Photodetector

Abstract

To provide a photodetection device that can correct the temperature characteristics of a Fabry-Perot interference filter with high precision.SOLUTION: A photodetection device 1A includes a wiring board 7 having wiring 79, a first support portion 91 arranged on a mounting surface 7a of the wiring board 7, a Fabry-Perot interference filter 10 arranged on the first support portion 91, and a photodetector 61 and a temperature detector 62 arranged on the mounting surface 7a. The wiring 79 includes: a mounting portion 72 provided on the mounting surface 7a and electrically connected to the temperature detector 62; an electrode pad 76 provided on the mounting surface 7a; and a connection portion 78 provided on the mounting surface 7a and connecting the mounting portion 72 and the electrode pad 76. At least a portion of the wiring 79 on the electrode pad 76 side is disposed outside the Fabry-Perot interference filter 10 when viewed in the Z-axis direction perpendicular to the mounting surface 7a.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a light detection device. [Background technology]

[0002] There is known a photodetector including a Fabry-Perot interference filter having a first mirror portion and a second mirror portion whose distance from each other is variable, a photodetector that detects light transmitted through the Fabry-Perot interference filter, and a temperature detector that detects the temperature of the space in which the Fabry-Perot interference filter is disposed (see, for example, Patent Document 1). In such a photodetector, the distance between the first mirror portion and the second mirror portion is controlled according to the potential difference between the first mirror portion and the second mirror portion, and the wavelength of light transmitted through the first mirror portion and the second mirror portion is controlled according to the distance between the first mirror portion and the second mirror portion. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-87318 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned photodetector, even if the potential difference between the first mirror portion and the second mirror portion is constant, if the temperature of the Fabry-Perot interference filter changes, the distance between the first mirror portion and the second mirror portion changes, and as a result, the wavelength of the light passing through the first mirror portion and the second mirror portion may deviate from the target wavelength (hereinafter, such a property of the Fabry-Perot interference filter is referred to as the "temperature characteristic of the Fabry-Perot interference filter.") Therefore, in the above-mentioned photodetector, in order to correct the temperature characteristic of the Fabry-Perot interference filter, the temperature of the space in which the Fabry-Perot interference filter is placed is detected by a temperature detector.

[0005] An object of the present disclosure is to provide a photodetector capable of highly accurately correcting the temperature characteristics of a Fabry-Perot interference filter. [Means for solving the problem]

[0006] a first support portion arranged on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror portion and a second mirror portion whose distance from each other is variable and whose outer edge is arranged in a first support region of the first support portion; a photodetector arranged on the mounting surface so as to face the first mirror portion and the second mirror portion on one side of the first support portion; and a temperature detector arranged on the mounting surface, wherein the temperature detector is arranged on the mounting surface such that at least a portion of the temperature detector overlaps with a portion of the Fabry-Perot interference filter when viewed from a first direction perpendicular to the mounting surface, and such that at least a portion of the temperature detector overlaps with a portion of the first support portion when viewed from a second direction in which the first support portion and the photodetector are aligned, and a first distance between the temperature detector and the first support portion in the second direction is smaller than a first width of the first support region in the second direction.

[0007] In this photodetector, the first distance between the temperature detector and the first support in the second direction is smaller than the first width of the first support region in the second direction. This allows the temperature detector to be brought closer to the first support while ensuring a sufficient area of ​​the first support region that serves as a thermal connection region between the Fabry-Perot interference filter and the first support. Therefore, it is possible to obtain a temperature that accurately reflects the temperature of the Fabry-Perot interference filter. Therefore, this photodetector allows for highly accurate correction of the temperature characteristics of the Fabry-Perot interference filter.

[0008] The photodetector according to one aspect of the present disclosure further includes a second support disposed on the mounting surface so as to face the first support across the photodetector in the second direction, the outer edge of the Fabry-Perot interference filter is disposed in a second support region of the second support, the temperature detector is disposed on the mounting surface so that at least a portion of the temperature detector overlaps a portion of the second support when viewed from the second direction, and the second distance between the temperature detector and the second support in the second direction may be smaller than the second width of the second support region in the second direction. This allows the temperature detector to be brought closer to the second support while ensuring a sufficient area of ​​the second support region that is a thermal connection region between the Fabry-Perot interference filter and the second support. Therefore, a temperature that more accurately reflects the temperature of the Fabry-Perot interference filter can be obtained.

[0009] In the photodetector according to one aspect of the present disclosure, the outer edge of the Fabry-Perot interference filter may be disposed in the first support region and the second support region such that the first width and the second width are equal, and the temperature detector may be disposed on the mounting surface such that the first distance and the second distance are equal. This makes it possible to obtain a temperature that is evenly reflected by the temperature of the Fabry-Perot interference filter via each of the first support portion and the second support portion.

[0010] In the photodetector according to one aspect of the present disclosure, for a space located between the wiring board and the Fabry-Perot interference filter in the first direction and between the first support and the second support in the second direction, a value obtained by dividing the width of the space in a third direction perpendicular to both the first and second directions by the width of the space in the second direction may be 1.5 or more. This makes it possible to ensure a sufficient area of ​​the first support region and an area of ​​the second support region by ensuring the length of the first support region in the third direction and the length of the second support region in the third direction while bringing the temperature detector closer to each of the first support and the second support in the second direction.

[0011] In the photodetector according to one aspect of the present disclosure, the wiring board has an elongated shape with a third direction perpendicular to both the first and second directions as its longitudinal direction, and the first support portion and the second support portion may be disposed on the mounting surface so as to extend along both edges of the wiring board in the second direction, respectively. This makes it possible to easily form a space whose width in the third direction is greater than its width in the second direction.

[0012] The photodetector according to one aspect of the present disclosure further includes a mounting section on which a wiring board is disposed, a first terminal and a second terminal provided on the mounting section, a first wire electrically connecting one electrode of the photodetector to the first terminal, and a second wire and a third wire electrically connecting the other electrode of the photodetector to the second terminal, the wiring board has a wiring electrically connected to one electrode of the photodetector on the mounting surface and having a first electrode pad provided on the mounting surface, and a second electrode pad provided on the mounting surface, the first wire electrically connecting the first electrode pad to the first terminal, the second wire electrically connecting the other electrode of the photodetector to the second electrode pad, and the third wire electrically connecting the second electrode pad to the second terminal, and the first electrode pad and the second electrode pad may be located outside the Fabry-Perot interference filter when viewed from the first direction. This can prevent the second wire and the third wire from contacting peripheral members (the Fabry-Perot interference filter, the first support, the second support, etc.).

