Excitation element

Abstract

An excitation element for generating or measuring mechanical motion is provided, comprising an exciter, a housing for a device under test, and an electrical interface for transmitting excitation or measurement data, which operates reliably at mechanical motions above 1 kHz, in particular above 40 kHz, preferably above 100 kHz up to the order of tens of megahertz, and is capable of "out-of-plane" motion and rotation of the DUT. [Solution] The present invention relates to an excitation element for generating or measuring mechanical motion, comprising an exciter, a receptacle for a device under test (DUT), and an electrical interface for transmitting excitation or measurement data, as well as a method for manufacturing such an excitation element, the object of which is to reliably measure or excite mechanical motions above 100 kHz up to several megahertz, and to enable "out-of-plane" and "in-plane" motions or rotations of the DUT. This object is achieved by using as the exciter a known plate-shaped piezoelectric composite having a first surface extending transversely to the plate thickness, a second surface extending parallel to the first surface and spaced apart by the plate thickness, and a rod-shaped piezoelectric element extending between the first and second surfaces.

Description

[Technical field]

[0001] The invention relates to an excitation element for generating mechanical movement, which comprises an exciter, a receptacle for a test object and an electrical interface for transmitting excitation or measurement data.

[0002] The present invention also relates to a method for manufacturing such an excitation element. [Background technology]

[0003] For functional testing, characterization or calibration of sensors, in particular vibration sensors, it is known to subject the sensor, via an exciter, to controlled and defined vibration conditions, whereupon the response of the sensor as a device under test (DUT) can be measured, from which statements about its functionality can be made or values ​​for the calibration of the sensor can be derived.

[0004] Calibration is defined as the comparative measurement of a DUT measurand against a national standard, where the deviation of the DUT measurand from the correct value of the measurand is determined and recorded.

[0005] Functional examination or testing is understood as measurements performed in the various phases of a product (development, validation, operation) to investigate the behavior of the DUT with respect to the measurand beyond the scope of calibration.

[0006] Characterization is defined as measurements that not only excite the DUT with the measurand, but also systematically examine the behavior of the DUT to interferences that may occur during its life cycle.

[0007] For the calibration of sensors, an exciter named SE-09 by the applicant is known, which can generate clean translational vibrations for calibration in the frequency range up to 20 kHz. The excitation of the vibrations is carried out via a purely electrodynamic exciter, which is excited via an electrodynamic system arranged in a housing. A base plate serves as a counterweight for the vibration system. The DUT is fixed to the exciter. A disadvantage here is that the vibration frequency is limited to 20 kHz. For functional testing and characterization of the DUT, the exciter can be used up to 50 kHz.

[0008] An exciter provided by the applicant itself is known, designated SE-16. It is illustrated in FIG. 0.1. The excitation of the vibrations is performed here via a purely electrodynamic exciter 0.1, which is excited via an electrodynamic system arranged in a housing 0.2. A base plate 0.3 is the counterweight of the vibration system. The DUT is fixed to the exciter 0.1. Disadvantages here include that the vibration frequency is in principle limited to 100 kHz. Also, clean translational vibrations cannot be generated.

[0009] As shown in FIG. 0.2, a vibration control system named VCS401-Piezo, which includes a piezoelectric exciter, is known from the applicant. This vibration control system uses a piezoelectric vibrator 1, as shown in FIG. 1. The piezoelectric vibrator 1 is disposed between a connecting body 0.4 and a counterweight 0.5. The vibrator 0.4 is provided with a DUT housing for housing a test object 0.6 (sensor). The DUT housing is included in the connecting body, and here consists of two M6 female screws.

[0010] deathHowever, this is only one variation of the embodiment: the piezoelectric vibrator consists of a piezo driver and two vibrating masses, forming a free double vibrator. One of the masses only functions as a counterweight (0.5), the other mass (0.4) functions as a coupling, where the DUT can be attached.

[0011] This piezoelectric vibrator 1 consists of a stack of individual piezoelectric vibration plates 1a with a square, rectangular or circular (as shown) base and thickness d, similar to commercially available piezoelectric vibrators, for example the piezosystems Jena piezo shaker (100 kHz, 5 μm, 100 N) (see https: / / www.piezosystem.com / products / piezocomposite / products / shaker / ). Such a stack of piezoelectric vibration plates 1a provides good translational motion and only a small occurrence of in-plane modes. However, this vibrator cannot generate vibration frequencies above 100 kHz, with an upper limit of 40 kHz stated in the data sheet. Here too, vibrations above 40 kHz can be generated. However, they are no longer purely translational and therefore not fully controllable.

