Electronic spectrometer

Abstract

To provide an electron spectrometer capable of detecting fast electrons from slow electrons with high resolution.SOLUTION: An electron spectrometer according to the present disclosure includes an excitation unit 100 that irradiates a sample with an energy beam, a circulating unit 10 that circulates electrons emitted from the sample irradiated with an energy ray, and a detection unit 120 that detects electrons extracted from the circulation unit 10, and the circulation unit 10 includes a plurality of electrode pairs, the plurality of electrode pairs control the applied voltage to cause electrons to circulate, and some of the plurality of electrode pairs are capture electrode pairs that capture electrons into the circulation unit 10 by controlling the applied voltage, and some of the plurality of electrode pairs are extracting electrode pairs that extract electrons from the circulating unit 10 by controlling the applied voltage.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to electron spectroscopy. [Background technology]

[0002] Electron spectroscopy is a measurement technique for obtaining information on the energy levels of electrons in a material. In electron spectroscopy, information on the energy of electrons in a material can be obtained by irradiating the material with energy rays such as light or electrons and measuring the energy distribution of free electrons emerging from the material.

[0003] An example of an electron spectrometer using electron spectroscopy is a time-of-flight electron spectrometer. A time-of-flight electron spectrometer measures the time it takes for the ejected electrons to reach the detection unit 120, calculates the speed from the measured time, and analyzes the energy. However, electrons have a light mass and therefore a fast speed. Therefore, a time-of-flight electron spectrometer, whose resolution depends on the distance the ejected electrons travel to reach the detection unit 120, has a problem in that it can only be applied to low-speed electrons (less than 10 eV).

[0004] Another type of electron spectrometer is the Velocity Map Imaging (VMI) electron spectrometer. VMI electron spectrometers analyze the kinetic energy of electrons by mapping all electrons with the same initial velocity vector to the same point on a two-dimensional detector using an electrostatic ion lens, regardless of the position where they were generated in the ionization region. However, VMI electron spectrometers have the problem that they can be applied to low- and medium-speed electrons (10 to 300 eV), but not to high-speed electrons (over 300 eV).

[0005] Non-Patent Document 1 discloses an electrostatic deflection electron spectrometer. The electrostatic deflection electron spectrometer changes the flight trajectory of electrons using an electric field, and measures the energy of the electrons from the relationship between the electric field strength and the amount of deflection. The electrostatic deflection electron spectrometer can be applied to low-speed electrons to high-speed electrons. [Prior art documents] [Non-patent literature]

[0006] [Non-Patent Document 1] V. Perez-Dieste et al., J. Physics: Conf. Series 425, 072023 (2013) Summary of the Invention [Problem to be solved by the invention]

[0007] Research into electron momentum spectroscopy is being conducted to directly observe the electron motion within a substance. Electron momentum spectroscopy is an experimental technique that utilizes Compton scattering using high-speed electrons as an excitation source, and can observe the shape of the wave function of each molecular orbital in momentum space. Compton scattering detects electrons with high energy on the order of keV. The electrostatic deflection electron spectrometer described in Non-Patent Document 1 cannot provide sufficient resolution for electrons on the order of keV (for example, the resolution is 2 eV when the electron energy is 600 eV). Therefore, there is a demand for an electron spectrometer that has a higher resolution than the electrostatic deflection electron spectrometer for high-speed electrons.

[0008] The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide an electron spectrometer that can detect low-energy electrons to high-energy electrons with high resolution. [Means for solving the problem]

[0009] The gist of the present disclosure is as follows. (1) An electron spectrometer according to one aspect of the present invention includes an excitation unit that irradiates an energy beam onto a sample, a circulation unit that circulates electrons emitted from the sample irradiated with the energy beam, and a detection unit that detects the electrons extracted from the circulation unit; The circulating portion includes a plurality of electrode pairs, The plurality of electrode pairs circulates the electrons by controlling an applied voltage; some of the plurality of electrode pairs are capture electrode pairs that capture the electrons into the orbiting portion by controlling an applied voltage; some of the plurality of electrode pairs are extraction electrode pairs that extract the electrons from the circulating portion by controlling an applied voltage; A bunch compression unit is provided for reducing the time spread of an electron bunch, which is a mass of electrons, by changing at least one of the speed and trajectory of the electrons. 、 The bunch compression unit a first trajectory correction unit that changes the trajectory of the electrons and is disposed on the side of the capture electrode pair; a second trajectory correction unit that changes the trajectory of the electrons and is disposed on the extraction electrode pair side; Equipped with The first trajectory correction unit and the second trajectory correction unit reduce the time spread of the electron bunch. do.

[0014] ( 2 )the above( 1 In the electron spectrometer described in (1), the first trajectory correction unit and the second trajectory correction unit may be electrostatic lenses.

[0015] ( 3 )(1) above or ( 2 In the electron spectrometer described in (1), the multiple electrode pairs constitute an outer electrode and an inner electrode, the inner surface of the outer electrode and the outer surface of the inner electrode are spherical, and a space between the inner surface of the outer electrode and the outer surface of the inner electrode may form a circulation path for the electrons.

