Substrate processing system

Abstract

To enable determination of whether to use a high-resolution composite image or use a monochromatic image to be appropriately discriminated in accordance with the need.SOLUTION: A substrate handling work system comprises a movement device for moving an XY plane, a lighting device which is attached to the movement device, a monochromatic camera which is attached to the movement device, and an image processing device. The image processing device selects one or a plurality of monochromatic lights from among at least two monochromatic lights on the basis of an object, controls the lighting device and the monochromatic camera so as to acquire a monochromatic image of the object irradiated with one monochromatic light when the selected monochromatic light is one, and sets the monochromatic image of the object to an image for object inspection. Meanwhile, when the selected monochromatic light is plural, the image processing device controls the lighting device and the monochromatic camera so as to acquire each monochromatic image of the object irradiated with the plurality of monochromatic lights independently of each other, as well as sets a composite image derived by combining each monochromatic image to an image for object inspection.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] This specification discloses a substrate working system.

Background Art

[0002] Conventionally, a substrate working system for performing operations on a substrate arranged in the XY plane is known. For example, Patent Document 1 discloses such a substrate working system that includes a head that moves in the XY plane, an illumination device that irradiates light onto the substrate, and a camera for imaging the substrate irradiated with light by the illumination device. On the other hand, as an image acquisition system, as shown in Patent Document 2, one that acquires a first optical image and a second optical image to create a composite image is known. The composite image is a color image, and each of the first and second optical images is composed of color components of the composite color image.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] Incidentally, in a substrate-facing work system, depending on the object imaged by a camera, it may or may not be recognizable in a black-and-white image. Considering this point, it is also conceivable to obtain a color image of the object and recognize the object using the color image. In that case, color information is often created with 4 pixels as one unit, but due to phenomena such as color bleeding and false colors, it has been difficult to accurately recognize the object. On the other hand, when generating a color image by synthesizing three black-and-white images obtained with a monochrome camera by irradiating RGB light respectively, a high-resolution color image with no color bleeding and false colors can be obtained. However, since a color image is generated by synthesizing three black-and-white images for any object, there is a problem that the imaging time becomes unnecessarily long for an object that can be sufficiently recognized with only a black-and-white image.

[0005] The substrate-facing work system disclosed in this specification is made to solve the above-described problems, and its main purpose is to enable appropriate selection between using a high-resolution composite image and using a monochrome image as needed.

Means for Solving the Problems

[0006] The substrate-facing work system disclosed in this specification is a substrate-facing work system that performs work on a substrate disposed in the XY plane, a moving device that moves in the XY plane, a lighting device attached to the moving device and capable of independently irradiating at least two of R, G, and B monochromatic lights onto an object on the XY plane, a monochrome camera attached to the moving device and configured to acquire a monochromatic image of the object irradiated by the lighting device, Select one or more monochromatic lights from the at least two monochromatic lights based on the object. If only one monochromatic light is selected, control the illumination device and the monochromatic camera to obtain a monochromatic image of the object irradiated with the one monochromatic light, and set the monochromatic image of the object as an image for object inspection. If a plurality of monochromatic lights are selected, control the illumination device and the monochromatic camera to obtain each monochromatic image of the object independently irradiated with the plurality of monochromatic lights, and set a composite image obtained by combining the monochromatic images as the image for object inspection. An image processing apparatus that does so, is provided with.

[0007] In this substrate-facing operation system, one or more monochromatic lights are selected from at least two monochromatic lights based on the object. If only one monochromatic light is selected, control the illumination device and the monochromatic camera to obtain a monochromatic image of the object irradiated with the one monochromatic light, and set the monochromatic image of the object as an image for object inspection. If a plurality of monochromatic lights are selected, control the illumination device and the monochromatic camera to obtain each monochromatic image of the object independently irradiated with the plurality of monochromatic lights, and set a composite image obtained by combining the monochromatic images as the image for object inspection. Since color information can be obtained for each pixel in the composite image, compared to the case where color information is created with four pixels arranged in a square shape as one unit, it becomes a high-resolution image in which phenomena such as color bleeding and false colors are eliminated, but since it is necessary to take images multiple times, it takes time for imaging. Here, it is selected whether to use one monochromatic image or a composite image as the image for object inspection based on the object. That is, whether to use one monochromatic image or a high-resolution composite image can be appropriately selected according to the object. Therefore, the processing time is shortened compared to the case where a composite image is used as the image for object inspection for all objects.

