X-ray diffraction measurement equipment

Abstract

To suppress enlargement of an X-ray diffraction measurement device 10.SOLUTION: An X-ray diffraction measurement device 10 emits an X-ray from a bulb 20 to a measurement object. The X-ray diffraction measurement device 10 includes: detection sensors 40 for detecting an X-ray diffracted by the measurement object; circulation liquid flow passages 34 for cooling the temperature of the bulb 20; a Peltier element 22 for performing temperature adjustment of the detection sensors 40 on one surface; and heat conductive members 38 having thermal conductivity and to be brought into contact with the opposite surface of the Peltier element 22 and the circulation liquid flow passages 34.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an X-ray diffraction measurement device. [Background technology]

[0002] Conventionally, there has been known an X-ray diffraction measurement device that irradiates an object to be measured with X-rays from an X-ray emitter and measures the residual stress, etc. of the object to be measured based on a light reception signal of a detection sensor that receives the X-rays diffracted by the object to be measured.

[0003] In this regard, Patent Document 1 discloses a technique for reducing power consumption in a Peltier element and a water-cooling unit used for cooling an X-ray sensor portion (a cooling target). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-255915 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the technique described in Patent Document 1, the X-ray sensor portion is cooled using a water-cooling unit, which causes a problem that the X-ray diffraction measurement device becomes large and limits the size of the measurement target.

[0006] The present invention has been made in view of the above problems, and has an object to provide an X-ray diffraction measurement device that can prevent the X-ray diffraction measurement device from becoming large. [Means for solving the problem]

[0007] In order to solve the above problems, an X-ray diffraction measurement device according to a first aspect of the present invention is an X-ray diffraction measurement device that emits X-rays from a tube toward a measurement object, and includes a detection sensor that detects X-rays diffracted by the measurement object, a circulating fluid flow path for cooling the temperature of the tube, a Peltier element on one side that adjusts the temperature of the detection sensor, and a heat conductive member that is in contact with the opposite side of the Peltier element and the circulating fluid flow path and has thermal conductivity. Note that the above phrase "in contact with the opposite surface of the Peltier element and the circulating fluid flow path" may include cases where the opposite surface of the Peltier element and the circulating fluid flow path are not in direct contact with the heat conductive member, but may include cases where the opposite surface of the Peltier element and the circulating fluid flow path are in thermal contact with the heat conductive member.

[0008] In a second aspect of the present invention, the sensor further includes a temperature adjustment plate that contacts one surface of the Peltier element and transfers heat absorption or generation of the Peltier element at the one surface to the detection sensor.

[0009] In a third aspect of the present invention, the device further includes a heat dissipation member attached to the thermal conduction member and configured to dissipate heat to outside air.

[0010] In a fourth aspect of the present invention, the heat conducting member is made of a material having a higher thermal conductivity than the heat dissipating member.

[0011] In a fifth aspect of the present invention, the thermally conductive member is made of copper, and the heat dissipation member is a heat sink made of aluminum.

[0012] In a sixth aspect of the present invention, the Peltier elements are provided on each of the longitudinal side surfaces of the X-ray diffraction measurement device, and the temperature adjustment plate has a bottom surface on the detection sensor side and a side surface in contact with one side of each of the Peltier elements.

[0013] In a seventh aspect of the present invention, a film heater is provided which is in contact with the temperature adjustment plate and assists the temperature adjustment by the Peltier element. Effect of the Invention

[0014] According to the present invention, it is possible to prevent the X-ray diffraction measurement device from becoming large. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a diagram showing an example of the overall configuration of an X-ray diffraction measurement system. [Diagram 2] FIG. 1 is a diagram illustrating an example of a partial configuration of an X-ray diffraction measurement apparatus according to a first embodiment. [Diagram 3] FIG. 1 is an exploded view of an X-ray diffraction measurement device according to a first embodiment. [Figure 4] 1 is a cross-sectional view of an X-ray diffraction measurement device according to a first embodiment. [Diagram 5] FIG. 4 is a diagram showing an example of a partial configuration of an X-ray diffraction measurement apparatus according to a second embodiment. [Figure 6] FIG. 4 is an exploded view of an X-ray diffraction measurement device according to a second embodiment. [Figure 7] FIG. 4 is a cross-sectional view of an X-ray diffraction measurement apparatus according to a second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, a number of embodiments of the present invention will be described with reference to the accompanying drawings. In order to facilitate understanding of the description, the same reference numerals are used to refer to the same components in each drawing as much as possible, and duplicated descriptions will be omitted.