[0016] ( 4 ) Above (1)~( 3 The electron spectrometer according to any one of claims 1 to 5, wherein the plurality of electrode pairs constitute an outer electrode and an inner electrode, an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode are cylindrical; A space between an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode may be a circulation path for the electrons. Effect of the Invention

[0017] According to the above-described aspects of the present invention, it is possible to provide an electron spectrometer capable of detecting low-energy electrons to high-energy electrons with high resolution. [Brief description of the drawings]

[0018] [Figure 1] 1 is a schematic perspective view of an electron spectrometer according to an embodiment of the present invention; [Diagram 2] 2 is a cross-sectional view taken along line AA of the electron spectrometer shown in FIG. 1. [Diagram 3] 1 is a diagram for explaining the relationship between incident electrons and electrons emitted from a sample. FIG. [Figure 4] 10 is a diagram for explaining the intake and extraction of electrons into and from a circulating portion. FIG. [Diagram 5] FIG. 1 is a diagram for explaining bunch compression by electron velocity modulation. [Figure 6] FIG. 13 is a diagram for explaining bunch compression by trajectory correction. [Figure 7] FIG. 13 is a schematic perspective view of an electron spectrometer according to another embodiment of the present invention. [Figure 8] 8 is a cross-sectional view taken along line BB of the electron spectrometer shown in FIG. 7. [Figure 9] FIG. 13 is a diagram for explaining the influence of bunch compression and revolution on resolution. [Figure 10] 1 is a diagram comparing the performance of a conventional electron spectrometer and the electron spectrometer according to the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Hereinafter, an electron spectrometer according to an embodiment of the present invention will be described with reference to Figs. 1 and 2. In the following description, components having the same or similar functions are denoted by the same reference numerals. Components having the same or similar functions may not be described repeatedly. In addition, "parallel," "orthogonal," "same," and "equivalent" described in this specification include "substantially parallel," "substantially orthogonal," "substantially identical," and "substantially equivalent," respectively. "Connection" described in this specification is not limited to the case where two members are in direct contact with each other, but includes the case where another member is interposed between the two members.

[0020] First Embodiment FIG. 1 is a schematic perspective view of an electron spectrometer 300 according to the first embodiment. FIG. 2 is a cross-sectional view of the electron spectrometer 300 shown in FIG. 1 taken along line AA. The electron spectrometer 300 includes a rotation unit 10, a bunch compression unit 20, a first deflection unit 60, a second deflection unit 70, a third deflection unit 80, an inlet 90, an excitation unit 100, a sample delivery unit 110, a detection unit 120, and a control unit (not shown). Each unit is connected so that the electron path can maintain a vacuum state. In the first embodiment, the rotation unit 10, the bunch compression unit 20, the first deflection unit 60, the second deflection unit 70, the third deflection unit 80, the inlet 90, the excitation unit 100, the sample delivery unit 110, and the detection unit 120 are housed inside a container 500.

[0021] Since the electrons emitted from the sample have a time width of an energy ray (for example, an electron beam, an X-ray), they are emitted from the sample as a bunch of electrons (electron bunch) having a certain time width (time spread). The ionization region of the sample has a predetermined size. Here, the ionization region refers to a spatial region where the electrons are emitted from the sample. Therefore, even if the position where the electrons are emitted from the sample differs, the electrons are emitted as an electron bunch having a certain time width (time spread). The bunch compression unit 20 has a function of reducing (compressing) the time spread of the electron bunch, which is a bunch of electrons, by changing at least one of the speed and trajectory of the electrons emitted from the sample. The bunch compression unit 20 includes an electron velocity modulation unit 30, a first trajectory correction unit 40, and a second trajectory correction unit 50. Each unit will be described below.

[0022] (Excitation section) The excitation unit 100 has a function of irradiating an energy beam onto a sample. The energy beam for exciting the sample is not particularly limited. The energy beam is, for example, an electron beam, a laser beam, or the like. The excitation unit 100 is, for example, an electron gun, a laser, or the like. Examples of electrons emitted from the sample irradiated with the energy beam include scattered electrons resulting from scattering of the electron beam, which is an energy beam, and ionized electrons resulting from ionization of the sample.

[0023] (Sample delivery section) The sample delivery unit 110 delivers the sample to an irradiation area E where the energy beam is irradiated. The sample delivery unit 110 is, for example, a gas nozzle. The state of the sample is not particularly limited as long as electrons are emitted from the sample by irradiation with the energy beam. The sample may be in any state of solid, liquid, or gas. The sample may also be in an energetically unstable state.

[0024] (Intake port) Electrons emitted from the sample irradiated with the energy beam pass through the intake port 90 and enter the first deflection unit 60. The angle X (scattering angle when the energy beam is an electron beam) between the traveling direction F of the energy beam (here, an electron beam) and the direction connecting the center of the area E irradiated with the energy beam on the sample and the intake port 90 is not particularly limited, but is, for example, 45 degrees. In the case of 45 degrees, electrons with a scattering angle of 45 degrees enter the circulation unit 10. The intake port 90 of the first embodiment has a shape in which a hole that forms an angle X with the traveling direction F of the energy beam is rotated 360 degrees around the traveling direction F of the energy beam as a central axis. By making the intake port 90 in such a shape, electrons having different azimuth angles φ can be taken in.

[0025] (1st deflection section) The first deflection unit 60 deflects the trajectory of the electrons that have passed through the intake port 90 so that the electrons enter the first trajectory correction unit 40. The first deflection unit 60 is composed of, for example, electrodes 61 and 62. The shapes of the electrodes 61 and 62 are not particularly limited as long as they can deflect the trajectory of the electrons so that the electrons enter the first trajectory correction unit 40.

[0026] (1st trajectory correction section) The first trajectory correction unit 40 changes the electron trajectory and converges the time to the detection unit 120 for each electron energy. The first trajectory correction unit 40 is disposed on the capture electrode pair side. In addition, the first trajectory correction unit 40 and the second trajectory correction unit 50 invert the isochronal plane (plane connecting electrons emitted at the same time) of the emitted electron bunch, so that the isochronal plane of the electrons becomes parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. This makes it possible to reduce the time spread of the electron bunch.

[0027] The first trajectory correction unit 40 is, for example, an electrostatic lens. In the first embodiment, the first trajectory correction unit 40 is composed of electrodes 35, 36, 41, 42, 43, and 44. In the first embodiment, the electrodes 35, 36, 41, 42, 43, and 44 are ring-shaped electrodes. The electrode 35 is disposed inside the electrode 36. The electrodes 35 and 36 constitute the external electrodes of the first trajectory correction unit 40. The electrode 41 is disposed inside the electrode 42. The electrodes 41 and 42 constitute the central electrodes of the first trajectory correction unit 40. The electrode 43 is disposed inside the electrode 44. The electrodes 43 and 44 constitute the external electrodes of the first trajectory correction unit 40. In this embodiment, the two external electrodes of the first trajectory correction unit 40 are, for example, ground. A steady voltage is applied to the central electrode of the first trajectory correction unit 40. The first trajectory correction unit 40 converges the electrons that have passed through the first deflection unit 60 and entered the first trajectory correction unit 40 .