[0008] Note that the image for object inspection may be used for automatic inspection of the object by the image processing apparatus, or may be displayed on a display by the image processing apparatus for the operator to inspect the object.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Mode for Carrying Out the Invention

[0010] A preferred embodiment of the component mounter disclosed in this specification will be described below with reference to the drawings. FIG. 1 is a perspective view of the component mounter 10, FIG. 2 is a schematic explanatory diagram of the configuration of the mark camera 50, FIG. 3 is a view A of the epi-illumination light source 53, FIG. 4 is a view B of the side-illumination light source 55, and FIG. 5 is a block diagram showing the configuration related to the control of the component mounter 10. In this embodiment, the left-right direction (X-axis), the front-back direction (Y-axis), and the up-down direction (Z-axis) are as shown in FIG. 1.

[0011] The component mounter 10 includes a substrate transfer device 18, a head 24, a nozzle 37, a parts camera 40, a mark camera 50, a display 68, a reel unit 70, and a control device 60.

[0012] The substrate transfer device 18 is a device for transferring and holding the substrate 80. This substrate transfer device 18 includes support plates 20, 20 and conveyor belts 22, 22 (only one is shown in FIG. 1). The support plates 20, 20 are members extending in the left-right direction and are provided at intervals in the front-rear direction of FIG. 1. The conveyor belts 22, 22 are spanned in an endless manner around drive wheels and driven wheels provided on the left and right of the support plates 20, 20. The substrate 80 is placed on the upper surfaces of the pair of conveyor belts 22, 22 and is transferred from left to right. This substrate 80 can be supported from the back side by a number of upright support pins 23. Therefore, the substrate transfer device 18 also serves as a substrate support device.

[0013] The head 24 is attached to the front surface of the X-axis slider 26. The X-axis slider 26 is attached to the front surface of the Y-axis slider 30. The Y-axis slider 30 is slidably attached to a pair of left and right guide rails 32, 32 extending in the front-rear direction. On the front surface of the Y-axis slider 30, a pair of upper and lower guide rails 28, 28 extending in the left-right direction are provided. The X-axis slider 26 is slidably attached to these guide rails 28, 28. The head 24 moves in the left-right direction as the X-axis slider 26 moves in the left-right direction, and moves in the front-rear direction as the Y-axis slider 30 moves in the front-rear direction. Each slider 26, 30 is driven by drive motors 26a, 30a (see FIG. 5), respectively. Further, the head 24 incorporates a Z-axis motor 34 and adjusts the height of the nozzle 37 attached to a ball screw 35 extending along the Z-axis by the Z-axis motor 34. Furthermore, the head 24 incorporates a Q-axis motor 36 (see FIG. 5) for axially rotating the nozzle 37.

[0014] The nozzle 37 is a member that adsorbs and holds components at the nozzle tip or releases the adsorption of the components adsorbed at the nozzle tip. The nozzle 37 can be supplied with pressure from a pressure supply source (not shown). For example, when negative pressure is supplied, it adsorbs the component, and when the supply of negative pressure is stopped or positive pressure is supplied, it releases the adsorption of the component. The nozzle 37 protrudes downward from the bottom surface of the main body of the head 24. Further, by moving the nozzle 37 up and down along the Z-axis direction by the Z-axis motor 34, the height of the component adsorbed by the nozzle 37 is adjusted. By rotating the nozzle 37 by the Q-axis motor 36, the orientation of the component adsorbed by the nozzle 37 is adjusted.

[0015] The parts camera 40 is disposed in front of the substrate transfer device 18. The parts camera 40 has an imaging range above the parts camera 40, and images the component held by the nozzle 37 from below to generate an imaging image.

[0016] The mark camera 50 is provided on the lower surface of the X-axis slider 26. The mark camera 50 images the object (imaging object) from above to generate an imaging image. Examples of the object of the mark camera 50 include components held on the tape 72 sent out from the feeder 74 in the reel unit 70, marks attached to the substrate 80, components after being mounted on the substrate 80, solder printed on the substrate 80, and the like.