[0017] ---First embodiment --- First, the first embodiment will be described.

[0018] <Overall composition> FIG. 1 is a diagram showing an example of the overall configuration of an X-ray diffraction measurement system 1. 1, the X-ray diffraction measurement system 1 includes, for example, an X-ray diffraction measurement device 10, a door box B, a storage tank 12, and a computer 14. Note that the illustration of the X-ray diffraction measurement device 10 is simplified in FIG.

[0019] The X-ray diffractometer 10 has a function of emitting X-rays from an X-ray tube 20, which will be described later, toward an object to be measured such as a gear or a shaft, and measuring the diffraction intensity of the X-rays diffracted from the object to be measured.

[0020] The door box B surrounds the X-ray diffractometer 10. The door box B has a door, and the user can set the object to be measured on the X-ray diffractometer 10 by opening the door.

[0021] The storage tank 12 is configured to be able to store cooling water. Note that a plurality of such storage tanks 12 may exist.

[0022] The computer 14 is connected to the X-ray diffractometer 10 and has a function of controlling the X-ray diffractometer 10. Further, the computer 14 receives the measurement result (electrical signal) of the diffraction intensity from the X-ray diffractometer 10, and analyzes and measures the structure and characteristics of the object to be measured based on the measurement result. In the first embodiment, the residual stress of the object to be measured is analyzed and measured based on the measurement result.

[0023] <Configuration of the X-ray diffractometer 10> FIG. 2 is a diagram showing an example of a partial configuration of the X-ray diffractometer 10 according to the first embodiment. FIG. 3 is an exploded view of the X-ray diffractometer 10 according to the first embodiment. FIG. 4 is a cross-sectional view of the X-ray diffractometer 10 according to the first embodiment. As shown in FIGS. 2 to 4, the X-ray diffractometer 10 according to the first embodiment includes, for example, an X-ray tube 20, a Peltier element 22, a substrate mounting plate 23, a temperature control plate 24, a collimator 26, a sensor substrate 28, a heat conduction sheet 30, a heat conduction plate 32, a circulating liquid flow path 34, a heat dissipation member 36, a heat conduction member 38, and a detection sensor 40. Further, the X-ray diffractometer 10 is a substantially rectangular parallelepiped whose one direction is longer than the vertical direction.

[0024] The X-ray tube 20 has a function as an X-ray emitter that generates X-rays and emits the generated X-rays toward an object to be measured.

[0025] The Peltier element 22 functions as a temperature regulator for adjusting the temperature of the detection sensor 40 (sensor substrate 28) within a set range. The temperature within this set range is an operating environment temperature at which the resistance of the detection sensor 40 changes and the detection sensitivity of diffracted X-rays, such as dark current, is not affected (measurement error is small). The Peltier element 22 is sandwiched between the heat conductive member 38 and the temperature adjustment plate 24, and is in contact with the heat conductive member 38 and the temperature adjustment plate 24. For example, the Peltier element 22 adjusts the temperature of the detection sensor 40 on one surface. In the first embodiment, the Peltier element 22 has one surface (lower surface) in contact with the temperature adjustment plate 24 and is thermally coupled to the detection sensor 40 (sensor substrate 28) via the temperature adjustment plate 24, the thermally conductive sheet 30, and the thermally conductive plate 32, and can adjust the temperature of the detection sensor 40 (sensor substrate 28) by absorbing or generating heat on the one surface. Moreover, the opposite surface of the Peltier element 22 is thermally coupled to the heat dissipation member 36 and the circulating fluid flow path 34 via the heat conduction member 38. In the first embodiment, the opposite surface (upper surface) of the Peltier element 22 is in contact with the heat conduction member 38, and even if the opposite surface generates heat, the opposite surface can be efficiently cooled by the heat dissipation member 36 and the circulating fluid flow path 34 via the heat conduction member 38. Note that the opposite surface (upper surface) of the Peltier element 22 may be in contact with the heat dissipation member 36 or the circulating fluid flow path 34.