[0013] A photodetector according to one aspect of the present disclosure further includes a mounting section on which a wiring board is disposed, a first terminal and a second terminal provided on the mounting section, a first wire electrically connecting one electrode of the photodetector to the first terminal, and a second wire electrically connecting the other electrode of the photodetector to the second terminal, the wiring board has a wiring having a first electrode pad provided on the mounting surface, the wiring board being electrically connected to one electrode of the photodetector on the mounting surface, the first wire electrically connecting the first electrode pad to the first terminal, the second wire electrically connecting the other electrode of the photodetector to the second terminal, and the first electrode pad may be located outside the Fabry-Perot interference filter when viewed from the first direction. This can suppress noise in the detection signal output from the photodetector due to a voltage signal applied to the Fabry-Perot interference filter. Effect of the Invention

[0014] According to the present disclosure, it is possible to provide a photodetector that enables highly accurate correction of the temperature characteristics of a Fabry-Perot interference filter. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a cross-sectional view of the photodetector according to the first embodiment. [Diagram 2] FIG. 2 is an exploded perspective view of a portion of the light detection device shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view of the Fabry-Perot interference filter shown in FIG. [Figure 4] FIG. 4 is a plan view of the internal structure of the photodetector shown in FIG. [Diagram 5] FIG. 5 is a plan view of a portion of the internal structure of the photodetector shown in FIG. [Figure 6] FIG. 6 is a plan view of the internal structure of the photodetector according to the second embodiment. [Figure 7] FIG. 7 is a plan view of a portion of the internal structure of the photodetector shown in FIG. [Figure 8]FIG. 8 is a graph showing the change over time in the detection signal output from the photodetector. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are denoted by the same reference numerals, and duplicated explanations will be omitted.

[0017] [First embodiment] [Photodetector] As shown in FIG. 1 and FIG. 2, the light detection device 1A of the first embodiment includes a housing 2, a wiring board 7, a first support portion 91, a second support portion 92, a Fabry-Perot interference filter 10, a photodetector 61, and a temperature detector 62. The housing 2 accommodates the wiring board 7, the first support portion 91, the second support portion 92, the Fabry-Perot interference filter 10, the photodetector 61, and the temperature detector 62. In this embodiment, the housing 2 is a CAN package having a stem (mounting portion) 3 and a cap 4. The cap 4 has a side wall 5 and a top wall 6 that are integrally formed. The material of the stem 3 and the cap 4 is, for example, a metal. The cap 4 has a cylindrical shape with the line L as the center line. The wiring board 7 is disposed on the inner surface 3a of the stem 3. The wiring board 7 is fixed to the inner surface 3a of the stem 3 by, for example, an adhesive member. The substrate material of the wiring substrate 7 is, for example, silicon, ceramic, quartz, glass, or plastic.

[0018] The first support portion 91 and the second support portion 92 are disposed on the mounting surface 7a of the wiring board 7. The first support portion 91 and the second support portion 92 are fixed to the mounting surface 7a of the wiring board 7 by, for example, an adhesive member. In this embodiment, the first support portion 91 and the second support portion 92 are formed separately from the wiring board 7. When viewed from the Z-axis direction (first direction) perpendicular to the mounting surface 7a of the wiring board 7, the first support portion 91 and the second support portion 92 face each other in the X-axis direction (second direction). The Z-axis direction is a direction parallel to the line L. The material of the first support portion 91 and the second support portion 92 is, for example, silicon, ceramic, quartz, glass, plastic, glass epoxy, or the like.

[0019] The Fabry-Perot interference filter 10 is disposed on a first support portion 91 and a second support portion 92. The Fabry-Perot interference filter 10 is fixed to the first support portion 91 and the second support portion 92 by, for example, an adhesive member. The center line of the light transmission region 10a of the Fabry-Perot interference filter 10 coincides with the line L. In this embodiment, the light transmission region 10a of the Fabry-Perot interference filter 10 has a circular shape when viewed from the Z-axis direction.

[0020] The photodetector 61 is mounted on the mounting surface 7a of the wiring board 7. That is, the photodetector 61 is disposed on the mounting surface 7a of the wiring board 7. The center line of the light receiving portion of the photodetector 61 coincides with the line L. The photodetector 61 detects light transmitted through the Fabry-Perot interference filter 10. In this embodiment, the photodetector 61 is an infrared detector, and is configured with a light receiving element such as an InGaAs photodiode, a thermopile, or a bolometer. In addition, when detecting ultraviolet, visible, or near-infrared light, the photodetector 61 may be configured with a light receiving element such as a Si photodiode. In addition, the photodetector 61 may be configured with one light receiving element, or may be configured with multiple light receiving elements. The photodetector 61 may be provided with one light receiving portion, or the photodetector 61 may be a photodiode array in which multiple light receiving portions are arranged in an array, a CCD image sensor, a CMOS image sensor, or the like.

[0021] The temperature detector 62 is mounted on the mounting surface 7a of the wiring board 7. That is, the temperature detector 62 is disposed on the mounting surface 7a of the wiring board 7. A detection signal detected by the temperature detector 62 is used to correct the temperature characteristics of the Fabry-Perot interference filter 10. In this embodiment, the temperature detector 62 is, for example, a thermistor, a resistance temperature detector, a thermocouple, a linear resistor, or a semiconductor temperature sensor.

[0022] An opening 2a is formed in the housing 2. The opening 2a is formed in the top wall 6 of the cap 4 so that its center line coincides with the line L. The opening 2a faces the light transmission region 10a of the Fabry-Perot interference filter 10 in the Z-axis direction. In this embodiment, the opening 2a has a circular shape when viewed from the Z-axis direction. A light transmitting member 13 is bonded to the inner surface 6a of the top wall 6 so as to close the opening 2a. The material of the light transmitting member 13 is, for example, glass. The light transmitting member 13 has a light incident surface 13a and a light exit surface 13b that face each other in the Z-axis direction, and a side surface 13c. The light incident surface 13a is approximately flush with the outer surface 6b of the top wall 6 of the cap 4 at the opening 2a. The side surface 13c is in contact with the inner surface 5a of the side wall 5 of the cap 4. Such a light transmitting member 13 is formed by melting a glass pellet arranged inside the cap 4 with the opening 2a facing downward.

[0023] A bandpass filter 14 is fixed to the light exit surface 13b of the light transmitting member 13 by an adhesive member 15 made of a light transmitting material. The bandpass filter 14 selectively transmits light in the measurement wavelength range of the light detection device 1A (light in a predetermined wavelength range that should be incident on the light transmitting region 10a of the Fabry-Perot interference filter 10) among the light transmitted through the light transmitting member 13. In this embodiment, the bandpass filter 14 has, for example, a rectangular plate shape. The bandpass filter 14 has a light entrance surface 14a and a light exit surface 14b that face each other in the Z-axis direction, and four side surfaces 14c. The bandpass filter 14 is composed of a light transmitting member made of, for example, silicon or glass, and a dielectric multilayer film formed on the surface of the light transmitting member. The dielectric multilayer film is composed of a film made of a high refractive index material (for example, TiO2 or Ta2O5, etc.) and a film made of a low refractive index material (for example, SiO2 or MgF2, etc.).

[0024] [Fabry-Perot interference filter] 2 and 3, the Fabry-Perot interference filter 10 is provided with a light-transmitting region 10a that transmits light of a wavelength corresponding to the distance between the first mirror portion 35 and the second mirror portion 36. The light-transmitting region 10a is, for example, a cylindrical region with the line L as its center line.