[0028] (Electronic velocity modulation section) The electron velocity modulation unit 30 has a function of changing the velocity of electrons emitted from the sample. In the first embodiment, the electron velocity modulation unit 30 is disposed adjacent to the side of the capture electrode pair (capture electrodes 1 and 5) of the circulating unit 10. The electron velocity modulation unit 30 changes the electron velocity and then sends the electrons to the capture electrode pair. The electron velocity modulation unit 30 accelerates the front part of the electron bunch (the side that arrives at the circulating unit 10 faster) and decelerates the rear part of the electron bunch (the side that arrives at the circulating unit 10 slower). The faster the electron velocity, the longer it takes to circulate. Therefore, by accelerating the front part of the electron bunch and decelerating the rear part, and then circulating the electron bunch in the circulating unit 10, the time spread of the electron bunch can be reduced.

[0029] The electron velocity modulation unit 30 is, for example, an electrostatic lens. In the first embodiment, the electron velocity modulation unit 30 is an electrostatic lens made up of electrodes 31, 32, 33, 34, 35, and 36. In the first embodiment, the electrodes 31, 32, 33, 34, 35, and 36 are ring-shaped electrodes. The electrode 31 is disposed inside the electrode 32. The electrodes 31 and 32 constitute the external electrodes of the electron velocity modulation unit 30. The electrode 33 is disposed inside the electrode 34. The electrodes 33 and 34 constitute the central electrode of the electron velocity modulation unit 30. The electrode 35 is disposed inside the electrode 36. The electrodes 35 and 36 constitute the external electrodes of the electron velocity modulation unit 30. In this embodiment, the two external electrodes are, for example, grounds, and the electron bunches after orbiting can be compressed by applying a sinusoidal voltage to the central electrode. Note that the electrostatic lens is composed of two external electrodes and one central electrode. In this embodiment, three external electrodes and two central electrodes constitute two electrostatic lenses. That is, the electron velocity modulation unit 30 and the first trajectory correction unit 40 share one external electrode.

[0030] (Lunch Club) The circulating unit 10 has a function of circulating electrons. The circulating electrons are electrons emitted from a sample irradiated with an energy beam. By applying an electric field and circulating the electrons in the circulating unit 10, the flight distance of the electrons can be increased. As a result, the resolution of the electron spectrometer 300 can be improved. By increasing the number of times the electrons circulate, the resolution of the electron spectrometer 300 can be increased.

[0031] The circulating section 10 includes a plurality of electrode pairs. In the case of the electron spectrometer 300, the circulating section 10 includes an intake electrode pair consisting of an intake electrode 1 and an intake electrode 5, an electrode pair consisting of an electrode 2 and an electrode 6, an extraction electrode pair consisting of an extraction electrode 3 and an extraction electrode 7, and an electrode pair consisting of electrodes 4 and 8. The plurality of electrode pairs constitute the inner electrode 11 and the outer electrode 12. Specifically, the intake electrode 1, the electrode 2, the extraction electrode 3, and the electrode 4 constitute the inner electrode 11. The intake electrode 5, the electrode 6, the extraction electrode 7, and the electrode 8 constitute the outer electrode 12. The inner circumferential surface of the outer electrode 12 and the outer circumferential surface of the inner electrode 11 are spherical. The inner circumferential surface of the inner electrode 11 and the inner circumferential surface of the outer electrode 12 are spherical, so that electrons having different azimuth angles φ can be circulated. The space between the inner circumferential surface of the outer electrode 12 and the outer circumferential surface of the inner electrode 11 becomes the circulating path of the electrons. It is preferable that the position of the center C of the sphere on the outer circumferential surface of the inner electrode 11 and the sphere on the inner circumferential surface of the outer electrode 12 are the same.

[0032] A part of the multiple electrode pairs of the circulating section 10 is the capture electrode pair. The capture electrode 5 has an electrode intake port 16 for capturing electrons. The capture electrode pair (the capture electrode 1 and the capture electrode 5) has a function of capturing electrons emitted from the sample into the circulating section 10. The capture electrode 1 and the capture electrode 5 are ring-shaped. Being ring-shaped allows electrons having different azimuth angles φ to be captured into the circulating section 10. For example, the control section controls the voltage applied to the capture electrode pair, so that the capture electrode pair captures electrons into the circulating section 10. Specifically, when electrons that have passed through the electron velocity modulation section 30 arrive at the circulating section 10, a high-speed pulser or the like is used to instantaneously turn off the voltage applied to the capture electrode pair, thereby capturing the electrons into the circulating section 10. The time required to instantly turn off (rise time and fall time: the time interval during which the instantaneous value of the pulse reaches 10% to 90% of the peak value) is, for example, 4 ns or less.

[0033] The multiple electrode pairs of the circulating unit 10 circulate the electrons by controlling the applied voltage. The voltage control is performed, for example, by a control unit. In this embodiment, the electrons are circulated by applying a positive voltage to the intake electrode 1, the electrode 2, the extraction electrode 3, and the electrode 4, and a negative voltage to the intake electrode 5, the electrode 6, the extraction electrode 7, and the electrode 8. By changing the applied voltage, it is possible to circulate electrons having a specific energy. In other words, the energy range of the electrons to be measured can be adjusted by the applied voltage.

