Film forming apparatus

Abstract

The present disclosure aims to provide a film forming apparatus that improves the quality and usage efficiency of a raw material solution mist conveyed by a mist supply pipe. In the mist film forming apparatus (51) of the present disclosure, an ultrasonic nebulizer (1) conveys a raw material solution mist (MT) toward a mist supply port (15) of a nozzle (7) through a mist supply pipe (11) by a carrier gas (G4). The mist supply direction (D1) of the mist supply pipe (11) includes two partial supply directions (D11 and D12). The elevation angle of each of the two partial supply directions (D11 and D12) is a positive value.

Description

Technical Field

[0001] The present disclosure relates to a film forming apparatus for forming a thin film, and particularly to a film forming apparatus that propagates a raw material solution mist through a mist supply pipe.

Background Art

[0002] Conventional film forming apparatuses for forming thin films generate a raw material solution mist in which a raw material solution is atomized by an ultrasonic nebulizer, and propagate the raw material solution mist through a mist supply pipe. The film forming apparatus sprays the raw material solution mist from a mist spraying mechanism connected to the mist supply pipe onto a substrate to be film formed, and forms a functional thin film on the surface of the substrate. For example, a nozzle can be considered as the mist spraying mechanism. As a conventional film forming apparatus, for example, there is a mist coating film forming apparatus disclosed in Patent Document 1.

[0003] FIG. 5 is an explanatory diagram schematically showing the configuration of a mist film forming apparatus 91 which is a first conventional apparatus.

[0004] As shown in the figure, the ultrasonic nebulizer 1 applies ultrasonic vibration to the raw material solution in the container to generate a raw material solution mist MT in the container. The ultrasonic nebulizer 1 takes in a carrier gas G4 from the gas supply unit 4 into the container, and conveys the raw material solution mist MT by the carrier gas G4 through the mist supply pipe 31 toward the mist supply port 75 of the nozzle 70.

[0005] The nozzle 70 has a column structure, has a mist supply port 75 on the upper surface, and has a mist outlet 77 on the lower surface. The nozzle 70 receives the raw material solution mist MT from the mist supply port 75 through the mist supply pipe 31, and supplies the raw material solution mist MT downward from the mist outlet 77.

[0006] The mist deposition apparatus 91 with such a configuration forms a thin film on the surface of the substrate 21 to be deposited by applying the raw material solution mist MT to the surface of the substrate 21. The substrate 21 is disposed below the mist outlet 77. As a method of disposing the substrate 21 below the mist outlet 77, placing the substrate 21 on a mounting table (not shown) etc. can be considered.

[0007] FIG. 6 is an explanatory diagram schematically showing the configuration of a mist deposition apparatus 92 which is a second conventional apparatus.

[0008] As shown in the figure, the ultrasonic nebulizer 1 applies ultrasonic vibration to the raw material solution in the container to generate the raw material solution mist MT in the container. The ultrasonic nebulizer 1 takes in the carrier gas G4 from the gas supply unit 4 into the container, and conveys the raw material solution mist MT by the carrier gas G4 through the mist supply pipe 32 toward the mist supply port 76 of the nozzle 80.

[0009] The nozzle 80 has a column structure, has a mist supply port 76 on the lower surface, and has a mist outlet 78 on the upper surface. The nozzle 80 receives the raw material solution mist MT from the mist supply port 76 through the mist supply pipe 32, and supplies the raw material solution mist MT upward from the mist outlet 78.

[0010] The mist deposition apparatus 92 with such a configuration forms a thin film on the back surface of the substrate 22 to be deposited by applying the raw material solution mist MT to the back surface of the substrate 22. The substrate 22 is disposed above the mist outlet 78. As a method of disposing the substrate 22 above the mist outlet 78, holding the substrate 22 by holding means (not shown) etc. can be considered.

Prior Art Documents

Patent Documents

[0011]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0012] Hereinafter, the mist film forming apparatus 91 shown in FIG. 5 and the mist film forming apparatus 92 shown in FIG. 6 are collectively referred to as the "mist film forming apparatus 90", and the mist supply pipe 31 shown in FIG. 5 and the mist supply pipe 32 shown in FIG. 6 may be collectively referred to as the "mist supply pipe 30".

