Semiconductor device and its manufacturing method

Abstract

To provide a semiconductor device with variations in resistance values of a plurality of resistance elements being reduced, despite with an outer peripheral part which is not used for circuits being also reduced.SOLUTION: A semiconductor device MCP1 comprises: an inter-layer insulating layer INI1; a plurality of resistor layers LR disposed in contact with a top face of the inter-layer insulating layer; and a wiring layer LM1 which is disposed at least either above or below the plurality of resistor layers so as to overlap the plurality of resistor layers in a planar view. The plurality of resistor layers include a first resistor layer LR1 and a second resistor layer LR2 of which the width in a first direction X is narrower than that of the first resistor layer. The wiring layer includes a first overlap region OVL2 overlapping the first resistor layer in the planar view and a second overlap region OVL2 overlapping the second resistor layer in the planar view. A value obtained by dividing a total value of areas of the second overlap regions with the width of the second resistor layer in the first direction is smaller than a value obtained by dividing a total value of areas of the first overlap regions with the width of the first resistor layer in the first direction.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor device and a manufacturing method thereof. [Background technology]

[0002] In a semiconductor device having a plurality of resistive elements, when there are regions where patterns such as wiring are densely formed and regions where the patterns are sparsely formed, the width of the wiring in the sparsely formed region is narrower than the width of the wiring in the densely formed region. This is known as the microloading effect. The microloading effect causes variation in the resistance value of each resistive element.

[0003] Japanese Patent Laid-Open Publication No. 9-311432 (Patent Document 1) discloses a semiconductor device in which a dummy pattern having a pattern width similar to that of the actual pattern is formed in the outer periphery where no pattern (actual pattern) constituting the circuit is formed. In this semiconductor device, the difference in density of the pattern is reduced compared to a semiconductor device in which no dummy pattern is formed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 9-311432 Summary of the Invention [Problem to be solved by the invention]

[0005] In a semiconductor device having a high-precision analog circuit, there is a demand for further reduction in the variation in the resistance value of each of the multiple resistor elements constituting the high-precision analog circuit. For example, in a semiconductor device having a digital-to-analog converter (DAC), there is a demand for the variation in the resistance value of each of the multiple resistor elements to be less than 0.2% with respect to the center value.

[0006] The present inventors have confirmed that in the semiconductor device described in Patent Document 1, unless a dummy pattern is formed and a sufficiently wide outer periphery that is not used in the circuit is provided, the variation in the resistance value of each of the multiple resistive elements in the actual pattern will be greater than 0.2% relative to the central value.

[0007] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0008] The semiconductor device according to the present disclosure includes an interlayer insulating layer, a plurality of resistive layers each disposed in contact with an upper surface of the interlayer insulating layer, and a wiring layer disposed above or below the plurality of resistive layers so as to overlap the plurality of resistive layers in a plan view. The plurality of resistive layers include a first resistive layer and a second resistive layer having a width in a first direction narrower than that of the first resistive layer. The wiring layer includes a first overlapping region overlapping the first resistive layer in a plan view and a second overlapping region overlapping the second resistive layer in a plan view. A value obtained by dividing a total area of ​​the second overlapping region by a width of the second resistive layer in the first direction is smaller than a value obtained by dividing a total area of ​​the first overlapping region by a width of the first resistive layer in the first direction. Effect of the Invention

[0009] According to the present disclosure, it is possible to provide a semiconductor device in which the variation in the resistance value of each of a plurality of resistive elements is reduced while reducing the peripheral portion unused in the circuit. [Brief description of the drawings]

[0010] [Figure 1] 1 is a plan view showing a first region and a second region of a semiconductor device according to a first embodiment. [Diagram 2] 1 is a plan view showing a plurality of resistance layers and wiring layers of the semiconductor device according to the first embodiment. [Diagram 3] FIG. 3 is a cross-sectional view taken along the line of arrows III-III in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. [Diagram 5] 3 is a cross-sectional view taken along the line VV in FIG. 2. [Figure 6] 6 is a cross-sectional view taken along the line VI-VI in FIG. 2. [Figure 7] 4 is a flowchart of a method for manufacturing a semiconductor device according to the first embodiment. [Figure 8] 1 is a cross-sectional view illustrating a first step in a method for manufacturing a semiconductor device according to a first embodiment. [Figure 9] 9 is a cross-sectional view illustrating a second step after the first step shown in FIG. 8 in the method for manufacturing the semiconductor device according to the first embodiment. [Figure 10] 10 is a cross-sectional view illustrating a third step after the second step shown in FIG. 9 in the method for manufacturing the semiconductor device according to the first embodiment. [Figure 11] 11 is a cross-sectional view illustrating a fourth step after the third step shown in FIG. 10 in the method for manufacturing the semiconductor device according to the first embodiment. FIG. [Figure 12] 12 is a cross-sectional view illustrating a fifth step after the fourth step shown in FIG. 11 in the method for manufacturing the semiconductor device according to the first embodiment. FIG. [Figure 13] 1 is a plan view showing a plurality of resistance layers and wiring layers of a semiconductor device according to Comparative Example 1. FIG. [Figure 14] 13 is a diagram for explaining the rate of change in the resistance value of a resistive layer in the semiconductor device according to Comparative Example 1. FIG. [Figure 15] 13 is a graph showing that the resistance value of a resistive layer that overlaps in a planar view with each of first and second wiring portions that run parallel to each other and whose respective widths in the second direction Y and whose respective spacing in the second direction Y are constant in the first direction X varies depending on the spacing in the second direction Y between the first and second wiring portions. [Figure 16] 5 is a diagram for explaining the rate of change in the resistance value of a resistive layer in the semiconductor device according to the first embodiment. FIG. [Figure 17] 11 is a plan view showing a plurality of resistance layers and wiring layers of a semiconductor device according to a second embodiment. FIG. [Figure 18]18 is a cross-sectional view taken along the line of arrows XVIII-XVIII in FIG. 17. [Figure 19] 18 is a cross-sectional view taken along the line XIX-XIX in FIG. 17. [Figure 20] 11 is a plan view showing a plurality of resistance layers and wiring layers of a semiconductor device according to Comparative Example 2. FIG. [Figure 21] 13 is a plan view showing a plurality of resistance layers and wiring layers of a semiconductor device according to a third embodiment. FIG. [Figure 22] 22 is a cross-sectional view taken along the arrows XXII-XXII in FIG. 21. [Figure 23] 23 is a cross-sectional view taken along the line of arrows XXIII-XXIII in FIG. 21. [Figure 24] 13 is a flowchart of a method for manufacturing a semiconductor device according to a third embodiment. [Diagram 25] 13 is a cross-sectional view showing a plurality of resistance layers and wiring layers of a semiconductor device according to a fourth embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment will be described with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0012] (Embodiment 1) <Configuration of Semiconductor Device> The semiconductor device MCP1 according to the first embodiment is a digital-to-analog converter including a ladder-type resistor network. The semiconductor device MCP1 is provided with a plurality of resistor elements for dividing a voltage input to the ladder-type resistor network. The plurality of resistor elements are arranged in an array.

[0013] 1, in a plan view, the semiconductor device MCP1 extends along a first direction X and a second direction Y perpendicular to the first direction X. The semiconductor device MCP1 has a first region R1 and a second region R2. The first region R1 is disposed on the inside of the second region R2 in the first direction X. The first region R1 is connected to the second region R2 in the first direction X. The second region R2 is located, for example, on the outermost periphery in the first direction X in a region in which real patterns constituting a ladder resistor network are formed in the semiconductor device MCP1. The semiconductor device MCP1 does not have a dummy region in which, for example, dummy patterns are formed.

