Clean room system and air exhaust method

Abstract

To keep conditions such as temperature in a clean room.SOLUTION: A clean room system installed in a clean room managed in temperature and cleanliness, includes an air blowing section blowing air into the clean room at a lower portion of the clean room, a suction section sucking the air at the upper portion with respect to the air blowing section, and a discharge section installed at a place separating from the air blowing section by a predetermined distance or more, and discharging the air from a lower layer to an upper layer, out of the lower layer and the upper layer stratified by air blowing by the air blowing section and suction by the suction section.SELECTED DRAWING: Figure 17

Description

[Technical field]

[0001] The present invention relates to a clean room system and an air exhaust method. [Background technology]

[0002] In a clean room, a method of ventilating indoor air to ensure the indoor environment such as temperature and cleanliness is known. As a displacement ventilation air-conditioning system, for example, one that includes a fan coil unit that controls the temperature of the air, a filter unit that takes in air from the fan coil unit and passes it through a filter to make it purified air, and a wall air supply opening that is provided on a wall of the clean room and supplies the purified air from the filter unit into the clean room (for example, Patent Document 1, etc.) is known. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-026242 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, the above-mentioned methods may result in some points in the clean room becoming hot. Meanwhile, in many cases, the clean room is determined so that, for example, the temperature and cleanliness of the room satisfy certain environmental conditions. Therefore, if some points in the clean room become hot, the clean room may not satisfy the specified conditions such as temperature.

[0005] The present invention has been made in view of the above problems, and has an object to maintain conditions such as temperature in a clean room. [Means for solving the problem]

[0006] The clean room system according to each embodiment of the present invention includes the following configuration.

[0007] A clean room system (e.g., clean room system 10) installed in a clean room where temperature and cleanliness are controlled includes: A blower (e.g., a first air conditioner 11 or a second air conditioner 12, etc.) that blows air into the room of the clean room in a lower part of the clean room; A suction section (e.g., a first air intake 13 or a second air intake 14) that sucks in the air above the blower section; a discharge section (e.g., a damper 15, etc.) that discharges the air from the lower layer (e.g., lower layer E2) to the upper layer (e.g., upper layer E1) that is stratified by the blowing of the blowing section and the suction of the suction section, and Includes.

[0008] In other words, in a displacement ventilation air conditioning system, a high temperature area with a high concentration of pollutants is formed in the upper layer of the air-conditioned space, but the low temperature air supplied to the air-conditioned space gradually pushes it out from the lower layer, and the high temperature air with a high concentration of pollutants is exhausted upwards without being stirred up, so the living area at the bottom of the air-conditioned space is maintained in a clean environment.

[0009] However, in large spaces such as clean rooms, the low-temperature air from the air blowers installed on the walls may not reach the central position sufficiently, and there are also points where high-temperature equipment is located, making the temperature relatively high.

[0010] In contrast, according to the configuration of the present invention, by installing an exhaust section at a point where the temperature becomes high, the air can be exhausted, and the upward pressure by the clean air in the lower layer is assisted, thereby making it possible to suppress the temperature rise and the decrease in cleanliness at the high temperature point.

[0011] In addition, the blower unit includes: It is desirable to blow air into the clean room so that it contains a swirling component that rotates in the blowing direction (for example, from right to left in Figs. 2 and 3, which is the x-axis direction) (for example, when blowing air as shown in Fig. 2 or 3). When a swirling component is imparted by such a configuration, the amount of air attracted (attraction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0012] In addition, the blower unit includes: It is desirable to blow air into the clean room by inducing the surrounding air (for example, as in the case of blowing air as shown in FIG. 2 or FIG. 3). With such a configuration, when the inducing action occurs, the amount of inducing air (inducing ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0013] It is also preferable to further include an obstruction section (such as a filter FR and a wall WL) that equalizes the flow speed of the air sent into the clean room. When the obstruction section is included, the wind speed at the air outlet is uniformed and variation can be suppressed.

[0014] Furthermore, it is desirable that the first temperature trend (e.g., first temperature trend TS1) indicating the amount of temperature change relative to the amount of height increase in the upper layer is greater than the second temperature trend (e.g., second temperature trend TS2) indicating the amount of temperature change relative to the amount of height increase in the lower layer (e.g., as shown in Figure 6). With this configuration, a "heat pool" can be created in the upper layer. In this way, the presence of a "heat pool" can increase the temperature difference between the lower and upper parts. And a large temperature difference between the supply air and the exhaust air can reduce the transport power. Therefore, creating a "heat pool" can save energy.

[0015] In addition, the discharge section includes: It is desirable to install the exhaust unit at a point where the temperature rises in the lower layer between a first wall (for example, first wall W1) where the blower unit is installed and a second wall (for example, second wall W2) facing the first wall (for example, damper 15 installed at a point such as that shown in FIG. 7 or at the intermediate point PM shown in FIG. 21). When the exhaust unit is installed at such a point, air can be exhausted at the point where the temperature rises, and the temperature inside the clean room can be kept to satisfy the conditions.

[0016] Moreover, the certain distance is preferably a distance at which the air in the lower layer reaches a set temperature (for example, a certain distance DI, etc.). If the exhaust section is installed at such a point, the air can be exhausted at a point where the temperature becomes high, so that the temperature conditions of the clean room can be met.

[0017] In addition, a plurality of the blowing units are installed (for example, an air conditioner installed as shown in FIG. 7 ), Among the blowers, a first blower is installed on a first wall of the clean room; a second blower unit disposed on a second wall facing the first wall; At least The discharge section is It is desirable to install at least the exhaust unit at a midpoint between the first blower unit and the second blower unit (for example, the midpoint PM shown in FIG. 21). If the exhaust unit is installed at such a point, air can be exhausted at a point where the temperature is high, so that the temperature conditions within the clean room can be maintained.

[0018] In addition, the discharge section includes: It is desirable that the opening (e.g., opening 40) sucks the air from the lower layer to the upper layer at a wind speed of 0.2 meters per second or less. It is desirable that the wind speed does not increase too much near the ceiling. If the wind speed increases too much, the air in the upper layer and the lower layer often mix. Therefore, it is desirable that the wind speed does not mix the air in the upper layer and the lower layer, especially near the ceiling. With such a wind speed, the mixing of the air in the upper layer and the lower layer is reduced, and a "heat pool" can be created in the upper layer. Therefore, when air is exhausted with such a configuration, a "heat pool" can be created in the upper layer, and the temperature difference between the lower layer and the upper layer can be increased. In this way, if the temperature difference between the intake air and the exhaust air can be increased, the transport power can be reduced. Therefore, energy can be saved.