[0026] For example, when the temperature of the detection sensor 40 (sensor board 28) is higher than the set range, the computer 14 applies a current in one direction (e.g., from positive to negative) to the Peltier element 22, so that one surface (lower surface) on the temperature adjustment plate 24 side absorbs heat (decreases in temperature) and the opposite surface (upper surface) on the heat conductive member 38 side generates heat (increases in temperature). On the other hand, when the temperature of the detection sensor 40 is lower than the set range, the computer 14 applies a current in the opposite direction (e.g., from negative to positive) to the Peltier element 22, so that one surface (lower surface) on the temperature adjustment plate 24 side generates heat and the opposite surface (upper surface) on the heat conductive member 38 side absorbs heat. The temperature of the detection sensor 40 (sensor board 28) is measured by a temperature sensor (not shown) attached between the temperature adjustment plate 24 and the heat conductive sheet 30, for example. The detection sensor 40 may be attached to the sensor board 28.

[0027] The substrate mounting plate 23 is a plate on which the sensor substrate 28 and the thermally conductive sheet 30 are attached to the thermally conductive member 38. The substrate mounting plate 23 is made of a material that has low thermal conductivity from the adjacent temperature adjustment plate 24. An example of this material is fluororesin.

[0028] The temperature adjustment plate 24 has a function of transferring heat absorption or heat generation on one surface of the Peltier element 22 to the detection sensor 40 (sensor substrate 28) via the heat conductive sheet 30 or the heat conductive plate 32. In the first embodiment, the temperature adjustment plate 24 contacts one surface (lower surface) of the Peltier element 22 and transfers heat absorption or heat generation of the Peltier element 22 on the one surface to the detection sensor 40 via the heat conductive sheet 30 or the heat conductive plate 32. Here, the temperature adjustment plate 24 is preferably small in size in order to efficiently transfer heat absorption or heat generation by the Peltier element 22 to the detection sensor 40 (to prevent heat transfer loss). For example, the temperature adjustment plate 24 is preferably the same size as the Peltier element 22 or one size larger than the Peltier element 22. This temperature adjustment plate 24 is made of a material having thermal conductivity. Examples of this material include materials with high thermal conductivity such as copper and aluminum.

[0029] The collimator extends from the bulb 20 toward the sensor substrate and has a function of adjusting the emission range of X-rays from the bulb 20. The tip of the collimator protrudes downward from the sensor substrate .

[0030] The sensor substrate 28 is provided with two detection sensors 40 for detecting X-rays diffracted by the measurement object on the lower surface of the X-ray diffraction measurement device 10. The detection sensors 40 are preferably integrated with a sensor section for detecting X-rays diffracted by the measurement object and a circuit section for converting the detected X-rays into an electrical signal. An example of the detection sensors 40 is an SOI (Silicon on Insulator) sensor. The sensor board 28 also includes a connector and the like for transmitting the electrical signal converted by the detection sensor 40 to the computer 14 .

[0031] The thermally conductive sheet 30 is sandwiched between the temperature adjustment plate 24 and the sensor board 28, and is a cushion member having electrical insulation and thermal conductivity. The thermally conductive sheet 30 is made of, for example, a silicon sheet. The thermally conductive sheet 30 has through holes for contacting the thermally conductive plate 32 with the temperature adjustment plate 24. In the first embodiment, the Peltier element 22, the temperature adjustment plate 24, the sensor substrate 28, and the heat conductive sheet 30 are provided with through holes through which the collimator 26 protrudes.

[0032] Two heat conducting plates 32 are provided on the upper surface of the sensor substrate 28, are in contact with the temperature adjustment plate 24, and have the function of transferring heat absorption or heat generation on one surface (lower surface) of the Peltier element 22 to two detection sensors 40 provided on the lower surface of the sensor substrate 28. The heat conducting plates 32 are made of, for example, a material having a higher thermal conductivity than the heat conducting sheet 30. Examples of such materials include copper and aluminum.

[0033] The circulating fluid flow path 34 has a function of cooling the temperature of the tubes 20 in contact therewith to a constant temperature (for example, the same as the outside air temperature). For example, the circulating fluid flow path 34 is connected to the storage tank 12, and water (for example, cold water or room temperature water) pumped up from the storage tank 12 by a pump (not shown) circulates through the circulating fluid flow path 34. In the first embodiment, the circulating fluid flow path 34 is in contact with not only the bulb 20 but also the heat conductive member 38. As a result, when the opposite surface of the Peltier element 22 generates heat, the circulating fluid flow path 34 can cool the opposite surface of the Peltier element 22 together with the bulb 20. The circulating fluid flow path 34 may be in contact with the heat dissipation member 36.

