Posture change device and film forming device

Abstract

To provide a technique that prevents dust from being attached to a substrate.SOLUTION: An attitude changing device changes the attitude of a substrate carrier and comprises rotating means that rotates the substrate carrier, and the rotating means includes a plurality of rollers that are arranged to sandwich the substrate carrier, and a dust collection cover that is provided on at least one of the plurality of rollers and individually surrounds the roller. The dust collection cover includes a regulation wall part that, when the rotating means rotates the substrate carrier, regulates dust from moving from a bottom part side to a top part side of the dust collection cover.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to an apparatus for varying the attitude of a substrate carrier. [Background technology]

[0002] In the manufacture of organic EL displays and the like, deposition materials such as organic materials and metal materials are deposited on a substrate. Depending on the process, it may be necessary to turn the substrate upside down, so a device for changing the position of the substrate is provided between the processing devices (Patent Document 1, etc.). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2015-0100999 Summary of the Invention [Problem to be solved by the invention]

[0004] In a system in which a substrate is loaded onto a substrate carrier and transported, the substrate is turned upside down together with the substrate carrier. When the attitude of the substrate carrier is changed, it is undesirable for dust (particles) to fly off and adhere to the substrate.

[0005] The present invention provides a technique for preventing dust from adhering to a substrate. [Means for solving the problem]

[0006] According to the present invention, A posture changing device for changing the posture of a substrate carrier, comprising: a rotating means for rotating the substrate carrier; The rotating means is A plurality of rollers arranged to sandwich the substrate carrier; a dust collection cover provided on at least one of the rollers and surrounding the roller individually; The dust collection cover is A top portion where the peripheral surface of the roller is exposed; a bottom portion formed to face the peripheral surface of the roller; a restricting wall portion disposed apart from the bottom portion and restricting dust on the bottom portion from moving to the top portion when the rotating means rotates the substrate carrier; A posture change device is provided. Effect of the Invention

[0007] According to the present invention, it is possible to provide a technique for preventing dust from adhering to a substrate. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a layout diagram of a film forming apparatus according to an embodiment of the present invention. [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] 1A and 1B are diagrams illustrating the operation of the posture changing device. [Figure 6] 1A and 1B are diagrams illustrating the operation of the posture changing device. [Figure 7] 1A and 1B are diagrams illustrating the operation of the posture changing device. [Figure 8] FIG. [Figure 9] 5A to 5C are explanatory diagrams showing how the position of the dust-collection cover changes when the holding unit is rotated. [Figure 10] 13A to 13C are explanatory diagrams showing how the attitude of a dust collection cover of another embodiment is changed. [Figure 11] (A) is an overall view of an organic EL display device, and (B) is a diagram showing the cross-sectional structure of one pixel. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] First Embodiment <Overview of the deposition equipment> FIG. 1 is a layout diagram of a film forming apparatus 1 according to one embodiment of the present invention. In each drawing, arrow Z indicates the up-down direction (the direction of gravity), and arrows X and Y indicate horizontal directions perpendicular to each other. The film forming apparatus 1 is an apparatus that forms a film of a deposition material on a substrate G, and forms a thin film of the deposition material in a predetermined pattern using a mask M. In particular, the film forming apparatus 1 of this embodiment is an in-line type film forming apparatus that can execute a film forming method in which a deposition material is deposited on the substrate G by a deposition device while the substrate G is being transported.

[0011] The material of the substrate G on which the film is formed in the film forming apparatus 1 can be appropriately selected from materials such as glass, resin, and metal, and a resin layer such as polyimide formed on glass is preferably used. The deposition material is an organic material or an inorganic material (metal, metal oxide, etc.). The film forming apparatus 1 can be applied to a manufacturing apparatus for manufacturing electronic devices such as display devices (flat panel displays, etc.), thin-film solar cells, and organic photoelectric conversion elements (organic thin-film imaging elements), and optical members, and is particularly applicable to a manufacturing apparatus for manufacturing organic EL panels.

[0012] The film forming apparatus 1 is an apparatus that transports a substrate G and a mask M using a substrate carrier 100. The substrate carrier 1 includes, for example, a mechanism for holding the substrate G and a mechanism for holding the mask M. The mechanism for holding the substrate G is, for example, an electrostatic chuck, and the mechanism for holding the mask M is, for example, a magnetic adsorption chuck. The mask M is held by the substrate carrier 1 so as to overlap the substrate G, and the substrate G is held between the substrate carrier 100 and the mask M. The substrate carrier 100, the substrate G, and the mask M are each in a plate-like form, and are transported in a horizontal position.

[0013] The substrate carrier 100 is transported cyclically (counterclockwise in the illustrated example) between the film formation path 1A and the return path 1B. In this embodiment, the transport mechanism is a roller conveyor. The film formation path 1A is provided with a substrate loading chamber 110. A substrate G to be film-formed is loaded into the substrate loading chamber 110 from outside the film formation apparatus 1, and is stacked and held on the substrate carrier 100 loaded into the substrate loading chamber 110 from a direction switching device 125 of the return path 1B. The substrate carrier 100 holding the substrate G is transported to a posture changing device 111, and its posture is changed by the posture changing device 111. In this embodiment, the substrate carrier 100 is inverted 180 degrees from a posture in which the substrate G is held above the substrate carrier 100 to a posture in which the substrate G is held below the substrate carrier 100.