[0017] As shown in Fig. 2, the mark camera 50 includes an illumination device 51 and a camera body 58. The illumination device 51 includes a housing 52, an epi-illumination light source 53, a half mirror 54, and a side-illumination light source 55. The housing 52 is a cylindrical member that opens at the bottom surface and is attached below the camera body 58. The epi-illumination light source 53 is provided on the inner side surface of the housing 52. As shown in Fig. 3, the epi-illumination light source 53 is such that a red LED 53a that emits R (red) monochromatic light, a green LED 53b that emits G (green) monochromatic light, and a blue LED 53c that emits B (blue) monochromatic light are arranged in the same number or approximately the same number on a square support plate 53d respectively. Each of the LEDs 53a to 53c has a hemispherical lens attached to a square base with a light-emitting element arranged at the center so as to cover the light-emitting element. The half mirror 54 is provided obliquely inside the housing 52. The half mirror 54 reflects the horizontal light from the LEDs 53a, 53b, and 53c of the epi-illumination light source 53 downward. Also, the half mirror 54 transmits the light from below toward the camera body 58. The side-illumination light source 55 is provided horizontally near the lower opening of the housing 52. As shown in Fig. 4, the side-illumination light source 55 is such that a red LED 55a, a green LED 55b, and a blue LED 55c are arranged in the same number or approximately the same number on a ring-shaped support plate 55d respectively, and irradiates light downward. Each of the LEDs 55a to 55c has a hemispherical lens attached to a square base with a light-emitting element arranged at the center so as to cover the light-emitting element. A diffusion plate 56 is provided below the side-illumination light source 55 in the housing 52. The light emitted from the epi-illumination light source 53 and the side-illumination light source 55 is finally diffused by this diffusion plate 56 and then irradiated onto the object. The camera body 58 generates a captured image based on the received light. This camera body 58 includes an optical system such as a lens (not shown) and an imaging element (e.g., CCD). When the light emitted from the epi-illumination light source 53 and the side-illumination light source 55 and reflected by the object passes through the half mirror 54 and reaches the camera body 58, the camera body 58 receives this light and generates a captured image.

[0018] Note that the wavelength ranges of each of R, G, and B are not particularly limited, but for example, R may be 590 - 780 nm, G may be 490 - 570 nm, and B may be 400 - 490 nm.

[0019] The display 68 is configured to display various images in color or in monochrome.

[0020] The reel unit 70 has a plurality of feeders 74 detachably attached thereto. Each feeder 74 includes a reel 71. A tape 72 is wound around the reel 71. A plurality of receiving recesses 73 are provided on the surface of the tape 72 along the longitudinal direction of the tape 72. Components are accommodated in each of the receiving recesses 73. These components are protected by a film covering the surface of the tape 72. Such a tape 72 is unwound from the reel 71 toward the rear, and the film is peeled off at a predetermined component supply position 74a of the feeder 74, leaving the components exposed. The components delivered to the predetermined component supply position 74a are adsorbed by the nozzle 37. The operation of the reel unit 70 is controlled by a feeder controller 76 (see FIG. 5) provided in each feeder 74.

[0021] As shown in FIG. 5, the control device 60 includes a CPU 61, a storage unit 63 (such as a ROM, a RAM, an HDD, etc.), an input / output interface 65, etc., which are connected via a bus 66. This control device 60 outputs drive signals to a substrate transfer device 18, a drive motor 26a of the X-axis slider 26, a drive motor 30a of the Y-axis slider 30, a Z-axis motor 34, a Q-axis motor 36, a parts camera 40, a mark camera 50, a display 68, and a pressure supply source (not shown) for the nozzle 37. Further, the control device 60 inputs captured images from the parts camera 40 and the mark camera 50. The control device 60 is communicably connected to the feeder controller 76 of the reel unit 70. Although not shown, each of the sliders 26, 30 is equipped with a position sensor (not shown), and the control device 60 controls the drive motors 26a, 30a of the respective sliders 26, 30 while inputting position information from those position sensors.