[0013] In the mist supply pipe 30 of the conventional mist film forming apparatus 90, there was a portion where the elevation angle, which is the angle upward with respect to the horizontal direction, was 0° or less in at least a part of the mist supply direction.

[0014] In the case of the mist film forming apparatus 91 shown in FIG. 5, the mist supply direction D6 of the mist supply pipe 31 includes three partial supply directions D61 to D63. The elevation angle of the partial supply direction D61 is 90°, the elevation angle of the partial supply direction D62 is 0°, and the elevation angle of the partial supply direction D63 is -90°.

[0015] For this reason, in the mist supply pipe 31, there was a problem that the raw material solution mist MT accumulated due to the adhesion of the raw material solution mist MT to the inner wall of the pipe corresponding to the partial supply direction D62, resulting in the formation of a liquid pool. The liquid pool means a liquid component formed by an aggregate of the raw material solution mist MT.

[0016] On the other hand, in the case of the mist film forming apparatus 92 shown in FIG. 6, the mist supply direction D7 of the mist supply pipe 32 includes three partial supply directions D71 to D73. The elevation angle of the partial supply direction D71 is +90°, the elevation angle of the partial supply direction D72 is -45°, and the elevation angle of the partial supply direction D73 is +90°.

[0017] For this reason, the bent portion 32b of the mist supply pipe 32 where the partial supply direction changes from D72 to D73 becomes the trough portion of the mist supply pipe 32. For this reason, there was a problem that the raw material solution mist MT accumulated due to the adhesion of the raw material solution mist MT to the inner wall corresponding to the bent portion 32b, resulting in the formation of a liquid pool.

[0018] Thus, the conventional mist film forming apparatus 90 had a problem in that a liquid pool was generated due to the existence of a portion with an elevation angle of 0° or less in at least a part of the mist supply direction of the mist supply pipe 30.

[0019] Therefore, when the mist film forming apparatus 90 is used for a long period of time, the liquid generated in the mist supply pipe 30 evaporates, and the components of the raw material solution dissolved or dispersed in the liquid are precipitated. Hereinafter, the precipitated components are referred to as "precipitated components".

[0020] Particularly, when the precipitated components dry and are subdivided during the non-use period of the mist film forming apparatus 90, they are transported by the gas flow of the transport gas G4 flowing through the mist supply pipe 30 during the use of the mist film forming apparatus 90, and finally blown out from the mist outlet 77 (78) of the nozzle 70 (80) together with the raw material solution mist MT.

[0021] Thus, the conventional mist film forming apparatus 90 had a problem in that the quality of the raw material solution mist MT transported by the mist supply pipe 30 deteriorated due to the flow of the precipitated components into the mist supply pipe 30.

[0022] When the solid precipitated components blown out from the mist outlet 77 are applied to the surface (back surface) of the base material 21 (22), they will be included in the formed thin film. When the precipitated components are included in the thin film, defects and non-uniformity of the film thickness of the thin film will occur. As a result, the performance of the thin film formed by the mist film forming apparatus 90 will deteriorate.

[0023] Furthermore, when a part of the mist supply pipe 30 is blocked by the liquid pool, there is a problem in that the use efficiency of the raw material solution mist MT flowing through the mist supply pipe 30 is reduced. That is, the conventional mist film forming apparatus 90 had a problem in that a part of the raw material solution mist MT remained in the mist supply pipe 30 as a liquid pool without being supplied to the base material 21 (22), resulting in a reduction in the use efficiency of the raw material solution mist MT.

[0024] In the present disclosure, an object is to provide a film forming apparatus that solves the above problems and improves the quality and use efficiency of a raw material solution mist conveyed by a mist supply pipe.

Means for Solving the Problems

[0025] The film forming apparatus of the present disclosure is a film forming apparatus including an ultrasonic nebulizer that applies ultrasonic vibration to a raw material solution to generate a raw material solution mist, and a mist supply pipe for conveying the raw material solution mist generated by the ultrasonic nebulizer, wherein a mist supply direction of the mist supply pipe has a positive value exceeding 0° as an elevation angle that is an angle upward with respect to the horizontal direction in the entire region.

Effects of the Invention

[0026] Since the mist supply direction of the mist supply pipe in the film forming apparatus of the present disclosure has a positive value as the elevation angle in the entire region, it is possible to surely avoid the occurrence of liquid accumulation due to the collection of the raw material solution mist in the mist supply pipe.