[0014] The substrate carrier 100 whose posture has been inverted is transported to an alignment chamber 112. In the alignment chamber 112, the mask M transported from the return path 1B is aligned with the substrate G held by the substrate carrier 100, and the mask M is held by the substrate carrier 100. The substrate carrier 100 (100GM) holding the substrate G and the mask M is accelerated to a predetermined transport speed in an acceleration chamber 113 and transported to an evaporation device 114. Here, an evaporation material is deposited on the substrate G. Thereafter, the substrate carrier 100 (100GM) holding the substrate G and the mask M on which the deposition has been performed is decelerated in a deceleration chamber 115, and the mask M is separated from the substrate carrier 100 in a separation chamber 116. The separated mask M is transported to a mask mounting chamber 121 on the return path 1B.

[0015] The posture of the substrate carrier 100 from which the mask M has been separated is changed in the posture changing device 117. In this embodiment, the substrate carrier 100 is inverted 180 degrees from a posture in which the substrate G is held below the substrate carrier 100 to a posture in which the substrate G is held above the substrate carrier 100. The substrate carrier 100 is then transported to a substrate separation chamber 118, where the substrate G is separated from the substrate carrier 100. The separated substrate G is discharged from the film forming apparatus 1.

[0016] The substrate carrier 100 from which the substrate G has been separated is transported to a direction switching device 119 on the return path 1B. The posture of the substrate carrier 100 is changed in a posture changing device 120. The substrate carrier 100 is turned 180 degrees so that it is upside down. The substrate carrier 100 is transported to a mask mounting chamber 121, where the mask M is held by the substrate carrier 100. The substrate carrier 100 (100M) holding the mask M is transported by a transport device 122 to a mask separation chamber 123, where the mask M is separated from the substrate carrier 100. The separated mask M is transported to an alignment chamber 112.

[0017] After the mask M is separated from the substrate carrier 100, its position is changed by the position changing device 120. The substrate carrier 100 is turned 180 degrees so that it is upside down. The substrate carrier 100 is then transported to the substrate loading chamber 110 via the direction switching device 125. The above process is repeated to sequentially perform the film formation processes.

[0018] <Vapor deposition equipment> 2 is an explanatory diagram of the deposition apparatus 114. The deposition apparatus 114 includes a transfer chamber 2 forming a transfer chamber 2a for transferring a substrate carrier 100 holding a substrate G and a mask M, and a plurality of source chambers 3. The plurality of source chambers 3 are arranged in the X direction, and the transfer chamber 2a is located above these source chambers 3.

[0019] The transfer chamber 2a is maintained at a vacuum during use, and is provided with an inlet 2b at one end in the X direction and an outlet 2c at the other end. A substrate carrier 100 holding a substrate G and a mask M is loaded into the transfer chamber 2a through the inlet 2b, and after processing is unloaded from the outlet 2c to the outside. Gate valves (not shown) are provided at the inlet 2b and the outlet 2c.

[0020] The transport chamber 2a is provided with a plurality of transport rollers 2d arranged in the X direction. The transport rollers 2d are arranged in two rows spaced apart in the Y direction. Each transport roller 2d rotates around a rotation axis in the Y direction. The substrate carrier 100 is placed at both ends in the Y direction on the two rows of transport rollers 2d, and is transported in the X direction in a horizontal position by the rotation of the transport rollers 2d.

[0021] Each source chamber 3a forms an internal space that is maintained at a vacuum during use. The source chamber 3a has a box shape with an opening formed at the top, and the transfer chamber 2a and the internal space of the source chamber 3a communicate with each other through the opening. Each source chamber 3a is provided with a deposition source 3a that emits a deposition material upward. The deposition source 3a in this embodiment is a so-called line source, and is extended in the Y direction. The deposition source 3a includes a crucible that contains the raw material of the deposition material, a heater that heats the crucible, and the like, and heats the raw material to emit the deposition material, which is its vapor, into the transfer chamber 2a.

[0022] The deposition apparatus 114 deposits a deposition material on the substrate G by the deposition source 3a while transporting the substrate carrier 100 holding the substrate G and the mask M in the transport chamber 2. In this embodiment, a plurality of source chambers 3 are arranged in the transport direction of the substrate carrier 100. When different types of deposition materials are released from the three source chambers 3, the different deposition materials can be continuously deposited on the substrate G. Note that the number of source chambers 3 is not limited to three, and may be one, two, or four or more.

[0023] <Posture change device> The attitude changing device 111 will be described with reference to Figs. 3 and 4. Fig. 3 is a view of the internal structure of the attitude changing device 111 as viewed in the Y direction, and Fig. 4 is a view as viewed in the X direction. The attitude changing device 111 includes a chamber 4 forming an internal space maintained in a vacuum during use, a plurality of transport units 5 arranged in the chamber 4, a holding unit 6 arranged in the chamber 4, a rotation unit 8 that rotates the holding unit 6 from outside the chamber 4, and a moving unit 9 that moves each transport unit 5 in the Y direction from outside the chamber 4. For convenience, the holding unit 6 is expressed separately from the rotation unit 8, but the holding unit 6 and the rotation unit 8 may be integrated to constitute a means for rotating the substrate carrier 100.

