Segmented multi-channel back-illuminated solid-state detector with through-holes for detecting secondary and backscattered electrons

Abstract

It is a back-illuminated segmented detector. The detector can collect and distinguish between secondary and backscattered electrons. The detector has a through hole for the passage of the primary electron beam. After striking the sample, the reflected secondary and backscattered electrons are collected via a vertical structure with a P+ / P- / N+ or N+ / N- / P+ composition depleted through the thickness of the device. The active area of ​​the device is segmented using field isolation insulators placed in front of the device.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 63 / 208,508, filed Jun. 9, 2021, by John Gerling et al., which is incorporated by reference herein in its entirety for all purposes. "Technology field"

[0002] The present disclosure relates generally to the field of wafer inspection systems and, more particularly, to miniature electron beam column detectors. [Background technology]

[0003] Generally, the semiconductor manufacturing industry uses highly complex techniques to fabricate integrated circuits using semiconductor materials patterned in layers on a substrate such as silicon. Due to the increasing scale of circuit integration and the miniaturization of semiconductor devices, the manufactured devices are becoming more and more sensitive to defects, i.e., the defects that can cause device failure are becoming smaller and smaller. Devices generally need to be free of defects before being shipped to end users or customers.

[0004] Therefore, it is becoming increasingly important to be able to detect smaller and smaller defects. The type, number and signature of defects found by the inspection system (or the inspector) contribute to the ramp-up of the manufacturing process established in the R&D phase in semiconductor manufacturing, and provide valuable information to ensure that the process window identified in the ramp-up phase can be transferred to high volume manufacturing (HVM) and that the day-to-day operations in HVM are stable and under control.

[0005] One method for detecting defects is to use a scanning electron microscope (SEM). An SEM can contain multiple electron beam columns with built-in detectors. As semiconductor devices shrink, the size of detectable defects becomes smaller, making detection extremely difficult using traditional optical methods because the wavelength of light is the limiting factor. One method for detecting such defects is to use an electron beam, where the wavelength of the electron beam can be much smaller than the wavelength of light. However, progress in terms of throughput has been slow, and single-column electron beam inspection of a wafer can take days or even weeks. To solve this problem, miniaturized multi-column or multi-beam SEMs allow for massively parallel inspection of wafers. Currently, state-of-the-art technology allows for small electron beam columns as small as one inch in height. However, the columns themselves are so small that there is not much space to install standard detectors. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent No. 8,698,094B1 [Patent Document 2] U.S. Patent No. 8,455,838B2 [Patent Document 3] US Patent Application Publication No. 2013 / 0088245 [Patent Document 4] U.S. Patent No. 8,997,258B2 Summary of the Invention [Problem to be solved by the invention]

[0007] Typically, separate detectors are used to detect secondary electrons (SE) and backscattered electrons (BSE), but due to the limited space in small electron beam columns, new and improved detectors are needed. [Means for solving the problem]

[0008] The following presents a simplified summary of the disclosure in order to provide a basic understanding of certain embodiments of the disclosure. This summary is not an extensive overview of the disclosure, nor does it identify key / critical elements of the disclosure or delineate the scope of the disclosure. Its sole purpose is to present some concepts disclosed herein in a simplified form as a prelude to the more detailed description presented later.

[0009] One aspect of the disclosure is directed to a solid-state device. The solid-state device includes a vertical structure. The vertical structure includes an N+ / P- / P+ or P+ / N- / N+ structure for full depletion through the thickness of the device. The N+ / P- / P+ or P+ / N- / N+ structure includes an N+ or P+ junction formed on the front side of the device, a P- or N- intrinsic layer in the middle, and a P+ or N+ layer formed on the back side of the device. The device also includes an active region for collecting secondary electrons (SE) and backscattered electrons (BSE). The active region is divided into multiple channels to separate the detection of secondary electrons and backscattered electrons. The device has a through hole in the center to allow a primary beam to pass through the device. The primary beam enters the through hole on the front side of the device.

[0010] Another aspect of the disclosure is directed to a system. The system includes an electron source, a ceramic substrate, and a device bonded to the ceramic substrate. The device includes a vertical structure. The vertical structure includes an N+ / P- / P+ or P+ / N- / N+ structure for full depletion through the thickness of the device. The N+ / P- / P+ or P+ / N- / N+ structure includes an N+ or P+ junction formed on the front side of the device, a P- or N- intrinsic layer in the middle, and a P+ or N+ layer formed on the back side of the device. The device also includes an active region for collecting secondary electrons (SE) and backscattered electrons (BSE). The active region is divided into multiple channels to separate the detection of secondary electrons and backscattered electrons. The device includes a through hole in the center to allow a primary beam to pass through the device. The primary beam is incident on the through hole on the front side of the device.

