Modular Foreline System

Abstract

A kit of parts for forming a foreline (112) for connecting a process chamber (108) to a vacuum pump and / or an abatement system (110), the kit comprising a plurality of foreline segments (122, 124), each of the foreline segments (122, 124) having a substantially straight first tip end (122a, 124a); a substantially straight second tip end (122b, 124b) opposite the first tip end (122a, 124a); and a respective curved portion (122d- and an intermediate portion (122c, 124c) connected to the first tip portion (122a, 124a) and the second tip portion (122b, 124b) by ends (124e, 124d-e), wherein the first tip portion (122a, 124a) and the second tip portion (122b, 124b) are substantially parallel to one another and the intermediate portion (122c, 124c) is oblique to the first tip portion (122a, 124a) and the second tip portion (122b, 124b), and the foreline segments (122, 124) are configured to be attached together to form a continuous foreline (112).

Description

[Technical Field]

[0001] The present invention relates to a modular foreline system for forming a foreline for connecting a process chamber in a semiconductor fabrication factory to a vacuum pump and / or abatement system. [Background technology]

[0002] Semiconductor foundries manufacture integrated circuit chips, and many processes, such as etching processes, performed on silicon wafers involve the use of gaseous environments and often require high vacuum and reduced gas pressure. Vacuum pumps are used to reduce the pressure of gases within the process chamber, to evacuate the chamber, and to maintain the flow of process gases. The vacuum pump is connected to the process chamber by a foreline. Summary of the Invention [Means for solving the problem]

[0003] In one aspect, a modular system of foreline components is provided that can be coupled together to provide a foreline for a vacuum pumping system. The modular system allows for the foreline to be constructed from standard components.

[0004] In a first aspect, a parts kit for forming a foreline for connecting a process chamber to a vacuum pump and / or an abatement system is provided. The kit includes a plurality of foreline segments. Each foreline segment is a pipe including a first substantially straight end portion, a second substantially straight end portion opposite the first end portion, and an intermediate portion disposed between the first and second end portions and connected to the first and second end portions by respective bends. The first and second end portions are substantially parallel to each other. The intermediate portion is oblique to the first and second end portions. The foreline segments of the plurality of foreline segments are configured to be attached together to form a continuous foreline.

[0005] The first substantially straight tip portion, the second substantially straight tip portion, and the intermediate portion may be integrally formed.

[0006] Each foreline segment may be a pipe, conduit, or tubing. Each foreline segment may be provided with a respective means for heating the foreline segment, the heating of each foreline segment being independently controllable.

[0007] The kit of parts may further include one or more additional foreline segments, each additional foreline segment being a substantially straight pipe, the additional foreline segments configured to be attached to the foreline segment and to each other to form a continuous foreline. Each additional foreline segment may include a respective means for heating the additional foreline segment, and the heating of each additional foreline segment is independently controllable.

[0008] Each of the one or more additional foreline segments may have a length that is 10 times or greater than the diameter of the additional foreline segment. The intermediate portion may have a length that is 10 times or more the diameter of the intermediate portion.

[0009] The angle between the first tip portion and the intermediate portion can be between 30° and 60°. The angle between the second tip portion and the intermediate portion can be between 30° and 60°. These angles can be the same. The angle(s) can be approximately 45°.

[0010] Each of the plurality of foreline segments may have a diameter selected from the range of diameters consisting of 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm, and 300 mm.

[0011] The kit of parts may further comprise one or more elements selected from the group of elements consisting of one or more traps configured to be mounted to each foreline segment, one or more reactors configured to be mounted within each foreline segment, one or more bellows configured to be mounted to the end of each foreline segment, and one or more filters configured to be coupled to each foreline segment. For each foreline segment, the distal end of the first tip portion can include a first flange, and for each foreline segment, the distal end of the second tip portion can include a second flange.

[0012] In a further aspect, a foreline is provided that includes a plurality of foreline segments coupled to the kit of parts of any preceding aspect. The foreline may include exactly two forelines and exactly three additional substantially straight forelines. The foreline segments and additional foreline segments may be attached together in an alternating manner.