[0025] The Fabry-Perot interference filter 10 includes a substrate 21. The substrate 21 is, for example, rectangular plate-shaped. The material of the substrate 21 is, for example, silicon, quartz, glass, or the like. The substrate 21 has a first surface 21a and a second surface 21b that face each other in a direction parallel to the line L. The first surface 21a is the surface on the light incident side (the bandpass filter 14 side). The second surface 21b is the surface on the light exit side (the photodetector 61 side).

[0026] A first layer structure 30 is disposed on the first surface 21a of the substrate 21. The first layer structure 30 is configured by laminating a first antireflection layer 31, a first stacked body 32, a first intermediate layer 33, and a second stacked body 34 in this order on the first surface 21a. An air gap S is formed between the first stacked body 32 and the second stacked body 34 by the frame-shaped first intermediate layer 33. When the material of the substrate 21 is silicon, the material of the first antireflection layer 31 and the first intermediate layer 33 is, for example, silicon oxide. The thickness of the first intermediate layer 33 is, for example, several tens of nm to several tens of μm.

[0027] The portion of the first laminate 32 corresponding to the light-transmitting region 10a functions as the first mirror section 35. The first laminate 32 is made of a dielectric multilayer film. As an example, the first laminate 32 is made by alternately stacking a plurality of polysilicon layers and a plurality of silicon nitride layers. The optical thickness of each of the polysilicon layers and silicon nitride layers constituting the first mirror section 35 is preferably an integral multiple of ¼ of the central transmission wavelength of light transmitted through the light-transmitting region 10a. The first mirror section 35 may be disposed on the first surface 21a of the substrate 21 without the first antireflection layer 31.

[0028] The portion of the second laminate 34 that corresponds to the light-transmitting region 10a functions as a second mirror section 36. The second mirror section 36 faces the first mirror section 35 across a gap S in a direction parallel to the line L. The second laminate 34 is made of a dielectric multilayer film. As an example, the second laminate 34 is made by alternately stacking a plurality of polysilicon layers and a plurality of silicon nitride layers one by one. The optical thickness of each of the polysilicon layers and silicon nitride layers that make up the second mirror section 36 is preferably an integer multiple of ¼ of the central transmission wavelength of light that passes through the light-transmitting region 10a.

[0029] Note that a silicon oxide layer may be disposed instead of the silicon nitride layer in the first stack 32 and the second stack 34. The materials of the layers constituting the first stack 32 and the second stack 34 are not limited to the above-mentioned materials and may be, for example, titanium oxide, tantalum oxide, zirconium oxide, magnesium fluoride, aluminum oxide, calcium fluoride, silicon, germanium, zinc sulfide, or the like.

[0030] A plurality of through holes 34b are formed in a portion of the second laminate 34 that corresponds to the void S. Each through hole 34b reaches the void S from a surface 34a of the second laminate 34 on the opposite side to the first laminate 32. The plurality of through holes 34b are formed to an extent that does not substantially affect the function of the second mirror section 36. The plurality of through holes 34b are used to form the void S by removing a portion of the first intermediate layer 33 by etching.

[0031] The first stack 32 has a first electrode 22 formed thereon so as to surround the light-transmitting region 10a. The first stack 32 has a second electrode 23 formed thereon so as to include the light-transmitting region 10a. The first electrode 22 and the second electrode 23 are formed by doping an impurity into the polysilicon layer of the first stack 32 that is closest to the void S to reduce resistance. The second stack 34 has a third electrode 24 formed thereon so as to face the first electrode 22 and the second electrode 23 across the void S. The third electrode 24 is formed by doping an impurity into the polysilicon layer of the second stack 34 that is closest to the void S to reduce resistance. The second electrode 23 may have a size substantially the same as or larger than the light-transmitting region 10a.

[0032] The first layer structure 30 is provided with a pair of terminals 25 and a pair of terminals 26. The pair of terminals 25 face each other with the light transmission region 10a in between. Each terminal 25 is disposed in a through hole extending from the surface 34a of the second laminate 34 to the first laminate 32. Each terminal 25 is electrically connected to the first electrode 22 via a wiring 22a formed in the first laminate 32. The pair of terminals 26 face each other with the light transmission region 10a in between in a direction perpendicular to the direction in which the pair of terminals 25 face each other. Each terminal 26 is disposed in a through hole extending from the surface 34a of the second laminate 34 to the inside of the first intermediate layer 33. Each terminal 26 is electrically connected to the second electrode 23 via a wiring 23a formed in the first laminate 32, and is electrically connected to the third electrode 24 via a wiring 24a formed in the second laminate 34.

[0033] The first laminate 32 has trenches 27 and 28 on its surface 32a on the side of the second laminate 34. The trench 27 extends in an annular shape so as to surround the connection portion of the wiring 23a with the terminal 26. The trench 27 electrically insulates the first electrode 22 from the wiring 23a. The trench 28 extends in an annular shape along the inner edge of the first electrode 22. The trench 28 electrically insulates the first electrode 22 from the inner region of the first electrode 22 (i.e., the region where the second electrode 23 exists). The second laminate 34 has trenches 29 on its surface 34a. The trench 29 extends in an annular shape so as to surround the terminal 25. The trench 29 electrically insulates the terminal 25 from the third electrode 24. The regions in the trenches 27, 28, and 29 may be insulating materials or may be voids.

[0034] A second layer structure 40 is disposed on the second surface 21b of the substrate 21. The second layer structure 40 is configured by stacking a second antireflection layer 41, a third stack 42, a second intermediate layer 43, and a fourth stack 44 in this order on the second surface 21b. The second antireflection layer 41, the third stack 42, the second intermediate layer 43, and the fourth stack 44 have the same configurations as the first antireflection layer 31, the first stack 32, the first intermediate layer 33, and the second stack 34, respectively. That is, the second layer structure 40 has a stack structure symmetrical to the first layer structure 30 with respect to the substrate 21. The second layer structure 40 is configured to correspond to the first layer structure 30, thereby suppressing warping of the Fabry-Perot interference filter 10.

[0035] An opening 40a is formed in the third laminate 42, the second intermediate layer 43, and the fourth laminate 44 so as to include the light transmitting region 10a. The opening 40a has, for example, a cylindrical shape with the line L as the center line, and has approximately the same diameter as the light transmitting region 10a. The opening 40a is open on the light exit side, and the bottom surface of the opening 40a reaches the second anti-reflection layer 41. The opening 40a passes light that has passed through the first mirror portion 35 and the second mirror portion 36.

[0036] A light-shielding layer 45 is formed on the surface of the fourth stack 44 on the light-emitting side. The material of the light-shielding layer 45 is, for example, aluminum. A protective layer 46 is formed on the surface of the light-shielding layer 45 and the inner surface of the opening 40a. The material of the protective layer 46 is, for example, aluminum oxide. By setting the thickness of the protective layer 46 to 1 to 100 nm (preferably, about 30 nm), the optical effect of the protective layer 46 can be ignored.

