Demand for valuable noble gases is growing. Xenon is a trace component of the atmosphere (87 ppb) and a by-product of complex air separation processes, making it an expensive material for semiconductor processing applications and other applications. For example, xenon is increasingly used in applications such as anesthesia, ion propulsion engines, high intensity discharges in lighting, plasma etching in semiconductor manufacturing, and as a plasma medium in discharge- or laser-produced plasmas. This growth in the number of applications is often limited by the limited supply of xenon. It would be beneficial to collect and recycle valuable noble gases such as xenon with the highest recovery efficiency.

[0004] Depending on the recovery efficiency of the rare gas recovery unit, the amount of rare gas collected varies. Typical performance is in the range of 90%-99.9%. Typically, 0.1%-10% of the remaining rare gas, such as Xe, is lost when the buffer gas is evacuated or otherwise removed. Depending on the gas separation technology and implementation, improving recovery efficiency may be impossible or expensive.

[0005] For example, in semiconductor processing tools, the impact of loss of residual noble gases on long-term cost of ownership can be significant, especially when noble gas flow rates are high, on the order of several liters per minute, and the process chambers are operating nearly 24 hours a day, as is common in semiconductor manufacturing. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent No. 9,168,467 [Patent Document 2] U.S. Patent No. 7,300,497 [Patent Document 3] U.S. Patent No. 8,535,414 Summary of the Invention [Problem to be solved by the invention]

[0007] Therefore, what is needed are new systems and methods for collecting and recycling rare gases. [Means for solving the problem]

[0008] In a first embodiment, a system is provided, the system comprising a process chamber using xenon and / or krypton, and a recovery unit in fluid communication with the process chamber, the recovery unit including a mixing tank in fluid communication with the process chamber via a gas exhaust line, a first column in fluid communication with the mixing tank, a second column in fluid communication with the mixing tank, a first storage tank in fluid communication with the first column and the process chamber, a second storage tank in fluid communication with the second column and the process chamber, a first gas supply line connecting the first storage tank to the process chamber, a second gas supply line connecting the second storage tank to the process chamber, a first loopback line connecting the first gas supply line to the gas exhaust line, and a second loopback line connecting the second gas supply line to the exhaust line.

[0009] The gas exhaust line may include a vacuum pump.

[0010] The system may further include a compressor pump in fluid communication with the mixing tank, the first column, and the second column.

[0011] The recovery unit may use at least one of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption.

[0012] The recovery unit may use cryogenic distillation.

[0013] The recovery unit may use membrane separation.

[0014] The recovery unit may be a closed loop system that includes the process chamber.

[0015] The system can further include a plurality of the process chambers in fluid communication with the gas exhaust line, the first gas supply line, and the second gas supply line, each of the process chambers can operate at a different gas supply flow rate.

[0016] In a second embodiment, a method is provided. The method includes processing a semiconductor wafer in a process chamber containing a process gas. The process gas includes a noble gas and a buffer gas. The process gas is pumped from the process chamber to a mixing tank through a gas exhaust line. The process gas is pumped from the mixing tank to a first column and a second column. The process gas is separated in the first column and the second column. The buffer gas is delivered from the first column to a first storage tank. The noble gas is delivered from the second column to a second storage tank. The buffer gas is delivered from the first storage tank to the process chamber and the noble gas is delivered from the second storage tank to the process chamber.

[0017] The noble gas may include at least one of xenon or krypton. The buffer gas may include at least one of argon, neon, oxygen, nitrogen, or hydrogen.

[0018] The method may further include diverting at least a portion of the noble gas from the second gas supply line toward the gas exhaust line rather than toward the process chamber.

[0019] The method may further include diverting at least a portion of the buffer gas from the first gas supply line toward the gas exhaust line rather than the process chamber.

[0020] Pumping the process gas from the process chamber to the mixing tank may use a vacuum pump. Pumping the process gas from the mixing tank to the first column and the second column may use a compressor pump.

[0021] The separating can use at least one of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption.

[0022] The separating may use cryogenic distillation.