[0012] The increasing use of sensors and actuators in many applications made possible by miniaturized designs, especially in microsystems, so-called MEMS (Micro Electromechanical Systems), now requires testing, characterization and / or calibration of MEMS sensors, but MEMS actuators, i.e. the components that actively generate motion, also require testing, characterization and calibration.

[0013] On the other hand, the known exciters have the disadvantage that, even if the physical limits are utilized as much as possible, the frequency range is limited, making it impossible to measure MEMS at high frequencies, e.g. from 100 kHz to 3 MHz. Furthermore, the movement of the DUT 3 is only possible in the out-of-plane direction 5. Movements in the in-plane direction 10, i.e. with the axis of movement 11 extending in the horizontal xy direction as indicated by the arrows x, y, z in the figure, and rotational movements around this axis of movement are not possible. For clarity of correspondence, the notation "out-of-plane" means the Z direction and "in-plane" means the xy direction. The coordinate axes are shown in the figure.

[0014] Piezo plates with nominal frequencies above 2 MHz are commercially available, for example from PI Ceramic GmbH (10 Lindenstrasse, 07589 Lederhose). One problem is that in-plane modes occur over the entire frequency range, which can lead to uncontrollable out-of-plane motions.

[0015] A disadvantage of an individual piezoelectric vibrating plate 1a as shown in FIG. 1 is that during the longitudinal excitation dz, strong transverse excitations dxy also occur, leading to uncontrollable plate motion. As already mentioned, a stack of piezoelectric vibrating plates 1a provides good translational motion, with only a few in-plane modes. However, even this vibrator does not allow vibration frequencies above a few kHz up to a few megahertz. A uniform translation in the "out-of-plane" direction 5 is only possible in a selected frequency range, while "in-plane" motions do occur as mentioned above, but only as a secondary or coupling effect of the out-of-plane motion, and therefore cannot be excited in a controlled manner. Rotation of the DUT attached to the piezoelectric vibrator or of the DUT itself is not possible at all.

[0016] From acoustics, in particular from acoustic measurement technology, acoustic signal generators in the form of a piezoelectric composite 12 are known and are illustrated, for example, in FIGS. 3 to 5. This is also plate-like as explained with reference to FIG. 1, but is divided into n piezoelectric elements 13 which are connected to one another by a matrix 14. The advantage over a standard piezo plate, as in the piezoelectric vibrator 1, is that there are significantly less pronounced transverse excitations dxy. However, the application of an acoustic sound source as a piezoelectric vibrator 1 in a measurement or calibration device 2 is not known. [Prior art documents] [Non-patent literature]

[0017] [Non-Patent Document 1] piezosystems Jena(100kHz,5μm, 100N), https: / / www.piezosystem.com / products / piezocomposite / products / shaker / Summary of the Invention [Problem to be solved by the invention]

[0018] The object of the present invention is to provide an excitation element for generating or measuring mechanical movements, comprising an exciter, a receptacle for a device under test and an electrical interface for transmitting excitation or measurement data, which operates reliably at mechanical movements above 1 kHz, in particular above 40 kHz, preferably above 100 kHz up to the order of several tens of megahertz, and which allows "out-of-plane" movements and rotations of the DUT. [Means for solving the problem]

[0019] On the device side, this problem is solved by using as an exciter a piezoelectric vibrator in the form of a known piezoelectric vibrating plate or a piezoelectric composite having a first surface extending transversely to the plate thickness direction, a second surface extending parallel to the first surface at a distance of the plate thickness, and a rod-shaped piezoelectric element extending between the first and second surfaces, the exciter having a first contact surface on its first surface and a second contact surface on its second surface, which contact surfaces are controllable, the exciter being designed to accommodate the test object on its second surface.

[0020] With such a device it is now basically possible for the first time to reliably generate mechanical movements in the frequency range from above 1 kHz, in particular above 40 kHz, preferably above 100 kHz up to the order of several tens of megahertz.