[0024] The chamber 4 has an inlet 4a at one end in the X direction and an outlet 4b at the other end, and the substrate carrier 100 holding the substrate G and mask M is loaded into the chamber 4 through the inlet 4a and, after changing its attitude, is unloaded to the outside through the outlet 4b. The inlet 2b and the outlet 2c are provided with gate valves 4c and 4d for opening and closing them.

[0025] A plurality of transport units 5 are provided spaced apart in the X and Y directions. Each transport unit 5 includes a plurality of transport rollers 5a arranged in the X direction, and a drive source such as a motor that rotates the transport rollers 5a. Each transport roller 5a is supported in a cantilevered state and rotates around a rotation axis in the Y direction. The substrate carrier 100 has both ends in the Y direction placed on two rows of transport rollers 5a spaced apart in the Y direction, and is transported in a horizontal position in the X direction by the rotation of the transport rollers 5a.

[0026] Each transport unit 5 is moved parallel to the Y direction (the roller axial direction of the transport roller 5a) by the moving unit 9 between a transport position indicated by a two-dot chain line in Fig. 4 and a retreat position indicated by a solid line. The transport position is a position on the central side of the attitude changing device 111 in the Y direction, and the retreat position is a position on the outer side in the Y direction. Each transport unit 5 transports the substrate carrier 100 at the transport position. The retreat position is a position where interference between the transport unit 5 and the holding unit 6 or the rotating unit 8 during rotation is avoided.

[0027] The moving unit 9 includes a drive mechanism 90 and an operating shaft 91. The drive mechanism 90 includes an actuator such as an electric cylinder that moves the operating shaft 91 back and forth in the Y direction, and is disposed outside the chamber 4. The operating shaft 91 passes through an opening (not shown) formed in a side wall of the chamber 4 and extends inside and outside the chamber 4. The seal structure 92 has a cylindrical structure such as a bellows, and seals the opening formed in the side wall of the chamber 4 and the operating shaft 91 to maintain airtightness inside the chamber 4.

[0028] The holding unit 6 has a pair of base members 60 spaced apart in the Y direction. Each base member 60 is a plate-shaped member along the XZ plane. The pair of base members 60 are connected by multiple beam members 60a, and rotate together around a rotation center line 81a.

[0029] The holding unit 6 includes a plurality of holding rollers 63 that hold the substrate carrier 100 by sandwiching it between them. The plurality of holding rollers 63 form four roller rows arranged in the X direction. The four roller rows are divided into two roller rows spaced apart in the Y direction, and the two roller rows are vertically spaced apart.

[0030] Each roller row is supported by a roller support member 61 or 62 so as to be freely rotatable around a rotation axis in the Y direction. Two roller support members 61 are provided, and are located on the upper side in the example of Figs. 3 and 4. The two roller support members 61 are spaced apart in the Y direction, and the holding rollers 63 supported by the roller support members 61 are supported in a cantilevered state on the inner side surface of the roller support members 61. Two roller support members 62 are also provided, and are located on the lower side in the example of Figs. 3 and 4. The two roller support members 62 are spaced apart in the Y direction, and the holding rollers 63 supported by the roller support members 62 are supported in a cantilevered state on the inner side surface of the roller support members 62.

[0031] The roller support members 61 and 62 are supported by the base member 60 via a plurality of guide units 65 so as to be movable (lifted) in the Z direction. The guide unit 65 is, for example, an extendable guide mechanism, and has a cylinder fixed to the base member 60 and a rod supported by the cylinder so as to be movable back and forth in the Z direction, and the roller support members 61 and 62 are fixed to the rod. A lifting unit 64 is provided between the base member 60 and the roller support members 61 and 62. The lifting unit 64 in this embodiment is an actuator that extends and retracts in the Z direction, for example an electric cylinder. The roller support members 61 and 62 can be raised and lowered relative to the base member 60 by the extension and contraction of the lifting unit 64.

[0032] The substrate carrier 100 is supported by a plurality of holding rollers 63 supported by roller support member 61 and a plurality of holding rollers 63 supported by roller support member 62, sandwiching the end of the substrate carrier 100 in the Y direction. In the example of Figures 3 and 4, the plurality of holding rollers 63 supported by roller support member 61 are located on one surface side (upper side) of the substrate carrier 100, and the plurality of holding rollers 63 supported by roller support member 62 are located on the other surface side (lower side) of the substrate carrier 100, and the substrate carrier 100 can be supported by being sandwiched vertically by these holding rollers 63.

[0033] It is undesirable that dust (particles) fly up due to the rotation of the holding rollers 63 and adhere to the substrate G. In this embodiment, each holding roller 63 is individually surrounded by a dust collection cover 7. The dust collection cover 7 will be described in detail later.

[0034] Each base member 60 is also provided with stoppers 66A and 66B. In the example of FIG. 3 and FIG. 4, the stopper 66A is located on the side of the entrance 4a, and the stopper 66B is located on the side of the entrance 4b. Each of the stoppers 66A and 66B includes a roller 69, a swing arm 68 that rotatably supports the roller 69, and an actuator 67 such as a motor that rotates the swing arm 68. The actuator 67 is fixed to the base member 60, and the roller 69 is supported by the swing arm 68 so as to be freely rotatable about a rotation axis in the Y direction. By rotating the swing arm 68, the roller 69 is moved between an operating position on the transport path of the substrate carrier 100 and a retracted position shown in FIG. 3 and FIG. 4. At the operating position, the end face of the substrate carrier 100 abuts against the peripheral surface of the roller 69, thereby restricting the substrate carrier 100 from being displaced in the substrate surface direction. Furthermore, when the rollers 69 are moved from the retracted position to the operating position, the peripheral surfaces of the rollers 69 can press against the end faces of the substrate carriers 100 to move the substrate carriers 100 to the holding position.

