Liquid-proof box of the grinding unit in a work grinding device

Abstract

It is attached to a grinding unit having a grinding wheel for grinding a workpiece, and a liquid-tight box that houses a coolant nozzle or the like for injecting a coolant for cooling the workpiece during grinding or the like is provided with a function of preventing the coolant from jetting to the outside. 【Solution means】Among a pair of clamp parts 4 and 5 that grip the workpiece 12, an opening 111b for taking in at least a partial section in the axial direction of one of the clamp parts 4 is formed in a wall plate 111a on the side of one of the clamp parts 4, and a liquid-tight brush 117 that closes a gap between the opening 111b and the peripheral surface of one of the clamp parts 4 is continuously fixed in the circumferential direction of the opening 111b around the opening 111b on the inner peripheral surface of the wall plate 111a, and an end on the peripheral surface side of one of the clamp parts 4 of the liquid-tight brush 117 is brought into contact with or can be brought into contact with the peripheral surface of one of the clamp parts 4.

Description

Technical Field

[0001] The present invention relates to a liquid-proof box of a grinding unit having a function of preventing external ejection of a coolant for suppressing heating of a workpiece during grinding of the workpiece to be ground.

Background Art

[0002] A workpiece grinding apparatus for grinding or polishing the peripheral surface of a workpiece such as an ingot whose surface is finished into a cylindrical shape has a grindstone for grinding the workpiece and a nozzle for injecting a coolant for cooling the workpiece during grinding, and is provided with a cover or a box for preventing scattering of grinding chips and the coolant generated during grinding (see Patent Documents 1 and 2).

[0003] The cover has a size (volume) capable of surrounding at least a partial section closer to the workpiece of the workpiece and a pair of clamp portions holding the workpiece, and an opening for inserting the clamp portion is formed in a wall plate facing the axial direction of the workpiece (paragraph 0059, FIG. 3 of Patent Document 1, paragraph 0026, FIG. 1 of Patent Document 2).

[0004] Since grinding chips and coolant can scatter outside the cover from the opening of the wall plate during grinding, a flexible liquid-proof material such as a brush for preventing scattering is attached to the opening (paragraph 0064, FIG. 5 of Patent Document 1, paragraph 0026, FIG. 3 of Patent Document 2).

[0005] However, in any of the above examples, since the liquid-proof material is disposed outside the cover, it is difficult to keep the grinding chips and the coolant inside the cover, and there is a possibility that some grinding chips and coolant may leak outside the cover.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

SUMMARY OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] In Patent Document 1, a water injection part for injecting water onto the surface of a work (workpiece) is arranged in the circumferential direction of the work within a cover, and by forming a film with water, primarily the scattering of grinding chips and coolant outside the cover is prevented (paragraph 0063). From this, it may be sufficient for the liquid stop material to play a secondary role. In Patent Document 1, since there is a double effect of preventing the leakage of grinding chips, etc. by the water injection part and the liquid stop material, it can also be said that by arranging the liquid stop material outside the cover, an effect of preventing the leakage of grinding chips, etc. can be expected.

[0008] However, focusing on the liquid stop material arranged outside the cover, the liquid stop material is not in a state where deformation due to the pressure acting from the inside to the outside of the cover is restrained (prevented), and when pressure acts from the inside of the cover, it is in a state where it can deform from the inside side to the outside side of the cover. Therefore, in this case, there is no room for the liquid stop material to exhibit the function of retaining grinding chips, etc. that are about to scatter to the outside through the opening inside the cover, so it is difficult for the liquid stop material arranged outside the cover to completely retain grinding chips, etc. inside the cover.

[0009] In Patent Document 1, also, the end part on the work side of the liquid stop material (brush) is brought into contact with the surface (circumferential surface) of the work (paragraph 0064), but if the pressure from inside the cover overcomes the frictional force due to the contact, the effect of preventing the deformation of the liquid stop material to the outside of the cover cannot be expected. Therefore, the contact state of the liquid stop material with the work cannot be said to be effective against the scattering of grinding chips, etc.

[0010] The present invention proposes a liquid stop box (cover) of a grinding unit provided with a liquid stop material (brush) that can effectively prevent the scattering of grinding chips, etc. that are about to scatter to the outside, based on the above background.

MEANS FOR SOLVING THE PROBLEM

[0011] In the work grinding device according to claim 1, the liquid-proof box of the grinding unit faces the longitudinal direction of the support base, grips the work when approaching each other, and a pair of clamp parts supported by a support part so as to be rotatable around the axis together with the work in a state of gripping the work, a rotation drive device that rotates the pair of clamp parts gripping the work around the axis of the clamp parts together with the support part, Among the pair of clamp parts, a linear drive device that linearly moves at least one of the clamp parts in the longitudinal direction with respect to the support base together with the support part that supports the one clamp part, In a work grinding device including a grinding unit that is installed on the support base so as to be linearly movable in the longitudinal direction of the support base and has a grinding wheel for grinding or polishing the work, Attached to the grinding unit, on the side of the one clamp part that is linearly movable in the longitudinal direction of the support base when the grinding unit When moving moves together with the grinding unit a liquid-proof box that surrounds the pair of clamp parts and the work gripped by both clamp parts, On the wall plate on the side of the one clamp part, the grinding unit is On the side of the one clamp part to Moving when An opening for taking in at least a partial section on the work side in the axial direction of the one clamp part is formed, A liquid-proof brush that closes the gap between the opening and the peripheral surface of the one clamp part is continuously fixed in the circumferential direction of the opening around the inner peripheral surface of the wall plate around the opening, It is a constituent requirement that the end on the peripheral surface side of the one clamp part of the liquid-proof brush is in contact with or can be in contact with the peripheral surface of the one clamp part.

[0012] "A pair of clamp parts that face each other in the longitudinal direction of the support base, grip the workpiece when approaching each other, and are supported by the support parts" means that, as shown in FIGS. 1 to 3, a pair of clamp parts 4 and 5 that grip (clamp) the workpiece 12 in its axial direction are arranged to face each other in the longitudinal direction of the support base 2 that supports the workpiece grinding apparatus 1, and each of the clamp parts 4 and 5 is supported (held) by the support parts 6 and 7 respectively. The "longitudinal direction of the support base 2" refers to the length direction (long side direction) when the support base 2 is viewed in a plane or an elevation. The "axial direction of the workpiece 12" refers to the axial center direction of the workpiece 12.

[0013] "A pair of clamp parts that are supported by the support parts so as to be rotatable about the axial center together with the workpiece in a state of gripping the workpiece" means that when the pair of clamp parts 4 and 5 are in a state of gripping the workpiece 12, the pair of clamp parts 4 and 5 and the workpiece 12 are rotatable about the axial center together with the support parts 6 and 7. The "axial center" refers to the axial center of the clamp parts 4 and 5 and the support parts 6 and 7, but is also the axial center of the workpiece 12. The pair of clamp parts 4 and 5 constitute the gripping device 3.

[0014] "A rotational drive device that rotates a pair of each clamp part that grips the workpiece together with the support part about the axial center of the clamp part" means that the rotational drive device rotates a pair of each clamp part 4 and 5 that grip the workpiece 12 and the support parts 6 and 7 that support the clamp parts 4 and 5 about the axial center of the clamp parts 4 and 5. The rotational drive device is a motor or the like. The rotational drive device interlocks and rotates the one clamp part 4 (5) and the other clamp part 5 (4) simultaneously with the support parts 6 and 7 that support them respectively.

[0015] The "linear drive device that linearly moves at least one of the pair of clamping parts, together with the support part that supports that one clamping part, in the longitudinal direction with respect to the support base" means the following. That is, among the pair of clamping parts 4 and 5, there are cases where a linear drive device 8 that reciprocates (linearly moves) one of the clamping parts 4 (5) and the support part 6 (7) that supports it in the longitudinal direction of the support base 2 is connected only to that one clamping part 4 (5) (support part 6 (7)), and cases where it is connected to each of both clamping parts 4 and 5 (support parts 6 and 7). The linear drive device 8 is directly or indirectly connected to the clamping part 4 (5) or the support part 6 (7).

[0016] When the pair of clamping parts 4 and 5 grip the workpiece 12, basically, it suffices to reciprocate one of the clamping parts 4 (5) (support part 6 (7)). If both clamping parts 4 and 5 (support parts 6 and 7) can reciprocate, the working efficiency when gripping the workpiece 12 can be improved or fine adjustment becomes possible.