[0013] In a further aspect, a system is provided that includes a process chamber, a vacuum pump and / or abatement system, and a foreline attached between the process chamber and the vacuum pump and / or abatement system, the foreline being the foreline of any preceding aspect. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a schematic diagram (not to scale) illustrating a semiconductor fabrication plant with a modular foreline connecting a process chamber to a vacuum pumping system. [Figure 2] FIG. 1 is a schematic diagram (not to scale) illustrating an alternative modular foreline connecting a process chamber to a vacuum pumping system. DETAILED DESCRIPTION OF THE INVENTION

[0015] FIG. 1 is a schematic diagram (not to scale) illustrating a semiconductor manufacturing facility 100 according to one embodiment. The semiconductor manufacturing facility 100 comprises a clean room 102 and a so-called sub-fab 104. The clean room 102 and the sub-fab 104 are separated by a structure 106 that forms the floor of the clean room 102 and the ceiling of the sub-fab 104.

[0016] Clean room 102 is the room in which semiconductor manufacturing takes place. The air within clean room 102 is maintained at typical clean room purity levels by appropriate gas / air filtration and distribution systems (not shown). The clean room 102 includes a plurality of process chambers 108 .

[0017] Each of the process chambers 108 is configured to receive process gas from a process gas supply (not shown) and use the received process gas to perform an etching process that chemically removes a layer from the surface of a wafer located within the process chamber 108.

[0018] The sub-fab 104 is located directly below the clean room 102. The sub-fab 104 may be a room in which an air cleanliness level above a predetermined threshold is maintained. The sub-fab 104 includes a number of gas pumping stations 110 .

[0019] In this embodiment, the gas pumping stations 110 include one or more vacuum pumps and may further include an abatement device. Each gas pumping station 110 is connected to a respective one of the process chambers 108 by a respective foreline or suction line 112. Each foreline 112 extends between a respective pair of gas pumping stations 110 and the process chamber 108. Each foreline 112 passes through a respective opening 114 in the structure 106.

[0020] Each gas pump station 110 is configured to evacuate and maintain a controlled flow of gases within the connected process chamber 108. Each gas pump station 110 is configured to exhaust exhaust gases from the connected process chamber 108 via a respective foreline 112. Additionally, each gas pump station 110 may be configured to discard this exhaust gas.

[0021] In this embodiment, each foreline 112 is a modular foreline formed from multiple modules or modular components. In other words, each foreline 112 is formed from a kit of parts. Specifically, in this embodiment, each foreline 112 includes multiple foreline segments: first foreline segment 121, second foreline segment 122, third foreline segment 123, fourth foreline segment 124, and fifth foreline segment 125.

[0022] Each of the foreline segments 121-125 includes a respective pair of flanges, one at each end of the foreline segment 121-125. Specifically, the first foreline segment 121 includes a first flange 1211 at its first end and a second flange 1212 at its second end. The second foreline segment 122 includes a first flange 1221 at its first end and a second flange 1222 at its second end. The third foreline 123 segment includes a first flange 1231 at its first end and a second flange 1232 at its second end. The fourth foreline 124 segment includes a first flange 1241 at its first end and a second flange 1242 at its second end. The fifth foreline 125 segment includes a first flange 1251 at its first end and a second flange 1252 at its second end. Each of the flanges surrounds a respective opening in the foreline segment.

[0023] The foreline segments 121-125 are connected as follows: a first flange 1211 at a first end of the first foreline segment 121 is connected to the respective process chamber 108; a second flange 1212 at a second end of the first foreline segment 121 is connected to a first flange 1221 at a first end of the second foreline segment 122; a second flange 1222 at a second end of the second foreline segment 122 is connected to a first flange 1231 at a first end of the third foreline segment 123; and a second flange 1232 at a second end of the third foreline segment 123 is connected to a first flange 1241 at a first end of the fourth foreline segment 124. A second flange 1242 at the second end of the fourth foreline segment 124 is connected to a first flange 1251 at the first end of the fifth foreline segment 125. A second flange 1252 at the second end of the fifth foreline segment 125 is coupled to the respective gas pump station 110. The connection between the flanges coupled together can be made by, for example, bolts passing through the flanges.

