LIQUID EJECTION HEAD AND LIQUID EJECTION APPARATUS

Abstract

To reduce declination of discharge characteristics resulting from a production error.SOLUTION: A liquid discharge head includes: a nozzle substrate on which a plurality of nozzles are provided; a pressure chamber substrate on which a plurality of pressure chambers are provided: a diaphragm: and a piezoelectric element in which a common electrode, a plurality of individual electrodes and piezoelectric materials are provided, in which those are laminated in this order in a second direction crossing with a first direction being an arrangement direction of the plurality of nozzles. The plurality of pressure chambers include the first pressure chamber and a second pressure chamber adjacent to the first pressure chamber in the first direction. The plurality of nozzles include a first nozzle communicating commonly with the first and second pressure chambers, and the piezoelectric element includes a first active region where the piezoelectric material is sandwiched between the common electrode and one individual electrode among the plurality of individual electrodes. The first active region is disposed across at least a part of the first pressure chamber and a part of the second pressure chamber viewed in the second direction.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a liquid ejection head and a liquid ejection apparatus. [Background technology]

[0002] 2. Description of the Related Art A liquid ejection head provided in a liquid ejection device such as a piezoelectric inkjet printer generally has a nozzle, a pressure chamber communicating with the nozzle, and a piezoelectric element that changes the pressure in the pressure chamber.

[0003] For the purpose of ejecting liquid suitably even when using highly viscous ink or ejecting large droplets, there is known a device that ejects liquid from multiple pressure chambers from a single nozzle, as described in Patent Document 1, for example. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2018-103418 A Summary of the Invention [Problem to be solved by the invention]

[0005] In the device described in Patent Document 1, it is described that two pressure chambers located at different positions in a cross direction (X direction) that crosses the row direction (Y direction) of the pressure chambers are connected to one nozzle. However, when two pressure chambers located at different positions in the cross direction are connected to one nozzle, adjacent pressure chambers in the row direction are connected to different nozzles, so it is necessary to separate the active areas of the piezoelectric elements. Therefore, the active areas must be formed with high precision in the row direction, which poses the problem that the ejection characteristics are easily displaced due to manufacturing errors, etc. [Means for solving the problem]

[0006] In order to solve the above problems, one aspect of the liquid ejection head according to the present invention is a liquid ejection head including a nozzle substrate provided with a plurality of nozzles arranged along a first direction, a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction, a vibration plate, a common electrode provided in common to the plurality of pressure chambers, a plurality of individual electrodes provided individually for the plurality of pressure chambers, and a piezoelectric body sandwiched between the common electrode and the individual electrodes, and the nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged in the first direction. the plurality of pressure chambers include a first pressure chamber and a second pressure chamber adjacent to the first pressure chamber in the first direction, the plurality of nozzles include a first nozzle commonly communicating with the first pressure chamber and the second pressure chamber, the piezoelectric element includes a first active area that sandwiches the piezoelectric body between the common electrode and a first individual electrode of the plurality of individual electrodes, and the first active area is disposed across at least a portion of the first pressure chamber and at least a portion of the second pressure chamber as viewed in the second direction.

[0007] One aspect of the liquid ejection device according to the present invention includes the liquid ejection head of the above aspect, and a control unit that controls the liquid ejection operation of the liquid ejection head. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a configuration diagram that illustrates a liquid ejection device according to a first embodiment. [Diagram 2] FIG. 1 is an exploded perspective view of a liquid ejection head according to a first embodiment. [Diagram 3] 3 is a cross-sectional view taken along line AA in FIG. 2. [Figure 4] 4 is a plan view showing the corresponding relationship between nozzles, pressure chambers, and piezoelectric elements in the first embodiment. FIG. [Diagram 5] 5 is a cross-sectional view taken along line BB in FIG. [Figure 6] FIG. 11 is a cross-sectional view showing a part of a liquid ejection head according to a second embodiment. [Figure 7] FIG. 11 is a cross-sectional view showing a part of a liquid ejection head according to a third embodiment. [Figure 8] FIG. 11 is a cross-sectional view showing a part of a liquid ejection head according to a fourth embodiment. [Figure 9] 10 is a plan view showing the corresponding relationship between nozzles, pressure chambers, and piezoelectric elements of a liquid ejection head according to Modification 1. FIG. [Figure 10] 11 is a plan view showing the corresponding relationship between the nozzles, pressure chambers, and piezoelectric elements of a liquid ejection head according to Modification 2. FIG. [Figure 11] FIG. 11 is a cross-sectional view showing a part of a liquid ejection head according to a third modified example. [Figure 12] FIG. 11 is a cross-sectional view of a liquid ejection head according to a fourth modified example. [Figure 13] FIG. 11 is a cross-sectional view of a liquid ejection head according to a fourth modified example. [Figure 14] 13 is an explanatory diagram of a flow path of a liquid ejection device according to Modification 5. FIG. [Figure 15] FIG. 13 is a cross-sectional view of a liquid ejection head according to a fifth modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Note that the dimensions or scale of each part in the drawings may differ from the actual dimensions, and some parts are shown diagrammatically to facilitate understanding. Furthermore, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited thereto.

[0010] In the following description, the mutually intersecting X-axis, Y-axis, and Z-axis are used as appropriate. Moreover, one direction along the X-axis is called the X1 direction, and the direction opposite to the X1 direction is called the X2 direction. Similarly, the opposite directions along the Y-axis are called the Y1 direction and the Y2 direction. Moreover, the opposite directions along the Z-axis are called the Z1 direction and the Z2 direction. The Y1 direction or the Y2 direction is an example of a "first direction." The Z1 direction or the Z2 direction is an example of a "second direction." Moreover, viewing in a direction along the Z-axis is called a "planar view."

[0011] Typically, the Z axis is a vertical axis, and the Z2 direction corresponds to the downward direction in the vertical direction. However, the Z axis does not have to be a vertical axis. Also, the X axis, the Y axis, and the Z axis are typically perpendicular to each other, but are not limited to this, and may intersect at an angle within a range of 80° to 100°, for example.

[0012] 1. Embodiment 1-1. Overall configuration of the liquid ejection device 1 is a schematic diagram showing a configuration of a liquid ejection device 100 according to a first embodiment. The liquid ejection device 100 is an inkjet printing device that ejects ink, which is an example of a liquid, as droplets onto a medium 12. The medium 12 is typically printing paper. Note that the medium 12 is not limited to printing paper, and may be a printing target made of any material, such as a resin film or fabric.

[0013] 1, a liquid container 14 that stores ink is attached to the liquid ejection device 100. Specific examples of the liquid container 14 include a cartridge that is detachable from the liquid ejection device 100, a bag-shaped ink pack made of a flexible film, and an ink tank that can be refilled with ink. The type of ink stored in the liquid container 14 is arbitrary.

[0014] The liquid ejection device 100 has a control unit 20, a transport mechanism 22, a moving mechanism 24, and a liquid ejection head 26. The control unit 20 includes a processing circuit such as a CPU (Central Processing Unit) or an FPGA (Field Programmable Gate Array) and a storage circuit such as a semiconductor memory, and controls the operation of each element of the liquid ejection device 100. Here, the control unit 20 is an example of a "control unit" and controls the ink ejection operation by the liquid ejection head 26.

[0015] The transport mechanism 22 transports the medium 12 in the Y2 direction under the control of the control unit 20. The movement mechanism 24 reciprocates the liquid ejection head 26 in the X1 direction and the X2 direction under the control of the control unit 20. In the example shown in FIG. 1, the movement mechanism 24 has a substantially box-shaped transport body 242 called a carriage that houses the liquid ejection head 26, and a transport belt 244 to which the transport body 242 is fixed. The number of liquid ejection heads 26 mounted on the transport body 242 is not limited to one, and may be multiple. In addition to the liquid ejection head 26, the above-mentioned liquid container 14 may be mounted on the transport body 242.

