Display device, display module and electronic device

Abstract

To provide a display device having an optical detection function and to provide the display device with high convenience.SOLUTION: A display device has a light receiving element and a light emitting element in a display unit. The light receiving element has a first pixel electrode, an active layer, and a common electrode. The light emitting element has a second pixel electrode, a light emitting layer, and the common electrode. The active layer is positioned on the first pixel electrode. The active layer has a first organic compound. The light emitting layer is positioned on the second pixel electrode. The light emitting layer has a second organic compound different from the first organic compound. The common electrode has a portion superposed with the first pixel electrode through the active layer and a portion superposed with the second electrode through the light emitting layer. Furthermore, it is preferable that the display device has a common layer positioned above the first pixel electrode and the second pixel electrode. The common layer has a portion superposed with the active layer and a portion superposed with the light emitting layer.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] 1. Field of the Invention One embodiment of the present invention relates to a display device having a light receiving element and a light emitting element.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. Examples of the technical field of one embodiment of the present invention include a semiconductor device, a display device, a light-emitting device, a power storage device, a memory device, an electronic device, a lighting device, an input device (e.g., a touch sensor), an input / output device (e.g., a touch panel), a driving method thereof, or a manufacturing method thereof. [Background technology]

[0003] In recent years, display devices are expected to be used in a variety of applications. For example, applications of large display devices include home television devices (also called televisions or television receivers), digital signage, and public information displays (PIDs). In addition, smartphones and tablet devices equipped with touch panels are being developed as mobile information terminals.

[0004] As a display device, for example, a light-emitting device having a light-emitting element has been developed. A light-emitting element (also referred to as an EL element) utilizing the electroluminescence (hereinafter referred to as EL) phenomenon has features such as being easily thin and lightweight, being capable of responding quickly to an input signal, and being capable of being driven by a low-voltage direct current power supply, and is applied to a display device. For example, Patent Document 1 discloses a flexible light-emitting device to which an organic EL element is applied. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2014-197522 A Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a display device having a light detection function.An object of one embodiment of the present invention is to provide a highly convenient display device.An object of one embodiment of the present invention is to provide a multifunctional display device.An object of one embodiment of the present invention is to provide a novel display device.

[0007] Note that the description of these problems does not preclude the existence of other problems. One embodiment of the present invention does not necessarily have to solve all of these problems. Problems other than these can be extracted from the description of the specification, drawings, and claims. [Means for solving the problem]

[0008] One embodiment of the present invention is a display device having a light receiving element and a first light emitting element in a display portion. The light receiving element has a first pixel electrode, an active layer, and a common electrode. The first light emitting element has a second pixel electrode, a light emitting layer, and a common electrode. The active layer is located over the first pixel electrode. The active layer has a first organic compound. The light emitting layer is located over the second pixel electrode. The light emitting layer has a second organic compound different from the first organic compound. The common electrode has a portion overlapping with the first pixel electrode through the active layer and a portion overlapping with the second pixel electrode through the light emitting layer.

[0009] One embodiment of the present invention is a display device having a light receiving element and a first light emitting element in a display portion. The light receiving element has a first pixel electrode, a common layer, an active layer, and a common electrode. The first light emitting element has a second pixel electrode, a common layer, a light emitting layer, and a common electrode. The active layer is located over the first pixel electrode. The active layer has a first organic compound. The light emitting layer is located over the second pixel electrode. The light emitting layer has a second organic compound different from the first organic compound. The common layer is located over the first pixel electrode and the second pixel electrode. The common layer has a portion overlapping with the active layer and a portion overlapping with the light emitting layer. The common electrode has a portion overlapping with the first pixel electrode through the common layer and the active layer, and a portion overlapping with the second pixel electrode through the common layer and the light emitting layer.

[0010] One embodiment of the present invention is a display device having a display portion including a light receiving element, a first light emitting element, and a second light emitting element. The light receiving element has a first pixel electrode, a common layer, an active layer, and a common electrode. The first light emitting element has a second pixel electrode, a common layer, a first light emitting layer, and a common electrode. The second light emitting element has a third pixel electrode, a common layer, a second light emitting layer, and a common electrode. The active layer is located over the first pixel electrode. The active layer has a first organic compound. The first light emitting layer is located over the second pixel electrode. The first light emitting layer has a second organic compound different from the first organic compound. The second light emitting layer is located over the third pixel electrode. The second light emitting layer has a third organic compound different from the first organic compound and the second organic compound. The common layer is located over the first pixel electrode, the second pixel electrode, and the third pixel electrode. The common layer has a portion overlapping with the active layer, a portion overlapping with the first light-emitting layer, and a portion overlapping with the second light-emitting layer. The common electrode has a portion overlapping with the first pixel electrode via the common layer and the active layer, a portion overlapping with the second pixel electrode via the common layer and the first light-emitting layer, and a portion overlapping with the third pixel electrode via the common layer and the second light-emitting layer.

[0011] The display unit preferably further includes a lens, the lens preferably having a portion overlapping the light receiving element, and the light transmitted through the lens is incident on the light receiving element.

[0012] The display unit preferably further includes a partition wall. The partition wall preferably covers an end of the first pixel electrode and an end of the second pixel electrode. The partition wall preferably has a function of electrically insulating the first pixel electrode and the second pixel electrode. The partition wall preferably has a function of absorbing at least a part of the light emitted by the first light-emitting element.

[0013] The display section preferably further includes a color layer having a portion in contact with the upper surface of the first pixel electrode and a portion in contact with a side surface of the partition wall.

[0014] Alternatively, it is preferable that the display portion further includes an insulating layer and a colored layer.

[0015] It is preferable that the color layer, the first pixel electrode, and the second pixel electrode each have a portion in contact with the upper surface of the insulating layer, and in this case, it is preferable that the partition wall covers the upper surface and side surfaces of the color layer.

[0016] Alternatively, the partition wall, the first pixel electrode, and the second pixel electrode each preferably have a portion in contact with the upper surface of the insulating layer. In this case, the partition wall preferably has an opening that reaches the insulating layer, and the colored layer preferably has a portion in contact with the insulating layer through the opening and a portion in contact with the upper surface of the partition wall.

[0017] The colored layer preferably has a color filter or a black matrix.

[0018] The display unit preferably further includes a light-shielding layer, an edge of the light-shielding layer preferably overlaps an edge of the lens, and the light-shielding layer preferably overlaps the partition wall.

[0019] The display unit is preferably flexible.

[0020] One aspect of the present invention is a module having a display device of any of the above configurations, and having a connector such as a flexible printed circuit (hereinafter referred to as FPC) or a TCP (Tape Carrier Package) attached, or a module having an integrated circuit (IC) mounted by a COG (Chip On Glass) method or a COF (Chip On Film) method, etc.

[0021] One embodiment of the present invention is an electronic device including any of the above modules and at least one of an antenna, a battery, a housing, a camera, a speaker, a microphone, and an operation button. Effect of the Invention

[0022] According to one embodiment of the present invention, a display device having a light detection function can be provided. According to one embodiment of the present invention, a highly convenient display device can be provided. According to one embodiment of the present invention, a multifunction display device can be provided. According to one embodiment of the present invention, a novel display device can be provided.

[0023] Note that the description of these effects does not preclude the existence of other effects. One embodiment of the present invention does not necessarily have all of these effects. Effects other than these can be extracted from the description in the specification, drawings, and claims. [Brief description of the drawings]

[0024] [Figure 1] Figures 1A, 1B, 1C and 1D are cross-sectional views showing an example of a display device, and Figures 1E, 1F, 1G and 1H are top views showing an example of a pixel. [Diagram 2] 2A, 2B, and 2C are cross-sectional views showing an example of a display device. [Diagram 3] 3A, 3B, and 3C are cross-sectional views showing an example of a display device. [Figure 4] 4A, 4B, and 4C are cross-sectional views showing an example of a display device. [Diagram 5]5A, 5B, and 5C are cross-sectional views showing an example of a display device. [Figure 6] 6A, 6B, and 6C are cross-sectional views showing an example of a display device. [Figure 7] FIG. 7 is a perspective view showing an example of a display device. [Figure 8] FIG. 8 is a cross-sectional view showing an example of a display device. [Figure 9] 9A and 9B are cross-sectional views showing an example of a display device. [Figure 10] 10A, 10B, and 10C are cross-sectional views showing an example of a display device. [Figure 11] FIG. 11 is a cross-sectional view showing an example of a display device. [Figure 12] 12A and 12B are circuit diagrams showing an example of a pixel circuit. [Figure 13] 13A and 13B are diagrams showing an example of an electronic device. [Figure 14] 14A, 14B, 14C, and 14D are diagrams showing examples of electronic devices. [Figure 15] 15A, 15B, 15C, 15D, 15E, and 15F are diagrams showing examples of electronic devices. [Figure 16] 16A and 16B are cross-sectional views showing the positional relationship of elements used in the calculation in the first embodiment. [Figure 17] FIG. 17 is a diagram showing the calculation results in the first embodiment. [Figure 18] FIG. 18 is a diagram showing the calculation results in the first embodiment. [Figure 19] FIG. 19 is a diagram showing the characteristics of the light receiving element in the second embodiment. [Figure 20] 20A, 20B, 20C, and 20D are the imaging results in Example 2. [Figure 21] FIG. 21 is a diagram showing a device structure constituting a pixel of the display device in the third embodiment. [Figure 22] FIG. 22 is a diagram showing the relationship between the wavelength dependency of the spectral sensitivity and the film thickness of the hole transport layer in Example 3. [Figure 23] FIG. 23 is a diagram showing the relationship between the incident light intensity and the photocurrent in the third embodiment. [Figure 24] FIG. 24 shows a display result of the display device in the third embodiment. [Diagram 25] FIG. 25 shows an image captured by the display device in the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] The embodiments will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it will be easily understood by those skilled in the art that the modes and details of the present invention can be modified in various ways without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the description of the embodiments shown below.

[0026] In the configuration of the invention described below, the same parts or parts having similar functions are denoted by the same reference numerals in different drawings, and the repeated explanations are omitted. In addition, when referring to similar functions, the same hatch pattern may be used and no particular reference numeral may be used.

[0027] In addition, for ease of understanding, the position, size, range, etc. of each component shown in the drawings may not represent the actual position, size, range, etc. Therefore, the disclosed invention is not necessarily limited to the position, size, range, etc. disclosed in the drawings.

[0028] In addition, the words "film" and "layer" can be interchanged depending on the case or situation. For example, the term "conductive layer" can be changed to the term "conductive film". Or, for example, the term "insulating film" can be changed to the term "insulating layer".

[0029] (Embodiment 1) In this embodiment, a display device according to one embodiment of the present invention will be described with reference to FIGS.

[0030] The display device of this embodiment has a light receiving element and a light emitting element in a display portion. Specifically, the light emitting elements are arranged in a matrix in the display portion, and an image can be displayed on the display portion. The light receiving elements are arranged in a matrix in the display portion, and the display portion also functions as a light receiving portion. The light receiving portion can be used as an image sensor or a touch sensor. That is, by detecting light with the light receiving portion, it is possible to capture an image or detect the proximity or contact of an object (such as a finger or a pen).

[0031] In the display device of this embodiment, when an object reflects the light emitted by a light-emitting element in the display unit, the light-receiving element can detect the reflected light, making it possible to capture images and detect touches (including near-touches) even in dark places.

[0032] The display device of this embodiment has a function of displaying an image using a light-emitting element, that is, the light-emitting element functions as a display element.

[0033] As the light-emitting element, it is preferable to use an EL element such as an OLED (Organic Light Emitting Diode) or a QLED (Quantum-dot Light Emitting Diode). Examples of the light-emitting substance that the EL element has include a substance that emits fluorescence (fluorescent material), a substance that emits phosphorescence (phosphorescent material), an inorganic compound (such as a quantum dot material), and a substance that exhibits thermally activated delayed fluorescence (thermally activated delayed fluorescence: TADF material). Also, an LED such as a micro LED (Light Emitting Diode) can be used as the light-emitting element.

[0034] The display device of this embodiment mode has a function of detecting light using a light receiving element.

[0035] In the case where the light receiving element is used as an image sensor, the display device of this embodiment mode can capture an image by using the light receiving element.

[0036] For example, data such as fingerprints, palm prints, or irises can be acquired using an image sensor. That is, a biometric authentication sensor can be built into the display device of the present embodiment. By building a biometric authentication sensor into the display device, the number of components in the electronic device can be reduced, and the electronic device can be made smaller and lighter, compared to a case where a biometric authentication sensor is provided separately from the display device.

[0037] In addition, data such as the user's facial expression, eye movement, or change in pupil diameter can be obtained using an image sensor. By analyzing the data, the user's mental and physical information can be obtained. By changing the display and / or audio output content based on the information, it is possible to ensure that the user can use the device safely, for example, in a VR (Virtual Reality) device, an AR (Augmented Reality) device, or an MR (Mixed Reality) device.

[0038] When the light-receiving element is used as a touch sensor, the display device of this embodiment can detect the proximity or contact of an object by using the light-receiving element.

[0039] The light receiving element can be, for example, a pn-type or pin-type photodiode. The light receiving element functions as a photoelectric conversion element that detects light incident on the light receiving element and generates electric charge. The amount of electric charge generated is determined based on the amount of incident light.

[0040] In particular, it is preferable to use an organic photodiode having a layer containing an organic compound as the light receiving element. Organic photodiodes can be easily made thin, lightweight, and large in area, and have a high degree of freedom in shape and design, and therefore can be applied to various display devices.

[0041] In one embodiment of the present invention, an organic EL element is used as a light-emitting element, and an organic photodiode is used as a light-receiving element. Many layers of an organic photodiode can be configured in common with an organic EL element. Therefore, a light-receiving element can be built into a display device without significantly increasing the number of manufacturing steps. For example, an active layer of a light-receiving element and a light-emitting layer of a light-emitting element can be separately manufactured, and other layers can be configured in the same manner for the light-emitting element and the light-receiving element. Note that a layer shared by a light-receiving element and a light-emitting element may have different functions in the light-emitting element and the light-receiving element. In this specification, components are named based on their functions in the light-emitting element. For example, a hole injection layer functions as a hole injection layer in a light-emitting element and functions as a hole transport layer in a light-receiving element. Similarly, an electron injection layer functions as an electron injection layer in a light-emitting element and functions as an electron transport layer in a light-receiving element.

[0042] 1A to 1D each show a cross-sectional view of a display device according to one embodiment of the present invention.

[0043] A display device 50A shown in FIG. 1A has, between a substrate 51 and a substrate 59, a layer 53 having light receiving elements and a layer 57 having light emitting elements.

[0044] A display device 50B shown in FIG. 1B includes, between a substrate 51 and a substrate 59, a layer 53 having a light receiving element, a layer 55 having a transistor, and a layer 57 having a light emitting element.

[0045] The display device 50A and the display device 50B are configured such that red (R), green (G), and blue (B) light are emitted from a layer 57 having light emitting elements.