[0024] The flanges 1221-1252 can be configured to provide a vacuum compatible seal between the foreline segments that are coupled together. The flanges 1221-1252 can conform to any suitable standard, such as an ISO standard for flanges. In this embodiment, the foreline segments 121-125 are configured so that the flanges 1221-1252 are substantially horizontal.

[0025] Each of the foreline segments 121-125 can be considered a pipe having a substantially circular cross-section. The diameters of the foreline segments 121-125 can be substantially the same. The diameter of each foreline segment 121-125 can be between approximately 40 mm and 200 mm. For example, the diameters can be standard ISO diameters of 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm, or 300 mm.

[0026] In this embodiment, the first foreline segment 121, the third foreline segment 123, and the fifth foreline segment 125 are substantially straight foreline segments, i.e., substantially straight pipes. The first foreline segment 121, the third foreline segment 123, and the fifth foreline segment 125 are vertically oriented.

[0027] The length of each of the first foreline segment 121, the third foreline segment 123, and the fifth foreline segment 125 is preferably at least 10 times its diameter. For example, a straight foreline segment having a diameter of about 100 mm can have a length of at least 1 meter.

[0028] In this embodiment, the second foreline segment 122 and the fourth foreline segment 124 may be identical to one another. The second foreline segment 122 and the fourth foreline segment 124 are non-straight, i.e., curved, foreline segments.

[0029] Specifically, in this embodiment, the second foreline segment 122 and the fourth foreline segment 124 each include a substantially straight first tip portion 122a, 124a, a substantially straight second tip portion 122b, 124b opposite the first tip portion 122a, 124a, and an intermediate portion 122c, 124c disposed between the first tip portion 122a, 124a and the second tip portion 122b, 124b. The intermediate portions 122c, 124c are connected to the first tip portion 122a, 124a by first curved portions 122d, 124d. The intermediate portions 122c, 124c are connected to the second tip portions 122b, 124b by second curved portions 122e, 124e. The first tip portions 122a, 124a and the second tip portion 122b are substantially parallel to each other, and the intermediate portions 122c, 124c are oblique to the first tip portions 122a, 124a and the second tip portions 122b, 124b.

[0030] The second foreline segment 122 and the fourth foreline segment 124 are arranged such that the first tip portions 122a, 124a and the second tip portions 122b, 124b are vertically aligned.

[0031] In this embodiment, angle 131 between tip portions 122a, 124a, 122b, 124b and intermediate portions 122c, 124c disposed therebetween can be between approximately 30° and 60°. For example, angle 131 can be approximately 30°, approximately 35°, approximately 40°, approximately 45°, approximately 50°, approximately 55°, or approximately 60°. More preferably, angle 131 is 45°. In some embodiments, angle 131 is between approximately 35° and approximately 55°. In some embodiments, angle 131 is between approximately 40° and 50°.

[0032] The length of each intermediate portion 122c, 124c is preferably at least 10 times its diameter, for example, for a straight intermediate portion having a diameter of about 100 mm, it may have a length of at least 1 m.

[0033] For the multiple forelines 112, the first foreline segments 121 of the forelines 112 can be substantially identical to one another. The second foreline segments 122 of the forelines 112 can be substantially identical to one another. The third foreline segments 123 of the forelines 112 can be substantially identical to one another. The fourth foreline segments 124 of the forelines 112 can be substantially identical to one another. The fifth foreline segments 125 of the forelines 112 can be substantially identical to one another.

[0034] In some embodiments, the first foreline segment 121 is substantially identical to the third foreline segment 122. In some embodiments, the first foreline segment 121 is substantially identical to the fifth foreline segment 125. In some embodiments, the second foreline segment 122 is substantially identical to the fourth foreline segment 124.

[0035] In this embodiment, each of the foreline segments 121-125 has a respective vertical length, or height. Specifically, the first foreline segment 121 has a first vertical length 141, the second foreline segment 122 has a second vertical length 142, the third foreline segment 123 has a third vertical length 143, the fourth foreline segment 124 has a fourth vertical length 144, and the fifth foreline segment 125 has a fifth vertical length 145.