[0022] Here, the substrate 80 will be described. The substrate 80 shown in FIG. 6 has fiducial marks 81. The fiducial marks 81 are marks provided at two diagonal corners of the substrate 80 and are used for correcting the posture (position and inclination) of the substrate 80. Here, it is assumed that the fiducial marks 81 are created so that they can be clearly distinguished from the substrate 80 by using a monochromatic image captured when irradiated with monochromatic light of R. Also, the substrate 80 shown in FIG. 7 has block skip marks 83. The block skip marks 83 are marks for indicating whether the substrate blocks 82 are good blocks or bad blocks when the substrate 80 is formed so that a large number of small substrates (substrate blocks 82) can be removed. Therefore, the block skip marks 83 are created so that a mark indicating a good block (a white mark in FIG. 8) and a mark indicating a bad block (a black mark in FIG. 8) can be distinguished. Here, it is assumed that the block skip marks 83 are created so that they can be clearly distinguished from the substrate 80 by using a monochromatic image captured when irradiated with monochromatic light of R. That is, for both the fiducial marks 81 and the block skip marks 83, monochromatic light of R is selected based on the distinguishability between the marks 81, 83 and the substrate 80 as the background.

[0023] Next, the operation of the component mounter 10 when performing component mounting processing will be described. The CPU 61 of the control device 60 controls each part of the component mounter 10 based on a production program received from a management device (not shown) to produce a substrate 80 on which a plurality of types and a plurality of components are mounted. Specifically, the CPU 61 controls the X-axis slider 26 and the Y-axis slider 30 so that the nozzle 37 faces the component sent to the component supply position 74a by the reel unit 70 which is a component supply device. Subsequently, the CPU 61 controls the pressure of the nozzle 37 so that the component at the component supply position 74a is adsorbed by the nozzle 37. Subsequently, the CPU 61 controls the parts camera 40 to capture an image of the component adsorbed by the nozzle 37, and recognizes the posture of the component based on the obtained component image. Subsequently, the CPU 61 controls the X-axis slider 26 and the Y-axis slider 30 so that the component is arranged directly above the designated position on the substrate 80 in consideration of the posture of the component adsorbed by the nozzle 37, and controls the pressure of the nozzle 37 so that the nozzle 37 releases the component. The CPU 61 repeatedly executes such component mounting processing to mount a predetermined number and types of components on the substrate 80. By arranging a plurality of such component mounters 10 side by side in the left-right direction, a mounting line is formed. When the substrate 80 is conveyed from the component mounter 10 at the most upstream to the component mounter 10 at the most downstream of one mounting line, all the predetermined components are mounted on the substrate 80.

[0024] Next, the operation when the component mounter 10 inspects the object will be described. FIG. 8 is a flowchart showing an example of an inspection routine. When the CPU 61 of the control device 60 starts the inspection routine, first, it selects monochromatic light based on the object (S100). For example, if the object is the fiducial mark 81 (see FIG. 6), the CPU 61 selects the R monochromatic light from among the three monochromatic lights of R, G, and B. The same applies when the object is the block skip mark 83 (see FIG. 7), and the R monochromatic light is also selected. As described above, both the fiducial mark 81 and the block skip mark 83 can be clearly distinguished from the substrate 80 (background) in the monochromatic image captured by irradiating with the R monochromatic light. On the other hand, if the object is a component on the substrate 80 after component mounting shown in FIG. 9 (for example, the substrate 80 on which all the components that the component mounter 10 is responsible for have been mounted), the CPU 61 selects all the monochromatic lights from among the three monochromatic lights of R, G, and B. On the substrate 80 in FIG. 9, three types of components P1, P2, and P3 are mounted, with 2 pieces of component P1, 6 pieces of component P2, and 1 piece of component P3 mounted. In the monochromatic image captured by irradiating the components P1, P2, and P3 on this substrate 80 with any one of the monochromatic lights of R, G, and B, all of the components P1, P2, and P3 cannot be clearly distinguished from the substrate 80 (background). It is assumed that in the composite image (color image) obtained by synthesizing the monochromatic images of R, G, and B, all of the components P1, P2, and P3 can be clearly identified from the substrate 80. That is, all the monochromatic lights of RGB are selected based on the distinguishability between the components P1, P2, and P3 and the substrate 80 that is their background.