[0019] In addition, the discharge section includes: It is desirable that the opening / closing or the opening degree is adjusted in accordance with the temperature of the air (for example, a damper 15, etc.). With such a configuration, the flow rate or flow velocity of the air passing through can be adjusted in accordance with the temperature, etc.

[0020] The air exhaust method performed by the clean room system installed in the clean room where temperature and cleanliness are controlled is as follows: A clean room system includes a step of blowing air into a room of the clean room at a lower portion of the clean room (e.g., step S01); A suction step (e.g., step S02) in which the clean room system sucks in the air at a height above the height at which the air blowing step is performed; The clean room system includes a discharge step (e.g., step S03) for discharging the air from the lower layer to the upper layer among the lower and upper layers formed by the blowing air in the blowing step and the suctioning in the suction step at a point at least a certain distance away from the point where the blowing step is performed. Includes. Effect of the Invention

[0021] According to each embodiment of the present invention, conditions such as temperature can be maintained in a clean room. [Brief description of the drawings]

[0022] [Figure 1] FIG. 1 is a cross-sectional view showing an example of the overall configuration of a clean room system. [Diagram 2] 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a counterclockwise swirling component to the air being blown when viewed from inside the room. FIG. [Diagram 3] 1 is a front view showing an example of the configuration of an air intake port having fins attached so as to give a clockwise swirling component to the air being blown when viewed from inside the room. FIG. [Figure 4] FIG. 11 is a contour diagram showing the temperature in a clean room to which the clean room system of the comparative example is applied. [Diagram 5] FIG. 2 is a contour diagram showing the temperature in a clean room to which the clean room system according to the present embodiment is applied. [Figure 6] FIG. 1 is a diagram showing an example of layering. [Figure 7] 11 is a cross-sectional view showing an example in which the exhaust section is disposed at a position at least a certain distance away from the blower section. FIG. [Figure 8] FIG. 13 is a diagram illustrating an example of the relationship between room temperature and distance. [Figure 9] 1 is a flowchart showing a first example of a method for discharging air in a clean room system. [Figure 10] 10 is a flowchart showing a second example of a method for discharging air from the clean room system. [Figure 11] FIG. 2 is a cross-sectional view showing a clean room system of a first comparative example. [Figure 12] FIG. 11 is a cross-sectional view showing a clean room system of a second comparative example. [Figure 13] FIG. 13 is a diagram showing an example of an opening. [Figure 14] FIG. 1 shows experimental results. [Figure 15] FIG. 2 shows the experimental results. [Figure 16]FIG. 13 is a diagram showing experimental results of a comparative example. [Figure 17] FIG. 2 is a functional block diagram showing an example of a functional configuration of the clean room system in the first embodiment. [Figure 18] FIG. 11 is a functional block diagram showing an example of a functional configuration of a clean room system in a second embodiment. [Figure 19] FIG. 2 is a configuration diagram showing a first example of an inhibition portion. [Figure 20] FIG. 11 is a diagram showing a configuration of a second example of the inhibition portion. [Figure 21] 5A to 5C are cross-sectional views showing an example of installation of a discharge section and temperature distribution. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, details of each embodiment will be described with reference to the accompanying drawings. In the description of each embodiment and the drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description will be omitted.

[0024] First Embodiment <Overall configuration example> 1 is a cross-sectional view showing an example of the overall configuration of a clean room system. The following description will be given taking as an example a clean room system 10 as shown in the figure. In the following description, the devices and the like necessary for explaining the embodiment are illustrated, and therefore the clean room system 10 may be configured to further include devices other than those shown in the figure.

[0025] As shown in the figure, in this example, two manufacturing devices MC are arranged in a clean room. Products such as semiconductors are manufactured by the manufacturing devices MC. An example of the number and arrangement of manufacturing devices MC as shown in the figure will be described below.

[0026] In the following, the x-axis, which is the horizontal direction of the diagram, is the width direction of the clean room. In the example shown below, the air conditioner blows air in the x-axis direction. Meanwhile, the z-axis, which is the vertical direction of the diagram, is the height direction of the clean room. In other words, the z-axis direction is the so-called direction of gravity. Furthermore, the depth direction is the y-axis.

[0027] <Example of a blower section> As shown in the figure, the clean room system 10 has an air conditioner that blows air into the clean room. For example, as shown in the figure, an air conditioner (an air conditioner installed at the left end of the clean room in the figure. Hereinafter referred to as the "first air conditioner 11") is installed on one wall (for example, the wall at the left end in the figure. Hereinafter referred to as the "first wall"). Then, an air conditioner (an air conditioner installed at the right end of the clean room in the figure. Hereinafter referred to as the "second air conditioner 12") is installed separately from the first air conditioner 11 on a wall facing the first wall (for example, the wall at the right end in the figure. Hereinafter referred to as the "second wall"). Below, an example in which two air conditioners, the first air conditioner 11 and the second air conditioner 12, are installed as shown in the figure will be described.

[0028] Furthermore, the air conditioner is installed, for example, at a lower part at a height lower than the suction part, as shown in the figure.

[0029] The first air conditioner 11 and the second air conditioner 12 preferably have the following configuration, for example.

[0030] FIG. 2 is a front view showing a configuration example of an air supply port to which fins are attached so as to give a counterclockwise swirling component to the air being blown as viewed from inside the room.

[0031] FIG. 3 is a front view showing a configuration example of an air supply port in which fins are attached so as to give a clockwise swirling component to the air being blown as viewed from inside the room.

[0032] A number of fins 20 are installed at the air intake port 21 on the front side of the air conditioner. The fins 20 send air by imparting a rotating component (hereinafter referred to as "swirling component") to the air sent into the clean room. Note that in Figures 2 and 3, the direction from right to left is the air sending direction, i.e., the direction toward the inside of the clean room.

[0033] The fins 20 are attached, for example, as shown in the figures, at equal intervals and radially in the rotational direction around the center of the central portion of the air intake port 21. Also, each fin 20 is arranged so as to be inclined with respect to the central axis 22. Note that Figs. 2 and 3 show an example in which each fin 20 has an opposite inclination angle with respect to the central axis 22.

[0034] In this way, when the fins 20 are arranged so as to be inclined with respect to the central axis 22 and the fins 20 are arranged radially, the air can be made to flow along the fins 20 when it is blown, that is, when it passes through the air intake port 21. This allows the air conditioner to blow air into the clean room with a swirling component.

[0035] The air conditioner has a plurality of configurations, for example, as shown in the figure. In this manner, the temperature, cleanliness, etc. of the controlled area EC are controlled by sending air to the controlled area EC. An example in which the temperature is the object of control will be described below.

