Physical quantity measuring device

Abstract

To provide a physical quantity measuring device capable of reliably fixing a signal transmission member to a cylindrical case even under a high-temperature environment.SOLUTION: A physical quantity measurement device 1 comprises: a cylindrical case 2 having a connection part 21 with a through hole 22 formed therein; a sensor module 5 that detects a physical quantity; a signal transmission member 7 that is electrically connected to the sensor module 5, and transmits a signal detected by the sensor module 5; a protection pipe member 8 that is inserted into the through hole 22 to communicate an inside with an outside of the cylindrical case 2, and into which the signal transmission member 7 is inserted; a fastening member 9 connected to the connection part 21, and having an insertion hole 91 through which the protection pipe member 8 is inserted; and a fixing member 10 arranged between the protection pipe member 8 and the fastening member 9, and fixing the protection pipe member 8. The fixing member 10 is made of metal and formed into a truncated conical shape, and has a first fixing member 11 in which the insertion hole through which the protection pipe member 8 is inserted is formed. On an inclined surface of the first fixing member 11, a slit is formed.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a physical quantity measuring device.

Background Art

[0002] Conventionally, a cable gland for attaching a cable to a case has been known (for example, Patent Document 1 etc.).

[0003] In Patent Document 1, a plurality of slits are provided in a sleeve for sealing between a gland body attached to a case and a cable. Thereby, without changing the hardness of the sleeve, the sleeve can be easily deformed radially inward, so that the cable can be firmly held and fixed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In Patent Document 1, a sleeve for fixing a cable is formed of rubber such as nitrile rubber. In this case, when used in a high-temperature environment, the sleeve is melted may be loosened or the mechanical properties may be greatly reduced, resulting in a problem that the cable cannot be surely fixed.

[0006] An object of the present invention is to provide a physical quantity measuring device capable of surely fixing a signal transmission member to a cylindrical case even when used in a high-temperature environment.

Means for Solving the Problems

[0007] The physical quantity measuring device of the present invention includes a cylindrical case having a connection portion formed with a through hole, a sensor module accommodated in the cylindrical case for detecting a physical quantity, a signal transmission member electrically connected to the sensor module for transmitting a signal detected by the sensor module, a protection tube member inserted into the through hole for communicating the inside and the outside of the cylindrical case and having the signal transmission member inserted therein, a fastening member connected to the connection portion and formed with an insertion hole through which the protection tube member is inserted, and a fixing member disposed between the protection tube member and the fastening member for fixing the protection tube member. The fixing member is made of metal and formed in a frustum shape, and has a first fixing member in which an insertion hole through which the protection tube member is inserted is formed. A slit is formed in an inclined surface of the first fixing member.

[0008] In the present invention, the protection tube member into which the signal transmission member is inserted is fixed by a fixing member disposed between the protection tube member and the fastening member. The fixing member is formed in a frustum shape and has a first fixing member in which an insertion hole through which the protection tube member is inserted is formed. A slit is formed in an inclined surface of the first fixing member. Thereby, when the first fixing member is disposed between the protection tube member and the fastening member, the width of deformation can be increased. Therefore, even if the environment in which it is used changes and the protection tube member and the signal transmission member expand or contract, the fixing member can be deformed greatly to securely fix the protection tube member and the signal transmission member. Here, in the present invention, since the fixing member for fixing the protection tube member and the signal transmission member is formed of metal, even when used in a high-temperature environment, it can be suppressed that the fixing member melts or the mechanical properties are greatly deteriorated. Therefore, even when used in a high-temperature environment, the signal transmission member and the protection tube member can be securely fixed to the cylindrical case.

[0009] In the physical quantity measuring device of the present invention, the fixing member is made of metal and formed in an annular shape, and has a second fixing member through which the protection tube member is inserted. The second fixing member has a second fixing member main body portion and an engaging portion extending from the second fixing member main body portion and engaging with an inner peripheral surface of the first fixing member.characterized by . In this configuration, the fixing member is made of metal and formed in an annular shape, and has a second fixing member through which the protective tube member is inserted. And the second fixing member has an engaging portion that engages with the inner peripheral surface of the first fixing member. Thereby, since the engaging portion of the second fixing member engages with the inner peripheral surface of the first fixing member, it is possible to suppress the first fixing member from being excessively crushed. Therefore, it is possible to suppress the first fixing member from being deformed more than necessary, making it impossible to fix the protective tube member with the first fixing member, or the first fixing member from being damaged.