[0023] The separating may use membrane separation.

[0024] The method may be carried out in a closed system.

[0025] The separating may operate at constant flow conditions, while the transferring of the rare gas from the second storage tank may be performed at a variable flow rate.

[0026] For a better understanding of the nature and objects of the present disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings. [Brief description of the drawings]

[0027] [Figure 1] FIG. 1 is a diagram of one embodiment of a system according to the present disclosure. [Diagram 2] FIG. 2 is a block diagram of a method according to the present disclosure. [Diagram 3] FIG. 2 is a diagram of another embodiment of a system according to the present disclosure. [Figure 4] FIG. 1 illustrates one embodiment of a system with multiple process chambers according to the present disclosure. [Diagram 5] FIG. 2 illustrates another embodiment of a system with multiple process chambers in accordance with the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Although the claimed subject matter is described with respect to certain embodiments, other embodiments, including embodiments that do not provide all of the advantages and features described herein, are also within the scope of the disclosure. Various changes in structure, logic, process steps, and electronic components may be made without departing from the scope of the disclosure. Accordingly, the scope of the disclosure is defined solely by reference to the appended claims.

[0029] Each embodiment disclosed herein includes a system and method for collecting and recycling gases. Highly valuable noble gases contained in the exhaust from the process chamber can be separated, purified, and resupplied with little loss. The system has a lower cost of ownership due to less loss of noble gases such as Xe. Furthermore, the recovery unit operates at constant flow conditions optimized to improve a combination of recovery efficiency and purity, while the process chambers can operate with varying gas supply flow rates. Multiple process chambers can operate with different gas supply flow rates while sharing a single recovery unit.

[0030] In semiconductor processing equipment, noble gases such as xenon and krypton are often supplied to the process chamber along with another buffer gas. Such combinations include Xe / Ar, Xe / Ne, Xe / He, Xe / O 2 , Xe / N 2 , Xe / H 2 , Kr / Ar, Kr / Ne, Kr / He, Kr / O 2 , Kr / N 2 , Kr / H 2, Xe / Kr, etc. In discharge or laser produced plasmas, xenon atoms are highly ionized and excited to various high energy ionic states under electron bombardment or laser fields. Transitions between densely branched electron configurations produce a broad range of radiation including infrared (IR), visible, ultraviolet (UV), extreme ultraviolet (EUV), and x-rays. Ar, Ne, O 2 , N 2 , or H 2 A buffer gas such as Kr may be used to slow down (and eventually stop) the energetic Xe or Kr ions to prevent them from etching the process chamber. Kr is considered a noble gas and may be used as a buffer gas for Xe. One or more buffer gases may be used with one or more noble gases. The exhaust of the process chamber is vacuum pumped out and sent to a noble gas recovery unit, where the Xe and / or Kr are mixed with Ar, Ne, O 2 , N 2 , or H 2 The rare gas is separated from a buffer gas such as . The rare gas may be purified by gas separation techniques. Such purification techniques include adsorption separation, cryogenic distillation (e.g., U.S. Pat. No. 5,399,633), or membrane separation. Adsorption separation may use pressure swing adsorption (e.g., U.S. Pat. No. 5,399,633), vacuum swing adsorption (e.g., U.S. Pat. No. 5,399,633), and temperature swing adsorption. Each of the patents disclosed herein is incorporated by reference in its entirety.

[0031] FIG. 1 is a diagram of one embodiment of a system 100. The system 100 includes a process chamber 101 and a recovery unit 200. The process chamber 101 is connected to a gas supply line 10, which may provide one or more noble gases and one or more buffer gases. The recovery unit 200 is in fluid communication with the process chamber 101. The process chamber 101 circulates the noble gases and buffer gases and may be part of a semiconductor inspection or metrology system, such as a light source or a measurement chamber of the system 100. The process chamber 101 may also be part of a CD metrology system, a reticle inspection system, a laser produced plasma source, an etch chamber, or other semiconductor processing, inspection, metrology, or review system. For example, the process chamber 101 may be part of a xenon plasma focused ion beam system or a xenon plasma etch system. Applications outside the semiconductor industry are also possible. For example, the process chamber 101 may be part of a xenon thruster test chamber used in space propulsion research.

