DETECTION APPARATUS AND DETECTION METHOD

Abstract

To provide a detection device with which it is possible to detect a detection object using a detection element that is not equipped with an electromagnetic field supply source.SOLUTION: The generation circuit of a transmit-receive device 1 wirelessly feeds an electromagnetic field EW for vibrating a vibrator included in each of detection elements 3-1 to 3-M to the detection elements 3-1 to 3-M by a transmit antenna 12. The receive circuit of the transmit-receive device 1 wirelessly receives a receive signal R0(t) when the vibrator vibrates due to an electric field E based on the electromagnetic field EW and a receive signal R1(t) when the vibrator vibrates by being affected by the detection object, from each of the detection elements 3-1 to 3-M via a receive antenna 13. A detection circuit 2 executes a process for detecting a change amount of resonance frequency of the vibrator based on the receive signals R0(t), R1(t) and detecting the detection object, for all of M receive signals R0(t), R1(t) having been received from the detection elements 3-1 to 3-M.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a detection device and a detection method. [Background technology]

[0002] Conventionally, a detection element described in Patent Document 1 is known. FIG. 36 is a cross-sectional view of the detection element described in Patent Document 1. Referring to FIG. 36, detection element 100 includes substrates 101-103, a vibrator 104, and antennas 105-108. Substrate 101 has a recess 111 and a support member 112. Substrate 102 has a through hole. Substrate 103 has a recess 131, a support member 132, and a liquid sending / removal port 133. As a result, a space SP is formed by stacking substrates 103.

[0003] Support member 112 penetrates substrate 101 in the thickness direction, and protrudes from bottom surface 111A of recess 111 toward bottom surface 131A of recess 131. Support member 112 is made of metal.

[0004] Support member 132 protrudes from bottom surface 131A of recess 131 toward bottom surface 111A of recess 111. Support member 132 (132c) penetrates substrate 103 in the thickness direction. Support members 132 (132a) and 132 (132b) are made of the same material as substrate 103, and support member 132 (132c) is made of metal.

[0005] Each of the support members 112 and 132 has a cylindrical shape. The liquid supply / waste port 133 penetrates the substrate 103 in the thickness direction from the outer surface of the substrate 103 to the bottom surface 131A of the recess 131.

[0006] Antenna 105 is disposed within recess 111 so as to cover bottom surface 111A and supporting member 112, and is made of a conductive thin film.

[0007] Antenna 106 is disposed on the surface of substrate 101 opposite bottom surface 111A of recess 111, and is in contact with support member 112. As a result, antenna 106 is electrically connected to antenna 105. Antenna 106 is made of the same conductive thin film as antenna 105.

[0008] Antenna 107 is disposed in recess 131 so as to cover bottom surface 131A and support member 132. Antenna 107 is made of the same conductive thin film as antenna 105.

[0009] The antenna 108 is disposed on the surface of the substrate 103 opposite to the bottom surface 131A of the recess 131, and is in contact with the support member 132 (132c).

[0010] The transducer 104 is disposed, for example, in contact with the antenna 7 .

[0011] In the detection element 100, when an electromagnetic field is applied to the oscillator 104 by the antennas 105 and 106, the oscillator 104 vibrates at a resonant frequency, and the antennas 107 and 108 detect a received signal consisting of a vibration signal of the oscillator 104.

[0012] When an object to be detected adheres to the oscillator 104, the resonant frequency of the oscillator 104 attenuates over time, and the object to be detected is detected by detecting the amount of attenuation (amount of change) of the resonant frequency based on a received signal consisting of a vibration signal from the oscillator 104. [Prior art documents] [Patent documents]

[0013] [Patent Document 1] JP 2019-138628 A Summary of the Invention [Problem to be solved by the invention]

[0014] Patent document 1 describes applying an electromagnetic field to vibrator 104 via antennas 105 and 106, but does not describe a method for supplying the electromagnetic field to detection element 100. Therefore, it is unclear whether detection element 100 can detect an object to be detected without providing a source of the electromagnetic field within detection element 100.

[0015] Therefore, according to an embodiment of the present invention, a detection device capable of detecting an object to be detected using a detection element that does not include an electromagnetic field source is provided.

[0016] Furthermore, according to the embodiment of the present invention, there is provided a detection method capable of detecting a detection target using a detection element that does not include a source of an electromagnetic field. [Means for solving the problem]

[0017] (Configuration 1) According to an embodiment of the present invention, the detection device includes M (M is an integer equal to or greater than 1) detection elements, a transmission / reception device, and a detection circuit. Each of the M detection elements includes a transducer, a first reception antenna, and a first transmission antenna. The transmission / reception device sets the number of transducers included in each of the M detection elements to n. 1 ,n 2 ,n M (n 1 ,n 2 ,n M where N is an integer of 1 or more, and N=n 1 +n 2 +···+n MThe system includes a generating circuit that generates an electromagnetic field that vibrates each of the number of vibrators at a resonant frequency, a second transmitting antenna that wirelessly feeds the electromagnetic field generated by the generating circuit to M first receiving antennas in the M number of detecting elements, and a second receiving antenna that wirelessly receives M receiving signals in the M detecting elements from the M first transmitting antennas in the M number of detecting elements. The detecting circuit detects an object to be detected based on the M receiving signals received by the second receiving antenna. Each of the M receiving signals has a vibration waveform that vibrates at a resonant frequency of 50 MHz or higher. The M first receiving antennas receive the electromagnetic field wirelessly fed from the second transmitting antenna, and each generate an oscillating electric field based on the received electromagnetic field. 1 n oscillators 2 oscillators, , and n M n 1 n oscillators 2 oscillators, , and n M The transducers are supported so as to be capable of vibrating at a resonant frequency, and generate M reception signals when an oscillating electric field is applied to the transducers. 1 n oscillators 2 oscillators, , and n M The M reception signals generated by the transducers are wirelessly transmitted to a second reception antenna. The detection circuit detects the amount of change in the resonant frequency in one of the M reception signals based on the M reception signals received by the second reception antenna, thereby executing a detection process for all of the M reception signals to detect the object to be detected.

[0018] (Configuration 2) In configuration 1, n 1 n oscillators 2 oscillators, , and n MWhen the transducers are respectively a first transducer, a second transducer, ..., and an Mth transducer, the M reception signals include M first reception signals in the M detection elements consisting of a first vibration waveform when the first transducer, the second transducer, ..., and the Mth transducer vibrate due to an oscillating electric field, and M second reception signals in the M detection elements consisting of a second vibration waveform when the first transducer, the second transducer, ..., and the Mth transducer vibrate due to the influence of a detection object. The second reception antenna receives the M second reception signals after receiving the M first reception signals. The detection circuit performs a process to determine M first resonant frequencies of the first vibrator, the second vibrator, ..., and the Mth vibrator based on M first received signals, performs a process to determine M second resonant frequencies of the first vibrator, the second vibrator, ..., and the Mth vibrator based on M second received signals, performs a process to determine an amount of change in the resonant frequency obtained by subtracting the second resonant frequency from the first resonant frequency for all M first and second resonant frequencies to determine the amount of change in the M resonant frequencies, and performs a process to detect an object to be detected based on the amount of change in one resonant frequency for all M amount of change in the resonant frequency to detect an object to be detected in the M detection elements.

[0019] (Configuration 3) In configuration 1 or 2, in each of the M detection elements, the first receiving antenna and the first transmitting antenna are made of a single antenna, that is, a first antenna member. The second transmitting antenna and the second receiving antenna are made of a single antenna, that is, a second antenna member, different from the first antenna member. The second antenna member wirelessly feeds an electromagnetic field generated by a generating circuit to the M first antenna members in the M detection elements for a certain period of time, and after wireless feeding of the electromagnetic field to the M first antenna members is stopped, wirelessly receives M reception signals from the M first antenna members. In the M detection elements, the M first antenna members receive the electromagnetic field wirelessly fed by the second antenna member, and transmit an oscillating electric field based on the received electromagnetic field for a certain period of time, that is, n 1 n oscillators 2oscillators, , and n M n of the oscillating electric field is applied to each of the oscillators. 1 n oscillators 2 oscillators, , and n M After stopping the application of voltage to the transducers, 1 n oscillators 2 oscillators, , and n M The M reception signals generated by the M transducers are wirelessly transmitted to a second antenna member.

[0020] (Configuration 4) In configuration 3, the shape of the first antenna member is a rod shape or a spiral shape in a plane opposite to the plane of the transducer.

[0021] (Configuration 5) In the configuration 1 or 2, in each of the M detector elements, the first receiving antenna is composed of a first antenna member that is an antenna, and the first transmitting antennas are each different from the first antenna member and are composed of n m (m is any one of 1 to M) m (m is any one of 1 to M) second antenna members. The second transmitting antenna is made of a third antenna member, and the second receiving antenna is made of a fourth antenna member different from the third antenna member. The third antenna member wirelessly feeds an electromagnetic field generated by a generating circuit to M first antenna members in the M detecting elements. The fourth antenna member transmits M receiving signals to n antenna members in the M detecting elements. 1 n second antenna members 2 number of second antenna members, ..., and n M In each of the M detection elements, the first antenna member receives the electromagnetic field wirelessly fed by the third antenna member, and generates an oscillating electric field based on the received electromagnetic field. m (m is any value between 1 and M) transducers are applied. In each of the M detection elements, m (m is any number from 1 to M) second antenna membersm The reception signals generated by the (m is any value from 1 to M) transducers are wirelessly transmitted to the fourth antenna member.

[0022] (Configuration 6) In configuration 5, the shape of the first antenna member is a rod shape or a spiral shape in a plane opposite to the plane of the transducer, and n m Each of the (m is any value from 1 to M) second antenna members is rod-shaped or spiral-shaped in a plane opposite to the plane of the transducer.

[0023] (Configuration 7) In any one of configurations 1 to 6, in each of the M detection elements, n m (n m is an integer of 2 or more, and m is any one of 1 to M) oscillators are mutually different n m (n m is an integer of 2 or more, and m is one of 1 to M resonant frequencies that vibrate at each of the n m (n m The first transmitting antenna of each of the M detecting elements wirelessly transmits the superimposed receiving signal as a receiving signal to the second receiving antenna. The detecting circuit detects n superimposed receiving signals based on one of the M superimposed receiving signals, which are the M receiving signals received by the second receiving antenna. m (n m is an integer of 2 or more, and m is any one of 1 to M) vibration waveforms are detected, and the detected n m (n m is an integer of 2 or more, and m is any one of 1 to M vibration waveforms, and n m (n m is an integer of 2 or more, and m is any one of 1 to M) vibration waveforms, and n m (n mThe detection of N (N is an integer of 2 or more, m is any one of 1 to M) detection targets is performed for all m=1 to M, and N (N is an integer of 2 or more) detection targets that are different from one another are detected.

[0024] (Configuration 8) In configuration 7, the N (N is an integer of 2 or more) detection objects include at least two of stress, pressure, gas, biological material, and temperature.

[0025] (Configuration 9) In any of configurations 1 to 8, the M detector elements are installed inside a building where people cannot enter.

[0026] (Configuration 10) In any of configurations 1 to 8, the M detector elements are placed inside the structure.

[0027] (Configuration 11) In any of configurations 1 to 8, M detection elements are placed inside a living body.

[0028] (Configuration 12) In any one of configurations 1 to 11, each of the M detector elements includes a substrate, a first support member, a second support member, a first transmitting antenna, a first receiving antenna, and n m (m is any of 1 to M) transducers. The substrate includes a space having a first surface and a second surface opposite to the first surface. The first support member protrudes from the first surface of the space toward the second surface. The second support member protrudes from the second surface of the space toward the first surface. The first transmitting antenna and the first receiving antenna are disposed on at least one of the first and second surfaces within the space. n m (m is any of 1 to M) transducers are arranged in contact with the first transmitting antenna and / or the first receiving antenna in a vibrating manner within the space. The first support member or the second support member has n m (m is any one of 1 to M) so as to prevent the vibrators from contacting the first surface or the second surface. m(m is any value from 1 to M) oscillators are supported.

[0029] (Configuration 13) According to an embodiment of the present invention, the detection method includes: The number of transducers contained in each of the M (M is an integer equal to or greater than 1) detection elements is n 1 ,n 2 ,n M (n 1 ,n 2 ,n M where N is an integer of 1 or more, and N=n 1 +n 2 +···+n M A first step of wirelessly feeding an electromagnetic field that vibrates each of the M oscillators at a resonant frequency to the M detector elements by a transmitting antenna; n 1 n oscillators 2 oscillators, , and n M a second step of receiving, from the M detection elements, M reception signals each having a vibration waveform when the M transducers vibrate at a resonant frequency of 50 MHz or more in response to application of an oscillating electric field based on an electromagnetic field, by a receiving antenna; and a third step of detecting the object to be detected by detecting the amount of change in resonant frequency in one of the M received signals based on the M received signals using the detection circuit for all of the M received signals.

[0030] (Configuration 14) In structure 13, n 1 n oscillators 2 oscillators, , and n MWhen the transducers are respectively a first transducer, a second transducer, ..., and an Mth transducer, the M reception signals include M first reception signals in the M detection elements consisting of a first vibration waveform when the first transducer, the second transducer, ..., and the Mth transducer vibrate due to an oscillating electric field, and M second reception signals in the M detection elements consisting of a second vibration waveform when the first transducer, the second transducer, ..., and the Mth transducer vibrate due to the influence of the detection object. In the second step, after the M first reception signals are received by the receiving antenna, the M second reception signals are received by the receiving antenna.

[0031] The third step is a first sub-step of executing a process of determining M first resonant frequencies of the first transducer, the second transducer, ..., and the Mth transducer based on the M first received signals by a detection circuit; a second sub-step of determining, by a detection circuit, M second resonant frequencies of the first transducer, the second transducer, ..., and the Mth transducer based on the M second received signals; a third sub-step of executing, by a detection circuit, a process of calculating a change amount of a resonance frequency obtained by subtracting the second resonance frequency from the first resonance frequency for all of the M first and second resonance frequencies to calculate a change amount of the M resonance frequencies; and a fourth sub-step of executing, by the detection circuit, a process of detecting the object to be detected based on the amount of change in one resonant frequency for all of the M amounts of change in the resonant frequency, thereby detecting the object to be detected in the M detection elements.

[0032] (Configuration 15) In the first step of configuration 13 or configuration 14, an electromagnetic field is superimposed on a carrier wave having a frequency higher than the resonant frequency of the transducer and wirelessly powered to the M detection elements.

[0033] (Configuration 16) In a first step of any of configurations 13 to 15, an electromagnetic field is wirelessly fed to M detection elements for a certain period of time by a transmitting / receiving antenna, which constitutes a transmitting antenna and a receiving antenna, and in a second step, M receiving signals are received by the transmitting / receiving antenna after the certain period has elapsed.

[0034] (Configuration 17) In either configuration 13 or configuration 16, in each of the M detection elements, n m (n m The oscillators (m is an integer of 2 or more, and m is any one of 1 to M) are made up of a plurality of oscillators having mutually different resonance frequencies. Effect of the Invention

[0035] The target substance can be detected using a sensing element that does not include a source of an electromagnetic field. [Brief description of the drawings]

[0036] [Figure 1] 1 is a schematic diagram of a detection device according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view of a detection element 3-1 shown in FIG. [Diagram 3] 3 is a cross-sectional view of the detection element 3-1 taken along line III-III in FIG. 2. [Figure 4] 3 is a plan view of the detection element 3-1 as viewed from a direction A shown in FIG. 2. [Diagram 5] 4 is a diagram showing the shapes of antennas 26 and 28 shown in FIG. [Figure 6] 5 is a first process chart showing a method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 7] 5 is a second process chart showing the method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 8] 5 is a third process chart showing the method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 9] 5 is a fourth process diagram showing the method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 10] 5 is a fifth process diagram showing the method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 11] 5 is a sixth process diagram showing the method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4. FIG. [Figure 12] 4 is a timing chart of an input voltage and a received signal. [Figure 13] 4 is a timing chart of the resonance frequency. [Figure 14] FIG. 2 is a diagram showing an example of a detection target; [Figure 15] FIG. 2 is a schematic diagram of a detection element for detecting pressure. [Figure 16] FIG. 4 is a diagram showing the relationship between the amplitude and frequency of a received signal. [Figure 17] 2 is a diagram showing an application example of the detection device shown in FIG. 1. [Figure 18] 2 is a flowchart for explaining the operation of the detection device shown in FIG. [Figure 19] FIG. 2 is a conceptual diagram showing received signals R0_SPM_D(t) and R1_SPM_D(t). [Figure 20] FIG. 13 is a conceptual diagram showing frequency components when the received signals R0_SPM_D(t) and R1_SPM_D(t) are subjected to a Fourier transform. [Figure 21] 4 is a schematic diagram of another detection device according to the first embodiment. FIG. [Figure 22] 4 is a schematic diagram of another detection element in the first embodiment. FIG. [Diagram 23] 10 is another flowchart for explaining the operation of the detection device 10 shown in FIG. [Figure 24] 4 is a flowchart showing a method for detecting a detection target according to the first embodiment. [Diagram 25] FIG. 11 is a schematic diagram of a detection device according to a second embodiment. [Figure 26] FIG. 26 is a schematic diagram of a detection element 4-1 shown in FIG. [Figure 27] FIG. 2 is a schematic diagram showing an arrangement structure of element units. [Figure 28]26 is a flowchart for explaining the operation of the detection device shown in FIG. 25. [Figure 29] 29 is a flowchart for explaining a detailed operation of step S24A in FIG. 28. [Diagram 30] FIG. 2 is a conceptual diagram showing received signals R0_SPM_SC(t) and R1_SPM_SC(t). [Diagram 31] FIG. 13 is a conceptual diagram showing frequency components when the received signals R0_SPM_SC(t) and R1_SPM_SC(t) are subjected to Fourier transform. [Diagram 32] FIG. 11 is a schematic diagram of another detection element in the second embodiment. [Diagram 33] FIG. 11 is a schematic diagram of another detection device according to the second embodiment. [Diagram 34] 13 is a schematic diagram of still another detection element in the second embodiment. FIG. [Diagram 35] 10 is a flowchart showing a method for detecting an object to be detected according to the second embodiment. [Diagram 36] FIG. 1 is a cross-sectional view of a detection element described in Patent Document 1. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference characters and their description will not be repeated.

[0038] [Embodiment 1] Fig. 1 is a schematic diagram of a detection device according to embodiment 1 of the present invention. With reference to Fig. 1, detection device 10 according to embodiment 1 of the present invention includes a transmission / reception device 1, a detection circuit 2, and M (M is an integer equal to or greater than 1) detection elements 3-1 to 3-M.

[0039] The transmitting / receiving device 1 includes a main body 11, a transmitting antenna 12, and a receiving antenna 13. The main body 11 incorporates a generating circuit that generates an electromagnetic field EW for vibrating a vibrator at a resonant frequency, and a receiving circuit that receives a receiving signal consisting of a vibration waveform of the vibrator. The electromagnetic field EW is an electromagnetic field that vibrates at a frequency of, for example, 50 MHz or more.

[0040] The transmitting antenna 12 is electrically connected to a generating circuit of the main body 11 by a cable 14. The receiving antenna 13 is electrically connected to a receiving circuit of the main body 11 by a cable 15.

[0041] When the electromagnetic field EW is supplied from the generating circuit via the cable 14, the transmitting antenna 12 wirelessly feeds the electromagnetic field EW to the M detection elements 3-1 to 3-M. In this case, the transmitting antenna 12 may wirelessly feed the electromagnetic field EW to the M detection elements 3-1 to 3-M for a certain period of time, and stop wirelessly feeding the electromagnetic field EW to the M detection elements 3-1 to 3-M after the certain period has elapsed. Also, the transmitting antenna 12 may continue wirelessly feeding the electromagnetic field EW to the M detection elements 3-1 to 3-M during the detection period of the detection target.

[0042] The receiving antenna 13 wirelessly receives M reception signals from the M detection elements 3-1 to 3-M, and supplies the M reception signals to a reception circuit in the main body 11 via a cable 15.