[0010] In the physical quantity measuring device of the present invention, it is preferable that two slits are provided at positions facing each other in the first fixing member. In this configuration, since two slits are provided at positions facing each other in the first fixing member, the first fixing member deforms into an elliptical shape when it is crushed. Therefore, for example, compared with the case of deforming into a circular shape, the protective tube member and the signal transmission member can be more reliably fixed by the first fixing member.

[0011] In the physical quantity measuring device of the present invention, the signal transmission member has a first wiring member electrically connected to the sensor module, a second wiring member inserted into the protective tube member, and a tubular connecting member that electrically connects the first wiring member and the second wiring member. The first wiring member is inserted from one end side of the connecting member, and the second wiring member is inserted from the other end side of the connecting member. In this state, it is preferable that the first wiring member and the second wiring member are electrically connected by spot welding to the connecting member. In this configuration, the signal transmission member includes a first wiring member electrically connected to the sensor module, a second wiring member inserted into the protective tube member, and a tubular connection member that electrically connects the first wiring member and the second wiring member. Then, the first wiring portion is inserted from one end side of the connection member, and the second wiring member is inserted from the other end side of the connection member. In this state, the first wiring member and the second wiring member are spot-welded to the connection member. Therefore, even when used in an environment with a large temperature change, since the first wiring member and the second wiring member are connected via the connection member, it is possible to prevent the electrical connection between the first wiring member and the second wiring member from being disconnected.

[0012] In the physical quantity measuring device of the present invention, a cylindrical base member formed using kovar and surrounding the periphery of the sensor module is provided. The base member is formed with an insertion hole into which the signal transmission member is inserted, and it is preferable that the insertion hole is sealed with glass in a state where the signal transmission member is inserted. In this configuration, since the kovar forming the base member and the glass sealing the insertion hole of the base member have similar coefficients of linear expansion, even when used in an environment with a large temperature change, it is possible to prevent the glass sealing the insertion hole from being damaged due to the expansion and contraction of the base member.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Best Mode for Carrying Out the Invention

[0014] [Embodiment] A physical quantity measuring device 1 according to an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the physical quantity measuring device 1 is configured to be able to measure the pressure of the fluid to be measured. FIG. 1 is a front view showing the outline of the physical quantity measuring device 1 of this embodiment, FIG. 2 is an exploded perspective view showing the outline of the physical quantity measuring device 1, and FIG. 3 is a cross-sectional view showing the outline of the physical quantity measuring device 1. As shown in FIGS. 1 to 3, the physical quantity measuring device 1 includes a cylindrical case 2, a connecting member 3, a joint 4, a sensor module 5, a base member 6, a signal transmission member 7, a protective tube member 8, a fastening member 9, and a fixing member 10.

[0015] [Cylindrical Case 2] The cylindrical case 2 is a metal member formed in a cylindrical shape, and houses the sensor module 5, the base member 6, the signal transmission member 7, the protective tube member 8, etc. inside. In this embodiment, a connection portion 21 is formed at one end of the cylindrical case 2. The connection portion 21 is formed in a cylindrical shape, and a through hole 22 into which the protective tube member 8 is inserted is formed. Further, an external male thread portion 23 is formed on the outer peripheral side of the connection portion 21, and the fastening member 9 is screwed thereon. Also, a connecting member 3 is connected to the other end of the cylindrical case 2.

[0016] [Connecting Member 3] The connecting member 3 is a metal member formed in a cylindrical shape. In this embodiment, the connecting member 3 has a connecting member main body portion 31 and a flange portion 32. The connecting member main body portion 31 is formed in a cylindrical shape, and one end thereof is welded and connected to the joint 4. Also, the other end of the connecting member main body portion 31 is screwed and connected to the cylindrical case 2. The flange portion 32 is formed to extend radially from the connecting member main body portion 31.

