Processing system and method for managing a processing system

Abstract

To provide a machining system and a machining system management method capable of reducing the time required to restore the operation of machining devices when the communication state of a communication system is poor.SOLUTION: A machining system 1 includes machining devices 10 and a terminal device 20 that operates the machining devices 10. The terminal device 20 and the machining devices 10 are connected by two or more different communication systems 30 (a communication system 30-1 and a communication system 30-2) for operating the machining devices 10 from the terminal device 20.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a processing system for remotely operating a processing device with a terminal device and a method for managing the processing system.

Background Art

[0002] In various manufacturing processes such as the manufacturing process of semiconductor devices, manufacturing is performed using various processing devices. Although it is common to operate each processing device with its own operation panel, there are also manufacturing sites where a plurality of processing devices are operated from a single terminal device for centralized management. In that case, each processing device is connected to the terminal device via a communication system and remotely operated (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, when the communication state by the communication system is abnormal, for example, when the communication cable is disconnected or the connection jack is removed, not only can remote operation not be performed, but also the state where it is not known at all what is happening occurs. There has been a problem that it takes time to resume the operation of the processing device because the cause is investigated separately for whether a failure has occurred in the processing device or there is an abnormality in the communication system.

[0005] The present invention has been made in view of such problems, and an object thereof is to provide a processing system and a method for managing the processing system that can reduce the time required to resume the operation of the processing device when the communication state by the communication system is abnormal.

Means for Solving the Problems

[0006] In order to solve the above-described problems and achieve the object, the processing system of the present invention includes a plurality of a processing device and the a plurality of a terminal device that operates the processing device, and the terminal device is connected to the a plurality of processing device through two or more different communication systems for operating the a plurality of processing device. and the terminal device includes a communication state determination unit that determines whether the communication state of each communication system is abnormal based on each command information transmitted to each processing device via each communication system and each control signal corresponding to each command information received from each processing device via each communication system. When the communication state determination unit determines that the communication state of one of the communication systems is abnormal, the plurality of processing devices are operated by the terminal device using another communication system That's what it is.

[0007] The two or more different communication systems may include different communication protocols or different communication hardware. Also, when the communication state determination unit determines that one of The communication state of the communication system is abnormal, if the two or more different communication systems have different communication protocols, the communication protocol may be switched by switching the program responsible for the application of the communication protocol of the communication system determined to be abnormal to the program responsible for the application of the communication protocol of another communication system. If the two or more different communication systems have different communication hardware, the communication hardware may be switched by switching the network interface of the communication hardware of the communication system determined to be abnormal to the network interface of the communication hardware of another communication system

[0008] The The communication state determination unit is of the communication state determination result may be notified to the terminal device. shi That's okay. The terminal device may generate command information regarding the operation of the processing device and transmit the command information to the processing device via one of the communication systems to operate the processing device. Further, the terminal device may receive an input of the processing conditions of the processing device or the operation conditions of each component of the processing device, generate the command information based on the received processing conditions or the operation conditions, and transmit the command information to the processing device via one of the communication systems

[0009] In order to solve the above-described problems and achieve the object, the management method of the processing system of the present invention is a management method of any of the above processing systems, By the communication state determination unit including a communication state determination step of determining the communication state of one communication system for operating the processing device, and a communication system change step of operating the processing device with the other communication system at the terminal device when the communication state is determined to be abnormal in the communication state determination step.

Effect of the Invention

[0010] The present invention can reduce the time required for the resumption of operation of the processing device when the communication state by the communication system is abnormal.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

[0012] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Also, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0013] **[Embodiment]** A processing system 1 and a management method of the processing system according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a configuration example of the processing system 1 according to the embodiment. As shown in FIG. 1, the processing system 1 includes a processing device 10, a terminal device 20, and a communication system 30. In the processing system 1, the number of processing devices 10 provided in the present embodiment is plural (four in the example shown in FIG. 1), but the present invention is not limited to this, and one may be sufficient. Also, in the processing system 1, the processing devices 10 may all be of different types, may all be of the same type, or may be a mixture of different types and the same type. Also, in the processing system 1, the number of terminal devices 20 provided in the present embodiment is one, but the present invention is not limited to this, and a plurality may be sufficient.

