Disk resonator, conductivity measurement device, and conductivity measurement method

Abstract

To provide a disc resonator, a conductivity measurement device and a conductivity measurement method capable of efficiently measuring a conductivity in a high-frequency area.SOLUTION: A disc resonator has: a first support that supports a first conductor sample; a second support that is provided to face the first support, and supports a second conductor sample; a third support that supports a third conductor sample such that gaps are formed between the first conductor sample and the third conductor sample and between the second conductor sample and the third conductor sample; and a signal transmission / reception unit that transmits and receives signals to and from the first conductor sample, the second conductor sample and the third conductor sample.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a disk resonator, a conductivity measuring device, and a conductivity measuring method.

Background Art

[0002] In recent years, efforts have been underway to utilize electromagnetic waves in the millimeter-wave band, which has a higher frequency than the microwave band. In electronic devices that use electromagnetic waves in the millimeter-wave band, a high-frequency circuit board corresponding to the millimeter-wave band is used. In such a high-frequency circuit board, reducing high-frequency transmission loss is an issue.

[0003] Against this background, the development of low-loss materials corresponding to high-frequency ranges such as the millimeter-wave band has been promoted. Also, a technique for accurately measuring the conductivity of low-loss materials in the high-frequency range, which is necessary for this purpose, has been demanded. As one such technique, the disk resonator method is known.

[0004] Patent Document 1 discloses a method for measuring the specific conductivity of a conductor plate or copper foil in a high-frequency range exceeding 20 GHz using a disk resonator. Specifically, the disk resonator described in Patent Document 1 includes a circular copper foil, a first dielectric plate and a second dielectric plate sandwiching the copper foil, and a first conductor plate and a second conductor plate provided so as to sandwich these. Each conductor plate is provided with a hole at the center, and an excitation line is inserted into the hole.

[0005] When a predetermined frequency is transmitted from a network analyzer, the inside of the resonator is excited via the excitation line. Then, by analyzing the signal received from the resonator, the specific conductivity of the conductor plate or copper foil can be obtained.

[0006] In the method described in Patent Document 1, members with different thicknesses are prepared as the first dielectric plate and the second dielectric plate. Specifically, first, a first output result is obtained using a first dielectric plate and a second dielectric plate each having a thickness of t1. Next, a second output result is obtained using a first dielectric plate and a second dielectric plate each having a thickness of t2. Then, the specific conductivity is finally calculated based on the first output result and the second output result.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0008] In the method described in Patent Document 1, since it is necessary to obtain measurement results using dielectric plates with different thicknesses respectively, the measurement work is required at least twice. For this reason, the method described in Patent Document 1 has a problem of low efficiency of the measurement work.

[0009] An object of the present invention is to provide a disk resonator, a conductivity measurement device, and a conductivity measurement method capable of efficiently measuring conductivity in a high-frequency range.

Means for Solving the Problems

[0010] Such an object is achieved by the present invention as described in the following (1) to (17). (1) A first support for supporting a first conductor sample, A second support provided opposite to the first support for supporting a second conductor sample, Between the first conductor sample and the third conductor sample, and between the second conductor sample and the third conductor sample respectively filled with outside air A third support for supporting the third conductor sample so that a gap is formed, A signal transmitting and receiving unit that transmits and receives signals to and from the first conductor sample, the second conductor sample, and the third conductor sample; A disk resonator characterized by having the same.

[0011] (2) The disk resonator according to (1) above, further comprising a distance changing unit that changes a first distance d1 between the first conductor sample and the third conductor sample and a second distance d2 between the second conductor sample and the third conductor sample.

[0012] (3) The distance changing unit has a screw provided on a side surface, a shaft that rotates around a rotation axis, a stand that supports the shaft in a rotatable state, and is provided with The disk resonator according to (2) above, wherein any two of the first support, the second support, and the third support move by rotation of the shaft.

[0013] (4) The screw has a first portion that moves the first support and a second portion that moves the second support, The disk resonator according to (3) above, wherein the advancing directions of the screws of the first portion and the second portion are opposite to each other.

[0014] (5) The screw has a third portion that moves the second support and a fourth portion that moves the third support, The advancing directions of the screws of the third portion and the fourth portion are the same as each other, The disk resonator according to (3) above, wherein the pitch of the screw of the third portion is larger than the pitch of the screw of the fourth portion.

[0015] (6) The distance changing unit has a rail extending parallel to a straight line passing through both the first conductor sample and the second conductor sample, a first slider and a second slider that move along the rail, and is provided with The disk resonator according to (2) above, wherein two of the first support, the second support, and the third support are connected to the first slider and the second slider.

[0016] (7) It has a first through-hole that extends parallel to a straight line passing through both the first conductor sample and the second conductor sample and penetrates the first support. The signal transmitting and receiving unit includes a first through-hole exciting line inserted into the first through-hole, and the disk resonator according to any one of (1) to (6) above.

[0017] (8) It has a second through-hole that extends parallel to the straight line and penetrates the second support. The signal transmitting and receiving unit includes a second through-hole exciting line inserted into the second through-hole, and the disk resonator according to (7) above.

[0018] (9) The signal transmitting and receiving unit includes a side exciting line inserted between the first conductor sample and the second conductor sample from a direction intersecting the straight line passing through both the first conductor sample and the second conductor sample, and the disk resonator according to any one of (1) to (6) above.

[0019] (10) The third support A first frame having a frame shape, A dielectric member provided inside the first frame and connecting the first frame and the third conductor sample, and the disk resonator according to any one of (1) to (9) above.

[0020] (11) The third support A second frame provided outside the first frame, A position adjusting unit that adjusts the position of the first frame with respect to the second frame, and the disk resonator according to (10) above.

[0021] (12) The third support is structurally independent of the first support and the second support. The distance changing unit changes at least one of the first distance d1 and the second distance d2 by moving at least one of the first support and the second support to change the separation distance between the first support and the second support. The disk resonator according to (2) above.

[0022] (13) The distance changing unit is the disk resonator according to (2), (6) or (12) above, which changes the first distance d1 and the second distance d2 while maintaining the posture of the second conductor sample with respect to the first conductor sample.

[0023] (14) The third support includes a void portion that penetrates therethrough, and has a third a member and a third b member having the same thickness. The third a member, the third conductor sample, and the third b member are laminated in this order, and are sandwiched between the first support and the second support, thereby being configured to support the third conductor sample. When the third conductor sample is supported by the third support The void portion provided in the third a member is located between the first conductor sample and the third conductor sample. The disk resonator according to (2) above, wherein the void portion provided in the third b member is located between the second conductor sample and the third conductor sample.

[0024] (15) A conductivity measuring device comprising the disk resonator according to any one of (1) to (14) above.

[0025] (16) A conductivity measuring method for measuring the conductivity of a first conductor sample, a second conductor sample, and a third conductor sample by an equilibrium disk resonator method, Between the first conductor sample and the third conductor sample, and between the second conductor sample and the third conductor sample, respectively filled with outside air A sample arranging step of arranging the first conductor sample, the second conductor sample, and the third conductor sample so that a gap is formed; A measurement step of transmitting signals to the first conductor sample, the second conductor sample, and the third conductor sample, and receiving signals from the first conductor sample, the second conductor sample, and the third conductor sample; A calculation step of analyzing the received signals to calculate the conductivity; A conductivity measurement method, characterized by comprising:

[0026] (17) The conductivity measurement method according to (16) above, wherein the signal to be transmitted is a high-frequency signal with a frequency of 300 MHz or more. [Advantages of the Invention]

[0027] According to the present invention, a disk resonator and a conductivity measurement device capable of efficiently measuring the conductivity in the high-frequency range can be obtained.

[0028] In addition, according to the present invention, a conductivity measurement method capable of efficiently measuring the conductivity in the high-frequency range can be provided. [Brief Description of the Drawings]

[0029]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0030] Hereinafter, the disk resonator, conductivity measurement device, and conductivity measurement method of the present invention will be described in detail based on the preferred embodiments shown in the accompanying drawings.

[0031] 1. First Embodiment First, the disk resonator according to the first embodiment will be described.

