Movable devices, image projection devices, head-up displays, object recognition devices, measuring devices, robots, moving bodies and vehicles

Abstract

To prevent deviation of a movable part according to acceleration acting on a movable device.SOLUTION: The present movable device comprises a movable part, and a driving part that can rotate the movable part around a rotation axis. The driving part has a plurality of beam parts, first connection parts that connects the adjacent beam parts to each other, and second connection parts that connect the beam parts and the movable part to each other. A distance between the rotation axis and a portion of the second connection part most separated from the rotation axis in an orthogonal direction orthogonal to the rotation axis is longer than a distance between the rotation axis and a portion of the movable part most separated from the rotation axis in the orthogonal direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a movable device, an image projection device, a head-up display, an object recognition device, a measuring device, a robot, a moving body, and a vehicle. [Background technology]

[0002] In recent years, with the advancement of micromachining technology that utilizes semiconductor manufacturing technology, there has been progress in the development of MEMS (Micro Electro Mechanical Systems) devices that are manufactured by microfabricating silicon or glass.

[0003] As an example of a MEMS device, a configuration has been disclosed that includes a support section that supports a mirror section, a piezoelectric actuator that has one end connected to the mirror section and the other end connected to the support section and that uses piezoelectric driving to oscillate the mirror section around a predetermined axis relative to the support section, and a detection piezoelectric element that detects vibrations transmitted to the support section (see, for example, Patent Document 1). This piezoelectric actuator is configured by connecting multiple piezoelectric cantilevers in a folded manner, and the detection piezoelectric element is disposed on the support section. Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the optical deflector configuration exemplified above, when acceleration acts on a movable device such as an optical deflector, a movable part such as a mirror part may shift in response to the applied acceleration, raising a concern that light may not be deflected in the desired direction.

[0005] The present invention has been made in consideration of the above-mentioned points, and an object of the present invention is to suppress deviation of a movable part in response to acceleration acting on a movable device. [Means for solving the problem]

[0006] A movable device according to one aspect of the present invention includes a movable section and a drive section capable of rotating the movable section around a rotation axis, the drive section having a plurality of beam sections, a first connection section connecting adjacent beam sections, and a second connection section connecting the beam sections and the movable section, and a distance between a portion of the second connection section farthest from the rotation axis in a direction perpendicular to the rotation axis and the rotation axis is longer than a distance between a portion of the movable section farthest from the rotation axis in the direction perpendicular to the rotation axis and the rotation axis. and a position where the second connection portion is connected to the movable portion is on the opposite side to the driving portion from the center of the movable portion in the direction along the rotation axis. .

[0007] A movable device according to one aspect of the present invention includes a movable section and a drive section capable of rotating the movable section around a rotation axis, the drive section having a plurality of beam sections, a first connection section connecting adjacent beam sections, and a second connection section connecting the beam sections and the movable section, and a distance between the rotation axis and a portion of the second connection section farthest from the rotation axis in a direction perpendicular to the rotation axis is longer than a distance between the rotation axis and a portion of the first connection section farthest from the rotation axis in the direction perpendicular to the rotation axis. and a position where the second connection portion is connected to the movable portion is on the opposite side to the driving portion from the center of the movable portion in the direction along the rotation axis. . Effect of the Invention

[0008] According to the present invention, it is possible to suppress deviation of the movable part in response to acceleration acting on the movable device. [Brief description of the drawings]

[0009] [Figure 1] 3 is a plan view illustrating an optical deflector of the movable device according to the first embodiment. FIG. [Diagram 2] FIG. 2 is a cross-sectional view taken along the line AA in FIG. [Diagram 3] 11A and 11B are diagrams illustrating an example of deviation of a movable part when acceleration is applied; [Figure 4] FIG. 11 is a plan view illustrating an optical deflector according to a first modified example. [Diagram 5] FIG. 11 is a plan view illustrating an optical deflector according to a second modified example. [Figure 6] FIG. 13 is a plan view illustrating an optical deflector according to a third modified example. [Figure 7] FIG. 13 is a plan view illustrating an optical deflector according to a fourth modified example. [Figure 8] FIG. 13 is a plan view illustrating an optical deflector according to a fifth modified example. [Figure 9] 1 is a schematic diagram of an example optical scanning system. [Figure 10] FIG. 2 is a diagram illustrating a hardware configuration of an example of an optical scanning system. [Figure 11] FIG. 2 is a functional block diagram of an example of a control device. [Figure 12] 13 is a flowchart of an example of a process related to the optical scanning system. [Figure 13] 1 is a diagram showing an example of an automobile equipped with a head-up display device. [Figure 14] 1 is a schematic diagram of an example of a head-up display device. [Figure 15] FIG. 1 is a schematic diagram of an example of an automobile equipped with a lidar device. [Figure 16] FIG. 1 is a schematic diagram of an example of a lidar device. [Figure 17] 1 is a schematic diagram illustrating an example of a packaged movable device. [Figure 18] FIG. 2 is a block diagram of a three-dimensional measuring apparatus. [Figure 19] 1 is a diagram showing an example of a state in which a measurement pattern is projected onto an object; [Figure 20] FIG. 2 is a diagram showing a robot arm having multiple joints of a robot. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same components are designated by the same reference numerals, and duplicated descriptions will be omitted where appropriate.

[0011] In the following description of the embodiment, rotation, swinging, and movement are synonymous. Among the directions indicated by arrows, the stacking direction of each layer in an actuator, etc. is the Z direction, and the directions perpendicular to each other in a plane perpendicular to the Z direction are the X direction and the Y direction. Planar view means viewing an object from the Z direction. However, these do not limit the orientation of the movable device when in use, and the orientation of the movable device is arbitrary.

[0012] First Embodiment Fig. 1 is a plan view illustrating an optical deflector which is a movable device according to the first embodiment, Fig. 2 is a cross-sectional view taken along the line AA in Fig. 1.

[0013] 1, the optical deflector 100 includes a movable part 103, actuators 104a and 104b, and a support 120. The optical deflector 100 is an example of a movable device that rotates the movable part 103 around a rotation axis E to deflect light incident on the movable part 103.

