Heat treatment apparatus

Abstract

To provide a heat treatment device capable of preventing means tightly adhering a door to a body side so as to prevent the leakage of a gas by tight adhesion from projecting from the body and the front face of the door.SOLUTION: A heat treatment device 1 comprises: a body 11; a door 12; a rod 27; and force split means 28. The body 11 composes a treatment chamber filled with a gas to heat-treat an object 10 to be treated. The door 12 opens and closes an opening 22 provided at the body 11. The rod 27 is arranged so as to be extended along a face provided with the opening 22 in the body 11 and moves the door 12 in a direction different from a pressing direction pressing the same to the side of the body 11. The force split means 28 splits control force controlling the rod 27 in the movement direction of the rod 27 in a state where the door 12 closes the opening 22 to generate force that tightly adhere the door 12 to the side of the body 11.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a heat treatment apparatus for performing heat treatment on an object to be processed.

Background Art

[0002] In a heat treatment apparatus for performing heat treatment on an object to be processed, depending on the type of the object to be processed, it is required to perform heat treatment in a state where the airtightness of a processing chamber filled with gas to heat-treat the object to be processed is maintained. In order to ensure such airtightness, in addition to locking a door that closes an opening of the main body constituting the processing chamber, it is necessary to bring the door into close contact with the main body so that gas does not leak.

[0003] As a configuration for bringing the door into close contact with the main body in a heat treatment apparatus, for example, as described in Patent Document 1, a configuration in which a lock handle and a horizontal handle are provided on the door is known. The lock handle includes an operation portion that protrudes from the front surface of the door and is operated by an operator, and a mechanism that engages between the main body side and the door side in accordance with the operation of the operation portion. Further, the horizontal handle includes an operation portion that is provided on the front surface of the main body and is operated by an operator, and a mechanism that operates in accordance with the operation of the operation portion to press the door. In the configuration described in Patent Document 1, the operator manually tightens the lock handle and the horizontal handle, and presses the door against the main body, so that the door comes into close contact with the main body.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the configuration disclosed in Patent Document 1, operating parts that are operated by an operator, such as a lock handle and a horizontal handle, are provided so as to protrude from the front surfaces of the main body and the door. For this reason, there is a problem that the operator may bump his / her body against the operating part, or the operator's clothing may get caught on the operating part, which hinders the operator's work.

[0006] In view of the above circumstances, an object of the present invention is to provide a heat treatment apparatus capable of preventing means for bringing the door into close contact with the main body side so that gas does not leak from protruding from the front surfaces of the main body and the door.

Means for Solving the Problems

[0007] (1) In order to solve the above problems, a heat treatment apparatus according to an aspect of the present invention includes a main body that constitutes a processing chamber for filling gas and heat-treating an object to be processed, a door that opens and closes an opening provided in the main body, a rod that is arranged so as to extend along a surface of the main body where the opening is provided and moves in a direction different from a pressing direction for pressing the door toward the main body side, and a component force means that generates a force for bringing the door into close contact with the main body side by component-forcing an operating force for operating the rod in the moving direction of the rod in a state where the door closes the opening. , the component force means includes a cam member attached to the rod, an elastic body that suppresses the movement amount of the cam member with respect to the movement amount of the rod, and a cam follower provided on the door that transmits the force divided from the operating force to the door by contacting the cam member. is provided.

[0008] According to this configuration, means for bringing the door in a state of closing the opening of the main body into close contact with the main body side is constituted by a rod that moves in a direction different from the pressing direction of the door and a component force means that component-forces the operating force in the moving direction of the rod. The rod is arranged so as to extend along a surface of the main body where the opening is provided, and the component force means is arranged in the vicinity of the rod in a state where the door closes the opening so as to operate as the rod moves. For this reason, it is possible to prevent the rod and the component force means, which are means for bringing the door into close contact with the main body side, from protruding from the front surfaces of the main body and the door. Therefore , airtight it is possible to prevent means for bringing the door into close contact with the main body side so that gas does not leak from protruding from the front surfaces of the main body and the door. . When there are dimensional errors in components such as the cam member and the cam follower, and when there are assembly errors during the assembly of components such as the cam member and the cam follower, the accuracy of the position between the cam member on the rod side and the cam follower on the door side is not constant, and variations will occur. For this reason, it is necessary to accurately adjust the positioning between the cam member and the cam follower. However, according to the above configuration, the cam member on the rod side that contacts the cam follower on the door side and divides the operating force of the rod is suppressed in its movement amount by the elastic body. Therefore, when the rod moves and the cam member contacts the cam follower, even if there are dimensional errors and assembly errors in the components, the errors are absorbed by the deformation of the elastic body. As a result, the positioning between the cam member and the cam follower can be accurately adjusted only by the operating amount in the moving direction of the rod. Therefore, according to the above configuration, in a heat treatment apparatus capable of preventing the means for closely attaching the door to the main body side so that the gas does not leak from protruding from the front surfaces of the main body and the door, the positioning between the cam member and the cam follower can be accurately adjusted only by the operating amount in the moving direction of the rod.

[0011] ( 2 ) The heat treatment apparatus may include a plurality of the force dividing means, and each of the plurality of the force dividing means may have the cam member, the elastic body, and the cam follower.

[0012] For example, even when adjustment means for adjusting the positions of the individual cam members arranged on the axis of the rod is provided by a screw portion provided on the rod and a nut screwed onto the screw portion, if there are a plurality of cam members, it becomes difficult to accurately align the cam members on the axis of the rod. However, according to this configuration, the elastic bodies provided in each of the force dividing means can individually absorb the individual errors existing in each of the force dividing means. Therefore, in each of the plurality of force dividing means that operate at the same timing as the rod moves, the positioning between the cam member and the cam follower can be accurately adjusted.

[0013] ( 3 ) The door is provided as a hinged door attached to the main body via a hinge, and in the plurality of elastic bodies included in the plurality of the force dividing means, the elastic force of the elastic body arranged on the side away from the hinge side may be set to be greater than that of the elastic body arranged on the hinge side.

[0014] According to this configuration, among the plurality of elastic bodies, the elastic force of the elastic body arranged on the hinge side is set to be greater than that of the elastic body arranged on the side away from the hinge side. Therefore, among the plurality of force dividing means, in the force dividing means arranged on the side away from the hinge side, the force with which the cam member biases the cam follower can be increased. Generally, when internal pressure is applied, the door tends to open. Even if the sealing pressure of the seal is ensured on the hinge side, the sealing pressure of the seal decreases as the distance from the hinge increases. Therefore, it is necessary to increase the elastic force of the more remotely arranged elastic bodies. However, even when the sealing pressure of the seal cannot be made uniform due to the shape of the door or the arrangement relationship with the door locking means, by configuring as described above, the sealing pressure of the seal can be made uniform.

[0015] ( 4 ) The cam follower is provided at the edge portion of the door, and the main body is provided with a recess at the edge portion of the opening for receiving the cam follower when the door closes the opening. When the door closes the opening and the cam follower is received in the recess, the rod moves in the moving direction, and in this case, the cam member may contact the cam follower.

[0016] According to this configuration, when the door closes, the cam follower on the door side is received in the recess at the edge portion of the opening of the main body. Therefore, the door can be closed in a state where the cam follower is arranged inside the main body without interfering with the main body. Thus, it is possible to prevent the cam follower from being arranged on the front side of the main body when the door is closed. Also, after the door is closed, the rod provided on the main body side moves, and when the cam member contacts the cam follower, the force divided from the operating force of the rod is transmitted to the cam follower, and the door can be brought into close contact with the main body side. Therefore, according to the above configuration, a structure can be easily constructed that can prevent the force dividing means for bringing the door into close contact with the main body from being arranged on the front side of the main body with a simple configuration in which a recess is provided at the edge portion of the opening.

[0017] ( 5) The amount of operation for operating the rod in the moving direction is set to be larger than a predetermined amount than the set distance between the cam member and the cam follower in the moving direction in a state before the door closes the opening and the rod moves.

[0018] According to this configuration, the operation amount of the rod is set to be larger than a predetermined amount than the set distance between the cam member and the cam follower in a state before the rod moves after the door is closed. Therefore, when the rod moves and the cam member abuts against the cam follower, even if there are dimensional errors and assembly errors of the parts, the errors can be more reliably absorbed by the deformation of the elastic body.

[0019] ( 6 ) The elastic body may be disposed on the outer periphery of the rod.

[0020] According to this configuration, the rod and the elastic body are not continuously arranged in the coaxial direction, and the combined structure of the rod and the elastic body can be configured to be short in the rod axis direction.

Advantages of the Invention

[0021] According to the present invention, a heat treatment apparatus capable of preventing means for closely attaching the door to the main body side so that the gas does not leak from protruding from the front surfaces of the main body and the door , the positioning between the cam member and the cam follower can be accurately adjusted only by the operating amount in the moving direction of the rod.

Brief Description of the Drawings

[0022]

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Embodiments for Carrying Out the Invention

[0023] Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

[0024] (First Embodiment) [Configuration of Heat Treatment Apparatus] FIG. 1 is a perspective view of a heat treatment apparatus 1 according to a first embodiment of the present invention. FIG. 1 shows a state where a door 12 is open in the heat treatment apparatus 1. FIG. 2 is a perspective view of the heat treatment apparatus 1 showing a state where the door 12 is closed.

[0025] Referring to FIGS. 1 and 2, the heat treatment apparatus 1 is configured as an apparatus for performing heat treatment on a workpiece 10. Examples of the heat treatment by the heat treatment apparatus 1 include a heat treatment for heating the workpiece 10 in a state where the workpiece 10 is disposed in a chamber filled with gas or a cooling treatment for cooling the workpiece 10. For example, examples of the heat treatment by the heat treatment apparatus 1 include carburizing treatment, quenching treatment, tempering treatment, annealing treatment, degreasing treatment, sintering treatment, and the like. Further, in the heat treatment apparatus 1, for example, heat treatment of the workpiece 10 provided as a member made of metal is performed.

[0026] The heat treatment apparatus 1 includes a main body 11, a door 12 for opening and closing the main body 11, a locking means 13 for locking the main body 11 and the door 12, a close contact mechanism 14 for bringing the door 12 into close contact with the main body 11, a control unit 15, etc.

[0027] The main body 11 constitutes a processing chamber for filling with gas and processing the workpiece 10. The gas filled in the main body 11 may be a gas such as nitrogen gas, air, etc., or a gas in the form of steam such as superheated steam. Also, as a form in which the main body 11 is filled with gas, a form of introducing gas from the outside of the main body 11 into the main body 11 can be exemplified, but it may not be limited to this form. That is, a form in which the main body 11 is filled with gas without introducing gas from the outside into the main body 11 may be implemented. Specifically, when the workpiece 10 is carried into the main body 11 without introducing gas from the outside, air exists in the main body 11, so that the main body 11 is filled with gas as air, and a form in which heat treatment of the workpiece 10 is performed may be implemented.

[0028] The main body 11 includes a front wall 16, a rear wall 17, side walls 18, 19, a ceiling wall 20, and a bottom wall 21, and is formed in a rectangular parallelepiped box shape that partitions a hollow region inside which the workpiece 10 is disposed. In the front wall 16 of the main body 11, an opening 22 that opens the hollow region inside the main body 11 to the outside is provided. The opening 22 is opened so as to penetrate the front wall 16 in a shape corresponding to the outer peripheral shape of the door 12. A heat-resistant seal 49 for ensuring airtightness is disposed at the periphery of the opening 22 between the opening 22 and the door 12.

[0029] The workpiece 10 is carried into the main body 11 through the opening 22. The workpiece 10 is carried in from the opening 22 and disposed inside the main body 11 in a state of being stored in a plurality of thin box-shaped cases 10a, for example. The case 10a is configured such that the surrounding gas can pass through and flow with almost no resistance, and is formed of a net-like member, for example.

[0030] When the heat treatment apparatus 1 is configured to perform heat treatment, for example, a heater (not shown) for heating the workpiece 10 is installed inside the main body 11. When the heat treatment apparatus 1 is configured to heat-treat the workpiece 10 with a heating gas such as superheated steam, an intake / exhaust system for supplying and discharging the heating gas to and from the inside of the main body 11 is installed in the main body 11. When the heat treatment apparatus 1 is configured to heat-treat the workpiece 10 by cooling it with a cooling gas, an intake / exhaust system for supplying and discharging the cooling gas to and from the inside of the main body 11 is installed in the main body 11.

[0031] The door 12 is provided as a door for opening and closing an opening 22 provided in the front wall 16 of the main body 11. The door 12 is formed in a shape that closes the entire opening 22 of the main body 11, and in this embodiment, is provided as a door having a rectangular outer shape. The door 12 is provided as a hinged door attached to the main body 11 via a plurality of hinges 23. In this embodiment, the door 12 is configured to open in a side-opening state via two hinges 23 with respect to the front wall 16 of the main body 11. That is, the door 12 is attached to the front wall 16 so as to rotate horizontally along the horizontal direction about the hinge 23 via two hinges 23 arranged vertically along the front wall 16 on one end side in the horizontal direction thereof. Further, a handle 25 that is operated by an operator when opening and closing the door 12 is provided on the side of the door 12 opposite to the hinge 23 side.

[0032] In addition, the door 12 is provided with an outer portion 12a facing the outside of the main body 11 and an inner portion 12b facing the inside of the main body 11 when the opening 22 is closed. Both the outer portion 12a and the inner portion 12b are provided as plate-like portions and are integrally formed by overlapping in the thickness direction of the door 12. And the shape of the outer periphery of the inner portion 12b is formed to be smaller than the shape of the outer periphery of the outer portion 12a. For this reason, the inner portion 12b is configured as a plate-like portion that rises in a stepped manner with respect to the outer portion 12a. Further, at the edge portion of the opening 22 in the main body 11, an outer edge portion 23a that is recessed in a stepped manner and an inner edge portion 23b that opens so as to be slightly tapered inward from the outer edge portion 23a are provided. And when the door 12 closes the opening 22, the outer peripheral edge portion of the outer portion 12a of the door 12 abuts against the outer edge portion 23a of the opening 22 to close the opening 22, and the outer peripheral edge portion of the inner portion 12b of the door 12 is configured to fit into the inner edge portion 23b of the opening 22.

[0033] The locking means 13 is provided as a mechanism for locking the door 12 to the main body 11 when the door 12 closes the opening 22. A plurality of locking means 13 are provided, and in this embodiment, for example, two locking means 13 are provided. In this embodiment, the two locking means 13 are arranged on the side opposite to the hinge 23 side with respect to the door 12 when the door 12 closes the opening 22. Further, the two locking means 13 are arranged vertically along the front wall 16 when the door 12 closes the opening 22.

[0034] Each locking means 13 includes a hook 13a provided on the door 12 and a hook holding portion 13b provided on the front wall 16 of the main body 11. The hook 13a is provided at the end side of the door 12 opposite to the hinge 23 side, and is formed in a claw shape protruding from the outer portion 12a of the door 12. The hook 13a is provided so as to protrude from the outer portion 12a toward the inside of the main body 11 when the door 12 closes the opening 22.

[0035] The hook holding portion 13b is provided as a mechanism for holding the hook 13a by engaging with the hook 13a when the door 12 closes the opening 22. The hook holding portion 13b is provided at the edge portion of the opening 22 on the front wall 16 of the main body 11, and is provided at the outer edge portion 23a. Further, the hook holding portion 13b is provided at the outer edge portion 23a on the side opposite to the hinge 23 side through the opening 22. The hook holding portion 13b includes, for example, an insertion hole that opens at the outer edge portion 23a and into which the hook 13a is inserted when the door 12 closes the opening 22, and an engagement pin (not shown) that engages with the hook 13a inserted into the insertion hole. The engagement pin is configured to be driven, for example, by a solenoid (not shown) that operates based on a control command from the control unit 15. When the opening 22 is closed by the door 12 and the hook 13a is inserted into the insertion hole of the hook holding portion 13b, the engagement pin driven by the solenoid operated by the control command from the control unit 15 moves, and the hook 13a and the engagement pin engage with each other. As a result, the hook 13a is held by the hook holding portion 13b, and the door 12 in the state of closing the opening 22 is locked to the main body 11.