[0011] Yet another aspect of the present disclosure is directed to a method for determining defects on a wafer. The method includes irradiating the wafer with a primary electron beam. The method then collects secondary electrons (SE) and backscattered electrons (BSE) on a solid-state device. The device includes a vertical structure. The vertical structure includes an N+ / P- / P+ or P+ / N- / N+ structure for full depletion through the thickness of the device. The N+ / P- / P+ or P+ / N- / N+ structure includes an N+ or P+ junction formed on the front side of the device, a P- or N- intrinsic layer in the middle, and a P+ or N+ layer formed on the back side of the device. The device also includes an active area for collecting secondary electrons (SE) and backscattered electrons (BSE). To separate the detection of secondary electrons and backscattered electrons, the active area is divided into multiple channels. A through hole is provided in the center of the device to allow the primary beam to pass through the device. The primary beam is incident on the through hole on the front side of the device.

[0012] In some embodiments, the segmentation appears on the front side of the device, and the SEs and BSEs are collected on the back side of the device. In some embodiments, the front side of the device also includes metal contacts to maximize the area available for collection of the SEs and BSEs. In some embodiments, the P+ layer includes boron or another acceptor dopant. In some embodiments, the P+ layer includes an additional conductive coating. The device further includes a post-lens element for controlling the SE and BSE signals on the device. In some embodiments, the segmented channel consists of a circular central channel surrounded by four quadrants of equal area, each of the four quadrants having the same area as the circular central channel.

[0013] These and other aspects of the present disclosure are further described below with reference to the figures. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a cross-sectional view of a detector device according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a diagram illustrating an example layout of an active area of ​​a device according to an embodiment of the present disclosure. [Figure 3A] FIG. 3A is an exemplary spot diagram of a BSE acquisition using a segmented detector according to an embodiment of the present disclosure. [Figure 3B] FIG. 3B is an exemplary spot diagram of an SE acquisition using a segmented detector according to an embodiment of the present disclosure. [Figure 4A] FIG. 4A illustrates an exemplary device assembly according to an embodiment of the present disclosure. [Figure 4B] FIG. 4B illustrates an exemplary device assembly according to an embodiment of the present disclosure. [Figure 4C] FIG. 4C illustrates an exemplary device assembly according to an embodiment of the present disclosure. [Figure 5A] FIG. 5A shows an example of an exemplary detection system having a miniature column according to an embodiment of the present disclosure. [Figure 5B] FIG. 5B shows an example of an exemplary detection system having a miniature column according to an embodiment of the present disclosure. [Figure 5C] FIG. 5C illustrates an example of an exemplary detection system having a miniature column according to an embodiment of the present disclosure. [Figure 6A] 1 illustrates an example of defect capture using signal mixing / differential according to an embodiment of the present disclosure. [Figure 6B] 1 illustrates an example of defect capture using signal mixing / differential according to an embodiment of the present disclosure. [Figure 6C] 1 illustrates an example of defect capture using signal mixing / differential according to an embodiment of the present disclosure. [Figure 6D] 1 illustrates an example of defect capture using signal mixing / differential according to an embodiment of the present disclosure. [Figure 7] FIG. 2 illustrates how different types of electrons are reflected from a sample, according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure. The present disclosure may be practiced without some or all of these specific details. In other instances, well-known process operations have not been described in detail in order not to unnecessarily obscure the present disclosure. While the present disclosure will be described in conjunction with certain embodiments, it will be understood that it is not intended to limit the present disclosure to the embodiments.

[0016] Wafer defects can be detected using high-resolution distributed probe inspection tools in the form of SEMs with multiple distributed miniaturized columns, multiple atomic force microscope (AFM) probes, near-field microwave tools with multiple probes, ion beam probes, or multiple near-field optical probes. Suitable miniaturized electron beam column technology is further described in U.S. Pat. Nos. 8,698,094 B1 and 8,455,838 B2, which are incorporated by reference herein for all purposes. Effective high-resolution near-field microwave probe technology is described in U.S. Patent Application Publication No. 2013 / 0088245, which is incorporated by reference herein for all purposes. Example high-resolution AFM probe configurations are described in U.S. Pat. No. 8,997,258 B2, which is incorporated by reference herein for all purposes. Small electron beam columns do not have enough space for conventional electron beam detectors to operate. Therefore, improved detectors must be used with small electron beam columns.

