Valve device

Abstract

This valve device comprises: a flow path block in which a fluid inflow path and a fluid outflow path are formed, a diaphragm that opens and closes between a fluid inflow path and a fluid outflow path, a case, a piston which is housed in the case and in which an air flow path is formed, a stem that moves axially with the piston to move the diaphragm to an open positioned or a closed position, and an actuator having an air introduction chamber surrounded by the case and the piston and a one-touch joint that supplies air fluid to the air introduction chamber via the air flow path. The one-touch joint is connected to the piston.

Description

[Technical field]

[0001] The present invention relates to a valve device. [Background technology]

[0002] JP2012-26544A discloses a valve device including a flow path block in which a flow path is formed, a valve body that opens and closes the flow path, a case, a piston housed in the case, a stem that moves axially together with the piston to move the valve body to an open position or a closed position, and an actuator having a one-touch joint that supplies driving air to the piston and is attached to the top wall of the case. Summary of the Invention

[0003] However, in the valve device described in JP2012-26544A, the pressure of the driving air supplied between the joint and the piston when the piston moves in a direction away from the flow path block acts downward on the upper end of the piston, which may hinder the upward movement of the piston. In particular, in a small valve device, the adverse effect of the pressure of the driving air supplied between the joint and the piston when the piston moves in a direction away from the flow path block becomes significant.

[0004] The present invention has been made with attention to this problem, and aims to provide a valve device that can suppress the adverse effects caused by the pressure of the driving fluid supplied between the joint and the piston when the piston moves in a direction away from the flow path block.

[0005] According to one aspect of the present invention, an actuator is provided, the actuator having: a flow path block in which a flow path is formed; a valve body for opening and closing the flow path; a case; a piston housed in the case and in which a fluid flow path is formed; a stem for moving the valve body to an open position or a closed position by moving axially together with the piston; a fluid introduction chamber surrounded by the case and the piston; and a coupling for supplying a drive fluid to the fluid introduction chamber via the fluid flow path, the coupling being connected to the piston.Without gaps It is provided in a linked manner.

[0006] According to this aspect, it is possible to suppress adverse effects caused by the pressure of the driving fluid supplied between the joint and the piston when the piston moves in a direction away from the flow path block. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a cross-sectional view showing a valve device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present invention (hereinafter, referred to as the present embodiment) will be described with reference to the accompanying drawings. In this specification, the same elements are denoted by the same reference numerals throughout.

[0009] (Valve device configuration) First, a valve device 1 according to this embodiment will be described with reference to Fig. 1. Fig. 1 is a cross-sectional view showing the valve device 1. In Fig. 1, a one-touch joint 65 is shown in a non-cross-sectional view.

[0010] The valve device 1 according to this embodiment is provided in a fluid control device (not shown) used in the manufacture of semiconductors. The fluid control device is used in a thin film formation process for forming a predetermined thin film on a substrate such as a semiconductor wafer by an ALD (Atomic Layer Deposition) method.

[0011] 1, the valve device 1 includes a flow path block 2, a diaphragm 3 as a valve body, a diaphragm holder 4 as a valve body holder, a spacer 5, and an actuator 6. The valve device 1 is an air-operated valve that opens and closes the diaphragm 3 by supplying driving air as a driving fluid to the actuator 6.

[0012] The flow path block 2 has a fluid inflow flow path 21 and a fluid outflow flow path 22 as flow paths, and a recess 23 in which a bonnet 612 (described later) of a case 61 constituting the actuator 6 is housed.

[0013] An upper end as one end of the fluid inflow channel 21 and an upper end as one end of the fluid outflow channel 22 communicate with each other via a recess 23. An annular valve seat 24 is provided on the periphery of one end of the fluid inflow channel 21. The channel block 2 includes a peripheral wall 231 that forms the recess 23. An internal thread 232 that screws into the bonnet 612 is formed on the inner circumferential surface of the peripheral wall 231.

[0014] The diaphragm 3 is a sheet-like valve element that opens and closes the fluid inflow flow passage 21 by being separated from or pressed against the valve seat 24. The diaphragm 3 is a partition member that separates the flow passage side from the actuator 6 side. In a natural state, the diaphragm 3 is formed in an arc shape that protrudes toward the actuator 6 side (upper side in FIG. 1), and is made of, for example, a nickel alloy thin plate. Normally, the diaphragm 3 is pressed against the valve seat 24 by a diaphragm presser 4.

[0015] The diaphragm holder 4 is a cylindrical holder member for holding the diaphragm 3 against the valve seat 24. The diaphragm holder 4 is housed in the bonnet 612. The diaphragm holder 4 has an upper end as one end that abuts against a stem 64 (described later) that constitutes the actuator 6, and a lower end as the other end that faces the diaphragm 3.