[0025] Next, the CPU 61 controls the mark camera 50 (i.e., the illumination device 51 and the camera body 58) to capture a monochromatic image of the object irradiated with the selected monochromatic light (S110), and inputs the captured monochromatic image from the mark camera 50 (S120). For example, if the selected monochromatic light is the monochromatic light of R as in the case where the object is a fiducial mark 81 or a block skip mark 83, the CPU 61 controls the mark camera 50 to obtain a monochromatic image of the object irradiated with the monochromatic light of R, and inputs the monochromatic image from the mark camera 50. On the other hand, if the selected monochromatic light is all of the monochromatic lights of R, G, and B as in the case where the object is the components P1, P2, and P3 on the substrate 80 after component mounting shown in FIG. 9, the CPU 61 controls the mark camera 50 to sequentially obtain a monochromatic image of the components P1, P2, and P3 irradiated with the monochromatic light of R, a monochromatic image of the components P1, P2, and P3 irradiated with the monochromatic light of G, and a monochromatic image of the components P1, P2, and P3 irradiated with the monochromatic light of B, and inputs those monochromatic images from the mark camera 50. When irradiating the object with monochromatic light, usually the side irradiation light source 55 of the illumination device 51 is used, but when the object has a glossy surface such as a metal surface, the epi-illumination light source 53 is used.

[0026] Next, the CPU 61 sets an object inspection image (S130). For example, if the CPU 61 inputs a monochromatic image of the object irradiated with the monochromatic light of R from the mark camera 50 as in the case where the object is a fiducial mark 81 or a block skip mark 83, the monochromatic image is set as the object inspection image. On the other hand, if the CPU 61 inputs monochromatic images of the object independently irradiated with the monochromatic lights of R, G, and B from the mark camera 50 as in the case where the object is the components P1, P2, and P3 on the substrate 80 after component mounting shown in FIG. 9, those monochromatic images are synthesized to generate a synthesized image (color image), and the synthesized image is set as the object inspection image.

[0027] Here, the color image generated in this embodiment will be described. From the black-and-white image of the object irradiated with R monochromatic light, information representing the brightness of R at each pixel in multiple levels of gradation (for example, 256 gradations) can be obtained. From the black-and-white image of the object irradiated with G monochromatic light, information representing the brightness of G at each pixel in multiple levels of gradation can be obtained. From the black-and-white image of the object irradiated with B monochromatic light, information representing the brightness of B at each pixel in multiple levels of gradation can be obtained. Since RGB information for each pixel can be obtained from these pieces of information, a color image can be generated. In the color image thus generated, since RGB information is obtained for each pixel, a high-resolution color image with reduced phenomena such as color bleeding and false colors can be obtained compared to the case where color information is created with four pixels arranged in a square shape as one unit (for example, with R and B arranged on one diagonal and G and G arranged on the other diagonal as one unit).

[0028] Next, the CPU 61 performs an inspection of the object using the object inspection image (S140). For example, when a monochromatic image irradiated with monochromatic light of R is set as the object inspection image, as in the case where the object is the fiducial mark 81 or the block skip mark 83, the positions of the fiducial mark 81 and the block skip mark 83 are inspected using the monochromatic image. The inspection of the positions of the fiducial mark 81 and the block skip mark 83 is performed before mounting the components on the substrate 80. By inspecting the position of the fiducial mark 81, the posture of the substrate 80 can be known from that position, and thus the subsequent component mounting can be accurately performed in consideration of the posture. By inspecting the position of the block skip mark 83, defective substrate blocks 82 can be skipped and component mounting can be performed. If the positions of the fiducial mark 81 and the block skip mark 83 cannot be recognized or deviate from the original position beyond the allowable range, it is regarded as an error, and the substrate 80 is discharged without component mounting. On the other hand, when a color image is set as the object inspection image, as in the case where the object is the components P1, P2, P3 on the substrate 80 after component mounting shown in FIG. 9, the positions of the components P1, P2, P3 are inspected using the color image. As described above, since the color image obtained in this embodiment is a high-resolution color image in which phenomena such as color bleeding and false colors are eliminated, the positions of the components P1, P2, P3 can be accurately recognized, and as a result, the inspection accuracy is improved. If the positions of the components P1, P2, P3 cannot be recognized or deviate from the original position beyond the allowable range, it is regarded as an error, and the substrate 80 is discarded.