[0014] The movable section 103 has a mirror section 101 having a substantially rectangular shape in a plan view, and a mirror reflecting surface 102 formed on the +Z side surface of a base of the mirror section 101. The mirror section 101 is made of, for example, a silicon layer. The mirror section 101 may be made of an oxidizing material, an inorganic material, or an organic material, or may be made of multiple materials or multiple layers of the same material.

[0015] The mirror reflecting surface 102 is made of, for example, a metal thin film containing aluminum, gold, silver, etc., or a multi-layer film thereof. A rib structure for reinforcing the mirror portion may be formed on the -Z side surface of the base of the mirror portion 101. The rib structure is made of, for example, a silicon support layer and a silicon oxide layer, and suppresses deformation and distortion of the mirror portion 101 and the mirror reflecting surface 102 caused by movement.

[0016] The movable part 103 is supported in a rotatable state by actuators 104a and 104b. In this embodiment, the mirror part 101 and the movable part 103 are formed in a substantially rectangular shape in a plan view, but are not limited thereto, and may be formed in any shape, such as a circular shape, an elliptical shape, or a polygonal shape.

[0017] Each of the actuators 104a and 104b is an example of a drive unit capable of rotating the movable unit 103 around a rotation axis E. One end of each of the actuators 104a and 104b is connected to the movable unit 103, and the other end is connected to the support 120.

[0018] The actuator 104a has a plurality of beam portions 105a, 105b, 105c and 105d, first connection portions 108a, 108b and 108c, and a second connection portion 107a.

[0019] The beam portions 105a, 105b, 105c, and 105d are connected to adjacent beam portions by first connection portions 108a, 108b, and 108c in a folded manner, thereby forming a meandering structure.

[0020] A second piezoelectric member 110a is provided on the beam portion 105a, a first piezoelectric member 110b is provided on the beam portion 105b, a second piezoelectric member 110c is provided on the beam portion 105c, and a first piezoelectric member 110d is provided on the beam portion 105d.

[0021] The actuator 104a is connected to the movable part 103 via the second connection part 107a in a direction intersecting with the rotation axis E. The second connection part 107a connects the beam part 105a and the movable part 103. The position where the second connection part 107a is connected to the movable part 103 is closer to the actuator 104a than the center of the movable part 103 in the direction along the rotation axis E.

[0022] The actuator 104b has a plurality of beam portions 106a, 106b, 106c and 106d, first connection portions 109a, 109b and 109c, and a second connection portion 107b.

[0023] The beam portions 106a, 106b, 106c, and 106d are connected to each other by first connection portions 109a, 109b, and 109c so that adjacent beam portions are folded back, thereby forming a folded structure (meander structure).

[0024] A first piezoelectric member 111a is provided on the beam portion 106a, a second piezoelectric member 111b is provided on the beam portion 106b, a first piezoelectric member 111c is provided on the beam portion 106c, and a second piezoelectric member 111d is provided on the beam portion 106d.

[0025] The actuator 104b is connected to the movable part 103 via the second connection part 107b in a direction intersecting with the rotation axis E. The second connection part 107b connects the beam part 106a and the movable part 103. The position where the second connection part 107b is connected to the movable part 103 is closer to the actuator 104b than the center of the movable part 103 in the direction along the rotation axis E.

[0026] The first piezoelectric members 110b, 110d, 111a, and 111c are deformed by application of a first driving voltage, and the second piezoelectric members 110a, 110c, 111b, and 111d are deformed by application of a second driving voltage that is in the opposite phase to the first driving voltage. The deformation of each of the first and second piezoelectric members causes warping in each beam portion.

[0027] The warping of each beam portion causes adjacent beam portions to bend in different directions, and the bending accumulates, causing movable portion 103 connected to each of actuators 104a and 104b to rotate back and forth around rotation axis E.

[0028] By applying a first drive voltage and a second drive voltage at a drive frequency that matches the resonance mode of the movable part 103 around the rotation axis E, the movable part 103 resonates and vibrates, making it possible to obtain a large rotation angle with a low drive voltage.

[0029] The waveform of the driving voltage may be a sine wave, a sawtooth wave, a triangular wave, or the like. The movable part 103 may be rotated in a non-resonant mode without being limited to the resonant mode. The optical deflector 100 may be driven by any of a variety of driving methods, such as an electrostatic, piezoelectric, or electromagnetic method.

[0030] Among these, piezoelectric drive is preferable because it allows the drive units to be positioned effectively and prevents the overall size of the optical deflector from becoming too large. For example, electrostatic drive requires the arrangement of comb electrodes on the outer periphery of the drive units, which tends to increase the overall size of the optical deflector. Electromagnetic drive is difficult because of the difficulty in arranging the wiring layout for each of the multiple drive units and the arrangement of magnets to apply a magnetic field to each of them, which tends to increase the overall size of the optical deflector.

[0031] When the driving method is a piezoelectric type, the cross-sectional structure of the actuator 104a is, for example, as shown in FIG. 2. As shown in FIG. 2, the actuator 104a is made of a plurality of layers in the thickness direction (Z direction). Specifically, in the actuator 104a, a base portion serving as an elastic portion is formed of a silicon layer 130. The thickness of the silicon layer 130 is, for example, about 20 μm to 60 μm. The base portion formed of the silicon layer 130 may be made of any material that has rigidity and is applicable to semiconductor processing, and may be made of an inorganic material, an organic material, a metallic glass, or the like. Also, it may have a multi-layer structure in which a plurality of materials are multi-layered.

[0032] In the actuator 104a, a lower electrode 131, a piezoelectric layer 132, and an upper electrode 133 are laminated in this order on the +Z side surface of a silicon layer 130. The lower electrode 131, the piezoelectric layer 132, and the upper electrode 133 configure a piezoelectric driving unit.

[0033] The lower electrode 131 and the upper electrode 133 are formed of, for example, gold (Au) or platinum (Pt), etc. The piezoelectric layer 132 is formed of, for example, a piezoelectric material such as PZT (lead zirconate titanate), but may be of any other piezoelectric material, regardless of the type.

