Clean room system and air circulation method

Abstract

To reduce a used amount of energy in a clean room.SOLUTION: A clean room system installed in a clean room comprises: a ventilation unit that ventilates air into the clean room; a temperature measurement unit that measures the temperature inside the clean room; a cleanliness measurement unit that measures the cleanliness in the clean room; a determination unit that determines whether or not to ventilate the air, or determines a ventilation amount that is an amount of the air, based on the temperature and the cleanliness; and a ventilation control unit that controls the ventilation unit based on the determination result by the determination unit.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The present invention relates to a clean room system and an air circulation method. [Background technology]

[0002] Conventionally, there has been known a method for forming a low-temperature and highly clean area inside a clean room.

[0003] For example, a damper for adjusting the air volume is provided in a duct used to blow air from an air conditioner to a space to be air-conditioned. In this way, a method for adjusting the air volume to an appropriate level is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2012-184900 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in conventional methods, the volume of air blown from an air conditioner or the like is often constant. In other words, the volume of air is constant regardless of whether or not there is a need to blow much air. This can result in an excessive volume of air in conditions where little air is needed, resulting in a waste of energy.

[0006] The present invention has been made in consideration of the above problems, and has an object to reduce the amount of energy used in clean rooms. [Means for solving the problem]

[0007] The clean room system according to each embodiment of the present invention (for example, the clean room system 10 shown in FIG. 1) is A blower unit (e.g., a first air conditioner 11 and a second air conditioner 12 shown in FIG. 1 ) that blows air into the clean room; A temperature measuring unit (such as the temperature sensor SER1 shown in FIG. 1) that measures the temperature inside the clean room; A cleanliness measurement unit (e.g., a particle counter SER2 shown in FIG. 1) that measures the cleanliness in the clean room; A determination unit (e.g., PLC 100 shown in FIG. 1 ) that determines whether to blow the air or the amount of the air to be blown based on the temperature and the cleanliness; an air blowing control unit (e.g., PLC 100 shown in FIG. 1 ) that controls the air blowing unit based on a result of the determination by the determination unit; Includes.

[0008] With the above-mentioned configuration, the clean room system can grasp the temperature, cleanliness, etc. Therefore, the clean room system can determine whether or not to blow air with the blower unit, or the volume of air to be blown by the blower unit, taking into account both the temperature and cleanliness. When such a determination is made to switch between blowing air or not, or when the volume of air is appropriately changed, electricity used for blowing air is cut off as little as possible, compared to when air is constantly being blown. Therefore, the amount of energy used in the clean room can be reduced.

[0009] In addition, the temperature measuring unit Measure the temperature at multiple points (for example, as shown in FIG. 4 ), Among the temperatures, the highest temperature (e.g., the highest temperature SR11, etc.) and the lowest temperature (e.g., the lowest temperature SR12, etc.) are extracted, The determination unit is A first airflow rate (e.g., the first determination result J1 shown in FIG. 6 ) determined based on a temperature difference (e.g., the temperature difference SR1) between the maximum temperature and the minimum temperature, and a second airflow rate (e.g., the second determination result J2 shown in FIG. 6 ) determined based on the cleanliness, A determination is made to adopt the larger air volume of the first air volume and the second air volume (for example, a determination result J3 shown in FIG. 6).

[0010] With the above configuration, the clean room system can specify the appropriate air volume to satisfy the environmental conditions of temperature and cleanliness. By adopting the largest air volume among them, the air volume can be set according to the environmental conditions that require the most air volume to satisfy the environmental conditions of temperature and cleanliness.

[0011] The clean room system further includes a humidity measuring unit (e.g., a humidity sensor SER3) that measures humidity in the clean room, The determination unit is It is desirable to determine the volume of the air based on the temperature, the cleanliness and the humidity.

[0012] With the above configuration, the clean room system can grasp three or more environmental conditions including temperature, cleanliness, and humidity. Temperature, cleanliness, humidity, etc. are often the subject of standards, etc. Therefore, if the temperature, cleanliness, humidity, etc. can be grasped, the inside of the clean room can be managed to satisfy the environmental conditions stipulated by the standards, etc.

[0013] In addition, a clean room system (such as the clean room system shown in FIG. 1) installed in a clean room is A blower unit (e.g., a first air conditioner 11 and a second air conditioner 12 shown in FIG. 1 ) that blows air into the clean room; A humidity measuring unit (e.g., a humidity sensor SER3, etc.) that measures the humidity in the clean room; A cleanliness measurement unit (e.g., a particle counter SER2 shown in FIG. 1) that measures the cleanliness in the clean room; A determination unit (e.g., PLC 100 shown in FIG. 1 ) that determines whether to blow the air or the amount of the air to be blown based on the humidity and the cleanliness; an air blowing control unit (e.g., PLC 100 shown in FIG. 1 ) that controls the air blowing unit based on a result of the determination by the determination unit; It is preferable that the configuration includes the following.

[0014] With the above-described configuration, the clean room system can grasp environmental conditions including at least cleanliness and humidity. Cleanliness and humidity are often the subject of standards, etc. Therefore, if the cleanliness and humidity can be grasped, the inside of the clean room can be managed to satisfy the environmental conditions stipulated by the standards, etc.

[0015] The humidity measuring unit includes: Measure the humidity at a plurality of locations; Among the humidities, a maximum humidity that is the highest humidity (for example, a maximum humidity SR31 shown in FIG. 9 ) and a minimum humidity that is the lowest humidity among the humidities (for example, a minimum humidity SR32 shown in FIG. 9 ) are extracted, A third airflow rate (e.g., the third determination result J4 shown in FIG. 9 ) determined based on a humidity difference between the maximum humidity and the minimum humidity (e.g., the humidity difference SR3 shown in FIG. 9 ) and a second airflow rate (e.g., the second determination result J2 shown in FIG. 9 ) determined based on the cleanliness, It is desirable to determine to adopt the larger air volume out of the third air volume and the second air volume.

[0016] With the above configuration, the clean room system can specify the appropriate air volume to satisfy the environmental conditions of humidity and cleanliness. By adopting the largest air volume among them, the air volume can be set according to the environmental conditions that require the most air volume to satisfy the environmental conditions of humidity and cleanliness.

[0017] In addition, the blower unit includes: It is desirable to blow air into the clean room so that it contains a swirling component that rotates in the blowing direction (for example, from right to left in Figures 2 and 3, which is the x-axis direction) (for example, when blowing air as shown in Figure 2 or 3). When a swirling component is imparted by such a configuration, the amount of air attracted (attraction ratio) increases. As a result, a large amount of air can be blown, and the air can be blown efficiently.

[0018] The air conditioner further includes an adjustment unit (e.g., the PLC 100, the TIC 32, and the cold water valve 33 shown in FIG. 11 ) that adjusts the temperature of the air with water based on the result of the determination by the determination unit, It is desirable that the blower blows the air conditioned by the conditioning unit.

[0019] With the above-described configuration, the clean room system can adjust the temperature of the air blown by the blower section by water cooling or the like.

[0020] In this way, if the temperature of the air blown by the blower can be adjusted with water based on the determination results of temperature, humidity, etc., the clean room system can adjust the temperature of the air blown by the blower without laying refrigerant piping as in air cooling. Furthermore, compared to air cooling, adjustment using water, etc. can reduce the risk of greenhouse gas leakage.

[0021] The clean room system further comprises dividing the clean room into areas, The determination unit is Determining for each of the areas, The air blowing control unit is It is desirable to control each area (for example, by dividing the area into an 11th area E11, a 12th area E12, a 13th area E13, a 14th area E14, a 21st area E21, a 22nd area E22, a 23rd area E23, and a 24th area E24, etc., as shown in FIG. 13, etc.).

[0022] With the above-mentioned configuration, the clean room system can measure, determine, and control the environmental conditions for each area. When the areas are separated, even if the environmental conditions differ from area to area, it is possible to blow air appropriate for each area.

[0023] The blower unit has a filter (for example, a filter FR shown in FIG. 15 ), a differential pressure measuring unit (e.g., a differential pressure gauge SER24 shown in FIG. 15 ) that measures the pressure difference (e.g., the pressure difference SRP shown in FIG. 15 ) between a first pressure (e.g., the first pressure P1 shown in FIG. 15 ) of the first air blown to the filter by the blower unit and a second pressure (e.g., the second pressure P2 shown in FIG. 15 ) of the second air blown from the filter into the room of the clean room; a wind speed measuring unit (e.g., the wind speed meter SER22 shown in FIG. 15 ) that measures the wind speed of the first air (e.g., the wind speed SRV shown in FIG. 15 ); Further comprising: It is desirable to determine (for example, as shown in FIG. 16) or predict (for example, as shown in FIG. 17) the life of the filter based on the air pressure difference and the wind speed.