[0032] The recovery unit 200 includes a mixing tank 105, which is in fluid communication with the process chamber 101 via the gas exhaust line 11 / 12 / 14. The gas exhaust line 11 / 12 / 14 includes a total inlet section 14. A first column 107 and a second column 108 are in fluid communication with the mixing tank 105 via conduits 15 / 16. A first storage tank 109 is in fluid communication with the first column 107 (via conduit 17), the process chamber 101, and the gas exhaust line 11 / 12 / 14. A second storage tank 110 is in fluid communication with the second column 108 (via conduit 18), the process chamber 101, and the gas exhaust line 11 / 12 / 14. Other connections between the second column 108 and the first storage tank 109 or between the first column 107 and the second storage tank 110 are also possible. A first gas supply line 23 connects the first storage tank 109 to the process chamber 101. A second gas supply line 24 connects the second storage tank 110 to the process chamber 101.

[0033] The gas exhaust lines 11 / 12 / 14 may include a vacuum pump 102. The conduits 15 / 16 connecting the mixing tank 105 to the first column 107 and the second column 108 may include a compressor pump 106.

[0034] Gas exhaust 11 from the process chamber 101 may be pumped by vacuum pump 102 and sent to a recovery unit 200. Gases received by the recovery unit 200 may be held in a mixing tank 105 and then pumped to gas separation columns 107, 108, where they are pressurized by a compressor pump 106. The packing material, temperature, and pressure (or vacuum) in the gas separation columns 107, 108 may vary depending on the choice of gas separation technology. Generally, a purified noble gas, such as Xe, and N 2 A purified buffer gas such as Xe emerges at the opposite ends of columns 107, 108. Such gases may use a particular temperature / pressure profile within those columns. The purified noble gas such as Xe may be stored in a second storage tank 110 and returned to the process chamber 101 via a second gas supply line 24. The second storage tank 110 may have less than 100% noble gas and may include certain impurities or small amounts of buffer gas. N 2 A purified, low-cost buffer gas, such as , can be stored in a first storage tank 109 and returned to the process chamber 101 via a first gas supply line 23. The first storage tank 109 can have less than 100% buffer gas and can include certain impurities or small amounts of noble gases. Pumps can be used to deliver the gas in the first and second gas supply lines 23, 24.

[0035] The system 100 may include a first loopback line 21 connecting a first gas supply line 23 to the gas exhaust line 11 / 12 / 14. A combination of the flow from the first loopback line 21 and the flow from the gas exhaust line 11 / 12 / 14 may form the total inlet section 14.

[0036] The system 100 may include a second loopback line 22 connecting the second gas supply line 24 to the gas exhaust line 11 / 12 / 14. The flow from the second loopback line 22 combined with the flow from the gas exhaust line 11 / 12 / 14 may form the total inlet section 14.

[0037] The first and second loopback lines 21, 22 are provided for the flow output from the recovery unit 200. The flow rates of the first gas supply line 23 and the second gas supply line 24 to the process chamber 101 can be adjusted (e.g., using one or more valves) or stopped, without affecting the state of the recovery unit 200. The flow diverted from the first gas supply line 23 goes to the first loopback line 21. The flow diverted from the second gas supply line 24 goes to the second loopback line 22. The flow rate diverted to the first loopback line 21 or the second loopback line 22 can be 0% to 100%, and the first and second loopback lines 21, 22 can have different diverted inflow rates. The gas flow rate in the total inlet section 14 of the recovery unit 200 and each partial pressure inside the total inlet section 14 can be kept constant.

[0038] The gas exhaust line 12, the first loopback line 21, the second loopback line 22, the first gas supply line 23, and the second gas supply line 24 may include one-way valves or other types of valves.