[0032] FIG. 1 is a cross-sectional view showing the disk resonator according to the first embodiment. In each figure of the present application, the X-axis, Y-axis, and Z-axis are set as three axes orthogonal to each other and are indicated by arrows. And the base end side of the arrow is the "minus side" of each axis, and the tip side of the arrow is the "plus side" of each axis.

[0033] The disk resonator 1 shown in FIG. 1 is a jig used to measure the conductivity of the conductor samples 91, 92, and 93 by the balanced disk resonator method.

[0034] The disk resonator 1 shown in Fig. 1 holds the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93, which are the objects to be measured, with a gap therebetween. Then, when a high-frequency signal is transmitted to the disk resonator 1 with the third conductor sample 93 disposed between the first conductor sample 91 and the second conductor sample 92, only a specific resonance mode is selectively excited. By measuring this resonance characteristic with a measuring device such as a network analyzer, the conductivity at each resonance frequency can be obtained.

[0035] The first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 each have a flat plate shape that is circular in plan view. The first conductor sample 91 and the second conductor sample 92 have the same diameter as each other and a larger diameter than the third conductor sample 93. Note that having the same diameter as each other is a concept that allows for a deviation on the order of a manufacturing error. Also, in this specification, "plan view" means viewing from a position on the Z-axis. The first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 are samples made of the same conductor.

[0036] When the disk resonator 1 is used, the conductivity in the high-frequency range can be measured. Since the conductivity may have frequency dependence, accurately measuring the conductivity in the high-frequency range is important, for example, in the development of circuits (high-frequency circuits) that utilize high-frequency radio waves.

[0037] Hereinafter, the structure of the disk resonator 1 will be further described. The disk resonator 1 includes a first support 21, a second support 22, a third support 23, a signal transmission / reception unit 5, and a distance changing unit 6.

[0038] 1.1. Support The first support 21 includes a first support conductor plate 212 and a first fixing plate 214.

[0039] The first support conductor plate 212 is a member that supports the first conductor sample 91 to be measured so as to extend along the X-Y plane, and in this embodiment, it has a plate shape extending along the X-Y plane. The first support conductor plate 212 is electrically coupled to the first conductor sample 91 to be measured. The planar shape of the first support conductor plate 212 is not particularly limited, but in this embodiment, it is a quadrilateral. The size of the first support conductor plate 212 in plan view is set to be larger than that of the first conductor sample 91.

[0040] The first fixing plate 214 has a plate shape extending along the X-Y plane. The first fixing plate 214 supports the first support conductor plate 212. The planar shape of the first fixing plate 214 is not particularly limited, but in this embodiment, it is a quadrilateral.

[0041] The second support 22 is provided opposite to the first support 21 and includes a second support conductor plate 222 and a second fixing plate 224.

[0042] The second support conductor plate 222 is a member that supports the second conductor sample 92 to be measured so as to extend along the X-Y plane, and in this embodiment, it has a plate shape extending along the X-Y plane. The second support conductor plate 222 is electrically coupled to the second conductor sample 92 to be measured. The planar shape of the second support conductor plate 222 is not particularly limited, but in this embodiment, it is a quadrilateral. The size of the second support conductor plate 222 in plan view is set to be larger than that of the second conductor sample 92.

[0043] The second fixing plate 224 has a plate shape extending along the X-Y plane. The second fixing plate 224 supports the second support conductor plate 222. The planar shape of the second fixing plate 224 is not particularly limited, but in this embodiment, it is a quadrilateral.

[0044] The constituent materials of each of the first support conductor plate 212 and the second support conductor plate 222 are not particularly limited as long as they are materials having sufficient conductivity. For example, pure copper or a copper alloy, pure aluminum or an aluminum alloy, a silver alloy, a nickel alloy, etc. may be mentioned. Further, for the first support conductor plate 212 and the second support conductor plate 222, a composite material in which a film of the above-described conductive material, such as a plating film, is provided on the surface of an insulating base material may be used. Note that the constituent materials of the first support conductor plate 212 and the second support conductor plate 222 may be different from each other, but are preferably the same as each other.

[0045] The constituent materials of each of the first fixing plate 214 and the second fixing plate 224 are not particularly limited as long as they are materials having sufficient mechanical strength. For example, Fe-based alloys such as stainless steel, heat-resistant steel, tool steel, alloy steel for machine structures, Cu-based alloys such as brass, metal materials such as aluminum alloys, ceramic materials such as alumina and zirconia, etc. may be mentioned. Note that the constituent materials of the first fixing plate 214 and the second fixing plate 224 may be different from each other, but are preferably the same as each other. Further, the first fixing plate 214 and the second fixing plate 224 may be provided as necessary and may be omitted.

[0046] The joining between the first support conductor plate 212 and the first fixing plate 214, and the joining between the second support conductor plate 222 and the second fixing plate 224 may each simply be in close contact, or may be adhesion via an adhesive or the like.

[0047] Note that when the first conductor sample 91 stands on its own with respect to the first slider 65 described later, the first support 21 may be omitted. Similarly, when the second conductor sample 92 stands on its own with respect to the second slider 66 described later, the second support 22 may be omitted.

[0048] The third support 23 includes a first frame 232 and a dielectric member 234. The first frame 232 has a frame shape that is larger than the third conductor sample 93 to be measured. The first frame 232 supports the third conductor sample 93 via a dielectric member 234 described later.

[0049] The dielectric member 234 has a plate shape that extends along the X-Y plane and has a through hole 235 in the central portion. The third conductor sample 93 is fixed so as to close the through hole 235. Thereby, the third conductor sample 93 is supported by the first frame 232 via the dielectric member 234.

[0050] The thickness of the dielectric member 234 is not particularly limited, but is preferably 0.001 mm or more and 1.00 mm or less, and more preferably 0.02 mm or more and 0.50 mm or less. With such a thickness, the electrical resistance value per unit length of the dielectric member 234 in the plane becomes high, so that insulation between the third conductor sample 93 and the first frame 232 can be ensured.

[0051] The constituent material of the first frame 232 is not particularly limited as long as it has sufficient mechanical strength.

[0052] The constituent material of the dielectric member 234 is not particularly limited as long as it has a low dielectric constant and dielectric loss tangent. Examples thereof include polyethylene, cycloolefin polymer, fluororesin, and quartz.

[0053] The third support 23 is arranged so as to provide a gap between the first support 21 and the second support 22. This gap electrically insulates between the first conductor sample 91 and the third conductor sample 93, and between the second conductor sample 92 and the third conductor sample 93, respectively.

[0054] As described above, the third support 23 shown in FIG. 1 includes a first frame 232 having a frame shape and a dielectric member 234. The dielectric member 234 is provided inside the first frame 232 and connects the first frame 232 and the third conductor sample 93.

[0055] According to such a configuration, it is possible to sufficiently reduce the change in the electromagnetic field when there is air between the first frame 232 and the third conductor sample 93, and the third conductor sample 93 can be easily held. In addition, by increasing the rigidity of the first frame 232, the handling of the third support 23 becomes easier.

[0056] FIG. 2 is a perspective view showing a second configuration example of the third support. FIG. 3 is a plan view of the third support 23 shown in FIG. 2. In FIG. 2, the illustration of the first frame 232 is omitted.

[0057] In the third support 23 shown in FIG. 1 described above, a third conductor sample 93 having substantially the same size as the through hole 235 provided in the dielectric member 234 is fitted therein. When such a configuration example of the third support 23 is referred to as a "first configuration example", FIGS. 2 and 3 show a second configuration example different from the first configuration example.

[0058] In the third support 23A shown in FIGS. 2 and 3, the size of the through hole 235 is set smaller than that of the third conductor sample 93. As a result, the outer peripheral portion of the third conductor sample 93 and the dielectric member 234 overlap. Therefore, the two overlapping members can be fixed to each other using an adhesive or an adhesive, and the fixing operation can be performed more easily.

[0059] FIG. 4 is a plan view showing a third configuration example of the third support. The third support 23B shown in FIG. 4 includes, in addition to the first frame 232 and the dielectric member 234, a second frame 238, two micrometer heads 242X and 242Y, two coil springs 246X and 246X, and two coil springs 246Y and 246Y.