[0034] The piezoelectric driving unit may have a structure in which a plurality of piezoelectric layers are laminated and an intermediate electrode is included. The piezoelectric driving unit is electrically connected to an external control device and is driven by application of a driving voltage. The +Z side of the piezoelectric driving unit may be covered with an insulating film (not shown) made of silicon oxide or the like, and electrical wiring may be formed on the surface of the insulating film on the +Z side.

[0035] Although FIG. 2 illustrates the cross-sectional structure of actuator 104a, the same applies to actuator 104b.

[0036] Each of the actuators 104a and 104b may be formed with some kind of sensor. The sensor is not particularly limited, but examples thereof include a displacement detection sensor (piezoelectric type, strain resistance type, etc.) that outputs a signal in response to deformation, a temperature sensor, etc.

[0037] <Distances between the ends of the movable portion, the first connecting portion, and the second connecting portion and the rotation axis> In FIG. 1, distance L1 represents the distance between the rotation axis E and a portion 140a of the second connection portion 107a that is farthest from the rotation axis E in the orthogonal direction F perpendicular to the rotation axis E. Distance L2 represents the distance between the rotation axis E and a portion 141 of the movable portion 103 that is farthest from the rotation axis E in the orthogonal direction F. Distance L3 represents the distance between the rotation axis E and a portion 142 of the first connection portion 108b that is farthest from the rotation axis E in the orthogonal direction F. As shown in FIG. 1, in this embodiment, distance L1 is longer than distance L2. Note that distance L2 and distance L3 are equal, so distance L3 is shown in parentheses in FIG. 1.

[0038] In general, when an acceleration acts on an optical deflector in a direction perpendicular to the rotation axis, the movable part rotates significantly around the rotation axis, which may cause the initial angle of the movable part to shift. The initial angle refers to the inclination angle of the movable part when the movable part is not rotating. Examples of the acceleration include gravitational acceleration acting on the optical deflector and acceleration acting on the optical deflector in response to the acceleration of a moving body when the optical deflector is mounted on a moving body such as an automobile or a robot arm.

[0039] Fig. 3 is a diagram showing an example of deviation in the initial angle of the movable part caused when acceleration is applied, and is a diagram of the movable part 103 in the optical deflector 100 in Fig. 1 viewed from the -Y side. Note that in Fig. 3, components of the optical deflector 100 other than the movable part 103 are omitted from illustration.

[0040] 3, the initial angle of the movable part 103 is inclined by an angle θ with respect to an angle reference A0. The angle reference A0 corresponds to, for example, the mirror reflecting surface 102 of the movable part 103 when the initial angle of the movable part 103 is in an ideal state. When acceleration in the +X direction acts on the optical deflector 100, the initial angle of the movable part 103 is shifted by an angle θ with respect to the angle reference A0.

[0041] When the movable part 103 rotates with the initial angle shifted by angle θ, the deflection direction of light that is incident on the mirror reflecting surface 102 of the movable part 103 and deflected by the optical deflector 100 shifts from the desired direction by an amount corresponding to the angle θ.

[0042] The relationship between the angle θ and the distance L1 is expressed by the following formula: Therefore, the longer the distance L1, the more the angle θ is suppressed. θ∝1 / L1 2

[0043] <Function and effect of the optical deflector 100> As described above, the optical deflector 100 (movable device) according to this embodiment includes the movable part 103 and the actuator 104a (drive part) capable of rotating the movable part 103 around a rotation axis E. The actuator 104a includes a plurality of beam parts 105a, 105b, 105c, and 105d, first connection parts 108a, 108b, and 108c that connect adjacent beam parts, and a second connection part 107a.

[0044] A distance L1 between the rotation axis E and a portion 140a of the second connection portion 107a that is farthest from the rotation axis E in an orthogonal direction F perpendicular to the rotation axis E is longer than a distance L2 between the rotation axis E and a portion 141 of the movable portion 103 that is farthest from the rotation axis E in the orthogonal direction F. This configuration makes it possible to suppress an angle θ that is a deviation of the initial angle with respect to the angle reference A0.

[0045] On the other hand, if the area of ​​the movable part 103 is increased by increasing the distance L1, there is a concern that this may result in a decrease in the resonance frequency and a decrease in the drive sensitivity, etc. The drive sensitivity refers to the rotation angle per unit drive voltage.

[0046] In this embodiment, by making the distance L1 longer than the distance L2, the area of ​​the movable part 103 is prevented from becoming larger, and the angle θ can be suppressed while avoiding the decrease in resonant frequency and the decrease in driving sensitivity that come with increasing the distance L1.

[0047] In this embodiment, the actuator 104a is connected to the movable part 103 via the second connecting part 107a in a direction intersecting with the rotation axis E. This makes it easier to arrange the second connecting part 107a when the distance L1 is made longer than the distance L2.

[0048] In this embodiment, the position where the second connection portion 107a is connected to the movable portion 103 is closer to the actuator 104a than the center of the movable portion 103 in the direction along the rotation axis E. This makes it easier to arrange the second connection portion 107a when the distance L1 is made longer than the distance L2.

[0049] In this embodiment, the configuration in which the distance L2 is equal to the distance L3 has been exemplified, but the length of the distance L3 may be arbitrary as long as the distance L1 is longer than the distance L2. However, making the distance L2 equal to the distance L3 is more preferable because it simplifies the configuration of the actuators 104a and 104b and the movable part 103.

[0050] In the present embodiment, the end face of the movable part 103 including the end of the movable part 103 in the orthogonal direction F is substantially parallel to the rotation axis E, but the present invention is not limited to this. Even if the end face of the movable part 103 intersects with the rotation axis E, the same effect as above can be obtained by making the distance L1 longer than the distance L2.

