Temperature control device and temperature control method

Abstract

To provide a technique for optimizing the amount of feed-forward and improving temperature control performance.SOLUTION: A temperature control device includes: an acquisition unit that acquires first data that are time-series data of a target value, the amount of operation, and a measured value by feedback control and second data that are time-series data of a measurement value obtained by applying a predetermined amount of operation to a control target; a prediction unit that predicts a relation between the amount of operation and the measured value, based on a plurality of second data; and a generation unit that generates feed-forward information including time-series data of the amount of feed-forward to be applied to the control target, based on the first data and the relation between the amount of operation predicted by the prediction unit and the measured value.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a temperature control device and a temperature control method. [Background technology]

[0002] Feedback control such as PID control adjusts the manipulated variable after the measured value changes due to disturbances, etc. For this reason, with feedback control, it is difficult to avoid delays in control response, which causes disturbances in the controlled variable. In order to improve the control response, manual feedforward control is sometimes used. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2010-218007 Summary of the Invention [Problem to be solved by the invention]

[0004] However, manual feedforward control can increase the amount of adjustment work required. Furthermore, feedforward control is subject to various environmental changes, such as when the initial temperature changes due to fluctuations in the standby time of a heater that heats the controlled object, or when the controlled object changes. Therefore, the temperature control performance achieved by feedforward control may not be adequately improved.

[0005] An object of one aspect of the present invention is to provide a technique for optimizing the feedforward amount and improving temperature control performance. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention employs the following configuration.

[0007] A first aspect of the present disclosure is a temperature control device including: an acquisition unit that acquires first data, which is time series data of target values, manipulated variables, and measured values obtained by feedback control, and second data, which is time series data of measured values obtained by applying a predetermined manipulated variable to a control object; an estimation unit that estimates a relationship between the manipulated variables and the measured values based on a plurality of second data; and a generation unit that generates feedforward information including time series data of a feedforward variable to be applied to the control object based on the first data and the relationship between the manipulated variables and the measured values estimated by the estimation unit.

[0008] The measurement value of the first data is a measurement value actually measured by the controlled device through feedback control. The target value and manipulated variable of the first data are a target value and manipulated variable when the measurement value is actually measured. The measurement value of the second data is a measurement value actually measured by the controlled device for a predetermined manipulated variable. The predetermined manipulated variable is a specific manipulated variable selected to estimate the relationship between the manipulated variable and the measurement value. The temperature control device can estimate a measurement value for a manipulated variable different from the predetermined manipulated variable based on the measurement value actually obtained for the predetermined manipulated variable. The feedforward information includes information on time series data of the feedforward amount applied to the controlled object. By controlling the temperature of the controlled object using a feedforward amount based on the generated feedforward information, the temperature control device can improve temperature control performance and reduce the amount of work required for the user to adjust the feedforward amount.

[0009] The acquisition unit acquires a target value, a feedforward amount set based on the feedforward information generated by the generation unit, and a measurement value obtained by applying the feedforward amount to the control object. The generation unit may acquire third data, which is time-series data of the above-mentioned temperature control device, and adjust the feedforward information based on the third data. For example, the temperature control device uses the relationship between the manipulated variable and the measured value estimated by the estimation unit to adjust and optimize the feedforward information so that the deviation between the target value and the measured value in the third data is suppressed. By adjusting the feedforward information, the temperature control device can improve temperature control performance.

[0010] The relationship between the manipulated variable and the measurement value estimated by the estimation unit may include time series data of the measurement value estimated when a manipulated variable different from a plurality of predetermined manipulated variables corresponding to each of the plurality of second data is applied to the controlled object. The estimation unit can estimate the measurement value for various manipulated variables based on the plurality of second data. Therefore, it is sufficient to actually measure the measurement value for a limited number of predetermined manipulated variables, and the temperature control device can estimate the measurement value for various manipulated variables to obtain a more appropriate feedforward amount.

