Method for producing boron-removed pure water, pure water production equipment, ultrapure water production system

Abstract

To provide a manufacturing apparatus of pure water and a manufacturing method of pure water which can manufacture pure water stably for an extended period and efficiently by suppressing scale blocks of a reverse osmosis membrane.SOLUTION: In a manufacturing method of pure water for obtaining boron-removed pure water by water conduction of raw water in two or more stages of reverse osmosis membranes, the method is characterized by that: an alkali treatment step where alkaline water to be treated is made to pass through one stage of a reverse osmosis membrane and an acid treatment step where acidic water to be treated is made to pass through to another stage of a reverse osmosis membrane are conducted in a predetermined order; and a first treatment period where a first reverse osmosis membrane is used in the alkali treatment step and a second reverse osmosis membrane is used in the acid treatment step and a second treatment period where the second reverse osmosis membrane is used in the alkali treatment step and the first reverse osmosis membrane is used in the acid treatment step are repeated in a predetermined interval by replacing the first reverse osmosis membrane and the second reverse osmosis membrane.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a method for producing pure water from which boron has been removed, a pure water producing apparatus, and an ultrapure water producing system using the same. [Background technology]

[0002] As a method for producing pure water by treating raw water containing boron, a method for producing pure water is known in which an alkali is added to the raw water to adjust the pH to 9.2 or more, and then reverse osmosis membrane treatment is performed. In this method, an acid is added to the permeated water from which boron has been removed, and the treated water is further treated with a reverse osmosis membrane to increase the resistivity of the treated water (see, for example, Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 11-128921 [Patent Document 2] Japanese Patent Publication No. 11-128922 Summary of the Invention [Problem to be solved by the invention]

[0004] Although raising the pH of water to 10 or higher improves the boron removal rate, the higher the pH, the more likely it is that scale blockage due to hardness such as calcium and magnesium will occur in the reverse osmosis membrane. For this reason, in conventional methods for producing pure water that removes boron, a hardness removal mechanism or a degassing device with high decarbonation capabilities is installed in the upstream stage to prevent scale blockage. In contrast, adjusting the pH of the water supplied to the reverse osmosis membrane to 5 or lower prevents the formation of hardness scale, but makes silica scale more likely to form.

[0005] When hard scale blockage occurs, scale cleaning is performed by passing an acidic cleaning agent, for example, with a pH of about 1 to 3, through the reverse osmosis membrane.When silica scale blockage occurs, scale cleaning is performed by passing an alkaline cleaning agent, for example, with a pH of 11.5 to 13, through the reverse osmosis membrane.

[0006] In both cases of hardness scale clogging and silica scale clogging, it is difficult to completely prevent scale clogging, and scale clogging occurs during short-term operation depending on the quality of the raw water and the operating conditions. When scale clogging progresses, the equipment must be stopped for backwashing and cleaning of the reverse osmosis membrane, installation of cleaning equipment, and membrane replacement, which reduces the efficiency of pure water production. For this reason, for example, for a period of six months to one year or more, the reverse osmosis membrane is operated continuously while avoiding cleaning as much as possible, and cleaning is often performed when it becomes difficult to continue operation, for example, due to a significant decrease in the permeate flow rate or a significant increase in the differential pressure between the supply side and the permeation side. However, with such an operating method, strong crystals of scale components grow on the reverse osmosis membrane surface when it becomes difficult to continue operation, and the physical properties of the membrane surface may change and deteriorate while the crystals grow.

[0007] When such hard scales are formed on the reverse osmosis membrane surface, the reverse osmosis membrane is likely to deteriorate due to the chemicals used for cleaning over a long period of time. Even if cleaning is performed, the deterioration of the membrane surface that occurs simultaneously with the crystal growth during water flow cannot be restored, so the deterioration of the treated water quality of the reverse osmosis membrane after cleaning is inevitable.

[0008] On the other hand, it is possible to frequently repeat cleaning so as not to form hard scale. However, this method is not practical because it requires frequent shutdowns of the system, the amount of wastewater generated by the repeated cleaning is too large, and it is difficult to reuse the wastewater. In other words, from the viewpoint of suppressing deterioration of the reverse osmosis membrane and reducing the amount of chemicals used, a method is desired that can produce pure water with a high water recovery rate without performing scale cleaning and stopping the pure water production system.

[0009] The present invention has been made to solve the above-mentioned problems, and has an object to provide a pure water production apparatus and a pure water production method that can stably and efficiently produce pure water for a long period of time without cleaning the reverse osmosis membrane by suppressing scale clogging of the reverse osmosis membrane. [Means for solving the problem]

[0010] In one embodiment of the pure water production method, raw water is passed through two or more stages of reverse osmosis membranes in sequence to obtain pure water from which boron has been removed, and the method is characterized in that an alkaline treatment process in which alkaline water to be treated is passed through one of the reverse osmosis membranes and an acid treatment process in which acidic water to be treated is passed through another of the reverse osmosis membranes are performed in a predetermined order, and a first treatment period in which a first reverse osmosis membrane is used in the alkaline treatment process and a second reverse osmosis membrane is used in the acid treatment process, and a second treatment period in which the second reverse osmosis membrane is used in the alkaline treatment process and the first reverse osmosis membrane is used in the acid treatment process are repeated at predetermined intervals by interchanging the first reverse osmosis membrane and the second reverse osmosis membrane.

[0011] In an embodiment of the pure water manufacturing method, during the first treatment period, alkaline treated water is passed through the first reverse osmosis membrane to perform an alkaline treatment process, the permeate through the first reverse osmosis membrane is adjusted to be acidic, and the resulting acidic treated water is passed through the second reverse osmosis membrane to perform the acid treatment process, and during the second treatment period, alkaline treated water is passed through the second reverse osmosis membrane to perform an alkaline treatment process, the permeate through the second reverse osmosis membrane is adjusted to be acidic, and the resulting acidic treated water is passed through the first reverse osmosis membrane to perform the acid treatment process, and it is preferable that the pH of the alkaline treated water is 9.0 or more and 11.0 or less, and the pH of the acidic treated water is 5.0 or less.

[0012] The pure water producing method of the embodiment preferably further comprises a step of passing raw water having a pH of 5.0 or more and 7.5 or less through a third reverse osmosis membrane device prior to the alkali treatment step.

[0013] In the embodiment of the pure water manufacturing method, in the first treatment period, the acidic water to be treated is passed through the second reverse osmosis membrane to perform the acid treatment step, the permeate of the second reverse osmosis membrane is adjusted to be alkaline, and the generated alkaline water to be treated is passed through the first reverse osmosis membrane to perform the alkaline treatment step, and in the second treatment period, the acidic water to be treated is passed through the first reverse osmosis membrane to perform the acid treatment step, the permeate of the first reverse osmosis membrane is adjusted to be alkaline, and the generated alkaline water to be treated is passed through the second reverse osmosis membrane to perform the alkaline treatment step, and the pH of the alkaline water to be treated is 9.0 or more and 11.0 or less, The pH of the acidic water to be treated is preferably 5.0 or more and 6.0 or less.

[0014] The embodiment of the pure water manufacturing apparatus is a pure water manufacturing apparatus that has two or more reverse osmosis membrane devices connected in series to produce pure water from which boron has been removed, and is characterized by having a raw water supply pipe that supplies raw water, a first reverse osmosis membrane device, a second reverse osmosis membrane device, a first adjustment mechanism that adjusts the water to be treated to be alkaline or acidic, a second adjustment mechanism that adjusts the water to be treated to be acidic or alkaline, which is different from the liquid property adjusted by the first adjustment mechanism, a first treatment path that passes the raw water through the first adjustment mechanism, the first reverse osmosis membrane device, the second adjustment mechanism, and the second reverse osmosis membrane device in this order, a second treatment path that passes the raw water through the first adjustment mechanism, the second reverse osmosis membrane device, the second adjustment mechanism, and the first reverse osmosis membrane device in this order, a switching mechanism capable of switching between the first treatment path and the second treatment path, and a control mechanism that controls the switching mechanism to switch between the first treatment path and the second treatment path every time a predetermined treatment period has elapsed.

[0015] In the pure water producing apparatus of the embodiment, it is preferable that the first adjustment mechanism is an alkali adjustment mechanism that adjusts raw water to be alkaline, and the second adjustment mechanism is an acid adjustment mechanism that adjusts the water to be treated to be acidic.

[0016] In the embodiment of the pure water producing apparatus, the first treatment path includes a first supply pipe for supplying raw water to a supply side of a first reverse osmosis membrane device, a second supply pipe for supplying permeated water from the first reverse osmosis membrane device to the second adjustment mechanism, a third supply pipe for supplying water to be treated that has passed through the second adjustment mechanism to the supply side of the second reverse osmosis membrane device, a fourth supply pipe for sending the permeated water from the second reverse osmosis membrane device to a subsequent stage, and four switching valves interposed in the first to fourth supply pipes, respectively, and the first adjustment mechanism is installed upstream of the switching valve of the first supply pipe. The second treatment path includes a first supply pipe for supplying raw water to a supply side of the second reverse osmosis membrane device, a second supply pipe for supplying the permeated water from the second reverse osmosis membrane device to the second adjustment mechanism, a third supply pipe for supplying water to be treated that has passed through the second adjustment mechanism to the supply side of the second reverse osmosis membrane device, a fourth supply pipe for sending the permeated water from the second reverse osmosis membrane device to a subsequent stage, and four switching valves interposed in the first to fourth supply pipes, respectively. The system has a fifth supply pipe which supplies the water to the supply side of the reverse osmosis membrane device, a sixth supply pipe which supplies the permeated water of the second reverse osmosis membrane device to the second adjustment mechanism, a seventh supply pipe which supplies the water to be treated that has passed through the second adjustment mechanism to the supply side of the first reverse osmosis membrane device, an eighth supply pipe which sends the permeated water of the first reverse osmosis membrane device to a subsequent stage, and four switching valves interposed in the fifth to eighth supply pipes, respectively, and the first adjustment mechanism is preferably installed upstream of the switching valve of the sixth supply pipe, and the control mechanism preferably controls the eight switching valves to switch between the first treatment path and the second treatment path.

[0017] In the pure water producing apparatus of the embodiment, it is preferable that the first adjustment mechanism is an acid adjustment mechanism that adjusts the raw water to be weakly acidic, and the second adjustment mechanism is an alkali adjustment mechanism that adjusts the water to be treated to be alkaline.

[0018] The ultrapure water producing system of one embodiment is an ultrapure water producing system comprising a primary pure water system and a secondary pure water system in this order, the primary pure water system comprising the pure water producing apparatus described in claim 5 or 6, followed by an ultraviolet oxidation device and an electrical deionization device, and the secondary pure water system comprising an ultraviolet oxidation device, a non-regenerative polisher, a membrane degassing device and an ultrafiltration device in this order, and is characterized in that it produces ultrapure water having a boron concentration of 0.1 μg / L or less.