[0034] A part of the multiple electrode pairs of the circulating part 10 is an extraction electrode pair. The extraction electrode 7 has an electrode outlet 17 for extracting electrons. The extraction electrode pair (the extraction electrode 3 and the extraction electrode 7) has a function of extracting electrons that have circulated a specific number of times from the circulating part 10. The extraction electrode 3 and the extraction electrode 7 are ring-shaped. The ring shape allows electrons with different azimuth angles φ to be extracted from the circulating part 10. For example, the control unit controls the voltage applied to the extraction electrode pair to extract electrons from the circulating part 10. Specifically, the electrons that have circulated a specific number of times are extracted from the circulating part 10 by instantaneously turning off the voltage applied to the extraction electrode pair using a high-speed pulser or the like. The time required to instantaneously turn off the voltage (rise time and fall time: the time interval from 10% to 90% of the peak value of the pulse) is, for example, 4 ns or less. The extracted electrons enter the second trajectory correction unit 50.

[0035] The distance R between the orbit around which the electrons revolve and the center C is not particularly limited, but the greater the distance R, the higher the resolution of the electron spectrometer 300 can be.

[0036] (Second orbit correction section) In the first embodiment, the bunch compression unit 20 includes a first trajectory correction unit 40 that changes the trajectory of the electrons and a second trajectory correction unit 50 that changes the trajectory of the electrons. Since the ionization region has a predetermined size, the initial positions of the emitted electrons are different, and the plane (isochronous plane) connecting the electrons that had the same initial energy when emitted is not parallel to the surface of the detection unit 120 when they reach the detection unit 120. The first trajectory correction unit 40 and the second trajectory correction unit 50 invert the isochronous plane of the emitted electron bunch, so that the isochronous plane can be made parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. This makes it possible to reduce the time spread of the electron bunch.

[0037] The second trajectory correction unit 50 is, for example, an electrostatic lens. The second trajectory correction unit 50 is disposed on the extraction electrode pair side. In the first embodiment, the second trajectory correction unit 50 is an electrostatic lens consisting of electrodes 51, 52, 53, 54, 55, and 56. In the first embodiment, the electrodes 51, 52, 53, 54, 55, and 56 are ring-shaped electrodes. The electrode 51 is disposed inside the electrode 52. The electrodes 51 and 52 constitute the external electrodes of the second trajectory correction unit 50. The electrode 53 is disposed inside the electrode 54. The electrodes 53 and 54 constitute the central electrodes of the second trajectory correction unit 50. The electrode 55 is disposed inside the electrode 56. The electrodes 55 and 56 constitute the external electrodes of the second trajectory correction unit 50. In this embodiment, the two external electrodes are, for example, ground, and a steady voltage is applied to the central electrode. By adjusting the voltage applied to the central electrode of the first trajectory correction unit 40 and the central electrode of the second trajectory correction unit 50, the electron trajectory can be corrected so that the isochronal plane of the electrons is parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120.

[0038] (Second deflection section) The second deflection unit 70 deflects the trajectory of the electrons that have passed through the second trajectory correction unit 50 so that they enter the third deflection unit 80. The second deflection unit 70 is, for example, electrodes 71 and 72. The shapes of the electrodes 71 and 72 are not particularly limited as long as they can deflect the trajectory of the electrons so that they enter the third deflection unit 80.

[0039] (3rd deflection section) The third deflection unit 80 deflects the trajectory of the electrons that have passed through the second deflection unit 70 so that they enter the detection unit 120. The third deflection unit 80 is, for example, electrodes 81 and 82. The shapes of the electrodes 81 and 82 are not particularly limited as long as they can deflect the trajectory of the electrons so that the electrons enter the detection unit 120.

[0040] (Detection unit) The detection unit 120 detects the electrons extracted from the rotation unit 10 (electrons deflected by the third deflection unit 80). As the detection unit 120, for example, a one-dimensional detector or a two-dimensional detector may be used. A two-dimensional detector is particularly preferable. In the first embodiment, by detecting electrons having different azimuth angles φ with a two-dimensional detector, a signal intensity 500,000 times higher than that of single-channel detection can be obtained, and information on the spatial angular distribution of electrons can also be obtained at the same time.

[0041] The path along which the emitted electrons reach the detection unit 120, i.e., the inside of the electron spectrometer 300, is a vacuum. The internal pressure is 1×10 -4 The internal pressure is preferably 100 Pa or less. The lower the internal pressure, the more preferable. A known method can be used to evacuate the inside of the electron spectrometer 300, and for example, a diffusion pump, a turbo molecular pump, a titanium sublimation pump, or the like can be used to evacuate the inside of the electron spectrometer 300.

[0042] The material of each part that serves as the electron path of the electron spectrometer 300 is preferably a non-magnetic material. Examples of the non-magnetic material include AISI 310 stainless steel and 2017 aluminum. The surface of the member that serves as the electron path may be coated with colloidal graphite.

[0043] <Electron spectroscopy> Electron spectroscopy using an electron spectrometer 300 will be described. As shown in FIG. 3, ionized electrons and scattered electrons having different azimuth angles φ are emitted from a sample irradiated with an energy beam (here, incident electrons) (excitation step). The example in FIG. 3 shows an example of two electrons having the same scattering angle θ. The emitted electrons pass through an intake port 90 as an electron bunch, are deflected by a first deflection unit 60, and enter a first trajectory correction unit 40. Next, the first trajectory correction unit 40 changes the trajectory of the electrons (first trajectory correction step). After the first trajectory correction step, the electron velocity modulation unit 30 accelerates the electrons in the front part of the electron bunch as shown in FIG. 5, and decelerates the electrons in the rear part of the electron bunch (velocity modulation step). The electrons after velocity modulation are taken into the circulating unit 10 (take-in step) and make a certain number of circulating motions (circulating step). After circulating, the electrons are taken out (take-out step). The trajectories of the extracted electrons are corrected by the second trajectory correction unit 50 (second trajectory correction step). The electrons are then deflected by the second deflection unit 70 and the third deflection unit 80, and detected by the detection unit 120 (detection step).