[0021] In one embodiment of the present invention, a plate-shaped piezoelectric composite known per se is used as an exciter having a first surface extending transversely to the plate thickness direction, a second surface extending parallel to the first surface at a distance of the plate thickness, and rod-shaped piezoelectric elements extending between the first and second surfaces, the exciter being divided into segments of piezoelectric elements configured to be excitable separately.

[0022] In addition to the significantly fewer transverse excitations dxy, customer-specific partition configurations are possible, among other things.

[0023] For excitation of individual partitions, targeted control of individual partitions, suppression of plate modes and / or rotational excitation by phase shift between the partitions, the exciter comprises a first segmented contact surface on its first side and a second segmented contact surface on its second side, which contact surfaces are controllable separately for each segment and from each other via the interface. The exciter is configured to receive a test object on its second side.

[0024] To create the partitions, both contact surfaces are segmented into strips, each strip having the same width.

[0025] When implementing strip-shaped partitions, the strip-shaped contact pieces of both contact surfaces can be oriented in the same horizontal direction, i.e. in the x or y direction.

[0026] However, it is also possible to create an island-shaped partition, in which case the strip-shaped contact piece of the first contact surface faces in a horizontal first direction, i.e., in the x-direction, and the strip-shaped contact piece of the second contact surface faces in a horizontal second direction perpendicular to the first direction, i.e., in the y-direction. In this case, when the intersection plane of the strip-shaped contact pieces of the first and second contact surfaces is projected in the vertical z-direction, it forms an island-shaped partition.

[0027] For the arrangement in which the test object can be accommodated on the second surface of the exciter, a segmented coupling plate is preferably provided on the second contact surface of the exciter, the segmentation of the coupling plate corresponding to the partitions of the exciter, i.e. the segmentation is performed in such a way that the partitions formed by the intersection planes of the contact strips of the first and second contact surfaces in the vertical z-projection coincide with the segments, so that the movements of the segments or the movements of the partitions, respectively, are transmitted.

[0028] In one embodiment of the excitation element, the connection plate is segmented into strip-shaped first connection plate segments, the width and orientation of which correspond to the strip-shaped contact strips of the second contact surface, and the first connection plate segments are oriented in the y direction and in the vertical z direction are above the strip-shaped contact strips of the second contact surface. In this way strip-shaped partitions are generated. They can be excited individually by applying a voltage to the respective strip-shaped contact strips facing each other in the Z projection. All translational movements in the Z direction of the individual partitions are thus possible individually. This allows for example translational and wave-like movements of the entire excitation element to be realized. Moreover, by controlling adjacent partitions or groups of adjacent partitions with a 180° phase shift, it is possible for the first time to realize a rotation of the DUT around a rotation axis extending in a plane extending in the xy direction.

[0029] In a further embodiment of the excitation element according to the invention, the connecting plate can be additionally segmented into strips extending in the x-direction to form square second connecting plate segments which, in the vertical z-direction, lie on the intersection plane of the contact strips of the first and second contact surfaces, as seen in the vertical z-direction, when the contact strips of the first and second contact surfaces are perpendicular to each other. In this way, island-like partitions are realized. Contact strips which intersect each other in the projection can be contacted individually. In this case, when a voltage is applied, the piezoelectric elements in the intersection area of ​​the respective contact strips are excited. However, it is also possible to excite entire strips or groups as described above.

[0030] In a preferred embodiment, the first or second connecting plate segments, respectively, are mechanically connected adjacent to one another by a connecting means, which may be embodied as follows: -Weakening of the structure in that area and the associated loss of rigidity -Filling material with a lower elastic modulus than the connecting plate segments.

[0031] This allows the connecting plate segments to move independently of each other, at least in the frequency range of interest herein.

[0032] The connection means can be made of epoxy, silicone or other plastics, materials that provide mechanical decoupling of the coupling plate segments in the frequency domain.

[0033] One challenge is mechanical decoupling, another is keeping the segments of the connecting plate held together tightly enough during manufacturing.

[0034] The connecting means provide a smooth surface for the coupling plate, onto which the DUT can be placed, preferably glued, whereby a particularly easily reversible adhesive can be used which does not remain on the DUT and can be removed without damaging it, so that the DUT and the exciter can be used in the future.

[0035] It should be emphasized that the excitation elements described herein relate to the mechanical coupling between the DUT and the excitation element, which corresponds to the practical intended use of the piezoelectric composite, and not to the acoustic coupling.