[0036] The control unit 15 is provided as a control device that controls the operations of the locking means 13, the close contact mechanism 14, and the mechanism for heat treatment provided in the main body 11. The control unit 15 includes a hardware processor such as a CPU (Central Processing Unit), memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory), an operation unit such as an operation panel operated by a user, an interface circuit, and the like. A program for creating control commands for controlling the operations of the locking means 13, the close contact mechanism 14, and the mechanism for heat treatment provided in the main body 11 is stored in the memory of the control unit 15. For example, when the operation unit is operated by an operator, the above program is read out and executed by the hardware processor from the memory. Thereby, the above control commands are created, and based on the control commands, the locking means 13, the close contact mechanism 14, and the mechanism for heat treatment provided in the main body 11 each operate.

[0037] [Configuration of the close contact mechanism] FIG. 3 is a diagram showing an enlarged part of the heat treatment apparatus 1 shown in FIG. 1. FIG. 4 is a diagram showing the door 12 and the close contact mechanism 14 of the heat treatment apparatus 1, and is a diagram showing the state viewed from the inside of the heat treatment apparatus 1. FIG. 5 is an enlarged view showing the close contact mechanism 14 shown in FIG. 4. FIG. 6(A) is a diagram showing the door 12 and the close contact mechanism 14 of the heat treatment apparatus 1 as viewed from above, and FIG. 6(B) is an enlarged view showing a part of FIG. 6(A). In FIGS. 4 and 5, illustration of elements other than the door 12 and the close contact mechanism 14 in the heat treatment apparatus 1 is omitted. In FIGS. 6(A) and 6(B), illustration of elements other than a part of the door 12, the close contact mechanism 14, and the front wall 16 of the main body 11 in the heat treatment apparatus 1 is omitted, and a part of the front wall 16 is shown as a cross-sectional view.

[0038] Referring to FIGS. 1 to 5, FIGS. 6(A) and 6(B), the close contact mechanism 14 is provided as a mechanism for bringing the door 12 into close contact with the main body 11 when the door 12 closes the opening 22. A plurality of close contact mechanisms 14 are provided, and in this embodiment, two are provided. In this embodiment, as the two close contact mechanisms 14, a close contact mechanism 14a and a close contact mechanism 14b are provided. The close contact mechanism 14a is disposed on the upper end side of the door 12 when the door 12 closes the opening 22. The close contact mechanism 14b is disposed on the lower end side of the door 12 when the door 12 closes the opening 22.

[0039] Each of the two close contact mechanisms 14 includes a drive mechanism 26, a rod 27, and a force dividing means 28. That is, the close contact mechanism 14a includes a drive mechanism 26, a rod 27, and a force dividing means 28, and the close contact mechanism 14b also includes a drive mechanism 26, a rod 27, and a force dividing means 28. Incidentally, the close contact mechanism 14a disposed on the upper end side of the door 12 and the close contact mechanism 14b disposed on the lower end side of the door 12 when the door 12 closes the opening 22 are similarly configured except that the vertical positions of the rod 27 and the force dividing means 28 are reversed. In the close contact mechanism 14a, the rod 27 is disposed above the force dividing means 28, and in the close contact mechanism 14b, the rod 27 is disposed below the force dividing means 28.

[0040] [Drive mechanism] The drive mechanism 26 is provided as a cylinder mechanism that drives the rod 27 to move along the axial direction of the rod 27 to operate the rod 27. The drive mechanism 26 is provided, for example, as a pneumatic cylinder mechanism, and has a pair of pressure chambers (not shown) for supplying and discharging compressed air and a piston 26a, and the rod 27 is connected to the piston 26a. Then, the drive mechanism 26 is configured to displace the piston 26a and reciprocally drive the rod 27 connected to the piston 26a by supplying and discharging compressed air to and from the pair of pressure chambers. That is, the drive mechanism 26 is configured to operate in accordance with the supply and discharge of compressed air and drive the rod 27 in a direction of being drawn into the drive mechanism 26 or a direction of being pushed out from the drive mechanism 26. Further, the drive mechanism 26 is installed inside the main body 11 in a state of being fixed to the main body 11, and is fixed and installed, for example, inside the front wall 16.

[0041] Further, the movement operation of the rod 27 by the drive mechanism 26 is performed by the drive mechanism 26 operating based on a control command from the control unit 15. More specifically, a solenoid valve (not shown) provided in a compressed air supply and discharge system connecting a compressed air supply source (not shown) and the drive mechanism 26 operates based on a control command from the control unit 15, so that compressed air is supplied to and discharged from the pair of pressure chambers in the drive mechanism 26, and the drive mechanism 26 operates. Thereby, the rod 27 is operated so as to move in a direction of being drawn into the drive mechanism 26 or a direction of being pushed out from the drive mechanism 26.

[0042] In addition, in the present embodiment, a form in which the drive mechanism 26 is configured as a pneumatic cylinder mechanism is exemplified, but it may not be like this. The drive mechanism 26 may be configured as a hydraulic cylinder mechanism or an electromagnetic solenoid mechanism. Further, the drive mechanism 26 may be configured as a mechanism other than the cylinder mechanism. For example, it may be configured as a mechanism including an electric motor and a rack and pinion, or a mechanism including an electric motor and a ball screw, etc.

[0043] [Rod] The rod 27 is provided as a linearly extending member, has an axial direction, and is provided, for example, as a member with a circular cross-section that extends in the axial direction. The rod 27 is disposed inside the main body 11 and is connected at one end to a drive mechanism 26 fixed to the main body 11. Also, the rod 27 is disposed inside the main body 11 and inside the front wall 16. And the rod 27 is disposed so as to extend along the surface 16a of the front wall 16, which is the surface where the opening 22 is provided in the main body 11. That is, the rod 27 is disposed inside the front wall 16 in a state where the axial direction of the rod 27 extends along the surface (surface 16a of the front wall 16) where the opening 22 is provided in the main body 11. Note that the state where the rod 27 extends along the surface (surface 16a) where the opening 22 is provided in the main body 11 is not limited to the state where the rod 27 extends parallel to the surface (surface 16a) where the opening 22 is provided, but also includes a state where the rod 27 is slightly inclined with respect to the surface (surface 16a) where the opening 22 is provided.

[0044] Also, the rod 27 extends along the surface where the opening 22 is provided in the main body 11 and is disposed so as to extend horizontally along the edge portion of the opening 22. Note that the rod 27 of the close contact mechanism 14a disposed on the upper end side of the door 12 is disposed so as to extend horizontally along the edge portion on the upper end side of the opening 22, and the rod 27 of the close contact mechanism 14b disposed on the lower end side of the door 12 is disposed so as to extend horizontally along the edge portion on the lower end side of the opening 22.

[0045] Further, the rod 27 is configured to move along the axial direction of the rod 27 by being operated by the drive mechanism 26. Further, the rod 27 is configured to move in a direction different from the pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12, that is, in a direction perpendicular to the pressing direction. The pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 is a direction perpendicular to the surface 16a of the front wall 16, and is a direction in which the door 12 closing the opening 22 is pressed toward the main body 11 so as to be in close contact with the main body 11. Incidentally, the pressing direction in which the door 12 is pressed toward the main body 11 is indicated by an arrow X1 in FIGS. 6(A) and 6(B). Also, the direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 is a direction orthogonal to the pressing direction, and is the moving direction of the rod 27 in which the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction. Incidentally, the direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 and the moving direction of the rod 27 operated by the drive mechanism 26 are indicated by an arrow X2 in FIGS. 6(A) and 6(B). As described above, the rod 27 is operated by the drive mechanism 26, is drawn into the drive mechanism 26, and moves in a direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11. Incidentally, the rod 27 is also configured to move in a direction in which it is pushed out from the drive mechanism 26 by being operated in the reverse direction along the axial direction of the rod 27 from the state in which it is operated in the direction of being drawn into the drive mechanism 26.

[0046] [Force dividing means] The force dividing means 28 is provided as a mechanism for dividing the operating force for operating the rod 27 in the moving direction of the rod 27 in a state where the door 12 closes the opening 22 and bringing the door 12 into close contact with the main body 11. In the close contact mechanism 14, a plurality of force dividing means 28 are provided. That is, in both the close contact mechanism 14a and the close contact mechanism 14b, a plurality of force dividing means 28 are provided. In the present embodiment, four force dividing means 28 are provided in each of the close contact mechanism 14a and the close contact mechanism 14b.

[0047] Each of the plurality of force dividing means 28 in the contact mechanism 14 has a cam member 29, a cam follower 30, and an elastic body 31. The cam member 29 and the elastic body 31 are provided on the main body 11 side and attached to the rod 27. The cam follower 30 is provided on the door 12 side. And when the rod 27 operated by the drive mechanism 26 moves in a state where the door 12 closes the opening 22, the force dividing means 28 is configured such that the cam member 29 and the cam follower 30 come into contact with each other, and a component force from the operating force for operating the rod 27 in the moving direction is divided from the cam member 29 toward the cam follower 30. And the force dividing means 28 is configured to press and bring into close contact with the door 12 provided with the cam follower 30 toward the main body 11 side by transmitting the force divided from the operating force for operating the rod 27 from the cam member 29 to the cam follower 30. Hereinafter, the configurations of the cam member 29, the elastic body 31, and the cam follower 30 will be described in more detail.

[0048] The cam member 29 is provided for each of the plurality of force dividing means 28 in the contact mechanism 14, and in this embodiment, four are provided in the contact mechanism 14. The four cam members 29 in the contact mechanism 14 are all attached to the rod 27 and are attached side by side along the axial direction of the rod 27. And the cam member 29 attached to the rod 27 is provided as a wedge-shaped member. The cam member 29 is provided with a tapered surface 38 that extends along a surface inclined with respect to the moving direction of the rod 27 by the operation of the drive mechanism 26 in a state where the cam member 29 is attached to the rod 27. Further, the tapered surface 38 is configured to extend along a surface that spreads in the vertical direction and a direction oblique to the axial direction of the rod 27.

[0049] Further, the cam member 29 is attached to the rod 27 via the attachment member 32. More specifically, the cam member 29 is fixed to the attachment member 32, and the attachment member 32 to which the cam member 29 is fixed is attached to the rod 27, whereby the cam member 29 is attached to the rod 27. The attachment member 32 is configured to have a rod insertion portion 32a and a cam pedestal portion 32b provided integrally. The rod insertion portion 32a is provided as a plate-like portion provided with an insertion hole through which the rod 27 penetrates in the axial direction, and is supported so as to be slidable in the axial direction of the rod 27 with respect to the rod 27 and relatively displaceable. Incidentally, the rod 27 is provided with a cam position regulating portion 33 that abuts against the rod insertion portion 32a that is slidable and relatively displaceable with respect to the rod 27. The cam position regulating portion 33 is provided so as to regulate the displacement of the attachment member 32 to which the cam member 29 is fixed in one direction in the axial direction of the rod 27 by abutting against the rod insertion portion 32a and define the position of the cam member 29 together with the attachment member 32. The cam position regulating portion 33 is provided, for example, as a ring-shaped member that engages with the rod 27 and is fixed to the rod 27.

[0050] The cam pedestal portion 32b is provided as a plate-like portion extending parallel to the axial direction of the rod 27, and the cam member 29 is fixed thereto. Further, the cam pedestal portion 32b is supported so as to be slidable with respect to a rail 34 provided inside the front wall 16 of the main body 11 when the attachment member 32 and the cam member 29 move as the rod 27 moves. Incidentally, the rail 34 is fixed to the front wall 16 inside the front wall 16 of the main body 11 and is installed so as to extend parallel to the axial direction of the rod 27 and the moving direction of the rod 27. Further, the same number of rails 34 as the component force means 28 are installed in the main body 11, and each rail 34 is provided at a position corresponding to the attachment member 32 of each component force means 28. Incidentally, since the attachment member 32 attached to the rod 27 is provided so as to be slidable with respect to the rail 34, the rod 27 is also supported so as to be slidable with respect to the rail 34.

[0051] The cam followers 30 are provided on each of the plurality of force dividing means 28 in the contact mechanism 14, and in this embodiment, four cam followers 30 are provided in the contact mechanism 14. The four cam followers 30 in the contact mechanism 14 are all provided at the edge portion of the door 12, and are provided at the edge portion of the outer portion 12a of the door 12. Incidentally, the four cam followers 30 in the contact mechanism 14a are provided at the edge portion on the upper end side of the door 12, and are arranged side by side at substantially equal intervals along the edge on the upper end side of the door 12. Further, the four cam followers 30 in the contact mechanism 14b are provided at the edge portion on the lower end side of the door 12, and are arranged side by side at substantially equal intervals along the edge portion on the lower end side of the door 12.

[0052] The cam follower 30 provided at the edge portion of the door 12 is provided as a cylindrical roller-shaped member with a low height. More specifically, the cam follower 30 is attached to the edge of the door 12 so as to be rotatable around a central axis extending vertically, and is provided as a columnar member having a circular cross section perpendicular to the central axis and a height dimension smaller than the diameter dimension of the circular cross section. Then, when the driving mechanism 26 operates to move the rod 27 in the direction of pulling the rod 27 into the driving mechanism 26 with the door 12 closing the opening 22, the cam follower 30 is configured to come into contact with the cam member 29 that has moved together with the rod 27. Further, the cam follower 30 is configured to transmit the force divided from the operating force of the rod 27 by the driving mechanism 26 to the door 12 by coming into contact with the cam member 29.

[0053] FIG. 7(A) is a view showing the door 12 and the close mechanism 14 of the heat treatment apparatus 1 as seen from above, and FIG. 7(B) is an enlarged view showing a part of FIG. 7(A). Note that FIGS. 7(A) and 7(B) correspond to FIGS. 6(A) and 6(B), and show a state in which the rod 27 is operated so as to move in the direction in which it is retracted by the drive mechanism 26. As shown in FIGS. 7(A) and 7(B), when the door 12 closes the opening 22 and the rod 27 moves in the direction in which it is retracted by the drive mechanism 26, the cam follower 30 contacts the cam member 29 that has moved together with the rod 27. At this time, the tapered surface 38 of the cam member 29 and the outer peripheral surface 39 of the cylindrical cam follower 30 come into contact with each other, so that the cam member 29 and the cam follower 30 come into contact with each other.

[0054] When the cam member 29 and the cam follower 30 come into contact with each other, a part of the operating force of the rod 27 by the drive mechanism 26 is transmitted from the cam member 29 that has moved together with the rod 27 operated by the drive mechanism 26 to the cam follower 30. That is, when the cam member 29 and the cam follower 30 come into contact with each other, a force in the direction from the cam member 29 to the cam follower 30 is resolved from the operating force of the drive mechanism 26 on the rod 27 in the moving direction of the rod 27, which is the direction in which the rod 27 moves in the direction in which it is retracted by the drive mechanism 26, and is transmitted to the cam follower 30. When the force resolved from the operating force of the rod 27 is transmitted from the cam member 29 to the cam follower 30, it is further transmitted from the cam follower 30 provided on the door 12 to the door 12. As a result, the door 12 is biased in the pressing direction (the direction indicated by the arrow X1 in FIGS. 7(A) and 7(B)) that presses the door 12 toward the main body 11 side, and the door 12 that closes the opening 22 is pressed against the main body 11 so as to be in close contact with the main body 11 side. As described above, the cam follower 30 is configured to transmit the force resolved from the operating force of the rod 27 to the door 12 when it comes into contact with the cam member 29.

[0055] Further, the cam follower 30 is arranged inside the front wall 16 of the main body 11 and configured not to protrude outside from the front wall 16 when the door 12 closes the opening 22. Specifically, as shown in FIGS. 1 to 3, the main body 11 is provided with a recess 37 at the edge portion of the opening 22 to receive the cam follower 30 when the door 12 closes the opening 22. The recess 37 is provided as a region formed to be recessed toward the inside of the front wall 16 by partially cutting out the front wall 16 at the edge portion of the opening 22 in the front wall 16 of the main body 11. And the number of recesses 37 provided is the same as the number of cam followers 30, and they are provided at positions corresponding to the cam followers 30 when the door 12 closes the opening 22 at the edge portion of the opening 22 in the front wall 16. Incidentally, the plurality of recesses 37 corresponding to the plurality of cam followers 30 of the close contact mechanism 14a are provided at the upper end side edge portion of the opening 22 in the front wall 16 and are arranged side by side along the upper end side edge portion of the opening 22. Also, the plurality of recesses 37 corresponding to the plurality of cam followers 30 of the close contact mechanism 14b are provided at the lower end side edge portion of the opening 22 in the front wall 16 and are arranged side by side along the lower end side edge portion of the opening 22.