[0017] In conventional electron beam detectors, the anode and cathode contacts are located on the active or illuminated side of the device. However, this has several drawbacks. For example, when the anode and cathode contacts are located on the active or illuminated side of the device, charge carriers flow laterally, resulting in reduced collection efficiency due to the contacts and isolation regions occupying the active area of ​​the device.

[0018] In addition, conventional segmented detectors are segmented on the active area side or the irradiation side, but this adds an insulator between the segments, which reduces the collection efficiency of the detector.

[0019] Also, conventional electron beam detection devices either use specially designed metal shields to cover the exposed insulators in the active area or simply leave the insulators exposed. However, the insulators exposed on the active area side or on the irradiation side can become charged and damage the device or affect the electron beam passing through the device. Therefore, conventional detector devices require additional shielding to mitigate charging concerns. For more information on shielding, please see U.S. Patent 9,418,819.

[0020] Additionally, conventional detector devices typically split the secondary electron (SE) and backscattered electron (BSE) detection functions into separate, physically distinct detectors, such as one detector for SE detection and one detector for BSE detection. This can become problematic as electron beam columns become smaller, as space becomes limited and it becomes difficult to add additional electron filtering optics.

[0021] Considering the problems of conventional detector devices, some of which are presented above, there is a need for an improved detector device that allows for simultaneous collection and discrimination of SE and BSE signals in a small form factor. The techniques and mechanisms described in this disclosure provide for simultaneous collection and discrimination of SE and BSE signals in a single detector. Additionally, the techniques and mechanisms described herein provide exemplary packaging approaches, and exemplary system implementations, the details of which are described below with reference to the following figures.

[0022] 1 is a diagram illustrating a cross-section of a detector device according to an embodiment of the present disclosure. In some embodiments, the device 100 is a segmented, multi-channel, back-illuminated, solid-state device with through-holes 130 for simultaneous detection of secondary and backscattered electron signals 122.

[0023] In some embodiments, the device 100 includes a vertical structure 112 that includes an N+ / P- / P+ structure for full depletion through the thickness of the device. In some embodiments, the device 100 is designed for backside illumination, which means that the primary electron beam 108 is emitted from an electron source and passes through a through hole 130 to hit a sample (e.g., a wafer). After the primary electron beam 108 hits the sample, the SE and BSE 122 reflect back towards the device 100 and hit the backside of the device 100, first hitting the P+ layer 106.

[0024] In other embodiments, device 100 includes a vertical structure 112 that includes a P+ / N- / N+ structure for front side illumination with different electrical performance. The main difference is that the cathode region has patterned insulator features separating the segments, which may reduce collection efficiency. In general, N-channel devices have high carrier mobility due to electrons being the majority carrier, while P-channel devices have low carrier mobility due to holes being the majority carrier. There are trade-offs between N-channel and P-channel devices in response time due to carrier mobility, bias voltage, depletion width, radiation hardness, etc., but either type can work in device 100.

[0025] In some embodiments, the P+ layer 106 is also in contact with a metal contact 110 on the backside, or illuminated, side of the device 100. In some embodiments, the P+ layer 106 includes boron or another acceptor dopant and may have a graded doping level, with the top surface being much more heavily doped toward the bottom. In some embodiments, the P+ layer 106 is formed by vapor deposition, such as atomic layer deposition, followed by a thermal anneal to form a shallow implant without leaving a native oxide on the sensitive surface.

[0026] In some embodiments, the P+ layer 106 also includes a conductive coating, e.g., 1-4 nm of oxide (such as aluminum oxide) or other thin film, to protect the layer 106 but still allow electrons to pass through. In some embodiments, this conductive coating is an optimization for compact e-beam columns because the electrons in compact e-beam columns are low energy, which means that the SEs and BSEs are also low energy. For the detector to pick up the SE and BSE signals, the electrons need to penetrate through the P+ layer 106 into the depletion region, i.e., the intrinsic P- layer 114, where the electron-hole pairs are collected and read as a signal. When electrons of sufficient energy strike the diode, electron-hole pairs are formed. When absorption occurs in the depletion region, these electron-holes are swept out of the junction by the built-in electric field of the depletion region. The holes move to the anode and the electrons to the cathode, generating a current signal. Some low energy SEs and BSEs do not penetrate the P+ layer 106 and are trapped. The trapped charges due to ionizing radiation are holes or electrons. These can be removed by providing a conductive path for transport to the metal contact 110, e.g., a conductive path or coating. However, if the surface of the P+ layer 106 is an insulator, the trapped electrons can begin to charge the insulator and damage the device or affect proper electron collection. In some embodiments, the conductive coating can be a thin layer of boron, e.g., 2 nm, which can passivate the device and also provide a conductive surface.