[0036] In order to ensure a better connection between the DUT and the coupling plate, as well as to realize the vibration system in the form of a free double oscillator, the exciter is connected at its first contact surface to a counterweight, where the coupling plate element on one surface acts as one mass of the vibration system and the counterweight on the other surface acts as the second mass of the vibration system.

[0037] For further embodiments and to realize the individual dual transducers in a dual transducer array, the counterweight can be configured as a counterweight plate, which counterweight plate can be a counterweight segment structured corresponding to the connecting plate, the thickness of the counterweight plate being possible to be different from the thickness of the connecting plate. It is also conceivable to fix the DUT on the first surface as well.

[0038] In a further embodiment, the excitation element is fixed to a second exciter, which can be, for example, an electrodynamic exciter as known from the prior art, for example the applicant's SE-16, thereby making it possible to cover the lower frequency range in which the second exciter is operable, and to cover the higher frequencies above the reliable operating range of the second exciter with the excitation element according to the invention.

[0039] The object of the invention is also achieved by a method for producing an excitation element, in which a cut is made in the connecting plate from the second or first side at a distance and direction corresponding to the distance and direction of the connecting plate segment, but the cut does not reach the other second or first side, respectively, but only a certain distance towards the opposite first or second side, and the cut is then filled with a connecting means. To separate the connecting plate elements, the connecting plate is removed from the respective opposite first or second side until the cut is reached.

[0040] The connecting plate can be connected to the exciter, for example by gluing, such that a number of excitation elements, in particular one or more piezo segments, are connected facing each other to one connecting plate segment, which are thereby responsible for exciting the DUT in the area of ​​the connecting plate element or for detecting the movement of the DUT in the area of ​​the respective connecting plate element.

[0041] To generate the vibration system, an exciter is connected to a counterweight plate, which is also configured as a coupling plate, resulting in individual small dual oscillators of the size of the partitions, which can be individually controlled according to the invention, so that different forms of motion of the DUT can be generated, such as translational and / or rotational motions, especially tilting and / or wave-like motions.

[0042] In particular, rotational movements about rotation axes extending in the in-plane direction can also be generated, for example when adjacent partitions are controlled in opposite directions.

[0043] The present invention will now be described in more detail with reference to an embodiment. [Brief description of the drawings]

[0044] [Figure 0.1] FIG. 2 is a diagram of Applicant's exciter SE-16. [Figure 0.2] FIG. 1 is a diagram of a piezo exciter that is part of the applicant's vibration control system (VCS401--piezo vibration control system). [Figure 1] 1A-1D are diagrams of standard piezoelectric vibrators of various configurations and their vibration behavior. [Diagram 2] 1 is a diagram of the principle structure of a measuring or calibration device according to the invention; [Diagram 3] 1A and 1B are perspective and cross-sectional views of a piezoelectric composite. [Figure 4] FIG. 2 is a partially enlarged perspective view of a piezoelectric composite. [Diagram 5] FIG. 1 is a diagram of a piezoelectric composite with contact strips. [Figure 6] FIG. 1 is a perspective view of a piezoelectric composite with a DUT placed on top. [Figure 7] 7 is a cross-sectional view of the piezoelectric composite of FIG. 6 with a DUT placed thereon and a voltage applied for translational excitation. [Figure 8]FIG. 7 is a cross-sectional view of the piezoelectric composite of FIG. 6 with a DUT placed thereon and a voltage applied for rotational excitation. [Figure 9] FIG. 13 is a perspective view of a piezoelectric composite having a band-shaped connecting plate and a DUT disposed on a second surface thereof. [Figure 10] FIG. 2 is a side view of a piezoelectric composite having contact strips on a first surface in the y direction and contact strips on a second surface in the y direction. [Figure 11] FIG. 13 is a top view of a piezoelectric composite having strip-shaped contact pieces provided on the second surface in the x-direction. [Figure 12] FIG. 13 is a top view of a piezoelectric composite having strip-shaped contact pieces provided on a first surface in the y direction. [Figure 13] FIG. 13 is a top view of a piezoelectric composite with contact strips and a structured counterweight plate in the y-direction on a first side. [Figure 14] FIG. 13 is a top view of a piezoelectric composite with contact strips and a structured weight plate in the x-direction on the second surface. [Figure 15] FIG. 2 is a top view of an excitation element having a DUT provided on a second surface. [Figure 16] FIG. 1 illustrates a cross-sectional view of a piezoelectric composite comprising a structured weight plate, a structured counterweight plate, and a DUT. [Figure 17] FIG. 17 is a perspective view of the piezoelectric composite of FIG. 16. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0045] 2 shows the principle arrangement of a DUT 3 on a measurement and calibration setup 2. The object to be tested is a device under test (DUT = Device Under Test) 3, which is placed on a vibrator 4, which mechanically moves the DUT in the vertical or "out of plane" direction 5. The vibrator 4 is connected to a counterweight 6, which can be elastically or rigidly connected to a base weight 7.