[0056] When the door 12 closes the opening 22, the outer peripheral edge portion of the outer portion 12a of the door 12 abuts against the outer edge portion 23a of the opening 22 to close the opening 22, and the cam follower 30 is received in the recess 37. When the door 12 closes the opening 22 and the rod 27 is not moving in the direction of being drawn into the drive mechanism 26, as shown in FIGS. 1 and 3, the cam member 29 is located at a position where it does not expose from the recess 37 inside the front wall 16. Also, the rod 27 is arranged to extend at a position above the recess 37 inside the front wall 16 and not to expose from the recess 37. Then, when the door 12 closes the opening 22 and the cam follower 30 is received in the recess 37 and the rod 27 moves in the direction of being drawn into the drive mechanism 26, the cam member 29 moves toward the cam follower 30 and abuts against the cam follower 30.

[0057] The elastic body 31 is provided on each of the plurality of force dividing means 28 in the adhesion mechanism 14, and in this embodiment, four elastic bodies 31 are provided in the adhesion mechanism 14. The four elastic bodies 31 in the adhesion mechanism 14 are all mounted on the rod 27 and are arranged side by side along the axial direction on the outer periphery of the rod 27. And the elastic body 31 mounted on the rod 27 is provided as a member having an elastic force, and in this embodiment, it is provided as a metal coil spring.

[0058] Also, the elastic body 31 is mounted on the rod 27 in a state of being fitted into the axis of the rod 27. That is, the elastic body 31 provided as a coil spring is mounted on the rod 27 in a state where the rod 27 is inserted inside the coil spring and in a state where the elastic deformation direction as a coil spring and the axial direction of the rod 27 extend in the same direction. For this reason, the elastic body 31 is arranged on the axis of the rod 27. And the plurality of elastic bodies 31 in the adhesion mechanism 14 are arranged side by side on the axis of the rod 27.

[0059] Also, the elastic body 31 is mounted on the rod 27 in a state of being arranged adjacent to the rod insertion portion 32a of the attachment member 32 in the axial direction of the rod 27. Further, on the rod 27, an elastic body position defining portion 35 is provided which defines the position of the elastic body 31 in the axial direction of the rod 27 by abutting against the end portion of the elastic body 31 on the side opposite to the rod insertion portion 32a side with respect to the elastic body 31. The elastic body position defining portion 35 is provided, for example, as a ring-shaped member that engages with the rod 27 and is fixed to the rod 27.

[0060] Further, between a plurality of elastic bodies 31 arranged along the axial direction of the rod 27, a spacer 36 is provided on the rod 27. The spacer 36 is mounted on the rod 27 between adjacent elastic bodies 31 in the axial direction of the rod 27 and between the cam position defining portion 33 and the elastic body position defining portion 35. The spacer 36 is provided as a cylindrical member through which the rod 27 is inserted, with one end abutting against the cam position defining portion 33 and the other end abutting against the elastic body position defining portion 35. For this reason, the distance between the cam position defining portion 33 fixed to the rod 27 and the elastic body position defining portion 35 is reliably maintained at a constant distance.

[0061] The elastic body position defining portion 35, the elastic body 31, the rod insertion portion 32a of the attachment member 32, and the cam position defining portion 33 are arranged in this order along the axial direction of the rod 27. The elastic body 31 is mounted on the rod 27 such that the position of one end thereof with respect to the rod 27 is defined by the elastic body position defining portion 35, and the other end abuts against the rod insertion portion 32a to bias the rod insertion portion 32a. Also, in a state where the rod 27 is not being operated in the direction in which it is drawn in by the drive mechanism 26, the rod insertion portion 32a biased by the elastic body 31 abuts against the cam position defining portion 33.

[0062] Since the elastic body 31 abuts against the elastic body position defining portion 35 and the rod insertion portion 32a, when the rod 27 moves while the rod insertion portion 32a remains in contact with the cam position defining portion 33, the elastic body 31 moves together with the rod 27 while maintaining the same length without changing the amount of elastic deformation. However, as shown in FIGS. 7(A) and 7(B), when the rod 27 is operated in the direction in which it is drawn in by the drive mechanism 26 and the cam member 29 and the cam follower 30 come into contact, the movement of the cam member 29 along the axial direction of the rod 27 is restricted.

[0063] As the rod 27 moves, when the cam member 29 and the cam follower 30 come into contact with each other and the movement of the cam member 29 is restricted, a force that biases the elastic body 31 toward the elastic body position regulating portion 35 acts on the elastic body 31 from the rod insertion portion 32a of the mounting member 32 to which the cam member 29 is fixed. For this reason, even when the rod 27 moves, the elastic body 31 elastically deforms in the compression direction, and the movement of the mounting member 32 and the cam member 29 along the axial direction of the rod 27 is absorbed. That is, the amount of movement of the mounting member 32 and the cam member 29 along the axial direction of the rod 27 is suppressed as compared with the amount of movement of the rod 27. Note that in a state where the cam member 29 and the cam follower 30 are in contact with each other and the amount of movement of the cam member 29 and the mounting member 32 is suppressed with respect to the amount of movement of the rod 27, the rod insertion portion 32a of the mounting member 32 and the cam position regulating portion 33 are separated from each other in the axial direction of the rod 27.

[0064] As described above, the elastic body 31 is configured to suppress the amount of movement of the cam member 29 with respect to the amount of movement of the rod 27 by elastically deforming by the biasing force from the mounting member 32 to which the cam member 29 in contact with the cam follower 30 is fixed when the rod 27 moves.

[0065] [Setting of operation amount of rod] In the heat treatment apparatus 1, based on a control command from the control unit 15, the drive mechanism 26 operates to manipulate the rod 27. The rod 27 moves in the direction of being drawn into the drive mechanism 26, the cam member 29 comes into contact with the cam follower 30, and the door 12 is pressed so as to closely adhere to the main body 11 side. At this time, with respect to the operation amount for operating the rod 27 in the moving direction of the rod 27 (that is, the stroke amount in the moving direction of the rod 27), it is set to be larger than a predetermined amount compared to the set distance between the cam member 29 and the cam follower 30 in the moving direction of the rod 27 in the state before the door 12 closes the opening 22 and the rod 27 moves. Thereby, with respect to the operation amount for operating the rod 27 in the moving direction, even if there are dimensional errors of components such as the cam member 29 and the cam follower 30 and assembly errors when assembling these components, the positioning between the cam member 29 and the cam follower 30 can be accurately controlled. Hereinafter, the setting of the operation amount of the rod 27 when operating the rod 27 to move in the direction of being drawn into the drive mechanism 26 will be described in more detail.

[0066] FIG. 8(A), FIG. 8(B), and FIG. 8(C) are diagrams for explaining the setting of the operation amount Y of the rod 27 in the close contact mechanism 14. In FIGS. 8(A) to 8(C), the close contact mechanism 14 is shown as having four cam members 29, namely, cam member 29a, cam member 29b, cam member 29c, and cam member 29d, four cam followers 30, namely, cam follower 30a, cam follower 30b, cam follower 30c, and cam follower 30d, and four elastic bodies 31, namely, elastic body 31a, elastic body 31b, elastic body 31c, and elastic body 31d.

[0067] In setting the operation amount Y of the rod 27, first, a set distance X as a reference value for setting the operation amount Y of the rod 27 is determined. Then, when the set distance X as the reference value is determined, next, a predetermined amount that is the amount of movement added on to the set distance X is determined. And finally, the operation amount Y of the rod 27 is determined as a value obtained by adding the predetermined amount to the set distance X.

[0068] Referring to FIG. 8(A), when setting the operation amount Y of the rod 27, first, a set distance X as a reference value for setting the operation amount Y of the rod 27 is determined. The set distance X is the set distance between the cam member 29 and the cam follower 30 in the moving direction of the rod 27 in the state before the door 12 closes the opening 22 and the rod 27 moves. The set distance X corresponds to the distance between the position of the portion of the cam member 29 that contacts the cam follower 30 and the position of the portion of the cam follower 30 that contacts the cam member 29 when it is assumed that there are no dimensional errors and assembly errors in components such as the cam member 29 and the cam follower 30. Also, the set distance X corresponds to the moving amount of the cam member 29 when operating to move the rod 27 in the direction of pulling it into the drive mechanism 26 when it is assumed that there are no dimensional errors and assembly errors in components such as the cam member 29 and the cam follower 30. The set distance X is determined through the following steps 1 to 5.

[0069] First, in step 1, based on the airtightness of the door 12 and the force capable of closely adhering the door 12 to the main body 11 against the internal pressure applied to the door 12 by the gas filled in the main body 11 with the door 12 closing the opening 22, a pressing force of the door 12 for defining how strongly to press the door 12 toward the main body 11 side is set. Next, in step 2, based on the pressing force of the door 12 set in step 1, the pressing force per cam member 29 is set. Specifically, the value of the quotient obtained by dividing the pressing force of the door 12 set in step 1 by the number of cam members 29 provided in the heat treatment apparatus 1 is set as the pressing force per cam member 29.

[0070] In step 3, the maximum allowable load of the cam follower 30 is set so as to have a force capable of withstanding the pressing force per cam member 29 set in step 2, and the cam follower 30 is selected. In step 3, by selecting the cam follower 30, the diameter dimension of the cam follower 30 is also determined.

[0071] In step 4, the inclination angle of the cam member 29, which is a wedge-shaped member, is set. That is, the inclination angle of the cam member 29, which is the angle at which the tapered surface 38 of the cam member 29 is inclined with respect to the axial direction of the rod 27, is set. In order to reduce the thrust of the drive mechanism 26, the inclination angle of the cam member 29 needs to be set to a more gentle angle. On the other hand, if the inclination angle is set to a gentle angle, the length of the cam member 29 will become longer. Therefore, in order to suppress the increase in the length of the cam member 29, it is necessary to set the inclination angle to a steeper angle. Therefore, the inclination angle of the cam member 29 is set to an optimal inclination angle in consideration of the viewpoint of reducing the thrust of the drive mechanism 26 and the viewpoint of suppressing the increase in the length of the cam member 29.

[0072] In step 5, the starting position of the movement of the cam member 29, which is the position where the cam member 29 is separated to a position where it does not contact the cam follower 30, is set. The starting position of the movement of the cam member 29 is the position of the cam member 29 in the state before the rod 27 is operated and pulled into the drive mechanism 26, and is the position where the movement of the cam member 29 is started when the rod 27 is operated. Also, in step 5, the ending position of the movement of the cam member 29, which is the position where the cam member 29 is moved until the cam member 29 contacts the cam follower 30 and the pressing of the door 12 is completed, is set. The ending position of the movement of the cam member 29 is the position where the cam member 29 abuts on the cam follower 30 and the movement of the cam member 29 ends, and the force obtained by resolving the operating force of the rod 27 is transmitted to the cam follower 30. The ending position of the movement of the cam member 29 is set based on the diameter dimension of the cam follower 30 determined in step 3 and the inclination angle of the cam member 29 set in step 4. Then, in step 5, based on the starting position of the movement of the cam member 29 and the ending position of the movement of the cam member 29, a set distance X is determined. That is, the set distance X is determined as the stroke amount required to move the cam member 29 between the starting position of the movement of the cam member 29 and the ending position of the movement of the cam member 29.

[0073] When the set distance X is determined, a predetermined amount that is the moving amount of the rod 27 to be overlaid on the set distance X is then determined. The predetermined amount is determined as the sum of the compression amount of the elastic body 31 when the cam member 29 is pressed against the cam follower 30 and the elastic body 31 is elastically deformed in the compression direction, and the maximum value of the variation amount due to dimensional errors of components such as the cam member 29 and the cam follower 30 and assembly errors of the components. As this predetermined amount, a safety factor (safety ratio) may be further multiplied. The compression amount of the elastic body 31 is determined based on the pressing force per one cam member 29 set in step 2 in the process of determining the set distance X and the elastic coefficient of the selected elastic body 31. The maximum value of the variation amount due to dimensional errors of components and assembly errors of the components is the maximum value of the variation amount of the actual dimension of the distance corresponding to the set distance X when the cam member 29 and the cam follower 30 are installed in the heat treatment apparatus 1.

[0074] Here, the maximum value of the variation amount due to dimensional errors of components and assembly errors of the components will be further described in detail. As shown in FIG. 8(A), if there are no dimensional errors and assembly errors of components such as the cam member 29 and the cam follower 30, the contact position distance, which is the distance between the position of the portion of the cam member 29 that contacts the cam follower 30 and the position of the portion of the cam follower 30 that contacts the cam member 29, is the set distance X. That is, the contact position distances between the cam member 29a and the cam follower 30a, between the cam member 29b and the cam follower 30b, between the cam member 29c and the cam follower 30c, and between the cam member 29d and the cam follower 30d are all the set distance X. However, when the cam member 29 and the cam follower 30 are actually installed in the heat treatment apparatus 1, variations occur in the actual dimension of the contact position distance, which is the distance corresponding to the set distance X.

[0075] FIG. 8(B) shows a state in which the cam member 29 and the cam follower 30 are actually installed in the heat treatment apparatus 1. In the state shown in FIG. 8(B), the distance between the contact positions of the cam member 29a and the cam follower 30a is Xa, the distance between the contact positions of the cam member 29b and the cam follower 30b is Xb, the distance between the contact positions of the cam member 29c and the cam follower 30c is Xc, and the distance between the contact positions of the cam member 29d and the cam follower 30d is Xd. And the variation amount due to the dimensional error of the parts and the assembly error of the parts is the magnitude (absolute value) of the difference between the set distance X and the distance between the contact positions of the cam member 29 and the cam follower 30. For this reason, the variation amount due to the dimensional error of the parts and the assembly error of the parts is |X - Xa| for the cam member 29a and the cam follower 30a, |X - Xb| for the cam member 29b and the cam follower 30a, |X - Xc| for the cam member 29c and the cam follower 30c, and |X - Xd| for the cam member 29d and the cam follower 30d. And the maximum value of the variation amount due to the dimensional error of the parts and the assembly error of the parts is the maximum value among |X - Xa|, |X - Xb|, |X - Xc|, and |X - Xd|.

[0076] When the compression amount of the elastic body 31 and the maximum value of the variation amount due to the dimensional error of the parts and the assembly error of the parts are determined, as the sum of these, a predetermined amount that becomes the movement amount of the rod 27 added to the set distance X is determined. When the predetermined amount is determined, finally, the operation amount Y of the rod 27 is determined as a value obtained by adding the predetermined amount to the set distance X, and the operation amount Y of the rod 27 in the heat treatment apparatus 1 is set.

[0077] Here, the operation amount Y of the rod 27 is set, and the case where the rod 27 is operated to move the set operation amount Y will be described. Referring to FIG. 8(B), in the state before the door 12 closes the opening 22 and the rod 27 moves, the distances between the contact positions of the respective cam members 29a to 29d and the respective cam followers 30a to 30d are Xa to Xd, respectively. From the state shown in FIG. 8(B), the rod 27 is operated to move the operation amount Y. Then, referring to FIG. 8(C), the rod 27 moves by the movement amount of the operation amount Y, and the cam position defining portion 33 fixed to the rod 27 also moves by the movement amount of the operation amount Y toward the cam follower 30 side.

[0078] On the other hand, when the rod 27 moves by the operation amount Y, the respective cam members 29a to 29d move the distances Xa to Xd between the respective contact positions toward the respective cam followers 30a to 30d and come into contact with the respective cam followers 30a to 30d. Then, in a state where the respective cam members 29a to 29d are in contact with the respective cam followers 30a to 30d, the movement along the axial direction of the rod 27 stops. And even after the movement of the respective cam members 29a to 29d stops, the rod 27 moves until the movement over the operation amount Y is completed. For this reason, the cam position defining portion 33 on the rod 27 side and the rod insertion portion 32a on the cam member 29 side, which were in contact with each other before the respective cam members 29a to 29d and the respective cam followers 30a to 30d came into contact, will be separated along the axial direction of the rod 27. And the respective elastic bodies 31a to 31d are elastically deformed in the compression direction, and urge the respective cam members 29a to 29d via the attachment member 32. Thereby, the respective cam followers 30a to 30d are pressed by the respective cam members 29a to 29d, and the respective cam followers 30a to 30d press the door 12 to be in close contact with the main body 11 side.

