Chill roll and method of manufacturing chill roll

Abstract

To provide a cooling roller capable of improving heat transfer between an inner drum and an outer pipe.SOLUTION: A cooling roller AA includes: an inner drum 10 including a refrigerant circulation path 12 in the inside; an outer pipe 20 burned and inserted into the outer periphery of the inner drum 10; and a heat transfer sheet 30 provided between the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20. Since a gap between the inner drum 10 and the outer pipe 20 is lost by deforming the heat transfer sheet 30 along irregularities on the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20, heat is easily transmitted.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a chill roll and a method for manufacturing the chill roll. More specifically, the present invention relates to a chill roll used as a can roll of a sputtering device, and a method for manufacturing the same. [Background technology]

[0002] Patent Document 1 discloses a method for manufacturing a can roll using a shrink fitting method. Specifically, first, an inner drum and an outer pipe whose inner diameter is slightly smaller than the outer diameter of the inner drum are prepared. The outer pipe is heated to thermally expand, and the inner drum is inserted inside the outer pipe. When the temperature of the outer pipe drops and it contracts, the inner drum and outer pipe are firmly joined together. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-203171 Summary of the Invention [Problem to be solved by the invention]

[0004] After the shrink fitting process, the outer surface of the inner drum and the inner surface of the outer pipe come into contact. If these surfaces are rough, the inner drum and outer pipe will not be able to fit together tightly, making it difficult for heat to be transferred between them. This reduces the cooling capacity of the can roll.

[0005] In view of the above circumstances, an object of the present invention is to provide a chill roll in which heat transfer between the inner drum and the outer pipe is improved, and a method for manufacturing the same. [Means for solving the problem]

[0006] The cooling roll of the present invention is characterized by comprising an inner drum having a refrigerant circulation path therein, an outer pipe shrink-fitted to the outer periphery of the inner drum, and a heat transfer sheet provided between the outer periphery of the inner drum and the inner periphery of the outer pipe. The method for manufacturing a cooling roll of the present invention is characterized by comprising a covering step of covering the outer surface of an inner drum having a refrigerant circulation path therein with a heat transfer sheet, and a shrink fitting step of shrink fitting an outer pipe onto the outer periphery of the inner drum. [Effects of the Invention]

[0007] According to the present invention, the heat transfer sheet deforms to conform to the irregularities on the outer peripheral surface of the inner drum and the inner peripheral surface of the outer pipe, thereby eliminating the gap between the inner drum and the outer pipe and facilitating heat transfer. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is a vertical cross-sectional view of the cooling roll according to the first embodiment. [Figure 2] Fig. 1A is an exploded perspective view of an inner drum, a heat transfer sheet, and an outer pipe according to one embodiment, and Fig. 1B is an exploded perspective view of an inner drum, a heat transfer sheet, and an outer pipe according to another embodiment. [Figure 3] FIG. 2 is a schematic diagram of contact portions between an inner drum, a heat transfer sheet, and an outer pipe. [Figure 4] FIG. 2 is an explanatory diagram showing a manufacturing procedure of a cooling roll. [Figure 5] FIG. 10 is a vertical cross-sectional view of a cooling roll according to a second embodiment. [Figure 6] FIG. 1 is an explanatory diagram of a sputtering apparatus. DETAILED DESCRIPTION OF THE INVENTION

[0009] Next, an embodiment of the present invention will be described with reference to the drawings. [First embodiment] The chill roll according to the first embodiment of the present invention can be incorporated into various processing devices. The chill roll is particularly suitable for use in devices that process long strip-shaped processing objects while transporting them roll-to-roll. The chill roll is used in, for example, film-forming devices, plasma processing devices, ion beam processing devices, etc. Film-forming devices include evaporation devices and sputtering devices. Vapor-forming devices include electron beam evaporation devices, resistance heating evaporation devices, and high-frequency induction heating evaporation devices.