[0016] The spacer 5 is an annular pressing adapter for pressing the outer periphery of the diaphragm 3. The spacer 5 is provided between the bottom surface of the recess 23 of the flow path block 2 and the lower end of the bonnet 612. The outer periphery of the diaphragm 3 is held between the spacer 5 and the bottom surface of the recess 23, and is fixed by screwing the bonnet 612 into the female threads 232 of the peripheral wall 231. The lower end of the diaphragm presser 4, which comes into contact with the diaphragm 3, is inserted into the inner periphery of the spacer 5.

[0017] The actuator 6 presses or separates the diaphragm 3 against the valve seat 24 via the diaphragm retainer 4 housed in a second housing chamber 612f (described later) of the bonnet 612, thereby blocking or connecting the fluid inflow passage 21 and the fluid outflow passage 22. The actuator 6 has a case 61, a piston 62, a coil spring 63, a stem 64, and a one-touch joint 65 as a joint. Note that, in this embodiment, the stem 64 is described as a component separate from the piston 62, but is not limited thereto, and may be, for example, a part of the piston 62.

[0018] The case 61 is a frame member for accommodating the piston 62, the coil spring 63, the stem 64, and the one-touch joint 65. The case 61 is provided above the flow path block 2. The case 61 also has a substantially bottomed cylindrical cap 611 as an upper case, and a bonnet 612 as a lower case connected to the cap 611 by screwing.

[0019] The cap 611 has a cylindrical peripheral wall 611a and a disk-shaped top wall 611b provided at an upper end, which serves as one end, of the peripheral wall 611a.

[0020] A male screw 611c that screws into the bonnet 612 is formed on the outer peripheral surface of the lower end side, which is the other end side, of the peripheral wall 611a. A through hole 611d that penetrates in the axial direction of the stem 64 (the vertical direction in FIG. 1) is formed in the center of a top wall 611b, which is one end of the case 61. A flexible tube (not shown) for connecting a drive air supply control unit (not shown) and the one-touch joint 65 is inserted into the through hole 611d.

[0021] The top wall 611b is formed with an annular surface 611e surrounding the through hole 611d as a holding surface for holding an upper end as one end of the coil spring 63. The coil spring 63 is accommodated in a spring accommodating space 66 formed between the annular surface 611e and the piston 62 in a compressed state such that the upper end abuts against the annular surface 611e and the other end, that is, the lower end, abuts against the piston 62.

[0022] The top wall 611b is formed with a pair of engagement holes 611f that engage with a rotation jig that rotates the cap 611 so as not to interfere with the through-hole 611d.

[0023] The bonnet 612 is connected by screwing to both the cap 611 and the flow path block 2. The bonnet 612 has a cylindrical peripheral wall 612a and a bonnet body 612b provided at the lower end of the peripheral wall 612a.

[0024] A female thread 612c that screws into the male thread 611c is formed on the inner peripheral surface of the upper end side (one end side) of the peripheral wall 612a. A contact surface 612d that contacts the outer peripheral surface of an O-ring 67 as a first seal material is formed on the inner peripheral surface of the lower end side (the other end side) of the peripheral wall 612a.

[0025] A first housing chamber 612e that houses an O-ring 68 as a second sealant is formed in the center of the upper end of the bonnet body 612b. When the O-ring 68 is housed in the first housing chamber 612e, the inner peripheral surface of the first housing chamber 612e and the outer peripheral surface of the O-ring 68 come into contact with each other. A second housing chamber 612f that houses the diaphragm holder 4 is formed in the center of the lower end of the bonnet body 612b. An insertion hole 612g that communicates between the first housing chamber 612e and the second housing chamber 612f and through which the stem 64 is inserted is formed in the bonnet body 612b.

[0026] Moreover, a male thread 612h that screws into the female thread 232 of the peripheral wall 231 is provided on the outer peripheral surface of the lower end side of the bonnet body 612b. Furthermore, an air vent hole 612i that connects the insertion hole 612g to the outside is formed in the bonnet body 612b along the radial direction of the stem 64.

[0027] The piston 62 has a disk-shaped piston body 621, a connecting portion 622 provided at the upper end as one end of the piston body 621, and an air flow path 623 as a fluid flow path formed in the connecting portion 622 and the piston body 621.

[0028] The outer circumferential surface of piston body 621, which serves as a sliding surface, is in sliding contact with the inner circumferential surface of O-ring 67. An annular flange 621a protruding from the outer circumferential surface of piston body 621 is provided on the upper end side of piston body 621. O-ring 67 is housed between flange 621a and the upper end surface of bonnet body 612b.