[0044] (take-in process, circulation process, take-out process) The relationship between the electron intake, circulation, and extraction processes in the circulating section, and the circulation process and the resolution will be described. The electron intake and extraction processes in the circulating section 10 are performed by controlling the voltages of the intake electrodes 1 and 5 and the extraction electrodes 3 and 7 with a pulse voltage. In the intake process, as shown in FIG. 4, the electrons are taken in by turning off the intake electrodes 1 and 5 with a pulse voltage. The electrons taken in are circulated as electrons with a specific energy based on the voltage applied to each electrode pair. The electrons to be circulated can be adjusted according to the applied voltage. After circulating a specific number of times, the electrons are taken out by turning off the extraction electrodes 3 and 7 with a pulse voltage as shown in FIG. 4. The rise and fall times required to turn off the pulse voltage are not particularly limited, but are preferably, for example, 4 ns or less. The period T(Epass) in the circulating motion of an electron with energy Epass is shown in the following formula (1), and the period T(Epass+δE) in the circulating motion of an electron whose energy is increased by δE from the energy Epass is shown in the following formula (2). Here, π is the circular constant, R0 is the radius of the electron's orbit, m is the electron's mass, Epass is the reference energy, and δE is the energy increment. From equations (1) and (2) below, we can see that the period differs depending on the energy possessed by the electron. If there is a difference in δE in equation (3) below, it shows the difference in period after N revolutions. As shown in equation (3) below, N revolutions result in N times difference in period. In other words, by making N revolutions, the resolution can be improved by N times.

[0045]

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[0046]

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[0047]

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[0048] (Electron bunch compression by electron velocity modulation) As shown in Figure 5, in the electron velocity modulation process, the front part of the electron bunch is accelerated and the rear part is decelerated. As shown in the above formula (2), the faster the electrons are (the higher the energy), the longer the period is. Therefore, by accelerating the front part of the electron bunch and decelerating the electrons in the rear part of the electron bunch to circulate, the spread of the electron bunch can be reduced as shown in Figure 5.

[0049] (Electron bunch compression by orbit correction) FIG. 6 shows the positions of electrons emitted at the same time in each part of the electron spectrometer 300. The black circles in the upper diagram of FIG. 6 show the positions of electrons. In the first and second trajectory correction steps, as shown in FIG. 6, a predetermined voltage is applied to the central electrode of the first trajectory correction unit 40 and the central electrode of the second trajectory correction unit 50, thereby changing the trajectory of the electrons so as to invert the isochronal surface of the electrons, so that the isochronal surface of the electrons becomes parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. The voltages applied to the central electrodes of the first trajectory correction unit 40 and the second trajectory correction unit 50 can be determined, for example, by performing a simulation.

[0050] The first embodiment has been described above. In the first embodiment, a sample delivery unit is used, but a sample may be placed on a sample holder and irradiated with an energy beam. The electron spectrometer 300 does not need to include the bunch compression unit 20.

[0051] <Second embodiment> FIG. 7 is a schematic perspective view of an electron spectrometer 300A according to the second embodiment. FIG. 8 is a cross-sectional view of the electron spectrometer 300A shown in FIG. 7 along the line BB. The electron spectrometer 300A includes a rotation section 10A, a bunch compression section 20A, a first deflection section 60A, a second deflection section 70A, a third deflection section 80A, intake ports 90A and 90B, an excitation section 100, a sample delivery section 110, a detection section 120, and a control section (not shown). The bunch compression section 20A includes electron velocity modulation sections 30A and 30B, first trajectory correction sections 40A and 40B, and second trajectory correction sections 50A and 50B. Each section is connected so that the electron path can maintain a vacuum state. Each section will be described below. In the second embodiment, the orbiting section 10A, the bunch compression section 20A, the first deflection section 60A, the second deflection sections 70A and 70B, the third deflection section 80A, the intake ports 90A and 90B, the excitation section 100, the sample delivery section 110, and the detection section 120 are housed inside a container 500A.

[0052] (Intake port) Electrons emitted from the sample irradiated with the energy beam pass through the intake ports 90A and 90B and enter the first deflection unit 60A. The angle X (scattering angle if the energy beam is an electron beam) between the traveling direction F of the energy beam (here, the electron beam) and the direction connecting the center of the area E irradiated with the energy beam on the sample and the intake port 90A is not particularly limited, but is, for example, 45 degrees. As with the intake port 90A, the angle is also not particularly limited in the case of the intake port 90B, and is, for example, 45 degrees. In the case of 45 degrees, electrons with a scattering angle of 45 degrees enter the circulation unit 10A. The intake ports 90A and 90B are holes opened in a direction that forms an angle X with the traveling direction F.

[0053] (1st deflection section) The first deflection unit 60A deflects the trajectory of the electrons that have passed through the intake port 90A so that the electrons enter the first trajectory correction units 40A and 40B. The first deflection unit 60A is composed of, for example, electrodes 61A, 62A, and 62B. For example, an electric field is applied between the electrode 61A and the electrode 62A, and between the electrode 61A and the electrode 62B. The shapes of the electrodes 61A, 62A, and 62B are not particularly limited as long as they can deflect the trajectory of the electrons so that the electrons enter the first trajectory correction unit 40.

[0054] (1st trajectory correction section) The first trajectory correction units 40A and 40B change the trajectory of the electrons and converge the time to the detection unit 120 for each electron energy. The first trajectory correction units 40A and 40B are arranged on the side of the capture electrode pair. In addition, the first trajectory correction unit 40A and the second trajectory correction unit 50A invert the isochronal plane of the emitted electron bunch, so that the isochronal plane can be parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. Similarly, the first trajectory correction unit 40B and the second trajectory correction unit 50B invert the isochronal plane of the emitted electron bunch, so that the isochronal plane can be parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. This makes it possible to reduce the time spread of the electron bunch.