[0017] [Joint 4] The joint 4 is a metal member and is fixed by being welded to the connecting member 3 as described above. And, an introduction hole 41 for introducing the fluid to be measured is formed in the joint 4. Further, in the joint 4, an engaging portion 42 that extends radially from the center and engages with a tool such as a spanner is formed, and a male screw portion 43 that is screwed into the portion to be attached is formed.

[0018] [Sensor module 5] The sensor module 5 has a cylindrical body portion 51 attached to one end side of the joint 4 and a diaphragm 52 integrally formed on one end side of the cylindrical body portion 51. A strain gauge (not shown) is formed on this diaphragm 52, and the pressure of the fluid to be measured introduced from the introduction hole 41 is detected by this strain gauge. Note that the sensor module 5 is not necessarily limited to a strain gauge type, and for example, it may be a capacitance type sensor as long as it is configured to be able to detect the pressure of the fluid to be measured.

[0019] [Base member 6] FIG. 4 is a perspective view showing an outline of the base member 6. As shown in FIG. 4, the base member 6 is formed in a cylindrical shape using Kovar and is a member that surrounds the periphery of the sensor module 5. In the present embodiment, an insertion hole 61 into which a first wiring member 71 of a signal transmission member 7 described later is inserted is formed in the base member 6. Here, in the present embodiment, the first wiring member 71 is formed using Kovar. And the insertion hole 61 is sealed with insulating glass 62 in a state where the first wiring member 71 is inserted. Thereby, since the Kovar forming the base member 6 and the first wiring member 71 and the glass 62 sealing the insertion hole 61 of the base member 6 have similar coefficients of linear expansion, even when used in an environment with a large temperature change, it is possible to suppress damage to the glass 62 that seals the insertion hole 61 due to the expansion and contraction of the base member 6 and the first wiring member 71. Further, since the first wiring member 71 inserted into the insertion hole 61 is fixed by the insulating glass 62, the first wiring member 71 and the base member 6 can be electrically insulated.

[0020] [Signal transmission member 7] Returning to FIGS. 1 to 3, the signal transmission member 7 is a member that is electrically connected to the sensor module 5 and transmits the signal detected by the sensor module 5. In the present embodiment, the signal transmission member 7 includes a first wiring member 71, a second wiring member 72, a connection member 73, and a guide member 74.

[0021] The first wiring member 71 is formed using kovar as described above, is electrically connected to the sensor module 5, and is fixed to the base member 6 by the glass 62 while being inserted into the insertion hole 61 of the base member 6 described above. In the present embodiment, five first wiring members 71 are provided. The second wiring member 72 is inserted into the protective tube member 8 and extends outside the cylindrical case 2. Thereby, the second wiring member 72 is configured to be electrically connectable to an external device. In the present embodiment, five second wiring members 72 are provided corresponding to the first wiring members 71. The connection member 73 is made of metal and formed in a tubular shape, and is a member that electrically connects the first wiring member 71 and the second wiring member 72. In the present embodiment, five connection members 73 are provided according to the first wiring member 71 and the second wiring member 72. Details of the connection of the first wiring member 71 and the second wiring member 72 by the connection member 73 will be described later. The guide member 74 is formed in a disk shape from alumina. In the present embodiment, the guide member 74 is supported at the end of the connecting member 3 and has five guide holes 75 for guiding the first wiring member 71.

[0022] [Protective tube member 8] The protective tube member 8 is a tubular member, is inserted into the through hole 22 of the connection portion 21 described above, and communicates the inside and the outside of the cylindrical case 2. And inside the protective tube member 8, the second wiring member 72 of the signal transmission member 7 described above is inserted. Also, in the present embodiment, the protective tube member 8 is fixed by the fixing member 10 together with the second wiring member 72.

[0023] [Fastening member 9] The fastening member 9 is a so-called hexagonal nut and is screwed onto the male screw portion 23 of the connection portion 21 described above. In the present embodiment, an insertion hole 91 through which the protective tube member 8 is inserted is formed in the fastening member 9. Note that the fastening member 9 is not limited to the above configuration, and may be configured to be connectable to the connection portion 21.

[0024] [Fixing member 10] The fixing member 10 is a member that is disposed between the protective tube member 8 and the fastening member 9 and fixes the protective tube member 8. In the present embodiment, the fixing member 10 includes a first fixing member 11 and a second fixing member 12.