[0027] As a result, the film forming apparatus of the present disclosure can improve the quality and use efficiency of the raw material solution mist conveyed by the mist supply pipe.

[0028] The object, features, aspects, and advantages of the present disclosure will become clearer from the following detailed description and the accompanying drawings.

Brief Description of the Drawings

[0029]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Embodiments for Carrying Out the Invention

[0030] <Embodiment 1> FIG. 1 is an explanatory diagram schematically showing the configuration of a mist film-forming apparatus 51 according to Embodiment 1 of the present disclosure. The film-forming apparatus of the present disclosure is the mist film-forming apparatus 51.

[0031] As shown in the figure, the ultrasonic nebulizer 1 applies ultrasonic vibration to the raw material solution in the container to generate a raw material solution mist MT in the container. The ultrasonic nebulizer 1 takes in the carrier gas G4 from the gas supply unit 4 into the container, and conveys the raw material solution mist MT toward the mist supply port 15 of the nozzle 7 through the mist supply pipe 11 by the carrier gas G4.

[0032] As the raw material solution of the raw material solution mist MT, for example, a solution in which a film-forming raw material is dissolved in a solvent containing water or an organic solvent can be considered. As the organic solvent, alcohol solvents such as ethanol and methanol, hydrocarbon solvents such as toluene and benzene, etc. can be considered.

[0033] Also, as the film-forming raw material, zinc acetate, aluminum acetate, nickel acetate, zinc acetylacetonate, aluminum acetylacetonate, nickel acetylacetonate, tin chloride, aluminum chloride, zinc chloride, etc. can be considered.

[0034] Also, as the raw material solution, a dispersion in which fine particles are dispersed in water or an organic solvent can be considered. As the fine particles serving as the film-forming raw material, carbon nanotubes, silica, fine particles of barium titanate, fine particles of tin oxide, etc. can be considered.

[0035] The nozzle 7 has a columnar structure, has a mist supply port 15 on its side surface, and has a mist outlet 17 on its lower surface. The terminal end (the right end in the figure) of the mist supply pipe 11 is connected to the mist supply port 15. The nozzle 7 receives the raw material solution mist MT from the mist supply port 15 via the mist supply pipe 11, and supplies the raw material solution mist MT downward from the mist outlet 17.

[0036] The conventional mist film forming apparatus 91 with such a configuration forms a thin film on the surface of the base material 21 to be film-formed by applying the raw material solution mist MT to the surface of the base material 21. The base material 21 is disposed below the mist outlet 17. As a method of disposing the base material 21 below the mist outlet 17, it is conceivable to place the base material 21 on a mounting table (not shown).

[0037] As shown in FIG. 1, in the mist film forming apparatus 51 of Embodiment 1, the mist supply direction D1 of the mist supply pipe 11 includes two partial supply directions D11 and D12. The elevation angle of the partial supply direction D11 is 90°, and the elevation angle of the partial supply direction D12 is about 15°.

[0038] The partial supply directions D11 and D12 are continuous in the order of D11 and D12, and the elevation angles of the partial supply directions D11 and D12 are positive values.

[0039] Further, the mist supply pipe 11 has an inner wall subjected to a water repellent treatment. As the inner wall subjected to the water repellent treatment, an inner wall coated with a water repellent material such that the contact angle with water is 90° or more, or the inner wall of the mist supply pipe 11 made of the above-described water repellent material as a constituent material can be considered. The contact angle means the angle formed by the liquid droplet and the solid to which the liquid droplet adheres. As the above-described water repellent material, for example, a fluororesin and a silicone resin can be considered.

[0040] Thus, in the mist supply pipe 11, the mist supply direction D1 including the partial supply directions D11 and D12 has a positive value exceeding 0° for the elevation angle, which is an angle upward with respect to the horizontal direction in the entire region.

[0041] Therefore, even if the raw material solution mist MT adheres to the inner wall of the mist supply pipe 11, the liquid component of the adhered raw material solution mist MT moves in the reverse direction inside the mist supply pipe 11 due to gravity, and finally flows back into the container of the ultrasonic nebulizer 1.

