Industrial robot control device

Abstract

To efficiently determining which safety device is operating among safety devices for stopping an industrial robot.SOLUTION: A robot control device 200 is configured to be connectable to a first safety device SF1, a second safety device SF2, and a third safety device SF3 connected in series to a power supply VCC, and comprises: detection circuits 202, 203, 204 each for detecting which of a first state of receiving power supplied from the power supply VCC connected to an output side terminal of each safety device and a second state of not receiving the power supplied from the power supply VCC each safety device is in; and a control unit 201 that gives a notification based on outputs of the detection circuits 202, 203, and 204.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a control device for an industrial robot. [Background technology]

[0002] Patent Document 1 describes an industrial robot equipped with multiple safety devices that stop the robot when activated. In this industrial robot, the safety devices are connected in series, and whether or not to output to a peripheral device the fact that one of the multiple safety devices has been activated can be selected by freely connecting one end of a relay coil for operating a relay contact for outputting to the peripheral device to any of the connection points of the multiple safety devices. When any safety device on one side of the connection point to which one end of the relay coil is connected is activated, the fact that the safety device has been activated is output to the peripheral device, and when any safety device on the other side of the connection point is activated, the fact that the safety device has been activated is not output to the peripheral device.

[0003] Patent Document 2 describes a robot control device that controls a robot. This robot control device includes a load detection unit that detects the load of a motor that drives each joint shaft of the robot, a speed detection unit that detects the shaft speed of each joint shaft of the robot, a stop cause identification unit that identifies the cause of the emergency stop when the robot is stopped in an emergency, and a recording unit that records the cause of the emergency stop and the motor load or shaft speed in association with each other. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2007-001012 A [Patent Document 2] JP 2017-100200 A Summary of the Invention [Problem to be solved by the invention]

[0005] The industrial robot of Patent Document 1 can change the connection destination of the relay coil for detecting the operation of the safety device as necessary. However, this results in frequent changes of the connection destination of the relay coil, which leads to a decrease in work efficiency at the production site. Patent Document 2 identifies the cause of an emergency stop inside the robot, but does not detect the operation state of a safety device connected to the robot.

[0006] An object of the present invention is to make it possible to efficiently check which of the safety devices for stopping an industrial robot is in operation. [Means for solving the problem]

[0007] (1) A control device for an industrial robot configured to be connectable to a plurality of types of safety devices connected in series to a power source, The safety device is capable of manually switching between electrical interruption of the wiring path and recovery from the interruption, a detection circuit connected to an output terminal of each of the plurality of types of safety devices, for detecting whether the device is in a first state in which the device is receiving power from the power source or in a second state in which the device is stopped from supplying power from the power source; A control unit that performs a notification based on an output of the detection circuit, When the plurality of detection circuits output detection results indicating the second state, the control unit notifies each of the plurality of detection circuits to prompt confirmation of each of the safety devices connected to the output side terminal. At once This is a control device for industrial robots.

[0008] According to (1), since a detection circuit is provided for each safety device, it is possible to determine which safety device should be checked first based on the output of the detection circuit. By notifying the user according to such a determination, the work required to restore the robot's operation can be carried out efficiently. In addition, for example, when the outputs of only two of the three detection circuits indicate the second state, only a notification is issued to encourage the user to check the safety devices connected to the output terminals of these two detection circuits. This eliminates the need for the user to check all the safety devices corresponding to these three detection circuits, thereby improving the efficiency of work such as safety checks.

[0009] (2) A control device for an industrial robot according to (1), The control unit is Located at the furthest position from the power source When only one of the detection circuits outputs a detection result indicating the second state, the detection circuit issues a notification to prompt the user to check the safety device connected to the output terminal.

[0010] According to (2), when the output of only one detection circuit indicates the second state, that is, when only the device located farthest from the power source among the multiple safety devices is activated (cutting off the wiring path), a notification is issued to encourage the user to check this device. This eliminates the need for the user to check all safety devices, and can improve the efficiency of work such as safety checks.