[0037] In the Fabry-Perot interference filter 10 configured as above, when a voltage is applied between the terminal 25 and the terminal 26, a potential difference occurs between the first electrode 22 and the third electrode 24, and an electrostatic force corresponding to the potential difference occurs between the first electrode 22 and the third electrode 24. As a result, the second mirror portion 36 is attracted to the first mirror portion 35 fixed to the substrate 21, and the distance between the first mirror portion 35 and the second mirror portion 36 changes. At this time, since no potential difference occurs between the second electrode 23 and the third electrode 24, the flatness of the second mirror portion 36 in the light transmission region 10a is ensured. In this way, in the Fabry-Perot interference filter 10, the distance between the first mirror portion 35 and the second mirror portion 36 is variable. Here, the wavelength of light transmitted through the light transmission region 10a depends on the distance between the first mirror portion 35 and the second mirror portion 36. Therefore, by adjusting the voltage applied between the terminal 25 and the terminal 26, the wavelength of light transmitted through the light transmission region 10a can be adjusted.

[0038] [Internal structure of the photodetector] 2 and 4, the wiring board 7 has an elongated shape with the Y-axis direction (a third direction perpendicular to both the first and second directions) as the longitudinal direction. As an example, the wiring board 7 has a rectangular plate shape with the Z-axis direction as the thickness direction, the X-axis direction as the short side direction, and the Y-axis direction as the long side direction.

[0039] The first support portion 91 and the second support portion 92 are disposed on the mounting surface 7a so as to extend along both edges of the wiring board 7 in the X-axis direction. The first support portion 91 is disposed on the other side (left side in the figure) of the mounting surface 7a in the X-axis direction. The second support portion 92 is disposed on one side (right side in the figure) of the mounting surface 7a in the X-axis direction. As an example, the first support portion 91 and the second support portion 92 each have a rectangular parallelepiped shape with the Y-axis direction as the longitudinal direction. The first support portion 91 and the second support portion 92 sandwich the photodetector 61 and the temperature detector 62 in the X-axis direction. The first support portion 91 and the second support portion 92 are disposed on the mounting surface 7a so that the bottom surface 91b and the bottom surface 92b of each completely overlap the wiring board 7. The Fabry-Perot interference filter 10 is disposed on an upper surface 91 a of the first support portion 91 and an upper surface 92 a of the second support portion 92 , and is supported by the first support portion 91 and the second support portion 92 .

[0040] As shown in FIG. 5, each side of the first support portion 91 and the second support portion 92 is located inside each side 7c of the wiring board 7 when viewed from the Z-axis direction. Specifically, the outer side 91c of the first support portion 91 opposite to the second support portion 92 is located inside the side 7c of the wiring board 7 when viewed from the Z-axis direction. The side surfaces 91e and 91f on both sides of the first support portion 91 in the Y-axis direction are each located inside the side surface 7c of the wiring board 7 when viewed from the Z-axis direction. The outer side surface 92c of the second support portion 92 opposite to the first support portion 91 is located inside the side surface 7c of the wiring board 7 when viewed from the Z-axis direction. The side surfaces 92e and 92f on both sides of the second support portion 92 in the Y-axis direction are each located inside the side surface 7c of the wiring board 7 when viewed from the Z-axis direction. An inner surface 91d of the first support portion 91 facing the second support portion 92 and an inner surface 92d of the second support portion 92 facing the first support portion 91 face each other in the X-axis direction. The outer surface 91c of the first support portion 91 may overlap the side surface 7c of the wiring board 7 when viewed from the Z-axis direction. The outer surface 92c of the second support portion 92 may overlap the side surface 7c of the wiring board 7 when viewed from the Z-axis direction.

[0041] Each side surface 10c of the Fabry-Perot interference filter 10 is located inside each side surface of the first support portion 91 and the second support portion 92 when viewed from the Z-axis direction. Specifically, the side surfaces 10c on both sides of the Fabry-Perot interference filter 10 in the X-axis direction are located inside the outer side surface 91c of the first support portion 91 and the outer side surface 92c of the second support portion 92, respectively. The side surface 10c on one side of the Fabry-Perot interference filter 10 in the Y-axis direction is located inside each of the side surface 91e on one side of the first support portion 91 in the Y-axis direction and the side surface 92e on one side of the second support portion 92 in the Y-axis direction. The side surface 10c on the other side of the Fabry-Perot interference filter 10 in the Y-axis direction is located inside each of the side surface 91f on the other side of the first support portion 91 in the Y-axis direction and the side surface 92f on the other side of the second support portion 92 in the Y-axis direction. In addition, each side 10c of the Fabry-Perot interference filter 10 may overlap with the outer surface 91c of the first support part 91, the side surfaces 91e, 91f of the first support part 91, the outer surface 92c of the second support part 92, and the side surfaces 92e, 92f of the second support part 92, respectively, when viewed from the Z-axis direction.

[0042] In this embodiment, the outer peripheral portion 10b of the light-transmitting region 10a of the Fabry-Perot interference filter 10 (a region that does not include the light-transmitting region 10a and surrounds the light-transmitting region 10a) is arranged in the first support region 91g of the first support portion 91 and the second support region 92g of the second support portion 92.

[0043] The first support region 91g is a region of the upper surface 91a of the first support portion 91 that overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. In this embodiment, the first support region 91g has an elongated shape with the Y-axis direction as the longitudinal direction. Specifically, the first support region 91g is a region defined by the inner surface 91d of the first support portion 91, the side surfaces 10c on both sides of the Fabry-Perot interference filter 10 in the Y-axis direction, and the side surface 10c of the Fabry-Perot interference filter 10 on the first support portion 91 side in the X-axis direction when viewed from the Z-axis direction. As an example, the first support region 91g has a rectangular shape with the short side direction being the X-axis direction and the long side direction being the Y-axis direction.

[0044] The second support region 92g is a region of the upper surface 92a of the second support portion 92 that overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. In this embodiment, the second support region 92g has an elongated shape with the Y-axis direction as the longitudinal direction. Specifically, the second support region 92g is a region defined by the inner surface 92d of the second support portion 92, the side surfaces 10c on both sides of the Fabry-Perot interference filter 10 in the Y-axis direction, and the side surface 10c of the Fabry-Perot interference filter 10 on the second support portion 92 side in the X-axis direction when viewed from the Z-axis direction. As an example, the second support region 92g has a rectangular shape with the short side direction being the X-axis direction and the long side direction being the Y-axis direction.

[0045] The first width W1 of the first support region 91g in the X-axis direction is equal to the second width W2 of the second support region 92g in the X-axis direction. That is, the outer edge portion 10b of the Fabry-Perot interference filter 10 is disposed in the first support region 91g and the second support region 92g such that the first width W1 and the second width W2 are equal. The first width of the first support region 91g in the X-axis direction refers to the maximum value of the length of the first support region 91g in the X-axis direction. The second width of the second support region 92g in the X-axis direction refers to the maximum value of the length of the second support region 92g in the X-axis direction.

[0046] The wiring board 7, the first support 91, the second support 92, and the Fabry-Perot interference filter 10 define a space A. The space A is located between the wiring board 7 and the Fabry-Perot interference filter 10 in the Z-axis direction, and between the first support 91 and the second support 92 in the X-axis direction. Specifically, the space A is located between the mounting surface 7a of the wiring board 7 and the bottom surface 10d of the Fabry-Perot interference filter 10, and between the inner side surface 91d of the first support 91 and the inner side surface 92d of the second support 92. That is, the space A is a space defined by the inner side surface 91d of the first support 91, the inner side surface 92d of the second support 92, and the side surfaces 10c on both sides of the Fabry-Perot interference filter 10 in the Y-axis direction when viewed from the Z-axis direction.