[0039] The system 100 may require a particular noble gas flow rate and a particular buffer gas flow rate, which are supplied via the first gas supply line 23 and the second gas supply line 24. The first storage tank 109 and the second storage tank 110 may provide a constant flow rate that is greater than the maximum demand of the process chamber 101. The excess may be recycled, for example, in a continuous manner, through the recovery unit 200.

[0040] The recovery unit 200 may use one or more of pressure swing adsorption, vacuum swing adsorption, temperature swing adsorption, cryogenic distillation, or membrane separation. Other techniques are possible.

[0041] As shown in FIG. 1, the first storage tank 190 contains N 2 and the like, which are recycled to the process chamber 101 as well as the noble gas, such as Xe, from the second storage tank 110. In one example, the recovery unit 200 is a closed loop system that includes the process chamber 101. Any remaining noble gas in the first storage tank 109 and the first gas supply line 23 is retained in the system with virtually no loss.

[0042] Figure 2 is a block diagram of a method 300 that may be applied to the system 100 of Figure 1. In step 301, a semiconductor wafer is processed in a process chamber containing a process gas. The process gas includes a noble gas and a buffer gas. The noble gas may include at least one of xenon or krypton. The buffer gas may include at least one of argon, neon, oxygen, nitrogen, or hydrogen. Other noble gases or buffer gases are possible.

[0043] In step 302, the process gas is pumped from the process chamber through a gas exhaust line to a mixing tank, for example using a vacuum pump. In step 303, the process gas is pumped from the mixing tank to a first column and a second column, for example using a compressor pump. In step 304, the process gas is separated in the first column and the second column. This separation may use one or more of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption, cryogenic distillation, or membrane separation.

[0044] In step 305, the buffer gas is sent from the first column to a first storage tank. In step 306, the noble gas is sent from the second column to a second storage tank. In step 307, the buffer gas and the noble gas are sent to the process chamber. Thus, the method 300 can be performed in a closed system.

[0045] In one case, the separation operates at constant flow conditions, but the noble gas may be delivered at a varying flow rate.

[0046] In one case, at least a portion of the noble gas is diverted from the second gas supply line to the gas exhaust line, and / or at least a portion of the buffer gas is diverted from the gas supply line to the gas exhaust line. Thus, some or all of the noble gas and / or buffer gas is bypassed from the process chamber. For example, the process chamber may be out of use or undergoing repairs. The gases may be recirculated by the recycling system until the process chamber is back online.

[0047] As an example, the gas supply to the process chamber may be stopped. The port connecting the exhaust from the process chamber may be closed and the exhaust may be switched to the outside air. The process chamber may be pumped out and evacuated. The associated recovery unit may be adjusted to the design operating conditions. The recovery unit may be operated with the first and second loopback lines fully open. This may stabilize the recovery at an optimal combination of recovery efficiency and purity. The gas exhaust line may be switched, connected or opened to the full inlet section. The flow rates of the first and second gas supply lines may be set for the process chamber. The flow rate of the first loopback line may be the output of the first storage tank minus the flow rate of the first gas supply line. The flow rate of the second loopback line may be the output of the second storage tank minus the flow rate of the second gas supply line.

[0048] 3, the system 100 may further include a gas scraper 103 in fluid communication with the process chamber 101 and the mixing tank 105. The gas scraper 103 may be on the gas exhaust line 11 / 12 / 14. The gas scraper 103 may remove contamination from the process chamber 101. Such contamination may include O2, NH3, and / or NH4 that have leaked into the chamber from the ambient air. 2 , hydrocarbons from the vacuum lubricant, outgassing from the chamber materials, or other sources of contamination. The gas scraper 103 may include, for example, one or more of a filter, an absorber, a cryogenic trap, a getter, or a catalytic converter.

[0049] As shown in FIG. 4, multiple process chambers 101-1 to 101-4 may be used in the system 202. Although four process chambers are shown, more or less process chambers may be included. The maximum number of process chambers may be dictated by the capabilities of the recovery unit 200. Each of the process chambers 101-1 to 101-4 is in fluid communication with a gas exhaust line 11 / 12 / 14 and may operate at different gas supply flow rates, such as using a mass flow controller or other controller. Each process chamber is connected to a gas supply line 10-1 to 10-4, a first gas supply line 23-1 to 23-4, and a second gas supply line 24-1 to 24-4. Each chamber has a gas supply line 10-1 to 10-4, although less than the total number of chambers may have one gas supply line. Some chambers may be connected to only the first and second gas supply lines.