[0027] In some embodiments, the metal contact scheme to the P+ layer 106 is formed as a thin grid-like layer in the case of oxide passivation, or is already present as metal contacts 110 at the periphery of the device in the case of conductive surfaces.

[0028] In some embodiments, the device active area of ​​device 100 may be divided into different channels to distinguish between SE and BSE signals. In some embodiments, each channel is configured to have equal area for equal capacitance. In such embodiments, ensuring equal capacitance allows every channel to have an equal or very similar response to the other channels in order to optimize electronic readout via channel readouts 116 and 118. In some embodiments, this is because the signal readout is performed via amplifier circuitry located directly adjacent to the detector device to minimize noise.

[0029] In some embodiments, an energy filter (e.g., a grid electrode) can be placed in front of the detection device. In such embodiments, the energy filter can also help separate the SE from the BSE signal.

[0030] According to various embodiments, next to the P+ layer 106 is a lightly doped P- intrinsic layer 114 that forms the bulk of the device for full depletion. As described above, the device 100 is configured such that an incoming energetic electron penetrating the P+ layer 106 ionizes one more lattice atom in the P- intrinsic layer 114, thereby generating multiple electron-hole pairs leading to device gain. The electron-hole pairs are then collected, thereby detecting a signal. In some embodiments, the thickness of the P- intrinsic layer 114 is thinned to optimize carrier transit time or device response (signal rise time and bandwidth) while maintaining flatness and handling requirements.

[0031] In some embodiments, device 100 can support and operate in a fully depleted mode, where the depletion layer, or P intrinsic layer 114, extends to the backside of the device. In some embodiments, the bias voltage (Vbias) 120 required to achieve this state must not cause breakdown anywhere else in the device.

[0032] According to various embodiments, device 100 also includes N+ junctions 126 and 128 and metal contacts 106 and 108 formed on the front side of device 100. In some embodiments, forming N+ junctions 126 and 128 and metal contacts 106 and 108 on the front side can maximize the area available for backside, or illuminated side, SE and BSE collection due to improved collection efficiency.

[0033] In some embodiments, N+ junctions 126 and 128 are separated by insulator 102, which is the dead area between the segments. In some embodiments, insulator 104 separates N+ junction 128 and through hole 130. In some embodiments, insulator 104 represents the dead zone of the through hole. In some embodiments, the dead zone should be minimized for efficiency. In some embodiments, insulators 102 and 104 are field oxides.

[0034] In some embodiments, since the primary beam 108 passes through the through hole 130, the sidewall 124 of the through hole 130 needs to be coated and grounded to prevent the sidewall 124 from affecting the primary electron beam 108. In some embodiments, the sidewall 124 includes a metal inserted into the sidewall. In some embodiments, the metal of the sidewall is a metal that does not oxidize, such as platinum, so that the metal does not form an insulating surface layer and become charged as the primary beam 108 passes through the through hole 108 and affect the primary beam 108.

[0035] In some embodiments, the N+ junctions 126 and 128 are separated by an insulator 102 to partition the active area of ​​the device 100. As mentioned above, the active area is segmented to distinguish between SE and BSE signals. In some embodiments, the segmentation is formed on the front side to maximize backside illumination. This is because the field isolation insulators 102 and 104, in contrast to frontside illuminated devices, are not exposed to reflected SE and BSE and therefore do not charge up and damage the device or significantly affect the electron beam. More details regarding segmented detectors are provided below.