[0034] The heat dissipation member 36 is attached to the outside of the heat conduction member 38, and has a function of dissipating heat from the heat conduction member 38 to the outside air. In the first embodiment, the heat dissipation member 36 is in contact with the heat conduction member 38, and when the opposite surface (upper surface) of the Peltier element 22 generates heat, the heat from the opposite surface is dissipated to the outside air via the heat conduction member 38. The heat dissipation member 36 is also cooled by the circulating fluid flow path 34 via the heat conduction member 38. The heat dissipation member 36 can also absorb heat from the heat conduction member 38 to the outside air. In the first embodiment, the heat dissipation members 36 are provided on each side surface of the X-ray diffraction measurement apparatus 10 in the longitudinal direction and on the top surface of the X-ray diffraction measurement apparatus 10. The heat dissipation members 36 are made of a material having thermal conductivity. Examples of this material include materials with high thermal conductivity such as aluminum. Examples of the heat dissipation members 36 include a heat sink made of aluminum. This heat sink has, for example, a plurality of fins provided on a portion exposed to the outside air.

[0035] The heat conducting member 38 is made of a material having thermal conductivity and has a function of transferring heat from the opposite surface of the Peltier element 22 to the heat dissipation member 36 and the circulating fluid flow path 34. In the first embodiment, the heat conducting member 38 is in contact with at least the opposite surface (upper surface) of the Peltier element 22, the circulating fluid flow path 34, and the heat dissipation member 36, and has a function of cooling (dissipating heat) the opposite surface by the heat dissipation member 36 and the circulating fluid flow path 34 when the opposite surface of the Peltier element 22 generates heat. In the first embodiment, the heat conducting member 38 has a shape in which the inside is in contact with the bulb 20 and the circulating fluid flow path 34, and a flat shape in which the outside is in contact with the opposite surface (upper surface) of the Peltier element 22 and the heat dissipation member 36. For example, the heat conducting member 38 is made of a material having a higher thermal conductivity than the heat dissipation member 36. For example, this material may be copper. The heat conducting member 38 may be made of the same material as the heat dissipating member 36 and may be molded integrally with the heat dissipating member 36 .

[0036] ---Second embodiment--- Next, a second embodiment will be described.

[0037] The second embodiment differs from the first embodiment in that a plurality of Peltier elements 22 are provided, that the shapes of the temperature adjustment plate 24 and the heat conductive member 38 are changed, and that a film heater 50 and a heater cover 52 are provided. Note that the configuration and functions of the X-ray diffraction measurement apparatus 10 according to the second embodiment, which will not be described below, are similar to the configuration and functions of the X-ray diffraction measurement apparatus 10 according to the first embodiment.

[0038] Fig. 5 is a diagram showing an example of a partial configuration of the X-ray diffraction measurement apparatus 10 according to the second embodiment. Fig. 6 is an exploded view of the X-ray diffraction measurement apparatus 10 according to the second embodiment. Fig. 7 is a cross-sectional view of the X-ray diffraction measurement apparatus 10 according to the second embodiment. As shown in Figures 5 to 7, the X-ray diffraction measurement apparatus 10 according to the second embodiment includes, for example, a tube 20, a Peltier element 22, a substrate mounting plate 23, a temperature adjustment plate 24, a collimator 26, a sensor substrate 28, a heat conduction sheet 30, a heat conduction plate 32, a circulating fluid flow path 34, a heat dissipation member 36, a heat conduction member 38, a detection sensor 40, a film heater 50, and a heater cover 52.