[0079] When the movement over the operation amount Y of the rod 27 is completed, the rod insertion portion 32a adjacent to the elastic body 31a and the cam position defining portion 33 are separated by a distance Da (Da = Y - Xa) which is the difference between the operation amount Y and the contact position interval distance Xa, and the elastic body 31a is in a state compressed by the distance Da from the state before the movement of the rod 27. Also, the rod insertion portion 32a adjacent to the elastic body 31b and the cam position defining portion 33 are separated by a distance Db (Db = Y - Xb) which is the difference between the operation amount Y and the contact position interval distance Xb, and the elastic body 31b is in a state compressed by the distance Db from the state before the movement of the rod 27. Also, the rod insertion portion 32a adjacent to the elastic body 31c and the cam position defining portion 33 are separated by a distance Dc (Dc = Y - Xc) which is the difference between the operation amount Y and the contact position interval distance Xc, and the elastic body 31c is in a state compressed by the distance Dc from the state before the movement of the rod 27. Also, the rod insertion portion 32a adjacent to the elastic body 31d and the cam position defining portion 33 are separated by a distance Dd (Dd = Y - Xd) which is the difference between the operation amount Y and the contact position interval distance Xd, and the elastic body 31d is in a state compressed by the distance Dd from the state before the movement of the rod 27.

[0080] [Setting of Elastic Force of Elastic Body] In the close contact mechanism 14, a plurality of force dividing means 28 are provided, and an elastic body 31 is provided in each of the plurality of force dividing means 28. And in the close contact mechanism 14, among the plurality of elastic bodies 31 of the plurality of force dividing means 28, the elastic force of the elastic body 31 arranged on the side away from the hinge 23 side with respect to the elastic body 31 arranged on the hinge 23 side with reference to the door 12 in the state where the opening 22 is closed is set to be large. Note that by setting a larger elastic coefficient of the elastic body 31, the elastic force of the elastic body 31 is set to be larger. Hereinafter, the setting of the elastic force of the elastic body 31 will be described in more detail.

[0081] FIG. 9(A), FIG. 9(B), FIG. 9(C), FIG. 9(D), FIG. 9(E), and FIG. 9(F) are diagrams for explaining the setting of the elastic force of the elastic body 31 in the adhesion mechanism 14. Note that FIG. 9(A) is a diagram showing the arrangement of the elastic bodies 31a to 31d in the adhesion mechanism 14. As shown in FIG. 9(A), the elastic bodies 31a to 31d are all provided as coil springs. Hereinafter, the elastic body 31a, the elastic body 31b, the elastic body 31c, and the elastic body 31d are also referred to as spring a, spring b, spring c, and spring d, respectively. FIGS. 9(B) to 9(E) are diagrams showing setting examples of the elastic forces of springs a to d, and are diagrams showing the magnitudes of the elastic forces of the respective springs a to d. Note that the springs a to d are arranged side by side in the order of spring d, spring c, spring b, and spring a, from the hinge 23 side to the end side of the door 12 on the side opposite to the hinge 23 side and away from the hinge 23 side, with the door 12 in the state of closing the opening 22 as a reference.

[0082] In the setting example of the elastic forces of springs a to d shown in FIG. 9(B), the elastic forces are set to increase in the order of spring d, spring c, spring b, and spring a. The elastic force of spring d is set to be the smallest, and the elastic force of spring a is set to be the largest. In this example, among the plurality of springs a to d, the elastic force of spring a arranged on the end side of the door 12, which is the side away from the hinge 23 side, is set to be larger than that of spring d arranged on the hinge 23 side. Also, in this example, among the plurality of springs a to d, the elastic force of spring a arranged on the side farthest from the hinge 23 side is set to be the largest.

[0083] The example of the setting of the elastic forces of the springs a to d shown in Fig. 9(C) is an example applied in a form in which the locking means 13 is arranged not on the end side of the door 12 opposite to the hinge 23 side but on the upper end side and the lower end side of the door 12, and further, the locking means 13 is arranged at a position corresponding to the spring b. In this example, among the plurality of springs a to d, the elastic force of the spring a arranged on the end side of the door 12 on the side away from the hinge 23 side is set to be large with respect to the springs d, c, and b arranged on the hinge 23 side. Also, in this example, among the plurality of springs a to d, the elastic force of the spring b arranged at the position corresponding to the locking means 13 is set to be the smallest, and the elastic force of the spring a arranged on the side farthest from the hinge 23 side is set to be the largest.

[0084] In the example of the setting of the elastic forces of the springs a to d shown in Fig. 9(D), the elastic force of the spring d is set to be the smallest, and the elastic force of the spring a is set to be the largest. And the elastic forces of the springs c and b are of the same magnitude, and are set to be larger than the elastic force of the spring d and smaller than the elastic force of the spring a. In this example, among the plurality of springs a to d, the elastic force of the spring a arranged on the end side of the door 12 on the side away from the hinge 23 side is set to be large with respect to the spring d arranged on the hinge 23 side. Also, in this example, among the plurality of springs a to d, the elastic force of the spring a arranged on the side farthest from the hinge 23 side is set to be the largest.

[0085] The example of the setting of the elastic forces of the springs a to d shown in Fig. 9(E) is an example applied in a form in which the door 12 is formed so as to partially expand vertically at a position corresponding to the spring b. Fig. 9(F) is a diagram schematically showing the form of the door 12 formed so as to partially expand vertically at a position corresponding to the spring b. In this example, among the plurality of springs a to d, the elastic force of the spring b arranged on the end side of the door 12 on the side away from the hinge 23 side is set to be large with respect to the spring c arranged on the hinge 23 side. Also, in this example, among the plurality of springs a to d, the elastic force of the spring b arranged at the position corresponding to the partially expanded portion of the door 12 is set to be the largest.

[0086] In the adhesion mechanism 14 of the heat treatment apparatus 1, four elastic bodies 31 are provided. However, even when the number of elastic bodies 31 provided in the adhesion mechanism 14 is three, two, or five or more, the elastic force of the elastic bodies 31 can be set in the same manner as when the number of elastic bodies 31 is four. That is, even when the number of elastic bodies 31 is a plurality other than four, among the plurality of elastic bodies 31, with respect to the elastic body 31 arranged on the hinge 23 side with reference to the door 12 in the state where the opening 22 is closed, the elastic force of the elastic body 31 arranged on the side away from the hinge 23 side with reference to the door 12 in the state where the opening 22 is closed can be set to be large.

[0087] FIGS. 10(A), 10(B), and 10(C) are diagrams for explaining the setting of the elastic force of the elastic bodies 31 in the adhesion mechanism 14 according to a modified example in which three elastic bodies 31 are provided. Note that FIG. 10(A) is a diagram showing the arrangement of the three elastic bodies 31a to 31c in the adhesion mechanism 14 according to the modified example. In the adhesion mechanism 14 according to the modified example shown in FIG. 10(A), three force dividing means 28 are provided, and each of the three force dividing means 28 includes an elastic body 31. As shown in FIG. 10(A), the elastic bodies 31a to 31c are all provided as coil springs. Hereinafter, the elastic body 31a, the elastic body 31b, and the elastic body 31c are also referred to as spring a, spring b, and spring c, respectively. FIGS. 10(B) and 10(C) are diagrams showing setting examples of the elastic forces of the springs a to c, and are diagrams showing the magnitudes of the elastic forces of the respective springs a to c. Note that the springs a to c are arranged side by side in the order of spring c, spring b, and spring a from the hinge 23 side to the end side of the door 12, which is the side opposite to the hinge 23 side and away from the hinge 23 side, with reference to the door 12 in the state where the opening 22 is closed.

[0088] In the example of the setting of the elastic forces of springs a to c shown in FIG. 10(B), the elastic forces are set to increase in the order of spring c, spring b, and spring a. The elastic force of spring c is set to be the smallest, and the elastic force of spring a is set to be the largest. In this example, among the plurality of springs a to c, the elastic force of spring a arranged on the end side of the door 12, which is the side away from the 23rd side, is set to be larger than that of spring c arranged on the 23rd side. Also, in this example, among the plurality of springs a to c, the elastic force of spring a arranged on the side farthest from the 23rd side is set to be the largest.

[0089] The example of the setting of the elastic forces of springs a to c shown in FIG. 10(C) is an example of a setting applied in a form in which the locking means 13 is arranged not on the end side of the door 12 on the side opposite to the 23rd side but on the upper end side and the lower end side of the door 12, and further, the locking means 13 is arranged at a position corresponding to spring b. In this example, among the plurality of springs a to c, the elastic force of spring a arranged on the end side of the door 12, which is the side away from the 23rd side, is set to be larger than that of spring c and spring b arranged on the 23rd side. Also, in this example, among the plurality of springs a to c, the elastic force of spring b arranged at a position corresponding to the locking means 13 is set to be the smallest, and the elastic force of spring a arranged on the side farthest from the 23rd side is set to be the largest.

[0090] FIG. 11(A), FIG. 11(B), FIG. 11(C), and FIG. 11(D) are diagrams for explaining the setting of the elastic force of the elastic bodies 31 in the adhesion mechanism 14 according to a modified example in which two elastic bodies 31 are provided. Note that FIGS. 11(A) and 11(B) are diagrams showing an arrangement example of two elastic bodies 31a and 31b in the adhesion mechanism 14 according to the modified example. In the adhesion mechanism 14 according to the modified example shown in each of FIGS. 11(A) and 11(B), two force dividing means 28 are provided, and each of the two force dividing means 28 includes an elastic body 31. Note that the distance between the elastic body 31a and the elastic body 31b is different between the adhesion mechanism 14 shown in FIG. 11(A) and the adhesion mechanism 14 shown in FIG. 11(B). More specifically, in the adhesion mechanism 14 shown in FIG. 11(B), the elastic body 31b is arranged closer to the elastic body 31a than in the adhesion mechanism 14 shown in FIG. 11(A).

[0091] As shown in FIGS. 11(A) and 11(B), both the elastic body 31a and the elastic body 31b are provided as coil springs, and hereinafter, the elastic body 31a and the elastic body 31b are also referred to as spring a and spring b, respectively. FIG. 11(C) is a diagram showing a setting example of the elastic forces of spring a and spring b in the adhesion mechanism 14 shown in FIG. 11(A), and is a diagram showing the magnitudes of the elastic forces of spring a and spring b. FIG. 11(D) is a diagram showing a setting example of the elastic forces of spring a and spring b in the adhesion mechanism 14 shown in FIG. 11(B), and is a diagram showing the magnitudes of the elastic forces of spring a and spring b. Note that in both the adhesion mechanism 14 shown in FIG. 11(A) and the adhesion mechanism 14 shown in FIG. 11(B), with the door 12 in a state where the opening 22 is closed as a reference, spring b is arranged on the hinge 23 side, and spring a is arranged on the end side of the door 12, which is on the side opposite to the hinge 23 side and away from the hinge 23 side.

[0092] In the setting example of the elastic forces of springs a and b shown in Fig. 11(C), among the plurality of springs a to b, the elastic force of spring a arranged on the end side of door 12, which is the side away from the 23 side, is set to be larger than that of spring b arranged on the 23 side. As shown in Fig. 11(C), in the close contact mechanism 14 shown in Fig. 11(A) where spring b is arranged far away on the 23 side with respect to spring a arranged on the end side of door 12, the elastic force of spring b is set to be considerably smaller than that of spring a, for example, set to be less than half of that of spring a.

[0093] In the setting example of the elastic forces of springs a and b shown in Fig. 11(D), among the plurality of springs a to b, the elastic force of spring a arranged on the end side of door 12, which is the side away from the 23 side, is set to be larger than that of spring b arranged on the 23 side. As shown in Fig. 11(C), in the close contact mechanism 14 shown in Fig. 11(A) where spring b arranged on the 23 side is arranged closer to the end side of door 12 than spring a arranged on the end side of door 12, the elastic force of spring b is set to be slightly smaller than that of spring a.

[0094] [Arrangement of Force Dividing Means] In the heat treatment apparatus 1, close contact mechanisms 14a and 14b as the close contact mechanism 14 are respectively provided on the upper end side and the lower end side of door 12 in a state where opening 22 is closed. And the close contact mechanisms 14a and 14b each include four force dividing means 28 having cam members 29 and cam followers 30 that contact each other. Further, each of the four force dividing means 28 in the close contact mechanism 14a on the upper end side of door 12 and each of the four force dividing means 28 in the close contact mechanism 14b on the lower end side of door 12 are arranged side by side in the vertical direction. Thereby, the heat treatment apparatus 1 is configured to closely contact and press door 12 against the main body 11 side at four positions on the upper and lower sides of door 12 by the force dividing means 28 arranged corresponding to the vertical direction.

[0095] As described above, in the heat treatment apparatus 1, the door 12 is pressed toward the main body 11 at four positions, respectively, above and below the door 12, by the biasing means 28 arranged corresponding to the vertical direction. However, not limited to this example, a form may be implemented in which the door 12 is pressed toward the main body 11 by the biasing means 28 arranged at positions different from those of the heat treatment apparatus 1 above and below the door 12, respectively.

[0096] FIGS. 12(A), 12(B), and 12(C) are diagrams for explaining the arrangement of the biasing means 28 in the close contact mechanism 14 of the heat treatment apparatuses 1a to 1c according to the modified examples. Note that FIG. 12(A) is a front view of the heat treatment apparatus 1a according to the modified example, FIG. 12(B) is a front view of the heat treatment apparatus 1b according to the modified example, and FIG. 12(C) is a front view of the heat treatment apparatus 1c. In the description of the heat treatment apparatuses 1a to 1c according to the modified examples, for the same or corresponding configurations as those of the heat treatment apparatus 1, duplicate explanations are omitted by attaching the same reference numerals in the drawings or by citing the same reference numerals.

[0097] In the heat treatment apparatus 1a according to the modified example shown in FIG. 12(A), close contact mechanisms 14a and 14b as the close contact mechanism 14 are provided on the upper end side and the lower end side of the door 12 in a state where the opening 22 is closed, respectively. The close contact mechanisms 14a and 14b each include one biasing means 28 having a cam member 29 and a cam follower 30 that are in contact with each other.

[0098] The biasing means 28 of the close contact mechanism 14a is disposed on the upper end side of the door 12 with the opening 22 closed. And the biasing means 28 of the close contact mechanism 14a is disposed on the end side of the door 12 on the side opposite to the hinge 23 side with respect to the door 12 with the opening 22 closed. Also, the biasing means 28 of the close contact mechanism 14b is disposed on the lower end side of the door 12 with the opening 22 closed. And the biasing means 28 of the close contact mechanism 14b is disposed on the end side of the door 12 on the side opposite to the hinge 23 side with respect to the door 12 with the opening 22 closed. Further, one biasing means 28 in the close contact mechanism 14a on the upper end side of the door 12 and one biasing means 28 in the close contact mechanism 14b on the lower end side of the door 12 are arranged side by side in the vertical direction. Thereby, the heat treatment apparatus 1a is configured to bring the door 12 into close contact with and press the door 12 against the main body 11 side at one position each on the upper and lower sides of the door 12 by the biasing means 28 arranged corresponding to the vertical direction.

[0099] In the heat treatment apparatus 1a, the biasing means 28 of the close contact mechanism 14a and the close contact mechanism 14b are disposed on the end side of the door 12 rather than on the hinge 23 side with respect to the door 12 with the opening 22 closed, but this is not necessarily the case. For example, the biasing means 28 of the close contact mechanism 14a and the close contact mechanism 14b may be disposed at an intermediate portion between the hinge 23 side and the end side of the door 12.

[0100] In the heat treatment apparatus 1b according to the modification shown in FIG. 12(B), the close contact mechanisms 14a and 14b as the close contact mechanism 14 are respectively provided on the upper end side and the lower end side of the door 12 with the opening 22 closed. And the close contact mechanisms 14a and 14b each include two biasing means 28 having cam members 29 and cam followers 30 that contact each other.

[0101] The two biasing means 28 of the close contact mechanism 14a are arranged on the upper end side of the door 12 with the opening 22 closed. And, with the door 12 with the opening 22 closed as a reference, one of the two biasing means 28 of the close contact mechanism 14a is arranged at an intermediate portion between the hinge 23 side and the end side of the door 12, and the other of the two biasing means 28 is arranged at the end side of the door 12. Further, the two biasing means 28 of the close contact mechanism 14b are arranged on the lower end side of the door 12 with the opening 22 closed. And, with the door 12 with the opening 22 closed as a reference, one of the two biasing means 28 of the close contact mechanism 14b is arranged at an intermediate portion between the hinge 23 side and the end side of the door 12, and the other of the two biasing means 28 is arranged at the end side of the door 12. Furthermore, each of the two biasing means 28 in the close contact mechanism 14a on the upper end side of the door 12 and each of the two biasing means 28 in the close contact mechanism 14b on the lower end side of the door 12 are arranged side by side in the vertical direction. Thereby, the heat treatment apparatus 1b is configured to closely contact and press the door 12 against the main body 11 side at two positions, respectively, above and below the door 12, by the biasing means 28 arranged corresponding to the vertical direction.