[0046] Such a DUT 3 consists of one or more motion elements 8 in the form of MEMS that can be configured as sensors or actuators, and control electronics arranged on a carrier 9 (in the form of a printed circuit board (PCB) or chip). The sensors can be for example inertial sensors (acceleration sensors, rotation sensors) and the actuators can be for example optical actuators (for example mirror actuators), fluidic actuators (for example valves or pumps) or acoustic actuators (for example sound generators).

[0047] The microsystem consists of a motion element 8 in the form of a MEMS and a carrier 9 in the form of a PCB, which is arranged on an excitation element 4. According to the prior art, the excitation element is formed as an oscillator capable of oscillating the microsystem 3 as DUT in a translational manner, whereby the reaction of the DUT 3 to said oscillations is measured. Measurements of the behavior of the DUT 3, i.e. when the DUT 3 includes an actuator as motion element 8, are not known with such an arrangement.

[0048] The basic idea of ​​the invention is to use a piezoelectric composite 12 known per se and illustrated in Figures 3 and 4 as an exciter in an excitation element 4 of Figure 2 for generating or measuring mechanical motion, said piezoelectric composite 12 having a first surface 15, a second surface 16 spaced apart from the first surface 15 by a thickness d, and a rod-shaped piezoelectric element 13 extending between the first surface 15 and the second surface 16.

[0049] As shown in FIG. 5, the piezoelectric composite 12 has a segmented first contact surface 17 on its first side 15 and a segmented second contact surface 18 on its second side 16, the contact surfaces 17 and 18 being separately controllable from each other on a segment-by-segment basis via an interface formed by contacts 31, as shown in FIGS. 10 to 12.

[0050] Both contact surfaces 17, 18 are each segmented into strips, into a strip-shaped contact piece 19 on the first contact surface 17 and a strip-shaped contact piece 20 on the second contact surface 18, and it is preferred that the widths of the strip-shaped contact pieces 19, 20 are the same, although this is not necessarily the case.

[0051] Here, there are two possible orientations for the contact strips 19 and 20.

[0052] 6, the piezoelectric element 13 with the contact surfaces 17, 18 may be provided with a DUT 3, preferably a PCB with MEMS. In this embodiment, the DUT 3 includes four MEMS 21 arranged on a PCB 22.

[0053] The contact strips 19, 20 of both contact surfaces 17, 18 may be oriented in the same horizontal direction, i.e. in the x or y direction.

[0054] In FIG. 7 it is shown that by applying the same voltage to the first contact surface 17 and a voltage of opposite polarity to the second contact surface 18 a translational motion 23 can be produced.

[0055] In FIG. 8 it is shown that by applying different voltages to the first contact surface 17 and different voltages, also of different polarity, to the second contact surface 18 a rotary motion 24 can be produced.

[0056] As shown in FIG. 9, the piezoelectric composite 12 includes a segmented coupling plate 25 on the second contact surface 18 as an embodiment of an exciter.

[0057] This segmented connection plate 25 provides a housing for the DUT 3 .

[0058] The connecting plate 25 is segmented into strip-shaped first connecting plate segments 26, the width and orientation of which correspond to those of the strip-shaped contact pieces of the second contact surface 18, the first connecting plate segments 26 facing in the y direction and above the strip-shaped contact pieces of the second contact surface 18 in the vertical z direction.

[0059] A first surface of the piezoelectric composite 12 is connected to a counterweight 27 .