[0043] The receiving circuit of the main body 11 receives M reception signals from the receiving antenna 13 , and supplies the M reception signals to the detection circuit 2 via the cable 16 .

[0044] The detection circuit 2 receives M reception signals from the reception circuit of the main body 11 via the cable 16, and detects the detection target in the detection elements 3-1 to 3-M based on the M reception signals by a method described later.

[0045] Each of the M detection elements 3-1 to 3-M incorporates a vibrator. The M detection elements 3-1 to 3-M are arranged at different positions from each other in an area where the electromagnetic field EW from the transmission antenna 12 of the transmission / reception device 1 reaches. When the electromagnetic field EW is wirelessly fed by the transmission antenna 12 of the transmission / reception device 1, the M detection elements 3-1 to 3-M apply an electric field E to the vibrator based on the wirelessly fed electromagnetic field EW, and wirelessly transmit a reception signal consisting of a vibration waveform of the vibrator to the reception antenna 13 of the transmission / reception device 1.

[0046] Fig. 2 is a perspective view of the detection element 3-1 shown in Fig. 1. Fig. 3 is a cross-sectional view of the detection element 3-1 taken along line III-III in Fig. 2. Fig. 4 is a plan view of the detection element 3-1 as viewed from the direction A in Fig. 2. Note that the antenna is omitted in Figs. 2 and 4. Also, in Fig. 2, only the outline of the vibrator 24 is shown for ease of viewing.

[0047] 2 to 4, detection element 3-1 includes substrates 21-23, an oscillator 24, and antennas 25-28.

[0048] The substrate 21 has a recess 211 and a support member 212. The substrate 23 has a recess 231, a support member 232, and a liquid sending / removal port 233. The support member 212 penetrates the substrate 21 in the thickness direction and protrudes from the bottom surface 211A of the recess 211 toward the bottom surface 231A of the recess 231. The support member 212 is made of a metal, for example, tungsten (W). The support member 212 may be made of a metal other than W.

[0049] The support member 232 protrudes from the bottom surface 231A of the recess 231 toward the bottom surface 211A of the recess 211. The support member 232 (232c) penetrates the substrate 23 in the thickness direction. The support members 232 (232a) and 232 (232b) are made of the same material as the substrate 23, and the support member 232 (232c) is made of a metal, for example, W. The support member 232 (232c) may be made of a metal other than W.

[0050] The recess 231 of the substrate 23 faces the recess 211 of the substrate 21. Each of the support members 212, 232 has, for example, a cylindrical shape. The liquid supply / waste port 233 penetrates the substrate 23 in the thickness direction from the outer surface of the substrate 23 to the bottom surface 231A of the recess 231.

[0051] Antenna 25 is disposed in recess 211 so as to cover bottom surface 211A and support member 212. Antenna 25 is made of a conductive thin film. More specifically, antenna 25 is made of a laminated structure of an adhesion layer / electrode layer. The adhesion layer is made of, for example, titanium (Ti) or chromium (Cr), and the electrode layer is made of, for example, gold (Au) or platinum (Pt).

[0052] Antenna 26 is disposed on the surface of substrate 21 opposite bottom surface 211A of recess 211, and is in contact with support member 212. Antenna 26 protrudes to the right of substrates 21-23 along the in-plane direction of substrates 21-23 in the plane of FIG. 3. As a result, because support member 212 is made of metal, antenna 26 is electrically connected to antenna 25. Antenna 26 is made of the same conductive thin film as antenna 25.

[0053] Antenna 27 is disposed in recess 231 so as to cover bottom surface 231A and support member 232. Antenna 27 is made of the same conductive thin film as antenna 25.

[0054] Antenna 28 is disposed on the surface of substrate 23 opposite bottom surface 231A of recess 231, and is in contact with support member 232 (232c). Antenna 28 protrudes to the right of substrates 21-23 along the in-plane direction of substrates 21-23 in the plane of FIG. 3. As a result, because support member 232 (232c) is made of metal, antenna 28 is electrically connected to antenna 27. Antenna 28 is made of the same conductive thin film as antenna 25.

[0055] Substrate 21 is bonded to one surface of substrate 22 by anodic bonding. Substrate 23 is bonded to the other surface of substrate 22 by anodic bonding so that recess 231 faces recess 211. As a result, substrate 22 and recesses 221, 231 form space SP.

[0056] The oscillator 24 has, for example, a streamlined planar shape and is made of, for example, quartz crystal. 2 The vibrator 24 is disposed in the space SP so as to be symmetrical with respect to the axis X1. The vibrator 24 is disposed in the space SP in contact with the antenna 27 covering the support member 232 and in close proximity to the antenna 25 covering the support member 212. In FIG. 3, three support members 212 are illustrated, but in reality, more than three support members 212 are formed in the recess 211 as shown in FIGS. 2 and 4. The same is true for the support members 232. And, N1 support members 212 and N2 support members 232 are provided. Each of N1 and N2 is the number that can prevent the vibrator 24 from contacting the bottom surface 211A of the recess 211 or the bottom surface 231A of the recess 231 due to bending. The specific value of N1 is determined taking into consideration the distance between support members 212 so as to prevent vibrator 24 from contacting bottom surface 211A of recess 211 due to bending, and the specific value of N2 is determined taking into consideration the distance between support members 232 so as to prevent vibrator 24 from contacting bottom surface 231A of recess 231 due to bending. Note that N1 and N2 may be the same as each other or may be different from each other.

[0057] The space SP has a streamlined planar shape. That is, the space SP has a planar shape similar to that of the transducer 24. The space SP is arranged symmetrically with respect to the axis X1. For example, four protrusions PRJ1 to PRJ4 are arranged in the space SP. The protrusions PRJ1 to PRJ4 protrude toward the inside of the space SP. The transducer 24 is arranged in the space SP so as to be in contact with the four protrusions PRJ1 to PRJ4. By the transducer 24 being in contact with the four protrusions PRJ1 to PRJ4, even if the liquid to be tested is introduced into the space SP, the transducer 24 can be prevented from moving in a direction parallel to the bottom surfaces 211A and 231A (see FIG. 4).

[0058] Since the space SP has a streamlined planar shape, for example, when a liquid containing a detection target enters the space SP through the inlet 215 and the flow path 213, it spreads throughout the space SP, flows within the space SP, and reaches the outlet 216 through the flow path 214. Therefore, by making the planar shape of the space SP streamlined, it is possible to prevent the liquid containing the detection target from stagnating within the space SP. As a result, the detection target can be detected by the entire planar portion of the transducer 24.

[0059] 3, for example, the vibrator 24 is disposed so as to be in contact with the antenna 27. In this case, the distance between the vibrator 24 and the antenna 25 is, for example, 5 μm. When the antenna 26 of the detection element 3-1 is disposed so as to be in contact with the base, the vibrator 24 is disposed so as to be in contact with the antenna 25, and in this case, the distance between the vibrator 24 and the antenna 27 is 5 μm. Thus, in the detection element 3-1, the vibrator 24 is disposed so as to be in contact with the antenna 25 (or the antenna 27) or is disposed in the very vicinity of the antenna 27 (or the antenna 25).

[0060] By joining the substrates 21 to 23 to each other, flow paths 213, 214, an inlet 215 and an outlet 216 are formed.

[0061] One end of flow path 213 communicates with inlet 215, and the other end communicates with space SP. One end of flow path 214 communicates with outlet 216, and the other end communicates with space SP. Inlet 215 communicates with one end of flow path 213. Outlet 216 communicates with one end of flow path 214.

[0062] Each of the substrates 21 and 23 is made of, for example, glass. The substrate 22 is made of, for example, silicon (Si). The thickness of the transducer 24 is generally less than 10 μm, for example, 3 μm.

[0063] In the detection element 3-1, when an electromagnetic field EW is wirelessly fed by the transmitting antenna 12 of the transmitting / receiving device 1, the antennas 25, 26 (or antennas 27, 28) apply an electric field E based on the wirelessly fed electromagnetic field EW to the transducer 24.

[0064] The oscillator 24 vibrates when an electric field E is applied by the antennas 25 and 26 (or antennas 27 and 28). When the antennas 25 and 26 apply the electric field E to the oscillator 24, the antennas 27 and 28 receive a reception signal consisting of a vibration waveform when the oscillator 24 vibrates due to the electric field E. When the antennas 27 and 28 apply the electric field E to the oscillator 24, the antennas 25 and 26 receive a reception signal consisting of a vibration waveform when the oscillator 24 vibrates due to the electric field E. Therefore, in the detection element 3-1, the antennas 25 and 26 may apply the electric field E to the oscillator 24 and the antennas 27 and 28 may receive a reception signal consisting of a vibration waveform of the oscillator 24, or the antennas 27 and 28 may apply the electric field E to the oscillator 24 and the antennas 25 and 26 may receive a reception signal consisting of a vibration waveform of the oscillator 24.

[0065] When an electric field E is applied to transducer 24 by antennas 25, 26 (or antennas 27, 28) and a received signal consisting of the vibration waveform of transducer 24 is received by antennas 27, 28 (or antennas 25, 26), even if a liquid containing the object to be detected is introduced into space SP and the vibration of transducer 24 is weak, transducer 24 is positioned in contact with antenna 25 (or antenna 27) or in close proximity to antenna 27 (or antenna 25), so that the received signal consisting of the vibration waveform of transducer 24 can be reliably detected.

[0066] The thickness D1 of the substrate 21 is, for example, 250 μm, the thickness D2 of the substrate 22 is, for example, several μm to several tens of μm, and the thickness D3 of the substrate 23 is, for example, 250 μm.

[0067] The width of the space SP (the dimension in the left-right direction on the paper in FIG. 3) is, for example, 2 mm, and the height of the space SP (the dimension in the up-down direction on the paper in FIG. 3) is, for example, 50 μm. The length of the space SP in the direction perpendicular to the paper in FIG. 3 is, for example, 2.9 mm. The height of the support member 212 from the bottom surface 211A (the dimension in the up-down direction on the paper in FIG. 3) and the height of the support member 232 from the bottom surface 231A (the dimension in the up-down direction on the paper in FIG. 3) are, for example, 5 μm.

[0068] Each of the detection elements 3-2 to 3-M shown in FIG. 1 has the same structure as the detection element 3-1 described in FIG. 2 to FIG. 4, and in each of the detection elements 3-2 to 3-M, the application of the electric field E to the transducer 24 and the reception of the reception signal from the transducer 24 are the same as the application of the electric field E to the transducer 24 and the reception of the reception signal from the transducer 24 in the detection element 3-1 described in FIG. 2 to FIG. 4.

[0069] FIG. 5 is a diagram showing the shapes of the antennas 26 and 28 shown in FIG. 3. Referring to FIG. 5(a), each of the antennas 26 and 28 is a rod-shaped antenna. Referring to FIG. 5(b), each of the antennas 26 and 28 is a spiral-shaped antenna formed by winding a metal wire in a spiral shape. The spiral-shaped antenna has a spiral shape in a plane opposite to the plane (top or bottom) of the vibrator 24. Referring to FIG. 5(c), each of the antennas 26 and 28 is an antenna with a folding structure formed by folding a metal plate. Here, the direction in which the metal plate is folded is perpendicular to the plane (top or bottom) of the vibrator 24.

[0070] Thus, each of the antennas 26, 28 is either a rod-shaped antenna, a spiral-shaped antenna, or an antenna with a folded structure.

[0071] The antennas 26 and 28 may be formed of antennas having the same shape, or may be formed of antennas having different shapes.

[0072] 6 to 11 are first to sixth process diagrams showing a method for manufacturing the detection element 3-1 shown in FIGS. 2 to 4, respectively.

[0073] 6 and 7 show steps of a glass process, FIG. 8 shows a silicon on insulator (SOI) substrate process, FIGS. 9 and 10 show a quartz process, and FIG. 11 shows a package process.

[0074] 6, when the glass process is started, a glass substrate 300 manufactured by Schott Japan and having a model number GW4-009-A is prepared (step A-1). The glass substrate 300 includes a plurality of cylindrical metal members 301 at predetermined intervals. Each of the plurality of metal members 301 penetrates the glass substrate 300 in the thickness direction. Each of the plurality of metal members 301 is made of tungsten (W) and has a diameter of, for example, 80 μm to 100 μm. In the glass substrate 300, the metal members 301 and the glass are in close contact with each other, and no liquid or gas leaks between the metal members 301 and the glass.

[0075] When the glass substrate 300 is prepared, resist is applied to both sides of the glass substrate 300, and the resist on one of the applied sides is patterned by photolithography to produce a resist pattern 310 (step A-2). Alternatively, after forming a metal thin film on both sides, resist is applied to both sides, and the resist on one of the applied sides is patterned by photolithography to etch the metal thin film, thereby producing a metal mask pattern 310.

[0076] Then, using the resist pattern (or metal mask pattern) 310 as a mask, the glass substrate 300 is wet-etched with buffered hydrofluoric acid to a depth of, for example, 5 μm to produce the substrate 23 having the recess 231 and the support member 232 (step A-3). In this case, a part of the metal member 301 is exposed by the wet etching to become the support member 232.

[0077] It should be noted that the steps A-2 and A-3 also produce the portions constituting the flow paths 213 and 214, the portion constituting the inlet 215, and the portion constituting the outlet 216 shown in FIG.

[0078] Thereafter, chromium (Cr) and gold (Au) are sequentially deposited by sputtering on the surface of the substrate 23 opposite to the recess 231 to form a conductive thin film 302 (step A-4). In this case, the thickness of Cr is, for example, 30 to 40 nm, and the thickness of Au is, for example, 200 nm.

[0079] Subsequently, a resist is applied to the surface of the conductive thin film 302, and the applied resist is patterned by photolithography to produce a resist pattern 311 (step A-5).

[0080] Then, the conductive thin film 302 is etched using the resist pattern 311 as a mask to fabricate the antenna 28 (step A-6). In this case, the antenna 28 is fabricated in contact with the support member 232 made of a metal member (W). When the conductive thin film 302 is made of gold (Au), the etching of the conductive thin film 302 is performed using an iodine-based etching solution (e.g., a mixed solution of potassium iodide and iodine), and when the conductive thin film 302 is made of chromium (Cr), the etching is performed using a nitric acid-based etching solution (e.g., a mixed solution of ceric ammonium nitrate, nitric acid, etc.).

[0081] After step A-6, a resist is applied to the surface of the substrate 23 on the side of the recess 231, and the applied resist is patterned by photolithography to produce a resist pattern 312 (step A-7). In this case, the width w r The thickness of the resist pattern 312 is, for example, 4 μm.

[0082] 7, after step A-7, Cr and platinum (Pt) are sequentially deposited by sputtering on the entire surface of substrate 23 on the side of recess 231 using resist pattern 312 as a mask, to form conductive thin film 303 (step A-8). In this case, the thickness of Cr is, for example, 30 to 40 nm, and the thickness of Pt is, for example, 100 nm to 200 nm.

[0083] Then, the resist pattern 312 is removed, and the antenna 27 is formed in the recess 231 (step A-9). In this case, the conductive thin film 303 formed on the resist pattern 312 is removed by lift-off. The resist pattern 312 is, for example, a negative resist OMR-100 (Tokyo Ohka Kogyo Co., Ltd.), and a dedicated OMR developer is used for development after photolithography, and the resist is removed using a mixed solution of sulfuric acid and hydrogen peroxide in a ratio of 3:1. Thereafter, in order to remove burrs from the removed metal thin film, ultrasonic cleaning is performed while immersed in pure water.

[0084] Thereafter, the liquid supply / waste port 233 is formed in the substrate 23 by machining (step A-10). The liquid supply / waste port 233 has a cylindrical shape and a diameter of, for example, 1 mm. This completes the glass process.

[0085] By sequentially performing steps A-1 to A-10 of the glass process, a structure COMP1 is produced that includes the substrate 23 and the antennas 27 and 28 formed on the substrate 23. By sequentially performing steps A-1 to A-9 of the glass process, a structure COMP2 is produced that includes the substrate 21 and the antennas 25 and 26 formed on the substrate 21.

[0086] Next, the SOI substrate process will be described. With reference to FIG. 8, when the SOI substrate process starts, an SOI substrate 320 is prepared (step B-1). The SOI substrate 320 includes a support layer 321, an oxide film layer (BOX layer) 322, and an active layer 323. The support layer 321 and the active layer 323 are made of single crystal silicon, and the oxide film layer 322 is a silicon oxide film (SiO 2 The support layer 321 has a thickness of, for example, 300 μm, the oxide layer 322 has a thickness of, for example, 1 μm, and the active layer 323 has a thickness of, for example, 10 μm.

[0087] When the SOI substrate 320 is prepared, a resist is applied to the surface of the active layer 323 of the SOI substrate 320, and the applied resist is patterned by photolithography to produce a resist pattern 313 (step B-2).

[0088] Then, using the resist pattern 313 as a mask, a part of the active layer 323 is removed by dry etching (step B-3). In this case, a SF process called the Bosch process is used. 6 Etching by C 4 F 8 In this case, an etching method is used in which sidewall protection by a metal film is alternately repeated. Note that the portions constituting the flow channels 213 and 214, the portion constituting the inlet 215, and the portion constituting the outlet 216 are also formed by dry etching a portion of the active layer 323.

[0089] After step B-3, the substrate 21 of the above-described structure COMP2 and the active layer 323 of the SOI substrate 320 are anodically bonded to each other (step B-4). In this case, the anodically bonded structure is formed by applying a voltage of 600 V at a temperature of 350° C.

[0090] Then, S.F. 6 Gas and O 2 The support layer 321 (silicon) is etched by plasma etching using a mixed gas of SF gas (step B-5). In this case, the pressure during etching is 10 Pa, the power is 1 kW, and the stage temperature is 20° C. 6 Gas and O 2 The plasma etching apparatus using the mixed gas of gases can be RIE-10NR (manufactured by Samco Corporation). 4 The gas may be used to etch the support layer 121 (silicon).

[0091] After step B-5, CHF 3The oxide layer 322 is etched by plasma etching using gas (step B-6). In this case, the pressure during etching is 20 Pa, the power is 100 W, and the stage temperature is 20° C. An RIE-800iPC (manufactured by Samco Corporation) can be used as the plasma etching device. In addition, in order to prevent ions in the plasma from colliding with the metal thin film of the antenna 25 and scattering the metal when removing the oxide layer 322 by plasma etching, the oxide layer 322 may be removed by wet etching using buffered hydrofluoric acid.

[0092] The oxide film layer 322 is etched to produce a structure COMP3 in which the substrate 22 is bonded to the substrate 21. This completes the SOI substrate process.

[0093] Next, the crystal process will be described. Referring to Fig. 9, when the crystal process starts, an AT-cut crystal substrate 332 is bonded to a silicon substrate 330 with an adhesive 331 (step C-1). After that, the crystal substrate is polished by CMP (Chemical Mechanical Polishing) to adjust the thickness to the desired thickness.

[0094] Then, a resist is applied to the surface of the AT-cut quartz crystal substrate 332, and the applied resist is patterned by photolithography to produce a resist pattern 314 (step C-2).

[0095] Thereafter, using the resist pattern 314 as a mask, 3 The AT-cut quartz crystal substrate 332 is etched by plasma etching using gas to produce the oscillator 24 (step C-3). In this case, the pressure during etching is 20 Pa, the power is 100 W, and the stage temperature is 20° C. An RIE-800iPC (manufactured by Samco Corporation) can be used as the plasma etching device.

[0096] Next, O 2The surface of the adhesive 331 is irradiated with high-energy oxygen (oxygen radicals) by plasma using gas, and is bonded with the carbon that constitutes the adhesive 331, resulting in CO 2 The adhesive 331 that is not in contact with the transducer 24 is removed by ashing (step C-4). In this case, the ashing pressure is 10 Pa, the power is 1 kW, and the stage temperature is 20°C.

[0097] After step C-4, polyimide 333 is applied to the surface of transducer 24 in the air (step C-5).

