Abnormality determination device, abnormality determination method, program, and abnormality determination system

Abstract

To enable the occurrence of abnormality of a three-dimensional measuring instrument to be detected early.SOLUTION: The abnormality assessment device comprises: a data acquisition unit 232 for acquiring, in association with device identification information for identifying a three-dimensional measuring device 1, position data that indicates a plurality of positions of a standard gauge 19 to be detected, that is used in the three-dimensional measuring device 1; a generation unit 233 for generating distance data that indicates the distance to be measured, that is the distance between the plurality of positions to be measured that are indicated by the position data; a storage unit 22 for storing an appropriate range where distance data is assessed as being appropriate; and an assessment unit 235 for assessing the presence of abnormality in the three-dimensional measuring device 1 on the basis of whether or not the measured distance indicated by the distance data is included in the appropriate range, and outputting the assessed result in association with the device identification information.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an abnormality determination device, an abnormality determination method, a program, and an abnormality determination system. [Background technology]

[0002] A coordinate measuring machine is known as a measuring device for measuring the dimensions, shape, etc. of a measurement target object. In order to maintain the measurement accuracy, the coordinate measuring machine is periodically calibrated using a standard gauge (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-99049 A Summary of the Invention [Problem to be solved by the invention]

[0004] Immediately after the CMM is calibrated, the CMM can measure the object with high accuracy. However, if the state of the CMM changes between calibrations, the measurement accuracy decreases.

[0005] The present invention has been made in consideration of these points, and has an object to make it possible to detect the occurrence of an abnormality in a coordinate measuring machine at an early stage. [Means for solving the problem]

[0006] An abnormality judgment device according to a first aspect of the present invention has a data acquisition unit that acquires position data indicating multiple measured positions of a standard gauge used in a three-dimensional measuring device, in association with device identification information for identifying the three-dimensional measuring device, a generation unit that generates distance data indicating a measured distance, which is the distance between the multiple measured positions indicated by the position data, a memory unit that stores an appropriate range for which the distance data is judged to be appropriate, and a judgment unit that judges whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the measured distance indicated by the distance data is included in the appropriate range, and outputs the judgment result in association with the device identification information.

[0007] The device may further have an appropriate range determination unit that determines the appropriate range, and when the data acquisition unit acquires the position data together with initialization data indicating that the appropriate range is to be initialized, the generation unit generates initial distance data indicating the measured distance at the time of initialization by calculating a measured distance, which is the distance between the multiple measured positions indicated by the position data, and the appropriate range determination unit may determine the appropriate range based on the initial distance data.

[0008] The data acquisition unit may further acquire temperature data indicating the temperature of the three-dimensional measuring device at the time when the three-dimensional measuring device measures the multiple measured positions, and the generation unit may calculate the measured distance by correcting the distance between the multiple measured positions calculated based on the multiple measured positions indicated by the position data based on the temperature indicated by the temperature data.

[0009] The memory unit may store the appropriate range in association with a model of the measuring device, and the judgment unit may judge the presence or absence of an abnormality based on the appropriate range associated with the model of the three-dimensional measuring device identified on the basis of the device identification information.

[0010] The memory unit may store the appropriate range in association with the device identification information, and the determination unit may determine the presence or absence of an abnormality based on the appropriate range associated with the device identification information acquired by the data acquisition unit.

[0011] The memory unit may store the appropriate range in association with each of a plurality of measurement areas in the three-dimensional measuring device, and the judgment unit may judge whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the measured distance indicated by the distance data is included in the appropriate range associated with the measurement area that includes the plurality of measured positions indicated by the position data.

[0012] The standard gauge may have three or more measured positions, the generation unit may generate the distance data indicating a plurality of measured distances which are distances between the plurality of measured positions indicated by the position data, and the judgment unit may judge whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the plurality of measured distances indicated by the distance data are within the appropriate range.

[0013] The memory unit may store the appropriate range in association with each of a plurality of measured positions of the standard gauge, and the judgment unit may judge whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the distance is included in the appropriate range associated with the measured positions corresponding to the plurality of measured distances indicated by the distance data.

[0014] The generation unit may periodically generate the distance data, and the judgment unit may judge whether or not there is an abnormality in the three-dimensional measuring device based on the result of comparing the changes in the multiple measured distances indicated by the multiple distance data generated by the generation unit with a reference value.

[0015] The judgment unit may judge whether or not there is an abnormality in the three-dimensional measuring device based on a result of comparing a pattern of the relationship between the time when the three or more measured distances are measured and the three or more measured distances with a reference pattern.

[0016] An abnormality determination method according to a second aspect of the present invention, executed by a computer, comprises the steps of acquiring position data indicating multiple measured positions of a standard gauge used in a three-dimensional measuring device, in association with device identification information for identifying the three-dimensional measuring device, generating distance data indicating a measured distance, which is the distance between the multiple measured positions indicated by the position data, and determining whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the measured distance indicated by the distance data is within an appropriate range in which the measured distance indicated by the distance data is determined to be appropriate, and outputting the determination result in association with the device identification information.

[0017] A program according to a third aspect of the present invention causes a computer to execute the steps of acquiring position data indicating multiple measured positions of a standard gauge used in the three-dimensional measuring device, in association with device identification information for identifying the three-dimensional measuring device; generating distance data indicating a measured distance, which is the distance between the multiple measured positions indicated by the position data; and judging the presence or absence of an abnormality in the three-dimensional measuring device based on whether the measured distance indicated by the distance data is within an appropriate range in which the measured distance indicated by the distance data is judged to be appropriate, and outputting the judgment result in association with the device identification information.