[0017] The "workpiece grinding device provided with a grinding unit having a grinding wheel that is installed on the support base so as to be linearly movable in the longitudinal direction of the support base and grinds or polishes the workpiece" means that the components of the workpiece grinding device 1 include a grinding unit 11 that is installed on the support base 2 so as to be linearly movable in the longitudinal direction.

[0018] "Attached to the grinding unit, on the side of one clamping part that is linearly movable in the longitudinal direction of the support base the grinding unit When it has moved moves together with the grinding unit 、a liquid-proof box that surrounds the pair of clamping parts and the workpiece gripped by both of these clamping parts" means that when the grinding unit 11 moves to the side of one clamping part 4 (5) on the support base 2, at least a part of the workpiece 12 side of the workpiece 12 and the pair of clamping parts 4 and 5 that grip it are surrounded inside the liquid-proof box 111 that is part of the grinding unit 11. Before the grinding unit 11 moves to the side of one clamping part 4 (5), it is located on the side opposite to one clamping part 4 (5), on the side of the other clamping part 5 (4).

[0019] "On the wall plate on the side of one clamping part, a grinding unit is On the side of one clamping part to Move when "An opening for taking in at least a partial section on the workpiece side in the axial direction of one clamping part is formed" means that the liquid-proof box 111 is constituted, and an opening 111b for the workpiece 12 and one clamping part 4(5) to enter into the liquid-proof box 111 when the grinding unit 11 moves is formed on the wall plate 111a located on the side of one clamping part 4(5).

[0020] "A liquid-proof brush that closes the gap between the opening and the peripheral surface of one clamping part is continuously fixed in the circumferential direction around the opening of the inner peripheral surface of the wall plate" means that a liquid-proof brush 117 is continuously fixed in the circumferential direction of the opening 111b so as to fill the gap between the peripheral surface (outer peripheral surface) of the clamping part 4(5) and the opening 111b in a state where the clamping part 4(5) is inserted through the opening 111b on the inner peripheral surface of the wall plate 111a. "The inner peripheral surface of the wall plate 111a" refers to the inner side surface of the liquid-proof box 111.

[0021] "Continuously" means that, for example, when the liquid-proof brush 117 is composed of a plurality of (a plurality of) brush constituent materials 117A as described later (Claim 2), when looking at the opening 111b from the front as shown in FIGS. 14 and 15, the adjacent brush constituent materials 117A, 117A are arranged such that there is no gap between the linear materials 117a, 117a of the adjacent brush constituent materials 117A, 117A.

[0022] The liquid-proof brush 117 is generally plate-shaped such as a disk shape, and the edge near the opening 111b has an annular shape corresponding to the shape of the opening 111b so that one clamping part 4(5) can be inserted through from the opening 111b. The liquid-proof brush 117 is fixed to the wall plate 111a at a position on the periphery of the opening 111b that is far from the opening 111b, and is continuous toward the opening 111b in the radial direction (radius direction) of the opening 111b. "Fixed" also includes being detachably fixed.

[0023] When viewed in the radial direction of the opening 111b, except for the portion of the liquid-proof brush 117 that protrudes from the opening 111b toward the clamp portion 4(5), the other portion is in a state of being in contact with, or capable of contacting, the inner peripheral surface of the wall plate 111a around the opening 111b as shown in FIGS. 11, 12-(c), and 16-(c). The "portion of the liquid-proof brush 117 other than the portion that protrudes from the opening 111b toward the clamp portion 4(5)" is the portion (section) where the liquid-proof brush 117 overlaps the wall plate 111a when the wall plate 111a is viewed from the front inside the liquid-proof box 111. The portion of the liquid-proof brush 117 that overlaps the wall plate 111a is in a state of being in contact with, or capable of contacting, the inner peripheral surface of the wall plate 111a.

[0024] The "state of being in contact" means that at least a part of the above-mentioned linear member 117a, which is the portion located on the wall plate 111a side of the liquid-proof brush 117, is in contact with the inner peripheral surface of the wall plate 111a. The "state of being capable of contacting" means that when viewed in the radial direction of the opening 111b, when a pressure from the inside to the outside of the liquid-proof box 111 is generated due to the injection of the coolant from the coolant nozzle 113, the portion (section) of the liquid-proof brush 117 (linear member 117a) closer to the clamp portion 4(5) is in a state of contacting the inner peripheral surface of the wall plate 111a.

[0025] The statement that "the end portion on the peripheral surface side of one clamp portion of the liquid-proof brush is in contact with the peripheral surface of one clamp portion" means that when viewed in the radial direction of the opening 111b, the tip portion on the clamp portion 4(5) side of the portion (section) that transitions from the portion of the liquid-proof brush 117 (linear member 117a) on the wall plate 111a side far from the opening 111b to the opening 111b side is in contact with the peripheral surface of the clamp portion 4(5).

[0026] "In contact with the circumferential surface of the clamp portion 4(5)" means that when the grinding unit 11 moves to one side of the clamp portion 4(5) and at least a partial section on the workpiece 12 side in the axial direction of one of the clamp portions 4(5) is incorporated into the opening 111b of the wall plate 111a, as shown in Fig. 12-(c), the end portion on the circumferential surface side of one of the clamp portions 4(5) of the liquid-proof brush 117 (linear member 117a) contacts the circumferential surface of one of the clamp portions 4(5). In this case, as shown in Fig. 12-(c), the end portion (the tip portion of the linear member 117a) of the liquid-proof brush 117 protrudes from the opening 111b toward the clamp portion 4(5).

[0027] "The end portion on the circumferential surface side of one of the clamp portions of the liquid-proof brush can be in a state of contacting the circumferential surface of one of the clamp portions" means that when at least a partial section on the workpiece 12 side in the axial direction of one of the clamp portions 4(5) is incorporated into the opening 111b of the wall plate 111a, the end portion (the tip) on the circumferential surface side of one of the clamp portions 4(5) of the liquid-proof brush 117 (linear member 117a) approaches to such an extent as to contact the circumferential surface of one of the clamp portions 4(5). In this case, the end portion (the tip of the linear member 117a) of the liquid-proof brush 117 does not necessarily protrude from the opening 111b toward the clamp portion 4(5) side and does not contact the circumferential surface of the clamp portion 4(5).

[0028] When the end portion on the circumferential surface side of one of the clamp portions 4(5) of the liquid-proof brush 117 (linear member 117a) is in contact with the circumferential surface of one of the clamp portions, when the grinding unit 11 moves to one side of the clamp portion 4(5) and at least a partial section on the workpiece 12 side in the axial direction of one of the clamp portions 4(5) is incorporated into the opening 111b of the wall plate 111a, by continuously contacting one of the clamp portions 4(5), the portion (section) of the liquid-proof brush 117 near the opening 111b bends or flexes as shown in Fig. 12-(c). The portion (section) of the liquid-proof brush 117 near the opening 111b can also be said to be the end portion section on the circumferential surface side of one of the clamp portions 4(5).

[0029] The "portion near the opening 111b of the liquid-proof brush 117" refers to the portion that protrudes or attempts to protrude toward the opening 111b from the portion overlapping the wall plate 111a of the liquid-proof brush 117 (linear member 117a). Among this portion, the end portion (tip portion) on the side of the clamp portion 4 (5) may contact or be capable of contacting the clamp portion 4 (5). The meaning of "the liquid-proof brush 117 being in contact with the peripheral surface of the clamp portion 4 (5), etc." is that the liquid-proof brush 117 (linear member 117a) closes the gap between the peripheral surface of the clamp portion 4 (5) and the opening 111b.

[0030] As described above, in a state where the portion of the liquid-proof brush 117 (linear member 117a) overlapping the wall plate 111a is in contact with or capable of contacting the inner peripheral surface of the wall plate 111a, and the liquid-proof brush 117 is fixed to the wall plate 111a inside the liquid-proof box 111, at least the portion overlapping the wall plate 111a will not undergo bending deformation even when pressure acts on the liquid-proof brush 117 from the inside to the outside of the liquid-proof box 111 because the bending deformation is restricted by the wall plate 111a.

[0031] In addition, due to the tip portion (tip portion of the linear member 117a) or the end section of the portion that can protrude from the portion of the liquid-proof brush 117 overlapping the wall plate 111a toward the opening 111b being in a state of contacting or being capable of contacting the clamp portion 4 (5) (Claim 1), even if pressure from the inside to the outside of the liquid-proof box 111 occurs in the portion of the liquid-proof brush 117 that can protrude toward the opening 111b, a situation where the portion of the liquid-proof brush 117 that can protrude toward the opening 111b is bent and deformed outward by the pressure and protrudes outside the liquid-proof box is avoided.