[0016] Under the control of the control unit 20, the liquid ejection head 26 ejects ink supplied from the liquid container 14 from each of a plurality of nozzles toward the medium 12 in the Z2 direction. This ejection is performed in parallel with the transportation of the medium 12 by the transport mechanism 22 and the reciprocating movement of the liquid ejection head 26 by the movement mechanism 24, thereby forming an ink image on the surface of the medium 12.

[0017] As described above, the liquid ejection device 100 includes the liquid ejection head 26 and the control unit 20, which is an example of a “control unit” that controls the ink ejection operation by the liquid ejection head 26.

[0018] 1-2. Overall configuration of liquid ejection head

[0019] Fig. 2 is an exploded perspective view of the liquid ejection head 26 according to the first embodiment. Fig. 3 is a cross-sectional view taken along line AA in Fig. 2. As shown in Fig. 2 and Fig. 3, the liquid ejection head 26 has a communication plate 32, a pressure chamber substrate 34, a vibration plate 36, a plurality of piezoelectric elements 38, a housing portion 42, a sealing body 44, a nozzle substrate 46, a vibration absorber 48, and a wiring substrate 50.

[0020] Here, the pressure chamber substrate 34, the vibration plate 36, the plurality of piezoelectric elements 38, the housing portion 42, and the sealing body 44 are disposed in an area positioned in the Z1 direction from the communicating plate 32. On the other hand, the nozzle substrate 46 and the vibration absorber 48 are disposed in an area positioned in the Z2 direction from the communicating plate 32. Each element of the liquid ejection head 26 is roughly a plate-like member elongated in the Y direction, and is joined to one another by, for example, an adhesive.

[0021] 2, the nozzle substrate 46 is a plate-like member provided with a plurality of nozzles N arranged in a direction along the Y axis. Each nozzle N is a through hole that allows ink to pass through. The nozzle substrate 46 is manufactured by processing a silicon single crystal substrate by a semiconductor manufacturing technique that uses a processing technique such as dry etching or wet etching. However, other known methods and materials may be used as appropriate to manufacture the nozzle substrate 46.

[0022] The communication plate 32 is a plate-like member for forming a flow path of ink. As shown in FIG. 2 and FIG. 3, the communication plate 32 is provided with an opening 322, a plurality of supply flow paths 324, a plurality of communication flow paths 326, and a relay flow path 328. The opening 322 is an elongated through hole extending in a direction along the Y axis in a plan view seen in a direction along the Z axis so as to be continuous across a plurality of pressure chambers C described below. On the other hand, the supply flow path 324 is a through hole provided individually for each pressure chamber C. The communication flow path 326 is a through hole provided individually for each set of two pressure chambers C. As shown in FIG. 3, the relay flow path 328 is provided on a surface of the communication plate 32 facing the Z2 direction. The relay flow path 328 is a flow path provided across a plurality of supply flow paths 324 and communicates the opening 322 with the plurality of supply flow paths 324. The communication plate 32 is manufactured by processing a silicon single crystal substrate using semiconductor manufacturing technology, for example, in the same manner as the above-mentioned nozzle substrate 46. However, other known methods and materials may also be used appropriately to manufacture the communication plate 32.

[0023] The pressure chamber substrate 34 is a plate-like member in which a plurality of pressure chambers C are formed. In this embodiment, the plurality of pressure chambers C are provided so that a set of two pressure chambers C corresponds to each nozzle N. The pressure chambers C are located between the communication plate 32 and the vibration plate 36, and are spaces called cavities for applying pressure to the ink filled in the pressure chambers C. The plurality of pressure chambers C are arranged in a direction along the Y axis. Each pressure chamber C is formed of a hole that opens on both sides of the pressure chamber substrate 34, and is elongated and extends in a direction along the X axis. The end of each pressure chamber C in the X2 direction communicates with the corresponding supply flow channel 324. On the other hand, the end of each pressure chamber C in the X1 direction communicates with the corresponding communication flow channel 326 for each set of two pressure chambers C. The pressure chamber substrate 34 is manufactured, for example, by processing a silicon single crystal substrate by semiconductor manufacturing technology, similar to the nozzle substrate 46 described above. However, each of the pressure chamber substrates 34 may be manufactured using other known methods and materials as appropriate.

[0024] A vibration plate 36 is disposed on the surface of the pressure chamber substrate 34 facing the Z1 direction. The vibration plate 36 is a plate-shaped member that can be elastically deformed. In the example shown in FIG. 3, the vibration plate 36 has a first layer 361 that is an elastic film and a second layer 362 that is an insulating film, which are laminated in this order in the Z1 direction. The first layer 361 is an elastic film made of, for example, silicon oxide (SiO2). The elastic film is formed, for example, by thermally oxidizing one surface of a silicon single crystal substrate. The second layer 362 is an insulating film made of, for example, zirconium oxide (ZrO2). The insulating film is formed, for example, by forming a layer of zirconium by a sputtering method and thermally oxidizing the layer.

[0025] The first layer 361 is not limited to silicon oxide, and may be made of other elastic materials such as silicon alone. The material of the second layer 362 is not limited to zirconium oxide, and may be other insulating materials such as silicon nitride. Another layer such as a metal oxide may be interposed between the first layer 361 and the second layer 362. In other words, the first layer 361 or the second layer 362 may be made of a plurality of layers that are the same or different from each other. A part or the whole of the diaphragm 36 may be integrally made of the same material as the pressure chamber substrate 34. The diaphragm 36 may be made of a layer of a single material.

[0026] A plurality of piezoelectric elements 38 corresponding to different nozzles N are arranged on the surface of the vibration plate 36 facing the Z1 direction. In this embodiment, the plurality of piezoelectric elements 38 are provided so that one piezoelectric element 38 corresponds to each pair of the two pressure chambers C described above. Each piezoelectric element 38 is a passive element that is deformed by the supply of a drive signal, and has an elongated shape extending in the direction along the X axis. The plurality of piezoelectric elements 38 are arranged in the direction along the Y axis. When the vibration plate 36 vibrates in conjunction with the deformation of the piezoelectric element 38, the pressure in the two pressure chambers C that form a pair corresponding to the piezoelectric element 38 fluctuates, and ink is ejected from the nozzle N corresponding to the piezoelectric element 38. The plurality of piezoelectric elements 38 described above can also be said to be one piezoelectric element 38 having a plurality of active areas corresponding to the plurality of piezoelectric elements 38. The plurality of active areas include a first active area AR_1 and a second active area AR_2 described later. Details of the piezoelectric element 38 will be described in 1-3. described later.

[0027] The housing 42 is a case for storing ink to be supplied to the multiple pressure chambers C, and is bonded to the surface of the communication plate 32 facing the Z1 direction with an adhesive or the like. The housing 42 is made of, for example, a resin material, and is manufactured by injection molding. The housing 42 is provided with a storage section 422 and an inlet 424. The storage section 422 is a recessed portion having an outer shape corresponding to the opening 322 of the communication plate 32. The inlet 424 is a through hole communicating with the storage section 422. The space formed by the opening 322 and the storage section 422 functions as a liquid storage chamber R, which is a reservoir for storing ink. Ink is supplied to the liquid storage chamber R from the liquid container 14 via the inlet 424.

[0028] The vibration absorber 48 is an element for absorbing pressure fluctuations in the liquid storage chamber R. The vibration absorber 48 is, for example, a compliant substrate that is a flexible sheet member that can be elastically deformed. Here, the vibration absorber 48 is disposed on the surface of the communicating plate 32 facing the Z2 direction so as to close the opening 322, the relay flow path 328, and the multiple supply flow paths 324 of the communicating plate 32 and form the bottom surface of the liquid storage chamber R.