[0010] For example, the sputtering apparatus SP has a configuration shown in Fig. 6. The sputtering apparatus SP shown in Fig. 6 is an apparatus that transports a long strip-shaped film-forming object F1 by roll-to-roll, and forms a film on the film-forming object F1 by sputtering to continuously produce a film-formed object F2.

[0011] The sputtering apparatus SP has a vacuum chamber 90. Inside the vacuum chamber 90, an unwinding section 91 and a winding section 93 are arranged. The unwinding section 91 unwinds the film-coated product F1 from a film-coated product roll in which the film-coated product F1 is wound in a roll shape. The winding section 93 winds the film-coated product F2 to form a film-coated product roll.

[0012] The film-formed article F1 is transported from the unwinding section 91 to the winding section 93. Inside the vacuum chamber 90, various rolls are provided that define the transport path of the film-formed article F1. Examples of such rolls include a free roll, a tension sensor roll, and a feed roll. The film-formed article F1 is wound around these rolls and transported. In addition, a can roll 92 is arranged on the transport path of the film-formed article F1.

[0013] A plurality of sputtering cathodes 94-97 are provided along the transport path of the film-forming article F1, facing the outer peripheral surface of the can roll 92. A target is attached to each of the sputtering cathodes 94-97 on the surface facing the outer peripheral surface of the can roll 92. Sputtered particles ejected from the target are deposited on the surface of the film-forming article F1, thereby forming a film.

[0014] The can roll 92 has a function of cooling the film formation target F1 that is heated by the sputtering process. The cooling roll of this embodiment is used as the can roll 92, for example.

[0015] The sputtering apparatus SP is not particularly limited in its application, but is used, for example, to manufacture copper-clad laminates. In this case, a base film such as a resin film is used as the substrate F1. A nickel-chromium alloy target is attached to the most upstream sputtering cathode 94, and copper targets are attached to the downstream sputtering cathodes 95-97. When the sputtering process is performed, a nickel-chromium alloy layer and a copper layer are laminated on the surface of the base film. If necessary, the copper layer is thickened by a wet plating method. This results in a copper-clad laminate. The copper-clad laminate is used to manufacture flexible printed wiring boards.

[0016] (Cooling roll) Next, the configuration of the cooling roll AA of this embodiment will be described. As shown in FIG. 1, the cooling roll AA has a cylindrical inner drum 10 having an internal space and a cylindrical outer pipe 20 shrink-fitted onto the outer periphery of the inner drum 10. The inner drum 10 and the outer pipe 20 are made of metal. For example, stainless steel can be used as the material for the inner drum 10 and the outer pipe 20. Alternatively, the inner drum 10 and the outer pipe 20 may be made of different metals, such as aluminum and stainless steel, respectively.

[0017] Rotating shafts 11 are provided at both ends of the inner drum 10. A refrigerant circulation path 12 is provided inside the inner drum 10. The refrigerant circulation path 12 is connected to a refrigerant cooling device (not shown) provided outside the cooling roll AA. The cooling roll AA can be cooled by circulating the refrigerant cooled by the refrigerant cooling device through the refrigerant circulation path 12. For example, cooling water can be used as the refrigerant.

[0018] A plurality of gas introduction passages 41 are provided at predetermined intervals in the circumferential direction between the inner drum 10 and the outer pipe 20, extending along the axial direction of the cooling roll AA. The outer pipe 20 is formed with a large number of gas discharge holes 42 that communicate between the inner peripheral surface and the outer peripheral surface. One end of each gas discharge hole 42 communicates with the gas introduction passage 41, and the other end opens to the outer peripheral surface of the outer pipe 20. The gas introduction passage 41 is connected to a gas supply source (not shown) via a rotary joint 43. Gas supplied from the gas supply source passes through the gas introduction passage 41 and is discharged from the gas discharge holes 42.

[0019] The object to be processed is transported while being wrapped around the outer peripheral surface of the chill roll AA (the outer peripheral surface of the outer pipe 20). Because the outer peripheral surface of the chill roll AA has small irregularities, a gap is created between the object to be processed and the chill roll AA. The presence of this gap makes it difficult for heat from the object to be processed to be transferred to the chill roll AA. By introducing gas into the gap between the outer peripheral surface of the chill roll AA and the object to be processed, heat transfer between them can be improved.