[0032] As a result, in addition to the portion of the liquid-proof brush 117 that can protrude toward the opening 111b closing the gap between the peripheral surface of the clamp portion 4 (5) and the opening 111b, scattering of grinding debris and coolant outside the liquid-proof box 111 during grinding of the workpiece 12 is substantially completely prevented.

[0033] Particularly, when the liquid-proof brush 117 is viewed from the vertical plane inside the liquid-proof box 111, the length in the radial direction (radius direction) of the portion (section) (the section overlapping the opening 111b) of the liquid-proof brush 117 (linear member 117a) that can protrude toward the opening 111b side only needs to be smaller than the length of the portion (section) overlapping the wall plate 111a. Therefore, the bending rigidity of the section where it can protrude (linear member 117a) is relatively larger than the bending rigidity of the section overlapping the wall plate 111a, making it less likely to bend and deform. Thus, even if a pressure is generated from the inside to the outside of the liquid-proof box 111, it is unlikely that only the portion (section) of the liquid-proof brush 117 that can protrude toward the opening 111b side will bend and deform outside the opening 111b.

[0034] Specifically, as shown in FIGS. 14 and 15, the liquid-proof brush 117 is composed of a plurality of brush constituent members 117A arranged in the circumferential direction around the opening 111b. Each brush constituent member 117A is composed of a large number (a large number of strands) of linear members 117a and a holder 117b that holds (restrains) all the end portions on one side of the large number of linear members 117a (Claim 2).

[0035] When a plurality of brush constituent members 117A are arranged around the opening 111b, the holders 117b, 117b are fixed to the wall plate 111a adjacent to each other in the circumferential direction of the opening 111b, and the linear members 117a are in contact with or overlap the linear members 117a of the adjacent brush constituent members 117A in the circumferential direction of the opening 111b (Claim 2). The adjacent brush constituent members 117A, 117A are arranged continuously so that there is no gap between the linear members 117a, 117a of both brush constituent members 117A, 117A as described above (Claim 1).

[0036] The linear members 117a do not have the ability to prevent the grinding swarf and the coolant from scattering outside the opening 111b when there are only a few of them. However, when a large number of them, exceeding a few, are assembled together, they have a thickness in the thickness direction of the wall plate 111a (holder 117b), are arranged in the circumferential direction of the opening 111b, and as shown in Fig. 16, the linear members 117a themselves form a wall-like shape. The linear members 117a of adjacent brush components 117A overlap each other in the circumferential direction of the opening 111b, ensuring an appropriate bending rigidity and elasticity that do not easily bend while closing the gap between the peripheral surface of the clamp portion 4(5) and the opening 111b, and having the ability to prevent the grinding swarf and the coolant from scattering outside the opening 111b.

[0037] "Assembly of a large number" means that when looking at the liquid-proof brush 117 in the thickness direction and the circumferential direction, the linear members 117a are assembled in such a number that no gap can be seen between the linear members 117a. Alternatively, when looking at the wall plate 111a from inside the liquid-proof box 111 in a state where a plurality of brush components 117A are arranged around the opening 111b, it means that the linear members 117a are densely packed to such an extent that the wall plate 111a cannot be seen at the tips of the large number of linear members 117a. Specifically, it means that there are dozens or more in each of the thickness direction and the circumferential direction of the liquid-proof brush 117 and they form bundles. Although it also depends on the thickness (diameter) of a single linear member 117a, "a large number" specifically refers to about dozens to hundreds.

[0038] During the grinding of the workpiece 12, a large number of linear members 117a are in contact with or can come into contact with the wall plate 111a and have an appropriate bending rigidity in the thickness direction, so they act as a part of the brush component 117A like a wall that prevents the grinding swarf and the coolant from scattering outside the opening 111b.

[0039] When the linear member 117a extends from the opening 111b toward the clamp portion 4(5) side, when the grinding unit 11 moves to one clamp portion 4(5) side and takes in the workpiece 12 and one clamp portion 4(5) into the liquid-proof box 111, as shown in Fig. 12-(c), the section near the clamp portion 4(5) in the radial direction (the section overlapping the opening 111b) elastically deforms temporarily so as not to hinder the insertion of the clamp portion 4(5) through the opening 111b. After the clamp portion 4 is inserted into the liquid-proof box 111, it restores or attempts to restore, closing the gap between the opening 111b and the outer peripheral surface of the clamp portion 4(5).

[0040] When the liquid-proof brush 117 is composed of a plurality of brush constituent members 117A arranged around the opening 111b (Claim 2), particularly by making the circumferential widths of the brush constituent members 117A, 117A adjacent in the circumferential direction of the opening 111b different (Claim 3), it becomes possible to arrange the plurality of brush constituent members 117A without gaps and regularly in the circumferential direction of the opening 111b.

[0041] For example, as shown in Fig. 14, when arranging the brush constituent members 117A with a certain angle in the circumferential direction between the center lines in the width direction of the adjacent brush constituent members 117A, 117A, considering that no gap occurs between the linear members 117a, 117a of the adjacent brush constituent members 117A, 117A under the condition of ensuring that the width of the holder 117b of the brush constituent member 117A is a certain value or more and preventing the length of the linear member 117a from becoming too large. In the examples shown in Figs. 14 and 15 where 16 brush constituent members 117A are arranged in the circumferential direction, the angle between the center lines in the width direction of the adjacent brush constituent members 117A, 117A is 22.5 degrees, which is half of 45 degrees, i.e., 360 degrees / 16.

[0042] To ensure that the width of the holder 117b of the brush component 117A is equal to or greater than a certain value, it means arranging a plurality of fasteners such as screws (bolts) 15 for fixing the holder 117b of one (one piece) of the brush component 117A to the wall plate 111a in the width direction, and also means not having too many brush components 117A to be arranged around the opening 111b. "To prevent the length of the linear member 117a from becoming too large" means preventing the bending rigidity in the state where a large number of linear members 117a are assembled from decreasing, and making it difficult to bend and deform.

[0043] As shown by the two-dot chain line in FIG. 15, when the circumferential width of the openings 111b of the adjacent brush components 117A, 117A is made constant, if an angle of 22.5 degrees (1 / 2 of 45 degrees) is provided between the center lines in the width direction of the adjacent brush components 117A, 117A, the holders 117b, 117b of the adjacent brush components 117A, 117A are likely to be in an interfering state, and it is difficult to arrange the brush components 117A regularly without gaps. When the angle between the center lines is 22.5 degrees, the number of brush components 117A arranged in the circumferential direction of the opening 111b is 16.

[0044] In this case, if we try to ensure that the width of the holder 117b of the brush component 117A is equal to or greater than a certain value, we have to move one of the holders 117b away from the center of the opening 111b, which results in increasing the length of the linear member 117a. As a result, the bending rigidity of a large number of linear members 117a becomes small, and it is easily deformed by water pressure.

[0045] On the contrary, as shown by the solid line in FIG. 15, by making the circumferential widths of the openings 111b of the adjacent brush components 117A, 117A different (Claim 3), it becomes possible to regularly arrange a plurality of brush components 117A in the circumferential direction without creating a gap between the holders 117b, 117b of the adjacent brush components 117A, 117A.

[0046] In the example of FIG. 15, when the vertical shape of the retainer 117b is rectangular, by setting the ratio of the widths of two types of retainers 117b with different widths to 10:7, the ends of adjacent retainers 117b, 117b near the opening 111b are brought into contact with each other, and while eliminating the gap, a 22.5-degree angle is provided between the center lines in the width direction of the retainers 117b, 117b, enabling them to be regularly arranged around the opening 111b.

[0047] By arranging a plurality of retainers 117b (brush constituent members 117A) while bringing the ends of adjacent retainers 117b, 117b near the opening 111b into contact with each other, the linear members 117a, 117a of adjacent brush constituent members 117A, 117A can be brought into contact with each other. When the linear members 117a, 117a of adjacent brush constituent members 117A, 117A are in contact with and adhered to each other, the density of the multiple linear members 117a increases closer to the opening 111b, and it becomes difficult for voids to occur among the multiple linear members 117a.

[0048] As a result, between adjacent brush constituent members 117A, 117A, while the linear members 117a, 117a of both are adhered to each other, shielding properties against grinding chips and coolant are ensured, and it becomes possible to effectively prevent the scattering of grinding chips and the like that attempt to scatter from inside the liquid-proof box 111 to the outside.