[0011] The second data may be time-series data of measured values obtained by applying a predetermined manipulated variable to the controlled object for a predetermined time. By obtaining the second data that takes into account the effect of the time during which the predetermined manipulated variable is applied, the temperature control device can obtain a more appropriate feedforward amount.

[0012] The temperature control device may further include a control unit that switches between a control period using feedback control and a control period using feedforward control. For example, by switching to feedback control in a steady state, the temperature control device can reduce the processing load caused by feedforward control.

[0013] A second aspect of the present invention is a temperature control method including: an acquisition step in which a computer acquires first data, which is time series data of target values, manipulated variables, and measured values obtained by feedback control, and second data, which is time series data of measured values obtained by applying a predetermined manipulated variable to a controlled object; an estimation step in which a relationship between the manipulated variables and the measured values is estimated based on a plurality of second data; and a generation step in which a computer generates feedforward information, which includes time series data of feedforward variables to be applied to the controlled object, based on the first data and the relationship between the manipulated variables and the measured values estimated in the estimation step.

[0014] The present invention can also be understood as a program for realizing such a method or a recording medium on which the program is non-temporarily recorded. Note that the above-mentioned means and processes can be combined with each other to the greatest extent possible to constitute the present invention. [Effects of the Invention]

[0015] According to the present invention, the feedforward amount can be optimized and the temperature control performance can be improved. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram illustrating an application example of a temperature control device according to an embodiment. [Figure 2] FIG. 2 is a diagram illustrating an example of a hardware configuration of the temperature control device. [Figure 3] FIG. 3 is a block diagram illustrating the functional configuration of the temperature control device. [Figure 4] FIG. 4 is a diagram illustrating the temperature control process. [Figure 5] FIG. 5 is a diagram illustrating the effects of PID control and feedforward control. [Figure 6] FIG. 6 is a diagram illustrating the problems in temperature rise control. [Figure 7] FIG. 7 is a diagram illustrating the problem in controlling fluctuations due to disturbances. [Figure 8] FIG. 8 is a diagram illustrating collected data input to the temperature control device. [Figure 9] FIG. 9 is a flowchart illustrating the feedforward information generation process. DETAILED DESCRIPTION OF THE INVENTION

[0017] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to one aspect of the present invention will now be described with reference to the accompanying drawings. However, the present invention is not limited to the following embodiment.

[0018] <Application example> FIG. 1 is a diagram illustrating an application example of a temperature control device according to an embodiment. For example, PID control, a type of feedback control, is a control method for adjusting a manipulated variable based on the deviation between a measured value and a target value, the integral of the deviation, and the derivative of the deviation. In the PID control shown in FIG. 1, it takes a certain amount of time for the measured value PV in temperature rise control to reach the target value SP. Furthermore, in PID control, the measured value PV in temperature fluctuation control due to disturbances begins control after a deviation between the measured value and the target value occurs, so it takes a certain amount of time to suppress the fluctuation range.

[0019] In this embodiment, the temperature control device acquires a feedforward amount for temperature rise control and a feedforward amount when a disturbance occurs based on data collected in advance. By controlling the temperature of the controlled object using the acquired feedforward amount, the temperature control device can improve the response performance of the temperature control.

[0020] The data collected in advance includes time-series data of target values, manipulated variables, and measured values obtained by feedback control such as PID control (hereinafter also referred to as PID control data), and time-series data of measured values when controlled by a predetermined manipulated variable (hereinafter also referred to as model data). The PID control data is an example of "first data." The model data is an example of "second data."

[0021] The predetermined manipulated variable is expressed by, for example, the value of the manipulated variable for the controlled object (e.g., heater output (%)) and the time period during which the manipulated variable is applied. By using multiple model data, the temperature control device can estimate measurement values for various manipulated variables.

[0022] The data collected in advance may also include time-series data (hereinafter also referred to as response data) of the target value, the manipulated variable set by the temperature control device, and the measured value obtained by applying the manipulated variable to the controlled object. The response data is an example of "third data." The collected PID control data, model data, and response data are registered in the temperature control device and stored, for example, in an auxiliary memory unit.