[0042] Therefore, in the mist film forming apparatus 51 of the first embodiment, due to the adhesion of the raw material solution mist MT to the inner wall of the mist supply pipe 11, the raw material solution mist MT does not accumulate to form a liquid pool.

[0043] As described above, the mist supply direction D1 of the mist supply pipe 11 in the mist film forming apparatus 51 of the first embodiment has a positive elevation angle in the entire region including the partial supply direction D11 and the partial supply direction D12. Therefore, it is possible to reliably avoid the occurrence of a liquid pool due to the accumulation of the raw material solution mist MT in the mist supply pipe 11.

[0044] As a result, the mist film forming apparatus 51 of the first embodiment can improve the quality and usage efficiency of the raw material solution mist MT that is transported by the mist supply pipe 11 and supplied to the outside from the mist outlet 17 of the nozzle 7.

[0045] This is because, unlike the conventional mist film forming apparatus 90 described with reference to FIGS. 5 and 6, the deposition component does not flow in the mist supply pipe 11, and a part of the mist supply pipe 11 is not blocked by a liquid pool.

[0046] Furthermore, by using the nozzle 7 in the mist film forming apparatus 51 of the first embodiment, the supply range of the raw material solution mist MT from the mist outlet 17 of the nozzle 7 can be expanded.

[0047] In addition, in the mist film forming apparatus 51 of the first embodiment, since the mist supply pipe 11 has two partial supply directions D11 and D12, the degree of freedom in arranging the ultrasonic nebulizer 1 and the nozzle 7 can be increased.

[0048] Furthermore, since the mist supply pipe 11 has an inner wall subjected to a water-repellent treatment, the raw material solution mist MT adhering to the inner wall can flow in the reverse direction through the mist supply pipe 11, and finally, the liquid return efficiency of flowing back into the container of the ultrasonic nebulizer 1 can be enhanced.

[0049] <Embodiment 2> FIG. 2 is an explanatory diagram schematically showing the configuration of a mist film forming apparatus 52 according to Embodiment 2 of the present disclosure. The film forming apparatus of the present disclosure becomes the mist film forming apparatus 52.

[0050] Hereinafter, the same contents as those of the mist film forming apparatus 51 shown in FIG. 1 will be described with the same reference numerals, and the description will be appropriately omitted as needed. The description will focus on the characteristic parts of the mist film forming apparatus 52 of Embodiment 2.

[0051] The ultrasonic nebulizer 1 takes in a carrier gas G4 into the container from the gas supply unit 4, and conveys the raw material solution mist MT toward the mist supply port 15 of the nozzle 8 through the mist supply pipe 12 by the carrier gas G4.

[0052] The nozzle 8 has a column structure, has a mist supply port 15 on the side surface, and has a mist outlet 18 on the upper surface. The terminal end (the right end in the figure) of the mist supply pipe 12 is connected to the mist supply port 15. The nozzle 8 receives the raw material solution mist MT from the mist supply port 15 through the mist supply pipe 12, and supplies the raw material solution mist MT upward from the mist outlet 18.

[0053] In order to supply the raw material solution mist MT upward, it is desirable to increase the flow rate of the carrier gas G4 in the ultrasonic nebulizer 1 as compared with the mist film forming apparatus 51 of Embodiment 1 in the mist film forming apparatus 52 of Embodiment 2.

[0054] The nozzle 8 has a discharge pipe 81 on the side surface on the lower surface side. The discharge pipe 81 is provided to discharge the residue inside the nozzle 8. As the residue of the nozzle 8, a liquid pool generated by the accumulation of the raw material solution mist MT due to the adhesion of the raw material solution mist MT on the lower surface of the nozzle 8 can be considered. It is desirable that the discharge pipe 81 provided on the side surface of the nozzle 8 be closer to the lower surface of the nozzle 8.

[0055] The mist film forming apparatus 52 of Embodiment 2 having such a configuration forms a thin film on the back surface of the substrate 22 to be film-formed by applying the raw material solution mist MT to the back surface of the substrate 22. The substrate 22 is disposed above the mist outlet 18. As a method of disposing the substrate 22 above the mist outlet 78, it is conceivable to hold the substrate 22 by holding means (not shown) having a hanging function.