[0036] If the air contains a swirling component when it is sent in, the swirling components are likely to interfere with each other. Specifically, by making the swirling components of the air sent out from adjacent air inlets in the same or opposite directions, the swirling components can interact with each other to enhance each other or to cancel each other out.

[0037] Furthermore, when there is a swirling component as shown in the figure, an induction effect occurs. In other words, when a swirling component is included, a flow in which the surrounding air is drawn in, a so-called induced airflow, is likely to occur. In this way, when a swirling component is given, the amount of induction of the induced air (induction ratio) increases. Therefore, a large amount of air can be blown, and the air can be blown efficiently.

[0038] <About clean rooms> A clean room is a space having an area where environmental conditions such as temperature and cleanliness are controlled. For example, the environmental conditions are defined by standards such as ISO (International Organization for Standardization) 14644-1 or the United States Federal Air Cleanliness Standard 209E.

[0039] Specifically, in the case of "Class 6" in ISO 14644-1, the temperature conditions are set to be within the range of "23°C ± 5°C". Furthermore, in the case of "Class 6" in ISO 14644-1, the cleanliness is set to be 1.0 x 10 particles with a particle size of 0.1 micrometers (μm) or more indoors. 6 Pieces / cubic meter (pieces / m 3 ) conditions are set so that the air cleanliness is below.

[0040] In this way, the clean room has a space that is controlled by an air conditioner or the like so that the controlled area EC meets predetermined conditions.

[0041] <Example of suction part> As shown in FIG. 1, an air intake port, which is an example of a suction unit, is installed at an upper part at a height higher than the air conditioner in the z-axis direction. For example, in the example shown in the figure, an air intake port (in the figure, it is an air intake port installed at the left end of the clean room and installed above the first air conditioner 11. Hereinafter, it is referred to as "first air intake port 13") is installed on one wall. Then, in addition to the first air intake port 13, an air intake port (in the figure, it is an air intake port installed at the right end of the clean room and installed above the second air conditioner 12. Hereinafter, it is referred to as "second air intake port 14") is installed on the wall opposite the wall where the first air conditioner 11 is located. Below, an example in which two air intake ports are installed as shown in the figure will be described.

[0042] As shown in the figure, the first air intake 13 includes devices such as an exhaust fan 13F and a cooling coil 13C, while the second air intake 14 includes devices such as an exhaust fan 14F and a cooling coil 14C.

[0043] <Example of discharge section> The damper 15, which is an example of a discharge portion, is installed on a ceiling 16 or the like, as shown in FIG.

[0044] In the following, an example in which the discharge portion is a damper 15 will be described.

[0045] The exhaust section is installed at a point at least a certain distance away from the blower section (in the figure, this is in the x-axis direction). First, damper 15 is placed together with an air conditioner. Damper 15 is placed at a point where the temperature of the air blown by the air conditioner rises. Specifically, at least one damper (hereinafter referred to as the "first damper") is placed for one air conditioner.

[0046] In addition, a heat generating element such as manufacturing equipment MC may be disposed between the first damper and the air conditioner. In such a case, a damper different from the first damper (hereinafter referred to as a "second damper") is further installed at a predetermined interval between the first damper and the air conditioner to accommodate the heat generating element.

[0047] The predetermined interval is, for example, an interval determined by a standard manufacturing equipment MC and a working area of ​​the manufacturing equipment MC, etc. By setting such an interval, it is possible to deal with even if the arrangement of the manufacturing equipment MC is changed.

[0048] First, as in the example above, when the blower unit at the bottom blows air into the room and the suction unit at the top sucks in air, a layer that can be managed to meet conditions such as temperature (hereinafter referred to as the "lower layer E2") and a layer formed above the lower layer E2 (hereinafter referred to as the "upper layer E1") are formed.

[0049] <Comparative Example> FIG. 4 is a contour diagram showing the temperature in a clean room to which the comparative clean room system is applied. In the diagram, the horizontal direction is the x-axis. Meanwhile, the vertical direction in the diagram is the z-axis. The comparative example shown in the diagram shows the results of a simulation.

[0050] As shown in the figure, manufacturing equipment and the like are installed in the lower part of the clean room. Then, as shown in the figure, the air becomes hot due to heat generation and the like from the manufacturing equipment. Therefore, in the example shown in the figure, an area such as an upper high temperature area TP1 is generated. When the upper high temperature area TP1 is generated in this way, some or all of the areas in the clean room may not be able to satisfy the temperature conditions and the like. Therefore, the blower unit needs to blow air multiple times, which may increase power consumption.

[0051] <Simulation results> Fig. 5 is a contour diagram showing the temperature in a clean room to which the clean room system according to this embodiment is applied. Compared with Fig. 4, the illustrated example is different in that it has an exhaust port 131, which is an example of a suction unit. That is, the suction unit may be installed, for example, at a position as shown in the figure.

[0052] In the illustrated simulation results, the temperature of the area near exhaust port 131 (hereinafter referred to as "area TP2 near the exhaust port") is lower than that of the comparative example shown in FIG. 4. As shown in FIG. 4, high-temperature air is likely to accumulate due to stratification in the upper part, i.e., in the area near where exhaust port 131 is installed. Therefore, by sucking air in the upper part through exhaust port 131, the temperature can be lowered as shown in the figure. Therefore, even if the number of times that the blower blows air is reduced, the temperature conditions can be met, and the temperature conditions can be maintained in the clean room.

[0053] As a first example, an example will be described in which the lower layer E2 is the controlled area EC. In the following, an example will be described in which the controlled area EC, i.e., the lower layer E2, is set in advance to be an area with a height of 2 meters or less based on the floor surface GD. For example, the stratification is performed as follows.

[0054] Note that a height of 2 meters from the floor surface GD is an example of the maximum height of the air blowing unit. In other words, the maximum height at which the air blowing unit can directly blow air is 2 meters from the floor surface GD. Therefore, the maximum height of the air blowing unit is determined by the size of the air conditioner and the height at which it can blow air, etc. Therefore, the area below a height of 2 meters from the floor surface GD becomes the controlled area EC, and the temperature, etc. of the controlled area EC is controlled by the air conditioner, etc.

[0055] 6 is a diagram showing an example of stratification, where the horizontal axis represents room temperature, while the vertical axis represents height.

[0056] When the upper layer E1 and the lower layer E2 are stratified, the amount of change in temperature with respect to the amount of increase in height in the upper layer (hereinafter referred to as the "first temperature trend TS1") differs from the amount of change in temperature with respect to the amount of increase in height in the lower layer (hereinafter referred to as the "second temperature trend TS2").