[0014] In the processing system 1, there are a plurality (two or more) of communication systems 30. In the example shown in FIG. 1, there are two communication systems 30, but three or more may be used. Each communication system 30 electrically connects all the processing devices 10 and the terminal device 20 so that information communication is possible. In this specification, when distinguishing between the two communication systems 30, they are referred to as communication system 30-1 and communication system 30-2, respectively.

[0015] A specific example of the processing device 10 constituting the processing system 1 will be described with reference to the drawings. FIG. 2 is a perspective view showing a configuration example of the processing device 10 in FIG. 1. FIG. 3 is a perspective view showing another configuration example of the processing device 10 in FIG. 1. As shown in FIGS. 2 and 3, the processing device 10 (processing devices 10-1 and 10-2) includes a chuck table 110, a processing unit 120, a moving unit 130, a cassette mounting table 150, a cleaning unit 160, and a control unit 170. The processing devices 10-1 and 10-2 are different in that they include processing units 120-1 and 120-2 that perform different processes on the workpiece 200, and the others are generally the same. In this specification, when not distinguishing between the processing devices 10-1 and 10-2, or when the types of the processing devices 10-1 and 10-2 are different, they are simply referred to as the processing device 10.

[0016] In the present embodiment, the workpiece 200 to be processed by the processing device 10 is, for example, a disk-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, etc. as a base material. As shown in FIGS. 2 and 3, devices are formed in regions partitioned by a plurality of division planned lines formed in a grid pattern on the flat surface of the workpiece 200. In the present embodiment, the workpiece 200 has an adhesive tape 201 attached to the back surface on the back side of the surface, and an annular frame 202 is attached to the outer peripheral portion of the adhesive tape 201, but the present invention is not limited thereto. Further, in the present invention, the workpiece 200 may be a rectangular package substrate, a ceramic plate, or a glass plate having a plurality of devices sealed with resin.

[0017] The chuck table 110 has a disk-shaped frame body in which a concave portion is formed, and a disk-shaped suction portion fitted into the concave portion. The suction portion of the chuck table 110 is formed of a porous material such as porous ceramic and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction portion of the chuck table 110 is a holding surface on which the workpiece 200 is placed and which sucks and holds the placed workpiece 200. The holding surface and the upper surface of the frame body of the chuck table 110 are arranged on the same plane and are formed parallel to the XY plane which is a horizontal plane. The chuck table 110 is rotatably provided around an axis parallel to the Z-axis direction which is a vertical direction and perpendicular to the holding surface by a rotation drive source (not shown).

[0018] In the example of the processing apparatus 10-1 shown in FIG. 2, the processing unit 120-1 is a cutting processing unit and has a cutting blade. The cutting blade is added with a rotational movement around an axis parallel to the Y-axis direction which is another horizontal direction and orthogonal to the X-axis direction, and cuts the workpiece 200 held by the chuck table 110. As shown in FIG. 2, the processing apparatus 10-1 includes two processing units 120-2, that is, a two-spindle dicing saw, a so-called facing dual type cutting apparatus.

[0019] In the example of the processing apparatus 10-2 shown in FIG. 3, the processing unit 120-2 is a laser processing unit and has a laser irradiator. The laser irradiator irradiates the workpiece 200 held by the chuck table 110 with a laser beam to perform laser processing on the workpiece 200. The laser irradiator forms a laser processing groove by ablating the workpiece 200 by irradiating the workpiece 200 with a laser beam having a wavelength that is absorbent to the workpiece 200, or forms a modified layer which is a fracture initiation point inside the workpiece 200 by irradiating the workpiece 200 with a laser beam having a wavelength that is transmissive to the workpiece 200. The processing apparatus 10-2 shown in FIG. 3 is a laser processing apparatus including the processing unit 120-2.