[0098] Then, the oscillator 24 is bonded to the antenna 27 of the structure COMP1 produced by the above-mentioned glass process with polyimide 333 (=adhesive) (step C-6).

[0099] Referring to FIG. 10, after step C-6, the silicon substrate 330 is removed (step C-7) by the same method as in step B-5 of FIG.

[0100] Then, the adhesive 331 is removed by ashing in the same manner as in step C-4 (step C-8). This completes the crystal process. The structure produced by the crystal process is designated as COMP4.

[0101] Finally, the packaging process will be described. With reference to Fig. 11, when the packaging process is started, the substrate 22 of the structure COMP3 shown in Fig. 8 is bonded to the substrate 23 of the structure COMP4 shown in Fig. 10 by anodic bonding (step D-1). By this bonding, the vibrator 24 is placed in contact with the antenna 25 of the structure COMP3 with a weak force, or with a minute gap (several µm to several tens of µm) between the vibrator 24 and the antenna 25. The conditions for the anodic bonding are the same as those described above.

[0102] Then, the polyimide 333 (=adhesive) between the transducer 24 and the antenna 27 is removed using a remover with the product name TOS-02 manufactured by Toray Industries, Inc. (step D-2). In this case, the polyimide 333 (=adhesive) is removed using a solution of the remover with the product name TOS-02. The remover with the product name TOS-02 is a basic remover, and contains N-methyl-2-pyrrolidone (NMP), monoethanolamine (MEA), propylene glycol monomethyl ether (PGME), tetramethylammonium hydroxide (TMAH), and water.

[0103] The content of N-methyl-2-pyrrolidone (NMP) is, for example, 10 to 50% by weight, the content of monoethanolamine (MEA) is, for example, 10 to 50% by weight, the content of propylene glycol monomethyl ether (PGME) is, for example, 10 to 50% by weight, the content of tetramethylammonium hydroxide (TMAH) is, for example, 0.1 to 10% by weight, and the content of water is, for example, 0.5 to 30% by weight.

[0104] The polyimide 333 (=adhesive) may be removed not only with a basic solution but also with an acidic solution or an organic solution.

[0105] By removing the polyimide 333 (=adhesive), the vibrator 24 is placed in contact with the antenna 27 in the space SP and in close proximity to the antenna 25 (for example, the distance between the vibrator 24 and the antenna 25 is 5 μm). This completes the packaging process and completes the detection element 3-1.

[0106] According to the manufacturing method of the detection element 3-1 described above, in a glass process, one surface side of the glass substrate 300 including the metal member 301 penetrating in the thickness direction is partially etched to produce the substrate 21 having the recess 211 and the support member 212, and the substrate 23 having the recess 231 and the support member 232. Then, the antenna 25 is formed in the recess 211 of the substrate 21, and the antenna 26 is formed on the surface of the substrate 21 opposite to the recess 211. In addition, the antenna 27 is formed in the recess 231 of the substrate 23, and the antenna 28 is formed on the surface of the substrate 23 opposite to the recess 231.

[0107] The substrate 23 of the structure COMP4, in which the transducer 24 is bonded to the antenna 27 formed in the recess 231, is bonded to the substrate 22 of the structure COMP3 by anodic bonding, and packaged.

[0108] As a result, the transducer 24 is in contact with one of the antennas 25, 27 and is disposed in close proximity to the other of the antennas 25, 27.

[0109] Therefore, even if the vibration of the vibrator 24 is weak, the detection element 3-1 can be manufactured which can reliably receive the reception signal formed from the vibration signal of the vibrator 24.

[0110] Furthermore, according to the above-mentioned manufacturing method for the detection element 3-1, it is possible to realize a detection element 3-1 having a fundamental resonance frequency of 1 GHz or more (a thickness of the oscillator 24 of 1.7 μm or less). Therefore, when used as a biosensor, a theoretical sensitivity of about 80,000 times that of an existing quartz oscillator biosensor from Biolin Scientific can be realized.

[0111] Furthermore, according to the above-mentioned manufacturing method of the detection element 3-1, the vibrator 24 is bonded to the antenna 27 while being fixed to the silicon substrate 330 (see step C-6 in FIG. 9), and then, while being bonded to the antenna 27, the surface opposite to the bonding surface to the antenna 27 is exposed (see steps C-7 and C-8 in FIG. 10). Then, the vibrator 24 is packaged while being bonded to the antenna 27 (see steps D-1 and D-2 in FIG. 11).

[0112] Therefore, in the manufacturing process of the detection element 3-1, the vibrator 24 alone is not manipulated with tweezers or the like, so that even if the thickness of the vibrator 24 is thinner than 10 μm, the detection element 3-1 can be manufactured while preventing damage to the vibrator 24.

[0113] Each of the detection elements 3-2 to 3-M shown in FIG. 1 is also manufactured by the manufacturing method described with reference to FIGS. 6 to 11, and has the same effects as the detection element 3-1.

[0114] Fig. 12 is a timing chart of the input voltage Vin and the received signal R. Fig. 13 is a timing chart of the resonant frequency.

[0115] A method of detecting an object to be detected by the detection element 3-1 will be described with reference to Fig. 12 and Fig. 13. When detecting an object to be detected, the generating circuit of the transmission / reception device 1 generates an electromagnetic field EW consisting of an input voltage Vin having a frequency of 50 MHz or more, and outputs the generated electromagnetic field EW to the transmission antenna 12. The transmission antenna 12 of the transmission / reception device 1 receives the electromagnetic field EW from the generating circuit, and wirelessly feeds the received electromagnetic field EW to M detection elements 3-1 to 3-M. Note that the generating circuit of the transmission / reception device 1 may superimpose an input voltage Vin having a frequency of 50 MHz or more on a carrier wave of 1 GHz to generate an electromagnetic field EW_SUP, and the transmission antenna 12 may wirelessly feed the electromagnetic field EW_SUP to M detection elements 3-1 to 3-M.

[0116] In each of the M detection elements 3-1 to 3-M, the antennas 25, 26 receive the electromagnetic field EW wirelessly fed from the transmitting antenna 12 of the transmitting / receiving device 1, and apply an oscillating electric field E generated based on an input voltage Vin (input voltage having an oscillating waveform) of the received electromagnetic field EW to the oscillator 24 from timing t1 to timing t2. Then, in each of the M detection elements 3-1 to 3-M, the antennas 25, 26 stop applying the oscillating electric field E generated based on the input voltage Vin (input voltage having an oscillating waveform) to the oscillator 24 after timing t2.

[0117] When antennas 25 and 26 receive the electromagnetic wave EW_SUP, they extract the input voltage Vin from the electromagnetic wave EW_SUP, and apply the generated oscillating electric field E, which is based on the extracted input voltage Vin (input voltage consisting of an oscillating waveform), to the vibrator 24 from timing t1 to timing t2.

[0118] When the oscillating electric field E is applied to the vibrator 24, the vibrator 24 resonates due to the inverse piezoelectric effect, and a potential distribution is generated on its surface.

[0119] Then, the antenna 27 receives the potential distribution generated on the surface of the vibrator 24 as a received signal R consisting of an oscillating waveform. In this case, if the object to be detected is not attached to the vibrator 24, the antenna 27 receives the received signal R0 consisting of an oscillating waveform, and if the object to be detected is attached to the vibrator 24, the antenna 27 receives the received signal R1 consisting of an oscillating waveform. Then, the antenna 27 wirelessly transmits the received received signals R0 and R1 to the transceiver 1 via the support member 232 (support member 232 made of a conductor member) and the antenna 28.

[0120] The receiving circuit of the transceiver 1 receives the received signals R0 and R1 via the receiving antenna 13, and outputs the received received signals R0 and R1 to the detection circuit 2.

[0121] When the detection circuit 2 receives the received signal R0 from the receiving circuit of the transceiver 1, it detects the resonance frequency f0 of the received received signal R0. Also, when the detection circuit 2 receives the received signal R1 from the receiving circuit of the transceiver 1, it detects the resonance frequency f1 (<f0) of the received received signal R1. Then, the detection circuit 2 detects the change amount of the resonance frequency Δf = f0 - f1, and detects that the object to be detected has adhered to the vibrator 24.

[0122] Note that the oscillation and detection method shown in FIG. 12 is only an example. For example, by using a network analyzer to measure its transmission response (S12 and S21), reflection response (S11 and S22), the resonance frequency can be measured in the same way.

[0123] When a detection target adheres to the oscillator 24, the mass of the oscillator 24 increases, and the resonance frequency f1 of the oscillator 24 decreases compared to when no detection target adheres to the oscillator 24.

[0124] Therefore, after the input voltage Vin is applied to the antennas 25 and 26, the detection circuit 2 receives the reception signal R from the antennas 27 and 28, and when the object to be detected is not attached to the oscillator 24, it detects the resonance frequency f0 from the reception signal R, and when the object to be detected is attached to the oscillator 24, it detects the resonance frequency f which gradually changes to the resonance frequency f1 (see FIG. 13). Then, the detection circuit 2 detects the amount of change in the resonance frequency f, Δf=f0-f1, and detects that the object to be detected has attached to the oscillator 24.

[0125] If the resonant frequency of oscillator 24 is f, the mass of oscillator 24 is m, and the change in mass of oscillator 24 (=mass of the object to be detected) is Δm, the change Δf in the resonant frequency of oscillator 24 is expressed by the following equation.

[0126] Δf = f Δm / m (1) In this way, the change in resonance frequency Δf is proportional to the change in mass Δm of the oscillator 24, i.e., the mass of the object to be detected, and inversely proportional to the mass m of the oscillator 24. Therefore, the larger the mass of the object to be detected or the smaller the mass (=thickness) of the oscillator 24, the larger the change in resonance frequency f Δf becomes, making it easier to detect adhesion of the object to be detected to the oscillator 24. In addition, the change in resonance frequency Δf is also brought about by changes in the shape of the oscillator 24 due to temperature, pressure, stress, etc., so that by detecting the change in resonance frequency Δf, it is possible to detect temperature, pressure, stress, etc. as the object to be detected.

[0127] In detection elements 3-1 to 3-M, the liquid to be tested is introduced into space portion SP via inlet 215 and flow path 213, and the liquid to be tested is discharged from space portion SP via flow path 214 and outlet 216, i.e., the liquid to be tested is circulated, and detection of the substance to be detected is performed by the method described above.

[0128] In this case, as described above, the vibrator 24 only contacts the antenna 25 on the support member 212 or the antenna 27 on the support member 232, and therefore vibrates freely when the electric field E based on the electromagnetic field EW is applied by the antennas 25, 26. Therefore, the stable vibration of the vibrator 24 can be ensured to detect the detection target.

[0129] In addition, when an electrodeless transducer is used, the resonance frequency of the transducer changes depending on the electrical and magnetic properties of the specimen (test solution or test gas) on the transducer surface. This is because the electrical and magnetic boundary conditions of the vibration change. Using this principle, it is also possible to detect target proteins or organic gases.

[0130] As described above, in the detection elements 3-1 to 3-M, the electric field E based on the electromagnetic field EW is applied to the vibrator 24 by either one of the antennas 25, 26 and the antennas 27, 28, and the reception signal consisting of the vibration signal of the vibrator 24 is received by the other of the antennas 5, 26 and the antennas 27, 28, so that there is no restriction due to the thickness of the vibrator 24, and therefore highly efficient wireless driving can be performed. More specifically, the distance between the antennas 25, 27 and the vibrator 24 can be dramatically reduced, so that the excitation of the vibrator 24 and signal reception can be effectively performed. In addition, the electromagnetic wave output applied for excitation can be reduced, and even if the electric field generated by the vibrator 24 is weak, the detection target can be easily detected.

[0131] Furthermore, by making the planar shape of the space SP and the transducer 24 streamlined, the target gas or target solution flows uniformly onto the surface of the transducer 24, allowing the entire surface of the transducer 24 to be used as an inspection area, thereby improving the sensitivity of the detection elements 3-1 to 3-M.

[0132] Furthermore, existing quartz crystal sensors use an oscillation circuit to excite the quartz crystal, so high and low potentials are applied simultaneously to each electrode on the surface of the quartz crystal. In electrolytes and other solutions, leakage current occurs between the electrodes, making it impossible to excite the quartz crystal. As a result, only one side of the crystal can be used as the detection surface (only one side is used in contact with the solution).

[0133] On the other hand, in the detection elements 3-1 to 3-M according to the first embodiment, the electric field E is applied to the oscillator 24 by either one of the antennas 25, 26 and the antennas 27, 28 to excite the oscillator 24, so there is no need to consider the leakage current to the other of the antennas 25, 26 and the antennas 27, 28. The reason is as follows. In the detection elements 3-1 to 3-M, (1) the electric field E is applied to the oscillator 24 from either one of the antennas 25, 26 and the antennas 27, 28, (2) the oscillator is vibrated via the inverse piezoelectric effect, (3) an electric field is generated on the surface of the vibrating oscillator 24 by the piezoelectric effect, and (4) the generated electric field is detected by the other of the antennas 25, 26 and the antennas 27, 28. This is because the driving process is separated in time series, and it is not necessary to simultaneously energize both the antennas 25, 26 and the antennas 27, 28. As a result, the entire oscillator 24 can be immersed in the solution, and both sides of the oscillator 24 can be used as detection surfaces.

[0134] Fig. 14 is a diagram showing an example of a detection target, and with reference to Fig. 14, each of detection elements 3-1 to 3-M can be used as, for example, a biosensor, a temperature sensor, a force (stress) sensor, and a gas sensor.

[0135] When each of the detection elements 3-1 to 3-M is a biosensor, when a target substance adheres to the oscillator 24, the mass load increases, and the resonance frequency of the oscillator 24 decreases as shown in Fig. 13. The target substance is, for example, a biological substance such as a protein. Therefore, each of the detection elements 3-1 to 3-M can be used as a biosensor.

[0136] Furthermore, when each of detection elements 3-1 to 3-M is a temperature sensor, the elastic constant of oscillator 24 changes with temperature change, and the resonant frequency of oscillator 24 decreases as shown in Fig. 13. Therefore, each of detection elements 3-1 to 3-M can be used as a temperature sensor.

[0137] Furthermore, when each of the detection elements 3-1 to 3-M is a force (stress) sensor, when an external force is applied to the oscillator 24, the shape of the oscillator 24 changes, and the resonant frequency of the oscillator 24 decreases as shown in Fig. 13. Therefore, each of the detection elements 3-1 to 3-M can be used as a force (stress) sensor.

[0138] Furthermore, when each of the detection elements 3-1 to 3-M is a gas sensor, a sensitive film that is sensitive to a specific gas is provided on the surface of the oscillator 24. 2 ) gas, the sensitive film is, for example, palladium (Pd). Also, when the specific gas is hydrogen (H 2 13. In the case of a gas other than the target gas, the sensitive film is a porous film. Since various gases are adsorbed to the porous film, the porous film can be used as the sensitive film. When the target gas adheres to the sensitive film, the mass of the oscillator 24 increases and the shape of the oscillator 24 changes, so that the resonance frequency of the oscillator 24 decreases as shown in FIG. 13. Therefore, each of the detection elements 3-1 to 3-M can be used as a gas sensor.

[0139] When manufacturing a detection element having a sensitive film, a step of forming a sensitive film on the exposed surface of the vibrator 24 is added between steps (C-4) and (C-5) in Fig. 9, so that a detection element that functions as a gas sensor can be manufactured by the manufacturing method shown in Fig. 6 to Fig. 11. In this case, polyimide 333 is applied to the surface of the sensitive film in step (C-5).

[0140] When each of the detection elements 3-1 to 3-M is used as a biosensor, a force (stress) sensor, and a gas sensor, the oscillator 24 is made of quartz. This is because quartz has good temperature stability and can detect the detection target by eliminating the effects of temperature changes.

[0141] When each of the detection elements 3-1 to 3-M is used as a temperature sensor, the oscillator 24 is made of lithium niobate (LiNbO 3 )

[0142] When each of the detection elements 3-1 to 3-M is a force (stress) sensor, each of the detection elements 3-1 to 3-M is fabricated by sealing the oscillator 24 in a vacuum or a nitrogen atmosphere (generally in an inert gas). The oscillator 24 has a size such that both ends in the in-plane direction of the oscillator 24 (both ends of the oscillator 24 in the left-right direction on the paper surface of FIG. 3) contact the substrate 22. By bringing both ends in the in-plane direction of the oscillator 24 into contact with the side walls of the space SP (substrate 22), the oscillator 24 receives a force (stress) at both ends in the in-plane direction of the oscillator 24 and changes its shape, so that the force (stress) can be detected.

[0143] Furthermore, when each of the detection elements 3-1 to 3-M is a gas sensor, each of the detection elements 3-1 to 3-M is fabricated by sealing the oscillator 24 in a vacuum or nitrogen atmosphere.

[0144] In this way, since the detection element 3-1 can be used as a biosensor, a temperature sensor, a force (stress) sensor, and a gas sensor, when M=4 in the detection device 10 (i.e., when the number of detection elements is four), for example, the detection element 3-1 can be used as a biosensor, the detection element 3-2 can be used as a force (stress) sensor, the detection element 3-3 can be used as a temperature sensor, and the detection element 3-4 can be used as a gas sensor.

[0145] In this case, since the detection elements 3-1 to 3-4 detect different detection objects, the four vibrators 24 of the detection elements 3-1 to 3-4 have mutually different resonant frequencies. For example, since the resonant frequency of the vibrator 24 can be changed by changing the thickness of the vibrator 24, the four vibrators 24 of the detection elements 3-1 to 3-4 have mutually different thicknesses.

[0146] The transmitting / receiving device 1 wirelessly feeds the electromagnetic field EW to the four detection elements 3-1 to 3-4 by the transmitting antenna 12, and receives reception signals R0_1, R0_2, R0_3, R0_4; R1_1, R1_2, R1_3, R1_4 from the four detection elements 3-1 to 3-4 by the receiving antenna 13. Here, the four oscillators 24 of the detection elements 3-1 to 3-4 vibrate at mutually different resonant frequencies, so that the reception signals R0_1, R0_2, R0_3, R0_4 and the reception signals R1_1, R1_2, R1_3, R1_4 are composed of vibration waveforms that vibrate at mutually different resonant frequencies.

[0147] Therefore, the detection circuit 2 detects a change in the resonant frequency of the oscillator 24 of the detection element 3-1 based on the reception signals R0_1, R1_1 to detect biological substances, detects a change in the resonant frequency of the oscillator 24 of the detection element 3-2 based on the reception signals R02, R1_2 to detect force (stress), detects a change in the resonant frequency of the oscillator 24 of the detection element 3-3 based on the reception signals R0_3, R1_3 to detect temperature, and detects a change in the resonant frequency of the oscillator 24 of the detection element 3-4 based on the reception signals R0_4, R1_4 to detect gas.

[0148] This allows the detection device 10 to detect different detection targets simultaneously.

[0149] Fig. 15 is a schematic diagram of a detection element for detecting pressure. Referring to Fig. 15, detection element 3-1A is obtained by adding a needle member 30 to detection element 3-1 shown in Fig. 3, and is otherwise the same as detection element 3-1.

[0150] The needle member 30 penetrates the substrate 21 and the antenna 25 in the thickness direction, and is positioned so that the distance between the tip of the needle member 30 and the vibrator 24 is smaller than the distance (= 5 μm) between the antenna 25 (the antenna 25 covering the tip on the bottom surface 231A side of the support member 212) and the vibrator 24.

[0151] The needle member 30 is composed of a metal member 301 that penetrates the glass substrate 100 in the thickness direction when a structure COMP2 including a substrate 21 and antennas 25, 26 formed on the substrate 21 is manufactured using the glass process shown in Figures 6 and 7.

[0152] The metal member 301 constituting the needle member 30 is longer than the metal member 301 that will constitute the support member 212, and at the stage of step (A-1) of preparing the glass substrate 300, its tip protrudes from the upper surface of the glass substrate 300 (the upper surface of the glass substrate 300 shown in step (A-1) of Figure 6).