[0018] An abnormality judgment system according to a fourth aspect of the present invention is an abnormality judgment system comprising a three-dimensional measuring device and an abnormality judgment device that judges whether or not there is an abnormality in the three-dimensional measuring device, wherein the three-dimensional measuring device has a measurement unit that measures a plurality of measured positions of a standard gauge used in the three-dimensional measuring device, or a measured distance which is the distance between the plurality of measured positions, and a communication unit that transmits position data indicating the plurality of measured positions or distance data indicating the measured distance to the abnormality judgment device in association with device identification information for identifying the three-dimensional measuring device, and the abnormality judgment device has a data acquisition unit that acquires the position data or the distance data, a memory unit that stores an appropriate range in which the measured distance is judged to be appropriate, and a judgment unit that judges whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the measured distance specified based on the position data or the distance data is included in the appropriate range, and outputs the judgment result in association with the device identification information. Effect of the Invention

[0019] The present invention has an effect of enabling early detection of the occurrence of an abnormality in a coordinate measuring machine. [Brief description of the drawings]

[0020] [Figure 1] 1 is a diagram for explaining an overview of an abnormality determination system S1 according to a first embodiment. [Diagram 2] FIG. 1 is a diagram illustrating an example of a three-dimensional measuring device 1. [Diagram 3] FIG. 2 is a diagram showing the configuration of an abnormality determination system S1. [Figure 4] FIG. 13 is a diagram showing the time at which a plurality of measured distances are measured and the plurality of measured distances. [Diagram 5] 4 is a flowchart for explaining the operation of the measuring device control device 2. [Figure 6] FIG. 11 is a diagram for explaining an overview of an abnormality determination system S2 according to a second embodiment. [Figure 7] FIG. 2 is a diagram showing the configuration of an abnormality determination system S2. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] <First embodiment> [Outline of the S1 anomaly detection system] 1 is a diagram for explaining an overview of an abnormality determination system S1 according to a first embodiment. The abnormality determination system S1 includes a three-dimensional measuring device 1, a measuring machine control device 2, a data management device 3, and an information terminal 4. The abnormality determination system S1 is a system that enables a user of the three-dimensional measuring device 1 to perform daily inspection and check whether there is an abnormality in the measurement accuracy of the three-dimensional measuring device 1.

[0022] The three-dimensional measuring device 1, the measuring machine control device 2, the data management device 3, and the information terminal 4 are connected via a network N. The network N includes, for example, an intranet or the Internet. The three-dimensional measuring device 1 and the measuring machine control device 2 may be connected via a communication line such as a Universal Serial Bus (USB) without going through the network N.

[0023] 2 is a diagram showing an example of a three-dimensional measuring device 1. The three-dimensional measuring device 1 includes a table 10 on which a standard gauge 19 is placed, a column 11, a supporter 12, a beam 13, a Y-axis direction drive unit 14, a slider 15, a Z-axis spindle 16, a probe 17, and a control unit 18. The three-dimensional measuring device 1 measures the coordinates of a plurality of positions to be measured on the standard gauge 19, for example, by moving the probe 17 and bringing the tip of the probe 17 into contact with the standard gauge 19, which is the object to be measured.

[0024] The multiple measured positions are, for example, predetermined positions on multiple spheres of the standard gauge 19, such as the center position of the sphere or the position on the sphere that is the furthest from the center of the standard gauge 19. When the center position of the sphere is used as the measured position, the measured position is measured based on the coordinates of multiple positions where the probe 17 contacts the surface of the sphere.

[0025] Specifically, the three-dimensional measuring device 1 moves the slider 15 in the X-axis direction along the beam 13, thereby moving the probe 17 in the X-axis direction. The three-dimensional measuring device 1 moves the probe 17 in the Y-axis direction by the Y-axis direction drive unit 14 moving a gate unit including the column 11, the supporter 12, and the beam 13. The three-dimensional measuring device 1 moves the probe 17 in the Z-axis direction by moving the Z-axis spindle 16 in the Z-axis direction relative to the slider 15.

[0026] The three-dimensional measuring device 1 measures the coordinates of a plurality of measured positions on each of a plurality of spheres of the standard gauge 19 while moving the probe 17 in the X-axis, Y-axis, and Z-axis directions. The three-dimensional measuring device 1 outputs coordinate information indicating the coordinates of the plurality of measured positions, which are the measurement results, from a communication section of the control unit 18 to the measuring machine control device 2 via the network N.

[0027] Returning to FIG. 1, the measuring machine control device 2 is an information terminal for controlling the three-dimensional measuring device 1, for example a computer. The measuring machine control device 2 operates as an abnormality determination device for determining the presence or absence of an abnormality in the three-dimensional measuring device 1. The measuring machine control device 2 determines whether or not the distance between a plurality of measured positions calculated based on the coordinates of a plurality of measured positions included in the measurement result acquired from the three-dimensional measuring device 1 is appropriate, for example. If the calculated distance is appropriate, the measuring machine control device 2 determines that there is no abnormality in the three-dimensional measuring device 1, and if the calculated distance is not appropriate, the measuring machine control device 2 determines that there is an abnormality in the three-dimensional measuring device 1.

[0028] The data management device 3 is, for example, a computer. The data management device 3 may be a single information processing device, or may be configured with multiple information processing devices, for example, a cloud-type server. The data management device 3 acquires measurement results indicating the coordinates of multiple measured positions measured by the three-dimensional measuring device 1 and judgment results obtained by the measuring device control device 2 as to whether or not there is an abnormality in the three-dimensional measuring device 1, from the measuring device control device 2. The data management device 3 stores the acquired measurement results and judgment results in a storage unit.

[0029] The information terminal 4 is, for example, a computer, and is an information terminal used by a serviceman who performs maintenance on the three-dimensional measuring device 1 or a user of the three-dimensional measuring device 1. The information terminal 4 acquires the measurement results and judgment results stored in the data management device 3 via the network N. The information terminal 4 displays the acquired measurement results and judgment results on, for example, a display connected to the information terminal 4. The operation of the abnormality judgment system S1 will be described below.

[0030] The three-dimensional measuring device 1 acquires, via the network N ((1) in FIG. 1), measurement instruction information that the measuring machine control device 2 has output to instruct the three-dimensional measuring device 1 to measure the standard gauge 19. The measurement instruction information is information that the measuring machine control device 2 outputs, for example, during daily inspection of the three-dimensional measuring device 1, and is output when the user operates the measuring machine control device 2.

[0031] In response to acquiring measurement instruction information from the measuring machine control device 2, the three-dimensional measuring device 1 measures the coordinates of a plurality of measured positions on a standard gauge 19 placed on the three-dimensional measuring device 1 ((2) in FIG. 1). The standard gauge 19 is placed at a predetermined position on the three-dimensional measuring device 1, for example, before a user of the three-dimensional measuring device 1 starts daily inspection of the three-dimensional measuring device 1. The three-dimensional measuring device 1 outputs measurement results including coordinate information indicating the coordinates of the plurality of measured positions to the measuring machine control device 2 via the network N ((3) in FIG. 1).