[0020] The moving unit 130 includes an X-axis moving unit 131 and a Y-axis moving unit 132. The X-axis moving unit 131 moves the chuck table 110 relative to the processing units 120-1 and 120-2 along the X-axis direction. In the processing device 10-1, the Y-axis moving unit 132 moves the processing unit 120-1 relative to the chuck table 110 along the Y-axis direction, and in the processing device 10-2, the Y-axis moving unit 132 moves the chuck table 110 relative to the processing unit 120-2 along the Y-axis direction. In the processing device 10-1, the moving unit 130 further includes a Z-axis moving unit 133. The Z-axis moving unit 133 moves the processing unit 120-1 relative to the chuck table 110 along the Z-axis direction.

[0021] The processing device 10-1 performs cutting on the workpiece 200 by rotating the cutting blade and relatively moving the cutting blade along the planned division line with respect to the workpiece 200 held on the chuck table 110 by the moving unit 130, thereby forming a cutting groove along the planned division line.

[0022] The processing device 10-2 performs laser processing on the workpiece 200 along the planned division line by irradiating a laser beam with a laser irradiator and relatively moving the laser irradiator along the planned division line with respect to the workpiece 200 held on the chuck table 110 by the moving unit 130.

[0023] The processing device 10-1 further includes an imaging unit 140. In Embodiment 1, the imaging unit 140 is attached to one of the processing units 120-1 and moves integrally with the one processing unit 120-1. The imaging unit 140 includes an image sensor that images the workpiece 200 before and after processing held on the chuck table 110. The image sensor is, for example, a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 140 images the workpiece 200 held on the chuck table 110 to obtain an image for performing alignment to align the workpiece 200 with the cutting blade, and outputs the obtained image to the control unit 170. The imaging unit 140 images the workpiece 200 held on the chuck table 110 to obtain an image for performing a kerf check to confirm the quality of machining marks such as cutting grooves formed on the workpiece 200, and outputs the obtained image to the control unit 170. The processing device 10-2, although not shown, includes an imaging unit similar to the imaging unit 140.

[0024] The cassette mounting table 150 is a mounting table on which a cassette 155, which is a container for accommodating a plurality of workpieces 200, is mounted, and raises and lowers the mounted cassette 155 in the Z-axis direction. The cleaning unit 160 cleans the workpiece 200 after processing by the processing unit 120 and removes foreign matters such as machining chips attached to the workpiece 200.

[0025] The processing device 10 further includes a conveyance unit (not shown). The conveyance unit (not shown) conveys the workpiece 200 before processing from inside the cassette 155 onto the chuck table 110, conveys the workpiece 200 after processing from above the chuck table 110 to the cleaning unit 160, and conveys the workpiece 200 after cleaning from the cleaning unit 160 into the cassette 155.

[0026] The control unit 170 controls the operations of the components of the processing apparatus 10 to cause the processing apparatus 10 to perform various operations related to the processing. In the present embodiment, the control unit 170 includes a computer system. The computer system included in the control unit 170 has an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit 170 performs arithmetic processing according to a computer program stored in the storage device of the control unit 170, and outputs a control signal for controlling the processing apparatus 10 to each component of the processing apparatus 10 via the input / output interface device of the control unit 170.

[0027] Note that the processing apparatus 10 constituting the processing system 1 is not limited to examples such as the processing apparatus 10-1 which is a cutting processing apparatus and the processing apparatus 10-2 which is a laser processing apparatus, and any processing apparatus may be used as long as it includes a processing unit for processing the workpiece 200. For example, a processing apparatus including a polishing processing unit for polishing the workpiece 200, a processing apparatus including a tape expansion unit for expanding the adhesive tape 201 attached to the workpiece 200, a processing apparatus including an ultraviolet irradiation unit for irradiating ultraviolet rays on the adhesive tape 201 attached to the workpiece 200, etc. may be used. Further, the processing apparatus 10 constituting the processing system 1 may be appropriately modified or rearranged in each component constituting the processing apparatus 10.