[0047] The space A has an elongated shape with the Y-axis direction as the longitudinal direction. The space A has a rectangular parallelepiped shape with the width in the Y-axis direction being larger than the width in the X-axis direction, for example. With regard to the space A, the value obtained by dividing the width (long side) of the space A in the Y-axis direction by the width (short side) of the space A in the X-axis direction (hereinafter referred to as the "aspect ratio of the space A") is 1.5 or more. The width of the space A in the Z-axis direction is smaller than the width of the space A in the Y-axis direction and the width of the space A in the X-axis direction. The width of the space A in the Y-axis direction is the maximum value of the length of the space A in the Y-axis direction. The width of the space A in the X-axis direction is the minimum value of the length of the space A in the X-axis direction. The width of the space A in the Z-axis direction is the minimum value of the length of the space A in the Z-axis direction.

[0048] The wiring board 7 includes wiring 70, 79 and electrode pads 74, 77. The wiring 70, 79 and the electrode pads 74, 77 are provided on the mounting surface 7a of the wiring board 7. The wiring 70 includes a mounting portion 71, an electrode pad 73, and a connection portion 75. The mounting portion 71 overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. The mounting portion 71 is disposed inside the space A. The mounting portion 71 faces the first mirror portion 35 and the second mirror portion 36 of the Fabry-Perot interference filter 10 in the Z-axis direction. The electrode pad (first electrode pad) 73 is provided on one side of the mounting portion 71 in the Y-axis direction when viewed from the Z-axis direction. The connection portion 75 is disposed between the mounting portion 71 and the electrode pad 73, and extends in the Y-axis direction. The mounting portion 71 and the electrode pad 73 are electrically connected by the connection portion 75. When viewed from the Z-axis direction, the electrode pad (second electrode pad) 74 is provided on one side of the mounting portion 71 in the Y-axis direction. The electrode pad 73 and the electrode pad 74 are aligned with each other in the X-axis direction.

[0049] The electrode pads 73 and 74 are disposed outside the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. The electrode pads 73 and 74 are disposed outside the space A. The electrode pads 73 and 74 are disposed on the opposite side to the Fabry-Perot interference filter 10 with respect to the side surface 91e of the first support portion 91 and the side surface 92e of the second support portion 92 when viewed from the Z-axis direction.

[0050] The wiring 79 has a mounting portion 72, an electrode pad 76, and a connection portion 78. When viewed from the Z-axis direction, the mounting portion 72 overlaps with the Fabry-Perot interference filter 10. The mounting portion 72 is disposed inside the space A. The mounting portion 72 is disposed on the other side of the mounting portion 71 in the Y-axis direction. When viewed from the Z-axis direction, the electrode pad 76 is provided on the other side of the mounting portion 72 in the Y-axis direction. The connection portion 78 is disposed between the mounting portion 72 and the electrode pad 76, and extends in the Y-axis direction. The mounting portion 72 and the electrode pad 76 are electrically connected by the connection portion 78. When viewed from the Z-axis direction, the electrode pad 77 is provided on the other side of the mounting portion 72 in the Y-axis direction. The electrode pad 76 and the electrode pad 77 are aligned with each other in the X-axis direction.

[0051] The electrode pads 76 and 77 are disposed outside the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. The electrode pads 76 and 77 are disposed outside the space A. The electrode pads 76 and 77 are disposed on the opposite side to the Fabry-Perot interference filter 10 with respect to the side surface 91f of the first support portion 91 and the side surface 92f of the second support portion 92 when viewed from the Z-axis direction.

[0052] The photodetector 61 is mounted on the mounting portion 71. One electrode (either the anode or the cathode) of the photodetector 61 is electrically connected to the mounting portion 71. As a result, one electrode of the photodetector 61 is electrically connected to the electrode pad 73 on the mounting surface 7a of the wiring board 7. The photodetector 61 faces the first mirror portion 35 and the second mirror portion 36 of the Fabry-Perot interference filter 10 on one side (space A side) of the first support portion 91 in the X-axis direction and on the other side (space A side) of the second support portion 92 in the X-axis direction. The photodetector 61, the first support portion 91, and the second support portion 92 are aligned in the X-axis direction. The photodetector 61 completely overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. The photodetector 61 completely overlaps with the first support portion 91 and the second support portion 92 when viewed from the X-axis direction. The photodetector 61 is disposed inside the space A.

[0053] The distance D1 between the photodetector 61 and the first support 91 in the X-axis direction is equal to the distance D2 between the photodetector 61 and the second support 92 in the X-axis direction. That is, the photodetector 61 is disposed on the mounting surface 7a so that the distance D1 and the distance D2 are equal. The distance between the photodetector 61 and the first support 91 in the X-axis direction refers to the shortest distance between the photodetector 61 and the first support 91 in the X-axis direction. The distance D1 is the distance between the other end of the photodetector 61 on the first support 91 side and the inner surface 91d of the first support 91. Similarly, the distance between the photodetector 61 and the second support 92 in the X-axis direction refers to the shortest distance between the photodetector 61 and the second support 92 in the X-axis direction. The distance D2 is the distance between one end of the photodetector 61 on the second support 92 side and the inner surface 92d of the second support 92. The distance D1 is smaller than the first width W1. The distance D2 is smaller than the second width W2.

[0054] The temperature detector 62 is mounted on the mounting portion 72. One electrode (either the anode or the cathode) of the temperature detector 62 is electrically connected to the mounting portion 72. As a result, the one electrode of the temperature detector 62 is electrically connected to the electrode pad 76 on the mounting surface 7a of the wiring board 7. When viewed from the Z-axis direction, the temperature detector 62 completely overlaps the Fabry-Perot interference filter 10. When viewed from the X-axis direction, the temperature detector 62 completely overlaps the first support portion 91 and the second support portion 92. The temperature detector 62 is disposed inside the space A.

[0055] The distance (first distance) D3 between the temperature detector 62 and the first support 91 in the X-axis direction is equal to the distance (second distance) D4 between the temperature detector 62 and the second support 92 in the X-axis direction. That is, the temperature detector 62 is disposed on the mounting surface 7a so that the distance D3 and the distance D4 are equal. The distance between the temperature detector 62 and the first support 91 in the X-axis direction refers to the shortest distance between the temperature detector 62 and the first support 91 in the X-axis direction. The distance D3 is the distance between the other end of the temperature detector 62 on the first support 91 side and the inner surface 91d of the first support 91. Similarly, the distance between the temperature detector 62 and the second support 92 in the X-axis direction refers to the shortest distance between the temperature detector 62 and the second support 92 in the X-axis direction. The distance D4 is the distance between one end of the temperature detector 62 on the second support 92 side and the inner surface 92d of the second support 92. The distance D3 is smaller than the first width W1. The distance D4 is smaller than the second width W2.