[0057] In the illustrated example, in the upper layer E1, for example, the amount of increase in height is "3.5-2.5=1.0 meter" from "2.5 meters" to "3.5 meters". In contrast, the amount of change in temperature is "25.0-22.0=3°C" from "22.0°C" to "25.0°C". Therefore, the upper layer E1 includes an area where the first temperature trend TS1 is "3°C÷1.0 meter=3°C / meter".

[0058] On the other hand, in the lower layer E2, for example, the amount of increase in height is "2.0-0.0=2.0 meters" from "0.0 meters" to "2.0 meters". In contrast, the amount of change in temperature is "20.8-20.0=0.8°C" from "20.0°C" to "20.8°C". Therefore, the lower layer E2 includes an area where the second temperature trend TS2 is "0.8°C÷2.0 meters=0.4°C / meter".

[0059] Also, the lower layer E2 is preferably formed within the range of the controlled area EC. On the other hand, the upper layer E1 is preferably formed at the top. The lower layer E2 is preferably a layer that is easy to control with a blower or the like so as to satisfy the conditions. Therefore, if the lower layer E2 is formed within a range where the air blown by the blower can easily reach, the room temperature of the clean room can be easily controlled.

[0060] It is desirable that the first temperature trend TS1 is a value larger than the second temperature trend TS2. In other words, it is desirable that the first temperature trend TS1 is larger than the second temperature trend TS2, and is a temperature trend that is more likely to become high temperature. If stratification can be achieved in this way, a high temperature area, a so-called "heat pool," can be created in the upper part of the clean room.

[0061] Specifically, in the illustrated example, areas with a height of 2.5 meters or more become "heat pools."

[0062] If there is a "heat pool", the temperature difference between the top and bottom can be increased. And if the temperature difference between the intake air and exhaust air is large, the transport power can be reduced. Therefore, creating a "heat pool" can save energy.

[0063] In addition, creating a "heat pool" makes it easier for cold air to stagnate at the bottom, which makes it easier for the bottom to become colder, and reduces the amount of energy needed to cool the bottom.

[0064] Furthermore, by creating a "heat pool", the area that is cooled by air blowing etc. is often limited to the lower layer. In other words, by creating a "heat pool", the area that is controlled by air blowing etc. can be smaller than the entire clean room. Therefore, compared to controlling the entire clean room, creating a "heat pool" can save energy.

[0065] <Example of a fixed distance> The location where the exhaust unit is to be installed, which is away from the blower unit by a certain distance or more, is, for example, the following location.

[0066] 7 is a cross-sectional view showing an example in which the exhaust section is installed at a position more than a certain distance away from the blower section. For example, the distance from the first wall W1 to the second wall W2 (hereinafter simply referred to as "width RW") is "40 meters." In this case, the damper 15 is installed at a position more than the certain distance DI, for example. In this case, the certain distance DI is, for example, "1.0 meter."

[0067] The fixed distance DI is not limited to 1.0 meter. In other words, the fixed distance DI varies depending on the conditions of the clean room, the strength of the air blown by the blower, the width RW, the arrangement of the manufacturing equipment, and the like.

[0068] When the room is a certain distance DI or more away from the air blower, the room temperature becomes as follows.

[0069] Fig. 8 is a diagram showing an example of the relationship between room temperature and distance. In the diagram, the horizontal axis shows the distance in the x-axis direction, while the vertical axis shows the room temperature. In other words, the point where the distance is "0.0 meters" is the point where the blower is installed, which is the point on both walls in the case of Fig. 7.

[0070] As shown in the figure, the room temperature is basically the lowest at a distance of "0.0 meters," and the room temperature increases as the distance increases. In this example, the set temperature is "22.0°C."

[0071] As shown in the figure, when the distance is 1.0 meter or more, the room temperature is almost the set temperature. Therefore, it is desirable to install a heating element such as a manufacturing device at a point 1.0 meter or more away from the air blowing unit. In other words, as shown in the figure, stratification is likely to occur due to an increase in room temperature at a point 1.0 meter or more away from the air blowing unit. Therefore, it is desirable to install a heating element at a point 1.0 meter or more away, and to install an exhaust unit at a distance of 1.0 meter or more. If the exhaust unit is installed at such a point, air can be exhausted at a point where the temperature is high, and the temperature and other conditions can be maintained in the clean room.

[0072] <First example of air exhaust method> The clean room system performs the following air exhaust method, for example.

[0073] FIG. 9 is a flowchart showing a first example of a method for discharging air from a clean room system.

[0074] <Blowing Example> (Step S01) In step S01, the blower starts blowing air. The air is blown at a lower height.

[0075] <Suction example> (Step S02) In step S02, the suction unit performs suction at a height that is the upper portion.

[0076] Furthermore, by performing a stratification process in which such air is blown and sucked, an upper layer and a lower layer can be formed. Specifically, when the stratification process is performed, low-temperature air is blown into the clean room at the lower part, and high-temperature air is sucked in at the upper part. High-temperature air is lighter than low-temperature air, so the high-temperature air is more easily sucked in. Therefore, high-temperature air tends to accumulate at the upper part. On the other hand, low-temperature air tends to accumulate relatively easily at the lower part. In this way, the stratification process can form an upper layer and a lower layer.

[0077] <Example of discharging air from the lower layer to the upper layer> (Step S03) In step S03, the exhaust unit exhausts air from the lower layer to the upper layer at a point that is a certain distance or more away from the point where air is blown.

[0078] <Second example of air exhaust method> The air discharge method may be as follows:

[0079] 10 is a flow chart showing a second example of the air exhaust method using the clean room system. Compared to the first example, it differs in that step S20 is performed. In the following, the same steps are denoted by the same reference numerals, and the differences will be mainly described.

[0080] <Example of discharging air from a lower layer to an upper layer at a predetermined wind speed> (Step S20) In step S20, the exhaust unit exhausts air from the lower layer to the upper layer at a predetermined wind speed, which will be described later in the second embodiment.

[0081] As described above, by discharging air through the stratification process and the process of discharging air, the conditions such as temperature can be maintained in the clean room.

[0082] <First Comparative Example> An example of a clean room as a comparative example will be described below.

[0083] Fig. 11 is a cross-sectional view showing a clean room system of Comparative Example 1. The clean room system 120 of Comparative Example 1 differs from the clean room system shown in Fig. 1 in that an air conditioner (hereinafter referred to as "third air conditioner 121") is further installed at the midpoint or the like of the clean room.

[0084] That is, the third air conditioner 121 is installed at a location where the room temperature is likely to become high. The third air conditioner 121 further blows air to make the room temperature satisfy the conditions. However, a space for installing the third air conditioner 121 and the like is required in the clean room. Also, costs are incurred for construction work to install the third air conditioner 121.