[0035] In this manner, in the holding unit 6 of this embodiment, two sets of mechanisms (base member 60, roller support members 61 and 62, rollers 63, lifting units 64, guide units 65, and stoppers 66A and 66B) are arranged spaced apart in the Y direction. The holding unit 6 is configured to be rotatable by the rotating unit 8 about a rotation center line 81a in the Y direction.

[0036] The rotation unit 8 includes a drive unit 80A and a driven unit 80B. Each of the units 80A and 80B includes a rotation shaft 81 that is coaxially arranged on a rotation center line 81a. Each rotation shaft 81 passes through an opening (not shown) formed in a side wall of the chamber 4 and extends inside and outside the chamber 4, with one rotation shaft 81 fixed to one of the two base members 60 and the other rotation shaft 81 fixed to the other base member 60. The seal structure 82 has a cylindrical structure such as a bellows, and seals the opening formed in the side wall of the chamber 4 and the rotation shaft 81 to maintain airtightness inside the chamber 4.

[0037] The unit 80A includes a motor which is a drive source for rotating the rotating shaft 81, and a reducer which reduces the rotation of the motor and transmits it to the rotating shaft 81. The unit 80B includes a bearing which supports the rotating shaft 81 rotatably.

[0038] The operation of the attitude changing device 111 will be described with reference to Figures 5(A) to 7(B). Figure 5(A) shows the stage where the substrate carrier 100 holding the substrate G has been carried into the attitude changing device 111. The substrate G is held on the upper side of the substrate carrier 100. Each transport unit 5 is located at the transport position, and the substrate carrier 100 is transported on the transport rollers 5a. Each holding roller 63 is separated from the substrate carrier 100. The roller 69 of the stopper 66B is located at the operating position.

[0039] 5(B) shows a state where loading of the substrate carrier 100 is completed. The gate valves 4c and 4d close the loading entrance 4a and the unloading exit 4b, respectively. The lower lifting unit 64 raises the roller support member 62. As a result, the substrate carrier 100 comes into contact with the multiple holding rollers 63 supported by the roller support member 62, and is lifted upward from the transport unit 5. The substrate carrier 100 is then sandwiched from below by the multiple holding rollers 63 supported by the roller support member 62, and from above by the multiple holding rollers 63 supported by the roller support member 61.

[0040] As shown in FIG. 6A, the stopper 66A is driven, and the roller 69 of the stopper 66A is moved to the operating position. The roller 69 abuts against the end face of the substrate carrier 100 and presses the substrate carrier 100 in the X direction. The substrate carrier 100 moves in the X direction to the right in FIG. 6A to a position where it abuts against the roller 69 of the stopper 66B. When the substrate carrier 100 moves, the holding roller 63 rolls according to the movement of the substrate carrier 100. The substrate carrier 100 is sandwiched between the holding rollers 63 in its normal direction (Z direction at this stage) to restrict its displacement, and is restricted in its planar direction (X direction at this stage) by the rollers 69 of the stoppers 66A and 66B. Next, the moving unit 9 is driven to move each transport unit 5 to a retreat position. As a result, each transport unit 5 moves to a position outside the base member 60 where it does not interfere with the holding unit 6, as shown in FIG. 4.

[0041] The rotation unit 8 is driven to rotate the holding unit 6 as shown in FIG. 6B. The substrate carrier 100 does not fall because the displacement in the normal direction and the surface direction is restricted by the holding unit 6. FIG. 7A shows the state after the rotation is completed. The holding unit 6 rotates 180 degrees and is reversed in the Z direction and the X direction from the state shown in FIG. 6A. Since the roller support unit 62 is located on the upper side and the roller support unit 61 is located on the lower side, the positions (upper or lower) of the multiple holding rollers 63 supported by the roller support unit 61 and the multiple holding rollers 63 supported by the roller support unit 62 relative to the substrate carrier 100 are switched before and after the rotation. In addition, the stopper 66B is located on the side of the entrance 4a and the stopper 66A is located on the side of the exit 4b, and the positions of the stopper 66A and the stopper 66B are also switched before and after the rotation. The substrate carrier 100 is also inverted in the Z and X directions, and the substrate G is held under the substrate carrier 100. By driving the moving unit 9, each transport unit 5 moves from the retreat position to the transport position.

[0042] Thereafter, the lower elevating unit 64 lowers the roller support member 61. As a result, the substrate carrier 100 is placed on the transfer unit 5, and each holding roller 63 is separated from the substrate carrier 100. The roller 69 of the stopper 66A is moved from the operating position to the retracted position. The gate valves 4c and 4d open the loading port 4a and the unloading port 4b. FIG. 7(B) shows the stage of unloading the substrate carrier 100. The substrate carrier 100 is unloaded in the X direction by driving the transfer unit 5. At the time of loading, the substrate carrier 100, on which the substrate G was held on the upper side, is unloaded in a state where it has changed (been inverted) to a posture in which the substrate G is held on the lower side.