[0049] Specifically, the retainer 117b of the brush constituent member 117A is divided into a fixing portion 117b1 that is directly or indirectly overlapped and fixed to the wall plate 111a of the liquid-proof box 111 as shown in FIG. 16, and a holding portion 117b2 that holds a large number of linear members 117a. The surface of the fixing portion 117b1 on the side of the wall plate 111a, on the wall plate 111a side of a number of linear members 117a It is appropriate for the surfaces to form a continuous flat surface (Claim 4).

[0050] In this case, the surface (back surface) of the fixing portion 117b1 on the side of the wall plate 111a, on the wall plate 111a side of a number of linear members 117aThe surface (rear surface) forms a continuous plane, so that the entire surface of the large number of linear members 117a on the wall plate 111a side is aligned in a state of being in contact with the wall plate 111a, and gaps are less likely to occur or not occur between the wall plate 111a and the linear members 117a, making it easier to prevent grinding chips and coolant from leaking out of the opening 111b.

Effect of the Invention

[0051] Among a pair of clamp parts for gripping a workpiece, a liquid-proof brush that closes the gap between the opening and the peripheral surface of one of the clamp parts is fixed around the opening for taking in one of the clamp parts on the inner peripheral surface of the wall plate on one of the clamp part sides, and the end of the liquid-proof brush on the peripheral surface side of one of the clamp parts is brought into contact with or can be brought into contact with the peripheral surface of one of the clamp parts. Therefore, even when pressure acting from the inside to the outside of the liquid-proof box acts on the liquid-proof brush, at least the bending deformation of the portion of the liquid-proof brush overlapping the wall plate can be restrained by the wall plate, and as a result, the bending deformation of the liquid-proof brush can be avoided.

[0052] In addition, since the tip (end) of the portion that can project from the portion overlapping the wall plate of the liquid-proof brush toward the opening side is in contact with or can be in contact with the clamp part, even if pressure acting from the inside to the outside of the liquid-proof box occurs in the portion that can project from the portion overlapping the wall plate of the liquid-proof brush toward the opening side, a situation where the portion that can project from the liquid-proof brush toward the opening side is bent and deformed by the pressure and protrudes outside the liquid-proof box can be avoided. As a result, the portion that can project from the liquid-proof brush toward the opening side closes the gap between the peripheral surface of the clamp part and the opening, and it is possible to substantially completely prevent grinding chips and coolant from scattering outside the liquid-proof box during grinding of the workpiece.

Brief Description of the Drawings

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Embodiment for Carrying out the Invention

[0054] FIGS. 1 and 2 show a configuration example of a work grinding device 1 having a pair of clamp portions 4 and 5 that face each other in the longitudinal direction of a support base 2, grip (clamp) a work 12 when approaching each other, and are supported by support portions (spindles) 6 and 7 so as to be rotatable about an axis together with the work 12 in a state where the work 12 is gripped. The pair of clamp portions 4 and 5 constitute a gripping device 3. The support base 2 is a three-dimensional frame-shaped base for supporting the work grinding device 1.

[0055] In addition to the gripping device 3, the work grinding device 1 includes a rotation drive device that rotates each of the pair of clamp portions 4 and 5 that grip the work 12 about the axis of each of them together with the support portions 6 and 7 that support them, and a linear drive device 8 that linearly moves at least one of the clamp portions 4 (5) together with the support portion 6 (7) that supports it in the longitudinal direction with respect to the support base 2. Specifically, the rotation drive device is a work rotation motor 98 and 104 respectively attached to a movable side presser unit 9 and a fixed side presser unit 10, which will be described later.

[0056] As shown in FIG. 9, the work grinding device 1 is provided with a grinding unit 11 that is installed on the support base 2 so as to be linearly movable in the longitudinal direction of the support base 2 and has a grinding wheel 112 for grinding or polishing the work 12. When the grinding unit 11 moves to one of the clamp portions 4 (5) side that is linearly movable in the longitudinal direction of the support base 2, moves together with the grinding unit 11, A liquid-proof box 111 that surrounds the pair of clamp portions 4 and 5 and the work 12 gripped by both of these clamp portions 4 and 5 is connected.

[0057] As shown in FIGS. 1 and 9, the grinding unit 11 is linearly movable on the same track as the movable-side pressing unit 9 that is linearly movable in the longitudinal direction with respect to the support base 2 on a plane. Also, since one of the clamp parts 4 supported by the movable-side pressing unit 9 is arranged on one side of the movable-side pressing unit 9 in the width direction of the support base 2, the liquid-proof box 111 is arranged on the same side as the one clamp part 4 side of the grinding unit 11. The liquid-proof box 111 is omitted in FIG. 1.

[0058] In the illustrated example, in order to securely grip the workpiece 12 having an irregular three-dimensional shape end face on one side in the axial direction, among the pair of clamp parts 4 and 5, either one of the clamp parts 4(5) is a follower clamp part as shown in FIGS. 4 and 6, and an example is shown where it has a plurality of gripping members 41 that can protrude and retract from the end face on the other clamp part 5(4) side to the workpiece 12 side and are independent of each other.

[0059] When the workpiece 12 is a silicon carbide single crystal (SiC) ingot, due to its manufacturing method (sublimation method), the end face on one side in the axial direction is a flat surface, while the end face on the other side may have irregularities. Therefore, when the workpiece 12 is a SiC ingot, it is required to be able to securely grip the end face of the ingot with such irregularities.

[0060] The drawing shows an example of the case where one of the clamp parts 4, which is part of the movable-side pressing unit 9, behaves as a follower clamp part having the gripping member 41, but there may also be a case where the other clamp part 5, which is part of the fixed-side pressing unit 10, becomes a follower clamp part having the gripping member 41. Hereinafter, an example will be described in the case where one of the clamp parts 4 is a follower clamp part and the other clamp part 5 is a fixed clamp part that is part of the fixed-side pressing unit 10.

[0061] As shown in FIGS. 1 and 2, a pair of clamp parts 4 and 5 are arranged such that their axes are located on the same straight axis on the support base 2, and a linear drive device 8 is indirectly connected to at least one of the clamp parts 4(5). In the illustrated example, the linear drive device 8 is connected to the movable-side pressing unit 9 integrated with one of the clamp parts 4, which is the follower clamp part. However, the linear drive device 8 may also be connected to the other clamp part 5.

[0062] In the illustrated example, one of the clamp parts (the follower clamp part) 4 is integrated with the movable-side pressing unit 9 in the supporting part 6 that supports it, and since the linear drive device 8 is connected to the movable-side pressing unit 9, the follower clamp part 4 linearly moves in the longitudinal direction of the support base 2 with respect to the fixed-side pressing unit 10 when the linear drive device 8 is driven.

[0063] In the illustrated example, the other clamp part 5 is also integrated with the fixed-side pressing unit 10 in the supporting part 7 that supports it as will be described later. In this context, since the other clamp part 5 does not linearly move in the longitudinal direction of the support base 2, the clamp part on the side paired with the follower clamp part 4 will be hereinafter referred to as the fixed clamp part 5. Since the workpiece 12 basically has an outer peripheral surface in the shape of a cylinder and the cross-sectional shape is circular, the end faces of both the follower clamp part 4 and the fixed clamp part 5 are basically circular.

[0064] In the drawing, an example is shown where the linear drive device 8 arranged on the support base 2 is composed of, for example, a motor 81 installed on the support base 2, a drive shaft 82 for converting the rotational force of the motor 81 into linear motion and transmitting it to the movable-side pressing unit 9, a ball screw 85, etc. However, as long as the linear drive device 8 is a mechanism that transmits power as the linear motion of the movable-side pressing unit 9 (one of the clamp parts (the follower clamp part) 4), the mechanism (configuration) and the installation position are not limited, and devices other than the mechanism using a ball screw or the like can also be used.

[0065] In the drawings, as shown in FIGS. 1, 3, and 9, a grinding unit 11 equipped with a grinding wheel 112 shown in FIG. 10 for grinding or polishing the work 12 is installed on the support base 2 adjacent to the width direction of the support base 2. The fixed-side pressing unit 10 is fixed to the support base 2 so as not to move linearly.

[0066] The grinding unit 11 is installed on the support base 2 so as to be linearly movable in the longitudinal direction of the support base 2 and moves linearly when the motor 114 attached to the grinding unit 11 rotates as shown in FIG. 1. On the side of the pair of clamp portions 4 and 5 of the grinding unit 11, as shown in FIG. 10, together with the grinding wheel 112 and the like, a liquid-proof box 111 that houses a coolant nozzle 113 and the like for injecting a coolant for cooling the work 12 during grinding is attached. As will be described later, the grinding wheel 112 and the like are stored in the liquid-proof box 111. Details of the inside of the liquid-proof box 111 will be described later.