[0039] In the second embodiment, the Peltier elements 22 are provided on each side surface in the longitudinal direction of the X-ray diffraction measurement apparatus 10. Each of the Peltier elements 22 is sandwiched between a heat conductive member 38 and a temperature adjustment plate 24, and is provided so as to be in contact with the heat conductive member 38 and the temperature adjustment plate 24. In the second embodiment, when the temperature of the detection sensor 40 is higher than the set range, for example, a current is passed from the computer 14 in one direction, so that one surface (inner surface) of each Peltier element 22 on the temperature adjustment plate 24 side absorbs heat and the opposite surface (outer surface) on the heat conductive member 38 side generates heat. On the other hand, when the temperature of the detection sensor 40 is lower than the set range, a current is passed from the computer 14 in the opposite direction, so that one surface (inner surface) on the temperature adjustment plate 24 side generates heat and the opposite surface (outer surface) on the heat conductive member 38 side absorbs heat.

[0040] In the second embodiment, the temperature adjustment plate 24 has a function of transferring heat absorption or heat generation from one surface (inner surface) of each Peltier element 22 to the detection sensor 40 (sensor board 28) via the heat conduction sheet 30 or the heat conduction plate 32. In the second embodiment, the temperature adjustment plate 24 has a function of transferring heat generated by the film heater 50 placed on the bottom surface on the detection sensor 40 side to the detection sensor 40 (sensor board 28) via the heat conduction sheet 30 or the heat conduction plate 32. For this reason, in the second embodiment, the temperature adjustment plate 24 has a U-shape having a bottom surface on the detection sensor 40 side and a side surface in contact with one surface (inner surface) of each Peltier element 22.

[0041] Moreover, in the second embodiment, the heat conduction member 38 is in contact with the heat dissipation member 36, the opposite surfaces (outer surfaces) of the Peltier elements 22, and the circulating fluid flow path 34, and when the opposite surfaces of the Peltier elements 22 generate heat, the opposite surfaces are cooled (heat dissipated) by the heat dissipation member 36 and the circulating fluid flow path 34. Moreover, in the second embodiment, the heat conduction member 38 has a shape in which the inside is in contact with the opposite surfaces of the Peltier elements 22 and the circulating fluid flow path 34, and the outside is in a flat shape in contact with the heat dissipation member 36.

[0042] The film heater 50 has a function of assisting the temperature adjustment (heat absorption or heat generation on one surface) by the Peltier element 22. In the second embodiment, the film heater 50 is placed on the bottom surface of the temperature adjustment plate 24, sandwiched between the heater cover 52 and the temperature adjustment plate 24, and in contact with the heater cover 52 and the temperature adjustment plate 24. In this way, the film heater 50 adjusts the temperature of the detection sensor 40 to within a set range via the temperature adjustment plate 24, the thermally conductive sheet 30, and the thermally conductive plate 32. For example, when the temperature of the detection sensor 40 is lower than the set range, the film heater 50 generates heat when a current is applied from the computer 14. Here, in the second embodiment, since multiple Peltier elements 22 are provided, the temperature regulation control of the detection sensor 40 becomes complicated, it is preferable that the film heater 50 is used to fine-tune the temperature of the detection sensor 40, for example, after the heat generation or absorption by each Peltier element 22 has stopped. Since the film heater 50 generates less heat than the Peltier element 22, it is preferable that the film heater 50 has an area equivalent to that of the sensor substrate .

[0043] The heater cover 52 has a function of transferring heat generated on the bulb 20 side (upper surface) of the film heater 50 to the temperature adjustment plate 24. For example, the heater cover 52 is made of a material with high thermal conductivity (such as copper or aluminum). In the second embodiment, the temperature adjustment plate 24, the sensor board 28, the thermally conductive sheet 30, the film heater 50, and the heater cover 52 are provided with through holes through which the collimator 26 protrudes.

[0044] In this way, in the X-ray diffraction measurement apparatus 10 in the second embodiment, since multiple Peltier elements and film heaters 50 are used, the temperature of the detection sensor 40 can be quickly raised to within the set range, for example, during periods of low temperature such as winter.

[0045] <Effects> As described above, in the embodiment of the present invention, X-ray diffraction measurement device 10 emits X-rays from tube 20 toward a measurement object, and includes detection sensor 40 that detects X-rays diffracted by the measurement object, a circulating fluid flow path 34 for cooling the temperature of tube 20, a Peltier element 22 that adjusts the temperature of detection sensor 40 on one side, and a heat conductive member 38 that is in contact with the opposite side of Peltier element 22 and with circulating fluid flow path 34 and has thermal conductivity.