[0015] ( 3 ) ( 1 ) or ( 2 A control device for an industrial robot according to the above-mentioned the plurality of types of safety devices include a first safety device provided on a safety fence surrounding the industrial robot, and a second safety device provided at a location different from the safety fence and the teaching operation terminal, The second safety device is a control device for an industrial robot that is arranged closer to the power source than the first safety device.

[0016] ( 3 According to the above, the second safety device, which is likely to be forgotten to be reset by the user, is disposed closer to the power source than the first safety device, which is unlikely to be forgotten to be reset by the user. Therefore, even if both the first safety device and the second safety device are activated, the user can be prompted to give priority to checking the second safety device. This allows the robot to be started with the second safety device reliably reset, thereby shortening the time until the robot is started.

[0017] ( 4 ) ( 3 A control device for an industrial robot according to the above-mentioned the plurality of types of safety devices further include a third safety device provided in the teaching operation terminal, The third safety device is a control device for an industrial robot that is arranged closer to the power source than the second safety device.

[0018] ( 4 ), the third safety device provided in the teaching operation terminal that is used least frequently is arranged closest to the power source. The output of the detection circuit connected to the third safety device often indicates the first state. If the third safety device that is used least frequently is arranged, for example, at the position farthest from the power source, when the safety device arranged closest to the power source becomes de-energized, it may be necessary to check the state of the third safety device. However, ( 4 ) By arranging the third safety device closer to the power source than the first safety device and the second safety device, such an inefficient state can be prevented. Effect of the Invention

[0019] According to the present invention, it is possible to efficiently check which of the safety devices for stopping an industrial robot is in operation. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a diagram showing a schematic configuration of an industrial robot included in a robot system. [Diagram 2] FIG. 2 is a diagram showing a schematic configuration of a robot control device and a teaching operation terminal included in the robot system. [Diagram 3] FIG. 2 is a plan view showing an example of the layout of a production line (robot system) including the industrial robot of FIG. [Figure 4] 4 is a schematic diagram showing an example of an electrical configuration of the robot system shown in FIG. 3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, a robot system including a robot controller 200 that is an embodiment of a controller of the present invention will be described with reference to the drawings.

[0022] [Robot system configuration] Fig. 1 is a diagram showing a schematic configuration of an industrial robot 100 included in a robot system. Fig. 2 is a diagram showing a schematic configuration of a robot control device 200 connected to the industrial robot 100 in Fig. 1 and a teaching operation terminal 400 connected to the robot control device 200. "FR" in Fig. 2 indicates a front view of the teaching operation terminal 400, and "BK" indicates a rear view of the teaching operation terminal 400. Fig. 3 is a schematic plan view showing an example of the layout of a production line (robot system) including the industrial robot 100 in Fig. 1.

[0023] The robot system shown in Fig. 3 is composed of an industrial robot 100, a robot control device 200, a higher-level device 300, a teaching operation terminal (teaching pendant) 400, a safety fence 500, and a liquid crystal display manufacturing device 550. The various devices and tools in the robot system are electrically connected by wire or wirelessly, or electrically connected using a serial cable.

[0024] The industrial robot 100 is a transport robot for transporting a glass substrate 10 for liquid crystal displays (hereinafter referred to as "glass substrate 10") as a workpiece. The industrial robot 100 is composed of a base 11, a rotating unit 12, a column 13, a slider 14 (a support member that supports the arm 15), and two arms 15. The arm 15 is equipped with a hand 16 at its tip. The hand 16 has a fork portion 16a and a hand base end portion 16b, and transports the glass substrate 10 by placing it on the fork portion 16a.

[0025] The rotating unit 12 is a base member on which the column 13 is established, and is rotatably disposed on the base 11. The rotating unit 12 rotates around the Z axis, thereby turning the arm 15 and the hand 16, and changing the orientation of the hand 16. The rotating unit 12 is also movable on the base 11 in the Y axis direction in the figure by a horizontal movement mechanism (not shown). Furthermore, the slider 14 is configured to be slidable up and down on the side of the column 13 (movable in the Z axis direction in the figure).