[0051] The effects and advantages of the actuator 104a have been described above, but the same applies to the actuator 104b. That is, in the actuator 104b, the distance L1 between the rotation axis E and the part 140b of the second connection part 107b that is the furthest from the rotation axis E in the orthogonal direction F is longer than the distance L2 between the rotation axis E and the part 141 of the movable part 103 that is the furthest from the rotation axis E in the orthogonal direction F. This configuration also provides the same effects and advantages as above. In other words, the above effects and advantages can be obtained by making the distance L1 in at least one of the second connection parts 107a and 107b longer than the distance L2.

[0052] In addition, the case has been exemplified where the distance between portion 140a in the orthogonal direction F and the rotation axis E is equal to the distance between portion 140b in the orthogonal direction F and the rotation axis E, but the present invention is not limited to this and the distances may be different. When the distances are different, the distance between the portion 140a or portion 140b, whichever is farther from the rotation axis E, and the rotation axis E corresponds to distance L1. When distance L1 satisfies the above condition, the same effect as above can be obtained.

[0053] <Modification> Next, a modified example of the first embodiment will be described. Note that the same components as those in the above-described embodiment are given the same reference numerals, and duplicated descriptions will be omitted as appropriate.

[0054] 4 is a plan view illustrating an optical deflector 100a according to a first modified example. As shown in FIG. 4, in this modified example, the distance L1 is longer than the distance L3. This configuration also makes it possible to suppress the angle θ, which is the deviation of the initial angle from the angle reference A0. In addition, by preventing an increase in the area of ​​the movable part 103, it is possible to avoid a decrease in the resonance frequency and a decrease in the drive sensitivity that are caused by increasing the distance L1.

[0055] Note that the length of distance L2 may be arbitrary as long as distance L1 is longer than distance L3. However, if distances L1, L2, and L3 satisfy the relationship of the following formula (1), the spring constant of actuators 104a and 104b can be reduced, which is advantageous in terms of improving drive sensitivity and increasing the rotation angle. L1>L3>L2 (1)

[0056] 5 is a plan view illustrating an optical deflector 100b according to a second modified example. As shown in FIG 5, in this modified example, the relationship of the following formula (2) is satisfied among the distance L1, the distance L2, and the distance L3. L1>L2>L3 (2)

[0057] This configuration allows the spring constant of the actuators 104a and 104b to be increased, which is advantageous in terms of improving resistance to damage when an impact is applied to the optical deflector 100b.

[0058] Fig. 6 is a plan view illustrating an optical deflector 100c according to a third modified example, and Fig. 7 is a plan view illustrating an optical deflector 100d according to a fourth modified example.

[0059] 6, in the optical deflector 100c, the position where the second connection portion 107ac is connected to the movable portion 103 is the center of the movable portion 103 in the direction along the rotation axis E. Also, as shown in Fig. 7, in the optical deflector 100d, the position where the second connection portion 107ad is connected to the movable portion 103 is on the opposite side to the actuator 104a than the center of the movable portion 103 in the direction along the rotation axis E.

[0060] As shown in the third and fourth modified examples, the position at which the second connecting portion 107a is connected to the movable portion 103 is arbitrary in the direction along the rotation axis E, and the same effects as those of the first embodiment can be obtained at any position. Furthermore, by combining the third or fourth modified example with the first modified example, the same effects as those of the first modified example can be obtained, and by combining the third or fourth modified example with the second modified example, the same effects as those of the second modified example can be obtained.

[0061] Fig. 8 is a plan view illustrating an optical deflector 100e according to a fifth modified example. As shown in Fig. 7, the optical deflector 100e has second connection portions 107ea and 107eb.

[0062] The second connection portion 107ea has a shape in which the width along the orthogonal direction F is longer toward the +Y side and has a generally triangular shape in plan view. The second connection portion 107eb has a shape in which the width along the orthogonal direction F is longer toward the -Y side and has a generally triangular shape in plan view.

[0063] A coupling shape 150 between the movable part 103 and the second connection parts 107ea and 107eb is a parallelogram in a plan view. With this configuration, the length of the portion where each of the second connection parts 107ea and 107eb is connected to the movable part 103 can be increased, and each of the second connection parts 107ea and 107eb and the movable part 103 can be stably connected.

[0064] The shape of the second connecting parts 107ea and 107eb is not limited to a substantially triangular shape and can be selected arbitrarily. Therefore, by adjusting the shape of the second connecting parts 107ea and 107eb, it is possible to adjust the intervals between the plurality of natural vibration modes of the optical deflector 100e.

[0065] The optical deflector according to the embodiment described above can be used in an optical scanning system, an optical deflection system, an image projection device, an optical writing device, an object recognition device, a laser headlamp, and a head mounted display. Each of these will be described in turn below.

[0066] [Optical scanning system] First, an optical scanning system to which a movable device according to an embodiment is applied will be described in detail with reference to FIGS.

[0067] A schematic diagram of an example of an optical scanning system is shown in Fig. 9. As shown in Fig. 9, an optical scanning system 10 is a system that optically scans a scanned surface 15 by deflecting light irradiated from a light source device 12 by a reflecting surface 14 of a movable device 13 under the control of a control device 11.

[0068] The optical scanning system 10 comprises a control device 11, a light source device 12, and a movable device 13 having a reflecting surface 14.

[0069] The control device 11 is, for example, an electronic circuit unit including a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The movable device 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflective surface 14 and capable of moving the reflective surface 14. The light source device 12 is, for example, a laser device that irradiates a laser. The scanned surface 15 is, for example, a screen.

[0070] The control device 11 generates control commands for the light source device 12 and the movable device 13 based on the acquired optical scanning information, and outputs drive signals to the light source device 12 and the movable device 13 based on the control commands.

[0071] The light source device 12 emits light based on the input drive signal. The movable device 13 moves the reflecting surface 14 in at least one axial direction or two axial directions based on the input drive signal.

[0072] As a result, for example, by controlling the control device 11 based on image information, which is an example of optical scanning information, the reflection surface 14 of the movable device 13 is moved back and forth in two axial directions within a predetermined range, and the irradiation light from the light source device 12 incident on the reflection surface 14 is deflected around a certain axis to perform optical scanning, so that an arbitrary image can be projected onto the scanned surface 15. Details of the movable device according to the embodiment and details of the control by the control device will be described later.