[0029] Next, the CPU 61 stores the image corresponding to the inspection result in the storage unit 63 (S150) and ends this routine. For example, when the object is a fiducial mark 81 or a block skip mark 83 and no error occurs, the monochromatic image of the object irradiated with the single-color light of R is stored in the storage unit 63. At this time, the monochromatic image may be compressed and stored. This is because there is no need to examine in detail the image in the case where no error occurs. On the other hand, when an error occurs when the object is a fiducial mark 81 or a block skip mark 83, the mark camera 50 is controlled to image the monochromatic images of the object independently irradiated with other (i.e., G and B) single-color lights, and the monochromatic images of R, G, and B are stored in the storage unit 63. By doing so, the cause of the error can be investigated by examining the monochromatic images of R, G, and B later. At this time, instead of or in addition to storing the monochromatic images of R, G, and B in the storage unit 63, a color image obtained by synthesizing the monochromatic images of R, G, and B may be stored in the storage unit 63. On the other hand, when the object shown in FIG. 9 is the components P1, P2, and P3 on the substrate 80 after component mounting and no error occurs, the color image is stored in the storage unit 63. At this time, the color image may be compressed and stored. This is because there is no need to examine in detail the image in the case where no error occurs. On the other hand, when an error occurs when the object is the components P1, P2, and P3 on the substrate 80 (see FIG. 9) after component mounting, it is stored in the storage unit 63 without compressing the color image. By doing so, the cause of the error can be investigated by examining the color image later. At this time, instead of or in addition to storing the color image in the storage unit 63, the monochromatic images of R, G, and B may be stored in the storage unit 63.

[0030] Here, the correspondence between the components of the present embodiment and the components of the substrate-facing work system disclosed in this specification will be described. The component mounter 10 of the present embodiment corresponds to the substrate-facing work system disclosed in this specification, the X-axis slider 26 and the Y-axis slider 30 correspond to the moving device, the lighting device 51 corresponds to the lighting device, the camera body 58 corresponds to the monochromatic camera, and the control device 60 corresponds to the image processing device. Further, the display 68 corresponds to the image display device, and the storage unit 63 corresponds to the storage device.

[0031] In the present embodiment described above, it is selected whether to use one monochromatic image or a composite image as the object inspection image based on the object. That is, it is possible to appropriately select whether to use one monochromatic image or a high-resolution composite image according to the object. Therefore, the processing time is shortened compared to the case where a composite image is used as the object inspection image for all objects.

[0032] Also, based on the discriminability of the object from the background of the object, it is determined whether to select one monochromatic light from among the three monochromatic lights of RGB or to select all the monochromatic lights. Therefore, an appropriate image is selected for inspecting the object.

[0033] Furthermore, the CPU 61 determines the quality of the object based on the result of image recognition of the object in the object inspection image. When the object is determined to be defective, all the monochromatic images of the three monochromatic lights of R, G, and B of the object and / or the composite image obtained by synthesizing all the monochromatic images are stored in the storage unit 63. Therefore, for the object determined to be defective, all the monochromatic images and / or composite images (color images) of the object can be read from the storage unit 63 later to investigate the cause of the defect. At this time, if all the monochromatic images of the three monochromatic lights of R, G, and B of the object are not available, the missing monochromatic images are acquired and stored.

[0034] Note that the present invention is not limited to the above-described embodiment at all, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.

[0035] For example, instead of the inspection routine of the above-described embodiment, the inspection routine of FIG. 10 may be executed. In the inspection routine of FIG. 10, the CPU 61 of the control device 60 first determines whether there has been a change in an event related to the object (S200). Examples of changes in events related to the object include changes in the shape data of a component that is the object, replacement of the feeder 74 that supplies the component, replacement of the nozzle 37 that adsorbs the component, and changes in the manufacturing company or manufacturing lot of the component. If there is no change in the event related to the object in S200, the CPU 61 executes the processes of S100 to S150 described above and ends this routine. On the other hand, if there is a change in the event related to the object in S200, the CPU 61 controls the mark camera 50 to capture a monochromatic image of the object irradiated with each of all the monochromatic lights of RGB regardless of the object (S210), and inputs the captured monochromatic image from the mark camera 50 (S220). Next, the CPU 61 sets an object inspection image (S230). Here, the CPU 61 synthesizes the monochromatic images of the object independently irradiated with the R, G, and B monochromatic lights input from the mark camera 50 to generate a synthesized image (color image), and sets the synthesized image as the object inspection image. After that, the CPU 61 executes the processes of S240 and S250 similar to S140 and S150 described above and ends this routine. In S250, if the inspection result is not an error, the CPU 61 compresses the synthesized image and stores it in the storage unit 63, and if the inspection result is an error, the CPU 61 stores the synthesized image in the storage unit 63 without compressing it. By doing so, when an event related to the object changes, since the probability of an error occurring is high, the synthesized image (color image) of the object can be read from the storage unit 63 later to investigate in detail how the change in the event has affected the object. If the inspection result is an error, instead of or in addition to storing the synthesized image in the storage unit 63, the CPU 61 may store the monochromatic images of R, G, and B in the storage unit 63. Even in this case, all the monochromatic images and / or the synthesized image (color image) of the object can be read from the storage unit 63 later to investigate in detail how the change in the event has affected the object.