[0036] FIG. 2 illustrates an example layout of a device active area according to an embodiment of the present disclosure. More specifically, FIG. 2 illustrates a top-down view of the front side of the device 100. In some embodiments, the active area 200 includes multiple channels segmented by field isolation insulators 216. In some embodiments, the insulators 216 represent dead zones in the device. In some embodiments, in the center of the active area 200 is a through hole 214 for the primary beam to pass through. In some embodiments, the through hole 214 is a through hole dead zone 212, which may or may not have a shield surrounding the sidewalls of the through hole 214. In some embodiments, the through hole 214 and the through hole dead zone 212 are located in the center of a center channel 210, labeled channel 0. In some embodiments, surrounding the center channel 210 are outer channels 202, 204, 206, and 208, labeled channels 1, 2, 3, and 4, respectively. As mentioned above, in some embodiments, each channel is separated by a dead zone insulator for electric field isolation.

[0037] As mentioned above, segmentation of the active area 200 is performed on the front side of the device (the side facing the primary beam). This improves the collection efficiency of SE and BSE on the back side (the illumination area facing the sample and the incident SE or BSE). Figures 3A-3B show how a segmented detector distinguishes between SE and BSE signals.

[0038] 3A illustrates an exemplary spot diagram 300 of a BSE acquisition using a segmented detector according to an embodiment of the present disclosure. As shown in FIG. 3A, the BSE signal 304 is evenly spread across the spot diagram 300. Thus, the BSE signal is fairly evenly spread across all five channels.

[0039] 3B shows an exemplary spot diagram of SE collection using a segmented detector according to an embodiment of the present disclosure. As shown in FIG. 3B, SE collection 308 occurs primarily in the center channel of the spot diagram 300, which is channel 0. This distinction is important because it allows an operator of the electron beam column system to select the optimal segment (or channel) for optimal imaging of the sample or wafer.

[0040] In some embodiments, segmentation and multi-channel details are mutually exclusive - i.e., multiple segments can be combined to form independent detection channels. For example, channels can be combined and mixed in appropriate ratios for optimal imaging quality. Furthermore, channels can be raw signals for SE, e.g., Ch0 (physical examination), or BSE, e.g., Ch1, 2, 3, and 4. In some embodiments, channels can be mixed for topographic imaging, e.g., (Ch1+Ch2)-(Ch3+Ch4). In some embodiments, each channel segment can be further segmented to achieve angular information.

[0041] 4A-4C show examples of device assemblies 400, 450, and 470 according to embodiments of the present disclosure. FIG. 4A includes a device assembly 400 showing a back-illuminated detector 402 attached to a substrate 414. In some embodiments, the substrate 414 is a ceramic substrate. Some examples of ceramic substrates include aluminum oxide (Al2O3), aluminum nitride (AlN), and quartz. Ceramic substrates are commonly used for thick film applications where conductors are silk screened or deposited and patterned by other means. According to various embodiments, different substrate materials are used depending on the mechanical, thermal, or electrical properties required for the application. In some embodiments, low temperature co-fired ceramics (LTCC), which are typically ceramic particles (aluminum nitride, alumina, or silicon nitride powder) mixed with a polymer binder to low sintering temperatures, e.g., below 1000° C., enable a multilayer approach in integrating passive components, e.g., resistors, capacitors, inductors, and conductive traces. In some embodiments, high temperature co-fired ceramics (HTCC) can be used in a similar manner to LTCC, except that the sintering temperature is higher, e.g., about 1600°C. As shown in FIG. 4A, the back (bottom) side of the detector 402 is free of segmentation. Additionally, cathode contacts 422 and 424 are also on the front side, and the anode contact 420, which is metal, is located on the back side. In some embodiments, wire bonds 408 are bonded to each contact on the front side of the detector 402.

[0042] In some embodiments, the device 402 may be a bare die mounted on a ceramic substrate 414 with substrate holes 426 for low noise, with readout electronics 434 adjacent to the detector 402 and connected through a metal layer 410. This minimizes parasitic capacitance and electronic crosstalk (EMI). In some embodiments, the capacitance and resistance (series and parallel) of the device 402 may be designed to match the bandwidth and input capacitance requirements of the preamplifier electronics. In some embodiments, the ceramic substrate 414 includes a metal layer 432 covering exposed areas of the dielectric to mitigate electronic charging.

[0043] As shown in FIG. 4B, in some embodiments, the assembly 450 includes a detector 402, which may be mounted to a subcarrier (ceramic, LTCC or similar) substrate 438 prior to mounting to the substrate 414 to facilitate assembly. In some embodiments, this includes wire bonding, ball solder bonding, or underfilling of contacts prior to mounting to the final substrate 414. In some embodiments, the carrier 438 (ceramic, LTCC or similar) may also have metallization 432 in selected areas, such as bores, undersides, etc., to mitigate e-beam charging of the dielectric. In some embodiments, the subcarrier substrate 438 may be used to separate the assembly and integration.