[0029] A tubular (specifically, cylindrical) connecting portion 622 protruding from the upper end surface of the piston body 621 is provided at the center of the upper end surface, which serves as one end surface, of the piston body 621. An annular surface 621b is formed at the upper end surface of the piston body 621 as a holding surface that holds the lower end of the coil spring 63 so as to surround the connecting portion 622. A female thread 622a that screws into a male thread 652a (described later) of the one-touch joint 65 is formed on the inner circumferential surface of the connecting portion 622.

[0030] The air flow passage 623 is a flow passage for introducing driving air into an air introducing chamber 69 serving as a fluid introducing chamber, which will be described later. The air flow passage 623 has an axial flow passage 623a formed in the connecting portion 622 and the piston body 621 so as to extend in the up-down direction (i.e., in the axial direction of the stem 64), and a communication flow passage 623b formed in the piston body 621 and the stem 64 so as to communicate between the axial flow passage 623a and the air introducing chamber 69.

[0031] The axial flow passage 623a is connected to the lower end of the female thread 622a, and is formed so that its tip enters the piston body 621. The communication flow passage 623b is formed inclined with respect to the axial direction of the stem 64 so as to communicate the tip of the axial flow passage 623a and the air introducing chamber 69.

[0032] The stem 64 is a stem that moves in the axial direction together with the piston 62 to move the diaphragm 3 to the open position or the closed position via the diaphragm presser 4. The stem 64 protruding from the lower end surface of the piston body 621 is provided in the central portion of the lower end surface, which is the other end surface, of the piston body 621. In this embodiment, the stem 64 is formed integrally with the piston 62, but is not limited to this and may be formed separately from the piston 62, for example.

[0033] The stem 64 is formed to be inserted through the first accommodation chamber 612e and the insertion hole 612g in this order, with the tip thereof entering the second accommodation chamber 612f. The stem 64 has an outer peripheral surface serving as a sliding contact surface that slides against the inner peripheral surface of the O-ring 68. The diaphragm holder 4 abuts against the tip of the stem 64. This allows the diaphragm holder 4 to move axially together with the stem 64.

[0034] The air introducing chamber 69 is an area surrounded by the bonnet 612 , the piston body 621 , the stem 64 , the O-ring 67 and the O-ring 68 .

[0035] One-touch joint 65 is a joint for connecting the flexible tube and connecting portion 622 of piston 62. One-touch joint 65 is provided in connection with connecting portion 622 of piston 62. This eliminates the need to provide a connecting structure for connecting one-touch joint 65 to cap 611 of case 61, and therefore the structure of cap 611 can be simplified.

[0036] The one-touch joint 65 has a tubular (specifically, cylindrical) joint body 651, a tubular (specifically, cylindrical) screw-threaded portion 652 provided at the lower end as the other end of the joint body 651, and a joint flow path 653 formed on the inner circumferential side of the joint body 651 and the screw-threaded portion 652. A male thread 652a that screws into the female thread 622a of the connecting portion 622 is formed on the outer circumferential surface of the screw-threaded portion 652. The screw-threaded portion 652 has an outer diameter smaller than that of the joint body 651. Both ends of the joint flow path 653 are respectively connected to the flow path of the flexible tube and the air flow path 623 (specifically, the axial flow path 623a) of the piston 62.

[0037] The connection portion between the upper end as one end of the joint body 651 and the tip of the flexible tube is sealed. Then, the male thread 652a of the screw-fitting portion 652 is screwed into the female thread 622a of the connecting portion 622, whereby the one-touch joint 65 is connected to the connecting portion 622 of the piston 62. This makes it possible to eliminate a gap between the one-touch joint 65 and the piston 62, and therefore makes it possible to suppress adverse effects due to the pressure of the driving air supplied between the one-touch joint 65 and the piston 62 when the piston 62 moves upward away from the flow path block 2.

[0038] Also, there is no need to seal between the piston 62 and the cap 611, and between the through hole 611d of the cap 611 and the one-touch joint 65, and it is possible to eliminate structures (specifically, including O-rings) for sealing between the tip of the piston 62 and the cap 611, and between the through hole 611d and the one-touch joint 65. As a result, the structure of the cap 611 can be further simplified.