[0032] The measuring machine control device 2 determines whether or not there is an abnormality in the coordinate measuring device 1 by calculating the distance between the multiple measured positions based on the coordinates of the multiple measured positions included in the acquired measurement results ((4) in FIG. 1). The measuring machine control device 2 outputs the determination result of whether or not there is an abnormality in the coordinate measuring device 1 and the measurement results acquired from the measuring machine control device 2 to the data management device 3 ((5) in FIG. 1).

[0033] The data management device 3 stores the judgment results and measurement results obtained from the measuring machine control device 2 ((6) in FIG. 1). The information terminal 4 obtains the judgment results and measurement results stored in the data management device 3 via the network N ((7) in FIG. 1). A serviceman using the information terminal 4 can, for example, display the judgment results and measurement results obtained by the information terminal 4 on a display connected to the information terminal 4 to check whether there is an abnormality in the coordinate measuring device 1 ((8) in FIG. 1).

[0034] By operating the abnormality determination system S1 in this manner, a serviceman or a user can obtain the results of daily inspections of the three-dimensional measuring device 1. As a result, the serviceman or the user can detect the presence or absence of an abnormality in the three-dimensional measuring device 1 even at a timing other than the timing for serviceman maintenance (for example, the annual calibration date), and therefore the occurrence of an abnormality in the three-dimensional measuring device 1 can be detected at an early stage.

[0035] [Configuration of anomaly detection system S1] Fig. 3 is a diagram showing the configuration of an abnormality determination system S1. Fig. 3 shows a three-dimensional measuring device 1, a measuring machine control device 2, and a data management device 3. A control unit 18 of the three-dimensional measuring device 1 has a communication section 181 and a measurement section 182. The measuring machine control device 2 has a communication section 21, a storage section 22, and a control section 23. The control section 23 has a measurement control section 231, a data acquisition section 232, a generation section 233, an appropriate range determination section 234, and a determination section 235.

[0036] In response to acquiring measurement instruction information from the measuring machine control device 2, the control unit 18 controls the position of the probe 17 to measure a plurality of measured positions on the standard gauge 19. The control unit 18 measures the plurality of measured positions by moving the position of the probe 17 to the standard gauge 19 based on coordinates indicating the predetermined measured positions. The control unit 18 outputs the measurement results measured by the three-dimensional measuring device 1 to the measuring machine control device 2.

[0037] The communication unit 181 includes a communication device for transmitting and receiving information via the network N. The communication device is, for example, a LAN (Local Area Network) controller or a wireless LAN controller. The communication unit 181 notifies the measurement unit 182 of measurement instruction information acquired from the measuring machine control device 2. The communication unit 181 transmits position data indicating a plurality of measured positions to the measuring machine control device 2 operating as an abnormality determination device, in association with device identification information (hereinafter referred to as "device ID") for identifying the three-dimensional measuring device 1. The position data is, for example, coordinate information indicating the coordinates of the measured positions.

[0038] The measurement unit 182 measures a plurality of measured positions of the standard gauge 19 used in the three-dimensional measuring device 1. When the three-dimensional measuring device 1 is equipped with the table 10 shown in FIG. 2, the measurement unit 182 measures the standard gauge 19 placed on the table 10, and when the three-dimensional measuring device 1 is not equipped with the table 10, the measurement unit 182 measures the standard gauge 19 installed at a predetermined position by a user. The measurement unit 182 measures the coordinates of the measured positions, for example, while moving the probe 17 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The measurement unit 182 measures the coordinates of the measured positions on each of a plurality of spheres of the standard gauge 19, for example, and generates position data indicating the measured positions.

[0039] [Configuration of measuring device control device 2] The communication unit 21 includes a communication device for transmitting and receiving information via the network N. The communication device is, for example, a LAN controller or a wireless LAN controller.

[0040] The storage unit 22 has storage media such as a Read Only Memory (ROM), a Random Access Memory (RAM), and a Solid State Drive (SSD). The storage unit 22 stores programs executed by the control unit 23. The storage unit 22 stores appropriate range information indicating appropriate ranges used to determine the presence or absence of an abnormality in the three-dimensional measuring device 1. The appropriate range information is, for example, maximum and minimum values ​​of a range in which the distance between a plurality of measured positions measured by the three-dimensional measuring device 1 is determined to be appropriate.

[0041] The control unit 23 is, for example, a CPU (Central Processing Unit). The control unit 23 executes a program stored in the storage unit 22 to function as a measurement control unit 231, a data acquisition unit 232, a generation unit 233, an appropriate range determination unit 234, and a judgment unit 235.

[0042] The measurement control unit 231 outputs measurement instruction information to the three-dimensional measuring device 1 for measuring a plurality of positions to be measured on the standard gauge 19. For example, a user using the measuring machine control device 2 operates a mouse or keyboard connected to the measuring machine control device 2 to press a "Start measurement" button displayed on a display connected to the measuring machine control device 2. The measurement control unit 231 outputs measurement instruction information to the three-dimensional measuring device 1 in response to the pressing of the "Start measurement" button.

[0043] The data acquisition unit 232 acquires the result of the measurement of the standard gauge by the three-dimensional measuring device 1. The data acquisition unit 232 acquires position data indicating a plurality of measured positions of the standard gauge 19 used in the three-dimensional measuring device 1 in association with a device ID for identifying the three-dimensional measuring device 1. The position data is data indicating the result of the measurement of a plurality of predetermined measured positions on the standard gauge 19 by the three-dimensional measuring device 1. The position data may include coordinates of the measured positions, or may include coordinates of a plurality of positions on the surface of a sphere used to specify the center position of the sphere that is the measured position. The data acquisition unit 232 acquires, for example, the coordinates of the plurality of measured positions and the device ID of the three-dimensional measuring device 1 from the measurement unit 182. The data acquisition unit 232 may acquire the device ID stored in the storage unit 22.

[0044] The data acquiring unit 232 may further acquire temperature data indicating the temperature of the three-dimensional measuring device 1 at the time when the three-dimensional measuring device 1 measures the multiple measured positions. The data acquiring unit 232 acquires, via the network N, temperature data indicating the temperature acquired by the measuring unit 182 from a temperature sensor placed near the standard gauge 19, for example, at the time when the three-dimensional measuring device 1 measures the multiple measured positions on the standard gauge 19.