[0046] A display device according to an embodiment of the present invention has a plurality of pixels arranged in a matrix. Each pixel has one or more sub-pixels. Each sub-pixel has one light-emitting element. For example, the pixel may have three sub-pixels (three colors: R, G, and B, or three colors: yellow (Y), cyan (C), and magenta (M)) or four sub-pixels (four colors: R, G, B, and white (W), or four colors: R, G, B, and Y). The pixel further has a light-receiving element. The light-receiving element may be provided in all pixels or in some pixels. Also, one pixel may have a plurality of light-receiving elements.

[0047] The layer 55 having transistors preferably has a first transistor and a second transistor. The first transistor is electrically connected to the light receiving element. The second transistor is electrically connected to the light emitting element.

[0048] The display device according to one embodiment of the present invention may have a function of detecting an object such as a finger touching the display device. For example, as shown in Fig. 1C, light emitted by a light-emitting element in a layer 57 having a light-emitting element is reflected by a finger 52 touching the display device 50B, and the light-receiving element in a layer 53 having a light-receiving element detects the reflected light. This makes it possible to detect that the finger 52 has touched the display device 50B.

[0049] The display device according to one embodiment of the present invention may have a function of detecting or capturing an image of an object that is close to (not in contact with) a display device 50B, as shown in FIG. 1D.

[0050] 1E to 1H show an example of a pixel.

[0051] The pixel shown in Fig. 1E and Fig. 1F has three sub-pixels (three light-emitting elements) of R, G, and B, and a light-receiving element PD. Fig. 1E is an example in which the three sub-pixels and the light-receiving element PD are arranged in a 2 × 2 matrix, and Fig. 1F is an example in which the three sub-pixels and the light-receiving element PD are arranged in a single horizontal row.

[0052] The pixel shown in FIG. 1G has four sub-pixels (four light-emitting elements) of R, G, B, and W, and a light-receiving element PD.

[0053] The pixel shown in FIG. 1H has three sub-pixels, R, G, and B, a light-emitting element IR that emits infrared light, and a light-receiving element PD. In this case, it is preferable that the light-receiving element PD has a function of detecting infrared light. The light-receiving element PD may have a function of detecting both visible light and infrared light. The wavelength of light detected by the light-receiving element PD can be determined according to the application of the sensor.

[0054] A detailed configuration of a display device according to one embodiment of the present invention will be described below with reference to FIGS.

[0055] [Display device 10A] FIG. 2A shows a cross-sectional view of the display device 10A.

[0056] The display device 10A includes a light receiving element 110 and a light emitting element 190.

[0057] The light receiving element 110 includes a pixel electrode 111 , a common layer 112 , an active layer 113 , a common layer 114 , and a common electrode 115 .

[0058] The light emitting element 190 includes a pixel electrode 191 , a common layer 112 , a light emitting layer 193 , a common layer 114 , and a common electrode 115 .

[0059] The pixel electrode 111, the pixel electrode 191, the common layer 112, the active layer 113, the light-emitting layer 193, the common layer 114, and the common electrode 115 may each have a single-layer structure or a multilayer structure.

[0060] The pixel electrode 111 and the pixel electrode 191 are located on an insulating layer 214. The pixel electrode 111 and the pixel electrode 191 can be formed of the same material and in the same process.

[0061] The common layer 112 is located on the pixel electrodes 111 and 191. The common layer 112 is a layer shared by the light receiving element 110 and the light emitting element 190.

[0062] The active layer 113 overlaps with the pixel electrode 111 through the common layer 112. The light-emitting layer 193 overlaps with the pixel electrode 191 through the common layer 112. The active layer 113 has a first organic compound, and the light-emitting layer 193 has a second organic compound different from the first organic compound.

[0063] The common layer 114 is located on the common layer 112, on the active layer 113, and on the light-emitting layer 193. The common layer 114 is a layer that is used in common by the light-receiving element 110 and the light-emitting element 190.

[0064] The common electrode 115 has a portion overlapping with the pixel electrode 111 via the common layer 112, the active layer 113, and the common layer 114. The common electrode 115 also has a portion overlapping with the pixel electrode 191 via the common layer 112, the light-emitting layer 193, and the common layer 114. The common electrode 115 is a layer shared by the light-receiving element 110 and the light-emitting element 190.

[0065] In the display device of the present embodiment, an organic compound is used for the active layer 113 of the light receiving element 110. The layers of the light receiving element 110 other than the active layer 113 can be configured in common with the light emitting element 190 (EL element). Therefore, the light receiving element 110 can be formed in parallel with the formation of the light emitting element 190 by simply adding a process of forming the active layer 113 to the manufacturing process of the light emitting element 190. In addition, the light emitting element 190 and the light receiving element 110 can be formed on the same substrate. Therefore, the light receiving element 110 can be built into the display device without significantly increasing the number of manufacturing processes.

[0066] In the display device 10A, the light receiving element 110 and the light emitting element 190 have a common configuration, except that the active layer 113 of the light receiving element 110 and the light emitting layer 193 of the light emitting element 190 are separately fabricated. However, the configuration of the light receiving element 110 and the light emitting element 190 is not limited to this. The light receiving element 110 and the light emitting element 190 may have layers that are separately fabricated from each other, in addition to the active layer 113 and the light emitting layer 193 (see display devices 10K, 10L, and 10M described later). It is preferable that the light receiving element 110 and the light emitting element 190 have one or more layers that are used in common (common layers). This allows the light receiving element 110 to be built into the display device without significantly increasing the number of fabrication steps.

[0067] The display device 10A has a light receiving element 110, a light emitting element 190, a transistor 41, a transistor 42, and the like between a pair of substrates (substrate 151 and substrate 152).

[0068] In the light receiving element 110, the common layer 112, the active layer 113, and the common layer 114, which are located between the pixel electrode 111 and the common electrode 115, can also be called organic layers (layers containing an organic compound). The pixel electrode 111 preferably has a function of reflecting visible light. The end of the pixel electrode 111 is covered with a partition wall 216. The common electrode 115 has a function of transmitting visible light.

[0069] The light receiving element 110 has a function of detecting light. Specifically, the light receiving element 110 is a photoelectric conversion element that receives light 22 incident from the outside of the display device 10A and converts it into an electric signal. The light 22 can also be light emitted by the light emitting element 190 and reflected by an object. The light 22 may also be incident on the light receiving element 110 through a lens to be described later. In this embodiment, the pixel electrode 111 functions as an anode and the common electrode 115 functions as a cathode in line with the light emitting element 190. In other words, the light receiving element 110 can detect light incident on the light receiving element 110 and generate electric charges by applying a reverse bias between the pixel electrode 111 and the common electrode 115 and driving the light receiving element 110.

[0070] A light-shielding layer BM is provided on the surface of the substrate 152 facing the substrate 151. The light-shielding layer BM has openings at positions overlapping the light receiving element 110 and the light emitting element 190. By providing the light-shielding layer BM, the range in which the light receiving element 110 detects light can be controlled.

[0071] The light-shielding layer BM may be made of a material that blocks light emitted from the light-emitting element. The light-shielding layer BM preferably absorbs visible light. For example, the light-shielding layer BM may be made of a black matrix using a metal material, or a resin material containing a pigment (such as carbon black) or a dye. The light-shielding layer BM may have a laminated structure of a red color filter, a green color filter, and a blue color filter.

[0072] Here, the light receiving element 110 detects the light emitted by the light emitting element 190 reflected by the object. However, there are cases where the light emitted by the light emitting element 190 is reflected inside the display device 10A and enters the light receiving element 110 without passing through the object. The light shielding layer BM can suppress the influence of such stray light. For example, if the light shielding layer BM is not provided, the light 23a emitted by the light emitting element 190 may be reflected by the substrate 152, and the reflected light 23b may enter the light receiving element 110. By providing the light shielding layer BM, it is possible to suppress the reflected light 23b from entering the light receiving element 110. This can reduce noise and increase the sensitivity of the sensor using the light receiving element 110.

[0073] In the light-emitting element 190, the common layer 112, the light-emitting layer 193, and the common layer 114, which are located between the pixel electrode 191 and the common electrode 115, can also be called EL layers. The pixel electrode 191 preferably has a function of reflecting visible light. An end of the pixel electrode 191 is covered with a partition wall 216. The pixel electrode 111 and the pixel electrode 191 are electrically insulated from each other by the partition wall 216. The common electrode 115 has a function of transmitting visible light.

[0074] The light emitting element 190 has a function of emitting visible light. Specifically, the light emitting element 190 is an electroluminescent element that emits light toward the substrate 152 side by applying a voltage between the pixel electrode 191 and the common electrode 115 (see emission 21).

[0075] The light emitting layer 193 is preferably formed so as not to overlap with the light receiving region of the light receiving element 110. This can suppress the light emitting layer 193 from absorbing the light 22, and can increase the amount of light irradiated to the light receiving element 110.

[0076] The pixel electrode 111 is electrically connected to the source or drain of the transistor 41 through an opening provided in the insulating layer 214. An end of the pixel electrode 111 is covered with a partition wall 216.

[0077] The pixel electrode 191 is electrically connected to a source or a drain of the transistor 42 through an opening provided in the insulating layer 214. An end of the pixel electrode 191 is covered with a partition wall 216. The transistor 42 has a function of controlling driving of the light-emitting element 190.

[0078] The transistor 41 and the transistor 42 are in contact with each other on the same layer (substrate 151 in FIG. 2A).

[0079] At least a part of the circuit electrically connected to the light receiving element 110 is preferably formed of the same material and in the same process as the circuit electrically connected to the light emitting element 190. This allows the thickness of the display device to be thinner and the manufacturing process to be simplified compared to the case where the two circuits are formed separately.

[0080] The light receiving element 110 and the light emitting element 190 are preferably covered with a protective layer 195. In Fig. 2A, the protective layer 195 is provided on and in contact with the common electrode 115. By providing the protective layer 195, impurities such as water can be prevented from entering the light receiving element 110 and the light emitting element 190, and the reliability of the light receiving element 110 and the light emitting element 190 can be improved. In addition, the protective layer 195 and the substrate 152 are bonded together by the adhesive layer 142.

[0081] 3A, a protective layer does not necessarily have to be provided on the light receiving element 110 and the light emitting element 190. In FIG. 3A, the common electrode 115 and the substrate 152 are bonded together by the adhesive layer 142.

[0082] [Display device 10B] 2B shows a cross-sectional view of display device 10B. In the following description of the display device, the description of the same configuration as the display device described above may be omitted.

[0083] The display device 10B shown in FIG. 2B includes a lens 149 in addition to the components of the display device 10A.

[0084] The display device of the present embodiment may have a lens 149. The lens 149 is provided at a position overlapping with the light receiving element 110. In the display device 10B, the lens 149 is provided in contact with the substrate 152. The lens 149 of the display device 10B has a convex surface facing the substrate 151 side. Alternatively, the lens 149 may have a convex surface facing the substrate 152 side.

[0085] When both the light-shielding layer BM and the lens 149 are formed on the same surface of the substrate 152, the order of formation does not matter. Fig. 2B shows an example in which the lens 149 is formed first, but the light-shielding layer BM may be formed first. In Fig. 2B, the edge of the lens 149 is covered by the light-shielding layer BM.

[0086] The display device 10B is configured such that the light 22 is incident on the light receiving element 110 via the lens 149. When the lens 149 is included, the imaging range of the light receiving element 110 can be narrowed compared to when the lens 149 is not included, and the imaging range of the light receiving element 110 can be prevented from overlapping with that of the adjacent light receiving element 110. This allows a clear image with less blurring to be captured. In addition, when the imaging range of the light receiving element 110 is the same, when the lens 149 is included, the size of the pinhole (corresponding to the size of the opening of the BM overlapping with the light receiving element 110 in FIG. 2B) can be made larger compared to when the lens 149 is not included. Therefore, by including the lens 149, the amount of light incident on the light receiving element 110 can be increased.

[0087] The display devices shown in FIGS. 3B and 3C each have a configuration in which light 22 is incident on light receiving element 110 via lens 149, similar to display device 10B shown in FIG. 2B.

[0088] 3B, the lens 149 is provided in contact with the upper surface of the protective layer 195. The lens 149 of the display device shown in FIG.

[0089] 3C has a lens array 146 provided on the display surface side of a substrate 152. Lenses of the lens array 146 are provided at positions overlapping with the light receiving elements 110. A light-shielding layer BM is preferably provided on the surface of the substrate 152 facing the substrate 151.

[0090] As a method for forming lenses used in the display device of this embodiment, lenses such as microlenses may be formed directly on a substrate or a light receiving element, or a lens array such as a microlens array that is separately manufactured may be bonded to the substrate.

[0091] [Display device 10C] FIG. 2C shows a cross-sectional view of the display device 10C.

[0092] The display device 10C shown in FIG. 2C differs from the display device 10A in that it does not have the substrate 151, the substrate 152, and the partition wall 216, but has the substrate 153, the substrate 154, the adhesive layer 155, the insulating layer 212, and the partition wall 217.

[0093] The substrate 153 and the insulating layer 212 are bonded together by an adhesive layer 155. The substrate 154 and the protective layer 195 are bonded together by an adhesive layer 142.

[0094] The display device 10C is manufactured by transferring the insulating layer 212, the transistor 41, the transistor 42, the light receiving element 110, the light emitting element 190, and the like, which are formed on a manufacturing substrate, onto a substrate 153. Each of the substrates 153 and 154 is preferably flexible. This can increase the flexibility of the display device 10C. For example, each of the substrates 153 and 154 is preferably made of a resin.

[0095] The substrates 153 and 154 may each be made of polyester resin such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), polyacrylonitrile resin, acrylic resin, polyimide resin, polymethyl methacrylate resin, polycarbonate (PC) resin, polyethersulfone (PES) resin, polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polyvinylidene chloride resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin, cellulose nanofiber, etc. One or both of the substrates 153 and 154 may be made of glass having a thickness sufficient to provide flexibility.

[0096] A film having high optical isotropy may be used for the substrate of the display device of this embodiment. Examples of the film having high optical isotropy include a triacetyl cellulose (TAC, also called cellulose triacetate) film, a cycloolefin polymer (COP) film, a cycloolefin copolymer (COC) film, and an acrylic film.

[0097] It is preferable that the partition 217 absorbs light emitted by the light emitting element. For example, a black matrix can be formed by using a resin material containing a pigment or a dye as the partition 217. In addition, by using a brown resist material, the partition 217 can be formed of a colored insulating layer.

[0098] Light 23c emitted by the light emitting element 190 may be reflected by the substrate 154 and the partition 217, and reflected light 23d may enter the light receiving element 110. Furthermore, light 23c may pass through the partition 217 and be reflected by a transistor, wiring, or the like, causing the reflected light to enter the light receiving element 110. The light 23c is absorbed by the partition 217, so that the reflected light 23d can be prevented from entering the light receiving element 110. This can reduce noise and increase the sensitivity of the sensor using the light receiving element 110.

[0099] It is preferable that the partition 217 absorbs at least the wavelength of light detected by the light receiving element 110. For example, when the light receiving element 110 detects green light emitted by the light emitting element 190, it is preferable that the partition 217 absorbs at least the green light. For example, when the partition 217 has a red color filter, it is possible to absorb the green light 23c and prevent the reflected light 23d from entering the light receiving element 110.