[0055] The first trajectory correction unit 40A is, for example, an electrostatic lens. In the second embodiment, the first trajectory correction unit 40A is composed of electrodes 35A, 41A, and 43A. Similarly, the first trajectory correction unit 40B is composed of electrodes 35B, 41B, and 43B. In the second embodiment, the electrodes 35A, 35B, 41A, 41B, 43A, and 43B are ring-shaped electrodes. The electrodes 35A and 43A constitute the outer electrodes of the first trajectory correction unit 40A. The electrode 41A constitutes the central electrode of the first trajectory correction unit 40A. The electrodes 35A, 41A, and 43A constitute one electrostatic lens. Similarly, the electrodes 35B, 41B, and 43B constitute one electrostatic lens. In the second embodiment, the two outer electrodes (electrodes 35A and 43A) of the first trajectory correction unit 40A are, for example, grounds. A steady voltage is applied to one central electrode (41A) of the first trajectory correction unit 40A. The first trajectory correction unit 40A converges the electrons that have passed through the first deflection unit 60A and entered the first trajectory correction unit 40A. The first trajectory correction unit 40B converges the electrons that have passed through the first deflection unit 60A and entered the first trajectory correction unit 40B.

[0056] (Electronic velocity modulation section) The electron velocity modulation units 30A and 30B have a function of changing the velocity of electrons emitted from the sample. In the second embodiment, the electron velocity modulation unit 30A is disposed adjacent to the pair of capture electrodes (capture electrodes 1A and 5A) of the circulating unit 10A. The electron velocity modulation unit 30B is disposed adjacent to the pair of capture electrodes (capture electrodes 1B and 5B) of the circulating unit 10A. The electron velocity modulation unit 30A changes the electron velocity and then sends the electrons to the capture electrodes 1A and 5A. The electron velocity modulation unit 30B changes the electron velocity and then sends the electrons to the capture electrodes 1B and 5B. The electron velocity modulation unit 30A and the electron velocity modulation unit 30B accelerate the front part of the electron bunch (the side that arrives at the circulating unit 10A quickly) and decelerate the rear part of the electron bunch (the side that arrives at the circulating unit 10A slowly). The faster the electron velocity, the longer it takes to circulate. Therefore, by accelerating the front part of the electron bunch and decelerating the rear part of the electron bunch, and then circulating the electron bunch in the circulating part 10A, the time spread of the electron bunch can be reduced.

[0057] The electron velocity modulation units 30A and 30B are, for example, electrostatic lenses. In the second embodiment, the electron velocity modulation unit 30A is an electrostatic lens made up of electrodes 31A, 33A, and 35A. The electron velocity modulation unit 30B is an electrostatic lens made up of electrodes 31B, 33B, and 35B. In the second embodiment, 31A, 31B, 33A, 33B, 35A, and 35B are ring-shaped electrodes. The electrode 31A and the electrode 35A constitute the external electrodes of the electron velocity modulation unit 30A. The electrode 33A constitutes the central electrode of the electron velocity modulation unit 30A. In the second embodiment, the two external electrodes (electrodes 31A and 35A) of the electron velocity modulation unit 30A are, for example, grounds. By applying a sinusoidal voltage to one central electrode (electrode) 33A, the electron bunch after circulating can be compressed. Like the electron velocity modulation unit 30A, the electron velocity modulation unit 30B also compresses the electron bunch after traveling by applying a sinusoidal voltage to the central electrode 33B. The electron velocity modulation unit 30A and the first trajectory correction unit 40A share the electrode 35A. Similarly, the electron velocity modulation unit 30B and the first trajectory correction unit 40B share the electrode 35B.

[0058] (Lunch Club) The circulating unit 10A has the function of circulating electrons. The circulating electrons are electrons emitted from a sample irradiated with an energy beam. By applying an electric field and circulating the electrons in the circulating unit 10A, the flight distance of the electrons can be increased. As a result, the resolution of the electron spectrometer 300A can be improved. By increasing the number of times the electrons circulate, the resolution of the electron spectrometer 300A can be increased.

[0059] The orbiting section 10A includes a plurality of electrode pairs. In the case of the electron spectrometer 300A, the electron spectrometer includes an import electrode pair consisting of the import electrode 1A and the import electrode 5A, an import electrode pair consisting of the import electrode 1B and the import electrode 5B, an electrode pair consisting of the electrode 2A and the electrode 6A, an extracting electrode pair consisting of the extracting electrode 3A and the extracting electrode 7A, an extracting electrode pair consisting of the extracting electrode 3B and the extracting electrode 7B, and an electrode pair consisting of the electrodes 4A and 8A. The plurality of electrode pairs constitute the inner electrode 11A and the outer electrode 12A. Specifically, the import electrode 1A, the import electrode 1B, the electrode 2A, the extracting electrode 3A, the extracting electrode 3B, and the electrode 4A constitute the inner electrode 11A. The import electrode 5A, the import electrode 5B, the electrode 6A, the extracting electrode 7A, the extracting electrode 7B, and the electrode 8A constitute the outer electrode 12A. The inner circumferential surface of the outer electrode 12A and the outer circumferential surface of the inner electrode 11A are cylindrical. The outer peripheral surface of the inner electrode 11A and the inner peripheral surface of the outer electrode 12A are cylindrical, so that the electrons can circulate. The space between the inner peripheral surface of the outer electrode 12A and the outer peripheral surface of the inner electrode 11A becomes the electron circulation path. It is preferable that the central axis C1 of the cylinder of the outer peripheral surface of the inner electrode 11A and the cylinder of the inner peripheral surface of the outer electrode 12 are the same. Note that the inner electrode 11A and the outer electrode 12A are connected to the bottom members 15A and 15B so that the electric field of the circulation path is not influenced by anything.