[0056] As shown in FIG. 2, in the mist film forming apparatus 52 of Embodiment 2, the mist supply direction D2 of the mist supply pipe 12 includes two partial supply directions D21 and D22. The elevation angle of the partial supply direction D21 is 90°, and the elevation angle of the partial supply direction D22 is about 15°. The partial supply directions D21 and D22 are continuous in the order of D21 and D22, and the elevation angles of the partial supply directions D21 and D22 are positive values.

[0057] Further, the mist supply pipe 12 has an inner wall that is subjected to a water repellent treatment in the same manner as the mist supply pipe 11 of Embodiment 1.

[0058] Thus, in the mist supply pipe 12, the mist supply direction D2 including the partial supply directions D21 and D22 has a positive value with a water elevation angle exceeding 0° in the entire region.

[0059] Therefore, even if the raw material solution mist MT adheres to the inner wall of the mist supply pipe 12, the liquid component of the adhered raw material solution mist MT moves in the reverse direction inside the mist supply pipe 12 by gravity and finally flows back into the container of the ultrasonic nebulizer 1.

[0060] Therefore, in the mist film forming apparatus 52 of Embodiment 2, the raw material solution mist MT does not collect and form a liquid pool due to the adhesion of the raw material solution mist MT to the inner wall of the mist supply pipe 12.

[0061] As described above, in the mist deposition apparatus 52 of the second embodiment, the mist supply direction D2 of the mist supply pipe 12 has a positive elevation angle in the entire region including the partial supply direction D21 and the partial supply direction D22. Therefore, it is possible to reliably avoid the occurrence of liquid accumulation due to the raw material solution mist MT accumulating in the mist supply pipe 12.

[0062] As a result, the mist deposition apparatus 52 of the second embodiment can improve the quality and usage efficiency of the raw material solution mist MT that is transported by the mist supply pipe 12 and supplied to the outside from the mist outlet 18 of the nozzle 8.

[0063] Furthermore, since the nozzle 8 in the mist deposition apparatus 52 of the second embodiment has the mist outlet 18 on the upper surface, it is possible to effectively suppress the occurrence of liquid accumulation due to the raw material solution mist MT accumulating at the mist outlet 18 and its periphery in the nozzle 8.

[0064] This is because even if the raw material solution mist MT temporarily adheres to the mist outlet 18 and its periphery in the nozzle 8, it will quickly fall due to gravity.

[0065] In addition, since the nozzle 8 has the discharge pipe 81, even if the raw material solution mist MT accumulates due to the adhesion of the raw material solution mist MT to the lower surface of the nozzle 8 and a liquid accumulation occurs, the liquid accumulation can be discharged from the discharge pipe 81.

[0066] Therefore, the mist deposition apparatus 52 of the second embodiment can suppress the deterioration of the quality of the raw material solution mist MT supplied from the nozzle 8 to the outside.

[0067] In addition, in the mist deposition apparatus 52 of the second embodiment, since it has two partial supply directions D21 and D22 of the mist supply pipe 12, the degree of freedom in the arrangement of the ultrasonic nebulizer 1 and the nozzle 8 can be increased.

[0068] Furthermore, since the mist supply pipe 12 has an inner wall that has been subjected to a water-repellent treatment similar to the mist supply pipe 11 of the first embodiment, the raw material solution mist MT adhering to the inner wall flows in the reverse direction through the mist supply pipe 12, and finally the liquid return efficiency of flowing back into the container of the ultrasonic nebulizer 1 can be increased.

[0069] <Embodiment 3> FIG. 3 is an explanatory diagram schematically showing the configuration of a mist film-forming apparatus 53 according to Embodiment 3 of the present disclosure. The mist film-forming apparatus 53 serves as the film-forming apparatus of the present disclosure.

[0070] Hereinafter, the same contents as those of the mist film-forming apparatus 51 shown in FIG. 1 and the mist film-forming apparatus 52 shown in FIG. 2 will be described with the same reference numerals and the description will be appropriately omitted as needed, and the description will focus on the characteristic parts of the mist film-forming apparatus 53 of Embodiment 3.

[0071] The ultrasonic nebulizer 1 takes in the carrier gas G4 into the container from the gas supply unit 4, and conveys the raw material solution mist MT toward the mist supply port 16 of the nozzle 9 through the mist supply pipe 13 by the carrier gas G4.