[0043] Thereafter, when the roller 69 of the stopper 66B is returned to the retracted position and the roller 69 of the stopper 66A is moved to the operating position, the state of the posture changing device 111 becomes substantially the same as the stage of FIG. 5(A) except that the up and down and front and back of the holding unit 6 are inverted, and the next substrate carrier 100 can be loaded. The subsequent operations of the posture changing device 111 are substantially the same as the operations described with reference to FIGS. 5(A) to 7(B), and the posture change of the sequentially loaded substrate carriers 100 can be repeated.

[0044] <Dust collection cover> The structure of the dust collection cover 7 will be described with reference to FIG. 8. FIG. 8 is an exploded perspective view of the dust collection cover 7. The posture of the dust collection cover 7 in FIG. 8 corresponds to the posture of each dust collection cover 7 supported by the roller support member 62 in the posture of the holding unit 6 shown in FIG. 5(A), and the posture of each dust collection cover 7 supported by the roller support member 61 corresponds to the inverted posture thereof.

[0045] The dust collection cover 7 is a box-shaped member that captures dust generated by the rotation of the holding roller 63 and suppresses it from scattering to the outside. The dust collection cover of the present embodiment includes a main body portion 7A and a separation portion 7B that is detachably attached to the main body member 7A. By fixing the main body portion 7A to the roller support member 61 or 62, the dust collection cover 7 is supported by the roller support member 61 or 62.

[0046] The dust collection cover 7 includes a bottom portion 70 and a top portion 71 which are in a vertical relationship in the Z direction, a left side portion 72 and a right side portion in the X direction as the left-right direction, and a front portion 73 on the front side in the Y direction as the front-rear direction. Note that the rear portion of the dust collection cover 7 in this embodiment, which is the rear side in the front-rear direction, is formed by the roller support member 61 or 62. However, the dust collection cover 7 may have its own rear portion.

[0047] The top part 71 is formed by the left and right top walls 71a, 71a of the main body part 7A. The left and right top walls 71a, 71a are inclined in opposite directions to form a roof shape, and a gap 71b is formed between the left and right top walls 71a. A part of the peripheral surface 63a of the holding roller 63 is exposed to the outside through the gap 71b, and the exposed part of the peripheral surface 63a abuts against the substrate carrier 100. In this embodiment, the top part 71 has the left and right top walls 71a, 71a, and is in a form that partially covers the peripheral surface 63a of the holding roller 63, but the top part 71 may be in a form that is entirely open. However, according to this embodiment, the dust capture performance and scattering prevention performance can be improved. Also, in this embodiment, the left and right top walls 71a are inclined, but they may be horizontal. However, according to this embodiment, the exposure of the peripheral surface 63a of the holding roller 63 can be reduced, and the dust capture performance and scattering prevention performance can be improved.

[0048] The bottom 70 and the left and right side portions 72 are walls formed by the main body 7A, with the bottom 70 being a horizontal plate and the left and right side portions 72 being vertical plate portions standing upright from the bottom 70. The bottom 70 and the left and right side portions 72 are positioned around the peripheral surface 63a of the retaining roller 63 and face the peripheral surface 63a. A permanent magnet 74 is disposed on the bottom 70 and attracts ferromagnetic dust such as iron powder, improving the capturing performance.

[0049] The front part 73 is a wall formed by the separation part 7B, and has a vertical plate shape. The separation part 7B has left and right ears 76 that overlap the left and right side parts 72, and the ears 76 are provided with mounting grooves 76a. The left and right side parts 72 are provided with fixing knobs 77 that are attached to the side parts 72 by a screw structure. When the separation part 7B is attached to the main body part 7A by inserting the middle part of the fixing knob 77 into the mounting grooves 76a and the fixing knob 77 is fastened to the side part 72, the ears 76 are sandwiched between the fixing knob 77 and the side part 72, and the separation part 7B is fixed to the main body part 7A. When the separation part 7B is attached to the main body part 7A in this way, the opening on the front side of the main body part 7A is closed by the front part 73, and the front part 73 faces the end face 63b of the roller 63.

[0050] The separation unit 7B has a tray 75 connected to the front part 73. Dust falls onto and is piled up on the tray 75. The tray 75 is made of a ferromagnetic material such as iron, and when the separation unit 7B is attached to the main body part 7A, the tray 75 overlaps the magnet 74. Ferromagnetic dust such as iron powder on the tray 75 is easily held by the magnetic force of the magnet 74. When the separation unit 7B is removed from the main body part 7A, the tray 75 is also removed from the bottom part 70 at the same time, making it easy to clean the tray 75.

[0051] The left and right side portions 72 are provided with intermediate plates 78 spaced apart from the bottom portion 70 in the Z direction. The left intermediate plate 78 provided on the left side portion 72 is formed so as to protrude toward the right side portion 72, and the right intermediate plate 78 provided on the right side portion 72 is formed so as to protrude toward the left side portion 72. An opening 79 is formed between the left and right intermediate plates 78 in the X direction, and dust falls from the holding roller 63 into the tray 75 and is captured. The intermediate plate 78 has a width similar to the width of the side portion 72 in the Y direction, and divides the internal space of the dust collection cover 7 into the bottom portion 70 side and the top portion 71 side, and functions as a regulating wall portion that regulates the movement of dust accumulated on the bottom portion 70 side to the top portion 71 side when the holding unit 6 rotates and is turned upside down.