[0019] In this specification, the symbol "~" indicates a numerical range from the value to the left of the symbol to the value to the right of the symbol. Effect of the Invention

[0020] According to the pure water producing apparatus and pure water producing method of the present invention, by suppressing scale clogging of the reverse osmosis membrane for a long period of time, pure water can be produced stably and efficiently for a long period of time without cleaning the reverse osmosis membrane. According to the pure water producing system of the present invention, by suppressing scale clogging of the reverse osmosis membrane provided at the upstream side of the ultrapure water producing system for a long period of time, ultrapure water can be produced stably and efficiently for a long period of time without cleaning the reverse osmosis membrane. [Brief description of the drawings]

[0021] [Figure 1] 1 is a block diagram illustrating a schematic diagram of a pure water producing method according to a first embodiment. [Diagram 2] FIG. 4 is a block diagram illustrating a pure water producing method according to a second embodiment. [Diagram 3] FIG. 11 is a block diagram illustrating a pure water producing system according to a third embodiment. [Figure 4] FIG. 13 is a block diagram illustrating a pure water producing system according to a first modified example of the third embodiment. [Diagram 5] FIG. 11 is a block diagram illustrating a pure water producing system according to a fourth embodiment. [Figure 6] FIG. 13 is a diagram illustrating a first treatment path in a pure water producing system according to a fourth embodiment. [Figure 7] FIG. 13 is a diagram for explaining a second treatment path in the pure water producing system of the fourth embodiment. [Figure 8] FIG. 2 is a diagram illustrating a processing path during a first processing period when a four-way valve is used. [Figure 9] FIG. 13 is a diagram illustrating a processing path during a second processing period when a four-way valve is used. [Figure 10] FIG. 13 is a block diagram illustrating a pure water producing system according to a first modified example of the pure water producing system of the fourth embodiment. [Figure 11] FIG. 13 is a diagram showing a schematic arrangement of a fourth reverse osmosis membrane device when a four-way valve is used. [Figure 12]1 is a block diagram illustrating a schematic configuration of an ultrapure water producing system according to an embodiment. [Figure 13] 1 is a graph showing the relationship between the pH of water to be treated in a reverse osmosis membrane device, and the boron removal rate and resistivity of the treated water. [Figure 14] 1 is a graph showing the relationship between the pH of water to be treated in a reverse osmosis membrane device and the resistivity of the treated water. [Figure 15] 1 is a graph showing the change in water flow time and permeate flow rate when the pH of the water to be treated in a reverse osmosis membrane device is adjusted to 9, 10.5, and 11. [Figure 16] 1 is a graph showing the change in permeate flow rate immediately after treatment in a reverse osmosis membrane device was started when the pH of the water to be treated was adjusted to 3, 4, and 6. [Figure 17] 1 is a graph showing the change in treated water flow rate when the front and rear reverse osmosis membrane devices in two stages are switched every 90 days. [Figure 18] 18 is a graph showing changes in permeate quality of the second and third stage reverse osmosis membrane devices under the operating conditions shown in FIG. 17. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, an embodiment of the present invention will be described. The pure water producing method of this embodiment is a method for producing pure water used in the electronics industry such as semiconductor manufacturing and for medical water. The pure water producing method of the embodiment is a method for producing pure water from which boron has been removed by passing raw water through two or more reverse osmosis membranes in sequence, and includes an alkali treatment step in which alkaline water to be treated is passed through one reverse osmosis membrane, and an acid treatment step in which acidic water to be treated is passed through another reverse osmosis membrane. The alkali treatment step and the acid treatment step are performed in a predetermined order, and the acid treatment step may be performed after the alkali treatment step, or the alkali treatment step may be performed after the acid treatment step. The pure water producing method of this embodiment is characterized in that a first treatment period in which a first reverse osmosis membrane is used in the alkali treatment step and a second reverse osmosis membrane is used in the acid treatment step, and a second treatment period in which a second reverse osmosis membrane is used in the alkali treatment step and a first reverse osmosis membrane is used in the acid treatment step are repeated at predetermined intervals by interchanging the first reverse osmosis membrane and the second reverse osmosis membrane. The order of the alkali treatment step and the acid treatment step in the first treatment period is the same as that in the second treatment period. This method will be described in detail below using a specific example.

[0023] Fig. 1 is a block diagram showing a schematic diagram of a pure water producing method according to the first embodiment. As shown in Fig. 1, the pure water producing method according to the first embodiment includes a step 101 of treating raw water with a reverse osmosis membrane to remove hardness components, a step 102 of adjusting the water to be treated from which the hardness components have been removed to an alkaline state and then treating it with a reverse osmosis membrane to remove boron, and a step 103 of adjusting the water to be treated from which the boron has been removed to an acidic state and then treating it with a reverse osmosis membrane to remove ion components.

[0024] In the pure water manufacturing method of the first embodiment shown in FIG. 1, step 102 corresponds to an alkali treatment step, and step 103 corresponds to an acid treatment step. The pH of the alkaline water to be treated in step 102 is 9.0 to 11.0, more preferably 9.2 to 10.5, in order to improve the removal rate of boron. The pH of the acidic water to be treated in step 103 is preferably 5.0 or less, more preferably 4.5 or less, more preferably 2.0 or more, and more preferably 3.0 or more, in order to improve the removal rate of ion components. Between steps 102 and 103, between steps 202 and 203, or after both steps, a step of passing water through one or more reverse osmosis membranes may be further provided in order to remove ion components. A booster pump, a degassing device, or a tank may be installed between each reverse osmosis membrane as necessary.

[0025] In the method for producing pure water according to the present embodiment, after step 101 of removing hardness components, step 102 of removing boron, and step 103 of removing ion components are performed in this order for a predetermined period of time, the reverse osmosis membrane device (first reverse osmosis membrane device (first RO)) used in step 102 of removing boron is replaced with the reverse osmosis membrane device (second reverse osmosis membrane device (second RO)) used in step 103 of removing ion components, step 202 of removing boron is performed with the second reverse osmosis membrane device, and step 203 of removing ion components is performed with the first reverse osmosis membrane device. Then, a treatment period 100 (first treatment period) in which step 101 of removing hardness components, step 102 of removing boron, and step 103 of removing ion components are performed in this order, and a treatment period 200 (second treatment period) in which step 101 of removing hardness components, step 202 of removing boron, and step 203 of removing ion components are performed in this order are alternately repeated for a predetermined period of time. The first and second reverse osmosis membrane devices can be switched by combining valves and piping to switch the flow path of the water to be treated. Instead of providing piping for flow path switching, the device can also be switched by removing two reverse osmosis membranes or reverse osmosis membrane modules and switching their positions.

[0026] In the pure water production method of the present embodiment, in the treatment period 100, hardness components are removed in step 101, but depending on the water quality and operation period, hardness components may leak into the permeate of the reverse osmosis membrane device. In the first reverse osmosis membrane device, since alkaline water to be treated is treated, when the water to be treated contains hardness components, hardness scale clogging is likely to progress. In the second reverse osmosis membrane device, which treats acidic water to be treated, scale clogging due to silica is likely to progress. Therefore, before the scale clogging of the first and second reverse osmosis membrane devices deteriorates the water recovery rate, the first reverse osmosis membrane device and the second reverse osmosis membrane device are replaced and the treatment period 200 is performed. In the treatment period 200, the first reverse osmosis membrane device treats the water to be treated that has been adjusted to be acidic in step 203, and in the process, the hardness components are dissolved by the acid and the scale clogging is improved. In the second reverse osmosis membrane device in which scale clogging by silica has progressed, the water to be treated that has been adjusted to be alkaline is treated in step 202, whereby the silica scale is dissolved by the alkali, and the scale clogging is improved. During the treatment period 200, hardness scale clogging of the second reverse osmosis membrane device used in step 202 and silica scale clogging of the first reverse osmosis membrane device used in step 203 may progress, but by replacing the first reverse osmosis membrane device with the second reverse osmosis membrane device again and performing the treatment period 100 before a decrease in the water recovery rate occurs due to this, the scale clogging of the first and second reverse osmosis membrane devices is improved as in the treatment period 200. This makes it possible to suppress the progress of scale clogging in the first and second reverse osmosis membrane devices over a long period of time, and therefore to produce pure water stably and efficiently over a long period of time. Furthermore, the acid and alkali conditions used in step 102 (step 202) and step 103 (step 203) are milder than the chemicals used in general scale cleaning, so deterioration of the reverse osmosis membrane can be suppressed. As a result, high-quality pure water can be produced stably for a long period of time.

[0027] Fig. 2 is a block diagram showing a schematic diagram of a pure water producing method according to the second embodiment. As shown in Fig. 2, the pure water producing method according to the second embodiment includes a step 301 of adjusting raw water to weak acidity and then treating it with a reverse osmosis membrane to remove hardness components, a step 302 of adjusting the water to be treated from which the hardness components have been removed to alkaline and then treating it with a reverse osmosis membrane to remove boron, and a step 303 of adjusting the water to be treated from which the boron has been removed to acidity and then treating it with a reverse osmosis membrane to remove ion components.

[0028] In the pure water producing method of the second embodiment shown in FIG. 2, step 302 corresponds to an alkaline treatment step, and step 301 corresponds to an acid treatment step. The pH of the acidic water to be treated in step 301 is preferably 5 to 6 in terms of improving the removal rate of hardness components. The pH of the alkaline water to be treated in step 302 is preferably 9.0 to 11.0, more preferably 9.2 to 10.5 in terms of improving the removal rate of boron. Note that between steps 302 and 303 and between or after steps 402 and 403, a step of passing the water through one or more reverse osmosis membranes may be further provided in order to remove ionic components. A booster pump, a degassing device, or a tank may be installed between each reverse osmosis membrane as necessary.

[0029] In the method for producing pure water according to the present embodiment, after the steps 301 to remove hardness components, 302 to remove boron, and 303 to remove ion components are performed in this order for a predetermined period of time, the reverse osmosis membrane device (third reverse osmosis membrane device (third RO)) used in the step 301 to remove hardness components is replaced with the reverse osmosis membrane device (first reverse osmosis membrane device) used in the step 302 to remove boron, and the first reverse osmosis membrane device is used to perform the step 401 to remove hardness components, and the third reverse osmosis membrane device is used to perform the step 402 to remove boron. Then, a treatment period 300 (first treatment period) in which the step 301 to remove hardness components, the step 302 to remove boron, and the step 303 to remove ion components are performed in this order, and a treatment period 400 (second treatment period) in which the step 401 to remove hardness components, the step 402 to remove boron, and the step 303 to remove cation components are performed in this order are alternately repeated for a predetermined period of time. The first reverse osmosis membrane device and the third reverse osmosis membrane device can be switched by combining valves and piping to switch the flow path of the water to be treated. In this case, instead of providing piping for flow path switching, it can also be achieved by removing two reverse osmosis membranes or reverse osmosis membrane modules and switching their positions.