[0024] Also, a recorded value (e.g., the recorded value CRB shown in FIG. 16 or FIG. 17) obtained by dividing the square root of the air pressure difference by the wind speed is recorded, It is desirable to determine that the filter has reached the end of its life when the recorded value is equal to or greater than a threshold value (e.g., as shown in FIG. 16), or to predict that the filter has reached the end of its life when a predicted point based on the recorded value is equal to or greater than a threshold value (e.g., as shown in FIG. 17).

[0025] As described above, a configuration that determines or predicts the life of a filter can prevent replacing a filter that has a sufficient remaining life, compared to periodic replacement of the filter. Also, compared to a configuration that monitors a differential pressure gauge to determine the life of the filter, it can reduce the amount of manpower required. In this way, it is possible to reduce costs due to unnecessary replacement and reduce the number of people required to monitor the filter.

[0026] Furthermore, with the above-described configuration, it becomes clear whether or not it is time to replace the device, making it possible to achieve so-called "visualization."

[0027] An air circulation method performed by a clean room system including an air blowing unit that blows air into a clean room and is installed in the clean room, comprising the steps of: A temperature measurement procedure (e.g., step S1 shown in FIG. 5) in which the clean room system measures the temperature inside the clean room; A clean room system includes a cleanliness measurement procedure (e.g., step S2 shown in FIG. 5) for measuring the cleanliness of the inside of the clean room; A determination procedure (e.g., steps S3 and S4 shown in FIG. 5 ) in which the clean room system determines whether to blow the air or the amount of the air to be blown based on the temperature and the cleanliness; The clean room system includes a blowing control procedure (e.g., step S5 shown in FIG. 5) for controlling the blowing unit based on a result of the determination procedure. Includes.

[0028] With the above-mentioned configuration, the clean room system can grasp the temperature, cleanliness, etc. Therefore, the clean room system can determine whether or not to blow air with the blower unit, or the volume of air to be blown by the blower unit, taking into account both the temperature and cleanliness. By switching between blowing and not blowing air, or by changing the volume of air appropriately based on such a determination, it is possible to reduce the electricity used for blowing air, compared to when air is always blown. Therefore, it is possible to reduce the amount of energy used in the clean room. Effect of the Invention

[0029] According to each embodiment of the present invention, it is possible to reduce the amount of energy used in a clean room. [Brief description of the drawings]

[0030] [Figure 1] 1 is a cross-sectional view showing an example of the overall configuration of a clean room system in a first embodiment. [Diagram 2] 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a counterclockwise swirling component to the air being blown when viewed from inside the room. FIG. [Diagram 3] 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a clockwise swirling component to the air being blown when viewed from inside the room. FIG. [Figure 4] FIG. 13 is a diagram showing an example of measurement results of temperature in a clean room. [Diagram 5] 1 is a flowchart showing a first example of an air circulation method in a clean room system. [Figure 6] FIG. 1 is a diagram showing a first example of an air circulation method in a clean room system. [Figure 7] FIG. 2 is a functional block diagram showing an example of a functional configuration of the clean room system in the first embodiment. [Figure 8] 10 is a flowchart showing a second example of an air circulation method in a clean room system. [Figure 9]FIG. 11 is a diagram showing a second example of an air circulation method in a clean room system. [Figure 10] FIG. 11 is a functional block diagram showing an example of a functional configuration of a clean room system in a second embodiment. [Figure 11] FIG. 11 is a cross-sectional view showing an example of the overall configuration of a clean room system in a second embodiment. [Figure 12] 13 is a flowchart showing a third example of an air circulation method in a clean room system. [Figure 13] FIG. 13 is a diagram showing an example in which judgment and control are performed by dividing the area into areas. [Figure 14] FIG. 13 is a diagram showing a modified example of an area. [Figure 15] FIG. 4 is a diagram showing an example of the configuration of an air blower having a filter. [Figure 16] FIG. 13 is a diagram showing an example of determining the life of a filter. [Figure 17] FIG. 13 is a diagram showing an example of a prediction of a filter life. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] Hereinafter, details of each embodiment will be described with reference to the accompanying drawings. In the description of each embodiment and the drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description will be omitted.

[0032] First Embodiment <Overall configuration example> 1 is a cross-sectional view showing an example of the overall configuration of a clean room system in a first embodiment. A clean room system 10 as shown in the figure will be described below as an example. In the following description, devices and the like necessary for explaining the embodiment will be illustrated.

[0033] As shown in the figure, in this example, two manufacturing devices MC are arranged in a clean room. Products such as semiconductors are manufactured by the manufacturing devices MC. An example of the number and arrangement of manufacturing devices MC as shown in the figure will be described below.

[0034] In the following, the x-axis, which is the horizontal direction of the diagram, is the width direction of the clean room. In the example shown below, the air conditioner blows air in the x-axis direction. Meanwhile, the z-axis, which is the vertical direction of the diagram, is the height direction of the clean room. In other words, the z-axis direction is the so-called direction of gravity. Furthermore, the depth direction is the y-axis.

[0035] <Example of a blower section> As shown in the figure, the clean room system 10 has an air conditioner that blows air into the clean room. For example, as shown in the figure, an air conditioner (an air conditioner installed at the left end of the clean room in the figure. Hereinafter referred to as the "first air conditioner 11") is installed on one wall (for example, the wall at the left end in the figure. Hereinafter referred to as the "first wall"). Then, an air conditioner (an air conditioner installed at the right end of the clean room in the figure. Hereinafter referred to as the "second air conditioner 12") is installed separately from the first air conditioner 11 on a wall facing the first wall (for example, the wall at the right end in the figure. Hereinafter referred to as the "second wall"). Below, an example in which two air conditioners, the first air conditioner 11 and the second air conditioner 12, are installed as shown in the figure will be described.

[0036] The first air conditioner 11 and the second air conditioner 12 preferably have the following configuration, for example.

[0037] FIG. 2 is a front view showing a configuration example of an air supply port to which fins are attached so as to give a counterclockwise swirling component to the air being blown as viewed from inside the room.

[0038] FIG. 3 is a front view showing a configuration example of an air supply port in which fins are attached so as to give a clockwise swirling component to the air being blown as viewed from inside the room.

[0039] A number of fins 20 are installed at the air intake port 21 on the front side of the air conditioner. The fins 20 send air by imparting a rotating component (hereinafter referred to as "swirling component") to the air sent into the clean room. Note that in Figures 2 and 3, the direction from right to left is the air sending direction, i.e., the direction toward the inside of the clean room.

[0040] The fins 20 are attached, for example, as shown in the figures, at equal intervals and radially in the rotational direction around the center of the central portion of the air intake port 21. Also, each fin 20 is arranged so as to be inclined with respect to the central axis 22. Note that Figs. 2 and 3 show an example in which each fin 20 has an opposite inclination angle with respect to the central axis 22.

[0041] In this way, when the fins 20 are arranged so as to be inclined with respect to the central axis 22 and the fins 20 are arranged radially, the air can be made to flow along the fins 20 when it is blown, that is, when it passes through the air intake port 21. This allows the air conditioner to blow air into the clean room with a swirling component.

[0042] The air conditioner has a plurality of configurations, for example, as shown in the figure. In this manner, the temperature, cleanliness, etc. of the controlled area EC are controlled by sending air to the controlled area EC. An example in which the temperature is the object of control will be described below.

[0043] If the air contains a swirling component when it is sent in, the swirling components are likely to interfere with each other. Specifically, by making the swirling components of the air sent out from adjacent air inlets in the same or opposite directions, the swirling components can interact with each other to enhance each other or to cancel each other out.

[0044] Furthermore, when there is a swirling component as shown in the figure, an induction effect occurs. In other words, when a swirling component is included, a flow in which the surrounding air is drawn in, a so-called induced airflow, is likely to occur. In this way, when a swirling component is given, the amount of induction of the induced air (induction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0045] <About clean rooms> A clean room is a space having an area where environmental conditions such as temperature and cleanliness are controlled. For example, the environmental conditions are defined by standards such as ISO (International Organization for Standardization) 14644-1 or the United States Federal Air Cleanliness Standard 209E.

[0046] Specifically, in the case of "Class 6" in ISO 14644-1, the temperature conditions are set to be within the range of "23°C ± 5°C". Furthermore, in the case of "Class 6" in ISO 14644-1, the cleanliness is set to be 1.0 x 10 particles with a particle size of 0.1 micrometers (μm) or more indoors. 6 Pieces / cubic meter (pieces / m 3 ) conditions are set so that the air cleanliness is below.