[0026] The two arms 15 move the hand 16 in the direction of removal and supply of the glass substrate 10 by a rotary drive source (not shown). At this time, the arm 15 performs an extension / contraction operation so that the hand 16 faces in one direction and moves linearly between an extended position where the arm 15 is fully extended and a retracted position where the arm 15 is folded. That is, in this embodiment, the hand 16 moves back and forth in the X direction in the figure. Then, the arm 15 operates to store the glass substrate 10 into the manufacturing device 550 (see FIG. 2) located at the extended position, or to transport the glass substrate 10 to the retracted position.

[0027] As described above, the industrial robot 100 is a transport robot for transporting the glass substrate 10, and is a large robot particularly suited for transporting a large glass substrate 10 as a workpiece. The glass substrate 10 is, for example, approximately square with a side length of about 3 m and has a considerable weight. Therefore, in the case of an emergency stop, there is a possibility of dangerous operations such as the slider 14 dropping or the arm 15 popping out. In other words, it is very dangerous for a worker to enter the working area R in FIG. 2, and it is necessary to surely brake such dangerous operations.

[0028] The industrial robot 100 shown in Fig. 3 is designed to transport a larger glass substrate 10 than the industrial robot 100 shown in Fig. 1, and has six fork portions 16a in accordance with the size of the glass substrate 10. The rotation unit 12 of the industrial robot 100 shown in Fig. 3 has a balancer 17 on the opposite side of the rotation diameter from the position where the column 13 is established, and balances the weight during rotation.

[0029] Such an industrial robot 100 is installed in a place (work area R) surrounded by a safety fence 500 and a liquid crystal display manufacturing device 550.

[0030] The robot controller 200 is electrically connected to the industrial robot 100 via a wire such as a serial cable. The robot controller 200 servo-controls the industrial robot 100, which is driven by a servo motor (not shown) to move in each of the X-axis, Y-axis, Z-axis, and θ-axis directions in the figure. The robot controller 200 is placed inside the safety fence 500 in the example of Fig. 3, but it may be placed outside the safety fence 500, and the layout can be changed as appropriate according to the needs of the robot system.

[0031] The host device 300 functions as a central control unit for a line consisting of several lanes. More specifically, the host device 300 is configured as an external control panel that controls the entire production line (robot system) including the industrial robot 100 and peripheral devices such as the manufacturing device 550. The host device 300 is electrically connected to the robot control device 200 and is disposed outside the safety fence 500. The host device 300 is also electrically connected to peripheral devices such as the manufacturing device 550. The host device 300 may be provided with an emergency stop device such as an emergency stop switch for emergency stopping the industrial robot 100.

[0032] The teaching operation terminal 400 is for teaching the industrial robot 100 position information, and is connected to the robot control device 200 by a wire such as a serial cable. The teaching operation terminal 400 includes a mode changeover switch 420 that issues a signal for switching between an automatic operation mode (Remote mode) and a teaching mode (Teach mode) of the industrial robot 100, a servo-on switch 421 that issues a signal for enabling a drive current of the servo motor of the industrial robot 100 during teaching in the teaching mode, an emergency stop switch 410 that issues an emergency stop signal corresponding to an emergency stop command, and an enable switch 430. The emergency stop switch 410 and the enable switch 430 are emergency stop devices for emergency stopping the industrial robot 100, respectively. Either the emergency stop switch 410 or the enable switch 430 may be omitted in the teaching operation terminal 400. Hereinafter, one or more emergency stop devices provided in the teaching operation terminal 400 will be collectively referred to as a third safety device SF3.