[0100] [Display device 10D] FIG. 4A shows a cross-sectional view of the display device 10D.

[0101] The display device 10D includes a color layer 148a in addition to the components of the display device 10B.

[0102] The colored layer 148 a has a portion in contact with the upper surface of the pixel electrode 111 of the light receiving element 110 and a portion in contact with the side surface of the partition wall 216 .

[0103] The colored layer 148a preferably absorbs light emitted by the light emitting element. For example, a black matrix can be formed as the colored layer 148a using a resin material containing a pigment or a dye. In addition, the colored layer 148a can be formed of a colored insulating layer by using a brown resist material.

[0104] It is preferable that the colored layer 148a absorbs at least the wavelength of light detected by the light receiving element 110. For example, when the light receiving element 110 detects green light emitted by the light emitting element 190, it is preferable that the colored layer 148a absorbs at least green light. For example, if the colored layer 148a has a red color filter, it can absorb green light and prevent reflected light from entering the light receiving element 110.

[0105] The colored layer 148a absorbs stray light generated within the display device 10D, thereby reducing the amount of stray light incident on the light receiving element 110. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0106] In the display device of this embodiment, the colored layer is disposed between the light receiving element 110 and the light emitting element 190. This makes it possible to suppress stray light incident on the light receiving element 110 from the light emitting element 190.

[0107] [Display device 10E] FIG. 4B shows a cross-sectional view of the display device 10E.

[0108] The display device 10E includes a color layer 148b in addition to the components of the display device 10D. The materials that can be used for the color layer 148b are the same as those for the color layer 148a.

[0109] The colored layer 148 b has a portion in contact with the upper surface of the pixel electrode 191 of the light emitting element 190 and a portion in contact with the side surface of the partition wall 216 .

[0110] The display device of this embodiment preferably has one or both of the color layer 148a and the color layer 148b.

[0111] By providing both the colored layer 148a and the colored layer 148b, the amount of stray light entering the light receiving element 110 can be further reduced.

[0112] In the display device 10E, since the colored layer 148b contacts the upper surface of the pixel electrode 191, the amount of light emitted 21 from the light emitting element 190 that is extracted to the outside of the display device 10E may be less than that of the display device 10D (FIG. 4A). Therefore, when only one of the colored layer 148a and the colored layer 148b is provided, it is preferable to provide only the colored layer 148a on the light receiving element 110 side as in the display device 10D. This can increase the light extraction efficiency of the light emitting element 190 and suppress the incidence of stray light into the light receiving element 110. Furthermore, a highly sensitive sensor can be built into a display device with high display quality.

[0113] [Display device 10F] FIG. 4C shows a cross-sectional view of the display device 10F.

[0114] The display device 10F includes the same components as the display device 10B, and further includes a color layer 148. The material that can be used for the color layer 148 is similar to that for the color layer 148a.

[0115] The colored layer 148 is provided so as to cover the upper surface and side surfaces of the partition wall 216. The colored layer 148 has a portion in contact with the upper surface of the pixel electrode 111 of the light receiving element 110, and a portion in contact with the upper surface of the pixel electrode 191 of the light emitting element 190.

[0116] The colored layer 148a and the colored layer 148b shown in Fig. 4B do not need to be separated from each other, and may be a single film like the colored layer 148 shown in Fig. 4C. The colored layer 148 absorbs stray light generated in the display device 10F, thereby reducing the amount of stray light incident on the light receiving element 110. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0117] [Display device 10G] FIG. 5A shows a cross-sectional view of the display device 10G.

[0118] The display device 10G includes a color layer 147 in addition to the components of the display device 10B.

[0119] The colored layer 147 is located on the insulating layer 214, and a partition wall 216 is provided so as to cover the upper surface and side surfaces of the colored layer 147. The colored layer 147 and the light receiving element 110 are electrically insulated by the partition wall 216. Similarly, the colored layer 147 and the light emitting element 190 are electrically insulated by the partition wall 216.

[0120] Materials that can be used for the colored layer 147 are similar to those for the colored layer 148a. As with the colored layers 148, 148a, and 148b described above, the colored layer 147 absorbs stray light generated within the display device 10G, thereby reducing the amount of stray light incident on the light receiving element 110. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0121] Since the colored layers 148, 148a, 148b described above are configured to absorb light, depending on the material, they may have a lower resistivity than the partition wall 216. For example, a resin containing a pigment such as carbon black has a lower resistivity than a resin that does not contain the pigment. Therefore, depending on the material, providing any of the colored layers 148, 148a, 148b may cause current to leak to an adjacent light-emitting element or light-receiving element. For example, current leaking to an adjacent light-emitting element may cause a problem in which elements other than the desired light-emitting element emit light (also known as crosstalk).

[0122] On the other hand, the colored layer 147 is provided at a distance from the light receiving element 110 and the light emitting element 190. The colored layer 147 is electrically insulated from the light receiving element 110 and the light emitting element 190 by the partition wall 216. Therefore, even if the colored layer 147 is a layer with low resistivity, it is unlikely to affect the light receiving element 110 and the light emitting element 190. This widens the range of materials to be used for the colored layer 147, which is preferable. For example, a black matrix may be formed as the colored layer 147 using a metal material or the like.

[0123] [Display device 10H] FIG. 5B shows a cross-sectional view of the display device 10H.

[0124] The display device 10H includes a color layer 148c in addition to the components of the display device 10B.

[0125] In the display device 10H, the partition 216 has an opening that reaches the insulating layer 214. The colored layer 148c has a portion that contacts the insulating layer 214 through the opening, a portion that contacts the side surface of the partition 216 inside the opening, and a portion that contacts the upper surface of the partition 216. The colored layer 148c and the light receiving element 110 are electrically insulated by the partition 216. Similarly, the colored layer 148c and the light emitting element 190 are electrically insulated by the partition 216.

[0126] The material that can be used for the colored layer 148c is the same as that for the colored layer 147. The colored layer 148c absorbs stray light generated in the display device 10H, thereby reducing the amount of stray light incident on the light receiving element 110. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0127] The colored layer 148c is provided spaced apart from the light receiving element 110 and the light emitting element 190. The colored layer 148c is electrically insulated from the light receiving element 110 and the light emitting element 190 by the partition wall 216. Therefore, even if the colored layer 148c is a layer with low resistivity, it is unlikely to affect the light receiving element 110 and the light emitting element 190. This provides a wider range of materials to be used for the colored layer 148c, which is preferable.

[0128] [Display device 10J] FIG. 5C shows a cross-sectional view of display device 10J.

[0129] The display device 10J includes a color layer 148c in addition to the configuration of the display device 10D.

[0130] 4A to 4C and 5A to 5C, the display device of one embodiment of the present invention preferably has one or more of the colored layers 148, 148a, 148b, 148c, and 147. This makes it possible to absorb stray light generated in the display device and reduce the amount of stray light incident on the light receiving element 110. As a result, noise can be reduced and the sensitivity of the sensor using the light receiving element 110 can be increased.

[0131] [Display device 10K, 10L, 10M] FIG. 6A shows a cross-sectional view of display device 10K, FIG. 6B shows a cross-sectional view of display device 10L, and FIG. 6C shows a cross-sectional view of display device 10M.

[0132] The display device 10K differs from the display device 10A in that it does not have the common layer 114, but has a buffer layer 184 and a buffer layer 194. The buffer layer 184 and the buffer layer 194 may each have a single-layer structure or a multilayer structure.

[0133] In the display device 10K, the light receiving element 110 has a pixel electrode 111, a common layer 112, an active layer 113, a buffer layer 184, and a common electrode 115. In the display device 10K, the light emitting element 190 has a pixel electrode 191, a common layer 112, a light emitting layer 193, a buffer layer 194, and a common electrode 115.

[0134] The display device 10L differs from the display device 10A in that it does not have the common layer 112, but has a buffer layer 182 and a buffer layer 192. The buffer layer 182 and the buffer layer 192 may each have a single-layer structure or a multilayer structure.

[0135] In the display device 10L, the light receiving element 110 has a pixel electrode 111, a buffer layer 182, an active layer 113, a common layer 114, and a common electrode 115. In the display device 10L, the light emitting element 190 has a pixel electrode 191, a buffer layer 192, a light emitting layer 193, the common layer 114, and the common electrode 115.

[0136] The display device 10M differs from the display device 10A in that it does not have the common layer 112 and the common layer 114, but has the buffer layer 182, the buffer layer 184, the buffer layer 192, and the buffer layer 194.

[0137] In the display device 10M, the light receiving element 110 has a pixel electrode 111, a buffer layer 182, an active layer 113, a buffer layer 184, and a common electrode 115. In the display device 10M, the light emitting element 190 has a pixel electrode 191, a buffer layer 192, a light emitting layer 193, a buffer layer 194, and the common electrode 115.

[0138] In the manufacture of the light receiving element 110 and the light emitting element 190, not only the active layer 113 and the light emitting layer 193 can be separately manufactured, but also other layers can be separately manufactured.

[0139] In the display device 10K, an example is shown in which a buffer layer 184 between the common electrode 115 and the active layer 113 and a buffer layer 194 between the common electrode 115 and the light-emitting layer 193 are separately formed. As the buffer layer 184, for example, an electron transport layer can be formed. As the buffer layer 194, for example, one or both of an electron injection layer and an electron transport layer can be formed.

[0140] In the display device 10L, an example is shown in which a buffer layer 182 between the pixel electrode 111 and the active layer 113 and a buffer layer 192 between the pixel electrode 191 and the light-emitting layer 193 are separately formed. As the buffer layer 182, for example, a hole transport layer can be formed. As the buffer layer 192, for example, one or both of a hole injection layer and a hole transport layer can be formed.

[0141] The display device 10M shows an example in which the light receiving element 110 and the light emitting element 190 do not have a common layer between a pair of electrodes (the pixel electrode 111 or the pixel electrode 191 and the common electrode 115). The light receiving element 110 and the light emitting element 190 of the display device 10M can be manufactured by forming the pixel electrode 111 and the pixel electrode 191 on the insulating layer 214 using the same material and in the same process, forming the buffer layer 182, the active layer 113, and the buffer layer 184 on the pixel electrode 111, forming the buffer layer 192, the light emitting layer 193, and the buffer layer 194 on the pixel electrode 191, and then forming the common electrode 115 so as to cover the pixel electrode 111, the buffer layer 182, the active layer 113, the buffer layer 184, the pixel electrode 191, the buffer layer 192, the light emitting layer 193, and the buffer layer 194. The order of forming the stacked structure of the buffer layer 182, the active layer 113, and the buffer layer 184 and the stacked structure of the buffer layer 192, the light-emitting layer 193, and the buffer layer 194 is not particularly limited. For example, the buffer layer 192, the light-emitting layer 193, and the buffer layer 194 may be formed after the buffer layer 182, the active layer 113, and the buffer layer 184 are formed. Conversely, the buffer layer 192, the light-emitting layer 193, and the buffer layer 194 may be formed before the buffer layer 182, the active layer 113, and the buffer layer 184 are formed. Also, the buffer layer 182, the buffer layer 192, the active layer 113, the light-emitting layer 193, and the like may be formed alternately in this order.

[0142] A more detailed configuration of the display device according to one embodiment of the present invention will be described below with reference to FIGS.

[0143] [Display device 100A] FIG. 7 shows a perspective view of the display device 100A, and FIG. 8 shows a cross-sectional view of the display device 100A.

[0144] The display device 100A has a configuration in which a substrate 152 and a substrate 151 are bonded together. In Fig. 7, the substrate 152 is indicated by a dashed line.

[0145] The display device 100A has a display unit 162, a circuit 164, wiring 165, etc. Fig. 7 shows an example in which an IC (integrated circuit) 173 and an FPC 172 are mounted on the display device 100A. Therefore, the configuration shown in Fig. 7 can also be said to be a display module having the display device 100A, an IC, and an FPC.

[0146] The circuit 164 can be, for example, a scanning line driver circuit.

[0147] The wiring 165 has a function of supplying signals and power to the display portion 162 and the circuit 164. The signals and power are input to the wiring 165 from the outside via the FPC 172 or from the IC 173.

[0148] 7 shows an example in which an IC 173 is provided on a substrate 151 by a chip on glass (COG) method or a chip on film (COF) method. For example, an IC having a scanning line driving circuit or a signal line driving circuit can be used as the IC 173. Note that the display device 100A and the display module may be configured without an IC. Also, the IC may be mounted on an FPC by a COF method or the like.

[0149] Figure 8 shows an example of a cross section of the display device 100A shown in Figure 7, cutting a portion of the area including the FPC 172, a portion of the area including the circuit 164, a portion of the area including the display unit 162, and a portion of the area including the end portion.

[0150] A display device 100A shown in FIG. 8 includes a transistor 201, a transistor 205, a transistor 206, a light-emitting element 190, a light-receiving element 110, and the like between a substrate 151 and a substrate 152. The display device 100A shown in FIG.

[0151] The substrate 152 and the insulating layer 214 are bonded via an adhesive layer 142. A solid sealing structure, a hollow sealing structure, or the like can be applied to seal the light emitting element 190 and the light receiving element 110. In FIG. 8, a space 143 surrounded by the substrate 152, the adhesive layer 142, and the insulating layer 214 is filled with an inert gas (nitrogen, argon, or the like), and a hollow sealing structure is applied. The adhesive layer 142 may be provided overlapping the light emitting element 190. In addition, the space 143 surrounded by the substrate 152, the adhesive layer 142, and the insulating layer 214 may be filled with a resin different from the adhesive layer 142.

[0152] The light-emitting element 190 has a layered structure in which a pixel electrode 191, a common layer 112, a light-emitting layer 193, a common layer 114, and a common electrode 115 are layered in this order from the insulating layer 214 side. The pixel electrode 191 is connected to a conductive layer 222b of the transistor 206 through an opening provided in the insulating layer 214. The transistor 206 has a function of controlling driving of the light-emitting element 190. An end of the pixel electrode 191 is covered with a partition wall 216. The pixel electrode 191 contains a material that reflects visible light, and the common electrode 115 contains a material that transmits visible light.

[0153] The light receiving element 110 has a layered structure in which a pixel electrode 111, a common layer 112, an active layer 113, a common layer 114, and a common electrode 115 are layered in this order from the insulating layer 214 side. The pixel electrode 111 is electrically connected to a conductive layer 222b of the transistor 205 through an opening provided in the insulating layer 214. An end of the pixel electrode 111 is covered with a partition wall 216. The pixel electrode 111 contains a material that reflects visible light, and the common electrode 115 contains a material that transmits visible light.

[0154] Light emitted by the light emitting element 190 is emitted towards the substrate 152. Light is incident on the light receiving element 110 via the substrate 152 and the space 143. The substrate 152 is preferably made of a material that is highly transparent to visible light.