[0028] The terminal device 20 includes an input unit, a display unit, and a control unit. The input unit of the terminal device 20 receives from the operator inputs such as registration and change of the processing conditions of each processing device 10 and the operating conditions of each component, and inputs such as operation commands for each processing device 10, and transmits the inputs received from the operator to the control unit of the terminal device 20. The display unit of the terminal device 20 displays screens of various information related to the processing device 10, such as input screens and confirmation screens for the processing conditions of each processing device 10 and the operating conditions of each component, and screens of the results of the processing of each processing device 10. The control unit of the terminal device 20 controls the operations of each part of the terminal device 20 to cause the terminal device 20 to perform various operations related to the management method of the processing system 1 according to the present embodiment.

[0029] The processing system 1 is remotely operated by an operator from the terminal device 20 via the communication system 30 for each processing device 10. The control unit of the terminal device 20 of the processing system 1 receives the acceptance input from the operator by the input unit of the terminal device 20, generates command information regarding the operation of each component of each processing device 10 based on the received input, and transmits the generated command information to each processing device 10 via the communication system 30. Each control unit 170 of each processing device 10 of the processing system 1 receives the command information from the terminal device 20 via the communication system 30, generates a control signal regarding the operation of each component of each processing device 10 based on the received command information, and transmits the generated control signal from each control unit 170 of each processing device 10 to each component of each processing device 10. At this time, it may be transmitted to the terminal device 20 via the communication system 30 that the generated control signal has been transmitted to each component of each processing device 10. The control signals generated and transmitted by each control unit 170 of each processing device 10 are transmitted to each component of each processing device 10 by commands set according to a predetermined communication standard, and are transmitted to the terminal device 20 via the communication system 30 as necessary. When the control unit of the terminal device 20 of the processing system 1 receives the control signal transmitted from each control unit 170 of each processing device 10 to each component of each processing device 10, it reflects the content based on the received control signal on the screen displayed on the display unit of the terminal device 20, thereby notifying the operator of the content based on the control signal received by the terminal device 20 or recording it in the storage device of the terminal device 20.

[0030] The control unit of the terminal device 20 includes a computer system in this embodiment. The computer system included in the control unit of the terminal device 20 has an arithmetic processing unit having a microprocessor such as a CPU, a storage device having a memory such as a ROM or a RAM, and an input / output interface device. The arithmetic processing unit of the control unit of the terminal device 20 performs arithmetic processing according to the computer program stored in the storage device of the control unit of the terminal device 20, and outputs a control signal for controlling the terminal device 20 to each part of the terminal device 20 via the input / output interface device of the control unit of the terminal device 20.

[0031] Here, the processing conditions of each processing device 10 and the operating conditions of each component include the conditions related to the workpiece 200 when each processing device 10 processes the workpiece 200 and the conditions related to each component of each processing device 10. The conditions related to the workpiece 200 are, for example, the material, shape, size (outer diameter and thickness) of the workpiece 200, the intervals and numbers in each direction of the planned division lines of the workpiece 200, the shape and size of the formation region of the devices on the workpiece 200, the number of formed devices, the material and thickness of the adhesive tape 201, the material, shape, and size (inner diameter, outer diameter, and thickness) of the frame 202, etc.