[0153] Therefore, the detection element 3-1A is manufactured according to the manufacturing method described with reference to FIGS.

[0154] In detection element 3-1A arranged with substrate 23 side in contact with the base, when pressure is applied to the upper surface of substrate 21 (the surface opposite bottom surface 211A of recess 211), needle member 30 moves toward bottom surface 231A of recess 231 and pushes vibrator 24 toward bottom surface 231A of recess 231. As a result, vibrator 24 bends so as to protrude toward bottom surface 231A of recess 231, so that the shape of vibrator 24 changes and the resonant frequency of vibrator 24 decreases as shown in FIG.

[0155] Therefore, the pressure can be detected by detecting the amount of change Δf in the resonance frequency of the vibrator 24.

[0156] When detecting pressure, each of the detection elements 3-1 to 3-M is made up of the detection element 3-1A shown in FIG.

[0157] FIG. 16 is a diagram showing the relationship between the amplitude and frequency of a received signal. In FIG. 16, the vertical axis represents the amplitude of the received signal, and the horizontal axis represents the frequency. Curves k1 to k6 respectively show the relationship between the amplitude and frequency of the received signal when the distance between the transmitting / receiving device 1 and the detecting element 3-1 is 1.5 m, 3 m, 5 m, 7 m, 10 m, and 20 m. Furthermore, the size of the detecting element 3-1 is 6×6×0.5 mm. 3(6 mm square, 0.5 mm thick) Furthermore, the transmitting / receiving device 1 wirelessly fed an electromagnetic field EW consisting of an input voltage Vin of 116 MHz with a transmission power of 50 W to the detecting element 3-1.

[0158] Referring to FIG. 16, when the distance between the transceiver 1 and the detection element 3-1 is in the range of 1.5 m to 20 m, the transceiver 1 wirelessly feeds an electromagnetic field EW consisting of an input voltage Vin to the detection element 3-1, receives a reception signal R from the detection element 3-1, and is able to detect the resonant frequency (the frequency at which the amplitude is maximum in curves k1 to k6).

[0159] Although not shown in Figure 16, it has been confirmed that the transceiver 1 can wirelessly supply an electromagnetic field EW consisting of the input voltage Vin to the detection element 3-1, receive a reception signal R from the detection element 3-1, and detect the resonant frequency even when the distance between the transceiver 1 and the detection element 3-1 is 6m, 8m, 9m, 11m, 12m, 13m, 14m, 15m, 16m, 17m, or 18m.

[0160] 16, the inventors discovered that the oscillator 24 included in the detection element 3-1 can be oscillated by the transmitting antenna 12 even if the detection element 3-1 does not have a supply source of the electromagnetic field EW consisting of the input voltage Vin. Then, it was possible to measure the resonant frequency of the oscillator 24 remotely. That is, it was possible to oscillate the oscillator 24 remotely using the electric field component of the electromagnetic field EW even if an oscillating electric field was not supplied to the oscillator 24 by an electrode provided in the detection element 3-1.

[0161] In this way, in the detection device 10, even if a source of the electromagnetic field EW is not provided in the detection element 3-1, the transmitter / receiver 1 can oscillate the oscillator 24 of the detection element 3-1 and measure the resonant frequency of the oscillator 24, so that the signal of the detection element 3-1 (oscillator 24) can be received semi-permanently and remotely.

[0162] Therefore, the detection element 3-1 can be used in the following application examples.

[0163] [Application example] Fig. 17 is a diagram showing an application example of the detection device 10 shown in Fig. 1. Referring to Fig. 17(a), the detection element 3-1 is installed inside a nuclear power plant, and the transmission / reception device 1 and the detection circuit 2 are installed outside the nuclear power plant.

[0164] The transceiver 1 wirelessly feeds the electromagnetic field EW to the detection element 3-1 via the transmitting antenna 12, and receives a reception signal from the detection element 3-1 via the receiving antenna 13. The detection circuit 2 receives the reception signal from the transceiver 1, detects the amount of change in the resonant frequency based on the received reception signal, and detects gas, etc., in the nuclear power plant.

[0165] The installation location of the detection element 3-1 is not limited to inside a nuclear power plant, but is generally a place where people cannot enter.

[0166] Referring to FIG. 17(b), the detection element 3-1 has dimensions of 6×6×0.5 mm as described above. 3 Because of its small size (6 mm square, 0.5 mm thick), the detection element 3-1 can be embedded inside an animal.

[0167] The transceiver 1 wirelessly feeds the electromagnetic field EW to the detection element 3-1 via the transmitting antenna 12, and receives a reception signal from the detection element 3-1 via the receiving antenna 13. The detection circuit 2 receives the reception signal from the transceiver 1, and detects the amount of change in the resonant frequency based on the received reception signal to detect the temperature at the local part of the animal.

[0168] The detection element 3-1 can also be embedded in the human body, and the temperature at a local part of the human body can be detected by the above-mentioned method. The temperature at a local part of the living body is the most important biological information, and for example, the state of local temperature changes in the trachea or lungs accompanying breathing is important in elucidating the mechanism of asthma onset. Therefore, measuring local temperature changes in the living body using the detection device 10 can contribute to elucidating the mechanism of asthma onset.

[0169] Referring to FIG. 17(c), the detection element 3-1 is embedded in concrete on a highway, a building, etc., and the transmission / reception device 1 and the detection circuit 2 are mounted on a truck. Then, when the truck arrives near the installation location of the detection element 3-1, the transmission / reception device 1 wirelessly feeds the electromagnetic field EW to the detection element 3-1 via the transmission antenna 12, and receives a reception signal from the detection element 3-1 via the reception antenna 13. The detection circuit 2 receives the reception signal from the transmission / reception device 1, detects the amount of change in the resonant frequency based on the received reception signal, and semi-permanently detects the temperature or force inside the concrete. By detecting the temperature or force inside the concrete semi-permanently, the deterioration state of the concrete can be detected, and accidents can be prevented by repairing the deteriorated parts of the concrete.

[0170] The detection device 10 has a feature that the resonant frequency of the oscillator 24 of the detection element 3-1 can be measured remotely, which can broaden the application fields of the detection device 10. As a result, the detection device 10 is a product that is expected to contribute to building a safe, secure, and healthy society in a wide range of application fields.

[0171] Fig. 18 is a flowchart for explaining the operation of the detection device 10 shown in Fig. 1. Note that Fig. 18 is based on the premise that M detection elements 3-1 to 3-M are arranged within the reach of the electromagnetic wave EW transmitted by the transmission antenna 12 of the transmission / reception device 1, and that M resonant frequencies of M transducers 24 in the M detection elements 3-1 to 3-M are different from one another.

[0172] 18, when the operation of the detection device 10 is started, the main body 11 of the transmission / reception device 1 determines that the timing t is the timing T SP It is determined whether or not this is the case (step S1).

[0173] In step S1, the timing t corresponds to the timing T SPIf it is determined that the electromagnetic field EW is equal to or greater than the predetermined threshold, the generating circuit of the transmitting / receiving device 1 generates an electromagnetic field EW, and the transmitting antenna 12 wirelessly feeds the electromagnetic field EW generated by the generating circuit to the M detecting elements 3-1 to 3-M (step S2).

[0174] Each of the M detector elements 3-1 to 3-M wirelessly receives the electromagnetic field EW from the transmitting antenna 12 (step S3).

[0175] Then, in each of the M detection elements 3-1 to 3-M, an oscillating electric field E based on the electromagnetic field EW is applied to the oscillator 24 by the antennas 25 and 26 (or the antennas 27 and 28) (step S4).

[0176] Thereafter, in each of the M detection elements 3-1 to 3-M, the antennas 27, 28 (or antennas 25, 26) receive a reception signal R0(t) consisting of the vibration waveform of the transducer 24 from the transducer 24 (step S5), and then receive a reception signal R1(t) consisting of the vibration waveform of the transducer 24 from the transducer 24 (step S6). Here, the reception signal R0(t) is a reception signal when the transducer 24 vibrates due to only the vibration electric field E, and the reception signal R1(t) is a reception signal when the transducer 24 vibrates under the influence of the object to be detected. The reception signals R0(t) and R1(t) are functions of time t.

[0177] Then, in each of the M detector elements 3-1 to 3-M, the antennas 27 and 28 (or the antennas 25 and 26) wirelessly transmit the reception signals R0(t) and R1(t) (step S7).

[0178] Then, the receiving antenna 13 of the transceiver 1 wirelessly receives the received signal R0_SPM_D(t) on which M received signals R0_1(t) to R0_M(t) are superimposed, and the received signal R1_SPM_D(t) on which M received signals R1_1(t) to R1_M(t) are superimposed (step S8), and outputs the received signals R0_SPM_D(t) and R1_SPM_D(t) to the receiving circuit of the transceiver 1. Upon receiving the received signals R0_SPM_D(t) and R1_SPM_D(t), the receiving circuit of the transceiver 1 outputs the received received signals R0_SPM_D(t) and R1_SPM_D(t) to the detection circuit 2.

[0179] Upon receiving the received signals R0_SPM_D(t) and R1_SPM_D(t), the detection circuit 2 performs a Fourier transform on the received signal R0_SPM_D(t) at one time to obtain M frequency components R0_1(f) to R0_M(f) (step S9), and then performs a Fourier transform on the received signal R1_SPM_D(t) at k (k is an integer equal to or greater than 3) time intervals t 1 ~t k Then, a Fourier transform is performed to obtain k sets of frequency components {R1_1(f) to R1_M(f)}_1 to {R1_1(f) to R1_M(f)}_k (step S10).

[0180] Here, R1_1(f)_1 to R1_1(f)_k are k time periods t 1 ~t k R1_2(f)_1 to R1_2(f)_k represent the frequency components of the received signal R1(t) from the detection element 3-1 at k times t 1 ~t k Similarly, R1_M(f)_1 to R1_M(f)_k represent the frequency components of the received signal R1(t) from the detection element 3-2 at k times t 1 ~t k 4 represents the frequency components of the received signal R1(t) from the detection element 3-M at

[0181] After step S10, the detection circuit 2 sets i=1 (step S11). Then, the detection circuit 2 detects the resonant frequency f0_i based on the frequency component R0_i(f) (step S12), and detects the resonant frequencies f1_i_1 to f1_i_k based on the frequency components R1_i(f)_1 to R1_i(f)_k (step S13).

[0182] Then, the detection circuit 2 detects that the detection target Dm_i has been detected by the detection element 3-i by detecting that the amount of change Δf_i in the resonance frequency decreases with respect to time t based on the resonance frequencies f0_i, f1_i_1 to f1_i_k (step S14). In this case, the detection circuit 2 calculates Δf_i_1=f0_i-f1_i_1, Δf_i_2=f0_i-f1_i_2, . . . , Δf_i_k=f0_i-f1_i_k, and calculates the change amount Δf_i in the resonance frequency Δf_i over time t. 1 ~t k A regression function RGF is calculated by the least squares method using the explanatory variables and the k amounts of change Δf_i_1 to Δf_i_k as objective variables. Then, when the amount of change Δf_i (objective function) of the calculated regression function RGF gradually decreases with time (explanatory variable) as shown in Fig. 13, the detection circuit 2 detects that the detection object Dm_i has been detected by the detection element 3-i.

[0183] After step S14, the detection circuit 2 determines whether i=M (step S15).

[0184] When it is determined in step S15 that i is not equal to M, the detection circuit 2 sets i to i+1 (step S16). After that, the series of operations proceeds to step S12, and steps S12 to S16 are repeatedly executed until it is determined in step S15 that i is equal to M.

[0185] Then, in step S15, if it is determined that i=M, the series of operations ends.

[0186] Fig. 19 is a conceptual diagram showing the received signals R0_SPM_D(t) and R1_SPM_D(t). Fig. 20 is a conceptual diagram showing frequency components when the received signals R0_SPM_D(t) and R1_SPM_D(t) are Fourier transformed. In Fig. 20, k time t 1 ~t k Let k=4.

[0187] Referring to Figure 19, the received signal R0_SPM_D(t) consists of a vibration waveform in which received signals R0_1(t) to R0_M(t) from M transducers 24 in M ​​detection elements 3-1 to 3-M are superimposed when the M transducers 24 are vibrating only by the vibration electric field E with respect to time t.

[0188] Furthermore, the received signal R1_SPM_D(t) consists of a vibration waveform in which received signals R1_1(t) to R1_M(t) from M transducers 24 in the M detection elements 3-1 to 3-M are superimposed when the M transducers 24 are vibrating due to the influence of the object to be detected with respect to time t.

[0189] And one time t 0 In this case, when the received signal R0_SPM_D(t) is Fourier transformed, M frequency components R0_1(f), R0_2(f), . . . , R0_M(f) shown in FIG. 20 are obtained.

[0190] In R0_1(f), R0_2(f), ..., R0_M(f), "R0" represents the received signal when the transducer 24 is affected only by the oscillating electric field E, "1", "2", ..., "M" are arguments representing the detection elements 3-1 to 3-M, respectively, and "f" represents the frequency.

[0191] Also, k times t 1 ~t kWhen the received signal R1_SPM_D(t) is Fourier transformed, k (=4) frequency components R1_1(f)_1, R1_1(f)_2, ···, R1_1(f)_k; R1_2(f)_1, R1_2(f)_2, ···, R1_2(f)_k; ···; R1_M(f)_1, R1_M(f)_2, ···, R1_M(f)_k, as shown in Figure 20, are obtained.

[0192] In R1_1(f)_1, R1_1(f)_2, . . . , R1_1(f)_k, “R1” represents a received signal when the transducer 24 vibrates due to the influence of the object to be detected, “1” represents the detection element 3-1, and “1”, “2”, . . . , “k” represent the time to be Fourier transformed (k times t 1 ~t k ) is an argument.

[0193] The same is true for R1_2(f)_1,R1_2(f)_2,···,R1_2(f)_k;···;R1_M(f)_1,R1_M(f)_2,···,R1_M(f)_k.

[0194] Then, based on the frequency component R0_1(f), the frequency when the amplitude of the frequency component R0_1(f) is maximum is detected as the resonant frequency f0_1 of the first detection element 3-1, and based on the frequency component R0_2(f), the frequency when the amplitude of the frequency component R0_2(f) is maximum is detected as the resonant frequency f0_2 of the second detection element 3-2, and similarly, based on the frequency component R0_M(f), the frequency when the amplitude of the frequency component R0_M(f) is maximum is detected as the resonant frequency f0_M of the Mth detection element 3-M (see Figure 20).

[0195] In addition, based on the frequency component R1_1(f)_1, the frequency at which the amplitude of the frequency component R1_1(f)_1 becomes maximum is determined as the time t 1 The frequency at which the amplitude of the frequency component R1_1(f)_2 becomes maximum is detected as the resonant frequency f1_1_1 at time t 2In the same manner, the frequency at which the amplitude of the frequency component R1_1(f)_k becomes maximum is detected as the resonant frequency f1_1_2 at time t k The resonant frequency f1_1_k at the resonance frequency f1_1 is detected as the resonant frequency f1_1_k at the resonance frequency f1_1_k (see FIG. 20).

[0196] Furthermore, based on the frequency component R1_2(f)_1, the frequency at which the amplitude of the frequency component R1_2(f)_1 becomes maximum is determined as the time t 1 The frequency at which the amplitude of the frequency component R1_2(f)_2 becomes maximum is detected as the resonant frequency f1_2_1 at the time t 2 In the same manner, the frequency at which the amplitude of the frequency component R1_2(f)_k becomes maximum is detected as the resonant frequency f1_2_2 at time t k The resonant frequency f1_2_k at the resonance frequency f1_2 is detected as f1_2_k (see FIG. 20).

[0197] Similarly, based on the frequency component R1_M(f)_1, the frequency at which the amplitude of the frequency component R1_M(f)_1 becomes maximum is determined as the time t 1 The frequency at which the amplitude of the frequency component R1_M(f)_2 becomes maximum is detected as the resonant frequency f1_M_1 at the time t 2 In the same manner, the frequency at which the amplitude of the frequency component R1_M(f)_k becomes maximum is detected as the resonant frequency f1_M_2 at time t k The resonant frequency f1_M_k at this point is detected as f1_M_k (see FIG. 20).

[0198] Then, the detection circuit 2 determines, based on the resonant frequencies f0_1, f1_1_1 to f1_1_k, the regression function RGF_1 indicating the time dependence of the amount of change in resonant frequency Δf_1 in the first detection element 3-1 by the method described above, and determines, based on the resonant frequencies f0_2, f1_2_1 to f1_2_k, the regression function RGF_2 indicating the time dependence of the amount of change in resonant frequency Δf_2 in the second detection element 3-2 by the method described above, and similarly determines the regression function RGF_M indicating the time dependence of the amount of change in resonant frequency Δf_M in the Mth detection element 3-M based on the resonant frequencies f0_M, f1_M_1 to f1_M_k.

[0199] Then, when the change Δf_1 (objective function) of the regression function RGF_1 gradually decreases with time (explanatory variable) as shown in FIG. 13, the detection circuit 2 detects that the object to be detected Dm_1 has been detected in the detection element 3-1, and when the change Δf_2 (objective function) of the regression function RGF_2 gradually decreases with time (explanatory variable) as shown in FIG. 13, the detection circuit 2 detects that the object to be detected Dm_2 has been detected in the detection element 3-2, and similarly, when the change Δf_M (objective function) of the regression function RGF_M gradually decreases with time (explanatory variable) as shown in FIG. 13, the detection circuit 2 detects that the object to be detected Dm_M has been detected in the detection element 3-M (see step S14 in FIG. 18).

[0200] In step S1 of the flowchart shown in FIG. 18, the timing t corresponds to the timing T SP The reason for determining whether or not the above is true is as follows.

[0201] In the detection device 10, the transmitting / receiving device 1 remotely and wirelessly feeds the electromagnetic field EW to the M detection elements 3-1 to 3-M, measures the resonance frequencies of the M oscillators 24 in the M detection elements 3-1 to 3-M, and semi-permanently detects the detection target in the M detection elements 3-1 to 3-M. The M detection elements 3-1 to 3-M do not have a source for supplying the electromagnetic field EW, and the M detection elements 3-1 to 3-M operate when the transmitting / receiving device 1 wirelessly feeds the electromagnetic field EW to the M detection elements 3-1 to 3-M. As a result, the transmitting / receiving device 1 does not need to always wirelessly feed the electromagnetic field EW to the M detection elements 3-1 to 3-M, and only needs to detect the detection target at the timing T SP This is because when this occurs, the electromagnetic field EW can be wirelessly fed to the M detection elements 3-1 to 3-M.

[0202] In step S8, the received signal R0_1(t) represents the received signal R0 in the detection element 3-1 (the received signal when the transducer 24 is vibrating due to only the vibration electric field E), and the received signal R1_1(t) represents the received signal R1 in the detection element 3-1 (the received signal when the transducer 24 is vibrating due to the influence of the object to be detected). The same is true for the received signals R0_2(t), R1_2(t) to R0_M(t), R1_M(t).

[0203] Since it is assumed that the M detection elements 3-1 to 3-M respectively transmit received signals R0_1(t), R1_1 to R0_M(t), and R1_M(t) almost simultaneously via antennas 27, 28 (or antennas 25, 26), in step S8, the receiving antenna 13 of the transmission / reception device 1 wirelessly sequentially receives a received signal R0_SPM_D(t) on which M received signals R0_1(t) to R0_M(t) are superimposed, and a received signal R1_SPM_D(t) on which M received signals R1_1(t) to R1_M(t) are superimposed.

[0204] Furthermore, if M=1, the detection circuit 2 detects the received signal R1_SPM_D(t) at k time intervals t 1 ~t kWhen the Fourier transform is performed in, k sets of frequency components {R1_1(f) to R1_M(f)}_1 to {R1_1(f) to R1_M(f)}_k are obtained. As a result, steps S12 to S14 are executed only once.