[0046] According to this configuration, there is no need to provide a waterway device (e.g., a cooling water pipe) for adjusting the temperature of the detection sensor 40, and the temperature of the detection sensor 40 can be adjusted by the small Peltier element 22. In addition, since the heat-conducting member 38 having thermal conductivity is in contact with the opposite surface of the Peltier element 22 and the circulating fluid flow path 34, even if the opposite surface of the Peltier element 22 generates heat, the opposite surface of the Peltier element 22 can be efficiently cooled through the heat-conducting member 38 by the existing circulating fluid flow path 34 that cools the bulb 20. This makes it possible to prevent overheating on the opposite surface of the Peltier element 22 while suppressing an increase in size of the X-ray diffraction measurement device 10. In addition, since there is no waterway device for adjusting the temperature of the detection sensor 40, it is possible to suppress deterioration of measurement accuracy and increase in power consumption due to vibration of the waterway device.

[0047] In addition, in the embodiment of the present invention, a temperature adjustment plate 24 is provided which contacts one surface of the Peltier element 22 and transfers heat absorption or generation of the Peltier element 22 at that surface to the detection sensor 40 .

[0048] According to this configuration, the temperature adjustment plate 24 can efficiently transfer the heat absorption or generation of the Peltier element 22 to the detection sensor 40, and the size of the X-ray diffraction measurement apparatus 10 can be prevented from increasing without providing a waterway device for adjusting the temperature of the detection sensor 40.

[0049] In addition, in the embodiment of the present invention, a heat dissipation member 36 is attached to the heat conduction member 38 and dissipates heat to the outside air.

[0050] According to this configuration, the heat dissipation member 36 attached to the heat conduction member 38 having thermal conductivity can efficiently dissipate heat generated on the opposite surface of the Peltier element 22 to the outside air, thereby preventing deformation, etc. due to overheating of the opposite surface of the Peltier element 22.

[0051] In addition, in this embodiment of the present invention, the heat conducting member 38 is made of a material having a higher thermal conductivity than the heat dissipating member 36 .

[0052] According to this configuration, since the thermal conductivity of the heat conducting member 38 is higher than that of the heat dissipating member 36, the heat generated on the opposite surface of the Peltier element 22 can be efficiently dissipated.

[0053] In addition, in this embodiment of the present invention, the heat conducting member 38 is made of copper, and the heat dissipating member 36 is a heat sink made of aluminum.

[0054] According to this configuration, the heat generated on the opposite surface of the Peltier element 22 can be dissipated by the heat sink inexpensively and efficiently.

[0055] In addition, in an embodiment of the present invention, the Peltier elements 22 are provided on each side surface in the longitudinal direction of the X-ray diffraction measurement apparatus 10, and the temperature adjustment plate 24 has a bottom surface on the detection sensor 40 side and a side surface in contact with one side of each of the Peltier elements 22.

[0056] According to this configuration, heat absorption or generation in each Peltier element 22 provided on the side surface can be efficiently transferred to the detection sensor 40 by the temperature adjustment plate 24.

[0057] In addition, in this embodiment of the present invention, a film heater 50 is provided which is in contact with the temperature adjustment plate 24 and assists the temperature adjustment by the Peltier element 22 .

[0058] According to this configuration, even if a plurality of Peltier elements 22 are provided, making temperature adjustment of the detection sensor 40 complicated, the temperature of the detection sensor 40 can be finely adjusted by the film heater 50.

[0059] <Modification> The present invention is not limited to the above-described embodiment. In other words, the above-described embodiment may be modified by a person skilled in the art as appropriate, and the modifications may be included within the scope of the present invention as long as they include the characteristics of the present invention. In addition, the elements of the above-described embodiment and the modifications described below may be combined to the extent technically possible, and the combinations of these may be included within the scope of the present invention as long as they include the characteristics of the present invention.

[0060] For example, in the first embodiment, no reference is made to the thickness of the thermally conductive sheet 30, but it is preferable to make it thin in order to enhance the heat transfer effect. For example, it is preferable that the thermally conductive sheet 30 is thinner than the sensor substrate .

[0061] In the second embodiment, the film heater 50 is described as being placed on the bottom surface of the temperature adjustment plate 24, but it may also be placed on the upper surface of the heat conduction sheet 30 and sandwiched between the temperature adjustment plate 24 and the heat conduction sheet 30. Furthermore, the film heater 50 may be provided on each side surface in the longitudinal direction of the X-ray diffraction measurement apparatus 10. In this case, the Peltier element 22 is preferably provided on the bottom surface of the temperature adjustment plate 24 having the side surface in contact with the film heater 50.