[0073] Next, a hardware configuration of an example of the optical scanning system 10 will be described with reference to Fig. 10. Fig. 10 is a hardware configuration diagram of an example of the optical scanning system 10. As shown in Fig. 10, the optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13, which are electrically connected to each other. Among these, the control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I / F 24, a light source device driver 25, and a movable device driver 26.

[0074] The CPU 20 is a calculation device that reads out programs and data from a storage device such as a ROM 22 onto a RAM 21 and executes processing to realize the overall control and functions of the control device 11.

[0075] The RAM 21 is a volatile storage device that temporarily stores programs and data.

[0076] The ROM 22 is a non-volatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10.

[0077] The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the movable device driver 26 in accordance with the processing of the CPU 20 .

[0078] The external I / F 24 is, for example, an interface with an external device, a network, etc. The external device includes, for example, a higher-level device such as a PC (Personal Computer), and a storage device such as a USB memory, an SD card, a CD, a DVD, a HDD, and an SSD. The network is, for example, a CAN (Controller Area Network) or a LAN (Local Area Network) of an automobile, the Internet, etc. The external I / F 24 may have a configuration that enables connection or communication with an external device, and an external I / F 24 may be provided for each external device.

[0079] The light source device driver 25 is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 in accordance with an input control signal.

[0080] The movable device driver 26 is an electric circuit that outputs a drive signal, such as a drive voltage, to the movable device 13 in accordance with the input control signal.

[0081] In the control device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I / F 24. Note that any configuration may be used as long as the CPU 20 can acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or FPGA 23 in the control device 11, or a storage device such as an SSD may be newly provided in the control device 11 to store the optical scanning information in the storage device.

[0082] Here, the optical scanning information is information indicating how to optically scan the scanned surface 15. For example, when an image is displayed by optical scanning, the optical scanning information is image data. For example, when optical writing is performed by optical scanning, the optical scanning information is writing data indicating the writing order and writing locations. For example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range of irradiating light for object recognition.

[0083] The control device 11 can realize the following functional configuration by instructions from the CPU 20 and the hardware configuration shown in FIG.

[0084] Next, a functional configuration of the control device 11 of the optical scanning system 10 will be described with reference to Fig. 11. Fig. 11 is a functional block diagram of an example of a control device of the optical scanning system.

[0085] As shown in FIG. 11, the control device 11 has a control unit 30 and a drive signal output unit 31 as functions.

[0086] The control unit 30 is realized by, for example, the CPU 20, the FPGA 23, etc., and acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs it to the drive signal output unit 31. For example, the control unit 30 acquires image data from an external device, etc. as optical scanning information, generates a control signal from the image data by performing a predetermined process, and outputs it to the drive signal output unit 31. The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, etc., and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

[0087] The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. For example, in the light source device 12, the drive signal is a drive voltage for controlling the timing and intensity of irradiation of the light source. Also, in the movable device 13, the drive signal is a drive voltage for controlling the timing and range of movement of the reflective surface 14 of the movable device 13.

[0088] Next, a process of optically scanning the surface 15 to be scanned by the optical scanning system 10 will be described with reference to Fig. 12. Fig. 12 is a flowchart showing an example of a process related to the optical scanning system.

[0089] In step S11, the control unit 30 acquires optical scanning information from an external device or the like.

[0090] In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31.

[0091] In step S13, the drive signal output unit 31 outputs drive signals to the light source device 12 and the movable device 13 based on the input control signal.

[0092] In step 14, the light source device 12 emits light based on the input drive signal. The movable device 13 moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, the light is deflected in an arbitrary direction and optical scanning is performed.

[0093] In the above-described optical scanning system 10, one control device 11 has devices and functions for controlling the light source device 12 and the movable device 13, but the control device for the light source device and the control device for the movable device may be provided separately.

[0094] In the optical scanning system 10, the single control device 11 is provided with the functions of the control unit 30 for the light source device 12 and the movable device 13 and the function of the drive signal output unit 31, but these functions may exist separately, for example, a drive signal output device having the drive signal output unit 31 may be provided separately from the control device 11 having the control unit 30. Note that, in the optical scanning system 10, the movable device 13 having the reflective surface 14 and the control device 11 may constitute an optical deflection system that performs optical deflection.

[0095] In this way, by using the movable device according to this embodiment in an optical scanning system, it is possible to suppress deviation of the movable part according to the acceleration acting on the movable device, and to perform appropriate scanning with light.

[0096] [Image projection device] Next, an image projection device to which the movable device according to the embodiment is applied will be described in detail with reference to Fig. 13 and Fig. 14. The image projection device is a device that projects an image by optical scanning, and is, for example, a head-up display device.

[0097] Fig. 13 is a schematic diagram of an automobile 400 equipped with a head-up display device 500, which is an example of an image projection device. Fig. 14 is a schematic diagram of an example of the head-up display device 500.

[0098] 13, the head-up display device 500 is installed, for example, near the windshield (windshield 401, etc.) of an automobile 400. Projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and directed toward an observer (driver 402) who is a user. This allows the driver 402 to visually recognize an image projected by the head-up display device 500 as a virtual image. Note that a combiner may be installed on the inner wall surface of the windshield, and the user may visually recognize a virtual image by the projection light reflected by the combiner.

[0099] As shown in FIG. 14, in the head-up display device 500, laser light is emitted from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incidence optical system including collimator lenses 502, 503, and 504 provided for each laser light source, two dichroic mirrors 505 and 506, and a light amount adjustment unit 507, and is then deflected by a movable device 13 having a reflecting surface 14. The deflected laser light passes through a projection optical system including a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511, and is projected onto a screen. In the head-up display device 500, the laser light sources 501R, 501G, and 501B, the collimator lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 are unitized as a light source unit 530 by an optical housing.

[0100] The head-up display device 500 projects an intermediate image displayed on an intermediate screen 510 onto a windshield 401 of an automobile 400, thereby allowing a driver 402 to visually recognize the intermediate image as a virtual image.