[0056] The light detection device 1A includes a plurality of lead pins 11 provided on the stem 3, and a plurality of wires 12, 81, 82, 83, 84, 85, and 86. When viewed from the Z-axis direction, each lead pin 11 is disposed outside the wiring board 7. Each lead pin 11 penetrates the stem 3 while maintaining electrical insulation and airtightness between the lead pin 11 and the stem 3 (see FIG. 1). An end of each lead pin 11 (an end in the housing 2) is located on the Fabry-Perot interference filter 10 side with respect to the inner surface 3a of the stem 3 in the Z-axis direction. An end of each lead pin 11 is located on the stem 3 side with respect to the Fabry-Perot interference filter 10 in the Z-axis direction. Each lead pin 11 is fixed to the stem 3. One terminal 25 and one terminal 26 of the Fabry-Perot interference filter 10 are electrically connected to the end of each corresponding lead pin 11 by a wire 12. Each of the pair of terminals 25 and the pair of terminals 26 of the Fabry-Perot interference filter 10 may be electrically connected to the corresponding end of the lead pin 11 by the wire 12. In the present embodiment, as an example, the ends of the two lead pins 11 connected to the ground potential are connected to the stem 3 by the wire 12. As a result, the stem 3 is connected to the ground potential. The ends of the lead pins 11 may be located on a surface including the inner surface 3a of the stem 3.

[0057] The electrode pad 73 and the end of the corresponding lead pin (first terminal) 11 are electrically connected by a wire (first wire) 81. That is, the wire 81 electrically connects one electrode of the photodetector 61 and the end of the lead pin 11. The other electrode (the other of the anode and the cathode) of the photodetector 61 and the electrode pad 74 are electrically connected by a wire (second wire) 82. The electrode pad 74 and the end of the corresponding lead pin (second terminal) 11 are electrically connected by a wire (third wire) 83. That is, the wire 82 and the wire 83 electrically connect the other electrode of the photodetector 61 and the end of the lead pin 11. The wire 82 and the wire 83 may be separated from each other on the electrode pad 74 or may overlap each other. That is, the wire 82 and the wire 83 may be connected to the electrode pad 74 at different positions on the electrode pad 74, or may be connected to the electrode pad 74 at the same position on the electrode pad 74.

[0058] The electrode pad 76 and the end of the corresponding lead pin 11 are electrically connected by a wire 84. That is, the wire 84 electrically connects one electrode of the temperature detector 62 and the end of the lead pin 11. The other electrode (the other of the anode and the cathode) of the temperature detector 62 and the electrode pad 77 are electrically connected by a wire 85. The electrode pad 77 and the end of the corresponding lead pin 11 are electrically connected by a wire 86. That is, the wire 85 and the wire 86 electrically connect the other electrode of the temperature detector 62 and the end of the lead pin 11. The wire 85 and the wire 86 may be separated from each other on the electrode pad 77, or may overlap each other. That is, the wire 85 and the wire 86 may be connected to the electrode pad 77 at different positions on the electrode pad 77, or may be connected to the electrode pad 77 at the same position on the electrode pad 77.

[0059] This enables input and output of electrical signals to and from the Fabry-Perot interference filter 10, the photodetector 61, and the temperature detector 62. Note that the wires 12, 81, 82, 83, 84, 85, and 86 are connected to the lead pins 11 or the electrode pads 73, 74, 76, and 77 by, for example, wire bonding.

[0060] In the photodetector 1A configured as above, when light enters the bandpass filter 14 from the outside of the housing 2 through the opening 2a, the light transmitting member 13, and the adhesive member 15, only light in a predetermined wavelength range passes through the bandpass filter 14. The light that has passed through the bandpass filter 14 enters the light transmitting region 10a of the Fabry-Perot interference filter 10, and light with a wavelength corresponding to the distance between the first mirror portion 35 and the second mirror portion 36 passes through the light transmitting region 10a. The light that has passed through the light transmitting region 10a enters the light receiving portion of the photodetector 61 and is detected by the photodetector 61. Therefore, a spectrum can be obtained by detecting the intensity of the light that has passed through the light transmitting region 10a in the photodetector 61 while changing the distance between the first mirror portion 35 and the second mirror portion 36 in the Fabry-Perot interference filter 10.

[0061] In the photodetector 1A, the distance between the first mirror portion 35 and the second mirror portion 36 is controlled in accordance with the potential difference between the first mirror portion 35 and the second mirror portion 36, and the wavelength of light passing through the first mirror portion 35 and the second mirror portion 36 is controlled in accordance with the distance between the first mirror portion 35 and the second mirror portion 36. In addition, in order to correct the temperature characteristics of the Fabry-Perot interference filter 10, the temperature of the space A in which the Fabry-Perot interference filter 10 is disposed is detected by a temperature detector 62.

[0062] [Action and Effects] In the light detection device 1A, the distance D3 between the temperature detector 62 and the first support portion 91 in the X-axis direction is smaller than the first width W1 of the first support region 91g in the X-axis direction. This allows the temperature detector 62 to be brought closer to the first support portion 91 while ensuring a sufficient area of ​​the first support region 91g, which is a thermal connection region between the Fabry-Perot interference filter 10 and the first support portion 91. Therefore, it is possible to obtain a temperature that accurately reflects the temperature of the Fabry-Perot interference filter 10. Therefore, the light detection device 1A enables highly accurate correction of the temperature characteristics of the Fabry-Perot interference filter 10.

[0063] The light detection device 1A also includes a second support 92 disposed on the mounting surface 7a so as to face the first support 91 across the light detector 61 in the X-axis direction. The outer edge 10b of the Fabry-Perot interference filter 10 is disposed in a second support region 92g of the second support 92. The temperature detector 62 is disposed on the mounting surface 7a so as to overlap with the second support 92 when viewed from the X-axis direction. The distance D4 between the temperature detector 62 and the second support 92 in the X-axis direction is smaller than the second width W2 of the second support region 92g in the X-axis direction. This allows the temperature detector 62 to be brought closer to the second support 92 while ensuring a sufficient area of ​​the second support region 92g, which is a thermal connection region between the Fabry-Perot interference filter 10 and the second support 92. Therefore, a temperature that more accurately reflects the temperature of the Fabry-Perot interference filter 10 can be acquired.

[0064] In the light detecting device 1A, the outer edge 10b of the Fabry-Perot interference filter 10 is disposed in the first support region 91g and the second support region 92g so that the first width W1 and the second width W2 are equal. The temperature detector 62 is disposed on the mounting surface 7a so that the distance D3 and the distance D4 are equal. This makes it possible to obtain the temperature of the Fabry-Perot interference filter 10 that is evenly reflected via each of the first support portion 91 and the second support portion 92.