[0014] As shown in FIG. 1 and FIG. 2, each of the multiple resistive elements is formed in each of the first region R1 and the second region R2. The multiple resistive elements formed in the second region R2 have a structure basically equivalent to that of the multiple resistive elements formed in the first region R1. The resistance values ​​of each of the multiple resistive elements are equal to each other. Here, the resistance values ​​of each of the multiple resistive elements are equal to each other means that the variation in the resistance value of each resistive element is within 0.2% of the design value. The resistance values ​​of each of the multiple resistive elements formed in the second region R2 are equal to each other and are equal to the resistance values ​​of each of the multiple resistive elements formed in the first region R1. In other words, the variation in the resistance value of each of the multiple resistive elements formed in the second region R2 is within 0.2% based on the resistance value of each of the multiple resistive elements formed in the first region R1.

[0015] 2 to 4, the semiconductor device MCP1 includes, for example, a semiconductor substrate SUB, an interlayer insulating layer INI0, a wiring layer LM1, a lower wiring layer LM10, an interlayer insulating layer INI1, a plurality of resistor layers LR, an interlayer insulating layer INI2, an upper wiring layer LM20, and a passivation film PV. Each of the wiring layer LM1, the lower wiring layer LM10, the interlayer insulating layer INI1, a plurality of resistor layers LR, an interlayer insulating layer INI2, an upper wiring layer LM20, and a passivation film PV is partially formed on a first region R1. Each of the wiring layer LM1, the lower wiring layer LM10, the interlayer insulating layer INI1, a plurality of resistor layers LR, an interlayer insulating layer INI2, an upper wiring layer LM20, and a passivation film PV is partially formed on a second region R2.

[0016] The interlayer insulating layer INI0 is formed on the upper surface of the semiconductor substrate SUB. The wiring layer LM1 and the pair of lower wiring layers LM10 are disposed in contact with the upper surface of the interlayer insulating layer INI0. The wiring layer LM1 and the pair of lower wiring layers LM10 are embedded in the interlayer insulating layer INI1. The interlayer insulating layer INI1 is disposed in contact with the upper surface of the interlayer insulating layer INI0. The upper surfaces of the interlayer insulating layer INI1 formed on each of the first region R1 and the second region R2 are flattened. The multiple resistor layers LR are disposed in contact with the upper surface of the interlayer insulating layer INI1. The resistor layers LR are embedded in the interlayer insulating layer INI2. The interlayer insulating layer INI2 is disposed in contact with the upper surface of the interlayer insulating layer INI1. The upper wiring layer LM20 is disposed in contact with the upper surface of the interlayer insulating layer INI2. The upper wiring layer LM20 is embedded in, for example, a passivation film PV.

[0017] In each of the first region R1 and the second region R2, each of the plurality of resistive elements is formed between the semiconductor substrate SUB and the passivation film PV. Each of the plurality of resistive elements includes a resistive layer LR, a pair of lower wiring layers LM10, a pair of upper wiring layers LM20, and a wiring layer LM1.

[0018] Each of the multiple resistive layers LR is disposed in contact with the upper surface of the interlayer insulating layer INI1. The resistive layers LR of the multiple resistive elements are disposed at intervals from each other in a first direction X, and extend along a second direction Y perpendicular to the first direction X. The resistive layers LR of the multiple resistive elements are formed in the same layer. From a different perspective, the resistive layers LR of the multiple resistive elements are formed in the same process in a manufacturing method for a semiconductor device, and the heights of the resistive layers LR from the main surface (upper surface) of the semiconductor substrate SUB are equal to each other.

[0019] The thickness of each of the multiple resistive layers LR is, for example, 1 nm or more and 20 nm or less. Preferably, the thickness of each of the multiple resistive layers LR is 10 nm or less. Each of the multiple resistive layers LR is made of a material containing metal. In other words, each of the multiple resistive layers LR is a thin-film metal resistor. The material constituting each of the multiple resistive layers LR includes at least one selected from the group consisting of silicon chromium (SiCr), silicon chromium doped with carbon (SiCrC), nickel chromium (NiCr), titanium nitride (TiN), and tantalum nitride (TaN).

[0020] Each of the pair of lower wiring layers LM10 is electrically connected to both ends of the resistive layer LR in the second direction Y through a via VA1. Each of the pair of upper wiring layers LM20 is electrically connected to each of the pair of lower wiring layers LM10 through a via VA2.

[0021] The material constituting the semiconductor substrate SUB may be any semiconductor material, for example, silicon (Si). The material constituting each of the interlayer insulating layers INI0, INI1, and INI2 may be any material having electrical insulation properties, for example, silicon oxide (SiO2) or silicon nitride (Si3N4). The material constituting the passivation film PV may be any material having electrical insulation properties, for example, silicon nitride (Si3N4) or polyimide. The thermal expansion coefficient of the material constituting the semiconductor substrate SUB is smaller than the thermal expansion coefficient of the material constituting the interlayer insulating layer INI1. The material constituting each of the lower wiring layer LM10 and the upper wiring layer LM20 may be any material having electrical conductivity, for example, aluminum (Al).

[0022] The width in the first direction X of each resistive layer LR and the interval in the first direction X of the resistive elements formed in the first region R1 and the resistive elements formed in the second region R2 are different from each other.

[0023] 2, each of the plurality of resistive elements formed in the first region R1 has a first resistive layer LR1 as a resistive layer. Each of the plurality of resistive elements formed in the second region R2 has a second resistive layer LR2 as a resistive layer. The plurality of first resistive layers LR1 are disposed on the inner side of the plurality of second resistive layers LR2 in the first direction X.

[0024] The widths W1 of the first resistance layers LR1 in the first direction X are equal to each other. The intervals D1 of the first resistance layers LR1 in the first direction X are equal to each other. The widths W1 and intervals D1 of the first resistance layers LR1 being equal to each other means that the dimensional difference between two adjacent first resistance layers LR1 with respect to the dimensions of one first resistance layer LR1 is within 0.2%.

[0025] The width in the first direction X of each second resistance layer LR2 gradually narrows toward the outside in the first direction X. In other words, the difference in the width in the first direction X between two second resistance layers LR2 adjacent to each other in the first direction X is greater than 0.2% of the width of one second resistance layer LR2. The interval in the first direction X between each second resistance layer LR2 gradually widens toward the outside in the first direction X.

[0026] The width W21 in the first direction X of the second resistor layer LR21 adjacent to the first resistor layer LR1 in the first direction X is narrower than the width W1 in the first direction X of the first resistor layer LR1. The width W22 in the first direction X of the second resistor layer LR22 adjacent to the second resistor layer LR21 in the first direction X is narrower than the width W21 in the first direction X of the second resistor layer LR21. The width W23 in the first direction X of the second resistor layer LR23 adjacent to the second resistor layer LR22 in the first direction X is narrower than the width W22 in the first direction X of the second resistor layer LR22.

[0027] A distance D21 in the first direction X between the second resistive layer LR21 and the second resistive layer LR22 is wider than a distance D20 in the first direction X between the first resistive layer LR1 and the second resistive layer LR21. A distance D22 in the first direction X between the second resistive layer LR22 and the second resistive layer LR23 is wider than a distance D21 in the first direction X between the second resistive layer LR21 and the second resistive layer LR22. Note that the distances D20 to D22 and the widths W21 to W23 fluctuate means that, for two second resistive layers LR2 being compared, the dimensional difference between both second resistive layers LR2 with respect to the dimension of one second resistive layer LR2 is greater than 0.1%.