[0036] In the above-described embodiment, monochromatic light is selected based on the object, and a monochromatic image irradiated with the selected monochromatic light is captured. However, when creating an in-machine editing image for editing on the display 68 of the component mounter 10, monochromatic images of three RGB colors may be captured regardless of the object, and these may be combined to create a combined image (color image), which may be displayed on the display 68.

[0037] In the above-described embodiment, at the start of production, monochromatic images of the object independently irradiated with each of the RGB monochromatic lights are captured. If there is a monochromatic image in which the feature points of the object can be well distinguished from the background of the object among the RGB monochromatic images, the monochromatic light of that monochromatic image may be associated with the object. If the feature points of the object cannot be seen well in any of the monochromatic images, all the monochromatic lights may be associated with the object so that a combined image (color image) obtained by combining each monochromatic image can be obtained. This association operation may be performed by the CPU 61 of the control device 60 or by the operator. Also, until a predetermined period has elapsed after the start of production, in S100 of the inspection routine, all monochromatic lights may be selected regardless of the object, and then this association operation may be performed. After performing the association operation, in S100 of the inspection routine, the monochromatic light associated with the object may be selected.

[0038] In the inspection routine of the above-described embodiment, even in the case of an object for which one monochromatic light is selected, periodically, monochromatic images of the object independently irradiated with each of the R, G, and B monochromatic lights may be combined, and the combined image (color image) may be left.

[0039] In the above-described embodiment, the object may be a component housed in the housing recess 73 of the tape 72 of the reel unit 70. Also, although the reel unit 70 is exemplified as the component supply device of the component mounter 10, it is not particularly limited thereto. For example, a tray unit that mounts and supplies components on a tray may be employed. In that case, the object may be a component placed on the tray.

[0040] In the above-described embodiment, the lighting device 51 can independently irradiate three colors of RGB, but it may also be capable of independently irradiating two colors (for example, R and G, R and B, G and B). In that case, for an object that cannot be recognized in a single-color image of one color, a composite image obtained by synthesizing single-color images of the object irradiated independently with each of the two single-color lights may be used.

[0041] In the above-described embodiment, the component mounter 10 is exemplified as the substrate working system, but it is not particularly limited thereto, and for example, a solder printer disposed upstream of a mounting line in which a plurality of component mounters 10 are arranged may be used. The solder printer is a device that prints solder at a predetermined position of the substrate 80 before mounting components, and may perform the above-described inspection routine using the solder as the object.

[0042] In S130 of the inspection routine of the above-described embodiment, the CPU 61 may display the object inspection image on the display 68 after setting the object inspection image. In this way, the operator can inspect the object by looking at the object inspection image displayed on the display 68. In that case, the processes of S140 and S150 may be omitted.

[0043] In the above-described embodiment, the head 24 having one nozzle 37 is used, but a rotary head having a plurality of nozzles at equal intervals along the outer periphery of a cylindrical head body may also be used.

[0044] In the above-described embodiment, the nozzle 37 is exemplified as the member for sucking and holding components, but it is not particularly limited thereto, and for example, a mechanical chuck or an electromagnet may be provided instead of the nozzle 37.

[0045] The substrate working system disclosed in this specification may be configured as follows.

[0046] In the substrate-facing work system disclosed in this specification, the image processing apparatus may display the inspection target image on an image display device. By doing so, an operator can check the inspection target image by looking at the image display device.

[0047] In the substrate-facing work system disclosed in this specification, the image processing apparatus may select one or a plurality of monochromatic lights from the at least two monochromatic lights based on the distinguishability of the object from its background. By doing so, an appropriate image for inspecting the object is selected. For example, if the object can be distinguished from its background in a monochromatic image of the object irradiated with a certain monochromatic light, that one monochromatic light may be selected. If the object cannot be distinguished from its background in any monochromatic image of the object irradiated with a monochromatic light but can be distinguished in a composite image, a plurality of monochromatic lights corresponding to the monochromatic images necessary for generating that composite image may be selected.