[0155] The pixel electrodes 111 and 191 can be manufactured using the same material and in the same process. The common layer 112, the common layer 114, and the common electrode 115 are used for both the light receiving element 110 and the light emitting element 190. The light receiving element 110 and the light emitting element 190 can have the same configuration except for the configurations of the active layer 113 and the light emitting layer 193. This allows the light receiving element 110 to be built into the display device 100A without significantly increasing the number of manufacturing steps.

[0156] A light-shielding layer BM is provided on the surface of the substrate 152 facing the substrate 151. The light-shielding layer BM has openings at positions overlapping the light receiving element 110 and the light emitting element 190. By providing the light-shielding layer BM, the range in which the light receiving element 110 detects light can be controlled. Furthermore, by having the light-shielding layer BM, it is possible to prevent light from being directly incident on the light receiving element 110 from the light emitting element 190 without passing through an object. Therefore, a sensor with low noise and high sensitivity can be realized.

[0157] A transistor 201, a transistor 205, and a transistor 206 are all formed over a substrate 151. These transistors can be manufactured using the same material and through the same process.

[0158] An insulating layer 211, an insulating layer 213, an insulating layer 215, and an insulating layer 214 are provided over the substrate 151 in this order. A part of the insulating layer 211 functions as a gate insulating layer for each transistor. A part of the insulating layer 213 functions as a gate insulating layer for each transistor. The insulating layer 215 is provided to cover the transistors. The insulating layer 214 is provided to cover the transistors and functions as a planarizing layer. Note that the number of gate insulating layers and the number of insulating layers covering the transistors are not limited, and each may be a single layer or two or more layers.

[0159] It is preferable that at least one of the insulating layers covering the transistors is made of a material that is difficult for impurities such as water and hydrogen to diffuse into. This allows the insulating layer to function as a barrier layer. With this structure, it is possible to effectively prevent impurities from diffusing into the transistors from the outside, thereby improving the reliability of the display device.

[0160] It is preferable to use an inorganic insulating film for each of the insulating layers 211, 213, and 215. As the inorganic insulating film, for example, an inorganic insulating film such as a silicon nitride film, a silicon oxynitride film, a silicon oxide film, a silicon nitride oxide film, an aluminum oxide film, or an aluminum nitride film can be used. Also, a hafnium oxide film, an yttrium oxide film, a zirconium oxide film, a gallium oxide film, a tantalum oxide film, a magnesium oxide film, a lanthanum oxide film, a cerium oxide film, or a neodymium oxide film may be used. Also, two or more of the above insulating films may be stacked.

[0161] Here, the organic insulating film often has a lower barrier property than the inorganic insulating film. Therefore, it is preferable that the organic insulating film has an opening near the end of the display device 100A. This makes it possible to suppress impurities from entering through the organic insulating film from the end of the display device 100A. Alternatively, the organic insulating film may be formed so that the end of the organic insulating film is located inside the end of the display device 100A, so that the organic insulating film is not exposed at the end of the display device 100A.

[0162] An organic insulating film is suitable for the insulating layer 214 that functions as a planarizing layer. Materials that can be used for the organic insulating film include acrylic resin, polyimide resin, epoxy resin, polyamide resin, polyimideamide resin, siloxane resin, benzocyclobutene resin, phenol resin, and precursors of these resins.

[0163] 8, an opening is formed in the insulating layer 214. This makes it possible to prevent impurities from entering the display unit 162 from the outside through the insulating layer 214, even when an organic insulating film is used for the insulating layer 214. This makes it possible to improve the reliability of the display device 100A.

[0164] The transistor 201, the transistor 205, and the transistor 206 each have a conductive layer 221 functioning as a gate, an insulating layer 211 functioning as a gate insulating layer, a conductive layer 222a and a conductive layer 222b functioning as a source and a drain, a semiconductor layer 231, an insulating layer 213 functioning as a gate insulating layer, and a conductive layer 223 functioning as a gate. Here, the same hatched pattern is applied to a plurality of layers obtained by processing the same conductive film. The insulating layer 211 is located between the conductive layer 221 and the semiconductor layer 231. The insulating layer 213 is located between the conductive layer 223 and the semiconductor layer 231.

[0165] The structure of the transistor included in the display device of this embodiment is not particularly limited. For example, a planar transistor, a staggered transistor, an inverted staggered transistor, or the like can be used. In addition, either a top-gate type or a bottom-gate type transistor may be used. Alternatively, gates may be provided above and below a semiconductor layer in which a channel is formed.

[0166] The transistor 201, the transistor 205, and the transistor 206 have a structure in which a semiconductor layer in which a channel is formed is sandwiched between two gates. The two gates may be connected and the same signal may be supplied to the gates to drive the transistors. Alternatively, the threshold voltage of the transistors may be controlled by supplying a potential for controlling the threshold voltage to one of the two gates and a potential for driving to the other gate.

[0167] The crystallinity of a semiconductor material used in a transistor is not particularly limited, and any of an amorphous semiconductor and a crystalline semiconductor (a microcrystalline semiconductor, a polycrystalline semiconductor, a single crystal semiconductor, or a semiconductor partially having a crystalline region) may be used. The use of a crystalline semiconductor is preferable because it can suppress deterioration of transistor characteristics.

[0168] The semiconductor layer of the transistor preferably contains a metal oxide (also referred to as an oxide semiconductor). Alternatively, the semiconductor layer of the transistor may contain silicon. Examples of silicon include amorphous silicon and crystalline silicon (such as low-temperature polysilicon and single crystal silicon).

[0169] The semiconductor layer preferably contains, for example, indium, M (M is one or more selected from gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium), and zinc. In particular, M is preferably one or more selected from aluminum, gallium, yttrium, and tin.

[0170] In particular, it is preferable to use an oxide containing indium (In), gallium (Ga), and zinc (Zn) (also referred to as IGZO) as the semiconductor layer.

[0171] When the semiconductor layer is an In-M-Zn oxide, the sputtering target used to deposit the In-M-Zn oxide preferably has an atomic ratio of In equal to or greater than the atomic ratio of M. Examples of atomic ratios of metal elements in such sputtering targets include In:M:Zn=1:1:1, In:M:Zn=1:1:1.2, In:M:Zn=2:1:3, In:M:Zn=3:1:2, In:M:Zn=4:2:3, In:M:Zn=4:2:4.1, In:M:Zn=5:1:6, In:M:Zn=5:1:7, In:M:Zn=5:1:8, In:M:Zn=6:1:6, In:M:Zn=5:2:5, and the like.

[0172] As the sputtering target, it is preferable to use a target containing a polycrystalline oxide, since it is easy to form a semiconductor layer having crystallinity. The atomic ratio of the semiconductor layer to be formed includes a variation of ±40% of the atomic ratio of the metal elements contained in the sputtering target. For example, when the composition of the sputtering target used for the semiconductor layer is In:Ga:Zn=4:2:4.1 [atomic ratio], the composition of the semiconductor layer to be formed may be close to In:Ga:Zn=4:2:3 [atomic ratio].

[0173] When the atomic ratio is described as In:Ga:Zn=4:2:3 or thereabout, this includes the case where, when the atomic ratio of In is 4, the atomic ratio of Ga is 1 or more and 3 or less, and the atomic ratio of Zn is 2 or more and 4 or less. When the atomic ratio of In is described as In:Ga:Zn=5:1:6 or thereabout, this includes the case where, when the atomic ratio of In is 5, the atomic ratio of Ga is more than 0.1 and 2 or less, and the atomic ratio of Zn is 5 or more and 7 or less. When the atomic ratio of In is described as In:Ga:Zn=1:1:1 or thereabout, this includes the case where, when the atomic ratio of In is 1, the atomic ratio of Ga is more than 0.1 and 2 or less, and the atomic ratio of Zn is more than 0.1 and 2 or less.

[0174] The transistors included in the circuit 164 and the transistors included in the display portion 162 may have the same structure or different structures. The transistors included in the circuit 164 may all have the same structure or may have two or more types. Similarly, the transistors included in the display portion 162 may all have the same structure or may have two or more types.

[0175] A connection portion 204 is provided in an area of ​​the substrate 151 where the substrate 152 does not overlap. In the connection portion 204, the wiring 165 is electrically connected to the FPC 172 via a conductive layer 166 and a connection layer 242. On the upper surface of the connection portion 204, the conductive layer 166 obtained by processing the same conductive film as the pixel electrode 191 is exposed. This allows the connection portion 204 and the FPC 172 to be electrically connected via the connection layer 242.

[0176] Various optical members can be disposed on the outside of the substrate 152. Examples of optical members include a polarizing plate, a retardation plate, a light diffusion layer (such as a diffusion film), an anti-reflection layer, and a light collecting film. In addition, an antistatic film that suppresses the adhesion of dust, a water-repellent film that makes it difficult for dirt to adhere, a hard coat film that suppresses the occurrence of scratches due to use, an impact absorbing layer, and the like may be disposed on the outside of the substrate 152.

[0177] The substrate 151 and the substrate 152 can each be made of glass, quartz, ceramic, sapphire, resin, etc. When the substrate 151 and the substrate 152 are made of a flexible material, the flexibility of the display device can be increased.

[0178] As the adhesive layer, various curing adhesives such as a photo-curing adhesive such as an ultraviolet curing adhesive, a reaction curing adhesive, a heat curing adhesive, and an anaerobic adhesive can be used. Examples of such adhesives include epoxy resin, acrylic resin, silicone resin, phenolic resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, and EVA (ethylene vinyl acetate) resin. In particular, a material with low moisture permeability such as epoxy resin is preferable. A two-liquid mixed resin may also be used. An adhesive sheet or the like may also be used.

[0179] The connection layer 242 may be made of an anisotropic conductive film (ACF), an anisotropic conductive paste (ACP), or the like.

[0180] The light emitting element 190 may be of a top emission type, a bottom emission type, a dual emission type, or the like. A conductive film that transmits visible light is used for the electrode on the side from which light is extracted. In addition, it is preferable to use a conductive film that reflects visible light for the electrode on the side from which light is not extracted.

[0181] The light-emitting element 190 has at least a light-emitting layer 193. The light-emitting element 190 may further have a layer containing a substance with high hole injection properties, a substance with high hole transport properties, a hole blocking material, a substance with high electron transport properties, a substance with high electron injection properties, a bipolar substance (a substance with high electron transport properties and hole transport properties), or the like, as a layer other than the light-emitting layer 193. For example, the common layer 112 preferably has one or both of a hole injection layer and a hole transport layer. For example, the common layer 114 preferably has one or both of an electron transport layer and an electron injection layer.

[0182] Either a low molecular weight compound or a high molecular weight compound may be used for the common layer 112, the light emitting layer 193, and the common layer 114, and may contain an inorganic compound. The layers constituting the common layer 112, the light emitting layer 193, and the common layer 114 can be formed by a deposition method (including a vacuum deposition method), a transfer method, a printing method, an inkjet method, a coating method, or the like.

[0183] The light-emitting layer 193 may contain an inorganic compound such as quantum dots as a light-emitting material.

[0184] The active layer 113 of the light receiving element 110 includes a semiconductor. Examples of the semiconductor include inorganic semiconductors such as silicon, and organic semiconductors including organic compounds. In this embodiment, an example in which an organic semiconductor is used as the semiconductor of the active layer is shown. By using an organic semiconductor, the light emitting layer 193 of the light emitting element 190 and the active layer 113 of the light receiving element 110 can be formed by the same method (for example, vacuum deposition method), which is preferable because the manufacturing equipment can be shared.

[0185] The active layer 113 is made of an n-type semiconductor material such as fullerene (e.g., C 60 , C 70Examples of the p-type semiconductor material of the active layer 113 include an electron-accepting organic semiconductor material such as copper(II) phthalocyanine (CuPc) or a derivative thereof. Examples of the p-type semiconductor material of the active layer 113 include an electron-donating organic semiconductor material such as copper(II) phthalocyanine (CuPc) or tetraphenyldibenzoperiflanthene (DBP).

[0186] For example, the active layer 113 is preferably formed by co-evaporation of an n-type semiconductor and a p-type semiconductor.

[0187] Materials that can be used for the gate, source, and drain of a transistor as well as conductive layers such as various wirings and electrodes that constitute a display device include metals such as aluminum, titanium, chromium, nickel, copper, yttrium, zirconium, molybdenum, silver, tantalum, and tungsten, as well as alloys containing such metals as main components, etc. Films containing these materials can be used as a single layer or a laminated structure.

[0188] As the conductive material having light transmitting properties, conductive oxides such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, zinc oxide containing gallium, or graphene can be used. Alternatively, metal materials such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, and titanium, or alloy materials containing the metal materials can be used. Alternatively, nitrides of the metal materials (for example, titanium nitride) may be used. Note that when using metal materials or alloy materials (or their nitrides), it is preferable to make them thin enough to have light transmitting properties. Also, a stacked film of the above materials can be used as the conductive layer. For example, it is preferable to use a stacked film of an alloy of silver and magnesium and indium tin oxide, because the conductivity can be increased. These can also be used for conductive layers such as various wirings and electrodes constituting a display device, and conductive layers (conductive layers functioning as pixel electrodes or common electrodes) of display elements.

[0189] Examples of insulating materials that can be used for each insulating layer include resins such as acrylic resin and epoxy resin, and inorganic insulating materials such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, and aluminum oxide.

[0190] [Display device 100B] FIG. 9A shows a cross-sectional view of the display device 100B.

[0191] The display device 100B differs from the display device 100A mainly in that the display device 100B has a lens 149 and a protective layer 195.

[0192] By providing a protective layer 195 covering the light receiving element 110 and the light emitting element 190, impurities such as water can be prevented from entering the light receiving element 110 and the light emitting element 190, thereby improving the reliability of the light receiving element 110 and the light emitting element 190.

[0193] In a region 228 near the end of the display device 100B, it is preferable that the insulating layer 215 and the protective layer 195 contact each other through the opening in the insulating layer 214. In particular, it is preferable that the inorganic insulating film of the insulating layer 215 and the inorganic insulating film of the protective layer 195 contact each other. This makes it possible to suppress impurities from entering the display unit 162 from the outside through the organic insulating film. Therefore, it is possible to improve the reliability of the display device 100B.

[0194] 9B shows an example of a three-layer structure of the protective layer 195. In FIG 9B, the protective layer 195 has an inorganic insulating layer 195a on the common electrode 115, an organic insulating layer 195b on the inorganic insulating layer 195a, and an inorganic insulating layer 195c on the organic insulating layer 195b.

[0195] The end of the inorganic insulating layer 195a and the end of the inorganic insulating layer 195c extend outward beyond the end of the organic insulating layer 195b and are in contact with each other. The inorganic insulating layer 195a is in contact with the insulating layer 215 (inorganic insulating layer) through an opening in the insulating layer 214 (organic insulating layer). This allows the insulating layer 215 and the protective layer 195 to surround the light receiving element 110 and the light emitting element 190, thereby improving the reliability of the light receiving element 110 and the light emitting element 190.

[0196] In this way, the protective layer 195 may have a laminated structure of an organic insulating film and an inorganic insulating film. In this case, it is preferable that the end of the inorganic insulating film extends further outward than the end of the organic insulating film.

