X-ray tube, X-ray generator, and method for manufacturing window member

Abstract

Provided are an X-ray tube, an X-ray generator, and a method for manufacturing a window member that can improve the crack resistance of a window member formed in a plate shape from single crystal diamond. [Solution] The X-ray tube 1 comprises a housing 2, an electron gun 3 that emits an electron beam B within the housing 2, a target 4 that generates X-rays R upon incidence of the electron beam B within the housing 2, and a window member 5 that seals an opening 23 in the housing 2 and allows the X-rays R to pass through. The window member 5 is formed into a plate shape from single-crystal diamond. The [100] direction of the single-crystal diamond intersects with the thickness direction of the window member 5 at an angle of less than 45 degrees.

Description

[Technical field]

[0001] The present invention relates to an X-ray tube, an X-ray generating device, and a method for manufacturing a window member. [Background technology]

[0002] There is known an X-ray tube that includes a housing, an electron gun that emits an electron beam within the housing, a target that generates X-rays within the housing by the incidence of the electron beam, and a window member that seals an opening of the housing and allows X-rays to pass through. In such an X-ray tube, the window member is formed into a plate shape using single crystal diamond, and the target may be formed on the inner surface of the window member (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5911323 Summary of the Invention [Problem to be solved by the invention]

[0004] Although a plate-shaped window member made of single crystal diamond has excellent X-ray transmission properties, heat resistance, heat dissipation, etc., it has the problem of being easily cracked at the crystal plane. In particular, in an X-ray inspection device using a small focus X-ray tube, the inspection object is brought close to the window member to increase the magnification ratio, and there is a possibility that the inspection object will come into contact with the window member, so it is extremely important to solve the above problem and improve the crack resistance of the window member.

[0005] An object of the present invention is to provide an X-ray tube, an X-ray generator, and a method for manufacturing a window member that are capable of improving the crack resistance of a window member formed into a plate shape from single crystal diamond. [Means for solving the problem]

[0006] The X-ray tube of the present invention comprises a housing, an electron gun which emits an electron beam within the housing, a target which generates X-rays within the housing by the incidence of the electron beam, and a window member which seals an opening in the housing and allows X-rays to pass through, the window member being formed into a plate-like shape from single crystal diamond, and the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of less than 45 degrees.

[0007] In this X-ray tube, the window member formed in a plate shape from single crystal diamond has a

[0100] direction of the single crystal diamond intersecting with the thickness direction of the window member at an angle of less than 45 degrees. As a result, compared to when the

[0100] direction of the single crystal diamond is parallel to the thickness direction of the window member (i.e., when the (100) face of the single crystal diamond is perpendicular to the thickness direction of the window member), the number of crystal faces that are parallel to the thickness direction of the window member among the multiple crystal faces that the single crystal diamond has is reduced, and as a result, the window member is less likely to crack due to the crystal faces. Therefore, with this X-ray tube, the crack resistance of the window member formed in a plate shape from single crystal diamond can be improved.

[0008] In the X-ray tube of the present invention, the

[0010] direction and the

[0001] direction of the single crystal diamond may intersect at an angle of less than 45 degrees with a plane perpendicular to the thickness direction of the window member. This further reduces the number of crystal faces that are parallel to the thickness direction of the window member among the multiple crystal faces that the single crystal diamond has, and as a result, the window member is even less likely to crack due to the crystal faces. Therefore, the crack resistance of the window member formed into a plate shape by the single crystal diamond can be more reliably improved.

[0009] In the X-ray tube of the present invention, the window member may have a first surface opposite to the inside of the housing, and the

[0100] direction of the single crystal diamond may intersect with a direction perpendicular to the first surface at an angle of less than 45 degrees. This makes it possible to suppress the occurrence of cracks in the window member due to the application of an external force to the first surface of the window member.

[0010] In the X-ray tube of the present invention, the window member is attached to a mounting surface around the opening in the housing, and the

[0100] direction of the single crystal diamond may intersect with a direction perpendicular to the mounting surface at an angle of less than 45 degrees. In this case, too, the crack resistance of the window member formed into a plate shape from the single crystal diamond can be improved.