[0045] The data acquiring unit 232 may further acquire sphericity data indicating the sphericity of the spheres held by the standard gauge 19, measured by the three-dimensional measuring device 1. The data acquiring unit 232 acquires, via the network N, the sphericity data generated by, for example, the measuring unit 182 measuring the sphericity of each of the multiple spheres held by the standard gauge 19.

[0046] The generating unit 233 generates distance data indicating a measured distance, which is a distance between a plurality of measured positions indicated by the position data. The measured distance is, for example, the distance between the centers of two of a plurality of spheres possessed by the standard gauge 19 (hereinafter referred to as "inter-sphere distance"). The generating unit 233 calculates the inter-sphere distance by calculating the position of the center of each of the plurality of spheres possessed by the standard gauge 19 based on a plurality of positions on the surface of the sphere indicated by the position data.

[0047] The generating unit 233 generates distance data, for example, periodically. Specifically, every time a daily inspection is performed, the generating unit 233 generates distance data corresponding to each piece of position data acquired by the data acquiring unit 232. The generating unit 233 calculates a measured distance, which is a distance between a plurality of measured positions indicated by the position data acquired by the data acquiring unit 232, for example, to generate distance data indicating the measured distance.

[0048] The generating unit 233 may generate distance data indicating a plurality of measured distances, which are distances between a plurality of measured positions indicated by the position data. The generating unit 233 generates distance data indicating two or more measured distances, based on the coordinates of three or more measured positions indicated by the position data generated by the measuring unit 182 measuring the standard gauge 19 having three or more measured positions, which is acquired by the data acquiring unit 232, for example.

[0049] The generating unit 233 may calculate the measured distance by correcting the distance between the multiple measured positions calculated based on the multiple measured positions indicated by the position data based on the temperature indicated by the temperature data. The generating unit 233 corrects the measured distance calculated based on the measured positions indicated by the position data based on the temperature indicated by the temperature data associated with the position data acquired by the data acquiring unit 232, for example. By operating in this manner, the generating unit 233 can calculate the measured distance with reduced measurement error caused by the temperature at the time when the measured positions are measured.

[0050] The generating unit 233 may generate initial distance data used to determine an appropriate range of the measured distance. For example, when the data acquiring unit 232 acquires position data together with initialization data indicating that the appropriate range is to be initialized, the generating unit 233 calculates the measured distance, which is the distance between the multiple measured positions indicated by the position data, to generate initial distance data indicating the measured distance at the time of initialization. The initialization data is data generated together with measurement instruction information by a serviceman operating the measuring machine control device 2, for example, when the serviceman performs maintenance on the three-dimensional measuring device 1.

[0051] The appropriate range determination unit 234 determines an appropriate range in which the measured distance indicated by the distance data is determined to be appropriate. The appropriate range is the maximum and minimum values ​​of the range in which the measured distance is determined to be appropriate. The appropriate range determination unit 234 acquires setting data including the maximum and minimum values ​​of the appropriate range from, for example, an information terminal used by a user of the three-dimensional measuring device 1 or an information terminal 4 used by a serviceman. The appropriate range determination unit 234 determines the appropriate range based on the maximum and minimum values ​​included in the acquired setting data.

[0052] The appropriate range determination unit 234 may determine an appropriate range based on the initial distance data generated by the generation unit 233. The appropriate range is, for example, a range in which a difference between the measured distance indicated by the distance data generated by the generation unit 233 and the measured distance indicated by the initial distance data used as the basis of the appropriate range by the appropriate range determination unit 234 is an allowable error due to the mechanical precision of the three-dimensional measuring device 1 or an error due to the probe 17.

[0053] By operating in this manner, the appropriate range determination unit 234 can determine a highly accurate application range based on the measurement distance with little error at the time when a serviceman performed maintenance on the three-dimensional measuring device 1. As a result, the measuring machine control device 2 can determine with high accuracy whether or not there is an abnormality in the three-dimensional measuring device 1.

[0054] The appropriate range determination unit 234 may determine a different appropriate range for each device ID of the three-dimensional measuring device 1. The appropriate range determination unit 234 determines the appropriate range by, for example, identifying the maximum and minimum values ​​of the appropriate range associated with the device ID acquired from the three-dimensional measuring device 1 from the maximum and minimum values ​​of a plurality of appropriate ranges included in the setting data. The appropriate range determination unit 234 stores the appropriate range associated with the device ID in the storage unit 22.

[0055] The appropriate range determination unit 234 may determine a different appropriate range for each model of the three-dimensional measuring device 1. The appropriate range determination unit 234 identifies the model of the three-dimensional measuring device 1 based on a device ID acquired by the data acquisition unit 232 from the three-dimensional measuring device 1, for example. The appropriate range determination unit 234 determines the appropriate range by identifying the maximum and minimum values ​​of the appropriate range associated with the identified model from among the maximum and minimum values ​​of multiple appropriate ranges included in the acquired setting data. The appropriate range determination unit 234 stores the appropriate range associated with model information indicating the model of the measuring device in the storage unit 22.

[0056] By the appropriate range determination unit 234 determining the appropriate range corresponding to the model of the measuring device, the measuring machine control device 2 can appropriately determine the presence or absence of an abnormality regardless of the model of the three-dimensional measuring device 1, even if the accuracy required differs for each model.

[0057] The appropriate range determination unit 234 may determine an appropriate range in association with each of a plurality of measurement regions in the three-dimensional measuring device 1. The appropriate range determination unit 234 acquires, for example, measurement region data indicating a measurement region associated with position data acquired by the data acquisition unit 232. The appropriate range determination unit 234 determines the appropriate range by identifying the maximum and minimum values ​​corresponding to the measurement region indicated by the measurement region data, among the maximum and minimum values ​​of the plurality of appropriate ranges included in the setting data. The appropriate range determination unit 234 stores the appropriate range in the storage unit 22 in association with each of the plurality of measurement regions in the three-dimensional measuring device 1.

[0058] By the appropriate range determination unit 234 determining an appropriate range corresponding to the measurement area of ​​the measuring device, the measuring machine control device 2 can appropriately determine whether or not there is an abnormality in the three-dimensional measuring device 1 even if the accuracy of the three-dimensional measuring device 1 differs for each measurement area and the location where the standard gauge 19 is placed is not constant.