[0101] The laser beams of each color emitted from the laser light sources 501R, 501G, and 501B are converted into approximately parallel beams by collimating lenses 502, 503, and 504, respectively, and are combined by two dichroic mirrors 505 and 506, which serve as a combining unit. The combined laser beams are adjusted in amount by a light amount adjusting unit 507, and then two-dimensionally scanned by a movable device 13 having a reflecting surface 14. The projection light L two-dimensionally scanned by the movable device 13 is reflected by a free-form surface mirror 509, where distortion is corrected, and then the light is focused on an intermediate screen 510 to display an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are arranged two-dimensionally, and the projection light L entering the intermediate screen 510 is magnified in units of the microlens.

[0102] The movable device 13 reciprocates the reflective surface 14 in two axial directions, thereby two-dimensionally scanning the projection light L incident on the reflective surface 14. The drive control of this movable device 13 is performed in synchronization with the emission timing of the laser light sources 501R, 501G, and 501B.

[0103] The above describes the head-up display device 500 as an example of an image projection device, but the image projection device may be any device that projects an image by performing optical scanning with the movable device 13 having the reflective surface 14. For example, the present invention can be similarly applied to a projector that is placed on a desk or the like and projects an image onto a display screen, or a head-mounted display device that is mounted on a mounting member that is mounted on the observer's head or the like and projects an image onto a reflective / transmissive screen of the mounting member or projects an image using the observer's eye as a screen.

[0104] The image projection device may be mounted not only on a vehicle or a mounting member, but also on a moving body including an aircraft, a ship, a mobile robot, etc. other than a vehicle, or on a non-moving body such as a work robot that operates a drive target such as a manipulator without moving from the site. The automobile 400 is an example of a moving body and an example of a vehicle.

[0105] In this manner, by using the movable device according to this embodiment in an image projection device, it is possible to suppress deviation of the movable part in accordance with the acceleration acting on the movable device, and to project a high-quality image.

[0106] [Object recognition device] Next, an object recognition device to which the movable device according to the embodiment is applied will be described in detail with reference to Fig. 15 and Fig. 16. The object recognition device is a device that recognizes an object in a target direction, and is, for example, a LIDAR device.

[0107] Fig. 15 is a schematic diagram of an automobile equipped with a LiDAR (Laser Imaging Detection and Ranging) device, which is an example of an object recognition device, and Fig. 16 is a schematic diagram of an example of the LiDAR device.

[0108] As shown in FIG. 15, a lidar device 700 is mounted on, for example, an automobile 701, and recognizes an object 702 by optically scanning the object in a target direction and receiving reflected light from the object 702 present in the target direction.

[0109] As shown in FIG. 16, the laser light emitted from the light source device 12 passes through an incident optical system consisting of a collimator lens 703, which is an optical system that converts divergent light into approximately parallel light, and a plane mirror 704, and is scanned in one or two axial directions by a movable device 13 having a reflecting surface 14. Then, the laser light passes through a projection lens 705, which is a projection optical system, and is irradiated onto an object 702 in front of the device. The light source device 12 and the movable device 13 are controlled by the control device 11. The reflected light reflected by the object 702 is optically detected by a photodetector 709. That is, the reflected light passes through a condenser lens 706, which is an incident light detection and light receiving optical system, and is received by an image sensor 707, which outputs a detection signal to a signal processing circuit 708. The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal, and outputs the result to a distance measurement circuit 710.

[0110] The distance measurement circuit 710 recognizes the presence or absence of the target object 702 based on the time difference between when the light source device 12 emits laser light and when the laser light is received by the photodetector 709, or the phase difference between each pixel of the image sensor 707 that receives the light, and further calculates distance information to the target object 702.

[0111] The movable device 13 having the reflective surface 14 is less likely to break than a polygonal mirror and is small, making it possible to provide a small, highly durable radar device. Such a lidar device can be attached to, for example, a vehicle, an aircraft, a ship, a robot, etc., and can optically scan a predetermined range to determine the presence or absence of an obstacle and the distance to the obstacle.

[0112] In the above object recognition device, the lidar device 700 has been described as an example, but the object recognition device may be a device that performs optical scanning by controlling a movable device 13 having a reflective surface 14 with a control device 11, and recognizes the target object 702 by receiving reflected light with a photodetector, and is not limited to the above-mentioned embodiment.

[0113] For example, the technology can be applied to biometric authentication, which calculates object information such as shape from distance information obtained by optically scanning a hand or face, and recognizes the target object by referring to a record; security sensors which recognize intruding objects by optically scanning a target range; and components of 3D scanners which calculate and recognize object information such as shape from distance information obtained by optical scanning, and output it as 3D data.

[0114] By using the movable device according to the embodiment in an object recognition device in this manner, it is possible to provide an object recognition device with high recognition accuracy by suppressing deviation of the movable part in response to acceleration acting on the movable device.

[0115] [Packaging] Next, packaging of the movable device according to the embodiment will be described with reference to Fig. 17. Fig. 17 is a schematic diagram of an example of a packaged movable device.

[0116] 17, the movable device 13 is attached to an attachment member 802 disposed inside a packaging member 801, and is packaged by covering a part of the packaging member 801 with a transparent member 803 and sealing it. Furthermore, an inert gas such as nitrogen is sealed inside the package. This suppresses deterioration of the movable device 13 due to oxidation, and further improves durability against environmental changes such as temperature.

[0117] [Measuring equipment] Next, a measurement device to which the movable device 13 according to the embodiment is applied will be described in detail with reference to Figs. 18 and 19. Here, a three-dimensional measurement device that performs three-dimensional measurement of an object using a pattern projection method is taken as an example of the measurement device. Fig. 18 is a block diagram showing an example of the configuration of the three-dimensional measurement device. Fig. 19 is a diagram showing a state in which a measurement pattern is projected onto an object by the three-dimensional measurement device.

[0118] As shown in FIG. 18, the three-dimensional measuring apparatus 1 includes a measurement information acquisition unit 20 and a control unit 300.