[0085] <Second Comparative Example> Fig. 12 is a cross-sectional view showing a clean room system of a second comparative example. The second comparative example clean room system 30 differs from the clean room system shown in Fig. 1 in that an additional air conditioner (hereinafter referred to as "fourth air conditioner 31") is installed at the midpoint of the clean room. Furthermore, it differs from the first comparative example in that the fourth air conditioner 31 is a device installed under the floor.

[0086] Even when an air conditioner is installed under the floor like the fourth air conditioner 31, in many cases, equipment cannot be installed above the fourth air conditioner 31 in order to avoid interfering with the air flow. Therefore, even if an air conditioner like the fourth air conditioner 31 is used, space is required in the clean room. In addition, costs are incurred for construction work to install the fourth air conditioner 31.

[0087] <Second embodiment> The second embodiment differs from the first embodiment in that, first, the ceiling of the clean room system is installed at a height that is included in the upper level out of the lower and upper levels, and prevents air from rising. Furthermore, the second embodiment differs in that the exhaust part of the clean room system is, for example, an opening as shown below.

[0088] In the case where there is no ceiling, for example, if the total height of the clean room is 4,300 mm, the ideal state of stratification of the upper and lower layers would be a lower layer of about 2,500 mm and an upper layer of about 1,800 mm. In this state, the upper and lower layers are stratified, and a "heat pool" can be created in the upper layer. And because a "heat pool" can be created in the upper layer, the temperature difference between the lower and upper parts can be increased. In this way, if the temperature difference between the intake air and the exhaust air can be increased, the transportation power can be reduced. Therefore, energy can be saved.

[0089] On the other hand, if there is a ceiling (especially if it is a low ceiling), it often separates the upper floors. Such a ceiling tends to prevent the air from rising, which often results in poor air flow.

[0090] Therefore, a ceiling that prevents air from rising is, for example, a ceiling portion that meets the following conditions.

[0091] A ceiling installed at a height that separates the upper layer when temperature stratification occurs between the upper and lower layers.

[0092] -A low ceiling where the upper floors are only half or even one-third the height of the lower floor (such as the management area).

[0093] -Ceilings no higher than 1.5 times the height of the ventilation section.

[0094] <Example of opening> Fig. 13 is a diagram showing an example of an opening. Below, an example will be described in which a ceiling has an opening 40, which is an example of an opening as shown in the figure. In this example, an opening is provided in a part of the ceiling by creating an opening through which air flows between the upper and lower parts.

[0095] The opening is provided at a position corresponding to the manufacturing equipment, etc. This allows the clean room system to exhaust high-temperature air generated by the manufacturing equipment without it hitting the ceiling surface portion.

[0096] For example, the area of ​​the openings relative to the area of ​​the entire ceiling is adjusted so that the wind speed at the openings is 0.2 meters per second or less, preferably 0.1 meters per second or less. In other words, it is determined so that the wind speed of the air passing through the openings is appropriate under the circumstances of the number of air conditioners and the set wind speed (for example, 0.1 meters per second or less). It is preferable that the ceiling is a system ceiling so that the location of the openings can be changed as needed.

[0097] The openings are arranged in a line perpendicular to the air conditioner's air outlet direction. This means that the distance between the air conditioner and each opening is equal compared to when they are arranged parallel to the air conditioner's air outlet direction, so air of similar temperatures rises to the ceiling, resulting in less turbulence in the airflow. Furthermore, if the openings are not concentrated but dispersed, air is less likely to concentrate in one place, so the air at the bottom is less likely to be hindered from rising to the top.

[0098] For example, if the ceiling is low, the ceiling often prevents air at the bottom from rising to the top.

[0099] On the other hand, if the ceiling is low, it is possible to install lighting, power strips, and other work equipment on the ceiling, and since the distance between the work equipment and the production equipment can be reduced, workability can be improved.

[0100] In the illustrated example, the clean room system controls the wind speed v by making "10%" of the ceiling part an opening 40 (in the figure, the percentage of the ceiling part that is occupied by openings is shown as the "ceiling opening ratio"). That is, in this example, when the ceiling opening ratio is increased, the wind speed v slows down because the amount of air flowing per unit time is the same. In this way, the clean room system, for example, controls the ceiling opening ratio to exhaust air at a predetermined wind speed v.

[0101] In the following, an example will be described in which the predetermined wind speed v is 0.1 meters per second. When the predetermined wind speed v is 0.1 meters per second, the temperature distribution inside the clean room will be as follows:

[0102] <Experimental Results> Figure 14 shows the experimental results (part 1). In the figure, the horizontal axis shows room temperature. Meanwhile, the vertical axis shows height. The figure shows the temperature distribution when there is a ceiling like the one in Figure 13, there is an opening, and the wind speed v is "0.1 meters per second."

[0103] In this example, the ceiling is installed at a height of "2.0 meters" to "2.5 meters."

[0104] As shown in the example, when the wind speed v is "0.1 meters per second", the temperature trend in the upper layer (hereinafter referred to as "upper layer temperature trend TS21") can be made greater than the temperature trend in the lower layer (hereinafter referred to as "lower layer temperature trend TS22"). In other words, when the wind speed v is "0.1 meters per second", the clean room system can create a "heat pool" in the upper layer.

[0105] Figure 15 shows the experimental results (part 2). In the figure, the vertical and horizontal axes are the same as in Figure 14. The difference between the cases shown in Figure 14 and Figure 15 is the presence or absence of a ceiling. Without a ceiling, the entire area of ​​the room would be openings, so the wind speed v would be less than 0.1 meters per second.

[0106] As shown in the figure, in the case of "no ceiling," the wind speed v is "0.1 meters per second" or less, and the upper layer temperature trend (hereinafter referred to as "upper layer temperature trend TS31") can be increased.

[0107] If a large temperature trend like the upper layer temperature trend TS31 can be created, that is, if a "heat pool" can be created in the upper layer, energy savings can be achieved.

[0108] In addition, as shown in the example at a height of "1.0 meter" or less, even in the lower layers, the temperature tendency may be large. For example, if the temperature of the supplied air is low compared to the heat generated in the room, the temperature tendency may be large at the air outlet, as shown in the figure, even in the lower layers. However, as long as there are areas where the temperature tendency is suddenly larger in the upper layers, such as the upper and lower layers with the boundary of "2.0 meters," the temperature tendency may be large in other areas.

[0109] <Comparative Example> FIG. 16 is a diagram showing the experimental results of the comparative example. In the figure, the vertical and horizontal axes are the same as those in FIG. 14 and the like. In the illustrated example, the wind speed v is "0.35 meters per second." With such a wind speed v, as illustrated, the temperature trend in the upper layer cannot be made very large. Specifically, in the illustrated comparative example, at heights of "2.0 meters" or more, the room temperature is almost constant at about "26.0°C."