[0102] In the heat treatment apparatus 1c according to the modification shown in FIG. 12(C), the close contact mechanisms 14a and 14b as the close contact mechanism 14 are respectively provided on the upper end side and the lower end side of the door 12 with the opening 22 closed. And, the close contact mechanisms 14a and 14b each include three biasing means 28 having cam members 29 and cam followers 30 that contact each other.

[0103] The three biasing means 28 of the close contact mechanism 14a are arranged on the upper end side of the door 12 with the opening 22 closed, and are arranged side by side at substantially equal intervals along the edge portion on the upper end side of the door 12. And, with the door 12 in the state where the opening 22 is closed as a reference, one of the three biasing means 28 of the close contact mechanism 14a is arranged on the hinge 23 side, and the other one of the three biasing means 28 is arranged at an intermediate portion between the hinge 23 side and the end side of the door 12, and the remaining one of the three biasing means 28 is arranged on the end side of the door 12. Also, the three biasing means 28 of the close contact mechanism 14b are arranged on the lower end side of the door 12 with the opening 22 closed, and are arranged side by side at substantially equal intervals along the edge portion on the lower end side of the door 12. And, with the door 12 in the state where the opening 22 is closed as a reference, one of the three biasing means 28 of the close contact mechanism 14b is arranged on the hinge 23 side, and the other one of the three biasing means 28 is arranged at an intermediate portion between the hinge 23 side and the end side of the door 12, and the remaining one of the three biasing means 28 is arranged on the end side of the door 12. Further, each of the three biasing means 28 in the close contact mechanism 14a on the upper end side of the door 12 and each of the three biasing means 28 in the close contact mechanism 14b on the lower end side of the door 12 are arranged side by side in the vertical direction. Thereby, the heat treatment apparatus 1c is configured to closely contact and press the door 12 against the main body 11 side at three positions on the upper and lower sides of the door 12 by the biasing means 28 arranged corresponding to the vertical direction.

[0104] Note that, not limited to the examples of the heat treatment apparatus 1 and the heat treatment apparatuses 1a to 1c according to the modified examples thereof described above, a form in which the door 12 is pressed against the main body 11 side by biasing means 28 arranged at further different positions on the upper and lower sides of the door 12 may be implemented. For example, a form in which the door 12 is pressed against the main body 11 side at five or more positions on the upper and lower sides of the door 12 by biasing means 28 arranged corresponding to the vertical direction may be implemented.

[0105] [Operation of the Heat Treatment Apparatus] Next, an example of the processing operation of the heat treatment apparatus 1 will be described. When the processing operation of the heat treatment apparatus 1 is started, first, with the door 12 opening the opening 22, the workpiece 10 stored in the case 10a is carried in from the opening 22 and arranged inside the main body 11. When the loading of the workpiece 10 into the main body 11 is completed, the door 12 is operated to close, and the opening 22 is blocked by the door 12. When the door 12 is closed, the cam followers 30 provided at the edge portions on the upper end side and the lower end side of the door 12 are received in the recesses 37 provided at the edge portion of the opening 22 in the main body 11. When the door 12 is closed, the locking means 13 operates based on a control command from the control unit 15, and the door 12 is locked to the main body 11.

[0106] With the door 12 closed and locked by the locking means 13, the drive mechanism 26 operates based on a control command from the control unit 15, the rod 27 is operated, and the rod 27 moves in a direction in which it is drawn into the drive mechanism 26. Then, as the rod 27 moves, the plurality of cam members 29 come into contact with the plurality of cam followers 30 respectively, and the plurality of cam followers 30 are pressed toward the main body 11 side, so that the door 12 is pressed toward the main body 11 side in a state of being in close contact with the main body 11 side. With the door 12 in close contact with and pressed against the main body 11 side, heat treatment is performed on the workpiece 10 arranged inside the main body 11.

[0107] When the heat treatment of the workpiece 10 is completed, the process of taking out the workpiece 10 from the main body 11 is started. At this time, first, the drive mechanism 26 operates based on a control command from the control unit 15, and the rod 27 is operated to move in a direction in which it is pushed out from the drive mechanism 26. As the rod 27 moves in a direction in which it is pushed out from the drive mechanism 26, the plurality of cam members 29 that were respectively in contact with the plurality of cam followers 30 on the door 12 side are separated from the plurality of cam followers 30 on the door 12 side respectively. Thereby, the state in which the door 12 is in close contact with the main body 11 side is released.

[0108] When the state of close contact with the main body 11 of the door 12 is released, the locking means 13 operates based on a control command from the control unit 15, and the lock on the main body 11 of the door 12 is released. When the lock on the main body 11 of the door 12 is released, the door 12 is operated to open, and the opening 22 is opened. Then, the object to be processed 10 stored in the case 10a is carried out from the opening 22 and taken out to the outside of the main body 11. Thereby, the processing operation of the heat treatment apparatus 1 is completed.

[0109] As described above, in the above-described embodiment, an example has been described in which, by pulling in the rod 27 by the drive mechanism 26, the cam member 29 that has moved together with the rod 27 abuts on the cam follower 30, and a force obtained by dividing the operating force of the rod 27 by the drive mechanism 26 is transmitted to the door 12. However, by pushing out the rod 27 by the drive mechanism 26, the cam member 29 that has moved together with the rod 27 abuts on the cam follower 30, and a force obtained by dividing the operating force of the rod 27 by the drive mechanism 26 may be transmitted to the door 12. That is, when the drive mechanism 26 is operated so that the rod 27 moves in a direction in which the rod 27 is pushed out from the drive mechanism 26, the cam member 29 that has moved together with the rod 27 may be configured to abut on the cam follower 30.

[0110] [Effects of the present embodiment] As described above, according to the heat treatment apparatus 1 of the present embodiment, the means for bringing the door 12 in a state where the opening 22 of the main body 11 is closed into close contact with the main body 11 side is composed of a rod 27 that moves in a direction perpendicular to the pressing direction of the door 12, which is a different direction, and a component force means 28 that components the operating force in the moving direction of the rod 27. The rod 27 is arranged so as to extend along the surface 16a of the front wall 16, which is the surface provided with the opening 22 in the main body 11, and the component force means 28 is arranged in the vicinity of the rod 27 in a state where the door 12 closes the opening 22 so as to operate as the rod 27 moves. For this reason, the rod 27 and the component force means 28, which are the means for bringing the door 12 into close contact with the main body 11 side, can be prevented from protruding from the front surfaces of the main body 11 and the door 12. Therefore, according to the present embodiment, it is possible to provide a heat treatment apparatus 1 in which the means for bringing the door 12 into close contact with the main body 11 side so that the gas does not leak due to close contact does not protrude from the front surfaces of the main body 11 and the door 12.

[0111] When there are dimensional errors in components such as the cam member 29 and the cam follower 30, and when there are assembly errors when assembling components such as the cam member 29 and the cam follower 30, the accuracy of the position between the cam member 29 on the rod 27 side and the cam follower 30 on the door 12 side is not constant and variations will occur. For this reason, it is necessary to accurately adjust the positioning between the cam member 29 and the cam follower 30. However, according to the heat treatment apparatus 1 of the present embodiment, the movement amount of the cam member 29 on the rod 27 side that abuts on the cam follower 30 on the door 12 side and components the operating force of the rod 27 is suppressed by the elastic body 31. For this reason, when the rod 27 moves and the cam member 29 abuts on the cam follower 30, even if there are dimensional errors and assembly errors of the components, the errors are absorbed by the deformation of the elastic body 31. Thereby, the positioning between the cam member 29 and the cam follower 30 can be accurately adjusted only by the operating amount in the moving direction of the rod 27.

[0112] For example, even when adjustment means for adjusting the positions of the individual cam members 29 arranged on the axis of the rod 27 is provided by a threaded portion provided on the rod 27 and a nut screwed onto the threaded portion, if there are a plurality of cam members 29, it becomes difficult to accurately align the cam members 29 on the axis of the rod 27. However, according to the heat treatment apparatus 1 of the present embodiment, the elastic bodies 31 provided on the respective component force means 28 can individually absorb the individual errors present in the respective component force means 28. Therefore, in each of the plurality of component force means 28 that operate at the same timing as the movement of the rod 27, the positioning between the cam member 29 and the cam follower 30 can be accurately adjusted.

[0113] Also, according to the heat treatment apparatus 1 of the present embodiment, among the plurality of elastic bodies 31, the elastic force of the elastic body 31 arranged on the side away from the hinge 23 is set larger than that of the elastic body 31 arranged on the hinge 23 side. For this reason, in the component force means 28 arranged on the side away from the hinge 23 among the plurality of component force means 28, the force with which the cam member 29 biases the cam follower 30 can be increased. Generally, when internal pressure is applied, the door 12 tends to open. Even if the sealing pressure of the seal 49 is ensured on the hinge 23 side, the sealing pressure of the seal 49 decreases more as the distance from the hinge 23 increases. Therefore, it is necessary to increase the elastic force of the more remotely arranged elastic bodies 31. However, although it is desired to make the sealing pressure of the seal 49 uniform, there may be a case where the sealing pressure of the seal 49 does not become uniform due to the shape of the door 12 or the arrangement relationship with the locking means 13 of the door 12. However, by configuring as in the present embodiment, the sealing pressure of the seal 49 can be made uniform.

[0114] Further, according to the heat treatment apparatus 1 of the present embodiment, when the door 12 is closed, the cam follower 30 on the door 12 side is received in the recess 37 at the edge portion of the opening 22 of the main body 11. Therefore, the door 12 can be closed while the cam follower 30 is arranged inside the main body 11 without interfering with the main body 11. For this reason, when the door 12 is closed, it is possible to prevent the cam follower 30 from being arranged on the front side of the main body 11. Further, after the door 12 is closed, the rod 27 provided on the main body 11 side moves, and when the cam member 29 abuts on the cam follower 30, the force divided from the operating force of the rod 27 is transmitted to the cam follower 30, and the door 12 can be brought into close contact with the main body 11 side. Therefore, according to the heat treatment apparatus 1 of the present embodiment, with a simple configuration in which the recess 37 is provided at the edge portion of the opening 22, a structure can be easily constructed that can prevent the biasing means 28 for bringing the door 12 into close contact with the main body 11 from being arranged on the front side of the main body 11.

[0115] Further, according to the heat treatment apparatus 1 of the present embodiment, the operation amount of the rod 27 is set to be larger than a predetermined amount than the set distance between the cam member 29 and the cam follower 30 in a state before the rod 27 moves after the door 12 is closed. For this reason, when the rod 27 moves and the cam member 29 abuts on the cam follower 30, even if there are dimensional errors and assembly errors of the parts, the errors can be more reliably absorbed by the deformation of the elastic body 31.

[0116] Further, according to the heat treatment apparatus 1 of the present embodiment, with a simple structure in which the elastic body 31 arranged on the axis of the rod 27 is fitted so as to fit the elastic body 31 around the outer periphery of the shaft of the rod 27, the rod 27 and the elastic body 31 are not arranged continuously in the coaxial direction, and the combined structure of the rod 27 and the elastic body 31 can be configured to be short in the rod axis direction.

[0117] (Second Embodiment) Next, the heat treatment apparatus 2 according to the second embodiment of the present invention will be described. FIG. 13 is a perspective view of the heat treatment apparatus 2 according to the second embodiment of the present invention. The heat treatment apparatus 2 of the second embodiment is configured as an apparatus for performing heat treatment on the workpiece 10, similar to the heat treatment apparatus 1 of the first embodiment. In the following description of the second embodiment, differences from the above-described first embodiment will be described, and for configurations similar to or corresponding to those of the first embodiment, the same reference numerals will be given in the drawings or the same reference numerals will be cited to omit redundant explanations.

[0118] The heat treatment apparatus 2 shown in FIG. 13 includes a main body 11, a door 12 for opening and closing the main body 11, a locking means 13 for locking the main body 11 and the door 12, a close contact mechanism 14 for bringing the door 12 into close contact with the main body 11, a control unit 15, etc., similar to the heat treatment apparatus 1 of the first embodiment. However, the heat treatment apparatus 2 is different from the heat treatment apparatus 1 in the configuration regarding the arrangement of the locking means 13 and the close contact mechanism 14.

[0119] In the heat treatment apparatus 2, the door 12 is provided as a door for opening and closing an opening 22 provided in the front wall 16 of the main body 11, similar to the door 12 of the heat treatment apparatus 1, and is provided as a hinged door configured to open in a side-opening state with respect to the main body 11 via a plurality of hinges 23. A plurality of locking means 13 for locking the door 12 to the main body 11 in a state where the door 12 closes the opening 22 are provided, and in the second embodiment, for example, two are provided.

[0120] In the second embodiment, the two locking means 13 are arranged on the upper end side and the lower end side of the door 12 when the door 12 closes the opening 22. That is, one of the two locking means 13 is arranged on the upper end side of the door 12, and the other locking means 13 is arranged on the lower end side of the door 12. Further, each locking means 13 is arranged at an intermediate portion between the hinge 23 side and the end portion side of the door 12 on the side opposite to the hinge 23 side, with reference to the door 12 in a state where the opening 22 is closed. And the two locking means 13 are arranged vertically along the front wall 16 when the door 12 closes the opening 22. Incidentally, each locking means 13 may be arranged on the end portion side of the door 12 with reference to the door 12 in a state where the opening 22 is closed.

[0121] Each locking means 13 of the heat treatment apparatus 2 is configured to have a hook 13a provided on the door 12 and a hook holding portion 13b provided on the front wall 16 of the main body 11, similar to the locking means 13 of the heat treatment apparatus 1. The hook 13a formed in a claw shape protruding from the door 12 is provided on the upper end side and the lower end side of the door 12, respectively, and protrudes from the outer portion 12a of the door 12 toward the inside of the main body 11. The hook holding portion 13b that engages with the hook 13a and holds the hook 13a when the door 12 closes the opening 22 is provided at the edge portion of the opening 22 on the front wall 16 of the main body 11 and is provided on the outer edge portion 23a. Further, the hook holding portion 13b is provided on the upper end side and the lower end side of the opening 22, respectively, at the outer edge portion 23a.

[0122] As described above, since the heat treatment apparatus 2 is provided with the locking means 13, when the door 12 provided as a horizontally-opening hinged door closes the opening 22, the door 12 is locked to the main body 11 by the locking means 13 arranged above and below the door 12.

[0123] In the heat treatment apparatus 2, one adhesion mechanism 14 for bringing the door 12 into close contact with the main body 11 when the door 12 closes the opening 22 is provided. And the adhesion mechanism 14 is arranged on the end portion side of the door 12 on the side opposite to the hinge 23 side when the door 12 closes the opening 22.

[0124] The close contact mechanism 14 of the heat treatment apparatus 2 is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28, similar to the close contact mechanism 14 of the heat treatment apparatus 1.

[0125] The rod 27 of the close contact mechanism 14 of the heat treatment apparatus 2 is disposed inside the main body 11 and is connected at one end to the drive mechanism 26 fixed to the main body 11. Further, the rod 27 is disposed inside the main body 11 and inside the front wall 16. And the rod 27 is disposed so as to extend along the surface 16a of the front wall 16 which is the surface provided with the opening 22 in the main body 11. That is, the rod 27 is disposed inside the front wall 16 in a state where the axial direction of the rod 27 extends along the surface (the surface 16a of the front wall 16) provided with the opening 22 in the main body 11. Also, the rod 27 extends along the surface provided with the opening 22 in the main body 11, and is disposed so as to extend in the vertical direction along the edge portion of the opening 22 at the end side of the door 12 which is opposite to the hinge 23 side with respect to the door 12 in a state where the opening 22 is closed.

[0126] Also, the rod 27 is configured to move in the vertical direction along the axial direction of the rod 27 by being operated by the drive mechanism 26. Further, the rod 27 is configured to move in a direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 by being operated by the drive mechanism 26 to move in the vertical direction along the axial direction of the rod 27. The pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 is a direction perpendicular to the surface 16a of the front wall 16, and is a direction in which the door 12 closing the opening 22 is pressed against the main body 11 so as to be in close contact with the main body 11 side. Also, the direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 is a direction orthogonal to the pressing direction, and is the moving direction of the rod 27 in which the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction.