[0025] FIG. 5 is a perspective view showing an outline of the first fixing member 11. As shown in FIG. 5, the first fixing member 11 is made of metal and formed in a frustum shape, and an insertion hole 111 through which the protective tube member 8 is inserted is formed. A slit 113 is formed in the inclined surface 112 of the first fixing member 11. In the present embodiment, two slits 113 are provided at opposing positions in the first fixing member 11.

[0026] FIG. 6 is a perspective view showing an outline of the second fixing member 12. As shown in FIG. 6, the second fixing member 12 is made of metal and formed in an annular shape. In the present embodiment, the second fixing member 12 includes a second fixing member main body portion 121 and an engaging portion 122. The second fixing member main body portion 121 is formed in an annular shape, and an insertion hole 123 through which the protective tube member 8 is inserted is formed. The engaging portion 122 extends axially from the second fixing member main body portion 121. The engaging portion 122 is configured to engage with the inner peripheral surface of the insertion hole 111 of the first fixing member 11.

[0027] [Regarding the fixing method by the fixing member 10] Next, the fixing method by the fixing member 10 will be described. As described above, the first fixing member 11 is disposed between the protective tube member 8 and the fastening member 9. And in the present embodiment, since the slit 113 is formed in the inclined surface 112 of the first fixing member 11, when the fastening member 9 is screwed into the connecting portion 21 of the cylindrical case 2, the first fixing member 11 can be greatly deformed by being pressed by the fastening member 9. Thereby, the first fixing member 11 can fix the protective tube member 8 and the second wiring member 72 inserted into the protective tube member 8 to the cylindrical case 2.

[0028] Here, in the present embodiment, since the first fixing member 11 is formed of metal, even when used in a high-temperature environment, it is possible to suppress the first fixing member 11 from melting or its mechanical properties from significantly deteriorating. Therefore, even when used in a high-temperature environment, the signal transmission member 7 and the protective tube member 8 can be reliably fixed to the cylindrical case 2.

[0029] Also, in the present embodiment, the second fixing member 12 has an engaging portion 122 that engages with the inner peripheral surface of the first fixing member 11. Thereby, since the engaging portion 122 of the second fixing member 12 engages with the inner peripheral surface of the first fixing member 11, it is possible to suppress the first fixing member 11 from being excessively crushed by the fastening member 9. Therefore, it is possible to suppress the first fixing member 11 from being deformed more than necessary and moving in the inner direction of the connecting portion 21 along the protective tube member 8, which would cause the protective tube member 8 to become unfixable by the first fixing member 11. Furthermore, it is possible to suppress the first fixing member 11 from being deformed and damaged more than necessary.

[0030] Furthermore, in the present embodiment, two of the above-described slits 113 are provided at opposing positions in the first fixing member 11. Thereby, when the first fixing member 11 is deformed by being pressed by the fastening member 9, it is deformed into an elliptical shape. Therefore, for example, compared with the case of being deformed into a circular shape, the protective tube member 8 and the signal transmission member 7 can be more reliably fixed by the first fixing member 11.

[0031] [Connection Method of First Wiring Member 71 and Second Wiring Member 72] Next, the connection method of the first wiring member 71 and the second wiring member 72 will be described. FIG. 7 is an exploded front view showing the connection state of the signal transmission member 7. As shown in FIG. 7, first, the first wiring member 71 is inserted from one end side of the connection member 73. Next, the second wiring member 72 is inserted from the other end of the connection member 73. And in this state, the first wiring member 71 and the second wiring member 72 are spot-welded to the connection member 73 from the outside of the connection member 73. Thereby, the first wiring member 71 and the second wiring member 72 are electrically connected via the connection member 73. In the present embodiment, since the first wiring member 71 and the second wiring member 72 are connected as described above, even when used in an environment with a large temperature change, the first wiring member 71 and the second wiring member 72 are connected via the connection member 73. Therefore, it is possible to prevent the electrical connection between the first wiring member 71 and the second wiring member 72 from being disconnected. Furthermore, since the first wiring member 71 and the second wiring member 72 are connected by spot-welding from the outside of the connection member 73, the operation of the step of connecting the first wiring member 71 and the second wiring member 72 can be facilitated.