[0039] Furthermore, it is preferable that an annular (annular) sealant be provided on the annular surface (circular surface) of the lower end of the joint body 651 located on the outer circumferential side of the screw-on portion 652. With this, in a state in which the one-touch joint 65 and the connecting portion 622 of the piston 62 are connected by screwing the male thread 652a and the female thread 622a together, the sealant can be brought into contact with the tip surface of the connecting portion 622 to seal the connecting portion between the lower end of the joint body 651 and the tip of the connecting portion 622.

[0040] In this embodiment, the one-touch joint 65 is connected to the connecting portion 622 of the piston 62 by screwing together the male thread 652a and the female thread 622a, but this is not limited to this and may be connected to the connecting portion 622 of the piston 62 by, for example, fitting or adhesive bonding.

[0041] The outer diameter of the joint body 651 is smaller than the inner diameter of the through hole 611d. That is, a clearance is formed between the outer peripheral surface of the joint body 651 and the inner peripheral surface of the through hole 611d. As a result, the one-touch joint 65 enters the through hole 611d when moving axially together with the piston 62 and the stem 64, but does not slide with the through hole 611d, so that the sliding resistance caused by the sliding contact between the one-touch joint 65 and the through hole 611d can be suppressed. As a result, the responsiveness of the actuator 6 can be improved. That is, the time required for the diaphragm 3 to open or close can be shortened.

[0042] The clearance communicates between the spring accommodating space 66, which accommodates the coil spring 63, and the outside. This eliminates the need to form an air vent hole that communicates between the spring accommodating space 66 and the outside, thereby further simplifying the structure of the cap 611.

[0043] The joint body 651 does not protrude from the top wall 611b of the cap 611 when moving axially together with the piston 62 and the stem 64. This makes it possible to reduce the size of the valve device 1 in the axial direction, compared to a valve device in which the one-touch joint 65 is attached to the top wall 611b of the case 61 so as to protrude from the case 61.

[0044] (Valve device operation) Next, the operation of the valve device 1 will be described.

[0045] When the drive air supply control unit supplies drive air to the actuator 6 of the valve device 1, the drive air is introduced into the air introducing chamber 69 via the flexible tube, the joint flow path 653 of the one-touch joint 65, and the air flow path 623 of the piston 62, in that order.

[0046] As a result, the piston 62 moves upward together with the one-touch joint 65 and the stem 64 against the biasing force of the coil spring 63 so that the volume of the air introducing chamber 69 increases. Then, the diaphragm 3 rises together with the diaphragm presser 4 due to its own restoring force, and moves away from the valve seat 24. That is, the diaphragm 3 opens the fluid inflow passage 21 due to the rise of the piston 62, the one-touch joint 65, the stem 64, and the diaphragm presser 4. Therefore, fluid such as vaporized process gas is supplied from the fluid inflow passage 21 to the fluid outflow passage 22 through the gap formed between the valve seat 24 and the diaphragm 3.

[0047] On the other hand, when the driving air supply control unit does not supply driving air to the actuator 6 of the valve device 1, the piston 62 moves downward together with the stem 64 due to the biasing force of the coil spring 63. Then, the diaphragm 3 is pressed against the valve seat 24 via the diaphragm holder 4 by the downward movement of the stem 64. That is, the diaphragm 3 closes the fluid inflow passage 21 by the movement of the piston 62, the one-touch joint 65, the stem 64, and the diaphragm holder 4. Therefore, fluid such as vaporized process gas is not supplied from the fluid inflow passage 21 to the fluid outflow passage 22.

[0048] The volume of the air introduction chamber 69 decreases due to the movement of the piston 62, the one-touch joint 65, the stem 64, and the diaphragm retainer 4. At this time, the air in the air introduction chamber 69 is led to the drive air supply control unit via the air flow path 623, the joint flow path 653, and the flexible tube, in that order.

[0049] In this way, the drive air supply control section can switch between opening and closing the diaphragm 3 relative to the valve seat 24 by controlling the supply of drive air to the actuator 6 of the valve device 1. Therefore, such a valve device 1 makes it possible to control the supply of fluid from the fluid inflow passage 21 to the fluid outflow passage 22. Note that in this embodiment, the valve device 1 is made up of a normally closed valve device, but is not limited to this and may be made up of, for example, a normally open valve device.

[0050] (Action and effect) Next, the effects of this embodiment will be described.

[0051] The valve device 1 of this embodiment comprises a flow path block 2 in which a fluid inflow path 21 and a fluid outflow path 22 are formed, a diaphragm 3 that opens and closes between the fluid inflow path 21 and the fluid outflow path 22, a case 61, a piston 62 housed in the case 61 and in which an air flow path 623 is formed, a stem 64 that moves axially together with the piston 62 to move the diaphragm 3 to an open position or a closed position, an air introduction chamber 69 surrounded by the case 61 and the piston 62, and an actuator 6 having a one-touch joint 65 that supplies air fluid to the air introduction chamber 69 via the air flow path 623, and the one-touch joint 65 is provided in connection with the piston 62.