[0067] Since the fixed-side pressing unit 10 is fixed to the support base 2, when the work 12 is gripped by the pair of clamp portions 4 and 5, the movable-side pressing unit 9 equipped with the follower clamp portion 4 and the support portion 6 that supports it moves linearly (approaches) toward the fixed-side pressing unit 10 side when the linear drive device 8 is driven, and the work 12 is gripped by the follower clamp portion 4 and the fixed clamp portion 5.

[0068] In the case of the example shown in FIG. 1, as the motor 81 that constitutes the linear drive device 8 rotates, the drive shaft 82 directly connected to the motor 81 rotates. At the same time, the driven gear 84 meshed with the drive gear 83 connected to the movable-side pressing unit 9 side of the drive shaft 82 rotates. A ball screw 85 is connected to the driven gear 84 in parallel with the drive shaft 82. The ball screw 85 rotates as the driven gear 84 rotates, and the nut 86 screwed onto the movable-side pressing unit 9 side of the ball screw 85 reciprocates (moves linearly) in the axial direction with respect to the ball screw 85.

[0069] The nut 86 forms part of the main body 91 that constitutes the movable-side pressing unit 9. The main body 91 reciprocates (linear motion) in the axial direction of the ball screw 85 simultaneously with the reciprocating motion of the nut 86. On one side in the direction orthogonal to the reciprocating motion direction of the main body 91, a control unit 92 having a control device for controlling the protrusion and retraction of the gripping member 41 that is retractably housed in the follower clamp portion 4 is integrated. The control unit 92 reciprocates (linear motion) in the axial direction of the ball screw 85 together with the main body 91. The main body 91 of the movable-side pressing unit 9 runs on the parallel guide members 93, 93 laid on the support base 2 in the axial direction of the ball screw 85, and is guided by both guide members 93, 93.

[0070] A support portion 6 is integrally connected to the control unit 92 of the movable-side pressing unit 9, and a follower clamp portion 4 is integrally connected to the end portion of the support portion 6 on the fixed clamp portion 5 side. The support portion 6 is connected to the fixed clamp portion 5 side of the control unit 92. The support portion 6 and the follower clamp portion 4 reciprocate when the motor 81 rotates together with the control unit 92, and when moving to the fixed clamp portion 5 side, grip the workpiece 12 together with the fixed clamp portion 5 supported in a fixed state by the support portion 7 which is a part of the fixed-side pressing unit 10.

[0071] Since the fixed-side pressing unit 10 equipped with the fixed clamp portion 5 is fixed to the support base 2, when gripping the workpiece 12, the movable-side pressing unit 9 moves toward the fixed-side pressing unit 10 side, so that the follower clamp portion 4 and the fixed clamp portion 5 grip the workpiece 12.

[0072] In the drawings, as shown in FIG. 4, an example is shown in the case of using a SiC ingot as the workpiece 12, where one end face has an irregular three-dimensional shape and the other end face forms a flat surface perpendicular to the axis. The irregular three-dimensional end face of the workpiece 12 faces the follower clamp portion 4 side, and the end face forming the flat surface faces the fixed clamp portion 5 side. In this relationship, the end face of the fixed clamp portion 5 on the follower clamp portion 4 side is a flat surface orthogonal to the axis of the workpiece 12. The insertion of the workpiece 12 between the follower clamp portion 4 and the fixed clamp portion 5 is operated by a loader unit described later.

[0073] The follower clamp portion 4 holds a plurality of gripping members 41 that can protrude from and retract into the end face on the fixed clamp portion 5 side as described above. As shown in FIGS. 4 and 6, the plurality of gripping members 41 are housed in a storage portion 42 formed in the follower clamp portion 4 so as to be able to protrude from and retract into the end face of the follower clamp portion 4 independently of each other. When gripping the workpiece 12, the tip portions of the plurality of gripping members 41 on the workpiece 12 side protrude from the end face of the follower clamp portion 4, and when the workpiece 12 is gripped in the axial direction between the tip end faces of the gripping members 41 and the end face of the fixed clamp portion 5, as shown in FIG. 4, the axial tip end faces of all the gripping members 41 grip the workpiece 12 together with the end face of the fixed clamp portion 5.

[0074] The workpiece 12 is inserted between the end faces of both clamp portions 4 and 5 that are in a state where a distance is secured between the opposing end faces while being held by a loader unit (not shown) that transfers the workpiece 12 in and out between the pair of clamp portions 4 and 5. However, for the purpose of avoiding the influence on the peripheral surface, which is the grinding surface, due to the workpiece 12 being directly held by the loader unit, a supported material 12A for being directly held by the loader unit is joined to the end face on the fixed clamp portion 5 side of the workpiece 12 with an adhesive or the like, as shown in FIG. 4.

[0075] In this case, the workpiece 12 is moved toward the fixed clamp portion 5 side while being held by the loader unit on the peripheral surface of the supported material 12A integrated therewith until the end face on the fixed clamp portion 5 side of the supported material 12A comes into surface contact with the end face of the fixed clamp portion 5. By the end face of the fixed clamp portion 5 coming into surface contact with the end face of the supported material 12A, a uniform compressive force is applied in the axial direction of the workpiece 12 in the contact state of the workpiece 12 due to the movement of the follower clamp portion 4 toward the fixed clamp portion 5 side, and the workpiece 12 is gripped with a constant compressive force.

[0076] When the end face on the fixed clamp part 5 side of the supported material 12A contacts the end face of the fixed clamp part 5, the end face on the workpiece 12 side of the air supply pipe 102 for cleaning air supply shown in FIG. 8, which is arranged in the control part 101 of the fixed side presser unit 10 to which the support part 7 supporting the fixed clamp part 5 is connected, reacts as a sensor dog. At the same time, the sensor 103 installed behind the control part 101 (on the opposite side of the fixed clamp part 5) detects the contact of the workpiece 12 (supported material 12A) with the end face of the fixed clamp part 5, and the movement of the workpiece 12 by the loader unit toward the fixed clamp part 5 side is stopped. The protrusion 12A1 shown in FIG. 4 formed or protruding on the end face on the fixed clamp part 5 side of the supported material 12A contacts the end face on the workpiece 12 side of the air supply pipe 102.

[0077] The loader unit is arranged on the side of the fixed side presser unit 10 opposite to the grinding unit 11 and can reciprocate (linear motion) in the axial direction of the fixed clamp part 5. The loader unit may be supported by the support base 2. The loader unit moves the workpiece 12 between the follower clamp part 4 and the fixed clamp part 5 by linear motion in the longitudinal direction and the width direction of the support base 2 while holding the workpiece 12, and once stops when the flat end face of the workpiece 12 coincides with the end face position of the fixed clamp part 5. At this time, the axis of the workpiece 12 and the axes of the follower clamp part 4 and the fixed clamp part 5 are in a parallel state.

[0078] After the loader unit intervenes the workpiece 12 between the follower clamp part 4 and the fixed clamp part 5, it slightly moves the workpiece 12 for fine adjustment toward the fixed clamp part 5 side, and stops the workpiece 12 when receiving a command from the sensor 103 when the workpiece 12 is in surface contact with the end face of the fixed clamp part 5. If there is an obstacle to the gripping of the workpiece 12 by the follower clamp part 4 and the fixed clamp part 5, the loader unit disengages from the stop position of the workpiece 12.

[0079] After the workpiece 12 stops, the movable-side pressing unit 9 moves toward the workpiece 12 side (fixed-side pressing unit 10 side) by the operation of the linear drive device 8. When the detection material 43 fixed to the end face on the workpiece 12 side of the follow clamping unit 4 shown in FIGS. 6 and 7 contacts any part of the end face of the workpiece 12 having an irregular three-dimensional shape, the sensor 94 shown in FIGS. 2 and 5 installed behind the movable-side pressing unit 9 (opposite side of the follow clamping unit 4) detects the contact of the detection material 43 with the workpiece 12, and stops the movable-side pressing unit 9 (linear drive device 8).

[0080] Here, the fixed position of the detection material 43 on the end face of the follow clamping unit 4 is adjusted so that the tip end face of the detection material 43 on the end face of the follow clamping unit 4, rather than any gripping material 41 protruding from the end face on the workpiece 12 side of the follow clamping unit 4, can surely contact the end face of the workpiece 12 when the follow clamping unit 4 moves toward the workpiece 12 side.