[0047] In this way, the clean room has a space that is controlled by an air conditioner or the like so that the controlled area EC meets predetermined conditions.

[0048] <PLC(Programmable Logic Controller)について> 1, the PLC 100 is an example of a control device that controls devices such as an air conditioner and an arithmetic device that performs processes such as judgment. The PLC 100 also acquires data from installed sensors via a network or a cable.

[0049] For example, the PLC 100 is an information processing device having electronic circuits and the like.

[0050] <Example of temperature measurement part> For example, a temperature sensor SER1 is installed in a clean room as shown in Fig. 1. The temperature sensor SER1 is a sensor that measures the temperature at the location where the sensor is installed or the surrounding area.

[0051] For example, by installing the temperature sensor SER1 at multiple locations in a clean room, the PLC 100 can obtain the following measurement results.

[0052] 4 is a diagram showing an example of the measurement result of the temperature in a clean room. The example shown in the figure is an example in which temperature sensors are installed at 19 locations in the clean room.

[0053] In the illustrated example, the highest temperature among the measurement results at 19 locations (hereinafter referred to as "maximum temperature SR11") is "25.35° C."

[0054] Similarly, in the illustrated example, the lowest temperature among the measurement results at 19 locations (hereinafter referred to as "lowest temperature SR12") is "22.90° C."

[0055] Then, the PLC 100 calculates a temperature difference SR1 based on the maximum temperature SR11 and the minimum temperature SR12, for example, as shown in the following formula (1). Temperature difference = maximum temperature - minimum temperature (1)

[0056] As in the above formula (1), the PLC 100 calculates the difference between the maximum temperature SR11 and the minimum temperature SR12 extracted from the multiple measurement results to obtain the temperature difference SR1. Specifically, in the illustrated example, based on the above formula (1), the temperature difference SR1 is "25.35°C - 22.90°C = 2.45°C."

[0057] The temperature difference SR1 is an example of a value that indicates so-called "temperature unevenness." In other words, if the temperature difference SR1 is a large value, the temperature unevenness is large, and the clean room system can determine that the temperature in the clean room is not uniform due to the existence of high-temperature spots in the clean room, etc. On the other hand, if the temperature difference SR1 is a small value, the clean room system determines that the temperature unevenness is small. For example, the magnitude of the temperature unevenness is determined by comparing the temperature difference SR1 with a preset threshold value, etc.

[0058] <Example of cleanliness measurement section> 1, a particle counter SER2 is installed in the clean room. That is, in the clean room, the number of particles in the clean room is measured by the particle counter SER2 or the like. Data indicating the measurement result is transmitted to the PLC 100.

[0059] <First example of air circulation method> The clean room system implements an air circulation method, for example, as follows.

[0060] FIG. 5 is a flowchart showing a first example of an air circulation method in a clean room system.

[0061] <Temperature measurement example> (Step S1) In step S1, the temperature measurement unit measures the temperature.

[0062] <Example of cleanliness measurement> (Step S2) In step S2, the cleanliness measurement unit measures the cleanliness.

[0063] <Example of judgment based on temperature and cleanliness> (Step S3) In step S3, the determination unit performs a determination based on the temperature and the cleanliness level. For example, the determination unit determines whether or not to blow air.

[0064] <Example of Determination of Whether or Not to Blow Air> (Step S4) In step S4, the determination unit determines whether or not to blow air based on the result of the determination in step S3.

[0065] Next, if it is determined that air should be blown (YES in step S4), the clean room system proceeds to step S5. On the other hand, if it is determined that air should not be blown (NO in step S4), the clean room system ends the process, that is, keeps the blower unit stopped.

[0066] <Example of air blowing> (Step S5) In step S5, the air blowing control unit controls the air blowing unit to blow air.

[0067] Specifically, the above process is carried out as follows.

[0068] FIG. 6 is a diagram showing a first example of an air circulation method in a clean room system.

[0069] As shown in Fig. 6(A), when step S1 is performed first, the maximum temperature SR11, the minimum temperature SR12, the temperature difference SR1, etc. are found by calculating the above formula (1), etc. Then, as shown in the figure, based on the temperature difference SR1, etc., it is determined whether the temperature difference is large or small, and whether or not to blow air (in other words, it is determined whether to turn the air blow "ON" or "OFF"). Hereinafter, the judgment result based on temperature is referred to as the "first judgment result J1".

[0070] 6(B), when step S2 is performed, the cleanliness level SR2, etc. is obtained. As shown in the figure, based on the cleanliness level SR2, etc., it is determined whether the cleanliness level is within an acceptable range, and whether or not to blow air is determined. Hereinafter, the determination result based on the cleanliness level is referred to as the "second determination result J2."

[0071] Next, as shown in FIG. 6(C), the clean room system obtains a final judgment result (hereinafter simply referred to as "judgment result J3") based on the first judgment result J1 and the second judgment result J2.

[0072] For example, if either the first judgment result J1 or the second judgment result J2 is a judgment result that "air is blown," the judgment result J3 becomes "air is blown." That is, the judgment result J3 is determined by taking the "OR" (logical sum) of the first judgment result J1 and the second judgment result J2, or the like.

[0073] <Example of functional configuration> 7 is a functional block diagram showing an example of the functional configuration of the clean room system in the first embodiment. For example, the clean room system 10 has a functional configuration including an air blower 10F1, a temperature measuring unit 10F2, a cleanliness measuring unit 10F3, a determining unit 10F4, and an air blower control unit 10F5. The following will explain the functional configuration shown in the figure as an example.

[0074] The blower 10F1 performs a blowing procedure for blowing air into the interior of the clean room. For example, the blower 10F1 is realized by an air conditioner or the like.

[0075] The temperature measurement unit 10F2 performs a temperature measurement procedure to measure the temperature inside the clean room. For example, the temperature measurement unit 10F2 is realized by a temperature sensor SER1 or the like.

[0076] The cleanliness measuring unit 10F3 performs a cleanliness measuring procedure for measuring the cleanliness in the clean room. For example, the cleanliness measuring unit 10F3 is realized by a particle counter SER2 or the like.

[0077] The determining unit 10F4 performs a determining procedure for determining whether or not to blow air based on the temperature and the cleanliness. For example, the determining unit 10F4 is realized by the PLC 100 or the like.

[0078] The air blowing control unit 10F5 performs an air blowing control procedure for controlling the air blowing unit 10F1 based on the result of the determination by the determination unit 10F4. For example, the air blowing control unit 10F5 is realized by the PLC 100 or the like.

[0079] As described above, by taking into consideration both temperature and cleanliness and having the clean room system blow air only when it is necessary to satisfy either of the conditions, it is possible to reduce energy consumption in the clean room compared to a case in which air is constantly blown.

[0080] <Second embodiment> The second embodiment differs from the first embodiment in that it uses humidity and cleanliness. The following description will focus on the differences from the first embodiment, and will not repeat the same description.

[0081] <Example of humidity measurement section> For example, a humidity sensor SER3 is installed in a clean room as shown in Fig. 1. The humidity sensor SER3 is a sensor that measures the humidity at the location where the sensor is installed or in the surrounding area.

[0082] For example, by installing humidity sensors SER3 at multiple locations in a clean room, the PLC 100 can obtain measurement results, etc., in the same way as the temperature in the first embodiment.

[0083] <Second example of air circulation method> In the second embodiment, the clean room system performs an air circulation method, for example, as follows.

[0084] 8 is a flow chart showing a second example of the air circulation method in the clean room system. Compared to the first example, the second example differs in that it includes steps S21 and S22.

[0085] Then, the PLC 100 calculates the humidity difference based on the highest humidity among the measured humidities and the lowest humidity among the measured humidities, for example, as shown in the following formula (2). Humidity difference = maximum humidity - minimum humidity (2)

[0086] As in the above formula (2), the PLC 100 calculates the difference between the maximum humidity and the minimum humidity extracted from a plurality of measurement results to obtain the humidity difference.

[0087] The humidity difference is an example of a value that indicates so-called "humidity unevenness." In other words, if the humidity difference is large, the humidity unevenness is large, and the clean room system can determine that the humidity in the clean room is not uniform due to the occurrence of low humidity areas in the clean room. On the other hand, if the humidity difference is small, the clean room system determines that the humidity unevenness is small. For example, the magnitude of humidity unevenness is determined by comparing the humidity difference with a preset threshold value, etc.

[0088] <Example of Humidity Measurement> (Step S21) In step S21, the humidity measurement unit measures the humidity.

[0089] <Example of Judgment Based on Humidity and Cleanliness> (Step S22) In step S22, the determination unit performs a determination based on the humidity and the cleanliness level. For example, the determination unit determines whether or not to blow air.

[0090] Specifically, the above process is carried out as follows.