[0119] The measurement information acquisition unit 20 includes a projection device 2 and a camera device 21. The projection device 2 shown in Fig. 1 includes a VCSEL array (Vertical Cavity Surface Emitting Laser Array) 3, an optical system 4, and a movable device 13. By using the VCSEL array 3 as a light source, it is possible to shorten the emission interval and form multiple light-focusing points.

[0120] The measurement information acquisition unit 20, under the control of the control unit 301 of the control unit 300, deflects light from multiple light-emitting elements included in the VCSEL array 3 using the movable device 13 and projects it onto an object in the measurement area. The control unit 301 controls the luminance and lighting timing of each light-emitting element of the VCSEL array 3, thereby projecting projection light 6 of a predetermined measurement pattern onto the entire measurement area including the object 7, as shown in FIG.

[0121] As the measurement pattern, a predetermined projection pattern such as a black and white gray code pattern is projected by controlling the lighting and extinguishing (on / off) of the light emitting elements of the VCSEL array 3. In Fig. 18, the optical system 4 for shaping the light of the VCSEL array 3 into a line shape is provided separately from the light source unit, but it may be included in the light source unit.

[0122] The camera device 21 captures an image of the above-mentioned measurement area at a fixed position and angle so that the projection center 41 of the projection light 6 projected by the projection device 2 onto the object is approximately at the center of the imaging area 40 .

[0123] The camera device 21 has a lens 210, which is a light receiving optical system, and an image sensor 211. As the image sensor 211, for example, a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) image sensor can be used. Light incident on the camera device 21 is imaged on the image sensor 211 via the lens 210 and photoelectrically converted. An image signal generated by photoelectric conversion in the image sensor 211 is supplied to an arithmetic processing unit 302 of the control unit 300.

[0124] The lens 210 may be provided with a narrow-band filter that transmits the emission wavelength of the VCSEL array 3. This makes it possible to suppress the influence of ambient light (light that causes disturbances, such as fluorescent lights) during measurement, enabling accurate measurement. A narrow-band filter may be provided in front of the lens 210. In this case, the same effect can be obtained.

[0125] The control unit 300 controls the projection of the measurement pattern light by the projection device 2 and the imaging by the camera device 21, and performs arithmetic processing such as three-dimensional measurement of the measurement target based on information about the image captured by the camera device 21. The control unit 301 may also control switching of the measurement pattern light projected by the projection device 2 to another pattern light. The control unit 301 may also control output of calibration information used by the arithmetic processing unit 302 to calculate three-dimensional coordinates.

[0126] The arithmetic processing unit 302 of the control unit 300 calculates (measures) three-dimensional coordinates corresponding to the three-dimensional shape of the target object 7 or information related to the three-dimensional coordinates based on the information related to the supplied image. The arithmetic processing unit 302 may output three-dimensional shape information indicating the calculated three-dimensional shape to an external device such as a personal computer device under the control of the control unit 301.

[0127] 18 shows an example in which one set of measurement information acquisition units 20 is provided for the control unit 300, but multiple sets of measurement information acquisition units 20 may be provided for the control unit 300. Also, in the example in FIG. 18, the measurement information acquisition unit 20 and the control unit 300 are provided independently, but part or all of the control unit 300 may be included in the measurement information acquisition unit 20.

[0128] By using the movable device according to the embodiment in a measuring device in this manner, it is possible to provide a measuring device with high measurement accuracy by suppressing deviation of the movable part in response to acceleration acting on the movable device.

[0129] [robot] Next, a robot to which the movable device 13 according to the embodiment is applied will be described in detail with reference to Fig. 20. Fig. 20 is a diagram showing a robot arm of a robot 70 having multiple joints.

[0130] 20, a robot arm 72, which is an articulated arm, includes a hand unit 71 for picking up an object 7, and a three-dimensional measuring device 1 is provided in close proximity to the hand unit 71. The robot arm 72 includes a plurality of bendable joints, and changes the position and posture of the hand unit 71 according to control.

[0131] The three-dimensional measuring device 1 is provided so that the direction of light projection coincides with the direction in which the hand unit 71 faces, and measures the object picked up by the hand unit 71 as the object 7 to be measured.

[0132] The robot 70 can measure the picking target 7 from a close distance using the three-dimensional measuring device 1 provided on the robot arm 72. This improves the measurement accuracy compared to measuring the picking target 7 from a long distance using a camera device or the like. For example, in the field of factory automation in various assembly lines in factories, the robot 70 equipped with the robot arm 72 is used for inspecting and recognizing parts. Providing the three-dimensional measuring device 1 on the robot 70 allows for accurate inspection and recognition of parts.

[0133] Furthermore, when an invalid area exists in the captured image for distance measurement, position and orientation information indicating the position and orientation at which complementary data can be acquired based on the image signal and the three-dimensional shape is fed back to the robot arm 72. This makes it possible to easily control the robot arm 72, and enables more accurate component inspection or recognition based on the measurement results with complementary data.

[0134] Moreover, it is only necessary to change the relative position and orientation of the measuring device and the measurement target. For this reason, although the three-dimensional measuring device 1 is provided on the robot arm 72, the measurement target may be provided on the robot arm 72 and its position and orientation may be changed.

[0135] When the three-dimensional measuring device 1 is mounted on the robot arm 72 and an object to be measured is three-dimensionally measured, a distance of 200 mm from the three-dimensional measuring device 1 is suitable. For this reason, the divergence angle of the emitted light beam of the pattern light (line light) needs to be 21 degrees or more, which is achieved in this embodiment.

[0136] By using the movable device according to the embodiment in a robot in this manner, it is possible to provide a robot whose position and posture can be controlled with high precision by suppressing deviation of the movable part in response to acceleration acting on the movable device.

[0137] Although preferred embodiments have been described above in detail, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the claims.