[0110] At this wind speed v, it is not possible to create much of a "heat pocket" in the upper layer.

[0111] In addition, in Fig. 14 and the like, an example is shown in which the wind speed v is "0.1 meters per second", but the same effect can be obtained even if the wind speed v is about "0.2 meters per second". Therefore, it is desirable for the wind speed v to be "0.2 meters per second" or less.

[0112] <Example of functional configuration> 17 is a functional block diagram showing an example of the functional configuration of the clean room system in the first embodiment. As shown in the figure, the clean room system 10 has a functional configuration including a blower 10F1, a suction unit 10F2, and a discharge unit 10F3.

[0113] The blower 10F1 performs a blowing procedure for blowing air into the interior of the clean room at the bottom of the clean room. For example, the blower 10F1 is realized by a first air conditioner 11 and a second air conditioner 12, etc.

[0114] The suction unit 10F2 is located above the blower unit 10F1 and performs a suction procedure of sucking in the air blown into the clean room by the blower unit 10F1. For example, the suction unit 10F2 is realized by a first intake port 13 and a second intake port 14, etc.

[0115] The exhaust unit 10F3 performs an exhaust procedure to exhaust air from the lower layer E2 to the upper layer E1 among the lower layer E2 and the upper layer E1 that are stratified by the blowing of the blower 10F1 and the suction of the suction unit 10F2, etc. For example, the exhaust unit 10F3 is realized by a damper 15 or the like.

[0116] In a clean room, when air is pumped in from the lower part and sucked in from the upper part, the lower and upper layers can be stratified. When stratification occurs in this way, the air exhausted by sucking in is often high-temperature air. On the other hand, low-temperature air is heavier than high-temperature air and tends to accumulate in the lower part. Therefore, even if manufacturing equipment or the like is installed in the lower part and generates heat, the clean room system 10 can lower the temperature in the lower part and keep the temperature of the controlled area, etc., to meet the conditions.

[0117] Therefore, with the above-mentioned configuration, it is possible to maintain the conditions such as temperature in the clean room.

[0118] 18 is a functional block diagram showing an example of the functional configuration of the clean room system in the second embodiment. As shown in the figure, the clean room system 10 has a functional configuration including a blower 10F1, a suction unit 10F2, a ceiling 10F10, and an opening 10F11.

[0119] The blower 10F1 performs a blowing procedure for blowing air into the interior of the clean room at the bottom of the clean room. For example, the blower 10F1 is realized by a first air conditioner 11 and a second air conditioner 12, etc.

[0120] The suction unit 10F2 is located above the blower unit 10F1 and performs a suction procedure of sucking in the air blown into the clean room by the blower unit 10F1. For example, the suction unit 10F2 is realized by a first intake port 13 and a second intake port 14, etc.

[0121] The ceiling section 10F10 is disposed at a height that is included in the upper layer of the lower and upper layers that are formed by the air blown by the blower section 10F1 and the air sucked by the suction section 10F2, and is a ceiling that prevents air from rising.

[0122] The opening 10F11 is provided in the ceiling portion 10F10 and performs an exhaust procedure for exhausting air at a predetermined wind speed.

[0123] For example, the ceiling portion 10F10 and the opening portion 10F11 are realized as shown in FIG.

[0124] In a clean room, when air is sent in from the lower part and air is sucked in from the upper part, the lower and upper layers can be stratified. When stratification occurs in this way, the air exhausted by sucking in is often high-temperature air. On the other hand, low-temperature air is heavier than high-temperature air and tends to accumulate in the lower part. Therefore, even if manufacturing equipment or the like is installed in the lower part and generates heat, the clean room system 10 can lower the temperature in the lower part and maintain the temperature and other conditions in the controlled area, etc., by exhausting air from the lower part to the upper part at a specified wind speed.

[0125] Therefore, with the above-mentioned configuration, it is possible to maintain the conditions such as temperature in the clean room.

[0126] <Modification> The clean room system may include the following components:

[0127] <Example of inhibition area> It is desirable for the clean room system to be configured to further include an obstruction section, for example, as described below.

[0128] 19 is a configuration diagram showing a first example of the obstruction section. Hereinafter, as shown in the figure, a cross-sectional view will be described using the first air conditioner 11 as an example. In the example shown in the figure, a filter FR is installed in the air blowing direction of the first air conditioner 11.

[0129] As shown in the figure, when the air passes through the filter FR, the wind speed of the air becomes a uniform wind speed (hereinafter referred to as the "second wind speed V2"), which is higher than the wind speed before passing through the filter FR (hereinafter referred to as the "first wind speed V1"). In this way, the filter FR uniformizes the wind speed of the air sent into the clean room from the first wind speed V1 to the second wind speed V2. In this way, by having an obstruction section, the clean room system can uniformize the wind speed of the air sent into the clean room. And by uniformizing the wind speed, that is, by making the air flow even, air can flow at an equal wind speed above and below, even if the air conditioner is a tall device.

[0130] Moreover, when the air passes through the filter FR, the air can be purified.

[0131] The number of filters FR is not limited to one, and may be multiple. Furthermore, the obstruction portion is not limited to the filter FR, and may be any object that allows a certain amount of air to pass through and obstructs the flow of air, like the filter FR.

[0132] 20 is a configuration diagram showing a second example of the inhibition unit. The inhibition unit may be configured as shown in the figure, for example. In the example shown, the final airflow direction, i.e., the direction inside the clean room is the x-axis direction, whereas the first air conditioner 11 first blows air in the y-axis direction. Then, by blowing the air against the wall WL, the clean room system equalizes the wind speed of the air sent into the clean room from the first wind speed V1 to the second wind speed V2.

[0133] The direction in which the first air conditioner 11 first blows out air does not have to be the y-axis. In other words, it is sufficient if the direction is at a certain angle or more with respect to the x-axis.

[0134] In addition, the object that the air first sent out by the first air conditioner 11 hits does not have to be the wall WL. In other words, the obstruction portion is not limited to the wall WL, and may be any material or structure that can cause the air to flow in another direction to some extent.

[0135] The manufacturing equipment MC may be an equipment such as an inspection equipment. In other words, the manufacturing equipment MC is an object that is a heat source. If a damper 15 or the like is installed at a point above such an object, it becomes easy to exhaust the heat according to the heat generation, and management becomes easy.

[0136] Furthermore, the air conditioner may be a blower or the like.