[0030] In the pure water production method of this embodiment, in the treatment period 300, hardness components are removed in step 301, but depending on the water quality and operation period, hardness components may leak into the permeate of the third reverse osmosis membrane device, and scale clogging of the first reverse osmosis membrane device in the subsequent stage may progress. In addition, in the third reverse osmosis membrane device that treats the weakly acidic water to be treated, scale clogging due to silica is likely to progress. Therefore, before the scale clogging of the first and third reverse osmosis membrane devices deteriorates the water recovery rate, the first reverse osmosis membrane device and the third reverse osmosis membrane device are replaced and the treatment period 400 is performed. In the treatment period 400, the first reverse osmosis membrane device treats the water to be treated that has been adjusted to be weakly acidic in step 401, and in the process, the hardness scale is dissolved by the acid, and the scale clogging is improved. In addition, in the third reverse osmosis membrane device in which scale clogging due to silica has progressed, the silica scale is dissolved by the alkali by treating the water to be treated that has been adjusted to be alkaline in step 402, and the scale clogging is improved. During the treatment period 400, hardness scale clogging of the third reverse osmosis membrane device subjected to step 402 and silica scale clogging of the first reverse osmosis membrane device subjected to step 401 may progress, but by replacing the first reverse osmosis membrane device with the third reverse osmosis membrane device again and performing the treatment period 300 before a decrease in the water recovery rate occurs due to this, the scale clogging of the first and third reverse osmosis membrane devices is improved as in the treatment period 400. This makes it possible to suppress the progression of scale clogging in the first and third reverse osmosis membrane devices 11 and 12 over a long period of time, so that pure water can be produced stably and efficiently for a long period of time. Furthermore, the acid and alkali conditions used in step 301 (step 401) and step 302 (step 402) are milder than the chemicals used for general scale cleaning, so that the deterioration of the reverse osmosis membrane can also be suppressed, and as a result, high-quality pure water can be produced stably for a long period of time.

[0031] Specifically, the scale components are mainly water-insoluble calcium (Ca) compounds such as calcium carbonate, calcium fluoride, calcium hydroxide, calcium sulfate, calcium phosphate, etc., magnesium (Mg) compounds such as magnesium carbonate, magnesium fluoride, magnesium hydroxide, magnesium sulfate, magnesium phosphate, etc., as well as silica, aluminum, etc. Scale clogging refers to the phenomenon in which these scale components adhere to the membrane surface and block part or all of the membrane, thereby reducing the amount of permeated water. Scale clogging due to hardness components is likely to occur under alkaline conditions, while scale clogging due to silica is likely to occur under acidic conditions.

[0032] In the first and second embodiments, the timing of replacing the reverse osmosis membrane devices can be, for example, when the treated water flow rate at the most downstream is measured and the treated water flow rate has decreased to a predetermined rate from the initial state. The period during which the treated water flow rate at the most downstream decreases to a predetermined rate from the initial state may be calculated in advance in consideration of the water recovery rate, and the replacement may be performed for each of the periods. Alternatively, the supply water pressure and permeate water pressure of each reverse osmosis membrane device may be measured, and the replacement may be performed when the difference between these reaches a predetermined value, or the period during which the difference between the supply water pressure and permeate water pressure of the reverse osmosis membrane device reaches a predetermined value may be calculated in advance in consideration of the water recovery rate, and the replacement may be performed for each of the periods. Alternatively, the differential pressure at which irreversible deterioration of the membrane occurs may be obtained in a preliminary experiment, and the device may be switched before the differential pressure is reached.

[0033] Next, a pure water production apparatus for realizing the pure water production method of the first embodiment will be described with reference to FIG. 3. FIG. 3 is a block diagram showing a pure water production apparatus 1 of a third embodiment. The pure water production apparatus 1 of the third embodiment has two reverse osmosis membrane devices (reverse osmosis membrane device 11 and reverse osmosis membrane device 12) connected in series. The pure water production apparatus 1 further includes a supply pipe 13 connected to the supply side of the reverse osmosis membrane device 11 for supplying the water to be treated to the reverse osmosis membrane device 11, and an alkali adjustment mechanism 14 provided in the path of the supply pipe 13 for adjusting the water to be treated of the reverse osmosis membrane device 11 to be alkaline. The pure water production apparatus 1 further includes a supply pipe 15 connecting the permeation side of the reverse osmosis membrane device 11 to the supply side of the reverse osmosis membrane device 12 for supplying the permeated water of the reverse osmosis membrane device 11 to the supply side of the reverse osmosis membrane device 12, and an acid adjustment mechanism 16 provided in the path of the supply pipe 15 for adjusting the water to be treated of the reverse osmosis membrane device 12 to be acidic. A supply pipe 17 is connected to the permeation side of the reverse osmosis membrane device 12, and the pure water produced in the pure water production device 1 is sent to the subsequent stage via the supply pipe 17.

[0034] The reverse osmosis membrane devices 11 and 12 are each provided with one or more reverse osmosis membrane modules, each of which is configured by housing a reverse osmosis membrane and a flow path material for passing water to be treated through the reverse osmosis membrane in a casing. As the reverse osmosis membrane, for example, various organic polymer membranes or ceramic membranes made of cellulose acetate, aliphatic polyamides, aromatic polyamides, or composites thereof can be used. The shape of the reverse osmosis membrane is hollow fiber, spiral, flat, tubular, or the like. The reverse osmosis membrane of this embodiment is preferably spiral in order to increase the pressure resistance and improve the treatment efficiency. In addition, the reverse osmosis membrane devices 11 and 12 are ultra-low pressure, low pressure, medium pressure, or high pressure reverse osmosis membrane devices, and the two reverse osmosis membrane devices are of the same type. For example, when the reverse osmosis membrane device 11 is of an ultra-low pressure type, the reverse osmosis membrane device 12 is also of an ultra-low pressure type; when the reverse osmosis membrane device 11 is of a low pressure type, the reverse osmosis membrane device 12 is also of a low pressure type; when the reverse osmosis membrane device 11 is of a medium pressure type, the reverse osmosis membrane device 12 is also of a medium pressure type; and when the reverse osmosis membrane device 11 is of a high pressure type, the reverse osmosis membrane device 12 is also of a high pressure type.

[0035] The alkali adjustment mechanism 14 and the acid adjustment mechanism 16, 21 are each composed of, for example, a tank for storing an acid adjuster or an alkali adjuster, and a chemical injection pump for measuring a predetermined amount of the chemical in the tank and adding it to each supply pipe.

[0036] A supply pipe 18 is connected to a branch point B11 of the supply pipe 13 downstream of the alkali adjustment mechanism 14. Another branch point B14 is located downstream of the branch point B11. The opposite end of the supply pipe 18 to the connection with the branch B11 is connected to the supply pipe 15 at a branch point B12 located downstream of the acid adjustment mechanism 16 of the supply pipe 15. The water to be treated that has been adjusted to alkaline by the alkali adjustment mechanism 14 is supplied to the supply side of the reverse osmosis membrane device 12 via the supply pipe 18 through the branch point B11.

[0037] A supply pipe 19 is connected to a branch point B13 located on the path of the supply pipe 17. The end of the supply pipe 19 opposite to the connection with the branch point 13 is connected to the supply pipe 13 at a branch point B14. The permeated water of the reverse osmosis membrane device 12 flows through the supply pipe 19 from the supply pipe 17 via the branch point B13, and is supplied to the supply side of the reverse osmosis membrane device 11 from the branch point B14 via the path downstream of the supply pipe 13. An acid adjustment mechanism 21 that adjusts the permeated water of the reverse osmosis membrane device 12 to be acidic is provided on the path of the supply pipe 19. A supply pipe 20 is connected to the branch point B15 of the supply pipe 15 on the permeation side of the reverse osmosis membrane device 11, and the pure water produced by the pure water production device 1 is sent to the subsequent stage via the supply pipe 20.

[0038] In the pure water producing apparatus 1, a first treatment path is a flow path that is composed of the supply pipe 13, the reverse osmosis membrane device 11, the supply pipe 15, the reverse osmosis membrane device 12, and the supply pipe 17, and treats the water to be treated in the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 in this order. A second treatment path is a flow path that runs from the upstream side of the branch point B11 of the supply pipe 13, through the supply pipe 18, the downstream side of the branch point B12 of the supply pipe 15, the reverse osmosis membrane device 12, the upstream side of the branch point B13 of the supply pipe 17, the supply pipe 19, and further through the downstream side of the branch point B14 of the supply pipe 13, and treats the water to be treated in the reverse osmosis membrane device 12 and the reverse osmosis membrane device 11 in this order.

[0039] In the pure water manufacturing apparatus 1, valves V11-V16 are provided in the supply pipes 13, 15, 17, 19, and 20, respectively, to enable switching between the first and second treatment paths. These valves V11-V16 function as a switching mechanism. For example, the valve V11 is provided between branch points B11 and B14 in the supply pipe 13, and the valve V14 is provided downstream near the branch point B11 in the supply pipe 18. The valve V12 is provided upstream of the branch point B12 (toward the reverse osmosis membrane device 11) and downstream of the branch point 15 (toward the reverse osmosis membrane device 12), in the supply pipe 15, and the valve V16 is provided in the supply pipe 20. Valve V13 is disposed downstream of branch point B13 in the path of supply pipe 17, and valve V15 is disposed downstream of branch point B13 in the path of supply pipe 19 and upstream of acid adjustment mechanism 21 (reverse osmosis membrane device 12 side). Valves V11 to V16 are, for example, openable and closable open / close valves, and may be automatic open / close valves whose opening and closing are automatically controlled by receiving a control signal output from control device 22. In addition, two valves provided at the branch, for example valves V11 and V14, valves V12 and V16, and valves V13 and V15, may each be combined into one three-way valve having a similar switching function.

[0040] The pure water production system 1 is optionally equipped with a pump P1, a reverse osmosis membrane device 23, a tank TK, a pump P2, and a supply pipe 24 that connects these and sends raw water from the pump P1 through the reverse osmosis membrane device 23 and the tank TK to the supply pipe 13, at the upstream side of the supply pipe 13. The most downstream side of the supply pipe 24 is connected to the supply pipe 13 via the pump P2. The reverse osmosis membrane device 23 is preferably configured similarly to the reverse osmosis membrane devices 11 and 12. The reverse osmosis membrane device 23 is preferably an ultra-low pressure, low pressure, or high pressure reverse osmosis membrane device, and is preferably of the same type as the reverse osmosis membrane devices 11 and 12. The pumps P1 and P2 are, for example, water supply pumps with adjustable discharge pressure.

[0041] Furthermore, a water pressure gauge for measuring the water pressure of the water to be treated or the permeated water may be provided on the supply side and the permeation side of the reverse osmosis membrane devices 11, 12, and 23. Furthermore, in addition to or instead of the water pressure gauge, a flow meter for measuring the flow rate of the water to be treated or the permeated water may be provided.

[0042] Concentrated water discharge pipes 25 and 26 are connected to the concentrating sides of the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12, respectively. The concentrated water can be discharged to the outside of the pure water production system 1 via the discharge pipes 25 and 26, or returned to the front stage of the reverse osmosis membrane device 23 for reprocessing. A concentrated water discharge pipe 27 is connected to the concentrating side of the reverse osmosis membrane device 23, and the concentrated water from the reverse osmosis membrane device 23 is discharged to the outside of the pure water production system 1 via the discharge pipe 27.

[0043] The pure water production system 1 is equipped with a control device 22 that controls the opening and closing of the valves V11 to V16 according to a pre-input program. A method of switching between the first treatment period and the second treatment period using the control device 22 will be described below.

[0044] First, the control device 22 outputs a control signal to open the valves V11, V12, and V13 and close the valves V14, V15, and V16. This opens the first treatment path. Raw water is supplied to the reverse osmosis membrane device 23 by the pump P1 from a raw water tank (not shown). The raw water is, for example, city water, well water, industrial water, etc. The raw water may also be used recovered water that has been used at a place where ultrapure water is used, recovered, and then subjected to a chemical removal treatment or the like as necessary. For example, the raw water contains hardness components such as calcium and magnesium and dissolved carbon dioxide gas as ions that can form inorganic salts insoluble in water and generate scale components, in a total amount of 10 mg / L to 300 mg / L in terms of calcium carbonate. The raw water contains, for example, silica (Si) of about 1 mg / L to 50 mg / L, chlorine of about 0.1 mg / L to 0.6 mg / L converted to Cl, and boron of about 5 μg / L to 100 μg / L. The pH of the raw water is about 5 to 7.5.