[0060] In another embodiment, as shown in Figures 10 to 12, the contact strips can be oriented in a horizontal first direction, i.e. the x-direction, on the first contact surface 17 and in a horizontal second direction, i.e. the y-direction, perpendicular to the first direction, on the second contact surface 18. In the figures, the contacts 31 are only shown diagrammatically. Usually, all the contact strips 19, 20 are provided with contacts 31. Although not shown, the contact strips can also be in an oblique embodiment or in the form of rings or other shapes.

[0061] 7 and 8, by applying a voltage, the piezoelectric element 13 can be excited or measured in a targeted manner in the region where the strip-shaped contact pieces 19 and 20 intersect, respectively.

[0062] Additionally, the connecting plate 25 can be segmented into strips extending in the x-direction to form a square second connecting plate segment 28 which, in the vertical z-direction, is located on the plane where the strip-shaped contact pieces 19 and 20 of the first and second contact surfaces 17 and 18 intersect when the strip-shaped contact pieces 19 and 20 of the first and second contact surfaces 17 and 18 are oriented perpendicular to each other, when viewed in projection in the vertical z-direction.

[0063] The first or second connecting plate segments 26, 28 are mechanically connected adjacent to each other by connecting means, the elastic modulus of the connecting means being smaller than the elastic modulus of the connecting plate segments. The connecting means can be made of epoxy or silicone. Furthermore, decoupling can be achieved by suitable shapes, for example thin webs as shown in FIG. 9 at 26.

[0064] As shown in FIGS. 13 and 17, the counterweight 27 is formed as a segmented counterweight plate 29 which is structured correspondingly to the connecting plate 25 into counterweight segments 30 .