[0011] In the X-ray tube of the present invention, the window member may have a second surface on the inner side of the housing, and the target may be formed on the second surface. This makes it possible to improve the crack resistance of the window member formed in a plate shape from single crystal diamond in the transmission type X-ray tube.

[0012] In the X-ray tube of the present invention, the

[0100] direction of the single crystal diamond may intersect with the direction of incidence of the electron beam on the target at an angle of less than 45 degrees. In this case as well, the crack resistance of the window member formed into a plate shape from the single crystal diamond can be improved.

[0013] In the X-ray tube of the present invention, the

[0100] direction of the single crystal diamond may intersect with the thickness direction of the window member at an angle of 0.1 to 7 degrees. This improves the crack resistance of the window member formed into a plate shape from single crystal diamond, while making it possible to easily and efficiently extract a window member in which the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of less than 45 degrees, for example, when removing the window member from a single crystal diamond substrate having a (100) plane as its main surface.

[0014] An X-ray generating device of the present invention includes the above-mentioned X-ray tube and a power supply unit that applies a voltage to the electron gun.

[0015] For the reasons described above, this X-ray generating device can improve the crack resistance of the window member formed into a plate shape from single crystal diamond.

[0016] The method for manufacturing a window member of the present invention comprises a first formation step of forming a single crystal diamond substrate having a (100) plane as its main surface by epitaxial growth, and a removal step of removing a plate-shaped window member from the single crystal diamond substrate. In the removal step, the window member is removed from the single crystal diamond substrate so that the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of less than 45 degrees.

[0017] The method for manufacturing a window member of the present invention includes a preparation step of preparing a seed substrate having a main surface that intersects with the (100) plane at an angle of less than 45 degrees; a first formation step of forming a single crystal diamond substrate on the main surface of the seed substrate by epitaxial growth; and a removal step of removing a plate-shaped window member from the single crystal diamond substrate by cutting the single crystal diamond substrate along a direction perpendicular to the thickness direction.

[0018] In these methods for manufacturing a window member, the

[0100] direction of the single crystal diamond in the obtained window member intersects with the thickness direction of the window member at an angle of less than 45 degrees. Therefore, this method for manufacturing a window member can improve the crack resistance of the window member formed into a plate shape from single crystal diamond.

[0019] The method for producing a window member of the present invention may further include a second formation step of forming a target that generates X-rays when an electron beam is incident on one surface of the window member in the thickness direction, thereby obtaining a window member for a transmission type X-ray tube.

[0020] In the method for manufacturing a window member of the present invention, the

[0100] direction of the single crystal diamond may intersect with the thickness direction of the window member at an angle of 0.1 degree or more and 7 degrees or less. This improves the crack resistance of the window member formed into a plate shape from single crystal diamond, and, for example, when removing a window member from a single crystal diamond substrate having a (100) plane as its main surface, it is possible to easily and efficiently remove a window member in which the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of less than 45 degrees. Effect of the Invention

[0021] According to the present invention, it is possible to provide an X-ray tube, an X-ray generator, and a method for manufacturing a window member that can improve the crack resistance of a window member formed in a plate shape from single crystal diamond. [Brief description of the drawings]

[0022] [Figure 1] FIG. 1 is a block diagram of an X-ray generating device according to an embodiment. [Diagram 2] FIG. 2 is a cross-sectional view of the X-ray tube shown in FIG. [Diagram 3] FIG. 3 is a side view of a portion of the window member shown in FIG. 2. [Figure 4] 3A to 3C are side views illustrating a method for manufacturing the window member shown in FIG. 2. [Diagram 5] FIG. 11 is a cross-sectional view of a modified X-ray tube. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals, and duplicated explanations will be omitted. [X-ray generator configuration]

[0024] 1, the X-ray generating device 10 includes an X-ray tube 1 and a power supply unit 11. The X-ray tube 1 and the power supply unit 11 are supported in a case (not shown) made of metal. As an example, the X-ray tube 1 is a small focus X-ray source, and the X-ray generating device 10 is a device used in X-ray nondestructive inspection for magnifying and observing the internal structure of an inspection target.

[0025] 2, the X-ray tube 1 includes a housing 2, an electron gun 3, a target 4, and a window member 5. As described below, the X-ray tube 1 is configured as a sealed transmission type X-ray tube that does not require replacement of parts.