[0060] The second frame 238 has a frame shape and is provided outside the first frame 232. A gap is provided between the first frame 232 and the second frame 238, and coil springs 246X, 246X, 246Y, and 246Y are provided in the gap.

[0061] The coil springs 246X and 246X connect the first frame 232 and the second frame 238 and expand and contract along the X-axis. The coil springs 246Y and 246Y connect the first frame 232 and the second frame 238 and expand and contract along the Y-axis.

[0062] The micrometer heads 242X and 242Y each include a sleeve 243 and a spindle 244. The spindle 244 is insertable into and removable from the sleeve 243, and the insertion length of the spindle 244 with respect to the sleeve 243 is finely adjustable. The sleeve 243 is connected to the second frame 238, and the spindle 244 is connected to the first frame 232.

[0063] When the spindle 244 is inserted into and removed from the sleeve 243 of the micrometer head 242X, the position of the first frame 232 along the X-axis with respect to the second frame 238 can be finely adjusted. When the spindle 244 is inserted into and removed from the sleeve 243 of the micrometer head 242Y, the position of the first frame 232 along the Y-axis with respect to the second frame 238 can be finely adjusted. Therefore, the micrometer heads 242X and 242Y function as position adjusting parts for adjusting the position of the first frame 232 with respect to the second frame 238.

[0064] By the action of the position adjusting part, in the third support 23B, the position of the third conductor sample 93 in the X-Y plane can be finely adjusted. Thereby, the position of the third conductor sample 93 with respect to the positions of the first conductor sample 91 and the second conductor sample 92 can be optimized, and the measurement accuracy of the conductivity can be further improved.

[0065] Note that the coil springs 246X and 246Y can be replaced with any elastic member, such as rubber, elastomer, or a spring other than a coil spring.

[0066] FIG. 5 is a plan view showing a fourth configuration example of the third support. The third support 23C shown in FIG. 5 is the same as the third support 23A shown in FIG. 3, except that the configuration of the dielectric member is different. That is, the third support 23C includes three dielectric members 234C shown in FIG. 5 instead of the dielectric member 234 shown in FIG. 3. The dielectric members 234C are strip-shaped and are arranged around the third conductor sample 93 at equal angular intervals from each other. Thereby, the area of the dielectric member 234C can be made smaller than that of the dielectric member 234. As a result, since the change in the electromagnetic field when the space between the third support 23C and the third conductor sample 93 is air can be made smaller, the measurement accuracy of the conductivity can be further improved.

[0067] 1.2. Signal transmission and reception unit The signal transmission and reception unit 5 shown in FIG. 1 includes a transmission antenna 55 having a first through excitation line 51 and a holder 53, and a reception antenna 56 having a second through excitation line 52 and a holder 54.

[0068] One end of a transmission cable (not shown) is connected to the first through excitation line 51. The other end of this transmission cable is connected to the output port of a measuring device such as a network analyzer (not shown).

[0069] One end of a reception cable (not shown) is connected to the second through excitation line 52. The other end of this reception cable is connected to the input port of a measuring device such as a network analyzer (not shown).

[0070] When the electromagnetic wave (signal) supplied from the network analyzer to the transmission antenna 55 is transmitted to the disk resonator 1, the resonance modes derived from the conductor samples 91, 92, and 93 are excited. Then, the electromagnetic wave transmitted through the resonator composed of the conductor samples 91, 92, and 93 is taken out from the reception antenna 56 and detected by the network analyzer. By analyzing the resonance characteristics from the detected electromagnetic wave, the Q value (quality factor of resonance) representing the sharpness of the resonance characteristics can be calculated. And from this Q value, the conductivity of the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 can be calculated.

[0071] The first through excitation line 51 extends along the first axis AX1 shown in FIG. 1. The first axis AX1 is parallel to the Z axis, passes through the center of the first conductor sample 91 in plan view, and is an axis located on the plus side of the Z axis with respect to the first conductor sample 91. The first conductor sample 91, the first support conductor plate 212, and the first fixing plate 214 are each provided with a first through hole 216 extending along the first axis AX1. The first through excitation line 51 is inserted into the first through hole 216. Thereby, a high-frequency signal can be supplied from the first through excitation line 51 toward the first conductor sample 91.

[0072] The holder 53 is disposed on the plus side of the Z axis of the first fixing plate 214. The holder 53 is also provided with a through hole 532 through which the first through excitation line 51 is inserted. Thereby, the holder 53 can hold the first through excitation line 51.

[0073] The second through excitation line 52 extends along the second axis AX2 shown in FIG. 1. The second axis AX2 is parallel to the Z axis, passes through the center of the second conductor sample 92 in plan view, and is an axis located on the minus side of the Z axis with respect to the second conductor sample 92. The second conductor sample 92, the second support conductor plate 222, and the second fixing plate 224 are each provided with a second through hole 226 extending along the second axis AX2. The second through excitation line 52 is inserted into the second through hole 226. Thereby, a signal from the second conductor sample 92 can be received by the second through excitation line 52.

[0074] The holder 54 is disposed on the minus side of the Z axis of the second fixing plate 224. The holder 54 is also provided with a through hole 542 through which the second through excitation line 52 is inserted. Thereby, the holder 54 can hold the second through excitation line 52.

[0075] For the first through excitation line 51 and the second through excitation line 52, various waveguides that propagate electromagnetic waves of the measurement frequency, such as coaxial lines, planar circuit type lines, waveguides, and dielectric waveguides, can be used.

[0076] In addition, in this embodiment, the signal transmission / reception unit 5 includes a transmission antenna 55 and a reception antenna 56, but only one of the antennas may be provided. That is, signal transmission and reception may be performed using one antenna.

[0077] 1.3. Distance changing unit The distance changing unit 6 shown in FIG. 1 includes a stand 61, a shaft 62, a handle 63, a rail 64, a first slider 65 and a second slider 66, and a pedestal 67. The distance changing unit 6 has a function of bringing the first support 21 and the second support 22 closer to or farther from the third support 23. With such a function, the distance (first distance d1) between the first conductor sample 91 and the third conductor sample 93 and the distance (second distance d2) between the second conductor sample 92 and the third conductor sample 93 can be changed respectively.

[0078] The stand 61 includes a base portion 612, and wall portions 614 and 616. The base portion 612 is a portion extending along the Z-axis. The wall portion 614 is a portion extending from the end of the base portion 612 on the plus side of the Z-axis toward the plus side of the Y-axis. The wall portion 616 is a portion extending from the end of the base portion 612 on the minus side of the Z-axis toward the plus side of the Y-axis. An insertion hole 615 is provided in the wall portion 614. An insertion hole 617 is provided in the wall portion 616.

[0079] The shaft 62 has a cylindrical shape and extends along the Z-axis. The end of the shaft 62 on the plus side of the Z-axis is inserted into the insertion hole 615. The end of the shaft 62 on the minus side of the Z-axis is inserted into the insertion hole 617. The shaft 62 is rotatable about a rotation axis AX3 parallel to the Z-axis with respect to the insertion holes 615 and 617.

[0080] The shaft 62 has a screw 620 provided on its side surface. The screw 620 is a male screw.

[0081] The handle 63 is connected to the end of the shaft 62 on the plus side of the Z-axis. The handle 63 serves as the force application point for applying the rotational force for rotation about the rotation axis AX3 to the shaft 62. Note that the handle 63 can be replaced by a power source such as an electric motor.

[0082] The rail 64 is a part extending along the Z-axis. The first slider 65 and the second slider 66 are guided by the rail 64 and are movable along the Z-axis. The above-described first support 21 is fixed to the first slider 65. The first slider 65 is provided with an insertion hole 652 through which the shaft 62 is inserted. The second support 22 is fixed to the second slider 66. The second slider 66 is provided with an insertion hole 662 through which the shaft 62 is inserted. Female threads (not shown) are provided in the insertion holes 652 and 662, respectively.

[0083] Note that some or all of the stand 61, the shaft 62, the handle 63, the rail 64, and the first slider 65 and the second slider 66 can be replaced by an electric actuator such as a linear slider.