[0028] In the first region R1, the plurality of first resistor layers LR1 are arranged relatively densely. In the second region R2, the plurality of second resistor layers LR2 are arranged relatively sparsely. The total area occupied by the plurality of second resistor layers LR2 per unit area in the second region R2 is smaller than the total area occupied by the plurality of first resistor layers LR1 per unit area in the first region R1.

[0029] As shown in FIGS. 2 to 6, the wiring layer LM1 is arranged below the multiple resistance layers LR so as to overlap the multiple resistance layers LR in a plan view. The wiring layer LM1 is arranged in contact with the upper surface of the interlayer insulating layer INI0. The thickness of the wiring layer LM1 is greater than the thickness of the resistance layer LR. The wiring layer LM1 is formed, for example, in the same layer as the lower wiring layer LM10. From a different perspective, the wiring layer LM1 and the lower wiring layer LM10 are formed in the same process in a manufacturing method of a semiconductor device, and are equal in height from the main surface (upper surface) of the semiconductor substrate SUB.

[0030] The wiring layer LM1 includes, for example, a first wiring portion LM11, a second wiring portion LM12, a third wiring portion LM13, and a fourth wiring portion LM14. Each of the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14 extends along the first direction X and is arranged at intervals in the second direction Y. In other words, each of the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14 runs parallel to one another. Each of the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14 has a width W3 in the second direction Y that is, for example, equal to one another.

[0031] The first wiring portion LM11, the third wiring portion LM13, the fourth wiring portion LM14, and the second wiring portion LM12 are arranged, for example, in the second direction Y in the order described above. The distance in the second direction Y between the first wiring portion LM11 and the third wiring portion LM13, the distance in the second direction Y between the third wiring portion LM13 and the fourth wiring portion LM14, and the distance in the second direction Y between the fourth wiring portion LM14 and the second wiring portion LM12 are all equal to one another. The above distances are, for example, equal to the width W3.

[0032] The wiring layer LM1 includes, for example, a plurality of sets of wiring patterns each consisting of a first wiring portion LM11, a second wiring portion LM12, a third wiring portion LM13, and a fourth wiring portion LM14. The plurality of sets of wiring patterns are arranged side by side in the second direction Y. The wiring layer LM1 includes, for example, two sets of the above wiring patterns and one first wiring portion LM11.

[0033] The first wiring portion LM11 overlaps each of the first resistor layers LR1 and the second resistor layers LR21, LR22, and LR23 in a planar view. The first wiring portion LM11 includes a plurality of third overlapping regions overlapping each of the first resistor layers LR1 in a planar view, a fourth overlapping region overlapping the second resistor layer LR21 in a planar view, a fifth overlapping region overlapping the second resistor layer LR22 in a planar view, and a sixth overlapping region overlapping the second resistor layer LR23 in a planar view.

[0034] The second wiring portion LM12 overlaps with each of the multiple first resistance layers LR1 in a planar view. The second wiring portion LM12 includes multiple third overlapping regions that overlap with any of the multiple first resistance layers LR1 in a planar view. The second wiring portion LM12 does not overlap with each of the multiple second resistance layers LR21, LR22, and LR23 in a planar view. The second wiring portion LM12 does not include a region that overlaps with each of the multiple second resistance layers LR21, LR22, and LR23 in a planar view.

[0035] The third wiring portion LM13 overlaps each of the plurality of first resistance layers LR1, the second resistance layer LR21, and the second resistance layer LR22 in a planar view. The third wiring portion LM13 includes a plurality of third overlapping regions overlapping any of the plurality of first resistance layers LR1 in a planar view, a fourth overlapping region overlapping the second resistance layer LR21 in a planar view, and a fifth overlapping region overlapping the second resistance layer LR22 in a planar view. The third wiring portion LM13 does not overlap the second resistance layer LR23 in a planar view. The third wiring portion LM13 does not include a region overlapping the second resistance layer LR23 in a planar view.

[0036] The fourth wiring portion LM14 overlaps each of the multiple first resistance layers LR1 and the multiple second resistance layers LR21 in a planar view. The fourth wiring portion LM14 includes multiple third overlapping regions that overlap any of the multiple first resistance layers LR1 in a planar view, and a fourth overlapping region that overlaps the second resistance layer LR21 in a planar view. The fourth wiring portion LM14 does not overlap each of the second resistance layers LR22 and the second resistance layers LR23 in a planar view. The fourth wiring portion LM14 does not include a region that overlaps each of the second resistance layers LR22 and the second resistance layers LR23 in a planar view.

[0037] From a different perspective, each of the multiple first resistance layers LR1 has multiple first overlapping regions OVL1 overlapping with the third overlapping regions of the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14 in a planar view. One first overlapping region OVL1 overlaps with one of the third overlapping regions in a planar view. The width in the first direction X of each first overlapping region OVL1 is equal to the width in the first direction X of each first resistance layer LR1. The width in the second direction Y of each first overlapping region OVL1 is equal to the width in the second direction Y of each of the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14. The spacing in the second direction Y of each first overlap region OVL1 is equal to the spacing in the second direction Y between the first wiring portion LM11 and the third wiring portion LM13, between the third wiring portion LM13 and the fourth wiring portion LM14, between the fourth wiring portion LM14 and the second wiring portion LM12, and between the second wiring portion LM12 and the first wiring portion LM11.

[0038] The second resistance layer LR21 has a plurality of second overlapping regions OVL21 overlapping with the fourth overlapping regions of the first wiring portion LM11, the third wiring portion LM13, and the fourth wiring portion LM14 in a planar view. One second overlapping region OVL21 overlaps with one of the fourth overlapping regions in a planar view. The second resistance layer LR21 does not have a region overlapping with the second wiring portion LM12 in a planar view. The width in the first direction X of each second overlapping region OVL21 is equal to the width in the first direction X of the second resistance layer LR21. The width in the second direction Y of each second overlapping region OVL21 is equal to the width in the second direction Y of each of the first wiring portion LM11, the second wiring portion LM12, and the third wiring portion LM13.

[0039] The maximum value L1 of the interval in the second direction Y of each second overlap region OVL21 (the maximum length in the second direction Y of a non-overlapping region located between the second overlap regions OVL21 and not overlapping with the wiring layer LM1 in a planar view) is longer than the interval L0 in the second direction Y of each first overlap region OVL1. The maximum value L1 is equal to the distance in the second direction Y between the fourth wiring portion LM14 and the first wiring portion LM11 arranged to sandwich the second wiring portion LM12. The minimum value of the interval in the second direction Y of each second overlap region OVL21 is equal to the interval in the second direction Y between the first wiring portion LM11 and the third wiring portion LM13, between the third wiring portion LM13 and the fourth wiring portion LM14, between the fourth wiring portion LM14 and the second wiring portion LM12, and between the second wiring portion LM12 and the first wiring portion LM11.

[0040] The second resistive layer LR22 has second overlapping regions OVL22 overlapping with the fifth overlapping regions of the first wiring portion LM11 and the third wiring portion LM13 in a planar view. One second overlapping region OVL22 overlaps with one of the fifth overlapping regions in a planar view. The second resistive layer LR22 does not have a region overlapping with either the second wiring portion LM12 or the fourth wiring portion LM14 in a planar view. The width in the first direction X of each second overlapping region OVL22 is equal to the width in the first direction X of the second resistive layer LR22. The width in the second direction Y of each second overlapping region OVL22 is equal to the width in the second direction Y of each of the first wiring portion LM11 and the second wiring portion LM12.