[0052] The intermediate plate 78 of this embodiment has a fixed portion 78a which is an end portion on the side of the side portion 72, and an inclined portion 78b which is an end portion on the opposite side. The fixed portion 78a is fixed to the side portion 72 and extends horizontally from the side portion 72. The inclined portion 78b is a portion which extends at an angle from the fixed portion 78a. In this manner, the intermediate plate 78 has a shape in which the end portion on the opposite side to the side of the side portion 72 is curved toward the bottom portion 70. This shape makes it easier for dust to fall from the holding roller 63 to the tray 7, while at the same time, when the holding unit 6 is rotated and turned upside down, it exhibits the effect of making it difficult for dust to return from the tray 7 to the top portion 71.

[0053] In this embodiment, the intermediate plate 78 is curved by the flat fixing portion 78a and the flat inclined portion 78b, but it may be curved in an arc. Also, in this embodiment, the intermediate plate 78 is fixed to the side portion 72, but it may be fixed to the front portion 73.

[0054] 9(A) to 9(C), the state of the dust collection cover 7 when the holding unit 6 rotates will be described. FIG. 9(A) shows a state in which the dust collection cover 7 is in a position in which the top part 71 is on top and the bottom part 70 is on the bottom. The position of the dust collection cover 7 in FIG. 9(A) corresponds to the position of each dust collection cover 7 supported by the roller support member 62 in the position of the holding unit 6 shown in FIG. 5(A). The rollers 63 abut against the lower surface of the substrate carrier 100. When dust is generated by the rotation of the rollers 63, it passes through the opening 79 by gravity and falls onto the tray 75 where it is captured, and the dust 200 is piled up on the tray 75.

[0055] Fig. 9(B) shows the position of the dust collection cover 7 when the holding unit 6 is rotated 90 degrees from the state shown in Fig. 9(A). The rotation of the holding unit 6 also rotates the dust collection cover 7. When a large amount of dust 200 is captured in the tray 75, the dust moves to the end (lower side) of the tray 75 by gravity as shown in Fig. 9(B), and some of the dust may protrude from the tray 75 and overflow onto the side portion 72 that is now in the lower position.

[0056] FIG. 9(C) shows the attitude of the dust collection cover 7 when the holding unit 6 is further rotated 90 degrees from the state of FIG. 9(B), and shows the attitude of the dust collection cover 7 when the holding unit 6 is inverted in the Z direction and the X direction. The dust collection cover 7 is in an attitude in which the top part 71 is down and the bottom part 70 is up. The attitude of the dust collection cover 7 in FIG. 9(C) corresponds to the attitude of each dust collection cover 7 supported by the roller support member 62 in the attitude of the holding unit 6 shown in FIG. 7(A). The roller 63 abuts on the lower surface of the substrate carrier 100. The dust captured in the tray 75 and the dust overflowing onto the side part 72 in the attitude of FIG. 9(B) tend to move toward the top part 71 due to gravity, but this is prevented by the intermediate plate 78. Therefore, the dust 200 is prevented from scattering from the gap 71b to the outside of the dust collection cover 7 and adhering to the substrate G held by the substrate carrier 100.

[0057] <Another form of dust collection cover> Figures 10(A) to 10(C) show another example of the configuration of the dust-collecting cover 7. The illustrated example differs from the dust-collecting cover 7 shown in Figures 8 to 9(C) only in the configuration of the intermediate plate 78, and has an intermediate plate 78'. The intermediate plate 78' has a fixed portion 78a' fixed to the side portion 72, and a movable portion 78b' whose angle is variable with respect to the fixed portion 78a'.

[0058] The fixed portion 78a' corresponds to the fixed portion 78 in FIG. 8, and the movable portion 78b' corresponds to the inclined portion 78b. However, whereas the inclined portion 78b is formed integrally with the fixed portion 78a and has a fixed angle, the movable portion 78b' is connected to the fixed portion 78a' via a hinge 78c, and the angle is variable. The hinge 78c connects the movable portion 78b' to the fixed portion 78a' so as to be rotatable around the center of rotation in the Y direction, and the angular range (rotation range) of the movable portion 78b' is structurally limited by a protruding piece. In this embodiment, the angle of the movable portion 78b' is made variable using the hinge 78c, but the angle may be made variable using an elastic body.

[0059] 10(A) corresponds to the state of FIG. 9(A), and shows the state in which the dust collection cover 7 is in a position in which the top part 71 is on the top and the bottom part 70 is on the bottom. The movable part 78b' is inclined at the same angle as the inclined part 78b with respect to the horizontal direction. When dust is generated by the rotation of the roller 63, it falls by gravity onto the tray 75 and is captured, and the dust 200 is piled up on the tray 75.

[0060] Fig. 10(B) corresponds to the state of Fig. 9(B), and shows the attitude of the dust-collection cover 7 when the holding unit 6 is rotated 90 degrees from the state of Fig. 10(A). At this time, the movable part 78b' of the intermediate plate 78' located on the upper side rotates with respect to the fixed part 78a' due to its own weight, and both the fixed part 78a' and the movable part 78b' are in a vertical position. As a result, the opening 79 is half-closed. There is no change in the intermediate plate 78' located on the lower side.