[0032] The conditions related to the chuck table 110 of the processing device 10 are, for example, the material, shape, and size (outer diameter and thickness) of the chuck table 110. The conditions related to the processing unit 120-1 of the processing device 10-1 are, for example, the material, shape (presence or absence of taper, etc.), size (outer diameter and length) of the shaft on which the cutting blade of the processing unit 120-1 is used, the material, shape (presence or absence of hub and slit, etc.), size (inner diameter, outer diameter, and thickness) of the cutting blade, the rotational speed of the spindle, etc. The conditions related to the processing unit 120-2 of the processing device 10-2 are, for example, the laser oscillation material used in the laser irradiator, the wavelength range of the laser beam by the laser irradiator (absorption wavelength range and transmission wavelength range of the workpiece 200), the irradiation depth of the laser beam (depth of focus, condensing position), optical characteristics such as the wavelength, phase, polarization plane, amplitude, power, propagation direction, etc. of the laser beam, the presence or absence of pulses and the pulse intervals of the laser beam, the type, position, and material of the optical system for condensing the laser beam, etc. The conditions related to the processing unit 120 of the processing device 10 constituting the processing system 1 are appropriately changed according to the processing form for processing the workpiece 200.

[0033] The conditions related to the moving unit 130 of the processing device 10-1 are, for example, the machining feed rate in the X-axis direction, the Y index of the cutting blade (reference position in the Y-axis direction), the indexing feed condition in the Y-axis direction, the height of the cutting blade during cutting (depth of cut into the workpiece 200), the plunge feed condition in the Z-axis direction, and so on. The conditions related to the moving unit 130 of the processing device 10-2 are, for example, the machining feed rate in the X-axis direction, the Y index of the laser irradiator (reference position in the Y-axis direction), the indexing feed condition in the Y-axis direction, and so on. The conditions related to the imaging unit 140 of the processing device 10-1 are, for example, the magnification of imaging, the type and nature of illumination during imaging, the illuminance of illumination during imaging, the imaging conditions during alignment, the imaging conditions during kerf check, and so on. The conditions related to the imaging unit (not shown) of the processing device 10-2 are the same as those related to the imaging unit 140 of the processing device 10-1.

[0034] The conditions related to the cassette mounting table 150 and the cassette 155 of the processing device 10 are, for example, the lifting speed of the cassette mounting table 150, the number of slots of the cassette 155, the reference slot height, the slot interval, the rail interval, and so on. The conditions related to the cleaning unit 160 of the processing device 10 are, for example, the cleaning time, the amount of cleaning water, the spinner table rotation speed, the cleaning mode (high-pressure cleaning mode or two-fluid cleaning mode), and so on. The conditions related to the conveying unit (not shown) of the processing device 10 are, for example, the gripping strength of the workpiece 200 or the frame 202, the suction pressure, the conveying path, the conveying speed in the conveying path, and so on.

[0035] The conditions related to the control unit 170 of the processing device 10 are, for example, the processing conditions for alignment, the processing conditions for kerf check, etc. The processing conditions for alignment are the conditions for the adjustment process of the positional relationship between the chuck table 110 and the processing unit 120 (cutting blade or laser irradiator). The processing conditions for kerf check are the items to be checked for the processing marks such as cutting grooves and laser processing grooves (each item of kerf check) and the allowable values for each of these items, and the conditions for the process when the allowable value is exceeded. Each item of kerf check is, for example, off-center, kerf width, chipping width from the kerf center, maximum chipping width from the kerf end, etc. The off-center is the value of the deviation in the width direction of the center line of the kerf center, which is the center line in the width direction of the processing mark, from the center line of the division planned line. The kerf width is, respectively, the distance (interval) between both ends of the processing mark within the area to be confirmed by the kerf check. The chipping width from the kerf center is the distance between the end of the maximum chipping in the width direction within the area to be confirmed by the kerf check and the center in the width direction of the processing mark. The maximum chipping width from the kerf end is the distance between the end of the maximum chipping in the width direction within the area to be confirmed by the kerf check and the end of the processing mark. The process when the allowable value is exceeded is, for example, the method of notifying an alarm by the alarm provided in the processing device 10, the method of notifying an alarm to the terminal device 20 via the communication system 30, etc.