[0084] The above-described screw 620 has a first portion 621 and a second portion 622 whose advancing directions are opposite to each other. The first portion 621 is screwed into the female thread provided in the insertion hole 652, and the second portion 622 is screwed into the female thread provided in the insertion hole 662. Therefore, when the handle 63 is turned and the shaft 62 rotates about the rotation axis AX3, the first slider 65 and the second slider 66 move in opposite directions. Thereby, by simply turning the handle 63, the first distance d1 and the second distance d2 can be changed while being interlocked with each other.

[0085] The pedestal 67 is a part connecting the stand 61 and the third support 23. The pedestal 67 is provided with an insertion hole 672 through which the shaft 62 is inserted. In the distance changing unit 6 shown in FIG. 1, the screw 620 is not screwed into the insertion hole 672.

[0086] 1.4. Measurement principle Next, the principle of measuring the conductivity of the conductor samples 91, 92, and 93 will be explained.

[0087] When using the disk resonator 1, the conductivity of the conductor samples 91, 92, and 93 can be measured. In particular, by transmitting a high-frequency signal, the conductivity in the high-frequency range can be measured.

[0088] One of the significances of measuring the conductivity in the high-frequency range is to reduce the transmission loss in the high-frequency circuit. By reducing the transmission loss in the high-frequency circuit, it is possible to contribute to the miniaturization, high functionality, and power saving of devices using the high-frequency circuit.

[0089] The transmission loss is mainly divided into dielectric loss and conductor loss. Among these, the conductivity measured by the disk resonator 1 affects the conductor loss. Specifically, the conductor loss depends on the frequency of the signal used in the high-frequency circuit, the conductivity of the conductor, and the circuit shape, and it is inevitable that the conductor loss increases as the frequency increases. Therefore, in the high-frequency range, it is required to increase the conductivity as much as possible.

[0090] In the high-frequency range, due to the skin effect, current easily flows near the surface of the conductor. When the surface of the conductor is rough, the conductivity decreases. Also, in order to increase the adhesion between the conductor and the insulating substrate, the surface of the conductor may be intentionally roughened. Therefore, when measuring the conductivity using the disk resonator 1, it is required to measure the conductivity that reflects the influence of the skin effect.

[0091] Therefore, when attaching the conductor sample to the disk resonator 1, the attachment method is selected according to the type of the conductor sample.

[0092] When there is no distinction between the front and back of the conductor sample to be measured, for example, when the conductor sample to be measured is rolled metal foil, the conductor samples 91, 92, and 93 may all be the same sample.

[0093] On the other hand, when there is a distinction between the front and back of the conductor sample to be measured, for example, when the conductor sample to be measured is an electrolytic metal foil, electrolytic metal foil is used for the first conductor sample 91 and the second conductor sample 92, and rolled metal foil is used for the third conductor sample 93. When arranging the first conductor sample 91 and the second conductor sample 92, the surface to be measured, for example, the surface subjected to the roughening treatment, is arranged facing the third conductor sample 93 side.

[0094] When the conductor samples 91, 92, and 93 as described above are attached to the disk resonator 1 for measurement, as described above, the Q value (quality factor of resonance), which represents the sharpness of the resonance characteristics of the disk resonator 1, can be obtained. This Q value is represented by the following formula (1).

[0095]

Equation

[0096] In the above formula (1), Q d is the dielectric Q value due to dielectric loss, and Q c is the conductor Q value due to conductor loss. Among these, Q d has the relationship of the following formula (2).

[0097]

Equation

[0098] In the above formula (2), tanδ is the dielectric tangent of the dielectrics provided between the first conductor sample 91 and the third conductor sample 93, and between the second conductor sample 92 and the third conductor sample 93, respectively.

[0099] On the other hand, Q in the above formula (1) c has the relationship of the following formula (3) in the case of a disk resonator in which the first distance d1 and the second distance d2 are equal, that is, a balanced disk resonator.

[0100]

Equation

[0101] In the above formula (3), σ is the conductivity of the conductor samples 91, 92, and 93, d is the distance between the gaps, that is, the first distance d1 and the second distance d2 which are equal to each other, ω is the angular frequency of the signal transmitted to the disk resonator 1, and μ is the magnetic permeability of vacuum. Then, from the above formulas (1) to (3), the following formula (4) is derived.

[0102]

Equation

[0103] In this embodiment, gaps are provided between the first conductor sample 91 and the third conductor sample 93, and between the second conductor sample 92 and the third conductor sample 93, respectively. For this reason, tanδ in the above formula (2) becomes the dielectric tangent of the outside air (air) and is zero. As a result, the above formula (4) is simplified as the following formula (5).

[0104]

Equation

[0105] In the case of a disk resonator in which the first distance d1 and the second distance d2 are different, that is, an unbalanced disk resonator, the formula (5) is corrected as the following formula (6).

[0106]

Equation

[0107] In the above formula (6), α is a correction coefficient of 1 or more, and d ave is the average value of the first distance d1 and the second distance d2, that is, d ave =(d1 + d2) / 2.

[0108] Here, in the above formula (5), the reciprocal of the Q value of the disk resonator 1 is proportional to the reciprocal of the distance between the gaps.

[0109] FIG. 6 is a graph created by plotting measurement results when the reciprocal of the gap distance d is taken on the horizontal axis of the orthogonal coordinate system and the reciprocal of the Q value is taken on the vertical axis. By using the above-described proportional relationship, the conductivity included in the proportional coefficient can be calculated. That is, the conductivity can be calculated from the slope of the straight line connecting the plot mark P on the graph and the origin of the orthogonal coordinate system.

[0110] Also, this straight line can be drawn as long as there is at least one plot mark P. Among the conventional measurement methods, there is a method that requires at least two plot marks, that is, a method that requires at least two measurement operations. However, in the present embodiment, the conductivity can be obtained by one measurement operation. Therefore, by using the disk resonator 1, the efficiency of the measurement operation can be improved.

[0111] Note that the conductivity obtained from the slope of the straight line is an average of the conductivities of the conductor samples 91, 92, and 93. Therefore, when the conductor sample to be measured is, for example, the electrolytic metal foil described above, the average value of the conductivity of the electrolytic metal foil and the conductivity of the rolled metal foil is obtained. In this case, by using a rolled metal foil with a known conductivity, finally, the conductivity of the electrolytic metal foil to be measured can be calculated.

[0112] Also, the number of plot marks P is not limited to one, and a plurality of them may be used. By deriving a straight line approximating the plurality of plot marks P and obtaining its slope, the conductivity can be calculated more accurately. According to the disk resonator 1 according to the present embodiment, since the operation of changing the first distance d1 and the second distance d2 can be easily performed, the measurements required for the plurality of plot marks P can be efficiently performed.

[0113] As described above, the disk resonator 1 according to the present embodiment includes a first support 21, a second support 22, a third support 23, and a signal transmission / reception unit 5. The first support 21 supports the first conductor sample 91. The second support 22 is provided to face the first support 21 and supports the second conductor sample 92. The third support 23 supports the third conductor sample 93 so that gaps are formed between the first conductor sample 91 and the third conductor sample 93 and between the second conductor sample 92 and the third conductor sample 93, respectively. The signal transmission / reception unit 5 transmits and receives signals to and from the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93.

[0114] According to such a configuration, the conductivity of the conductor sample can be obtained with at least one measurement operation. Therefore, according to the disk resonator 1, the measurement of the conductivity in the high-frequency range can be efficiently performed.

[0115] Also, by providing gaps between the first conductor sample 91 and the third conductor sample 93 and between the second conductor sample 92 and the third conductor sample 93, respectively, it is not necessary to fill the space between them with a dielectric. Therefore, the number of parts of the disk resonator 1 can be reduced, and handling becomes easier.

[0116] Furthermore, according to the disk resonator 1, deformations such as scratches and dents of the conductor sample due to contact with the dielectric do not occur. Therefore, the conductivity of the conductor sample including the influence of the skin effect can be measured more accurately.

[0117] Also, according to the disk resonator 1, since the gas entering the gap can be selected, for example, the influence of humidity and gas composition on the conductivity can also be investigated. Thereby, the relationship between the conductivity and various environmental factors can be evaluated.