[0023] By controlling the temperature rise using a feedforward amount set based on data collected in advance, the temperature control device can shorten the settling time, which is the time it takes for the temperature to fall within the allowable range from the target value (a1). By speeding up the temperature rise and shortening the settling time, the temperature control device can shorten the time until the next process and improve the production capacity of the controlled device 2.

[0024] By controlling temperature fluctuations caused by disturbances using a feedforward amount obtained based on data collected in advance, the temperature control device can suppress temperature drops (a2).By improving temperature control performance and suppressing temperature fluctuations caused by disturbances, the temperature control device can stabilize the processing quality of the workpiece being controlled.

[0025] <Embodiment> The configuration of the temperature control device will be described with reference to Figures 2 and 3. The temperature control device 1 is, for example, a control computer such as a programmable logic controller (PLC). 2 is a diagram illustrating an example of the hardware configuration of the temperature control device 1. The temperature control device 1 includes a processor 101, a main memory unit 102, an auxiliary memory unit 103, an input unit 104, and an output unit 105.

[0026] The processor 101 reads out a program stored in the auxiliary storage unit 103 into the main storage unit 102 and executes it to realize the functions of the functional components of the temperature control device 1 described in Fig. 3. Some of the functional components of the temperature control device 1 may be realized by dedicated hardware devices such as FPGAs or ASICs.

[0027] The auxiliary storage unit 103 stores data collected in advance to acquire the feedforward amount. The input unit 104 accepts input from an external device. For example, the input unit 104 receives information on the temperature of the controlled object measured by the sensor 202 from the external device. The output unit 105 outputs the feedforward amount generated by the temperature control device 1 to the connected controlled object device 2.

[0028] The controlled device 2 is, for example, a device for machining a workpiece to be controlled. The controlled device 2 includes a heater 201 and a sensor 202. The heater 201 heats the workpiece to be controlled based on the feedforward amount output by the temperature control device 1. The sensor 202 measures the temperature of the controlled object and inputs the measured value to the temperature control device 1.

[0029] 3 is a block diagram illustrating an example of the functional configuration of the temperature control device 1. The temperature control device 1 outputs a feedforward amount based on the generated feedforward information to the controlled device 2 as a manipulated variable MV in a section that is the target of feedforward control.

[0030] The controlled device 2 inputs the temperature of the controlled object (measured value PV) to the temperature control device 1. In the example of Fig. 3, the controlled device 2 inputs information on the measured value PV measured by the sensor 202 to the temperature control device 1 via the temperature input unit 3.

[0031] The temperature control device 1 includes a feedforward information generating unit 110, a feedforward information generating unit 111, a feedforward information generating unit 112, a feedforward information generating unit 113, a feedforward information generating unit 114, a feedforward information generating unit 115, a feedforward information generating unit 116, a feedforward information generating unit 117, a feedforward information generating unit 118, a feedforward information generating unit 119, I The system includes a feedforward control unit 120 and a feedback control unit 130. The feedforward information generation unit 110 generates feedforward information based on data collected by actually controlling the temperature of a controlled object using PID control and a predetermined manipulated variable. The feedforward information is expressed as profile information in which multiple combinations of the manipulated variable by feedforward and the time to which the manipulated variable is applied are defined, for example. The feedforward information generation unit 110 generates feedforward information based on the generated feedforward information. I The feedforward amount is set in the feedforward control unit 120 .

[0032] The feedforward information generation unit 110 includes an acquisition unit 111, an estimation unit 112, and a generation unit 113. The acquisition unit 111 acquires PID control data, which is time-series data for feedback control, and model data, which is time-series data of measurement values corresponding to predetermined manipulated variables. The PID control data and model data are acquired by the controlled device 2, and are stored in the main memory unit 102 or the auxiliary memory unit 103, for example, when a user inputs the acquired data into the temperature control device 1. In the following description, the PID control data and model data will be described as being stored in the auxiliary memory unit 103.