[0036] As shown in FIG. 1, the control unit of the terminal device 20 includes a communication state determination unit 21. Based on the command information transmitted to each processing device 10 via each communication system 30 and the control signal received from each control unit 170 of each processing device 10 via each communication system 30, the communication state determination unit 21 determines whether the communication state of each communication system 30 is abnormal, and notifies the determination result to the display unit etc. of the terminal device 20.

[0037] The details of the communication system 30 that constitutes the processing system 1 will be described based on the drawings. FIG. 4 is a functional block diagram showing a configuration example of the communication system 30 in FIG. 1. As shown in FIG. 4, each communication system 30 (communication systems 30-1 and 30-2) includes a communication protocol 31 (communication protocols 31-1 and 31-2) and communication hardware 32 (communication hardware 32-1 and 32-2), respectively.

[0038] Two or more different communication systems 30-1 and 30-2 are provided with different communication protocols 31-1 and 31-2 from each other, or different communication hardware 32-1 and 32-2 from each other. That is, at least one of the communication protocol 31-1 of the communication system 30-1 and the communication protocol 31-2 of the communication system 30-2, and the communication hardware 32-1 of the communication system 30-1 and the communication hardware 32-2 of the communication system 30-2 is different. Both the communication protocol 31-1 of the communication system 30-1 and the communication protocol 31-2 of the communication system 30-2, and the communication hardware 32-1 of the communication system 30-1 and the communication hardware 32-2 of the communication system 30-2 may be different, or either one may be the same.

[0039] The communication protocol 31 and the communication hardware 32 will be described based on the drawings. FIG. 5 is a diagram for explaining the communication protocol 31 and the communication hardware 32 of FIG. 4. FIG. 5 shows an example of the OSI (Open Systems Interconnection) reference model which is a computer network standard. In the present invention, the communication protocol 31 refers to the communication standards (protocols) of the application layer (layers 5, 6, and 7) of the OSI reference model shown in FIG. 5. Specifically, it includes HTTP (HyperText Transfer Protocol) used on the web, FTP (File Transfer Protocol) used for file transfer, and SEMI (Semiconductor Equipment and Materials International) standards such as SECS (SEMI Equipment Communications Standard), etc. In the present invention, the communication hardware 32 refers to the communication standards (protocols) of the network interface layer (layers 1 and 2) of the OSI reference model shown in FIG. 5. Specifically, it includes wired LAN (Local Area Network) cables, wireless infrared communication, Bluetooth (trademark registered), WiFi (trademark registered) (Wireless Fidelity), etc. The communication protocol 31 and the communication hardware 32 can be used in combination with each other.

[0040] In the communication system 30, when the communication protocol 31-1 and the communication protocol 31-2 are different and the communication hardware 32-1 and the communication hardware 32-1 are the same, for example, when the communication protocol 31-1 is SECS of the SEMI standard, the communication protocol 31-2 is HTTP, and both the communication hardware 32-1 and the communication hardware 32-1 are LAN cables, the application layer of the information communication between each processing device 10 and the terminal device 20 is duplicated. Therefore, when a program responsible for one application fails, it can be switched to the other application program.

[0041] In the present embodiment, as described above, since there are many types of processing conditions for each processing device 10 and operating conditions for each component, there are many types of commands for control signals by each control unit 170 of each processing device 10. For this reason, the number of types of commands set in some communication standards (for example, SECS) is small compared to the commands for control signals by each control unit 170 of each processing device 10, and there may be a shortage. Therefore, the communication system 30 uses, for at least one of the communication protocol 31-1 and the communication protocol 31-2, a communication standard in which the number of types of commands is large compared to the commands for control signals by each control unit 170 of each processing device 10, so that data insufficient in the communication standard of the other application layer can be transmitted and received in the communication standard of the one application layer.