[0029] The sealing body 44 is a structure that protects the multiple piezoelectric elements 38 and reinforces the mechanical strength of the pressure chamber substrate 34 and the vibration plate 36. The sealing body 44 is bonded to the surface of the vibration plate 36 by, for example, an adhesive. The sealing body 44 is provided with a recess that accommodates the multiple piezoelectric elements 38.

[0030] A wiring board 50 is bonded to the surface of the pressure chamber substrate 34 or the vibration plate 36 facing the Z1 direction. The wiring board 50 is a mounting component on which a plurality of wires for electrically connecting the control unit 20 and the liquid ejection head 26 are formed. The wiring board 50 is a flexible wiring board such as an FPC (Flexible Printed Circuit) or an FFC (Flexible Flat Cable). A drive signal for driving the piezoelectric elements 38 is supplied to the wiring board 50. The drive signal is supplied to each piezoelectric element 38 via the wiring board 50.

[0031] 1-3. Corresponding relationship between the nozzle N, the pressure chamber C, and the piezoelectric element 38 Fig. 4 is a plan view showing the corresponding relationship between the nozzles N, pressure chambers C, and piezoelectric elements 38 in the first embodiment. Fig. 5 is a cross-sectional view taken along line BB in Fig. 4. Figs. 4 and 5 show the configuration of the communication plate 32 and the pressure chamber substrate 34 corresponding to any two adjacent nozzles N among the multiple nozzles N. The two nozzles N are shown by dashed lines in Fig. 4, and one of the two nozzles N is a first nozzle N_1 and the other is a second nozzle N_2. The first nozzle N_1 and the second nozzle N_2 are arranged in this order in the Y1 direction.

[0032] 4, the pressure chamber substrate 34 is provided with a first pressure chamber C_1 and a second pressure chamber C_2 as two pressure chambers C corresponding to the first nozzle N_1, and a third pressure chamber C_3 and a fourth pressure chamber C_4 as two pressure chambers C corresponding to the second nozzle N_2. The first pressure chamber C_1, the second pressure chamber C_2, the third pressure chamber C_3, and the fourth pressure chamber C_4 are arranged in this order in the Y1 direction. A first partition wall 341 is provided between the first pressure chamber C_1 and the second pressure chamber C_2, and between the third pressure chamber C_3 and the fourth pressure chamber C_4. A second partition wall 342 is provided between the second pressure chamber C_2 and the third pressure chamber C_3. In the following description, the set of the first pressure chamber C_1 and the second pressure chamber C_2 and the set of the third pressure chamber C_3 and the fourth pressure chamber C_4 may each be referred to as a "set of pressure chambers C".

[0033] The communicating plate 32 is provided with a communicating flow path 326_1 as the communicating flow path 326 corresponding to the set of the first pressure chamber C_1 and the second pressure chamber C_2, and a communicating flow path 326_2 as the communicating flow path 326 corresponding to the set of the third pressure chamber C_3 and the fourth pressure chamber C_4. The communicating plate 32 is also provided with a first supply path 324_1 which is the supply flow path 324 corresponding to the first pressure chamber C_1, a second supply path 324_2 which is the supply flow path 324 corresponding to the second pressure chamber C_2, a third supply path 324_3 which is the supply flow path 324 corresponding to the third pressure chamber C_3, and a fourth supply path 324_4 which is the supply flow path 324 corresponding to the fourth pressure chamber C_4.

[0034] As shown in FIG. 5, the piezoelectric element 38 has a plurality of first electrodes 381, piezoelectric bodies 382, ​​and second electrodes 383, which are laminated in this order in the Z1 direction. Note that other layers, such as layers for improving adhesion, may be appropriately interposed between the layers of the piezoelectric element 38, or between the piezoelectric element 38 and the vibration plate 36. Also, a seed layer may be provided between the first electrode 381 and the piezoelectric body 382. The seed layer has a function of improving the orientation of the piezoelectric body 382 when the piezoelectric body 382 is formed. The seed layer is, for example, made of titanium (Ti) or made of a complex oxide having a perovskite structure, such as Pb(Fe,Ti)O3.

[0035] The first electrodes 381 are individual electrodes spaced apart from one another for each set of pressure chambers C. Specifically, a plurality of first electrodes 381 extending in the direction along the X-axis are arranged in the direction along the Y-axis at intervals from one another. A drive signal for ejecting ink from a nozzle N corresponding to a set of pressure chambers C is applied to each first electrode 381 via the wiring substrate 50.

[0036] The first electrode 381 has, for example, a first layer made of titanium (Ti), a second layer made of platinum (Pt), and a third layer made of iridium (Ir), which are laminated in this order in the Z1 direction. The first electrode 381 is formed by, for example, a known film formation technique such as a sputtering method, and a known processing technique using photolithography, etching, etc.

[0037] Here, the first layer functions as an adhesion layer that improves the adhesion of the first electrode 381 to the diaphragm 36. The thickness of the first layer is not particularly limited, but is, for example, about 3 nm or more and 50 nm or less. The material of the first layer is not limited to titanium, and for example, chromium may be used instead of titanium.

[0038] In addition, the metals constituting the second and third layers are both electrode materials with excellent electrical conductivity and have similar chemical properties. This allows the first electrode 381 to have excellent electrode properties. The thickness of the second layer is not particularly limited, but is, for example, about 50 nm to 200 nm. The thickness of the third layer is not particularly limited, but is, for example, about 4 nm to 20 nm.

[0039] The configuration of the first electrode 381 is not limited to the above example. For example, either the second layer or the third layer may be omitted, or a layer made of iridium may be provided between the first layer and the second layer. Also, instead of the second layer and the third layer, or in addition to the second layer and the third layer, a layer made of an electrode material other than iridium and platinum may be used. Examples of the electrode material include metal materials such as aluminum (Al), nickel (Ni), gold (Au), and copper (Cu). Of these, one type may be used alone, or two or more types may be used in combination in the form of a laminate or an alloy.

[0040] The piezoelectric body 382 is disposed between a plurality of first electrodes 381 and second electrodes 383. The piezoelectric body 382 may be provided individually for each of the pressure chambers C, namely the first pressure chamber C_1, the second pressure chamber C_2, the third pressure chamber C_3 and the fourth pressure chamber C_4, but has a strip shape extending in the direction along the Y axis so as to be continuous across these pressure chambers C. In this case, the piezoelectric body 382 has a through hole extending in the direction along the X axis in an area corresponding to the gap between the pairs of adjacent pressure chambers C in a plan view.

[0041] The piezoelectric body 382 is composed of a piezoelectric material having a perovskite crystal structure represented by a general composition formula ABO3. Examples of the piezoelectric material include lead titanate (PbTiO3), lead zirconate titanate (Pb(Zr,Ti)O3), lead zirconate (PbZrO3), lead lanthanum titanate ((Pb,La),TiO3), lead lanthanum zirconate titanate ((Pb,La)(Zr,Ti)O3), lead zirconium niobate titanate (Pb(Zr,Ti,Nb)O3), and lead magnesium zirconium niobate titanate (Pb(Zr,Ti)(Mg,Nb)O3). Among them, lead zirconate titanate is preferably used as the material for the piezoelectric body 382. The piezoelectric body 382 may contain small amounts of other elements such as impurities. The piezoelectric material for the piezoelectric body 382 may also be a non-lead material such as barium titanate.

[0042] The piezoelectric body 382 is formed by forming a precursor layer of the piezoelectric body by a liquid phase method such as a sol-gel method or a metal organic decomposition (MOD) method, and then baking and crystallizing the precursor layer. Here, the piezoelectric body 382 may be formed of a single layer, but when it is formed of multiple layers, there is an advantage that the characteristics of the piezoelectric body 382 can be easily improved even if the thickness of the piezoelectric body 382 is increased.