[0020] The inner drum 10 and the outer pipe 20 are joined by shrink fitting. That is, before assembly, the inner diameter of the outer pipe 20 is set to be slightly smaller than the outer diameter of the inner drum 10. The outer pipe 20 is heated to thermally expand, and then the inner drum 10 is inserted into it. When the temperature of the outer pipe 20 drops and it contracts, the inner drum 10 and the outer pipe 20 are firmly joined together.

[0021] When joined by shrink fitting, the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20 come into contact with each other. If these surfaces are rough, the inner drum 10 and the outer pipe 20 will not be in close contact with each other, making it difficult for heat to be transferred between them. This reduces the cooling capacity of the cooling roll AA.

[0022] 2(A), the cooling roll AA of this embodiment has a heat transfer sheet 30 provided between the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20. The heat transfer sheet 30 is provided so as to cover the entire outer peripheral surface of the inner drum 10. The outer pipe 20 is shrink-fitted onto the outer periphery of the inner drum 10 covered with the heat transfer sheet 30. This results in the heat transfer sheet 30 being inserted between the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20.

[0023] A plurality of grooves for the gas introduction passages 41 are formed on the outer peripheral surface of the inner drum 10. The rectangular surfaces 13 between adjacent grooves engage with the inner peripheral surface of the outer pipe 20. Heat transfer between the inner drum 10 and the outer pipe 20 is affected by the degree of contact between the surfaces 13 and the inner peripheral surface of the outer pipe 20. Therefore, it is sufficient that the heat transfer sheet 30 is inserted at least between the surfaces 13 and the inner peripheral surface of the outer pipe 20. As shown in FIG. 2(A), the heat transfer sheet 30 needs to cover the entire outer peripheral surface of the inner drum 10, spanning the grooves for the gas introduction passages 41. Alternatively, as shown in FIG. 2(B), the heat transfer sheet 30 may be composed of a plurality of rectangular members that cover only the surfaces 13.

[0024] As shown in FIG. 3, the outer peripheral surface 10S of the inner drum 10 and the inner peripheral surface 20S of the outer pipe 20 have small irregularities due to cutting or the like. When the heat transfer sheet 30 is inserted between these, it deforms to conform to the irregularities of the outer peripheral surface 10S of the inner drum 10 and the inner peripheral surface 20S of the outer pipe 20. This brings the inner drum 10 and the heat transfer sheet 30 into close contact, and also brings the heat transfer sheet 30 into close contact with the outer pipe 20. This eliminates any gaps between the inner drum 10 and the outer pipe 20, facilitating heat transfer. As a result, the cooling capacity of the cooling roll AA is increased.

[0025] The cooling capacity of the cooling roll AA is increased, allowing the object to be cooled efficiently. For example, in a sputtering device SP, the temperature reached by the film-forming object F1 can be lowered. Therefore, even if a film that is prone to thermal deformation is used as the film-forming object F1, deformation of the film can be suppressed.

[0026] 3 is a schematic diagram showing contact areas between the inner drum 10, the heat transfer sheet 30, and the outer pipe 20. Gaps are unavoidably formed between the inner drum 10, the heat transfer sheet 30, and the outer pipe 20. It is sufficient that the gap between the inner drum 10 and the outer pipe 20 is reduced by inserting the heat transfer sheet 30. In other words, the gap between them does not necessarily have to be completely eliminated in the strict sense.

[0027] The heat transfer sheet 30 may be any sheet that has high thermal conductivity and that can deform to conform to the small irregularities present on the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20. Metal foil is preferably used as the heat transfer sheet 30. Materials for the metal foil that have high thermal conductivity include copper, aluminum, silver, and gold. Alternatively, a carbon fiber sheet can be used as the heat transfer sheet 30.