[0127] The biasing means 28 of the heat treatment apparatus 2 is provided as a mechanism that biases the operating force for operating the rod 27 in the moving direction of the rod 27 in the state where the door 12 closes the opening 22, similar to the biasing means 28 of the heat treatment apparatus 1, and causes the door 12 to closely adhere to the main body 11 side. And a plurality of biasing means 28 are also provided in the close contact mechanism 14 of the heat treatment apparatus 2. In the second embodiment, two biasing means 28 are provided in the close contact mechanism 14.

[0128] Each of the plurality of biasing means 28 in the close contact mechanism 14 of the heat treatment apparatus 2 has a cam member 29, a cam follower 30, and an elastic body 31, similar to the biasing means 28 of the close contact mechanism 14 of the heat treatment apparatus 1. Therefore, in the second embodiment, in the close contact mechanism 14, two cam members 29, two cam followers 30, and two elastic bodies 31 are provided respectively.

[0129] The two cam members 29 in the close contact mechanism 14 are attached to the rod 27 and are arranged side by side along the axial direction of the rod 27 extending in the vertical direction. The two elastic bodies 31 in the close contact mechanism 14 are attached to the rod 27 and are configured to suppress the amount of movement of the cam member 29 with respect to the amount of movement of the rod 27. Also, the two elastic bodies 31 are arranged side by side on the axis of the rod 27 and are coaxially arranged with the rod 27. The two cam followers 30 in the close contact mechanism 14 are provided at the edge portion of the door 12 on the end side of the door 12 opposite to the hinge 23 side. Also, the two cam followers 30 are provided at the edge portion of the outer portion 12a of the door 12 and are arranged side by side along the vertical direction.

[0130] The component force means 28 of the close contact mechanism 14 of the heat treatment apparatus 2 operates in the same manner as the component force means 28 of the heat treatment apparatus 1. That is, when the rod 27 operated by the drive mechanism 26 moves with the door 12 closing the opening 22 in the heat treatment apparatus 2, the cam member 29 and the cam follower 30 come into contact with each other, and a component force from the operating force for operating the rod 27 in the moving direction is divided from the cam member 29 to the cam follower 30. Then, the component force means 28 transmits the force divided from the operating force for operating the rod 27 from the cam member 29 to the cam follower 30, thereby pressing and closely contacting the door 12 provided with the cam follower 30 toward the main body 11 side.

[0131] According to the heat treatment apparatus 2 of the second embodiment described above, similar to the heat treatment apparatus 1 of the first embodiment, the means for closely contacting the door 12 in a state where the opening 22 of the main body 11 is closed toward the main body 11 side is composed of a rod 27 that moves in a direction perpendicular to the pressing direction of the door 12 and a component force means 28 that divides the operating force in the moving direction of the rod 27. The rod 27 is arranged so as to extend along the surface 16a of the front wall 16 which is the surface provided with the opening 22 in the main body 11, and the component force means 28 is arranged in the vicinity of the rod 27 in a state where the door 12 closes the opening 22 so as to operate as the rod 27 moves. For this reason, the rod 27 and the component force means 28, which are the means for closely contacting the door 12 toward the main body 11 side, can be prevented from protruding from the front surfaces of the main body 11 and the door 12. Therefore, according to the second embodiment, it is possible to provide a heat treatment apparatus 2 in which the means for closely contacting the door 12 toward the main body 11 side so that the gas does not leak due to close contact does not protrude from the front surfaces of the main body 11 and the door 12.

[0132] (Third Embodiment) Next, the heat treatment apparatus 3 according to the third embodiment of the present invention will be described. FIG. 14 is a perspective view of the heat treatment apparatus 3 according to the third embodiment of the present invention. The heat treatment apparatus 3 of the third embodiment is configured as an apparatus for performing heat treatment on the workpiece 10, similar to the heat treatment apparatus 1 of the first embodiment. In the following description of the third embodiment, differences from the aforementioned first embodiment will be described, and for configurations similar to or corresponding to those of the first embodiment, duplicate explanations will be omitted by attaching the same reference numerals in the drawings or by citing the same reference numerals.

[0133] The heat treatment apparatus 3 shown in FIG. 14, similar to the heat treatment apparatus 1 of the first embodiment, includes a main body 11, a door 12 for opening and closing the main body 11, a locking means 13 for locking the main body 11 and the door 12, a close contact mechanism 14 for bringing the door 12 into close contact with the main body 11, a control unit 15, etc. However, the heat treatment apparatus 3 is different from the heat treatment apparatus 1 in the configuration regarding the opening and closing direction of the door 12 and the arrangement of the locking means 13 and the close contact mechanism 14.

[0134] In the heat treatment apparatus 3, the door 12 is provided as a door for opening and closing the opening 22 provided in the front wall 16 of the main body 11, and is provided as a door 12 having a rectangular outer shape that closes the entire opening 22. The door 12 is provided as a hinged door attached to the main body 11 via a plurality of hinges 23. In the third embodiment, the door 12 is configured to open in a vertically opening state via two hinges 23 with respect to the front wall 16 of the main body 11. That is, the door 12 is attached to the front wall 16 so as to rotate in the vertical direction around the hinge 23 with respect to the main body 11 via two hinges 23 arranged horizontally along the front wall 16 on the upper end side of the door 12 in the state where the opening 22 is closed.

[0135] In the heat treatment apparatus 3, a plurality of locking means 13 for locking the door 12 to the main body 11 with the door 12 closing the opening 22 are provided. In the third embodiment, for example, two locking means 13 are provided. In the third embodiment, the two locking means 13 are arranged on the side opposite to the hinge 23 side with respect to the door 12 and on the lower end side with respect to the door 12 in a state where the door 12 closes the opening 22. Then, the two locking means 13 are arranged side by side in the horizontal direction along the front wall 16 in a state where the door 12 closes the opening 22.

[0136] Each locking means 13 of the heat treatment apparatus 3 is configured to have a hook 13a provided on the door 12 and a hook holding portion 13b provided on the front wall 16 of the main body 11, similar to the locking means 13 of the heat treatment apparatus 1. The hook 13a formed in a claw shape protruding from the door 12 is provided on the end side of the door 12 opposite to the hinge 23 side of the door 12 and on the lower end side of the door 12 in a state where the door 12 closes the opening 22. Further, the hook 13a is provided to protrude from the outer portion 12a of the door 12 toward the inside of the main body 11. The hook holding portion 13b that engages with the hook 13a and holds the hook 13a in a state where the door 12 closes the opening 22 is provided at the edge portion of the opening 22 on the front wall 16 of the main body 11 and on the outer edge portion 23a. Also, the hook holding portion 13b is provided on the lower end side of the opening 22 at the outer edge portion 23a.

[0137] Since the heat treatment apparatus 3 is provided with the locking means 13 as described above, in a state where the door 12 provided as a vertically-opening hinged door closes the opening 22, the door 12 is locked to the main body 11 by the locking means 13 arranged on the end side of the door 12 opposite to the hinge 23 side and on the lower end side of the door 12.

[0138] In the heat treatment apparatus 3, a plurality of adhesion mechanisms 14 for bringing the door 12 into close contact with the main body 11 with the door 12 closing the opening 22 are provided. In the third embodiment, two such adhesion mechanisms 14 are provided. In the third embodiment, as the two adhesion mechanisms 14, an adhesion mechanism 14a and an adhesion mechanism 14b are provided. The adhesion mechanism 14a is disposed on the side wall 18 side of the main body 11 at one end side in the horizontal direction with respect to the door 12 and the opening 22 with the door 12 closing the opening 22. The adhesion mechanism 14b is disposed on the side wall 19 side of the main body 11 at the other end side in the horizontal direction with respect to the door 12 and the opening 22 with the door 12 closing the opening 22.

[0139] Each of the two adhesion mechanisms 14 in the heat treatment apparatus 3 is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28, similar to the adhesion mechanism 14 of the heat treatment apparatus 1. That is, the adhesion mechanism 14a is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28, and the adhesion mechanism 14b is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28. Incidentally, the adhesion mechanism 14a disposed on the side wall 18 side with respect to the door 12 and the adhesion mechanism 14b disposed on the side wall 19 side with respect to the door 12 with the door 12 closing the opening 22 are similarly configured except that the horizontal positions of the rod 27 and the force dividing means 28 are reversed. In the adhesion mechanism 14a, the rod 27 is disposed on the side wall 18 side with respect to the force dividing means 28, and in the adhesion mechanism 14b, the rod 27 is disposed on the side wall 19 side with respect to the force dividing means 28.

[0140] The rod 27 of the adhesion mechanism 14 of the heat treatment apparatus 3 is disposed inside the main body 11 and is connected at one end to a drive mechanism 26 fixed to the main body 11. Further, the rod 27 is disposed inside the main body 11 and inside the front wall 16. And the rod 27 is disposed so as to extend along the surface 16a of the front wall 16 which is the surface provided with the opening 22 in the main body 11. That is, the rod 27 is disposed inside the front wall 16 in a state where the axial direction of the rod 27 extends along the surface (the surface 16a of the front wall 16) provided with the opening 22 in the main body 11. Also, the rod 27 extends along the surface provided with the opening 22 in the main body 11 and is disposed so as to extend in the vertical direction along the edge portion of the opening 22. Note that the rod 27 of the adhesion mechanism 14a is disposed so as to extend in the vertical direction along the edge portion on the one end side in the horizontal direction of the opening 22 and on the side wall 18 side. The rod 27 of the adhesion mechanism 14b is disposed so as to extend in the vertical direction along the edge portion on the other end side in the horizontal direction of the opening 22 and on the side wall 19 side.

[0141] Also, the rod 27 is configured to move in the vertical direction along the axial direction of the rod 27 by being operated by the drive mechanism 26. Further, the rod 27 is configured to move in a direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 by being operated by the drive mechanism 26 to move in the vertical direction along the axial direction of the rod 27. The pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 is a direction perpendicular to the surface 16a of the front wall 16 and is a direction in which the door 12 closing the opening 22 is pressed against the main body 11 so as to be in close contact therewith. Also, the direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 is a direction orthogonal to the pressing direction and is the moving direction of the rod 27 in which the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction.

[0142] The force dividing means 28 of the heat treatment apparatus 3 is provided as a mechanism that divides the operating force for operating the rod 27 in the moving direction of the rod 27 and brings the door 12 into close contact with the main body 11 side in the state where the door 12 closes the opening 22, similar to the force dividing means 28 of the heat treatment apparatus 1. And a plurality of force dividing means 28 are also provided in the close contact mechanism 14 of the heat treatment apparatus 3. That is, a plurality of force dividing means 28 are provided in both the close contact mechanism 14a and the close contact mechanism 14b. In the third embodiment, three force dividing means 28 are provided in each of the close contact mechanism 14a and the close contact mechanism 14b.

[0143] Each of the plurality of force dividing means 28 in the close contact mechanism 14 of the heat treatment apparatus 3 has a cam member 29, a cam follower 30, and an elastic body 31, similar to the force dividing means 28 of the close contact mechanism 14 of the heat treatment apparatus 1. Therefore, in the third embodiment, in the close contact mechanism 14, three cam members 29, three cam followers 30, and three elastic bodies 31 are provided respectively.

[0144] The three cam members 29 in the close contact mechanism 14 are attached to the rod 27 and are arranged side by side along the axial direction of the rod 27 extending in the vertical direction. The three elastic bodies 31 in the close contact mechanism 14 are attached to the rod 27 and are configured to suppress the amount of movement of the cam member 29 with respect to the amount of movement of the rod 27. Also, the three elastic bodies 31 are arranged side by side on the axis of the rod 27 and are arranged coaxially with the rod 27. The three cam followers 30 in the close contact mechanism 14 are provided at the edge portions of the door 12 at each of the one end side and the other end side in the horizontal direction of the door 12. Also, the three cam followers 30 are provided at the edge portions of the outer portion 12a of the door 12 and are arranged side by side along the vertical direction in the state where the door 12 closes the opening 22.

[0145] The force dividing means 28 of the adhesion mechanism 14 of the heat treatment apparatus 3 operates in the same manner as the force dividing means 28 of the heat treatment apparatus 1. That is, when the rod 27 operated by the drive mechanism 26 moves with the door 12 closing the opening 22 in the heat treatment apparatus 3, the cam member 29 and the cam follower 30 come into contact with each other, and the force component from the operating force for operating the rod 27 in the moving direction is divided into a force from the cam member 29 toward the cam follower 30. Then, the force dividing means 28 transmits the force divided from the operating force for operating the rod 27 from the cam member 29 to the cam follower 30, thereby pressing and adhering the door 12 provided with the cam follower 30 to the main body 11 side.

[0146] According to the heat treatment apparatus 3 of the third embodiment described above, similar to the heat treatment apparatus 1 of the first embodiment, the means for adhering the door 12 in a state of closing the opening 22 of the main body 11 to the main body 11 side is constituted by the rod 27 that moves in a direction perpendicular to the pressing direction of the door 12 and the force dividing means 28 that divides the operating force in the moving direction of the rod 27. The rod 27 is arranged so as to extend along the surface 16a of the front wall 16 which is the surface provided with the opening 22 in the main body 11, and the force dividing means 28 is arranged in the vicinity of the rod 27 in a state where the door 12 closes the opening 22 so as to operate as the rod 27 moves. For this reason, the rod 27 and the force dividing means 28, which are the means for adhering the door 12 to the main body 11 side, can be prevented from protruding from the front surfaces of the main body 11 and the door 12. Therefore, according to the third embodiment, it is possible to provide a heat treatment apparatus 3 in which the means for adhering the door 12 to the main body 11 side so that the gas does not leak due to adhesion does not protrude from the front surfaces of the main body 11 and the door 12.

[0147] (Fourth Embodiment) Next, the heat treatment apparatus 4 according to the fourth embodiment of the present invention will be described. FIG. 15 is a diagram showing the heat treatment apparatus 4 according to the fourth embodiment of the present invention. FIG. 15(A) is a perspective view of the heat treatment apparatus 4, and FIG. 15(B) is a plan view of the heat treatment apparatus 4. The heat treatment apparatus 4 of the fourth embodiment is configured as an apparatus for performing heat treatment on the workpiece 10, similar to the heat treatment apparatus 1 of the first embodiment. In the following description of the fourth embodiment, the differences from the aforementioned first embodiment will be described, and for the same or corresponding configurations as those of the first embodiment, duplicate explanations will be omitted by attaching the same reference numerals in the drawings or by citing the same reference numerals.

[0148] The heat treatment apparatus 4 shown in FIG. 15 is configured to include a main body 11, a door 12 for opening and closing the main body 11, a locking means 13 for locking the main body 11 and the door 12, a close contact mechanism 14 for bringing the door 12 into close contact with the main body 11, a control unit 15, etc., similar to the heat treatment apparatus 1 of the first embodiment. However, the heat treatment apparatus 4 is different from the heat treatment apparatus 1 in the configurations related to the main body 11 and the close contact mechanism 14.

[0149] In the heat treatment apparatus 4, the main body 11 includes a front wall 16, a rear wall 17, side walls 18, 19, a ceiling wall 20, and a bottom wall 21, and is formed in a box shape that partitions a hollow region inside which the workpiece 10 is disposed. The main body 11 is provided with an opening 22 in the front wall 16 that opens the hollow region inside the main body 11 to the outside. The opening 22 is opened so as to penetrate the front wall 16 in a shape corresponding to the outer peripheral shape of the door 12.

[0150] In the main body 11, side walls 18 and 19 extending so as to spread along the vertical direction are provided so as to spread parallel to each other, and a ceiling wall 20 and a bottom wall 21 extending so as to spread along the horizontal direction are provided so as to spread parallel to each other. Further, in the main body 11, a rear wall 17 extending so as to spread along the vertical direction is provided so as to spread in a direction perpendicular to any of the side walls 18, side walls 19, ceiling wall 20, and bottom wall 21. On the other hand, a front wall 16 extending so as to spread along the vertical direction is provided so as to spread in an oblique direction with respect to any of the side walls 18, side walls 19, and rear wall 17. For this reason, the main body 11 is formed so as to have a trapezoidal outer shape when viewed from above. Further, in the main body 11, the length of the side wall 19 extending along the horizontal direction is configured to be longer than the length of the side wall 18 extending along the horizontal direction. In FIG. 15(A), a virtual surface 17a extending parallel to the rear wall 17 from the end of the side wall 18 with a short horizontal length is shown by a two-dot chain line. The front wall 16 is provided so as to protrude forward on the end side coupled to the side wall 19 in the horizontal direction rather than on the end side coupled to the side wall 18 in the horizontal direction. And the front wall 16 is provided so as to protrude obliquely forward with respect to the virtual surface 17a.