[0072] The nozzle 9 has a column structure, has a mist supply port 16 on the lower surface, and has a mist outlet 18 on the upper surface. The terminal end (the upper end in the figure) of the mist supply pipe 13 is connected to the mist supply port 16. The nozzle 9 receives the raw material solution mist MT from the mist supply port 16 through the mist supply pipe 13, and supplies the raw material solution mist MT upward from the mist outlet 18.

[0073] The nozzle 9 has a discharge pipe 81 on the side surface on the lower surface side. The discharge pipe 81 is provided to discharge the residue inside the nozzle 9. As the residue of the nozzle 9, a liquid pool formed by the collection of the raw material solution mist MT can be considered. It is desirable that the discharge pipe 81 provided on the side surface of the nozzle 9 be closer to the lower surface of the nozzle 9.

[0074] The mist deposition apparatus 53 of Embodiment 3 with such a configuration forms a thin film on the back surface of the substrate 22 to be deposited by applying the raw material solution mist MT to the back surface of the substrate 22. The substrate 22 is disposed above the mist outlet 18.

[0075] As shown in FIG. 3, in the mist deposition apparatus 53 of Embodiment 3, the mist supply direction D3 of the mist supply pipe 13 is single and the elevation angle is constant at 90°. Further, the mist supply pipe 13 has an inner diameter of 35.7 mm. It is desirable that the inner diameter of the mist supply pipe 14 be 23 mm or more.

[0076] Also, the mist supply pipe 13 has an inner wall that is subjected to a water repellent treatment in the same manner as the mist supply pipe 11 of Embodiment 1.

[0077] Thus, in the mist supply pipe 13, the mist supply direction D3 has a positive value with the water elevation angle exceeding 0° in the entire region.

[0078] Therefore, even if the raw material solution mist MT adheres to the inner wall of the mist supply pipe 13, the liquid component of the adhered raw material solution mist MT moves in the reverse direction inside the mist supply pipe 13 by gravity and finally flows back into the container of the ultrasonic nebulizer 1.

[0079] Therefore, in the mist deposition apparatus 53 of Embodiment 3, due to the adhesion of the raw material solution mist MT to the inner wall of the mist supply pipe 13, the raw material solution mist MT does not collect to form a liquid pool.

[0080] As described above, the mist supply direction D3 of the mist supply pipe 13 in the mist deposition apparatus 53 of Embodiment 3 has a positive elevation angle in the entire region. Therefore, it is possible to surely avoid the occurrence of a liquid pool due to the collection of the raw material solution mist MT in the mist supply pipe 13.

[0081] As a result, the mist deposition apparatus 53 of Embodiment 3 can improve the quality and usage efficiency of the raw material solution mist MT that is conveyed by the mist supply pipe 13 and supplied to the outside from the mist outlet 18 of the nozzle 9.

[0082] Furthermore, since the nozzle 9 in the mist deposition apparatus 53 of Embodiment 3 has a mist outlet 18 on its upper surface, it is possible to effectively suppress the occurrence of liquid accumulation caused by the raw material solution mist MT collecting at the mist outlet 18 and its periphery inside the nozzle 9.

[0083] In addition, since the nozzle 9 has a discharge pipe 81, even if a liquid accumulation occurs due to the collection of the raw material solution mist MT caused by the adhesion of the raw material solution mist MT on the lower surface of the nozzle 9, the liquid accumulation can be discharged from the discharge pipe 81.

[0084] Therefore, the mist deposition apparatus 53 of Embodiment 3 can suppress the deterioration of the quality of the raw material solution mist MT supplied from the nozzle 9 to the outside.

[0085] In the mist supply pipe 13 of the mist deposition apparatus 53 of Embodiment 3, since the elevation angle in the mist supply direction D3 is constant at the steepest 90°, the occurrence of the above-mentioned liquid accumulation can be most reliably avoided.

[0086] In addition, by setting the pipe diameter of the mist supply pipe 13 to a sufficiently wide 35.7 mm, the flow of the raw material solution mist MT from the mist supply pipe 13 toward the nozzle 9 is not obstructed.

[0087] This is because, by making the pipe diameter of the mist supply pipe 13 sufficiently wide, even if there is a raw material solution mist MT that naturally falls inside the mist supply pipe 13 from the mist supply port 16 of the nozzle 9, the original flow of the raw material solution mist MT from the mist supply pipe 13 toward the nozzle 9 is not obstructed.