[0041] The maximum value L2 of the intervals in the second direction Y of each second overlap region OVL22 (the maximum length in the second direction Y of the non-overlapping region located between the second overlap regions OVL22 and not overlapping with the wiring layer LM1 in a planar view) is longer than the maximum value L1. The maximum value L2 is equal to the distance in the second direction Y between the third wiring portion LM13 and the first wiring portion LM11 arranged to sandwich the second wiring portion LM12 and the fourth wiring portion LM14. The minimum value of the intervals in the second direction Y of each second overlap region OVL22 is equal to the intervals in the second direction Y between the first wiring portion LM11 and the third wiring portion LM13, between the third wiring portion LM13 and the fourth wiring portion LM14, between the fourth wiring portion LM14 and the second wiring portion LM12, and between the second wiring portion LM12 and the first wiring portion LM11.

[0042] The second resistance layer LR23 has a second overlapping region OVL23 overlapping with the sixth overlapping region of the first wiring portion LM11 in a plan view. The second resistance layer LR23 does not have a region overlapping with each of the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14 in a plan view.

[0043] The width in the first direction X of each second overlap region OVL23 is equal to the width in the first direction X of the second resistance layer LR23. The width in the second direction Y of each second overlap region OVL23 is equal to the width W3 in the second direction Y of the first wiring portion LM11. The maximum value L3 of the interval in the second direction Y of each second overlap region OVL23 (the maximum length in the second direction Y of the non-overlapping region located between the second overlap regions OVL23 and not overlapping with the wiring layer LM1 in a planar view) is longer than the maximum value L2. The maximum value L3 is equal to the distance in the second direction Y between the first wiring portion LM11 and the first wiring portion LM11 arranged to sandwich the second wiring portion LM12, the third wiring portion, and the fourth wiring portion LM14. The minimum spacing in the second direction Y of each second overlap region OVL23 is equal to the spacing in the second direction Y between the first wiring portion LM11 and the third wiring portion LM13, between the third wiring portion LM13 and the fourth wiring portion LM14, between the fourth wiring portion LM14 and the second wiring portion LM12, and between the second wiring portion LM12 and the first wiring portion LM11.

[0044] The sum of the areas of the second overlapping regions of each second resistance layer LR2 is smaller than the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1. The sum of the areas of the second overlapping regions of each second resistance layer LR2 varies depending on the position of the second resistance layer LR2 in the first direction X. The sum of the areas of the second overlapping regions of the second resistance layer LR2 located relatively outward in the first direction X is smaller than the sum of the areas of the second overlapping regions of the second resistance layer LR2 located relatively inward in the first direction X. The sum of the areas of the second overlapping regions on the second resistance layer LR2 located on the outermost side in the first direction X is the smallest among the sums of the areas of the second overlapping regions on each second resistance layer LR2.

[0045] A value obtained by dividing the sum of the areas of the second overlapping regions of each second resistance layer LR2 by the width in the first direction X of the second resistance layer LR2 is smaller than a value obtained by dividing the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1 by the width in the first direction X of the first resistance layer LR1. A value obtained by dividing the sum of the areas of the second overlapping regions of a second resistance layer LR2 located relatively outward in the first direction X by the width in the first direction X of the second resistance layer LR2 is smaller than a value obtained by dividing the sum of the areas of the second overlapping regions of a second resistance layer LR2 located relatively inward in the first direction X by the width in the first direction X of the second resistance layer LR2. A value obtained by dividing the sum of the areas of the second overlapping regions on a second resistance layer LR2 located on the outermost side in the first direction X by the width in the first direction X of the second resistance layer LR2 is the smallest of the values ​​obtained by dividing the sum of the areas of the second overlapping regions on each second resistance layer LR2 by the width in the first direction X of the second resistance layer LR2.

[0046] The ratio (data rate) of each of the multiple second overlapping regions of each second resistive layer LR2 to a unit area is lower than the ratio of each of the multiple first overlapping regions OVL1 of each first resistive layer LR1 to a unit area. The ratio of each of the multiple second overlapping regions of the second resistive layer LR2 located relatively outward in the first direction X to a unit area is lower than the ratio of each of the multiple second overlapping regions OVL2 of the second resistive layer LR2 located relatively inward in the first direction X to a unit area. The ratio of each of the second overlapping regions on the second resistive layer LR2 located on the outermost side in the first direction X to a unit area is the smallest among the ratios of each of the second overlapping regions on each second resistive layer LR2 to a unit area.

[0047] The sum of the areas of the second overlapping regions OVL21 of the second resistance layer LR21 (total area) is smaller than the sum of the areas of the first overlapping regions OVL1 of one first resistance layer LR1. The value (second value) obtained by dividing the sum of the areas of the second overlapping regions OVL21 of the second resistance layer LR21 by the width W21 of the second resistance layer LR21 in the first direction X is smaller than the value (first value) obtained by dividing the sum of the areas of the first overlapping regions OVL1 of the first resistance layer LR1 by the width W1 of the first resistance layer LR1 in the first direction X.

[0048] The sum of the areas of the second overlapping regions OVL22 of the second resistor layer LR22 is smaller than the sum of the areas of the second overlapping regions OVL21 of the second resistor layer LR21. The value (third value) obtained by dividing the sum of the areas of the second overlapping regions OVL22 of the second resistor layer LR22 by the width W22 of the second resistor layer LR22 in the first direction X is smaller than each of the first value and the second value.

[0049] The total area of ​​the second overlapping regions OVL23 of the second resistive layer LR23 is smaller than the total area of ​​the second overlapping regions OVL22 of the second resistive layer LR22. The value (fourth value) obtained by dividing the total area of ​​the second overlapping regions OVL23 of the second resistive layer LR23 by the width W22 of the second resistive layer LR22 in the first direction X is smaller than each of the first value, the second value, and the third value.

[0050] <Method of Manufacturing Semiconductor Device> 7, in the method for manufacturing the semiconductor device MCP1, first, a semiconductor substrate SUB is prepared (step (S10)). In the step (S10), a semiconductor substrate SUB having an interlayer insulating layer INI0 formed on an upper surface is prepared.

[0051] Second, a wiring layer LM1 and a lower wiring layer LM10 are formed on the semiconductor substrate SUB (step (S20)). In step (S20), first, a metal film is deposited on the upper surface of the interlayer insulating layer INI0. Second, the metal film is patterned by photolithography. As a result, as shown in FIG. 8, each of the wiring layer LM1 and the lower wiring layer LM10 is formed from the metal film. Note that in FIGS. 8 to 12, the semiconductor substrate SUB and the interlayer insulating layer INI0 are omitted from illustration.

[0052] Third, an interlayer insulating layer INI1 and a via VA1 are formed on the wiring layer LM1 and the lower wiring layer LM10 (step (S30)). In step (S30), first, an interlayer insulating film is formed on the interlayer insulating layer INI0, the wiring layer LM1, and the lower wiring layer LM10. Second, a planarization process is performed on the interlayer insulating film. The planarization process is, for example, chemical mechanical polishing (CMP). Third, a contact hole is formed in the interlayer insulating film. The contact hole is formed so as to open a part of the lower wiring layer LM10. Fourth, a conductive film is formed so as to fill the inside of the contact hole. The material constituting the conductive film includes, for example, tungsten (W). Fifth, a part of the conductive film and a part of the interlayer insulating film are removed by CMP. In this way, as shown in FIG. 9, the interlayer insulating layer INI1 is formed from the interlayer insulating film, and the via VA1 is formed from the conductive film. The dimensions of the wiring layer LM1 in this step (S30) are set based on an estimated value of dimensional variation of the resistor layer LR expected in step (40). The estimated value of the dimensional variation of the resistor layer LR is obtained from a preliminary experiment or the like.