[0043] The second electrode 383 is a band-shaped common electrode extending in the direction along the Y axis so as to be continuous across the first pressure chamber C_1, the second pressure chamber C_2, the third pressure chamber C_3 and the fourth pressure chamber C_4. A predetermined reference voltage is applied to the second electrode 383.

[0044] The second electrode 383 has, for example, a layer made of iridium (Ir) and a layer made of titanium (Ti), which are laminated in this order in the Z1 direction. The second electrode 383 is formed by, for example, a known film formation technique such as a sputtering method, and a known processing technique using photolithography, etching, etc.

[0045] The material of the second electrode 383 is not limited to iridium and titanium, and may be, for example, a metal material such as platinum (Pt), aluminum (Al), nickel (Ni), gold (Au), or copper (Cu). The second electrode 383 may be made of one of these metal materials alone, or may be made of two or more of these metal materials in a laminated or alloy form. The second electrode 383 may be made of a single layer. However, it is preferable that the second electrode 383 contains iridium or iridium oxide that contains less oxygen than the stoichiometric composition.

[0046] The piezoelectric element 38 having the above-mentioned layer configuration has a first active area AR_1 and a second active area AR_2. The first active area AR_1 and the second active area AR_2 are arranged in this order in the Y1 direction.

[0047] As shown in FIG. 5, the first active area AR_1 is an area of ​​the piezoelectric element 38 that sandwiches the piezoelectric body 382 between one first electrode 381 (first individual electrode) of the multiple first electrodes 381 and a second electrode 383. The first active area AR_1 corresponds to the first nozzle N_1, and is disposed across the first pressure chamber C_1 and the second pressure chamber C_2 in a plan view, as shown in FIG. 4. Therefore, the piezoelectric body 382 in the first active area AR_1 can be displaced by an electric field applied between the one first electrode 381 and the second electrode 383. Therefore, by driving the first active area AR_1, both the first pressure chamber C_1 and the second pressure chamber C_2 are pressurized simultaneously, and ink can be ejected from the first nozzle N_1.

[0048] Here, the first active area AR_1 has a portion that protrudes in each of the Y1 direction and the Y2 direction beyond the first partition 341. In the example shown in Fig. 5, the length of the portion along the Y axis is smaller than the length of the first pressure chamber C_1 or the second pressure chamber C_2 along the Y axis.

[0049] Therefore, the width W1 along the Y1 direction of a portion of the first pressure chamber C_1 overlapping with the first active area AR_1 in the Z1 direction is smaller than the width W2 along the Y1 direction of a portion of the first pressure chamber C_1 not overlapping with the first active area AR_1 in the Z1 direction. Similarly, the width W3 along the Y1 direction of a portion of the second pressure chamber C_2 overlapping with the first active area AR_1 in the Z1 direction is smaller than the width W4 along the Y1 direction of a portion of the second pressure chamber C_2 not overlapping with the first active area AR_1 in the Z1 direction.

[0050] On the other hand, the second active area AR_2 is an area of ​​the piezoelectric element 38 that sandwiches the piezoelectric body 382 between another one of the first electrodes 381 (second individual electrode) 381 and the second electrode 383, as shown in FIG. 5. The second active area AR_2 corresponds to the second nozzle N_2, and is disposed across the third pressure chamber C_3 and the fourth pressure chamber C_4 in a plan view, as shown in FIG. 4. Therefore, the piezoelectric body 382 in the second active area AR_2 can be displaced by an electric field applied between the other one of the first electrodes 381 and the second electrode 383. Therefore, by driving the second active area AR_2, both the third pressure chamber C_3 and the fourth pressure chamber C_4 are pressurized simultaneously, and ink can be ejected from the second nozzle N_2. It should be noted that the second active area AR_2 has portions that protrude beyond the first partition wall 341 in both the Y1 and Y2 directions, similar to the above-described first active area AR_1.

[0051] In this embodiment, between the first active area AR_1 and the second active area AR_2, there is a region NR where the piezoelectric body 382 is not arranged. In the example shown in Fig. 5, the region NR is composed of only the second electrode 383. Note that the region NR may include, in addition to the second electrode 383, a layer composed of the same material as the first electrode 381.

[0052] As described above, the liquid ejection head 26 includes the nozzle substrate 46, the pressure chamber substrate 34, the vibration plate 36, and the piezoelectric element 38, which are stacked in this order in the Z1 direction, which is an example of the "second direction intersecting the first direction." The nozzle substrate 46 is provided with a plurality of nozzles N arranged along the Y1 direction or the Y2 direction, which is an example of the "first direction." The pressure chamber substrate 34 is provided with a plurality of pressure chambers C arranged along the Y1 direction or the Y2 direction. The piezoelectric element 38 is provided with a second electrode 383, which is an example of a "common electrode" commonly provided to the plurality of pressure chambers C, a plurality of first electrodes 381, which are an example of "a plurality of individual electrodes" individually provided to the plurality of pressure chambers C, and a piezoelectric body 382 sandwiched between the first electrode 381 and the second electrode 383.

[0053] As described above, the multiple pressure chambers C include a first pressure chamber C_1 and a second pressure chamber C_2 adjacent to the first pressure chamber C_1 in the Y1 direction. The multiple nozzles N include a first nozzle N_1 commonly communicating with the first pressure chamber C_1 and the second pressure chamber C_2. The piezoelectric element 38 includes a first active area AR_1 that sandwiches the piezoelectric body 382 between a first electrode 381 and a second electrode 383 that are "first individual electrodes" among the multiple first electrodes 381.

[0054] In addition, the first active area AR_1 is disposed across at least a part of the first pressure chamber C_1 and at least a part of the second pressure chamber C_2 when viewed in the Z1 direction. Therefore, the pressures in the first pressure chamber C_1 and the second pressure chamber C_2 can be changed by the operation of the first active area AR_1, thereby discharging liquid from the first nozzle N_1. Furthermore, such an arrangement of the first active area AR_1 makes it possible to increase the distance between the active areas compared to a configuration in which active areas of the piezoelectric element 38 are provided separately corresponding to the first pressure chamber C_1 and the second pressure chamber C_2, and thus makes it possible to reduce fluctuations in the discharge characteristics of the liquid from the first nozzle N_1 due to manufacturing errors in the piezoelectric element 38. Furthermore, for example, even if the first active area AR_1 is positioned offset in the Y1 direction or the second direction, at least a portion of the pressure fluctuations in the first pressure chamber C_1 and the second pressure chamber C_2 due to manufacturing errors are offset by each other, thereby reducing fluctuations in the ejection characteristics of the liquid from the first nozzle N_1.

[0055] As described above, the multiple pressure chambers C further include a third pressure chamber C_3 adjacent to the second pressure chamber C_2 in the Y1 direction. The multiple nozzles N include a second nozzle N_2 adjacent to the first nozzle N_1 in the Y1 direction. The second nozzle N_2 does not communicate with either the first pressure chamber C_1 or the second pressure chamber C_2, but communicates with the third pressure chamber C_3. In addition, the first active area AR_1 is disposed so as not to straddle the third pressure chamber C_3 when viewed in the Z1 direction. This prevents pressure fluctuations in the third pressure chamber C_3 due to the operation of the first active area AR_1.

[0056] As described above, the pressure chambers C further include a fourth pressure chamber C_4 adjacent to the third pressure chamber C_3 in the Y1 direction. The second nozzle N_2 is commonly connected to the third pressure chamber C_3 and the fourth pressure chamber C_4. The piezoelectric element 38 includes a second active area AR_2 that sandwiches the piezoelectric body 382 between the first electrode 381 and the second electrode 383, which are "second individual electrodes" among the first electrodes 381. In addition, the second active area AR_2 is disposed across at least a part of the third pressure chamber C_3 and at least a part of the fourth pressure chamber C_4. Therefore, compared to a configuration in which active areas are provided corresponding to each of the third pressure chamber C_3 and the fourth pressure chamber C_4, it is possible to reduce the variation in the ejection characteristics of the liquid from the second nozzle N_2 due to manufacturing errors of the piezoelectric element 38.