[0197] A lens 149 is provided on the surface of the substrate 152 facing the substrate 151. The lens 149 has a convex surface facing the substrate 151. It is preferable that the light receiving region of the light receiving element 110 overlaps with the lens 149 and does not overlap with the light emitting layer 193. This can improve the sensitivity and accuracy of the sensor using the light receiving element 110.

[0198] The lens 149 preferably has a refractive index of 1.3 or more and 2.5 or less. The lens 149 can be formed using at least one of an inorganic material and an organic material. For example, a material containing a resin can be used for the lens 149. Also, a material containing at least one of an oxide and a sulfide can be used for the lens 149.

[0199] Specifically, a resin containing chlorine, bromine, or iodine, a resin containing a heavy metal atom, a resin containing an aromatic ring, a resin containing sulfur, or the like can be used for the lens 149. Alternatively, a material containing a resin and nanoparticles of a material having a higher refractive index than the resin can be used for the lens 149. Titanium oxide, zirconium oxide, or the like can be used for the nanoparticles.

[0200] In addition, cerium oxide, hafnium oxide, lanthanum oxide, magnesium oxide, niobium oxide, tantalum oxide, titanium oxide, yttrium oxide, zinc oxide, an oxide containing indium and tin, or an oxide containing indium, gallium, and zinc can be used for the lens 149. Alternatively, zinc sulfide or the like can be used for the lens 149.

[0201] In the display device 100B, the protective layer 195 and the substrate 152 are bonded together by an adhesive layer 142. The adhesive layer 142 is provided so as to overlap the light receiving element 110 and the light emitting element 190, respectively, and a solid sealing structure is applied to the display device 100B.

[0202] [Display device 100C] FIG. 10A shows a cross-sectional view of the display device 100C.

[0203] The display device 100C differs from the display device 100B in the structure of the transistors.

[0204] The display device 100C includes a transistor 208, a transistor 209, and a transistor 210 over a substrate 151.

[0205] The transistor 208, the transistor 209, and the transistor 210 each include a conductive layer 221 functioning as a gate, an insulating layer 211 functioning as a gate insulating layer, a semiconductor layer having a channel formation region 231i and a pair of low-resistance regions 231n, a conductive layer 222a connected to one of the pair of low-resistance regions 231n, a conductive layer 222b connected to the other of the pair of low-resistance regions 231n, an insulating layer 225 functioning as a gate insulating layer, a conductive layer 223 functioning as a gate, and an insulating layer 215 covering the conductive layer 223. The insulating layer 211 is located between the conductive layer 221 and the channel formation region 231i. The insulating layer 225 is located between the conductive layer 223 and the channel formation region 231i.

[0206] The conductive layer 222a and the conductive layer 222b are connected to the low-resistance region 231n through openings provided in the insulating layer 225 and the insulating layer 215, respectively. One of the conductive layer 222a and the conductive layer 222b functions as a source, and the other functions as a drain.

[0207] The pixel electrode 191 of the light emitting element 190 is electrically connected to one of a pair of low resistance regions 231n of the transistor 208 via the conductive layer 222b.

[0208] The pixel electrode 111 of the light receiving element 110 is electrically connected to the other of the pair of low resistance regions 231n of the transistor 209 via the conductive layer 222b.

[0209] 10A shows an example in which the insulating layer 225 covers the upper surface and side surface of the semiconductor layer. On the other hand, in FIG. 10B, the insulating layer 225 overlaps with the channel formation region 231i of the semiconductor layer 231, but does not overlap with the low-resistance region 231n. For example, the insulating layer 225 is processed using the conductive layer 223 as a mask, so that the structure shown in FIG. 10B can be manufactured. In FIG. 10B, the insulating layer 215 is provided to cover the insulating layer 225 and the conductive layer 223, and the conductive layer 222a and the conductive layer 222b are connected to the low-resistance region 231n through the openings in the insulating layer 215. Furthermore, an insulating layer 218 may be provided to cover the transistor.

[0210] The display device 100C also differs from the display device 100B in that it has a color layer 147.

[0211] The color layer 147 is located on the insulating layer 214 , and the partition wall 216 is provided so as to cover the upper surface and side surfaces of the color layer 147 .

[0212] In Fig. 10A, the color layer 147 and the light receiving element 110 are spaced apart from each other. Similarly, the color layer 147 and the light emitting element 190 are spaced apart from each other. The arrangement of the color layer 147 is not limited to that shown in Fig. 10A. As shown in Fig. 10C, the color layer 147 may cover one or both of the ends of the pixel electrode 111 and the pixel electrode 191.

[0213] 10A, the colored layer 147 is provided apart from the light receiving element 110 and the light emitting element 190, and therefore even if the colored layer 147 is a layer with low resistivity, it is unlikely to affect the light receiving element 110 and the light emitting element 190. Therefore, the range of materials to be used for the colored layer 147 is preferably widened.

[0214] 10C, the colored layer 147 covers the ends of the pixel electrodes 111 and 191, so that the area in which the colored layer 147 is provided can be made larger. The larger the area in which the colored layer 147 is provided, the more stray light generated in the display device can be absorbed by the colored layer 147, and the less amount of stray light incident on the light receiving element 110 can be reduced, which is preferable. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0215] [Display device 100D] FIG. 11 shows a cross-sectional view of the display device 100D.

[0216] The display device 100D differs from the display device 100C in that it does not have the color layer 147 but has a color layer 148a.

[0217] The colored layer 148 a has a portion in contact with the upper surface of the pixel electrode 111 of the light receiving element 110 and a portion in contact with the side surface of the partition wall 216 .

[0218] The colored layer 148a absorbs stray light generated within the display device 100D, thereby reducing the amount of stray light incident on the light receiving element 110. This reduces noise and increases the sensitivity of the sensor using the light receiving element 110.

[0219] Display device 100D also differs from display device 100C in that display device 100D does not include substrate 151 and substrate 152, but includes substrate 153, substrate 154, adhesive layer 155, and insulating layer 212.

[0220] The substrate 153 and the insulating layer 212 are bonded together by an adhesive layer 155. The substrate 154 and the protective layer 195 are bonded together by an adhesive layer 142.

[0221] The display device 100D is manufactured by transferring the insulating layer 212, the transistor 208, the transistor 209, the light receiving element 110, the light emitting element 190, and the like, which are formed on a manufacturing substrate, onto a substrate 153. Each of the substrate 153 and the substrate 154 is preferably flexible. This can increase the flexibility of the display device 100D.

[0222] The insulating layer 212 can be formed using the inorganic insulating film that can be used for the insulating layers 211, 213, and 215.

[0223] Moreover, the display device 100C shows an example in which the lens 149 is not provided, while the display device 100D shows an example in which the lens 149 is provided. The lens 149 can be provided as appropriate depending on the application of the sensor, etc.

[0224] [Metal oxides] Metal oxides that can be used for the semiconductor layer will be described below.

[0225] In this specification and the like, metal oxides containing nitrogen may also be collectively referred to as metal oxides. Metal oxides containing nitrogen may also be referred to as metal oxynitrides. For example, metal oxides containing nitrogen, such as zinc oxynitride (ZnON), may be used for the semiconductor layer.

[0226] In this specification, etc., the term CAAC (c-axis aligned crystal) and CAC (Cloud-Aligned Composite) may be used. CAAC represents an example of a crystal structure, and CAC represents an example of a function or material configuration.

[0227] For example, the semiconductor layer can be made of a cloud-aligned composite (CAC)-oxide semiconductor (OS).

[0228] CAC-OS or CAC-metal oxide has a conductive function in a part of the material and an insulating function in a part of the material, and has a function as a semiconductor as a whole. When CAC-OS or CAC-metal oxide is used in a semiconductor layer of a transistor, the conductive function is a function of flowing electrons (or holes) that become carriers, and the insulating function is a function of not flowing electrons that become carriers. By making the conductive function and the insulating function act complementarily, it is possible to impart a switching function (on / off function) to CAC-OS or CAC-metal oxide. By separating the respective functions in CAC-OS or CAC-metal oxide, it is possible to maximize both functions.

[0229] Moreover, the CAC-OS or CAC-metal oxide has a conductive region and an insulating region. The conductive region has the above-mentioned conductive function, and the insulating region has the above-mentioned insulating function. In addition, in the material, the conductive region and the insulating region may be separated at the nanoparticle level. In addition, the conductive region and the insulating region may be unevenly distributed in the material. In addition, the conductive region may be observed to be connected in a cloud shape with a blurred periphery.

[0230] In addition, in the CAC-OS or CAC-metal oxide, the conductive regions and the insulating regions may each be dispersed in the material with a size of 0.5 nm to 10 nm, preferably 0.5 nm to 3 nm.

[0231] In addition, the CAC-OS or CAC-metal oxide is composed of components having different band gaps. For example, the CAC-OS or CAC-metal oxide is composed of a component having a wide gap due to an insulating region and a component having a narrow gap due to a conductive region. In this configuration, when carriers are caused to flow, the carriers mainly flow in the component having the narrow gap. In addition, the component having the narrow gap acts complementarily on the component having the wide gap, and carriers also flow in the component having the wide gap in conjunction with the component having the narrow gap. Therefore, when the above CAC-OS or CAC-metal oxide is used in the channel formation region of a transistor, a high current driving force in the on state of the transistor, that is, a large on-current and a high field effect mobility can be obtained.

[0232] That is, CAC-OS or CAC-metal oxide can also be called a matrix composite or a metal matrix composite.

[0233] Oxide semiconductors (metal oxides) are classified into single-crystal oxide semiconductors and other non-single-crystal oxide semiconductors, such as c-axis aligned crystalline oxide semiconductors (CAAC-OS), polycrystalline oxide semiconductors, nanocrystalline oxide semiconductors (nc-OS), amorphous-like oxide semiconductors (a-like OS), and amorphous oxide semiconductors.

[0234] CAAC-OS has a c-axis orientation and a distorted crystal structure in which multiple nanocrystals are connected in the ab-plane direction. The distortion refers to a portion where the lattice orientation changes between a region with a uniform lattice arrangement and a region with a different uniform lattice arrangement in the region where multiple nanocrystals are connected.

[0235] Nanocrystals are basically hexagonal, but may be non-regular hexagonal. In addition, the lattice arrangement may be pentagonal or heptagonal due to the distortion. In CAAC-OS, it is difficult to confirm clear grain boundaries even in the vicinity of the distortion. In other words, it is found that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is because CAAC-OS can tolerate distortion due to the fact that the arrangement of oxygen atoms in the ab-plane direction is not dense and the bond distance between atoms changes due to the substitution of metal elements.

[0236] CAAC-OS also tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium and oxygen (hereinafter, In layer) and a layer containing element M, zinc, and oxygen (hereinafter, (M, Zn) layer) are stacked. Note that indium and element M can be substituted for each other, and when element M in an (M, Zn) layer is substituted for indium, it can also be represented as an (In, M, Zn) layer. When indium in an In layer is substituted for element M, it can also be represented as an (In, M) layer.

[0237] CAAC-OS is a metal oxide with high crystallinity. On the other hand, it is difficult to confirm clear crystal boundaries in CAAC-OS, so it is said that the decrease in electron mobility caused by crystal boundaries is unlikely to occur. In addition, since the crystallinity of metal oxides can be decreased by the inclusion of impurities or the generation of defects, CAAC-OS is unlikely to have impurities or defects (oxygen vacancies (V O : It is also called oxygen vacancy. ) Therefore, metal oxides with CAAC-OS have stable physical properties. Therefore, metal oxides with CAAC-OS are resistant to heat and highly reliable.

[0238] The nc-OS has periodic atomic arrangement in a microscopic region (for example, a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). In addition, the nc-OS does not show regularity in the crystal orientation between different nanocrystals. Therefore, no orientation is seen throughout the film. Therefore, depending on the analysis method, the nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor.

[0239] Indium-gallium-zinc oxide (hereinafter referred to as IGZO), a type of metal oxide containing indium, gallium, and zinc, may have a stable structure when made into the above-mentioned nanocrystals. In particular, since IGZO tends to have difficulty in crystal growth in the atmosphere, it may be structurally more stable when made into small crystals (for example, the above-mentioned nanocrystals) rather than large crystals (here, crystals of several mm or several cm).

[0240] The a-like OS is a metal oxide having a structure between the nc-OS and an amorphous oxide semiconductor. The a-like OS has a pore or low-density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS.

[0241] Oxide semiconductors (metal oxides) have a variety of structures and each structure has different characteristics. The oxide semiconductor of one embodiment of the present invention may include two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, an nc-OS, and a CAAC-OS.

[0242] The metal oxide film functioning as the semiconductor layer can be formed using either one or both of an inert gas and an oxygen gas. The flow rate ratio of oxygen (oxygen partial pressure) during the formation of the metal oxide film is not particularly limited. However, in order to obtain a transistor with high field effect mobility, the flow rate ratio of oxygen (oxygen partial pressure) during the formation of the metal oxide film is preferably 0% or more and 30% or less, more preferably 5% or more and 30% or less, and even more preferably 7% or more and 15% or less.

[0243] The energy gap of the metal oxide is preferably 2 eV or more, more preferably 2.5 eV or more, and further preferably 3 eV or more. By using a metal oxide having such a wide energy gap, the off-state current of the transistor can be reduced.

[0244] The substrate temperature during deposition of the metal oxide film is preferably 350° C. or lower, more preferably room temperature or higher and 200° C. or lower, and further preferably room temperature or higher and 130° C. or lower. When the substrate temperature during deposition of the metal oxide film is room temperature, productivity can be increased, which is preferable.

[0245] The metal oxide film can be formed by a sputtering method, or by other methods such as PLD, PECVD, thermal CVD, ALD, and vacuum deposition.

[0246] As described above, the display device of this embodiment has a light receiving element and a light emitting element in the display portion, and the display portion has both a function of displaying an image and a function of detecting light. This allows the electronic device to be made smaller and lighter than when a sensor is provided outside the display portion or the display device. In addition, a more multifunctional electronic device can be realized by combining the display device with a sensor provided outside the display portion or the display device.

[0247] At least one layer of the light receiving element other than the active layer can be configured in common with the light emitting element (EL element). Furthermore, all layers of the light receiving element other than the active layer can be configured in common with the light emitting element (EL element). For example, the light emitting element and the light receiving element can be formed on the same substrate by simply adding a process of forming an active layer to the manufacturing process of the light emitting element. In addition, the pixel electrode and the common electrode of the light receiving element and the light emitting element can be formed from the same material and in the same process. In addition, the manufacturing process of the display device can be simplified by manufacturing the circuit electrically connected to the light receiving element and the circuit electrically connected to the light emitting element from the same material and in the same process. In this way, a display device with a high convenience can be manufactured by incorporating a light receiving element without having a complicated process.

[0248] In addition, the display device of this embodiment has a colored layer between the light receiving element and the light emitting element. The colored layer may also serve as a partition wall that electrically insulates the light receiving element and the light emitting element. The colored layer can absorb stray light in the display device, and therefore can increase the sensitivity of a sensor using the light receiving element.