[0205] Furthermore, if the M detection elements 3-1 to 3-M consist of, for example, four detection elements 3-1 to 3-4, the detection device 10 can execute the flowchart shown in FIG. 18 so that the four detection elements 3-1 to 3-4 function as the biosensor, force (stress) sensor, temperature sensor and gas sensor described in FIG. 14, respectively, and can simultaneously detect biological substances, force (stress), temperature and gas as detection targets.

[0206] Furthermore, the detection circuit 2 has a built-in correspondence table indicating the correspondence between the identification information ID of the detection elements 3-1 to 3-M and the resonance frequencies of the oscillators 24 in the detection elements 3-1 to 3-M.

[0207] Table 1 shows a correspondence table indicating the correspondence between the identification information ID of the detection elements 3-1 to 3-M and the resonance frequencies of the oscillators 24 in the detection elements 3-1 to 3-M.

[0208] [Table 1]

[0209] In Table 1, ID_1 to ID_M respectively represent the identification information of detection elements 3-1 to 3-M, and f1_1 to f1_M respectively represent the resonant frequency of oscillator 24 in detection elements 3-1 to 3-M (the resonant frequency when oscillator 24 is vibrating due to the influence of the object to be detected).

[0210] The resonance frequencies f1_1 to f1_M correspond to the identification information ID_1 to ID_M of the detection elements 3-1 to 3-M, respectively.

[0211] 18, when the detection circuit 2 detects that the detection object Dm_i has been detected, the detection circuit 2 refers to the correspondence table shown in Table 1, detects the resonance frequency f1 (any of f1_1 to f1_M) that matches the resonance frequency f1_i_1 to f1_i_k detected in step S13, detects the identification information ID (any of ID_1 to ID_M) of the detection element associated with the detected resonance frequency f1 (any of f1_1 to f1_M), and identifies the detection element (any of the detection elements 3-1 to 3-M) that detected the detection object Dm_i. The detection circuit 2 also identifies the detection object Dm_i (any of temperature, gas, etc.) based on the resonance frequency f1 (any of f1_1 to f1_M).

[0212] As a result, by arranging M detection elements 3-1 to 3-M within a predetermined area, it is possible to specify a range within the predetermined area in which at least one detection target is detected.

[0213] In addition, by repeatedly identifying the range in which at least one detection target is detected within a specified area at a specified time interval, it is possible to detect whether the range in which at least one detection target is detected within the specified area has changed.

[0214] 21 is a schematic diagram of another detection device according to embodiment 1. The detection device according to embodiment 1 may be a detection device 10A shown in FIG.

[0215] 21, a detection device 10A is the same as detection device 10 shown in FIG. 1 except that transmitting antenna 12 and receiving antenna 13 of detection device 10 shown in FIG. 1 are replaced with an antenna 17.

[0216] In the detection device 10A, the antenna 17 wirelessly feeds the electromagnetic field EW generated by the generating circuit to the M detection elements 3-1 to 3-M for a certain period of time, and when the certain period has elapsed, stops wirelessly feeding the electromagnetic field EW to the M detection elements 3-1 to 3-M. After that, the antenna 17 receives reception signals R from the M detection elements 3-1 to 3-M, and outputs the received reception signals R to the receiving circuit.

[0217] In this way, antenna 17 is a single antenna that serves the functions of both transmitting antenna 12 and receiving antenna 13 .

[0218] The operation of the detection device 10A is performed according to the flowchart shown in FIG. 18 in which step S2 is changed to "a step of generating an electromagnetic field EW and wirelessly feeding the generated electromagnetic field EW to M detection elements 3-1 to 3-M for a certain period of time by antenna 17" and step S8 is changed to "a step of antenna 17 wirelessly receiving a received signal R0_SPM_D(t) on which M received signals R0_1(t) to R0_M(t) are superimposed, and a received signal R1_SPM_D(t) on which M received signals R1_1(t) to R1_M(t) are superimposed."

[0219] 22 is a schematic diagram of another detection element according to Embodiment 1. The detection element according to Embodiment 1 may be detection element 3-1B shown in FIG.

[0220] 22, detector 3-1B is the same as detector 3-1 except that antennas 27 and 28 of detector 3-1 shown in Fig. 2 to Fig. 4 are deleted. As a result, detector 3-1B has one antenna member consisting of antennas 25 and 26.

[0221] The detection element 3-1B is produced by a manufacturing method shown in Figures 6 to 11, in which steps (A-4) to (A-9) in the glass process shown in Figures 6 and 7 are deleted to produce a structure COMP1, and then steps (A-1) to (A-9) in the glass process shown in Figures 6 and 7 are performed to produce a structure COMP2. In this case, the structure COMP1 has a structure in which a liquid supply / discharge port 233 is formed in a substrate 23 after step (A-3) has been completed.

[0222] In the detection element 3-1B, the antennas 25, 26 (one antenna member) wirelessly receive the electromagnetic field EW wirelessly fed from the transceiver 1 (or the transceiver 1A) for a certain period of time, and apply an oscillating electric field E based on the received electromagnetic field EW to the transducer 24. Thereafter, the antennas 25, 26 (one antenna member) receive reception signals R0(t), R1(t) consisting of the vibration waveform of the transducer 24, and sequentially transmit the received reception signals R0(t), R1(t) wirelessly to the transceiver 1 (or the transceiver 1A).

[0223] The detection element 3-1B may include antennas 27 and 28 instead of the antennas 25 and 26. In this case, the antennas 27 and 28 form a single antenna member. That is, the detection element 3-1B may include either one of the single antenna member consisting of the antennas 25 and 26, or the single antenna member consisting of the antennas 27 and 28.

[0224] When the detection element 3-1B has antennas 27 and 28 instead of the antennas 25 and 26, the detection element 3-1B is manufactured by a manufacturing method shown in Figures 6 to 11 in which the glass process shown in Figures 6 and 7 is carried out to manufacture the structure COMP1 shown in Figure 7, and then steps (A-4) to (A-10) in the glass process shown in Figures 6 and 7 are deleted to manufacture the structure COMP2. In this case, the structure COMP2 is made of a substrate 21 in which a "recess 211" and a "support member 212" are formed instead of the "recess 231" and the "support member 232" shown in step (A-3), respectively.

[0225] When each of the M detection elements 3-1 to 3-M of the detection device 10 shown in FIG. 1 consists of the detection element 3-1B, the operation of the detection device 10 is executed according to the flowchart shown in FIG. 18 in which step S2 is changed to "a step of generating an electromagnetic field EW and wirelessly feeding the generated electromagnetic field EW to the M detection elements 3-1 (3-1B) to 3-M (3-1B) for a certain period of time by the transmitting antenna 12", step S3 is changed to "a step of the antennas 25, 26 (or the antennas 27, 28) wirelessly receiving the electromagnetic field EW for a certain period of time", and step S7 is changed to "a step of the antennas 25, 26 (or the antennas 27, 28) wirelessly transmitting the received signals R0(t), R1(t)".

[0226] 21 includes M detection elements 3-1 to 3-M. In the operation of the detection device 10A shown in FIG. 21, step S2 in the flowchart shown in FIG. 18 is changed to "a step of generating an electromagnetic field EW and wirelessly feeding the generated electromagnetic field EW to the M detection elements 3-1 to 3-M by the antenna 17 for a certain period of time" and step S3 is changed to "a step of receiving the electromagnetic field EW wirelessly by the antennas 25 and 26 (or the antennas 27 and 28) for a certain period of time." ", step S7 is changed to "a step in which antennas 25, 26 (or antennas 27, 28) wirelessly transmit received signals R0(t), R1(t)", and step S8 is changed to "a step in which antenna 17 wirelessly sequentially receives received signal R0_SPM_D(t) on which M received signals R0_1(t) to R0_M(t) are superimposed, and received signal R1_SPM_D(t) on which M received signals R1_1(t) to R1_M(t) are superimposed".

[0227] The operation of the detection device 10 when the M resonant frequencies of the M transducers 24 in the M detection elements 3-1 to 3-M are the same will be described.

[0228] In this case, the transmitting / receiving device 1 includes a control circuit in addition to the generating circuit and the receiving circuit. The control circuit determines the identification information ID_1 to ID_M of the detecting elements 3-1 to 3-M and the direction θ of the arrangement positions of the detecting elements 3-1 to 3-M with respect to the position of the transmitting / receiving device 1. 3-1 ~θ 3-M The identification information ID_1 to ID_M of the detection elements 3-1 to 3-M and the direction θ of the arrangement positions of the detection elements 3-1 to 3-M with respect to the position of the transmission / reception device 1 are stored in a correspondence table. 3-1 ~θ 3-M Table 2 shows the correspondence between the

[0229] [Table 2]

[0230] In Table 2, the direction θ of the arrangement positions of the detection elements 3-1 to 3-M 3-1 ~θ 3-M are associated with the identification information ID_1 to ID_M of the detection elements 3-1 to 3-M, respectively.

[0231] The position of transmitter / receiver 1 is [x 1 ,y 1 ], and the position of the detector element 3-1 is [x 3-1 ,y 3-1 ], then the direction θ 3-1 is calculated by the following formula:

[0232] θ 3-1 =tan -1 [|y 3-1 -y 1 | / |x 3-1 -x 1 |]···(2) The positions of the detector elements 3-2 to 3-M are [x 3-2 ,y 3-2 ]~[x 3-M ,y 3-M ], then, “x 3-1 ", "y 3-1 " and "x 3-2 ", "y 3-2 " into equation (2) to obtain the direction θ3-2 is calculated, and similarly, "x 3-1 ", "y 3-1 " and "x 3-M ", "y 3-M " into equation (2) to obtain the direction θ 3-M is calculated.

[0233] The generating circuit of the transmitting / receiving device 1 generates an electromagnetic field EW, superimposes the generated electromagnetic field EW on a carrier wave (for example, a 1 GHz carrier wave) and supplies it to the transmitting antenna 12. When wirelessly feeding the electromagnetic field EW to the detection element 3-1, the control circuit refers to the correspondence table shown in Table 2 and calculates the direction θ 3-1 Based on this, the carrier wave with the electromagnetic field EW superimposed is sent in the direction θ 3-1 When wirelessly feeding the carrier waves superimposed with the electromagnetic field EW to the detection elements 3-2 to 3-M, the control circuit of the transmission / reception device 1 controls the transmission antenna 12 so as to transmit the directional radio waves having a direction θ 3-2 ~θ 3-M The transmitting antenna 12 is controlled so as to transmit a directional radio wave having a directional characteristic.

[0234] Since the method of transmitting directional radio waves is well known, detailed description thereof will be omitted.

[0235] Fig. 23 is another flowchart for explaining the operation of the detection device 10 shown in Fig. 1. Note that Fig. 23 is based on the premise that the M detection elements 3-1 to 3-M are arranged within the reach of the electromagnetic wave EW transmitted by the transmission antenna 12 of the transmission / reception device 1, and that the M resonant frequencies of the M transducers 24 in the M detection elements 3-1 to 3-M are the same as each other.

[0236] The flowchart shown in Figure 23 is the same as the flowchart shown in Figure 18, except that step S2 of the flowchart shown in Figure 18 is replaced with steps S21 and S22, and steps S8 to S16 of the flowchart shown in Figure 18 are replaced with steps S23 to S28.

[0237] 23, when the operation of the detection device 10 is started, the above-mentioned step S1 is executed. In step S1, the timing t corresponds to the timing T SP If it is determined that i is equal to 1, the control circuit of the transmitting / receiving device 1 sets i=1 (step S21).

[0238] The generating circuit generates an electromagnetic field EW, superimposes the generated electromagnetic field EW on a carrier wave, and supplies the superimposed electromagnetic field EW to the transmitting antenna 12. The control circuit refers to the correspondence table shown in Table 2 and calculates a direction θ from the transmitting / receiving device 1 to the detecting element 3-i. 3-i Based on this, the carrier wave with the electromagnetic field EW superimposed is sent in the direction θ 3-i Then, the transmitting antenna 12, under the control of the control circuit, transmits a carrier wave (a carrier wave on which an electromagnetic field EW is superimposed) from the generating circuit in a direction θ 3-i The detection element 3-i is wirelessly powered by a directional radio wave having the above-mentioned characteristic (step S22).

[0239] After step S22, the detection element 3-i sequentially executes steps S3 to S7 described with reference to FIG.

[0240] After step S7, the receiving circuit of the transceiver 1 wirelessly receives the receiving signals R0(t)_i, R1(t)_i in sequence via the receiving antenna 13 (step S23) and outputs the received receiving signals R0(t)_i, R1(t)_i to the detection circuit 2.

[0241] The detection circuit 2 receives the received signals R0(t)_i, R1(t)_i, detects the resonant frequency f0(t)_i based on the received signal R0(t)_i (step S24), and detects the resonant frequency f1(t)_i based on the received signal R1(t)_i (step S25).

[0242] Then, the detection circuit 2 detects that the detection target Dm_i has been detected in the detection element 3-i by detecting that the amount of change in the resonant frequency Δf(t)_i decreases over time t based on the resonant frequencies f0(t)_i and f1(t)_i (step S26).

[0243] After that, the detection circuit 2 determines whether or not i=M (step S27).

[0244] When it is determined in step S27 that i is not equal to M, the detection circuit 2 sets i to i+1 (step S28). After that, the series of operations proceeds to step S22, and steps S22, S3 to S7, and S23 to S28 are repeatedly executed until it is determined in step S27 that i is equal to M.

[0245] Then, if it is determined in step S27 that i=M, the series of operations ends.

[0246] According to the flowchart shown in FIG. 23, an electromagnetic field EW is wirelessly supplied to one detection element 3-i, and detection of the detection object Dm_i in the detection element 3-i based on the reception signals R0(t)_i, R1(t)_i received from the one detection element 3-i (see steps S24 to S26) is detected for all M detection elements 3-1 to 3-M. Therefore, even if the M resonant frequencies of the M oscillators 24 in the M detection elements 3-1 to 3-M are the same, it is possible to remotely and accurately detect that the same detection object has been detected in the M detection elements 3-1 to 3-M.

[0247] By arranging M detection elements 3-1 to 3-M within a predetermined area, it is possible to specify the range within the predetermined area in which one detection object is detected.

[0248] In addition, by repeatedly identifying the range in which a single detection target is detected within a specified area at specified time intervals, it is possible to detect whether the range in which a single detection target is detected within a specified area has changed.

[0249] In the operation of the detection device 10A, in the flowchart shown in FIG. 23, step S22 is "generating an electromagnetic field EW, and the antenna 17 transmits a carrier wave on which the electromagnetic field EW is superimposed from the generating circuit in a direction θ 3-i The process is carried out according to a flowchart in which step S21 is changed to "a step of wirelessly feeding power to detection element 3-i for a certain period of time by directional radio waves having a directional frequency of 100 Hz" and step S23 is changed to "a step of antenna 17 wirelessly receiving reception signals R0(t)_i, R1(t)_i in sequence."

[0250] In the case where each of the M detection elements 3-1 to 3-M of the detection device 10 shown in FIG. 1 is the detection element 3-1B, the operation of the detection device 10 is performed by changing step S22 in the flowchart shown in FIG. 23 to "generate an electromagnetic field EW, and direct the carrier wave on which the generated electromagnetic field EW is superimposed in a direction θ 3-i The process is carried out according to a flowchart in which step S1 is changed to "a step of wirelessly feeding power to detection element 3-i for a certain period of time by directional radio waves having a directional field EW"; step S2 is changed to "a step of antennas 25, 26 (or antennas 27, 28) receiving a carrier wave (a carrier wave superimposed with an electromagnetic field EW) by radio for a certain period of time"; and step S7 is changed to "a step of antennas 25, 26 (or antennas 27, 28) wirelessly transmitting received signals R0(t)_i, R1(t)_i".

[0251] 21 includes M detector elements 3-1B. In the operation of the detector 10A, step S22 in the flowchart shown in FIG. 23 is changed to "generate an electromagnetic field EW, and the antenna 17 transmits a carrier wave superimposed with the electromagnetic field EW from the generating circuit in a direction θ 3-i the step S1 is changed to "a step of wirelessly feeding power to detection element 3-i for a certain period of time by directional radio waves having a directional field EW"; step S3 is changed to "a step of antennas 25, 26 (or antennas 27, 28) receiving a carrier wave (carrier wave superimposed with an electromagnetic field EW) by radio for a certain period of time"; step S7 is changed to "a step of antennas 25, 26 (or antennas 27, 28) wirelessly transmitting received signals R0(t)_i, R1(t)_i"; and step S23 is changed to "a step of antenna 17 receiving received signals R0(t)_i, R1(t)_i by radio".

[0252] The rest of the description of the flowchart shown in FIG. 23 is the same as the description of the flowchart shown in FIG.

[0253] Fig. 24 is a flowchart showing a method for detecting an object to be detected according to embodiment 1. Referring to Fig. 24, when detection of an object to be detected is started, the transmitting / receiving device 1 wirelessly feeds an electromagnetic field EW to M detecting elements 3-1 to 3-M (step S51).

[0254] Then, the transceiver 1 wirelessly receives a reception signal R0_SPM_D(t) consisting of a vibration waveform caused only by the electric field E (electric field based on the electromagnetic field EW) of the M transducers 24 in the M detection elements 3-1 to 3-M from the M detection elements 3-1 to 3-M (step S52).

[0255] In addition, the transmission / reception device 1 wirelessly receives a reception signal R1_SPM_D(t) consisting of a vibration waveform when the M transducers 24 in the M detection elements 3-1 to 3-M vibrate due to the influence of the object to be detected from the M detection elements 3-1 to 3-M (step S53).

[0256] Then, the detection circuit 2 detects M resonant frequencies f0(t)_1 to f0(t)_M of the M transducers 24 of the M detection elements 3-1 to 3-M based on the received signal R0_SPM_D(t) (step S54).

[0257] Subsequently, the detection circuit 2 detects M resonant frequencies f1(t)_1 to f1(t)_M of the M transducers 24 of the M detection elements 3-1 to 3-M based on the reception signal R1_SPM_D(t) (step S55).

[0258] Then, based on the M resonant frequencies f0(t)_1 to f0(t)_M and the M resonant frequencies f1(t)_1 to f1(t)_M, the detection circuit 2 detects that the object to be detected has been detected by the M detection elements 3-1 to 3-M by detecting a decrease in the resonant frequency changes Δf(t)_1 to Δf(t)_M over time t (step S56).

[0259] This completes the detection of the object to be detected.

[0260] In the method for detecting an object to be detected shown in FIG. 24, wireless power supply to M detection elements 3-1 to 3-M of the electromagnetic field EW in step S51 is realized by executing step S2 of the flowchart shown in FIG.

[0261] In the method for detecting an object to be detected shown in FIG. 24, the wireless reception of the reception signal R0_SPM_D(t) from the M detection elements 3-1 to 3-M in step S52 is realized by executing step S8 in the flowchart shown in FIG.

[0262] Furthermore, in the method for detecting an object to be detected shown in FIG. 24, wireless reception of the reception signals R1_SPM_D(t) from the M detection elements 3-1 to 3-M in step S53 is realized by executing step S8 in the flowchart shown in FIG.

[0263] Furthermore, in the method for detecting an object to be detected shown in FIG. 24, detection of M resonant frequencies f0(t)_1 to f0(t)_M in step S54 is realized by executing step S12 of the flowchart shown in FIG. 18 for all i = 1 to M, detection of M resonant frequencies f1(t)_1 to f1(t)_M in step S55 is realized by executing step S13 of the flowchart shown in FIG. 18 for all i = 1 to M, and "detecting that an object to be detected has been detected in M ​​detection elements 3-1 to 3-M" in step S56 is realized by executing step S14 of the flowchart shown in FIG. 18 for all i = 1 to M.

[0264] In the method for detecting an object to be detected shown in FIG. 24, an electromagnetic field EW may be wirelessly fed to M detection elements 3-1 to 3-M using directional radio waves.