[0028] The heat transfer sheet 30 only needs to be thick enough to absorb the small irregularities present on the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20. The heat transfer sheet 30 only needs to be thicker than the surface roughness (maximum height Rz) of the outer peripheral surface of the inner drum 10 and the inner peripheral surface of the outer pipe 20. For example, the maximum height Rz of a mirror-finished surface is 0.05 to 0.8 μm. In this case, the thickness of the heat transfer sheet 30 needs to be 1 μm or more. Furthermore, the maximum height Rz of a micro-mirror-finished surface is 1.6 to 6.3 μm, and the maximum height Rz of a normal-finished surface is 12.5 to 25 μm. Therefore, a thickness of 30 μm is sufficient for the heat transfer sheet 30. In other words, the thickness of the heat transfer sheet 30 is preferably 1 to 30 μm. Furthermore, when a metal foil is used as the heat transfer sheet 30, a thickness of 9 to 20 μm is more preferable due to its ease of availability.

[0029] (Method of manufacturing a cooling roll) Next, a method for manufacturing the cooling roll AA of this embodiment will be described with reference to FIG. (1) Groove formation process First, grooves for the gas introduction passages 41 are formed on the outer peripheral surface of the inner drum 10 by cutting grooves.

[0030] (2) Coating process Next, the outer peripheral surface of the inner drum 10 is covered with a heat transfer sheet 30. Here, the heat transfer sheet 30 may cover the entire outer peripheral surface of the inner drum 10 (see FIG. 2(A)), or may be provided only on the surface between the grooves for the gas introduction passages 41 (see FIG. 2(B)). When a metal foil is used as the heat transfer sheet 30, the metal foil can be attached to the outer peripheral surface of the inner drum 10 by wrapping the metal foil around the outer peripheral surface of the inner drum 10 and then hitting the metal foil with a rubber hammer. The heat transfer sheet 30 may also be attached to the inner drum 10 using adhesive tape or the like.

[0031] (3) Shrink fitting process Next, the outer pipe 20 is shrink-fitted onto the outer periphery of the inner drum 10. The inner diameter of the outer pipe 20 is set slightly smaller than the outer diameter of the inner drum 10. The outer pipe 20 is heated with a burner, electric furnace, or the like to cause thermal expansion. If necessary, the inner drum 10 may be cooled to cause contraction. In this state, the inner drum 10 is inserted inside the outer pipe 20. When the temperature of the outer pipe 20 drops and it contracts, the inner drum 10 and the outer pipe 20 are firmly joined together.

[0032] (4) Hole formation process Next, gas discharge holes 42 communicating with the gas introduction passages 41 are formed in the outer pipe 20. The gas discharge holes 42 are formed so as to penetrate the heat transfer sheet 30. The gas discharge holes 42 can be formed using a micro drill, a laser drill, or the like.

[0033] If necessary, the outer peripheral surface of the outer pipe 20 may be polished. The outer peripheral surface of the outer pipe 20 may be coated to prevent scratches. Also, side plates may be attached to the ends of the inner drum 10.

[0034] Second Embodiment Next, a cooling roll BB according to a second embodiment of the present invention will be described. 5, the cooling roll BB of this embodiment does not have the gas introduction passages 41 and gas release holes 42 of the cooling roll AA of the first embodiment. In this way, the gas release structure is not necessary. The remaining structure is the same as that of the first embodiment, so the same members are designated by the same reference numerals and a description thereof will be omitted.

[0035] The cooling roll BB does not have the gas introduction passages 41 and the gas discharge holes 42, and therefore the groove forming process and the hole forming process are not required in its manufacture. The outer peripheral surface of the inner drum 10 is covered with the heat transfer sheet 30 (covering process), and the outer pipe 20 is shrink-fitted onto the outer periphery of the inner drum 10 (shrink-fitting process). [Example]

[0036] Next, an example will be described. (Common conditions) A chill roll with the configuration shown in Figure 1 was created. That is, the chill roll has a gas inlet and a gas discharge hole. The inner drum and outer pipe are made of stainless steel (SUS304). The outer diameter of the inner drum is 390 mm. The thickness of the outer pipe is 5 mm.