[0057] In this embodiment, as described above, no other piezoelectric body 382 is disposed between the piezoelectric body 382 in the first active area AR_1 and the piezoelectric body 382 in the second active area AR_2 in the Y1 direction. This reduces the constraint of the vibration plate 36 by the piezoelectric body 382. As a result, the driving efficiency of the liquid ejection head 26 can be improved.

[0058] As described above, the width W1 along the Y1 direction of the portion of the first pressure chamber C_1 that overlaps with the first active area AR_1 as viewed in the Z1 direction is smaller than the width W2 along the Y1 direction of the portion of the first pressure chamber C_1 that does not overlap with the first active area AR_1 as viewed in the Z1 direction. Similarly, the width W3 along the Y1 direction of the portion of the second pressure chamber C_2 that overlaps with the first active area AR_1 as viewed in the Z1 direction is smaller than the width W4 along the Y1 direction of the portion of the second pressure chamber C_2 that does not overlap with the first active area AR_1 as viewed in the Z1 direction. Due to this relationship in magnitude between the widths W1 to W4, it is possible to reduce the variation in the ejection characteristics of the liquid from the first nozzle N_1 due to manufacturing errors in the first active area AR_1, compared to a configuration in which the relationship in magnitude between these widths is reversed.

[0059] Note that the width W1 may be greater than the width W2, and the width W3 may be greater than the width W4. In this case, there is an advantage that the drive efficiency of the first active area AR_1 can be easily improved compared to a configuration in which the magnitude relationship between these widths is reversed.

[0060] Although the configuration having the communication passage 326 which is a communication passage commonly communicating with the first pressure chamber C_1 and the second pressure chamber C_2 has been described, other embodiments are also possible. A configuration having a first nozzle flow passage communicating with the first nozzle N_1, a first communication passage communicating with the first pressure chamber C_1 and the first nozzle flow passage, and a second communication passage communicating with the second pressure chamber C_2 and the first nozzle flow passage may be used. In other words, a communication passage individually communicating with the first pressure chamber C_1 and the second pressure chamber C_2 may be used.

[0061] As described above, the plurality of communication paths further includes a first supply path 324_1 that supplies liquid to the first pressure chamber C_1 and a second supply path 324_2 that supplies liquid to the second pressure chamber C_2. This allows liquid to be supplied to both the first pressure chamber and the second pressure chamber more smoothly than a configuration in which one of the first supply path and the second supply path is omitted. In addition, since the configuration of the liquid flow path is simpler than a configuration in which the liquid is circulated as in Modification 4 described below, there is also the advantage that it is easier to miniaturize the liquid ejection head 26.

[0062] As described above, the multiple first electrodes 381 are disposed between the piezoelectric body 382 and the diaphragm 36. Therefore, compared to a configuration in which a common electrode is disposed between the piezoelectric body 382 and the diaphragm 36, it is easier to form wiring for the individual electrodes.

[0063] As described above, both the first pressure chamber C_1 and the second pressure chamber C_2 are set to positive pressure in the liquid ejection head 26. Therefore, the liquid can be ejected from the first nozzle N_1 more efficiently than in a configuration in which the liquid is ejected from the first nozzle N_1 using only the pressure of the first pressure chamber C_1.

[0064] 2. Second embodiment A second embodiment of the present invention will be described below. In the following example, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0065] 6 is a cross-sectional view showing a portion of a liquid ejection head 26A according to the second embodiment. The liquid ejection head 26A is similar to the liquid ejection head 26 of the first embodiment described above, except that it has a pressure chamber substrate 34A instead of the pressure chamber substrate 34. The pressure chamber substrate 34A is similar to the pressure chamber substrate 34, except that the thickness t1 of the first partition wall 341 is different.

[0066] The pressure chamber substrate 34A includes a first partition 341 that separates the first pressure chamber C_1 from the second pressure chamber C_2, and a second partition 342 that separates the second pressure chamber C_2 from the third pressure chamber C_3. However, the thickness t1 of the first partition 341 in the Y1 direction is smaller than the thickness t2 of the second partition 342 in the Y1 direction. Therefore, the drive efficiency of the first active area AR_1 can be improved compared to a configuration in which the thickness t1 of the first partition 341 is equal to or larger than the thickness t2 of the second partition 342.

[0067] According to the second embodiment described above, it is also possible to reduce deviations in ejection characteristics due to manufacturing errors.

[0068] 3. Third embodiment The third embodiment of the present invention will be described below. In the following exemplary embodiment, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0069] 7 is a cross-sectional view showing a portion of a liquid ejection head 26B according to the third embodiment. The liquid ejection head 26B is similar to the liquid ejection head 26 of the first embodiment described above, except that it has a piezoelectric element 38B instead of the piezoelectric element 38. The piezoelectric element 38B is similar to the pressure chamber substrate 34, except that the configuration of the piezoelectric body 382 is different.

[0070] The piezoelectric element 38B includes an intermediate region CR in which another piezoelectric body 382 is disposed between the piezoelectric body 382 in the first active region AR_1 and the piezoelectric body 382 in the second active region AR_2 in the Y1 direction. Here, the piezoelectric body 382 in the intermediate region CR is not continuous with either the piezoelectric body 382 in the first active region AR_1 or the piezoelectric body 382 in the second active region AR_2. Therefore, the connection portion between the second partition wall 342 separating the second pressure chamber C_2 and the third pressure chamber C_3 and the vibration plate 36 can be reinforced by the intermediate region CR. As a result, damage to the vibration plate 36 can be reduced.

[0071] Moreover, the intermediate region CR includes a conductor portion 385 made of the same material as the first electrode 381 at a position where the piezoelectric body 382 is sandwiched between the second electrode 383 and the intermediate region CR. Therefore, the rigidity of the intermediate region CR can be increased compared to a configuration in which the conductor portion 385 is omitted. As a result, damage to the vibration plate 36 is easily reduced. In addition, the conductor portion 385 is electrically connected to the second electrode 383. Therefore, the conductor portion 385 has the same potential as the second electrode 383. Therefore, since an electric field is not applied to the portion 384, deformation of the intermediate region CR accompanying the driving of the first active region AR_1 is reduced, and as a result, the aforementioned connection portion is suitably reinforced by the intermediate region CR.

[0072] The conductor portion 385 may be omitted. That is, the intermediate region CR may not include a portion made of the same material as the first electrode 381 at a position where the piezoelectric body 382 is sandwiched between the intermediate region CR and the second electrode 383. Even in this case, since no electric field is applied to the portion 384, deformation of the intermediate region CR caused by driving the first active region AR_1 is reduced, and as a result, the aforementioned connection portion is suitably reinforced by the intermediate region CR.

[0073] According to the above third embodiment, it is also possible to reduce deviations in ejection characteristics due to manufacturing errors.

[0074] 4. Fourth embodiment The fourth embodiment of the present invention will be described below. In the following exemplary embodiment, for elements having the same actions and functions as those in the first embodiment, the reference numerals used in the description of the first embodiment will be used and detailed descriptions of each will be omitted as appropriate.

[0075] 8 is a cross-sectional view showing a portion of a liquid ejection head 26C according to the fourth embodiment. The liquid ejection head 26C is similar to the liquid ejection head 26 of the first embodiment described above, except that it has a piezoelectric element 38C instead of the piezoelectric element 38. The piezoelectric element 38C is similar to the pressure chamber substrate 34, except that the configuration of the piezoelectric body 382 is different.