[0265] In this case, in step S51, the transmission / reception device 1 wirelessly feeds a carrier wave (a carrier wave superimposed with an electromagnetic field EW) to one detection element 3-i by directional radio waves for all of the M detection elements 3-1 to 3-M. At this time, wirelessly feeding a carrier wave (a carrier wave superimposed with an electromagnetic field EW) to one detection element 3-i by directional radio waves for all of the M detection elements 3-1 to 3-M is realized by executing step S22 of the flowchart shown in FIG. 23 for all of i=1 to M.

[0266] Furthermore, in step S52, the transmission / reception device 1 wirelessly receives M reception signals R0(t)_1 to R0(t)_M from the M detection elements 3-1 to 3-M instead of the reception signal R0_SPM_D(t). At this time, the reception of the M reception signals R0(t)_1 to R0(t)_M in step S52 is realized by executing step S23 of the flowchart shown in FIG. 23 for all i=1 to M.

[0267] Furthermore, in step S53, the transmission / reception device 1 wirelessly receives M reception signals R1(t)_1 to R1(t)_M from the M detection elements 3-1 to 3-M instead of the reception signal R1_SPM_D(t). At this time, the reception of the M reception signals R1(t)_1 to R1(t)_M in step S53 is realized by executing step S23 of the flowchart shown in FIG. 23 for all i=1 to M.

[0268] Furthermore, in step S54, the detection circuit 2 detects M resonant frequencies f0(t)_1 to f0(t)_M based on M reception signals R0(t)_1 to R0(t)_M from the M detection elements 3-1 to 3-M, instead of the reception signal R0_SPM_D(t). At this time, the detection of the M resonant frequencies f0(t)_1 to f0(t)_M in step S54 is realized by executing step S24 of the flowchart shown in FIG. 23 for all i=1 to M.

[0269] Furthermore, in step S55, the detection circuit 2 detects M resonant frequencies f1(t)_1 to f1(t)_M based on M reception signals R1(t)_1 to R1(t)_M from M detection elements 3-1 to 3-M, instead of reception signal R1_SPM_D(t). At this time, the detection of M resonant frequencies f1(t)_1 to f1(t)_M in step S55 is realized by executing step S25 of the flowchart shown in FIG. 23 for all i=1 to M.

[0270] Furthermore, in step S56, detection of the detection target object in M ​​detection elements 3-1 to 3-M by detecting a decrease in the resonant frequency changes Δf(t)_1 to Δf(t)_M over time t based on M resonant frequencies f0(t)_1 to f0(t)_M and M resonant frequencies f1(t)_1 to f1(t)_M is realized by executing step S26 of the flowchart shown in FIG. 23 for all i=1 to M.

[0271] Therefore, the method for detecting the target substance shown in FIG. 24 is a detection method based on the explanation in the above-mentioned first embodiment.

[0272] In the first embodiment, in each of detection elements 3-1 to 3-M, substrate 21 has a plurality of support members 212, and substrate 23 has a plurality of support members 232, but it is sufficient that at least one of the plurality of support members 212 is made of metal, and it is sufficient that at least one of the plurality of support members 232 is made of metal. This is because, if at least one of the plurality of support members 212 is made of metal, antenna 26 can be electrically connected to antenna 25, and, if at least one of the plurality of support members 232 is made of metal, antenna 28 can be electrically connected to antenna 27.

[0273] Furthermore, each of support members 212 and 232 is not limited to a cylindrical shape, and may have a shape such as a triangular prism, a rectangular prism, or a pentagonal prism, and the cross-sectional shape in a direction perpendicular to the longitudinal direction may be any shape.

[0274] Furthermore, the planar shape of the space SP and the transducer 24 is not limited to a streamlined shape, and may be an elliptical shape.

[0275] [Embodiment 2] Fig. 25 is a schematic diagram of a detection device according to embodiment 2. Referring to Fig. 25, detection device 10B according to embodiment 2 is the same as detection device 10, except that M detection elements 3-1 to 3-M of detection device 10 shown in Fig. 1 are replaced with M detection elements 4-1 to 4-M. Each of the M detection elements 4-1 to 4-M includes a plurality of transducers 24.

[0276] Fig. 26 is a schematic diagram of the detection element 4-1 shown in Fig. 25. Note that Fig. 26 shows a schematic diagram of the detection element 4-1 in the case where the plurality of transducers 24 is three transducers 24.

[0277] 26, the detection element 4-1 includes element units Unit_1 to Unit_3 and a base 400. The element units Unit_1 to Unit_3 are fixed onto the base 400 at predetermined intervals. Each of the element units Unit_1 to Unit_3 has the same configuration as the detection element 3-1 shown in FIGS.

[0278] As a result, the detection element 4-1 has a configuration in which the element units Unit_1 to Unit_3 are arranged in a line on the base 400 at predetermined intervals.

[0279] In the detection element 4-1, the three transducers 24 included in the element units Unit_1 to Unit_3 have mutually different resonance frequencies (that is, for example, mutually different thicknesses).

[0280] Each of the detection elements 4-2 to 4-M shown in FIG. 25 has the same configuration as the detection element 4-1 shown in FIG.

[0281] Fig. 27 is a schematic diagram showing an arrangement structure of element units. With reference to Fig. 27, when detection element 4-1 includes p x q element units Unit_11 to Unit_pq (one of p and q is an integer of 2 or more, and the other of p and q is an integer of 1 or more), the p x q element units Unit_11 to Unit_pq are arranged in a matrix of p rows and q columns. Similarly to detection element 4-1, each of detection elements 4-2 to 4-M also includes p x q element units Unit_11 to Unit_pq arranged in a matrix of p rows and q columns.

[0282] In each of the detection elements 4-1 to 4-M, the p×q transducers 24 in the p×q element units Unit_11 to Unit_pq have mutually different resonance frequencies (that is, for example, mutually different thicknesses).

[0283] In this manner, in the detection elements 4-1 to 4-M, the plurality of element units Unit may be arranged in a row or in a matrix.

[0284] The number of transducers 24 included in each of detection elements 4-1 to 4-M is equal to or less than the total number of types of detection targets.

[0285] Furthermore, the detection elements 4-1 to 4-M may have the same number of transducers 24 (i.e., the same number of element units Unit), or may have different numbers of transducers 24 (i.e., different numbers of element units Unit).

[0286] When the detection elements 4-1 to 4-M have the same number of transducers 24 (i.e., the same number of element units Unit), the detection device 10B uses the detection elements 4-1 to 4-M to detect detection objects that are the same in number and type, or uses the detection elements 4-1 to 4-M to detect detection objects that are the same in number but different in type.

[0287] When detecting objects whose number and types are the same, the M detection elements 4-1 to 4-M include the same number of oscillators 24 with the same resonant frequencies. On the other hand, when detecting objects whose numbers are the same and types are different, the M detection elements 4-1 to 4-M include the same number of oscillators 24 with at least one different resonant frequency.

[0288] Fig. 28 is a flowchart for explaining the operation of the detection device 10B shown in Fig. 25. Note that Fig. 28 is based on the premise that M detection elements 4-1 to 4-M are arranged within the reach of the electromagnetic field EW transmitted by the transmission antenna 12 of the transmission / reception device 1.

[0289] The flowchart shown in FIG. 28 is the same as the flowchart shown in FIG. 23, except that steps S4 to S7 of the flowchart shown in FIG. 23 are replaced with steps S4A to S7A, and steps S23 to S26 of the flowchart shown in FIG. 23 are replaced with steps S23A and S24A.

[0290] 28, when the operation of the detection device 10B is started, the above-mentioned steps S1, S21, S22, and S3 are executed in sequence. Note that in the second embodiment, in step S22, "the carrier wave superimposed with the electromagnetic field EW is wirelessly fed to the detection element 4-i."

[0291] Then, after step S3, in the detection element 4-i, the antennas 25 and 26 (or the antennas 27 and 28) apply an oscillating electric field E based on the electromagnetic field EW to the multiple oscillators 24 (step S4A).

[0292] Then, in the detection element 4-i, the antennas 27 and 28 (or the antennas 25 and 26) receive a plurality of reception signals R0_1(t) to R0_j, which are vibration waveforms of a plurality of transducers 24. max The reception signals R0_SPM_SC(t)_i on which (t) are superimposed are received from the plurality of transducers 24 (step S5A).

[0293] Subsequently, in the detection element 4-i, the antennas 27 and 28 (or the antennas 25 and 26) receive a plurality of reception signals R1_1(t) to R1_j, which are vibration waveforms of a plurality of transducers 24. max The reception signals R1_SPM_SC(t)_i on which (t) are superimposed are received from the plurality of transducers 24 (step S6A).

[0294] Then, in the detection element 4-i, the antennas 27 and 28 (or the antennas 25 and 26) wirelessly transmit the reception signals R0_SPM_SC(t)_i and R1_SPM_SC(t)_i (step S7A).

[0295] The receiving circuit of the transmitting / receiving device 1 wirelessly receives the receiving signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i via the receiving antenna 13 (step S23A), and outputs the received receiving signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i to the detection circuit 2.

[0296] The detection circuit 2 receives the reception signals R0_SPM_SC(t)_i and R1_SPM_SC(t)_i from the reception circuit, and detects the amount of change in the resonance frequencies {Δf_1 to Δf_j max}_i and detect multiple detection targets {Dm_1~Dm_j max}_i is detected (step S24A).

[0297] Thereafter, the above-mentioned step S27 is executed, and when it is determined in step S27 that i=M is ​​not satisfied, steps S22, S3, S4A to 7A, S23A, S24A, S27, and S28 are repeatedly executed until it is determined in step S27 that i=M is ​​satisfied.

[0298] Then, when it is determined in step S27 that i=M, the series of operations ends.

[0299] FIG. 29 is a flowchart for explaining the detailed operation of step S24A in FIG.

[0300] 29, after step S23A in FIG. 28, the detection circuit 2 performs a Fourier transform on the received signal R0_SPM_SC(t)_i at one time to obtain frequency components R0_1(f)_i to R0_j. max (f)_i is obtained (step S31).

[0301] The detection circuit 2 then detects the received signal R0_SPM_SC(t)_i for k time periods t 1 ~t k Then, the frequency components {R1_1(f)_i~R1_j max (f)_i}_1~{R1_1(f)_i~R1_j max (f) _i}_k is obtained (step S32).

[0302] Thereafter, the detection circuit 2 sets j=1 (step S33), and detects the resonance frequency f0_j_i based on the frequency component {R0_j(f)_i (step S34).

[0303] Subsequently, the detection circuit 2 detects the resonant frequencies {f1_j_i}_1 to {f1_j_i}_k based on the frequency components {R1_j(f)_i}_1 to {R1_j(f)_i}_k, respectively (step S35).

[0304] Then, the detection circuit 2 detects that the object to be detected Dm_j_i has been detected in the detection element 4-i by detecting a decrease in the amount of change in resonant frequency Δf_j_i over time t based on the resonant frequency f0_j_i and the resonant frequencies {f1_j_i}_1 to {f1_j_i}_k using the method described in step S14 of Figure 18 (step S36).

[0305] And the detection circuit 2 is j=j max In step S37, it is determined whether j=j max If it is determined that j is not j, the detection circuit 2 sets j=j+1 (step S38). After that, the series of operations proceeds to step S34, and in step S37, j=j max Steps S34 to S38 are repeatedly executed until it is determined that j=j max If it is determined that this is the case, the series of operations proceeds to step S27 in FIG.

[0306] In the flowchart shown in FIG. 29, steps S34 to S36 are performed for j=1 to j max By performing the above for all of the detection elements 4-i, max The change in resonant frequency Δf_1_i~Δf_j max _i is found. Therefore, j max The change in resonant frequency Δf_1_i~Δf_j max _i is a function of the multiple change amounts {Δf_1 to Δf_j max}_i.

[0307] Fig. 30 is a conceptual diagram showing the received signals R0_SPM_SC(t) and R1_SPM_SC(t), and Fig. 31 is a conceptual diagram showing frequency components when the received signals R0_SPM_SC(t) and R1_SPM_SC(t) are subjected to a Fourier transform.

[0308] 30 and 31 show frequency components obtained by Fourier transforming the received signals R0_SPM_SC(t), R1_SPM_SC(t) and the received signals R0_SPM_SC(t), R1_SPM_SC(t) in one detector element 4-i. 1 ~t k Let k=4.

[0309] 30, the received signal R0_SPM_SC(t) is expressed as j for one detection element 4-i with respect to time t. max j when the oscillator 24 is vibrating due to only the oscillating electric field E max The received signals R0_1(t) to R0_j from the transducers 24 max (t) consists of superimposed vibration waveforms.

[0310] In addition, the received signal R1_SPM_SC(t) is expressed as j for one detection element 4-i with respect to time t. max j when the vibrator 24 is vibrating due to the influence of the detection object max The received signals R1_1(t) to R1_j from the transducers 24 max (t) consists of superimposed vibration waveforms.

[0311] And one time t 0 In this case, when the received signal R0_SPM_SC(t) is Fourier transformed, j shown in FIG. max Frequency components R0_1(f)_i, R0_2(f)_i, . . . , R0_j max (f)_i is obtained.

[0312] R0_1(f)_i,R0_2(f)_i,...,R0_j max An explanation of each part of (f)_i is shown in Table 3.

[0313] [Table 3]

[0314] Also, k times t 1 ~t k In this case, when the received signal R1_SPM_SC(t) is Fourier transformed, k (=4) frequency components R1_1(f)_i_1 to R1_1(f)_i_2, . . . , R1_1(f)_i_k; R1_2(f)_i_1 to R1_2(f)_i_2, . . . , R1_2(f)_i_k; . . . , R1_j max (f)_i_1~R1_j max (f) i2, , R1 j max (f)_i_k is obtained.

[0315] Table 4 shows an explanation of each part of R1_1(f)_i_1~R1_1(f)_i_2,...,R1_1(f)_i_k.

[0316] [Table 4]

[0317] In addition, R1_2(f)_i_1~R1_2(f)_i_2,···,R1_2(f)_i_k;···;R1_j max (f)_i_1~R1_j max (f) i2, , R1 j max The explanation of each part of (f)_i_k is also shown in Table 4.

[0318] Then, based on the frequency component R0_1(f)_i, the frequency at which the amplitude of the frequency component R0_1(f)_i is maximized is detected as the resonant frequency f0_1_i of the first oscillator 24 in the detection element 4-i, and based on the frequency component R0_2(f)_i, the frequency at which the amplitude of the frequency component R0_2(f)_i is maximized is detected as the resonant frequency f0_2_i of the second oscillator 24 in the detection element 4-i. Similarly, the frequency components R0_j maxBased on (f)_i, frequency component R0_j max (f) The frequency at which the amplitude of i is maximum is j in the detection element 4-i. max The resonant frequency f0_j of the th oscillator 24 max _i (see Figure 31).

[0319] In addition, based on the frequency component R1_1(f)_i_1, the frequency at which the amplitude of the frequency component R1_1(f)_i_1 becomes maximum is determined as the time t 1 The frequency at which the amplitude of the frequency component R1_1(f)_i_2 becomes maximum is detected as the resonant frequency f1_1_i_1 at time t 2 In the same manner, the frequency at which the amplitude of the frequency component R1_1(f)_i_k becomes maximum is detected as the resonant frequency f1_1_i_2 at time t k The resonant frequency f1_1_i_k at the resonance frequency f1_1_i_k is detected (see FIG. 31).

[0320] Furthermore, based on the frequency component R1_2(f)_i_1, the frequency at which the amplitude of the frequency component R1_2(f)_i_1 becomes maximum is determined as the time t 1 The frequency at which the amplitude of the frequency component R1_2(f)_i_2 becomes maximum is detected as the resonant frequency f1_2_i_1 at time t 2 In the same manner, the frequency at which the amplitude of the frequency component R1_2(f)_i_k becomes maximum is detected as the resonant frequency f1_2_i_2 at time t k The resonant frequency f1_2_i_k at the resonance frequency f1_2 is detected as f1_2_i_k (see FIG. 31).

[0321] Similarly, frequency components R1_jmax Based on (f)_i_1, frequency component R1_j max (f) The frequency at which the amplitude of _i_1 is maximum is j in detector element 4-i. max Time t of the 24th oscillator 1 Resonant frequency f1_j at max _i_1 and frequency component R1_j max Based on (f)_i_2, frequency component R1_j max (f) The frequency at which the amplitude of _i_2 is maximum is j in detector element 4-i. max Time t of the 24th oscillator 2 Resonant frequency f1_j at max _i_2, and similarly, frequency components R1_j max Based on (f)_i_k, frequency component R1_j max (f) The frequency at which the amplitude of _i_k is maximum is j in detector element 4-i. max Time t of the 24th oscillator k Resonant frequency f1_j at max _i_k (see Figure 31).

[0322] Then, by subtracting the resonance frequencies f1_1_i_1 to f1_1_i_k from the resonance frequency f0_1_i, the amount of change Δf_1_i in the resonance frequency of the first oscillator 24 in the detection element 4-i is detected, and by subtracting the resonance frequencies f1_2_i_1 to f1_2_i_k from the resonance frequency f0_2_i, the amount of change Δf_2_i in the resonance frequency of the second oscillator 24 in the detection element 4-i is detected. max _i to resonance frequency f1_j max _i_1~f1_j max j in detector element 4-i by subtracting _i_k max The change in the resonant frequency of the th vibrator 24, Δf_j max _i is detected (see Figure 31).

[0323] And the change in the resonant frequency Δf_1_i, Δf_2_i, Δf_j maxBy detecting that the first transducer 24, the second transducer 24, . . . , j in the detection element 4-i are decreased with respect to time t, max It is detected that the th transducer 24 has detected the detection target (see step S24A in FIG. 28 (= the flowchart shown in FIG. 29)).

[0324] According to the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29), steps S22, S3, S4A to S7A, S23A, S24A, S27, and S28 are repeatedly executed until it is determined in step S27 that i=M, and j max Each oscillator 24 has a different j max The detection targets are detected.

[0325] In this case, each of the M detection elements 4-1 to 4-M includes an oscillator 24 (j=1) having resonant frequencies f0_1 and f1_1, an oscillator 24 (j=2) having resonant frequencies f0_2 and f1_2, and an oscillator 24 (j=j) having resonant frequencies f0_3 and f1_3. max (=3) max (=3) transducers 24 are provided, and f0_1=f0_2=f0_3 and f1_1=f1_2=f1_3 are satisfied, then in M ​​detection elements 4-1 to 4-M, max Since the resonant frequencies f0, f1 of the (=3) oscillators 24 are the same, each of the M detection elements 4-1 to 4-M detects the same three types of detection targets. The number of types of detection targets detected by each of the M detection elements 4-1 to 4-M is not limited to three, but may be two or more.

[0326] For example, when M=3, the detection element 4-1 has a transducer 24 (j=1) having resonant frequencies f0_1 and f1_1, and a transducer 24 (j=2) having resonant frequencies f0_2 and f1_2. max =2) and j maxThe detection element 4-2 includes a transducer 24 (j=1) having resonant frequencies f0_3 and f1_3, and a transducer 24 (j=2) having resonant frequencies f0_4 and f1_4. max =2) and j max The detection element 4-3 includes a transducer 24 (j=1) having resonant frequencies f0_5 and f1_5, and a transducer 24 (j=2) having resonant frequencies f0_6 and f1_6. max =2) and j max When the detection elements 4-1 to 4-3 are provided with (=2) oscillators 24 and f0_1≠f0_2≠f0_3≠f0_4≠f0_5≠f0_6 and f1_1≠f1_2≠f1_3≠f1_4≠f1_5≠f1_6, the detection elements 4-1 to 4-3 detect two different types of detection objects. That is, the detection elements 4-1 to 4-3 are provided with the same number (=2) of oscillators 24, but the resonant frequencies f0_1 to f0_6 are different from each other, and the resonant frequencies f1_1 to f1_6 are different from each other, so that the two types of detection objects detected by the detection elements 4-1 to 4-3 are different from each other. The number of types of detection objects detected by the detection elements 4-1 to 4-3 is not limited to two, but may be two or more.