[0081] Specifically, as shown in FIG. 6, when all the gripping materials 41 are immersed in the storage part 42 of the follow clamping unit 4, when viewed in the direction orthogonal to the axial direction of the follow clamping unit 4, the tip end face on the workpiece 12 side of the detection material 43 is adjusted to be positioned on the workpiece 12 side relative to the tip end face on the workpiece 12 side of all the gripping materials 41. The detection material 43 is fixed to the end face of the follow clamping unit 4 at this adjusted position.

[0082] In FIG. 6, the tip end face of the uppermost gripping material 41 is shown to coincide with the tip end face of the detection material 43, but in the immersed state, the gripping material 41 is stored in the storage part 42 as shown by the two-dot chain line. In FIGS. 6 and 7, the detection material 43 is arranged at the center position of the end face of the follow clamping unit 4, but it is not always necessary to arrange the detection material 43 at the center of the end face.

[0083] The end face on the follow clamping unit 4 side of the workpiece 12 may have an irregular three-dimensional shape as shown in FIG. 4. A plurality of gripping materials 41 independent of each other are stored in the storage part 42 of the follow clamping unit 4 so as to be able to protrude and retract in the axial direction of the follow clamping unit 4 so that all the gripping materials 41 can follow the irregular arbitrary three-dimensional shape and contact and press the end face of the workpiece 12.

[0084] When each gripping member 41 grips the workpiece 12, it protrudes from the end face on the workpiece 12 side (fixed clamp portion 5 side) of the follower clamp portion 4 toward the workpiece 12 side. At the position where the end faces on the workpiece 12 side of each of them come into contact with the end face of the workpiece 12, the protrusion from the follower clamp portion 4 stops upon receiving the reaction force from the workpiece 12. In this stopped state, when each gripping member 41 receives the hydraulic pressure described later, a constant compressive force acts on the workpiece 12 from each gripping member 41. The total value of the compressive forces acting on the workpiece 12 from all the gripping members 41 is the reaction force acting on the workpiece 12 from the paired fixed clamp portion 5, and this reaction force becomes the compressive force when the fixed clamp portion 5 grips the workpiece 12.

[0085] In particular, in preparation for the case where the end face of the workpiece 12 on the side of the follower clamp portion 4 has a delicate uneven shape, as shown in FIGS. 4 and 6, it is desirable that the end portion of the gripping member 41 on the workpiece 12 side has a tapered shape from the support portion 6 side toward the workpiece 12 side. Specifically, the end portion of the gripping member 41 on the workpiece 12 side has a shape in which the cross-sectional area perpendicular to the axis of the gripping member 41 decreases or gradually decreases from the support portion 6 side that supports the follower clamp portion 4 toward the workpiece 12 side.

[0086] Since the tip of the gripping member 41 has a tapered shape, as shown in FIG. 4, even when the end face of the workpiece 12 has a fine uneven shape, each gripping member 41 can contact the end face of the workpiece 12 substantially at a point or a surface close to a point. Therefore, it is possible to accurately and stably grip the workpiece 12 without slightly moving (shifting) it in a direction perpendicular to the axis of the workpiece 12.

[0087] Also, when the workpiece 12 is gripped by all the gripping members 41 of the follower clamp portion 4, in order to prevent the detection member 43 from being involved in the gripping of the workpiece 12, in other words, in order to prevent the detection member 43 from interfering with the gripping by the gripping members 41, when all the gripping members 41 protrude, the protruding length of the detection member 43 is adjusted so that the tip end faces on the workpiece 12 side of all the gripping members 41 are located on the workpiece 12 side of the detection member 43.

[0088] When the tip surface of the entire gripping member 41 on the workpiece 12 side during protrusion is positioned closer to the workpiece 12 side than the tip surface of the detection member 43 on the workpiece 12 side, any part of the tip surface of the detection member 43 coming into contact with the end surface of the workpiece 12 ahead of any part of the tip surface of the entire gripping member 41 is avoided. This is possible as long as the central part of the end surface on the follower clamping part 4 side of the workpiece 12 is not in a three-dimensional shape that is extremely convex toward the follower clamping part 4 side. When the workpiece 12 is gripped by the entire gripping member 41, since the detection member 43 does not come into contact with the workpiece 12 ahead of the entire gripping member 41, malfunction due to the detection member 43 coming into contact with the workpiece 12 is avoided.

[0089] As shown in FIGS. 5, 6, and 8, a hydraulic fluid supply pipe 95 for supplying hydraulic fluid for controlling the protrusion and retraction of each gripping member 41 is arranged in the control unit 92 of the movable-side presser unit 9. As shown in FIG. 5, hydraulic fluid such as pressure oil is supplied into the hydraulic fluid supply pipe 95 from a tank 99 by a hydraulic pump 96 through a control valve 97 such as a solenoid valve. As shown in FIG. 6, the hydraulic fluid supply pipe 95 branches into each storage part 42 for storing each gripping member 41 within the follower clamping part 4, equal hydraulic fluid is supplied into a plurality of storage parts 42 storing each gripping member 41, and equal hydraulic pressure such as hydraulic oil acts on the back surface in the axial direction of each gripping member 41.

[0090] In FIG. 6, the two-dot chain line representing the gripping member 41 indicates the protruding position and the retracted position of the gripping member 41, and the difference between the respective positions indicates the possible stroke of the gripping member 41. Basically, since the entire gripping member 41 does not receive hydraulic pressure from the hydraulic fluid, it is in a state where it can move freely in the axial direction, is retracted into the storage part 42 of the follower clamping part 4, and is kept in a state where the tip surface does not protrude beyond the detection member 43. This retracted state is also maintained by utilizing the restoring force, for example, by interposing some spring such as a coil spring around each gripping member 41.

[0091] When the detection material 43 contacts the end face of the workpiece 12 and the sensor 94 detects this, pressure fluid is supplied from the tank 99 to each storage part 42 through the pressure fluid supply pipe 95. Each gripping material 41 protrudes according to the shape of the end face of the workpiece 12 and stops when it contacts the end face of the workpiece 12. In the stopped state, each gripping material 41 receives the pressure necessary for holding from the pressure fluid in the storage part 42, and continues to grip the workpiece 12 together with the fixed clamp part 5 with a certain compressive force. Since the compressive forces acting on the workpiece 12 from the follower clamp part 4 and the fixed clamp part 5 when gripping the workpiece 12 are balanced, the sum of the compressive forces from all the gripping materials 41 is equal to the compressive force from the fixed clamp part 5.

[0092] In addition, as shown in FIG. 7, it is reasonable that a plurality of gripping materials 41 are arranged evenly in the circumferential direction at positions equidistant from the center of the end face of the follower clamp part 4 in the radial direction (radius direction) so that when all the gripping materials 41 grip the workpiece 12, an axial compressive force that is uniform from a plurality of locations is applied to the end face of the workpiece 12. In the drawing, four rod (pin)-shaped gripping materials 41 are arranged, but the number is arbitrary. If the gripping material 41 is rod-shaped, at least three are sufficient. If the gripping material 41 is a curved or bent plate shape, at least two are sufficient.

[0093] When a plurality of gripping materials 41 grip the end face of the workpiece 12, the pressure of the pressure fluid is adjusted so that an appropriate hydraulic pressure necessary for gripping acts on each gripping material 41. When releasing the grip of the workpiece 12 by a plurality of gripping materials 41 after finishing grinding the circumferential surface of the workpiece 12, the pressure fluid is returned from the pressure fluid supply pipe 95 to the tank 99 by releasing the hydraulic pump 96, the pressure acting on the back surface of each gripping material 41 is released, and the follower clamp part 4 retracts from the workpiece 12.

[0094] Each gripping material 41 is free to move axially when the hydraulic pressure is released, but by interposing a spring around the gripping material 41 as described above, it is also possible to automatically immerse (restore) the gripping material 41 into the storage part 42 when the hydraulic pressure is released. The restoring force (biasing force) of the spring is set to be smaller than the force due to the hydraulic pressure acting on the back surface of each gripping material 41.

[0095] When the work 12 is held by the follower clamp portion 4 and the fixed clamp portion 5, the grinding unit 11 shown in FIGS. 1, 3, and 9 linearly moves on the support base 2 in its longitudinal direction by the rotation of the motor 114 as a linear drive device connected thereto. Specifically, when the motor 114 rotates, simultaneously with the movement of the ball screw 115 that linearly moves in conjunction with the rotation, the grinding unit 11 integrated with the nut screwed to the ball screw 115 moves in the reciprocating direction of the movable side presser unit 9.