[0044] 4C shows an assembly 470 that is similar to assembly 450, except that the readout electronics 434 are disposed on the substrate 414 instead of the subcarrier substrate 438. In some embodiments, the readout electronics 434 are on the substrate 414 instead of the subcarrier 438 may be due to size constraints of the subcarrier 438.

[0045] In some embodiments, the device 402 can be fabricated on a ceramic substrate with a recess to minimize the loop height of the wire bonds 408 or to allow for alternative methods of contacting the cathode, such as mechanical clips, spring-loaded clamps, screw-down clamps, or other methods requiring a planar or near-planar surface.

[0046] In some embodiments, the package can be used to mount other devices, active or passive, that improve the performance of the detector or the overall device performance, such as differential pumping apertures, additional amplifiers, electrodes for electron energy filtering, or noise suppression devices.

[0047] In some embodiments, multi-layer packaging such as LTCC or AlN allows for embedded interconnects and device wiring such as heaters, resistors, and capacitors to enhance detector functionality, simplify detector design, or improve device performance such as controlled impedances such as 50 Ω and matched path lengths.

[0048] According to various embodiments, a through-hole 432, or patterned fiducials on the device, can be used for optical registration to facilitate precise alignment. In some embodiments, the through-hole 432 is located at or near the center of the device 402 so that the primary beam 434 passes through and reflects back the SEs and BSEs 428. In some embodiments, the through-hole 432 may be located off-center. In some embodiments, multiple through-holes 432 may be provided, e.g., for multi-beam applications.

[0049] In some embodiments, the through holes 432 can have any one of a variety of shapes or etch profiles, such as straight, tapered, or stepped. In some embodiments, the through holes 432 can have a conductive coating on the sidewalls, such as a metal or impurity doping to mitigate charging. In some embodiments, the through holes 432 can have a shield inserted in place of a protective coating.

[0050] Figure 5A illustrates an exemplary detection system 500 having a compact electron beam column according to an embodiment of the present disclosure. Figure 5B illustrates an example of a detection system 502 with an alternative compact electron beam column according to an embodiment of the present disclosure. Figure 5C illustrates yet another example of an electron beam column detection system 540.

[0051] In some embodiments, the detector 514 is positioned in the path of the primary beam 532 on-axis within the electron beam column. In some embodiments, the primary beam 532 is emitted from an electron source 504. In some embodiments, the source 504 is an electron emitter. In some embodiments, the anode 506 is energized with a high voltage, which creates an electric field, to extract electrons from the electron source 504. In some embodiments, below the anode 506 is an electrostatic focusing lens 508 that focuses the beam 532 into a limiting aperture 510. In some embodiments, the limiting aperture 510 defines an acceptance angle at the source. In some embodiments, the limiting aperture 510 filters the beam 532 to the order of tens of microns.

[0052] In some embodiments, the primary beam 532 then passes through a through hole in the detector 514. In some embodiments, the primary beam 532 then passes through scan coils or deflectors 516 on its way to the sample 530, e.g., a wafer. In such embodiments, these scan coils or deflectors 516 raster scan the primary beam 532 over the sample 532. In some embodiments, an objective lens 518 focuses the primary beam 532 onto the sample 530. In some embodiments, after the primary beam 532 is raster scanned over the sample 530, the electrons are reflected as secondary / backscattered electrons 534 and diffuse back along the primary beam path towards the detector 514.

[0053] In some embodiments, the SE and BSE 534 impinge on the detector 514 at different locations and signals of various intensities are captured depending on where the primary beam 532 raster scans the sample. In some embodiments, the configuration of the SE and BSE signals on the detector 514 can be adjusted depending on the working distance of the sample 530 from the detector 514 and other operating conditions such as landing energy or focus. In some embodiments, the readout of the detector signal is via an amplification circuit directly adjacent to the detector to minimize noise.