[0059] The appropriate range determination unit 234 may determine an appropriate range in association with each of a plurality of measured positions of the standard gauge 19. For example, the data acquisition unit 232 acquires position data and sphere identification information (hereinafter referred to as "sphere ID") for identifying a sphere of the standard gauge 19, which is associated with each of the plurality of measured positions indicated by the position data. The appropriate range determination unit 234 specifies two sphere IDs associated with two measured positions corresponding to the measured distances indicated by the distance data generated by the generation unit 233.

[0060] The appropriate range determination unit 234 determines the appropriate range by identifying the maximum and minimum values ​​corresponding to the combination of the identified two sphere IDs from among the maximum and minimum values ​​of multiple appropriate ranges included in the setting data. The appropriate range determination unit 234 stores the determined appropriate range in the storage unit 22. By the appropriate range determination unit 234 determining the appropriate range corresponding to the distance between the measured positions, the measuring machine control device 2 can appropriately determine the presence or absence of an abnormality in the three-dimensional measuring device 1 even when standard gauges 19 with different distances between the measured positions are used.

[0061] The determination unit 235 determines whether or not there is an abnormality in the three-dimensional measuring device 1. The determination unit 235 determines whether or not there is an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance indicated by the distance data is included in an appropriate range, and outputs the determination result in association with the device ID. For example, when the measured distance indicated by the distance data generated by the generation unit 233 is included in the appropriate range stored in the storage unit 22, the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1. On the other hand, when the measured distance is not included in the appropriate range, the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1.

[0062] The determination unit 235 transmits the result of determining whether or not there is an abnormality in the three-dimensional measuring device 1 to the data management device 3 via the communication unit 21. The determination unit 235 may transmit the determination result together with distance data indicating the measured distance to the data management device 3. The determination unit 235 transmits, for example, the vector of the probe 17, the coordinates of the measured position, and the diameter and sphericity of the sphere of the standard gauge 19 to the data management device 3.

[0063] The measured distance is, for example, the inter-sphere distance between a plurality of spheres of the standard gauge 19. Since the inter-sphere distance is not easily affected by the directional characteristics of the probe 17, the determination unit 235 can determine with high accuracy whether or not there is an abnormality in the three-dimensional measuring device 1 by using the inter-sphere distance as the measured distance.

[0064] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether or not the multiple measured distances indicated by the distance data are included in an appropriate range. For example, when one or more of the multiple measured distances are not included in the appropriate range, the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1, and when all of the multiple measured distances are included in the appropriate range, the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1. By the determination unit 235 using the multiple measured distances in this manner, the determination unit 235 can improve the accuracy of determining the presence or absence of an abnormality.

[0065] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 by using an appropriate range corresponding to each of the multiple measured distances. The determination unit 235 determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on, for example, whether a distance is included in an appropriate range associated with measured positions corresponding to the multiple measured distances indicated by the distance data. The determination unit 235 acquires, for example, an appropriate range corresponding to two measured positions associated with the measured distance from the storage unit 22, and determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether the measured distance is included in the acquired appropriate range.

[0066] In this manner, the judgment unit 235 judges whether or not there is an abnormality in the three-dimensional measuring device 1 using an appropriate range associated with a measured position corresponding to a measured distance, so that the judgment unit 235 can judge whether or not there is an abnormality in the three-dimensional measuring device 1 using the correct appropriate range according to the shape of the standard gauge 19.

[0067] The determination unit 235 may determine the presence or absence of an abnormality based on the appropriate range associated with the device ID acquired by the data acquisition unit 232. The determination unit 235 acquires, for example, the appropriate range associated with the device ID from the storage unit 22, and determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether the measured distance is included in the applicable range. By operating the determination unit 235 in this manner, when a user has multiple three-dimensional measuring devices 1 and the measurement accuracy required for each of the multiple three-dimensional measuring devices 1 is different, the determination unit 235 can determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on the appropriate range corresponding to the measurement accuracy required for each of the multiple three-dimensional measuring devices 1.

[0068] The determination unit 235 may determine the presence or absence of an abnormality based on an appropriate range associated with the model of the three-dimensional measuring device 1 identified based on the device ID. The determination unit 235 acquires, for example, an appropriate range associated with the model of the three-dimensional measuring device 1 from the storage unit 22, and determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether the measured distance is included in the applicable range. By operating in this manner, the determination unit 235 can determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on an appropriate range corresponding to a measurement accuracy that differs for each model of the three-dimensional measuring device 1.

[0069] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance indicated by the distance data is included in an appropriate range associated with a measurement area including a plurality of measured positions indicated by the position data. The determination unit 235, for example, acquires from the storage unit 22 an appropriate range associated with a measurement area corresponding to the measured positions, and determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance is included in the applicable range. By operating in this manner, the determination unit 235 can ensure sufficient determination accuracy even when the user cannot place the standard gauge 19 in a certain position.

[0070] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on the amount of change in the multiple distance data generated periodically. The determination unit 235 determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on the result of comparing the amount of change in the multiple measured distances indicated by the multiple distance data generated by the generation unit 233 with a reference value, for example. The reference value is the maximum amount of change at which it can be determined that there is no abnormality in the three-dimensional measuring device 1, and is, for example, the maximum value in a range at which it can be determined that the amount of change has occurred due to aging of the three-dimensional measuring device 1.

[0071] For example, when the amount of change in the multiple measured distances indicated by the distance data is smaller than a reference value, the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1, and when the amount of change in the multiple measured distances is larger than the reference value, the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1. By operating in this manner, the determination unit 235 can determine that there is an abnormality in the three-dimensional measuring device 1 due to a large change in the measured distance, even if the measured distance is within an appropriate range. As a result, the determination unit 235 can determine the presence or absence of an abnormality in the three-dimensional measuring device 1 with high accuracy.

[0072] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on the result of comparing the pattern of the relationship between the time when the three or more measured distances are measured and the three or more measured distances with a reference pattern. The reference pattern is a pattern that can be used to determine that there is no abnormality in the three-dimensional measuring device 1, and is a pattern that may occur due to deterioration of the three-dimensional measuring device 1 over time, for example.

[0073] The determination unit 235, for example, identifies the amounts of change in three or more measured distances and the times at which the three or more measured distances were measured, thereby identifying the amounts of change in two or more measured distances corresponding to the amounts of change in two or more times. If the identified amounts of change are within a certain range from the reference pattern of amounts of change acquired from the storage unit 22, the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1, and if they are not within the certain range, the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1. By operating in this manner, the determination unit 235 can increase the possibility of detecting whether the three-dimensional measuring device 1 has an abnormality that requires maintenance.