[0026] The housing 2 has a head 21 and a bulb 22. The head 21 is formed of metal in a cylindrical shape with a bottom. The bulb 22 is formed of an insulating material such as glass in a cylindrical shape with a bottom. An opening 22a of the bulb 22 is airtightly joined to an opening 21a of the head 21. In the X-ray tube 1, the center line of the housing 2 is the tube axis A. An opening 23 is formed in the bottom wall portion 21b of the head 21. The opening 23 is located on the tube axis A. When viewed from a direction parallel to the tube axis A, the opening 23 has, for example, a circular shape with the tube axis A as its center line.

[0027] The electron gun 3 emits an electron beam B in the housing 2. The electron gun 3 has a heater 31, a cathode 32, a first grid electrode 33, and a second grid electrode 34. The heater 31, the cathode 32, the first grid electrode 33, and the second grid electrode 34 are arranged on the tube axis A in this order from the bottom wall portion 22b side of the bulb 22. The heater 31 is composed of a filament, and generates heat when electricity is applied. The cathode 32 is heated by the heater 31 and emits electrons. The first grid electrode 33 is formed in a cylindrical shape, and adjusts the amount of electrons emitted from the cathode 32. The second grid electrode 34 is formed in a cylindrical shape, and focuses the electrons that have passed through the first grid electrode 33 on the target 4. The heater 31 , the cathode 32 , the first grid electrode 33 and the second grid electrode 34 are electrically and physically connected to a plurality of lead pins 35 penetrating the bottom wall portion 22 b of the bulb 22 .

[0028] The window member 5 seals the opening 23 of the housing 2. The window member 5 is formed in a plate shape by single crystal diamond. The window member 5 is, for example, in a disk shape with the tube axis A as the center line. The window member 5 has a first surface 51 and a second surface 52. The first surface 51 is a surface on the opposite side to the inside of the housing 2, and the second surface 52 is a surface on the inside side of the housing 2. Each of the first surface 51 and the second surface 52 is, for example, a flat surface perpendicular to the tube axis A. The target 4 is formed on the second surface 52 of the window member 5. The target 4 is, for example, formed in a film shape by tungsten. The target 4 generates X-rays R by the incidence of the electron beam B in the housing 2. In this embodiment, the X-rays R generated in the target 4 are transmitted through the target 4 and the window member 5 and emitted to the outside.

[0029] The window member 5 is attached to a mounting surface 24 around the opening 23 in the housing 2. The mounting surface 24 is, for example, a flat surface perpendicular to the tube axis A, and is formed on the head 21. The window member 5 is hermetically joined to the mounting surface 24 via a joining member (not shown) such as a brazing material. In the X-ray tube 1, the target 4 is electrically connected to the head 21, and the target 4 and the window member 5 are thermally connected to the head 21. As an example, the target 4 is set to a ground potential via the head 21. As an example, heat generated in the target 4 by the incidence of the electron beam B is transferred to the head 21 directly and / or via the window member 5, and is released from the head 21 to a heat dissipation section (not shown). In this embodiment, the housing 2, the target 4, and the window member 5 maintain the internal space of the housing 2 at a high degree of vacuum.

[0030] In the X-ray generator 10 configured as above, a negative voltage is applied to the electron gun 3 by the power supply unit 11 with the potential of the target 4 as a reference. As an example, the power supply unit 11 applies a negative high voltage (e.g., −10 kV to −500 kV) to each part of the electron gun 3 via each lead pin 35 while the target 4 is at ground potential. The electron beam B emitted from the electron gun 3 is focused on the target 4 along the tube axis A. The X-rays R generated in the area of ​​the target 4 irradiated with the electron beam B are focused at the irradiated area and transmitted through the target 4 and the window member 5 to be emitted to the outside. [Window material configuration]

[0031] As shown in Fig. 3, in the window member 5, the <0100> direction of the single crystal diamond intersects with the thickness direction D of the window member 5 at an angle of less than 45 degrees (more preferably, an angle of 0.1 degree or more and 7 degrees or less). In other words, in the window member 5, the (100) plane of the single crystal diamond intersects with a plane perpendicular to the thickness direction D of the window member 5 (for example, a plane parallel to the first surface 51) at an angle of less than 45 degrees. The thickness direction D is, for example, the direction in which the first surface 51 faces the second surface 52. Note that the "intersecting relationship" means an intersecting relationship at an angle greater than 0 degrees.