[0033] As shown in FIG. 2, the teaching operation terminal 400 is provided with an LCD display 405 as an output unit in the center of the surface. An emergency stop switch 410 is provided in the upper right of the LCD display 405. A mode changeover switch 420 and a servo-on switch 421 are provided in a group of switches above the LCD display 405. The group of switches also includes various changeover switches for switching other operation modes. A plurality of keys (switches) are provided to the right of the LCD display 405. These are switches for moving the industrial robot 100 from its current position to a predetermined target position for teaching. Specifically, the plurality of keys are an X-axis jog feed operation key, a Y-axis jog feed operation key, a Z-axis jog feed operation key, and the like, which move the industrial robot 100 in the directions of the X-axis, Y-axis, Z-axis, and θ-axis.

[0034] The enable switch 430 is provided on the back side of the teaching operation terminal 400. A gripping portion 435 for an operator to grip is provided near the enable switch 430 (see FIG. 2). The enable switch 430 is a switch for avoiding danger that turns ON when the operator grips it lightly and turns OFF when the operator releases it or grips it tightly. It is desirable that the enable switch 430 is provided integrally with or adjacent to the gripping portion 435 so that the operator can press the enable switch 430 at the same time when gripping and operating the gripping portion 435. The enable switch 430 may be attached to the back side of the gripping portion of the teaching operation terminal 400, and is also called a deadman's switch.

[0035] The above-mentioned arrangement of the operation keys and operation mode changeover switches is merely an example, and they may be arranged and operated in a different manner (eg, lever switch type) than that shown in FIG.

[0036] The safety fence 500 is provided to prevent a worker from inadvertently entering the operating range of the industrial robot 100 and ensure the safety of the worker. More specifically, as shown in Fig. 3, three liquid crystal display manufacturing devices 550 are installed as peripheral devices at positions where three of the four sides of the safety fence 500 are partially open so as to surround the industrial robot 100. The safety fence 500 and the manufacturing devices 550 form a working area R for the industrial robot 100. Note that instead of the manufacturing devices 550, a conveyor device or a connection device thereof for connecting to another manufacturing line, or a substrate cassette device for stacking and storing a plurality of glass substrates 10 may be arranged.

[0037] The safety fence 500 is provided with an opening / closing door 510, and is equipped with an interlock device 511 that detects the open / closed state of the opening / closing door 510. The interlock device 511 is an emergency stop device for bringing the industrial robot 100 to an emergency stop. In the robot system, when an operator opens the opening / closing door 510 of the safety fence 500 in the automatic operation mode (Remote mode), the interlock device 511 is activated to bring the industrial robot 100 to an emergency stop. The safety fence 500 may be provided with a plurality of opening / closing doors 510. In this case, the interlock device 511 is attached to each opening / closing door 510. Hereinafter, one or more interlock devices 511 provided on the safety fence 500 will be collectively referred to as a first safety device SF1.

[0038] The robot system further includes an emergency stop device 600 that issues an emergency stop signal to bring the industrial robot 100 to an emergency stop in the event of a dangerous situation or a system malfunction, and is provided in a location different from the safety fence 500 and the teaching operation terminal 400. In the example of FIG. 3, the emergency stop device 600 is attached to the manufacturing apparatus 550. The emergency stop device 600 may be attached to the higher-level device 300, for example. The emergency stop device 600 is composed of, for example, an emergency stop button and a corresponding duplicated switch. Only one emergency stop device 600 may be provided in the robot system, or multiple emergency stop devices 600 may be provided in the robot system. Hereinafter, one or multiple emergency stop devices 600 included in the robot system will be collectively referred to as a second safety device SF2. As described above, the robot system of this embodiment is equipped with three types of safety devices: the third safety device SF3 provided on the teaching operation terminal 400, the first safety device SF1 provided on the safety fence 500, and the second safety device SF2 provided in a location different from the safety fence 500 and the teaching operation terminal 400.

[0039] [Electrical configuration of the robot system] Fig. 4 is a schematic diagram showing an example of the electrical configuration of the robot system shown in Fig. 3. Fig. 4 shows an example in which the third safety device SF3 is composed of only an emergency stop switch 410, the second safety device SF2 is composed of only one emergency stop device 600, and the first safety device SF1 is composed of only one interlock device 511.