[0042] When the communication protocol 31-1 and the communication protocol 31-2 are the same and the communication hardware 32-1 and the communication hardware 32-1 are different, for example, when both the communication protocol 31-1 and the communication protocol 31-2 are HTTP, the communication hardware 32-1 is a LAN cable, and the communication hardware 32-1 is Wifi, the network interface layer for information communication between each processing device 10 and the terminal device 20 is duplicated. Therefore, when one network interface is disconnected, communication can be switched to the other network interface.

[0043] Next, this specification will describe an example of the processing of the management method of the processing system according to the embodiment with reference to the drawings. FIG. 6 is a flowchart showing an example of the procedure of the processing of the management method of the processing system according to the embodiment. As shown in FIG. 6, the management method of the processing system includes a communication state determination step 1001 and a communication system change step 1003. A series of processes of the management method of the processing system are performed each time information communication is performed between the processing device 10 and the terminal device 20 via two or more different communication systems 30 when at least one or more of the processing devices 10 constituting the processing system 1, the terminal device 20, and at least two or more different communication systems 30 are switched on and in an operating state.

[0044] The communication state determination step 1001 is a step of determining the communication state of one communication system 30 that operates each processing device 10. In the communication state determination step 1001, the communication state determination unit 21 determines that the communication state of the communication system 30 is good when a control signal corresponding to the command information transmitted to each processing device 10 via the communication system 30 is received from each control unit 170 of each processing device 10 for each communication system 30, and determines that the communication state of the communication system 30 is abnormal when a control signal corresponding to the command information transmitted to each processing device 10 via the communication system 30 is not received from each control unit 170 of each processing device 10.

[0045] Note that in the communication state determination step 1001, when the control signal corresponding to the command information transmitted to each processing device 10 cannot be received via the communication system 30 because the number of types of commands set by the communication standard of the communication protocol 31 of the communication system 30 is small, the determination of the communication state of the communication system 30 is postponed. Alternatively, the determination of the communication state may be performed using a communication system 30 different from the communication system 30 having a small number of command types. For example, the communication and operation logs of the processing device 10 and the communication system 30 may be received by the terminal device 20, and the control unit of the terminal device 20 or the operator may determine whether the communication state is abnormal from the logs.

[0046] When the communication state determination unit 21 determines in the communication state determination step 1001 that the communication states of all the communication systems 30 are good (No in step 1002 of FIG. 6), it ends a series of processes of the management method of the processing system. When the communication state determination unit 21 determines in the communication state determination step 1001 that the communication states of one or more communication systems 30 are abnormal (Yes in step 1002 of FIG. 6), it notifies the determination result that the communication state of the communication system 30 is abnormal by displaying it in an image on the display unit etc. of the terminal device 20, and advances the process to the communication system change step 1003.

[0047] When the communication state determination unit 21 determines in the communication state determination step 1001 that the communication states of all the communication systems 30 are abnormal (Yes in step 1002 of FIG. 6), it notifies by displaying in an image on the display unit etc. of the terminal device 20 the determination result that there may be something wrong with the communication state of the communication system 30 and that there may be something wrong with the processing device 10 that attempted communication when making the determination, and ends a series of processes of the management method of the processing system.

[0048] The communication system change step 1003 is a step of operating each processing device 10 with the terminal device 20 by means of other communication systems 30 that were not determined to be abnormal when it is determined in the communication state determination step 1001 that the communication states of one or more communication systems 30 are abnormal (Yes in step 1002 of FIG. 6). In the communication system change step 1003, the control unit of the terminal device 20 transmits command information to each processing device 10 via other communication systems 30 that were not determined to be abnormal in the communication state determination step 1001, and receives control signals transmitted from each control unit 170 of each processing device 10 to each component of each processing device 10.

[0049] In the processing system 1 and the management method of the processing system according to the embodiment having the above configuration, since the terminal device 20 and the processing device 10 are connected by two or more different communication systems 30 that operate the processing device 10 from the terminal device 20, even if one communication system 30 fails, the processing device 10 can be operated by another communication system 30. Therefore, the time required for the resumption of operation of the processing device 10 is significantly reduced, and the effect of being able to continue operation is achieved.