[0032] In this embodiment, in the window member 5, the

[0010] direction and the

[0001] direction of the single crystal diamond are in a relationship where they intersect with a plane perpendicular to the thickness direction D of the window member 5 (for example, a plane parallel to the first surface 51) at an angle of less than 45 degrees. In other words, in the window member 5, the (010) plane and the (001) plane of the single crystal diamond are in a relationship where they intersect with the thickness direction D of the window member 5 at an angle of less than 45 degrees. As an example, in the window member 5, the

[0100] direction of the single crystal diamond is inclined at an angle of 0.1 degrees or more and 7 degrees or less around an axis parallel to the

[0011] direction and is inclined at an angle of 0.1 degrees or more and 7 degrees or less around an axis parallel to the [0-11] direction with respect to the thickness direction D of the window member 5.

[0033] When the first surface 51 of the window member 5 is taken as a reference, the

[0100] direction of the single crystal diamond in the window member 5 intersects with the direction perpendicular to the first surface 51 at an angle of less than 45 degrees. When the mounting surface 24 around the opening 23 in the housing 2 is taken as a reference, the

[0100] direction of the single crystal diamond in the window member 5 intersects with the direction perpendicular to the mounting surface 24 at an angle of less than 45 degrees. When the electron beam B is incident on the target 4 along the tube axis A (parallel to the tube axis A), the

[0100] direction of the single crystal diamond in the window member 5 intersects with the direction in which the electron beam B is incident on the target 4 at an angle of less than 45 degrees. Note that the window member 5 is not limited to being composed of a single crystal diamond substrate integrally formed as a single substrate, but may be composed of a mosaic single crystal diamond substrate formed by joining a plurality of single crystal diamond members adjacent to each other in the lateral direction to form a single substrate. A window member 5 made of a mosaic single crystal diamond substrate can also have the same properties as a window member 5 made of a single crystal diamond substrate formed integrally as a single substrate by bonding a plurality of single crystal diamond members adjacent to each other while satisfying the above conditions. [Window material manufacturing method]

[0034] As shown in FIG. 4(a), a seed substrate 100 having a (100) plane as a main surface is prepared, and a single crystal diamond substrate 110 having a (100) plane as a main surface is formed by epitaxial growth (for example, CVD method) on the main surface of the seed substrate 100 (first formation step). Then, the window member 5 is taken out from the single crystal diamond substrate 110 so that the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member 5 at an angle of less than 45 degrees (take-out step). As an example, the window member 5 is obtained by cutting out the single crystal diamond substrate 110 by mechanical processing or laser processing and polishing the outer surface. Then, as shown in FIG. 4(b), a target 4 is formed on one surface of the window member 5 in the thickness direction D (second formation step). The formation of the target 4 is performed, for example, by sputtering.

[0035] In addition, a seed substrate 100 having a main surface intersecting with the (100) plane at an angle of less than 45 degrees is prepared (preparation step), a single crystal diamond substrate 110 is formed on the main surface of the seed substrate 100 by epitaxial growth (first formation step), and the window member 5 may be taken out from the single crystal diamond substrate 110 by cutting along a direction perpendicular to the thickness direction of the single crystal diamond substrate 110 (removal step). In this case, the single crystal diamond substrate 110 in which the

[0100] direction of the single crystal diamond intersects with the thickness direction of the single crystal diamond substrate 110 at an angle of less than 45 degrees is formed by epitaxial growth. Therefore, by cutting along a direction perpendicular to the thickness direction of the single crystal diamond substrate 110, a window member 5 in which the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member 5 at an angle of less than 45 degrees can be easily obtained. [Action and Effects]

[0036] In the X-ray tube 1, in the window member 5 formed in a plate shape by single crystal diamond, the

[0100] direction of the single crystal diamond intersects with the thickness direction D of the window member 5 at an angle of less than 45 degrees. As a result, the number of crystal faces parallel to the thickness direction D of the window member 5 for the multiple types of crystal faces (e.g., (0-11) face, (011) face, etc.) possessed by the single crystal diamond is smaller than when the

[0100] direction of the single crystal diamond is parallel to the thickness direction D of the window member 5 (i.e., when the (100) face of the single crystal diamond is perpendicular to the thickness direction D of the window member 5), and as a result, the window member 5 is less likely to crack due to the crystal faces. Therefore, according to the X-ray tube 1 and the X-ray generating device 10 equipped with the X-ray tube 1, the crack resistance of the window member 5 formed in a plate shape by single crystal diamond can be improved.