[0249] This embodiment mode can be combined with other embodiment modes as appropriate. In addition, in the case where a plurality of configuration examples are shown in one embodiment mode in this specification, the configuration examples can be combined as appropriate.

[0250] (Embodiment 2) In this embodiment, a display device of one embodiment of the present invention will be described with reference to FIGS.

[0251] A display device according to one embodiment of the present invention includes a first pixel circuit having a light-receiving element and a second pixel circuit having a light-emitting element, the first pixel circuit and the second pixel circuit being arranged in a matrix.

[0252] FIG. 12A shows an example of a first pixel circuit having a light receiving element, and FIG. 12B shows an example of a second pixel circuit having a light emitting element.

[0253] 12A includes a light receiving element PD, a transistor M1, a transistor M2, a transistor M3, a transistor M4, and a capacitance element C1. Here, an example is shown in which a photodiode is used as the light receiving element PD.

[0254] The cathode of the light receiving element PD is electrically connected to the wiring V1, and the anode is electrically connected to one of the source and drain of the transistor M1. The gate of the transistor M1 is electrically connected to the wiring TX, and the other of the source and drain is electrically connected to one electrode of the capacitance element C1, one of the source and drain of the transistor M2, and the gate of the transistor M3. The gate of the transistor M2 is electrically connected to the wiring RES, and the other of the source and drain is electrically connected to the wiring V2. The source and drain of the transistor M3 is electrically connected to the wiring V3, and the other of the source and drain is electrically connected to one of the source and drain of the transistor M4. The gate of the transistor M4 is electrically connected to the wiring SE, and the other of the source and drain is electrically connected to the wiring OUT1.

[0255] A constant potential is supplied to the wiring V1, the wiring V2, and the wiring V3. When the light receiving element PD is driven with a reverse bias, a potential lower than the potential of the wiring V1 is supplied to the wiring V2. The transistor M2 is controlled by a signal supplied to the wiring RES, and has a function of resetting the potential of the node connected to the gate of the transistor M3 to the potential supplied to the wiring V2. The transistor M1 is controlled by a signal supplied to the wiring TX, and has a function of controlling the timing at which the potential of the node changes according to the current flowing through the light receiving element PD. The transistor M3 functions as an amplifying transistor that outputs according to the potential of the node. The transistor M4 is controlled by a signal supplied to the wiring SE, and functions as a selection transistor for reading out the output according to the potential of the node in an external circuit connected to the wiring OUT1.

[0256] 12B includes a light-emitting element EL, a transistor M5, a transistor M6, a transistor M7, and a capacitor C2. Here, an example is shown in which a light-emitting diode is used as the light-emitting element EL. In particular, it is preferable to use an organic EL element as the light-emitting element EL.

[0257] The transistor M5 has a gate electrically connected to the wiring VG, one of its source and drain electrically connected to the wiring VS, and the other of its source and drain electrically connected to one electrode of the capacitor C2 and the gate of the transistor M6. One of the source and drain of the transistor M6 is electrically connected to the wiring V4, and the other is electrically connected to the anode of the light-emitting element EL and one of the source and drain of the transistor M7. The transistor M7 has a gate electrically connected to the wiring MS, and the other of its source and drain electrically connected to the wiring OUT2. The cathode of the light-emitting element EL is electrically connected to the wiring V5.

[0258] A constant potential is supplied to the wiring V4 and the wiring V5. The anode side of the light-emitting element EL can be set to a high potential, and the cathode side can be set to a lower potential than the anode side. The transistor M5 is controlled by a signal supplied to the wiring VG, and functions as a selection transistor for controlling the selection state of the pixel circuit PIX2. The transistor M6 also functions as a drive transistor for controlling the current flowing through the light-emitting element EL according to the potential supplied to the gate. When the transistor M5 is in a conductive state, the potential supplied to the wiring VS is supplied to the gate of the transistor M6, and the light emission luminance of the light-emitting element EL can be controlled according to the potential. The transistor M7 is controlled by a signal supplied to the wiring MS, and has a function of outputting the potential between the transistor M6 and the light-emitting element EL to the outside via the wiring OUT2.

[0259] The wiring V1 to which the cathode of the light receiving element PD is electrically connected and the wiring V5 to which the cathode of the light emitting element EL is electrically connected can be in the same layer and have the same potential.

[0260] In the display device of the present embodiment, an image may be displayed by making the light-emitting element emit light in a pulsed manner. By shortening the driving time of the light-emitting element, it is possible to reduce the power consumption of the display device and suppress heat generation. In particular, organic EL elements are suitable because they have excellent frequency characteristics. The frequency can be, for example, 1 kHz or more and 100 MHz or less.

[0261] Here, it is preferable that the transistors M1, M2, M3, and M4 in the pixel circuit PIX1, and the transistors M5, M6, and M7 in the pixel circuit PIX2 are transistors that use a metal oxide (oxide semiconductor) in the semiconductor layer in which a channel is formed.

[0262] A transistor using a metal oxide, which has a wider band gap and a lower carrier density than silicon, can achieve an extremely small off-state current. Therefore, the small off-state current allows the charge stored in the capacitor connected in series to the transistor to be held for a long period of time. Therefore, it is preferable to use transistors using an oxide semiconductor for the transistor M1, the transistor M2, and the transistor M5 connected in series to the capacitor C1 or the capacitor C2 in particular. In addition, by using transistors using an oxide semiconductor for the other transistors as well, the manufacturing cost can be reduced.

[0263] Alternatively, the transistors M1 to M7 may each be a transistor in which silicon is used as a semiconductor in which a channel is formed. In particular, the use of silicon with high crystallinity, such as single crystal silicon or polycrystalline silicon, is preferable because high field-effect mobility can be achieved and faster operation can be achieved.

[0264] Alternatively, a structure in which an oxide semiconductor is used for at least one of the transistors M1 to M7 and silicon is used for the remaining transistors may be used.

[0265] Note that although the transistors are depicted as n-channel transistors in FIGS. 12A and 12B, p-channel transistors can also be used.

[0266] The transistors of the pixel circuit PIX1 and the transistors of the pixel circuit PIX2 are preferably formed side by side on the same substrate. In particular, it is preferable that the transistors of the pixel circuit PIX1 and the transistors of the pixel circuit PIX2 are mixed and periodically arranged in one region.

[0267] In addition, it is preferable to provide one or more layers having one or both of a transistor and a capacitor at a position overlapping with the light receiving element PD or the light emitting element EL, which can reduce the effective area occupied by each pixel circuit and realize a high-definition light receiving section or display section.

[0268] This embodiment mode can be combined with other embodiment modes as appropriate.

[0269] (Embodiment 3) In this embodiment, electronic devices according to one embodiment of the present invention will be described with reference to FIGS.

[0270] The electronic device of this embodiment includes the display device of one embodiment of the present invention. For example, the display device of one embodiment of the present invention can be applied to a display portion of an electronic device. The display device of one embodiment of the present invention has a function of detecting light, and therefore can perform biometric authentication or detect touch or near-touch in the display portion. This can improve the functionality, convenience, and the like of the electronic device.

[0271] Examples of electronic devices include electronic devices with relatively large screens, such as television sets, desktop or notebook personal computers, computer monitors, digital signage, large game machines such as pachinko machines, as well as digital cameras, digital video cameras, digital photo frames, mobile phones, portable game machines, personal digital assistants, and audio playback devices.

[0272] The electronic device of this embodiment may have a sensor (including a function to measure force, displacement, position, velocity, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor, or infrared rays).

[0273] The electronic device of the present embodiment can have various functions, such as a function of displaying various information (still images, videos, text images, etc.) on a display unit, a touch panel function, a function of displaying a calendar, date, time, etc., a function of executing various software (programs), a wireless communication function, a function of reading out a program or data recorded on a recording medium, etc.

[0274] Electronic device 6500 shown in FIG. 13A is a portable information terminal that can be used as a smartphone.

[0275] The electronic device 6500 includes a housing 6501, a display portion 6502, a power button 6503, a button 6504, a speaker 6505, a microphone 6506, a camera 6507, and a light source 6508. The display portion 6502 has a touch panel function.

[0276] The display device of one embodiment of the present invention can be applied to the display portion 6502.

[0277] FIG. 13B is a schematic cross-sectional view including the end of the housing 6501 on the microphone 6506 side.

[0278] A light-transmitting protective member 6510 is provided on the display surface side of the housing 6501, and a display panel 6511, optical members 6512, a touch sensor panel 6513, a printed circuit board 6517, a battery 6518, etc. are arranged in the space surrounded by the housing 6501 and the protective member 6510.

[0279] A display panel 6511, an optical member 6512, and a touch sensor panel 6513 are fixed to the protective member 6510 by an adhesive layer (not shown).

[0280] In an area outside the display unit 6502, a part of the display panel 6511 is folded back, and the folded back part is connected to an FPC 6515. An IC 6516 is mounted on the FPC 6515. The FPC 6515 is connected to a terminal provided on a printed circuit board 6517.

[0281] The flexible display of one embodiment of the present invention can be applied to the display panel 6511. Therefore, an extremely lightweight electronic device can be realized. In addition, since the display panel 6511 is extremely thin, a large-capacity battery 6518 can be mounted thereon while suppressing the thickness of the electronic device. In addition, by folding back a part of the display panel 6511 and arranging a connection portion with the FPC 6515 on the back side of the pixel portion, an electronic device with a narrow frame can be realized.

[0282] 14A shows an example of a television device. In a television device 7100, a display unit 7000 is incorporated in a housing 7101. Here, the housing 7101 is supported by a stand 7103.

[0283] The display device of one embodiment of the present invention can be applied to the display portion 7000.

[0284] 14A can be operated using an operation switch provided on the housing 7101 or a separate remote control 7111. Alternatively, a touch sensor may be provided on the display unit 7000, and the television unit 7100 may be operated by touching the display unit 7000 with a finger or the like. The remote control 7111 may have a display unit that displays information output from the remote control 7111. Using an operation key or a touch panel provided on the remote control 7111, it is possible to operate the channel and the volume, and to operate the video displayed on the display unit 7000.

[0285] The television device 7100 includes a receiver and a modem. The receiver can receive general television broadcasts. By connecting to a wired or wireless communication network via the modem, one-way (from sender to receiver) or two-way (between sender and receiver, or between receivers) information communication can be performed.

[0286] 14B shows an example of a laptop personal computer 7200. The laptop personal computer 7200 includes a housing 7211, a keyboard 7212, a pointing device 7213, an external connection port 7214, and the like. A display unit 7000 is incorporated in the housing 7211.

[0287] The display device of one embodiment of the present invention can be applied to the display portion 7000.

[0288] 14C and 14D show an example of digital signage.

[0289] 14C includes a housing 7301, a display unit 7000, and a speaker 7303. The digital signage 7300 may further include an LED lamp, an operation key (including a power switch or an operation switch), a connection terminal, various sensors, a microphone, and the like.

[0290] 14D shows a digital signage 7400 attached to a cylindrical pole 7401. The digital signage 7400 has a display unit 7000 provided along the curved surface of the pole 7401.

[0291] 14C and 14D, the display device of one embodiment of the present invention can be applied to the display portion 7000.

[0292] The larger the display unit 7000, the more information can be provided at one time. Also, the larger the display unit 7000, the more easily it catches people's attention, which can increase the advertising effect of, for example, advertisements.

[0293] Applying a touch panel to the display unit 7000 is preferable because it not only displays images or videos on the display unit 7000 but also allows the user to intuitively operate it. Furthermore, when used for providing information such as route information or traffic information, usability can be improved by intuitive operation.

[0294] 14C and 14D, it is preferable that the digital signage 7300 or the digital signage 7400 can be linked to an information terminal 7311 or an information terminal 7411 such as a smartphone carried by a user via wireless communication. For example, advertising information displayed on the display unit 7000 can be displayed on the screen of the information terminal 7311 or the information terminal 7411. Furthermore, the display on the display unit 7000 can be switched by operating the information terminal 7311 or the information terminal 7411.

[0295] In addition, a game can be executed on the digital signage 7300 or the digital signage 7400 using the screen of the information terminal 7311 or the information terminal 7411 as an operation means (controller). This allows an unspecified number of users to participate in and enjoy the game at the same time.

[0296] The electronic device shown in Figures 15A to 15F has a housing 9000, a display unit 9001, a speaker 9003, operation keys 9005 (including a power switch or an operation switch), a connection terminal 9006, a sensor 9007 (including a function to measure force, displacement, position, speed, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor or infrared rays), a microphone 9008, etc.

[0297] The electronic device shown in Fig. 15A to Fig. 15F has various functions. For example, it can have a function of displaying various information (still images, videos, text images, etc.) on the display unit, a touch panel function, a function of displaying a calendar, date or time, a function of controlling processing by various software (programs), a wireless communication function, a function of reading and processing a program or data recorded on a recording medium, etc. The functions of the electronic device are not limited to these, and it can have various functions. The electronic device may have multiple display units. In addition, the electronic device may have a camera or the like to capture still images and videos and store them on a recording medium (external or built-in to the camera), a function of displaying the captured images on the display unit, etc.

[0298] The electronic device shown in FIGS. 15A to 15F will be described in detail below.

[0299] FIG. 15A is a perspective view showing a mobile information terminal 9101. The mobile information terminal 9101 can be used as, for example, a smartphone. Note that the mobile information terminal 9101 may be provided with a speaker 9003, a connection terminal 9006, a sensor 9007, and the like. The mobile information terminal 9101 can display text and image information on a plurality of surfaces. FIG. 15A shows an example in which three icons 9050 are displayed. Information 9051 shown in a dashed rectangle can also be displayed on another surface of the display unit 9001. Examples of the information 9051 include notifications of incoming e-mail, SNS, and phone calls, titles of e-mail and SNS, sender names, date and time, time, remaining battery level, and antenna reception strength. Alternatively, the icon 9050 or the like may be displayed at the position where the information 9051 is displayed.

[0300] 15B is a perspective view showing a mobile information terminal 9102. The mobile information terminal 9102 has a function of displaying information on three or more sides of the display unit 9001. Here, an example is shown in which information 9052, information 9053, and information 9054 are displayed on different sides. For example, a user can check information 9053 displayed in a position that can be observed from above the mobile information terminal 9102 while holding the mobile information terminal 9102 in a breast pocket of clothes. The user can check the display without taking the mobile information terminal 9102 out of the pocket and decide, for example, whether or not to answer a call.

[0301] FIG. 15C is a perspective view showing a wristwatch-type mobile information terminal 9200. The mobile information terminal 9200 can be used as, for example, a smart watch. The display surface of the display unit 9001 is curved, and display can be performed along the curved display surface. The mobile information terminal 9200 can also perform hands-free conversation by communicating with, for example, a headset capable of wireless communication. The mobile information terminal 9200 can also perform data transmission and charging with another information terminal through a connection terminal 9006. Note that charging may be performed by wireless power supply.