[0053] Fourth, a resistive layer LR is formed on the interlayer insulating layer INI1 and the via VA1 (step (S40)). In step (S40), first, a metal resistive thin film is formed on the interlayer insulating layer INI1 and the via VA1. Second, the metal resistive thin film is patterned by photolithography. Specifically, a mask pattern for patterning the resistive layer is formed by exposing and developing a photosensitive thin film using an optical mask (reticle). Next, the mask pattern is used as an etching mask to remove the metal thin film resistors exposed in the openings of the mask pattern.

[0054] In the optical mask, the dimensions of the patterns for forming the multiple resistive layers LR are equal to each other. On the other hand, the thickness of the photosensitive thin film becomes thicker toward the outside in the first direction X. Due to the minute variation in the thickness of the photosensitive thin film in the first direction X, the area ratio of each opening of the mask pattern becomes lower toward the outside in the first direction X. Therefore, the etching rate of the resistive layer on the second region R2 is higher than the etching rate of the resistive layer on the first region R1, and further the etching rate of the resistive layer on the second region R2 increases toward the outside in the first direction X (microloading effect).

[0055] As a result, a plurality of first resistive layers LR1 and a plurality of second resistive layers LR2 are formed from the metal resistive thin film, as shown in Fig. 10. The above-mentioned variations in the width and spacing of each of the second resistive layers LR2 in the first direction X are caused by the microloading effect.

[0056] Fifth, an interlayer insulating layer INI2 and a via VA2 are formed on the resistive layer LR (step (S50)). In step (S50), first, an interlayer insulating film is formed on the interlayer insulating layer INI1 and the multiple first resistive layers LR1 and the multiple second resistive layers LR2. Second, a planarization process is performed on the interlayer insulating film. The planarization process is, for example, chemical mechanical polishing (CMP). Third, a contact hole is formed in the interlayer insulating film. The contact hole is formed so as to open another part of the lower wiring layer LM10. Fourth, a conductive film is formed so as to fill the inside of the contact hole. The material constituting the conductive film includes, for example, tungsten (W). Fifth, a part of the conductive film and a part of the interlayer insulating film are removed by CMP. In this way, as shown in FIG. 11, the interlayer insulating layer INI2 is formed from the interlayer insulating film, and the via VA2 is formed from the conductive film.

[0057] Sixth, an upper wiring layer LM20 is formed on the interlayer insulating layer INI2 and the via VA2 (step (S60)). In step (S60), first, a metal film is formed on the upper surfaces of the interlayer insulating layer INI2 and the via VA2. Second, the metal film is patterned by photolithography. As a result, the upper wiring layer LM20 is formed from the metal film.

[0058] Seventh, a passivation film PV is formed on the upper wiring layer LM20 (step (S70)). In step (S70), first, the passivation film PV is formed on the upper surfaces of the interlayer insulating layer INI2 and the upper wiring layer LM20. In this manner, as shown in FIG. 12, a plurality of resistance elements are formed between the semiconductor substrate and the passivation film PV.

[0059] <Effects of semiconductor device> The effects of the semiconductor device MCP1 will be described based on a comparison with the semiconductor device according to Comparative Example 1 shown in FIG.

[0060] 13, similarly to the semiconductor device MCP1, the width in the first direction X of each second resistance layer LR2 is narrower than the width in the first direction X of each first resistance layer LR1 due to the microloading effect, and the sum of the areas of the second overlapping regions of each second resistance layer LR2 is smaller than the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1. On the other hand, the semiconductor device according to Comparative Example 1 differs from the semiconductor device MCP1 in that the sum of the areas of the second overlapping regions of each second resistance layer LR2 divided by the width in the first direction X of the second resistance layer LR2 is equal to the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1 divided by the width in the first direction of the first resistance layer LR1.

[0061] 13, due to the microloading effect, the resistance value of the second resistive layer LR2 becomes higher than the resistance value of the first resistive layer LR1, and the rate of increase is greater than 0.2% (see FIG. 14). Therefore, in a semiconductor device in which the tolerance of the resistance variation rate of each resistive element is within 0.2%, it is necessary to expand the first region to ensure the number of resistive elements whose resistance variation rate is within 0.2% and to make the second region R2 a dummy region, which makes it difficult to reduce the planar dimensions of the semiconductor device.

[0062] The present inventors have experimentally confirmed that the smaller the value obtained by dividing the total area of ​​the overlapping region of the resistive layer and the wiring layer by the width of the resistive layer, the smaller the resistance value of the resistive layer.

[0063] FIG. 15 is a graph showing that, when comparing resistor elements 1 to 4 that are different from each other only in the interval in the second direction Y of the wiring layers LM1, the resistance value of one resistor layer LR among the resistor elements 1 to 4 fluctuates according to the interval in the second direction Y of the wiring layers LM1. The horizontal axis of FIG. 15 indicates the interval in the second direction Y of the wiring layers LM1 (unit: μm), and the vertical axis of FIG. 15 indicates the variation rate (unit: %) of the resistance value among the resistor elements 1 to 4 when the resistance value of the resistor element 1 is used as a reference. The width in the second direction Y of each of the wiring layers LM1 of each resistor element is 0.5 μm. The length in the first direction X of each of the wiring layers LM1 of each resistor element is 5 μm or more. The width in the first direction X of each of the resistor layers LR of each resistor element is 5 μm, and the length in the second direction Y of the resistor layer LR is 25 μm. The interval between the wiring layers LM1 of the resistor element 1 in the second direction Y was 0.5 μm, the interval between the wiring layers LM1 of the resistor element 2 was 1.0 μm, the interval between the resistor element 3 was 2.0 μm, and the interval between the wiring layers LM1 of the resistor element 4 was 4.0 μm. The data rate of the resistor element 1 was 50%, the data rate of the resistor element 2 was 33%, the data rate of the resistor element 3 was 20%, and the data rate of the resistor element 4 was 11%. In the resistor elements 1 to 4, the longer the interval between the wiring layers LM1 in the second direction Y, the longer the distance between the overlapping regions of the resistor layer LR and the wiring layer LM1, and the smaller the value obtained by dividing the total area of ​​the overlapping regions of the resistor layer LR and the wiring layer LM1 by the width of the resistor layer LR. As shown in FIG. 15, the longer the interval between the wiring layers LM1 in the second direction Y, and the smaller the value obtained by dividing the total area of ​​the overlapping regions of the resistor layer LR and the wiring layer LM1 by the width of the resistor layer LR, the smaller the resistance value decreased.

[0064] The above results are explained as follows. The resistance value of the resistive layer LR, which is a thin-film metal resistor, decreases as the stress applied to the resistive layer LR increases. The stress applied to the resistive layer LR is generated due to the difference in thermal expansion coefficient between the semiconductor substrate SUB and the interlayer insulating layer INI2 or the passivation film PV, for example, in a process of forming the interlayer insulating layer INI2 or the passivation film PV on the semiconductor substrate SUB. The wiring layer LM1 arranged so as to overlap the resistive layer LR in a planar view buffers the stress applied to the resistive layer LR via the interlayer insulating layer INI1. Therefore, the smaller the value obtained by dividing the total area of ​​the overlapping region of the resistive layer LR and the wiring layer LM1 by the width of the resistive layer LR, the greater the stress applied to the resistive layer LR, and the easier it is for the resistance value of the resistive layer LR to decrease.