[0037] Furthermore, when the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member 5 at an angle of 0.1 degree or more and 7 degrees or less, the crack resistance of the window member 5 formed in a plate shape from the single crystal diamond is improved, and when removing the window member 5 from a single crystal diamond substrate 110 having a (100) plane as its main surface, for example, the window member in which the

[0100] direction of the single crystal diamond intersects with the thickness direction of the window member 5 at an angle of less than 45 degrees can be easily and efficiently removed.

[0038] In the X-ray tube 1, in the window member 5, the

[0010] direction and the

[0001] direction of the single crystal diamond intersect at an angle of less than 45 degrees with a plane perpendicular to the thickness direction D of the window member 5. This further reduces the number of crystal planes parallel to the thickness direction D of the window member 5 among the multiple crystal planes that the single crystal diamond has (at least the (0-11) plane and the (011) plane are not parallel to the thickness direction D of the window member 5), and as a result, the window member 5 is even less likely to crack due to the crystal planes. Therefore, the crack resistance of the window member 5 formed into a plate shape from single crystal diamond can be more reliably improved.

[0039] In the X-ray tube 1, the

[0100] direction of the single crystal diamond in the window member 5 intersects with the direction perpendicular to the first surface 51 of the window member 5 at an angle of less than 45 degrees. This makes it possible to suppress the occurrence of cracks in the window member 5 due to the application of an external force to the first surface 51 of the window member 5.

[0040] In the X-ray tube 1, the

[0100] direction of the single crystal diamond in the window member 5 intersects at an angle of less than 45 degrees with the direction perpendicular to the mounting surface 24 around the opening 23 in the housing 2. Even in this case, it is possible to improve the crack resistance of the window member 5 formed into a plate shape from the single crystal diamond.

[0041] In the X-ray tube 1, the target 4 is formed on the second surface 52 of the window member 5. This makes it possible to improve the crack resistance of the window member 5, which is made of single crystal diamond and has a plate shape, in the transmission type X-ray tube.

[0042] In the X-ray tube 1, the

[0100] direction of the single crystal diamond in the window member 5 intersects with the direction in which the electron beam B is incident on the target 4 at an angle of less than 45 degrees. Even in this case, the crack resistance of the window member 5 formed into a plate shape from single crystal diamond can be improved.

[0043] In the manufacturing method of the window member 5, the

[0100] direction of the single crystal diamond intersects with the thickness direction D of the window member 5 at an angle of less than 45 degrees in the obtained window member 5. Therefore, according to the manufacturing method of the window member 5, it is possible to improve the crack resistance of the window member 5 formed into a plate shape from single crystal diamond.

[0044] In the method for manufacturing the window member 5, the target 4 is formed on one surface of the window member 5 in the thickness direction D. In this manner, the window member 5 for a transmission type X-ray tube can be obtained. [Variations]

[0045] The present invention is not limited to the above embodiment. The X-ray tube 1 may be configured as a sealed reflection type X-ray tube. As shown in FIG. 5, the sealed reflection type X-ray tube 1 is mainly different from the sealed transmission type X-ray tube 1 in that the electron gun 3 is arranged in a housing part 6 on the side of the head 21, and the target 4 is supported by a support member 7 instead of a window member 5. The housing part 6 has a side tube 61 and a stem 62. The side tube 61 is joined to the side wall part of the head 21 so that one opening 61a of the side tube 61 faces the inside of the head 21. The stem 62 seals the other opening 61b of the side tube 61. The heater 31, the cathode 32, the first grid electrode 33, and the second grid electrode 34 are arranged in this order in the side tube 61 from the stem 62 side. A plurality of lead pins 35 penetrate the stem 62. The support member 7 penetrates the bottom wall part 22b of the bulb 22. The target 4 is fixed to a tip portion 71 of a support member 7 in a state inclined on the tube axis A so as to face both the electron gun 3 and the window member 5 .