[0065] This is achieved by making cuts in the connecting plate 25 and / or counterweight plate 29 from its first or second face at intervals and orientations corresponding to the intervals and orientations of the connecting plate segments 26 or counterweight elements 30, respectively, where the cuts do not reach the other second or first face, respectively, but only reach a certain distance towards the opposite first or second face, and then filling the cuts with the connecting means and removing the connecting plate 25 or counterweight plate 29 on the opposite first or second face, respectively, until the cuts are reached. This application relates to the invention described in the claims, but also includes the following as other aspects. 1. An excitation element for generating mechanical movements, comprising an exciter and a receptacle for a test object, as well as an electrical interface for transmitting excitation or measurement data, said element comprising: A piezoelectric vibrator (1) is used in the form of a piezoelectric vibrating plate (1a) known per se or a piezoelectric composite (12) having a first surface (15) extending transversely to the direction of the plate thickness (d), a second surface extending parallel to the first surface at a distance of the plate thickness (d), and a piezoelectric element between the first surface and the second surface, said exciter having a first contact surface (17) on its first face (15) and a second contact surface (18) on its second face (16), said contact surfaces (17; 18) being controllable; the exciter being adapted to receive a device under test (3) on its second surface (16); An excitation element comprising: 2. 1. The excitation element according to claim 1, characterized in that a plate-shaped piezoelectric composite (12) known per se is used as an exciter, having a first surface (15) extending transversely to the direction of the plate thickness (d), a second surface (16) extending parallel to the first surface (15) at a distance of the plate thickness (d), and rod-shaped piezoelectric elements (13) extending between the first surface (15) and the second surface (16), the exciter being divided into segments consisting of piezoelectric elements (13) configured to be excitable separately. 3. 3. The excitation element according to claim 2, characterized in that the exciter comprises a segmented first contact surface (17) on its first side (15) and a segmented second contact surface (18) on its second side (16), the contact surfaces (17; 18) being controllable segment by segment and separately from each other via an interface. 4. 4. An excitation element according to any one of claims 1 to 3, characterized in that both contact surfaces (17; 18) are segmented in strips, each strip-shaped contact piece (19; 20) having the same width. 5. 5. An excitation element according to any one of claims 1 to 4, characterized in that the contact strips (19; 20) of both contact surfaces (17; 18) are oriented in the same horizontal direction, i.e. in the x or y direction. 6. An excitation element described in any one of claims 1 to 4, characterized in that the strip-shaped contact piece (19) on the first contact surface (17) is oriented in a first horizontal direction, i.e., the x-direction, and the strip-shaped contact piece (20) on the second contact surface (18) is oriented in a second horizontal direction, i.e., the y-direction, perpendicular to the first direction. 7. 7. An excitation element according to any one of claims 1 to 6, characterized in that the exciter is provided with a segmented connecting plate (25) on the second contact surface (17). 8. The excitation element described in claim 7, characterized in that the connecting plate (25) is segmented into a strip-shaped first connecting plate segment (26), whose width and orientation correspond to the strip-shaped contact piece (20) of the second contact surface (18), and the first connecting plate segment faces in the y direction and is located above the strip-shaped contact piece (20) of the second contact surface (18) in the vertical z direction. 9. 9. The excitation element according to claim 8, characterized in that the connecting plate (25) is additionally segmented into strips extending in the x-direction to form square second connecting plate segments (28), which, in the vertical z-direction, are located on the intersection plane of the contact strips (19; 20) of the first and second contact surfaces (17; 18) when the contact strips (19; 20) of the first and second contact surfaces (17; 18) are perpendicular to each other, as viewed in projection in the vertical z-direction. 10. 10. An excitation element as described in any one of claims 7 to 9, characterized in that the first connecting plate segment (26) or the second connecting plate segment (28), respectively, are mechanically connected to each other in an adjacent state by a connecting means, wherein the elastic modulus of the connecting means is smaller than the elastic modulus of the connecting plate segments (26; 28). 11. 11. An excitation element as described in claim 10, characterized in that the connecting means is made of epoxy resin, silicone or other plastic. 12. 12. An excitation element according to any one of claims 1 to 11, characterized in that the exciter is connected at its first face (15) to a counterweight (6). 13. 13. The excitation element according to claim 12, characterized in that the counterweight (6; 27) is formed as a counterweight plate (29), which is structured into counterweight segments (30) corresponding to the connecting plate (25). 14. 14. An excitation element according to any one of claims 1 to 13, characterized in that the excitation element is attached to a second exciter (0.1). 15. 15. A method for manufacturing an excitation element according to any one of claims 1 to 14, characterized in that the connecting plate (25) is provided with an incision from its second face (16) or first face (15) at a distance and orientation corresponding to the distance and orientation of the connecting plate segments (26; 28), which incision does not, however, reach the other second face (16) or first face (15), respectively, but only reaches a certain distance towards the opposite first face (15) or second face (16), and that the incision is filled with the connecting means and the connecting plate (25) is removed in the opposite first face (15) or second face (16), respectively, until the incision is reached. 16 16. The method according to claim 15, characterized in that the connecting plate (25) is connected to the exciter in such a way that a plurality of excitation elements (13) face one connecting plate segment (26; 28). 17. 17. The method according to any one of claims 15 to 16, characterized in that the exciter is connected to a counterweight plate (29), the counterweight plate (29) being structured in the manner of a connecting plate (25). [Explanation of symbols]

[0066] 0.1 exciter 0.2 Housing 0.3 Base plate 0.4 Vibrator 0.5 Counterweight 0.6 DUT housing section 1 Piezoelectric vibrator 1a Piezoelectric vibration plate 2. Measuring or Calibrating Equipment 3 Microsystem, DUT 4 Excitation element, vibrator 5 "Out-of-plane" direction 6 Counterweight 7 Base Weight 8 Motion elements, MEMS 9 Carrier, PCB 10 “In-plane” motion 11 Motion axis 12 Piezoelectric Composite 13 Piezoelectric element 14. Matrix 15 Page 1 16 Side 2 17 Segmented first contact surface on first surface 18 Segmented second contact surface on second surface 19 Strip-shaped contact piece on the first contact surface 20 Strip-shaped contact piece on the second contact surface twenty one MEMS 22 PCB 23 Translational motion 24 Rotational Motion 25 Segmented connecting plate 26 Band-shaped first connecting plate segment 27 Counterweight 28 Square 2nd Connecting Plate Segment 29 Segmented counterweight plate 30 Counterweight Segment 31 Contacts

Claims

1. 1. An excitation element for generating mechanical movements, comprising an exciter and a receptacle for a test object, as well as an electrical interface for transmitting excitation or measurement data, said element comprising: A piezoelectric vibrator (1) is used in the form of a piezoelectric vibrating plate (1a) known per se or a piezoelectric composite (12) having a first surface (15) extending transversely to the direction of the plate thickness (d), a second surface extending parallel to the first surface at a distance of the plate thickness (d), and a piezoelectric element between the first and second surfaces, said exciter comprising a first contact surface (17) on its first face (15) and a second contact surface (18) on its second face (16), said contact surfaces (17; 18) being controllable; the exciter being adapted to receive a device under test (3) on its second face (16); An excitation element comprising:

2. 2. The excitation element according to claim 1, characterized in that a plate-shaped piezoelectric composite (12) known per se is used as an exciter having a first surface (15) extending transversely to the direction of the plate thickness (d), a second surface (16) extending parallel to the first surface (15) at a distance of the plate thickness (d), and rod-shaped piezoelectric elements (13) extending between the first surface (15) and the second surface (16), the exciter being divided into segments consisting of piezoelectric elements (13) that are configured to be excitable separately.

3. 3. An excitation element according to claim 2, characterized in that the exciter comprises a segmented first contact surface (17) on its first side (15) and a segmented second contact surface (18) on its second side (16), the contact surfaces (17; 18) being controllable segment by segment and separately from each other via an interface.

4. 4. An excitation element according to claim 1, characterized in that both contact surfaces (17; 18) are segmented in strips, each strip contact (19; 20) having the same width.

5. 5. An excitation element according to claim 1, characterized in that the contact strips (19; 20) of both contact surfaces (17; 18) are oriented in the same horizontal direction, i.e. in the x or y direction.

6. 5. An excitation element as claimed in claim 1, characterized in that the contact strips (19) on the first contact surface (17) are oriented in a first horizontal direction, i.e. the x-direction, and the contact strips (20) on the second contact surface (18) are oriented in a second horizontal direction, i.e. the y-direction, perpendicular to the first direction.

7. 7. An excitation element according to any one of the preceding claims, characterized in that the exciter is provided with a segmented connecting plate (25) on the second contact surface (17).

8. 8. The excitation element according to claim 7, characterized in that the connecting plate (25) is segmented into strip-shaped first connecting plate segments (26), the width and orientation of which correspond to the strip-shaped contact pieces (20) of the second contact surface (18), the first connecting plate segments being oriented in the y-direction and located above the strip-shaped contact pieces (20) of the second contact surface (18) in the vertical z-direction.

9. 9. The excitation element according to claim 8, characterized in that the connecting plate (25) is additionally segmented into strips extending in the x-direction to form square second connecting plate segments (28) which, in the vertical z-direction, lie on the intersection plane of the contact strips (19; 20) of the first and second contact surfaces (17; 18) when viewed in projection in the vertical z-direction, if the contact strips (19; 20) of the first and second contact surfaces (17; 18) are perpendicular to one another.

10. 10. An excitation element as claimed in claim 8 or 9, characterized in that the first connecting plate segment (26) or the second connecting plate segment (28), respectively, are mechanically connected adjacent to each other by a connecting means, wherein the elastic modulus of the connecting means is smaller than the elastic modulus of the connecting plate segments (26; 28).

11. 11. An excitation element according to claim 10, characterized in that the connection means consist of epoxy, silicone or other plastic.

12. 12. An excitation element according to any one of claims 7 to 11, characterized in that the exciter is connected at its first face (15) to a counterweight (6).

13. 13. The excitation element according to claim 12, characterized in that the counterweight (6; 27) is formed as a counterweight plate (29), which is structured into counterweight segments (30) corresponding to the connecting plate (25).

14. 14. An excitation element according to any one of the preceding claims, characterized in that it is attached to a second exciter (0.1).

15. 15. A method for manufacturing an excitation element according to any one of claims 1 to 14, characterized in that the connecting plate (25) is cut from its second face (16) or first face (15) at a distance and orientation corresponding to the distance and orientation of the connecting plate segments (26; 28), but the cut does not reach the other second face (16) or first face (15), respectively, but only up to a distance towards the opposite first face (15) or second face (16), and that the cut is filled with a connecting means and the connecting plate (25) is removed until the cut is reached in the opposite first face (15) or second face (16), respectively.

16. 16. The method according to claim 15, characterized in that the connecting plate (25) is connected to the exciter in such a way that a number of excitation elements (13) face one connecting plate segment (26; 28).

17. 17. The method according to claim 15, characterized in that the exciter is connected to a counterweight plate (29), the counterweight plate (29) being structured in the manner of a connecting plate (25).

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