[0065] Based on the above, in the semiconductor device MCP1, the value obtained by dividing the total value of the areas of the multiple second overlapping regions of each second resistive layer LR2 by the width in the first direction X of the second resistive layer LR2 is smaller than the value obtained by dividing the total value of the areas of the multiple first overlapping regions OVL1 of each first resistive layer LR1 by the width in the first direction X of the first resistive layer LR1. As a result, in the semiconductor device MCP1, the stress applied to the second resistive layer LR2 having a relatively narrow width is larger than that applied to the first resistive layer LR1 having a relatively wide width. As a result, the reduction rate of the resistance value of the second resistive layer LR2 caused by the stress is larger than the reduction rate of the resistance value of the first resistive layer LR1, and the variation in the resistance value caused by the difference in the width in the first direction X between the first resistive layer LR1 and the second resistive layer LR2 can be reduced. In other words, in the semiconductor device MCP1, the variation in the resistance value of the resistive layer LR in each of the first region R1 and the second region R2 can be reduced compared to the semiconductor device according to Comparative Example 1 without providing an outer peripheral portion (dummy region) not used in the circuit.

[0066] Furthermore, the inventors have confirmed that by adjusting the intervals in the second direction Y between the multiple wiring layers LM1 on the order of several hundreds of nanometers (adjusting the data rate on the order of about 10%), the decrease rate of the resistance value of the resistive layer LR can be adjusted on the order of about 0.2% within a range of about 1% (see FIG. 15). The increase rate of the resistance value of the resistive layer caused by the microloading effect is about 0.2% or more and 0.6% or less. In other words, in the semiconductor device MCP1, the decrease rate of the resistance value of the resistive layer LR can be easily adjusted so as to offset the increase rate of the resistance value caused by the microloading effect.

[0067] Furthermore, in the semiconductor device MCP1, the adjustment accuracy of the reduction rate of the resistance value of each resistive layer LR does not depend on the width in the first direction X of each resistive layer LR and the size of the interval. For example, even if the width in the first direction X of each resistive layer LR and the interval are less than 100 nm, it is relatively easy to adjust the data rate to the order of about 10%. Although miniaturization of resistive elements is progressing, the semiconductor device MCP1 can reduce the variation in the resistance value of even further miniaturized resistive elements.

[0068] In addition, in the semiconductor device MCP1, each of the multiple second resistance layers LR2 is disposed outside each of the multiple first resistance layers LR1, and the total value of the areas of the multiple second overlapping regions of the second resistance layer LR2 located relatively outside in the first direction X is smaller than the total value of the areas of the multiple second overlapping regions of the second resistance layer LR2 located relatively inside in the first direction X. Therefore, as shown by the straight line C in Fig. 16, in the semiconductor device MCP1, the decreasing tendency B of the resistance value caused by the effect of buffering the stress on the resistance layer LR by the wiring layer LM1 can more effectively counteract the increasing tendency A of the resistance value caused by the microloading effect.

[0069] In the semiconductor device MCP1, the wiring layer LM1 has a first wiring portion LM11, a second wiring portion LM12, a third wiring portion LM13, and a fourth wiring portion LM14. In the semiconductor device MCP1, the total area of ​​each of the first overlapping region and the second overlapping region can be adjusted by the length of each wiring portion in the first direction X and the interval in the second direction Y. Since it is sufficient to adjust the length of each wiring portion in the first direction X to whether or not each wiring portion overlaps with each second resistance layer LR2, it is sufficient to adjust the length on the order of several hundred nm, which is the same as the interval in the first direction X of the second resistance layer LR2. Also, as described above, in the semiconductor device MCP1, the resistance value of each resistance layer can be adjusted on the order of 0.1% by adjusting the interval in the second direction Y of each wiring portion on the order of several hundred nm. Therefore, in the semiconductor device MCP1, the variation in the resistance value of the resistance layer LR in each of the first region R1 and the second region R2 can be relatively easily reduced.

[0070] In the semiconductor device MCP1, the wiring layer LM1 is formed below a plurality of resistor layers LR. In this case, the wiring layer LM1 can be formed simultaneously with the lower wiring layer LM10 in the process of forming the lower wiring layer LM10. In other words, the semiconductor device MCP1 can be manufactured without increasing the number of steps compared to a conventional semiconductor device having a lower wiring layer.

[0071] Since the first resistance layer LR1 and the second resistance layer LR2 are thin-film metal resistors, their resistance values ​​decrease when stress is applied. The material constituting each of the first resistance layer LR1 and the second resistance layer LR2 includes at least one selected from the group consisting of silicon chrome (SiCr), silicon chrome with carbon (SiCrC), nickel chrome (NiCr), titanium nitride (TiN), and tantalum nitride (TaN). The above materials can be processed relatively easily.

[0072] According to the manufacturing method of the semiconductor device MCP1, the length of each wiring portion in the first direction X and the interval in the second direction Y can be adjusted on the order of several hundreds of nanometers, whereby the semiconductor device MCP1 can be easily manufactured.

[0073] (Embodiment 2) 17 to 19, the semiconductor device MCP2 according to the second embodiment has a basically similar configuration to the semiconductor device MCP1 according to the first embodiment, but differs from the semiconductor device MCP1 in that the width W4 in the second direction Y of the first overlapping region OVL1 is wider than the width W5 in the second direction Y of the second overlapping region OVL21. The following mainly describes the differences between the semiconductor device MCP2 and the semiconductor device MCP1. Note that the semiconductor substrate SUB and the interlayer insulating layer INI0 are omitted from illustration in FIGS. 18 and 19.

[0074] The wiring layer LM1 includes, for example, a plurality of fifth wiring portions LM15. The width of the fifth wiring portions LM15 in the second direction Y gradually narrows toward the outside in the first direction X.

[0075] Each of the plurality of fifth wiring portions LM15 has, for example, a first portion LM151, a second portion LM152, a third portion LM153, and a fourth portion LM154. The first portion LM151 overlaps the plurality of first resistive layers LR1 in a planar view. The second portion LM152 overlaps the second resistive layer LR21 in a planar view. The third portion LM153 overlaps the second resistive layer LR22 in a planar view. The fourth portion LM154 overlaps the second resistive layer LR23 in a planar view. In each of the plurality of fifth wiring portions LM15, the widths in the first direction X of the first portion LM151, the second portion LM152, the third portion LM153, and the fourth portion LM154 narrow in the above-described order.

[0076] Each of the multiple first resistor layers LR1 includes a first overlapping region OVL1 overlapping with a first portion LM151 of each fifth wiring portion LM15 in a planar view. The second resistor layer LR21 includes multiple second overlapping regions OVL21 overlapping with a second portion LM152 of each fifth wiring portion LM15 in a planar view. The second resistor layer LR22 includes a second overlapping region OVL22 overlapping with a third portion LM153 of the fifth wiring portion LM15 in a planar view. The second resistor layer LR23 includes a second overlapping region OVL23 overlapping with a fourth portion LM154 of the fifth wiring portion LM15 in a planar view.

[0077] A width W4 in the second direction Y of each first overlap region OVL1 is equal to the width in the second direction Y of each first portion LM151 of the multiple fifth wiring portions LM15. A width W5 in the second direction Y of each second overlap region OVL21 is equal to the width in the second direction of each second portion LM152 of the multiple fifth wiring portions LM15. A width W6 in the second direction Y of each second overlap region OVL22 is equal to the width in the second direction of each second portion LM152 of the multiple fifth wiring portions LM15.

[0078] A spacing L5 in the second direction Y between each of the second overlap regions OVL21 is longer than a spacing L4 in the second direction Y between each of the first overlap regions OVL1. A spacing L6 in the second direction Y between each of the second overlap regions OVL22 is longer than a spacing L5 in the second direction Y between each of the second overlap regions OVL21. A spacing L7 in the second direction Y between each of the second overlap regions OVL23 is longer than a spacing L6 in the second direction Y between each of the second overlap regions OVL22.