[0045] The supply pressure of the raw water to the reverse osmosis membrane device 23 is, for example, 0.4 MPa to 8.0 MPa, and preferably 0.5 MPa to 3.0 MPa. The raw water is treated with a reverse osmosis membrane in the reverse osmosis membrane device 23, thereby removing hardness components in the raw water (step 101 in FIG. 1). An acid adjustment mechanism may be provided upstream of the reverse osmosis membrane device 23 in the supply pipe 24 to adjust the raw water to an acidic state, and then the raw water may be treated in the reverse osmosis membrane device 23. In this case, the pH of the raw water adjusted to an acidic state is preferably 5.0 or more and 6.0 or less, which can improve the removal rate of hardness components in the raw water.

[0046] The permeate from the reverse osmosis membrane device 23 is temporarily stored in a tank TK. The permeate stored in the tank TK is supplied as water to be treated to the reverse osmosis membrane device 11 via the supply pipe 13 of the first treatment path by the pump P2. While the water to be treated flows through the supply pipe 13, an alkalinity regulator is added to the water to be treated by the alkali adjustment mechanism 14, thereby adjusting the water to be treated to be alkaline. Examples of the alkalinity regulator include an aqueous potassium hydroxide solution and an aqueous sodium hydroxide solution, and the aqueous sodium hydroxide solution is generally used. In addition, the pH of the permeate adjusted to be alkaline is 9.0 to 11.0, more preferably 9.2 to 10.5, in order to improve the boron removal rate in the reverse osmosis membrane device 11.

[0047] The water to be treated is treated by the reverse osmosis membrane device 11, and boron, silica, carbonate ions, and anions are removed from the water to be treated (step 102 in FIG. 1). The conductivity of the permeate water from the reverse osmosis membrane device 11 from which boron has been removed is, for example, 1 μS / cm to 15 μS / cm, the boron concentration is, for example, 0.3 ppb (μg / L) to 10 ppb (μg / L), and the boron removal rate in the reverse osmosis membrane device 11 is 50% to 95%. The permeate water from the reverse osmosis membrane device 11 from which boron has been removed is then supplied as the water to be treated to the supply side of the reverse osmosis membrane device 12 via the supply pipe 15 of the first treatment path. During the process in which the water to be treated flows through the supply pipe 15, an acidity regulator is added to the water to be treated by the acidity regulator mechanism 16, thereby adjusting the water to be treated to be acidic. Examples of the acidity regulator include an aqueous hydrochloric acid solution and an aqueous sulfuric acid solution, and it is common to use an aqueous sulfuric acid solution. In order to improve the removal rate of ion components in the reverse osmosis membrane device 12, the pH of the permeate adjusted to be acidic is preferably 2.0 or more and 5.0 or less, and more preferably 3.0 or more and 4.5 or less.

[0048] The water to be treated is treated by the reverse osmosis membrane device 12, and ionic components in the water to be treated are removed (step 103 in FIG. 1). The ionic components removed by the reverse osmosis membrane device 12 are mainly anionic components such as chloride ions, sulfate ions, nitrate ions, fluoride ions, and ionized bicarbonate ions, cationic components such as sodium ions and potassium ions, and weak electrolytes such as silica. The permeated water from the reverse osmosis membrane device 12 from which the ionic components have been removed has a specific resistance (resistivity) of, for example, 0.5 MΩ·cm to 10 MΩ·cm, and a boron concentration of, for example, 0.1 ppb (μg / L) to 5 ppb (μg / L). The permeated water from the reverse osmosis membrane device 12 is sent to the subsequent stage via a supply pipe 17. The concentrated water from the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 is discharged outside the pure water production system 1, or returned to the upstream side of the reverse osmosis membrane device 23 for retreatment.

[0049] As described above, the water to be treated in the tank TK is treated by passing it through the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 in this order via the first treatment path. The predetermined period during which this treatment is carried out is the first treatment period. After the first treatment period, the control device 22 outputs a control signal to close valves V11, V12, and V13, and open valves V14, V15, and V16. This opens the second treatment path, and the second treatment period begins.

[0050] In the second treatment period, the water to be treated stored in the tank TK is supplied by the pump P2 from the branch point B11 of the supply pipe 13 of the second treatment path through the supply pipe 18 to the reverse osmosis membrane device 12. As the water to be treated flows through the supply pipe 13, an alkali adjuster is added to the water to be treated by the alkali adjustment mechanism 14, thereby adjusting the water to be treated to be alkaline. The type of alkali adjuster and the preferred pH of the water to be treated are the same as those in the first treatment period.

[0051] The water to be treated is treated by the reverse osmosis membrane device 12 (step 202 in FIG. 1), and boron, silica, carbonate ions, and anions are removed from the water to be treated in the same manner as in the first treatment period. The quality of the permeate water from the reverse osmosis membrane device 11 from which boron has been removed is the same as in the first treatment period.

[0052] The permeate from the reverse osmosis membrane device 12 then flows through the second treatment path from branch point B13 of the supply pipe 17 to the supply pipe 19 and the downstream side of branch point B14 of the supply pipe 13, and is supplied as the water to be treated to the supply side of the reverse osmosis membrane device 11. As the water to be treated flows through the supply pipe 19, an acid regulator is added to the water to be treated by the acid adjustment mechanism 16, thereby adjusting the water to be treated to be acidic. The type of acid regulator and the preferred pH of the water to be treated are the same as those in the first treatment period.

[0053] The water to be treated is treated by the reverse osmosis membrane device 11, and ionic components in the water to be treated are removed in the same manner as in the first treatment period (step 203 in FIG. 1). The quality of the permeate from the reverse osmosis membrane device 11 from which the ionic components have been removed is also the same as in the first treatment period. The permeate from the reverse osmosis membrane device 11 is sent to the subsequent stage via the supply pipe 15, branch point B15, and supply pipe 20 in this order. The concentrated water from the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 is discharged outside the system of the pure water production system 1 or returned to the upstream side of the reverse osmosis membrane device 23 for retreatment.

[0054] As described above, in the second treatment period, the water to be treated in the tank TK is passed through the second treatment path and treated in the reverse osmosis membrane device 12 and the reverse osmosis membrane device 11 in that order. After the second treatment period, the control device 22 outputs a control signal to open the valves V11, V12, and V13 and close the valves V14, V15, and V16. This opens the first treatment path and restarts the first treatment period. By repeating these steps, the first treatment period and the second treatment period are alternately repeated.

[0055] In the pure water manufacturing apparatus 1 of this embodiment, in the first treatment period, hardness components are removed by the reverse osmosis membrane device 11, but depending on the water quality and the operation period, hardness components may leak into the permeate of the reverse osmosis membrane device, and scale clogging of the reverse osmosis membrane device 11 may progress. In addition, in the second reverse osmosis membrane device that treats the acidic water to be treated, scale clogging due to silica is likely to progress. Therefore, before the scale clogging of the reverse osmosis membrane devices 11 and 12 deteriorates the water recovery rate, the order of the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 is switched and the second treatment period is performed. In the second treatment period, the reverse osmosis membrane device 11 treats the water to be treated that has been adjusted to be acidic, and in the process, the hardness components are dissolved by the acid, and the scale clogging is improved. In addition, in the second reverse osmosis membrane device 12 in which scale clogging due to silica has progressed, silica scale is dissolved by the alkali by treating the water to be treated that has been adjusted to be alkaline, and the scale clogging is improved. In the second treatment period, the scale clogging of the reverse osmosis membrane device 12 arranged at the front stage may progress as described above, but by switching the flow order of the water to be treated through the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 again and performing the first treatment period before a drop in the water recovery rate occurs due to this, the scale clogging of the reverse osmosis membrane devices 11 and 12 is improved as in the second treatment period. This makes it possible to suppress the progression of scale clogging in the reverse osmosis membrane devices 11 and 12 over a long period of time, and therefore makes it possible to stably and efficiently produce pure water for a long period of time. Furthermore, the acid and alkali conditions used in the pure water production device 1 are milder than those of chemicals used for general scale cleaning, so that the deterioration of the reverse osmosis membrane can also be suppressed, and as a result, high-quality pure water can be stably produced for a long period of time.

[0056] The timing of switching between the first and second treatment periods can be determined as follows. The first switching method is a method in which the treated water flow rate at the most downstream is measured and is performed when the treated water flow rate has decreased to a predetermined rate from the initial rate. Specifically, the switching can be performed as follows. A flow meter is connected to the most downstream side of the piping, a calculation means is provided in the control device 22, and the flow meter inputs the measured value to the calculation means. The flow meter is installed, for example, near the ends of the supply pipes 17 and 20, near the connection between the supply pipe 17 and the supply side of the second reverse osmosis membrane device 12, and near the connection between the supply pipe 20 and the permeation side of the first reverse osmosis membrane device. The calculation means calculates the rate of decrease in the flow rate from the initial time of water flow, and when the calculated rate of decrease in the flow rate exceeds a predetermined threshold, the control device 22 outputs a control signal to control the switching mechanism to open and close the valve. In the second switching method, the threshold value of the flow rate reduction ratio at the time of switching is set to a predetermined value in the range of 0.05 to 0.5, i.e., the flow rate is in the range of 50% to 95% of the initial flow rate of 100%, so that the reverse osmosis membrane treatment can be continued for a long period of time without performing scale cleaning of the reverse osmosis membrane devices 11 and 12. The threshold value of the flow rate reduction ratio at the time of switching is preferably set to a range of 0.05 to 0.2, i.e., the flow rate is in the range of 80% to 95% of the initial flow rate of 100%, so that the membrane deterioration can be suppressed and the reverse osmosis membrane treatment can be continued with stable water quality. The period during which the most downstream treated water flow rate decreases from the initial rate to a predetermined rate may be calculated in advance, taking into account the water recovery rate, and the reverse osmosis membrane treatment may be performed for each period.

[0057] In the second switching method, water pressure gauges are provided on the supply side and the permeation side of the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12, respectively, and the control device switches between the first and second processing paths when the differential pressure between the supply water of the reverse osmosis membrane device 11 and the permeation water of the reverse osmosis membrane device 12 reaches a predetermined value in the first processing period, and when the differential pressure between the supply water of the reverse osmosis membrane device 12 and the permeation water of the reverse osmosis membrane device 11 reaches a predetermined value in the second processing period. This method can also be performed as follows, similar to the above-mentioned first switching method. A calculation means is provided in the control device 22, and each water pressure gauge inputs its measured value to the calculation means, which calculates the differential pressure. When the calculated differential pressure exceeds a predetermined threshold, the control device 22 outputs a control signal to control the switching mechanism, and the valve is opened or closed. The threshold value of the differential pressure at the time of switching in the second switching method is, for example, The predetermined value is preferably in the range of 105% to 200% of the initial water flow differential pressure, and more preferably in the range of 105% to 125%. This allows reverse osmosis membrane treatment to be continued for a long period of time without performing scale cleaning of the reverse osmosis membrane devices 11, 12. The water flow differential pressure is the difference between the permeate water pressure minus the average of the supply water pressure and the concentrated water pressure.