[0061] FIG. 10C corresponds to the state of FIG. 9C, and shows the attitude of the dust-collecting cover 7 when the holding unit 6 is further rotated 90 degrees from the state of FIG. 10B. The dust-collecting cover 7 is in an attitude in which the top part 71 is down and the bottom part 70 is up. At this time, the movable part 78b' of the intermediate plate 78', which was located on the lower side at the stage of FIG. 10B, also rotates with respect to the fixed part 78a' by its own weight, and both the fixed part 78a' and the movable part 78b' are in a horizontal attitude. As a result, the front part of the opening 79 is substantially closed. The dust captured in the tray 75 and the dust overflowing onto the side part 72 in the attitude of FIG. 9B tend to move toward the top part 71 due to gravity, but the opening 79 is closed and this can be reliably prevented by the intermediate plate 78'. Therefore, the dust 200 is prevented from scattering from the gap 71b to the outside of the dust-collecting cover 7 and adhering to the substrate G held by the substrate carrier 100.

[0062] <Another form of Laura> In the above embodiment, an example in which the holding unit 6 has a plurality of holding rollers 63 has been described. In addition to the holding rollers 63, the rotating unit 8 may have a plurality of rollers arranged to sandwich the substrate carrier 100. These rollers are, for example, idle rollers. In a certain state, the idle rollers below the substrate carrier 100 are at the same height as the transport rollers 5a. The idle rollers themselves are not driven, and are arranged mainly for the purpose of distributing the load of the substrate carrier 100 to the transport rollers 5a. Since the idle rollers are not connected to the driving means, even if the idle rollers are configured to be rotated together with the rotating unit 8, it is possible to avoid the device becoming complicated and large. Therefore, by arranging the idle rollers to sandwich the substrate carrier, it is possible to simplify the device. It is not necessary for the idle rollers to hold the substrate carrier 100 when the substrate carrier 100 is rotated.

[0063] The dust collection cover 7 described in the above embodiment may also be provided on the idle roller. Also, the dust collection cover 7 may be provided only on the idle roller, and no cover may be provided on the holding roller 63. For example, there may be a case where a roller is not used at the tip of the holding part of the holding unit 6.

[0064] <Electronic devices> Next, an example of an electronic device will be described below, which will be exemplified by the configuration of an organic EL display device.

[0065] First, the organic EL display device to be manufactured will be described. Fig. 11(A) is an overall view of an organic EL display device 500, and Fig. 11(B) is a diagram showing the cross-sectional structure of one pixel.

[0066] 11(A), a plurality of pixels 52, each including a plurality of light-emitting elements, are arranged in a matrix in a display region 51 of an organic EL display device 500. As will be described in detail later, each of the light-emitting elements has a structure including an organic layer sandwiched between a pair of electrodes.

[0067] The pixel here refers to the smallest unit that allows a desired color to be displayed in the display region 51. In the case of a color organic EL display device, the pixel 52 is configured by a combination of a plurality of sub-pixels, a first light-emitting element 52R, a second light-emitting element 52G, and a third light-emitting element 52B, which emit light different from each other. The pixel 52 is often configured by a combination of three types of sub-pixels, a red (R) light-emitting element, a green (G) light-emitting element, and a blue (B) light-emitting element, but is not limited to this. The pixel 52 needs to include at least one type of sub-pixel, and preferably includes two or more types of sub-pixels, and more preferably includes three or more types of sub-pixels. The sub-pixels that configure the pixel 52 may be, for example, a combination of four types of sub-pixels, a red (R) light-emitting element, a green (G) light-emitting element, a blue (B) light-emitting element, and a yellow (Y) light-emitting element.

[0068] Fig. 11(B) is a partial cross-sectional schematic diagram taken along the line AB in Fig. 11(A). A pixel 52 has a plurality of sub-pixels on a substrate 53, each of which is composed of an organic EL element having a first electrode (anode) 54, a hole transport layer 55, any one of a red layer 56R, a green layer 56G, and a blue layer 56B, an electron transport layer 57, and a second electrode (cathode) 58. Of these, the hole transport layer 55, the red layer 56R, the green layer 56G, the blue layer 56B, and the electron transport layer 57 correspond to organic layers. The red layer 56R, the green layer 56G, and the blue layer 56B are formed in patterns corresponding to light-emitting elements (sometimes referred to as organic EL elements) that emit red, green, and blue colors, respectively.

[0069] In addition, the first electrode 54 is formed separately for each light-emitting element. The hole transport layer 55, the electron transport layer 57, and the second electrode 58 may be formed in common for the plurality of light-emitting elements 52R, 52G, and 52B, or may be formed for each light-emitting element. That is, as shown in FIG. 11B, the hole transport layer 55 may be formed as a common layer for the plurality of sub-pixel regions, and the red layer 56R, the green layer 56G, and the blue layer 56B may be formed separately for each sub-pixel region on top of the hole transport layer 55, and the electron transport layer 57 and the second electrode 58 may be formed as a common layer for the plurality of sub-pixel regions on top of the hole transport layer 55.

[0070] In order to prevent short circuits between adjacent first electrodes 54, an insulating layer 59 is provided between the first electrodes 54. Furthermore, since the organic EL layer deteriorates due to moisture and oxygen, a protective layer 600 is provided to protect the organic EL element from moisture and oxygen.