[0091] Fig. 9 is a diagram showing a second example of an air circulation method using a clean room system. Note that the cleanliness level, that is, the example shown in Fig. 9(B) is the same as in the first embodiment, so a description thereof will be omitted.

[0092] 9(A), first, when step S21 is performed, the maximum humidity SR31, the minimum humidity SR32, the humidity difference SR3, etc. are obtained by calculating the above formula (2), etc. Then, as shown in the figure, based on the humidity difference SR3, etc., it is determined whether the humidity difference is large or small, and whether or not to blow air is determined. Hereinafter, the determination result based on humidity is referred to as the "third determination result J4."

[0093] Next, as shown in FIG. 6(C), the clean room system determines a judgment result J3 based on the second judgment result J2 and the third judgment result J4.

[0094] <Example of functional configuration> 10 is a functional block diagram showing an example of the functional configuration of a clean room system in the second embodiment. Compared with the first embodiment, the second embodiment differs in that the functional configuration includes a humidity measuring unit 10F20.

[0095] The humidity measurement unit 10F20 performs a humidity measurement procedure to measure the humidity in the clean room. For example, the humidity measurement unit 10F20 is realized by a humidity sensor SER3 or the like.

[0096] As described above, by taking into consideration both humidity and cleanliness and having the clean room system blow air only when it is necessary to satisfy either of the conditions, it is possible to reduce the amount of energy used in the clean room compared to a case in which air is constantly blown.

[0097] <Third embodiment> The clean room system may have the following configuration, for example.

[0098] <Overall configuration example> FIG. 11 is a cross-sectional view showing an example of the overall configuration of a clean room system in the second embodiment.

[0099] For example, an air conditioner, which is an example of a blower, may be a third air conditioner 31, as shown in the figure. That is, in the clean room, blowers may be installed in the arrangement and orientation shown in the figure, such as a plurality of third air conditioners 31 as shown in the figure.

[0100] Furthermore, the clean room is provided with wireless temperature and humidity sensors SER5 at multiple locations. Therefore, in the third embodiment, the temperature and humidity are measured at multiple locations in the clean room by the multiple wireless temperature and humidity sensors SER5, and the measurement results are transmitted to the PLC 100.

[0101] Furthermore, in the illustrated example, a TIC (Temperature Indication Controller, hereinafter simply referred to as "TIC32") and a chilled water valve 33 are examples of an adjustment unit that performs an adjustment procedure to adjust the temperature of the air (hereinafter referred to as "blowout temperature") blown by the third air conditioner 31 with water or the like based on the control by PLC100, which is an example of a control unit. Below, an example will be described in which the blowout temperature is water-cooled by the PLC100, TIC32, and chilled water valve 33.

[0102] <Third example of air circulation method> In the third embodiment, the clean room system performs an air circulation method, for example, as follows.

[0103] FIG. 12 is a flowchart showing a third example of an air circulation method in a clean room system.

[0104] <Example of Determining Whether Data Has Been Acquired from All Sensors> (Step S301) In step S301, the control unit judges whether data has been acquired from all sensors. In other words, if any of the sensors is broken, not all data will be available. Therefore, the control unit judges whether such a failure has occurred.

[0105] Next, if it is determined that data has been acquired from all the sensors (YES in step S301), the clean room system proceeds to step S303. On the other hand, if it is determined that data has not been acquired from all the sensors (NO in step S301), the clean room system proceeds to step S302.

[0106] <Example of issuing an alarm, etc.> (Step S302) In step S302, the control unit issues an alarm or the like. That is, the clean room system notifies an administrator or the like that a sensor or the like is in a broken state.

[0107] <Calculation example of temperature difference and humidity difference> (Step S303) In step S303, the determination unit calculates the temperature difference and the humidity difference. For example, the temperature difference is calculated as shown in the following formula (3). ΔT = Max(T1~T4) - Min(T1~T4) (3)

[0108] In the above formula (3), "ΔT" indicates the temperature difference. Furthermore, "Max()" indicates a function that extracts the maximum temperature among the temperatures entered in "()". Furthermore, "Min()" indicates a function that extracts the minimum temperature among the temperatures entered in "()".

[0109] Moreover, the above formula (3) is an example in which the measurement targets are four locations, "T1", "T2", "T3", and "T4".

[0110] Next, for example, the humidity difference is calculated as shown in the following formula (4). ΔH = Max(H1~H4) - Min(H1~H4) (4)

[0111] In the above formula (4), "ΔH" indicates the humidity difference. Also, "Max()" and "Min()" are the same as in the above formula (3).

[0112] The above formula (4) is an example in which the measurement targets are four locations, "H1", "H2", "H3", and "H4".

[0113] <Example of Determination of Whether Temperature Difference or Humidity Difference is Larger than Threshold Value> (Step S304) In step S304, the determination unit determines whether the temperature difference or the humidity difference is greater than a threshold value. For example, the determination unit makes the determination according to the following formula (5). Judgment result = (ΔT>ΔTb) OR (ΔH>ΔHb) (5)

[0114] In the above formula (5), "ΔT" and "ΔH" are the same as those in the above formulas (3) and (4). "ΔTb" is a threshold value for determining the presence or absence of temperature unevenness, and the value is set in advance. Similarly, "ΔHb" is a threshold value for determining the presence or absence of humidity unevenness, and the value is set in advance. Therefore, if either one of "ΔT" and "ΔH" is greater than the threshold value, the judgment unit judges that there is temperature unevenness or humidity unevenness (hereinafter simply referred to as "unevenness present"). On the other hand, if both "ΔT" and "ΔH" are equal to or less than the threshold value, the judgment unit judges that there is neither temperature unevenness nor humidity unevenness (hereinafter simply referred to as "no unevenness").

[0115] Next, if it is determined that there is unevenness (YES in step S304), the clean room system proceeds to step S305. On the other hand, if it is determined that there is no unevenness (NO in step S304), the clean room system proceeds to step S306.

[0116] <Example of "Uneven" Settings> (Step S305) In step S305, the judgment unit sets the judgment result of "unevenness exists". For example, the judgment result of "unevenness exists" or "no unevenness" is input to a flag or the like. Hereinafter, the judgment result of "unevenness exists" or "no unevenness" is referred to as "TH_ng". "TH_ng" is data that is set to "1" or "0", with "unevenness exists" being set to "1". On the other hand, the judgment result of "no unevenness" is input as "0" to "TH_ng".

[0117] Therefore, in step S305, the determination unit sets "TH_ng=1."

[0118] <Setting example of "No Unevenness"> (Step S306) In step S306, the determination unit sets the determination result to “no unevenness.” Therefore, in step S306, the determination unit sets “TH_ng=0.”

[0119] <Example of determining water volume based on representative temperature> (Step S307) In step S307, the determination unit determines the amount of water based on the representative temperature.

[0120] The representative temperature is, for example, the temperature at a specific point in the clean room. That is, the representative temperature is, for example, a temperature selected in advance from "T1", "T2", "T3", "T4", and the like.

[0121] When the representative temperature is high, the determination unit determines that the amount of cold water should be increased by increasing the opening degree of the cold water valve. In this way, when the amount of cold water flowing through the coil of the air conditioner increases, the temperature of the air to be blown can be adjusted to be lower.

[0122] <Example of Determination of Whether or Not "Unevenness Exists"> (Step S308) In step S308, the determination unit determines whether or not there is “unevenness.” That is, the determination unit determines whether “TH_ng=0” or “TH_ng=1.”

[0123] In addition, in step S308, the judgment result, i.e., the air volume controlled in the subsequent stage, is maintained for about 30 minutes to avoid drastic changes in the judgment result. For example, a moving average value or the like is used to determine whether or not to change the judgment result.

[0124] Next, if it is determined that there is "unevenness" (YES in step S308), the clean room system proceeds to step S309. On the other hand, if it is determined that there is not "unevenness" (NO in step S308), the clean room system proceeds to step S310.

[0125] <Example of increasing air volume> (Step S309) In step S309, the airflow control unit increases the airflow rate. For example, the airflow control unit controls the airflow rate according to the following formula (6). N = N + ΔN (6)

[0126] In the above formula (6), "N" indicates the current air volume (hereinafter referred to as "current value"), and "ΔN" is the amount of change in the air volume (hereinafter simply referred to as "change amount"), which is a preset value.

[0127] <Example of Reducing Airflow> (Step S310) In step S310, the airflow control unit reduces the airflow rate. For example, the airflow control unit controls the airflow rate according to the following formula (7). N = N - ΔN (7) In the above formula (7), "N" and "ΔN" are the same as in the above formula (6).