[0065] In the light detection device 1A, the space A located between the wiring board 7 and the Fabry-Perot interference filter 10 in the Z-axis direction and between the first support portion 91 and the second support portion 92 in the X-axis direction has a value obtained by dividing the width of the space A in the Y-axis direction by the width of the space A in the X-axis direction of 1.5 or more. This allows the length of the first support region 91g in the Y-axis direction and the length of the second support region 92g in the Y-axis direction to be secured while the temperature detector 62 is brought close to each of the first support portion 91 and the second support portion 92 in the X-axis direction, thereby allowing the area of ​​the first support region 91g and the area of ​​the second support region 92g to be secured sufficiently. From the viewpoint of securing the length of the first support region 91g in the Y-axis direction and the length of the second support region 92g in the Y-axis direction while bringing the temperature detector 62 close to each of the first support portion 91 and the second support portion 92, the aspect ratio of the space A is preferably 1.8 or more, and more preferably 2 or more.

[0066] In the light-detecting device 1A, the wiring board 7 has an elongated shape with the Y-axis direction as the longitudinal direction, and the first support portion 91 and the second support portion 92 are disposed on the mounting surface 7a so as to extend along both edges of the wiring board 7 in the X-axis direction, respectively. This makes it possible to easily form the space A whose width in the Y-axis direction is larger than its width in the X-axis direction.

[0067] The light detection device 1A also includes a stem 3 on which a wiring board 7 is arranged, a plurality of lead pins 11 provided on the stem 3, a wire 81 electrically connecting one electrode of the photodetector 61 to an end of the lead pin 11, and a wire 82 and a wire 83 electrically connecting the other electrode of the photodetector 61 to an end of the lead pin 11. The wiring board 7 has a wiring 70 electrically connected to one electrode of the photodetector 61 on the mounting surface 7a and having an electrode pad 73 provided on the mounting surface 7a, and an electrode pad 74 provided on the mounting surface 7a. The wire 81 electrically connects the electrode pad 73 to an end of the lead pin 11, the wire 82 electrically connects the other electrode of the photodetector 61 to the electrode pad 74, and the wire 83 electrically connects the electrode pad 74 to an end of the lead pin 11. The electrode pad 73 and the electrode pad 74 are located outside the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. This makes it possible to prevent the wires 82 and 83 from coming into contact with the surrounding members (the Fabry-Perot interference filter 10, the first support portion 91, the second support portion 92, etc.).

[0068] [Second embodiment] As shown in FIGS. 6 and 7, the photodetector 1B of the second embodiment differs from the photodetector 1A of the first embodiment mainly in that the photodetector 1B does not include the electrode pad 74, the electrode pad 77, the wire 83, and the wire 86.

[0069] As described above, the photodetector 1B does not include the electrode pad 74, the electrode pad 77, the wire 83, and the wire 86. The other electrode of the photodetector 61 is electrically connected directly to the end of the lead pin 11 by a wire 82. The other electrode of the temperature detector 62 is electrically connected directly to the end of the lead pin 11 by a wire 85.

[0070] The wires 82 and 85 are bent. Specifically, the wires 82 and 85 are bent in a direction away from the surrounding members so as not to come into contact with the surrounding members. More specifically, the wires 82 and 85 are bent in a direction away from the second support portion 92 when viewed from the Z-axis direction. The wires 82 and 85 are bent so as to avoid the second support portion 92 when viewed from the Z-axis direction. This makes it possible to prevent the wires 82 and 85 from coming into contact with the second support portion 92. Furthermore, the wires 82 and 85 are bent in a direction away from the Fabry-Perot interference filter 10 in the vicinity of the side surface 10c of the Fabry-Perot interference filter 10 when viewed from the X-axis direction. The wires 82 and 85 are bent in a direction away from the Fabry-Perot interference filter 10 in the vicinity of the side surface 10c of the Fabry-Perot interference filter 10 when viewed from the X-axis direction. This makes it possible to prevent the wires 82 and 85 from coming into contact with the Fabry-Perot interference filter 10. As described above, since the end of each lead pin 11 is located on the stem 3 side relative to the Fabry-Perot interference filter 10 in the Z-axis direction, the wires 82 and 85 are easily bent to avoid the Fabry-Perot interference filter 10.

[0071] As described above, the photodetector 1B of the second embodiment, like the photodetector 1A of the first embodiment described above, enables highly accurate correction of the temperature characteristics of the Fabry-Perot interference filter 10. Furthermore, the photodetector 1B can suppress noise in the detection signal output from the photodetector 61 caused by the voltage signal applied to the Fabry-Perot interference filter 10.

[0072] The noise suppression effect will be described below based on the results of an experiment (Example 1) conducted using the photodetector 1A and the results of an experiment (Example 2) conducted using the photodetector 1B. Fig. 8 is a graph showing the change over time in the detection signal output from the photodetector 61 when a voltage is applied between the terminals 25 and 26 of the Fabry-Perot interference filter 10 in each of Examples 1 and 2.

[0073] When a voltage is applied between the terminals 25 and 26 of the Fabry-Perot interference filter 10, the detection signal from the photodetector 61 maintains a state of approximately zero during the period until the distance between the first mirror portion 35 and the second mirror portion 36 reaches a distance corresponding to the light of the target wavelength. However, as shown in FIG. 8, during a part of the above period (for example, 0 to 0.0006 s), noise (crosstalk signal) that rises suddenly may occur in the detection signal output from the photodetector 61. This is considered to be caused by the voltage signal applied to the Fabry-Perot interference filter 10. From the results shown in FIG. 8, it can be seen that noise is suppressed in Example 2 compared to Example 1.

[0074] [Variations] The present disclosure is not limited to the above-described first and second embodiments. For example, in the first and second embodiments, an example has been shown in which the photodetector 61 completely overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction, but the photodetector 61 may have at least a portion overlapping with a portion of the Fabry-Perot interference filter 10. The photodetector 61 may have a portion located outside the Fabry-Perot interference filter 10 when viewed from the Z-axis direction.

[0075] Furthermore, in the first and second embodiments, an example has been shown in which the photodetector 61 completely overlaps with the first support portion 91 and the second support portion 92 when viewed from the X-axis direction, but the photodetector 61 may at least partially overlap with the first support portion 91 and the second support portion 92 when viewed from the X-axis direction. The photodetector 61 may be partially located outside the first support portion 91 or the second support portion 92 when viewed from the X-axis direction. It is sufficient that the photodetector 61 at least partially overlaps with a portion of the first support portion 91 when viewed from the X-axis direction.

[0076] In addition, in the first and second embodiments, an example has been shown in which the temperature detector 62 completely overlaps with the Fabry-Perot interference filter 10 when viewed from the Z-axis direction, but it is sufficient that at least a portion of the temperature detector 62 overlaps with a portion of the Fabry-Perot interference filter 10. A portion of the temperature detector 62 may be located outside the Fabry-Perot interference filter 10 when viewed from the Z-axis direction.

[0077] Furthermore, in the first and second embodiments, an example has been shown in which the temperature detector 62 completely overlaps with the first support portion 91 and the second support portion 92 when viewed from the X-axis direction, but the temperature detector 62 may at least partially overlap with the first support portion 91 and the second support portion 92 when viewed from the X-axis direction. The temperature detector 62 may be partially located outside the first support portion 91 or the second support portion 92 when viewed from the X-axis direction. It is sufficient that the temperature detector 62 at least partially overlaps with a portion of the first support portion 91 when viewed from the X-axis direction.