[0058] The third switching method is a method in which the durations of the first and second treatment periods are determined in advance in consideration of the raw water quality, the amount of alkali regulator added by the alkali adjustment mechanism 14, the amount of acid regulator added by the acid adjustment mechanisms 16 and 21, the specifications of the reverse osmosis membrane devices 11 and 12, and the water recovery rate, and the control device 22 controls the switching mechanism according to the durations. In this case, the method is carried out as follows. The control device 22 is provided with a timer means for measuring time and outputting a switching signal at a preset time. When the timer means outputs a switching signal at a preset time, the switching signal is input to the control gain 22. In response to the input of the switching signal, the control device 22 outputs a control signal to control the switching mechanism (valves V11 to V16). The durations of the first and second treatment periods may be determined based on a progress rate of scale clogging determined by a preliminary experiment.

[0059] Next, a pure water manufacturing apparatus 2 which is a first modified example of the pure water manufacturing apparatus 1 of the third embodiment will be described with reference to Fig. 4. Fig. 4 is a block diagram showing a schematic representation of the pure water manufacturing apparatus 2 of this modified example. The pure water manufacturing apparatus 2 differs from the pure water manufacturing apparatus 1 in that it further has a reverse osmosis membrane device 28 between two reverse osmosis membrane devices (reverse osmosis membrane device 11 and reverse osmosis membrane device 12) connected in series. In Fig. 4, components having the same functions as those in Fig. 3 are given the same reference numerals, and detailed descriptions thereof will be omitted. Also, Fig. 4 omits some optional components.

[0060] The reverse osmosis membrane device 28 is interposed in the supply pipe 15, for example, on the upstream side (the reverse osmosis membrane device 11 side) of the branch point B15. A concentrated water drain pipe 29 is provided on the concentrated side of the reverse osmosis membrane device 28, and the concentrated water is discharged to the outside of the pure water production system 2 through the discharge pipe 29 or returned to the front stage of the reverse osmosis membrane device 23 for retreatment. The reverse osmosis membrane device 28 is an ultra-low pressure type, low pressure type, or high pressure type reverse osmosis membrane device, and may be the same type as the reverse osmosis membrane devices 11, 12, and 23, or may be a different type. In addition, a water pressure gauge for measuring the water pressure of the water to be treated or the permeated water may be provided on the supply side and the permeated side of the reverse osmosis membrane device 28. In addition, a flow meter for measuring the flow rate of the water to be treated or the permeated water may be provided in addition to or instead of the water pressure gauge.

[0061] In the pure water producing apparatus 2, in a first treatment period, the water to be treated is passed through a first treatment path, that is, the supply pipe 13, the reverse osmosis membrane device 11, the reverse osmosis membrane device 28, the supply pipe 15, and the reverse osmosis membrane device 12 in this order, and treated. In the first treatment period, the conductivity of the permeated water through the reverse osmosis membrane device 28 is, for example, 1 μS / cm to 15 μS / cm, and the boron concentration is, for example, 0.1 ppb (μg / L) to 5 ppb (μg / L), and the resistivity of the permeated water through the reverse osmosis membrane device 12 is, for example, 0.5 MΩ to 10 MΩ, and the boron concentration is, for example, 0.1 ppb (μg / L) to 3 ppb (μg / L). In this way, by providing the reverse osmosis membrane device 28, the removal rate of boron and silica in the produced pure water can be improved, and the removal rate of boron in the pure water producing apparatus 2 can achieve 60% to 98%.

[0062] In the pure water producing apparatus 2, during the second treatment period, the water to be treated is passed through the second treatment path, that is, the upstream side of branch point B11 of supply pipe 13, branch point B11, supply pipe 18, branch point B12, reverse osmosis membrane device 12, the upstream side of branch point B13 of supply pipe 17, supply pipe 19, the downstream side of branch point B14 of supply pipe 13, reverse osmosis membrane device 11, supply pipe 15, reverse osmosis membrane device 28, and supply pipe 20, in that order, and treated. The quality of the permeate through the reverse osmosis membrane device 11 during the second treatment period is the same as that during the first treatment period.

[0063] In the pure water manufacturing apparatus 2, as in the above-mentioned pure water manufacturing apparatus 1, by repeatedly switching between the first treatment period and the second treatment period, it is possible to continue producing pure water stably for a long period of time without performing scale cleaning of the reverse osmosis membrane devices 11 and 12.

[0064] As a second modified example of the pure water producing apparatus 1, the order of water flow through the reverse osmosis membrane device 23 and the reverse osmosis membrane device 11 may be reversed. In this modified example, a first treatment period in which the reverse osmosis membrane device 23 is used in the front stage and the reverse osmosis membrane device 11 is used in the rear stage and a second treatment period in which the reverse osmosis membrane device 11 is used in the front stage and the reverse osmosis membrane device 23 is used in the rear stage can be repeated. In this modified example, a switching mechanism is provided by installing piping and valves in the same manner as in the pure water producing apparatus 1 of the above-mentioned embodiment, and a first treatment path is configured in which raw water is passed through the reverse osmosis membrane device 23, the alkali adjustment mechanism 14, and the reverse osmosis membrane device 11 in this order, and a second treatment path is configured in which raw water is passed through the reverse osmosis membrane device 11, the alkali adjustment mechanism 14, and the reverse osmosis membrane device 23 in this order. Thereby, the control device 22 controls the switching mechanism to switch between the first and second treatment paths every time a predetermined treatment period elapses, and the first treatment period using the first treatment path and the second treatment period using the second treatment path can be alternately repeated. In this modification, the reverse osmosis membrane device 23 is an ultra-low pressure type, low pressure type, or high pressure type reverse osmosis membrane device, and is the same type as the reverse osmosis membrane device 11. An acidity adjusting mechanism may be provided immediately after the pump P1 in the supply pipe 24 path to adjust the water to be treated to be acidic and supplied to the first stage reverse osmosis membrane device. This can improve the removal rate of hardness components in the first stage reverse osmosis membrane device. The acidity adjusting agent in this case is the same as that described above, but the pH of the water to be treated is preferably adjusted to 5.0 to 6.0.

[0065] In this modified example, in the first treatment period, the hardness components are removed by the reverse osmosis membrane device 23, but depending on the water quality and the operation period, the hardness components may leak into the permeate of the reverse osmosis membrane device 23, and scale clogging of the reverse osmosis membrane device 11 at the rear stage may progress. In addition, in the reverse osmosis membrane device 23 that treats the weakly acidic water to be treated, scale clogging due to silica is likely to progress. Therefore, before the scale clogging of the reverse osmosis membrane device 11 and the reverse osmosis membrane device 23 deteriorates the water recovery rate, the order of water flow through the reverse osmosis membrane device 11 and the reverse osmosis membrane device 23 is switched and the second treatment period is performed. In the second treatment period, the reverse osmosis membrane device 11 treats the water to be treated that has been adjusted to be weakly acidic, and in the process, the hardness scale is dissolved by the acid, and the scale clogging is improved. In addition, in the reverse osmosis membrane device 23 in which scale clogging due to silica has progressed, the silica scale is dissolved by the alkali by treating the water to be treated that has been adjusted to be alkaline, and the scale clogging is improved. During the second treatment period, silica scale clogging of the reverse osmosis membrane device 23 that treats alkaline water to be treated and hardness scale clogging of the reverse osmosis membrane device 11 that treats weakly acidic water to be treated may progress, but by replacing the reverse osmosis membrane device 11 with the reverse osmosis membrane device 23 again and performing the first treatment period before a decrease in the water recovery rate occurs due to this, the scale clogging of the reverse osmosis membrane devices 11 and 23 is improved as in the second treatment period. This makes it possible to suppress the progression of scale clogging in the reverse osmosis membrane devices 23 and 11 for a long period of time, so that pure water can be produced stably and efficiently for a long period of time. Furthermore, the acid and alkali conditions used in this modification are milder than those of chemicals used in general scale cleaning, so that the deterioration of the reverse osmosis membrane can also be suppressed, and as a result, high-quality pure water can be produced stably for a long period of time.

[0066] Next, a pure water manufacturing system 3 according to a fourth embodiment will be described with reference to FIG. 5. FIG. 5 is a block diagram that shows a schematic diagram of the pure water manufacturing system 3 according to the fourth embodiment. The pure water manufacturing system 3 shown in FIG. 5 differs from the pure water manufacturing system 1 in that the acid adjustment mechanism is concentrated in one place, and as a result, the manner of installation of the piping (supply pipes) and valves is also different. Therefore, the piping method of the pure water manufacturing system 3 will be mainly described below. In FIG. 5, the components having the same functions as those in FIG. 3 are given the same reference numerals and detailed description will be omitted, and some descriptions of the same methods and effects as those of the pure water manufacturing system 1 shown in FIG. 3 will also be omitted.

[0067] The pure water production system 3 of the fourth embodiment has two reverse osmosis membrane devices (reverse osmosis membrane device 11 and reverse osmosis membrane device 12) connected in series, similar to the pure water production system 1 of the third embodiment. The pure water production system 1 further includes a supply pipe 13 connected to the supply side of the reverse osmosis membrane device 11 for supplying the water to be treated to the reverse osmosis membrane device 11, and an alkali adjustment mechanism 14 provided in the path of the supply pipe 13 for adjusting the water to be treated in the reverse osmosis membrane device 11 to be alkaline. A pump P2 is disposed at the end of the supply pipe 13 opposite to the connection point with the reverse osmosis membrane device 11, and the water to be treated is sent from the tank TK to the reverse osmosis membrane device 11 by the pump P2. The supply pipe 13 has two branch points in its path, that is, branch points B1 and B7 in this order from the upstream side. Furthermore, a valve V31 is interposed between the branch point B1 and the branch point B7 in the path of the supply pipe 13.

[0068] The pure water production system 3 further includes a supply pipe 35 connected to the permeation side of the reverse osmosis membrane device 11 to send the water to be treated to a subsequent stage. Branch points B2, B3, B6, and B4 are located in the path of the supply pipe 35, in that order from the upstream side (the permeation side of the reverse osmosis membrane device 11). An acid adjustment mechanism 16 that adjusts the water to be treated from the reverse osmosis membrane device 12 to be acidic is provided between branch points B3 and B6 of the path of the supply pipe 35. A valve V32 is provided between branch points B2 and B3 of the supply pipe 35, and a valve V33 is provided between branch points B6 and B4.

[0069] A supply pipe 36 is connected to the branch point B4 of the supply pipe 35. The end of the supply pipe 36 opposite to the branch point B4 is connected to the supply side of the reverse osmosis membrane device 12. As a result, the water to be treated that has been adjusted to be acidic by the acid adjustment mechanism 16 is supplied from the supply side of the reverse osmosis membrane device 12 via the supply pipe 36.