[0128] <Example of Determination of Whether Air Volume is Less than Lower Limit Value> (Step S311) In step S311, the determination unit determines whether or not the airflow rate is smaller than a lower limit value LT. For example, the lower limit value LT is set in advance as shown in FIG.

[0129] That is, the judgment unit judges whether the current value is smaller than the lower limit LT as a result of the calculation of the above formula (7). There are circumstances in which the blower unit cannot blow air at an air volume smaller than the lower limit LT. Therefore, the judgment unit judges not to set an air volume smaller than the lower limit LT.

[0130] Next, if it is determined that the air volume is less than the lower limit (YES in step S311), the clean room system proceeds to step S312. On the other hand, if it is determined that the air volume is not less than the lower limit (NO in step S311), the clean room system ends the process.

[0131] <Example of setting the air volume to the lower limit> (Step S312) In step S312, the air flow control unit sets the air volume to the lower limit value.

[0132] As described above, if the blowing air temperature can be adjusted with water based on the determination results of temperature, humidity, etc., the clean room system can adjust the blowing air temperature without laying refrigerant piping as in air cooling. Furthermore, compared to air cooling, adjustment using water, etc. can reduce the risk of greenhouse gas leakage.

[0133] <Modification> The clean room system may be configured as follows:

[0134] <About the ventilation section> It is desirable to install the blower unit of an air conditioner or the like at a lower position, that is, at a lower height than the suction unit, as shown in FIG.

[0135] <About the suction unit> An air intake port, which is an example of a suction unit, is desirably installed at an upper portion that is higher than the air conditioner in the z-axis direction, as shown in FIG. 1. For example, in the example shown in the figure, an air intake port (in the figure, it is an air intake port installed at the left end of the clean room and installed above the first air conditioner 11. Hereinafter, it is referred to as "first air intake port 13") is installed on one wall. Then, an air intake port (in the figure, it is an air intake port installed at the right end of the clean room and installed above the second air conditioner 12. Hereinafter, it is referred to as "second air intake port 14") is installed separately from the first air intake port 13 on the wall opposite the wall where the first air conditioner 11 is located. Below, an example in which two air intake ports are installed as shown in the figure will be described.

[0136] As shown in the figure, the first air intake 13 includes devices such as an exhaust fan 13F and a cooling coil 13C, while the second air intake 14 includes devices such as an exhaust fan 14F and a cooling coil 14C.

[0137] <Example of discharge section> 1, a damper 15, which is an example of a discharge section, may be installed in the clean room. For example, the damper 15 is installed on a ceiling 16 or the like.

[0138] The exhaust section is installed at a point at least a certain distance away from the blower section (in the figure, this is in the x-axis direction). First, damper 15 is placed together with an air conditioner. Damper 15 is placed at a point where the temperature of the air blown by the air conditioner rises. Specifically, at least one damper (hereinafter referred to as the "first damper") is placed for one air conditioner.

[0139] In addition, a heat generating element such as manufacturing equipment MC may be disposed between the first damper and the air conditioner. In such a case, a damper different from the first damper (hereinafter referred to as a "second damper") is further installed at a predetermined interval between the first damper and the air conditioner to accommodate the heat generating element.

[0140] The predetermined interval is, for example, an interval determined by a standard manufacturing equipment MC and a working area of ​​the manufacturing equipment MC, etc. By setting such an interval, it is possible to deal with even if the arrangement of the manufacturing equipment MC is changed.

[0141] <Example of stratifying upper and lower layers> As shown in the example in Figure 1, in a clean room, it is desirable to have a layer (hereinafter referred to as the "lower layer E2") that can be controlled to meet temperature and other conditions by having a blower at the bottom blow air into the room and a suction unit at the top suck air in, and a layer (hereinafter referred to as the "upper layer E1") formed above the lower layer E2.

[0142] In the illustrated example, the lower floor E2 is the management area EC. In this example, the management area EC, that is, the lower floor E2, is preset to be an area having a height of 2 meters or less based on the floor surface GD.

[0143] Note that a height of 2 meters from the floor surface GD is an example of the maximum height of the air blowing unit. In other words, the maximum height at which the air blowing unit can directly blow air is 2 meters from the floor surface GD. Therefore, the maximum height of the air blowing unit is determined by the size of the air conditioner and the height at which it can blow air, etc. Therefore, the area below a height of 2 meters from the floor surface GD becomes the controlled area EC, and the temperature, etc. of the controlled area EC is controlled by the air conditioner, etc.

[0144] For example, as shown in the figure, when an upper layer E1 and a lower layer E2 are layered, a high temperature area, a so-called "heat pool," can be created in the upper part of the clean room.

[0145] If there is a "heat pool," the temperature difference between the top and bottom can be increased. In this way, if the temperature difference between the intake air and exhaust air is large, the transport power can be reduced. Therefore, creating a "heat pool" can help save energy.

[0146] In addition, creating a "heat pool" makes it easier for cold air to stagnate at the bottom, which makes it easier for the bottom to become colder, and reduces the amount of energy needed to cool the bottom.

[0147] Furthermore, by creating a "heat pool", the area that is cooled by air blowing etc. is often limited to the lower layer. In other words, by creating a "heat pool", the area that is controlled by air blowing etc. can be smaller than the entire clean room. Therefore, compared to controlling the entire clean room, creating a "heat pool" can save energy.

[0148] <Example of a fixed distance> The location where the exhaust unit is to be installed, which is away from the blower unit by a certain distance or more, is, for example, the following location.

[0149] For example, assume that the distance from the first wall to the second wall (hereinafter simply referred to as "width") is "40 meters." In this case, the damper 15 is installed, for example, at a point that is a certain distance or more away from the first wall or the second wall. In this case, the certain distance is, for example, "1.0 meter."

[0150] The certain distance is not limited to 1.0 meter. In other words, the certain distance varies depending on the conditions of the clean room, the strength of the air blowing by the blower, the width, or the arrangement of the manufacturing equipment.

[0151] When you move a certain distance away from the air blower, the room temperature becomes as follows:

[0152] The room temperature is lowest at a distance of "0.0 meters" from the first or second wall, and the room temperature increases as the distance increases. For example, the set temperature is "22.0°C."

[0153] At a distance of "1.0 meter" or more, the room temperature will be almost at the set temperature, i.e., the room temperature will be higher than at the point of the air blowing section. Therefore, it is desirable to install a heating element such as a manufacturing device at a point "1.0 meter" or more away from the air blowing section. In other words, stratification is likely to occur due to the rise in room temperature at a point "1.0 meter" or more away from the air blowing section. Therefore, it is desirable to install a heating element at a point "1.0 meter" or more away, and to install an exhaust section at a distance of "1.0 meter" or more. If the exhaust section is installed at such a point, air can be exhausted at the point where the temperature becomes high, and the temperature and other conditions can be maintained in the clean room.

[0154] Furthermore, the air conditioners may be fans, etc. Also, the air conditioners may have different configurations as shown in FIG. 1, or may have the same configuration.

[0155] Also, multiple exhaust sections whose opening / closing or opening degree can be adjusted may be provided in a dispersed manner on the ceiling. Such a configuration can accommodate changes in the location of heat generating elements (such as manufacturing equipment) in the clean room. Also, such a configuration is preferable because it can accommodate not only location changes but also operation or non-operation of the manufacturing equipment. In this case, for example, opening / closing and the opening degree can be adjusted manually or using a control device depending on the location of the manufacturing equipment. Also, opening / closing and the opening degree can be adjusted manually or using a control device depending on operation or non-operation of the manufacturing equipment.

[0156] The number of air conditioners may be any number, and may be one or more than three. The air conditioners may be installed anywhere on the x-axis and y-axis. For example, when the distance from wall to wall is long, i.e., when the space is large, the volume of air sent by the air conditioners may be insufficient. In such a case, for example, as shown in FIG. 1, the respective blowers are arranged facing each other on the x-axis. In this way, it is possible to make up for the insufficient volume of air sent by a small number of air conditioners. Furthermore, in such a configuration, the air sent by both air conditioners collides with each other at a midpoint or the like. When the air collides with each other in this way, it has the effect of pushing the air upward in the clean room.

[0157] On the other hand, when the distance from wall to wall is short, i.e., the space is small, stratification can be achieved even with one air conditioner. In such a case, taking into consideration the construction costs, etc., one air conditioner may be sufficient.

[0158] The blower unit does not have to be configured as shown in Fig. 2. For example, the blower unit may have a mechanism with a different shape, arrangement, or inclination angle. It is preferable that the blower unit is configured to blow air by drawing in surrounding air with the air sent into the clean room.