[0088] In addition, in order to surely ensure the original flow of the raw material solution mist MT from the mist supply pipe 13 toward the nozzle 9, it is desirable that the pipe diameter (inner diameter) of the mist supply pipe 13 be 23 mm or more.

[0089] Furthermore, since the mist supply pipe 13 has an inner wall subjected to a water-repellent treatment similar to the mist supply pipe 11 of the first embodiment, the raw material solution mist MT adhering to the inner wall can flow in the reverse direction in the mist supply pipe 13, and finally, the liquid return efficiency of flowing back into the container of the ultrasonic nebulizer 1 can be increased.

[0090] <Embodiment 4> FIG. 4 is an explanatory diagram schematically showing the configuration of a mist film forming apparatus 54 according to Embodiment 4 of the present disclosure. The film forming apparatus of the present disclosure becomes the mist film forming apparatus 54.

[0091] Hereinafter, the same contents as those of the mist film forming apparatus 51 shown in FIG. 1, the mist film forming apparatus 52 shown in FIG. 2, and the mist film forming apparatus 53 shown in FIG. 3 will be described with the same reference numerals, and the description will be appropriately omitted, and the description will be centered on the characteristic portions of the mist film forming apparatus 54 of Embodiment 4.

[0092] The ultrasonic nebulizer 1 takes in the carrier gas G4 into the container from the gas supply unit 4, and conveys the raw material solution mist MT toward the mist supply port 16 of the nozzle 9 through the mist supply pipe 14 by the carrier gas G4.

[0093] The nozzle 9 has a column structure, has a mist supply port 16 on the lower surface, and has a mist outlet 18 on the upper surface. The terminal end (the upper end portion in the figure) of the mist supply pipe 14 is connected to the mist supply port 16. The nozzle 9 receives the raw material solution mist MT from the mist supply port 16 through the mist supply pipe 14, and supplies the raw material solution mist MT upward from the mist outlet 18.

[0094] The nozzle 9 has a discharge pipe 81 on the side surface on the lower surface side. The discharge pipe 81 is provided to discharge the residue inside the nozzle 9. It is desirable that the discharge pipe 81 provided on the side surface of the nozzle 9 be closer to the lower surface of the nozzle 9.

[0095] The mist film forming apparatus 54 of Embodiment 4 with such a configuration forms a thin film on the back surface of the substrate 22 to be film-formed by applying the raw material solution mist MT to the back surface of the substrate 22. The substrate 22 is disposed above the mist outlet 18.

[0096] As shown in FIG. 4, in the mist film forming apparatus 54 of Embodiment 4, the mist supply direction D4 of the mist supply pipe 14 includes three partial supply directions D41 to D43. The elevation angle of the partial supply direction D41 is 90°, the elevation angle of the partial supply direction D42 is about 25°, and the elevation angle of the partial supply direction D43 is 90°.

[0097] The partial supply directions D41 to D43 are continuous in the order of D41, D42, and D43, and the elevation angles of the partial supply directions D41 to D43 are positive values.

[0098] Further, the mist supply pipe 14 has an inner wall that is subjected to a water repellent treatment in the same manner as the mist supply pipe 11 of Embodiment 1.

[0099] Thus, in the mist supply pipe 14, the mist supply direction D4 including the partial supply directions D41 to D43 has a positive value with a water elevation angle exceeding 0° in the entire region.

[0100] Therefore, even if the raw material solution mist MT adheres to the inner wall of the mist supply pipe 14, the liquid component of the adhered raw material solution mist MT moves in the reverse direction inside the mist supply pipe 14 by gravity and finally flows back into the container of the ultrasonic nebulizer 1.

[0101] Therefore, in the mist film forming apparatus 54 of Embodiment 4, due to the adhesion of the raw material solution mist MT to the inner wall of the mist supply pipe 14, the raw material solution mist MT does not accumulate to form a liquid pool.

[0102] As described above, in the mist deposition apparatus 54 of the fourth embodiment, the mist supply direction D4 of the mist supply pipe 14 has a positive elevation angle in the entire region including the partial supply direction D41 and the partial supply direction D42. Therefore, it is possible to reliably avoid the occurrence of liquid accumulation due to the raw material solution mist MT accumulating in the mist supply pipe 14.