[0070] A supply pipe 18 is connected to a branch point B1 between the alkali adjustment mechanism 14 and the valve V31 of the supply pipe 13. The water to be treated, which has been adjusted to be alkaline by the alkali adjustment mechanism 14, is sent to the supply pipe 18 via the branch point B1. The supply pipe 18 is connected to a supply pipe 36 at a branch point B4, and the water to be treated is supplied to the supply side of the reverse osmosis membrane device 12 via the supply pipe 13, the branch point B1, the supply pipe 18, the branch point B4, and the supply pipe 36 in this order. The pure water production apparatus 3 further includes a supply pipe 37 connected between the branch point B5 of the supply pipe 17 and the branch point B3 of the supply pipe 35. A valve V36 is provided in the supply pipe 37. The pure water production apparatus 3 includes a supply pipe 39 connected between the branch point B6 of the supply pipe 35 and the supply pipe 13. A valve V37 is provided in the supply pipe 39. The supply pipe 17 is connected to the supply pipe 37 at a branch point B5, and the pure water produced in the pure water production apparatus 1 is sent to a downstream stage via the supply pipe 17. A valve V34 is provided in the path of the supply pipe 17.

[0071] The permeated water of the reverse osmosis membrane device 12 is adjusted to be acidic by the acidity adjusting mechanism 16 provided in the path of the supply pipe 35 while passing through the supply pipe 17, the branch point B5, the supply pipe 37, the branch point B3, and the supply pipe 35 in this order. The water to be treated that has been adjusted to be acidic is then passed through the branch point B6, the supply pipe 39, and the branch point B7, and is then passed through the supply pipe 13, and is then supplied to the supply side of the first reverse osmosis membrane device 11. The branch pipe 35 connected to the permeation side of the reverse osmosis membrane device 11 is connected to the supply pipe 20 at the branch point B2, and the pure water produced by the pure water production device 1 is sent to the subsequent stage via the supply pipe 20. A valve V38 is provided in the path of the supply pipe 20.

[0072] The preferred aspects of the valves V31 to V38 and the pumps P1 and P2 are the same as those of the pure water producing system 1 of the third embodiment.

[0073] In the pure water production system 3, the first treatment path is a flow path that is composed of the supply pipe 13, the reverse osmosis membrane device 11, the supply pipe 35, the supply pipe 36, the reverse osmosis membrane device 12, and the supply pipe 17, and that treats the water to be treated in the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 in this order. In Fig. 6, the first treatment path is shown by a solid line, and paths through which the water to be treated does not flow are shown by dashed lines. The second treatment path is made up of the path from the upstream side of the branch point B1 of the supply pipe 13, the path from the supply pipe 18 to the branch point B4, the supply pipe 36, the reverse osmosis membrane device 12, the path from the permeation side of the reverse osmosis membrane device 12 to the branch point B5 of the supply pipe 17, the supply pipe 37, the path from the branch point B3 to the branch point B6 of the supply pipe 35, the supply pipe 39, the flow path downstream of the branch point B7 of the supply pipe 13, the reverse osmosis membrane device 11, the path from the permeation side of the reverse osmosis membrane device 11 to the branch point B2 of the supply pipe 35, and the supply pipe 20, and the flow path in which the water to be treated is treated in the reverse osmosis membrane device 12 and the reverse osmosis membrane device 11 in this order. In Fig. 7, the second treatment path is shown by a solid line, and the path through which the water to be treated does not flow is shown by a dashed line.

[0074] In the pure water producing apparatus 3, the water to be treated stored in the tank TK is passed through a first treatment path in a first treatment period, and is passed through a second treatment path in a second treatment period.

[0075] The pure water production system 3 is equipped with a control device 22 that controls the opening and closing of the valves V31 to V38 according to a pre-input program. A method of switching between the first treatment period and the second treatment period using the control device 22 will be described below.

[0076] First, the control device 22 outputs a control signal to open the valves V31, V32, V33, and V34, and close the valves V35, V36, V37, and V38. This opens the first processing path, and the pump P2 operates to start the first processing period. After the first processing period is performed for a predetermined period, the control device 22 outputs a control signal to close the valves V31, V32, V33, and V34, and open the valves V35, V36, V37, and V38. This opens the second processing path, and the second processing period starts. After the second processing period, the control device 22 outputs a control signal to open the valves V31, V32, V33, and V34, and close V35, V36, V37, and V38. This opens the first processing path, and the first processing period resumes. By repeating these steps, the first processing period and the second processing period are alternately repeated.

[0077] In the pure water production system 3 of this embodiment, in the first treatment period, hardness components are removed by the reverse osmosis membrane device 23, but depending on the water quality and the operation period, hardness components may leak into the permeate of the reverse osmosis membrane device 23, and scale clogging of the reverse osmosis membrane device 11 may progress. In addition, in the reverse osmosis membrane device 12 that treats acidic water to be treated, scale clogging due to silica is likely to progress. Therefore, before the scale clogging of the reverse osmosis membrane devices 11 and 12 deteriorates the water recovery rate, the order of the reverse osmosis membrane device 11 and the reverse osmosis membrane device 12 is switched and the second treatment period is performed. In the second treatment period, the reverse osmosis membrane device 11 treats water to be treated that has been adjusted to be acidic, and in the process, the hardness scale is dissolved by the acid, and the scale clogging is improved. In addition, the reverse osmosis membrane device 12 in which scale clogging due to silica has progressed treats water to be treated that has been adjusted to be alkaline, and the silica scale is dissolved by the alkali, and the scale clogging is improved. In the second treatment period, the scale clogging of the reverse osmosis membrane devices 11 and 12 may progress in the same manner as described above, but before the water recovery rate decreases due to this, the order of flow of the water to be treated through the reverse osmosis membrane devices 11 and 12 is switched again, and the first treatment period is performed, so that the scale clogging of the reverse osmosis membrane devices 11 and 12 is improved as in the second treatment period. This makes it possible to suppress the progression of scale clogging in the reverse osmosis membrane devices 11 and 12 over a long period of time, and therefore makes it possible to stably and efficiently produce pure water for a long period of time. Furthermore, the acid and alkali conditions used in the pure water production device 3 are milder than those of chemicals used for general scale cleaning, so that the deterioration of the reverse osmosis membrane can also be suppressed, and as a result, high-quality pure water can be stably produced for a long period of time.

[0078] Among the valves V31 to V38, a pair of valves provided at each branch, for example, valves V31 and V35, valves V32 and V38, valves V33 and V37, and valves V34 and V36, may be combined into one three-way valve to have a similar flow path switching function.Furthermore, the valves V31, V33, V35, and V37 may be combined into one four-way valve, and V32, V34, V36, and V38 may be combined into another four-way valve to have a similar flow path switching function.

[0079] 8 and 9 show a schematic diagram of a piping configuration of a pure water production system 4 using two four-way valves, valves V41 and V42. The pure water production system 4 includes valves V41 and V42, which are four-way valves, a supply pipe 13, a supply pipe 131 connected to the supply side of the reverse osmosis membrane device 11, a supply pipe 141 connected to the permeation side of the reverse osmosis membrane device 11, a supply pipe 132 connected to the supply side of the reverse osmosis membrane device 12, a supply pipe 142 connected to the permeation side of the reverse osmosis membrane device 12, a pipe 143 connecting the valve V41 and the valve V42, and a supply pipe 150 for sending treated water (permeated water) to a subsequent stage. In the pure water production system 4, the supply pipe 131, the supply pipe 132, and the pipe 143 are connected to the supply pipe 13 via the valve V41. The opposite side of the pipe 143 to the side connected to the valve V41 is connected to the valve V42. Furthermore, a supply pipe 141, a supply pipe 142, and a pipe 143 are connected to the supply pipe 150 via a valve V42.

[0080] Fig. 8 is a diagram showing a schematic diagram of a processing path in a first processing period when a four-way valve is used. As shown in Fig. 8, in the first processing period, the flow path of valve V41 is switched to connect supply pipe 13 to supply pipe 131 and to connect pipe 143 to supply pipe 132. The flow path of valve V42 is switched to connect supply pipe 141 to pipe 143 and to connect supply pipe 142 to supply pipe 150. Note that the four-way valve in Fig. 8 may be changed to a plurality of two-way valves.

[0081] Fig. 9 is a diagram showing a schematic diagram of a processing path during a second processing period when a four-way valve is used. During the second processing period, as shown in Fig. 9, the flow path of valve V41 is switched to connect supply pipe 13 to supply pipe 132 and to connect pipe 143 to supply pipe 131. The flow path of valve V42 is switched to connect supply pipe 141 to supply pipe 150 and to connect supply pipe 142 to pipe 143. Note that the four-way valve in Fig. 9 may be changed to a plurality of two-way valves.

[0082] Next, a first modified example of the pure water production system 3 shown in Fig. 5 will be described with reference to Fig. 10. Fig. 10 is a block diagram that shows a schematic representation of the pure water production system 5 of the first modified example. The pure water production system 5 differs from the pure water production system 3 shown in Fig. 5 in that a reverse osmosis membrane device 40 is interposed downstream of the branch point B3 of the route of the supply pipe 35 and upstream of the acid adjustment mechanism 16, and the reverse osmosis membrane device 40 performs a third-stage reverse osmosis membrane treatment. The rest is the same as the pure water production system 3. Therefore, the same reference numerals are used for components that have the same effects, and detailed descriptions thereof will be omitted.

[0083] In the pure water producing apparatus 5, in a first treatment period, the permeated water from the reverse osmosis membrane device 11 is supplied to the supply side of the fourth reverse osmosis membrane device 40 via the supply pipe 35. The alkaline water to be treated is treated in the reverse osmosis membrane device 40 to further remove boron and silica, and then the permeated water from the reverse osmosis membrane device 40 is adjusted to be acidic by the acid adjustment mechanism 16 and is passed through the supply pipe 36 via branch points B6 and B4. The acidic water to be treated that has been passed through the supply pipe 36 is treated in the reverse osmosis membrane device 12.

[0084] In the pure water producing apparatus 5, in the second treatment period, the permeated water from the reverse osmosis membrane device 12 is sent to the branch point B3 via the supply pipe 37, and is supplied from the branch point B3 to the supply side of the fourth reverse osmosis membrane device 40 via the supply pipe 35. The alkaline water to be treated is treated in the reverse osmosis membrane device 40, so that boron and silica are further removed. Thereafter, the permeated water from the reverse osmosis membrane device 40 is adjusted to be acidic by the acid adjustment mechanism 16, and is passed through the supply pipe 39 via the branch point B6. The acidic water to be treated that has been passed through the supply pipe 39 is supplied from the supply side of the reverse osmosis membrane device 11 via the supply pipe 13 via the branch point B7, and is treated.

[0085] By using this pure water production apparatus 5, pure water with an even lower boron concentration, for example, 0.1 ppb (μg / L) or less, can be obtained.

[0086] FIG. 11 is a schematic diagram of the pure water production system 6 in the case where a four-way valve is used as the valve of the pure water production system 5 shown in FIG. 10. In the pure water production system 6 shown in FIG. 11, the reverse osmosis membrane device 40 is interposed in the path of the pipe 143 so that the upstream side of the pipe 143 (the valve V42 side) is the supply side and the downstream side of the pipe 143 (the valve V41 side) is the permeation side. In addition, the reverse osmosis membrane device 40 is disposed upstream of the acid adjustment mechanism 16. This makes it possible to configure a first treatment path in which the water to be treated is passed through the reverse osmosis membrane device 11, the reverse osmosis membrane device 40, and the reverse osmosis membrane device 12 in this order, and a second treatment path in which the water to be treated is passed through the reverse osmosis membrane device 12, the reverse osmosis membrane device 40, and the reverse osmosis membrane device 11 in this order. In addition, by switching the flow paths of the valves V41 and V42 in the pure water production system 6 in the same manner as in the pure water production system 4, the first treatment period and the second treatment period can be alternately repeated. In addition, in FIG. 11, the four-way valve may be changed to a two-way valve.