[0327] Furthermore, for example, when M=3, the detection element 4-1 has a transducer 24 (j=1) having resonant frequencies f0_1 and f1_1, and a transducer 24 (j=2) having resonant frequencies f0_2 and f1_2. max =2) and j max The detection element 4-2 includes a transducer 24 (j=1) having resonant frequencies f0_3 and f1_3, a transducer 24 (j=2) having resonant frequencies f0_4 and f1_4, and a transducer 24 (j=3) having resonant frequencies f0_5 and f1_5. max =3) and j max The detection element 4-3 includes a transducer 24 (j=1) having resonant frequencies f0_6 and f1_6, a transducer 24 (j=2) having resonant frequencies f0_7 and f1_7, a transducer 24 (j=3) having resonant frequencies f0_8 and f1_8, and a transducer 24 (j=4) having resonant frequencies f0_9 and f1_9. max = 4) and maxWhen the detection element 4-1 includes (=4) oscillators 24 and f0_1≠f0_2, f0_3≠f0_4≠f0_5, f0_6≠f0_7≠f0_8≠f0_9 and f1_1≠f1_2, f1_3≠f1_4≠f1_5, f1_6≠f1_7≠f1_8≠f1_9, the detection element 4-1 detects two types of detection objects, the detection element 4-2 detects three types of detection objects, and the detection element 4-3 detects four types of detection objects. That is, when the detection elements 4-1 to 4-3 include different numbers of oscillators 24 and the resonant frequencies f0, f1 of the oscillators 24 in each of the detection elements 4-1 to 4-3 are different from each other, the detection elements 4-1 to 4-3 detect different types of detection objects.

[0328] In this manner, in the detection device 10B, it is sufficient that the resonant frequencies of the oscillators 24 included in one detection element 4-i (i=1 to M) are different from one another.

[0329] The rest of the description of the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29) is the same as the description of the flowchart shown in FIG.

[0330] 32 is a schematic diagram of another detection element according to embodiment 2. The detection element according to embodiment 2 may be detection element 4-1A shown in FIG.

[0331] 32, detection element 4-1A is obtained by adding connection members 41, 42, 51, and 52 to detection element 4-1 shown in FIG. 26, and is otherwise the same as detection element 4-1 shown in FIG.

[0332] The connection member 41 electrically connects the antenna 26 of the element unit Unit_1 to the antenna 26 of the element unit Unit_2. The connection member 42 electrically connects the antenna 26 of the element unit Unit_2 to the antenna 26 of the element unit Unit_3. Each of the connection members 41 and 42 is made of the same conductive thin film as the antenna 26.

[0333] One end of the connection member 51 penetrates the base 400 in the thickness direction and is electrically connected to the antenna 28 of the element unit Unit_1, and the other end of the connection member 51 penetrates the base 400 in the thickness direction and is electrically connected to the antenna 28 of the element unit Unit_2. One end of the connection member 52 penetrates the base 400 in the thickness direction and is electrically connected to the antenna 28 of the element unit Unit_2, and the other end of the connection member 52 penetrates the base 400 in the thickness direction and is electrically connected to the antenna 28 of the element unit Unit_3. Each of the connection members 51 and 52 is made of the same conductive thin film as the antenna 28.

[0334] In each of the element units Unit_1 to Unit_3, the antenna 26 is electrically connected to the antenna 25, so that the antennas 25, 26 and the connection members 41, 42 configure one antenna 40 in the element units Unit_1 to Unit_3.

[0335] Furthermore, in each of the element units Unit_1 to Unit_3, the antenna 28 is electrically connected to the antenna 27, so that the antennas 27, 28 and the connection members 51, 52 form one antenna 50 in the element units Unit_1 to Unit_3.

[0336] The detection element 4-1A does not necessarily have to include the connection members 51 and 52. In this case, the detection element 4-1A includes one antenna 40 and three antennas (each of the three antennas is made up of an antenna 27 and an antenna 28) provided corresponding to the three transducers 24.

[0337] Furthermore, the detection element 4-1A does not necessarily have to include the connection members 41 and 42. In this case, the detection element 4-1A includes three antennas (each of the three antennas is made up of the antennas 25 and 26) provided corresponding to the three transducers 24, and one antenna 50.

[0338] In the detection device 10B, each of the detection elements 4-1 to 4-M may be the detection element 4-1A. In this case, the operation of the detection device 10B is performed according to a flowchart shown in Fig. 28 (including the flowchart shown in Fig. 29) in which step S3 is changed to "the step in which the antenna 40 wirelessly receives a carrier wave (a carrier wave superimposed with an electromagnetic field EW)", step S4A is changed to "the step in which the antenna 40 applies an oscillating electric field E based on the electromagnetic field EW to the multiple transducers 24", step S5A is changed to "the step in which the antenna 50 receives the reception signal R0_SPM_SC(t)_i from the multiple transducers", step S6A is changed to "the step in which the antenna 50 receives the reception signal R1_SPM_SC(t)_i from the multiple transducers", and step S7A is changed to "the step in which the antenna 50 wirelessly transmits the reception signal R0_SPM_SC(t)_i and the reception signal R1_SPM_SC(t)_i".

[0339] 33 is a schematic diagram of another detection device according to embodiment 2. The detection device according to embodiment 2 may be a detection device 10C shown in FIG.

[0340] 33, a detection device 10C is the same as detection device 10B shown in FIG. 25 except that transmitting antenna 12 and receiving antenna 13 of detection device 10B shown in FIG. 25 are replaced with an antenna 17.

[0341] In detection device 10B, antenna 17 wirelessly feeds electromagnetic field EW generated by a generating circuit to M detection elements 4-1 to 4-M for a fixed period of time, and stops wirelessly feeding electromagnetic field EW to M detection elements 4-1 to 4-M after the fixed period has elapsed. Thereafter, antenna 17 receives reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i from detection element 4-i (any of detection elements 4-1 to 4-M), and outputs the received reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i to a receiving circuit.

[0342] In this way, antenna 17 is a single antenna that serves the functions of both transmitting antenna 12 and receiving antenna 13 .

[0343] The operation of the detection device 10C is performed according to the flowchart shown in Figure 28 (including the flowchart shown in Figure 29) in which step S22 is changed to "a step of generating an electromagnetic field EW and wirelessly feeding a carrier wave superimposed with the generated electromagnetic field EW to the detection element 4-i by directional radio waves via the antenna 17 for a certain period of time" and step S23A is changed to "a step of the antenna 17 wirelessly receiving the received signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i".

[0344] 34 is a schematic diagram of still another detection element according to the embodiment 2. The detection element according to the embodiment 2 may be detection element 4-1B shown in FIG.

[0345] 34, detector element 4-1B is the same as detector element 4-1 except that antennas 27, 28 of element units Unit_1 to Unit_3 in detector element 4-1 shown in Fig. 26 are deleted. As a result, each of element units Unit_1 to Unit_3 in detector element 4-1B has one antenna member consisting of antennas 25, 26.

[0346] The detection element 4-1B is produced by a manufacturing method shown in Fig. 6 to Fig. 11, in which steps (A-4) to (A-9) in the glass process shown in Fig. 6 and Fig. 7 are deleted to produce a structure COMP1, and then steps (A-1) to (A-9) in the glass process shown in Fig. 6 and Fig. 7 are performed to produce a structure COMP2, and this manufacturing method is performed the same number of times as the element units Unit_1 to Unit_3. In this case, the structure COMP1 has a structure in which a liquid supply / waste port 233 is formed in a substrate 23 after step (A-3) has been completed.

[0347] In detection element 4-1B, antennas 25, 26 (one antenna member) wirelessly receive a carrier wave (carrier wave superimposed with electromagnetic field EW) wirelessly fed from transceiver 1 (or transceiver 1A) for a certain period of time, and apply an oscillating electric field E based on the electromagnetic field EW of the received carrier wave to transducer 24. Thereafter, antennas 25, 26 (one antenna member) receive reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i consisting of vibration waveforms from transducer 24, and wirelessly transmit the received reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i to transceiver 1 (or transceiver 1A).

[0348] The detection element 4-1B may include antennas 27 and 28 instead of the antennas 25 and 26. In this case, the antennas 27 and 28 form a single antenna member. That is, the detection element 4-1B may include either one of the single antenna including the antennas 25 and 26, or the single antenna including the antennas 27 and 28.

[0349] When the detection element 4-1B has antennas 27 and 28 instead of the antennas 25 and 26, the detection element 4-1B is produced by a manufacturing method shown in Figures 6 to 11 in which the glass process shown in Figures 6 and 7 is carried out to produce the structure COMP1 shown in Figure 7, and then steps (A-4) to (A-10) in the glass process shown in Figures 6 and 7 are deleted to produce the structure COMP2, and this manufacturing method is carried out the same number of times as the number of element units Unit_1 to Unit_3. In this case, the structure COMP2 is made of the substrate 21 in which the recess 231 and the support member 232 shown in step (A-3) are formed.

[0350] 25 includes a detection element 4-1B. In the operation of the detection device 10B, in the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29), step S22 is changed to "a step of generating an electromagnetic field EW, and wirelessly feeding a carrier wave on which the generated electromagnetic field EW is superimposed to the detection element 4-i (4-1B) by directional radio waves by the transmitting antenna 12 for a certain period of time", step S3 is changed to "a step of receiving the carrier wave (the carrier wave on which the electromagnetic field EW is superimposed) by wireless for a certain period of time by the antennas 25 and 26 (or the antennas 27 and 28)", and step S4A is changed to "a step of receiving an oscillating electric field E based on the electromagnetic field EW for a certain period of time". The present embodiment is carried out according to a flowchart in which step S5A is changed to "a step of applying a received signal R0_SPM_SC(t)_i to the multiple transducers 24 for a certain period of time", step S5A is changed to "a step of antennas 25, 26 (or antennas 27, 28) receiving received signal R0_SPM_SC(t)_i from the multiple transducers 24 after a certain period of time has elapsed", step S6A is changed to "a step of antennas 25, 26 (or antennas 27, 28) receiving received signal R1_SPM_SC(t)_i from the multiple transducers 24 after a certain period of time has elapsed", and step S7A is changed to "a step of antennas 25, 26 (or antennas 27, 28) wirelessly transmitting received signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i".

[0351] 33 includes a detection element 4-1B, the operation of the detection device 10C is as follows: in the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29), step S22 is changed to "a step of generating an electromagnetic field EW, and wirelessly feeding a carrier wave on which the generated electromagnetic field EW is superimposed to the detection element 4-i (4-1B) by directional radio waves via the antenna 17 for a certain period of time", step S3 is changed to "a step of the antennas 25, 26 (or the antennas 27, 28) receiving the carrier wave (the carrier wave on which the electromagnetic field EW is superimposed) wirelessly for a certain period of time", step S4A is changed to "a step of applying an oscillating electric field E based on the electromagnetic field EW to a plurality of oscillators 24 for a certain period of time", and step S5A is changed to "a step of applying an oscillating electric field E based on the electromagnetic field EW to a plurality of oscillators 24 for a certain period of time". The process is executed according to a flowchart in which step S6A is changed to "a step in which, after a certain period of time has elapsed, antennas 25, 26 (or antennas 27, 28) receive reception signals R0_SPM_SC(t)_i from the multiple transducers 24", step S6A is changed to "a step in which, after a certain period of time has elapsed, antennas 25, 26 (or antennas 27, 28) receive reception signals R1_SPM_SC(t)_i from the multiple transducers 24", step S7A is changed to "a step in which antennas 25, 26 (or antennas 27, 28) wirelessly transmit reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i", and step S23A is changed to "a step in which antenna 17 wirelessly receives reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i".

[0352] Fig. 35 is a flowchart showing a method for detecting an object to be detected according to embodiment 2. Referring to Fig. 35, when detection of an object to be detected is started, the transmitting / receiving device 1 wirelessly feeds an electromagnetic field EW to M detecting elements 4-1 to 4-M (step S61).

[0353] The transmitting / receiving device 1 then detects a plurality of (j max A plurality of (j) oscillators 24 are formed by vibration waveforms caused only by the electric field E (electric field based on the electromagnetic field EW) of the oscillators 24. max ) received signals R0_1(t) to R0_j maxThe received signal R0_SPM_SC(t)_i on which (t) is superimposed is wirelessly received from each of the M detecting elements 4-1 to 4-M (step S62).

[0354] The transmitting / receiving device 1 also detects a plurality of (j max A plurality of (j) oscillators 24 are formed by vibration waveforms influenced by the detection object. max ) received signals R1_1(t) to R1_j max The received signal R1_SPM_SC(t)_i on which (t) is superimposed is wirelessly received from each of the M detecting elements 4-1 to 4-M (step S63).

[0355] Then, the detection circuit 2 detects M sets of multiple (j max ) received signals {R0_1(t)~R0_j max (t)}_1~{R0_1(t)~R0_j max (t)}_M, the above-mentioned method is used to calculate M sets of multiple (j max pcs) of resonance frequencies {f0_1~f0_j max}_1~{f0_1~f0_j max}_M is detected (step S64).

[0356] In addition, the detection circuit 2 detects M sets of multiple (j max 1(t) to R1_j max (t)}_1~{R1_1(t)~R1_j max (t)}_M, the above-mentioned method is used to calculate M sets of multiple (j max pcs) resonant frequency {f1_1~f1_j max}_1~{f1_1~f1_j max}_M is detected (step S65).

[0357] The detection circuit 2 detects the resonance frequencies f0_1 to f0_j max Then, the resonant frequencies f1_1 to f1_j are max The change in resonant frequency Δf_1 to Δf_j is calculated by subtracting maxThe search is done for M sets of multiple (j max pcs) of resonance frequencies {f0_1~f0_j max}_1~{f0_1~f0_j max}_M and M-tuple (j max pcs) resonant frequency {f1_1~f1_j max}_1~{f1_1~f1_j max}_M, and calculate the change in the resonant frequency of M sets {Δf_1~Δf_j max}_1~{Δf_1~Δf_j max}_M is detected (step S66).

[0358] Thereafter, the detection circuit 2 detects the detection target object based on the change amount Δf_j by the above-mentioned method. max}_1~{Δf_1~Δf_j max}_M, and M sets of multiple (j max ) of detection objects {Dm_1~Dm_j max}_1~{Dm_1~Dm_j max}_M is detected (step S67), whereby the detection of the detection target is completed.

[0359] In the method for detecting an object to be detected shown in FIG. 35, in step S61, the electromagnetic field EW is wirelessly supplied to M detection elements 4-1 to 4-M by executing step S22 of the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29) for all of i=1 to M.

[0360] Furthermore, in the detection method for an object to be detected shown in Figure 35, in step S62, receiving the received signal R0_SPM_SC(t)_i wirelessly from each of the M detection elements 4-1 to 4-M, and in step S63, receiving the received signal R1_SPM_SC(t)_i wirelessly from each of the M detection elements 4-1 to 4-M, are realized by executing step S23A of the flowchart shown in Figure 28 (including the flowchart shown in Figure 29) for all i = 1 to M.

[0361] Furthermore, in the detection method of the detection target shown in FIG. 35, the M sets of plural (j max pcs) of resonance frequencies {f0_1~f0_j max}_1~{f0_1~f0_j max}_M is detected by performing step S34 included in step S24A of the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29) for j=1 to j max This is realized by executing the above for all i=1 to M.

[0362] Furthermore, in the detection method of the detection target shown in FIG. 35, the M sets of plural (j max pcs) resonant frequency {f1_1~f1_j max}_1~{f1_1~f1_j max}_M is detected by performing step S35 included in step S24A of the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29) for j=1 to j max This is realized by executing the above for all i=1 to M.

[0363] Furthermore, in the detection method of the detection target shown in FIG. 35, the M sets of change amounts {Δf_1 to Δf_j max}_1~{Δf_1~Δf_j max}_M, and the M sets of multiple (j max ) of detection objects {Dm_1~Dm_j max}_1~{Dm_1~Dm_j max}_M is detected by performing step S36 included in step S24A of the flowchart shown in FIG. 28 (including the flowchart shown in FIG. 29) for j=1 to j max This is realized by executing the above for all i=1 to M.

[0364] Therefore, the method for detecting the target substance shown in FIG. 35 is a detection method based on the explanation in the above-mentioned second embodiment.

[0365] Other aspects of the second embodiment are the same as those of the first embodiment.

[0366] In the above-described first embodiment, in the detection device 10 (or detection device 10A) including M detection elements 3-1 to 3-M, the transmission / reception device 1 (or the transmission / reception device 1A) wirelessly feeds the electromagnetic field EW to the M detection elements 3-1 to 3-M, receives reception signals R0_SPM_D(t), R1_SPM_D(t) (or reception signals R0(t)_i, R1(t)_i) from the M detection elements 3-1 to 3-M, and the detection circuit 2 detects the detection target in the M detection elements 3-1 to 3-M based on the reception signals R0_SPM_D(t), R1_SPM_D(t) (or reception signals R0(t)_i, R1(t)_i). In this case, each of the M detection elements 3-1 to 3-M includes one transducer 24.

[0367] In the above-described second embodiment, it has been described that in the detection device 10B (or detection device 10C) including M detection elements 4-1 to 4-M, the transceiver 1 (or the transceiver 1A) wirelessly feeds a carrier wave (a carrier wave superimposed with an electromagnetic field EW) to the M detection elements 4-1 to 4-M, receives reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i (i=1 to M) from the M detection elements 4-1 to 4-M, and the detection circuit 2 detects an object to be detected in the M detection elements 4-1 to 4-M based on the reception signals R0_SPM_SC(t)_i, R1_SPM_SC(t)_i (i=1 to M). In this case, each of the M detection elements 4-1 to 4-M includes a plurality of transducers 24 having mutually different resonant frequencies.

[0368] Therefore, in this embodiment of the present invention, the number of transducers 24 included in each of the M detection elements is set to n 1 ,n 2 ,n M (n 1 ,n 2 ,n M are integers equal to or greater than 1), M detection elements DE_1, DE_2, . . . , DE_M are each1 24 transducers, n 2 24, . . . , n M As a result, the total number N of the transducers 24 in the M detection elements DE_1 to DE_M is an integer equal to or greater than 1, where N=n 1 +n 2 +···+n M Meet the following.

[0369] M detection elements DE_1 to DE_M, and the number n of transducers 24 in the M detection elements DE_1 to DE_M 1 ~n M The relationship between the above and the resonant frequency of the vibrator 24 is shown in Table 5.

[0370] [Table 5]

[0371] n 1 ~n M is "1", the M transducers 24 in the M detection elements DE_1 to DE_M have resonant frequencies f_rsn_1 to f_rsn_M, respectively. The M resonant frequencies f_rsn_1 to f_rsn_M may be the same as each other or different from each other. The M resonant frequencies f_rsn_1 to f_rsn_M may include a group consisting of the same resonant frequencies and a group consisting of different resonant frequencies.

[0372] n 1 ~n M is equal to or greater than "2", n 1 The oscillators 24 each have a different n 1 Resonant frequencies f_rsn_1_1, f_rsn_1_2, , f_rsn_1_n 1 and n in the detection element DE_2 2 The oscillators 24 each have a different n 2 Resonant frequencies f_rsn_2_1, f_rsn_2_2, , f_rsn_2_n 2and n in the detection element DE_3 3 The oscillators 24 each have a different n 3 Resonant frequencies f_rsn_3_1, f_rsn_3_2, , f_rsn_3_n 3 Similarly, n M The oscillators 24 each have a different n M Resonant frequencies f_rsn_M_1, f_rsn_M_2, , f_rsn_M_n M And, n 1 ,n 2 ,n M may be the same as or different from each other. 1 ,n 2 ,n M may include groups with the same number of elements and groups with different numbers of elements. For example, when M=10, n 1 ,n 2 ,n 10 are mutually equal in number n 2 =n 3 =n 5 A group consisting of n distinct numbers 1 ≠ n 4 ≠ n 7 ≠ n 8 and

[0373] n 1 ~n M is equal to or greater than "1", the M detection elements DE_1 to DE_M may include a group of detection elements having one oscillator 24 and a group of detection elements having a plurality of oscillators 24. In a group of detection elements having a plurality of oscillators 24, the oscillators 24 of each detection element have mutually different resonant frequencies.