[0137] The predetermined wind speed may be slower than the wind speed at which the blower blows air. Specifically, when the blower blows air at a wind speed of 1 meter per second, the predetermined wind speed is slower than the wind speed of 1 meter per second. Alternatively, the predetermined wind speed may be slower than the wind speed at which the suction unit sucks in air.

[0138] Also, multiple exhaust sections whose opening / closing or opening degree can be adjusted may be provided in a dispersed manner on the ceiling. Such a configuration can accommodate changes in the location of heat generating elements (such as manufacturing equipment) in the clean room. Also, such a configuration is preferable because it can accommodate not only location changes but also operation or non-operation of the manufacturing equipment. In this case, for example, opening / closing and the opening degree can be adjusted manually or using a control device depending on the location of the manufacturing equipment. Also, opening / closing and the opening degree can be adjusted manually or using a control device depending on operation or non-operation of the manufacturing equipment.

[0139] The number of air conditioners may be any number, and may be one or more than three. The air conditioners may be installed anywhere on the x-axis and y-axis. For example, when the distance from wall to wall is long, i.e., when the space is large, the volume of air sent by the air conditioners may be insufficient. In such a case, the air conditioners are placed facing each other on the x-axis as shown in FIG. 1, etc. In this way, the volume of air that is insufficient with one air conditioner can be compensated for. Furthermore, in such a configuration, the air sent by both air conditioners collides with each other at a midpoint or the like. By colliding the air with each other in this way, the effect of pushing the air upward is achieved.

[0140] On the other hand, if the distance from wall to wall is short, i.e., the space is small, stratification can be achieved with one air conditioner. In such a case, taking into account construction costs, etc., one air conditioner may be sufficient.

[0141] The blower unit does not have to be configured as shown in Fig. 2. For example, the blower unit may have a mechanism with a different shape, arrangement, or inclination angle. It is preferable that the blower unit is configured to blow air by drawing in surrounding air with the air sent into the clean room.

[0142] Specifically, the configuration for inducing the surrounding air is a mechanism that first collects the air to be sent out and then pushes out the collected air. With such a mechanism, the air pressure at the location where the air was pushed out drops, causing a phenomenon in which the surrounding air flows in, making it easy to generate an induced airflow. In this way, with a configuration for inducing the surrounding air to blow air, air can be blown efficiently. Note that the blowing unit may induce the surrounding air to blow air using methods and mechanisms other than those described above.

[0143] The blower may also have mechanisms other than those shown in the drawings. For example, the blower may further have a filter or an air cooler. The air cooler (cooling coil) may be arranged extending in the height direction corresponding to the management area EC. The presence of an air cooler can keep the temperature of the air blown from the first air conditioner 11 and the second air conditioner 12 almost constant. The air cooler may also be arranged in the upper blower unit. With such a configuration, the thickness of the air conditioner can be reduced, allowing for a wider use of the work area of ​​the clean room.

[0144] Furthermore, the air cooler etc. may use an evaporator of a refrigeration cycle. In this case, the condenser of the refrigeration cycle may be arranged on the outer wall of the clean room etc. In the above example, the air cooler etc. may be arranged on the rooftop etc., that is, as an outdoor unit, via a refrigerant pipe. Also, the air cooler etc. may be of a type in which cold water is passed from the outside through a heat exchanger. Also, a configuration may be used in which a heat exchanger is arranged outside and cold air is supplied to the air cooler etc. through a duct. This allows the indoor space to be used more effectively.

[0145] In addition, in a clean room, conditions other than temperature may be further managed. For example, cleanliness and the like may be managed in addition to temperature. When managing a condition such as cleanliness, the cleanliness and the like may be measured using a measuring device capable of measuring the item to be managed, such as a particle counter, and ventilation may be performed based on the feedback from the measuring device. Similarly, when measuring temperature, for example, a measuring device such as a temperature sensor may be used.

[0146] In addition, in the clean room, humidity, pressure, gas components, static electricity, electromagnetic waves, microorganisms, and the like may be controlled as environmental conditions.

[0147] Also, in a clean room, all spaces do not have to satisfy the environmental conditions defined as "Class 6". That is, in a clean room, an area that is set in advance as an area that satisfies the environmental conditions (the control area EC in the above example) may be a part of the space in the clean room. For example, the control area EC is set as a range up to a certain height based on the floor surface GD as shown in the figure. Therefore, the control area EC is managed by an air conditioner or the like so that the temperature is, for example, "23°C ± 5°C". On the other hand, areas other than the control area EC (areas at a height higher than the control area EC and areas at a height lower than the floor surface GD in the example shown in FIG. 1) are not subject to management and the temperature does not have to be within the range of "23°C ± 5°C".

[0148] The number of air intakes may be any number, and may be one or more than two. The air intakes may be located anywhere on the x-axis and y-axis. The wind speed at which the air intakes draw in air is preferably equal to or lower than a predetermined wind speed. That is, if the air intake draws in a large amount of air at once, the air in the upper and lower layers tends to mix. Therefore, it is preferable that the air intake draws in air at a wind speed that makes it difficult for the air in the upper and lower layers to mix. Specifically, the predetermined wind speed is preferably equal to or lower than 1 meter per second. The number of air intakes or the direction in which the air is drawn in may be determined so that the wind speed is such that the air in the upper and lower layers does not mix.

[0149] The suction unit may be configured to be connected to a duct DT or the like. As shown in Fig. 1, for example, a mechanism may be used in which air is sucked in from an inlet of the duct DT in the center of the clean room, and the air flows from the inlet of the duct DT to the second air intake port 14 through piping. In other words, the suction unit only needs to be able to suck in air above the blower unit, and the mechanism of the duct DT or the like, the location on the plane, and the configuration of the device are not important. In particular, a configuration in which the duct DT or the like is connected is effective in a configuration without a ceiling.

[0150] Furthermore, the air delivered by the duct DT may be exhausted to the outside of the clean room by a separate exhaust duct or the like without circulating within the clean room.

[0151] Furthermore, the air intakes are not limited to a combination of the first air intake 13 and the second air intake 14. For example, in a configuration using two or more air intakes, all of them may be first air intakes 13. In a configuration using the first air intake 13, the air to be sent out can be cooled evenly in the height direction.

[0152] On the other hand, for example, in a configuration using two or more intake ports, all of them may be second intake ports 14. In a configuration using second intake ports 14, the filter portion and the like can be made thinner.

[0153] It is preferable that the exhaust section has an opening like the damper 15. In other words, it is preferable that the exhaust section has a mechanism that can open / close the opening or adjust the opening degree. In this way, with a configuration that can open / close or adjust the opening degree, the exhaust section can adjust the flow rate or flow speed of the air passing through in accordance with the temperature, etc. For example, when the temperature increases due to the operation of the manufacturing equipment, the opening may be opened to make it easier for the air to be exhausted. In addition, the flow rate may be adjusted to adjust the wind speed to a predetermined wind speed or less.