[0062] <Additional notes> [Additional note 1] An X-ray diffraction measurement device that emits X-rays from a tube toward a measurement object, A detection sensor for detecting X-rays diffracted by the object to be measured; a Peltier element for adjusting the temperature of the detection sensor on one side; a heat conductive member in contact with an opposite surface of the Peltier element and having thermal conductivity; a heat dissipation member attached to the heat conduction member and configured to dissipate heat to outside air; Equipped with X-ray diffraction measurement device. [Additional note 2] a circulating fluid flow path for cooling the temperature of the bulb; Equipped with The heat conductive member is in contact with the circulating fluid flow path. Item 1. The X-ray diffraction measurement apparatus according to claim 1. [Explanation of symbols]

[0063] 10...X-ray diffraction measurement device, 20...bulb, 22...Peltier element, 24...temperature adjustment plate, 34...circulating fluid flow path, 36...heat dissipation member, 38...heat conduction member, 40...detection sensor, 50...film heater

Claims

1. An X-ray diffraction measurement device that emits X-rays from a tube that is long in one direction toward a measurement object, a detection sensor provided at a position away from the tube in the emission direction of the X-rays from the tube, the detection sensor detecting the X-rays diffracted by the measurement object; a circulating fluid flow path for cooling the bulb, the circulating fluid flow path being provided along the longitudinal direction of the bulb and in contact with the bulb; a Peltier element provided between the bulb and the detection sensor in a direction along the emission direction of the bulb, the Peltier element adjusting the temperature of the detection sensor on one side in the direction along the emission direction; a heat conductive member having thermal conductivity, the heat conductive member being provided so as to cover the bulb and a portion of the circulating fluid flow path overlapping the bulb, the heat conductive member having an outer side in contact with an opposite surface of the Peltier element that faces the one surface of the Peltier element and an inner side in contact with the circulating fluid flow path; An X-ray diffraction measurement apparatus comprising:

2. a temperature adjustment plate that contacts the one surface of the Peltier element and transfers heat absorption or generation of the Peltier element at the one surface to the detection sensor; 2. The X-ray diffraction measurement apparatus according to claim 1, further comprising:

3. a heat dissipation member attached to the heat conductive member and dissipating heat to the outside air; The X-ray diffraction measurement apparatus according to claim 2 , further comprising:

4. The heat conducting member is made of a material having a higher thermal conductivity than the heat dissipating member.

4. The X-ray diffraction measurement apparatus according to claim 3.

5. The heat conductive member is made of copper, The heat dissipation member is a heat sink made of aluminum.

5. The X-ray diffraction measurement apparatus according to claim 4.

6. An X-ray diffraction measurement device that emits X-rays from a tube toward a measurement object, a detection sensor for detecting X-rays diffracted by the object to be measured; a circulating fluid flow path for cooling the bulb; a Peltier element provided on each side surface of the X-ray diffraction measurement device in a longitudinal direction thereof for adjusting the temperature of the detection sensor on one side; a heat conductive member having thermal conductivity, the heat conductive member being in contact with the opposite surface of the Peltier element and the circulating fluid flow path; a temperature adjustment plate having a bottom surface on the detection sensor side and a side surface in contact with the one surface of each of the Peltier elements, the temperature adjustment plate transferring heat absorption or generation of the Peltier elements on the one surface to the detection sensor via the bottom surface; An X-ray diffraction measurement apparatus comprising:

7. An X-ray diffraction measurement device that emits X-rays from a tube toward a measurement object, a detection sensor for detecting X-rays diffracted by the object to be measured; a circulating fluid flow path for cooling the bulb; a Peltier element for adjusting the temperature of the detection sensor on one side; a heat conductive member having thermal conductivity, the heat conductive member being in contact with the opposite surface of the Peltier element and the circulating fluid flow path; a temperature adjustment plate that contacts the one surface of the Peltier element and transfers heat absorption or generation of the Peltier element at the one surface to the detection sensor; a film heater that is in contact with the temperature adjustment plate and assists the temperature adjustment by the Peltier element; An X-ray diffraction measurement apparatus comprising:

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