[0374] According to the above-described embodiment, the detection device includes: M (M is an integer equal to or greater than 1) detector elements each including a transducer, a first receiving antenna, and a first transmitting antenna; The number of transducers in each of the M detector elements is n 1 ,n 2 ,n M (n 1 ,n 2 ,n M where N is an integer of 1 or more, and N=n 1 +n 2 +···+n M a transmitting / receiving device including a generating circuit that generates an electromagnetic field that vibrates each of the number of oscillators at a resonant frequency, a second transmitting antenna that wirelessly feeds the electromagnetic field generated by the generating circuit to M number of first receiving antennas in the M number of detecting elements, and a second receiving antenna that wirelessly receives M number of receiving signals in the M number of detecting elements from the M number of first transmitting antennas in the M number of detecting elements; a detection circuit that detects a detection target based on the M reception signals received by the second reception antenna, Each of the M received signals is composed of an oscillatory waveform that oscillates at a resonant frequency of 50 MHz or more; The M first receiving antennas receive the electromagnetic fields wirelessly fed from the second transmitting antenna, and generate oscillating electric fields based on the received electromagnetic fields, each of which is n 1 n oscillators 2 oscillators, , and n M Apply to each transducer, n in M ​​detector elements 1 n oscillators 2 oscillators, , and n M The transducers are supported so as to be capable of vibrating at a resonant frequency, and generate M reception signals when an oscillating electric field is applied thereto; The M first transmit antennas are 1 n oscillators 2 oscillators, , and n M wirelessly transmitting the M reception signals generated by the transducers to a second reception antenna; The detection circuit may perform a detection process for all M received signals received by the second receiving antenna, in order to detect the object to be detected by detecting the amount of change in resonant frequency in one received signal.

[0375] The detection method is as follows: The number of transducers contained in each of the M (M is an integer equal to or greater than 1) detection elements is n 1 ,n 2 ,n M (n 1 ,n 2 ,n M where N is an integer of 1 or more, and N=n 1 +n 2 +···+n M A first step of wirelessly feeding an electromagnetic field that vibrates each of the M oscillators at a resonant frequency to the M detector elements by a transmitting antenna; n 1 n oscillators 2 oscillators, , and n M a second step of receiving M reception signals from the M detection elements by a receiving antenna, the M reception signals being vibration waveforms in which the M transducers vibrate at a resonant frequency of 50 MHz or more in response to application of an oscillating electric field based on an electromagnetic field; and a third step of detecting the object to be detected by detecting the amount of change in resonant frequency in one of the M received signals based on the M received signals using the detection circuit for all M received signals.

[0376] In this embodiment of the invention, the antennas 25 and 26 (or the antennas 27 and 28) constitute a "first receiving antenna", and the antennas 27 and 28 (or the antennas 25 and 26) constitute a "first transmitting antenna".

[0377] In the embodiment of the present invention, in the plurality of element units Unit_1 to Unit_3, the three sets of antennas 27 and 28 (or the three sets of antennas 25 and 26) provided corresponding to the three transducers 24 are “n m (m is any value from 1 to M) second antenna members are configured.

[0378] Furthermore, in this embodiment of the present invention, the transmitting antenna 12 constitutes a "second transmitting antenna" or a "third antenna member", and the receiving antenna 13 constitutes a "second receiving antenna" or a "fourth antenna member".

[0379] Furthermore, in this embodiment of the present invention, antennas 25 and 26 (or antennas 27 and 28) constitute a "first antenna member", and antenna 17 constitutes a "second antenna member".

[0380] Furthermore, in this embodiment of the present invention, antenna 17 constitutes a "second antenna member" or a "transmitting / receiving antenna".

[0381] Furthermore, in this embodiment of the present invention, antenna 40 (or antenna 50) constitutes a "first receiving antenna", and antenna 50 (or antenna 40) constitutes a "first transmitting antenna".

[0382] Furthermore, in this embodiment of the present invention, antenna 40 (or antenna 50) constitutes a "first antenna member."

[0383] Furthermore, in this embodiment of the present invention, the received signals R0_SPM_D(t) and R1_SPM_D(t) constitute "M received signals." Moreover, the received signal R0_SPM_D(t) constitutes "M first received signals," and the received signal R1_SPM_D(t) constitutes "M second received signals."

[0384] Furthermore, in the embodiment of the present invention, M resonant frequencies f0_1 to f0_M obtained when step S12 in FIG. 18 is executed for all i=1 to M constitute "M first resonant frequencies."

[0385] Furthermore, in an embodiment of the present invention, when step S13 in FIG. 18 is executed for all i=1 to M, each of “M resonant frequencies f1_1_1 to f1_M_1”, “M resonant frequencies f1_1_2 to f1_M_2”, ... and “M resonant frequencies f1_1_k to f1_M_k” constitutes “M second resonant frequencies”.

[0386] Furthermore, in this embodiment of the present invention, the amounts of change in resonant frequency Δf_1 to Δf_M when step S14 in FIG. 18 is executed for all of i=1 to M constitute "M amounts of change in resonant frequency."

[0387] Furthermore, in an embodiment of the present invention, when step S23 in FIG. 23 is executed for all i = 1 to M, received signals R0(t)_1 to R0(t)_M, R1(t)_1 to R1(t)_M constitute "M received signals," received signals R0(t)_1 to R0(t)_M constitute "M first received signals," and received signals R1(t)_1 to R1(t)_M constitute "M second received signals."

[0388] Furthermore, in this embodiment of the present invention, the resonant frequencies f0(t)_1 to f0(t)_M obtained when step S24 in FIG. 23 is executed for all of i=1 to M constitute "M first resonant frequencies."

[0389] Furthermore, in this embodiment of the present invention, the resonant frequencies f1(t)_1 to f1(t)_M obtained when step S25 in FIG. 23 is executed for all of i=1 to M constitute "M second resonant frequencies."

[0390] Furthermore, in this embodiment of the present invention, the amounts of change in resonant frequency Δf(t)_1 to Δf(t)_M when step S26 in FIG. 23 is executed for all of i=1 to M constitute "M amounts of change in resonant frequency."

[0391] Furthermore, in an embodiment of the present invention, when step S23A of Figure 28 is executed for all i = 1 to M, the received signals R0_SPM_SC(t)_1 to R0_SPM_SC(t)_M, R1_SPM_SC(t)_1 to R1_SPM_SC(t)_M constitute "M received signals," the received signals R0_SPM_SC(t)_1 to R0_SPM_SC(t)_M constitute "M first received signals," and the received signals R1_SPM_SC(t)_1 to R1_SPM_SC(t)_M constitute "M second received signals."

[0392] Furthermore, in an embodiment of the present invention, when step S24A of FIG. 28 is executed for all i=1 to M, the flowchart of FIG. 29 is executed for all i=1 to M, so that the resonant frequencies f0_j_1 to f0_j_M when step S34 of FIG. 29 is executed for all i=1 to M constitute "M first resonant frequencies", the "resonant frequencies {f1_j_1}_1 to {f1_j_M}_1" to "resonant frequencies {f1_j_1}_k to {f1_j_M}_k" respectively when step S35 of FIG. 29 is executed for all i=1 to M constitute "M second resonant frequencies", and the changes in resonant frequencies Δf_j_1 to Δf_j_M when step S36 of FIG. 29 is executed for all i=1 to M constitute "changes in M ​​resonant frequencies".

[0393] Furthermore, in this embodiment of the present invention, the received signals R0_SPM_SC(t)_i and R1_SPM_SC(t)_i are “n m (n mThe received signals R0_SPM_SC(t)_1 to R0_SPM_SC(t)_M, R1_SPM_SC(t)_1 to R1_SPM_SC(t)_M when step S23A of FIG. 28 is executed for all i = 1 to M constitute "a superimposed received signal consisting of a superimposed vibration waveform in which i = 1 to M) vibration waveforms are superimposed, the received signals R0_SPM_SC(t)_1 to R0_SPM_SC(t)_M constitute "M superimposed received signals", the received signals R1_SPM_SC(t)_1 to R1_SPM_SC(t)_M constitute "M first superimposed received signals", and the received signals R1_SPM_SC(t)_1 to R1_SPM_SC(t)_M constitute "M second superimposed received signals".

[0394] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims, not by the description of the embodiments described above, and is intended to include all modifications within the meaning and scope of the claims. [Industrial Applicability]

[0395] The present invention is applicable to a detection device and a detection method. [Explanation of symbols]

[0396] 1, 1A transmitter / receiver, 2 detection circuit, 3-1 to 3-M, 3-1A, 3-1B, 4-1 to 4-M, 4-1A, 4-1B detection element, 10, 10A, 10B, 10C detection device, 11 main body, 12 transmitting antenna, 13 receiving antenna, 14 to 16 cable, 21 to 23 board, 24 transducer, 17, 25 to 28 antenna, 30 needle member, 41, 42, 51, 52 connection member, 211, 231 recess, 211A, 231A bottom surface, 212, 212A, 232, 232a, 232b, 232c, 232A support member, 213, 214 flow path, 215 inlet, 216 outlet, 233 liquid supply / waste port, 400 base.

Claims

1. M (M is an integer equal to or greater than 2) detection elements each including a transducer, a first receiving antenna, and a first transmitting antenna; The number of the transducers included in each of the M detection elements is n １ , n ２ , ..., n Ｍ (n １ , n ２ , ..., n Ｍ where each of N is an integer of 2 or more, and N=n １ +n ２ +...+n Ｍ a transmitting / receiving device including a generating circuit that generates an electromagnetic field that vibrates each of the M oscillators at a resonant frequency, a second transmitting antenna that wirelessly feeds the electromagnetic field generated by the generating circuit to the M first receiving antennas in the M detecting elements, and a second receiving antenna that wirelessly receives the M receiving signals in the M detecting elements from the M first transmitting antennas in the M detecting elements; a detection circuit that detects a detection target based on the M reception signals received by the second reception antenna, Each of the M received signals has a vibration waveform that vibrates at the resonant frequency of 50 MHz or more, The M first receiving antennas receive the electromagnetic field wirelessly fed from the second transmitting antenna, and each of the M first receiving antennas transmits an oscillating electric field based on the received electromagnetic field to the n １ The n transducers ２ vibrators, ..., and the n Ｍ Apply to each transducer, The n １ The n transducers ２ vibrators, ..., and the n Ｍ the transducers are supported so as to be capable of vibrating at the resonant frequency, and generate the M reception signals when the oscillating electric field is applied thereto; The M first transmitting antennas are １ The n transducers ２ vibrators, ..., and the n Ｍ transmitting the M reception signals generated by the M transducers to the second reception antenna by wireless; the detection circuit performs a detection process for detecting the detection target by detecting an amount of change in the resonant frequency in one of the M reception signals based on the M reception signals received by the second reception antenna, for all of the M reception signals; In each of the M detection elements, the n m (n m is an integer of 2 or more, m is any of 1 to M) transducers generate, as the reception signal, a superimposed vibration waveform in which the n m (n m is an integer of 2 or more, m is any of 1 to M) vibration waveforms that respectively vibrate at the n m (n m is an integer of 2 or more, m is any of 1 to M) mutually different resonant frequencies are superimposed; In each of the M detector elements, the first transmitting antenna wirelessly transmits the superimposed receiving signal as the receiving signal to the second receiving antenna; the detection circuit detects the n m (n m is an integer of 2 or more, m is any one of 1 to M) vibration waveforms based on one of the M superimposed received signals, which are the M received signals received by the second receiving antenna, and executes the detection process based on one of the detected n m (n m is an integer of 2 or more, m is any one of 1 to M) vibration waveforms for all of the n m (n m is an integer of 2 or more, m is any one of 1 to M) vibration waveforms to detect mutually different n m (n m is an integer of 2 or more, m is any one of 1 to M) detection objects for all m = 1 to M, thereby detecting mutually different N (N is an integer of 2 or more) detection objects; A detection device, wherein the M detection elements are arranged at different positions from each other in a region where an electromagnetic field EW from the second transmitting antenna reaches.

2. The n １ The n transducers ２ vibrators, ..., and the n Ｍ When the oscillators are respectively a first oscillator, a second oscillator, . . . , and an M-th oscillator, The M reception signals include M first reception signals in the M detection elements, which are composed of a first vibration waveform when the first transducer, the second transducer, ..., and the M transducer vibrate due to the oscillating electric field, and M second reception signals in the M detection elements, which are composed of a second vibration waveform when the first transducer, the second transducer, ..., and the M transducer vibrate due to the influence of the detection object, the second receiving antenna receives the M second received signals after receiving the M first received signals; The detection circuit includes: Executing a process of obtaining M first resonant frequencies of the first transducer, the second transducer, ..., and the M transducer based on the M first received signals; Executing a process of obtaining M second resonant frequencies of the first transducer, the second transducer, ..., and the M transducer based on the M second received signals; a process of calculating a change amount of a resonance frequency obtained by subtracting the second resonance frequency from the first resonance frequency for all of the M first and second resonance frequencies to calculate a change amount of the M resonance frequencies; The detection device according to claim 1 , further comprising: a process for detecting an object to be detected based on the amount of change in one of the resonant frequencies for all of the M amounts of change in the resonant frequencies, thereby executing a process for detecting an object to be detected in the M detection elements.

3. In each of the M detector elements, the first receiving antenna and the first transmitting antenna are each composed of a first antenna member that is a single antenna; the second transmitting antenna and the second receiving antenna are each a second antenna member that is a single antenna different from the first antenna member; the second antenna member wirelessly feeds the electromagnetic field generated by the generating circuit to the M first antenna members in the M detection elements for a certain period of time, and after stopping the wireless feeding of the electromagnetic field to the M first antenna members, wirelessly receives the M reception signals from the M first antenna members; In the M detection elements, the M first antenna members receive the electromagnetic field wirelessly fed by the second antenna member, and transmit the oscillating electric field based on the received electromagnetic field for the certain period of time to the n １ The n transducers ２ vibrators, ..., and the n Ｍ The n oscillators are each applied with the oscillating electric field. １ The n transducers ２ vibrators, ..., and the n Ｍ After the application of the voltage to the vibrators is stopped, １ The n transducers ２ vibrators, ..., and the n Ｍ 3. The detection device according to claim 1, wherein the M reception signals generated by the M transducers are wirelessly transmitted to the second antenna member.

4. 4. The detection device according to claim 3, wherein the first antenna member has a rod shape or a spiral shape in a plane opposite to a plane of the transducer.

5. In each of the M detector elements, the first receive antenna is made up of a first antenna member that is an antenna, and the first transmit antennas are each different from the first antenna member and include n ｍ (m is any one of 1 to M) ｍ (m is an integer from 1 to M) second antenna members; the second transmitting antenna comprises a third antenna member; the second receiving antenna comprises a fourth antenna member different from the third antenna member; the third antenna member wirelessly supplies the electromagnetic field generated by the generating circuit to the M first antenna members in the M detection elements; The fourth antenna member transmits the M received signals to the M detection elements. １ the second antenna members, n ２ the second antenna members, ..., and n Ｍ receiving the signal wirelessly from the second antenna members; In each of the M detection elements, the first antenna member receives the electromagnetic field wirelessly fed by the third antenna member, and transmits the oscillating electric field based on the received electromagnetic field to the n ｍ (m is any value from 1 to M) transducers are applied with In each of the M detection elements, ｍ (m is any one of 1 to M) second antenna members ｍ 3. The detection device according to claim 1, wherein reception signals generated by m transducers (m being any of 1 to M) are wirelessly transmitted to the fourth antenna member.

6. the first antenna member has a rod shape or a spiral shape in a plane opposite to a plane of the transducer; The n ｍ 6. The detection device according to claim 5, wherein each of the (m is any value between 1 and M) second antenna members is rod-shaped or spiral-shaped in a plane opposite to the plane of the transducer.

7. 2. The detection device according to claim 1, wherein the N (N is an integer of 2 or more) detection objects include at least two of stress, pressure, gas, biological material, and temperature.

8. The detection apparatus according to claim 1 , wherein the M detection elements are installed in a building that is inaccessible to humans.

9. The detection device according to claim 1 , wherein the M detection elements are installed inside a structure.

10. The detection device according to claim 1 , wherein the M detection elements are placed inside a living body.

11. Each of the M detection elements A substrate including a space having a first surface and a second surface opposite to the first surface; a first support member protruding from the first surface of the space toward the second surface; a second support member protruding from the second surface of the space toward the first surface; the first transmitting antenna and the first receiving antenna disposed on at least one of the first and second surfaces in the space; The n antennas are arranged in contact with the first transmitting antenna and / or the first receiving antenna so as to be vibrated in the space. ｍ (m is any one of 1 to M) transducers, The first support member or the second support member is ｍ (m is any one of 1 to M) so as to prevent the n transducers from contacting the first surface or the second surface. ｍ 11. A detection device according to any one of claims 1 to 10, which supports transducers (m being any value from 1 to M).

12. The number of transducers included in each of M (M is an integer of 2 or more) detection elements is n １ , n ２ , ..., n Ｍ (n １ , n ２ , ..., n Ｍ where each of N is an integer of 2 or more, and N=n １ +n ２ +...+n Ｍ A first step of wirelessly feeding an electromagnetic field that vibrates each of the M transducers at a resonant frequency to the M transducers by a transmitting antenna; The n １ The n transducers ２ vibrators, ..., and the n Ｍ a second step of receiving, from the M detection elements by a receiving antenna, M reception signals each having a vibration waveform in which the vibrators vibrate at a resonance frequency of 50 MHz or more in response to application of an oscillating electric field based on the electromagnetic field; a third step of detecting an object to be detected by detecting an amount of change in the resonant frequency in one of the M received signals based on the M received signals using a detection circuit, for all of the M received signals; In each of the M detection elements, the n m (n m is an integer of 2 or more, and m is any one of 1 to M) transducers are composed of a plurality of transducers having mutually different resonant frequencies; A detection method in which the M detection elements are arranged at different positions from each other in a region reached by an electromagnetic field EW from the transmitting antenna.

13. The n １ The n transducers ２ vibrators, ..., and the n Ｍ When the oscillators are respectively a first oscillator, a second oscillator, . . . , and an M-th oscillator, The M reception signals include M first reception signals in the M detection elements, which are composed of a first vibration waveform when the first transducer, the second transducer, ..., and the M transducer vibrate due to the oscillating electric field, and M second reception signals in the M detection elements, which are composed of a second vibration waveform when the first transducer, the second transducer, ..., and the M transducer vibrate due to the influence of the detection object, In the second step, after the M first received signals are received by the receiving antennas, the M second received signals are received by the receiving antennas; The third step includes: a first sub-step of executing, by the detection circuit, a process of determining M first resonant frequencies of the first transducer, the second transducer, ..., and the M transducer based on the M first received signals; a second sub-step of executing, by the detection circuit, a process of determining M second resonant frequencies of the first transducer, the second transducer, ..., and the Mth transducer based on the M second received signals; a third sub-step of executing, by the detection circuit, a process of calculating a change amount of a resonance frequency obtained by subtracting the second resonance frequency from the first resonance frequency for all of the M first and second resonance frequencies to calculate a change amount of the M resonance frequencies; and a fourth substep of detecting the detection target object based on the amount of change in one of the resonant frequencies for all of the M amounts of change in the resonant frequencies by the detection circuit, thereby detecting the detection target object in the M detection elements.

14. The detection method according to claim 12 or 13, wherein in the first step, the electromagnetic field is superimposed on a carrier wave having a frequency higher than a resonant frequency of the transducer, and power is wirelessly supplied to the M detection elements.

15. In the first step, the electromagnetic field is wirelessly fed to the M detection elements for a certain period of time by a transmitting / receiving antenna which constitutes the transmitting antenna and the receiving antenna and is a single antenna; The detection method according to claim 12 , wherein in the second step, the M received signals are received by the transmitting / receiving antennas after the certain period has elapsed.

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