[0040] As shown in Fig. 4, the first safety device SF1, the second safety device SF2, and the third safety device SF3 are each configured with a b-contact switch and are connected in series to the power supply VCC. When a user performs an operation for emergency stopping the industrial robot 100 (a button operation in the case of the emergency stop switch 410 or the emergency stop device 600, or an opening operation of the opening / closing door 510 in the case of the interlock device 511), the first safety device SF1, the second safety device SF2, and the third safety device SF3 each cut off the electrical connection between the input side terminal and the output side terminal (switch open) to become non-conductive. When a user performs a return operation (a button operation in the case of the emergency stop switch 410 or the emergency stop device 600, or a closing operation of the opening / closing door 510 in the case of the interlock device 511), the first safety device SF1, the second safety device SF2, and the third safety device SF3 each restore the electrical connection between the input side terminal and the output side terminal (switch close) to become conductive. In this way, the first safety device SF1, the second safety device SF2, and the third safety device SF3 are each capable of manually switching between electrically cutting off (non-conductive state) the wiring path and restoring (conductive state) it from this cutting off.

[0041] An input terminal T1 of the third safety device SF3 is connected to the power supply VCC. An input terminal T3 of the second safety device SF2 is connected to an output terminal T2 of the third safety device SF3. An input terminal T5 of the first safety device SF1 is connected to an output terminal T4 of the second safety device SF2. An output terminal T6 of the first safety device SF1 is connected to the robot controller 200. The third safety device SF3 is the safety device arranged closest to the power supply VCC among the three types of safety devices. The first safety device SF1 is the safety device arranged closest to the power supply VCC side (the position furthest from the power supply VCC, closest to the robot controller 200) among the three types of safety devices.

[0042] The robot control device 200 includes a control unit 201 that performs drive control of the industrial robot 100 and emergency stop control of the industrial robot 100. The control unit 201 includes a central processing unit CPU (Central Processing Unit) and storage devices such as a ROM (Read Only Memory) and a RAM (Random access memory). The control unit 201 drives and controls the industrial robot 100 by commands related to linear motion, rotational motion, and each axis motion in various coordinate systems based on the operation program of the industrial robot 100 and parameters for operation stored in the storage device. Note that the signal input from the teaching operation terminal 400 is for changing and correcting the operation program of the industrial robot 100 and parameters for operation.

[0043] The robot controller 200 further includes a detection circuit 202 connected to a connection node N1 between the third safety device SF3 and the second safety device SF2, a detection circuit 203 connected to a connection node N2 between the second safety device SF2 and the first safety device SF1, and a detection circuit 204 connected to a connection node N3 between the first safety device SF1 and a ground terminal. The detection circuits 202, 203, and 204 are each configured as a relay circuit that does not output a detection signal in a first state in which power is supplied from a power source VCC, and outputs a detection signal in a second state in which power supply from the power source VCC is stopped. That is, the detection circuit 202, the detection circuit 203, and the detection circuit 204 are each a circuit that detects whether the state is the first state or the second state.

[0044] In addition, when the third safety device SF3 further includes an enable switch 430, a series circuit of the enable switch 430 and the emergency stop switch 410 is connected between the power supply VCC and the connection node N1. In this way, when the third safety device SF3 includes a plurality of emergency stop devices, the output terminal of the emergency stop device connected closest to the connection node N1 among the plurality of emergency stop devices connected in series constitutes the output terminal of the third safety device SF3. In the example of FIG. 3, the output terminal T2 of the emergency stop switch 410 constitutes the output terminal of the third safety device SF3. Hereinafter, the third safety device SF3 is defined as being in a non-conductive state when at least one emergency stop device included in the third safety device SF3 is in a non-conductive state. Also, the third safety device SF3 is defined as being in a conductive state when all emergency stop devices included in the third safety device SF3 are in a conductive state.