[0036] Preferably, all of the vertical lengths 141-145 of the foreline segments 121-125 are each equal to an integer multiple of a common value D, where D can have any suitable value. The value D can be, for example, a value in the range of 10 mm-200 cm, more preferably 10 mm-100 cm, more preferably 10 mm-90 cm, more preferably 10 mm-50 cm, more preferably 10 mm-20 cm, more preferably 10 mm-5 cm, more preferably 20 mm-50 mm, or more preferably 30 mm-40 mm. Example values of x include, but are not limited to, 10 mm, 11 mm, 22 mm, 40 mm, 41 mm, 42 mm, 43 mm, 44 mm, 45 mm, 46 mm, 47 mm, 48 mm, 49 mm, 50 mm, 88 mm, 176 mm, 352 mm, 704 mm, 11 cm, 22 cm, 100 cm, 175 cm, 200 cm, etc. Preferably, D is equal to or about 44 mm. The exact value chosen for D is rather unimportant and any suitable value can be chosen.

[0037] In some embodiments, the vertical lengths 141-145 of the foreline segments 121-125 are all equal, for example, equal to x. Thus, the vertical height of the foreline 112 is 5x. The height x may be any suitable value, for example, 1 meter.

[0038] In some embodiments, the vertical lengths 141-145 of the foreline segments 121-125 are not all equal. For example, the first, third, and fifth segments 121, 123, 125 may have a vertical height of x, while the second and fourth segments 122, 124 may have a vertical height of y, where y is not equal to x. Thus, the vertical height of the foreline 112 is 3x + 2y. The height x may be any suitable value. The height y may be any suitable value.

[0039] In this embodiment, each foreline 112 can be thought of as a modular pipe or conduit with alternating straight and non-straight sections that are removably attached. There are three straight sections and two non-straight sections in each foreline 112. Each foreline 112 is a pipe that includes multiple bends. Preferably, the bends are not sharp bends, but rather gradual bends with angles as described above.

[0040] Figure 2 is a schematic diagram (not to scale) illustrating an alternative modular foreline connecting a process chamber and a vacuum pumping system. In Figure 2, elements that are the same as those shown in Figure 1 and described in more detail above are designated with the same reference numerals as in Figure 1 and will not be described again for the sake of brevity.

[0041] In this embodiment, the modular foreline 112 further comprises a plurality of traps 200 and a plurality of in-line reactors 202. Accordingly, the kit of parts from which the foreline 112 is constructed further comprises a plurality of traps 200 a,b and a plurality of reactors 202 in this embodiment.

[0042] Traps 200a,b may be devices that capture gases or vapors from the exhaust gases pumped through the foreline 112. Traps 200a,b may be any suitable type of trap, including, but not limited to, environmental alumna traps. The traps 200a,b are modular elements that are attachable to and detachable from the foreline sections 121-125. The traps 200a,b can be configured to be attached to the foreline sections in any suitable location.

[0043] In this embodiment, first trap 200a is coupled to second foreline segment 122. Specifically, in this embodiment, second foreline segment 122 further includes an additional opening surrounded by a third flange 1223 (not present in the embodiment shown in FIG. 1 ). Third flange 1223 is disposed vertically downward and opposite first flange 1221 in first curved portion 122d of second foreline segment 122. First trap 200a includes flange 201a coupled to third flange 1223 by, for example, bolts.

[0044] Similarly, in this embodiment, second trap 200b is coupled to fourth foreline segment 124. Specifically, in this embodiment, fourth foreline segment 124 further includes an additional opening surrounded by a third flange 1243 (not present in the embodiment shown in FIG. 1 ). Third flange 1243 is disposed vertically below and opposite first flange 1241 at first curved portion 124d of fourth foreline segment 124. Second trap 200b includes flange 201b coupled to third flange 1243 by, for example, bolts. The traps 200a,b may include valves, for example for maintenance purposes.