[0046] In an X-ray generator 10 including the sealed reflection type X-ray tube 1 configured as described above, as an example, with the head 21 and side tube 61 at ground potential, a positive voltage is applied to the target 4 by the power supply unit 11 via the support member 7, and a negative voltage is applied to each part of the electron gun 3 by the power supply unit 11 via multiple lead pins 35. The electron beam B emitted from the electron gun 3 is focused on the target 4 along a direction perpendicular to the tube axis A. X-rays R generated in the area of ​​the target 4 irradiated with the electron beam B are emitted to the outside through the window member 5, with the irradiation area as a focus.

[0047] The X-ray tube 1 may be configured as an open transmission type X-ray tube or an open reflection type X-ray tube. The open transmission type or open reflection type X-ray tube 1 is an X-ray tube in which the housing 2 is configured to be openable, and parts (for example, the window member 5 and each part of the electron gun 3) can be replaced. In an X-ray generating device 10 including an open transmission type or open reflection type X-ray tube 1, the degree of vacuum in the space inside the housing 2 is increased by a vacuum pump.

[0048] In a sealed transmission type or open transmission type X-ray tube 1, the target 4 may be formed on at least a region of the second surface 52 of the window member 5 that is exposed to the opening 23. In a sealed transmission type or open transmission type X-ray tube 1, the target 4 may be formed on the second surface 52 of the window member 5 via another film.

[0049] In the manufacturing method of the window member 5 for a sealed reflection type X-ray tube or an open reflection type X-ray tube, the step of forming the target 4 on one surface of the window member 5 in the thickness direction D is not necessary. [Explanation of symbols]

[0050] Reference Signs List 1...X-ray tube, 2...housing, 3...electron gun, 4...target, 5...window member, 10...X-ray generator, 11...power supply unit, 23...opening, 24...mounting surface, 51...first surface, 52...second surface, 110...single crystal diamond substrate, B...electron beam, R...X-ray.

Claims

1. A housing and an electron gun configured to emit an electron beam within the housing; a target that generates X-rays in response to the electron beam being incident thereon; a window member that seals the opening of the housing and allows the X-rays to pass through, the window member is formed in a plate shape from single crystal diamond, An X-ray tube, wherein the [100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of less than 45 degrees.

2. the window member has a first surface opposite an interior of the housing; 2. The x-ray tube of claim 1, wherein the [100] direction of the single crystal diamond is in an angle of less than 45 degrees with respect to a direction normal to the first surface.

3. the window member is attached to a mounting surface of the housing around the opening, 3. The X-ray tube according to claim 1, wherein the [100] direction of the single crystal diamond intersects with a direction perpendicular to the mounting surface at an angle of less than 45 degrees.

4. the window member has a second surface on an inner side of the housing; The X-ray tube according to any one of claims 1 to 3, wherein the target is formed on the second surface.

5. 5. The X-ray tube of claim 4, wherein the [100] direction of the single crystal diamond intersects with a direction of incidence of the electron beam on the target at an angle of less than 45 degrees.

6. 6. The X-ray tube according to claim 1, wherein the [100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of 0.1 degrees or more and 7 degrees or less.

7. An X-ray tube as described in any one of claims 1 to 6, wherein the window member is composed of a mosaic single crystal diamond substrate formed by bonding a plurality of single crystal diamond members adjacent to each other.

8. An X-ray tube according to any one of claims 1 to 7; a power supply unit that applies a voltage to the electron gun.

9. a step of preparing a seed substrate having a primary surface that intersects with a (100) plane at an angle of less than 45 degrees; a first formation step of forming a single crystal diamond substrate on the main surface of the seed substrate by epitaxial growth; a step of removing a plate-shaped window member from the single crystal diamond substrate by cutting the single crystal diamond substrate along a direction perpendicular to a thickness direction of the single crystal diamond substrate; a second formation step of forming a target that generates X-rays when an electron beam is incident on one surface of the window member in the thickness direction.

10. The method for manufacturing a window member according to claim 9 , wherein the [100] direction of the single crystal diamond intersects with the thickness direction of the window member at an angle of 0.1 degree or more and 7 degrees or less.

Images