[0151] In the heat treatment apparatus 4, a plurality of close contact mechanisms 14 for bringing the door 12 into close contact with the main body 11 with the door 12 closing the opening 22 are provided, and in the fourth embodiment, two are provided. One of the two close contact mechanisms 14 is arranged on the upper end side of the door 12 with the door 12 closing the opening 22. The other of the two close contact mechanisms 14 is arranged on the lower end side of the door 12 with the door 12 closing the opening 22.

[0152] Each of the two close contact mechanisms 14 in the heat treatment apparatus 4 is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28, similar to the close contact mechanism 14 of the heat treatment apparatus 1.

[0153] The drive mechanism 26 of the adhesion mechanism 14 of the heat treatment apparatus 4 is disposed inside the main body 11 and is fixed to the side wall 19. Further, the rod 27 of the adhesion mechanism 14 of the heat treatment apparatus 4 is disposed inside the main body 11 and is connected at one end to the drive mechanism 26 fixed to the side wall 19 of the main body 11. Further, the rod 27 is disposed inside the main body 11 so as to extend horizontally along the surface 16a of the front wall 16 which is the surface where the opening 22 of the main body 11 is provided. That is, the rod 27 is disposed inside the main body 11 in a state where the axial direction of the rod 27 extends horizontally along the surface (the surface 16a of the front wall 16) where the opening 22 of the main body 11 is provided. Incidentally, in the adhesion mechanism 14 of the heat treatment apparatus 4, the rod 27 is disposed so as to extend along the surface (the surface 16a) where the opening 22 is provided in a state inclined with respect to the surface (the surface 16a) where the opening 22 of the main body 11 is provided.

[0154] FIG. 16 is a diagram for explaining the operation of the adhesion mechanism 14 of the heat treatment apparatus 4 shown in FIG. 15. FIG. 16(A) is a diagram showing the state before the adhesion mechanism 14 operates, and FIG. 16(B) is a diagram showing the state after the adhesion mechanism 14 operates. Referring to FIGS. 15 and 16, the rod 27 is configured to move horizontally along the axial direction of the rod 27 by being operated by the drive mechanism 26. Further, the rod 27 is configured to move in a direction inclined with respect to the direction perpendicular to the pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12, as a direction different from the pressing direction in which the door 12 is pressed toward the main body 11.

[0155] The pressing direction in which the door 12 is pressed toward the main body 11 in a state where the opening 22 is closed by the door 12 is a direction perpendicular to the surface 16a of the front wall 16, and is a direction in which the door 12 closing the opening 22 is pressed against the main body 11 so as to be in close contact with the main body 11. Incidentally, the pressing direction in which the door 12 is pressed toward the main body 11 is indicated by an arrow X1 in FIGS. 15(B), 16(A), and 16(B).

[0156] Also, the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 is a direction orthogonal to the pressing direction in the horizontal direction, and is the direction toward the side where the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction and the side wall 19 side. Note that the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 is indicated by an arrow X3 in FIGS. 15(B), 16(A), and 16(B).

[0157] Also, the direction inclined with respect to the direction perpendicular to the pressing direction as a direction different from the pressing direction for pressing the door 12 toward the main body 11 is a direction extending obliquely with respect to the direction perpendicular to the pressing direction, and is the moving direction of the rod 27 such that the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction. Note that the direction inclined with respect to the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 and the moving direction of the rod 27 operated by the drive mechanism 26 are indicated by an arrow X2 in FIGS. 15(B), 16(A), and 16(B).

[0158] As described above, the rod 27 is operated by the drive mechanism 26 and is drawn into the drive mechanism 26, and moves in a direction inclined with respect to the direction perpendicular to the pressing direction as a direction different from the pressing direction for pressing the door 12 toward the main body 11. Note that the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 (the direction indicated by the arrow X3) and the direction inclined with respect to the perpendicular direction and in which the rod 27 moves so as to be drawn into the drive mechanism 26 (the direction indicated by the arrow X2) are set so that the angle formed by these directions does not become an excessively large angle. Specifically, the angle formed by the direction perpendicular to the pressing direction of the door 12 and the direction inclined with respect to the perpendicular direction and in which the rod 27 moves so as to be drawn into the drive mechanism 26 is set to an angle of, for example, 15°. This angle setting is associated with a form in which, due to some circumstances in the overall configuration of the heat treatment apparatus, the door 12 has to be disposed obliquely with respect to the main body, and the angle can be set according to those circumstances. Thereby, the rod 27 can be disposed so as to extend along the surface 16a of the front wall 16 inside the main body 11.

[0159] The force dividing means 28 of the heat treatment apparatus 4 is provided as a mechanism that divides the operating force for operating the rod 27 in the moving direction of the rod 27 and brings the door 12 into close contact with the main body 11 side in the same manner as the force dividing means 28 of the heat treatment apparatus 1 when the door 12 closes the opening 22. The force dividing means 28 is provided singly in the close contact mechanism 14 of the heat treatment apparatus 4. The force dividing means 28 in the close contact mechanism 14 of the heat treatment apparatus 4 has a cam member 29 and a cam follower 30.

[0160] The cam member 29 of the force dividing means 28 is attached to the rod 27 and is attached to the rod 27 at an end opposite to the end connected to the drive mechanism 26 in the rod 27. The cam member 29 is fixed and attached to the rod 27, for example, at an end opposite to the end connected to the drive mechanism 26 in the rod 27. The cam member 29 attached to the rod 27 is provided as a wedge-shaped member. The cam member 29 is provided with a tapered surface 38 that extends along a surface inclined with respect to the moving direction of the rod 27 by the operation of the drive mechanism 26 in a state where the cam member 29 is attached to the rod 27. Further, the tapered surface 38 is configured to extend along a surface that extends in a direction oblique to the vertical direction and the axial direction of the rod 27.

[0161] The cam followers 30 of the force dividing means 28 are provided at the upper edge portion and the lower edge portion of the door 12, respectively. Note that the cam follower 30 of the force dividing means 28 in one of the two close contact mechanisms 14 is provided at the upper edge portion of the door 12, and the cam follower 30 of the force dividing means 28 in the other of the two close contact mechanisms 14 is provided at the lower edge portion of the door 12. The cam follower 30 provided at the edge portion of the door 12 is provided as a cylindrical roller-shaped member with a low height and is attached to the edge of the door 12 so as to be rotatable about a central axis extending vertically. The outer peripheral surface 39 of the cylindrical roller-shaped cam follower 30 is configured to contact the cam member 29.

[0162] As shown in FIGS. 15(B) and 16(A), the force dividing means 28 of the heat treatment apparatus 4 is operated so that the rod 27 moves in a direction in which it is drawn into the drive mechanism 26 with the door 12 closing the opening 22, thereby operating. When the rod 27 is operated by the drive mechanism 26 and moves with the door 12 closing the opening 22, as shown in FIG. 16(B), the cam member 29 that has moved with the rod 27 contacts the cam follower 30. At this time, the tapered surface 38 of the cam member 29 and the outer peripheral surface 39 of the cam follower 30 contact each other, so that the cam member 29 and the cam follower 30 contact each other. When the cam member 29 and the cam follower 30 contact each other, a component force directed from the cam member 29 to the cam follower 30 is divided from the operating force for operating the rod 27 in the moving direction. Then, the force divided from the operating force for operating the rod 27 is transmitted from the cam member 29 to the cam follower 30, whereby the door 12 provided with the cam follower 30 is pressed toward the main body 11 side, and the door 12 adheres closely to the main body 11 side.

[0163] According to the heat treatment apparatus 4 of the fourth embodiment described above, similar to the heat treatment apparatus 1 of the first embodiment, the means for bringing the door 12 in a state of closing the opening 22 of the main body 11 into close contact with the main body 11 side is composed of a rod 27 that moves in a direction inclined with respect to a direction perpendicular to the pressing direction of the door 12 and a force dividing means 28 that divides the operating force in the moving direction of the rod 27. The rod 27 is arranged so as to extend along the surface 16a of the front wall 16 which is the surface of the main body 11 where the opening 22 is provided, and the force dividing means 28 is arranged in the vicinity of the rod 27 in a state where the door 12 closes the opening 22 so as to operate as the rod 27 moves. For this reason, the rod 27 and the force dividing means 28, which are the means for bringing the door 12 into close contact with the main body 11 side, can be prevented from protruding from the front surfaces of the main body 11 and the door 12. Therefore, according to the fourth embodiment, it is possible to provide a heat treatment apparatus 4 in which the means for bringing the door 12 into close contact with the main body 11 side so that the gas does not leak due to close contact does not protrude from the front surfaces of the main body 11 and the door 12.

[0164] (Fifth Embodiment) Next, the heat treatment apparatus 5 according to the fifth embodiment of the present invention will be described. FIG. 17 is a diagram showing the heat treatment apparatus 5 according to the fifth embodiment of the present invention. FIG. 17(A) is a perspective view of the heat treatment apparatus 5, and FIG. 17(B) is a plan view of the heat treatment apparatus 5. Similar to the heat treatment apparatus 1 of the first embodiment, the heat treatment apparatus 5 of the fifth embodiment is configured as an apparatus for performing heat treatment on the workpiece 10. In the following description of the fifth embodiment, the differences from the aforementioned first embodiment will be described, and for the same or corresponding configurations as those of the first embodiment, the same reference numerals will be given in the drawings or the same reference numerals will be cited to omit redundant explanations.

[0165] The heat treatment apparatus 5 shown in FIG. 17, similar to the heat treatment apparatus 1 of the first embodiment, includes a main body 11, a door 12 for opening and closing the main body 11, a locking means 13 for locking the main body 11 and the door 12, a close contact mechanism 14 for bringing the door 12 into close contact with the main body 11, a control unit 15, and the like. However, the heat treatment apparatus 5 is different from the heat treatment apparatus 1 in the configurations related to the main body 11 and the close contact mechanism 14.

[0166] In the heat treatment apparatus 5, the main body 11 includes a front wall 16, a rear wall 17, side walls 18, 19, a ceiling wall 20, and a bottom wall 21, and is formed in a box shape that partitions an internal hollow region where the workpiece 10 is disposed. In the front wall 16 of the main body 11, an opening 22 is provided that opens the internal hollow region of the main body 11 to the outside. The opening 22 is formed to penetrate the front wall 16 in a shape corresponding to the outer peripheral shape of the door 12.

[0167] In the main body 11, side walls 18 and 19 that extend so as to spread along the vertical direction are provided so as to spread parallel to each other, and a ceiling wall 20 and a bottom wall 21 that extend so as to spread along the horizontal direction are provided so as to spread parallel to each other. Further, in the main body 11, a rear wall 17 that extends so as to spread along the vertical direction is provided so as to spread in a direction perpendicular to any of the side walls 18, side walls 19, ceiling wall 20, and bottom wall 21. On the other hand, a front wall 16 that extends so as to spread along the vertical direction is provided so as to spread in an oblique direction with respect to any of the side walls 18, side walls 19, and rear wall 17. For this reason, the main body 11 is formed so as to have a trapezoidal outer shape when viewed from above. Further, in the main body 11, the length of the side wall 18 extending along the horizontal direction is configured to be longer than the length of the side wall 19 extending along the horizontal direction. In FIG. 17(A), a virtual surface 17a extending parallel to the rear wall 17 from the end of the side wall 19 having a short horizontal length is shown by a two-dot chain line. The front wall 16 is provided so as to protrude forward on the end side coupled to the side wall 18 in the horizontal direction rather than on the end side coupled to the side wall 19 in the horizontal direction. And the front wall 16 is provided so as to protrude obliquely forward with respect to the virtual surface 17a.

[0168] In the heat treatment apparatus 4, a plurality of close contact mechanisms 14 for bringing the door 12 into close contact with the main body 11 with the door 12 closing the opening 22 are provided. In the fifth embodiment, two such close contact mechanisms 14 are provided. One of the two close contact mechanisms 14 is disposed on the upper end side of the door 12 with the door 12 closing the opening 22. The other of the two close contact mechanisms 14 is disposed on the lower end side of the door 12 with the door 12 closing the opening 22.

[0169] Each of the two close contact mechanisms 14 in the heat treatment apparatus 5 is configured to include a drive mechanism 26, a rod 27, and a force dividing means 28, similar to the close contact mechanism 14 of the heat treatment apparatus 1.

[0170] The drive mechanism 26 of the adhesion mechanism 14 of the heat treatment apparatus 5 is disposed inside the main body 11 and is fixedly disposed on the side wall 19. Further, the rod 27 of the adhesion mechanism 14 of the heat treatment apparatus 5 is disposed inside the main body 11 and is connected at one end to the drive mechanism 26 fixed to the side wall 19 of the main body 11. Further, the rod 27 is disposed inside the main body 11 so as to extend horizontally along the surface 16a of the front wall 16 which is the surface where the opening 22 in the main body 11 is provided. That is, the rod 27 is disposed inside the main body 11 in a state where the axial direction of the rod 27 extends horizontally along the surface (the surface 16a of the front wall 16) where the opening 22 in the main body 11 is provided. Incidentally, in the adhesion mechanism 14 of the heat treatment apparatus 4, the rod 27 is disposed so as to extend along the surface (the surface 16a) where the opening 22 is provided in a state inclined with respect to the surface (the surface 16a) where the opening 22 is provided in the main body 11.

[0171] FIG. 18 is a diagram for explaining the operation of the adhesion mechanism 14 of the heat treatment apparatus 5 shown in FIG. 17. FIG. 18(A) is a diagram showing the state before the adhesion mechanism 14 operates, and FIG. 18(B) is a diagram showing the state after the adhesion mechanism 14 operates. Referring to FIGS. 17 and 18, the rod 27 is configured to move horizontally along the axial direction of the rod 27 by being operated by the drive mechanism 26. Further, the rod 27 is configured to move in a direction inclined with respect to the direction perpendicular to the pressing direction in such a way that, when the rod 27 is operated by the drive mechanism 26 to move horizontally along the axial direction of the rod 27, the rod 27 presses the door 12 toward the main body 11 with the opening 22 closed by the door 12.

[0172] The pressing direction for pressing the door 12 toward the main body 11 with the opening 22 closed by the door 12 is a direction perpendicular to the surface 16a of the front wall 16 and is a direction in which the door 12 closing the opening 22 is pressed against the main body 11 so as to be in close contact with the main body 11. Incidentally, the pressing direction for pressing the door 12 toward the main body 11 is indicated by an arrow X1 in FIGS. 17(B), 18(A), and 18(B).

[0173] Also, the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 is a direction orthogonal to the pressing direction in the horizontal direction, and is the direction toward the side where the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction and the side wall 19 side. Incidentally, the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 is indicated by an arrow X3 in FIGS. 17(B), 18(A), and 18(B).

[0174] Also, a direction inclined with respect to the direction perpendicular to the pressing direction as a direction different from the pressing direction for pressing the door 12 toward the main body 11 is a direction extending obliquely with respect to the direction perpendicular to the pressing direction, and is the moving direction of the rod 27 such that the rod 27 operated by the drive mechanism 26 is drawn into the drive mechanism 26 along its axial direction. Incidentally, the direction inclined with respect to the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 and the moving direction of the rod 27 operated by the drive mechanism 26 are indicated by an arrow X2 in FIGS. 17(B), 18(A), and 18(B).

[0175] As described above, the rod 27 is operated by the drive mechanism 26, is drawn into the drive mechanism 26, and moves in a direction inclined with respect to the direction perpendicular to the pressing direction as a direction different from the pressing direction for pressing the door 12 toward the main body 11. Incidentally, the direction perpendicular to the pressing direction for pressing the door 12 toward the main body 11 (the direction indicated by the arrow X3) and the direction inclined with respect to the perpendicular direction and in which the rod 27 moves so as to be drawn into the drive mechanism 26 (the direction indicated by the arrow X2) are set so that the angle formed by these directions does not become an excessively large angle. Specifically, the angle formed by the direction perpendicular to the pressing direction of the door 12 and the direction inclined with respect to the perpendicular direction and in which the rod 27 moves so as to be drawn into the drive mechanism 26 is set to an angle of, for example, 15°. This angle setting is associated with a form in which, due to some circumstances in the overall configuration of the heat treatment apparatus, the door 12 has to be disposed obliquely with respect to the main body, and the angle can be set according to those circumstances. Thereby, the rod 27 can be disposed so as to extend along the surface 16a of the front wall 16 inside the main body 11.