[0045] Reactor 202 may be any suitable type of reactor for treating exhaust gases in the foreline, such as a foreline plasma reactor. The reactor 202 is a modular element that is attachable to and detachable from the foreline sections 121-125. The reactor 202 may be installable within the foreline sections 121-125. In this embodiment, the reactor 202 is disposed within the straight portions of the foreline sections, specifically within the third and fifth foreline sections 123, 125.

[0046] Thus, a modular system for constructing the foreline of a vacuum pumping system is provided. Advantageously, the modules (i.e., foreline subsections and ancillary equipment) can be easily and efficiently arranged and attached together to provide a number of different system configurations. Several different example configurations are shown in FIG. 1 . This advantageously allows a degree of flexibility and adjustment with respect to the positioning of the gas pumping systems relative to each other and to the process chamber. For example, using the above system, it is easier to space the gas pumping systems farther apart than would be possible using a straight foreline. This facilitates maintenance and repair of the gas pumping systems.

[0047] Modules can be manufactured and prepared in advance of system design and installation, reducing costs and lead times. The space (or footprint) occupied by an installed vacuum pump and / or abatement system is a rather important factor in system design. A reduced footprint tends to translate into lower costs and / or increased productivity. Advantageously, the modular systems described above tend to allow for greater control over the footprint of an installed system.

[0048] The modular system described above tends to expedite the manufacture and installation of forelines in semiconductor fabrication factories. The modular system is a kit of parts containing multiple pipes, each of which has a standard length and diameter. This kit allows for the construction of multiple forelines, each of which still has the same number of curved and straight sections as the other forelines, but can have different shapes or configurations. Therefore, forelines of different configurations / shapes tend to provide substantially the same vacuum performance as each other. This facilitates chamber matching, i.e., matching performance between multiple different process chambers.

[0049] Traditionally, highly diverse custom forelines have made it difficult to implement a temperature management system (TMS). It is also relatively difficult to ensure consistent quality control of custom forelines. The modular foreline system described above makes it easy to solve these problems.

[0050] The above-described modular foreline systems tend to allow for consistent geometry and conductance for each process chamber, support fab / sub-fab layout variations, accommodate standardized interfaces and size (diameter and length) increases, facilitate the inclusion of integrated TMS with metrology, allow the inclusion of foreline traps / deadlegs, facilitate foreline cleaning, repair and maintenance, and support the attachment of instrumentation and leak testing means.

[0051] In the above embodiment, the modular foreline system, i.e., kit of parts, includes a plurality of straight segments (e.g., first, third, and fifth segments) and a plurality of segments with multiple curves (e.g., second and fourth segments). However, in other embodiments, the kit includes different parts. In some embodiments, the straight segments can be omitted. In some embodiments, segments of different shapes can be included, for example, a segment with only a single curve.

[0052] In the above embodiment, each foreline includes exactly three straight segments and exactly two segments with multiple curves, which are attached together in an alternating pattern. However, in other embodiments, each foreline includes a different number of straight segments (e.g., none, fewer than three, four or more) and / or a different number of segments with multiple curves (e.g., one, three or more). The segments comprising a foreline can be attached together in a different configuration, for example, other than the alternating arrangement shown in Figures 1 and 2.

[0053] In the above embodiments, the foreline segments of the modular system are unheated, i.e., do not include respective heating means for heating gas passing through the segment. However, in other embodiments, one or more, and more preferably all, of the foreline segments of the modular system are heated, i.e., include respective heating means for heating gas passing through the segment. Examples of heating means include, but are not limited to, jackets wrapped around a pipe segment and controllable to heat the pipe segment. Preferably, each heating means is controllable independently of the others. Thus, the assembled foreline includes multiple, independently controllable heating zones along its length.