[0037] To measure the temperature of the outer surface of the chill roll, a 50 mm wide black polyimide tape was attached to the center of the chill roll for one revolution. The temperature was measured by applying a heat flow to the chill roll and measuring the surface temperature of the black polyimide tape with a radiation thermometer 5 minutes later.

[0038] Example 1 A 12 μm thick copper foil was inserted between the inner drum and the outer pipe as a heat transfer sheet. With cooling water at a temperature of 5°C circulating in the refrigerant circulation path inside the inner drum, a 10 W / m 2 As a result, the surface temperature of the outer circumferential surface of the cooling roll was 17.5°C.

[0039] Example 2 A 30 μm thick aluminum foil was inserted between the inner drum and the outer pipe as a heat transfer sheet. With cooling water at a temperature of 5°C circulating in the refrigerant circulation path inside the inner drum, a 10 W / m 2 As a result, the surface temperature of the outer circumferential surface of the cooling roll was 18.6°C.

[0040] (Comparative Example 1) No heat transfer sheet was inserted between the inner drum and the outer pipe. With cooling water at a temperature of 5°C circulating in the refrigerant circulation path inside the inner drum, a heat transfer rate of 10 W / m was applied from the outside of the cooling roll. 2 As a result, the surface temperature of the outer circumferential surface of the cooling roll was 22.5°C.

[0041] From the above, it was confirmed that the cooling capacity of the chill roll can be increased by inserting a heat transfer sheet between the inner drum and the outer pipe. [Explanation of symbols]

[0042] AA, BB cooling rolls 10 Inner drum 11 Rotation axis 12 Refrigerant circuit 20 Outer pipe 30 Heat transfer sheet 41 Gas inlet 42 Gas release hole 43 Rotary Joint

Claims

1. A cooling roll for use in a film forming apparatus, a plasma processing apparatus, or an ion beam processing apparatus, comprising: an inner drum having a refrigerant circulation path therein; an outer pipe shrink-fitted to the outer periphery of the inner drum; a heat transfer sheet provided between the outer peripheral surface of the inner drum and the inner peripheral surface of the outer pipe, The outer pipe does not have a gas release hole. A cooling roll characterized by:

2. The heat transfer sheet is a metal foil made of copper, aluminum, silver, or gold, or a carbon fiber sheet.

2. The chill roll according to claim 1.

3. The thickness of the heat transfer sheet is 1 to 30 μm.

3. The chill roll according to claim 1 or 2.

4. A method for manufacturing a cooling roll used in a film forming apparatus, a plasma processing apparatus, or an ion beam processing apparatus, comprising: a covering step of covering an outer peripheral surface of an inner drum having a refrigerant circulation path therein with a heat transfer sheet; a shrink-fitting step of shrink-fitting an outer pipe onto the outer periphery of the inner drum, The outer pipe of the completed cooling roll does not have gas release holes. A method for producing a cooling roll, comprising:

5. A method for manufacturing a cooling roll used in a film forming apparatus, a plasma processing apparatus, or an ion beam processing apparatus, comprising: a covering step of wrapping a heat transfer sheet around an outer peripheral surface of an inner drum having a refrigerant circulation path therein; a shrink-fitting step of shrink-fitting an outer pipe onto the outer periphery of the inner drum. A method for producing a cooling roll, comprising:

6. The heat transfer sheet is a metal foil, In the covering step, after the metal foil is wrapped around the outer peripheral surface of the inner drum, the metal foil is hit with a rubber hammer to attach the metal foil to the outer peripheral surface of the inner drum.

6. The method for producing a chill roll according to claim 5.

7. The heat transfer sheet is a metal foil made of copper, aluminum, silver, or gold, or a carbon fiber sheet.

6. The method for producing a chill roll according to claim 4 or 5.

8. a groove forming step of forming a groove for a gas introduction path on the outer peripheral surface of the inner drum before the covering step; a hole forming step of forming a gas release hole in the outer pipe that communicates with the gas introduction path after the shrink fitting step.

7. The method for producing a chill roll according to claim 5 or 6.

Images