[0052] According to this configuration, the gap between the one-touch joint 65 and the piston 62 can be eliminated, thereby suppressing the adverse effects caused by the pressure of the driving air supplied between the one-touch joint 65 and the piston 62 when the piston 62 moves in a direction away from the flow path block 2.

[0053] Also, there is no need to provide sealing between the piston 62 and the cap 611, and between the cap 611 and the one-touch joint 65, and it is possible to eliminate structures (specifically, including O-rings) for providing sealing between the tip of the piston 62 and the cap 611, and between the cap 611 and the one-touch joint 65. As a result, the structure of the cap 611 that constitutes the case 61 can be further simplified.

[0054] In this embodiment, the one-touch joint 65 does not come into sliding contact with the case 61 when moving axially together with the piston 62 and the stem 64 .

[0055] In addition, in this embodiment, a through hole 611d is formed in the top wall 611b of the cap 611, which is one end of the case 61 opposite the flow path block 2, and a clearance is formed between the outer peripheral surface of the one-touch fitting 65 and the inner peripheral surface of the through hole 611d.

[0056] According to these configurations, the one-touch joint 65 enters the through-hole 611d when moving axially together with the piston 62 and the stem 64, but does not slide against the through-hole 611d, so that it is possible to suppress the sliding resistance caused by the sliding contact between the one-touch joint 65 and the through-hole 611d. As a result, the responsiveness of the actuator 6 can be improved.

[0057] In this embodiment, the one-touch joint 65 does not protrude from the case 61 when moving axially together with the piston 62 and the stem 64 .

[0058] According to this configuration, compared to a valve device in which the one-touch joint 65 is attached to the top wall 611b of the case 61 so as to protrude from the case 61, it is possible to reduce the size of the valve device 1 in the axial direction.

[0059] In this embodiment, the case 61 has a cap 611 and a bonnet 612 connected to both the cap 611 and the flow path block 2, and the stem 64 is entirely housed in the bonnet 612.

[0060] According to this configuration, the bonnet 612 connected to the flow path block 2 serves as the lower case constituting the case 61, and is connected to the cap 611 serving as the upper case constituting the case 61, thereby making it possible to integrate the lower case and the bonnet 612, thereby simplifying the components constituting the valve device 1.

[0061] Moreover, since the entire stem 64 is housed in the bonnet 612, it is possible to further reduce the size of the valve device 1 in the axial direction. In the valve device 1 that has been reduced in size, it is possible to suppress adverse effects that become noticeable due to the pressure of the driving air supplied between the one-touch coupling 65 and the piston 62 when the piston 62 moves in a direction away from the flow path block 2.

[0062] Although the present embodiment has been described above, the above-described embodiment merely illustrates some of the application examples of the present invention, and is not intended to limit the technical scope of the present invention to the specific configurations of the above-described embodiment.

[0063] This application claims priority based on Patent Application No. 2021-125167, filed with the Japan Patent Office on July 30, 2021, the entire contents of which are incorporated herein by reference. [Explanation of symbols]

[0064] 1 Valve device 2 Fluid Block 3 Diaphragm (valve body) 6 Actuators 21 Fluid inlet channel (channel) 22 Fluid outlet channel (channel) 61 cases 62 Piston 64 Stem 65 One-touch fitting (fitting) 69 Air introduction chamber (fluid introduction chamber) 611 Cap 612 Bonnet 611d Through hole 623 Air flow path (fluid flow path)

Claims

1. a flow path block in which a flow path is formed; A valve body that opens and closes the flow path; an actuator including a case, a piston housed in the case and having a fluid flow path formed therein, a stem that moves axially together with the piston to move the valve element to an open position or a closed position, a fluid introduction chamber surrounded by the case and the piston, and a joint that supplies a drive fluid to the fluid introduction chamber via the fluid flow path, The joint is connected to the piston without any gap. Valve device.

2. the joint does not come into sliding contact with the case when moving in the axial direction together with the piston and the stem, The valve device of claim 1 .

3. A through hole is formed at one end of the case, A clearance is formed between an outer peripheral surface of the joint and an inner peripheral surface of the through hole. The valve device according to claim 2.

4. the joint does not protrude from the case when moving in the axial direction together with the piston and the stem; The valve device of claim 1 .

5. The case is Cap and a bonnet connected to both the cap and the flow path block; The stem is entirely housed within the bonnet. The valve device of claim 1 .

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