[0045] When the second safety device SF2 includes a plurality of emergency stop devices 600, a series circuit of the plurality of emergency stop devices 600 is connected between the connection node N1 and the connection node N2. When the second safety device SF2 includes a plurality of emergency stop devices, the output terminal of the emergency stop device connected closest to the connection node N2 among the plurality of emergency stop devices connected in series constitutes the output terminal of the second safety device SF2. In the example of FIG. 3, the output terminal T4 of the emergency stop device 600 constitutes the output terminal of the second safety device SF2. Hereinafter, the second safety device SF2 is defined as being in a non-conductive state when at least one emergency stop device included in the second safety device SF2 is in a non-conductive state. Also, the second safety device SF2 is defined as being in a conductive state when all emergency stop devices included in the second safety device SF2 are in a conductive state.

[0046] When the first safety device SF1 includes a plurality of interlock devices 511, a series circuit of the plurality of interlock devices 511 is connected between the connection node N2 and the connection node N3. When the first safety device SF1 includes a plurality of emergency stop devices, the output terminal of the emergency stop device connected closest to the connection node N3 among the plurality of emergency stop devices connected in series constitutes the output terminal of the first safety device SF1. In the example of FIG. 3, the output terminal T6 of the interlock device 511 constitutes the output terminal of the first safety device SF1. Hereinafter, the first safety device SF1 is defined as being in a non-conductive state when at least one emergency stop device included in the first safety device SF1 is in a non-conductive state. Also, the first safety device SF1 is defined as being in a conductive state when all emergency stop devices included in the first safety device SF1 are in a conductive state.

[0047] When the industrial robot 100 is operated, the first safety device SF1, the second safety device SF2, and the third safety device SF3 are all operated so that they are in a conductive state. Then, when the third safety device SF3 is in a non-conductive state during operation of the industrial robot 100, the wiring path between the power supply VCC and the connection node N1 is interrupted. As a result, the detection circuits 202, 203, and 204 are all in a second state in which the power supply VCC is stopped, and detection signals are input to the control unit 201 from the detection circuits 202, 203, and 204.

[0048] When the second safety device SF2 is activated and goes into a non-conductive state during operation of the industrial robot 100, the wiring path between the connection node N1 and the connection node N2 is interrupted. As a result, the detection circuit 203 and the detection circuit 204 are both in a second state in which the power supply from the power supply VCC is stopped, and detection signals are input to the control unit 201 from each of the detection circuit 203 and the detection circuit 204.

[0049] When the first safety device SF1 is activated and goes into a non-conductive state during operation of the industrial robot 100, the wiring path between the connection node N2 and the connection node N3 is interrupted. As a result, only the detection circuit 204 goes into the second state in which the power supply from the power supply VCC is stopped, and a detection signal is input to the control unit 201 only from the detection circuit 204.

[0050] When a detection signal is input from at least one of the detection circuits 202, 203, and 204, the control unit 201 performs control to make an emergency stop of the industrial robot 100. Furthermore, the control unit 201 performs control to make a notification indicating which of the first safety device SF1, the second safety device SF2, and the third safety device SF3 should be checked based on the outputs of the detection circuits 202, 203, and 204. As a method of notification, for example, a method of sending a control signal to the host device 300 to display a message on a display of the host device 300 or turning on a lamp of the relevant safety device among lamps provided for each safety device in the host device 300 may be adopted. If a display or a lamp is provided in the robot control device 200, the notification may be made using these.