[0050] Further, in the processing system 1 and the management method of the processing system according to the embodiment, two or more different communication systems 30 include different communication protocols 31 or different communication hardware 32. For this reason, in the processing system 1 and the management method of the processing system according to the embodiment, when different communication protocols 31 are provided, the application layer of information communication between the processing device 10 and the terminal device 20 is duplicated. Therefore, when a program responsible for one application fails, it is possible to switch to the other application program. Further, in the processing system 1 and the management method of the processing system according to the embodiment, when different communication hardware 32 is provided, the network interface layer of information communication between each processing device 10 and the terminal device 20 is duplicated. Therefore, when one network interface is disconnected, it is possible to switch to the other network interface and communicate.

[0051] Further, the processing system 1 and the management method of the processing system according to the embodiment include a communication state determination unit 21 that determines whether the communication state of each communication system 30 is abnormal and notifies the terminal device 20 of the determination result. For this reason, in the processing system 1 and the management method of the processing system according to the embodiment, by notifying the operator which communication system 30 is abnormal or whether the processing device 10 may be abnormal, the time required for the recovery of the processing device 10 and the communication system 30 can be reduced more than before.

[0052] Note that the present invention is not limited to the above-described embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention. For example, when it is determined in the communication state determination step 1001 that the communication states of one or more communication systems 30 are abnormal, the operator may determine whether to execute the communication system change step 1003.

Explanation of Signs

[0053] 1 Processing system 10, 10-1, 10-2 Processing device 20 Terminal device 21 Communication state determination unit 30, 30-1, 30-2 Communication system 31, 31-1, 31-2 Communication protocol 32, 32-1, 32-2 Hardware for communication

Claims

**Claim 1**: A processing system having a plurality of processing devices and a terminal device for operating the plurality of processing devices, wherein the terminal device and the plurality of processing devices are connected by two or more different communication systems for operating the plurality of processing devices from the terminal device, the terminal device includes a communication state determination unit that determines whether the communication state of each communication system is abnormal based on each command information transmitted to each processing device via each communication system and each control signal corresponding to each command information received from each processing device via each communication system, and when the communication state determination unit determines that the communication state of one of the communication systems is abnormal, a processing system for operating the plurality of processing devices with the terminal device by another communication system. **Claim 2** The processing system according to claim 1, wherein the two or more different communication systems include different communication protocols or different communication hardware. **Claim 3**: When the communication state determination unit determines that the communication state of one of the communication systems is abnormal, if the two or more different communication systems include different communication protocols, the communication protocol is switched by switching a program responsible for the application of the communication protocol of the communication system determined to be abnormal to a program responsible for the application of the communication protocol of another communication system, and if the two or more different communication systems include different communication hardware, the communication hardware is switched by switching the network interface of the communication hardware of the communication system determined to be abnormal to the network interface of the communication hardware of another communication system. The processing system according to claim 2. **Claim 4** The processing system according to claim 1, 2, or 3, wherein the communication state determination unit notifies the terminal device of the determination result of the communication state. **Claim 5**: The processing system according to claim 1, 2, 3, or 4, wherein the terminal device generates command information regarding the operation of the processing device and transmits the command information to the processing device via one of the communication systems to operate the processing device. **Claim 6**: The processing system according to claim 5, wherein the terminal device receives an input of the processing conditions of the processing device or the operating conditions of each component of the processing device, generates the command information based on the received processing conditions or the operating conditions, and transmits the command information to the processing device via one of the communication systems. **Claim 7** A method for managing a processing system according to claim 1, 2, 3, 4, 5 or 6, comprising: a communication state determination step of determining a communication state of one of the communication systems for operating the processing device by a communication state determination unit; a communication system change step of operating the processing device by another communication system at the terminal device when it is determined in the communication state determination step that the communication state is abnormal. A method for managing a processing system comprising the above steps.

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