[0060] Some of the electrode pairs in the orbiting section 10A are the capture electrode pairs. In the case of the second embodiment, there are two capture electrode pairs. The capture electrode pair consisting of the capture electrode 1A and the capture electrode 5A and the capture electrode pair consisting of the capture electrode 1B and the capture electrode 5B have the function of capturing electrons emitted from the sample into the orbiting section 10A. The capture electrodes 5A and 5B have electrode intake ports 16A and 16B for capturing electrons. For example, the control unit controls the voltage applied to each capture electrode pair, so that each capture electrode pair captures electrons into the orbiting section 10A. Specifically, when electrons that have passed through the electron velocity modulation unit 30A arrive at the orbiting section 10A, a high-speed pulser or the like is used to instantly turn off the voltage applied to each capture electrode pair, thereby capturing the electrons into the orbiting section 10A. The time required to turn off instantaneously (rise time and fall time: the time interval for the instantaneous value of the pulse to reach 10% to 90% of the peak value) is, for example, 4 ns or less.

[0061] The multiple electrode pairs of the circulating unit 10A circulate the electrons by controlling the applied voltage. The voltage control is performed, for example, by a control unit. In this embodiment, the electrons are circulated by applying a positive voltage to the intake electrode 1A, the intake electrode 1B, the electrode 2A, the extraction electrode 3A, the extraction electrode 3B, and the electrode 4A, and applying a negative voltage to the intake electrode 5A, the intake electrode 5B, the electrode 6A, the extraction electrode 7A, the extraction electrode 7B, and the electrode 8A. By changing the applied voltage, electrons having a specific energy can be circulated. That is, the energy range of the electrons to be measured can be adjusted by the applied voltage.

[0062] Some of the electrode pairs of the circulation section 10A are extraction electrode pairs. In the second embodiment, there are two extraction electrode pairs. The extraction electrode pair consisting of the extraction electrode 3A and the extraction electrode 7A and the extraction electrode pair consisting of the extraction electrode 3B and the extraction electrode 7B have the function of extracting electrons that have circulated a specific number of times from the circulation section 10A. The extraction electrodes 7A and 7B are provided with electrode extraction ports 17A and 17B for extracting electrons. For example, the control unit controls the voltage applied to each extraction electrode pair, so that the electrons can be extracted from the circulation section 10A. Specifically, the electrons that have circulated a specific number of times are extracted from the circulation section 10A by instantaneously turning off the voltage applied to each extraction electrode pair using a high-speed pulser or the like. The time required to instantaneously turn off (rise time and fall time: the time interval for the instantaneous value of the pulse to reach 10% to 90% of the peak value) is, for example, 4 ns or less. Electrons extracted from the extraction electrodes 3A and 7A enter the second trajectory correction unit 50 A. Electrons extracted from the extraction electrodes 3B and 7B enter the second trajectory correction unit 50B.

[0063] The distance R1 connecting the orbit of the electrons and the central axis C1 is not particularly limited, but the greater the distance R1, the higher the resolution of the electron spectrometer 300A can be.

[0064] (Second orbit correction section) In the second embodiment, the bunch compression unit 20A includes first trajectory correction units 40A and 40B for changing the trajectory of electrons and second trajectory correction units 50A and 50B for changing the trajectory of electrons. Since the ionization region has a predetermined size, the initial positions of the emitted electrons are different, and the plane (isochronic plane) connecting the electrons that had the same initial energy at the time of emission is not parallel to the surface of the detection unit 120 when they reach the detection unit 120. The first trajectory correction unit 40A and the second trajectory correction unit 50A invert the isochronic plane of the emitted electron bunch, so that the isochronic plane of the electrons can be parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. The first trajectory correction unit 40B and the second trajectory correction unit 50B can also make the isochronic plane of the electrons parallel to the surface of the detection unit 120. This makes it possible to reduce the time spread of the electron bunch.

[0065] The second trajectory correction units 50A and 50B are, for example, electrostatic lenses. The second trajectory correction units 50A and 50B are arranged on the extraction electrode pair side. In the second embodiment, the second trajectory correction unit 50A is an electrostatic lens consisting of electrodes 51A, 53A, and 55A. The second trajectory correction unit 50B is an electrostatic lens consisting of electrodes 51B, 53B, and 55B. In the second embodiment, the electrodes 51A, 51B, 53A, 53B, 55A, and 55B are ring-shaped electrodes. The electrodes 51A and 55A constitute the outer electrodes of the second trajectory correction unit 50A. The electrode 53A constitutes the central electrode of the second trajectory correction unit 50A. In the second embodiment, the two outer electrodes (electrodes 51A and 55A) of the second trajectory correction unit 50A are, for example, grounds. A steady voltage is applied to the central electrode (53A) of the second trajectory correction unit 50A. By adjusting the voltages applied to the central electrodes of the first trajectory correction unit 40A and the second trajectory correction unit 50A, the electron trajectory can be corrected so that the isochronal plane of the electrons is parallel to the surface of the detection unit 120 when the electrons reach the detection unit 120. The second trajectory correction unit 50B is similar to the second trajectory correction unit 50A. The electrons corrected by the second trajectory correction unit 50A enter the second deflection unit 70A. The electrons corrected by the second trajectory correction unit 50B enter the second deflection unit 70B.

[0066] (Second deflection section) The second deflection unit 70A deflects the trajectory of the electrons that have passed through the second trajectory correction unit 50A so that they enter the third deflection unit 80A. The second deflection unit 70A is, for example, electrodes 71A and 72A. Similarly, the second deflection unit 70B deflects the trajectory of the electrons that have passed through the second trajectory correction unit 50B so that they enter the third deflection unit 80A. The second deflection unit 70B is, for example, electrodes 71B and 72B. For example, a voltage is applied between the electrodes 71A and 72A and between the electrodes 71B and 72B. The shapes of the electrodes 71A, 71B, 72A, and 72B are not particularly limited as long as they can deflect the trajectory of the electrons so that they enter the third deflection unit 80A.

[0067] (3rd deflection section) The third deflection unit 80A deflects the trajectory of the electrons that have passed through the second deflection units 70A and 70B so that they enter the detection unit 120. The third deflection unit 80A is, for example, electrodes 81A, 82A, and 82B. A voltage is applied, for example, between the electrode 81A and the electrode 82A, and between the electrode 81A and the electrode 82B. The shapes of the electrodes 81A, 82A, and 82B are not particularly limited as long as they can deflect the trajectory of the electrons so that the electrons enter the detection unit 120.