[0118] As described above, the disk resonator 1 according to the present embodiment has a distance changing unit 6. The distance changing unit 6 has a function of changing a first distance d1 between the first conductor sample 91 and the third conductor sample 93 and a second distance d2 between the second conductor sample 92 and the third conductor sample 93.

[0119] According to such a configuration, the first distance d1 and the second distance d2 can be easily adjusted according to the frequency of the signal transmitted to the disk resonator 1. Specifically, when the first distance d1 and the second distance d2 are large, a desired resonance peak cannot be obtained at a high frequency. On the other hand, when the first distance d1 and the second distance d2 are small, the Q value decreases, so that it may deviate from the range that can be accurately calculated. Therefore, if the first distance d1 and the second distance d2 can be easily adjusted according to the frequency of the signal and the measurement accuracy, it is useful in that the measurement operation of the conductivity becomes easy. In addition, the measurements necessary for specifying the plurality of plot marks P can be easily performed.

[0120] The first distance d1 and the second distance d2 may be different from each other, but are preferably set to be equal to each other. Thereby, since the Q value can be accurately obtained, the conductivity can be calculated more accurately. Note that the difference |d1 - d2| between the first distance d1 and the second distance d2 is preferably 30% or less of the shorter one of the first distance d1 and the second distance d2, and more preferably 20% or less. With such a difference, the conductivity can be obtained with relatively high accuracy by correcting the measurement result.

[0121] The first distance d1 and the second distance d2 are set according to the frequency of the signal transmitted to the disk resonator 1. As an example, each is preferably 100 μm or more and 500 μm or less, and more preferably 200 μm or more and 400 μm or less.

[0122] As described above, the distance changing unit 6 shown in FIG. 1 includes a shaft 62 and a stand 61. The shaft 62 has a screw 620 provided on the side surface and rotates around the rotation axis AX3. The stand 61 supports the shaft 62 in a rotatable state. And any two of the first support 21, the second support 22, and the third support 23 are configured to move by the rotation of the shaft 62. In the present embodiment, in particular, the first support 21 and the second support 22 move by the rotation of the shaft 62.

[0123] According to such a configuration, while interlocking the first distance d1 and the second distance d2 with each other, they can be adjusted. Thereby, when changing the first distance d1 and the second distance d2 according to the frequency for measuring the conductivity and the measurement accuracy of the required Q value, the changing operation can be performed easily and with high precision.

[0124] As described above, the screw 620 shown in FIG. 1 has a first portion 621 and a second portion 622. The first portion 621 is a portion that moves the first support 21 by the rotation of the shaft 62, and the second portion 622 is a portion that moves the second support 22 by the rotation of the shaft 62. And, the advancing direction of the screw of the first portion 621 and the advancing direction of the screw of the second portion 622 are opposite to each other.

[0125] According to such a configuration, when the shaft 62 is rotated, the first support 21 and the second support 22 approach each other or move away from each other. That is, the operation of adjusting the distance can be easily performed while maintaining the relationship that the first distance d1 and the second distance d2 are equal to each other. Thereby, the operation of changing the frequency for measuring the conductivity can be performed more easily. Also, since the rotation speed of the shaft 62 and the amount of change in the distance correspond to each other, the changing operation is easy from that viewpoint as well.

[0126] In order to maintain the above relationship, the pitch of the screw may be made equal between the first portion 621 and the second portion 622. The equal pitch of the screw is a concept that allows a deviation on the order of manufacturing error.

[0127] As described above, the distance changing unit 6 shown in FIG. 1 includes a rail 64, a first slider 65, and a second slider 66. The rail 64 extends parallel to the straight line passing through both the first conductor sample 91 and the second conductor sample 92. That is, the rail 64 in FIG. 1 extends parallel to the Z-axis. The first slider 65 and the second slider 66 are configured to move along the rail 64. And two of the first support 21, the second support 22, and the third support 23 are connected to the first slider 65 and the second slider 66. In the present embodiment, in particular, the first support 21 is connected to the first slider 65, and the second support 22 is connected to the second slider 66.

[0128] According to such a configuration, by moving the first slider 65 and the second slider 66 along the rail 64, the first support 21 and the second support 22 can be accurately moved. Thereby, the adjustment of the first distance d1 and the second distance d2 can be performed particularly easily and with high precision.

[0129] The disk resonator 1 shown in FIG. 1 has a first through hole 216 that penetrates the first support 21. The first through hole 216 extends parallel to the straight line passing through both the first conductor sample 91 and the second conductor sample 92. And the signal transmitting and receiving unit 5 includes a first through excitation line 51 inserted into the first through hole 216.

[0130] According to such a configuration, for example, different from a configuration in which an excitation line is inserted between the first conductor sample 91 and the second conductor sample 92, the distance between the first conductor sample 91 and the second conductor sample 92 can be freely set. That is, the thickness of the excitation line does not affect the gap distance. For this reason, according to the disk resonator 1 shown in FIG. 1, the first through excitation line 51 having a sufficient thickness and low transmission loss can be used. In addition, in order to transmit and receive electromagnetic waves near the center in the plan view of the third conductor sample 93, for example, a specific mode such as the TM0n0 (n is an integer) mode can be selectively excited and detected, and the influence of unnecessary modes is small and higher-order modes can be used for measurement. As a result, the conductivity can be accurately measured in a wider frequency range.

[0131] The disk resonator 1 shown in FIG. 1 has a second through hole 226 that penetrates the second support 22. The second through hole 226 extends parallel to a straight line passing through both the first conductor sample 91 and the second conductor sample 92. And the signal transmitting and receiving unit 5 includes a second through excitation line 52 inserted into the second through hole 226.

[0132] According to such a configuration, for example, unlike a configuration in which an excitation line is inserted between the first conductor sample 91 and the second conductor sample 92, the distance between the first conductor sample 91 and the second conductor sample 92 can be freely set. That is, the thickness of the excitation line does not affect the distance of the gap. For this reason, according to the disk resonator 1 shown in FIG. 1, the second through excitation line 52 having a sufficient thickness and low transmission loss can be used. In addition, in order to transmit and receive electromagnetic waves near the center in the plan view of the third conductor sample 93, for example, a specific mode such as the TM0n0 (n is an integer) mode can be selectively excited and detected, and the influence of unnecessary modes is small and higher-order modes can be used for measurement. As a result, the conductivity can be accurately measured in a wider frequency range.

[0133] In the disk resonator 1 shown in FIG. 1, the first distance d1 and the second distance d2 are changed by moving the first slider 65 and the second slider 66 along the rail 64. At this time, the distance changing unit 6 can change the distance while maintaining the posture of the second conductor sample 92 with respect to the first conductor sample 91. Thereby, even if the first distance d1 and the second distance d2 are changed, in the disk resonator 1, the symmetry of the structure is maintained. As a result, the influence on the resonance mode due to the change in the structure can be reduced, and highly reproducible measurement can be performed. Thereby, even when the first distance d1 and the second distance d2 are changed, the conductivity can be accurately measured.

[0134] Note that maintaining the posture of the second conductor sample 92 with respect to the first conductor sample 91 includes, for example, maintaining the first conductor sample 91 and the second conductor sample 92 in a parallel state to each other.

[0135] 1.5. Measurement procedure Next, the measurement procedure of the conductivity using the disk resonator 1 will be described.

[0136] FIGS. 7 and 8 are cross-sectional views for explaining the measurement procedure of the conductivity using the disk resonator 1, respectively.

[0137] First, after attaching the conductor samples 91, 92, and 93 to the disk resonator 1, as shown in FIG. 7, the first slider 65 and the second slider 66 are moved until the first conductor sample 91 and the third conductor sample 93 are in contact or close proximity, and the second conductor sample 92 and the third conductor sample 93 are in contact or close proximity. At this point, the first distance d1 and the second distance d2 are each approximately zero, and the setting of the zero point is completed. For example, if the first distance d1 is not zero, the first distance d1 can be finely adjusted by shifting the position of the first fixing plate 214 with respect to the first slider 65 or the like.