[0033] The estimation unit 112 estimates the relationship between the manipulated variable and the measurement value based on the model data. Specifically, the estimation unit 112 estimates the measurement value when a manipulated variable different from a predetermined manipulated variable is applied to the control object. That is, the relationship between the manipulated variable and the measurement value includes time-series data of the measurement value estimated when a manipulated variable different from a plurality of predetermined manipulated variables corresponding to each of the plurality of model data is applied to the control object.

[0034] The model data may be time-series data of measurement values obtained by applying a predetermined manipulated variable to the control object for a predetermined time. For example, the acquisition unit 111 can acquire, as separate model data, time-series data when a predetermined manipulated variable ma is applied for time ta and time-series data when the predetermined manipulated variable ma is applied for time tb. The estimation unit 112 can estimate, based on the multiple model data, measurement values when a manipulated variable different from the predetermined manipulated variable is applied to the control object for a time different from the predetermined time.

[0035] The generator 113 generates feedforward information based on the PID control data and the relationship between the manipulated variables and the measurement values estimated by the estimator 112. That is, the generator 113 generates the feedforward information by superimposing time-series data of the measurement values for appropriate manipulated variables on the PID control data. The generator 113 can generate feedforward information for setting optimized feedforward variables by using the estimated relationships between the various manipulated variables and the measurement values.

[0036] centre I The feedforward control unit 120 receives the setting of the feedforward amount from the feedforward information generation unit 110. I The feedforward control unit 120 outputs the set feedforward amount to the feedback control unit 130 .

[0037] The feedback control unit 130 outputs the manipulated variable MV to the heater 201 of the controlled device 2. In the feedforward control section, the feedback control unit 130 I The feedforward amount from the feedforward control unit 120 is output to the heater 201 of the controlled device 2 as a manipulated variable MV.

[0038] In the feedback PID control section, the feedback control unit 130 determines the manipulated variable MV based on the temperature (measured value PV) input from the temperature input unit 3, and outputs it to the heater 201 of the controlled device 2.

[0039] 2 and 3 are merely examples, and the functions realized by the temperature control device 1 may be performed by multiple devices. Also, the temperature control device 1 may be configured as an integrated unit with the temperature input unit 3.

[0040] 4 is a diagram illustrating the temperature control process. The temperature control process includes a feedforward control section and a PID control section. The temperature control device 1 controls the temperature of the controlled object while switching between the feedforward control section and the PID control section.

[0041] The feedforward control section is a section in which the target value SP changes, such as in temperature rise control. During the feedforward control section, the temperature control device 1 determines the manipulated variable MV based on the feedforward information generated by the generation unit 113. Furthermore, when a disturbance occurs, the temperature control device 1 sets the manipulated variable MV based on the feedforward information generated by the generation unit 113 and performs feedforward control until the temperature control device 1 returns to a steady state.

[0042] The PID control section can be a steady-state section in which the target value SP does not change and the measured value PV is stable. In the PID control section, the temperature control device 1 outputs the manipulated variable MV determined by PID control to the controlled device 2.

[0043] Temperature control device 1 I The feedforward control section 120 or the feedback control section 130 switches between the feedforward control section and the PID control section in response to a change in the target value SP or the occurrence of a disturbance. By determining the manipulated variable MV in response to each control section, the temperature control device 1 can improve the temperature control performance of the controlled object and reduce the man-hours required for adjusting the feedforward amount. I The forward control unit 120 and the feedback control unit 130 are an example of a "control unit."

[0044] FIG. 5 is a diagram illustrating the effects of PID control and feedforward control. FIG. 5 shows graphs of the manipulated variable MV and the measured value PV in the cases of normal PID control, PID control to suppress hunting, which is a periodic fluctuation, and feedforward control. The horizontal axis of each graph represents time. The graph of the measured value PV shows the target value SP along with changes in the measured value PV. In the example of FIG. 5, the target value SP is set to a constant value.