[0068] The path along which the emitted electrons reach the detection unit 120, i.e., the inside of the electron spectrometer 300, is a vacuum. The internal pressure is 1×10 -4 The internal pressure is preferably equal to or less than 1 Pa. The lower the internal pressure, the more preferable. A known method can be used to evacuate the inside of the electron spectrometer 300, and for example, a diffusion pump, a turbo molecular pump, a titanium sublimation pump, or the like can be used to evacuate the inside of the electron spectrometer 300.

[0069] The material of each part of the electron spectrometer 300A that serves as the electron path is preferably a non-magnetic material. Examples of non-magnetic materials include AISI 310 stainless steel and 2017 aluminum. The surface of the member that serves as the electron path may be coated with colloidal graphite.

[0070] <Electron spectroscopy> The electron spectroscopy using the electron spectrometer 300 according to the second embodiment is similar to that of the first embodiment, except that the electrons that can be measured are limited to those having an azimuth angle φ within a certain range.

[0071] The above describes the second embodiment. In the second embodiment, the bunch compression section 20A includes two each of the electron velocity modulation sections 30, the first trajectory correction section 40, and the second trajectory correction section 50, but may include only one each.

[0072] The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention. EXAMPLES

[0073] Next, an embodiment of the present invention will be described, but the conditions in the embodiment are merely an example of conditions adopted to confirm the feasibility and effects of the present invention, and the present invention is not limited to this example of conditions. Various conditions can be adopted in the present invention as long as they do not deviate from the gist of the present invention and achieve the object of the present invention.

[0074] (Effects of bunch compression and number of electron orbits) Figure 9 shows the results of a simulation of the relationship between electron bunch compression and the number of electron orbits, and the distribution of electrons, based on the electron spectrometer configured as shown in Figures 1 and 2. This shows the movement of electron bunches (in 1 eV increments) of 595 eV to 605 eV, which can occur when the pulse width of the electron beam, an energy beam, is 5 ns, after they are taken into the orbital section with a pulse voltage with rise and fall times of 4 ns. The left figure shows the case with bunch compression, and the right figure shows the case without it. As shown in Figure 9, it was found that electron bunch compression can separate electrons of each energy by their respective energies. It was also found that the more the number of orbits increases, the better the separation of electrons of different energies becomes.

[0075] (Compared to conventional electron spectrometers) FIG. 10 shows an example of a simulation result of the electron energy and the number of detected electrons in a conventional electron spectrometer (an electron spectrometer without a rotation section and a bunch compression section) and the electron spectrometer according to this embodiment (the electron spectrometer of the first embodiment shown in FIG. 1 and FIG. 2). This was performed under the conditions of a detector time resolution of 100 ps, ​​an electron beam pulse width of 5 ns, and a number of revolutions in the rotation section 10 of 15. The horizontal axis of FIG. 10 indicates the energy (eV) of the electron, and the vertical axis indicates the number of detected electrons. As shown in FIG. 10, the electron spectrometer according to this embodiment was able to resolve each energy. Comparing the resolution at 600 eV, the conventional one was 1.78 eV, while the resolution of the first embodiment was 0.0668 eV, which was 27 times higher than the conventional one.

[0076] As described above, the electron spectrometer of the present disclosure has a high resolution for high-speed electrons, and therefore can be used as an electron momentum spectrometer. In addition, because of the high resolution, the shape of the wave function can be observed in momentum space. Conventional state functions determined by relying on the integral value over the entire energy space being a minimum were not sufficient for describing a system at a distance that determines the interaction between molecules. Therefore, the state function calculated by the conventional method could not adequately search for a molecular recognition mechanism model or the like. By using the electron spectrometer of the present disclosure, it is possible to obtain a more accurate state function. Therefore, the electron spectrometer of the present disclosure is useful for searching for a new molecular recognition mechanism model that requires a precise state function. [Explanation of symbols]

[0077] 1, 5: intake electrode, 3, 7: extraction electrode, 2, 4, 6, 8: electrode, 10: orbiting section, 20: bunch compression section, 30: electron velocity modulation section, 40: first trajectory correction section, 50: second trajectory correction section, 300: electron spectrometer

Claims

1. an excitation unit that irradiates an energy beam onto a sample; a circulating unit that circulates electrons emitted from the sample irradiated with the energy beam; a detection unit that detects the electrons extracted from the circulating unit; Equipped with The circulating portion includes a plurality of electrode pairs, The plurality of electrode pairs circulates the electrons by controlling an applied voltage; some of the plurality of electrode pairs are capture electrode pairs that capture the electrons into the orbiting portion by controlling an applied voltage; some of the plurality of electrode pairs are extraction electrode pairs that extract the electrons from the circulating portion by controlling an applied voltage; a bunch compression unit that reduces the time spread of an electron bunch, which is a mass of electrons, by changing at least one of the velocity and trajectory of the electrons; The bunch compression unit a first trajectory correction unit that changes the trajectory of the electrons and is disposed on the capture electrode pair side; a second trajectory correction unit that changes the trajectory of the electrons and is disposed on the extraction electrode pair side; Equipped with The first trajectory correction unit and the second trajectory correction unit reduce the time spread of the electron bunches.

2. The electron spectrometer according to claim 1 , wherein the first trajectory correction unit and the second trajectory correction unit are electrostatic lenses.

3. The plurality of electrode pairs constitute an outer electrode and an inner electrode, an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode are spherical; 3. The electron spectrometer according to claim 1, wherein a space between an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode serves as a circular path for the electrons.

4. The plurality of electrode pairs constitute an outer electrode and an inner electrode, an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode are cylindrical; 4. The electron spectrometer according to claim 1, wherein a space between an inner circumferential surface of the outer electrode and an outer circumferential surface of the inner electrode serves as a circular path for the electrons.

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