[0138] The disk resonator 1 shown in FIGS. 7 and 8 further includes a distance measuring device 71 for measuring the distance between the wall portion 614 and the first support 21, and a distance measuring device 72 for measuring the distance between the wall portion 616 and the second support 22. These distance measuring devices 71 and 72 measure the distance using the light L as a measurement probe. By providing such distance measuring devices 71 and 72, the distance between the wall portion 614 and the first support 21 and the distance between the wall portion 616 and the second support 22 can be known more accurately, respectively. Thereby, the adjustment of the first distance d1 and the second distance d2 can be performed more accurately. Note that the measurement principle of the distance measuring devices 71 and 72 is not limited to this.

[0139] When the handle 63 is rotated from the state shown in FIG. 7, as shown in FIG. 8, the first support 21 and the second support 22 move away from each other. At this time, the change in the first distance d1 and the second distance d2 may be monitored using the distance measuring devices 71 and 72. Then, when the first distance d1 and the second distance d2 reach the target distances, the movement is stopped. Thereafter, a signal is transmitted to the disk resonator 1, and the conductivity is obtained by analyzing the received signal.

[0140] 2. Second Embodiment Next, the disk resonator according to the second embodiment will be described. FIG. 9 is a cross-sectional view showing the disk resonator according to the second embodiment.

[0141] Hereinafter, the second embodiment will be described. In the following description, the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In each figure, the same components as those in the first embodiment are denoted by the same reference numerals.

[0142] The disk resonator 1D shown in FIG. 9 is the same as the disk resonator 1 shown in FIG. 1 except that the configuration of the distance changing portion is different.

[0143] The distance changing portion 6 shown in FIG. 1 described above includes a shaft 62 provided with a screw 620 on its side surface. The screw 620 shown in FIG. 1 has a first portion 621 and a second portion 622 whose traveling directions are opposite to each other.

[0144] On the other hand, the screw 620 included in the distance changing portion 6D shown in FIG. 9 has a third portion 623 and a fourth portion 624 whose traveling directions are the same and whose pitches are different. Specifically, the third portion 623 is screwed into the insertion hole 662 of the second slider 66 and is a portion that moves the second support 22 by the rotation of the shaft 62. The fourth portion 624 is screwed into the insertion hole 652D of the first slider 65 and is a portion that moves the third support 23 by the rotation of the shaft 62. In this embodiment, the third support 23 is connected to the first slider 65, and the first support 21 is connected to the pedestal 67. And in this embodiment, the traveling direction of the screw of the third portion 623 and the traveling direction of the screw of the fourth portion 624 are the same as each other. Also, the pitch of the screw of the third portion 623 is larger than the pitch of the screw of the fourth portion 624. On the other hand, the insertion hole 672D of the pedestal 67 is not screwed with the screw 620.

[0145] According to such a configuration, when the shaft 62 is rotated, the second support 22 approaches or moves away from the first support 21 with a larger amount of change compared to the third support 23. Thereby, while maintaining the relationship that the first distance d1 and the second distance d2 are equal to each other, the operation of adjusting the distance can be easily performed. As a result, the operation of measuring the Q value for various gap distances can be performed with higher reproducibility.

[0146] In addition, in order to maintain the above relationship more precisely, the pitch of the screw of the third portion 623 may be set to twice the pitch of the screw of the fourth portion 624. The fact that the pitch of the screw is twice means a concept that allows a deviation of the order of manufacturing error.

[0147] As described above, in the distance changing portion 6D shown in FIG. 9, the second support 22 and the third support 23 move by the rotation of the shaft 62.

[0148] According to such a configuration, the first distance d1 and the second distance d2 can be adjusted while being interlocked with each other. Thereby, when changing the first distance d1 and the second distance d2 according to the frequency for measuring the conductivity, the changing operation can be performed easily and with high precision.

[0149] Also, in the distance changing portion 6D shown in FIG. 9, the second support 22 is connected to the second slider 66, and the third support 23 is connected to the first slider 65.

[0150] According to such a configuration, by moving the first slider 65 and the second slider 66 along the rail 64, the second support 22 and the third support 23 can be accurately moved. Thereby, the adjustment of the first distance d1 and the second distance d2 can be performed particularly easily and with high precision.

[0151] 3. Third Embodiment Next, a disk resonator according to the third embodiment will be described. FIG. 10 is a cross-sectional view showing a disk resonator according to the third embodiment.

[0152] Hereinafter, the third embodiment will be described. In the following description, the differences from the first embodiment will be mainly described, and the description of the same matters will be omitted. In each figure, the same components as those in the first embodiment are denoted by the same reference numerals. Note that in FIG. 10, the illustration of some components is omitted.

[0153] The disk resonator 1E shown in FIG. 10 includes a first support 21, a second support 22, a third support 23E, a signal transmitting / receiving unit (not shown), and a distance changing unit 6E.

[0154] The third support 23E shown in FIG. 10 has a suspension thread 236. The suspension thread 236 is suspended from above the third conductor sample 93, and the third conductor sample 93 is attached to the lower end thereof.

[0155] The distance changing unit 6E shown in FIG. 10 includes bolts 682, 682, nuts 684, 684, a third fixing plate 686, a micrometer head 687, and coil springs 688, 688. The bolts 682, 682 are full-thread bolts provided so as to penetrate both the first fixing plate 214 and the second fixing plate 224. Nuts 684, 684 are screwed onto the ends of the bolts 682, 682 on the minus Z-axis side. On the other hand, the third fixing plate 686 is screwed onto the ends of the bolts 682, 682 on the plus Z-axis side. As a result, the first support 21 and the second support 22 are sandwiched between the nuts 684, 684 and the third fixing plate 686. Note that the bolts 682, 682 are not limited to the full-thread bolts described above, and may be rod-shaped members provided with male threads in part, or any rod-shaped member that can be coupled to the nuts 684, 684 or a member replacing them or the third fixing plate 686 by means other than screws.

[0156] The sleeve 243 of the micrometer head 687 is connected to the third fixing plate 686, and the spindle 244 is connected to the first fixing plate 214. Thereby, the distance between the first support 21 and the third fixing plate 686 can be finely adjusted by the micrometer head 687.

[0157] Inside the coil springs 688, 688, bolts 682, 682 are inserted. And the coil springs 688, 688 are disposed between the first fixing plate 214 and the second fixing plate 224.

[0158] In such a distance changing unit 6E, the force (pressing force) for pressing the third fixing plate 686 in the negative Z-axis direction by the micrometer head 687 and the restoring force of the coil springs 688, 688 are balanced. That is, the coil springs 688, 688 generate a restoring force so as to press the first fixing plate 214 against the micrometer head 687 and press the second fixing plate 224 against the nuts 684, 684. Thereby, by the operation of the micrometer head 687, the positions of the first support 21 and the second support 22 with respect to the third fixing plate 686 can be uniquely determined. That is, according to the distance changing unit 6E, the separation distance between the first conductor sample 91 and the second conductor sample 92 can be easily adjusted with high accuracy.

[0159] Therefore, when measuring the conductivity, first, the position of the entire structure having the first support 21, the second support 22, and the distance changing unit 6E is adjusted with respect to the position of the third support 23E. Specifically, the third conductor sample 93 suspended by the suspension thread 236 is arranged at the midpoint between the first conductor sample 91 and the second conductor sample 92. At this time, the first distance d1 can be changed by the distance changing unit 6E.

[0160] As described above, the third support 23E according to the present embodiment is structurally independent of the first support 21 and the second support 22. And the distance changing unit is configured to change at least one of the first distance d1 and the second distance d2 by moving at least one of the first support 21 and the second support 22 and changing the separation distance between the first support 21 and the second support 22. In the distance changing unit 6E according to the present embodiment, as an example, the first distance d1 is changed by relatively moving the first support 21 with respect to the second support 22.