[0051] [Specific examples of notification methods] A specific example of the notification method will be described below, but the method is not limited to this. First, the output state patterns of the detection circuit are listed below. (Pattern A) Pattern A is a pattern in which a detection signal is output from only one of the detection circuits 202, 203, and 204. This pattern occurs when only the first safety device SF1 located closest to the robot control device 200 is activated and enters a non-conductive state. (Pattern B) Pattern B is a pattern in which detection signals are output from two of detection circuits 203 and 204 among detection circuits 202, 203, and 204. This pattern occurs when only the second safety device SF2 is activated and brought into a non-conductive state, or when only the first safety device SF1 and the second safety device SF2 are activated and brought into a non-conductive state. (Pattern C) Pattern C is a pattern in which detection signals are output from all of the detection circuits 202, 203, and 204. This pattern occurs when only the third safety device SF3 is activated and in a non-conductive state, when only the third safety device SF3 and the second safety device SF2 are activated and in a non-conductive state, when only the third safety device SF3 and the first safety device SF1 are activated and in a non-conductive state, or when the first safety device SF1, the second safety device SF2, and the third safety device SF3 are all activated and in a non-conductive state.

[0052] (First notification control) In the case of pattern A, the control unit 201 controls the detection circuit 204 outputting the detection signal to issue a notification prompting the user to check the first safety device SF1 connected to the output terminal. The user who receives this notification determines that only the first safety device SF1 is operating, and after checking safety, operates the first safety device SF1 to be in a conductive state. When a state in which no detection signal is output from any of the detection circuits 202, 203, and 204, the control unit 201 resumes the operation of the industrial robot 100.

[0053] (Secondary notification control) In the case of pattern B, the control unit 201 performs control to issue a notification to prompt the user to check the second safety device SF2, of which the detection circuit 203 and the detection circuit 204 are outputting detection signals, and the detection circuit 203 is connected to the output terminal. The user who receives this notification determines that the second safety device SF2 is activated, and after confirming safety, operates the second safety device SF2 to be in a conductive state. When the result of this operation is that no detection signal is output from any of the detection circuits 202, 203, and 204, the control unit 201 resumes the operation of the industrial robot 100. On the other hand, if this operation results in the output state of the detection circuit becoming pattern A (i.e., the first safety device SF1 and the second safety device SF2 have been activated, resulting in pattern B), the control unit 201 then performs control to issue a notification urging the user to check the first safety device SF1. The user who receives this notification determines that the first safety device SF1 is activated, and after checking safety, operates the first safety device SF1 to become conductive. When this results in a state in which no detection signal is output from any of the detection circuits 202, 203, and 204, the control unit 201 resumes the operation of the industrial robot 100.

[0054] (Modification of second notification control) In the case of pattern B, the control unit 201 controls the detection circuit 203 and the detection circuit 204 outputting the detection signal to issue a notification to prompt the user to check both the second safety device SF2 and the first safety device SF1 connected to the output terminal. The user who received this notification determines that the first safety device SF1 and the second safety device SF2 are in operation, and after confirming safety, operates the first safety device SF1 and the second safety device SF2 to be in a conductive state. When the result of this operation is that no detection signal is output from any of the detection circuits 202, 203, and 204, the control unit 201 resumes the operation of the industrial robot 100. Pattern B cannot distinguish between a situation in which only the second safety device SF2 is activated and a situation in which both the second safety device SF2 and the first safety device SF1 are activated. Therefore, in the case of pattern B, by adopting the notification control of this modified example, it may be possible to more efficiently resume the operation of the industrial robot 100 than by performing notification in two stages as in the second notification control. On the other hand, in a situation in which only the second safety device SF2 is activated, by adopting the above-mentioned second notification control, the user can omit checking the first safety device SF1, enabling efficient work.

[0055] (Third notification control) In the case of pattern C, the control unit 201 controls the control circuit 201 to issue a notification to prompt the user to check the third safety device SF3, of which detection circuit 202, detection circuit 203, and detection circuit 204 are outputting detection signals, and which is connected to the output terminal of the detection circuit 202.

[0056] (Modification of the third notification control) In the case of pattern C, the control unit 201 performs control so as to issue a notification urging the user to check the first safety device SF1, the second safety device SF2, and the third safety device SF3.