[0032] In the present embodiment as described above, the following effects can be obtained. (1) In the present embodiment, the protective tube member 8 into which the signal transmission member 7 is inserted is fixed by a fixing member 10 disposed between the protective tube member 8 and the fastening member 9. And the said fixing member 10 is formed in a frustum shape, and has a first fixing member 11 in which an insertion hole 111 through which the protective tube member 8 is inserted is formed, and a slit 113 is formed in the inclined surface 112 of the first fixing member 11. Thereby, the first fixing member 11 can be greatly deformed when disposed between the protective tube member 8 and the fastening member 9. Therefore, even if the environment in use changes and the protective tube member 8 and the signal transmission member 7 expand or contract, the fixing member 10 can be greatly deformed to securely fix the protective tube member 8 and the signal transmission member 7. Here, in the present embodiment, since the fixing member 10 for fixing the protection tube member 8 and the signal transmission member 7 is formed of metal, even when used in a high-temperature environment, it is possible to suppress the fixing member 10 from melting or the mechanical properties from significantly deteriorating. Therefore, even when used in a high-temperature environment, the signal transmission member 7 and the protection tube member 8 can be reliably fixed to the cylindrical case 2.

[0033] (2) In the present embodiment, the fixing member 10 is made of metal and formed in an annular shape, and has a second fixing member 12 through which the protection tube member 8 is inserted. And the second fixing member 12 has an engaging portion 122 that engages with the inner peripheral surface of the first fixing member 11. Thereby, since the engaging portion 122 of the second fixing member 12 engages with the inner peripheral surface of the first fixing member 11, it is possible to suppress the first fixing member 11 from being excessively crushed. Therefore, it is possible to suppress the first fixing member 11 from being deformed more than necessary, making it impossible to fix the protection tube member 8 with the first fixing member 11, or the first fixing member 11 from being damaged.

[0034] (3) In the present embodiment, since two slits 113 are provided at positions facing each other in the first fixing member 11, the first fixing member 11 deforms into an elliptical shape when crushed. Therefore, for example, compared with the case where the first fixing member 11 deforms into a circular shape, the protection tube member 8 and the signal transmission member 7 can be more reliably fixed by the first fixing member 11.

[0035] (4) In this embodiment, the signal transmission member 7 includes a first wiring member 71 electrically connected to the sensor module 5, a second wiring member 72 inserted into the protective tube member 8, and a tubular connection member 73 that electrically connects the first wiring member 71 and the second wiring member 72. The first wiring member 71 is inserted through one end side of the connection member 73, and the second wiring member 72 is inserted through the other end side of the connection member 73. In this state, the first wiring member 71 and the second wiring member 72 are spot-welded to the connection member 73. Therefore, even when used in an environment with a large temperature change, since the first wiring member 71 and the second wiring member 72 are connected via the connection member 73, it is possible to prevent the electrical connection between the first wiring member 71 and the second wiring member 72 from being disconnected.

[0036] (5) In this embodiment, since the coefficient of linear expansion of the kovar forming the base member 6 and the first wiring member 71 and the glass 62 that seals the insertion hole 61 of the base member 6 is close, even when used in an environment with a large temperature change, it is possible to prevent the glass 62 that seals the insertion hole 61 from being damaged due to the expansion and contraction of the base member 6.

[0037] [Modification Example] Note that the present invention is not limited to the above-described embodiment, and modifications, improvements, etc. within the scope that can achieve the object of the present invention are included in the present invention.

[0038] In the above embodiment, five first wiring members 71, second wiring members 72, and connection members 73 were provided, but the present invention is not limited to this. For example, the number of the first wiring member, the second wiring member, and the connection member may be four or less, or six or more.

[0039] In the above embodiment, the base member 6 was formed using kovar, but the present invention is not limited to this. For example, the base member may be made of stainless steel or ceramic, and is preferably composed of a metal having a coefficient of linear expansion close to that of glass. 。 Examples of the metal having a coefficient of linear expansion close to that of glass include, for example, iron-nickel alloy. In the above embodiment, the first wiring member 71 was formed using Kovar, but it is not limited thereto. For example, the first wiring part The material is may be formed of copper or the like, as long as it is formed of a conductive member. In addition, the first wiring member is preferably composed of a metal having a coefficient of linear expansion close to that of glass. Furthermore, in the above embodiment, the insertion hole 61 of the base member 6 was sealed with glass 62, but it is not limited thereto. For example, the insertion hole of the base member may be sealed with an adhesive or the like.