[0176] Similar to the force dividing means 28 of the heat treatment apparatus 1, the force dividing means 28 of the heat treatment apparatus 5 is provided as a mechanism that divides the operating force for operating the rod 27 in the moving direction of the rod 27 and brings the door 12 into close contact with the main body 11 side when the door 12 closes the opening 22. The force dividing means 28 is provided singly in the close contact mechanism 14 of the heat treatment apparatus 5. The force dividing means 28 in the close contact mechanism 14 of the heat treatment apparatus 5 has a cam member 29 and a cam follower 30.

[0177] The cam member 29 of the force dividing means 28 is attached to the rod 27, and is attached to the rod 27 via a connecting rod 27a that bends and extends in the axial direction of the rod 27 at an end of the rod 27 opposite to the end connected to the drive mechanism 26. The cam member 29 is fixed to and attached to the rod 27, for example, via a connecting rod 27a provided at an end of the rod 27 opposite to the end connected to the drive mechanism 26. The cam member 29 attached to the rod 27 is provided as a wedge-shaped member. The cam member 29 is provided with a tapered surface 38 that extends along a surface inclined with respect to the moving direction of the rod 27 by the operation of the drive mechanism 26 in a state where the cam member 29 is attached to the rod 27. Further, the tapered surface 38 is configured to extend along a surface that extends in the vertical direction and in a direction oblique to the axial direction of the rod 27.

[0178] The cam followers 30 of the force dividing means 28 are provided at the edge portions on the upper end side and the lower end side of the door 12, respectively. Among the two close contact mechanisms 14, the cam follower 30 of the force dividing means 28 in one of them is provided at the edge portion on the upper end side of the door 12, and the cam follower 30 of the force dividing means 28 in the other of the two close contact mechanisms 14 is provided at the edge portion on the lower end side of the door 12. The cam follower 30 provided at the edge portion of the door 12 is provided as a cylindrical roller-shaped member with a low height, and is attached to the edge of the door 12 in a rotatable state around a central axis extending vertically. The outer peripheral surface 39 of the cylindrical roller-shaped cam follower 30 is configured to contact the cam member 29.

[0179] As shown in FIGS. 17(B) and 18(A), the force dividing means 28 of the heat treatment apparatus 5 operates by being operated so as to move in a direction in which the rod 27 is drawn into the drive mechanism 26 with the door 12 closing the opening 22. When the rod 27 is operated by the drive mechanism 26 and moves with the door 12 closing the opening 22, as shown in FIG. 18(B), the cam member 29 that has moved together with the rod 27 abuts against the cam follower 30. At this time, the tapered surface 38 of the cam member 29 and the outer peripheral surface 39 of the cam follower 30 abut against each other, so that the cam member 29 and the cam follower 30 abut against each other. When the cam member 29 and the cam follower 30 abut against each other, a component force directed from the cam member 29 to the cam follower 30 is divided from the operating force for operating the rod 27 in the moving direction. Then, the force divided from the operating force for operating the rod 27 is transmitted from the cam member 29 to the cam follower 30, whereby the door 12 provided with the cam follower 30 is pressed toward the main body 11 side, and the door 12 is brought into close contact with the main body 11 side.

[0180] According to the heat treatment apparatus 5 of the fifth embodiment described above, similarly to the heat treatment apparatus 1 of the first embodiment, the means for bringing the door 12 in a state of closing the opening 22 of the main body 11 into close contact with the main body 11 side is composed of a rod 27 that moves in a direction inclined with respect to the direction perpendicular to the pressing direction of the door 12 and a force dividing means 28 that divides the operating force in the moving direction of the rod 27. The rod 27 is arranged so as to extend along the surface 16a of the front wall 16 which is the surface of the main body 11 where the opening 22 is provided, and the force dividing means 28 is arranged in the vicinity of the rod 27 with the door 12 closing the opening 22 so as to operate as the rod 27 moves. For this reason, it is possible to prevent the rod 27 and the force dividing means 28, which are the means for bringing the door 12 into close contact with the main body 11 side, from protruding from the front surfaces of the main body 11 and the door 12. Therefore, according to the fifth embodiment, it is possible to provide a heat treatment apparatus 5 in which the means for bringing the door 12 into close contact with the main body 11 side so that the gas does not leak due to close contact does not protrude from the front surfaces of the main body 11 and the door 12.

[0181] (Modification example) The embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made and implemented as long as they are within the scope described in the claims. For example, the following modifications may be implemented.

[0182] (1) In the foregoing embodiment, the cam member of the force dividing means was described by taking as an example the form in which the cam member of the force dividing means was provided as a wedge-shaped member and the cam follower of the force dividing means was provided as a cylindrical roller-shaped member. However, this does not have to be the case, and forms in which the cam member and the cam follower have other shapes may be implemented. FIGS. 19(A), 19(B), 19(C), and 19(D) are diagrams showing examples of the shapes of the cam member and the cam follower in the force dividing means of the close contact mechanism of the heat treatment apparatus.

[0183] The shape example shown in FIG. 19(A) is an example of the shapes of the cam member 29 and the cam follower 30 of the foregoing embodiment, and is a shape example in which a tapered surface and a curved surface are in contact. In this example, the cam member 29 on the main body 11 side is provided as a wedge-shaped member, and the cam follower 30 on the door 12 side is provided as a cylindrical roller-shaped member. The cam member 29 is provided with a tapered surface 38 inclined with respect to the moving direction of the rod 27, and the cam follower 30 is provided with a cylindrical outer peripheral surface 39. Then, as the rod 27 moves, the cam member 29 moves in the direction indicated by the arrow X2 in FIG. 19(A), and the tapered surface 38 of the cam member 29 comes into contact with the outer peripheral surface 39 of the cam follower 30. Then, by the contact between the cam member 29 and the cam follower 30, the force divided from the operating force of the rod 27 is transmitted from the cam follower 30 to the door 12 along the direction indicated by the arrow X1 in FIG. 19(A), and the door 12 is brought into close contact with and pressed against the main body 11 side.

[0184] The shape example shown in Fig. 19(B) is a shape example of the cam member 40 and the cam follower 41 formed in a similar shape, and is a shape example in a form where curved surfaces are in contact with each other. In this example, the cam member 40 on the main body 11 side is provided as a member in which a curved surface 40a that curves and extends while changing the radius of curvature is formed. The curved surface 40a is provided, for example, as a surface that extends so as to form a part of an elliptical arc. The cam follower 41 on the door 12 side is also provided as a member in which a curved surface 41a that curves and extends while changing the radius of curvature is formed, similar to the cam member 40. The curved surface 41a is provided, for example, as a surface that extends so as to form a part of an elliptical arc. The cam member 40 and the cam follower 41 are arranged in a state where the curved surface 40a of the cam member 40 and the curved surface 41a of the cam follower 41 face each other in the axial direction of the rod 27 at positions shifted in a direction perpendicular to the axial direction of the rod 27. Then, as the rod 27 moves, the cam member 40 moves in the direction indicated by the arrow X2 in Fig. 19(B), and the curved surface 40a of the cam member 40 and the curved surface 41a of the cam follower 41 come into contact with each other. And, by the contact of the cam member 40 and the cam follower 41, the force component separated from the operating force of the rod 27 is transmitted from the cam follower 41 to the door 12 along the direction indicated by the arrow X1 in Fig. 19(B), and the door 12 is pressed into close contact with the main body 11 side.

[0185] The shape example shown in FIG. 19(C) is a shape example of the cam member 42 and the cam follower 43 formed in a similar shape, and is a shape example in a form where the tapered surfaces are in contact with each other. In this example, the cam member 42 on the main body 11 side is provided as a member having a tapered surface 42a inclined with respect to the moving direction of the rod 27. The cam follower 43 on the door 12 side is also provided as a member having a tapered surface 43a inclined with respect to the moving direction of the rod 27. The cam member 42 and the cam follower 43 are arranged in a state where the tapered surface 42a of the cam member 42 and the tapered surface 43a of the cam follower 43 face each other in the axial direction of the rod 27. Then, as the rod 27 moves, the cam member 42 moves in the direction indicated by the arrow X2 in FIG. 19(C), and the tapered surface 42a of the cam member 42 and the tapered surface 43a of the cam follower 43 come into contact with each other. And, when the cam member 42 and the cam follower 43 come into contact with each other, the force divided from the operating force of the rod 27 is transmitted from the cam follower 43 to the door 12 along the direction indicated by the arrow X1 in FIG. 19(C), and the door 12 is pressed into close contact with the main body 11 side.

[0186] The shape example shown in Fig. 19(D) is a shape example of the cam member 44 and the cam follower 45 formed in different shapes from each other, and is a shape example in a form where curved surfaces are in contact with each other. In this example, the cam member 44 on the main body 11 side is provided as a member having an arc surface 44a formed as a curved surface that curves in an arc shape and extends in a concave manner. The arc surface 44a is provided as a surface that extends so as to form a part of an arc of a circle with a constant radius of curvature. The cam follower 45 on the door 12 side is provided as a cylindrical roller-shaped member, and an outer peripheral surface 45a that forms an arc of a circle with a constant radius of curvature is provided. The radius of curvature of the outer peripheral surface 45a of the cam follower 45 is set to be smaller than the radius of curvature of the arc surface 44a of the cam member 44. The cam member 44 and the cam follower 45 are arranged in a state where the arc surface 44a of the cam member 44 and the outer peripheral surface 45a of the cam follower 45 face each other in the axial direction of the rod 27. Then, as the rod 27 moves, the cam member 44 moves in the direction indicated by the arrow X2 in Fig. 19(D), and the arc surface 44a of the cam member 44 and the outer peripheral surface 45a of the cam follower 45 come into contact with each other. Then, the force that is a component force from the operating force of the rod 27 when the cam member 44 and the cam follower 45 come into contact with each other is transmitted from the cam follower 45 to the door 12 along the direction indicated by the arrow X1 in Fig. 19(D), and the door 12 is pressed into close contact with the main body 11 side.

[0187] (2) In the above-described embodiment, the form in which the elastic body is provided as a coil spring has been described as an example, but this is not necessary, and a form in which the elastic body is configured as an elastic body other than a coil spring may be implemented. Figs. 20(A), 20(B), and 20(C) are diagrams showing examples of the form of the elastic body in the component force means of the close contact mechanism of the heat treatment apparatus.

[0188] The example of the form shown in FIG. 20(A) is an example of the form of the elastic body 31 in the foregoing embodiment, and is an example of the form provided as a metal coil spring. The elastic body 31 provided as a coil spring is attached to the rod 27 in the direction indicated by the arrow in FIG. 20(A), fitted onto the axis of the rod 27, and attached to the rod 27. For this reason, the elastic body 31 provided as a coil spring is attached to the rod 27 in a state of being disposed on the axis of the rod 27 on the outer periphery of the rod 27.

[0189] The example of the form shown in FIG. 20(B) is an example of the form of the elastic body 47 provided as a metal leaf spring. The elastic body 47 is configured as a leaf spring in which inclined plate portions 47a formed to be alternately inclined and bent are integrally arranged in series. Through holes 47b are provided in the inclined plate portions 47a arranged in series. Then, the elastic body 47 provided as a leaf spring is attached to the rod 27 in the direction indicated by the arrow in FIG. 20(B), and the rod 27 is inserted through the through holes 47b of the inclined plate portions 47a and fitted onto the axis of the rod 27 and attached to the rod 27. For this reason, the elastic body 47 provided as a leaf spring is attached to the rod 27 in a state of being disposed on the axis of the rod 27 on the outer periphery of the rod 27.

[0190] The example of the form shown in FIG. 20(C) is an example of the form of the elastic body 48 provided as a heat-resistant rubber member. The elastic body 48 is provided as a cylindrical heat-resistant rubber member, and a through hole 48a extending in the cylindrical axis direction is provided. Then, the elastic body 48 provided as a heat-resistant rubber member is attached to the rod 27 in the direction indicated by the arrow in FIG. 20(C), and the rod 27 is inserted through the through hole 48a and fitted onto the axis of the rod 27 and attached to the rod 27. For this reason, the elastic body 48 provided as a heat-resistant rubber member is attached to the rod 27 in a state of being disposed on the axis of the rod 27 on the outer periphery of the rod 27.

[0191] (3) In the foregoing embodiment, the door for closing the opening of the main body has been described by taking as an example the form in which the door has a rectangular outer shape. However, this does not have to be the case, and the shape of the door is not limited to a rectangle and may be various shapes. For example, a circular opening is provided in the main body, and a form may be implemented in which the door is formed in a shape having a circular outer shape so as to close the circular opening of the main body. Further, the door only needs to be in a shape that closes the entire opening provided in the main body, and a form in which the shape of the opening provided in the main body and the outer shape of the door are different may be implemented.

[0192] (4) In the foregoing embodiment, the door for closing the opening of the main body has been described by taking as an example the form in which the door opens and closes via a hinge. However, the present invention is not limited to this, and a slide-type door may be used. For example, a form may be implemented in which the door closes the opening of the main body by sliding in the horizontal direction, or a form may be implemented in which the door closes the opening of the main body by sliding in the vertical direction.

[0193] (5) In the foregoing embodiment, the form in which the cam member of the force dividing means is provided as a wedge-shaped member and the cam follower of the force dividing means is provided as a cylindrical roller-shaped member has been described by taking it as an example. However, a form in which these are provided in the reverse relationship may be implemented. That is, a form may be implemented in which the cam member of the force dividing means is provided as a cylindrical roller-shaped member and the cam follower of the force dividing means is provided as a wedge-shaped member. In this case, the cylindrical roller-shaped cam member is rotatably attached to the rod via an attachment member, and the wedge-shaped cam follower is fixed to the edge portion of the door. In this way, a form in which a cylindrical roller-shaped cam member is provided on the main body side and a wedge-shaped cam follower is provided on the door side may be implemented.

Industrial Applicability

[0194] The present invention relates to a heat treatment apparatus for performing heat treatment on an object to be processed, and can be widely applied.

Explanation of Signs

[0195] 1, 2, 3, 4, 5 Heat treatment apparatus 10 Object to be processed 11 Body 12 Door 14, 14a, 14b Contact mechanism 22 Opening 27 Rod 28 Force dividing means 29 Cam member 30 Cam follower 31 Elastic body

Claims

1. A main body constituting a processing chamber for filling gas and heat-treating an object to be processed, A door for opening and closing an opening provided in the main body, A rod arranged to extend along the surface of the main body where the opening is provided, and moving in a direction different from the pressing direction for pressing the door toward the main body side, A component force means for generating a force that divides an operating force for operating the rod in the moving direction of the rod in a state where the door closes the opening and causes the door to closely adhere to the main body side, Comprising, The component force means includes a cam member attached to the rod, an elastic body that suppresses the moving amount of the cam member with respect to the moving amount of the rod, and a cam follower provided on the door and transmitting the force divided from the operating force to the door by contacting the cam member. A heat treatment apparatus.

2. The heat treatment apparatus according to claim 1, Comprising a plurality of the component force means, Each of the plurality of the component force means has the cam member, the elastic body, and the cam follower. A heat treatment apparatus.

3. The processing apparatus according to claim 2, The door is provided as a hinged door attached to the main body via a hinge, Among the plurality of elastic bodies included in the plurality of the component force means, the elastic force of the elastic body arranged on the side away from the hinge side is set to be greater than that of the elastic body arranged on the hinge side. A heat treatment apparatus.

4. The heat treatment apparatus according to any one of claims 1 to 3, The cam follower is provided at an edge portion of the door, In the main body, at an edge portion of the opening, a recess for receiving the cam follower when the door closes the opening is provided, In a state where the door closes the opening and the cam follower is received in the recess, when the rod moves in the moving direction, the cam member contacts the cam follower. A heat treatment apparatus.

5. The heat treatment apparatus according to any one of claims 1 to 4, The operating amount for operating the rod in the moving direction is set to be greater than a predetermined amount than the set distance between the cam member and the cam follower in the moving direction in a state before the door closes the opening and the rod moves. A heat treatment apparatus.

6. The heat treatment apparatus according to any one of claims 1 to 5, The elastic body is arranged on the outer periphery of the rod. A heat treatment apparatus.

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