[0048] In the substrate-facing work system disclosed in this specification, the lighting device can independently irradiate the object with three monochromatic lights of R, G, and B, and the image processing apparatus may be configured to set one monochromatic light from the three monochromatic lights of R, G, and B or select all the monochromatic lights based on the object. By doing so, the composite image becomes a color image obtained by synthesizing each monochromatic image of RGB.

[0049] In the substrate-facing work system disclosed in this specification, the image processing apparatus determines the quality of the object based on the result of image recognition of the object in the object inspection image. When the object is determined to be defective, all monochromatic images of the three monochromatic lights of R, G, and B of the object and / or a composite image obtained by synthesizing all the monochromatic images may be stored in a storage device. By doing so, for an object determined to be defective, all monochromatic images and / or composite images (color images) of the object can be read from the storage device later to investigate the cause of the defect. At this time, if all the monochromatic images of the three wavelengths of R, G, and B of the object are not available, the missing monochromatic images may be captured with a monochromatic camera. Or,

[0050] In the substrate-facing work system disclosed in this specification, when an event related to the object changes, the image processing apparatus may store all monochromatic images of the three monochromatic lights of R, G, and B of the object and / or a composite image obtained by synthesizing all the monochromatic images in a storage device. By doing so, when an event related to the object changes, all monochromatic images and / or composite images (color images) of the object can be read from the storage device later to investigate what kind of influence the change of the event has on the object. At this time, if all the monochromatic images of the three wavelengths of R, G, and B of the object are not available, the missing monochromatic images may be captured with a monochromatic camera. Examples of the case where an event related to the object changes include, for example, when the object is a component mounted on a substrate, the case where the shape data of the component is changed, the case where the component supply device or nozzle for supplying the component is replaced, and the case where the manufacturing company or lot of the component is changed.

[0051] In the substrate-facing work system disclosed in this specification, the object may be a mark attached to the substrate, a component mounted on the substrate, a component arranged in a component supply device for supplying components to the substrate, or solder printed on the substrate.

Industrial Applicability

[0052] The present invention can be used in industries involving the operation of mounting components on a substrate.

Explanation of Reference Numerals

[0053] 10 Component mounter, 18 Substrate conveyor, 20 Support plate, 22 Conveyor belt, 23 Support pin, 24 Head, 26 X-axis slider, 26a Drive motor, 28 Guide rail, 30 Y-axis slider, 30a Drive motor, 32 Guide rail, 34 Z-axis motor, 35 Ball screw, 36 Q-axis motor, 37 Nozzle, 40 Parts camera, 50 Mark camera, 51 Lighting device, 52 Housing, 53 Incident light source, 53a Red LED, 53b Green LED, 53c Blue LED, 53d Support plate, 54 Half mirror, 55 Side-emitting light source, 55a Red LED, 55b Green LED, 55c Blue LED, 55d Support plate, 56 Diffusion plate, 58 Camera body, 60 Control device, 61 CPU, 63 Storage unit, 65 Input / output interface, 66 Bus, 68 Display, 70 Reel unit, 71 Reel, 72 Tape, 73 Storage recess, 74 Feeder, 74a Component supply position, 76 Feeder controller, 80 Substrate, 81 Fiducial mark, 82 Substrate block, 83 Block skip mark, P1, P2, P3 Components.

Claims

A substrate working system for performing operations on a substrate, comprising: a monochrome camera for imaging an object on the substrate; an illumination device capable of independently irradiating the object with monochromatic light of R, G, and B; a display for displaying an image; a control device that, when inspecting the object, selects the monochromatic light based on the object, controls the illumination device and the monochromatic camera to image a monochromatic image of the object irradiated with the selected monochromatic light, sets the monochromatic image as an image for object inspection based on the imaged monochromatic image, performs inspection of the object using the set image for object inspection, and when creating an image for display on the display, controls the illumination device and the monochromatic camera to image monochromatic images of three colors of RGB, creates a composite image by combining the monochromatic images of the three colors of RGB, and displays the composite image on the display; A substrate working system comprising the above components.

Images