[0045] With normal PID control, the measured value PV continues to increase even after reaching the target value SP from its minimum value during time t1, resulting in an overshoot (b1). If the manipulated variable MV is reduced in response to the overshoot, the measured value PV will again fall below the target value SP, causing hunting, which repeats periodic fluctuations (b2).

[0046] When PID control is performed to suppress hunting, overshoot and hunting are suppressed, but the measured value PV does not reach the target value SP even after time t1 has passed after it reaches its minimum value. When PID control is performed to suppress overshoot and hunting, it takes longer to reach the target value SP, and the response performance of the temperature control deteriorates.

[0047] When the manipulated variable MV is determined by feedforward control, overshooting and hunting are suppressed. Furthermore, the time it takes for the measured value PV to reach the target value SP from its minimum value is reduced to time t1. By using feedforward control, the temperature control device 1 can suppress overshooting and hunting and shorten the temperature rise time.

[0048] Issues in temperature rise control and disturbance-induced fluctuation control will be described with reference to Figures 6 and 7. Figure 6 is a diagram illustrating issues in temperature rise control. Graph 601 is a graph of a measurement value PV1 obtained by PID control with respect to a target value SP1. As shown in graph 602, a measurement value PV2 obtained by temperature control using a feedforward amount MV1 rises in temperature faster than the measurement value PV1.

[0049] However, in the temperature rising process, the response performance of the temperature control may not be improved due to changes in conditions such as a change in the initial temperature of the heater 201 due to differences in standby time caused by continuous processing or processing stoppage, or a change in the size or shape of the workpiece to be controlled. As shown in graph 603, if the initial temperature of the heater 201 is higher than normal, and temperature control is performed using the feedforward amount MV1, the measured value PV3 may exceed the target value SP1 and overshoot.

[0050] Furthermore, as shown in graph 604, if the size or shape of the workpiece to be controlled changes (here, if the workpiece becomes larger), when temperature control is performed using the feedforward amount MV1, the measured value PV4 may not reach the target value SP1.

[0051] Figure 7 illustrates the issues involved in controlling fluctuations due to disturbances. Graph 701 is a graph of the measurement value PV11 obtained by PID control with respect to a constant target value SP2. As shown in graph 702, the measurement value PV12 obtained by temperature control using the feedforward amount MV11 exhibits a more suppressed temperature drop than the measurement value PV11.

[0052] However, there are cases where the response performance of the temperature control is not improved due to changes in conditions such as the size or shape of the workpiece to be controlled. p3 shows the change in the measurement value PV13 when temperature control is performed using the feedforward amount MV11. If the size or shape of the workpiece to be controlled changes (in this case, if the workpiece becomes larger), there is a possibility that the measurement value PV13 will gradually fall below the target value SP2 even if temperature control is performed using the feedforward amount MV11.

[0053] The temperature control device 1 according to this embodiment can solve the problems described in FIGS. 6 and 7 by acquiring a feedforward amount based on data collected in advance. FIG. 8 is a diagram illustrating collected data input to the temperature control device 1. The temperature control device 1 receives input of three types of data and outputs feedforward information based on the input data. The three types of data input to the temperature control device 1 are PID control data, model data, and response data.

[0054] The PID control data (first data) is time-series data of the target value SP, the manipulated variable MV, and the measured value PV by feedback control such as PID control. The PID control data is data actually measured by the controlled device 2 through PID control.

[0055] The model data (second data) is time-series data of actual measurement values corresponding to a predetermined manipulated variable. The model data includes time-series data of measurement values obtained when the temperature of a controlled object is controlled using a predetermined manipulated variable. The model data may also be time-series data of measurement values obtained by applying a predetermined manipulated variable to the controlled object for a predetermined period of time. The temperature control device 1 can set a more appropriate feedforward amount by generating feedforward information based on multiple pieces of model data. Furthermore, generating feedforward information based on a larger amount of model data further improves temperature control performance.

[0056] The response data (third data) is time-series data of the target value, the feedforward amount set based on the feedforward information generated by the temperature control device 1, and the measurement value obtained by applying the feedforward amount to the controlled object.