[0159] Specifically, the configuration for inducing the surrounding air is a mechanism that first collects the air to be sent out and then pushes out the collected air. With such a mechanism, the air pressure at the location where the air was pushed out drops, causing a phenomenon in which the surrounding air flows in, making it easy to generate an induced airflow. In this way, with a configuration for inducing the surrounding air to blow air, air can be blown efficiently. Note that the blowing unit may induce the surrounding air to blow air using methods and mechanisms other than those described above.

[0160] The blower may also have mechanisms other than those shown in the drawings. For example, the blower may further have a filter or an air cooler. The air cooler (cooling coil) may be arranged extending in the height direction corresponding to the management area EC. The presence of an air cooler can keep the temperature of the air blown from the first air conditioner 11 and the second air conditioner 12 almost constant. The air cooler may also be arranged in the upper blower unit. With such a configuration, the thickness of the air conditioner can be reduced, allowing for a wider use of the work area of ​​the clean room.

[0161] Furthermore, the air cooler or the like can be an evaporator of a refrigeration cycle. In this case, the condenser of the refrigeration cycle can be arranged on the outer wall of the clean room or the like. In the above example, the air cooler or the like can be arranged on the roof or the like via a refrigerant pipe, that is, can be used as an outdoor unit. Also, as the air cooler or the like, a type in which cold water is circulated from the outside through a heat exchanger can be used. Also, a configuration in which a heat exchanger is arranged outside and cold air is supplied to the air cooler or the like through a duct can be used. This allows the indoor space to be used more effectively.

[0162] In addition, in the clean room, temperature, humidity, cleanliness, vibration, pressure, gas components, static electricity, electromagnetic waves, microorganisms, or a combination of these may be managed as environmental conditions. The clean room system may perform judgment by combining two or more of the temperature, humidity, cleanliness, and other environmental conditions. Therefore, the clean room system may perform judgment and other processes using combinations other than the above examples. In this way, by combining multiple environmental conditions, it is possible to control so as to satisfy the conditions specified in standards, etc.

[0163] The environmental conditions to be managed should desirably include temperature, cleanliness, and humidity. Temperature, cleanliness, and humidity are often the targets of standards, etc. Therefore, if the temperature, cleanliness, and humidity can be grasped, the inside of the clean room can be managed to meet the environmental conditions stipulated by the standards, etc.

[0164] Also, in a clean room, all spaces do not have to satisfy the environmental conditions defined as "Class 6". That is, in a clean room, an area that is set in advance as an area that satisfies the environmental conditions (the control area EC in the above example) may be a part of the space in the clean room. For example, the control area EC is set as a range up to a certain height based on the floor surface GD as shown in the figure. Therefore, the control area EC is managed by an air conditioner or the like so that the temperature is, for example, "23°C ± 5°C". On the other hand, areas other than the control area EC (areas at a height higher than the control area EC and areas at a height lower than the floor surface GD in the example shown in FIG. 1) are not subject to management and the temperature does not have to be within the range of "23°C ± 5°C".

[0165] The number of air intakes may be any number, and may be one or more than two. The air intakes may be located anywhere on the x-axis and y-axis. The wind speed at which the air intakes draw in air is preferably equal to or lower than a predetermined wind speed. That is, if the air intake draws in a large amount of air at once, the air in the upper and lower layers tends to mix. Therefore, it is preferable that the air intake draws in air at a wind speed that makes it difficult for the air in the upper and lower layers to mix. Specifically, the predetermined wind speed is preferably equal to or lower than 1 meter per second. The number of air intakes or the direction in which the air is drawn in may be determined so that the wind speed is such that the air in the upper and lower layers does not mix.

[0166] The suction unit may be configured to be connected to a duct DT or the like. As shown in Fig. 1, for example, a mechanism may be used in which air is sucked in from an inlet of the duct DT in the center of the clean room, and the air flows from the inlet of the duct DT to the second air intake port 14 through piping. In other words, the suction unit only needs to be able to suck in air above the blower unit, and the mechanism of the duct DT or the like, the location on the plane, and the configuration of the device are not important. In particular, a configuration in which the duct DT or the like is connected is effective in a configuration without a ceiling.

[0167] Furthermore, the air delivered by the duct DT may be exhausted to the outside of the clean room by a separate exhaust duct or the like without circulating within the clean room.

[0168] Furthermore, the air intakes are not limited to a combination of the first air intake 13 and the second air intake 14. For example, in a configuration using two or more air intakes, all of them may be first air intakes 13. In a configuration using the first air intake 13, the air to be sent out can be cooled evenly in the height direction.

[0169] On the other hand, for example, in a configuration using two or more intake ports, all of them may be second intake ports 14. In a configuration using second intake ports 14, the filter portion and the like can be made thinner.

[0170] It is preferable that the exhaust section has an opening like the damper 15. In other words, it is preferable that the exhaust section has a mechanism that can open / close the opening or adjust the opening degree. In this way, with a configuration that can open / close or adjust the opening degree, the exhaust section can adjust the flow rate or flow speed of the air passing through in accordance with the temperature, etc. For example, when the temperature increases due to the operation of the manufacturing equipment, the opening may be opened to make it easier for the air to be exhausted. In addition, the flow rate may be adjusted to adjust the wind speed to a predetermined wind speed or less.

[0171] The discharge unit may be realized by other mechanisms. For example, the discharge unit may include a window or a hole. For example, the discharge unit may have a sensor that measures values ​​such as temperature, flow rate, or flow speed, and may have a system configuration in which the measurement results by the sensor are fed back to open / close the opening or adjust the opening degree by an actuator or the like.

[0172] Furthermore, the first damper and the second damper may be different in size. For example, the first damper may be a damper that always sucks in air and is larger than the second damper, etc.

[0173] It is desirable that the first damper and the second damper are configured so that the opening degree can be adjusted from inside the room. With such a configuration, the work of climbing up to the ceiling to adjust the opening degree can be reduced. It is also desirable that the opening degree can be adjusted remotely using a control device or the like. With such a configuration, the workload can be reduced.

[0174] <About sensors> For example, as shown in Figure 1, the clean room may have a sensor such as an airflow meter SER4. For example, the airflow meter SER4 may be a pitot tube.

[0175] Therefore, the blower and the airflow control unit may be configured to measure the air volume, the air speed, or a combination thereof with the airflow meter SER4 and perform feedback control, etc. On the other hand, the blower and the airflow control unit may be configured to perform sequence control, etc., without the airflow meter SER4, etc.

[0176] With feedback from the airflow meter SER4, the cleanroom system can precisely control the airflow, etc.

[0177] <Regarding environmental conditions such as temperature, humidity and cleanliness> As in the above example, the judgment based on temperature is not limited to the judgment based on the temperature difference, i.e., the presence or absence of temperature unevenness. For example, in ISO and the like, a range is set, such as "23°C ± 5°C". Using these values ​​as thresholds, the clean room system may judge whether each temperature is within the range set by the standard or the like. Then, if any one of the measurement results is out of range, the maximum temperature is out of range, or the minimum temperature is out of range, the clean room system may make a judgment to blow air or increase the air volume.

[0178] Similarly, the range may be humidity or cleanliness, etc. If the range is not defined by standards or the like, the range may be set independently.

[0179] By using such criteria for judgment, the clean room system can be controlled so as to satisfy the conditions stipulated by standards and the like.

[0180] <About determining air volume, etc.> The judgment is not limited to judging whether or not to blow air. For example, the judgment may be made by determining the air volume, etc. For example, when the judgment is made based on the temperature and the cleanliness, the air volume is first judged separately based on the respective measurement results. Note that, when it is judged whether or not to blow air as in FIG. 6, for example, the air volume is a preset air volume.

[0181] Specifically, the clean room system specifies an air volume (hereinafter referred to as "first air volume") that corresponds to a temperature difference. Similarly, the clean room system specifies an air volume (hereinafter referred to as "second air volume") that corresponds to a cleanliness level. Then, the clean room system, for example, compares the first air volume with the second air volume and adopts the larger air volume.

[0182] In this way, the appropriate air volume for satisfying each environmental condition can be identified. By adopting the largest air volume among them, the air volume can be set according to the environmental condition that requires the most air volume to be satisfied.

[0183] Similarly, the clean room system may specify an air volume corresponding to the humidity difference (hereinafter referred to as the "third air volume"). That is, the clean room system may specify two or more of the first air volume, the second air volume, and the third air volume, and adopt the largest air volume among these air volumes.

[0184] The air volume is set by, for example, changing the amount of air the blower blows per unit time, the length of time the blower blows air (i.e., the time the blower is turned "ON"), the wind speed, the rotational speed of the fins, the voltage of the motor that rotates the fins, the number of fins that are rotated, or a combination of these.

[0185] Moreover, the air volume corresponding to the temperature difference, cleanliness level, or humidity difference is a value that is set in advance using a table, for example.