[0096] With the follower clamp portion 4 to the fixed clamp portion 5 taken into the liquid-proof box 111 disposed on the clamp portion 4, 5 side of the grinding unit 11, the support portions 6, 7 are rotated about the axis by the drive of the work rotation motors 98, 104 as rotation drive devices attached to the rear sides of the movable side presser unit 9 and the fixed side presser unit 10 shown in FIGS. 1 and 2, respectively, and the follower clamp portion 4 and the fixed clamp portion 5 are rotated together with the work 12. The drive shafts of the work rotation motors 98, 104 are connected to each other within the movable side presser unit 9 and the fixed side presser unit 10, and by synchronizing the work rotation motors 98, 104, they rotate at the same speed simultaneously.

[0097] By rotating the work 12 about the axis together with the support portions 6, 7, grinding or polishing of the peripheral surface of the work 12 by the above-described grinding wheel 112 is performed. When grinding the peripheral surface of the work 12, the grinding wheel 112 is rotated in the direction opposite to the rotation of the work 12. In FIGS. 9 and 10, 116 indicates a notch grinding wheel for forming a groove in the axial direction of the work 12 with the rotation of the work 12 stopped.

[0098] As a result of the grinding unit 11 moving to the movable side pressing unit 9 side, the fixed clamp unit 5, the workpiece 12, and the follower clamp unit 4 are taken into and surrounded by the liquid-proof box 111 attached to the grinding unit 11. With the fixed clamp unit 5, the workpiece 12, and the follower clamp unit 4 surrounded by the liquid-proof box 111, a grinding wheel 112 mounted in the liquid-proof box 111 shown in Fig. 10 comes into contact with the peripheral surface of the rotating workpiece 12 while rotating, thereby grinding the peripheral surface of the workpiece 12. At this time, the workpiece 12 is kept at a certain temperature or lower by the coolant sprayed from the coolant nozzle 113.

[0099] The liquid-proof box 111 is formed in a box shape from a wall plate 111a through which the following clamp portion 4(5) which is one of the clamp portions is inserted, a wall plate 111c through which the fixed clamp portion 5(4) which is the other clamp portion is inserted, and side plates 111e, 111e which connect the wall plate 111a and the wall plate 111c and have a surface parallel to the moving direction of the grinding unit 11. The bottom of the liquid-proof box 111 is open as described later. The wall plate 111a is located on the following clamp portion 4(5) side, and the wall plate 111c is located on the fixed clamp portion 5(4) side.

[0100] The liquid-proof box 111 has a wall plate 111a on the side of the follower clamp unit 4 (5) as shown in FIG. is Movable side presser unit 9 side to move when An opening 111b having a shape corresponding to the cross-sectional shape of the following clamp portion 4 is formed in the wall plate 111c on the fixed clamp portion 5(4) side, so that at least a portion of the axial direction of the following clamp portion 4 can be taken into the liquid-proof box 111. An opening 111d having a shape corresponding to the cross-sectional shape of the fixed clamp portion 5 is formed in the wall plate 111c on the fixed clamp portion 5(4) side, so that at least a portion of the axial direction of the fixed clamp portion 5 can be taken into the liquid-proof box 111, as shown in FIG. 10-(a).

[0101] Around the opening 111b on the inner peripheral surface of the wall plate 111a, a liquid-proof brush 117 is installed (fixed) to prevent the coolant from the coolant nozzle 113 from spraying outside the liquid-proof box 111 when the follow clamp portion 4 enters the liquid-proof box 111 from the opening 111b. The liquid-proof brush 117 may also be installed around the opening 111d on the inner peripheral surface of the wall plate 111c. However, in order to cool the workpiece 12 during grinding of the workpiece 12 by the grinding wheel 112 disposed closer to the wall plate 111c, the coolant sprayed from the coolant nozzle 113 closer to the wall plate 111c shown in Fig. 10-(a) is less likely to spray out from the opening 111d due to the rotation direction of the grinding wheel 112. Therefore, it is not always necessary to install the liquid-proof brush 117.

[0102] The coolant from the coolant nozzle 113 closer to the wall plate 111a shown in Fig. 10-(a) is mainly sprayed during grinding by the notch grinding wheel 116 for forming a groove in the axial direction of the workpiece 12 with the rotation of the workpiece 12 stopped. In this regard, the liquid-proof brush 117 serves to prevent the coolant sprayed from the coolant nozzle 113 closer to the wall plate 111a from spraying outside the liquid-proof box 111.

[0103] Specifically, since the notch grinding wheel 116 is located closer to the wall plate 111a (closer to the follow clamp portion 4) inside the liquid-proof box 111, the coolant nozzle 113 for the notch grinding wheel 116 is also disposed closer to the wall plate 111a. Therefore, the liquid-proof brush 117 mainly serves to prevent the coolant sprayed from the coolant nozzle 113 from spraying outside the liquid-proof box 111 during grinding by the notch grinding wheel 116. The notch grinding wheel 116 rotates clockwise when viewed in the plane shown in Figs. 3-(a) and 9 of the cross section shown in Fig. 10-(a).

[0104] The lower part of the liquid-proof box 111 is open as shown in Fig. 13, and the coolant and grinding chips sprayed from the coolant nozzle 113 fall below the liquid-proof box 111 from the drain port 118 integrated below the liquid-proof box 111. The coolant and the like that have fallen from the liquid-proof box 111 are discharged through the drain channel 13 disposed below the workpiece grinding device 1 to the drain groove 14 laid outside the workpiece grinding device 1.

[0105] As shown in Fig. 14, when the liquid-proof brush 117 is fixed around the opening 111b on the inner peripheral surface of the wall plate 111a, the end on the circumferential surface side of the follower clamp portion (one of the clamp portions) 4 (5) is in contact with or can be in contact with the circumferential surface of the follower clamp portion 4 (5), substantially closing the gap between the opening 111b and the circumferential surface of the follower clamp portion 4 (5).

[0106] Specifically, as shown in Fig. 14, the liquid-proof brush 117 is composed of a plurality of brush constituent members 117A arranged in the circumferential direction around the opening 111b of the wall plate 111a. Each brush constituent member 117A is composed of a large number (many) of linear members 117a and a holder 117b that holds all the end portions on one side of the large number of linear members 117a, as shown in Fig. 16 is .

[0107] The holder 117b is mainly formed of synthetic resin, hard rubber, metal, etc. The linear member 117a is formed of synthetic resin, synthetic fiber, animal hair, etc., with a thickness of about 0. several mm to several mm. All the end portions on one side of the large number of linear members 117a are inserted into the inside of grooves, holes, etc. formed on the linear member 117a side of the holder 117b, and are clamped in the thickness direction of the holder 117b, welded, or held and integrated with the holder 117b by filling with an adhesive.

[0108] The holders 117b of the plurality of brush constituent members 117A are fixed to the wall plate 111a, for example, detachably, adjacent to each other in the circumferential direction of the opening 111b. When each brush constituent member 117A is fixed to the wall plate 111a, the linear members 117a of the brush constituent member 117A are in contact with or overlap with the linear members 117a of the adjacent brush constituent members 117A in the circumferential direction of the opening 111b.

[0109] The holder 117b of the brush component 117A is further divided into two parts: a fixing part 117b1 that overlaps and is fixed to the wall plate 111a of the liquid-proof box 111 as shown in Fig. 16, and a holding part 117b2 that holds a large number (many) of linear members 117a. The ends of the large number of linear members 117a on the holding part 117b2 side gather and are held in the holding part 117b2 in an integrated state. A plurality of insertion holes 117b3 for joining to the wall plate 111a by a plurality of screws (bolts) 15 etc. in the width direction of the fixing part 117b1 are formed in the fixing part 117b1.

[0110] The ends of the large number of linear members 117a on the holding part 117b2 side are bonded etc. as described above to be integrated with each other, and are then sandwiched in the holding part 117b2 in the thickness direction by crimping, adhesion etc. to be integrated with and held by the holding part 117b2.

[0111] As shown in Fig. 16-(c), the surface of the fixing part 117b1 on the wall plate 111a side and on the wall plate 111a side of a number of linear members 117a the surface forms a continuous plane so that no gap occurs or hardly occurs between the wall plate 111a and the linear member 117a, and substantially the entire surface of the large number of linear members 117a on the wall plate 111a side is aligned in a state of contacting the wall plate 111a. When the entire surface of the linear member 117a on the wall plate 111a side contacts the wall plate 111a, it becomes easier to prevent the grinding chips and the coolant from leaking out of the opening 111b.