[0161] According to such a configuration, since the first support 21, the second support 22, and the third support 23E are structurally independent, the structure of the disk resonator 1E becomes simpler. Therefore, the manufacturing cost of the disk resonator 1E can be reduced. Further, according to such a configuration, the distance between the first conductor sample 91 and the second conductor sample 92 and the distance between the first conductor sample 91 and the third conductor sample 93 are adjusted by the micrometer head 687, respectively, and accordingly, the amount of movement of the first support 21, that is, the distance of the first support 21 with respect to the third fixing plate 686 is defined. Therefore, according to the present embodiment, the distance measuring device 71 can be omitted. Also in the third embodiment as described above, the same effects as those of the first embodiment can be obtained.

[0162] Note that the coil spring 688 can be replaced with any elastic member, such as rubber, elastomer, a spring other than a coil spring, etc. Also, the suspension thread 236 can be replaced with any holding member capable of holding the third conductor sample 93.

[0163] 4. Fourth Embodiment Next, a disk resonator according to the fourth embodiment will be described. FIG. 11 is a cross-sectional view showing a disk resonator according to the fourth embodiment.

[0164] Hereinafter, the fourth embodiment will be described. In the following description, the differences from the second embodiment will be mainly described, and the description of the same matters will be omitted. In each figure, the same reference numerals are given to the same configurations as those in the second embodiment. Note that in FIG. 11, the illustration of some configurations is omitted.

[0165] The disk resonator 1F shown in FIG. 11 includes a first support 21, a second support 22, a third support 23F, a signal transmitting and receiving unit (not shown), and a distance changing unit 6E.

[0166] The third support 23F shown in Fig. 11 has a third a - member 237a and a third b - member 237b with equal thicknesses. The third a - member 237a is disposed between the first conductor sample 91 and the third conductor sample 93 and has a void portion 238a penetrating in the Z - axis direction. The third b - member 237b is disposed between the second conductor sample 92 and the third conductor sample 93 and has a void portion 238b penetrating in the Z - axis direction.

[0167] That is, the third support 23F is configured such that the third a - member 237a, the third conductor sample 93, and the third b - member 237b are laminated in this order and are sandwiched between the first support 21 and the second support 22 to support the third conductor sample 93.

[0168] When the third conductor sample 93 is supported by the third support 23F, the void portion 238a provided in the third a - member 237a is located between the first conductor sample 91 and the third conductor sample 93. Also, the void portion 238b provided in the third b - member 237b is located between the second conductor sample 92 and the third conductor sample 93.

[0169] According to such a configuration, the thickness of the void portion 238a and the thickness of the void portion 238b can be made equal by the third a - member 237a and the third b - member 237b with equal thicknesses. That is, gaps with equal thicknesses can be provided between the first conductor sample 91 and the third conductor sample 93 and between the second conductor sample 92 and the third conductor sample 93, respectively. As a result, the stand 61, the shaft 62, the rail 64, etc. of the first embodiment become unnecessary, and the structure of the disk resonator 1F becomes simpler. Even in the fourth embodiment as described above, the same effects as those of the first and second embodiments can be obtained.

[0170] 5. Fifth Embodiment Next, a disk resonator according to the fifth embodiment will be described. Fig. 12 is a cross - sectional view showing a disk resonator according to the fifth embodiment.

[0171] Hereinafter, the fifth embodiment will be described. In the following description, the differences from the second embodiment will be mainly described, and the description of the same matters will be omitted. In each figure, the same components as those in the second embodiment are denoted by the same reference numerals. Note that in FIG. 12, the illustration of some components is omitted.

[0172] The disk resonator 1G shown in FIG. 12 includes a first support 21, a second support 22, a third support 23E, a signal transmission / reception unit 5G, and a distance changing unit 6E.

[0173] The signal transmission / reception unit 5G shown in FIG. 12 includes a side excitation line 51G and a side excitation line 52G.

[0174] The side excitation line 51G is inserted between the first conductor sample 91 and the third conductor sample 93. Further, the side excitation line 51G is inserted from a direction intersecting the straight line passing through both the first conductor sample 91 and the second conductor sample 92. In FIG. 12, as an example, the side excitation line 51G is inserted from the +Y axis side toward the -Y axis side.

[0175] The side excitation line 52G is inserted between the second conductor sample 92 and the third conductor sample 93. Also, the side excitation line 52G is inserted from a direction intersecting the above-mentioned straight line. In FIG. 12, as an example, the side excitation line 52G is inserted from the -Y axis side toward the +Y axis side.

[0176] According to such a configuration, since it is not necessary to provide the holders 53 and 54 shown in FIG. 1, the structure of the signal transmission / reception unit 5G is simplified. Further, according to the signal transmission / reception unit 5G, by using the side excitation lines 51G and 52G, it is not necessary to provide through holes in the first conductor sample 91 and the second conductor sample 92, respectively. For this reason, the preparation of the first conductor sample 91 and the second conductor sample 92 becomes easy, and the efficiency of the measurement work can be further improved.

[0177] Even in the fifth embodiment as described above, the same effects as those of the first and second embodiments can be obtained. Note that the positions of the lateral excitation lines 51G and 52G in the Z-axis direction are not limited to the above positions and may be anywhere between the first conductor sample 91 and the second conductor sample 92. Also, one of the lateral excitation lines 51G and 52G may be omitted. That is, signal transmission and reception may be performed by one of the lateral excitation lines 51G and 52G.

[0178] 6. Sixth Embodiment Next, a conductivity measuring device according to the sixth embodiment will be described. FIG. 13 is a diagram showing a conductivity measuring device according to the sixth embodiment.

[0179] The conductivity measuring device 10 shown in FIG. 13 includes the disk resonator 1 described above. Specifically, the conductivity measuring device 10 shown in FIG. 13 includes a disk resonator 1, a network analyzer 11, and a personal computer 12. The network analyzer 11 and the disk resonator 1 are connected via a transmission cable 13 and a reception cable 14.

[0180] The network analyzer 11 transmits electromagnetic waves to the disk resonator 1 and acquires analysis data such as resonance frequency, insertion loss, and power half-width by digitally processing the electromagnetic waves received from the disk resonator 1. Then, the network analyzer 11 outputs this analysis data to the personal computer 12.

[0181] The personal computer 12 calculates the conductivity of the conductor sample based on this analysis data, initial conditions regarding the sample, initial conditions regarding the disk resonator 1, environmental conditions such as temperature and humidity, and the like.

[0182] According to such a conductivity measuring device 10, since the disk resonator 1 described above is provided, the conductivity of the conductor sample in the high-frequency range can be efficiently measured.

[0183] 7. Seventh Embodiment Next, a conductivity measurement method according to the seventh embodiment will be described. FIG. 14 is a flowchart showing a conductivity measurement method according to the seventh embodiment.

[0184] The conductivity measurement method shown in FIG. 14 is, for example, a method of measuring the conductivity of the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 by the balanced disk resonator method using the disk resonator 1 described above. Specifically, the conductivity measurement method shown in FIG. 14 includes a sample placement step S102, a measurement step S104, and a calculation step S106.

[0185] In the sample placement step S102, the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 are arranged so that gaps are formed between the first conductor sample 91 and the third conductor sample 93 and between the second conductor sample 92 and the third conductor sample 93, respectively. Thereby, the disk resonator 1 is obtained.

[0186] In the measurement step S104, a signal is transmitted to the disk resonator 1, and a signal from the disk resonator 1 is received. Specifically, in the measurement step S104, a signal is transmitted from the signal transceiver 5 to the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93, and signals from the first conductor sample 91, the second conductor sample 92, and the third conductor sample 93 are received by the signal transceiver 5. In the calculation step S106, the received signal is analyzed to calculate the conductivity.

[0187] According to such a conductivity measurement method, the conductivity of the conductor sample can be obtained by at least one measurement operation. Therefore, according to this method, the measurement of the conductivity in the high-frequency range can be efficiently performed.

[0188] Also, since gaps are provided between the first conductor sample 91 and the third conductor sample 93 and between the second conductor sample 92 and the third conductor sample 93, respectively, there is no need to fill the space between them with a dielectric. Therefore, the number of parts of the disk resonator 1 can be reduced, and the efficiency of the measurement operation is increased.

[0189] Furthermore, by providing a gap, deformations such as scratches and dents on the conductor sample due to contact with the dielectric do not occur. Therefore, the conductivity of the conductor sample including the influence of the skin effect can be measured more accurately.