[0054] As shown in FIG. 5B, in some embodiments, the detection system 502 includes a post-lens element 520 to control the SE and BSE signals on the detector 514. In some embodiments, by adjusting the distance of the sample to the bottom of the detection system (the "working distance") and the voltage on the post-lens element 520, the system can control the ratio of the SE and BSE signals to focus the detector and collection efficiency. This allows the operator to obtain images that are primarily SE, primarily BSE, or a combination of both to optimize image quality specific to the sample being imaged. In some embodiments, the working distance is defined as the distance from the sample 530 to the objective lens 518. In other embodiments, the working distance is defined as the distance from the sample 530 to the post-lens element 520. In some embodiments, the SE and BSE signals can still be adjusted by changing only the working distance. However, in some embodiments, in conjunction with changing the working distance, the post-lens element 520 facilitates manipulation of the SE and BSE ratio.

[0055] 5C shows yet another example of an electron beam column, detection system 540. In some embodiments, detection system 540 has all the same elements as system 500, except that the detector is split into two separate detectors 514A and 514B. Furthermore, detectors 514A and 514B are placed after the objective lens 518. In some embodiments, detector 514A detects BSEs and detector 514B detects SEs. In some embodiments, detector 514B uses a strong electric field to push low energy SEs off to the side. In some embodiments, placing the detector after the objective lens has some disadvantages, including a shorter working distance and a higher sensitivity of the detector to contamination (e.g., outgassing, sublimation, evaporation).

[0056] 6A and 6B show examples of defect capture using signal mixing / differential according to embodiments of the present disclosure. FIG. 6A displays a defect capture 602 of a mix of SE+BSE signals juxtaposed with a defect capture 622 of only the BSE signal. As seen in FIG. 6A, the SE+BSE defect capture 602 displays defects 604, 606, and 608. However, the BSE-only defect capture 622 shows the same three defects plus additional defects 610, 612, 614, and 616. Thus, in the particular example of FIG. 6A, the BSE-only image is better at finding the defects. In some embodiments, the BSE-only image is better for both line opens (FIG. 6C, line open at 654) and line bridges (FIG. 6D, line bridge at 658).

[0057] FIG 6B shows a defect capture 632 of an SE-only signal side-by-side with a defect capture 642 of a BSE-only signal. As can be seen in FIG 6B, the SE-only defect capture 632 shows a defect 636. However, the BSE-only defect capture 642 shows no defect. Thus, in the particular example of FIG 6B, the SE-only image is better suited to finding the defect. In some embodiments, the SE-only image is better suited to finding a contact open.

[0058] FIG. 7 shows how different types of electrons are reflected from a sample. FIG. 7 shows a primary electron beam 702 hitting a sample 700. After hitting the sample, several different types of illuminating light are reflected and provide different information. For example, Auger electrons 724 provide atomic composition information of the surface. Characteristic X-rays 722 give atomic composition of the thickness, and cathodoluminescence 720 gives information of the electronic state. Some of the electrons that penetrate to the other side of the sample are transmitted 712 or scattered in multiple directions 714 (incoherent elastic scattering), 718 (inelastic scattering), or 710 (elastic scattering).

[0059] For the purposes of this disclosure, the above-mentioned system focuses on secondary electrons (SEs) and backscattered electrons (BSEs). BSEs are reflected after elastic collisions of the electron beam with the sample. SEs originate from atoms in the sample. They are the result of inelastic collisions of the electron beam with the sample. BSEs originate from deep regions of the sample and SEs from surface regions.

[0060] BSE and SE images convey different types of information. BSE images are highly sensitive to differences in atomic number of the material being imaged; the higher the atomic number, the brighter the material appears in the image. SE images provide more detailed surface information, including topology. The effectiveness of BSE and SE in imaging defects such as line opens, bridges, pinholes, and pin dots depends on the landing energy, material, angle of incidence, and the pattern / topology of the sample.

[0061] In some embodiments, solid-state detectors can be made from many different materials and formats. The following examples are all potential replacements for silicon PIN detectors: Segmented microchannel plates can give higher gain signals and can also pick up lower energy electrons; Photomultipliers / scintillators and segmented photodetectors can get higher gain; Silicon drift detectors (SDDs) can be energy discriminated; Charge-coupled devices (CCDs) can improve spatial resolution; There are other solid-state material types, such as GaN, diamond, etc. -- e.g. GaN, diamond, etc. -- that can operate at higher temperatures and are more robust than silicon.

[0062] The particular embodiments of the present disclosure presented herein generally address the field of semiconductor inspection and process control and are not limited to the hardware, algorithmic / software implementations and architectures, and use cases summarized above.