[0302] 15D, 15E, and (F) are perspective views showing a foldable mobile information terminal 9201. FIG. 15D is a perspective view of the mobile information terminal 9201 in an unfolded state, FIG. 15F is a perspective view of the mobile information terminal 9201 in a folded state, and FIG. 15E is a perspective view of a state in the middle of changing from one of FIG. 15D and FIG. 15F to the other. The mobile information terminal 9201 has excellent portability in a folded state, and has excellent viewability of the display due to a seamless wide display area in an unfolded state. The display unit 9001 of the mobile information terminal 9201 is supported by three housings 9000 connected by hinges 9055. For example, the display unit 9001 can be bent with a curvature radius of 0.1 mm or more and 150 mm or less.

[0303] This embodiment mode can be appropriately combined with other embodiment modes and examples. EXAMPLES

[0304] In this example, calculation results of an imaging range of one pixel included in a display device of one embodiment of the present invention will be described with reference to FIGS.

[0305] The components used in the calculation in this embodiment and their positional relationships will be described with reference to FIGS. 16A and 16B.

[0306] 16A and 16B, a light-shielding layer BM is provided on a substrate SUB. The light-receiving element PD is provided spaced apart from the substrate SUB and the light-shielding layer BM. The light-shielding layer BM has an opening, and the light-receiving element PD overlaps with the opening.

[0307] The configuration shown in Fig. 16B differs from the configuration shown in Fig. 16A in that a lens LE is provided on a substrate SUB. The lens LE overlaps with an opening in a light-shielding layer BM and a light-receiving element PD.

[0308] In this embodiment, it is assumed that the light receiving element PD is used as a fingerprint sensor or the like, and that the subject is in contact with the surface of the substrate SUB.

[0309] In this embodiment, the calculation was performed using the size d of the light receiving element PD, the imaging range D of the light receiving element PD, the distance L1 between the pinhole and the subject, the distance L2 between the light receiving element PD and the pinhole, and the diameter p of the pinhole, all of which are shown in Figures 16A and 16B. Note that the distance L1 corresponds to the optical path length of the substrate SUB. Also, the distance L1 in Figure 16B can be said to be the distance between the lens LE and the subject. Also, the diameter p of the pinhole corresponds to the diameter of the opening of the light shielding layer BM.

[0310] First, using the configuration shown in FIG. 16A, the relationship between the pinhole diameter p and the imaging range D of the light receiving element PD was calculated.

[0311] The conditions used in the calculations were determined assuming that a light-receiving element was mounted on a flexible OLED panel that has a different light-emitting layer painted for each color.

[0312] Specifically, the resolution was 254ppi, the pixel size was 100μm□, the size d of the light receiving element PD was 14μm□, and the distance L2 was 30μm. It was also assumed that one pixel had a red (R) subpixel, a green (G) subpixel, a blue (B) subpixel, and a subpixel having a light receiving element PD. The total aperture ratio of the RGB subpixels was 10.1%, the aperture ratio of the subpixel having the light receiving element PD was 2.0%, and the aperture ratio of one pixel was 12.1%.

[0313] Fig. 17 shows the relationship between the pinhole diameter p and the imaging range D of the light receiving element PD obtained by calculation. Fig. 17 shows the results for five conditions with different values ​​of the distance L1 (distance L1 = 100 μm, 200 μm, 500 μm, 1000 μm, and 2000 μm).

[0314] As above, the calculation was performed under the condition of a pixel size of 100 μm, so if the imaging range D of the light receiving element PD is 100 μm or less, the imaging range of one light receiving element PD can be said to fit within the area of ​​one pixel. On the other hand, if the imaging range D of the light receiving element PD exceeds 100 μm, it will overlap with the imaging range D of the adjacent light receiving element PD, and the captured image will be blurred.

[0315] 17, it was found that when the distance L1 is 100 μm and 200 μm, there is a condition for the pinhole diameter p that allows the imaging range D of the light receiving element PD to fit within the area of ​​one pixel. Also, when the distance L1 is 500 μm or more, it was found that even when the diameter p is ≈ 0 μm, the imaging range D of the light receiving element PD becomes wider than the area of ​​one pixel.

[0316] Even under conditions and configurations where the imaging ranges D of adjacent light receiving elements PD overlap, a clearer image can be obtained by performing image processing to reduce blurring of the image after capture. On the other hand, if the imaging range D of the light receiving element PD can be contained within an area of ​​one pixel, this image processing becomes unnecessary, which is preferable.

[0317] In addition, as described above, since the distance L1 corresponds to the optical path length of the substrate SUB, in order to shorten the distance L1, it is necessary to thin the substrate SUB, which may reduce the strength and bending resistance of the flexible OLED panel.

[0318] Therefore, a calculation was performed to determine whether the range of distance L1 at which the imaging range D of the light receiving element PD can be contained within the area of ​​one pixel can be expanded by using the lens LE.

[0319] Specifically, using the configuration shown in FIG. 16B, the relationship between the imaging range D of the light receiving element PD and the distance L1 between the pinhole and the subject was calculated.

[0320] The conditions used in the calculation were the same as above. The pinhole diameter p was set to 14 μm.

[0321] FIG. 18 shows the relationship between the imaging range D of the light receiving element PD and the distance L1 between the pinhole and the subject, which is obtained by calculation.

[0322] From FIG. 18, it can be seen that when the distance L1 is 215 μm or less, the imaging range D of the light receiving element PD is 100 μm or less, and the imaging range D can be contained within the region of one pixel.

[0323] On the other hand, from FIG. 17, it can be seen that when the lens LE is not used, under the condition of the diameter p = 14 μm and the distance L1 = 100 μm, the imaging range D can be contained within the area of ​​one pixel, but under the condition of the diameter p = 14 μm and the distance L1 = 200 μm, the imaging range D of the light receiving element PD is wider than 100 μm.

[0324] 17 and 18, it was found that the range of the distance L1 at which the imaging range D of the light receiving element PD can be contained within an area of ​​one pixel is widened by using the lens LE. Specifically, it was found that, for the same pinhole diameter p, the use of the lens LE makes it possible to contain the imaging range D within an area of ​​one pixel even if the distance L1 is made longer than when the lens LE is not used.

[0325] The longer the distance L1, the thicker the substrate SUB can be. For example, in addition to the thicker substrate itself, at least one of an antistatic film, a water-repellent film, a hard coat film, and an impact absorbing layer can be additionally disposed on the substrate. Therefore, the strength, bending resistance, and reliability of the flexible OLED panel can be improved.

[0326] As described above, the results of this embodiment confirmed that there is a condition that allows the imaging range D of the light receiving element PD to be contained within the area of ​​one pixel, regardless of the presence or absence of the lens LE. It was also found that the condition can be broadened by providing the lens LE. For example, it was suggested that the strength, bending resistance, and reliability of the flexible OLED panel can be improved because the thickness of the substrate SUB can be increased. EXAMPLES

[0327] In this embodiment, a light receiving element is fabricated, and the light receiving element is used in an image sensor to perform imaging. The results are described below.

[0328] The photodetector 1 of this example has a structure common to the light-emitting element, and has a layered structure that can be fabricated by replacing the light-emitting layer of the light-emitting element with the active layer of the photodetector. The comparative photodetector 2 has a structure that is not common to the light-emitting element, and has a layered structure suitable for an image sensor.

[0329] The chemical formulas of the materials used in this example are shown below.

[0330] [ka]

[0331] The element structure of the light receiving element of this example is shown in Table 1. Furthermore, with reference to Table 1, the light receiving element 1 and the comparative light receiving element 2 will be explained.

[0332] [Table 1]

[0333] [Photodetector 1] As shown in Table 1, in the light receiving element 1, a three-layer structure of a titanium film with a thickness of about 50 nm, an aluminum film with a thickness of about 200 nm, and a titanium film with a thickness of about 5 nm was used as the first electrode.

[0334] The first buffer layer of the light receiving element 1 corresponds to the hole injection layer and the hole transport layer of the light emitting element.

[0335] First, a layer corresponding to the hole injection layer was formed by co-evaporating 3-[4-(9-phenanthryl)-phenyl]-9-phenyl-9H-carbazole (abbreviation: PCPPn) and molybdenum oxide in a weight ratio of PCPPn:molybdenum oxide = 2: 1. The layer corresponding to the hole injection layer was formed to a thickness of about 15 nm.

[0336] Next, a layer corresponding to a hole transport layer was deposited by vapor deposition using N-(1,1'-biphenyl-4-yl)-N-[4-(9-phenyl-9H-carbazol-3-yl)phenyl]-9,9-dimethyl-9H-fluoren-2-amine (abbreviation: PCBBiF) to a thickness of 60 nm.

[0337] The active layer of the light receiving element 1 is made of fullerene (C 70 ) and tetraphenyldibenzoperiflanthene (abbreviation: DBP) in a weight ratio of C 70 The active layer was formed by co-evaporation so that the ratio of DMF to DBP was 9:1. The active layer was formed to a thickness of about 60 nm.

[0338] The second buffer layer of the light receiving element 1 corresponds to the electron transport layer and the electron injection layer of the light emitting element.

[0339] First, a layer corresponding to an electron transport layer was formed by sequentially evaporating 2-[3'-(dibenzothiophen-4-yl)biphenyl-3-yl]dibenzo[f,h]quinoxaline (abbreviation: 2mDBTBPDBq-II) to a thickness of 10 nm and 2,9-bis(naphthalen-2-yl)-4,7-diphenyl-1,10-phenanthroline (abbreviation: NBPhen) to a thickness of 10 nm.

[0340] Next, a layer corresponding to the electron injection layer was formed by vapor deposition using lithium fluoride (LiF) to a thickness of 1 nm.

[0341] The second electrode of the light receiving element 1 was formed by co-evaporation of silver (Ag) and magnesium (Mg) with a volume ratio of 10:1 to a thickness of 9 nm, and then indium tin oxide (ITO) was formed by sputtering to a thickness of 70 nm.

[0342] In this manner, the light receiving element 1 was fabricated.

[0343] [Comparative photodetector 2] As shown in Table 1, the comparative light-receiving element 2 used a three-layer structure as the first electrode, which was made up of a titanium film having a thickness of about 50 nm, an aluminum film having a thickness of about 200 nm, and a titanium film having a thickness of about 5 nm.

[0344] The first buffer layer of the comparative photodiode 2 is made of fullerene (C 70 ) was used to deposit a film having a thickness of approximately 10 nm.

[0345] The active layer of the comparative photodetector 2 is the same as that of the photodetector 1, and contains fullerene (C 70 ) and DBP in a weight ratio of C 70 The active layer was formed by co-evaporation so that the ratio of DMF to DBP was 9:1. The active layer was formed to a thickness of about 60 nm.

[0346] The second buffer layer of the comparative photodetector 2 was formed by vapor deposition using molybdenum oxide to a thickness of about 60 nm.

[0347] The second electrode of the comparative light-receiving element 2 was formed by sputtering ITO to a thickness of about 70 nm.

[0348] In this manner, a comparative light-receiving element 2 was fabricated.

[0349] [Current vs. irradiated light intensity characteristics of photodetector 1] 19 shows the results of evaluating the current-irradiation light intensity characteristics of the light receiving element 1. In FIG. 19, the vertical axis represents the current (A) and the horizontal axis represents the irradiation light intensity (W / cm 2 )

[0350] The light receiving area of ​​the light receiving element 1 was 2 mm x 2 mm.

[0351] With a voltage of -2V applied to the photodetector 1, light with a wavelength of λ=550 nm is detected at 1 μW / cm 2 to 40 μW / cm 2 The current was measured under the above conditions. The voltage applied here (-2V) is usually the value when the bias applied to the EL element is positive. In other words, the positive voltage is when the first electrode side is at a high potential and the second electrode side is at a low potential.

[0352] 19, it was confirmed that the amount of current changed linearly with respect to the intensity of the irradiated light, suggesting that the image sensor using the light receiving element 1 operates normally.

[0353] [Image results] Next, an image sensor chip was fabricated using each of the light receiving element 1 and the comparative light receiving element 2, and still images were captured.

[0354] The imaging results of the image sensor chip using the light receiving element 1 are shown in Figures 20A and 20B. Figure 20A shows the data before correction. In addition, the data before correction was corrected for gradation and unevenness between pixels using an all-white image and an all-black image captured in advance by the image sensor chip using the light receiving element 1. Figure 20B shows the data after correction.

[0355] The imaging results of the image sensor chip using the comparative light receiving element 2 are shown in Figures 20C and 20D. Figure 20C shows the data before correction. In addition, the data before correction was corrected for gradation and unevenness between pixels using an all-white image and an all-black image captured in advance by the image sensor chip using the comparative light receiving element 2. Figure 20D shows the data after correction.

[0356] 20A to 20D, still images could be captured satisfactorily in both the image sensor chip using the light receiving element 1 and the image sensor chip using the comparative light receiving element 2. In other words, using the light receiving element 1 having a structure common to the light emitting element, imaging results equivalent to those obtained using the comparative light receiving element 2 having a layered structure suitable for an image sensor could be obtained.

[0357] As described above, in this embodiment, an image sensor capable of performing good imaging can be manufactured by using a light receiving element having a common structure to a light emitting element. EXAMPLES

[0358] In this embodiment, a display device having a light receiving element and a light emitting element in a display portion is manufactured, and the result is described.

[0359] [Cross-sectional structure] FIG. 21 shows a device structure constituting a pixel of a display device.

[0360] One pixel of the display device produced in this embodiment has a total of four elements: organic EL elements OLED of three colors, Red (R), Green (G), and Blue (B), and one organic photodiode OPD, and circuits (drive circuits 43, 44) for independently driving these four elements.

[0361] Each of the four elements is provided on a substrate 151 (glass substrate). Furthermore, a drive circuit 43 electrically connected to the pixel electrode 111 of the organic photodiode OPD and a drive circuit 44 electrically connected to the pixel electrode 191 of the organic EL element OLED are provided on the substrate 151. The organic photodiode OPD is configured to detect light incident from the opposing substrate side. The organic EL element OLED has a top emission structure that emits light to the opposing substrate side (the common electrode 115 side in FIG. 21). The pixel electrode 111 and the pixel electrode 191 have the function of reflecting visible light.

[0362] The four elements each have a different hole transport layer, and the light emitting layers of the organic EL elements OLED and the active layers of the organic photodiodes OPD of each color are different. Specifically, the organic photodiode OPD has a hole transport layer 186 and an active layer 113, the red organic EL element OLED has a hole transport layer 196R and a light emitting layer 193R, the green organic EL element OLED has a hole transport layer 196G and a light emitting layer 193G, and the blue organic EL element OLED has a hole transport layer 196B and a light emitting layer 193B.

[0363] The common layers 112, 114a, 114b, and the common electrode 115 are common to the four elements and are formed using a common mask. In this embodiment, the common layer 112 is a hole injection layer, the common layer 114a is an electron transport layer, and the common layer 114b is an electron injection layer. The common electrode 115 has a function of transmitting visible light and a function of reflecting visible light.

[0364] In this way, by simply changing the configuration from one in which light-emitting elements of three colors, R, G, and B, are separately manufactured to one in which four types, including the organic photodiode OPD, are separately manufactured, it is possible to form photosensors over the entire surface of the display section of the organic EL display. The display device configuration of this embodiment is superior in terms of process, cost, and design compared to a case in which the photosensor is incorporated as a separate module, and is easy to make compact and flexible.