[0057] [Effects of the embodiment] According to the robot system described above, a detection circuit is provided for each of the three types of safety devices, so it is possible to determine which safety device's operating state should be checked with priority based on the output of the detection circuits 202, 203, and 204. By notifying the user according to such a determination, the work until the industrial robot 100 returns to operation can be carried out efficiently.

[0058] [Other embodiments] The robot system of this embodiment includes three types of safety devices, but among the first safety device SF1, the second safety device SF2, and the third safety device SF3, the third safety device SF3 is not essential and can be omitted because there are users who do not introduce the teaching operation terminal 400.

[0059] The first safety device SF1, the second safety device SF2, and the third safety device SF3 are preferably arranged so that the third safety device SF3 provided in the teaching operation terminal 400, which is used less frequently in the robot system, is arranged closest to the power supply VCC, the first safety device SF1 including the interlock device 511, which is least likely to forget the reset operation, is arranged closest to the robot control device 200, and the second safety device SF2 is arranged therebetween, as shown in Fig. 4. However, this arrangement is not limited to this and can be changed according to the user's intention. For example, the positions of the first safety device SF1 and the second safety device SF2 may be reversed.

[0060] Although the robot system of this embodiment includes three types of safety devices, it is also possible to add a device prepared by the user that is a b-contact switch other than the safety devices. In this case, for example, this device may be connected between the power supply VCC and the third safety device SF3, or between the third safety device SF3 and the second safety device SF2. In this case, a detection circuit that is connected to the output terminal of this device may be additionally provided in the robot control device 200. This makes it possible to check the operating status of devices other than the safety devices.

[0061] In this embodiment, two hands 16 and two arms 15 are arranged so as to overlap each other in the vertical direction. That is, the industrial robot 100 in this embodiment is a double-arm type robot. The industrial robot 100 may be a single-arm type robot having one hand 16 and one arm 15. Furthermore, in this embodiment, a double-arm type robot that transports a glass substrate as a workpiece is exemplified, but the robot may be a robot that transports a semiconductor wafer or the like. Furthermore, the present invention is not limited to a robot system that transports a glass substrate, and may be applied to robots for other types of applications and other industrial equipment. For example, the present invention may be applied to a robot system that transports a semiconductor substrate. [Explanation of symbols]

[0062] 100 Industrial Robots 200 Robot control device 201 Control section 202, 203, 204 Detection circuit 300 Upper device 400 Teaching operation terminal 410 Emergency stop switch 500 safety fence 511 Interlocking Device 600 Emergency stop equipment SF1 First safety device SF2 Second safety device SF3 Third safety device VCC power supply

Claims

1. A control device for an industrial robot configured to be connectable to a plurality of types of safety devices connected in series to a power source, The safety device is capable of manually switching between electrical interruption of the wiring path and recovery from the interruption, a detection circuit connected to an output terminal of each of the plurality of types of safety devices, for detecting whether the device is in a first state in which the device is receiving power from the power source or in a second state in which the device is stopped from supplying power from the power source; A control unit that performs a notification based on an output of the detection circuit, The control unit is a control device for an industrial robot, and when a plurality of the detection circuits output detection results indicating the second state, the control unit simultaneously sends a notification to each of the plurality of detection circuits to prompt checking each of the safety devices connected to the output terminal.

2. The control device for an industrial robot according to claim 1, The control unit is a control device for an industrial robot that, when only one of the detection circuits located farthest from the power source outputs a detection result indicating the second state, issues a notification that prompts the user to check the safety device connected to the output terminal of the detection circuit. Control device for industrial robots.

3. 3. The control device for an industrial robot according to claim 1, the plurality of types of safety devices include a first safety device provided on a safety fence surrounding the industrial robot, and a second safety device provided at a location different from the safety fence and the teaching operation terminal, The second safety device is a control device for an industrial robot that is arranged closer to the power source than the first safety device.

4. The control device for an industrial robot according to claim 3, the plurality of types of safety devices further include a third safety device provided in the teaching operation terminal, The third safety device is a control device for an industrial robot that is arranged closer to the power source than the second safety device.

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