[0063] Although the foregoing disclosure has been described in some detail for purposes of clarity of understanding, it will be apparent that certain changes and modifications may be practiced within the scope of the appended claims. It should be noted that there are many alternative ways of implementing the processes, systems, and devices of the present disclosure. Thus, the present embodiments are considered to be illustrative and not restrictive, and the present disclosure is not limited to the details given herein.

Claims

1. 1. A solid-state device comprising: a vertical structure depleted through the thickness of the device, comprising an N+ / P- / P+ or P+ / N- / N+ structure, the N+ / P- / P+ or P+ / N- / N+ structure comprising an N+ or P+ junction formed on the front side of the device, a P- or N- intrinsic layer formed in the middle of the device, and a P+ or N+ layer formed on the back side of the device; an active area for collecting secondary electrons (referred to as SE) and backscattered electrons (referred to as BSE), the active area being segmented into a number of channels to separate the detection of secondary electrons and backscattered electrons; a through-hole located at the center of the device for passing a primary beam, the primary beam entering the through-hole on a front side of the device; Including, Solid state devices.

2. The solid-state device of claim 1 , wherein the segmentation occurs on a front side of the device and the SE and BSE are collected on a back side of the device.

3. 2. The solid-state device of claim 1, the front surface of the device includes metal contacts to maximize the area available for collection of the SEs and the BSEs; Solid state devices.

4. 10. The solid-state device of claim 1, wherein the P+ layer comprises boron or other acceptor dopant.

5. The solid-state device of claim 1 , wherein the P+ layer includes an additional conductive coating.

6. The solid-state device of claim 1 further comprising a post-lens element for controlling SE and BSE signals on the device.

7. 2. The solid-state device of claim 1, wherein the segmented channel includes a circular central channel surrounded by four quadrants of equal area, each of the four quadrants having the same area as the circular central channel.

8. An electron source; A ceramic substrate; a device bonded to the ceramic substrate; Including, The device comprises: a vertical structure depleted through the thickness of the device, the vertical structure including an N+ / P- / P+ or P+ / N- / N+ structure, the N+ / P- / P+ or P+ / N- / N+ structure including an N+ or P+ junction formed on the front side of the device, an intermediate P- or N- intrinsic layer, and a P+ or N+ layer formed on the back side of the device; an active area for collecting secondary electrons (referred to as SE) and backscattered electrons (referred to as BSE), the active area being segmented into a number of channels to separate the detection of said SE and said BSE; a through-hole located at the center of the device for passing a primary beam, the primary beam entering the through-hole on a front side of the device; Including, system.

9. The system of claim 8 , wherein the segmentation occurs on a front side of the device and the SE and BSE are collected on a back side of the device.

10. The system of claim 8 , wherein a front side of the device includes metal contacts to maximize the area available for collection of the SEs and the BSEs.

11. The system of claim 8 , wherein the P+ layer comprises boron or other acceptor dopant.

12. The system of claim 8 , wherein the P+ layer includes an additional conductive coating.

13. The system of claim 8 , wherein the device further comprises a post-lens element for controlling SE and BSE signals on the device.

14. 9. The system of claim 8, wherein the segmented channel comprises a circular central channel surrounded by four quadrants of equal area, each of the four quadrants having the same area as the circular central channel.

15. 1. An electronic detection system comprising: an electron beam column including a detector for collecting secondary electrons and backscattered electrons; The detector comprises: a vertical structure depleted through the thickness of a device, comprising an N+ / P- / P+ or P+ / N- / N+ structure, the vertical structure comprising an N+ or P+ junction formed on the front side of the device, an intermediate P- or N- intrinsic layer, and a P+ or N+ layer formed on the back side of the device; an active area for collecting secondary electrons (referred to as SE) and backscattered electrons (referred to as BSE), the active area being segmented into a number of channels to separate the detection of said SE and said BSE; a through-hole located at the center of the device for passing a primary beam, the primary beam entering the through-hole on a front side of the device; Including, Electronic detection system.

16. The electronic detection system of claim 15 , wherein the segmentation occurs on a front side of the device and the SE and BSE are collected on a back side of the device.

17. The electron detection system of claim 15 , wherein a front surface of the device includes metal contacts to maximize the area available for collection of the SEs and the BSEs.

18. The electron detection system of claim 15 , wherein the P+ layer comprises boron or other acceptor dopant.

19. The electronic detection system of claim 15 , wherein the P+ layer includes an additional conductive coating.

20. The electron detection system of claim 15 , wherein the device further comprises a post-lens element for controlling SE and BSE signals on the device.

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