[0057] The temperature control device 1 can obtain a more appropriate feedforward amount by adjusting the feedforward information using the response data in addition to the PID control data and model data. By repeatedly adjusting the feedforward information using the response data, the temperature control performance is improved.

[0058] The process of generating feedforward information will be described with reference to Fig. 9. Fig. 9 is a flowchart illustrating the feedforward information generation process.

[0059] In S101, the acquisition unit 111 acquires PID control data. The PID control data is time-series data when temperature rise control or temperature fluctuation control due to disturbance is performed by PID control, and is time-series data of target values, manipulated variables, and measured values actually measured in the controlled device 2. The PID control data is stored in, for example, the auxiliary storage unit 103. The acquisition unit 111 can acquire the PID control data from the auxiliary storage unit 103.

[0060] In S102, the acquisition unit 111 acquires model data. The model data is time-series data of measurement values PV obtained by applying a predetermined manipulated variable MV to the control target. The model data is data obtained by actual measurement in the control target device 2, and multiple model data are registered in the temperature control device 1. The model data is stored in the auxiliary storage unit 103. The acquisition unit 111 can acquire the model data from the auxiliary storage unit 103.

[0061] In S103, the estimation unit 112 acquires a plurality of model data and estimates the relationship between the manipulated variable and the measured value based on the acquired plurality of model data. For example, it is time series data of measurement values estimated when various manipulated variables, including manipulated variables different from the predetermined manipulated variables of the model data and the plurality of predetermined manipulated variables corresponding to each of the plurality of model data, are applied to the control object.

[0062] In S104, the generation unit 113 generates feedforward information based on the PID control data and the relationship between the manipulated variable and the measurement value estimated by the estimation unit 112. The generated feedforward information includes information on a combination of the manipulated variable and the time controlled by the manipulated variable.

[0063] In S105, the generation unit 113 acquires response data obtained by applying the feedforward information generated in S104 to the control target. The response data is data actually measured in the control target device 2, and is registered in the auxiliary storage unit 103 of the temperature control device 1.

[0064] In S106, the generation unit 113 adjusts the feedforward information based on the response data acquired in S105. The generation unit 113 may repeatedly execute the processes of S105 and S106. By repeatedly adjusting the feedforward information, the generation unit 113 can generate feedforward information for acquiring a more optimal feedforward amount.

[0065] The temperature control device 1 can generate feedforward information for optimizing the feedforward amount through the processes of S101 to S104. In S105 and S106, the temperature control device 1 can obtain a more optimal feedforward amount by adjusting the feedforward information using response data obtained by applying the feedforward information generated by the generation unit 113 to the controlled object. The temperature control device 1 can further improve the temperature control performance by repeating the processes of S105 and S106.

[0066] In the above embodiment, the temperature control device 1 generates feedforward information based on PID control data, which is actual measurement data obtained by PID control, and model data, which is actual measurement data for a predetermined manipulated variable. By obtaining a feedforward amount based on the feedforward information, the temperature control device 1 can optimize the feedforward amount and improve the temperature control performance of the controlled object. Furthermore, by improving the temperature control performance of the controlled object, the user can reduce the man-hours required to adjust the feedforward amount.

[0067] <Other> The above-described embodiment merely exemplifies the configuration of the present invention, and the present invention is not limited to the specific embodiment described above, and various modifications are possible within the scope of the technical concept thereof.

[0068] In the above embodiment, the temperature control device 1 generates feedforward information for temperature rise control and temperature fluctuation control due to disturbance, but this is not limiting. The temperature control device 1 can also generate feedforward information for control to follow a target value.

[0069] Furthermore, even when the target value changes in a complex manner, the temperature control device 1 can generate appropriate feedforward information for each control section by dividing the control section according to the change in the target value. Furthermore, this embodiment is not limited to temperature control, but can also be applied to control of flow rate, pressure, movement amount, speed, etc.