[0078] In the first and second embodiments, the outer edge portion 10b of the Fabry-Perot interference filter 10 is disposed in the first support region 91g and the second support region 92g so that the first width W1 and the second width W2 are equal to each other. However, the outer edge portion 10b of the Fabry-Perot interference filter 10 may be disposed in the first support region 91g and the second support region 92g so that the first width W1 and the second width W2 are different from each other. The first width W1 may be larger than the second width W2 or may be smaller than the second width W2.

[0079] In the first and second embodiments, the photodetector 61 is disposed on the mounting surface 7a such that the distance D1 is equal to the distance D2, but the photodetector 61 may be disposed on the mounting surface 7a such that the distance D1 is different from the distance D2. The distance D1 may be greater than the distance D2, or may be smaller than the distance D2.

[0080] In addition, in the first and second embodiments, examples are shown in which the distance D1 is smaller than the first width W1 and the distance D2 is smaller than the second width W2, but the distance D1 may be greater than or equal to the first width W1, and the distance D2 may be greater than or equal to the second width W2.

[0081] In the first and second embodiments, the temperature detector 62 is disposed on the mounting surface 7a such that the distance D3 is equal to the distance D4, but the temperature detector 62 may be disposed on the mounting surface 7a such that the distance D3 is different from the distance D4. The distance D3 may be greater than the distance D4, or may be smaller than the distance D4.

[0082] In the first and second embodiments, the distance D4 is smaller than the second width W2, but the distance D4 may be equal to or larger than the second width W2. It is sufficient that the distance D3 is at least smaller than the first width W1.

[0083] In the first and second embodiments, the first support 91 is disposed on the other side (left side in the figure) of the mounting surface 7a in the X-axis direction, and the second support 92 is disposed on one side (right side in the figure) of the mounting surface 7a in the X-axis direction, but the first support 91 may be disposed on one side (right side in the figure) of the mounting surface 7a in the X-axis direction, and the second support 92 may be disposed on the other side (left side in the figure) of the mounting surface 7a in the X-axis direction. In other words, compared to the first and second embodiments, the first support 91 and the second support 92 may be rotated 180° about the line L when viewed from the Z-axis direction.

[0084] In the first and second embodiments, the first and second terminals are lead pins 11 penetrating the stem 3, but the first and second terminals do not have to be lead pins. The first and second terminals may be, for example, electrode pads provided on the mounting surface 7a of the wiring board 7. In this case, the light detecting device 1A or the light detecting device 1B may be configured as, for example, a surface mounted device (SMD).

[0085] In the first and second embodiments, an example has been shown in which the first support portion 91 and the second support portion 92 are formed separately from the wiring board 7, but the first support portion 91 and the second support portion 92 may be formed integrally with the wiring board 7. In addition, the first support portion 91 and the second support portion 92 may be formed integrally with the substrate 21 of the Fabry-Perot interference filter 10.

[0086] The light detection device includes a wiring board, a first support section and a second support section arranged on a mounting surface of the wiring board so as to face each other, a first mirror section and a second mirror section whose distance from each other is variable, a Fabry-Perot interference filter whose outer edge is arranged in a first support region of the first support section and a second support region of the second support section, a light detector arranged on the mounting surface between the first support section and the second support section so as to face the first mirror section and the second mirror section, and a temperature detector arranged on the mounting surface, wherein the temperature detector has at least a portion of the temperature detector when viewed from a first direction perpendicular to the mounting surface. The temperature detector is disposed on the mounting surface so that at least a part of the temperature detector overlaps with a part of the Fabry-Perot interference filter and at least a part of the temperature detector overlaps with a part of each of the first support and the second support when viewed from the second direction in which the first support and the second support face each other, and the space located between the wiring board and the Fabry-Perot interference filter in the first direction and between the first support and the second support in the second direction may have a value obtained by dividing the width of the space in a third direction perpendicular to both the first and second directions by the width of the space in the second direction of 1.5 or more. In this photodetector, while bringing the temperature detector closer to each of the first support and the second support in the second direction, the length of the first support region in the third direction and the length of the second support region in the third direction are secured, so that the area of ​​the first support region and the area of ​​the second support region can be secured sufficiently. Therefore, it is possible to obtain a temperature that accurately reflects the temperature of the Fabry-Perot interference filter. Therefore, this photodetector enables highly accurate correction of the temperature characteristics of the Fabry-Perot interference filter. [Explanation of symbols]

[0087] 1A, 1B...photodetector, 3...stem (mounting portion), 7...wiring board, 7a...mounting surface, 10...Fabry-Perot interference filter, 10b...outer edge, 61...photodetector, 62...temperature detector, 11...lead pin (first terminal, second terminal), 35...first mirror portion, 36...second mirror portion, 73...electrode pad (first electrode pad), 74...electrode pad (second electrode pad), 81...wire (first wire), 82...wire (second wire), 83...wire (third wire), 91...first support portion, 91g...first support region, 92...second support portion, 92g...second support region, A...space.

Claims

1. A wiring board having wiring; A first support portion disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror portion and a second mirror portion whose distance from each other is variable and disposed on the first support portion; a photodetector disposed on the mounting surface on one side of the first support portion so as to face the first mirror portion and the second mirror portion; a temperature detector disposed on the mounting surface, the temperature detector is disposed on the mounting surface such that at least a portion of the temperature detector overlaps a portion of the Fabry-Perot interference filter when viewed from a first direction perpendicular to the mounting surface, and such that at least a portion of the temperature detector overlaps a portion of the first support when viewed from a second direction in which the first support and the photodetector are aligned, The wiring is a mounting portion provided on the mounting surface and electrically connected to the temperature detector; an electrode pad provided on the mounting surface; a connection portion provided on the mounting surface and connecting the mounting portion and the electrode pad, At least a portion of the wiring on the electrode pad side is disposed outside the Fabry-Perot interference filter when viewed from the first direction.

2. 2. The optical detection device of claim 1, wherein the distance between the electrode pad and the temperature detector in a third direction perpendicular to both the first direction and the second direction is greater than the distance between the first support portion and the temperature detector in the second direction.

3. an outer edge portion of the Fabry-Perot interference filter is disposed in a support region of the first support portion; The light detection device according to claim 1 , wherein a distance between the first support portion and the temperature detector in the second direction is smaller than a width of the support region in the second direction.

4. a mounting portion on which the wiring substrate is placed; A first terminal provided on the mounting portion; 4. The light detection device according to claim 1, further comprising a wire electrically connecting the electrode pad and the first terminal.

5. a second support portion disposed on the mounting surface to face the first support portion across the photodetector in the second direction, the Fabry-Perot interference filter is disposed on the second support; The optical detection device of any one of claims 1 to 4, wherein for a space located between the wiring substrate and the Fabry-Perot interference filter in the first direction and between the first support portion and the second support portion in the second direction, a value obtained by dividing the width of the space in a third direction perpendicular to both the first direction and the second direction by the width of the space in the second direction is 1.5 or more.

6. the Fabry-Perot interference filter has a second terminal; 6. The light detection device according to claim 1, wherein the second terminal is located in a region of the first support portion on the light detector side when viewed from the first direction.

Images