[0071] 11(B), the hole transport layer 55 and the electron transport layer 57 are shown as a single layer, but they may be formed of multiple layers including a hole blocking layer and an electron blocking layer depending on the structure of the organic EL display element. In addition, a hole injection layer having an energy band structure that allows holes to be smoothly injected from the first electrode 54 to the hole transport layer 55 may be formed between the first electrode 54 and the hole transport layer 55. Similarly, an electron injection layer may be formed between the second electrode 58 and the electron transport layer 57.

[0072] Each of the red layer 56R, the green layer 56G, and the blue layer 56B may be formed of a single light-emitting layer, or may be formed by laminating a plurality of layers. For example, the red layer 56R may be configured of two layers, with the upper layer being a red light-emitting layer and the lower layer being a hole transport layer or an electron block layer. Alternatively, the lower layer may be formed of a red light-emitting layer and the upper layer being an electron transport layer or a hole block layer. By providing a layer below or above the light-emitting layer in this way, the light-emitting position in the light-emitting layer can be adjusted, and the optical path length can be adjusted, thereby improving the color purity of the light-emitting element.

[0073] Although the example of the red layer 56R is shown here, the same structure may be adopted for the green layer 56G and the blue layer 56B. The number of layers may be two or more. Furthermore, layers of different materials may be laminated, such as a light-emitting layer and an electron blocking layer, or layers of the same material may be laminated, such as two or more light-emitting layers.

[0074] In the manufacture of such electronic devices, the above-mentioned film forming apparatus 1 can be applied, and the manufacturing method can include a transporting process of transporting a substrate G, and a deposition process of depositing at least one of the layers on the substrate G being transported by a deposition apparatus 114.

[0075] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0076] 1 film forming device, 6 holding unit, 63 holding roller, 7 dust collection cover, 71 top part, 70 bottom part, 78 intermediate plate, 111 position change device, 100 substrate carrier

Claims

1. A posture changing device for changing the posture of a substrate carrier, comprising: a rotating means for rotating the substrate carrier; The rotating means is A plurality of rollers arranged to sandwich the substrate carrier; a dust collection cover provided on at least one of the rollers and surrounding the roller individually; The dust collection cover is A top portion where the peripheral surface of the roller is exposed; a bottom portion formed to face the peripheral surface of the roller; a restricting wall portion disposed apart from the bottom portion and restricting dust on the bottom portion from moving to the top portion when the rotating means rotates the substrate carrier; A posture changing device characterized by:

2. A posture changing device for changing the posture of a substrate carrier, comprising: a rotating means for rotating the substrate carrier; The rotating means is A plurality of rollers arranged to sandwich the substrate carrier; a dust collection cover provided on at least one of the rollers and surrounding the roller individually; The dust collection cover is a bottom portion formed to face the peripheral surface of the roller; a left side portion and a right side portion extending from the bottom portion so as to face a circumferential surface of the roller; a left intermediate plate formed to protrude from the left side portion to the right side portion; a right intermediate plate formed to protrude from the right side portion to the left side portion; Equipped with A posture changing device characterized by:

3. 3. The posture changing device according to claim 2, the right end of the left intermediate plate is curved toward the bottom; The left end of the right intermediate plate is curved toward the bottom. A posture changing device characterized by:

4. 3. The posture changing device according to claim 2, the left intermediate plate includes a first fixed portion fixed to the left side portion and a first movable portion whose angle is variable with respect to the first fixed portion, The right intermediate plate includes a second fixed portion fixed to the right side portion and a second movable portion whose angle is variable with respect to the second fixed portion. A posture changing device characterized by:

5. 5. The posture changing device according to claim 4, When the attitude of the dust collection cover is such that the bottom is on the lower side, the first movable part and the second movable part are displaced so that an opening is formed between the left intermediate plate and the right intermediate plate, When the dust collection cover is in a position in which the bottom portion is on the upper side, the first movable portion and the second movable portion are displaced so that the opening is closed. A posture changing device characterized by:

6. The posture changing device according to any one of claims 1 to 5, A magnet is disposed on the bottom. A posture changing device characterized by:

7. The posture changing device according to any one of claims 1 to 6, A removable tray is disposed on the bottom. A posture changing device characterized by:

8. The posture changing device according to any one of claims 1 to 7, A plurality of transport rollers for transporting the substrate carrier; a moving means for moving the plurality of transport rollers between a transport position and a retreat position for avoiding interference with the rotating means or the substrate carrier when the rotating means rotates; Equipped with A posture changing device characterized by:

9. The posture changing device according to any one of claims 1 to 8, The plurality of rollers include a plurality of first rollers located on one side of the substrate carrier; a second plurality of rollers located on the other side of the substrate carrier; the plurality of first rollers and the plurality of second rollers are switched in position by rotation by the rotating means; A posture changing device characterized by:

10. A posture changing device for changing the posture of a substrate carrier, comprising: a rotating means for rotating the substrate carrier; A plurality of transport rollers for transporting the substrate carrier; a moving means for moving the plurality of transport rollers in parallel in a roller axis direction between a transport position and a retreat position for avoiding interference with the rotating means or the substrate carrier when the rotating means rotates, A posture changing device characterized by:

11. A posture changing device according to any one of claims 1 to 10, a deposition apparatus for depositing a deposition material onto a substrate held by a substrate carrier; A film forming apparatus comprising:

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