[0138] For example, in each of the above embodiments, the movable part has a mirror part, but the movable part may have a diffraction grating, a photodiode, a heater (e.g., a heater using SiN), a light source (e.g., a surface-emitting laser), etc. instead of the mirror part. [Explanation of symbols]

[0139] 1. Three-dimensional measuring device 2 Projection device 3. VCSEL Array 4 Optical system 6 Projection light 7. Objects 70 Robot 71 Hand section 72 Robot Arm 10 Optical Scanning System 11 Control device 12, 12b Light source device 13 Mobile Devices 14 Reflective surface 15 Scanned surface 25 Light source driver 26 Mobile Device Driver 30 Control section 31 Drive signal output section 100 Optical deflector (an example of a movable device) 101 Mirror section 102 Mirror Reflective Surface 103 Moving parts 104a, 104b Actuator (an example of a driving unit) 105a, 105b, 105c, 105d Beam section 106a, 106b, 106c, 106d Beam section 107a, 107b Second connection portion 108a, 108b, 108c First connection portion 109a, 109b, 109c First connection part 110b, 110d, 111a, 111c First piezoelectric member 110a, 110c, 111b, 111d second piezoelectric member 130 Silicon Layer 131 Lower electrode 132 Piezoelectric layer 133 Upper electrode 140a, 140b The part of the second connection portion farthest from the rotation axis in the orthogonal direction 141 The part of the movable part farthest from the rotation axis in the perpendicular direction 142 The part of the first connection portion that is farthest from the rotation axis in the perpendicular direction 150 Bond shape 400 Automobile (an example of a moving object, an example of a vehicle) E Rotational axis F Orthogonal direction L1, L2, L3 distance θ angle [Prior art documents] [Patent documents]

[0140] [Patent Document 1] JP 2013-7780 A

Claims

1. A movable part; A drive unit capable of rotating the movable unit around a rotation axis, The drive unit is A plurality of beams; a first connection portion that connects adjacent beam portions; a second connection portion that connects the beam portion and the movable portion, a distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in a direction perpendicular to the rotation axis is longer than a distance between the rotation axis and a portion of the movable portion that is farthest from the rotation axis in the direction perpendicular to the rotation axis; A movable device, characterized in that the position where the second connection portion is connected to the movable portion is on the opposite side to the drive portion from the center of the movable portion in the direction along the rotation axis.

2. A movable part, A drive unit capable of rotating the movable unit around a rotation axis, The drive unit is A plurality of beams; a first connection portion that connects adjacent beam portions; a second connection portion that connects the beam portion and the movable portion, a distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in a direction perpendicular to the rotation axis is longer than a distance between the rotation axis and a portion of the movable portion that is farthest from the rotation axis in the direction perpendicular to the rotation axis; A movable device, characterized in that the combined shape of the movable portion and the second connection portion is a parallelogram in a plan view.

3. A movable part; A drive unit capable of rotating the movable unit around a rotation axis, The drive unit is A plurality of beams; a first connection portion that connects adjacent beam portions; a second connection portion that connects the beam portion and the movable portion, a distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in a direction perpendicular to the rotation axis is longer than a distance between the rotation axis and a portion of the first connection portion that is farthest from the rotation axis in the direction perpendicular to the rotation axis; A movable device, characterized in that the position where the second connection portion is connected to the movable portion is on the opposite side to the drive portion from the center of the movable portion in the direction along the rotation axis.

4. A movable part, A drive unit capable of rotating the movable unit around a rotation axis, The drive unit is A plurality of beams; a first connection portion that connects adjacent beam portions; a second connection portion that connects the beam portion and the movable portion, a distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in a direction perpendicular to the rotation axis is longer than a distance between the rotation axis and a portion of the first connection portion that is farthest from the rotation axis in the direction perpendicular to the rotation axis; A movable device, characterized in that the combined shape of the movable portion and the second connection portion is a parallelogram in a plan view.

5. 5. The movable device according to claim 1, wherein the drive portion is connected to the movable portion in a direction intersecting the rotation axis via the second connection portion.

6. The movable device according to any one of claims 1 to 5, characterized in that the distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in the orthogonal direction is L1, the distance between the rotation axis and a portion of the movable portion that is farthest from the rotation axis in the orthogonal direction is L2, and the distance between the rotation axis and a portion of the first connection portion that is farthest from the rotation axis in the orthogonal direction is L3, satisfies the condition of the following equation (1). L1>L3>L2... (1)

7. The movable device according to any one of claims 1 to 5, characterized in that the distance between the rotation axis and a portion of the second connection portion that is farthest from the rotation axis in the orthogonal direction is L1, the distance between the rotation axis and a portion of the movable portion that is farthest from the rotation axis in the orthogonal direction is L2, and the distance between the rotation axis and a portion of the first connection portion that is farthest from the rotation axis in the orthogonal direction is L3, satisfies the condition of the following equation (2). L1>L2>L3... (2)

8. 8. The movable device according to claim 1, wherein the position at which the second connection portion is connected to the movable portion is closer to the drive portion than the center of the movable portion in the direction along the rotation axis.

9. 8. The movable device according to claim 1, wherein the second connection portion is connected to the movable portion at a center of the movable portion in a direction along the rotation axis.

10. A movable device according to any one of claims 1 to 9; A light source that emits light; Equipped with An image projection device which projects light emitted from the light source by deflecting the light.

11. The light source is provided in plurality, The plurality of light sources emit light of different wavelengths, A combining unit that combines the plurality of light beams emitted from the plurality of light sources is further provided, 11. The image projection device according to claim 10, wherein the light combined in the combining unit is deflected and projected.

12. A head-up display comprising a movable device according to any one of claims 1 to 9.

13. A movable device according to any one of claims 1 to 9; A light source that emits light, An object recognition device comprising: a light source that is deflected, the light is irradiated onto an object, and the reflected light reflected by the object is detected, thereby recognizing the object.

14. A movable device according to any one of claims 1 to 9; A light source that emits light; Equipped with A measuring apparatus comprising: a light source that is deflected; an object is irradiated with the light; and a shape of the object is measured based on the light reflected by the object.

15. A robot comprising the measuring device according to claim 14.

16. A moving object comprising at least one of the head-up display according to claim 12 and the object recognition device according to claim 13.

17. A vehicle comprising at least one of the head-up display according to claim 12 or the object recognition device according to claim 13.

Images