[0154] The discharge unit may be realized by other mechanisms. For example, the discharge unit may include a window or a hole. For example, the discharge unit may have a sensor that measures values ​​such as temperature, flow rate, or flow speed, and may have a system configuration in which the measurement results by the sensor are fed back to open / close the opening or adjust the opening degree by an actuator or the like.

[0155] Furthermore, the first damper and the second damper may be different in size. For example, the first damper may be a damper that always sucks in air and is larger than the second damper, etc.

[0156] It is desirable that the first damper and the second damper are configured so that the opening degree can be adjusted from inside the room. With such a configuration, the work of climbing up to the ceiling to adjust the opening degree can be reduced. It is also desirable that the opening degree can be adjusted remotely using a control device or the like. With such a configuration, the workload can be reduced.

[0157] Fig. 21 is a cross-sectional view showing an example of the installation of the exhaust unit and the temperature distribution. For example, assume that air conditioners are installed on both walls (both ends of the clean room in the illustrated example) as in Fig. 1. In such a configuration, the room temperature in the clean room is likely to have a temperature distribution as shown in the figure.

[0158] Specifically, when the air is sent out from the air conditioner, it is affected by heat generated by the manufacturing equipment MC, etc. Therefore, as shown in the figure, when multiple blowing sections are installed, the room temperature is likely to rise at the midpoint of the clean room, which is the farthest point from both air conditioners, and which is an example of the first blowing section and the second blowing section (this example is an example where the midpoint between the first blowing section and the second blowing section coincides with the midpoint of the clean room. Hereinafter, simply referred to as the "midpoint PM"), etc.

[0159] Even if multiple air conditioners are installed and controlled to lower the room temperature, not limited to the intermediate point PM, at points more than a certain distance away from the air conditioners, the temperature in the lower floors may rise to a predetermined temperature (hereinafter referred to as the "set temperature").

[0160] Therefore, it is desirable to install the damper 15 at a point where the room temperature is likely to rise to the set temperature, such as the intermediate point PM, etc. If the damper 15 is installed at such a point, it is easy to manage the condition so that the conditions are met, even if there is a point where the temperature is likely to rise due to the exhaust of air.

[0161] In this way, if the exhaust section is installed at a distance at which the air in the lower layer reaches the set temperature, i.e., at a point more than a certain distance away, it is easy to manage the temperature to meet specified conditions.

[0162] The points where the air conditioner and the damper are installed do not have to be the points shown in the figure. That is, the air conditioner may be installed only on the second wall, not on the first wall. In such a case, the damper is installed, for example, symmetrically to the points shown in the figure (the midpoint of the clean room in the figure is the axis of symmetry).

[0163] In addition, the discharge unit is not limited to being installed at a location as shown in the figure. For example, if there is a manufacturing device MC and the manufacturing device MC generates heat, the location of the manufacturing device MC may be prone to high temperatures. In such a case, it is desirable to install the damper at a location close to the manufacturing device MC.

[0164] As shown in Figure 5, the range in which the temperature is lowered by the suction unit may be controlled by using a structure such as a beam. Specifically, as shown in the figure, if a beam is installed on the ceiling, the way the temperature drops will change at the point where the beam is located. In this way, by using a structure, it is possible to create a range in which the temperature is lowered and a range in which the temperature is not lowered very much.

[0165] The wind speed may be controlled by a method other than adjusting the opening ratio. That is, the wind speed may be controlled by an air conditioner that forcibly exhausts air. In addition, the wind speed may be controlled by the number of openings, the type of openings, or opening and closing of the openings.

[0166] [Other embodiments] The present invention is not limited to the above configurations, such as the configurations described in the above embodiments, combinations with other elements, etc. These points can be changed without departing from the spirit of the present invention, and can be appropriately determined according to the application form. [Explanation of symbols]

[0167] 10 Clean Room System 11 1st air conditioner 12 2nd air conditioner 13 First air intake 13F, 14F Exhaust Fan 13C, 14C Cooling coil 14 Second air intake 15 Damper 16 Ceiling 40 aperture 131 Exhaust port TS1 1st temperature trend TS2 2nd temperature trend TS21, TS31 Upper layer temperature trend TS22 Lower layer temperature trend E1 upper layer E2 lower layer MC manufacturing equipment GD Floor surface EC management area PM waypoint DI fixed distance W1 1st wall W2 Second Wall FR Filter WL Wall 10F1 Air blower 10F2 Suction part 10F3 Discharge section 10F10 Ceiling section 10F11 opening

Claims

1. A displacement ventilation type clean room system that is installed in a clean room where temperature and cleanliness are controlled, and that ventilates by pushing up relatively high-temperature air with a high concentration of contaminants to an upper layer using air supplied to a lower layer, a blower unit in a lower portion of the clean room that blows air into a room of the clean room; a suction section that sucks in the air above the blower section; A ceiling portion is provided at a height included in the upper layer of the lower layer and the upper layer that are formed by blowing air by the blowing unit and suction by the suction unit; Including, The ceiling portion has a structure protruding downward, The suction unit has an exhaust port disposed around the structure, The lower layer is a region below a maximum height at which the blower unit can directly blow air, An auxiliary air conditioning means is disposed at a position affected by a heat generating body installed in the clean room. Clean room system.

2. The blowing section is provided in a plurality of locations in the clean room so as to face each other, The auxiliary air conditioning means is provided at a position between the blower sections. The clean room system according to claim 1 .

3. The auxiliary air conditioning means is an air conditioner provided in the lower layer. The clean room system according to claim 1 or 2.

4. The auxiliary air conditioning means is an air conditioner installed under the floor. The clean room system according to claim 1 or 2.

5. An air exhaust method performed by a displacement ventilation type clean room system which is installed in a clean room where temperature and cleanliness are controlled, and which ventilates by pushing up relatively high-temperature air with a high concentration of contaminants to an upper layer using air supplied to a lower layer, comprising the steps of: The clean room includes a ceiling portion installed at a height included in the upper layer, The ceiling portion has a structure protruding downward, a blowing step of the clean room system blowing air into a room of the clean room at a lower part of the clean room; a suction step in which the clean room system draws in the air from an exhaust port located around the structure above a height at which the blowing step is performed; an auxiliary air conditioning procedure in which the clean room system performs air conditioning at a position affected by a heat source installed in the clean room; Including, The lower layer is an area below the maximum height at which air can be directly blown in the blowing procedure. Air exhaust method.

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