[0074] The determination unit 235 may determine the presence or absence of an abnormality in the three-dimensional measuring device 1 based on the sphericity of a plurality of spheres in the standard gauge. For example, when the sphericity indicated by the sphericity data acquired by the data acquisition unit 232 exceeds a certain range from the reference value, the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1, and when the sphericity is within the certain range from the reference value, the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1.

[0075] When dust or other debris adheres to the sphere of the standard gauge 19, the sphericity of the sphere changes significantly. In response to this, the determination unit 235 determines whether or not there is an abnormality in the coordinate measuring device 1 based on the sphericity indicated by the sphericity data, and the determination unit 235 can determine, for example, whether or not cleaning of the coordinate measuring device 1 and the standard gauge 19 is necessary.

[0076] Fig. 4 is a diagram showing the time when multiple measured distances were measured and the multiple measured distances. The horizontal axis of Fig. 4 indicates the inspection date when the measured distances were measured, and the vertical axis of Fig. 4 indicates the ball distance, which is the measured distance. The ball distance R is the ball distance indicated by the initial distance data, which is the standard for the appropriate range. The ball distance M1 is the maximum value of the appropriate range, and the ball distance M2 is the minimum value of the appropriate range.

[0077] In Fig. 4(a), the inter-ball distances measured on each of multiple inspection dates D (D1 to D5) are within the appropriate range (inter-ball distance M1 to inter-ball distance M2), so the judgment unit 235 judges that there is no abnormality in the three-dimensional measuring device 1. On the other hand, in Fig. 4(b), the inter-ball distance measured on inspection date D5 is not within the appropriate range, so the judgment unit 235 judges that there is an abnormality in the three-dimensional measuring device 1.

[0078] The data management device 3 stores the measurement results indicating the measured distances and the judgment results of the presence or absence of an abnormality transmitted from the judgment unit 235 in association with the inspection date, and provides the measurement results and judgment results to the information terminal 4 in response to a request from the information terminal 4. The information terminal 4 displays a screen showing the measurement results, for example, as shown in Fig. 4. A serviceman performing maintenance on the three-dimensional measuring device 1 can view the measurement results shown in Fig. 4 by operating the information terminal 4 to obtain the measurement results and judgment results from the data management device 3.

[0079] [Flowchart of measuring device control device 2] Fig. 5 is a flowchart for explaining the operation of the measuring machine control device 2. The flowchart shown in Fig. 5 shows the operation from obtaining position data indicating the result of measuring the standard gauge 19 to determining whether or not there is an abnormality in the coordinate measuring device 1.

[0080] The data acquiring unit 232 acquires position data indicating the results of measuring a plurality of measured positions on the standard gauge 19 from the three-dimensional measuring device 1 (S11). When the generating unit 233 acquires initialization data indicating that the appropriate range is to be initialized together with the position data (YES in S12), it generates initial distance data by calculating the measured distance, which is the distance between the plurality of measured positions indicated by the position data (S13). The appropriate range determining unit 234 determines an appropriate range based on the initial distance data generated by the generating unit 233 (S14).

[0081] If the generation unit 233 does not acquire initialization data together with the position data (NO in S12), it calculates the measured distance to generate distance data (S15). If the distance data generated by the generation unit 233 is within the appropriate range (YES in S16), the determination unit 235 determines that there is no abnormality in the three-dimensional measuring device 1 (S17). On the other hand, if the distance data is not within the appropriate range (NO in S16), the determination unit 235 determines that there is an abnormality in the three-dimensional measuring device 1 (S18). The determination unit 235 outputs the result of determining whether there is an abnormality in the three-dimensional measuring device 1 and the position data acquired by the data acquisition unit 232 to the data management device 3 (S19).

[0082] [Variations] In the above explanation, an example has been given of the operation in which the three-dimensional measuring device 1 generates position data and the generation unit 233 generates distance data indicating the measured distance based on the multiple measured positions indicated by the position data, but the three-dimensional measuring device 1 may also generate position data and distance data and output the generated position data and distance data to the measuring machine control device 2.

[0083] In this case, in the three-dimensional measuring device 1, the measuring unit 182 measures a plurality of measured positions, or a measured distance which is the distance between a plurality of measured positions, of a standard gauge 19 used in the three-dimensional measuring device 1. The communication unit 181 transmits position data indicating the plurality of measured positions, or distance data indicating the measured distance, in association with a device ID for identifying the three-dimensional measuring device 1, to the measuring machine control device 2 operating as an abnormality determination device.

[0084] Next, in the measuring machine control device 2, the data acquiring unit 331 acquires the position data or the distance data. The determining unit 334 determines whether or not the coordinate measuring device 1 has an abnormality based on whether or not the measurement distance specified based on the position data or the distance data acquired by the data acquiring unit 331 is within the appropriate range acquired from the storage unit 22.

[0085] By having the three-dimensional measuring device 1 generate distance data in this manner, the measuring machine control device 2 can reduce the amount of calculation required to calculate the measured distance from the multiple measured positions indicated by the position data, thereby reducing the processing load on the measuring machine control device 2.

[0086] [Effects of the measuring device control device 2 according to the first embodiment] As described above, the measuring machine control device 2 according to the first embodiment includes the data acquisition unit 232 that acquires position data indicating the results of measuring a plurality of measured positions by the three-dimensional measuring device 1, and the generation unit 233 that generates distance data by calculating a measured distance, which is the distance between the measured positions. Then, the determination unit 235 determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance indicated by the distance data is included in an appropriate range of the measured distance stored in the storage unit 22, and outputs the determination result to the data management device 3. This allows the user of the three-dimensional measuring device 1 and a serviceman who performs maintenance on the three-dimensional measuring device 1 to know at an early stage that an abnormality has occurred in the three-dimensional measuring device 1.

[0087] <Second embodiment> [Outline of the S2 anomaly detection system] Fig. 6 is a diagram for explaining an overview of an abnormality determination system S2 according to a second embodiment. The abnormality determination system S2 differs from the abnormality determination system S1 shown in Fig. 1 in that the data management device 3 operates as an abnormality determination device for determining the presence or absence of an abnormality in the coordinate measuring device 1, but is the same in other respects. The operation of the abnormality determination system S2 will be described below.