[0076] The piezoelectric element 38C includes a non-active region NFR disposed between the first active region AR_1 and the second active region AR_2 in the Y1 direction. Here, the piezoelectric body 382 has a portion 386 disposed in the non-active region NFR so as to be continuous with each of the first active region AR_1 and the second active region AR_2. In addition, the plurality of first electrodes 381 are not disposed in the non-active region NFR. Due to such a non-active region NFR, even if the piezoelectric body 382 is disposed offset in the Y1 direction or the Y2 direction, it is possible to reduce the variation in the ejection characteristics of the liquid from the first nozzle N_1. In addition, there is also an advantage that the processing of the piezoelectric body 382 can be easily completed compared to a configuration in which there is a region in which the piezoelectric body 382 is not disposed between the first active region AR_1 and the second active region AR_2.

[0077] According to the fourth embodiment described above, it is also possible to reduce deviations in ejection characteristics due to manufacturing errors.

[0078] 5. Variations Each of the above-mentioned exemplary embodiments may be modified in various ways. Specific modified aspects that may be applied to each of the above-mentioned embodiments are illustrated below. Two or more aspects selected from the following exemplary embodiments may be appropriately combined as long as they are not inconsistent with each other. In the following modified examples, the elements whose actions and functions are the same as those of the first embodiment will be referred to by the symbols used in the description of the first embodiment, and detailed descriptions of each will be omitted as appropriate.

[0079] 5-1. Variation 1 9 is a plan view showing the corresponding relationship between the nozzles N, pressure chambers C, and piezoelectric elements 38 of a liquid ejection head 26D according to Modification 1. The liquid ejection head 26D is similar to the liquid ejection head 26 of the above-described first embodiment, except that the second nozzle N_2 is omitted and a communicating plate 32D is provided instead of the communicating plate 32. The communicating plate 32D is similar to the communicating plate 32, except that a communicating channel 326D is provided instead of the communicating channels 326_1 and 326_2.

[0080] In the first modification, the first pressure chamber C_1, the second pressure chamber C_2, the third pressure chamber C_3, and the fourth pressure chamber C_4 are grouped together to correspond to the first nozzle N_1, and a communication flow path 326D is provided to correspond to the group. That is, the communication flow path 326D corresponds to the first nozzle N_1, and communicates with each of the first pressure chamber C_1, the second pressure chamber C_2, the third pressure chamber C_3, and the fourth pressure chamber C_4. The above first modification can also reduce deviations in ejection characteristics due to manufacturing errors. Moreover, in the first modification, a larger ejection pressure can be obtained than in the above-mentioned embodiments.

[0081] 5-2. Variation 2 10 is a plan view showing the corresponding relationship between the nozzles N, pressure chambers C, and piezoelectric elements 38 of a liquid ejection head 26E according to Modification 2. The liquid ejection head 26E is similar to the liquid ejection head 26 of the above-described first embodiment, except that the second nozzle N_2 is omitted and a piezoelectric element 38E is provided instead of the piezoelectric element 38. The piezoelectric element 38E is similar to the piezoelectric element 38, except that the arrangement of the first active area AR_1 is different.

[0082] In the second modification, the first pressure chamber C_1, the second pressure chamber C_2, and the third pressure chamber C_3 are grouped together to correspond to the first nozzle N_1, and a first active area AR_1 is provided corresponding to this group.

[0083] That is, the multiple pressure chambers C of the liquid ejection head 26E include the first pressure chamber C_1, the second pressure chamber C_2, and the third pressure chamber C_3 adjacent to the second pressure chamber C_2 in the Y1 direction. The first nozzle N_1 communicates with the first pressure chamber C_1, the second pressure chamber C_2, and the third pressure chamber C_3. The first active area AR_1 is disposed across at least a part of the first pressure chamber C_1, at least a part of the second pressure chamber C_2, and at least a part of the third pressure chamber C_3 when viewed in the Z1 direction. Therefore, liquid can be ejected from the first nozzle N_1 by utilizing the pressures of the first pressure chamber C_1, the second pressure chamber C_2, and the third pressure chamber C_3. The above-mentioned first modification can also reduce deviations in ejection characteristics due to manufacturing errors.

[0084] 5-3. Variation 3 11 is a cross-sectional view showing a portion of a liquid ejection head 26F according to Modification Example 3. The liquid ejection head 26F is similar to the liquid ejection head 26 of the above-described first embodiment, except that it has a piezoelectric element 38F instead of the piezoelectric element 38. The piezoelectric element 38F has a first electrode 381F, a piezoelectric body 382, ​​and a plurality of second electrodes 383F, which are layered in this order in the Z1 direction.

[0085] In this embodiment, the first electrode 381F, which is a common electrode, is disposed between the piezoelectric body 382 and the vibration plate 36. Therefore, it is easier to reduce the size of the piezoelectric body 382 that does not contribute to driving, compared to a configuration in which an individual electrode is disposed between the piezoelectric body 382 and the vibration plate 36. As a result, the driving efficiency of the liquid ejection head 26F can be improved.

[0086] The deviation of the ejection characteristics due to the manufacturing error can also be reduced by the above-mentioned modification 3. In the above-mentioned embodiment, the piezoelectric body is interposed between the individual electrode and the common electrode, but the present invention is not limited to this, and the piezoelectric body may be interposed between the individual electrodes.

[0087] 5-4. Variation 4 Fig. 12 and Fig. 13 are cross-sectional views of a liquid ejection head 26G according to Modification Example 4. Fig. 12 shows a cross section of the liquid ejection head 26G cut along an XZ plane passing through a first pressure chamber C_1. Fig. 13 shows a cross section of the liquid ejection head 26G cut along an XZ plane passing through a second pressure chamber C_2.

[0088] The liquid ejection head 26G is similar to the liquid ejection head 26 of the first embodiment described above, except that the liquid ejection head 26G is configured to circulate ink. Specifically, the liquid ejection head 26G is similar to the liquid ejection head 26 of the first embodiment described above, except that the liquid ejection head 26G has a communication plate 32G and a housing portion 42 instead of the communication plate 32 and the housing portion 42.

[0089] The communicating plate 32G is similar to the communicating plate 32G described above, except that the opening 322, the supply flow paths 324, and the relay flow paths 328 are each divided into a liquid supply path and a liquid discharge path. The communicating paths of the communicating plate 32G further include a first supply path 324a that supplies liquid to the first pressure chamber C_1, and a first discharge path 324b that discharges liquid from the second pressure chamber C_2. This allows the liquid in the first pressure chamber C_1 and the second pressure chamber C_2 to circulate. This makes it easy to maintain good liquid ejection characteristics from the first nozzle N_1 for a long period of time. Note that the first supply path 324a is supplied with ink from the inlet 424a and the storage portion 422a provided in the housing portion 42G via the relay flow path 328b and the opening 322a provided in the communicating plate 32G. Furthermore, the ink in the first discharge path 324b passes through a relay flow path 328b and an opening 322b provided in the communication plate 32G, and is discharged from a discharge port 424b and a storage portion 422b provided in the housing portion 42G.

[0090] Here, the first pressure chamber C_1, which is one of the first pressure chamber C_1 and the second pressure chamber C_2, is set to a positive pressure, and the other, the second pressure chamber C_2, is set to a negative pressure, thereby causing the liquid to flow from the first nozzle N_1. As a result, the liquid in the first pressure chamber C_1 and the second pressure chamber C_2 is circulated, making it easy to maintain good ejection characteristics of the liquid from the first nozzle N_1 for a long period of time. The above-described fourth modification can also reduce deviations in ejection characteristics due to manufacturing errors.

[0091] 5-5. Variation 5 Fig. 14 is an explanatory diagram of the flow paths of a liquid ejection device 100H according to Modification 5. The liquid ejection device 100H is similar to the liquid ejection device 100 of the first embodiment described above, except that it has a liquid ejection head 26H and a circulation mechanism 29 instead of the liquid ejection head 26. As shown in Fig. 14, the liquid ejection head 26H is provided with a plurality of nozzles N, a plurality of individual flow paths P, a first common liquid chamber R1, and a second common liquid chamber R2, and is connected to the circulation mechanism 29. Note that in Fig. 14, the active area AR constituting the first active area AR_1 or the second active area AR_2 described above is indicated by a dashed line.