[0112] Fig. 15 shows an arrangement example of the brush component 117A when two types of brush components 117A, 117A with different widths of the holder 117b are arranged adjacent to each other in the circumferential direction of the opening 111b.

[0113] In the example of FIG. 15, while giving the holder 117b a width greater than a certain value, consideration is given to prevent the length of the linear member 117a from becoming too large. The widths of the two types of brush constituent members 117A and 117A, and the angle between the center lines in the width direction of the adjacent brush constituent members 117A and 117A are adjusted, and the two types of brush constituent members 117A and 117A are arranged around the opening 111b. In this example, the angle between the center lines in the width direction of the adjacent brush constituent members 117A and 117A is 22.5 degrees, but the angle is arbitrary. When the angle between the center lines is 22.5 degrees, the number of brush constituent members 117A constituting the liquid-proof brush 117 is 16.

[0114] As shown in FIG. 16, the brush constituent member 117A has a form in which a large number of linear members 117a protrude from the lower end of the holding portion 117b2 having a certain width and thickness in the direction of the center line in the width direction. Individually, the large number of linear members 117a are arranged substantially parallel to the center line in the width direction of the holding portion 117b2. When the brush constituent members 117A are arranged adjacent to each other in the width direction as shown in FIG. 15, the linear members 117a and 117a of the adjacent brush constituent members 117A and 117A contact or overlap each other.

[0115] In the examples shown in FIGS. 14 to 16, on the vertical surface of the brush constituent member 117A, the holder 117b has a rectangular shape, but the holder 117b may be formed in a belt-like fan shape. When the holder 117b has a rectangular shape, there are cases where no gap is secured between the ends on the linear member 117a side of the holders 117b and 117b of the adjacent brush constituent members 117A and 117A as shown in FIG. 15, and cases where a slight gap is secured.

[0116] The linear members 117a on the back side (the side of the wall plate 111a) of the brush constituent member 117A are basically aligned with the back of the fixing portion 117b1 as shown in FIG. 16-(c) in order to eliminate the gap between the back of the brush constituent member 117A and the wall plate 111a, but this is not necessarily required. When the linear members 117a on the back side are aligned with the back of the fixing portion 117b1, when the brush constituent member 117A is joined to the wall plate 111a, the linear members 117a on the back side contact the wall plate 111a and close the gap between the brush constituent member 117A and the wall plate 111a.

[0117] As shown in FIG. 15, as the linear members 117a on both sides in the width direction of the holding portion 117b2 approach the opening 111b, the degree of adhesion with the linear members 117a of the adjacent brush constituent members 117A increases. Therefore, they tend to incline toward the center in the width direction of the holding portion 117b2 and tend to be bent and deformed toward the center in the width direction as they approach the opening 111b. As a result, the density (concentration) of the linear members 117a increases as they approach the opening 111b. Thus, the linear members 117a function to make it difficult for grinding chips and coolant to pass through or to block them.

[0118] When fixing the brush constituent member 117A to the wall plate 111a, in order to ensure the stability of the brush constituent member 117A in the fixed state, as shown in FIG. 17, on the wall plate 111a, a reinforcing plate 111f for reinforcing the wall plate 111a in the case of a thin wall is overlapped directly or indirectly on the wall plate 111a, and together with the holding portion 117b2 of the brush constituent member 117A, it is joined to the wall plate 111a by a screw 15 or the like shown in FIG. 15.

[0119] The reinforcing plate 111f shown in FIG. 17 is formed in a shape obtained by dividing a ring for fixing two brush constituent members 117A having different widths shown in FIGS. 16-(a) and (b). However, the perimeter of the reinforcing plate 111f is arbitrary and may be formed in an annular shape. An insertion hole 111f1 is formed at a position corresponding to the insertion hole 117b3 of the fixing portion 117b1 of the reinforcing plate 111f.

[0120] The reinforcing plate 111f shown in FIG. 17 is used for the purpose of fixing the fixing portions 117b1 of two adjacent brush constituent members 117A. In this relation, the interval between the insertion holes 111f1, 111f1 of the reinforcing plate 111f corresponds to the interval between the insertion holes 117b3, 117b3 formed in the fixing portions 117b1, 117b1 of the two types of brush constituent members 117A, 117A shown in FIGS. 16-(a) and (b).

Explanation of Reference Numerals

[0121] 1... Work grinding device, 2... Support base, 3... Gripping device, 4... One clamping part (following clamping part), 41... Holding material, 42... Storage part, 43... Detection material, 5... The other clamping part (fixed clamping part), 6... Support part (of one clamping part), 7... Support part (of the other clamping part), 8... Linear drive device, 81... Motor, 82... Drive shaft, 83... Drive gear, 84... Driven gear, 85... Ball screw, 86... Nut, 9... Movable side pressing unit, 91... Main body part, 92... Control part, 93... Guide, 94... Sensor, 95... Hydraulic fluid supply pipe, 96... Hydraulic pump, 97... Control valve, 98... Work rotation motor (rotation drive device), 99... Tank, 10... Fixed side pressing unit, 101... Control part, 102... Air supply pipe, 103... Sensor, 104... Work rotation motor (rotation drive device), 11... Grinding unit, 111... Liquid-proof box, 111a... Wall plate, 111b... Opening, 111c... Wall plate, 111d... Opening, 111e... Side plate, 111f... Reinforcing plate, 111f1... Insertion hole, 112... Grinding wheel, 113... Cooling nozzle, 114... Motor, 115... Ball screw, 116... Notch grinding wheel, 117... Liquid-proof brush, 117A... Brush component material, 117a... Linear material, 117b... Holder, 117b1... Fixed part, 117b2... Holding part, 117b3... Insertion hole, 118... Drainage port, 12... Workpiece, 12A... Supported material, 12A1... Protrusion, 13... Drainage channel, 14... Drainage groove, 15... Screw.

Claims

1. A pair of clamping parts opposed to each other in the longitudinal direction of the support table, gripping a workpiece when approaching each other, and supported by the support part so as to be rotatable together with the workpiece about an axis while gripping the workpiece; a rotation drive device that rotates each of the pair of clamp parts that grip the workpiece together with the support part about an axis of the clamp part; a linear drive device that linearly moves at least one of the pair of clamping portions together with the support portion that supports the one of the clamping portions in a longitudinal direction relative to the support base; a grinding unit that is installed on the support table and is movable in a linear direction in the longitudinal direction of the support table and has a grinding wheel that grinds or polishes the workpiece, a liquid-proof box that is attached to the grinding unit, moves together with the grinding unit when the grinding unit moves toward the one of the clamping parts that is linearly movable in the longitudinal direction of the support table, and surrounds the pair of clamping parts and the workpiece held by both of the clamping parts; An opening is formed in the wall plate on the side of the one clamp portion to receive at least a portion of the workpiece side of the one clamp portion in the axial direction when the grinding unit moves to the side of the one clamp portion, a liquid-proof brush is fixed continuously around the opening on the inner peripheral surface of the wall plate in a circumferential direction of the opening to close a gap between the opening and a peripheral surface of one of the clamp portions; A liquid-proof box of a grinding unit in a workpiece grinding apparatus, characterized in that the end portion of the liquid-proof brush on the peripheral surface side of one of the clamping parts is in contact with or in a state capable of contacting the peripheral surface of the one of the clamping parts.

2. the liquid-proof brush is composed of a plurality of brush components arranged in a circumferential direction around the opening, each of the brush components being composed of a number of linear members and a holder for holding all ends of one side of the number of linear members; 2. A liquid-proof box for a grinding unit in a workpiece grinding apparatus as described in claim 1, characterized in that the holders of the multiple brush components are fixed to the wall plate adjacent to each other in the circumferential direction of the opening, and the linear materials of the brush components overlap with the linear materials of the brush components adjacent to each other in the circumferential direction of the opening.

3. 3. The liquid-proof box of a grinding unit in a workpiece grinding apparatus according to claim 2, wherein the widths of the openings in the circumferential direction of the openings of the brush components adjacent to each other in the circumferential direction of the openings are different.

4. A liquid-proof box of a grinding unit in a workpiece grinding apparatus as described in claim 2 or claim 3, characterized in that the holder for the brush components is divided into a fixed portion which is overlapped and fixed to the wall plate of the liquid-proof box and a holding portion which holds the numerous linear materials, and the surface of the fixed portion facing the wall plate and the surfaces of the numerous linear materials facing the wall plate form a continuous plane.

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