[0088] The three-dimensional measuring device 1 acquires, via the network N ((1) in FIG. 6), measurement instruction information output by the measuring machine control device 2 to instruct the three-dimensional measuring device 1 to measure the standard gauge 19. In response to acquiring the measurement instruction information from the measuring machine control device 2, the three-dimensional measuring device 1 measures the coordinates of a plurality of measured positions on the standard gauge 19 used in the three-dimensional measuring device 1 ((2) in FIG. 6).

[0089] The three-dimensional measuring device 1 outputs coordinate information indicating the coordinates of a plurality of measured positions, which are the measurement results, to the data management device 3 via the network N ((3) in FIG. 6). The data management device 3 determines whether or not there is an abnormality in the three-dimensional measuring device 1 by calculating the distances between the plurality of measured positions based on the coordinates of the plurality of measured positions contained in the acquired measurement results ((4) in FIG. 6). The data management device 3 outputs the determination result of whether or not there is an abnormality in the three-dimensional measuring device 1 to the measuring machine control device 2 ((5) in FIG. 6).

[0090] The data management device 3 stores the judgment results of whether or not there is an abnormality in the three-dimensional measuring device 1 and the measurement results obtained from the measuring machine control device 2 ((6) in FIG. 6). The information terminal 4 acquires the judgment results and measurement results stored in the data management device 3 via the network N ((7) in FIG. 6). A serviceman using the information terminal 4 or a user of the three-dimensional measuring device 1 can check whether or not there is an abnormality in the three-dimensional measuring device 1, for example, by displaying the judgment results and measurement results acquired by the information terminal 4 on a display connected to the information terminal 4 ((8) in FIG. 6).

[0091] [Configuration of anomaly detection system S2] Fig. 7 is a diagram showing the configuration of an abnormality determination system S2. Fig. 7 shows a three-dimensional measuring device 1, a measuring machine control device 2, and a data management device 3. The configuration of the three-dimensional measuring device 1 is the same as that of the three-dimensional measuring device 1 shown in Fig. 3. Below, the operations of the measuring machine control device 2 and the data management device 3 according to the second embodiment will be described, focusing on functions different from those of the first embodiment.

[0092] The measuring device control device 2 has a communication unit 21 and a control unit 23. The control unit 23 has a measurement control unit 231 and a data acquisition unit 232. The data management device 3 has a communication unit 31, a storage unit 32, and a control unit 33. The control unit 33 has a data acquisition unit 331, a generation unit 332, an appropriate range determination unit 333, and a judgment unit 334.

[0093] The measurement control unit 231 is the same as the measurement control unit 231 shown in Fig. 3. The data acquisition unit 232 acquires the result of judging the presence or absence of an abnormality in the coordinate measuring device 1 from the data management device 3. The data acquisition unit 232 displays the acquired result on a display connected to the measuring machine control device 2, for example.

[0094] The communication unit 31 includes a communication device for transmitting and receiving information via the network N. The communication device is, for example, a LAN controller or a wireless LAN controller. The storage unit 32 has storage media such as a ROM, a RAM, and an SSD. The storage unit 32 stores a program executed by the control unit 33. The storage unit 32 stores appropriate range information indicating an appropriate range used to determine the presence or absence of an abnormality in the three-dimensional measuring device 1.

[0095] The control unit 33 is, for example, a CPU. The control unit 33 executes a program stored in the storage unit 32 to function as a data acquisition unit 331, a generation unit 332, an appropriate range determination unit 333, and a judgment unit 334.

[0096] 3. The data acquiring unit 331 acquires, for example, the vector of the probe 17, the coordinates of the position to be measured, and the diameter and sphericity of the sphere of the standard gauge 19 via the communication unit 31. The data acquiring unit 331 may acquire these data from the measuring device control device 2.

[0097] The generating unit 332 has a function equivalent to that of the generating unit 233 shown in Fig. 3. The appropriate range determining unit 333 has a function equivalent to that of the appropriate range determining unit 234 shown in Fig. 3. Since the data management device 3 can manage data related to a plurality of three-dimensional measuring devices 1 used by a plurality of users, the appropriate range determining unit 234 may determine the appropriate range in association with a user ID for identifying the user.

[0098] Judgment unit 334 differs from judgment unit 334 shown in FIG. 3 in that judgment unit 334 outputs the result of judging whether or not there is an abnormality in three-dimensional measuring device 1 to measuring machine control device 2 in association with the device ID, and stores the measurement results acquired by data acquisition unit 331 and the result of judging whether or not there is an abnormality in three-dimensional measuring device 1 in memory unit 32, but is the same in other respects.

[0099] [Effects of the data management device 3 according to the second embodiment] As described above, the data management device 3 according to the second embodiment has a data acquisition unit 331 that acquires position data indicating the results of measuring a plurality of measured positions by the three-dimensional measuring device 1, and a generation unit 332 that generates distance data by calculating a measured distance, which is the distance between the measured positions. Then, a determination unit 334 determines the presence or absence of an abnormality in the three-dimensional measuring device 1 based on whether or not the measured distance indicated by the distance data is included in the appropriate range of the measured distance stored in the storage unit 22, and outputs the determination result to the measuring machine control device 2.

[0100] Unlike the first embodiment, the data management device 3 operates as an abnormality determination device, so that even if the computer used as the measuring machine control device 2 is replaced, the user can determine whether or not there is an abnormality in the three-dimensional measuring device 1 without having to re-set the appropriate range.