[0092] The liquid ejection head 26H has a plurality of nozzles N, and each of the plurality of nozzles N is connected to two individual flow paths P. Here, the two individual flow paths P are connected to each other so as to intersect midway, and the nozzle N is provided at the intersection.

[0093] Each individual flow path P has a pressure chamber Ca, a pressure chamber Cb, and a nozzle flow path Nf. Each of the pressure chambers Ca and the pressure chamber Cb is configured in the same manner as the pressure chamber C described above. Here, of the pressure chambers Ca of the two individual flow paths P that intersect with each other, one pressure chamber Ca is an example of a "first pressure chamber," and the other pressure chamber Ca is an example of a "second pressure chamber." Similarly, of the pressure chambers Cb of the two individual flow paths P that intersect with each other, one pressure chamber Cb is an example of a "fifth pressure chamber," and the other pressure chamber Cb is an example of a "sixth pressure chamber."

[0094] However, the pressure chamber Ca and the pressure chamber Cb in each individual flow path P communicate with each other via the nozzle flow path Nf. Here, the pressure chamber Ca corresponding to the first pressure chamber communicates with the nozzle flow path Nf via a first communication path 326H_1. The pressure chamber Ca corresponding to the second pressure chamber communicates with the nozzle flow path Nf via a second communication path 326H_2. The pressure chamber Cb corresponding to the fifth pressure chamber communicates with the nozzle flow path Nf via a third communication path 326H_3. The pressure chamber Cb corresponding to the sixth pressure chamber communicates with the nozzle flow path Nf via a fourth communication path 326H_4. Each nozzle flow path Nf is provided with a nozzle N. In each nozzle flow path Nf, the pressure in the pressure chamber Ca and the pressure chamber Cb changes, causing ink to be ejected from the nozzle N.

[0095] A first common liquid chamber R1 and a second common liquid chamber R2 are connected to each of the individual flow paths P. The first common liquid chamber R1 stores ink to be supplied to each individual flow path P. Meanwhile, the second common liquid chamber R2 is connected to an end of each individual flow path P in the X1 direction. The second common liquid chamber R2 stores ink that is not ejected and is discharged from each individual flow path P.

[0096] A circulation mechanism 29 is connected to the first common liquid chamber R1 and the second common liquid chamber R2. The circulation mechanism 29 supplies ink to the first common liquid chamber R1 and recovers ink discharged from the second common liquid chamber R2 for re-supply to the first common liquid chamber R1. The circulation mechanism 29 has a first supply pump 291, a second supply pump 292, a storage container 293, a recovery flow path 294, and a supply flow path 295.

[0097] The first supply pump 291 is a pump that supplies the ink stored in the liquid container 14 to the storage container 293. The storage container 293 is a sub-tank that temporarily stores the ink supplied from the liquid container 14. The recovery flow path 294 communicates the second common liquid chamber R2 with the storage container 293, and is a flow path for recovering the ink from the second common liquid chamber R2 to the storage container 293. In addition to the ink stored in the liquid container 14 being supplied to the storage container 293 from the first supply pump 291, the ink discharged from each individual flow path P to the second common liquid chamber R2 is supplied via the recovery flow path 294. The second supply pump 292 is a pump that sends out the ink stored in the storage container 293. The supply flow path 295 communicates the first common liquid chamber R1 with the storage container 293, and is a flow path for supplying the ink from the storage container 293 to the first common liquid chamber R1.

[0098] Fig. 15 is a cross-sectional view of a liquid ejection head 26H according to Modification 5. As shown in Fig. 15, the liquid ejection head 26H has a configuration in which two liquid ejection heads 26 of the first embodiment described above are combined so as to be symmetrical with respect to the nozzle N. However, as described above, the pressure chamber Ca and the pressure chamber Cb communicate with each other via the nozzle flow path Nf, the first communication passage 326H_1, and the second communication passage 326H_2.

[0099] As shown in FIG. 15, the liquid ejection head 26H has a pressure chamber substrate 34H in which the pressure chambers Ca and pressure chambers Cb are provided, and a communication plate 32H in which the nozzle flow paths Nf, the first communication passages 326H_1 and the second communication passages 326H_2 are provided.

[0100] In this way, the liquid ejection head 26H has a communication plate 32H disposed between the nozzle substrate 46 and the pressure chamber substrate 34H. The communication plate 32H is provided with a plurality of communication paths. The plurality of communication paths include a nozzle flow path Nf, which is an example of a "first nozzle flow path" that communicates with a nozzle N, which is an example of a "first nozzle", a first communication path 326H_1 that communicates between the pressure chamber Ca or pressure chamber Cb corresponding to the "first pressure chamber" and the nozzle flow path Nf, and a second communication path 326H_2 that communicates between the pressure chamber Ca or pressure chamber Cb corresponding to the "second pressure chamber" and the nozzle flow path Nf. Therefore, the pressure of these pressure chambers can be suitably transmitted to the nozzle N, compared to a configuration in which a flow path that communicates between the first pressure chamber and the second pressure chamber is provided in the pressure chamber substrate 34H.

[0101] 5-6. Variation 6 In each of the above-mentioned embodiments, a serial type liquid ejection device 100 is exemplified in which a transport body 242 carrying a liquid ejection head 26 is moved back and forth, but the present invention can also be applied to a line type liquid ejection device in which multiple nozzles N are distributed across the entire width of the medium 12.

[0102] 5-7. Variation 7 The liquid ejection device 100 exemplified in each of the above-mentioned embodiments can be adopted in various devices such as facsimile machines and copy machines, in addition to devices dedicated to printing. However, the use of the liquid ejection device of the present invention is not limited to printing. For example, a liquid ejection device that ejects a solution of a color material is used as a manufacturing device for forming a color filter of a liquid crystal display device. Also, a liquid ejection device that ejects a solution of a conductive material is used as a manufacturing device for forming wiring and electrodes of a wiring board. [Explanation of symbols]

[0103] 12...medium, 14...liquid container, 20...control unit, 22...transport mechanism, 24...movement mechanism, 26...liquid ejection head, 26A...liquid ejection head, 26B...liquid ejection head, 26C...liquid ejection head, 26D...liquid ejection head, 26E...liquid ejection head, 26F...liquid ejection head, 26G...liquid ejection head, 26H...liquid ejection head, 29...circulation mechanism, 32...communication plate, 32D...communication plate, 32G...communication plate, 32H...communication plate, 34...pressure chamber substrate, 34A...pressure chamber substrate, 34H...pressure chamber substrate, 36...vibration plate, 38...piezoelectric element, 38B...piezoelectric element, 38C...piezoelectric element, 8E...piezoelectric element, 38F...piezoelectric element, 42...casing, 42G...casing, 44...sealing body, 46...nozzle substrate, 48...vibration absorber, 50...wiring substrate, 100...liquid ejection device, 100H...liquid ejection device, 242...transport body, 244...transport belt, 291...first supply pump, 292...second supply pump, 293...storage container, 294...recovery flow path, 295...supply flow path, 322...opening, 322a...opening, 322b...opening, 324...supply flow path, 324_1...first supply path, 324_2...second supply path, 324_3...third supply path, 324_4...fourth supply path, 324a...first supply path, 324b...first discharge passage, 326...communicating passage, 326D...communicating passage, 326H_1...first communication passage, 326H_2...second communication passage, 326_1...communicating passage, 326_2...communicating passage, 328...relay passage, 328b...relay passage, 341...first partition, 342...second partition, 361...first layer, 362...second layer, 381...first electrode, 381F...first electrode, 382...piezoelectric body, 383...second electrode, 383F...second electrode, 384...portion, 385...conductor portion, 386...portion, 422...accommodating portion, 422a...accommodating portion, 422b...accommodating portion, 424...inlet, 424a...inlet, 424b...exhaust orifice, AR...active area (first active area, second active area), AR_1...first active area, AR_2...second active area, C...pressure chamber, CR...intermediate area, C_1...first pressure chamber, C_2...second pressure chamber, C_3...third pressure chamber, C_4...fourth pressure chamber, Ca...pressure chamber (first pressure chamber, second pressure chamber), Cb...pressure chamber (first pressure chamber, second pressure chamber), N...nozzle, NFR...non-active area, NR...area, N_1...first nozzle, N_2...second nozzle, Nf...nozzle flow path (first nozzle flow path), P...individual flow path, R...liquid storage chamber, R1...first common liquid chamber, R2...second common liquid chamber, t1...thickness, t2...thickness.