[0070] <Appendix 1> an acquisition unit (111) that acquires first data, which is time-series data of target values, manipulated variables, and measured values obtained by feedback control, and second data, which is time-series data of measured values obtained by applying a predetermined manipulated variable to a control target; an estimation unit (112) that estimates a relationship between an operation amount and a measurement value based on a plurality of the second data; a generation unit (113) that generates feedforward information based on the first data and the relationship between the manipulated variable and the measurement value estimated by the estimation unit; A temperature control device (1) comprising:

[0071] <Appendix 2> The computer an acquisition step of acquiring first data, which is time series data of target values, manipulated variables, and measured values obtained by feedback control, and second data, which is time series data of measured values obtained by applying a predetermined manipulated variable to a control target (S101, S102); an estimation step of estimating a relationship between an operation amount and a measurement value based on the plurality of second data (S103); a generating step of generating feedforward information based on the first data and the relationship between the manipulated variable and the measured value estimated in the estimating step (S104); A temperature control method comprising: [Explanation of symbols]

[0072] 1: Temperature control device, 2: Control target device, 3: Temperature input unit, 101: Processor, 102: Main memory unit, 103: Auxiliary memory unit, 104: Input unit, 105: Output unit, 110: Feedforward information generation unit, 111: Acquisition unit, 112: Estimation unit, 113: Generation unit, 120: Feedforward control unit, 130: Feedback control unit, 201: Heater, 202: Sensor

Claims

1. A temperature control device for controlling the temperature of a control object, a feedforward control unit that feedforward controls a manipulated variable to be applied to the control object in accordance with feedforward information that is information defining a plurality of combinations of a manipulated variable to be applied to the control object and a time period during which the manipulated variable is applied; a feedback control unit that feedback-controls an operation amount to be applied to the controlled object based on a target value and a measured value of the temperature of the controlled object; a feedforward information generating unit that generates the feedforward information to be used in the feedforward control unit, The feedforward information generation unit generating first feedforward information based on first data, which is time-series data of a target value, a manipulated variable, and a measured value, which are actually measured when the feedback control unit performs feedback control of the controlled object, and second data, which is time-series data of a measured value, which is actually measured when a predetermined manipulated variable is applied to the controlled object; A temperature control device that performs a process of generating second feedforward information having better temperature control performance than the first feedforward information by adjusting the first feedforward information based on response data including time series data of measured values actually measured when the feedforward control unit performs feedforward control of the controlled object using the generated first feedforward information.

2. The feedforward information generation unit performing a process of generating third feedforward information having better temperature control performance than the second feedforward information by adjusting the second feedforward information based on response data including time series data of measured values actually measured when the feedforward control unit performs feedforward control of the controlled object using the generated second feedforward information; The temperature control device according to claim 1 .

3. The second data is a measurement obtained by applying the predetermined manipulated variable to the controlled object for a predetermined time. Constant time series data, The temperature control device according to claim 1 or 2.

4. The control unit further includes a control section that switches between a control section based on feedback control and a control section based on feedforward control. The temperature control device according to any one of claims 1 to 3.

5. A feedforward control unit that feedforward controls an operation amount to be applied to a control object in accordance with feedforward information, which is information that defines a plurality of combinations of an operation amount to be applied to the control object and a time period during which the operation amount is applied; a feedback control unit that feedback-controls an operation amount to be applied to the controlled object based on a target value and a measured value of the temperature of the controlled object; a processor of a temperature control device comprising: generating first feedforward information based on first data, which is time-series data of a target value, a manipulated variable, and a measured value, which are actually measured when the feedback control unit performs feedback control of the controlled object, and second data, which is time-series data of a measured value, which is actually measured when a predetermined manipulated variable is applied to the controlled object; generating second feedforward information having better temperature control performance than the first feedforward information by adjusting the first feedforward information based on response data including time-series data of measured values actually measured when the feedforward control unit performs feedforward control of the controlled object using the generated first feedforward information; A method for generating feedforward information to perform the above.

6. A program for causing a processor to execute each step of the method according to claim 5.

Images