[0087] Next, a second modified example of the pure water production apparatus 3 will be described. In this modified example, the order of water flowing through the reverse osmosis membrane device 23 and the reverse osmosis membrane device 11 is switched to perform a first treatment period and a second treatment period, similar to the first modified example of the pure water production apparatus 1. In this modified example, the pure water production apparatus of the above-mentioned embodiment is provided with a switching mechanism capable of switching the order of water flowing through the reverse osmosis membrane device 23 and the reverse osmosis membrane device 11 by using piping and valves, similar to the first modified example of the pure water production apparatus 1, and is provided with a first treatment path in which raw water is passed through the reverse osmosis membrane device 23, the alkali adjustment mechanism 14, and the reverse osmosis membrane device 11 in this order, and a second treatment path in which raw water is passed through the reverse osmosis membrane device 11, the alkali adjustment mechanism 14, and the reverse osmosis membrane device 23 in this order. This allows the control device 22 to control the switching mechanism to switch between the first and second processing paths every time a predetermined processing period elapses, and alternate between a first processing period using the first processing path and a second processing period using the second processing path. In this case, instead of providing piping for switching the flow paths, this can also be achieved by removing two reverse osmosis membranes or reverse osmosis membrane modules and exchanging their positions.

[0088] In this modification, an acidity adjusting mechanism may be provided immediately after the pump P1 in the path of the supply pipe 24 to adjust the water to be treated to be acidic and to supply the water to the first-stage reverse osmosis membrane device. This can improve the removal rate of hardness components in the first-stage reverse osmosis membrane device. In this case, the acidity adjusting agent is the same as that described above, but it is preferable that the pH of the water to be treated is adjusted to 5.0 to 6.0. In the pure water production system of this modification, as in the first modification of the pure water production system 1, the scale blockage can be improved by replacing the reverse osmosis membrane device 23 and the reverse osmosis membrane device 11, so that the progress of scale blockage in the reverse osmosis membrane devices 23 and 11 can be suppressed for a long period of time, and as a result, pure water can be produced stably and efficiently for a long period of time.

[0089] Next, an ultrapure water producing system 7 according to an embodiment using the above-mentioned pure water producing apparatus 1 will be described with reference to Fig. 12. Fig. 12 is a block diagram showing a schematic configuration of the ultrapure water producing system 7.

[0090] 12, the ultrapure water production system 7 includes, in this order, a pretreatment system 70, a primary pure water system 71, and a secondary pure water system (subsystem) 72. The secondary pure water system 72 is connected to a point of use (POU) 73 by piping, so that the ultrapure water produced by the ultrapure water production system 7 is supplied to the POU 73.

[0091] The pretreatment system 70 performs processes such as coagulation, filtration, and membrane separation, and adjusts the temperature using a heat exchanger or the like as necessary to remove turbid matters such as suspended matter and colloidal matter contained in the water to be treated (raw water). Specifically, for example, the pretreatment system 70 includes an appropriate combination of a coagulation sedimentation device, a pressure flotation device, a sand filter, a precision filter, an ultrafilter, a heat exchanger, and the like. Note that if the quality of the raw water is sufficient to supply to the primary pure water system 71, the pretreatment system 70 may be omitted.

[0092] The ultrapure water production system 7 includes a tank TK1 downstream of the pretreatment system 70, and the water to be treated that has been pretreated by the pretreatment system 70 is introduced into the tank TK1 and temporarily stored therein. The water to be treated in the tank TK1 is supplied to the primary pure water system 71 by a pump P3.

[0093] The primary pure water system 71 produces primary pure water by removing organic matter, ion components and dissolved gas from pretreated water. The primary pure water system 71 includes, in this order, a pump P3, an activated carbon device (AC) 711, a degassing device 712, the pure water production system 1 of the above embodiment, an ultraviolet oxidation device (TOC-UV) 713 and an electrodeionization device (EDI) 714. The pure water production system 1 used in the primary pure water system 71 is preferably configured to include three reverse osmosis membrane devices, 23, 11 and 12, as a water treatment device. The primary pure water system 71 may include the pure water production systems 2 to 6 of the above embodiment or their modified examples instead of the pure water production system 1.

[0094] In the primary pure water system 71, first, the activated carbon device (AC) 711 removes impurities that cause membrane deterioration, such as hydrogen peroxide and chlorine, that are mixed into the pretreated water.

[0095] Next, the degassing device 712 removes carbon dioxide from the water to be treated. The degassing device 712 is a vacuum degassing tower that removes dissolved gas from water under vacuum, or a membrane degassing device that removes dissolved gas through a degassing membrane. Thereafter, the pure water producing system 1 removes ionic components and boron from the treated water in the degassing device 712.

[0096] The ultraviolet oxidation device 713 has an ultraviolet lamp capable of irradiating ultraviolet rays having a wavelength of, for example, about 185 nm, and irradiates the water to be treated with ultraviolet rays from the ultraviolet lamp to oxidize and decompose the total organic carbon (TOC) in the water to be treated. The ultraviolet lamp used in the ultraviolet oxidation device 713 may be a lamp that generates ultraviolet rays having a wavelength of about 185 nm, or a low-pressure mercury lamp that emits ultraviolet rays having a wavelength of about 254 nm together with ultraviolet rays having a wavelength of about 185 nm. The ultraviolet rays emitted by the ultraviolet oxidation device 713 decompose water to generate OH radicals, and the organic matter in the water to be treated is oxidized and decomposed into organic acids by the OH radicals. The amount of ultraviolet irradiation in the ultraviolet oxidation device 713 of the primary pure water system can be appropriately changed depending on the water quality of the water to be treated.

[0097] The electrodeionization device (EDI) 714 has, for example, anion exchange membranes and cation exchange membranes alternately arranged between an anode and a cathode, and has alternate deionization compartments separated by the anion exchange membranes and cation exchange membranes, and concentration compartments into which concentrated water containing the removed ion components flows in. The electrodeionization device has a mixture of anion exchange resin and cation exchange resin filled in the deionization compartment, and electrodes for applying a DC voltage.

[0098] In the electrodeionization apparatus 714, for example, the water to be treated is supplied to the deionization compartment and the concentration compartment in parallel, and the mixture of anion exchange resin and cation exchange resin in the deionization compartment adsorbs the ionic components in the water to be treated. The adsorbed ionic components are transferred to the concentration compartment by the action of a direct current, and the concentrated water in the concentration compartment is discharged outside the system.

[0099] The electrodeionization apparatus 714 can continuously remove ionic components without using any chemicals such as acids or alkalis to regenerate the ion exchange resin, which improves safety in ultrapure water production, reduces production costs, and makes the equipment more compact, leading to improved production efficiency.

[0100] Furthermore, the ultrapure water producing system 7 of this embodiment uses the pure water producing apparatus 1 of the above embodiment, which includes two or more reverse osmosis membrane devices connected in series to form two or more stages of reverse osmosis membrane devices, thereby improving the quality of the water supplied to the electrodeionization device 714. As a result, the burden on the electrodeionization device 714 and subsequent devices is reduced, and the quality of the obtained ultrapure water is expected to improve.

[0101] The primary pure water obtained in this manner has, for example, a resistivity of 17 MΩ·cm or more and a TOC concentration of 10 μg C / L or less.

[0102] The ultrapure water producing system of this embodiment includes, in this order, a primary pure water tank TK2 for storing primary pure water, a pump P4, and a secondary pure water system 72 downstream of a primary pure water system 71. The primary pure water produced in the primary pure water system is temporarily stored in the primary pure water tank TK2, and then sent to the secondary pure water system 72 by the pump P4. The secondary pure water system 72 includes an ultraviolet oxidation device (TOC-UV) 721, a non-regenerative polisher (Polisher) 722, a membrane degasser (MDG) 723, and an ultrafiltration device (UF) 724.

[0103] The ultraviolet oxidation device 721 in the secondary pure water system 72 has the same configuration as the ultraviolet oxidation device 712 in the primary pure water system 71. The non-regenerative polisher 722 is a mixed-bed ion exchange resin device in which a strong acid cation exchange resin and a strong base anion exchange resin are mixed and filled in a container such as a cylinder. The non-regenerative polisher 722 adsorbs and removes ion components generated by the ultraviolet oxidation device 721 decomposing organic matter.

[0104] The membrane degassing device 723 removes dissolved gases through a degassing membrane. The membrane degassing device 723 removes trace amounts of dissolved oxygen in the primary pure water to reduce the dissolved oxygen concentration, for example, to about 1 μg / L or less. The ultrafiltration membrane device 724 performs filtration using an ultrafiltration membrane to remove trace amounts of eluted matter and fine particle components from the upstream ion exchange resin, for example, to reduce the number of fine particles of 0.05 μm or more to about 250 Pcs. / L or less.

[0105] In this way, the secondary pure water system 72 processes the primary pure water to produce ultrapure water of even higher purity. The quality of the ultrapure water is, for example, a total organic carbon (TOC) concentration of 1 μgC / L or less, a resistivity of 18 MΩ·cm or more, and a boron concentration of 0.1 ppb (μg / L) or less. The ultrapure water produced by the secondary pure water system is supplied to a point of use 73.

[0106] In each of the above-mentioned embodiments, the quality of the raw water, pretreated water, pure water, or ultrapure water can be measured by the following method or device. pH:electrode method Boron concentration: ICP emission spectroscopy and ICP-MS Hardness component: ICP-MS method Dissolved carbon dioxide (calcium carbonate equivalent): SUEZ Sievers M9e Silica (Si): Atomic absorption spectrometry and absorption spectrometry Chlorine (Cl equivalent): DPD method Conductivity: Conductivity meter (HORIBA HE-960CW) Resistivity (specific resistance): Resistivity meter (Horiba, Ltd. HE-960RW) Total organic carbon (TOC) concentration: TOC meter (other than ultrapure water: SUEZ Sievers M9e, ultrapure water: BECKMAN COULTER Anatel A-1000XP) Number of particles 0.05 μm or larger: Particle counter (UDI-50, manufactured by Particle Measuring Systems) EXAMPLES

[0107] Next, experimental examples and examples will be described, but the present invention is not limited to the following examples.

[0108] [Experimental Example 1] Using a pure water production system with a three-stage reverse osmosis membrane device as shown in Figure 5, the relationship between the pH of the water to be treated in the second-stage reverse osmosis membrane device, and the boron removal rate and resistivity of the treated water were investigated. The pH of the water to be treated in the third-stage reverse osmosis membrane device was fixed at 4, and the pH of the water to be treated in the second-stage reverse osmosis membrane device was changed to treat the water to be treated, and the boron concentration and resistivity of the permeate from the third-stage reverse osmosis membrane device were measured. The raw water was Atsugi City water, and the raw water was subjected to deaeration and activated carbon treatment in that order to obtain treated water. This treated water was supplied to the first-stage reverse osmosis membrane device without any adjustment. In this experimental example, the quality of the water supplied to the first stage reverse osmosis membrane device was as follows: the content of hardness components such as calcium and magnesium and dissolved carbon dioxide was 10 mg / L to 300 mg / L in total calculated as calcium carbonate, the content of silica (Si) was approximately 1 mg / L to 50 mg / L, the content of chlorine was approximately 0.1 mg / L to 0.6 mg / L calculated as Cl, and the pH was approximately 7.2.