[0190] In the measurement step S104, the signal transmitted to the disk resonator 1 is, for example, a high-frequency signal corresponding to microwaves or millimeter waves. Specifically, it is preferably a high-frequency signal with a frequency of 300 MHz or more, more preferably a high-frequency signal with a frequency of 1 GHz or more, and even more preferably a high-frequency signal with a frequency of 10 GHz or more. In terms of being able to efficiently measure the conductivity in such a high-frequency range, the conductivity measurement method according to the present embodiment is useful.

[0191] Note that the upper limit value of the frequency of the signal transmitted to the disk resonator 1 is not particularly limited, but is, for example, about 300 GHz. If it exceeds this, the measurement accuracy of the conductivity may decrease.

[0192] As described above, the disk resonator, the conductivity measurement device, and the conductivity measurement method of the present invention have been described based on the illustrated embodiments, but the present invention is not limited thereto.

[0193] For example, the disk resonator and the conductivity measurement device of the present invention may each be replaced with those having an arbitrary configuration in which each part of the above-described embodiment and each configuration example has the same function, or an arbitrary component may be added to the above-described embodiment and each configuration example. Further, the disk resonator of the present invention may be a combination of at least two or more of the above-described embodiments and each configuration example.

[0194] Also, the conductivity measurement method of the present invention may be one in which a process for an arbitrary purpose is added to the above-described embodiment.

Description of Reference Numerals

[0195] 1 Disk resonator 1D Disk resonator 1E Disk resonator 1F Disk Resonator 1G Disk Resonator 5 Signal Transmitting and Receiving Unit 5G Signal Transmitting and Receiving Unit 6 Distance Changing Unit 6D Distance Changing Unit 6E Distance Changing Unit 10 Conductivity Measuring Device 11 Network Analyzer 12 Personal Computer 13 Transmission Cable 14 Receiving Cable 21 First Support 22 Second Support 23 Third Support 23A Third Support 23B Third Support 23C Third Support 23E Third Support 23F Third Support 51 First Through - Excitation Line 51G Side - Excitation Line 52 Second Through - Excitation Line 52G Side - Excitation Line 53 Holder 54 Holder 55 Transmission Antenna 56 Receiving Antenna 61 Stand 62 Shaft 63 Handle 64 Rail 65 First Slider 66 Second Slider 67 Pedestal 71 Distance Measuring Device 72 Distance Measuring Device 91 First Conductor Sample 92 Second Conductor Sample 93 Third Conductor Sample 212 First Support Conductor Plate 214 First Fixed Plate 216 First Through - Hole 222 Second Support Conductor Plate 224 Second Fixed Plate 226 Second Through - Hole 232 First Frame 234 Dielectric Member 234C Dielectric Member 235 Through-Hole 236 Suspension Thread 237a Third a Member 237b Third b Member 238 Second Frame 238a Gap Portion 238b Gap Portion 242X Micrometer Head 242Y Micrometer Head 243 Sleeve 244 Spindle 246X Coil Spring 246Y Coil Spring 532 Through-Hole 542 Through-Hole 612 Base 614 Wall Portion 615 Insertion Hole 616 Wall Portion 617 Insertion Hole 620 Screw 621 First Portion 622 Second Portion 623 Third Portion 624 Fourth Portion 652 Insertion Hole 652D Insertion Hole 662 Insertion Hole 672 Insertion Hole 672D Insertion Hole 682 Bolt 684 Nut 686 Third Fixed Plate 687 Micrometer Head 688 Coil Spring AX1 First Axis AX2 Second Axis AX3 Rotation Axis L Light P Plot Mark S102 Sample Placement Process S104 Measurement Process S106 Calculation Process d1 First Distance d2 second distance

Claims

1. A first support for supporting a first conductor sample; A second support provided opposite to the first support for supporting a second conductor sample; A third support for supporting a third conductor sample so that gaps filled with outside air are formed between the first conductor sample and the third conductor sample and between the second conductor sample and the third conductor sample, respectively; A signal transceiver for transmitting and receiving signals to and from the first conductor sample, the second conductor sample, and the third conductor sample; A disk resonator, characterized by comprising the above components.

2. The disk resonator according to claim 1, further comprising a distance changing unit for changing a first distance d1 between the first conductor sample and the third conductor sample and a second distance d2 between the second conductor sample and the third conductor sample.

3. The distance changing unit includes: A shaft having a screw provided on a side surface and rotating around a rotation axis; A stand for rotatably supporting the shaft; And is provided with: The disk resonator according to claim 2, wherein any two of the first support, the second support, and the third support move by rotation of the shaft.

4. The screw has a first portion for moving the first support and a second portion for moving the second support, The disk resonator according to claim 3, wherein the advancing directions of the screws of the first portion and the second portion are opposite to each other.

5. The screw has a third portion for moving the second support and a fourth portion for moving the third support, The disk resonator according to claim 3, wherein the advancing directions of the screws of the third portion and the fourth portion are the same as each other, And the pitch of the screw of the third portion is larger than the pitch of the screw of the fourth portion.

6. The distance changing unit includes: A rail extending parallel to a straight line passing through both the first conductor sample and the second conductor sample; A first slider and a second slider moving along the rail; And is provided with: The disk resonator according to claim 2, wherein two of the first support, the second support, and the third support are connected to the first slider and the second slider.

7. It has a first through hole extending parallel to a straight line passing through both the first conductor sample and the second conductor sample and penetrating the first support, The disk resonator according to any one of claims 1 to 6, wherein the signal transceiver includes a first through excitation line inserted into the first through hole.

8. It extends parallel to the straight line and has a second through-hole penetrating the second support body. The disk resonator according to claim 7, wherein the signal transmitting and receiving unit includes a second through-hole exciting line inserted into the second through-hole.

9. The disk resonator according to any one of claims 1 to 6, wherein the signal transmitting and receiving unit includes a side exciting line inserted between the first conductor sample and the second conductor sample from a direction intersecting a straight line passing through both the first conductor sample and the second conductor sample.

10. The third support body A first frame having a frame shape, A dielectric member provided inside the first frame and connecting the first frame and the third conductor sample. The disk resonator according to any one of claims 1 to 9, comprising:

11. The third support body A second frame provided outside the first frame, A position adjusting unit that adjusts the position of the first frame with respect to the second frame. The disk resonator according to claim 10, comprising:

12. The third support body is structurally independent from the first support body and the second support body. The disk resonator according to claim 2, wherein the distance changing unit moves at least one of the first support body and the second support body to change the separation distance between the first support body and the second support body, thereby changing at least one of the first distance d1 and the second distance d2.

13. The disk resonator according to claim 2, 6 or 12, wherein the distance changing unit changes the first distance d1 and the second distance d2 while maintaining the posture of the second conductor sample with respect to the first conductor sample.

14. The third support body includes void portions penetrating therethrough, and has a third a member and a third b member having equal thicknesses. The third a member, the third conductor sample, and the third b member are laminated in this order and are sandwiched between the first support body and the second support body, thereby being configured to support the third conductor sample. When the third conductor sample is supported by the third support body, The void portion provided in the third a member is located between the first conductor sample and the third conductor sample. The disk resonator according to claim 2, wherein the void portion provided in the third b member is located between the second conductor sample and the third conductor sample.

15. A conductivity measuring device comprising the disk resonator according to any one of claims 1 to 14.

16. A conductivity measurement method for measuring the conductivity of a first conductor sample, a second conductor sample, and a third conductor sample by an equilibrium disk resonator method, a sample arrangement step of arranging the first conductor sample, the second conductor sample, and the third conductor sample so that gaps filled with outside air are formed between the first conductor sample and the third conductor sample and between the second conductor sample and the third conductor sample, respectively; a measurement step of transmitting a signal to the first conductor sample, the second conductor sample, and the third conductor sample and receiving signals from the first conductor sample, the second conductor sample, and the third conductor sample; a calculation step of analyzing the received signal and calculating the conductivity; A conductivity measurement method characterized by comprising the steps of:

17. The conductivity measurement method according to claim 16, wherein the signal to be transmitted is a high-frequency signal having a frequency of 300 MHz or higher.

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