[0101] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by distributing or integrating functionally or physically in any unit. In addition, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment resulting from the combination combines the effect of the original embodiment. [Explanation of symbols]

[0102] 1 Three-dimensional measuring device 2 Measuring machine control device 3 Data management device 4. Information terminals 10 Tables 11 Column 12 Supporters 13. Beam 14 Y-axis direction drive unit 15 Slider 16 Z-axis spindle 17 Probe 18 Control Unit 19 Standard Gauge 21 Communications Department 22 Memory section 23 Control Unit 31 Communications Department 32 Storage section 33 Control Unit 181 Communications Department 182 Measuring section 231 Measurement control section 232 Data Acquisition Section 233 Generation part 234 Appropriate Range Determination Department 235 Judgment section 331 Data Acquisition Department 332 Generation part 333 Appropriate Range Determination Department 334 Judgment section

Claims

1. a data acquiring unit that acquires position data indicating a plurality of measurement positions of a standard gauge used in a three-dimensional measuring device in association with device identification information for identifying the three-dimensional measuring device; a generating unit that generates distance data indicating a measured distance, which is a distance between the plurality of measured positions indicated by the position data; an appropriate range determination unit that determines an appropriate range within which the distance data is determined to be appropriate; A storage unit that stores the appropriate range; a determination unit that determines whether or not there is an abnormality in the coordinate measuring device based on whether or not the measured distance indicated by the distance data is within the appropriate range, and outputs the determination result in association with the device identification information; having when the data acquisition unit acquires the position data together with initialization data indicating that the appropriate range is to be initialized, the generation unit calculates a measured distance, which is a distance between the plurality of measured positions indicated by the position data, to generate initial distance data indicating the measured distance at the time of initialization; The appropriate range determination unit determines the appropriate range based on the initial distance data. Abnormality determination device.

2. the data acquisition unit further acquires temperature data indicating a temperature of the three-dimensional measuring device at a time when the three-dimensional measuring device measures a plurality of measurement positions; The generation unit calculates the measured distance by correcting the distance between the plurality of measured positions, which is calculated based on the plurality of measured positions indicated by the position data, based on the temperature indicated by the temperature data. The abnormality determination device according to claim 1 .

3. The storage unit stores the appropriate range in association with a model of the measurement device, the determination unit determines the presence or absence of an abnormality based on the appropriate range associated with the model of the coordinate measuring device identified based on the device identification information. The abnormality determination device according to claim 1 or 2.

4. The storage unit stores the appropriate range in association with the device identification information, the determination unit determines whether or not there is an abnormality based on the appropriate range associated with the device identification information acquired by the data acquisition unit. The abnormality determination device according to claim 1 .

5. the storage unit stores the appropriate range in association with each of a plurality of measurement regions in the three-dimensional measuring device; the determination unit determines whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the measurement distance indicated by the distance data is included in the appropriate range associated with the measurement region including the multiple measurement positions indicated by the position data. The abnormality determination device according to claim 1 .

6. the standard gauge has three or more of the measured positions; the generating unit generates the distance data indicating a plurality of measured distances which are distances between the plurality of measured positions indicated by the position data; the determination unit determines whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the plurality of measured distances indicated by the distance data are within the appropriate range. The abnormality determination device according to claim 1 .

7. the storage unit stores the appropriate range in association with each of a plurality of measurement positions of the standard gauge; the determination unit determines whether or not there is an abnormality in the three-dimensional measuring device based on whether or not the distance is included in the appropriate range associated with between the measured positions corresponding to the plurality of measured distances indicated by the distance data. The abnormality determination device according to claim 6.

8. The generating unit periodically generates the distance data, the determination unit determines whether or not there is an abnormality in the three-dimensional measuring device based on a result of comparing amounts of change in the plurality of measured distances indicated by the plurality of distance data generated by the generation unit with a reference value. The abnormality determination device according to claim 1 .

9. the determination unit determines the presence or absence of an abnormality in the three-dimensional measuring device based on a result of comparing a pattern of a relationship between the time when the three or more measured distances are measured and the three or more measured distances with a reference pattern. The abnormality determination device according to claim 8.

10. The computer executes acquiring position data indicating a plurality of measured positions of a standard gauge used in the three-dimensional measuring device in association with device identification information for identifying the three-dimensional measuring device; generating distance data indicating measured distances which are distances between the plurality of measured positions indicated by the position data; determining an appropriate range within which the distance data is determined to be appropriate; determining whether or not there is an abnormality in the coordinate measuring device based on whether or not the measured distance indicated by the distance data is within the appropriate range, and outputting the determination result in association with the device identification information; having In the step of acquiring the position data, based on acquisition of the position data together with initialization data indicating that the appropriate range is to be initialized, in the step of generating the distance data, a measured distance which is a distance between the plurality of measured positions indicated by the position data is calculated, thereby generating initial distance data indicating the measured distance at the time of initialization; In the step of determining the appropriate range, the appropriate range is determined based on the initial distance data. Abnormality determination method.

11. On the computer, acquiring position data indicating a plurality of measured positions of a standard gauge used in the three-dimensional measuring device in association with device identification information for identifying the three-dimensional measuring device; generating distance data indicating measured distances which are distances between the plurality of measured positions indicated by the position data; determining an appropriate range within which the distance data is determined to be appropriate; determining whether or not there is an abnormality in the coordinate measuring device based on whether or not the measured distance indicated by the distance data is within the appropriate range, and outputting the determination result in association with the device identification information; Run the command, In the step of acquiring the position data, based on acquisition of the position data together with initialization data indicating that the appropriate range is to be initialized, in the step of generating the distance data, a measured distance which is a distance between the plurality of measured positions indicated by the position data is calculated, thereby generating initial distance data indicating the measured distance at the time of initialization; In the step of determining the appropriate range, the appropriate range is determined based on the initial distance data. program.

12. 1. An abnormality determination system comprising: a three-dimensional measuring device; and an abnormality determination device that determines whether or not an abnormality exists in the three-dimensional measuring device, The three-dimensional measuring device is a measurement unit that measures a plurality of measured positions of a standard gauge used in the three-dimensional measuring device, or a measured distance that is a distance between the plurality of measured positions; a communication unit that transmits to the abnormality determination device position data indicating the plurality of measured positions or distance data indicating the measured distances in association with device identification information for identifying the three-dimensional measuring device; having The abnormality determination device includes: a data acquisition unit for acquiring the position data or the distance data; an appropriate range determination unit that determines an appropriate range within which the measured distance is determined to be appropriate; A storage unit that stores the appropriate range; a determination unit that determines whether or not there is an abnormality in the coordinate measuring device based on whether or not the measurement distance specified based on the position data or the distance data is within the appropriate range, and outputs the determination result in association with the device identification information; having When the data acquisition unit acquires the position data together with initialization data indicating that the appropriate range is to be initialized from the communication unit, the appropriate range determination unit determines the appropriate range based on initial distance data indicating the measured distance at the time of initialization, the measured distance being generated by calculating a measured distance which is a distance between the multiple measured positions indicated by the position data. Anomaly detection system.

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