[0186] In this way, the clean room system can adjust the strength of the airflow by determining not only whether to blow air but also the air volume. In particular, it often reduces power consumption compared to when only "100%" (blow air) or "0%" (do not blow air) are available.

[0187] <About adjustments> The blowing air temperature does not have to be water-cooled. That is, the adjustment may be performed by increasing the blowing air temperature. Furthermore, the hardware used for the adjustment may be a device other than the above example.

[0188] <About warnings, etc.> The alarm etc. is not limited to emitting an alarm sound etc. In other words, the notification method is not important as long as it can notify the manager or the person in the clean room that an abnormality has occurred. For example, the alarm etc. may be configured to emit a light or a message etc. Furthermore, the warning etc. may display or transmit data etc. that is used for a sensor that cannot acquire data, i.e., to investigate the cause of a failure or to identify the location of the failure. In this way, when a failure etc. is notified by an alarm etc., the manager etc. can quickly notice the abnormality such as a sensor failure.

[0189] <Example of judging by area> The clean room system may divide the clean room into areas and perform judgments for each area, for example, as described below.

[0190] 13 is a diagram showing an example of performing judgment and control by dividing the area. For example, a clean room is divided in advance into an eleventh area E11, a twelfth area E12, a thirteenth area E13, a fourteenth area E14, a twenty-first area E21, a twenty-second area E22, a twenty-third area E23, and a twenty-fourth area E24, as shown in the figure.

[0191] In this way, by dividing the clean room into areas and performing measurement, judgment, and control for each area, the inside of the clean room can be controlled in detail.

[0192] The size of the areas, how they are divided, the number of areas, etc. are set in advance. For example, the areas may be divided as follows:

[0193] Fig. 14 is a diagram showing modified examples of the areas. For example, the areas may be divided as shown in Fig. 14(A), Fig. 14(B), Fig. 14(C), or Fig. 14(D) based on the size of the clean room, the locations of the sensors, the layout of the manufacturing equipment, etc.

[0194] By dividing the areas in this way, even if the environmental conditions differ from area to area, air can be blown in a manner appropriate to each area.

[0195] <Example of judging and predicting filter life> Also, the clean room system desirably includes a management device CNT, for example, as shown in Fig. 11. The management device CNT is, for example, an information processing device such as a server. Therefore, the management device CNT acquires data measured by various sensors via the PLC 100 or the like. Then, the management device CNT determines and predicts the life of a filter in an air blowing section having a filter, for example, as follows.

[0196] 15 is a diagram showing an example of the configuration of an air blower having a filter. For example, as shown in the figure, the air blower has a filter FR in the direction in which the first air conditioner 11 blows air (to the right from the first air conditioner 11 in the example shown in the figure).

[0197] The filter FR removes particles and the like contained in the air being blown. The filter FR may also slow down the speed of the air being blown. Thus, after a certain period of use, the filter FR reaches the end of its "life" due to damage, wear, dirt, clogging, or the like. That is, a filter FR that has reached the end of its life may no longer be able to adequately purify the air being blown, or may become clogged and cause other problems, such as being unable to blow air adequately. Therefore, it is desirable to replace a filter FR that has reached the end of its life.

[0198] The control device CNT measures, for example, parameters as shown in the figure, and determines whether or not the filter FR has reached the end of its life based on the measurement results.

[0199] For example, the clean room system 10 is a hardware configuration including a barometer SER21, a flow meter SER22, a barometer SER23, a differential pressure gauge 24, and the like.

[0200] As shown in the figure, the barometer SER21 measures the air pressure (hereinafter referred to as "first air") sent by the first air conditioner 11 to the filter FR, that is, the air pressure (hereinafter referred to as "first air pressure P1") of the air before passing through the filter FR.

[0201] As shown in the figure, the barometer SER23 measures the air pressure (hereinafter referred to as "second air") blown from the filter FR into the clean room, that is, the air pressure of the air after passing through the filter FR (hereinafter referred to as "second air pressure P2").

[0202] The differential pressure gauge 24, which is an example of a differential pressure measuring unit, measures the difference between the first atmospheric pressure P1 and the second atmospheric pressure P2 (hereinafter referred to as the "pressure difference SRP").

[0203] The air flow meter SER22, which is an example of an air speed measuring unit, measures the air speed SRV before the air passes through the filter FR.

[0204] Using the above-mentioned measurement results, the management device CNT judges the life of the filter FR, for example, as follows.

[0205] 16A and 16B are diagrams showing examples of determining the life of a filter. For example, the life of a filter is determined as shown in FIG.

[0206] 16A, the horizontal axis represents the wind speed SRV, and the vertical axis represents the square root of the pressure difference SRP. In the initial state, that is, immediately after replacing the filter FR, the characteristic is, for example, as shown in the initial state CRA1. Specifically, in the initial state CRA1, even if the wind speed SRV changes, the square root of the pressure difference SRP does not change much.

[0207] As the filter FR is used, the characteristics often change from an initial state CRA1 to a replacement time state CRA2, as shown in the figure.

[0208] In the replacement time state CRA2, the square root of the pressure difference SRP changes significantly with respect to changes in the air speed SRV, as compared to the initial state CRA1. In this state, the first air conditioner 11 blows air at a constant air pressure, so the first air pressure P1 remains almost constant even over time, whereas the air pressure drops significantly after passing through the filter FR. In other words, if the filter FR is clogged, the filter FR weakens the force of the air it blows, making it easy for the air pressure to drop significantly.

[0209] Therefore, if a value indicating a trend such as the replacement time status CRA2 (for example, the slope of the replacement time status CRA2) is set as a threshold value in advance, the management device CNT can determine the filter life by calculating the square root of the air pressure difference SRP, etc.

[0210] In Figure 16(B), the horizontal axis represents time (the time the filter FR has been in use, i.e., the time elapsed since the filter FR was replaced), and the vertical axis represents the result of dividing the square root of the pressure difference SRP by the wind speed SRV.

[0211] The recorded value CRB is, for example, an example of a result of dividing the square root of the pressure difference SRP by the wind speed SRV, which is calculated every day. As shown in the figure, the recorded value CRB increases over time. In response to this, a judgment value JL, which is a threshold value for judging whether it is time to replace the device, is preset in the management device CNT.

[0212] In this way, the management device CNT can determine that the point at which the recorded value CRB reaches the judgment value JL (in the drawing, this is the point indicated as the life point LP) is the end of the life of the filter FR.

[0213] Furthermore, the management device CNT may predict the life of the filter, for example, as follows.

[0214] Fig. 17 is a diagram showing an example of a prediction of the life of a filter. For example, assume that a recorded value CRB is input as shown in Fig. 16(B). As shown in the figure, at the current time T1, the recorded value CRB has not reached the judgment value JL, so it is determined that the current time T1 is not the time to replace the filter FR.

[0215] Therefore, the management device CNT predicts the time when the life is expected to end (hereinafter referred to as "prediction time T2") based on the recorded value CRB, for example, as shown in the figure. Specifically, the management device CNT first calculates a prediction line PL based on the recorded value CRB. The points on the prediction line PL are the prediction points.

[0216] The forecast line PL is calculated, for example, by taking a moving average of the calculation results for the most recent month indicated by the recorded values ​​CRB, an average of the recorded values ​​CRB, or a least squares method based on the recorded values ​​CRB.

[0217] As shown in the figure, when the prediction line PL is extended, an intersection point PP with the judgment value JL is obtained. For example, the intersection point PP obtained in this manner is the point at which the filter FR reaches the end of its life, i.e., the prediction point becomes equal to or greater than the threshold value, and the time at which the filter FR reaches the end of its life is predicted to be the prediction time T2.

[0218] With this configuration, the clean room system can predict when the filter FR will need to be replaced.

[0219] The hardware configuration is not limited to the illustrated configuration. For example, a hardware configuration without the differential pressure gauge 24 may be used. In this configuration, the management device CNT calculates the difference between the atmospheric pressures measured by the barometer SER21 and the barometer SER23 to calculate the pressure difference SRP. In this way, the pressure difference SRP and the wind speed SRV may be obtained by calculation or the like. The measurement results may be calculated based on the measurement results that can be obtained from sensors other than those illustrated. In this way, the measurement results may be estimated based on the measurement results by other sensors, or the measurement results of other sensors may be used in common, thereby reducing the number of sensors.

[0220] As described above, a configuration that determines or predicts the life of a filter can prevent replacing a filter that has a sufficient remaining life, compared to periodic replacement of the filter. Also, compared to a configuration that monitors a differential pressure gauge to determine the life of the filter, it can reduce the amount of manpower required. In this way, it is possible to reduce costs due to unnecessary replacement and reduce the number of people required to monitor the filter.