[0054] In certain of the above embodiments, the modular foreline system, i.e., kit of parts, includes one or more traps and one or more reactors. In some embodiments, the traps are omitted, and in some embodiments, the reactors are omitted. In other embodiments, the modular foreline system includes one or more different types of devices instead of or in addition to the traps and / or reactors. Examples of different types of devices that can be included in the kit include, but are not limited to, filters (such as in-line filters for mounting within segments), bellows sections to provide variable length mounting between devices / segments, temperature sensors, pressure sensors, heating controls, temperature management systems, etc. [Explanation of symbols]

[0055] 100 semiconductor manufacturing plants 102 Clean Room 104 Sub-Fab 106 Structure 108 Process Chamber 110 Gas Pump Station 112 Foreline 114 Aperture 121 First Foreline Segment 122 Second Foreline Segment 123 Third Foreline Segment 124 Fourth Foreline Segment 125 5th Foreline Segment 1211-1252 flange 122a: first tip portion of second foreline segment 122b second tip portion of second foreline segment 122c Middle portion of second foreline segment 122d first bend of second foreline segment 122e second curved portion of second foreline segment 124a: first tip portion of fourth foreline segment 124b second tip portion of fourth foreline segment 124c Mid-portion of fourth foreline segment 124d First bend of fourth foreline segment 124e Second bend of fourth foreline segment 131 angle 141 First Vertical Length 142 Second Vertical Length 143 Third Vertical Length 144 Fourth Vertical Length 145 Fifth Vertical Length 200a, b trap 201a, b flange 202 Reactor

Claims

1. 1. A kit of parts for forming a foreline for connecting a process chamber to a vacuum pump and / or an abatement system, comprising: The kit comprises a plurality of foreline segments; Each of the foreline segments comprises: a substantially straight first tip portion; a substantially straight second tip portion opposite the first tip portion; and a middle section disposed between the first tip section and the second tip section and connected to the first tip section and the second tip section by respective bends; the first tip portion and the second tip portion are substantially parallel to each other; the intermediate portion is oblique to the first tip portion and the second tip portion; the foreline segments of the plurality of foreline segments are configured to be attached together to form a continuous foreline; the kit of parts further comprising one or more additional foreline segments, each of the additional foreline segments being a substantially straight pipe, the additional foreline segments configured to be attached to the foreline segments and to each other to form a continuous foreline; the vertical length of each of the foreline segments and the vertical length of each of the additional foreline segments are all each equal to an integer multiple of a common value; A parts kit characterized by:

2. each of the foreline segments includes a respective means for heating the foreline segment, and heating of each of the foreline segments is independently controllable; 10. The kit of parts of claim 1.

3. each of the additional foreline segments includes a respective means for heating the additional foreline segment, and heating of each of the additional foreline segments is independently controllable; 3. A kit of parts according to claim 1 or 2.

4. each of the one or more additional foreline segments having a length that is 10 times or greater than a diameter of the additional foreline segment; A kit of parts according to any one of claims 1 to 3.

5. The intermediate portion has a length that is 10 times or more the diameter of the intermediate portion. A kit of parts according to any one of claims 1 to 4.

6. the angle between the first tip portion and the intermediate portion and the angle between the second tip portion and the intermediate portion are between 30° and 60°; A kit of parts according to any one of claims 1 to 5.

7. The angle is 45°.

7. The kit of parts of claim 6.

8. each of the plurality of foreline segments having a diameter selected from the range of diameters consisting of 40 mm, 63 mm, 80 mm, 100 mm, 160 mm, 200 mm, 250 mm, and 300 mm; A kit of parts according to any one of claims 1 to 7.

9. one or more traps configured to be attached to each foreline segment; one or more reactors configured to be mounted within each foreline segment; one or more bellows configured to be attached to an end of each foreline segment; one or more filters configured to be coupled to each foreline segment; further comprising one or more elements selected from the group of elements consisting of: A kit of parts according to any one of claims 1 to 8.

10. For each of the foreline segments, the distal end of the first tip portion includes a first flange and the distal end of the second tip portion includes a second flange. A kit of parts according to any one of claims 1 to 9.

11. A foreline comprising a plurality of foreline segments connected together from a parts kit according to any one of claims 1 to 10.

12. the foreline comprising exactly two foreline segments and exactly three additional substantially straight foreline segments; A foreline according to claim 11 when dependent on claim 2.

13. the foreline segments and the additional foreline segments are attached together in an alternating manner; The foreline of claim 12.

14. a process chamber; a vacuum pump and / or abatement system; a foreline attached between the process chamber and the vacuum pump and / or abatement system, 14. A system wherein the foreline is a foreline according to any one of claims 11 to 13.

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