[0103] As a result, the mist deposition apparatus 54 of the fourth embodiment can improve the quality and usage efficiency of the raw material solution mist MT that is conveyed by the mist supply pipe 14 and supplied to the outside from the mist outlet 18 of the nozzle 9.

[0104] Furthermore, since the nozzle 9 in the mist deposition apparatus 54 of the fourth embodiment has the mist outlet 18 on the upper surface, it is possible to effectively suppress the occurrence of liquid accumulation due to the raw material solution mist MT accumulating in the nozzle 9 at the mist outlet 18 and its periphery.

[0105] In addition, since the nozzle 9 has the discharge pipe 81, it is possible to suppress the quality deterioration of the raw material solution mist MT supplied from the nozzle 9 to the outside, similar to the mist deposition apparatus 52 of the second embodiment.

[0106] Furthermore, in the mist deposition apparatus 54 of the fourth embodiment, since the mist supply pipe 14 has three partial supply directions D41 to D43, the degree of freedom in the arrangement of the ultrasonic nebulizer 1 and the nozzle 9 can be increased.

[0107] In addition, since the inner wall of the mist supply pipe 14 is subjected to a water repellent treatment in the same manner as the mist supply pipe 11 of the first embodiment, the liquid return efficiency of the raw material solution mist MT adhering to the inner wall flowing in the reverse direction of the mist supply pipe 14 and finally flowing back into the container of the ultrasonic nebulizer 1 can be increased.

[0108] <Others> Although the present disclosure has been described in detail, the above description is illustrative in all aspects and the present disclosure is not limited thereto. It is understood that numerous variations not illustrated can be envisioned without departing from the scope of the present disclosure.

[0109] For example, in the above-described embodiment, the bent portions where the partial supply direction changes were "0" to "2", but bent portions of "3" or more may be set. In the above-described embodiment, the supply directions of the mist supply pipes 11 to 14 all had linear components, but a curved line segment may be provided for at least a part of the mist supply pipe under the condition that the elevation angle is a positive value.

Explanation of Reference Numerals

[0110] 1 Ultrasonic nebulizer 4 Gas supply unit 7 - 9 Nozzles 11 - 14 Mist supply pipes 15, 16 Mist supply ports 17, 18 Mist ejection ports 21, 22 Base materials 81 Drain pipe D1 - D4 Mist supply directions

Claims

1. A film forming apparatus comprising an ultrasonic atomizer that applies ultrasonic vibration to a raw material solution to generate a raw material solution mist, and a mist supply pipe for transporting the raw material solution mist generated by the ultrasonic atomizer, wherein the mist supply direction of the mist supply pipe has a positive value with an elevation angle exceeding 0° which is an angle upward with respect to the horizontal direction in the entire region. Film forming apparatus.

2. The film forming apparatus according to Claim 1, further comprising a nozzle that receives the raw material solution mist from a mist supply port through the mist supply pipe and supplies the raw material solution mist to the outside from a mist outlet. Film forming apparatus.

3. The film forming apparatus according to Claim 2, wherein the nozzle has a column structure, and the nozzle has the mist outlet on the upper surface and supplies the raw material solution mist upward from the mist outlet. Film forming apparatus.

4. The film forming apparatus according to Claim 3, wherein the nozzle further has a discharge pipe for discharging residues inside. Film forming apparatus.

5. The film forming apparatus according to any one of Claims 2 to 4, wherein the mist supply direction includes a plurality of partial supply directions with different elevation angles for each, and the elevation angle of each of the plurality of mist supply directions is a positive value. Film forming apparatus.

6. The film forming apparatus according to Claim 3 or Claim 4, wherein the mist supply direction is a single mist supply direction, the elevation angle of the mist supply direction is 90°, and the nozzle has the mist supply port on the lower surface. Film forming apparatus.

7. The film forming apparatus according to Claim 6, wherein the inner diameter of the mist supply pipe is set to 23 mm or more. Film forming apparatus.

8. The film forming apparatus according to any one of Claims 1 to 4, wherein the mist supply pipe has an inner wall subjected to a water repellent treatment. Film forming apparatus.

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