[0079] The widths W4 in the first direction X of the first portions LM151 of the multiple fifth wiring portions LM15 are, for example, equal to each other. The widths W5 in the first direction X of the second portions LM152 of the multiple fifth wiring portions LM15 are, for example, equal to each other. The widths W6 in the first direction X of the third portions LM153 of the multiple fifth wiring portions LM15 are, for example, equal to each other. The widths W7 in the first direction X of the fourth portions LM154 of the multiple fifth wiring portions LM15 are, for example, equal to each other. The above widths of the multiple fifth wiring portions LM15 may be different from each other.

[0080] Also in the semiconductor device MCP2, the value obtained by dividing the sum of the areas of the multiple second overlapping regions of each second resistance layer LR2 by the width in the first direction X of the second resistance layer LR2 is smaller than the value obtained by dividing the sum of the areas of the multiple first overlapping regions OVL1 of each first resistance layer LR1 by the width in the first direction X of the first resistance layer LR1. The value obtained by dividing the sum of the areas of the multiple second overlapping regions of the second resistance layer LR2 located relatively outward in the first direction X by the width in the first direction X of the second resistance layer LR2 is smaller than the value obtained by dividing the sum of the areas of the multiple second overlapping regions of the second resistance layer LR2 located relatively inward in the first direction X by the width in the first direction X of the second resistance layer LR2. The value obtained by dividing the sum of the areas of the second overlapping regions on the second resistance layer LR2 arranged at the outermost side in the first direction X by the width of the second resistance layer LR2 in the first direction X is the smallest value among the values ​​obtained by dividing the sum of the areas of the second overlapping regions on each second resistance layer LR2 by the width of the second resistance layer LR2 in the first direction X.

[0081] In the semiconductor device MCP2, the ratio (data rate) of each of the second overlapping regions of each second resistive layer LR2 to a unit area is lower than the ratio of each of the first overlapping regions OVL1 of each first resistive layer LR1 to a unit area. The ratio of each of the second overlapping regions of the second resistive layer LR2 located relatively outward in the first direction X to a unit area is lower than the ratio of each of the second overlapping regions OVL2 of the second resistive layer LR2 located relatively inward in the first direction X to a unit area. The ratio of each of the second overlapping regions on the second resistive layer LR2 located on the outermost side in the first direction X to a unit area is the smallest among the ratios of each of the second overlapping regions on each second resistive layer LR2 to a unit area.

[0082] Therefore, in the semiconductor device MCP2, as in the semiconductor device MCP1, the smaller the value obtained by dividing the total area of ​​the overlapping region of the resistive layer LR and the wiring layer LM1 by the width of the resistive layer LR, the larger the stress applied to the resistive layer LR becomes, and the easier it is to reduce the resistance value of the resistive layer LR. In other words, the semiconductor device MCP2 also achieves the same effects as the semiconductor device MCP1.

[0083] For example, in the semiconductor device MCP2, without providing a dummy region that is not used in the circuit, the variation in the resistance value of the resistive layer LR in each of the first region R1 and the second region R2 can be reduced compared to the semiconductor device of comparative example 2 shown in Figure 20.

[0084] 20, similarly to the semiconductor device MCP2, the width in the first direction X of each second resistance layer LR2 is narrower than the width in the first direction X of each first resistance layer LR1 due to the microloading effect, and the sum of the areas of the second overlapping regions of each second resistance layer LR2 is smaller than the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1. On the other hand, the semiconductor device according to comparative example 2 differs from the semiconductor device MCP2 in that the sum of the areas of the second overlapping regions of each second resistance layer LR2 divided by the width in the first direction X of the second resistance layer LR2 is equal to the sum of the areas of the first overlapping regions OVL1 of each first resistance layer LR1 divided by the width in the first direction of the first resistance layer LR1.

[0085] Also in Comparative Example 2, due to the microloading effect, the resistance value of the second resistor layer LR2 becomes higher than the resistance value of the first resistor layer LR1, and the rate of increase becomes greater than 0.2%. Therefore, in a semiconductor device in which the tolerance of the resistance value fluctuation rate of each resistor element is within 0.2%, it is necessary to expand the first region to ensure the number of resistor elements whose resistance value fluctuation rate is within 0.2% and to make the second region R2 a dummy region, which makes it difficult to reduce the planar dimensions of the semiconductor device.

[0086] On the other hand, in the semiconductor device MCP2, similarly to the semiconductor device MCP1, the stress applied to the second resistive layer LR2 having a relatively narrow width is larger than that applied to the first resistive layer LR1 having a relatively wide width, and as a result, the rate of decrease in the resistance value of the second resistive layer LR2 caused by the stress is larger than the rate of decrease in the resistance value of the first resistive layer LR1, and the variation in the resistance value caused by the difference in width in the first direction X between the first resistive layer LR1 and the second resistive layer LR2 can be reduced.

[0087] Furthermore, in the semiconductor device MCP2, the resistance value of each resistor layer LR can be adjusted by adjusting the width of the wiring layer LM1 in the second direction Y. Therefore, also in the semiconductor device MCP2, the resistance value of each resistor layer LR can be adjusted with high precision.

[0088] The semiconductor device MCP2 can be manufactured in a similar manner to the semiconductor device MCP1. (Embodiment 3) As shown in Figures 21 to 23, the semiconductor device MCP3 according to the third embodiment has a basically similar configuration to the semiconductor device MCP1 according to the first embodiment, but differs from the semiconductor device MCP1 in that, instead of the wiring layer LM1, a wiring layer LM2 is provided that is disposed above the multiple resistance layers LR and is provided so as to overlap the multiple resistance layers LR in a plan view. The following mainly describes the differences between the semiconductor device MCP3 and the semiconductor device MCP1. Note that the semiconductor substrate SUB and the interlayer insulating layer INI0 are omitted from illustration in Figures 22 and 24.

[0089] The wiring layer LM2 of the semiconductor device MCP3 has basically the same configuration as the wiring layer LM1 of the semiconductor device MCP1, and differs from the wiring layer LM1 only in that it is disposed above a plurality of resistor layers LR.

[0090] The wiring layer LM2 is disposed in contact with the upper surface of the interlayer insulating layer INI1. The wiring layer LM2 is formed, for example, in the same layer as the upper wiring layer LM20. From a different perspective, the wiring layer LM2 and the upper wiring layer LM20 are formed in the same process in the manufacturing method of the semiconductor device, and are equal in height from the main surface (upper surface) of the semiconductor substrate SUB.

[0091] In the semiconductor device MCP3, similarly to the semiconductor device MCP1, the smaller the value obtained by dividing the total area of ​​the overlapping region of the resistive layer LR and the wiring layer LM1 by the width of the resistive layer LR, the larger the stress applied to the resistive layer LR becomes, and the easier it is to reduce the resistance value of the resistive layer LR. In other words, the semiconductor device MCP3 also achieves the same effects as the semiconductor device MCP1.

[0092] 24, the manufacturing method of the semiconductor device MCP3 differs from the manufacturing method of the semiconductor device MCP1 only in that it includes a step (S21) of forming a lower wiring layer LM10 instead of the step (S20) of forming the wiring layer LM1 and the lower wiring layer LM10, and includes a step (S61) of forming a wiring layer LM2 and an upper wiring layer LM20 instead of the step (S60) of forming the upper wiring layer LM20. According to the manufacturing method of the semiconductor device MCP3, the length of each wiring portion in the first direction X and the interval in the second direction Y can be adjusted to the order of several hundreds of nm, so that the semiconductor device MCP3 can be easily manufactured.