Claims

1. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element having a The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, a third pressure chamber adjacent to the second pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. a second nozzle adjacent to the first nozzle in the first direction, the second nozzle does not communicate with either the first pressure chamber or the second pressure chamber, and , communicating with the third pressure chamber, The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the The pressure chamber is disposed so as to extend across at least a part of the second pressure chamber and not extend across the third pressure chamber. A liquid ejection head comprising:

2. The plurality of pressure chambers further include a fourth pressure chamber adjacent to the third pressure chamber in the first direction. Including, the second nozzle is in communication with both the third pressure chamber and the fourth pressure chamber, The piezoelectric element is a piezoelectric body connected to the common electrode and a second individual electrode among the plurality of individual electrodes. a second active region sandwiched between the pole; The second active area includes at least a portion of the third pressure chamber and at least a portion of the fourth pressure chamber. Also, some of them are located across the 2. The liquid ejection head according to claim 1.

3. Between the piezoelectric body of the first active area and the piezoelectric body of the second active area in the first direction, No other piezoelectric bodies are arranged.

3. The liquid ejection head according to claim 2.

4. The piezoelectric element is a piezoelectric body in the first active area and a piezoelectric body in the second active area in the first direction. an intermediate region in which another piezoelectric body is disposed between the piezoelectric body and the intermediate region; The piezoelectric body in the intermediate region is a piezoelectric body in the first active region and a piezoelectric body in the second active region. not consecutive with each of the 3. The liquid ejection head according to claim 2.

5. The intermediate region is provided with the plurality of individual electrodes at positions where the piezoelectric body is sandwiched between the common electrode and the individual electrodes. A conductor portion made of the same material as The conductor portion is electrically connected to the common electrode.

5. The liquid ejection head according to claim 4.

6. The intermediate region is provided with the plurality of individual electrodes at positions where the piezoelectric body is sandwiched between the common electrode and the individual electrodes. does not contain any part made of the same material as 5. The liquid ejection head according to claim 4.

7. The piezoelectric element is disposed between the first active area and the second active area in the first direction. a non-active area in which The piezoelectric body has the non-conducting portion that is continuous with the first active area and the second active area. a portion disposed in the active area; The plurality of individual electrodes are not provided in the non-active region.

3. The liquid ejection head according to claim 2.

8. The pressure chamber substrate is a first partition wall separating the first pressure chamber and the second pressure chamber; a second partition wall separating the second pressure chamber and the third pressure chamber, The thickness of the first partition wall in the first direction is greater than the thickness of the second partition wall in the first direction. small, 8. The liquid ejection head according to claim 1, wherein the liquid ejection head is a liquid ejection head.

9. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element, The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, In the first direction, a portion of the first pressure chamber that overlaps with the first active area when viewed in the second direction The width along the first pressure chamber is a width extending from the front of the first pressure chamber to the rear of the first pressure chamber. The width along the first direction is smaller than the width along the first direction, In the first direction, a portion of the second pressure chamber that overlaps with the first active area when viewed in the second direction The width along the second direction is the width of the front of the portion of the second pressure chamber that does not overlap the first active area. The width along the first direction is smaller than the width along the first direction. A liquid ejection head comprising:

10. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element, The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, In the first direction, a portion of the first pressure chamber that overlaps with the first active area when viewed in the second direction The width along the first pressure chamber is a width extending from the front of the first pressure chamber to the rear of the first pressure chamber. The width along the first direction is larger than the width along the first direction, In the first direction, a portion of the second pressure chamber that overlaps with the first active area when viewed in the second direction The width along the second direction is the width of the front of the portion of the second pressure chamber that does not overlap the first active area. The width along the first direction is greater than the width along the first direction. A liquid ejection head comprising:

11. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. A piezoelectric element having a A communication plate disposed between the nozzle substrate and the pressure chamber substrate and having a plurality of communication paths. and The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, The plurality of communication passages include a first nozzle flow path communicating with the first nozzle; a first communication passage that communicates the first pressure chamber and the first nozzle flow passage; a second communication passage that communicates the second pressure chamber with the first nozzle flow passage; A liquid ejection head comprising:

12. The plurality of communication passages include a first supply path that supplies liquid to the first pressure chamber; a second supply path that supplies liquid to the second pressure chamber, 12. The liquid ejection head according to claim 11.

13. The plurality of communication passages include a first supply path that supplies liquid to the first pressure chamber; a first discharge path for discharging liquid from the second pressure chamber, 12. The liquid ejection head according to claim 11.

14. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element, The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction; a third pressure chamber adjacent to the second pressure chamber in the first direction, The plurality of nozzles are common to the first pressure chamber, the second pressure chamber, and the third pressure chamber. a first nozzle in communication with the The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the The pressure chamber is disposed across at least a portion of the second pressure chamber and at least a portion of the third pressure chamber. R, A liquid ejection head comprising:

15. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element having a The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, The plurality of individual electrodes are disposed between the piezoelectric body and the vibration plate. A liquid ejection head comprising:

16. a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element having a The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, The common electrode is disposed between the piezoelectric body and the diaphragm. A liquid ejection head comprising:

17. A liquid ejection head according to any one of claims 1 to 16, A control unit that controls a liquid ejection operation by the liquid ejection head. A liquid ejection device comprising:

18. a positive pressure is applied to both the first pressure chamber and the second pressure chamber; 18. The liquid ejection device according to claim 17.

19. A liquid ejection head; a control unit for controlling the liquid ejection operation of the liquid ejection head. And, The liquid ejection head includes: a nozzle substrate provided with a plurality of nozzles arranged along a first direction; a pressure chamber substrate provided with a plurality of pressure chambers arranged along the first direction; A diaphragm; A common electrode provided in common to the plurality of pressure chambers, and a pair of electrodes provided individually to the plurality of pressure chambers. and a piezoelectric body sandwiched between the common electrode and the individual electrodes. and a piezoelectric element, The nozzle substrate, the pressure chamber substrate, the vibration plate, and the piezoelectric element are arranged so as to intersect in the first direction. The laminate is laminated in a second direction, The plurality of pressure chambers include A first pressure chamber; a second pressure chamber adjacent to the first pressure chamber in the first direction, The plurality of nozzles include a first nozzle that is commonly connected to the first pressure chamber and the second pressure chamber. Including The piezoelectric element is a piezoelectric body that is connected to the common electrode and a first individual electrode among the plurality of individual electrodes. a first active region sandwiched between the pole, The first active area includes at least a part of the first pressure chamber and the and disposed across at least a portion of the second pressure chamber, One of the first pressure chamber and the second pressure chamber is set to a positive pressure and the other is set to a negative pressure. do, A liquid ejection device comprising:

20. A pressure chamber having a pressure sensor which is commonly connected to the plurality of pressure chambers arranged along the first direction, 17. The liquid ejection head according to claim 16, further comprising a flow path for supplying liquid to the Do.

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