[0221] Furthermore, with the above-described configuration, it becomes clear whether or not it is time to replace the device, making it possible to achieve so-called "visualization."

[0222] <Modification for increasing the amount of air blown> It is desirable for the clean room system to further determine the following conditions and control the blower. Condition 1) When the temperature of the air blown by the blower unit is adjusted with water, the cold water control valve that adjusts the amount of water used by the adjustment unit (hereinafter simply referred to as "water amount") is fully open, or the cold water control valve is opened so that the amount of water is equal to or greater than the preset upper limit (hereinafter referred to as "upper water amount value"). Second condition) When the temperature of the air blown by the blower is equal to or lower than a preset lower limit (hereinafter referred to as the "lower limit temperature").

[0223] When it is determined that at least one of the two conditions, such as the first condition and the second condition, described above is satisfied, the clean room system desirably controls the airflow rate to be increased.

[0224] When the clean room system controls the air blower by making a judgment based on a combination of temperature difference, humidity difference, cleanliness, etc., the clean room system may control to reduce the amount of air blown if the temperature difference, humidity difference, cleanliness, etc. meet the conditions of the standard, etc. When such control is performed, the amount of air blown is reduced, and the temperature inside the clean room may rise.

[0225] The first and second conditions shown above are examples of conditions used to detect when the blown air temperature is outside the control range or approaches the outside of the control range when adjusting the temperature inside the clean room.

[0226] Specifically, when the blown air is water-cooled, when the cold water control valve is fully open or reaches the upper water volume limit, it can be estimated that the room temperature has risen to a level where it is difficult to further lower the room temperature by blowing water-cooled blown air. Therefore, the clean room system uses the first condition to determine whether the water cooling is at or near its limit and the room temperature has risen. In such a state, since water cooling has reached its limit, it may not be possible to lower the room temperature unless the blown air volume is controlled to be increased. Therefore, when the first condition is met, it is desirable for the clean room system to control the blower unit to increase the blown air volume.

[0227] In addition, when the blown air temperature reaches the lower limit, it can be estimated that the indoor temperature has risen to a level where it is difficult to further lower the indoor temperature by lowering the blown air temperature. In order to lower the indoor temperature, if the blown air temperature is lowered, that is, if lower temperature blown air is blown, the clean room system can lower the indoor temperature, assuming that the blown air volume is set to be constant. However, when the second condition is satisfied, that is, when the blown air temperature is equal to or lower than the lower limit, it can be estimated that the blown air temperature is at or near the limit for lowering the blown air temperature. Therefore, the clean room system judges whether the blown air temperature is at or near the limit for lowering the blown air temperature and the indoor temperature has risen, based on the second condition. In such a state, since there is a limit to lowering the blown air temperature, there are cases where the room temperature cannot be lowered unless the blown air volume is controlled to be increased. Therefore, when the second condition is satisfied, it is desirable for the clean room system to control the blower unit to increase the blown air volume.

[0228] [Other embodiments] In the examples given above, the value may be a statistical value such as an average, a moving average or a median.

[0229] In the above examples, the processes may be performed in a different order from that shown in the drawings, etc. For example, the processes such as measurements may be performed in an order different from that shown in the drawings or in parallel.

[0230] In addition, AI (Artificial Intelligence) and the like may be used for each process. For example, the life of a filter and the like may be predicted based on machine learning using past data as learning data.

[0231] The number of devices in the above examples does not have to be one. For example, there may be multiple devices such as information processing devices. That is, an information processing system made up of multiple information processing devices may execute processing or data storage in a distributed, redundant, virtualized, parallel, or combination thereof. Also, for example, devices such as a PLC and a management device may be integrated into one device.

[0232] The processing in the embodiment may be realized, for example, by a program for causing a computer to execute the processing. That is, based on the program for executing the processing, a computer such as an information processing device executes the processing by making an arithmetic unit, a control unit, a storage device, etc. cooperate with each other.

[0233] The program may be distributed on a computer-readable storage medium. The storage medium may be, for example, an auxiliary storage device such as an optical disk or a hard disk, a USB memory, or a magnetic tape. The program may be distributed via an electric communication line such as a network.

[0234] The present invention is not limited to the above configurations, such as the configurations described in the above embodiments, combinations with other elements, etc. These points can be changed without departing from the spirit of the present invention, and can be appropriately determined according to the application form. [Explanation of symbols]

[0235] 10 Clean Room System 10F1 Air blower 10F2 Temperature measurement section 10F20 Humidity measurement unit 10F3 Cleanliness Measurement Section 10F4 Judgment section 10F5 Air flow control unit 11 1st air conditioner 12 2nd air conditioner 13 First air intake 13C Cooling coil 13F Exhaust fan 14 Second air intake 14C Cooling coil 14F Exhaust fan 15 Damper 16 Ceiling 20. Finn 21 Air supply port 22 Center axis 24 Differential pressure gauge 31 3rd air conditioner 33 Cold water valve 100 PLC CNT management device CRA1 Initial state CRA2 Replacement time status CRB Record Value DT Duct E1 upper layer E2 lower layer E11 11th Area E12 12th Area E13 13th Area E14 14th Area E21 Area 21 E22 Area 22 E23 23rd Area E24 24th Area EC management area FR Filter GD Floor surface J1 1st judgment result J2 2nd judgment result J3 Judging Results J4 3rd judgment result JL Judgment Value LP End of Life LT Lower limit MC manufacturing equipment P1 1st Atmosphere P2 2nd Atmosphere PL forecast line PP intersection SER1 Temperature Sensor SER2 Particle Counter SER3 Humidity Sensor SER4 Air Flow Meter SER5 Wireless Temperature and Humidity Sensor SER21 Barometer SER22 Air flow meter SER23 Barometer SER24 Differential Pressure Gauge SR1 temperature difference SR2 Cleanliness SR3 Humidity difference SR11 Maximum temperature SR12 minimum temperature SR31 Maximum humidity SR32 minimum humidity SRP Pressure Difference SRV wind speed T1 Present time T2 prediction time point

Claims

1. A clean room system installed in a clean room, comprising: A blower that blows air into the clean room; A suction unit that is installed on the blower unit and sucks in the air; a temperature measuring unit that measures a temperature inside the clean room; a cleanliness measuring unit that measures the cleanliness in the clean room; A determination unit that determines whether to blow the air or a blowing amount, which is the amount of the air, based on the temperature and the cleanliness; an air blowing control unit that controls the blowing or stopping of the air blowing unit or the amount of the air blown based on a result of the determination by the determination unit; Including, Dividing the clean room into areas, The determination unit performs a determination for each of the areas, The air blowing control unit controls for each area, The suction unit includes an exhaust fan that sends the sucked air to the blower unit. Clean room system.

2. The clean room further includes a humidity measuring unit that measures humidity in the clean room, The determination unit is The air volume is determined based on the temperature, the cleanliness, and the humidity. The clean room system according to claim 1 .

3. The blower section includes: The air sent to the clean room is sent so as to include a swirling component that rotates in the direction of the air being sent. The clean room system according to claim 1 or 2.

4. The air conditioner further includes an adjustment unit that adjusts a temperature of the air with water based on a result of the determination by the determination unit, The air blowing unit blows the air conditioned by the conditioned unit. The clean room system according to any one of claims 1 to 3.

5. The blower unit has a filter, a differential pressure measuring unit configured to measure a pressure difference between a first atmospheric pressure of the first air blown to the filter by the blower unit and a second atmospheric pressure of the second air blown from the filter into the clean room; a wind speed measuring unit that measures a wind speed of the first air; Further comprising: Determining or predicting the life of the filter based on the air pressure difference and the wind speed. The clean room system according to any one of claims 1 to 4.

6. Recording the square root of the pressure difference divided by the wind speed; When the recorded value is equal to or greater than a threshold, it is determined that the filter has reached the end of its service life, or when a predicted point based on the recorded value is equal to or greater than a threshold, it is predicted that the filter has reached the end of its service life. The clean room system according to claim 5.

7. An air circulation method performed by a clean room system including a blower unit that blows air into a clean room divided into areas, an exhaust fan that is installed above the blower unit and sends the sucked air to the blower unit, and a suction unit that sucks in the air, the method comprising: a temperature measurement procedure in which the clean room system measures a temperature inside the clean room; A clean room system includes a cleanliness measurement procedure for measuring a cleanliness level within the clean room; a determination step in which the clean room system determines, for each of the areas, whether to blow the air or a blowing amount, which is the amount of the air, based on the temperature and the cleanliness; an air blowing control step of controlling, for each of the areas, the air blowing unit to blow or stop the air blowing or to control the air blowing volume of the air based on a result of the determination step; An air circulation method comprising:

Images