[0050] As shown in system 203 of FIG. 5, each of the process chambers 101-1 to 101-4 may have a separate gas scraper 103-1 to 103-4.

[0051] Using the systems and methods disclosed herein, a completely closed loop system for collecting and recycling gases can be implemented. As a result, loss of valuable noble gases can be nearly eliminated. The use of loopback lines can allow the process chambers to operate at varying gas supply flow rates while the recovery unit can operate at constant inlet flow rate conditions optimized for the best combination of recovery efficiency and purity. Gas scrapers can be added to remove contamination and / or impurities that affect the performance of the recovery unit or process chamber. Multiple process chambers can share a single recovery unit. Each of these process chambers can operate at a different gas supply flow rate. Each of these process chambers can use a separate gas scraper to remove contamination and / or impurities.

[0052] In one instance, the system disclosed herein can operate with only 0.01% loss of noble gas, which can occur during regeneration of the gas scraper or cleaning of the process chamber.

[0053] In one case, a xenon laser-produced plasma (LPP) soft x-ray source uses N as a buffer gas. 2 The buffer gas is used to stop the energetic xenon ions that are created in the plasma, preventing them from etching the chamber and damaging the optics. The soft x-ray source also uses a recovery unit to convert N 2 Xenon is recovered from the buffer gas. In this example, the recovery unit is a commercially available Pressure Swing Adsorption (PSA) recovery unit. Using embodiments disclosed herein, the risk of slow drift of the recovery unit over time and unpredictable degradation of xenon recovery efficiency can be mitigated. Recovery efficiency is a factor that impacts the cost of ownership of the tool. Sharing a single recovery unit across multiple tools can further reduce the cost of ownership. The recovery unit can be scaled to suit the desired flow rate.

[0054] Although the present disclosure has been described with respect to one or more particular embodiments, it will be understood that other embodiments of the present disclosure may be made without departing from the scope of the present disclosure, and therefore, the present disclosure is deemed to be limited only by the appended claims and their reasonable interpretation.

Claims

1. a process chamber using xenon and / or krypton; a recovery unit in fluid communication with the process chamber, the recovery unit comprising: a mixing tank in fluid communication with the process chamber via a gas exhaust line; a first column in fluid communication with the mixing tank; a second column in fluid communication with the mixing tank; a first storage tank in fluid communication with the first column and the process chamber; a second storage tank in fluid communication with the second column and the process chamber; a first gas supply line connecting the first storage tank to the process chamber; a second gas supply line connecting the second storage tank to the process chamber; a first loopback line connecting the first gas supply line to the gas exhaust line; a second loopback line connecting the second gas supply line to the gas exhaust line; the process gas comprises a noble gas and a buffer gas, the noble gas being xenon and / or krypton; The process gas is sent from the process chamber through the gas exhaust line to the first column and the second column through the mixing tank and separated in the first column and the second column; The buffer gas is delivered from the first column to the first storage tank and from the first storage tank to the process chamber. The noble gas is delivered from the second column to the second storage tank and from the second storage tank to the process chamber. system.

2. The system of claim 1 , wherein the gas exhaust line comprises a vacuum pump.

3. 10. The system of claim 1, further comprising a compressor pump in fluid communication with said mixing tank, said first column, and said second column.

4. 10. The system of claim 1, wherein the recovery unit uses at least one of pressure swing adsorption, vacuum swing adsorption, temperature swing adsorption, cryogenic distillation, or membrane separation.

5. The system of claim 1 , wherein the recovery unit is a closed loop system that includes the process chamber.

6. 10. The system of claim 1, further comprising a plurality of said process chambers in fluid communication with said gas exhaust line, said first gas supply line, and said second gas supply line, each of said process chambers operating at a different gas supply flow rate.

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