[0040] In the above embodiment, the flange portion 32 was formed on the connecting member main body portion 31 of the connecting member 3, but it is not limited thereto. For example, even when the flange portion is not formed on the connecting member main body portion, it is included in the present invention. In this case, the end portion of the cylindrical case may be welded and connected to the end portion of the connecting member main body portion.

[0041] In the above embodiment, two slits 113 were formed at opposing positions in the first fixing member 11, but it is not limited thereto. For example, one slit may be formed in the first fixing member, or three or more slits may be formed.

[0042] In the above embodiment, the cylindrical case 2 was formed in a cylindrical shape, but it is not limited thereto. For example, the cylindrical case may be formed in a polygonal cylindrical shape.

[0043] In the above embodiment, the physical quantity measuring device 1 was configured to be able to measure the pressure as the physical quantity of the fluid to be measured, but it is not limited thereto. For example, the physical quantity measuring device may be configured to be able to measure physical quantities such as the temperature or differential pressure of the fluid to be measured.

Explanation of Reference Numerals

[0044] 1... Physical quantity measuring device, 2... Cylindrical case, 3... Connecting member, 4... Joint, 5... Sensor module, 6... Base member, 7... Signal transmission member, 8... Protective tube member, 9... Fastening member, 10... Fixing member, 11... First fixing member, 12... Second fixing member, 21... Connection part, 22... Through hole, 23... Male screw part, 31... Connecting member main body part, 32... Flange part, 41... Introduction hole, 42... Engaging part, 43... Male screw part, 51... Cylindrical body part, 52... Diaphragm, 61... Insertion hole, 62... Glass, 71... First wiring member, 72... Second wiring member, 73... Connection member, 74... Guide member, 75... Guide hole, 91... Insertion through hole, 111... Insertion through hole, 112... Inclined surface, 113... Slit, 121... Second fixing member main body part, 122... Engaging part, 123... Insertion through hole.

Claims

1. A cylindrical case having a connection portion with a through hole formed therein, a sensor module housed in the cylindrical case for detecting a physical quantity, a signal transmission member electrically connected to the sensor module for transmitting a signal detected by the sensor module, a protective tube member inserted into the through hole to communicate the inside and outside of the cylindrical case and having the signal transmission member inserted therein, a fastening member connected to the connection portion and having an insertion hole through which the protective tube member is inserted, and a fixing member disposed between the protective tube member and the fastening member for fixing the protective tube member. The fixing member includes a first fixing member made of metal and formed in a frustum shape with an insertion hole through which the protective tube member is inserted, and a second fixing member made of metal and formed in an annular shape with the protective tube member inserted therethrough. A slit is formed in the inclined surface of the first fixing member. The second fixing member includes a second fixing member main body portion and an engaging portion extending from the second fixing member main body portion and engaging with the inner peripheral surface of the first fixing member. A physical quantity measuring device, characterized in that.

2. In the physical quantity measuring device according to Claim 1, two slits are provided at positions facing each other in the first fixing member. A physical quantity measuring device, characterized in that.

3. In the physical quantity measuring device according to Claim 1, the signal transmission member includes a first wiring member electrically connected to the sensor module, a second wiring member inserted into the protective tube member, and a tubular connection member for electrically connecting the first wiring member and the second wiring member. The first wiring member is inserted through one end side of the connection member, and the second wiring member is inserted through the other end side of the connection member. In this state, the first wiring member and the second wiring member are spot welded to the connection member, whereby the first wiring member and the second wiring member are electrically connected. A physical quantity measuring device, characterized in that.

4. In the physical quantity measuring device according to Claim 1, a cylindrical base member formed using Kovar and surrounding the periphery of the sensor module is provided. An insertion hole through which the signal transmission member is inserted is formed in the base member. The insertion hole is sealed with glass in a state where the signal transmission member is inserted. A physical quantity measuring device, characterized in that.

Images