[0365] The imaging method of the display device of this embodiment will be described with reference to Fig. 1C. Imaging by the display device of this embodiment is performed by using light emitted by the organic EL element OLED as a light source and detecting reflected light from an object to be imaged by the organic photodiode OPD.

[0366] 1C, when capturing an image of a fingerprint of a finger 52 in contact with a substrate 59 (opposing substrate), the light emitted by the organic EL element OLED is reflected by the finger 52 on the substrate 59, and the organic photodiode OPD detects the reflected light. At this time, the fingerprint can be captured by utilizing the difference in reflectance of the projections and recesses of the fingerprint.

[0367] In addition, in the display device of this embodiment, a black resin layer is provided on the opposing substrate. This black resin layer corresponds to the light-shielding layer BM shown in FIG. 2A. By providing the black resin layer, it is possible to prevent the light emitted from the organic EL element OLED from being reflected within the display device and the reflected light from being directly incident on the organic photodiode OPD. Furthermore, the black resin layer is also used to adjust the imaging range of the organic photodiode OPD. By setting the diameter of the opening of the black resin layer according to the desired imaging range, it is possible to prevent the captured image from becoming blurred.

[0368] Although imaging of a fingerprint can be detected using only monochromatic light and does not need to be color imaging, the display device of this embodiment is capable of color imaging by sequentially emitting light from the R, G, and B organic EL elements and detecting the reflected light of each in a time-division manner. For example, a color image can be arranged on the opposing substrate and the color image can be scanned in color. When using this method, it is only necessary to arrange an organic photodiode OPD having sensitivity to the entire visible light range, and there is no need to arrange individual organic photodiodes OPD for R, G, and B, which is advantageous for achieving high definition.

[0369] [Photodetector considerations] As described above, in the display device of this embodiment, the common electrode 115, which is the upper electrode, has the function of transmitting and reflecting visible light, and the microcavity structure is applied to both the organic EL element OLED and the organic photodiode OPD, which can improve the color purity of the organic EL element OLED and narrow the wavelength range that is sensed by the organic photodiode OPD.

[0370] Fig. 22 shows the relationship between the wavelength dependency of the spectral sensitivity and the film thickness of the hole transport layer in a light receiving element having a similar configuration to the organic photodiode OPD adopted in the display device of this embodiment. Fig. 22 also shows the normalized absorption spectrum of the light receiving element. In Fig. 22, the first vertical axis is the spectral sensitivity (arbitrary unit), the second vertical axis is the absorption spectrum (arbitrary unit), and the horizontal axis is the wavelength (unit: nm).

[0371] The materials of the light receiving element in this embodiment are the same as those of the light receiving element 1 in Example 2 (Table 1), except that the pixel electrode 111 is made of a laminated structure of an alloy of silver (Ag), palladium (Pd) and copper (Cu) (Ag-Pd-Cu (APC)) film and an indium tin oxide (ITSO) film containing silicon oxide, and PCPPn is used for the hole transport layer.

[0372] As shown in Figure 22, it was found that the absorption band of the photodetector exists throughout the entire visible light range, and that the absorbance decreases as the wavelength becomes longer in the red range. In contrast, it was found that the spectral sensitivity of the photodetector has a peak, and that the peak shifts depending on the thickness of the hole transport layer. From this, it was confirmed that it is necessary to appropriately adjust the thickness of the hole transport layer of the organic photodiode OPD for the wavelength range to be detected.

[0373] In this embodiment, a fingerprint image is captured by emitting light from a green organic EL element OLED. Therefore, an organic photodiode OPD with a hole transport layer thickness of 40 nm, which can cover a wide range from blue to red, with a focus on green (wavelength of about 550 nm), is adopted for the display device of this embodiment.

[0374] Figure 23 shows the relationship between the incident light intensity and the photocurrent when monochromatic light with a wavelength of 550 nm is irradiated onto an organic photodiode OPD with a hole transport layer thickness of 40 nm. In Figure 23, the vertical axis represents the current density (unit: μA / cm 2 ), the horizontal axis is the incident light intensity (unit: μW / cm 2 ).

[0375] As shown in Fig. 23, a linear relationship between the incident light intensity and the photocurrent was confirmed when the applied voltage was -2 V or less. In particular, when the voltage was -3 V or more and -6 V or less, it was confirmed that the voltage dependency was small and that there was a saturation region.

[0376] When scanning an image, sensing with analog gradation is required. Also, when scanning a color image, a wide wavelength range is required for detection. Therefore, it is necessary to have linearity between the incident light intensity and the photocurrent over a wide wavelength range, and a wide saturation region. From Figures 22 and 23, it was confirmed that the organic photodiode OPD, which shares part of the device structure with the organic EL element OLED, meets the above requirements and can operate without any problems as a light sensor.

[0377] [Display device configuration] In this example, an active matrix display device was fabricated with a diagonal screen size of 3.07 inches, a pixel count of 360 (H) x 540 (V), a pixel pitch of 120 μm x 120 μm, and a resolution of 212 ppi. The gate driver was built-in, and the source driver was an external IC implemented using the COG method. The readout circuit was an analog voltage sequential output.

[0378] In the display device of this embodiment, a transistor including an oxide semiconductor for a semiconductor layer is used as a switching element. A transistor including a CAAC-OS for a semiconductor layer has a feature of having a very small off-state current. This feature has an advantage in terms of sensing in that imaging can be performed using a global shutter method. In addition, in the case of a still image, the number of times an image is rewritten can be reduced, enabling driving (IDS driving) that leads to low power consumption.

[0379] IDS driving is an idling stop driving that operates at a frame frequency slower than normal. In IDS driving, after executing the image data writing process, the rewriting of image data is stopped. By writing image data once and then extending the interval until the next image data writing, it is possible to reduce the power consumption required for writing image data during that time. The frame frequency of IDS driving can be, for example, 1 / 100 to 1 / 10 of normal operation (typically 60 Hz to 240 Hz). In a still image, the video signal is the same between consecutive frames. Therefore, the IDS driving mode is particularly effective when displaying still images.

[0380] Normally, image rewriting operations cause noise in the sensor, lowering the signal-to-noise ratio. However, with IDS drive, image rewriting operations can be stopped while retaining the image during sensing. This means that sensing can be performed without being affected by noise caused by image rewriting, and the deterioration of the signal-to-noise ratio can be suppressed.

[0381] In the display device of this embodiment, one frame is divided into a display period and a sensing period. By using IDS driving during the sensing period, the image is not rewritten, and noise during sensing is reduced. In addition, since the light emitted by the organic EL element OLED is used as a light source for fingerprint authentication and image scanning, it is necessary to keep the luminance of the light emitted by the organic EL element OLED constant. In this case, too, by adopting IDS driving, noise can be reduced and good sensing can be performed.

[0382] [Display results] The display result of the display device of this example is shown in Fig. 24. As shown in Fig. 24, it was confirmed that the display device having a light receiving element and a light emitting element in the display section can display an image well.

[0383] [Image results] 25 shows the result of imaging using the organic photodiode OPD with the light emitted by the organic EL element OLED as the light source in the display device of this embodiment. Note that image correction was performed on the captured image using the detection values ​​of white display and black display measured in advance as reference values. In addition, during image correction, the detection values ​​of the captured image were corrected to the black display values ​​in areas where the detection values ​​were significantly different from the reference values.

[0384] Fig. 25 shows the result of printing an image on paper, placing the paper on the display device with the printed side facing the display device, and capturing an image. The exposure time was 1.78 msec, and the readout time was 248 msec. Color imaging was performed by RGB time division. As shown in Fig. 25, it was confirmed that a color image could be captured well using the display device of this embodiment.

[0385] In addition, when a finger was placed on the display device and the green organic EL element OLED was made to emit light to capture an image of the fingerprint, the fingerprint pattern caused by the unevenness of the fingerprint could be captured satisfactorily. This confirmed that the display device of this embodiment can capture images with the same high resolution as a fingerprint. [Explanation of symbols]

[0386] C1: Capacitive element, C2: Capacitive element, EL: Light emitting element, IR: Light emitting element, L1: Distance, L2: Distance, LE: Lens, M1: Transistor, M2: Transistor, M3: Transistor, M4: Transistor, M5: Transistor, M6: Transistor, M7: Transistor, OLED: Organic EL element, OPD: Organic photodiode, OUT1: Wiring, OUT2: Wiring, PD: Light receiving element, PIX1: Pixel circuit, PIX2: Pixel circuit, SUB: Substrate, V1: Wiring, V2: Wiring, V3: Wiring, V4: Wiring, V5: Wiring, 10A: Display device, 10B: Display device, 1 0C: display device, 10D: display device, 10E: display device, 10F: display device, 10G: display device, 10H: display device, 10J: display device, 10K: display device, 10L: display device, 10M: display device, 21: light emission, 22: light, 23a: light, 23b: reflected light, 23c: light, 23d: reflected light, 41: transistor, 42: transistor, 43: driving circuit, 44: driving circuit, 50A: display device, 50B: display device, 51: substrate, 52: finger, 53: layer having light receiving element, 55: layer having transistor, 57: layer having light emitting element, 59: substrate, 100A: display device , 100B: display device, 100C: display device, 100D: display device, 110: light receiving element, 111: pixel electrode, 112: common layer, 113: active layer, 114: common layer, 114a: common layer, 114b: common layer, 115: common electrode, 142: adhesive layer, 143: space, 146: lens array, 147: colored layer, 148: colored layer, 148a: colored layer, 148b: colored layer, 148c: colored layer, 149: lens, 151: substrate, 152: substrate, 153: substrate, 154: substrate, 155: adhesive layer, 162: display unit, 164: circuit, 165: wiring, 166: conductive layer, 172: FP C, 173: IC, 182: buffer layer, 184: buffer layer, 186: hole transport layer, 190: light emitting element, 191: pixel electrode, 192: buffer layer, 193: light emitting layer, 193B: light emitting layer, 193G: light emitting layer, 193R: light emitting layer, 194: buffer layer, 195: protective layer, 195a: inorganic insulating layer, 195b: organic insulating layer, 195c: inorganic insulating layer, 196B: hole transport layer, 196G: hole transport layer, 196R: hole transport layer, 201: transistor, 204: connection portion, 205: transistor, 206: transistor, 208: transistor, 209: transistor,210: transistor, 211: insulating layer, 212: insulating layer, 213: insulating layer, 214: insulating layer, 215: insulating layer, 216: partition wall, 217: partition wall, 218: insulating layer, 221: conductive layer, 222a: conductive layer, 222b: conductive layer, 223: conductive layer, 225: insulating layer, 228: region, 231: semiconductor layer, 231i: channel formation region, 231n: low resistance region, 242: connection layer, 6500: electronic device, 6 501: Housing, 6502: Display unit, 6503: Power button, 6504: Button, 6505: Speaker, 6506: Microphone, 6507: Camera, 6508: Light source, 6510: Protective member, 6511: Display panel, 6512: Optical member, 6513: Touch sensor panel, 6515: FPC, 6516: IC, 6517: Printed circuit board, 6518: Battery, 7000: Display unit, 7100: Television application device, 7101: housing, 7103: stand, 7111: remote control device, 7200: notebook personal computer, 7211: housing, 7212: keyboard, 7213: pointing device, 7214: external connection port, 7300: digital signage, 7301: housing, 7303: speaker, 7311: information terminal device, 7400: digital signage, 7401: pillar, 741 1: information terminal, 9000: housing, 9001: display unit, 9003: speaker, 9005: operation keys, 9006: connection terminal, 9007: sensor, 9008: microphone, 9050: icon, 9051: information, 9052: information, 9053: information, 9054: information, 9055: hinge, 9101: portable information terminal, 9102: portable information terminal, 9200: portable information terminal, 9201: portable information terminal,

Claims

1. A display device having a display unit, The display unit includes a light receiving element and a light emitting element, the light receiving element has a first pixel electrode, a hole transport layer, an active layer, an electron transport layer and a common electrode; the light-emitting element includes a second pixel electrode, the hole transport layer, the light-emitting layer, the electron transport layer, and the common electrode; the active layer comprises a first organic compound; the light-emitting layer has a second organic compound different from the first organic compound; the common electrode has a portion overlapping the first pixel electrode via the active layer and a portion overlapping the second pixel electrode via the light emitting layer, the hole transport layer has a region overlapping with the active layer and a region overlapping with the light emitting layer, The display device, wherein the electron transport layer has a region overlapping with the active layer and a region overlapping with the light-emitting layer.

2. A display device having a display unit, the display unit includes a light receiving element, a light emitting element, and a light blocking layer; the light receiving element has a first pixel electrode, a hole transport layer, an active layer, an electron transport layer and a common electrode; the light-emitting element includes a second pixel electrode, the hole transport layer, the light-emitting layer, the electron transport layer, and the common electrode; the active layer comprises a first organic compound; the light-emitting layer has a second organic compound different from the first organic compound; the common electrode has a portion overlapping the first pixel electrode via the active layer and a portion overlapping the second pixel electrode via the light emitting layer, the light-shielding layer has an opening provided in a region overlapping the light-receiving element and an opening provided in a region overlapping the light-emitting element, the hole transport layer has a region overlapping with the active layer and a region overlapping with the light emitting layer, The display device, wherein the electron transport layer has a region overlapping with the active layer and a region overlapping with the light-emitting layer.

3. In claim 1 or 2, The display device, wherein the active layer has a region in contact with the hole transport layer and a region in contact with the electron transport layer.

4. In any one of claims 1 to 3, The display unit further includes a partition wall, the partition wall covers an end portion of the first pixel electrode and an end portion of the second pixel electrode; The partition has a function of electrically insulating the first pixel electrode and the second pixel electrode.

5. In claim 4, The partition has a function of absorbing at least a part of light emitted by the light emitting element.

6. In claim 4, The display unit further includes a color layer, the color layer has a portion in contact with an upper surface of the first pixel electrode and a portion in contact with a side surface of the partition wall.

7. In claim 4, The display unit further includes an insulating layer and a color layer, the color layer, the first pixel electrode, and the second pixel electrode each have a portion in contact with an upper surface of the insulating layer; The partition wall covers an upper surface and a side surface of the color layer.

8. In claim 4, The display unit further includes an insulating layer and a color layer, the partition wall, the first pixel electrode, and the second pixel electrode each have a portion in contact with an upper surface of the insulating layer; the partition has an opening reaching the insulating layer, the color layer has a portion in contact with the insulating layer through the opening and a portion in contact with an upper surface of the partition wall.

9. In any one of claims 1 to 8, The display unit further includes a lens. the lens has a portion overlapping the light receiving element, The display device, wherein the light transmitted through the lens is incident on the light receiving element.

10. In any one of claims 1 to 9, The display device, wherein the display unit is flexible.

11. A display module comprising: a display device according to any one of claims 1 to 10; and at least one of a connector and an integrated circuit.

12. A display module according to claim 11; An electronic device having at least one of an antenna, a battery, a housing, a camera, a speaker, a microphone, and an operation button.

Images