[0109] The above results are shown in Figure 13. As shown in Figure 13, the resistivity of the treated water is maximum when the pH of the water to be treated in the second-stage reverse osmosis membrane device is around 9.0 to 10.5, and it can be seen that the boron removal rate improves at a pH of 9.0 or higher. In addition, in Figs. 13 to 18, "reverse osmosis membrane-2" represents the second stage reverse osmosis membrane device, and "reverse osmosis membrane-3" represents the third stage reverse osmosis membrane device.

[0110] [Experimental Example 2] In Experimental Example 1, the pH of the water to be treated in the second-stage reverse osmosis membrane device was adjusted to 10.5, and the pH of the water to be treated in the third-stage reverse osmosis membrane device was changed, and the resistivity of the permeate water from the third-stage reverse osmosis membrane device was measured. This allowed us to investigate the relationship between the pH of the water to be treated in the third-stage reverse osmosis membrane device and the resistivity of the treated water. The results are shown in Figure 14. As shown in FIG. 14, it is understood that the resistivity of the treated water is maximum when the pH of the water to be treated in the third-stage reverse osmosis membrane device is around 4 to 5.5.

[0111] [Experimental Example 3] The second-stage reverse osmosis membrane device shown in Figure 5 was used alone to investigate the changes in water flow time and permeate flow rate when the pH of the water to be treated was adjusted to 9, 10.5, and 11. The other conditions were the same as in Experimental Example 1. The results are shown in Figure 15. As shown in FIG. 15, after 90 days of water flow, the flow rate decreased by about 1% at pH=9, 7.5% at pH=10.5, and 11% at pH=11. In FIG. 15, "RO" means a reverse osmosis membrane, and "RO-2" means a second-stage reverse osmosis membrane.

[0112] [Experimental Example 4] In Experimental Example 3, the water to be treated was passed through the system for 90 days at a pH of 10.5, and the reverse osmosis membrane device at which the permeate flow rate decreased was used as the third-stage reverse osmosis membrane device, and the pH of the water to be treated was adjusted to 3, 4, and 6 to investigate the change in the permeate flow rate immediately after treatment began. The other conditions were the same as in Experimental Example 1. The results are shown in Figure 16. As shown in Figure 16, at around pH=6, the flow rate only recovered about 2-3% even after three days, whereas at pH=4, the flow rate recovered to its initial value after two days, and at pH=3, the flow rate recovered to its initial value after one day.

[0113] [Example 1] Based on the above results, a pure water production system having three reverse osmosis membrane devices as shown in Figure 5 was used, with reverse osmosis membrane device B installed in the second stage reverse osmosis membrane device and reverse osmosis membrane device C installed in the third stage reverse osmosis membrane device, and the treated water was treated for a treatment period of 90 days by switching the order of reverse osmosis membrane devices B and C by opening and closing valves every 90 days. The change in treated water flow rate (permeate flow rate of the third stage reverse osmosis membrane device) was investigated when the pH of the treated water in the second stage reverse osmosis membrane device was set to 10.5 and the pH of the treated water in the third stage reverse osmosis membrane device was set to 4. The results are shown in Figure 17. As shown in Figure 17, reverse osmosis membrane B, which was placed in the second stage at the beginning of the water flow, showed a flow rate drop of about 7.5% after 90 days of water flow. After 90 days of water flow, the flow path was switched so that reverse osmosis membrane B was placed in the third stage and reverse osmosis membrane C was placed in the second stage, and after the switch, reverse osmosis membrane B recovered to the initial flow rate in about two days. After that, the flow rate of reverse osmosis membrane C decreased, so it was switched again after 180 days of water flow.

[0114] Fig. 18 shows the change in electrical conductivity of the treated water (permeate) of the second-stage reverse osmosis membrane device and the change in resistivity of the treated water (permeate) of the third-stage reverse osmosis membrane device in Example 1. As shown in Fig. 18, the quality of the permeate water from the second and third-stage reverse osmosis membrane devices decreases slightly immediately before the flow path switching, but the water quality is restored by the switching.

[0115] According to the pure water production system of the embodiment described above, by switching the water flow order between the upstream reverse osmosis membrane device that treats alkaline water and the downstream reverse osmosis membrane device that treats acidic water every predetermined treatment period (here, 90 days), it is possible to improve scale blockage that occurs during long-term use during the water treatment process without performing cleaning operations, and therefore it is possible to stably and efficiently produce pure water for a long period of time. [Explanation of symbols]

[0116] 1~6: Pure water production equipment, 7: Ultrapure water production system 11,12,23,28,40…Reverse osmosis membrane device 13,15,17~20,35~37,39,131,132,141,142,150...supply pipe 143…Plumbing 14...Alkaline adjustment mechanism 16,21…Acid regulation mechanism 25~27,41…Discharge pipe 22...Control device B1~B7, B11~B15...branch points V11~V16, V31~V38, V41, V42... Valves P1~P4…Pump TK, TK1, TK2...Tank 70…Pretreatment system 71...Primary pure water system 72...Secondary pure water system (subsystem) 73…Point of Use (POU) 711…Activated carbon device (AC) 712…Deaeration device 713…Ultraviolet oxidation device (TOC-UV) 714...Electrodeionization equipment (EDI) 721…Ultraviolet oxidation device (TOC-UV) 722…Non-regenerative polisher 723…Membrane Degassing Device (MDG) 724…Ultrafiltration device (UF)

Claims

1. A method for producing pure water, comprising the steps of: passing raw water through two or more stages of reverse osmosis membranes in order to obtain pure water from which boron has been removed, an alkaline treatment step in which alkaline water to be treated is passed through one of the reverse osmosis membranes; an acid treatment step in which acidic water to be treated is passed through another one of the reverse osmosis membranes in a predetermined order; a first treatment period in which a first reverse osmosis membrane is used in the alkaline treatment step and a second reverse osmosis membrane is used in the acid treatment step; a second treatment period in which the second reverse osmosis membrane is used in the alkaline treatment step and the first reverse osmosis membrane is used in the acid treatment step; The first reverse osmosis membrane and the second reverse osmosis membrane are replaced with each other at predetermined intervals. Pure water production method.

2. In the first treatment period, alkaline water to be treated is passed through the first reverse osmosis membrane to perform an alkaline treatment step, permeated water of the first reverse osmosis membrane is adjusted to be acidic, and the generated acidic water to be treated is passed through the second reverse osmosis membrane to perform the acid treatment step, In the second treatment period, alkaline water to be treated is passed through the second reverse osmosis membrane to perform an alkaline treatment step, permeated water of the second reverse osmosis membrane is adjusted to be acidic, and the generated acidic water to be treated is passed through the first reverse osmosis membrane to perform the acid treatment step, The pH of the alkaline water to be treated is 9.0 or more and 11.0 or less, The pH of the acidic water to be treated is 5.0 or less. The method for producing pure water according to claim 1.

3. Furthermore, prior to the alkali treatment step, 3. The method for producing pure water according to claim 2, further comprising a step of passing raw water having a pH of 5.0 to 7.5 through a third reverse osmosis membrane device.

4. In the first treatment period, the acidic water to be treated is passed through the second reverse osmosis membrane to perform the acid treatment step, the permeate water of the second reverse osmosis membrane is adjusted to be alkaline, and the alkaline water to be treated produced is passed through the first reverse osmosis membrane to perform the alkaline treatment step, In the second treatment period, the acidic water to be treated is passed through the first reverse osmosis membrane to carry out the acid treatment step, the permeate water of the first reverse osmosis membrane is adjusted to be alkaline, and the alkaline water to be treated produced is passed through the second reverse osmosis membrane to carry out the alkaline treatment step, The pH of the alkaline water to be treated is 9.0 or more and 11.0 or less, The pH of the acidic water to be treated is 5.0 or more and 6.0 or less. The method for producing pure water according to claim 1.

5. A pure water production apparatus having two or more reverse osmosis membrane devices connected in series to produce pure water from which boron has been removed, A raw water supply pipe for supplying raw water; A first reverse osmosis membrane device and a second reverse osmosis membrane device; A first adjusting mechanism for adjusting the water to be treated to be alkaline or acidic; a second adjusting mechanism for adjusting the pH of the water to be treated to be either acidic or alkaline, which is different from the pH of the water to be treated by the first adjusting mechanism; a first treatment path for passing raw water through a first adjustment mechanism, a first reverse osmosis membrane device, a second adjustment mechanism, and a second reverse osmosis membrane device in this order; a second treatment path in which the raw water is passed through a first adjustment mechanism, a second reverse osmosis membrane device, a second adjustment mechanism, and the first reverse osmosis membrane device in this order; a switching mechanism capable of switching between a first processing path and a second processing path; a control mechanism that controls the switching mechanism to switch between the first processing path and the second processing path every time a predetermined processing period elapses; A pure water producing apparatus comprising:

6. The first adjustment mechanism is an alkali adjustment mechanism that adjusts raw water to be alkaline, The second adjustment mechanism is an acid adjustment mechanism that adjusts the water to be treated to be acidic. The water purifying apparatus according to claim 5.

7. The first processing path includes: a first supply pipe for supplying raw water to a supply side of the first reverse osmosis membrane device; a second supply pipe for supplying permeated water from the first reverse osmosis membrane device to the second adjustment mechanism; a third supply pipe that supplies the water to be treated that has passed through the second adjustment mechanism to a supply side of the second reverse osmosis membrane device; a fourth supply pipe for sending the permeated water of the second reverse osmosis membrane device to a subsequent stage; four switching valves respectively provided in the first to fourth supply pipes, and the first adjustment mechanism is provided upstream of the switching valve of the first supply pipe; The second processing path includes: a fifth supply pipe for supplying raw water to a supply side of the second reverse osmosis membrane device; a sixth supply pipe for supplying permeated water from the second reverse osmosis membrane device to the second adjustment mechanism; a seventh supply pipe that supplies the water to be treated that has passed through the second adjustment mechanism to a supply side of the first reverse osmosis membrane device; an eighth supply pipe for sending the permeated water of the first reverse osmosis membrane device to a subsequent stage; Four switching valves are provided in the fifth to eighth supply pipes, respectively; the first adjustment mechanism is disposed on the upstream side of the switching valve of the sixth supply pipe, 7. The pure water producing apparatus according to claim 5, wherein the control mechanism controls eight of the switching valves to switch between the first treatment path and the second treatment path.

8. The first adjustment mechanism is an acid adjustment mechanism that adjusts the raw water to a weak acidity, The second adjustment mechanism is an alkali adjustment mechanism that adjusts the treated water to be alkaline. The water purifying apparatus according to claim 5.

9. An ultrapure water production system including a primary pure water system and a secondary pure water system in this order, The primary pure water system comprises the pure water producing apparatus according to claim 5 or 6, and an ultraviolet oxidation device and an electrodeionization device in a downstream stage thereof, the secondary pure water system comprises an ultraviolet oxidation device, a non-regenerative polisher, a membrane degassing device and an ultrafiltration device in this order; Produce ultrapure water with a boron concentration of 0.1 μg / L or less Ultrapure water production system.

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