[0093] The semiconductor device MCP3 may have a similar configuration to the semiconductor device MCP2, except that the wiring layer LM2 arranged above the multiple resistive layers LR is arranged so as to overlap the multiple resistive layers LR in a planar view.

[0094] (Embodiment 4) As shown in FIG. 25, the semiconductor device MCP4 of the fourth embodiment has a configuration basically similar to that of the semiconductor device MCP1 of the first embodiment, but differs from the semiconductor device MCP1 in that, in addition to the wiring layer LM1, it further has a wiring layer LM2 that is arranged above the multiple resistive layers LR and is arranged so as to overlap the multiple resistive layers LR in a planar view.

[0095] The first overlapping region is a portion of the first resistor layer LR1 that overlaps with at least one of the wiring layers LM1 and LM2 in a plan view, and the second overlapping region is a portion of the second resistor layer LR2 that overlaps with at least one of the wiring layers LM1 and LM2 in a plan view.

[0096] In the semiconductor device MCP4 as well, the value obtained by dividing the sum of the areas of the second overlapping regions of each second resistance layer LR2 by the width of the second resistance layer LR2 in the first direction X is smaller than the value obtained by dividing the sum of the areas of the first overlapping regions of each first resistance layer LR1 by the width of the first resistance layer LR1 in the first direction X. In the semiconductor device MCP4 as well, the same effects as those of the semiconductor device MCP1 are achieved.

[0097] The semiconductor device MCP4 may have the same configuration as the semiconductor device MCP2, except that the semiconductor device MCP4 further includes a wiring layer LM2 in addition to the wiring layer LM1.

[0098] <Modification> In the semiconductor devices MCP1-103, the second resistor layers LR2 may further include one or more other second resistor layers LR2 on the outer side of the second resistor layer LR23. In this case, the wiring layer LM1 may further include, in addition to the first wiring portion LM11, the second wiring portion LM12, the third wiring portion LM13, and the fourth wiring portion LM14, one or more other wiring portions having regions overlapping with the other second resistor layers LR2 in a plan view.

[0099] In the semiconductor devices MCP1 to 103, the number of wiring parts in the wiring layer LM1 is not particularly limited.

[0100] In the semiconductor devices MCP1-103, the wiring layer LM1 is continuous in the first direction X, but is not limited to this. At least a part of the wiring layer LM1 may be formed discontinuously in the first direction X. In this case, the wiring layer LM1 has a pair of ends disposed between two resistor layers LR adjacent to each other in the first direction X in a plan view.

[0101] In the semiconductor device MCP1, 103, the wiring layer LM1 includes a first wiring portion LM11, a second wiring portion LM12, a third wiring portion LM13, and a fourth wiring portion LM14 that are different from each other in length in the first direction X, but is not limited to this. Similarly, in the semiconductor device MCP3, 103, the wiring layer LM2 includes a sixth wiring portion LM21, a seventh wiring portion LM22, an eighth wiring portion LM23, and a ninth wiring portion LM24 that are different from each other in length in the first direction X, but is not limited to this. Each of the wiring layers LM1 and LM2 may include at least two wiring portions that are different from each other in length in the first direction X.

[0102] In the semiconductor device MCP2, 103, the widths of the plurality of fifth wiring portions LM15 in the second direction Y may be different from each other.

[0103] The invention made by the inventor has been specifically described above based on an embodiment, but it goes without saying that the present invention is not limited to the above embodiment and can be modified in various ways without departing from the gist of the invention. [Explanation of symbols]

[0104] MCP1, MCP2, MCP3, MCP4 semiconductor device, INI0, INI1, INI2 interlayer insulating layer, LM1, LM2 wiring layer, LM10 lower wiring layer, LM11 first wiring section, LM12 second wiring section, LM13 third wiring section, LM14 fourth wiring section, LM15 fifth wiring section, LM151 first section, LM152 second section, LM153 third section, LM154 fourth section, LM20 upper wiring layer, LM21 sixth wiring section, LM22 seventh wiring section, LM23 eighth wiring section, LM24 ninth wiring section, LR resistance layer, LR1 first resistance layer, LR2, LR21, LR22, LR23 second resistance layer, OVL1 first overlapping region, OVL2, OVL21, OVL21, OVL22, OVL23 second overlapping region, PV passivation film, R1 First region, R2 second region, SUB semiconductor substrate, VA1, VA2 vias.

Claims

1. An interlayer insulating layer; a plurality of resistive layers each disposed in contact with an upper surface of the interlayer insulating layer and spaced apart from one another in a first direction; a wiring layer disposed above or below the plurality of resistive layers so as to overlap the plurality of resistive layers in a plan view; the plurality of resistive layers include a first resistive layer and a second resistive layer having a width in the first direction narrower than that of the first resistive layer; the first resistance layer includes a first overlapping region that overlaps with the wiring layer in a plan view; the second resistance layer includes a second overlapping region that overlaps with the wiring layer in a plan view; a value obtained by dividing a total area of ​​the second overlapping region by a width in the first direction of the second resistive layer is smaller than a value obtained by dividing a total area of ​​the first overlapping region by a width in the first direction of the first resistive layer, the wiring layer includes a first wiring portion and a second wiring portion that run parallel to each other; the first wiring portion overlaps with the first resistance layer and the second resistance layer in a plan view, The second wiring portion overlaps the first resistance layer in a planar view, but does not overlap the second resistance layer in a planar view.

2. 2 . The semiconductor device according to claim 1 , wherein, in a plan view, the first resistance layer is arranged further inward than the second resistance layer in a planar arrangement region of the plurality of resistance layers.

3. The semiconductor device according to claim 1 , wherein a width of the first overlapping region in a second direction perpendicular to the first direction is greater than a width of the second overlapping region in the second direction.

4. The semiconductor device according to claim 1 , wherein said wiring layer is formed below said plurality of resistive layers.

5. The semiconductor device according to claim 1 , wherein said wiring layer is formed above said plurality of resistive layers.

6. 2. The semiconductor device according to claim 1, wherein said wiring layer is formed both above and below said plurality of resistance layers.

7. 2. The semiconductor device according to claim 1, wherein each of said first resistance layer and said second resistance layer is made of a material containing a metal.

8. 8. The semiconductor device according to claim 7, wherein a material constituting each of the first resistance layer and the second resistance layer includes at least one selected from the group consisting of silicon chromium (SiCr), silicon chromium doped with carbon (SiCrC), nickel chromium (NiCr), titanium nitride (TiN), and tantalum nitride (TaN).

9. forming an interlayer insulating layer; forming a plurality of resistive layers disposed on an upper surface of the interlayer insulating layer and spaced apart from one another in a first direction; forming a wiring layer above and / or below the plurality of resistive layers so as to overlap the plurality of resistive layers in a plan view; In the step of forming the plurality of resistive layers, a first resistive layer and a second resistive layer having a width in the first direction narrower than that of the first resistive layer are formed, a value obtained by dividing a total value of an area of ​​a first overlapping region where the wiring layer and the first resistance layer overlap in a plan view by a width of the first resistance layer in the first direction is smaller than a value obtained by dividing a total value of an area of ​​a second overlapping region where the wiring layer and the second resistance layer overlap in a plan view by a width of the second resistance layer in the first direction; the wiring layer includes a first wiring portion and a second wiring portion that run parallel to each other; the first wiring portion overlaps with the first resistance layer and the second resistance layer in a plan view, The second wiring portion overlaps the first resistance layer in a planar view, but does not overlap the second resistance layer in a planar view.

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